Page 1
Mercury™2000V & 3000V- Vacuum Rated
SSmmaarrtt PPrrooggrraammmmaabbllee EEnnccooddeerr SSyysstteemmss
IInnssttaallllaattiioonn MMaannuuaall
aanndd RReeffeerreennccee GGuuiiddee
Manual No. IM-M2000V&3000V Rev i
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IInnttrroodduuccttiioonn
MicroE Systems was founded to advance encoder technology to
a level never before achieved. Our objective was to design encoder
systems that would be small enough to fit into densely packed OEM
equipment designs, affordable enough for cost-sensitive applications
and easy enough to enable installation, setup and alignment by
assemblers with little training. We are pleased to say that all of
these goals have been realized with the introduction of the Mercury
family of encoders.
Sensor shown
actual size
M10
PPaatteennttss
Covered by the following patents: US 5,991,249; EP 895,239; JP 3,025,237; US
6,897,435; and EP 1,451,933. Additional patents and patents pending may apply.
PPrreeccaauuttiioonnss
Follow standard ESD precautions. Turn power off before connecting the sensor.
Do not touch the electrical pins without static protection such as a grounded
wrist strap.
Do not touch the glass scale unless you are wearing talc-free gloves or finger
cots. Please read this installation manual for full instructions.
LLAASSEERR SSAAFFEETTYY IINNFFOORRMMAATTIIOONN::
MMeerrccuurryy && CChhiippEEnnccooddeerr
1
2
This product is sold solely for use as a component (or replacement) in an electronic product; therefore it is not
required to, and does not comply with, 21 CFR 1040.10 and 1040.11 which pertain to complete laser
products. The manufacturer of the complete system-level electronic product is responsible for complying with 21
CFR 1040.10 and 1040.11 and for providing the user with all necessary safety warnings and information.
MicroE encoders contain an infrared laser diode or diodes. Emitted invisible laser radiation levels have been
measured to be within the CDRH Class 1 range, which is not considered hazardous; however, to minimize
exposure to the diverging beam, the encoder sensor should be installed in its operational configuration in close
proximity to the encoder scale before power is applied.
• Invisible laser radiation; wavelength: 850 nm
• Max power 2.4 mW CW (4.8 mW CW for Mercury II™)
• CAUTION – The use of optical instruments with this product will increase eye hazard. DO NOT VIEW
DIRECTLY WITH OPTICAL INSTRUMENTS (MICROSCOPES, EYE LOUPES OR MAGNIFIERS).
• All maintenance procedures such as cleaning must be performed with the MicroE encoder turned off.
• Do not insert any reflective surface into the beam path when the encoder is powered.
• Do not attempt to service the MicroE encoder.
INVISIBLE LASER RADIATION
DO NOT VIEW DIRECTLY WITH OPTICAL
INSTRUMENTS
(MICROSCOPES, EYE LOUPES OR
MAGNIFIERS)
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TTaabbllee OOff CCoonntteennttss
SYSTEM ILLUSTRATION PAGE
Encoder with Linear scale 2
Encoder with Rotary scale 3
INSTALLATION INSTRUCTIONS
Encoder System Mounting - Linear 4
Encoder System Alignment - Linear 5
Centering the Index & Calibration - Linear 5
Encoder System Mounting - Rotary 6
Encoder System Alignment - Rotary 7
Centering the Index & Calibration - Rotary 7
REFERENCE SECTION
Installation of Linear Scales 8
Grounding Instructions 9
Recommendations for Power 9
Recommended Interface Termination 9
Customer Interface Cable Requirements 10
SmartPrecision
TM
Module Mounting Options 11
ENCODER TROUBLESHOOTING
Cleaning Scales 11
Contact MicroE Systems Back Cover
Page 1
Page 4
Mercury 2000V & 3000V Encoder System
with Linear scale
Flying Leads (to be connected to inside of
vacuum chamber pass through connector)
Sensor
(shown attached to a
linear slide base with
mounting bracket)
SSyysstteemm VViieeww
Glass Scale
SmartPrecision electronics
module (interpolator)
Vacuum chamber wall
EExxppaannddeedd VViieeww
Scale benching edge
End locator pin
End index mark
Sensor mounting holes (2)
Bracket mounting holes (2)
Optional sensor benching pins (3)
Single
shielded
cable
Center index
mark
Typical user-supplied
sensor mounting bracket
Top reflective linear scale
Detail A
Male 15 pin
high density
D-sub
connector
Thumb screw
Index/Calibration
button
Mounting screws & flat washers
(2 needed per screw)
Page 2
Scale reference datum;
example shown with
benching pins
Detail A
Mounting bracket
screws (2)
Double shielded “pigtail” cable from
vacuum wall to electronics
Flying Leads, customers are responsible for
connector selection and installation
Power/Calibration
indicator
Signal & alignment
indicators
Vacuum chamber wall
Page 5
Mercury 2000V & 3000V Encoder System
with Rotary scale
Page 3
Double shielded “pigtail” cable
from vacuum wall to electronics
EExxppaannddeedd VViieeww
Top reflective
rotary scale
Male 15 pin
High Density
D-sub
connector
Index / Calibration button
Typical user-supplied
sensor mounting bracket
would be located here
Mounting screws & flat washers
(2 needed per screw)
Flying Leads, customer is responsible for
connector selection and installation
Single
shielded
cable
SSyysstteemm VViieeww
Shown with Rotary scale
SmartPrecision electronics
module (interpolator)
Flying Leads (to be connected to inside of
vacuum chamber pass through connector)
Sensor
Glass Rotary Scale
Vacuum chamber wall
Vacuum chamber wall
Power/Calibration
indicator
Signal & alignment
indicators
Page 6
Installation Instructions
Linear Encoders
2
Attach the scale to the base
slide. Reference the preferred
datum on the interface drawing
for either end or center index
orientation.
Attach the scale to the slide.
Refer to pg. 8 for details.
Be sure the grating surface of
the scale faces the sensor.
Insure that there is no contact
between these surfaces or
damage may result.
Be sure the source power is off before
connecting the SmartPrecision plug.
Connect the SmartPrecision electronics to the
controller using the pinout diagram described on
the interface drawing.
Pin 1 must not be connected under any
circumstances, including connection to wires
within extension cables and floating wires. Any
connection to Pin 1 could damage or disable the
encoder system.
Insure proper system grounding. Refer to the
procedure on pg 9.
Tighten the thumb screws.
Power up the system. The Power/Calibration
indicator will illuminate.
4
Page 4
3
CAUTION: observe precautions for handling electrostatic
sensitive devices.
Install the double shielded “pigtail” cable from vacuum wall to
electronics into the SmartPrecision electronics module. This cable
is shipped with “flying” leads. Customers are responsible for
connector selection and installation.
A) Remove the three cover screws and the top half of the
connector housing. Do not pull on the 15-pin D-sub
connector or the circuit board under the insulation layer.
B) Attach the sensor's 5 X 2 connector to the mating 5 X 2
connector on the circuit board.
C) Route the double shielded “pigtail” cable through its
channel in the center of the connector body and place the
cable's hex sleeve in the matching recess. Attach the top half
of the connector housing to the bottom half using the three
cover screws. The longest screw is used in the hole adjacent
to the cable exit.
D) Connect the customer supplied connector to the feed-through
in the vacuum wall.
Install the sensor on your mounting surface referencing the
appropriate datum surface as shown on the interface
drawing. Use 2 washers per mounting screw.
Benching pins may be used to locate the sensor if the
system mechanical tolerances are adequate. See data sheet
for alignment tolerances, or keep mounting screws loose for
sensor alignment if benching pins are not used.
Connect the vacuum cable to the feed-through in the vacuum
wall. Wires of the same color must be connected through
the vacuum chamber wall (see Interface Drawing for color
assignments). Vacuum cables are shipped with “flying”
leads”. Customers are responsible for connector
selection and installation.
1
Page 7
Installation Instructions
Linear Encoders
5
If benching dimensions cannot be provided, proper sensor alignment may require minor
adjustments to the sensor position with respect to the scale. This can be performed easily
using the LED alignment indicators, as illustrated below.
The red, yellow, or green LED will light depending on sensor alignment. Slowly move the
sensor by allowing it to slide on the mounting surface until the green or Proper Alignment LED,
is illuminated. Optimal alignment will be displayed as a “Bright Green” LED.
IIMMPPOORRTTAANNTT
: Confirm that the Proper Alignment LED blinks when passing over the index.
If not, readjust the sensor in the Y direction and repeat the above procedure. When alignment
is completed, tighten the sensor mounting screws.
6
Confirm proper alignment over
the full range of motion.
The “Proper Alignment” LED
must remain on over the entire
range. If not aligned over the
entire range of motion, loosen
the sensor mounting screws
and repeat step 5.
x
Y
Z
θ
z
To align the sensor, move
it in the Y or θ
z
directions.
Page 5
IIMMPPOORRTTAANNTT
OOUUTTPPUUTT CCAALLIIBBRRAATTIIOONN PPRROOCCEEDDUURREE
This procedure must be completed for
proper system operation each time the
sensor is aligned or if the SmartPrecision
electronics module is replaced.
Position the sensor at least 7mm (1/4”) away
from the index mark on the scale. Next, push
the Index/Calibration
button inside the
module with a small
diameter shaft, such
as a bare cotton swab.
The Power/
Calibration indicator
will flash continuously.
Move the scale past the sensor in both directions
so that the index mark passes under the sensor.
Do not run off the end of the scale. When the
calibration procedure is complete, the
Power/Calibration indicator stops flashing.
7
Power/
Calibration
indicator
Index /
Calibration
button
Proper
Alignment
indicator
Improper
Alignment LED
Red
Power/
Calibration
Power/
Calibration
Power/
Calibration
Improved
Alignment LED
Yellow
Proper
Alignment LED
Green
Optimal
Alignment LED
Bright Green
Page 8
Installation Instructions
Rotary Encoders
Attach your hub/scale assembly
to the rotary device. Refer to
the interface drawing. The
reflective surface of the scale
must face the sensor.
Be sure the grating surface of
the scale faces the sensor.
Insure that there is no contact
between these surfaces or
damage may result.
1
Page 6
2
Install the sensor on your mounting surface referencing the
appropriate datum surface as shown on the interface drawing.
Use 2 washers per mounting screw.
Benching pins may be used to locate the sensor if the system
mechanical tolerances are adequate. See data sheet for alignment
tolerances, or keep mounting screws loose for sensor alignment if
benching pins are not used.
Connect the vacuum cable to the feed-through in the vacuum wall.
Wires of the same color must be connected through the vacuum
chamber wall (see Interface Drawing for color assignments).
Vacuum cables are shipped with “flying” leads”. Customers are
responsible for connector selection and installation.
3
CAUTION: observe precautions for handling electrostatic
sensitive devices.
Install the double shielded “pigtail” cable from vacuum wall to
electronics into the SmartPrecision electronics module. This cable
is shipped with “flying” leads. Customers are responsible for
connector selection and installation.
A) Remove the three cover screws and the top half of the
connector housing. Do not pull on the 15-pin D-sub
connector or the circuit board under the insulation layer.
B) Attach the sensor's 5 X 2 connector to the mating 5 X 2
connector on the circuit board.
C) Route the double shielded “pigtail” cable through its
channel in the center of the connector body and place the
cable's hex sleeve in the matching recess. Attach the top half
of the connector housing to the bottom half using the three
cover screws. The longest screw is used in the hole adjacent
to the cable exit.
D) Connect the customer supplied connector to the feed-through
in the vacuum wall.
Be sure the source power is off before
connecting the SmartPrecision plug.
Connect the SmartPrecision electronics to the
controller using the pinout diagram described on the
interface drawing.
Pin 1 must not be connected under any
circumstances, including connection to wires within
extension cables and floating wires. Any connection
to Pin 1 could damage or disable the encoder
system.
Insure proper system grounding. Refer to the
procedure on pg 9.
Tighten the thumb screws.
Power up the system. The Power/Calibration
indicator will illuminate.
4
Page 9
Installation Instructions
Rotary Encoders
Page 7
6
Confirm proper alignment
over the full range of motion.
The “Proper Alignment” LED
must remain on over the
entire range. If not aligned
over the entire range of
motion, loosen the sensor
mounting screws and repeat
step 5.
5
If benching dimensions cannot be provided, proper sensor alignment may require minor adjustments
to the sensor position with respect to the scale. This can be performed easily using the LED alignment
indicators, as illustrated below.
The red, yellow, or green LED will light depending on sensor alignment. Slowly move the sensor by
allowing it to slide on the mounting surface until the green or Proper Alignment LED, is illuminated.
Optimal alignment will be displayed as a “Bright Green” LED.
IIMMPPOORRTTAANNTT
: Confirm that the Proper Alignment LED blinks when passing over the index. If not,
readjust the sensor in the Y direction and repeat the above procedure. When alignment is completed,
tighten the sensor mounting screws.
x
Y
Z
θ
z
To align the sensor, move it
in the Y or θz directions.
IIMMPPOORRTTAANNTT
OOUUTTPPUUTT CCAALLIIBBRRAATTIIOONN PPRROOCCEEDDUURREE
This procedure must be completed for
proper system operation each time the
sensor is aligned or if the SmartPrecision
electronics module is replaced.
Position the sensor at least 7mm (1/4”) away
from the index mark on the scale. Next, push
the Index/Calibration
button inside the
module with a small
diameter shaft, such
as a bare cotton swab.
The Power/
Calibration indicator
will flash continuously. Move the scale past the
sensor in both directions so that the index mark
passes under the sensor. Do not run off the end
of the scale when using a segment scale. When
the calibration procedure is complete, the
Power/Calibration indicator stops flashing.
7
Power/
Calibration
indicator
Index /
Calibration
button
Proper
Alignment
indicator
Improper
Alignment LED
Red
Power/
Calibration
Power/
Calibration
Power/
Calibration
Improved
Alignment LED
Yellow
Proper
Alignment LED
Green
Optimal
Alignment LED
Bright Green
Page 10
Reference Section
Installation of Linear Scales
Page 8
MicroE Systems
L
0.2L
0.6L
0.2L
Benching pins
Positioning the Scale
Note: Before beginning mounting procedure, use talc-free gloves or finger cots to handle the scales. Also use vacuum compatible handling procedures and materials .
"Benching" the scale to the system means aligning the scale by means of benching pins. Pin locations are described on the appropriate interface drawing.
Two benching pins are recommended on the long side of the scale and one at the end as shown . This is marked datum A on the interface drawing.
Position the benching pins in from either end. 20% of the overall
scale length is the recommended location from the edge.
Be sure the benching pins do not extend too high in the Z direction to
prevent mechanical interference with the sensor or sensor mount.
2
1
End
Benching
Pin
Mounting the Scale
End Benching
Pin
Hard epoxy
at one corner,
this end only.
Suggested Epoxy and Clamp Mounting
1
Make sure the mounting surface is
clean and dry.
Scale clamps (customer supplied) may be used to mechanically secure the
scale. The clamps should allow for thermal expansion of the scale and
mounting surface. Make sure that the clamps do not interfere with the sensor
or sensor mount. Note: adhesive used on clamps supplied by MicroE is not
vacuum rated.
Side view showing
suggested scale
clamps and scale.
Space clamps every
75mm on scales over
150 mm in length.
4
Apply a hard, vacuum compatible epoxy to the
end of the scale at the end benching pin.
3
MicroE Systems
L
2
Align the scale by placing the edges
against the benching pins.
Benching pins
Scale clamp
Mounting clamp
Mounting clamp
Mounting clamp
Page 11
Reference Section
Grounding Instructions for Mercury 2000V and 3000V Encoder Systems
Page 9
Customer Differential Line Receiver
Recommended Interface Termination
B-
IW-
120 ohm
B+
A+
120 ohm
120 ohm
IW+
A-
Vacuum Chamber wall
Connector pins
5 Volts
0 Volts
Power
Supply
Note: Specific applications may require a different grounding scheme.
Please contact MicroE Systems Application grouip with details for assistance.
Electrically conductive
mechanical connection
(as supplied by MicroE
Systems).
Shielding Instructions
Customer-installed connectors at the vacuum chamber wall must electrically shield the signal wires from Electro Magnetic
Interference, Radio Frequency Interference and Electro Static Discharge. The connectors' shielding must completely surround
the wires with no gaps, including intimate electrical contact 360 degrees around the outer cable shields at the ends of the
cables supplied with flying leads. The inner shield of the cable that is attached to the SmartPrecision electronics module must
be electrically isolated from the outer shield.
Important Note
MicroE Systems recommends testing the motion subsystem after the Mercury 2000V and 3000V encoders are installed using
your vacuum through-wall connectors. The testing should prove that the motion system has sufficient immunity to Electro
Magnetic Interference, Radio Frequency Interference and Electro Static Discharge according to the application requirements.
I+
I-
Correct grounding can be implemented in several ways depending on how the customer implements the connections through
the vacuum chamber wall. The diagram below is suitable where:
•The outer cable shields are electrically isolated from each other at the vacuum chamber wall.
•The sensor is mounted with good electrical contact to a well-grounded surface. (Note that an electrical path through
bearings will not result in a well-grounded sensor.)
Mercury encoders require a minimum of 4.75V DC continuously. When designing circuits and extension cables to use Mercury encoders, be sure to
account for voltage loss over distance and tolerances from the nominal supply voltage so that at least 4.75V DC is available to the Mercury encoder
under all operating conditions. The input voltage should not exceed 5.25V DC.
Recommendations for Power
Note: specific applications may require a differnet grounding scheme. Contact MicroE Systems
for applications support.
Page 12
Reference Section
Page 10
Mercury 3500, 3000, 2000
Signal Twisted Pair
A+ Pair 1
AB+ Pair 2
BIndex+ Pair 3
Index-
+5V Pair 4
GND
Customer Interface Cable Requirements
Customer cables that interface to Mercury series encoders must have the following characteristics:
• Twisted pair signal wiring.
• Characteristic impedance of 100-120 ohms.
• Sufficient wire gauge to meet the minimum voltage requirement at the encoder, for example 24AWG gauge wire for a 2m length cable.
Examples of acceptable cables with 24 AWG gauge wire and 4 twisted pairs are Belden 9831, 8104, and 9844 or other
manufacturer's equivalents.
• Single shield cable with a minimum of 90% coverage. Note that a double shielded cable may be required in high-noise applications.
Signal Wiring:
Each differential signal should be connected to a corresponding twisted pair as follows:
Shield Termination:
The customer's cable shield should be in 360° contact with the connector shroud and the connector shell to provide complete shielding. The
connector shell should be metal with conductive surfaces. Suggested metal connector shells for use with Mercury 3500, 3000, 3000Si, and
2000 encoders: AMP 748676-1 or equivalent; for Mercury 1000 and 1500S encoders: AMP 745172-3, -2, or -1 where the dash number is
dependent on the customer's outside cable diameter. The shield should be terminated as illustrated in the following diagram.
Fold braided shield back over jacket. Example shows double-shielded cable. Dimensions shown
are for illustration only.
Page 13
SmartPrecision Module Mounting Options
The SmartPrecision electronics module may be mounted directly to a
bulkhead connector using the integral thumb screws shown in figure A.
Alternatively, the module may be used with an extension cable and
mounted to a base plate using the mounting tabs as shown in figure B.
AB
Reference Section
Troubleshooting
Problem
The Power/Calibration indicator will not come on.
Solution
• Make sure that the SmartPrecision
TM
electronics’ 15-pin D-sub connector is fully seated and connected.
• Confirm that +5 Volts DC is being applied to pin 12 on the SmartPrecision electronics’ 15-pin HD connector and that pin 13 is connected
to ground.
Problem
Can't get the SmartPrecision
TM
electronics’ "Signal" LEDs better than red or yellow; or the green, “ Proper Alignment”
indicator doesn't stay illuminated over the full length of the scale.
Solution
• Verify that the sensor has been aligned to the scale and that the mounting screws are tight. Check the dimensions for the mechanical
mounting holes (and clamps if any) to make sure that the sensor is correctly located over the scale. Refer to appropriate the
interface drawing.
• Check that the scale is firmly mounted and can't jiggle or move in other than the intended direction.
• Make sure that the scale is clean over its entire length or circumference.
Problem
The green Power/Calibration indicator is flashing unexpectedly.
Solution
• Part of the normal setup procedure is to activate the SmartPrecisionTMelectronics’ Index/Calibration process by pressing the recessed button
the SmartPrecisionTMelectronics’ connector body. The On/Index LED will begin to flash until the index mark on the scale passes under the
sensor at least one time in each direction.
Problem
Can't Complete the Index/Calibration process - the green Power/Calibration indicator doesn't stop flashing.
Solution
• Verify that the sensor is mounted in the correct orientation to the scale for the desired index mark. Refer to the interface drawing.
• Refer to step 5 of the installation procedure to insure proper operation.
Cleaning scales
General
Particle
Removal
Blow off the
contamination
with nitrogen,
clean air, or a
similar gas.
Page 11
Contamination
Removal
Use a lint-free cleanroom
wipe or cotton swab
dampened with isopropyl
alcohol or acetone only
to wipe the surface
clean. Handle the scale
by the edges. Do not
scrub the scale.
Page 14
World Headquarters: 125 Middlesex Turnpike • Bedford • MA 01730 USA
www.microesys.com • info@microesys.com • T. [781] 266-5700 • F. [781] 266-5112
© 2008 MicroE Systems
Contacting MicroE Systems
Thank you for purchasing a MicroE Systems product. You should expect
the highest level of quality and support from MicroE. If you want to
download the Mercury Encoder Installation Manual, Data Sheet or
Interface Drawing, browse www.microesys.com and click on the
Mercury Encoders button.
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