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WARRANTY
Keithley Instruments, Inc. w
arrants this product to be free from defects in material and workmanship for a period of 1 year
from date of shipment.
Keithley Instruments, Inc. warrants the following items for 90 days from the date of shipment: probes, cables, rechargeable
batteries, diskettes, and documentation.
During the warranty period, we will, at our option, either repair or replace any product that proves to be defective.
To exercise this warranty, write or call your local Keithley representative, or contact Keithley headquarters in Cleveland, Ohio.
You will be given prompt assistance and return instructions. Send the product, transportation prepaid, to the indicated service
facility. Repairs will be made and the product returned, transportation prepaid. Repaired or replaced products are warranted for
the balance of the original warranty period, or at least 90 days.
LIMITATION OF W
This warranty does not apply to defects resulting from product modification without Keithle
ARRANTY
y’s express written consent, or
misuse of any product or part. This warranty also does not apply to fuses, software, non-rechargeable batteries, damage from
battery leakage, or problems arising from normal wear or failure to follow instructions.
THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING ANY
IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE. THE REMEDIES PROVIDED HEREIN ARE BUYER’S SOLE AND EXCLUSIVE REMEDIES.
NEITHER KEITHLEY INSTRUMENTS, INC. NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR ANY DIRECT,
INDIRECT, SPECIAL, INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE OF ITS
INSTRUMENTS AND SOFTWARE EVEN IF KEITHLEY INSTRUMENTS, INC., HAS BEEN ADVISED IN ADVANCE
OF THE POSSIBILITY OF SUCH DAMAGES. SUCH EXCLUDED DAMAGES SHALL INCLUDE, BUT ARE NOT LIMITED TO: COSTS OF REMOVAL AND INSTALLATION, LOSSES SUSTAINED AS THE RESULT OF INJURY TO ANY
PERSON, OR DAMAGE TO PROPERTY.
The print history shown below lists the printing dates of all Revisions and Addenda created for this manual. The
Revision Level letter increases alphabetically as the manual undergoes subsequent updates. Addenda, which are
released between Revisions, contain important change information that the user should incorporate immediately into
the manual. Addenda are numbered sequentially. When a new Revision is created, all Addenda associated with the
previous Revision of the manual are incorporated into the new Revision of the manual. Each new Revision includes a
revised copy of this print history page.
Revision A (Document Number 6521-901-01).............................................................................. September 1994
Addendum A (Document Number 6521-901-02)........................................................................... December 1995
Revision B (Document Number 6521-901-01)....................................................................................... April 2001
All Keithley product names are trademarks or registered trademarks of Keithley Instruments, Inc.
Other brand and product names are trademarks or registered trademarks of their respective holders
Safety Precautions
The following safety precautions should be observed before using
this product and any associated instrumentation. Although some instruments and accessories would normally be used with non-hazardous voltages, there are situations where hazardous conditions
may be present.
This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury. Read the operating information
carefully before using the product.
The types of product users are:
Responsible body
and maintenance of equipment, for ensuring that the equipment is
operated within its specifications and operating limits, and for ensuring that operators are adequately trained.
Operators
trained in electrical safety procedures and proper use of the instrument. They must be protected from electric shock and contact with
hazardous live circuits.
Maintenance personnel
to keep it operating, for example, setting the line voltage or replacing consumable materials. Maintenance procedures are described in
the manual. The procedures explicitly state if the operator may perform them. Otherwise, they should be performed only by service
personnel.
Service personnel
safe installations and repairs of products. Only properly trained service personnel may perform installation and service procedures.
Keithley products are designed for use with electrical signals that
are rated Installation Category I and Installation Category II, as described in the International Electrotechnical Commission (IEC)
Standard IEC 60664. Most measurement, control, and data I/O signals are Installation Category I and must not be directly connected
to mains voltage or to voltage sources with high transient over-voltages. Installation Category II connections require protection for
high transient over-voltages often associated with local AC mains
connections. The user should assume all measurement, control, and
data I/O connections are for connection to Category I sources unless otherwise marked or described in the Manual.
is the individual or group responsible for the use
use the product for its intended function. They must be
perform routine procedures on the product
are trained to work on live circuits, and perform
Exercise extreme caution when a shock hazard is present. Lethal
voltage may be present on cable connector jacks or test fixtures.The
American National Standards Institute (ANSI) states that a shock
hazard exists when voltage levels greater than 30V RMS, 42.4V
peak, or 60VDC are present.
that hazardous voltage is present in any unknown circuit before
measuring.
Users of this product must be protected from electric shock at all
times. The responsible body must ensure that users are prevented
access and/or insulated from every connection point. In some cases,
connections must be exposed to potential human contact. Product
users in these circumstances must be trained to protect themselves
from the risk of electric shock. If the circuit is capable of operating
at or above 1000 volts,
exposed.
Do not connect switching cards directly to unlimited power circuits.
They are intended to be used with impedance limited sources.
NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective devices to limit fault current and voltage to the card.
Before operating an instrument, make sure the line cord is connected to a properly grounded power receptacle. Inspect the connecting
cables, test leads, and jumpers for possible wear, cracks, or breaks
before each use.
When installing equipment where access to the main power cord is
restricted, such as rack mounting, a separate main input power disconnect device must be provided, in close proximity to the equipment and within easy reach of the operator.
For maximum safety, do not touch the product, test cables, or any
other instruments while power is applied to the circuit under test.
ALWAYS remove power from the entire test system and discharge
any capacitors before: connecting or disconnecting cables or jumpers, installing or removing switching cards, or making internal
changes, such as installing or removing jumpers.
Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth) ground. Always
make measurements with dry hands while standing on a dry, insulated
surface capable of withstanding the voltage being measured.
A good safety practice is to expect
no conductive part of the circuit may be
The instrument and accessories must be used in accordance with its
specifications and operating instructions or the safety of the equipment may be impaired.
Do not exceed the maximum signal levels of the instruments and accessories, as defined in the specifications and operating information, and as shown on the instrument or test fixture panels, or
switching card.
When fuses are used in a product, replace with same type and rating
for continued protection against fire hazard
Chassis connections must only be used as shield connections for
measuring circuits, NOT as safety earth ground connections.
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use of a
lid interlock.
If a screw is present, connect it to safety earth ground using the
wire recommended in the user documentation.
!
The symbol on an instrument indicates that the user should refer to the operating instructions located in the manual.
The symbol on an instrument shows that it can source or measure 1000 volts or more, including the combined effect of normal
and common mode voltages. Use standard safety precautions to
avoid personal contact with these voltages.
The
WARNING
result in personal injury or death. Always read the associated information very carefully before performing the indicated procedure.
The
CAUTION
damage the instrument. Such damage may invalidate the warranty.
Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and
all test cables.
To maintain protection from electric shock and fire, replacement
components in mains circuits, including the power transformer, test
leads, and input jacks, must be purchased from Keithley Instruments. Standard fuses, with applicable national safety approvals,
may be used if the rating and type are the same. Other components
that are not safety related may be purchased from other suppliers as
long as they are equivalent to the original component. (Note that selected parts should be purchased only through Keithley Instruments
to maintain accuracy and functionality of the product.) If you are
unsure about the applicability of a replacement component, call a
Keithley Instruments office for information
To clean an instrument, use a damp cloth or mild, water based
cleaner. Clean the exterior of the instrument only. Do not apply
cleaner directly to the instrument or allow liquids to enter or spill
on the instrument. Products that consist of a circuit board with no
case or chassis (e.g., data acquisition board for installation into a
computer) should never require cleaning if handled according to instructions. If the board becomes contaminated and operation is affected, the board should be returned to the factory for proper
cleaning/servicing.
heading in a manual explains dangers that might
heading in a manual explains hazards that could
2/01
CHANNELS PER CARD: 10.
FUNCTIONS: Amps.
CONTACT CONFIGURATION:
Current Mode: Single pole break-before-make for signal HI input. Signal
LO is common for all 10 channels and output. When a channel is off,
signal HI is connected to signal LO via a relay. All channels connect to
signal LO, in a make-before-break configuration between channel closures so that the current path is never interrupted.
All relays open when power is off.
SCAN SPEED:
1.5 channels/second with default settings.
1, 2
43 channels/second maximum speed.
1, 2, 3
1
When used with 6517 Electrometer.
2
Scan speeds are for fixed range readings for 200V and 20mA 6517
ranges, into data buffer.
3
6517 Filter off, speed fast, settling time 0 seconds.
Operating: 0°C to 50°C up to 35°C at 70% RH.
Storage: –25°C to 65°C.
DIMENSIONS,WEIGHT: 38mm high × 70mm wide × 242mm deep (1.5 in
× 2.75 in × 9.5 in). Net weight 623g (22 oz).
Specifications are subject to change without notice.
Model 6521 Low Current Scanner
OUTHL
H
IN 2...9
G
IN 1
L
H
IN 10
L
CHANNELS PER CARD: 10.
FUNCTIONS: Volts, Amps.
CONTACT CONFIGURATION:
Voltage Mode: Single pole break-before-make for signal HI input. Guard
is common for all 10 channels and output.
Current Mode: Single pole break-before-make for signal HI input. Signal
LO is common for all 10 channels and output. When a channel is off,
signal HI input is connected to signal LO via a relay. All channels connect to signal LO in a make-before-break configuration between
channel closures so that the current path is never interrupted.
All relays open when power is off.
SCAN SPEED:
1.5 channels/second with default settings.
1, 2
43 channels/second maximum speed.
1, 2, 3
1
When used with 6517 Electrometer.
2
Scan speeds are for fixed range readings for 200V and 20mA 6517
ranges, into data buffer.
3
6517 Filter off, speed fast, settling time 0 seconds.
1.2 Features .............................................................................................................................................................. 1-1
1.2.1 Model 6521 features................................................................................................................................... 1-1
1.2.2 Model 6522 features................................................................................................................................... 1-1
1.7 Unpacking and inspection.................................................................................................................................. 1-2
1.7.1 Inspection for damage................................................................................................................................ 1-2
3.2 Signal limitations................................................................................................................................................ 3-1
3.2.1 Model 6521 signal limitations .................................................................................................................... 3-1
3.2.2 Model 6522 signal limitations .................................................................................................................... 3-1
3.3.2 Scanner option bus query ........................................................................................................................... 3-2
3.4 Front panel operation.......................................................................................................................................... 3-2
3.5.4 Bus scanning............................................................................................................................................... 3-7
4.3.4 Offset current tests...................................................................................................................................... 4-3
4.3.5 Signal path contact resistance tests............................................................................................................. 4-4
4.4 Special handling of static-sensitive devices ....................................................................................................... 4-8
4.5 Principles of operation........................................................................................................................................ 4-8
4.5.2 Relay control .............................................................................................................................................. 4-8
5.2 Parts lists ............................................................................................................................................................ 5-1
5.3 Ordering information ......................................................................................................................................... 5-1
5.4 Factory service ................................................................................................................................................... 5-1
5.5 Component layouts and schematic diagrams ..................................................................................................... 5-1
Figure 3-6Capacitor leakage test system ................................................................................................................... 3-11
Figure 3-7High-resistance test system....................................................................................................................... 3-12
Figure 3-8Low-current test system ............................................................................................................................ 3-13
4Service Information
Figure 4-1Connections for offset current verification ................................................................................................. 4-3
Figure 4-2Connections for signal path contact resistance tests ................................................................................... 4-4
Figure 4-3Connections for ground relay contact resistance tests ................................................................................ 4-5
Figure 4-4Connections for channel isolation............................................................................................................... 4-7
Figure 4-5Connections for input isolation ................................................................................................................... 4-7
This section contains general information about the Models
6521 and 6522 scanner card options for the Model 6517
Electrometer. Both cards provide 10 channels of single-pole
switching. The Model 6521 is intended for use primarily
with the amps function, while the Model 6522 can be used
with the volts, amps, ohms, and charge functions. Both cards
have very low offset current and are designed for installation
in the Model 6517 rear panel OPTION SLOT.
Section 1 is arranged in the following manner:
1.2 Features
1.3 Warranty information
1.4 Manual addenda
1.5 Safety symbols and terms
1.6 Specification
1.7 Unpacking and inspection
1.8 Repacking for shipment
1.9 Optional accessories
• BNC input cables and a triax output cable to maintain
signal integrity.
• Low offset current (<1pA; <30fA typical).
1.2.2Model 6522 features
Key Model 6522 features include:
• 10 channels of single-pole switching designed for volts,
ohms, amps and coulombs functions.
• When configured for current operation, input HI is connected to input LO when a channel is off for true current
switching.
• Triax input cables and a triax output cable to maintain
signal integrity.
• Low offset current (<1pA; <30fA typical).
• High channel isolation and input isolation.
• Fully guarded operation is supported to maintain signal
integrity under high-impedance voltage measurement
conditions.
1.2Features
1.2.1Model 6521 features
Key Model 6521 features include:
• 10 channels of single-pole switching designed for
amps.
• Input HI is connected to input LO when a channel is off
for true current switching.
1.3Warranty information
Warranty information is located on the inside front cover of
this instruction manual. Should your Model 6521/22 require
warranty service, contact the Keithley representative or
authorized repair facility in your area for further
information. When returning the scanner card for repair, be
sure to fill out and include the service form at the back of this
manual in order to provide the repair facility with the
necessary information.
1-1
General Information
1.4Manual addenda
Any improvements or changes concerning the scanner card
or manual will be explained in an addendum included with
the card. Addenda are provided in a page replacement format. Simply replace the obsolete pages with the new pages.
1.5Safety symbols and terms
The following symbols and terms may be found on an instrument or used in this manual.
The symbolon an instrument indicates that the user
should refer to the operating instructions located in the instruction manual.
The WARNING heading used in this manual explains dangers that might result in personal injury or death. Always
read the associated information very carefully before performing the indicated procedure.
The CAUTION heading used in this manual explains hazards that could damage the scanner card. Such damage may
invalidate the warranty.
Thesymbol indicates a safety earth ground. The
ground screw must be secured to assure that the scanner card
is properly grounded.
!
• After removing the card from its anti-static bag, inspect
it for any obvious signs of physical damage. Report any
such damage to the shipping agent immediately.
• When the card is not installed in a Model 6517 Electrometer, keep the card in the anti-static bag, and store
it in the original packing carton.
1.7.3Shipment contents
The following items are included with every Model 6521/22
order:
• Model 6521/22 Scanner Card
• Model 6521/22 Instruction Manual
• Input/output cables (factory connected to card)
• Additional accessories as ordered
1.7.4Instruction manual
If an additional Model 6521/22 Instruction Manual is required, order the manual package, Keithley part number
6521-901-00. The manual package includes an instruction
manual and any pertinent addenda.
1.8Repacking for shipment
1.6Specifications
Model 6521/22 specifications are found at the front of this
manual. These specifications are exclusive of the Model
6517 Electrometer specifications.
1.7Unpacking and inspection
1.7.1Inspection for damage
The Model 6521/22 is packaged in a re-sealable, anti-static
bag to protect it from damage due to static discharge and
from contamination that could degrade its performance. Before removing the card from the bag, observe the precautions
on handling discussed below.
1.7.2Handling precautions
• Always grasp the card by the side edges and covers. Do
not touch the board surfaces or components.
Should it become necessary to return the Model 6521/22 for
repair, carefully pack the unit in its original packing carton
or the equivalent, and include the following information:
• Advise as to the warranty status of the scanner card.
• Write ATTENTION REPAIR DEPARTMENT on the
shipping label.
• Fill out and include the service form located at the back
of this manual.
1.9Optional accessories
The following optional accessories are recommended for use
for the Model 6521/22.
1.9.1Model 6521 accessories
Model 4801 Coax Cable: Low-noise coax cable, 1.2m (48
in) in length with male BNC connectors on each end. Recommended for extending Model 6521 input connections.
1-2
General Information
Model 4802-10 Coax Cable: 3m (10 ft.) of low-noise coax
cable with a male BNC connector on one end and unterminated at the other end. Recommended for extending Model
6521 input connections.
Model 4803 Low-Noise Cable Kit: Includes 15m (50 ft.) of
low-noise coax cable, 10 male BNC connectors, and fi e female BNC, chassis-mount connectors. Recommended for
extending Model 6521 input connections.
Model CAP-18 2-Slot Cap: Protective shield/cap for Model
6521 input jacks.
SC-9 Coax Cable: Low-noise coax cable without connectors
(sold by the foot).
1.9.2Model 6522 accessories
Model 237-ALG Triax Cable: 2m (6.6.ft.) of low-noise triax
cable terminated with a 3-slot male triax connector on one
end, and three alligator clips on the other end. Recommended for extending Model 6522 input connections.
Model 6171 Adapter: 3-slot male to 2-lug female triax
adapter. Recommended for adapting 2-slot triax cables to
Model 6522 input connectors.
Model 7078-TRX-3 Triax Cable: 0.9m (3 ft.) low-noise tri-
ax cable terminated at both ends with 3-slot male triax connectors. Also available in 3m (10 ft.) and 6m (20 ft.) lengths
(Models 7078-TRX-10 and 7078-TRX-20 respectively).
Recommended for extending Model 6522 input connections.
Model 7078-TRX-BNC Adapter: 3-slot male triax to BNC
adapter useful for adapting BNC coax cables to Model 6522
input jacks.
Model 7078-TRX-TBC Triax Bulkhead Connector: 3-lug
female triax bulkhead connector with cap for assembly of
custom panels and interface connections.
Model CAP-31 3-Slot Cap: Protective shield/cap for Model
6522 input jacks.
SC-22 Triax Cable: Low-noise triax cable without connec-
tors (sold by the foot).
1-3
General Information
1-4
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