Keithley 6517B User Manual

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Model 6517B Electrometer

User’s Manual

6517B-900-01 Rev. A / June 2008

99 Washington Street
Melrose, MA 02176

Phone [phone]
Toll Free 1-800-517-8431

A GREATER MEASURE OF CONFIDENCE

WARRANTY

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Keithley Instruments, Inc. warrant s this product to be free from defect s in ma terial a nd wor kmanship for a period of
one (1) year from date of shipment.

Keithley Instruments, Inc. warrants the following items for
software, rechargeable batteries, diskettes, and documentation.

During the warranty period, Keithley Instruments will, at it
to be defective.

To exercise this warranty, write or call your local Keithley Instruments representative, or contact
Keithley Instruments headquarters
Send the product, transportation prepaid, to the indicated service facility. Repairs will be made and the product
returned, transportation prepaid. Repaired or replaced products are warranted for the balance of the original
warranty period, or at least 90 days.

in Cleveland, Ohio. You will be given prompt assistance and return instructions.

90 days from the date of shipment: probes, cables,

s option, either repair or replace any product that proves

LIMITATION OF WARRANTY

This warranty does not apply to defects resulting from product modification without Keithley Instruments’ express
written consent, or misuse of any product or part. This warranty also does not apply to fuses, software,
non-rechargeable batteries, damage from batter y leakag
instructions.

THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES, EXPRESSED
IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE. THE REMEDIES
PROVIDED HEREIN ARE BUYER’S SOLE AND EXCLUSIVE REMEDIES.

NEITHER KEITHLEY INSTRUMENTS, INC. NOR ANY OF ITS EMP
DIRECT, INDIRECT, SPECIAL, INCIDENTAL, OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE
OF ITS INSTRUMENTS AND SOFTWARE, EVEN IF KEITHLEY INSTRUMENTS, INC. HAS BEEN ADVISED IN
ADVANCE OF THE POSSIBILITY OF SUCH DAMAGES. SUCH EXCLUDED DAMAGES SHALL INCLUDE, BUT
ARE NOT LIMITED TO: COST OF REMOVAL AND INSTALLATION, LOSSES SUSTAINED AS THE RESULT OF
INJURY TO ANY PERSON, OR DAMAGE TO PROPERTY.

e, or problems arising from normal wear or failure to follow

OR IMPLIED, INCLUDING ANY

LOYEES SHALL BE LIABLE FOR ANY

3/07

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Model 6517B

Any unauthorized reproduction, photocopy, or use the information herein, in whole or in part, without the prior written

approval of Keithley Instruments, Inc. is strictly prohibited.

TSP, TSP-Link, and TSP-Net are trademarks of Keithley Instruments, Inc.

All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments, Inc.

Other brand names are trademarks or registered trademarks of their respective holders.

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Electrometer

User’s Manual

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The following safety precautions should be observed before using this product an d any associated instrumentation. Although some
instruments and accessories would normally be used with non-hazardous voltages, there are situations where hazardous conditions may
be present.

Safety Precautions

This product is intended for use by qualified personnel who recog
to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the product. Refer
to the user documentation for complete product specifications.

If the product is used in a manner not
The types of product users are:
Responsible body is

operated within its specifications and operating limits, and for ensuring that operators are adequately trained.
Operators use

They must be protected from electric shock and contact with hazardous live circuits.
Maintenance personnel pe

replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures explicitly state if the
operator may perform them. Otherwise, they should be performed only by service personnel.

Service personnel are traine
personnel may perform installation and service procedures.

Keithley Instruments products are designed for use with electrical sig
Category II, as described in the International Electrotechnical Commission (IEC) Standard IEC 60664. Most measurement, control, and
data I/O signals are Measurement Category I and must not be directly connected to mains voltage or to voltage sources with high transient
over-voltages. Measurement Category II connections require protection for high transient over-voltages often associated with local AC
mains connections. Assume all measurement, control, and data I/O connections are for connection to Category I sources unless otherwise
marked or described in the user documentation.

the individual or group responsible for the use and maintenance of equipment, for ensuring that the equipment is

the product for its intended function. They must be trained in electrical safety procedures and proper use of the instrument.

rform routine procedures on the product to keep it operating properly, for example, setting the line voltage or

d to work on live circuits, perform safe installations, and repair products. Only properly trained service

specified, the protection provided by the product warranty may be impaired.

nize shock hazards and are familiar with the safety precautions required

nals that are rated Measurement Category I and Measurement

Exercise extreme caution when a shock hazard is prese
American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than 30V RMS, 42.4V peak,
or 60VDC are present. A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring.

Operators of this product must be protected from ele
prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential human contact.
Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If the circuit is capable of
operating at or above 1000V, no conductive part of the circuit may be exposed.

Do not connect switching cards directly to unlimited power circuit
connect switching cards directly to AC mains. When connecting sources to switching cards, install protective devices to limit fault current
and voltage to the card.

Before operating an instrument, ensure that the line cord is con
cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.

nt. Lethal voltage may be present on cable connector jacks or test fixtures. The

ctric shock at all times. The responsible body must ensure that operators are

s. They are intended to be used with impedance-limited sources. NEVER

nected to a properly-grounded power receptacle. Inspect the connecting

11/07

When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input power

!

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disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.
For maximum safety, do not touch the product, test cables, or any other instrument

AL W AYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting cables or jumpers,
installing or removing switching cards, or making internal changes, such as installing or removing jumpers.

Do not touch any object that could provide a current path to the co
make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the voltage being measured.

The instrument and accessories must be used in
equipment may be impaired.

Do not exceed the maximum signal levels of the
and as shown on the instrument or test fixture panels, or switching card.

When fuses are used in a product, replace with the same type an
Chassis connections must only be used as shield connections for me
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires th

interlock.
If a screw is present, connect it to safety earth ground
The symbol on an instrument indicates that the user should refe r to the operating instructions located in the user documentation.
The symbol on an instrument shows that it can source or measure 10

common mode voltages. Use standard safety precautions to avoid personal contact with these voltages.

accordance with its specifications and operating instructions, or the safety of the

instruments and accessories, as defined in the specifications and operating information,

mmon side of the circuit under test or power line (earth) ground. Always

d rating for continued protection against fire hazard.

asuring circuits, NOT as safety earth ground connections.

using the wire recommended in the user documentation.

00V or more, including the combined effect of normal and

s while power is applied to the circuit under test.

e use of a lid

The symbol on an instrument shows that
The symbol indicates a connection terminal to the equipment frame.

If this symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be properly
disposed of according to federa

The WARNING heading in the user documentation explains dangers that might result in personal injury or death. Always read the
associated information very carefully before performing the indicated procedure.

The CAUTION h
warranty.

Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and all test cables.
T o maintain protection from electric shock and fire, replacement compon

and input jacks - must be purchased from Keithley Instruments. Standard fuses with applicable national safety approvals may be used if
the rating and type are the same. Other components that are not safety-related may be purchased from other suppliers as long as they
are equivalent to the original component (note that selected parts should be purchased only through Keithley Instruments to maintain
accuracy and functionality of the product). If you are unsure about the applicability of a replacement component, call a Keithley Instruments
office for information.

To clean an instrument, use a damp cloth or mild, water-based clea
directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with no case or chassis
(e.g., a data acquisition board for installation into a computer) should never require cleaning if handled according to instructions. If the
board becomes contaminated and operation is affected, the board should be returned to the factory for proper cleaning/servicing.

eading in the user documentation explains hazards that could damage the instrument. Such damage may invalidate the

l, state, and local laws.

the surface may be hot. Avoid personal contact to prevent burns.

ents in mains circuits - including the power transformer, test leads,

ner. Clean the exterior of the instrument only. Do not apply cleaner

Table of Contents

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Section Topic Page

1 Introduction............................................................................................. 1-1

Overview....

Capabilities and features overview...
Options and accessories..
Specifications...

Unpacking and inspection...

Inspection for damage..
Handling precautions ...

Shipment contents ............................................................................... 1-5

Documentation.

Repacking for shipment....

2 Getting Started....................................................................................... 2-1

Introduction...
Front and rear p

Front panel summary...

Rear panel summary............................................................................ 2-4

Power-up ...

Line power connection.
Power-up procedure..

Display........................................................................................................ 2-6

Primary display line...
Secondary display line .

Bench defaults.

Restoring bench defaults..

Function default settings...................................................................... 2-7

3 Basic Measurements ............................................................................ 3-1

Introduction...
Changing functions.
Voltage measurements.

Guarding ...

Current measurements.
Resistance measurements.

Auto V-Source..
Amps Rel...

Resistivity measurements ...
Charge measurements .

Auto discharge .

Temperature and humidity measurements ............................................... 3-10

Connections.
Measurement control ...
Temperature units...

Display reading options....

4 Measurement Options.......................................................................... 4-1

Introduction...
Multiple displays .
Menus.

Navigating menus ..

................................................................................................. 1-2

.................................................... 1-2

.................................................................... 1-3

.................................................................................... 1-5

........................................................................ 1-5

........................................................................ 1-5

........................................................................ 1-5

.................................................................................... 1-5

.................................................................... 1-6

.............................................................................................. 2-2

anel familiarization............................................................ 2-2

........................................................................ 2-2

................................................................................................. 2-6

........................................................................ 2-6

........................................................................... 2-6

........................................................................... 2-6

........................................................................ 2-7

........................................................................................... 2-7

.................................................................... 2-7

.............................................................................................. 3-2

.................................................................................... 3-2

.............................................................................. 3-2

........................................................................................... 3-3

.............................................................................. 3-4

........................................................................ 3-5

.................................................................................... 3-6

........................................................................................... 3-6

........................................................................ 3-7

.............................................................................. 3-9

.................................................................................. 3-10

...................................................................................... 3-10

...................................................................... 3-11

............................................................................ 3-11

.................................................................. 3-12

.............................................................................................. 4-3

........................................................................................ 4-3

........................................................................................................ 4-5

.............................................................................. 4-6

Table of Contents Model 6517B Electrometer User’s Manual

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Section Topic Page

Voltage source ............................................................................................ 4-7

Connections..

Basic operation..................................................................................... 4-9

Configuring V-Source...

Relative..

..................................................................................................... 4-9

Configuring rel .

Zero check ................................................................................................ 4-10

Zero correct..
Triggering ..

................................................................................................... 4-11

Idle...
Control sources ..
Device action...

Output trigger...................................................................................... 4-12

Counters....

Bench default setup...

Speed ..

...................................................................................................... 4-13

Configuring speed ..

Resolution.

Configuring resolution...

Filter.

......................................................................................................... 4-13

Filter types.

Filter modes........................................................................................ 4-14

Median filter..

Configuring filters....

Buffer (data store) ..................................................................................... 4-15

Storing readings..

Math.

......................................................................................................... 4-16

Selecting and configuring math.
Enabling math..

Additional math operations................................................................. 4-18

Test sequences...

Configuring test sequences.
Connections..

Running a test .................................................................................... 4-21

Internal scanning .

Configure internal scanner ..

Perform the scan....

Close/open channels.

External scanning...

Trigger connections...
Configure external channels...

Perform the scan....

5 Remote Operation.................................................................................. 5-1

Overview...
Software support.

LabView driver.

Remote interfaces..

IEEE-488 bus ..
RS-232 interface.

Common commands.
SCPI commands.

SCPI command syntax.
SCPI signal-oriented commands..
SCPI subsystem commands ..

Program examples.

Changing function and range .
One-shot triggering.
Continuous triggering #1 .
Continuous triggering #2 .

........................................................................................ 4-7

........................................................................ 4-9

................................................................................... 4-10

............................................................................................. 4-10

................................................................................................ 4-10

................................................................................ 4-12

................................................................................... 4-12

......................................................................................... 4-12

......................................................................... 4-12

............................................................................ 4-13

................................................................................................ 4-13

...................................................................... 4-13

......................................................................................... 4-14

...................................................................................... 4-14

............................................................................ 4-15

................................................................................ 4-15

......................................................... 4-17

................................................................................... 4-18

...................................................................................... 4-19

............................................................... 4-19

...................................................................................... 4-20

...................................................................................... 4-21

............................................................... 4-21

............................................................................ 4-21

......................................................................... 4-22

................................................................................... 4-22

......................................................................... 4-23

............................................................ 4-23

............................................................................ 4-23

.................................................................................................. 5-2

........................................................................................ 5-2

..................................................................................... 5-2

..................................................................................... 5-2

..................................................................................... 5-2

.................................................................................. 5-3

.................................................................................. 5-5

........................................................................................ 5-5

........................................................................ 5-6

........................................................ 5-8

.............................................................. 5-8

................................................................................... 5-13

............................................................ 5-13

............................................................................ 5-14

................................................................... 5-15

................................................................... 5-15

ii 6517B-900-01 Rev. A / Jun 2008

Model 6517B Electrometer User’s Manual Table of Contents

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Section Topic Page

Generating SRQ on buffer full ............................................................ 5-16

Storing readings in the buffer.............................................................. 5-17

Taking readings with the scanner card...
Test sequence: Staircase sweep ..

Index ............................................................................................................................ I-1

............................................ 5-18

...................................................... 5-19

6517B-900-01 Rev. A / Jun 2008 iii

Table of Contents Model 6517B Electrometer User’s Manual

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iv 6517B-900-01 Rev. A / Jun 2008

List of Figures

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Section Figure Title Page

2 Figure 2-1 Model 6517B front panel................................................................ 2-2

2 Figure 2-2 Model 6517B rear panel ..
3 Figure 3-1 Voltage measurements.
3 Figure 3-2 Current measurements.
3 Figure 3-3 Resistance measurements .
3 Figure 3-4 Resistivity measurements...
3 Figure 3-5 Charge measurements.
3 Figure 3-6 External temperature and humidity measurements...
4 Figure 4-1 Main menu display.
4 Figure 4-2 Independent V-Source connections.
4 Figure 4-3 FVMI connections..
4 Figure 4-4 Basic trigger model (s

4 Figure 4-5 Advanced trigger model (simplified) ....

4 Figure 4-6 Filter response/noise window .
4 Figure 4-7 Combining math calculations..
4 Figure 4-8 Typical FVMI connections...
4 Figure 4-9 Trigger connections using trigger link..
5 Figure 5-1 IEEE-488 connections ..
5 Figure 5-2 Hierarchy of the example SENSe1 commands ...

.............................................................. 2-4

................................................................. 3-3

................................................................. 3-4

........................................................... 3-6

........................................................... 3-9

............................................................... 3-10

.................. 3-11

........................................................................ 4-5

.............................................. 4-8

........................................................................ 4-8

implified).................................................... 4-11

........................................ 4-11

..................................................... 4-14

..................................................... 4-18

......................................................... 4-20

........................................ 4-23

................................................................. 5-3

.......................... 5-6

List of Figures Model 6517B Electrometer User’s Manual

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vi 6517B-900-01 Rev. A / Jun 2008

List of Tables

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Section Table Title Page

4 Table 4-1 Multiple displays by function.......................................................... 4-3

4 Table 4-2 Main menu summary.

4 Table 4-3 Configuration settings for each measurement function....

4 Table 4-4 Configuration settings for instrument operations.
4 Table 4-5 Menu summary...

.................................................................... 4-5

............. 4-6

.......................... 4-6

........................................................................... 4-7

List of Tables Model 6517B Electrometer User’s Manual

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viii 6517B-900-01 Rev. A / Jun 2008

In this section:

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Topic Page

Overview ................................................................................................. 1-2

Unpacking and inspection....................................................................... 1-5

Section 1

Introduction

Capabilities and features overview ................................................. 1-2

Options and accessories................................................................. 1-3

Specifications.................................................................................. 1-5

Inspection for damage .................................................................... 1-5

Handling precautions ...................................................................... 1-5

Shipment contents.......................................................................... 1-5

Repacking for shipment .................................................................. 1-6

Section 1: Introduction Model 6517B Electrometer User’s Manual

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Overview

This section contains general information about the Keithley Instrument s Model 6517B
Electrometer.

If you have any questions after reviewing this info
Instruments representative or call one of our applications engineers at 1-888-KEITHLEY
(1-888-534-8453) within the U.S. and Canada. You can also contact us through our website at

www.keithley.com.

rmation, please contact your local Keithley

Capabilities and features overview

The Model 6517B is a 6½-digit electrometer/high-resistance test and measurement system with
the following measurement capabilities:

• DC voltage measurements from 1μV to

• DC current measurements from 10aA to 21mA.

• Charge measurements from 10fC to 2.1μC.

• Resistance measurements from 10Ω t

• Surface resistivity measurements.

• Volume resistivity measurements.

• External temperature measurements from -25°C to 150°C using the supplied Model
517-TP thermocouple.

6

• Relative humidity measurements (0 to 100%) using the optional Model 6517-RH probe.

Some additional capabilities of the Model

• Built-in V-Source. The 100V range provides u

provides up to ±1000V at 1mA.

• Data storage (50,000 points).

• Single button zeroing (REL).

• Built-in math functions.

• Filtering, averaging, and median.

• Built-in test sequences.

• Remote operation using the IEEE-488 (GPIB) bus or the RS

• Scan (measure) channels of an external scanner.

• Scan (measure) channels of an internal scanne

Model 6521 or Model 6522) installed in the option slot.

210V.

o 210PΩ.

6517B include:

p to ±100V at 10mA, while the 1000V range

-232 interface.

r card (for example, Keithley Instruments

1-2 Return to Section Topics 6517B-900-01 Rev. A / Jun 2008

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Options and accessories

The following options and accessories are available from Keithley Instruments for use with the
Model 6517B Electrometer:

NOTE Check the Keithley Instruments website (www.keith

accessories that may have been added to the Keithley Instruments product line for use
with the Model 6517B Electrometer.

ley.com) for additional options and

Cables and adapters

Model 237-ALG-2 Triax Cable: This is a 2-meter (6.6ft) low-noise triax cable terminated with a

3-slot male triax connector on one end and 3 alligator clips on the other.
Model 237-BNC-TRX Adapter:

disconnected). It is used to terminate a triax cable with a BNC plug. Su itable for use with the M odel
6517B V-Source in high voltage applications.

Model 237-TRX-T Adapter: Th
7078-TRX triax cables. Suitable for use with the Model 6517B V-Source in high voltage
applications.

Model 237-TRX-TBC Connector:
assembly of custom panels and interface connections. Suitable for use with the Model 6517B
V-Source in high voltage applications.

Model 6517B-ILC-3 Interlock Cable: This is a 3 me
Phoenix connector on one end and a 4 pin Switchcraft connector on the other end.

Model 7078-TRX-BNC Adapter: This is
lets you connect a BNC cable to the triax input of the Model 6517B. Suitable for use with the Mod el
6517B in high voltage applications.

This is a male BNC to 3-lug female triax adapter (guard

is is a 3-slot male to dual 3-lug female triax tee adapter for use with

This is a 3-lug female triax bulkhead connector with cap for

ter (6.6 ft) cable terminated with a 4 pin

a 3-slot male triax to female BNC adapter. This adapter

Models 7078-TRX-3, 7078-TRX-10 and 7078-TRX-20 Triax Cables: Th
cables terminated at both ends with 3-slot male triax connectors. The Model 7078-TRX-3 is 3ftft
(0.9m) in length, the Model 7078-TRX-10 is 10f t (3m) in length, and the Model 7078-TRX-20 is 20f t
(6m) in length.

Model 7078-TRX-TBC Connector: This is
assembly of custom panels and interface connections. Suitable for use with the Model 6517B
V-Source in high voltage applications.

Models 7007-1 and 7007-2 Shielded IEEE-488 Cables: Conn
IEEE-488 bus using shielded cables and connectors to reduce electromagnetic interference (EMI).
The Model 7007-1 is one meter long; the Model 7007-2 is two meters long.

Models 8501-1 and 8501-2 Trigger Link Cables: Con
with Trigger Link connectors (for example, Model 7001 Switch System). The Model 8501-1 is one
meter long; the Model 8501-2 is two meters long.

Model 8502 Trigger Link Adapter: A
instruments that use the standard BNC (In/Out) external trigg er ing tech n iqu e.

Model 8606 High Performance Probe Tip Kit: C
two spring hook test probes (the spade lugs and alligator clips are rated at 30V RMS, 42.4V peak;
the test probes are rated at 1000V). These components are designed to be used with high
performance test leads terminated with banana plugs, such as the Model 8607 High Performance
Banana Cables.

a 3-lug female triax bulkhead connector with cap for

ect the Model 6517B to the

nect the Model 6517B to other instruments

llows you to connect the Trigger Link of the Model 6517B to

onsists of two spade lugs, two alligator clips, and

ese are low noise triax

6517B-900-01 Rev. A / Jun 2008 Return to Section T o pics 1-3

Section 1: Introduction Model 6517B Electrometer User’s Manual

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Model 8607 High Performance Banana Cables: Consists of two high voltage (1000V) banana
cables. The cables are terminated with banana plugs that have retractable sheaths.

CS-751 Barrel Adapter:
together. Both ends of the adapter are terminated with 3-lug female triax connectors.

This is a barrel adapter that allows you to connect two triax cables

Case and rack mount kits

Model 1050 Padded Carrying Case: A carrying case for a Model 6517B. Includes handles and

shoulder strap.
Model 4299-1 Single Fixed Rack Mount Kit: M

rack.
Model 4299-2 Side-by-side Rack Mount Kit: Mou

19-inch rack.
Model 4288-4 Side-by-side Rack Mount Kit: Mou

side-by-side in a standard 19-inch rack.

ounts a single Model 6517B in a st andard 19-in ch

nts two instruments side-by-side in a standard

nts a Model 6517B and a 5.25-inch instrument

Probes

Model 6517-RH Humidity Probe with Cable: This sensor allows the Model 6517B to make

relative humidity measurements (0 to 100%). Also included is an extension cable (part number
CA-129-1).

Model 6517-TP Thermocouple with Leads: This t
6517B to make external temperature measurements from –190°C to 1350°C.

ype K thermocouple sensor allows the Model

Scanner cards

Model 6521 Low Current Scanner Card: This 10-channel low current scanner card is terminated

with BNC connectors and plugs into the option slot of the Model 6517B.
Model 6522 Low Current/Low Voltage Scanner Card: Th

scanner card is terminated with triax connectors and plugs into the option slot of the Model 6517B.

is 10-channel low current/low voltage

T est fixture

Model 8009 Resistivity Test Fixture: This is a guarded test fixture for measuring volume and

surface resistivities. It can accommodate sheet samples 64 to 102mm (2 -1/2 to 4 in.) in diameter
and up to 3.175mm (1/8 in.) thick.

Software

Model 6524 Hi-R Software Package: Desig ned to ai d in making more r epeat able hig h resist ance/

resistivity measurements. Four windows-driven programs increase measurement precision, ease
download and analysis of Hi-R data, and allow cross-correlation of environmental factors.

1-4 Return to Section Topics 6517B-900-01 Rev. A / Jun 2008

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Specifications

Full Model 6517B specifications are included in the Model 6 517B Refere nce Man ual, Ap pendix A.
Check the Keithley Instruments website at www.keithley.com for the latest updates to the
specifications.

Unpacking and inspection

Inspection for damage

The Model 6517B was carefully inspected electrically and mechanically before shipment. After
unpacking all items from the shipping carton, check fo r any obvio us signs of p hysical damage that
may have occurred during transit (there may be a protective film over the display lens, which can
be removed). Report any damage to the shipping agent immediately. Save the original packing
carton for possible future shipment. Before removing the Model 6517B from the anti-static bag,
observe the following handling precautions.

Handling precautions

• Always grasp the Model 6517B by the covers.

• After removing the Model 6517B from its anti-static bag, inspect it for any obvious signs
of physical damage; report any such damage to the shipping agent immediately.

• When the Model 6517B is not installed and connected, keep the unit in its anti-static
bag and store it in the original packing carton.

Shipment contents

The following items are included with every Model 6517B order:

• Model 6517B Electrometer with line cord

• Protective Triax Shield/C

• 237-ALG-2 Triax Cable terminated with alligator clip

• Accessories as ordered

• Certificate of calibration

• CD containing complete documentation and requ ired software

ap (CAP-28-1)

s on one end

Documentation

A CD-ROM containing this User’s Manual, a Re ference Manual, and r equired sof tware is included
with each Model 6517B. Check the Keithley Instruments website at www.keithley .com for the latest
versions of the manuals. The latest manuals can be downloaded (in PDF format) from the website.

6517B-900-01 Rev. A / Jun 2008 Return to Section T o pics 1-5

Section 1: Introduction Model 6517B Electrometer User’s Manual

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Repacking for shipment

Should it become necessary to return the Model 6517B for repair, carefully pack the unit in its
original packing carton or the equivalent, and follow these instructions:

• Call the repair department toll-free at 1-888-KEITHLEY (1-888-534-8453), within the U.S.
a

nd Canada, to obtain a Return Material Authorization (RMA) number.

• Advise as to the warranty status of the Model 6517B.

• Write ATTENTION REPAIR DEPARTMENT and

• Complete and include the Service Form

located at the back of this manual.

the RMA number on the shipping label.

1-6 Return to Section Topics 6517B-900-01 Rev. A / Jun 2008

In this section:

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Topic Page

Introduction ....................................... .......................................... ............ 2-2

Front and rear panel familiarization......................................................... 2-2

Power-up ....................................................................... ......................... 2-6

Display .................................................................................................... 2-6

Section 2

Getting Started

Front panel summary ................................. ........... ........ ............ ...... 2-2

Rear panel summary ...................... ... ............................................. 2-4

Line power connection ................................................................... 2-6

Power-up procedure ....................................... ................................ 2-6

Primary display line ........................................................................ 2-6

Secondary display line ................................................................... 2-7

Bench defaults .................................... ... ................................................. 2-7

Restoring bench defaults ................................................................ 2-7

Function default settings ................................................................ 2-7

Section 2: Getting Started Model 6517B Electrometer User’s Manual

VOLTAGE

SOURCE

OPERATE

6517B ELECTROMETER/HIGH RESIST

ANCE METER

EDIT ERR REM TALK LSTN SRQ REAR REL FILT MATH 4W AUTO ARM TRIG SMPL

1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10

PREV

NEXT

DISPLAY

Z-CHK REL

FILTER

MATH TRIG SEQ

INFO

LOCAL STORE

RECALL

CONFIG

MENU

EXIT

ENTER

VI R

Q

CARD OPER

OPTION

VOLTAGE SOURCE

POWER

AUTO

RANGE

RANGE

5

19

273864

Secondary display line

Primary display line

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Introduction

This section contains identification and descriptions of controls and components of the Keithley
Instruments Model 6517B Electrometer and det ailed informatio n for powering up the Model 6517B.

Front and rear panel familiarization

Front panel summary

The front panel of the Model 6517B is shown in Figure 2-1. The descriptions of the front panel
controls follow Figure 2-1.

Figure 2-1

Model 6517B front panel

1 ANNUNCIATORS

EDIT Editing voltage source values
ERR Questionable reading
REM In remote
TALK Addressed to talk
LSTN Addressed to listen
SRQ Service Request
REL Relative reading displayed
FILT Digital filter enabled
MATH Math calculation enabled
AUTO Autoranging enabled
ARM Trigger armed; not in idle
*(asterisk) Reading being stored

2-2 Return to Section Topics 6517B-900-01 Rev. A / Jun 2008

Model 6517B Electrometer User’s Manual Section 2: Getting Started

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2 F UNCTION KEYS

Select measurement function; volts (V), amps (I), resistivity (R) or coulombs (Q).

3 RAN GE KEYS

Moves to higher range; increments digit.
Moves to lower range; decrements digit.

AUTO Enables/disables autorange.

4 HANDLE

Pull out and rotate to desired position.

5 DISPLAY KEYS

PREV/NEXT Scroll through multiple displays of a function.

6 OPERATION KEYS

Z-CHK Enables/disables zero check: enable zero check before changing functions.
REL Enables/disables relative reading.
FILTER Displays digital filter status for presen
MATH Displays math calculation and toggles math on/off if configured.
TRIG Triggers unit.
SEQ Performs selected test sequence.

t function and toggles filter on/off.

and Moves cursor among data entry digits, menu selections, and information displays.

INFO Shows context-sensitive information about the present display.
LOCAL Cancels remote operation.
STORE Enables data storage.
RECALL Displays reading data (reading, number, ti

maximum, minimum average, sta
CONFIG Configures functions and operations.
MENU Saves/restores instrument conditions; sets up communications; performs calibration

and self-tests; defines limits, digital outpu
EXIT Cancels selection, moves back within menu structure.
ENTER Holds reading, enters selection, moves down within menu structure.

me). Use PREV/NEXT DISPLAY for

ndard deviation.

t, and other miscellaneous operations.

7 VOLTAGE SOURCE KEYS

OPER Toggles V-source between operate and standby.

and Adjusts V-source value.

8 VO LTAGE SOURCE OPERATE

Indicator light is on when in operation, off in standby.

9 OPTION CARD KEY

Use to program and operate an optional feature. Also use to view external scanner channels.

6517B-900-01 Rev. A / Jun 2008 Return to Section T o pics 2-3

Section 2: Getting Started Model 6517B Electrometer User’s Manual

8

9101112131415

Input high

Input low
Chassis ground

Unguarded (guard off)

Input high

Guard
Chassis ground

Guarded (guard off)

OPTION SLOT

250VDC MAX

MADE IN

U.S.A

LINE RATING

50-60 Hz

100 VA MAX.

LINE

WARNING:

NO INTERNAL OPERATOR SERVICABLE PARTS, SERVICE BY QUALIFIED PERSONNEL ONLY.

CAUTION:

FOR CONTINUED PROTECTION AGAINST FIRE HAZARD, REPLACE FUSE WITH SAME TYPE AND RATING.

1250Vpk

PREAMP

OUT

1000VDC

MAX

FUSE

630mAT

315mAT

100V
120V
220V
240V

COMMON 2V OUT

LO HI

V SOURCE

TRIGGER LINK RS-232

DIGITAL I/O

HUMIDITY

TEMP

TYPE K

INTERLOCK

IEEE-488

2VDC MAX

1234567

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Rear panel summary

The rear panel of the Model 6517B is shown in Figure 2-2. The descriptions of the rear panel
components follow Figure 2-2.

Figure 2-2

Model 6517B rear panel

1 INPUT CONNECTOR

Unguarded Configuration Disable GUARD for amps, ohms, coulombs

and unguarded voltage measurements.

Guarded Configuration Enable GUARD for gua

rded voltage measurements.

2PREAMP OUT

Follows the signal amplitude applied to the INPUT terminal. With GUARD on, PREAMP OUT is connected
to the inner shell of the INPUT triax connector to configure the input for guarded voltage measurements.
Referenced to COMMON. See the Model 6517B Reference Manual for more information.

2-4 Return to Section Topics 6517B-900-01 Rev. A / Jun 2008

Model 6517B Electrometer User’s Manual Section 2: Getting Started

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3COMMON

Connector that is internally connected to INPUT low.

4 CHASSIS GROUND

Attached cable that connects the chassis to ground through the power line cord. COMMON can be
connected to chassis ground by plugging the cable into COMMON. For floating measurements, make sure
the ground cable connection between COMMON and Chassis Ground is open.

5 2V ANALOG OUTPUT

Connector provides a scaled 0 to 2V output that is referenced to COMMON. It is typically connected to a
measuring device such as a chart recorder. See the Model 6517B Reference Manual for more information.

6 HUMIDITY

Connect the optional Keithley Instruments Model 6517-RH probe for relative humidity measurements.

7 TEMP TYPE K

Connect the Keithley Instruments Model 6517-TP type K thermocouple for temperature measurements.

8 POWER LINE INPUT MODULE

Provides connections for power line input and contains the line fuse. If the fuse needs to be replaced, refer
to the procedure in Section 2 of the Model 6517B Reference Manual.

9 IEEE-488 CONNECTOR

Connects the Model 6517B to the IEEE-488 (GPIB) bus. Use shielded IEEE-488 cables.

10 INTERLOCK

Connects the safety interlock to a test fixture using an appropriate cable. Interlock is automatically enabled
when the appropriate interlock cable is connected to the 6517B. Rated at 50-60 Hz, 140 VA max. The
interlock’s CS-1305 connector includes four pins (left to right as viewed from rear of the 6517B):

• Pin 1: Interlock safe

• Pin 2: Ground

• Pin 3: +5 VDC output

• Pin 4: Surface/volume select (low = volume, high = surface)

11 RS-232

DB-9 connector for the RS-232 interface. Use a standard RS-232 cable.

12 DIGITAL I/O

A male DB-9 connector for the four TTL-compatible digital output lines.

13 TRIGGER LINK

An 8-pin micro DIN connector for sending and receiving trigger pulses to and from other instruments.

14 V-SOURCE HI and LO

Safety banana jacks for the voltage source.

15 OPTION SLOT

An option card, such as the Keithley Instruments Model 6521 or Model 6522 scanner card, can be installed
in this slot.

6517B-900-01 Rev. A / Jun 2008 Return to Section T o pics 2-5

Section 2: Getting Started Model 6517B Electrometer User’s Manual

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Power-up

Line power connection

Follow the procedure below to connect the Model 6517B to line power and turn on the instrument.

CAUTION Operating the instrument on an incorrect line voltage may cause damage to

he instrument, possibly voiding the warranty.

t

1. Before plugging in the power cord, make sure that th
(O) position. Be sure that line input voltage is set to the cor rect range for the power supply
being used to power the Model 6517B.

NOTE L

2. Connect the female end of the supplied power cord to the AC receptacle on the rear panel.

WARNING The power cord supplied with the Model 6517B contains a separate ground

ine voltage is pre-set at the factory, but may be reset in the field by adjusting the voltage
selector behind the left ear. To access the voltage selector, first remove the handle then
remove the left mounting ear. The current voltage setting is the marking closest to the
small circle.

nect the other end of the power cord to a grounded AC outlet.

Con

wire for use with grounded outlets. When proper connections are made,
instrument chassis is connected to power line ground through the ground
wire in the power cord. Failure to use a grounded outlet may result in personal
injury or death due to electric shock.

e front panel power switch is in the off

Power-up procedure

1. Turn on the instrument by pressing the front panel power switch to the on (I) position.

2. During power-up, the Model 6517B performs self-tests on its memory elements. If a failure
occurs, the instrument momentarily displays an error message and turns on the ERR
annunciator. If the instrument passes the self-tests, the firmware revision level and bus
interface information are displayed. For complete information on the power-up sequence,
see Section 2 in the Model 6517B Reference Manual.

Display

As shown in the Model 6517B front panel illustration (see Figure 2-1), the front panel has three
lines of display information: the primary display line, the secondary display line, and annunciators.

Primary display line

The top line displays readings along with units. It can also display mea surement type, “hold,” math
operating type, channel number, menu headings, and messages. Status and error messages are
listed in Section 2 of the Reference Manual.

2-6 Return to Section Topics 6517B-900-01 Rev. A / Jun 2008