Keithley 6517A, 6517 User Manual

Model 6517A

Electrometer/High

Resistance Meter

Getting Started Manual

Contains Operating Information

W ARRANTY

Keithley Instruments, Inc. warrants this product to be free from defects in material and workmanship for a period of 1 year from date of shipment.

Keithley Instruments, Inc. warrants the following items for 90 days from the date of shipment: probes, cables, rechargeable batteries, diskettes, and documentation.

During the warranty period, we will, at our option, either repair or replace any product that proves to be defective.

To exercise this warranty, write or call your local Keithley representative, or contact Keithley headquarters in Cleveland, Ohio. You will be given prompt assistance and return instructions. Send the product, transportation prepaid, to the indicated service facility . Repairs will be made and the product returned, transportation prepaid. Repaired or replaced products are warranted for the balance of the original warranty period, or at least 90 days.

LIMIT A TION OF W ARRANTY

This warranty does not apply to defects resulting from product modiﬁcation without Keithley’s express written consent, or misuse of any product or part. This warranty also does not apply to fuses, software, non-rechargeable batteries, damage from battery leakage, or problems arising from normal wear or failure to follow instructions.

THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE. THE REMEDIES PROVIDED HEREIN ARE BUYER’S SOLE AND EXCLUSIVE REMEDIES.

NEITHER KEITHLEY INSTRUMENTS, INC. NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR ANY DIRECT , INDIRECT, SPECIAL, INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE OF ITS INSTRUMENTS AND SOFTWARE EVEN IF KEITHLEY INSTRUMENTS, INC., HAS BEEN ADVISED IN ADVANCE OF THE POSSIBILITY OF SUCH DAMAGES. SUCH EXCLUDED DAMAGES SHALL INCLUDE, BUT ARE NOT LIMITED TO: COSTS OF REMOVAL AND INSTALLATION, LOSSES SUSTAINED AS THE RESULT OF INJURY T O ANY PERSON, OR DAMAGE TO PROPERTY.

Keithley Instruments, Inc. • 28775 Aurora Road • Cleveland, OH 44139 • 440-248-0400 • Fax: 440-248-6168 • http://www.k eithley.com

BELGIUM: Keithley Instruments B.V. Bergensesteenweg 709 • B-1600 Sint-Pieters-Leeuw • 02/363 00 40 • Fax: 02/363 00 64 CHINA: Keithley Instruments China Y uan Chen Xin Building, Room 705 • 12 Yumin Road, Dewai, Madian • Beijing 100029 • 8610-62022886 • Fax: 8610-62022892 FRANCE: Keithley Instruments Sarl B.P. 60 • 3, allée des Garays • 91122 Palaiseau Cédex • 01 64 53 20 20 • Fax: 01 60 11 77 26 GERMANY: Keithley Instruments GmbH Landsberger Strasse 65 • D-82110 Germering • 089/84 93 07-40 • Fax: 089/84 93 07-34 GREAT BRITAIN: Keithley Instruments Ltd The Minster • 58 Portman Road • Reading, Berkshire RG30 1EA • 0118-9 57 56 66 • Fax: 0118-9 59 64 69 INDIA: Keithley Instruments GmbH Flat 2B, WILOCRISSA • 14, Rest House Crescent • Bangalore 560 001 • 91-80-509-1320/21 • Fax: 91-80-509-1322 ITALY: Keithley Instruments s.r.l. Viale S. Gimignano, 38 • 20146 Milano • 02/48 30 30 08 • Fax: 02/48 30 22 74 NETHERLANDS: Keithley Instruments B.V. Postbus 559 • 4200 AN Gorinchem • 0183-635333 • Fax: 0183-630821 SWITZERLAND: Keithley Instruments SA Kriesbachstrasse 4 • 8600 Dübendorf • 01-821 94 44 • Fax: 01-820 30 81 TAIWAN: Keithley Instruments Taiwan 1 Fl. 85 Po Ai Street • Hsinchu, Taiwan, R.O.C. • 886-3572-9077• Fax: 886-3572-9031

10/99

Model 6517A Electrometer/

High Resistance Meter

Getting Started Manual

All references to the Model 6517 also apply to the Model 6517A.

Cleveland, Ohio, U.S.A.

First Printing, July 2000

Document Number: 6517A-903-01 Rev. A

Manual Print History

The print history shown below lists the printing dates of all Revisions and Addenda created for this manual. The Revision Le vel letter increases alphabetically as the manual under goes subsequent updates. Addenda, which are released between Revisions, contain important change information that the user should incorporate immediately into the manual. Addenda are numbered sequentially . When a new Re vision is created, all Addenda associated with the previous Re vision of the manual are incorporated into the new Revision of the manual. Each ne w Revision includes a revised copy of this print history page.

Revision A (Document Number 6517A-903-01)...............................................................July 2000

All Keithley product names are trademarks or registered trademarks of Keithley Instruments, Inc. Other brand names are trademarks or registered trademarks of their respective holders.

Safety Precautions

The following safety precautions should be observed before using this product and any associated instrumentation. Although some instruments and accessories would normally be used with non-hazardous voltages, there are situations where hazardous conditions may be present.

This product is intended for use by qualiﬁed personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury. Read the operating information carefully before using the product.

The types of product users are:

Responsible body is the individual or group responsible for the use and maintenance of equipment, for

ensuring that the equipment is operated within its speciﬁcations and operating limits, and for ensuring that operators are adequately trained.

Operators use the product for its intended function. They must be trained in electrical safety procedures

and proper use of the instrument. They must be protected from electric shock and contact with hazardous live circuits.

Maintenance personnel perform routine procedures on the product to keep it operating, for example,

setting the line voltage or replacing consumable materials. Maintenance procedures are described in the manual. The procedures explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.

Service personnel are trained to work on live circuits, and perform safe installations and repairs of prod-

ucts. Only properly trained service personnel may perform installation and service procedures. Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable con-

nector jacks or test ﬁxtures. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than 30V RMS, 42.4V peak, or 60VDC are present.

safety practice is to expect that hazardous voltage is present in any unknown cir cuit before measuring.

Users of this product must be protected from electric shock at all times. The responsible body must ensure that users are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential human contact. Product users in these circumstances must be trained to protect themselves from the risk of electric shock. If the circuit is capable of operating at or above 1000 volts,

As described in the International Electrotechnical Commission (IEC) Standard IEC 664, digital multimeter measuring circuits (e.g., Keithley Models 175A, 199, 2000, 2001, 2002, and 2010) are Installation Category II. All other instruments’ signal terminals are Installation Category I and must not be connected to mains.

Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance limited sources. NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective devices to limit fault current and voltage to the card.

Before operating an instrument, make sure the line cord is connected to a properly grounded power receptacle. Inspect the connecting cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.

For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under test. ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting cables or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.

no conductive part of the circuit may be exposed.

A good

Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth) ground. Alw ays make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the voltage being measured.

The instrument and accessories must be used in accordance with its speciﬁcations and operating instructions or the safety of the equipment may be impaired.

Do not exceed the maximum signal levels of the instruments and accessories, as deﬁned in the speciﬁcations and operating information, and as shown on the instrument or test ﬁxture panels, or switching card.

When fuses are used in a product, replace with same type and rating for continued protection against ﬁre hazard. Chassis connections must only be used as shield connections for measuring circuits, NOT as safety earth

ground connections. If you are using a test ﬁxture, keep the lid closed while power is applied to the device under test. Safe operation

requires the use of a lid interlock.

If a screw is present, connect it to safety earth ground using the wire recommended in the user documentation.

The symbol on an instrument indicates that the user should refer to the operating instructions located in the manual.

The symbol on an instrument sho ws that it can source or measure 1000 volts or more, including the combined effect of normal and common mode voltages. Use standard safety precautions to av oid personal contact with these voltages.

The

WARNING heading in a manual explains dangers that might result in personal injury or death. Always

read the associated information very carefully before performing the indicated procedure. The

CAUTION heading in a manual explains hazards that could damage the instrument. Such damage may

invalidate the warranty. Instrumentation and accessories shall not be connected to humans. Before performing any maintenance, disconnect the line cord and all test cables. To maintain protection from electric shock and ﬁre, replacement components in mains circuits, including the

power transformer, test leads, and input jacks, must be purchased from Keithley Instruments. Standard fuses, with applicable national safety approvals, may be used if the rating and type are the same. Other components that are not safety related may be purchased from other suppliers as long as they are equivalent to the original component. (Note that selected parts should be purchased only through Keithley Instruments to maintain accuracy and functionality of the product.) If you are unsure about the applicability of a replacement component, call a Keithley Instruments ofﬁce for information.

To clean an instrument, use a damp cloth or mild, water based cleaner. Clean the exterior of the instrument only. Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with no case or chassis (e.g., data acquisition board for installation into a computer) should never require cleaning if handled according to instructions. If the board becomes contaminated and operation is affected, the board should be returned to the factory for proper cleaning/servicing.

Rev. 10/99

T able of Contents

Front Panel Operation

Product overview.................................................................................1-2

Display.................................................................................................1-8

Power-up..............................................................................................1-8

Bench defaults .....................................................................................1-9

Changing functions..............................................................................1-9

Voltage measurements .......................................................................1-10

Current measurements.......................................................................1-12

Resistance measurements ..................................................................1-13

Resistivity measurements ..................................................................1-16

Charge measurements........................................................................1-18

External temperature and relative humidity measurements...............1-20

Measurement Options

Multiple displays .................................................................................2-2

Menus ..................................................................................................2-6

Voltage source....................................................................................2-10

Relative..............................................................................................2-13

Zero check .........................................................................................2-14

Zero correct........................................................................................2-14

Triggering..........................................................................................2-15

Speed..................................................................................................2-18

Resolution..........................................................................................2-19

Filter...................................................................................................2-20

Buffer (Data Store)............................................................................2-23

Math...................................................................................................2-24

Test sequences ...................................................................................2-27

Internal scanning................................................................................2-30

External scanning...............................................................................2-32

Remote Operation

Overview..............................................................................................3-2

Software support..................................................................................3-3

IEEE-488 bus standards.......................................................................3-4

RS-232 standard...................................................................................3-4

IEEE-488 bus connections...................................................................3-4

RS-232 connections.............................................................................3-5

IEEE-488 interface, address and language selection...........................3-6

RS-232 interface selection and conﬁguration......................................3-7

Common commands............................................................................3-8

SCPI commands...................................................................................3-9

SCPI command syntax ......................................................................3-10

SCPI signal oriented commands .......................................................3-13

SCPI subsystem commands ..............................................................3-14

Program examples.............................................................................3-22

Speciﬁcations

Condensed speciﬁcations ....................................................................4-2

Accessories available...........................................................................4-8

Front Panel

Operation

1-2 Front Panel Operation

Product overview

If you have any questions after re viewing this information, please contact your local K eithle y representative, or call one of our Applications Engineers at only). Worldwide phone numbers are listed in the front of this manual.

1-800-348-3735 (U.S. and Canada

The Model 6517A is a 6 surement capabilities:

• DC voltage measurements from 1µV to 210V

• DC current measurements from 10aA to 21mA

• Charge measurements from 10fC to 2.1µC

• Resistance measurements from 10

• Surface resistivity measurements

• Volume resistivity measurements

• External temperature measurements from -25°C to 150°C using the supplied Model 6517-TP thermocouple

• Relative humidity measurements (0 to 100%) using the optional Model 6517-RH probe

½ -digit electrometer/high resistance system with the following mea-

Ω to 210T Ω

Front Panel Operation 1-3

Some additional capabilities of the Model 6517A include:

• Built-in V-Source — The 100V range provides up to 100V at 10mA, while the 1000V range provides up to 1000V at 1mA

• Data storage

• Single button zeroing (REL)

• Built-in math functions

• Filtering; averaging and median

• Built-in test sequences

• Remote operation using the IEEE-488 (GPIB) bus or the RS-232 interface

• Model 617 emulation using the DDC (device-dependent command) programming language mode

• Scan (measure) channels of an external scanner (e.g., Model 706, 7001 or 7002)

• Scan (measure) channels of an internal scanner card (e.g., Model 6521 or 6522) installed in the option slot

The Model 6517A front and rear panel overvie ws (Figures 1 and 2) include important abbre-

viated information that should be reviewed before operating the instrument.

1-4 Front Panel Operation

Figure 1

Model 6517A front panel overview

1 ANNUNCIATORS

ERR Questionable reading REM In remote TALK Addressed to talk LSTN Addressed to listen SRQ Service Request REL Relative reading displayed FILT Digital filter enabled MATH Math calculation enabled AUTO Autoranging enabled ARM Trigger armed; not in idle *(asterisk) Reading being stored

Secondary Display Line

Primary Display Line

EDIT ERR REM TALK LSTN SRQ REAR REL FILT MATH 4W AUTO ARM TRIG SMPL

1234567891012345678910

DISPLAY

POWER

6517 ELECTROMETER/HIGH RESISTANCE METER

VI RQ

RELZ-CHK

FILTER MATH

INFO LOCAL

STORE RECALL

OPTION VOLTAGE SOURCE

CARD OPER

TRIG SEQ

EXIT ENTERCONFIG MENU

RANGE

AUTO

RANGE

VOLTAGE

SOURCE

OPERATE

CAL

52 6 7 3 8 4

2 FUNCTION KEYS Select measurement function; volts (V), amps (I), resistivity (R) or

coulombs (Q)

3 RANGE KEYS

▲ Moves to higher range; increments digit ▼ Moves to lower range; decrements digit

AUTO Enables/disables autorange

Front Panel Operation 1-5

4 HANDLE (not shown) Pull out and rotate to desired position. 5 DISPLAY KEYS PREV/NEXT Scroll through multiple displays of a function 6 OPERATION KEYS

Z-CHK Enables/disables zero check. Enable zero check before changing functions. REL Enables/disables relative reading FILTER Displays digital filter status for present function and toggles filter on/off MATH Displays math calculation and toggles math on/off if configured TRIG Triggers unit SEQ Performs selected test sequence

and Moves cursor among data entry digits, menu selections, and information displays INFO Shows context-sensitive information about the present display LOCAL Cancels remote operation STORE Enables data storage RECALL Displays reading data (reading, number, time). Use PREV/NEXT DISPLAY for

maximum, minimum average, standard deviation. CONFIG Configures functions and operations MENU Saves/restores instrument conditions; sets up communications; performs calibra-

tion and self-tests; defines limits, digital output, and other miscellaneous opera-

tions (see Table 2) EXIT Cancels selection, moves back within menu structure ENTER Holds reading, enters selection, moves down within menu structure

7 VOLTAGE SOURCE KEYS

OPER Toggles V-source between operate and standby ▲ and ▼ Adjusts V-source value

8 VOLTAGE SOURCE OPERATE Indicator on when in operate, off when in standby 9 OPTION CARD KEY Use to program and operate an installed option. Also used to scan

external scanner channels.

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY.

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING.

1-6 Front Panel Operation

Figure 2

Model 6517A rear panel overview

23 5 4 9 8 10

1010V PEAK

SELECTED

LINE VOLTAGE

90-110V

105-125V

OUT

DIGITAL

TRIG LINK

I/O

INTERLOCK

TTL HI

TTL LO

BNC CONNECTIONS

INPUT

250V PEAK

PREAMP OUT

TEMP

TYPE K

250 PEAK

OPTION SLOT

Input High Input Low

Chassis Ground

Unguarded (Guard off)

Input High Guard

Chassis Ground

Guarded (Guard on)

COMMON 2V ANALOG

OUTPUT

HUMIDITY

750V

PEAK

EXT TRIGINMTR COMP

RS232

V SOURCE

6 7 15 16 14 13 12

EXTERNAL TRIGGER INPUT

Trigger Reading

>10µsec

180-220V 210-250V

115V

LINE RATING

50VA MAX

50-60HZ

AC ONLY

(CHANGE IEEE ADDRESS

WITH FRONT PANEL MENU)

IEEE-488

LINE FUSE

SLOWBLOW

1/2A 90-125V

1/4A 180-250V

METER COMPLETE OUTPUT

Reading Complete

>10µsec

TTL HI TTL LO

LO (Chassis)

MADE U.S.A.

Front Panel Operation 1-7

1 INPUT CONNECTOR (see Figure 2)

Unguarded Configuration Disable GUARD for amps, ohms, coulombs and unguarded

volts measurements.

Guarded Configuration Enable GUARD for guarded volts measurements.

2 TEMP TYPE K Connect the Model 6517-TP type K thermocouple for temperature mea-

surements.

3 PREAMP OUT Follows the signal amplitude applied to the INPUT terminal. With

GUARD on, PREAMP OUT is internally connected to the inner shell of the INPUT triax connector to configure the input for guarded volts measurements. Referenced to COMMON. See the Model 6517A User’s Manual for more information.

4 2V OUTPUT Binding post provides a scaled 0 to 2V output that is referenced to COM-

MON. Typically connected to a measuring device such as a chart recorder. See the Model 6517A User’s Manual for more information.

5 COMMON Binding post that is internally connected to INPUT low through a 0.6Ω resis-

tor.

6 CHASSIS GROUND Binding post that connects the chassis to ground through the power

line cord. COMMON can be connected to chassis ground by installing the ground link. For floating measurements, make sure the ground link connection between COMMON and Chassis Ground is open.

7 HUMIDITY Connect the optional Model 6517-RH probe for relative humidity measure-

ments.

8 V-SOURCE HI and LO Banana jacks for the voltage source. 9 LINE VOLTAGE SWITCH Two-position slide switch configures instrument for avail-

able line power voltage. A 90 to 125V line voltage requires the 115V setting, while a 180 to 250V line voltage requires the 230V setting.

10 POWER LINE INPUT Connect to power line (50 or 60Hz) grounded outlet using 3-wire

power cord.

11 LINE FUSE For the 115V line voltage setting, use a ½ A, 250V, slow blow, 5×20mm

fuse. For the 230V setting, use a ¼ A, 250V, slow blow, 5×20mm fuse.

12 IEEE-488 CONNECTOR Connects the instrument to the IEEE-488 (GPIB) bus. Use

shielded IEEE-488 cables.

13 TRIG LINK An 8-pin micro DIN connector for sending and receiving trigger pulses to

and from other instruments.

14 DIGITAL I/O An 8-pin micro DIN connector for the four TTL-compatible digital output

lines.

15 RS-232 DB-9 connector for the RS-232 interface. Use a standard RS-232 cable. 16 INTERLOCK Connects the safety interlock to the Model 8009 Resistivity Test Fixture

or the Model 8002A High Resistance Test Fixture using the appropriate cable.

17 OPTION SLOT An option card, such as the Model 6521 or 6522 scanner card, installs in

this slot.

1-8 Front Panel Operation

Display

As shown in the Model 6517A front panel ov erview (Figure 1), the front panel has three lines

of display information: the primary display line, the secondary display line, and annunciators.

• Primary Display Line: The top line displays readings along with units. It can also display measurement type, “hold”, math operating type, channel number, menu headings and messages. Error and status messages are listed in Section 2 of the User’s Manual.

• Secondary Display Line: The bottom line displays the range, V-Source value, menu items, messages and multiple displays (see Measurement Options section of this manual). Longer text strings are indicated by arrows on either end of the display line. Use the cursor keys ( and ) to display the additional information.

Power-up

WARNING

W arm-up

Before turning on the Model 6517A, make sure it is connected to a grounded power receptacle using the supplied power cord or the equivalent. Failure to properly ground the unit creates a shock hazard that could result in injury or death.

Use the front panel POWER switch to turn power on and off.

During power-up, the Model 6517A performs self-tests on its memory elements. If a failure occurs, the instrument momentarily displays an error message and turns on the ERR annunciator. If the instrument passes the self-tests, the ﬁ rmware re vision lev el, and bus interf ace information are displayed.

For complete information on the power-up sequence, see Section 2 in the User’s Manual.

The instrument is ready for use as soon as the power-up sequence is completed. However, to achieve rated accuracy, allow the instrument to warm up for one hour. If the instrument has been subjected to extreme temperatures, allow additional time to allow internal temperatures to stabilize.

Bench defaults

The Model 6517A can save ten user setups in non-v olatile memory. You can select one of the user setups as the power-on default or ha v e the instrument power up to either of the two factory defaults (optimized for “BENCH” or “GPIB” operation).

Since the basic measurement procedures in this manual assume the BENCH defaults, reset the instrument from the SAVESETUP item of the MAIN MENU by performing the following steps:

1. Press the MENU key to display the main menu:

MAIN MENU

SAVESETUP COMMUNICATION CAL

2. If the SAVESETUP option is not blinking, press the key until it is blinking and then press ENTER to view the setup menu:

SETUP MENU

SAVE RESTORE POWERON RESET

3. Select the RESET option and press ENTER to view the reset menu:

RESET ORIGINAL DFLTS

BENCH GPIB

4. Select the BENCH option and press ENTER. The following message is displayed:

RESETTING INSTRUMENT

Enter to conﬁrm; EXIT to abort

5. Press ENTER to conﬁrm. The display will go to the volts function with auto-range disabled and zero check enabled.

TEST LIMITS STATUS-MSG GENERAL

Front Panel Operation 1-9

Other BENCH default settings for each function include:

• Triggers — Continuous measurements.

• Measurement speed (integration time) — Normal, 1 power line cycle.

• Digital ﬁlter — Enabled, averaging, 10 readings.

• Median ﬁlter — Enabled, rank 1.

• Display resolution — 5

Note: See “Menus” in the Measurement Options section of this manual for details on navi-

gating the Main Menu.

Changing functions

T o avoid erratic operation, always enable zero check (“ZeroCheck” displayed) before selecting one of the other measurement functions (V, I, R or Q). The Z-CHK key controls zero check. See “Zero Check” in Section 2 for more information on the zero check feature.

½ digits.

1-10 Front Panel Operation

V oltage measurements

Assuming “BENCH” reset conditions, the basic procedure is as follows:

1. With zero check enabled (“ZeroCheck” displayed), select the v olts function by pressing V. The Z-CHK key is used to enable/disable zero check.

2. Enable or disable guard as needed. See “Guarding” at the end of this procedure.

NOTE With guard enabled (ON), the “Grd” message is displayed. However, if zero correct

is already enabled (“ZCor” displayed), then “Grd” will not be displayed.

3. To achieve optimum accuracy for low voltage measurements, zero correct the Model 6517A. To do this, use the RANGE and press REL. With zero correct enabled, the REL indicator is on.

▼ key to select the lowest measurement range (2V)

NOTE With zero correct enabled, the “ZCor” message is displayed. However, if guard is al-

WARNING

CAUTION

ready enabled (“Grd” displayed), then “ZCor” will not be displayed.

4. Select a measurement range or use autoranging. A. To automatically select the most sensitive range, enable autorange. The AUTO key

enables and disables autorange. When enabled, the AUTO annunciator is on.

B. For manual ranging, use the RANGE

consistent with the expected voltage.

5. Connect the test cable(s) to the voltage to be measured. Figure 3A sho ws connections for unguarded measurements, and Figure 3B shows connections for guarded measurements.

Hazardous voltage may be present on the inner shield of the triax cable when GUARD is on. A safety shield connected to safety earth ground (as shown in Figure 3B) should be used for voltage measurements at or above 30V.

Do not apply more than 250V peak (DC to 60Hz) to the input or instrument damage may occur.

6. Press Z-CHK to disable zero check and take a reading from the display.

▲ and ▼ keys to select a measurement range

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS

CAUTION:FOR CONTINUED PROTECTION AG

WARNING:NO INTERNAL OPERATOR

Front Panel Operation 1-11

Figure 3

Voltage measurements

A. Unguarded (GUARD off)

B. Guarded (GUARD on)

Measured

Voltage

Shield (Optional)

Safety

Earth

Ground

Measured

Voltage

Guard

6517

237-ALG-2

Red (HI)

Black

Green

Safety Shield

Cable

237-ALG-2

Cable

INPUT

250V PEAK

6517

250V PEAK

INPUT

COMMON

Red (HI)

Black (LO)

Guarding

measurements that use long input cables. In a high impedance circuit, guarding greatly reduces leakage currents. When using long input cables, guarding cancels the effects of cable capacitance that can signiﬁcantly slow down the measurement response time.

tential to the inner shell of the INPUT triax connector. With this conﬁguration, the COMMON banana jack is used for input low . Figure 3 sho ws both the guarded and unguarded conﬁguration of the INPUT connector.

Guarding should be used for high impedance ( ≥ 10

Ω ) voltage measurements and for voltage

When GUARD is enabled, the INPUT triax connector is reconﬁgured to apply the guard po-

Perform the following steps to enable or disable guard:

1. Press CONFIG and then V to display the volts conﬁguration menu.

2. Use the and keys to place the cursor (blinking menu item) on GUARD and press ENTER.

3. Place the cursor on the desired selection (OFF to disable or ON to enable) and press ENTER.

4. Use the EXIT key to back out of the menu.

CAUTION:

FOR CONTIN

CAUTION:

FOR CONTIN

WARNING:

NO IN

WARNING:

NO IN

1-12 Front Panel Operation

Current measurements

Assuming “BENCH” reset conditions, the basic procedure is as follows:

1. With zero check enabled (“ZeroCheck” displayed), select the amps function by pressing I. The Z-CHK key is used to enable/disable zero check.

2. To achieve optimum accuracy for low current measurements, zero correct the Model 6517A. To do this, use the RANGE (20pA) and press REL. W ith zero correct enabled, the REL indicator is on, and the message “ZCor” is displayed.

3. Select a measurement range or use autoranging: A. To automatically select the most sensitive range, enable autorange. The AUTO key

enables and disables autorange. When enabled, the AUTO annunciator is on.

B. For manual ranging, use the RANGE

consistent with the expected current.

4. Connect the instrument to the current to be measured as shown in Figure 4.

▼ key to select the lowest measurement range

▲ and ▼ keys to select a measurement range

CAUTION

5. Press Z-CHK to disable zero check and take a reading from the display.

NOTE To disable zero correct, enable zero check and then press REL.

Figure 4

Current measurements

Do not apply more than 250V peak (DC to 60Hz; 10 seconds per minute maximum on mA ranges), or instrument damage may occur.

6517

237-ALG-2

Black (LO)

Cable

INPUT

250V PEAK

COMMON

Measured

Current

Shield (Recommended

below 1µA)

CAUTION: Maximum Input = 250V peak (DC to 60Hz) ; 10s per minute maximum on mA ranges.

Red (HI)

Input low connected to shield

Resistance measurements

NOTE Accurate high resistance measurements require the use of a low-leakage test ﬁxture,

such as the Model 8002A.

The following procedure requires “BENCH” reset conditions. See “Bench defaults” to reset

the instrument.

1. With zero check enabled (“ZeroCheck” displayed), select the ohms function by pressing R.

2. Select Auto V-Source ohms. In this mode, the V-Source is automatically set to a voltage (nominally 40V or 400V) that optimizes measurement accuracy . See “ Auto V-Source” to select Auto V -Source ohms.

Front Panel Operation 1-13

NOTE “BENCH” reset conditions selects Manual V-Source ohms. In this mode, you must

manually set the V -Source le vel for the measurement. See “Voltage Source” in Section 2 for details on using the V-Source.

WARNING Selecting Auto V-Source ohms may set the V-Source to 400V.

3. Select a measurement range or use autoranging: A. To automatically select the most sensitive range, enable autorange. The AUTO key

enables and disables autorange. When enabled, the AUTO annunciator is on.

B. For manual ranging, use the RANGE ▲ and ▼ keys to select a measurement range

consistent with the expected resistance.

4. Connect the Model 6517A to the test ﬁxture. Generic connections are shown in Figure 5A. Note that this connection scheme requires that ammeter LO be internally connected to V-Source LO. See “Conﬁguring V-Source” in Section 2 to control this internal LO-toLO connection. If using the Model 8002A test ﬁxture, refer to Figure 5B.

NOTE For optimum accuracy, leakage currents in the test ﬁxture can be cancelled by per-

forming REL on the current component of the measurement. To cancel leakage current, perform the procedure in “Amps Rel”.

5. Disable zero check by pressing Z-CHK and press OPER to source voltage to the test ﬁxture DUT.

6. Take a reading from the display.

7. Place the V-Source in standby when ﬁnished by again pressing OPER.

WARNING Place the V -Source in standby before making or breaking connections to the

test ﬁxture or DUT.

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QU

CAUTION:

FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TY

CAUTION:

FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TY

WARNING:

NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSO

WARNING:

NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSO

1-14 Front Panel Operation

Figure 5

Resistance measurements

A. Generic connections

B. Connections using 8002A

test fixture

Red

Measured

Resistance

Black

LO connected to shield

Shield

8002A HIGH RESISTANCE TEST FIXTURE

7078-TRX-3 Triax Cable

Note: Set fixture mode switch to picoammeter operation.

Warning: Connect of fixture to safety earth ground using safety ground wire (supplied with 8002A test fixture).

6517

237-ALG-2

Cable

INPUT

250V PEAK

Note: V-Source low internally connected to electrometer low.

8002-ILC-3 Interlock Cable

250V PEAK

8607 Banana Plug Cables

LO HI

COMMON

PREAMP OUT

250V PEAK

COMMON

PREAMP OUT

250V PEAK

INPUT

V SOURCE

LO HI

V SOURCE

INTERLOCK

TRIGG

LINK

OUT

Model 6517

Auto V -Source

Auto V-Source should be used to achieve optimum accuracy for ohms measurements. With

Auto V-Source selected, the V-Source is automatically set for either 40V or 400V. For the 2MΩ through 200GΩ ranges, the V-Source is set to 40V. For the 2TΩ through 200TΩ ranges, a 400V test voltage is used. With Manual V-Source selected, you can manually set the voltage level of the V -Source.

Perform the following steps to select the V-Source mode for the ohms function:

1. Press CONFIG and then R to display the ohms conﬁguration menu.

2. Use the and keys to place the cursor (blinking menu item) on VSOURCE and press ENTER.

3. Place the cursor on AUTO (Auto V-Source ohms) or on MANUAL (Manual V-Source ohms), and press ENTER.

4. Use the EXIT key to back out of the menu.

Amps Rel

the following steps:

NOTE This procedure assumes that steps 1 through 4 of the Resistance Measurement proce-

Front Panel Operation 1-15

Amps Rel is used to cancel leakage current in a test ﬁxture for ohms measurements. Perform

dure have been performed.

1. With the V-Source in standby, remove the DUT from the test ﬁxture.

2. Select the amps (I) function and disable zero check. Make sure REL is disabled.

3. Place the V-Source in operate by pressing OPER. The VOLTAGE SOURCE OPERATE indicator is on when in operate.

4. Select the lowest possible measurement range to display the leakage current in the test ﬁxture.

5. Enable relative (REL annunciator on) by pressing REL. This zeroes the display, cancelling the leakage current reading.

6. Press OPER to place the V-Source in standby and enable zero check.

7. Perform the following steps to establish the amps Rel value for the ohms function. A. Press CONFIG and then R to display the ohms conﬁguration menu. B. Use the and keys, place the cursor (blinking menu item) on AMPSREL and

press ENTER.

C. Place the cursor on YES and press ENTER to use the amps Rel value for the ohms

measurement.

D. Use the EXIT key to back out of the menu.

8. Re-install the DUT in the test ﬁxture.

9. Select the ohms function (R) and proceed to step 5 of the Resistance Measurement procedure.

1-16 Front Panel Operation

Resistivity measurements

NOTE The following procedur e to measur e resistivity (surface or volume) r equir es the use of

the Keithley Model 8009 Resistivity Test Fixtur e. Refer to the Model 8009 Instruction Manual for details on using the test ﬁxture.

The following procedure requires “BENCH” reset conditions. See “Bench defaults” to reset

the instrument.

1. With zero check enabled (“ZeroCheck” displayed), select the ohms function by pressing R.

2. Select Auto V-Source ohms. In this mode, the V-Source is automatically set to a voltage (nominally 40V or 400V) that optimizes measurement accuracy. See “Auto V-Source” located under “Resistance Measurements” to select Auto V-Source ohms.

NOTE “BENCH” reset conditions selects Manual V-Source ohms. In this mode, you must

manually set the V -Source le vel for the measurement. See “Voltage Source” for details on using the V-Source.

WARNING Selecting Auto V-Source ohms may set the V-Source to 400V.

3. Select a measurement range or use autoranging: A. To automatically select the most sensitive range, enable autorange. The AUTO key

enables and disables autorange. When enabled, the AUTO annunciator is on.

B. For manual ranging, use the RANGE ▲ and ▼ keys to select a measurement range

consistent with the expected resistance.

4. Connect the Model 6517A to the Model 8009 test ﬁxture as shown in Figure 6, and set the switch on the test ﬁxture to the desired measurement type (Surface or Volume).

5. Select the resistivity measurement mode as follows: A. Press the CONFIG and then R to display the ohms conﬁguration menu. B. Use the and keys to place the cursor (blinking menu item) on MEAS-TYPE

and press ENTER.

C. Place the cursor on RESISTIVITY and press ENTER.

NOTE The Model 6517A senses the switch position (surface or volume) on the Model 8009

through the interloc k cable, and automatically conﬁgur es the instrument for that measurement type.

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING.

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY.

Front Panel Operation 1-17

D. Cursor position (SURFACE or V OLUME menu item blinking) indicates the select-

ed measurement type:

• SURFACE — If Surf ace is the selected measurement type, you do not have to proceed any further into the menu structure. Use the EXIT key to e xit from the menu.

• VOLUME — If Volume is the selected measurement type, proceed as follows to specify the thickness of the sample:

a. With the cursor on VOLUME, press ENTER to display the parameters menu

for volume.

b. Place the cursor on THICKNESS and press ENTER. The present thickness pa-

rameter for the sample will be displayed.

c. Use the cursor keys ( and ) and the RANGE ▲ and ▼ keys to specify

the thickness (in millimeters) of the sample, and then press ENTER.

d. Use the EXIT key to back out of the menu structure.

6. Disable zero check by pressing Z-CHK.

7. Press OPER to source voltage to the DUT and, after an appropriate electriﬁcation time, take a reading from the display. Typically, an electriﬁcation time of 60 seconds is used.

8. Place the V-Source in standby when ﬁnished by again pressing OPER.

WARNING Place the V -Source in standby before making or breaking connections to the

test ﬁxture or DUT.

Figure 6

Resistivity measurements

MAX INPUT

LID INTERLOCK

1100V

METER SOURCE

TRIAX

250 MAX

HI-LO

8607 Banana Plug Cable

7078-TRX-3 Triax Cable

PREAMP OUT

250V PEAK

INPUT

250V PEAK

Warning: Connect of fixture to safety earth ground using safety ground wire.

6517-ILC-3 Interlock Cable

LO HI

COMMON

V SOURCE

INTERLOCK

OUT

LINE RATING

90-134VAC 180-250VAC

50, 60, 400HZ

55VA MAX

(CHANGE IEEE ADDRESS

WITH FRONT PANEL MENU)

IEEE-488

LINE FUSE

SLOWBLOW

1/2A, 250V

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,R

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,S

1-18 Front Panel Operation

Charge measurements

Assuming “BENCH” reset conditions, the basic procedure is as follows:

1. With zero check enabled (“ZeroCheck” displayed), select the coulombs function by pressing Q.

2. Select a measurement range or use autoranging: A. To automatically select the most sensitive range, enable autorange. The AUTO key

enables and disables autorange. When enabled, the AUTO annunciator is on.

B. For manual ranging, use the RANGE ▲ and ▼ keys to select a measurement range

consistent with the expected charge reading.

3. Connect the test cable (see Figure 7) to the input of the Model 6517A and, with the input open, disable zero check. If needed, press REL to zero the display.

4. Connect the instrument to the charge to be measured as shown in Figure 7.

CAUTION Do not apply more than 250V peak (DC to 60Hz) or instrument damage

may occur.

5. Take a reading from the display.

NOTE The reading can be r eset to zero by enabling zero check. If you wish to have the r ead-

ing reset to zero when a speciﬁed charge level is reached, enable Auto Discharge as explained in the following paragraph.

Figure 7

Charge measurements

Measured

Charge

Shield (Optional)

Red (HI)

237-ALG-2

Cable

Black (LO)

Input low connected to shield

6517

INPUT

250V PEAK

COMMON

Auto discharge

When enabled, Auto Dischar ge is used to automatically reset the charge reading to zero when the speciﬁed charge level is reached. After the inte grator resets, the charge measurement process simply restarts at zero. Perform the following steps to enable or disable Auto Discharge.

1. Press the CONFIG and then Q to display the coulombs conﬁguration menu.

2. Use the and keys to place the cursor (blinking menu item) on AUTO-DISCHARGE and press ENTER.

3. Perform step A to enable Auto Discharge or perform step B to disable it: A. Enable Auto Dischar ge — Place the cursor on ON nad press ENTER to display the

B. Disable Auto Discharge — Place the cursor on OFF and press ENTER.

4. Use the EXIT key to exit from the menu.

Front Panel Operation 1-19

present discharge level. Use the and keys, and the RANGE ▲ and ▼ keys to set a different discharge level and press ENTER.

CAUTION:

FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING.

CAUTION:

FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING.

WARNING:

NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY.

WARNING:

NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY.

1-20 Front Panel Operation

External temperature and relative humidity measurements

The Model 6517A can make external temperature measurements from -25°C to 150°C using

the Model 6517-TP type K thermocouple (which is a supplied accessory).

The Model 6517A can make relative humidity measurements (0 to 100%) using the Model

6517-RH humidity probe (which is available as an option).

Connections

The Models 6517-TP (thermocouple) and 6517-RH (humidity probe) connect to the rear pan-

el connectors labeled “TEMP TYPE K” and “HUMIDITY” as shown in Figure 8.

NOTE It is recommended that the thermocouple junction of the Model 6517-TP be electri-

cally insulated from ground and voltage potentials. Erroneous reading will result if the thermocouple comes in contact with ground or a voltage potential.

Figure 8

External temperature and humidity

Model 6517-TP

Thermocouple

6517

INPUT

250V PEAK

PREAMP OUT

250V PEAK

COMMON

V SOURCE

Extension Cable (P/N CA-129-1)

LINE RATING

90-134VAC

180-250VAC

50, 60, 400HZ

55VA MAX

Model 6517-RH Humidity Probe

Measurement control

BENCH reset disables temperature and humidity measurements. These measurements can be

enabled from the front panel as follows:

1. Press MENU to display the main menu.

2. Use the and keys to place the cursor (blinking menu item) on GENERAL and press ENTER to display the menu items of the general menu.

3. Place the cursor on A/D-CONTROLS and press ENTER to display the A/D controls menu.

4. Place the cursor on DAT A-STAMP and press ENTER. The present control state for temperature and humidity will be displayed. OFF indicates that the measurement is disabled, while ON indicates that the measurement is enabled.

5. To change the control state for temperature and/or humidity, place the cursor on the appropriate menu item and use the RANGE ▲ and ▼ keys to toggle the control state. W ith the desired states for temperature and humidity displayed (ON or OFF), press ENTER.

6. Use the EXIT key to back out of the menu.

T emperature units

All temperature readings by the Model 6517A can be displayed in °C, °F or K. BENCH reset

selects °C measurement units. Perform the following steps to change units:

Front Panel Operation 1-21

1. Press MENU to display the main menu.

2. Use the and keys to place the cursor (blinking menu item) on GENERAL and press ENTER to display the menu items of the general menu.

3. Place the cursor on DISPLAY and press ENTER to display the SET READING DISPLAY menu.

4. Place the cursor on TEMP-UNITS and press ENTER. The blinking cursor indicates the present temperature units selection.

5. T o change temperature units, place the cursor on the desired selection (°C, K or °F) and press ENTER.

6. Use the EXIT key to back out of the menu.

Display reading options

T emperature and humidity readings are available as multiple (NEXT) displays. Using multiple displays, temperature and humidity readings can accompany each normal A/D measurement, and they can be included as data storage elements for each reading stored in he buf fer . See “Multiple Displays” in Section 2 of this manual.

External temperature and humidity are selected as data store elements from the data store conﬁguration menu. See “Buffer (Data Store)” in Section 2.

1-22 Front Panel Operation

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