Keithley 6517A Datasheet

6517A Electrometer/High Resistance Meter

VOLTS ACCURACY TEMPERATURE

⁄2-DIGIT 18°–28°C 0°–18°C & 28°–50°C

RANGE RESOLUTION ±(%rdg+counts) ±(%rdg+counts)/°C

(1 Year)

COEFFICIENT

2 V 10 µV 0.025 + 4 0.003 + 2

20 V 100 µV 0.025 + 3 0.002 + 1

200 V 1 mV 0.06 + 3 0.002+ 1

When properly zeroed, 51⁄2-digit, 1 PLC (power line cycle), median filter on, digital filter = 10 readings.

NMRR: 60dB on 2V, 20V, >55dB on 200V, at 50Hz or 60Hz ±0.1%. CMRR: >120dB at DC, 50Hz or 60Hz. INPUT IMPEDANCE: >200TΩ in parallel with 20pF, < 2pF guarded

(10MΩ with zero check on).

SMALL SIGNAL BANDWIDTH AT PREAMP OUTPUT: Typically 100kHz

(–3dB).

AMPS ACCURACY TEMPERATURE

⁄2-DIGIT 18°–28°C 0°–18°C & 28°–50°C

RANGE RESOLUTION ±(%rdg+counts) ±(%rdg+counts)/°C

20 pA 100 aA

200 pA 1 fA

(1 Year)

COEFFICIENT

1 + 30 0.1 + 5 1 + 5 0.1 + 1

2 nA 10 fA 0.2 + 30 0.1 + 2

20 nA 100 fA 0.2 + 5 0.03 + 1

200 nA 1 pA 0.2 + 5 0.03 + 1

2 µA 10 pA 0.1 + 10 0.005 + 2

20 µA 100 pA 0.1 + 5 0.005 + 1

200 µA 1 nA 0.1 + 5 0.005 + 1

2 mA 10 nA 0.1 + 10 0.008 + 2

20 mA 100 nA 0.1 + 5 0.008 + 1

When properly zeroed, 51⁄2-digit, 1 PLC (power line cycle), median filter on, digital filter = 10 readings.

aA =10–18A, fA=10–15A.

INPUT BIAS CURRENT: <3fA at T

INPUT BIAS CURRENT NOISE: <750aA p-p (capped input), 0.1Hz to

10Hz bandwidth, damping on. Digital filter = 40 readings.

INPUT VOLTAGE BURDEN at T

20µA ranges. <100µV on 200pA, 200nA, 200µA ranges. <2mV on 2mA range. <4mV on 20mA range.

TEMPERATURE COEFFICIENT OF INPUT VOLTAGE BURDEN:

<10µV/°C on pA, nA, µA ranges.

PREAMP SETTLING TIME (to 10% of final value): 2.5s typical on pA

ranges, damping off, 4s typical on pA ranges damping on, 15ms on nA ranges, 2ms on µA and mA ranges.

NMRR: >95dB on pA, 60dB on nA, µA, and mA ranges at 50Hz or 60Hz

±0.1%.

COULOMBS ACCURACY TEMPERATURE

⁄2-DIGIT 18°–28°C 0°–18°C & 28°–50°C

RANGE RESOLUTION ±(%rdg+counts) ±(%rdg+counts)/°C

. Temperature coefficient = 0.5fA/°C.

CAL

±1°C: <20µV on 20pA, 2nA, 20nA, 2µA,

CAL

1,2

(1 Year)

COEFFICIENT

2 nC 10 fC 0.4 + 5 0.04 + 3

20 nC 100 fC 0.4 + 5 0.04 + 1

200 nC 1 pC 0.4 + 5 0.04 + 1

2 µC 10 pC 0.4 + 5 0.04 + 1

Specifications apply immediately after charge acquisition. Add

_____

(4fA +

where T urement, Q

When properly zeroed, 5½-digit, 1 PLC (power line cycle), median filter on, digital filter = 10 readings.

INPUT BIAS CURRENT: <4fA at T

) T

= period of time in seconds between the coulombs zero and meas-

= average charge measured over TA, and RC = 300,000 typical.

. Temperature coefficient = 0.5fA/°C.

CAL

OHMS (Normal Method)

⁄2-DIGIT (10–100% Range) (10–100% Range)

RANGE LUTION ±(% rdg+counts) ±(% rdg+counts) V SOURCE RANGE

RESO- 18°–28°C (1 Yr.) 0°–18°C & 28°–50°C AUTO AMPS

ACCURACY

TEMPERATURE

COEFFICIENT

2MΩ 10 Ω 0.125 + 1 0.01 + 1 40 V 200 µA

20 MΩ 100 Ω 0.125 + 1 0.01 + 1 40 V 20 µA

200 MΩ 1kΩ 0.15 + 1 0.015 + 1 40 V 2 µA

2GΩ 10 kΩ 0.225 + 1 0.035 + 1 40 V 200 nA

20 GΩ 100 kΩ 0.225 + 1 0.035 + 1 40 V 20 nA

200 GΩ 1MΩ 0.35 + 1 0.110 + 1 40 V 2 nA

2TΩ 10 MΩ 0.35 + 1 0.110 + 1 400 V 2 nA

20 TΩ 100 MΩ 1.025 + 1 0.105 + 1 400 V 200 pA

200 TΩ 1GΩ 1.15 + 1 0.125 + 1 400 V 20 pA

Specifications are for auto V-source ohms, when properly zeroed, 51⁄ on, digital filter = 10 readings. If user selectable voltage is required, use manual mode. Manual mode displays resistance (up to 10 accuracy of V-source plus accuracy of selected Amps range.

PREAMP SETTLING TIME: Add voltage source settling time to preamp settling time in Amps spec-

ification.

Ω) calculated from measured current. Accuracy is equal to

-digit, 1 PLC, median filter

OHMS (Alternating Polarity Method)

The alternating polarity sequence compensates for the background (offset) currents of the materi-

al or device under test. Maximum tolerable offset up to full scale of the current range used.

Using Keithley 8002A or 8009 fixture REPEATABILITY: ∆I

ACCURACY: (V

where: ∆IBGis a measured, typical background current noise from the sample and fixture.

VOLTAGE SOURCE ACCURACY TEMPERATURE

RANGE RESOLUTION ±(% setting + offset) ±(% setting+offset)/°C

100 V 5 mV 0.15 + 10 mV 0.005 + 1 mV

1000 V 50 mV 0.15 +100 mV 0.005 +10 mV

MAXIMUM OUTPUT CURRENT:

±10mA; active current limit at <11.5mA for 100V range. ±1mA; active current limit at <1.15mA for 1000V range.

SETTLING TIME: <8ms to rated accuracy for 100V range.

NOISE: <150µV p-p from 0.1Hz to 10Hz for 100V range.

× R/V

+ 0.1% (1σ) (instrument temperature constant ±1°C).

ALT

Err + I

SRC

is the alternating polarity voltage used.

ALT

Err is the accuracy (in volts) of the voltage source using V

SRC

Err is the accuracy (in amps) of the ammeter using V

MEAS

Err × R)/V

MEAS

⁄2-DIGIT 18°–28°C 0°–18°C & 28°–50°C

ALT

(1 Year) COEFFICIENT

<50ms to rated accuracy for 1000V range.

<1.5mV p-p from 0.1Hz to 10Hz for 1000V range.

as the setting.

ALT

/R as the rdg.

ALT

HW 10/25/02

Rev. C

Page 1 of 2

6517A Electrometer/High Resistance Meter

TEMPERATURE (THERMOCOUPLE)

THERMOCOUPLE 18°–28°C

TYPE RANGE ±(% rdg + °C)

ACCURACY (1 Year)

K –25°C to 150°C ± (0.3% + 1.5°C)

Excluding probe errors, T

HUMIDITY

RANGE 18°–28°C, ±(% rdg + % RH)

± 5°C, 1 PLC integration time.

CAL

ACCURACY (1 Year)

0–100% ± (0.3% +0.5)

Humidity probe accuracy must be added. This is ±3% RH, for Model 6517RH, up to 65°C probe environment, not to exceed 85°C.

IEEE-488 BUS IMPLEMENTATION

MULTILINE COMMANDS: DCL, LLO, SDC, GET, GTL, UNT, UNL,

SPE, SPD.

IMPLEMENTATION: SCPI (IEEE-488.2, SCPI-1993); DDC (IEEE-

488.1).

UNILINE COMMANDS: IFC, REN, EOI, SRQ, ATN. INTERFACE FUNCTIONS: SH1, AH1, T5, TE0, L4, LE0, SR1, RL1, PP0,

DC1, DT1, C0, E1.

PROGRAMMABLE PARAMETERS: Function, Range, Zero Check, Zero

Suppress, EOI (DDC mode only), Trigger, Terminator (DDC mode only), 100-Reading Storage (DDC mode), 15706 Max. Reading Storage (SCPI mode), Calibration (SCPI mode only), V-Source Output, Display Format, SRQ, Status (including V-Source I-Limit), Output Format, Guard.

ADDRESS MODES: TALK ONLY and ADDRESSABLE. TRIGGER TO READING DONE: 150ms typical, with external trigger. RS-232 IMPLEMENTATION: Supports: SCPI 1991.0. Baud Rates: 300,

600, 1200, 2400, 4800, 9600, 19.2k.

PROTOCOLS: Xon/Xoff, 7- or 8-bit ASCII, parity-odd/even/none. CONNECTOR: DB-9 TXD/RXD/GND.

DISPLAY: 61⁄2-digit vacuum fluorescent multiline.

GENERAL

OVERRANGE INDICATION: Display reads “OVERFLOW.” RANGING: Automatic or manual. CONVERSION TIME: Selectable 0.01 PLC to 10 PLC. PROGRAMS: Provide front panel access to IEEE address, choice of

engineering units or scientific notation, and digital calibration.

MAXIMUM INPUT: 250V peak, DC to 60Hz sine wave; 10s per minute

maximum on mA ranges.

MAXIMUM COMMON MODE VOLTAGE (DC to 60Hz sine wave):

Electrometer, 500V peak; V Source, 750V peak.

ISOLATION (Meter COMMON to chassis): Typically 10

with 500pF.

INPUT CONNECTOR: Three lug triaxial on rear panel. 2V ANALOG OUTPUT: 2V for full range input. Non-inverting in Volts

and Ohms modes, inverting when measuring Amps or Coulombs. Output impedance 10kΩ.

PREAMP OUTPUT: Provides a guard output for Volts measurements.

Can be used as an inverting output or with external feedback in Amps and Coulombs modes.

EXTERNAL TRIGGER: TTL compatible External Trigger and Electro-

meter Complete.

GUARD: Switchable voltage guard available. DIGITAL I/O AND TRIGGER LINE: Available, see manual for usage. EMI/RFI: Meets VDE-0871 and FCC Class B limits. EMC: Conforms to European Union Directive 89/336/EEC. SAFETY: Conforms to European Union Directive 73/23/EEC (meets

EN61010-1/IEC 1010).

TEST SEQUENCES: Device-Characterization (Diode, Capacitor,

Cable, Resistor), Resistivity, Surface-Insulation-Resistance, Sweep.

READING STORAGE: 100 readings (DDC mode), 15706 max. readings

(SCPI mode).

READING RATE:

To internal buffer 125 readings/second To IEEE-488 bus 115 readings/second To front panel 17 readings/second Bus transfer 2500 readings/second

0.01 PLC, digital filters off, front panel off, temperature + RH off.

1.00 PLC, digital filters off, temperature + RH off.

Binary transfer mode.

1,3

DIGITAL FILTER: Median and averaging. ENVIRONMENT: Operating: 0°–50°C; relative humidity 70% non-

condensing, up to 35°C. Storage: –25° to +65°C.

WARM-UP: 1 hour to rated accuracy (see manual for recommended

procedure).

POWER: 105–125V or 210–250V (external switch selected), 90–110V

(internal switch selected), 50–60Hz, 50VA.

PHYSICAL: Case Dimensions: 90mm high × 214mm wide × 369mm

deep (3

⁄2in. × 81⁄2in. × 141⁄2in.).

Working Dimensions: From front of case to rear including power

cord and IEEE-488 connector: 15.5 inches.

Net Weight: <4.6 kg (<10.1 lbs). Shipping Weight: <9.5 kg (<21 lbs).

Ω in parallel

HW 10/25/02

Rev. C

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