Keithley Instruments, Inc. warrants this product to be free from defects in material and workmanship for a period of 1 year
from date of shipment.
Keithley Instruments, Inc. warrants the following items for 90 days from the date of shipment: probes, cables, rechargeable
batteries, diskettes, and documentation.
During the warranty period, we will, at our option, either repair or replace any product that proves to be defective.
To exercise this warranty, write or call your local Keithle y representative, or contact Keithle y headquarters in Cleveland, Ohio.
You will be given prompt assistance and return instructions. Send the product, transportation prepaid, to the indicated service
facility . Repairs will be made and the product returned, transportation prepaid. Repaired or replaced products are warranted for
the balance of the original warranty period, or at least 90 days.
LIMIT A TION OF W ARRANTY
This warranty does not apply to defects resulting from product modification without Keithley’s express written consent, or
misuse of any product or part. This warranty also does not apply to fuses, software, non-rechargeable batteries, damage from
battery leakage, or problems arising from normal wear or failure to follow instructions.
THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING ANY
IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE. THE REMEDIES PROVIDED HEREIN ARE BUYER’S SOLE AND EXCLUSIVE REMEDIES.
NEITHER KEITHLEY INSTRUMENTS, INC. NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR ANY DIRECT,
INDIRECT, SPECIAL, INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE OF ITS
INSTRUMENTS AND SOFTWARE EVEN IF KEITHLEY INSTRUMENTS, INC., HAS BEEN ADVISED IN ADVANCE
OF THE POSSIBILITY OF SUCH DAMAGES. SUCH EXCLUDED DAMAGES SHALL INCLUDE, BUT ARE NOT LIMITED TO: COSTS OF REMOVAL AND INSTALLATION, LOSSES SUSTAINED AS THE RESULT OF INJURY TO ANY
PERSON, OR DAMAGE TO PROPERTY.
All rights reserved.
Cleveland, Ohio, U.S.A.
Third Printing, July 2000
Document Number: 6517A-900-01 Rev. C
Manual Print History
The print history shown below lists the printing dates of all Revisions and Addenda created for this manual. The Revision
Level letter increases alphabetically as the manual undergoes subsequent updates. Addenda, which are released between Revisions, contain important change information that the user should incorporate immediately into the manual. Addenda are numbered sequentially. When a new Revision is created, all Addenda associated with the previous Revision of the manual are
incorporated into the new Revision of the manual. Each new Revision includes a revised copy of this print history page.
Revision A (Document Number 6517A-900-01).............................................................................December 1996
Revision B (Document Number 6517A-900-01).............................................................................November 1999
Revision C (Document Number 6517A-900-01).......................................................................................July 2000
All Keithley product names are trademarks or registered trademarks of Keithley Instruments, Inc.
Other brand and product names are trademarks or registered trademarks of their respective holders.
Safety Precautions
The following safety precautions should be observed before using
this product and any associated instrumentation. Although some instruments and accessories would normally be used with non-hazardous voltages, there are situations where hazardous conditions
may be present.
This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury. Read the operating information
carefully before using the product.
The types of product users are:
Responsible body is the individual or group responsible for the use
and maintenance of equipment, for ensuring that the equipment is
operated within its specifications and operating limits, and for ensuring that operators are adequately trained.
Operators use the product for its intended function. They must be
trained in electrical safety procedures and proper use of the instrument. They must be protected from electric shock and contact with
hazardous live circuits.
Maintenance personnel perform routine procedures on the product
to keep it operating, for example, setting the line voltage or replacing consumable materials. Maintenance procedures are described in
the manual. The procedures explicitly state if the operator may perform them. Otherwise, they should be performed only by service
personnel.
Service personnel are trained to work on live circuits, and perform
safe installations and repairs of products. Only properly trained service personnel may perform installation and service procedures.
Users of this product must be protected from electric shock at all
times. The responsible body must ensure that users are prevented
access and/or insulated from every connection point. In some cases,
connections must be exposed to potential human contact. Product
users in these circumstances must be trained to protect themselves
from the risk of electric shock. If the circuit is capable of operating
at or above 1000 volts,
exposed.
As described in the International Electrotechnical Commission
(IEC) Standard IEC 664, digital multimeter measuring circuits
(e.g., Keithley Models 175A, 199, 2000, 2001, 2002, and 2010) are
Installation Category II. All other instruments’ signal terminals are
Installation Category I and must not be connected to mains.
Do not connect switching cards directly to unlimited power circuits.
They are intended to be used with impedance limited sources.
NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective devices to limit fault current and voltage to the card.
Before operating an instrument, make sure the line cord is connected to a properly grounded power receptacle. Inspect the connecting
cables, test leads, and jumpers for possible wear, cracks, or breaks
before each use.
For maximum safety, do not touch the product, test cables, or any
other instruments while power is applied to the circuit under test.
ALWAYS remove power from the entire test system and discharge
any capacitors before: connecting or disconnecting cables or jumpers, installing or removing switching cards, or making internal
changes, such as installing or removing jumpers.
no conductive part of the circuit may be
Exercise extreme caution when a shock hazard is present. Lethal
voltage may be present on cable connector jacks or test fixtures. The
American National Standards Institute (ANSI) states that a shock
hazard exists when voltage levels greater than 30V RMS, 42.4V
peak, or 60VDC are present.
pect that hazardous voltage is present in any unknown circuit before measuring.
A good safety practice is to ex-
Do not touch any object that could provide a current path to the
common side of the circuit under test or power line (earth) ground.
Always make measurements with dry hands while standing on a
dry, insulated surface capable of withstanding the voltage being
measured.
The instrument and accessories must be used in accordance with its
specifications and operating instructions or the safety of the equipment may be impaired.
Do not exceed the maximum signal levels of the instruments and accessories, as defined in the specifications and operating information, and as shown on the instrument or test fixture panels, or
switching card.
When fuses are used in a product, replace with same type and rating
for continued protection against fire hazard.
Chassis connections must only be used as shield connections for
measuring circuits, NOT as safety earth ground connections.
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use of a
lid interlock.
If a screw is present, connect it to safety earth ground using the
wire recommended in the user documentation.
!
The symbol on an instrument indicates that the user should refer to the operating instructions located in the manual.
The symbol on an instrument shows that it can source or measure 1000 volts or more, including the combined effect of normal
and common mode voltages. Use standard safety precautions to
avoid personal contact with these voltages.
The
WARNING heading in a manual explains dangers that might
result in personal injury or death. Alw ays read the associated infor mation very carefully before performing the indicated procedure.
CAUTION heading in a manual explains hazards that could
The
damage the instrument. Such damage may invalidate the warranty.
Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and
all test cables.
To maintain protection from electric shock and fire, replacement
components in mains circuits, including the power transformer, test
leads, and input jacks, must be purchased from Keithley Instruments. Standard fuses, with applicable national safety approvals,
may be used if the rating and type are the same. Other components
that are not safety related may be purchased from other suppliers as
long as they are equivalent to the original component. (Note that selected parts should be purchased only through Keithley Instruments
to maintain accuracy and functionality of the product.) If you are
unsure about the applicability of a replacement component, call a
Keithley Instruments office for information.
To clean an instrument, use a damp cloth or mild, water based
cleaner. Clean the exterior of the instrument only. Do not apply
cleaner directly to the instrument or allow liquids to enter or spill
on the instrument. Products that consist of a circuit board with no
case or chassis (e.g., data acquisition board for installation into a
computer) should never require cleaning if handled according to instructions. If the board becomes contaminated and operation is affected, the board should be returned to the factory for proper
cleaning/servicing.
1.8Options and accessories ...................................................................................................................................... 1-2
2.2.1Line power connections ...............................................................................................................................2-2
2.3.3Status and error messages ............................................................................................................................2-5
2.4.2High-resistance meter connections ............................................................................................................2-11
2.7Resistance and resistivity measurements........................................................................................................... 2-32
2.9.2Setting voltage source value...................................................................................................................... 2-48
2.9.3Voltage and current limit............................................................................................................................2-49
2.9.4Interlock and test fixtures...........................................................................................................................2-50
2.10.12V analog output ....................................................................................................................................... 2-51
2.11.6Non-decade current gains...........................................................................................................................2-57
2.12Range and resolution......................................................................................................................................... 2-57
2.12.1Measurement range ....................................................................................................................................2-57
2.13Zero check, relative, and zero correct ................................................................................................................2-58
2.14.2Configure Test Sequence............................................................................................................................2-68
2.14.3Running the selected test............................................................................................................................2-70
2.16.1Configuring data storage ............................................................................................................................2-96
2.16.2Storing and recalling readings....................................................................................................................2-98
2.17.3Configuring the filters ..............................................................................................................................2-103
2.18.7Selecting and configuring math ...............................................................................................................2-106
3.2.1IEEE-488 bus connections...........................................................................................................................3-2
3.2.2RS-232 serial interface connections.............................................................................................................3-3
3.4GPIB programming language selection.............................................................................................................. 3-4
3.6General bus commands....................................................................................................................................... 3-5
3.6.4GTL (go to local) .........................................................................................................................................3-6
3.6.8SPE, SPD (serial polling).............................................................................................................................3-6
3.7Front panel aspects of IEEE-488 operation ........................................................................................................ 3-7
3.7.1Error and status messages ............................................................................................................................3-7
3.7.2IEEE-488 status indicators...........................................................................................................................3-7
3.8.6Status byte and service request (SRQ) .......................................................................................................3-16
3.9Trigger Model (IEEE-488 operation)................................................................................................................ 3-18
3.11.9*RST — reset the Model 6517A................................................................................................................3-33
3.11.10*SAV — save the current setup in memory...............................................................................................3-33
3.11.11*SRE <NRf> — service request enable.....................................................................................................3-34
SRE? — service request enable query
3.11.12*STB? — status byte query........................................................................................................................3-35
3.27RS-232 Serial Interface ....................................................................................................................................3-157
3.27.4Downloading commands using ProComm...............................................................................................3-158
3.28DDC programming language ...........................................................................................................................3-158
ASpecifications
BInterface Functions Codes
CASCII Character Codes and IEEE-488 Multiline Interface Command Messages
DIEEE-488 Bus Overview
EIEEE-488 Conformance Information
FSCPI Conformance Information
GDevice Dependent Command Summary
vi
List of Illustrations
2Calibration
Figure 2-1Line voltage switch..................................................................................................................................... 2-2
Figure 2-BMeasurement on 20nA range .......................................................................................................................2-5
Figure 2-7Capacitor test circuit without protection................................................................................................... 2-10
Figure 2-8Capacitor test circuit with protection........................................................................................................ 2-10
Figure 2-9Force voltage measure current...................................................................................................................2-11
Figure 2-16Test fixture to source voltage, measure current (resistance measurements)..............................................2-16
Figure 2-17Multi-purpose test fixture...........................................................................................................................2-17
Figure 2-23Unguarded voltage measurements.............................................................................................................2-23
Figure 2-24Guarded voltage measurements.................................................................................................................2-24
Figure 2-25Typical connections for current measurements..........................................................................................2-25
Figure 2-26Connections for guarded, floating current measurements..........................................................................2-26
Figure 2-28Source resistance and capacitance .............................................................................................................2-30
Figure 2-29High impedance current measurements.....................................................................................................2-31
Figure 2-30Floating current measurements..................................................................................................................2-31
Figure 2-31Typical connections for resistance measurements.....................................................................................2-34
Figure 2-32Connections for resistance measurements using Model 8002A test fixture..............................................2-35
Figure 2-40Typical 2V analog output connections.......................................................................................................2-51
Figure 2-41Typical preamp out connections.................................................................................................................2-53
Figure 2-44“Transdiode” logarithmic current configuration........................................................................................2-57
Figure 2-45Non-decade current gains...........................................................................................................................2-58
Figure 2-46Equivalent input impedance with zero check enabled ...............................................................................2-59
Figure 2-47Connections; diode leakage current test.....................................................................................................2-61
Figure 2-48Default measurement points; diode leakage current test............................................................................2-61
Figure 2-59External triggering and asynchronous trigger link input pulse specifications ...........................................2-81
Figure 2-60Meter complete and asynchronous trigger link output pulse specifications...............................................2-82
Figure 2-61DUT test system.........................................................................................................................................2-82
Figure 2-63Trigger link connector................................................................................................................................2-84
Figure 2-64DUT test system.........................................................................................................................................2-85
Figure 2-65Trigger Link connections (asynchronous example #1)..............................................................................2-85
Figure 2-66Operation model for asynchronous trigger link example #1......................................................................2-87
Figure 2-67Connections using Trigger Link adapter....................................................................................................2-88
Figure 2-68DUT test system (asynchronous example #2)............................................................................................2-88
Figure 2-69Trigger Link connections (asynchronous example #2)..............................................................................2-89
Figure 2-70Operation model for asynchronous Trigger Link example #2 ...................................................................2-90
Figure 2-71Semi-synchronous Trigger Link specifications..........................................................................................2-91
Figure 2-73Trigger Link connections (semi-synchronous example)............................................................................2-92
Figure 2-74Operation model for semi-synchronous Trigger Link example.................................................................2-93
Figure 2-75Digital filter; averaging and advanced filter types...................................................................................2-102
Figure 2-76Digital filter; moving and repeating filter modes.....................................................................................2-103
Figure 2-77Limits bar graph example.........................................................................................................................2-119
Figure 2-78Using limit test to sort 100k Ω resistors....................................................................................................2-120
Figure 3-13Status byte and service request (SRQ).......................................................................................................3-16
Figure 3-14Trigger Model (IEEE-488 bus operation)..................................................................................................3-19
Figure 3-16Standard Event Status Register..................................................................................................................3-29
Figure 3-19ASCII data format......................................................................................................................................3-76
Figure 3-20IEEE754 single precision data format (32 data bits) .................................................................................3-76
Figure 3-21IEEE754 double precision data format (64 data bits)................................................................................3-77
Figure D-1IEEE-488 bus configuration....................................................................................................................... D-2
Table 2-15CONFIGURE V-Source menu structure................................................................................................... 2-46
Table 2-16Typical 2V analog output values .............................................................................................................. 2-51
Table 2-17Full-range PREAMP OUT values..............................................................................................................2-52
Table 2-18Integration times set-by-resolution (all functions).....................................................................................2-58
This section contains general information about the Model
6517A Electrometer/High Resistance Meter. It is arranged in
the following manner:
1.2 Features
1.3 Warranty information
1.4 Manual addenda
1.5 Safety symbols and terms
1.6 Specifications
1.7 Inspection
1.8 Options and accessories
1.2Features
Some important Model 6517A features include:
• Full range of functions — Exceptional sensitivity and
accuracy for voltage, current, charge, and V/I resistance
and resistivity (surface and volume) measurements.With the Models 6517-RH and 6517-TP, relative
humidity and external temperature can be measured.
• Voltage source — The internal 1000V V-Source can be
configured with the ammeter to make V/I resistance/resistivity measurements, and to force voltage, measure
current.
• T wo-line display — Readings and front panel messages
are provided on the top line (primary) 20-character, and
bottom line (secondary) 32-character alphanumeric display. The multiple display pro vides supplemental infor-
mation about the reading, such as min/max readings,
bar graphs for the reading, and time and date.
• Reading and setup storage — Readings and setup data
can be stored and recalled from memory. Over 15,000
readings can be stored in the buffer , and up to 10 instrument setups can be stored in memory.
• T est sequences — Built-in tests for the follo wing applications: device characterization, resistivity, high resistance/resistivity (alternating polarity method), surface
insulation resistance, and voltage sweeps.
• GPIB interface — Accommodates two separate languages for IEEE-488 operation. The SCPI language
conforms to the IEEE-488.2 and SCPI standards. The
617 emulation mode (DDC language) allows the instrument to be controlled using device-dependent command programming.
• RS-232 interface — The instrument can instead be controlled over this serial interface using SCPI commands.
• T alk-only mode — From the front panel, you can set the
instrument to send readings to a printer. Talk-only is
available over both the GPIB and RS-232 interfaces.
• Scanning — The Model 6517A has an option slot that
will accommodate an optional scanner card (Models
6521 and 6522). The instrument can also be configured
to operate with an external switching system (i.e., Model 7001 or 7002) to scan external channels.
• Trigger link — This is a new trigger concept that provides more versatile and precise external triggering. It
is in addition to the standard Trigger In/Meter Complete
Out BNC external triggering techniques.
• Digital calibration — The instrument may be digitally
calibrated from either the front panel, or over the RS232 interface or GPIB bus (SCPI language).
1-1
General Information
1.3W arranty information
Warranty information is located on the inside front cover of
this instruction manual. Should your Model 6517A require
warranty service, contact the Keithley representative or authorized repair facility in your area for further information.
When returning the instrument for repair, be sure to fill out
and include the service form at the back of this manual to
provide the repair facility with the necessary information.
1.4Manual addenda
Any improvements or changes concerning the instrument or
manual will be explained in an addendum included with the
manual. Be sure to note these changes and incorporate them
into the manual.
1.5Safety symbols and terms
The following symbols and terms may be found on an instrument or used in this manual.
!
The symbol on an instrument indicates that the user
should refer to the operating instructions located in the manual.
The symbol on an instrument shows that high voltage
may be present on the terminal(s). Use standard safety precautions to avoid personal contact with these voltages.
The symbol indicates that the test fixture (i.e. Model
8009) must be connected to a safety earth ground using #18
AWG wire or larger.
The WARNING heading used in this manual explains dangers that might result in personal injury or death. Always
read the associated information very carefully before performing the indicated procedure.
The CAUTION heading used in this manual explains hazards that could damage the instrument. Such damage may invalidate the warranty.
1.6Specifications
1.7Inspection
The Model 6517A was carefully inspected, both electrically
and mechanically before shipment. After unpacking all items
from the shipping carton, check for any obvious signs of
physical damage that may have occurred during transit.
(Note: There may be a protective film over the display lens,
which can be removed.) Report any damage to the shipping
agent immediately. Save the original packing carton for possible future reshipment.
If an additional manual is required; order the appropriate
manual package:
• Model 6517A User’s Manual — Keithley P/N
6517A-900-00
• Model 6517 Getting Started Manual — Keithley
P/N 6517-903-00
• Model 6517 Service Manual — Keithley P/N
6517-905-00
1.8Options and accessories
The following options and accessories are available from
Keithley for use with the Model 6517A:
Model 237-ALG-2 Triax Cable: This is a 2-meter (6.6 ft.)
low noise triax cable terminated with a 3-slot male triax connector on one end and 3 alligator clips on the other.
Model 237-BNC-TRX Adapter: This is a male BNC to 3-
lug female triax adapter (guard disconnected). It is used to
terminate a triax cable with a BNC plug. Suitable for use with
the Model 6517A V-Source in high voltage applications.
Model 237-TRX-T Adapter: This is a 3-slot male to dual 3-
lug female triax tee adapter for use with 7078-TRX triax cables. Suitable for use with the Model 6517A V-Source in
high voltage applications.
Model 7078-TRX-BNC Adapter: This is a 3-slot male triax
to female BNC adapter. This adapter lets you connect a BNC
cable to the triax input of the Model 6517A. Suitable for use
with the Model 6517A in high voltage applications.
Model 237-TRX-TBC Connector: This is a 3-lug female
triax bulkhead connector with cap for assembly of custom
panels and interface connections. Suitable for use with the
Model 6517A V-Source in high voltage applications.
Full Model 6517A specifications are found in Appendix A.
1-2
Model 1050 Padded Carrying Case: A carrying case for a
Model 6517A. Includes handles and shoulder strap.
General Information
Model 4288-1 Single Fixed Rack Mount Kit: Mounts a sin-
gle Model 6517A in a standard 19-inch rack.
Model 4288-2 Side-by-side Rack Mount Kit: Mounts two
instruments (Models 182, 428, 486, 487, 2001, 2002, 6517,
6517A, 7001) side-by-side in a standard 19-inch rack.
Model 4288-3 Side-by-side Rack Mount Kit: Mounts a
Model 6517A and a Model 199 side-by-side in a standard
19-inch rack.
Model 4288-4 Side-by-side Rack Mount Kit: Mounts a
Model 6517A and a 5
220, 224, 230, 263, 595, 614, 617, 705, 740, 775, etc.) sideby-side in a standard 19-inch rack.
Model 5156 Electrometer Calibration Standard Set: This
calibration fixture contains standardized resistors and capacitors needed to calibrate the Model 6517A.
Model 6517-ILC-3 Safety Interlock Cable: Designed to
connect the lid interlock circuit of the Model 8009 test fixture to the interlock circuit of the Model 6517A.
Model 6517-RH Humidity Probe with Cable: This sensor
allows the Model 6517A to make relativ e humidity measurements (0 to 100%). Also included is an e xtension cable (part
number CA-129-1).
¼
-inch instrument (Models 195A, 196,
both ends with 3-slot male triax connectors. The -3 model is
3 ft. (0.9m) in length, the -10 model is 10 ft. (3m) in length,
and the -20 model is 20 ft. (6m) in length.
Model 7078-TRX-TBC Connector: This is a 3-lug female
triax bulkhead connector with cap for assembly of custom
panels and interface connections. Suitable for use with the
Model 6517A V-Source in high voltage applications.
Model 8002-ILC-3 Safety Interlock Cable: Designed to
connect the lid interlock circuit of the Model 8002A test fixture to the interlock circuit of the Model 6517A.
Model 8002A High Resistance T est Fixture: Used with the
Model 6517A to make accurate high resistance measurements of DUT. Designed to minimize leakage currents that
can corrupt the integrity of the measurement.
Model 8009 Resistivity Test Fixture: This is a guarded test
fixture for measuring volume and surface resistivities. It can
accommodate sheet samples 64 to 102mm (2-1/2 to 4 in.) in
diameter and up to 3.175mm (1/8 in.) thick.
Models 8501-1 and 8501-2 Trigger Link Cables: Connect
the Model 6517A to other instruments with Trigger Link
connectors (e.g., Model 7001 Switch System). The Model
8501-1 is one meter long; the Model 8501-2 is two meters
long.
Model 6517-TP Thermocouple with Leads: This type K
thermocouple sensor allows the Model 6517A to make exter nal temperature measurements from -190°C to 1350°C.
Model 6521 Low Current Scanner Card: This 10-channel
low current scanner card is terminated with BNC connectors
and plugs into the option slot of the Model 6517A.
Model 6522 Low Current/Low Voltage Scanner Card:
This 10-channel low current/low voltage scanner card is terminated with triax connectors and plugs into the option slot
of the Model 6517A.
Model 6524 Hi-R Software Package: Designed to aid in
making more repeatable high resistance/resistivity measurements. Four windows-driven programs increase measurement precision, ease download and analysis of Hi-R data,
and allow cross-correlation of environmental factors.
Models 7007-1 and 7007-2 Shielded IEEE-488 Cables:
Connect the Model 6517A to the IEEE-488 bus using shielded cables and connectors to reduce electromagnetic interference (EMI). The Model 7007-1 is one meter long; the Model
7007-2 is two meters long.
Models 7078-TRX-3, 7078-TRX-10 and 7078-TRX-20
Triax Cables: These are low noise triax cables terminated at
Model 8502 Trigger Link Adapter: Allows you to connect
the Trigger Link of the Model 6517A to instruments that use
the standard BNC (In/Out) external triggering technique.
Model 8530 IEEE-488 to Centronics Printer Adapter Cable: Translates the IEEE-488 connector pinout and signal
level to a Centronics termination. This permits a standard
Centronics parallel printer to be connected to a Model
6517A in TALK-ONLY mode.
Model 8606 High Performance Probe Tip Kit: Consists of
two spade lugs, two alligator clips, and two spring hook test
probes. (The spade lugs and alligator clips are rated at 30V
RMS, 42.4V peak; the test probes are rated at 1000V.) These
components are designed to be used with high performance
test leads terminated with banana plugs, such as the Model
8607 High Performance Banana Cables.
Model 8607 High Performance Banana Cables: Consists
of two high voltage (1000V) banana cables. The cables are
terminated with banana plugs that have retractable sheaths.
CS-751 Barrel Adapter: This is a barrel adapter that allows
you to connect two triax cables together. Both ends of the
adapter are terminated with 3-lug female triax connectors.
1-3
2
Front Panel Operation
2.1Introduction
This section contains detailed information for front panel operation of the Model 6517A. It is organized as follows:
2.2Power-up — Covers information on connecting the in-
strument to line power, w arm-up period, default conditions, and the power-up sequence.
2.3Display — Covers display formats, and messages as-
sociated with operation.
2.4Connections — Electrometer input and voltage source
output: Provides basic information on the connections
used for typical electrometer and high-resistance meter
measurements. Summarizes guarding and shielding
techniques, and explains the potential hazards presented by floating circuits. Recommends cables and test
fixtures that can be used, and provides guidelines for
building a test fixture.
2.5Voltage measurements — Provides the basic proce-
dure to measure voltage. Includes configuration information and measurement considerations for the volts
function.
2.6Current measurements — Provides the basic proce-
dure to measure current. Includes configuration information and measurement considerations for the amps
function.
2.7Resistance measurements — Provides the basic pro-
cedures to perform resistance and resistivity measurements. Includes configuration information, the
multiple display and measurement considerations for
the ohms function.
2.8Charge measurements — Provides the basic proce-
dure to measure charge. Includes configuration infor-
mation, multiple displays and measurement considerations for the coulombs function.
2.10 Analog outputs — Provides information needed to
use the 2V analog output and the preamp output.
2.11 Using external feedback — Explains how to use ex-
ternal feedback to extend the capabilities of the Model
6517A.
2.12 Range and resolution — Covers both manual and
auto ranging and resolution.
2.13 Zero check and relative — Provides details on the
zero check and relative (REL) features.
2.14 Test sequences — Covers the test sequences that can
be configured and run.
2.15 Triggering — Details types of trigger modes as well as
trigger sources that can be used.
2.16 Buffer — Covers use of the reading buffer including
programming the buffer size, recalling data and time
stamp.
2.17 Filter — Covers the use of the digital filter types that
can be used to reduce reading noise.
2.18 Math — Describes the calculations that can be per-
formed on readings.
2.19 Menu — Covers selections controlled from the main
menu, such as saving instrument setups, communication configuration (GPIB and RS-232), and limits.
2.20 Scanning — Summarizes internal scanning using one
of the optional scanner cards, and explains how to use
the Model 6517A in an external scanning system.
2-1
Front Panel Operation
2.21 Other measurement considerations — Covers the
measurement considerations that generally apply to all
measurements.
2.22 Relative humidity and external temperature readings — Explains how to include these readings with
each volts, amps, ohms and coulombs measurement.
2.2Power-up
2.2.1Line power connections
Follow the procedure below to connect the Model 6517A to
line power and turn on the instrument.
1. First check to see that the line voltage selection switch
(see Figure 2-1) on the rear panel is in the correct position for the operating voltage in your area. The 115V position is for line power in a voltage range from 90V to
125V. The 230V position is for line power in a voltage
range from 180V to 250V. The instrument will operate
at a line frequency of 50Hz, 60Hz or 400Hz.
CAUTION
Operating the instrument on an incorrect line voltage may cause damage to
the instrument, possibly voiding the
warranty.
proper connections are made, instrument chassis is connected to power line
ground through the ground wire in the
power cord. Failure to use a grounded
outlet may result in personal injury or
death due to electric shock.
2.2.2Line fuse replacement
A rear panel fuse located below the AC receptacle protects
the power line input of the instrument. If the fuse needs to be
replaced, perform the following steps:
WARNING
Make sure the instrument is disconnected from the line and other equipment
before replacing the line fuse.
1. With the power off, place the end of a flat-blade screwdriver into the rear panel LINE FUSE holder. Push in
gently and rotate the fuse carrier one-quarter turn counterclockwise. Release pressure on the holder and its internal spring will push the fuse carrier out of the holder.
2. Remove the fuse and replace it with the type recommended in Table 2-1.
SELECTED
LINE VOLTAGE
90-110V
105-125V
180-220V
210-250V
115V
Figure 2-1
Line voltage switch
2. Before plugging in the power cord, make sure the front
panel power switch is in the off (0) position.
3. Connect the female end of the supplied power cord to
the AC receptacle on the rear panel. Connect the other
end of the power cord to a grounded AC outlet.
WARNING
The power cord supplied with the Model
6517A contains a separate ground wire
for use with grounded outlets. When
CAUTION
Do not use a fuse with a higher current
rating than specified, or instrument
damage may occur. If the instrument repeatedly blows fuses, locate and correct
the cause of the trouble before replacing
the fuse.
Install the new fuse and fuse carrier into the holder by reversing the above procedure.
Table 2-1
Line fuse selection
Keithley
Line voltageFuse type
90-125V
180-250V
1/2A, 250V, Slo Blo
1/4A, 250V, Slo Blo
part no.
FU-71
FU-96-4
2-2
2.2.3Power-up sequence
On power-up, the Model 6517A performs self-tests on its
EPROM and RAM, and checksum tests on data stored in
non-volatile memory . (See Table 2-2.) If a failure is detected,
the instrument momentarily displays an error message and
the ERR annunciator turns on. (Messages are listed in Table
2-3.)
NOTE
If a problem develops while the instrument is under warranty, return it to Keithley Instruments, Inc. for repair.
If the instrument passes the self-tests, the firmware revision
levels and the communications status are displayed. An example of this display is shown as follows:
Model 6517A
Rev. B12 A02 IEEE Addr=27 SCPI
The firmware revision levels (left to right) are for the main
microcontroller and display microcontroller. The revision
level number may be different in your particular unit. The
IEEE-488 address is its default value of 27 and the SCPI language is selected. DDC will be displayed if the DDC language is selected instead. If the RS-232 interface is selected,
the message “RS-232 enabled” is displayed instead of the
IEEE-488 address.
Next, if the unit is configured to display the calibration due
date at power-up, the unit shows the following:
Model 6517A
Calibration due: mmm/dd/yy
where “mmm” is the month abbreviation, “dd” is the day,
and “yy” is the year. If no calibration date is set, the display
shows that it is due now. (See the Model 6517 Service Manual to set the calibration due date and paragraph 2.19.3 of this
manual to set the display option.)
After the power-up sequence, the instrument begins its normal display with zero check enabled (“Zero Check” displayed).
The cal dates are set to factory
default values, but they are not
stored into EEPROM.
To do this, perform a comprehensive calibration.
Cal constants are set to factory
default values, but they are not
stored into EEPROM. To do
this, perform a comprehensive
calibration.
Power-on defaults are reset to
factory defaults (bench) and
stored into EEPROM.
GPIB address is reset to factory
default (27) and stored into
EEPROM.
The reading buffer controls are
reset to factory defaults, but
they are not stored into
NVRAM. To do this, store readings in the buffer.
Instrument setup is reset to
bench defaults are stored in
EEPROM.
Power-up error messages
Error messages that may be displayed during power-up are
summarized in Table 2-3. These are shown when one of the
checksum tests of Table 2-2 fails.
2.2.4Power-on default conditions
Power-on default conditions are those conditions the instrument assumes when it is first turned on. You can change these
power-on default conditions (e xcept the primary address) by
using the save setup feature that is av ailable with the MENU
key, as described in paragraph 2.19.1.
2-3
Front Panel Operation
µ
M Ω G Ω T Ω P Ω
Ω
Ω
Ω
Ω
Ω
e6 Ω e9 Ω
Depending on the installed memory option, either one, five,
or ten user-defined setups can be stored, any one of which
could be selected as the power-on default.
Table 2-30 in paragraph 2.19.1 lists the default conditions
that are set at the factory to optimize bench and GPIB (IEEE-
488) operation.
2.2.5Warm-up period
The Model 6517A can be used within one minute after it is
turned on. However, the instrument should be turned on and
allowed to warm up for at least one hour before use to
achieve rated accuracy.
2.2.6IEEE-488 primary address
The IEEE-488 primary address of the instrument must be the
same as the primary address you specify in the controller's
programming language. The default primary address of the
instrument is 27, but you can set the address to any value
from 0 to 30 by using the MENU key. Refer to paragraph
2.19.2 for step-by-step instructions on setting the primary
address.
Press the INFO key to view context-sensitive information
from most of the displays. An arrow (
tom line indicates that there is more information. Use the
cursor keys (
and
) to view the complete line. To exit
an INFO display, just press INFO, ENTER, EXIT or a function key.
or
) on the bot-
2.3Display
The display of the Model 6517A is primarily used to display
readings along with the units and type of measurement.
When not displaying readings, it is used for informational
messages, such as menu headings and selections. At the top
of the display are annunciators to indicate various states of
operation.
2.3.1Exponent mode (Engineering or Scientific)
Readings on the display can be expressed in engineering
units or in scientific notation as shown in Table 2-4. In the
scientific mode, the exponent can be fixed to a specified value, or it can be floating. In the floating mode, the instrument
will automatically select the exponent value.
All exponent mode selections are performed from the DISPLAY option of the GENERAL menu, which is part of the
MAIN MENU (see paragraph 2.19.7 for details).
Range messages
The following display messages may occur when making
measurements:
OVERFLOW — This message is displayed when the inte-
grated (average) input signal level (voltage, current, or
charge) exceeds 105% of full scale for the selected measurement range. For example, on the 20nA measurement range,
the OVERFLOW message occurs when the integrated input
level exceeds 21nA.
An OVERFLOW condition can be resolved by selecting a
higher measurement range, using AUTO range, or reducing
the magnitude of the input signal.
The OVERFLOW message will NOT occur during resistance or resistivity measurements.
UNDERFLOW — This condition is similar to OVER-
FLOW but pertains to resistance and resistivity measurements. An ohms measurement is performed by sourcing
voltage and measuring current. An ohms measurement that is
too low causes the current to exceed full scale. Thus, the
message UNDERFLOW is used to indicate that the measured resistance or resistivity is lower than the lo wer limit of
the selected range.
2-4
Front Panel Operation
The UNDERFLOW condition can usually be resolved by selecting a lower ohms range or by using AUTO range. Paragraph 2.7 (Ohms Ranges) covers range limits and explains
how to select the optimum range for ohms measurements.
OUT OF LIMITS — This message indicates that a momen-
tary or transient out-of-range condition appeared at the input,
even though the integrated (or a verage) signal was within the
full scale range of the A/D con v erter. It usually indicates that
there is too much noise on the input signal for a valid measurement.
Generally, the OUT OF LIMITS condition can be eliminated
by better shielding of the signal source or by using other
noise reduction methods. Another solution is to select the
next higher range (or lower R range) to keep the transients
less than full scale.
The 2nA, 20nA, and 200nA ranges (and the R measurements
that use these current ranges) are particularly susceptible to
this condition because of the combination of speed and sensitivity.
A sine wave signal riding on a dc bias level is used to demonstrate an OUT OF LIMIT reading. Figure 2-A shows a
sine wave riding on a 20nA bias level. If this signal is measured on the 200nA range at normal speed, it would simply
read 20nA (which is the dc average). If howe v er, you use the
20nA range, the positive peaks of the sine wave will be
clipped as shown in Figure 2-B. Clipping occurs at 110% of
full range (22nA on the 20nA range). Because of clipping,
the measurement of the input signal is significantly less than
20nA. To avoid these bad readings, the Model 6517A displays the OUT OF LIMITS message instead of the inaccurate reading.
30
25
20
nA
15
10
Figure 2-A
Input signal
30
25
22
20
nA
15
10
DCA Reading on 200 nA range = 20nA
5
0
0
5
time16.67ms
DCA Reading = <20nA
Note that the positive peaks of the input signal (which exceed
full scale) will not cause an OVERFLOW condition on the
20nA range since the average reading over the 16.67ms integration period is less than full scale.
The A/D hardware limit detection circuit can be disabled,
which in turn disables the OUT OF LIMITS message. However , the presence of OUT OF LIMIT readings may result in
measurements that are slightly, severely, or totally inaccurate. Paragraph 2.19.7 explains how to disable the OUT OF
LIMIT message.
When both OVERFLOW and OUT OF LIMITS conditions
occur, the OVERFLOW message will be displayed.
0
0
time16.67ms
Figure 2-B
Measurement on 20nA range
2.3.3Status and error messages
During Model 6517A operation and programming, you will
encounter a number of front panel messages. T ypical messages are either of status or error variety, as listed in Table 2-5.
The most recent status or error messages can be momentarily
displayed. Just enter a configuration menu or the main menu,
and press the PREV range key. (The display is blank if no
message is queued.)
“Reading A vailable”
“Voltmeter Complete”
“Buffer A v ailable”
“Buffer half full”
“Buffer full”
“Buffer Overflow”
“Buffer Pretriggered”
“Reading out of Limit”
“V-Source compliance detected”
“Buffer & Format element mismatch”
“Buffer Sizing error; set to MAX”
“Buffer Sizing error; set to MIN”
Each measurement function has its own set of “multiple displays” shown in the bottom line of the front panel display.
The PREVious and NEXT DISPLAY keys scroll through the
selections for the present function.
The multiple displays can show a reading in a different form,
or give additional information about the reading, for example:
• T op line shows a reading; bottom line sho ws a zero-center bar graph with adjustable limits.
To scroll through the multiple displays available for each
measurement functions, repeatedly press and release the
NEXT DISPLAY key. The same action with the PREVious
DISPLAY key does a reverse scroll through the displays. To
return to the default reading display, just press and hold either key.
Multiple displays that are specific to a particular function or
operation are discussed later in this section, such as the calculations display in math (see Table 2-6 for paragraph references). Some of the displays that are common to all
measurement functions are discussed here.
Time/Day/Date
This display provides the time, day of week, and the date.
The time, date and format (12-hour or 24-hour) are set from
the CLOCK option of the GENERAL MENU (which is selected from the MAIN MENU). See paragraph 2.19.7
(CLOCK) for details.
Table 2-6
Multiple (Next) displays by function
Paragraph
FunctionNext display
AllTime, day and date
Bar graph
Zero-centered bar graph
Maximum and minimum values
Relative and actual values
Calculated and actual values
Limits bar graph
Relative humidity and external
temperature stamp
RSource (V) and measure (I) values 2.7.4
reference
2.3.4
2.3.4
2.3.4
2.3.4
2.13.3
2.18.7
2.19.5
2.3.4
2-7
Front Panel Operation
Bar graph
The “normal” bar graph, with a zero at the left end, is a
graphical representation of a reading as a portion of a range.
(See Figure 2-2.) The vertical lines displayed along the bar
designate 0%, 25%, 50%, 75%, and 100% of full scale. Each
full segment of the bar represents approximately 4% of the
range limit.
The right endpoint of the bar graph is plus full scale of the
present range for positive readings, and minus full scale for
negative readings. When the 100% line changes to an arrow,
the reading exceeds the present range.
-11.9685
0
25% of
full range
V
-20V
Full
Range
50% of
full range
75% of full range
Figure 2-2
Bar graph (zero-at-left) multiple display
Zero-centered bar graph
wise, values greater than 1% (such as 1.67%) are shown
rounded to the nearest integer percent.
Perform the following to view or change the plus and minus
percentage of range:
1. From a measurement function, press CONFIG and then
NEXT or PREV DISPLAY . The following is displayed:
ZERO-BARGRAPH+/-50.00%
2. Change the percentage by using the cursor keys and the
RANGE ▲ and ▼ keys to enter a numeric value (0.01 -
99.99%). Press ENTER when done.
Maximum and minimum
The maximum and minimum multiple display shows the
maximum and minimum readings since the display was entered. (See Figure 2-4.) The maximum and minimum values
are reset by the following:
• Pressing the present function key.
• Leaving the display by changing function or entering a
menu.
The resolution, units, and prefix on the bottom line are the
same as shown for top line reading.
The zero-centered bar graph is a graphical representation of
a reading with plus and minus limits. (See Figure 2-3.) The
limits are expressed in a user-selectable percentage of range.
The vertical lines displayed along the bar designate the plus
and minus limits, zero, and halfway to either limit. There are
ten full segments between zero and each end, so each full
segment represents 10% of the limit. When a line at the limit
changes to an arrow, the reading exceeds the programmed
range.
-05.9577
50%
-50% of range
-25% of range
V
+50V
+50% of range
25% of range
0%
Figure 2-3
Zero-centered bar graph multiple display
The plus and minus percentage of range that is programmed
(0.01 - 99.99%) applies to all functions. Because of rounding, values greater than 99.5% are shown as 100% and, like-
-15.8286
Max = -05.7460
Maximum
value
V
Min = -15.8286
Minimum
value
Figure 2-4
Maximum and minimum multiple display
Relative humidity and external temperature
This display provides the relative humidity and the external
temperature readings. Note that the appropriate sensors have
to be connected to instrument, and they have to be enabled in
order to get valid readings. (See paragraph 2.22 for details.)
2.3.5Navigating menus
There are basically two types of menu structures; the Main
Menu and the Configure menus. The Main Menu accesses
items for which there are no dedicated keys, and Configure
menus are used to configure measurement functions and other instrument operations.
2-8
Front Panel Operation
Use the following rules to navigate through the menu structure:
1. The top level of the Main Menu is accessed by pressing
the MENU key. A Configuration menu is accessed by
pressing CONFIG and then the desired function (V, I,
etc.) or operation (TRIG, STORE, etc.).
2. A menu item is selected by placing the cursor on it and
pressing ENTER. Cursor position is denoted by the
blinking menu item or parameter. The cursor keys (
and ) control cursor position.
3. A displayed arrow ( and ) on the bottom line indicates that there are one or more additional items (messages) to select from. Use the appropriate cursor key to
display them.
4. A numeric parameter is keyed in by placing the cursor
on the digit to be changed and using the RANGE ▲ or
▼ key to increment or decrement the digit.
5. A change is only executed when ENTER is pressed. Entering an invalid parameter generates an error and the
entry is ignored.
6. The EXIT key is used to back out of the menu structure.
Any change that is not entered is cancelled when EXIT
is pressed. The EXIT key has additional actions and are
summarized in Table 2-7.
7. The VOL T A GE SOURCE ▼ and ▲ keys are used adjust
the V-Source value. The V-Source is decremented or incremented by placing the cursor on the desired digit and
pressing ▼ or ▲. With the cursor on the polarity sign,
pressing ▼ or ▲ toggles the polarity. Pressing CONFIG
and then ▼ or ▲ displays the CONFIGURE VSOURCE menu.
2.4Connections — electrometer , highresistance meter , and V -source
ing. The concepts of guarding and floating circuits are
introduced here.
NOTE
Detailed connection schemes are included
with the measurement procedures (see
paragraphs 2.5.1, 2.6.1, 2.7.1 and 2.8.1).
2.4.1Electrometer input connector
The rear panel triax INPUT connector is a 3-lug female triax
connector that will mate to a cable terminated with a 3-slot
male triax connector.
Input configurations — As shown in Figure 2-5, the input
connector can be configured in two ways. With GUARD off
(Figure 2-5A), input low is connected to the inner shell of the
connector. This configuration is used for current, resistance,
coulombs and unguarded voltage measurements.
NOTE
Where possible, make input low connections directly to the INPUT connector low
terminal instead of using COMMON to
avoid internal voltage drops that may affect measurement accuracy.
With GU ARD on (Figure 2-5B), guard is connected to the inner shell of the triax connector. Input low is accessed via the
COMMON binding post through an internal 1Ω resistor.
This configuration is used for guarded voltage measurements
only. Note that guard can only be enabled (on) for the volts
function. For ohms, amps and coulombs, guard is always disabled (off). For voltage measurements, guard is enabled or
disabled from the Configure Voltage menu structure as explained in paragraph 2.5.2.
The following information provides basic information on
electrometer, high-resistance meter, and V-source connections. Also co vered is the use of lo w-noise cables and shield-
Table 2-7
EXIT key actions
ConditionEXIT key action
Temporary message displayed
(e.g., TRIGGERS HAL TED)
INFO message displayed
Reading display hold
Scanning
Data storage
Cancels display of temporary message.
Cancels INFO message, returns to menu or normal reading display.
Cancels reading display hold, resumes normal reading display.
Disables scanning. Also stops data storage if enabled.
Stops data storage. Temporary message STORAGE INTERRUPTED
is displayed.
The INPUT triax connector is also used for the Force Voltage
Measure Current configuration. This configuration utilizes
the V-source to make resistance measurements (see paragraph 2.4.2) and current measurements (see paragraph
2.4.3).
2-9
Front Panel Operation
INPUT
250V PEAK
Volts, Amps, Ohms & Coulombs
A. Unguarded (GUARD off)
Input High
Guard
Chassis
INPUT
250V PEAK
Volts only
Ground
B. Guarded (GUARD on)
Figure 2-5
Input connector configurations
Input High
Input Low
Chassis Ground
COMMON
1Ω
Input Low
Input High
Input Low
Chassis Ground
* Max Input Signal - 250VRMS, DC to 60Hz sine wave
(10 seconds maximum in mA ranges).
Figure 2-6
Maximum input levels
S
V
Max Input Signal *
500V Peak
Capacitor
Under Test
500V Peak
6517A
A
Ammeter
Maximum input levels — The maximum input levels to the
Model 6517A are summarized in Figure 2-6.
WARNING
The maximum common-mode input
voltage (the voltage between input low
and chassis ground) is 500V peak. Exceeding this value may create a shock
hazard.
CAUTION
Connecting PREAMP OUTPUT, COMMON, or 2V ANALOG OUTPUT to
earth while floating the input may damage the instrument.
Input protection — The Model 6517A incorporates protec-
tion circuitry against nominal overload conditions. Howe ver ,
a high voltage (>250V) and resultant current surge could
damage the input circuitry. A typical test circuit to measure
the leakage current of a capacitor is shown in Figure 2-7.
When Switch S is closed, an initial surge of charging current
will flow and the high voltage will be seen across the input
of the Model 6517A.
Figure 2-7
Capacitor test circuit without protection
Adding a resistor and two diodes (1N3595) as shown in Figure 2-8 will provide considerable extra protection. The resistor must be large enough to limit the current through the
diodes to 10mA or less. It must also be large enough to withstand the supply voltage. The protection circuit should be enclosed in a light-tight conductive shield.
This same protection circuit is useful when measuring the insulation resistance of films or high-voltage cables. Without
such added protection, a pinhole or other defect could cause
an arc, destroying the electrometer input.
Protection Circuit
S
Capacitor
Under Test
V
R
D1D2
HI
A
LO
6517A
Ammeter
Figure 2-8
Capacitor test circuit with protection
2-10
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