Keithley 6517A User Manual

Model 6517A

Electrometer/High Resistance Meter Getting Started Manual

A GREATER MEASURE OF CONFIDENCE

WARRANTY

Keithley Instruments, Inc. warrants this product to be free from defects in material and workmanship for a period of 1 year from date of shipment.

Keithley Instruments, Inc. warrants the following items for 90 days from the date of shipment: probes, cables, rechargeable batteries, diskettes, and documentation.

During the warranty period, we will, at our option, either repair or replace any product that proves to be defective.

To exercise this warranty, write or call your local Keithley representative, or contact Keithley headquarters in Cleveland, Ohio. You will be given prompt assistance and return instructions. Send the product, transportation prepaid, to the indicated service facility. Repairs will be made and the product returned, transportation prepaid. Repaired or replaced products are warranted for the balance of the original warranty period, or at least 90 days.

LIMITATION OF WARRANTY

This warranty does not apply to defects resulting from product modiﬁcation without Keithley’s express written consent, or misuse of any product or part. This warranty also does not apply to fuses, software, non-rechargeable batteries, damage from battery leakage, or problems arising from normal wear or failure to follow instructions.

THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE. THE REMEDIES PROVIDED HEREIN ARE BUYER’S SOLE AND EXCLUSIVE REMEDIES.

NEITHER KEITHLEY INSTRUMENTS, INC. NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR ANY DIRECT, INDIRECT, SPECIAL, INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE OF ITS INSTRUMENTS AND SOFTWARE EVEN IF KEITHLEY INSTRUMENTS, INC., HAS BEEN ADVISED IN ADVANCE OF THE POSSIBILITY OF SUCH DAMAGES. SUCH EXCLUDED DAMAGES SHALL INCLUDE, BUT ARE NOT LIMITED TO: COSTS OF REMOVAL AND INSTALLATION, LOSSES SUSTAINED AS THE RESULT OF INJURY TO ANY PERSON, OR DAMAGE TO PROPERTY.

Keithley Instruments, Inc.

Sales Ofﬁces: BELGIUM:

CHINA:

Yuan Chen Xin Building, Room 705 • 12 Yumin Road, Dewai, Madian • Beijing 100029 • 8610-82251886 • Fax: 8610-82251892

FINLAND: FRANCE: GERMANY: GREAT BRITAIN: INDIA:

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ITALY:

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JAPAN:

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NETHERLANDS: SWEDEN: TAIWAN:

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1-888-KEITHLEY (534-8453) • www.keithley.com

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13F-3, NO. 6, Lane 99, Pu-Ding Road, Hsinchu, Taiwan, ROC. • 886-3-572-9077• Fax: 886-3-572-9031

5/03

Model 6517A Electrometer/High Resistance Meter

Getting Started Manual

Cleveland, Ohio, U.S.A.

Second Printing, June 2003

Document Number: 6517A-903-01 Rev. B

Manual Print History

The print history shown below lists the printing dates of all Revisions and Addenda created for this manual. The Revision Level letter increases alphabetically as the manual undergoes subsequent updates. Addenda, which are released between Revisions, contain important change information that the user should incorporate immediately into the manual. Addenda are numbered sequentially. When a new Revision is created, all Addenda associated with the previous Revision of the manual are incorporated into the new Revision of the manual. Each new Revision includes a revised copy of this print history page.

Revision A (Document Number 6517A-903-01) .................................................... September 2000

Revision B (Document Number 6517A-903-01) ..............................................................June 2003

All Keithley product names are trademarks or registered trademarks of Keithley Instruments, Inc. Other brand names are trademarks or registered trademarks of their respective holders.

afety Precautions

The following safety precautions should be observed before using this product and any associated instrumentation. Although some instruments and accessories would normally be used with non-hazardous voltages, there are situations where hazardous conditions may be present.

This product is intended for use by qualiﬁed personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the product. Refer to the manual for complete product speciﬁcations.

If the product is used in a manner not speciﬁed, the protection provided by the product may be impaired.

The types of product users are:

Responsible body

ment is operated within its speciﬁcations and operating limits, and for ensuring that operators are adequately trained.

Operators

instrument. They must be protected from electric shock and contact with hazardous live circuits.

Maintenance personnel

voltage or replacing consumable materials. Maintenance procedures are described in the manual. The procedures explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.

Service personnel

trained service personnel may perform installation and service procedures.

Keithley products are designed for use with electrical signals that are rated Measurement Category I and Measurement Category II, as described in the International Electrotechnical Commission (IEC) Standard IEC 60664. Most measurement, control, and data I/O signals are Measurement Category I and must not be directly connected to mains voltage or to voltage sources with high transient over-voltages. Measurement Category II connections require protection for high transient over-voltages often associated with local AC mains connections. Assume all measurement, control, and data I/O connections are for connection to Category I sources unless otherwise marked or described in the Manual.

Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test ﬁxtures. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than 30V RMS,

42.4V peak, or 60VDC are present.

circuit before measuring.

Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential human contact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If the circuit is capable of operating at or above 1000 volts,

Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance limited sources. NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective devices to limit fault current and voltage to the card.

Before operating an instrument, make sure the line cord is connected to a properly grounded power receptacle. Inspect the connecting cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.

When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input power disconnect device must be provided, in close proximity to the equipment and within easy reach of the operator.

For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under test. ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting ca-

is the individual or group responsible for the use and maintenance of equipment, for ensuring that the equip-

use the product for its intended function. They must be trained in electrical safety procedures and proper use of the

perform routine procedures on the product to keep it operating properly, for example, setting the line

are trained to work on live circuits, and perform safe installations and repairs of products. Only properly

A good safety practice is to expect that hazardous voltage is present in any unknown

no conductive part of the circuit may be exposed.

5/03

bles or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.

Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth) ground. Always make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the voltage being measured.

The instrument and accessories must be used in accordance with its speciﬁcations and operating instructions or the safety of the equipment may be impaired.

Do not exceed the maximum signal levels of the instruments and accessories, as deﬁned in the speciﬁcations and operating information, and as shown on the instrument or test ﬁxture panels, or switching card.

When fuses are used in a product, replace with same type and rating for continued protection against ﬁre hazard.

Chassis connections must only be used as shield connections for measuring circuits, NOT as safety earth ground connections.

If you are using a test ﬁxture, keep the lid closed while power is applied to the device under test. Safe operation requires the use of a lid interlock.

If a screw is present, connect it to safety earth ground using the wire recommended in the user documentation.

The symbol on an instrument indicates that the user should refer to the operating instructions located in the manual.

The symbol on an instrument shows that it can source or measure 1000 volts or more, including the combined effect of normal and common mode voltages. Use standard safety precautions to avoid personal contact with these voltages.

The symbol indicates a connection terminal to the equipment frame.

The

WARNING

information very carefully before performing the indicated procedure.

The

CAUTION

ranty.

Instrumentation and accessories shall not be connected to humans.

Before performing any maintenance, disconnect the line cord and all test cables.

To maintain protection from electric shock and ﬁre, replacement components in mains circuits, including the power transformer, test leads, and input jacks, must be purchased from Keithley Instruments. Standard fuses, with applicable national safety approvals, may be used if the rating and type are the same. Other components that are not safety related may be purchased from other suppliers as long as they are equivalent to the original component. (Note that selected parts should be purchased only through Keithley Instruments to maintain accuracy and functionality of the product.) If you are unsure about the applicability of a replacement component, call a Keithley Instruments ofﬁce for information.

To clean an instrument, use a damp cloth or mild, water based cleaner. Clean the exterior of the instrument only. Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with no case or chassis (e.g., data acquisition board for installation into a computer) should never require cleaning if handled according to instructions. If the board becomes contaminated and operation is affected, the board should be returned to the factory for proper cleaning/servicing.

heading in a manual explains dangers that might result in personal injury or death. Always read the associated

heading in a manual explains hazards that could damage the instrument. Such damage may invalidate the war-

1 Front Panel Operation

Product overview ........................................................................ 1-2

Display ....................................................................................... 1-8

Power-up .................................................................................... 1-8

Warm-up ............................................................................. 1-8

Bench defaults ............................................................................ 1-9

Changing functions .................................................................... 1-9

Voltage measurements .............................................................. 1-10

Guarding ........................................................................... 1-12

Current measurements .............................................................. 1-12

Resistance measurements ......................................................... 1-14

Auto V-Source ................................................................... 1-16

Amps Rel .......................................................................... 1-16

Resistivity measurements ......................................................... 1-17

Charge measurements .............................................................. 1-20

Auto discharge .................................................................. 1-21

External temperature and relative humidity measurements ..... 1-22

Connections ....................................................................... 1-22

Measurement control ........................................................ 1-23

Temperature units .............................................................. 1-23

Display reading options .................................................... 1-24

2 Measurement Options

Multiple displays ........................................................................ 2-2

Menus ......................................................................................... 2-5

Navigating menus ............................................................... 2-6

Voltage source ............................................................................ 2-8

Connections ......................................................................... 2-8

Basic operation .................................................................... 2-9

Conﬁguring V-Source ....................................................... 2-10

Relative ..................................................................................... 2-10

Conﬁguring rel .................................................................. 2-10

Zero check ................................................................................ 2-11

Zero correct .............................................................................. 2-11

Triggering ................................................................................. 2-12

Idle .................................................................................... 2-13

Control sources ................................................................. 2-14

Device action ..................................................................... 2-14

Output trigger .................................................................... 2-14

Counters (Advanced triggering) ........................................ 2-14

Bench default trigger model setup .................................... 2-15

Speed ........................................................................................ 2-15

Conﬁguring speed ............................................................. 2-15

Resolution ................................................................................. 2-16

Conﬁgure resolution .......................................................... 2-16

Filter ......................................................................................... 2-16

Filter types ......................................................................... 2-16

Filter modes ....................................................................... 2-17

Median ﬁlter ...................................................................... 2-17

Conﬁguring ﬁlters ............................................................. 2-18

Buffer (Data Store) ................................................................... 2-19

Storing readings ................................................................. 2-19

Math .......................................................................................... 2-20

Selecting and conﬁguring math ......................................... 2-21

Enabling math ................................................................... 2-22

Additional math operations ............................................... 2-22

Test sequences .......................................................................... 2-23

Selecting and conﬁguring a test sequence ......................... 2-23

Connections ....................................................................... 2-24

Running a test .................................................................... 2-25

Internal scanning ...................................................................... 2-26

Conﬁgure internal scanner ................................................ 2-26

Perform the scan ................................................................ 2-27

Close/Open channels ......................................................... 2-28

External scanning ..................................................................... 2-28

Trigger connections ........................................................... 2-28

Conﬁgure external channels .............................................. 2-29

Perform the scan ................................................................ 2-30

3 Remote Operation

Overview .................................................................................... 3-2

Software support ......................................................................... 3-2

TestPoint application software ............................................ 3-2

Demonstration/Startup programs ........................................ 3-2

LabView driver .................................................................... 3-2

IEEE-488 bus standards .............................................................. 3-3

RS-232 standard ......................................................................... 3-3

IEEE-488 bus connections .......................................................... 3-3

RS-232 connections .................................................................... 3-4

IEEE-488 interface, address and language selection .................. 3-4

RS-232 interface selection and conﬁguration ............................. 3-5

Common commands ................................................................... 3-6

SCPI commands ......................................................................... 3-7

SCPI command syntax ............................................................... 3-8

Tree structure ....................................................................... 3-8

Long and short form commands .......................................... 3-9

Query commands ................................................................. 3-9

Default nodes ....................................................................... 3-9

Command syntax ............................................................... 3-10

SCPI signal oriented commands .............................................. 3-10

:FETCh? ............................................................................ 3-10

:MEASure[:<function>]? .................................................. 3-10

SCPI subsystem commands ..................................................... 3-11

Defaults ............................................................................. 3-11

Fresh readings ................................................................... 3-11

Function conﬁguration ...................................................... 3-12

V-Source ............................................................................ 3-14

Data store (Buffer) ............................................................ 3-14

Open/close channels and scan ........................................... 3-14

Trigger model .................................................................... 3-15

Test sequences ................................................................... 3-16

Status register .................................................................... 3-17

Program examples .................................................................... 3-18

Changing function and range ............................................ 3-18

One-shot triggering ........................................................... 3-19

Continuous triggering #1 .................................................. 3-21

Continuous triggering #2 .................................................. 3-22

Generating SRQ on buffer full .......................................... 3-23

Storing readings in buffer ................................................. 3-24

Taking readings with the scanner card .............................. 3-26

Test Sequence — staircase sweep ..................................... 3-28

4 Specs and Accessories

List of Tables

2 Measurement Options

Table 2-1 Multiple displays by function ................................................. 2-2

Table 2-2 Summary of main menu.......................................................... 2-5

Table 2-3 Conﬁguration settings for instrument operations.................... 2-6

Table 2-4 Conﬁguration settings for each measurement function .......... 2-6

Table 2-5 Menu summary ....................................................................... 2-7

List of Illustrations

1 Front Panel Operation

Figure 1-1 Model 6517A front panel overview ....................................... 1-4

Figure 1-2 Model 6517A rear panel overview ......................................... 1-6

Figure 1-3 Voltage measurements ......................................................... 1-11

Figure 1-4 Current measurements ......................................................... 1-13

Figure 1-5 Resistance measurements .................................................... 1-15

Figure 1-6 Resistivity measurements .................................................... 1-19

Figure 1-7 Charge measurements .......................................................... 1-20

Figure 1-8 External temperature and humidity ...................................... 1-22

2 Measurement Options

Figure 2-1 Independent V-Source connections ........................................ 2-8

Figure 2-2 FVMI connections ................................................................. 2-9

Figure 2-3 Basic trigger model (simpliﬁed) .......................................... 2-12

Figure 2-4 Advanced trigger model (simpliﬁed) ................................... 2-13

Figure 2-5 Filter response/noise window .............................................. 2-17

Figure 2-6 Combining math calculations .............................................. 2-23

Figure 2-7 Typical FVMI connections .................................................. 2-25

Figure 2-8 Trigger connections using trigger link ................................. 2-29

Figure 2-9 Trigger connections using conventional external triggering 2-29

3 Remote Operation

Figure 3-1 IEEE-488 connections ........................................................... 3-3

Figure 3-2 Hierarchy of the example SENSe1 commands ...................... 3-8

Front Panel Operation

1-2 Front Panel Operation Model 6517A Getting Started Manual

Product overview

If you have any questions after reviewing this information, please contact your local Keithley representative, or call one of our Applications Engineers at 1-800-348-3735 (U.S. and Canada only). Worldwide phone numbers are listed in the front of this manual.

The Model 6517A is a 6½-digit electrometer/high resistance system with the following measurement capabilities:

• DC voltage measurements from 1µV to 210V

• DC current measurements from 10aA to 21mA

• Charge measurements from 10fC to 2.1µC

• Resistance measurements from 10Ω to 210T

• Surface resistivity measurements

• Volume resistivity measurements

• External temperature measurements from -25°C to 150°C using the supplied Model 6517-TP thermocouple

• Relative humidity measurements (0 to 100%) using the optional Model 6517-RH probe

Ω

Model 6517A Getting Started Manual Front Panel Operation 1-3

Some additional capabilities of the Model 6517A include:

• Built-in V-Source — The 100V range provides up to 100V at 10mA, while the 1000V range provides up to 1000V at 1mA

• Data storage

• Single button zeroing (REL)

• Built-in math functions

• Filtering; averaging and median

• Built-in test sequences

• Remote operation using the IEEE-488 (GPIB) bus or the RS-232 interface

• Model 617 emulation using the DDC (device-dependent command) programming language mode

• Scan (measure) channels of an external scanner (e.g., Model 706, 7001, or 7002)

• Scan (measure) channels of an internal scanner card (e.g., Model 6521 or 6522) installed in the option slot

The Model 6517A front and rear panel overviews (Figure 1-1 and Figure 1-2) include important abbreviated information that should be reviewed before operating the instrument.

1-4 Front Panel Operation Model 6517A Getting Started Manual

Figure 1-1

Model 6517A front panel overview

Secondary Display Line

Primary Display Line

EDIT ERR REM TALK LSTN SRQ REAR REL FILT MATH 4W AUTO ARM TRIG SMPL

1234567891012345678910

DISPLAY

POWER

6517A ELECTROMETER/HIGH RESISTANCE METER

VI RQ

RELZ-CHK

FILTER MATH

INFO LOCAL

STORE RECALL

OPTION VOLTAGE SOURCE

CARD OPER

TRIG SEQ

EXIT ENTERCONFIG MENU

RANGE

AUTO

RANGE

VOLTAGE

SOURCE

OPERATE

CAL

52 6 7 3 8 4

1 ANNUNCIATORS

ERR Questionable reading REM In remote TALK Addressed to talk LSTN Addressed to listen SRQ Service Request REL Relative reading displayed FILT Digital ﬁlter enabled MATH Math calculation enabled AUTO Autoranging enabled ARM Trigger armed; not in idle *(asterisk) Reading being stored

2 FUNCTION KEYS

Select measurement function; volts (V), amps (I), resistivity (R) or coulombs (Q)

3 RANGE KEYS

 

AUTO Enables/disables autorange

4 HANDLE

Moves to higher range; increments digit Moves to lower range; decrements digit

(not shown) Pull out and rotate to desired position.

5 DISPLAY KEYS

PREV/NEXT Scroll through multiple displays of a function

Model 6517A Getting Started Manual Front Panel Operation 1-5

6 OPERATION KEYS

Z-CHK Enables/disables zero check. Enable zero check before changing functions. REL Enables/disables relative reading FILTER Displays digital ﬁlter status for present function and toggles ﬁlter on/off MATH Displays math calculation and toggles math on/off if conﬁgured TRIG Triggers unit SEQ Performs selected test sequence

and





INFO Shows context-sensitive information about the present display LOCAL Cancels remote operation STORE Enables data storage RECALL Displays reading data (reading, number, time). Use PREV/NEXT DISPLAY for maxi-

CONFIG Conﬁgures functions and operations MENU Saves/restores instrument conditions; sets up communications; performs calibration

EXIT Cancels selection, moves back within menu structure ENTER Holds reading, enters selection, moves down within menu structure

Moves cursor among data entry digits, menu selections, and information displays

mum, minimum average, standard deviation.

and self-tests; deﬁnes limits, digital output, and other miscellaneous operations (see Table 2-2)

7 VOLTAGE SOURCE KEYS

OPER Toggles V-source between operate and standby

and





8 VOLTAGE SOURCE OPERATE

Adjusts V-source value

Indicator on when in operate, off when in standby

9 OPTION CARD KEY

Use to program and operate an installed option. Also used to scan external scanner channels.

1-6 Front Panel Operation Model 6517A Getting Started Manual

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY.

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING.

Figure 1-2

Model 6517A rear panel overview

23 5 4 9 8 10

1010V PEAK

INPUT

250V PEAK

PREAMP OUT

TEMP

TYPE K

250 PEAK

OPTION SLOT

COMMON 2V ANALOG

OUTPUT

HUMIDITY

V SOURCE

750V

PEAK

EXT TRIGINMTR COMP

RS232

OUT

INTERLOCK

DIGITAL

I/O

SELECTED

LINE VOLTAGE

90-110V

105-125V

TRIG LINK

180-220V 210-250V

115V

LINE RATING

50-60HZ

50VA MAX

AC ONLY

IEEE-488

(CHANGE IEEE ADDRESS

WITH FRONT PANEL MENU)

LINE FUSE

SLOWBLOW

1/2A 90-125V

1/4A 180-250V

MADE

U.S.A.

Input High Input Low

Chassis Ground

Unguarded (Guard off)

Input High Guard

Chassis Ground

Guarded (Guard on)

6 7 15 16 14 13 12

EXTERNAL TRIGGER INPUT

Trigger Reading

TTL HI

>10µsec

TTL LO

BNC CONNECTIONS

METER COMPLETE OUTPUT

Reading Complete

TTL HI

>10µsec

TTL LO

LO (Chassis)

1 INPUT CONNECTOR (see Figure 1-2)

Unguarded Conﬁguration Disable GUARD for amps, ohms, coulombs and unguarded volts

Guarded Conﬁguration Enable GUARD for guarded volts measurements.

2 TEMP TYPE K

Connect the Model 6517-TP type K thermocouple for temperature

measurements.

3 PREAMP OUT

Follows the signal amplitude applied to the INPUT terminal. With GUARD on, PREAMP OUT is internally connected to the inner shell of the INPUT triax connector to conﬁgure the input for guarded volts measurements. Referenced to COMMON. See the Model 6517A User’s Manual for more information.

Model 6517A Getting Started Manual Front Panel Operation 1-7

4 2V ANALOG OUTPUT

to COMMON. Typically connected to a measuring device such as a chart recorder. See the Model 6517A User’s Manual for more information.

5 COMMON

resistor.

6 CHASSIS GROUND

line cord. COMMON can be connected to chassis ground by installing the ground link. For ﬂoating measurements, make sure the ground link connection between COMMON and Chassis Ground is open.

7 HUMIDITY

measurements.

8 V-SOURCE HI and LO

9 LINE VOLTAGE SWITCH

line power voltage. A 90 to 125V line voltage requires the 115V setting, while a 180 to 250V line voltage requires the 230V setting.

10 POWER LINE INPUT

power cord.

11 LINE FUSE

For the 230V setting, use a ¼A, 250V, slow blow, 5×20mm fuse.

12 IEEE-488 CONNECTOR

shielded IEEE-488 cables.

Binding post that is internally connected to INPUT low through a 0.6Ω

Connect the optional Model 6517-RH probe for relative humidity

For the 115V line voltage setting, use a ½A, 250V, slow blow, 5×20mm fuse.

Binding post provides a scaled 0 to 2V output that is referenced

Binding post that connects the chassis to ground through the power

Banana jacks for the voltage source.

Two-position slide switch conﬁgures instrument for available

Connect to power line (50 or 60Hz) grounded outlet using 3-wire

Connects the instrument to the IEEE-488 (GPIB) bus. Use

13 TRIG LINK

and from other instruments.

14 DIGITAL I/O

lines.

15 RS-232

16 INTERLOCK

the Model 8002A High Resistance Test Fixture using the appropriate cable.

17 OPTION SLOT

in this slot.

An 8-pin micro DIN connector for sending and receiving trigger pulses to

An 8-pin micro DIN connector for the four TTL-compatible digital output

DB-9 connector for the RS-232 interface. Use a standard RS-232 cable.

Connects the safety interlock to the Model 8009 Resistivity Test Fixture or

An option card, such as the Model 6521 or 6522 scanner card, installs

1-8 Front Panel Operation Model 6517A Getting Started Manual

Display

As shown in the Model 6517A front panel overview (Figure 1-1), the front panel has three lines of display information: the primary display line, the secondary display line, and annunciators.

• Primary Display Line — The top line displays readings along with units. It can also display measurement type, “hold”, math operating type, channel number, menu headings and messages. Error and status messages are listed in Section 2 of the User’s Manual.

• Secondary Display Line — The bottom line displays the range, V-Source value, menu items, messages and multiple displays (see Measurement Options section of this manual). Longer text strings are indicated by arrows on either end of the dis-



play line. Use the cursor keys (

and ) to display the additional information.

Power-up

WARNING

Use the front panel POWER switch to turn power on and off.

During power-up, the Model 6517A performs self-tests on its memory elements. If a failure occurs, the instrument momentarily displays an error message and turns on the ERR annunciator. If the instrument passes the self-tests, the ﬁrmware revision level and bus interface information are displayed.

For complete information on the power-up sequence, see Section 2 in the User’s Manual.

Warm-up

The instrument is ready for use as soon as the power-up sequence is completed. However, to achieve rated accuracy, allow the instrument to warm up for one hour. If the instrument has been subjected to extreme temperatures, allow additional time to allow internal temperatures to stabilize.

Before turning on the Model 6517A, make sure it is connected to a grounded power receptacle using the supplied power cord or the equivalent. Failure to properly ground the unit creates a shock hazard that could result in injury or death.

Model 6517A Getting Started Manual Front Panel Operation 1-9

Bench defaults

The Model 6517A can save ten user setups in non-volatile memory. You can select one of the user setups as the power-on default or have the instrument power up to either of the two factory defaults (optimized for “BENCH” or “GPIB” operation).

Since the basic measurement procedures in this manual assume the BENCH defaults, reset the instrument from the SAVESETUP item of the MAIN MENU by performing the following steps:

1. Press the MENU key to display the main menu:

MAIN MENU

SAVESETUP COMMUNICATION CAL



TEST LIMITS STATUS-MSG GENERAL

2. If the SAVESETUP option is not blinking, press the  key until it is blinking and then press ENTER to view the setup menu:

SETUP MENU

SAVE RESTORE POWERON RESET

3. Select the RESET option and press ENTER to view the reset menu:

RESET ORIGINAL DFLTS

BENCH GPIB

4. Select the BENCH option and press ENTER. The following message is displayed:

RESETTING INSTRUMENT

Enter to conﬁrm; EXIT to abort

5. Press ENTER to conﬁrm. The display will go to the volts function with auto-range disabled and zero check enabled.



Other BENCH default settings for each function include:

• Triggers — Continuous measurements.

• Measurement speed (integration time) — Normal, 1 power line cycle.

• Digital ﬁlter — Enabled, averaging, 10 readings.

• Median ﬁlter — Enabled, rank 1.

• Display resolution — 5½ digits.

Note: See “Menus” in the Measurement Options section of this manual for details on navigating the Main Menu.

Changing functions

To avoid erratic operation, always enable zero check (“ZeroCheck” displayed) before selecting one of the other measurement functions (V, I, R, or Q). The Z-CHK key controls zero check. See “Zero Check” in Section 2 for more information on the zero check feature.

1-10 Front Panel Operation Model 6517A Getting Started Manual

Voltage measurements

Assuming “BENCH” reset conditions, the basic procedure is as follows:

1. With zero check enabled (“ZeroCheck” displayed), select the volts function by pressing V. The Z-CHK key is used to enable/disable zero check.

2. Enable or disable guard as needed. See “Guarding” at the end of this procedure.

NOTE

WARNING

With guard enabled (ON), the “Grd” message is displayed. However, if zero correct is already enabled (“ZCor” displayed), then “Grd” will not be displayed.

3. To achieve optimum accuracy for low voltage measurements, zero correct the Model 6517A. To do this, use the RANGE  key to select the lowest measurement range (2V) and press REL. With zero correct enabled, the REL indicator is on.

With zero correct enabled, the “ZCor” message is displayed. However, if guard is already enabled (“Grd” displayed), then “ZCor” will not be displayed.

4. Select a measurement range or use autoranging.

a. To automatically select the most sensitive range, enable autorange. The AUTO

key enables and disables autorange. When enabled, the AUTO annunciator is on.

b. For manual ranging, use the RANGE  and  keys to select a measurement

range consistent with the expected voltage.

5. Connect the test cable(s) to the voltage to be measured. Figure 1-3A shows connections for unguarded measurements, and Figure 1-3B shows connections for guarded measurements.

Hazardous voltage may be present on the inner shield of the triax cable when GUARD is on. A safety shield connected to safety earth ground (as shown in Figure 1-3B) should be used for voltage measurements at or above 30V.

CAUTION

6. Press Z-CHK to disable zero check and take a reading from the display.

Do not apply more than 250V peak (DC to 60Hz) to the input or instrument damage may occur.

Model 6517A Getting Started Manual Front Panel Operation 1-11

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL O

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FU

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY

Figure 1-3

Voltage measurements

A. Unguarded (GUARD off)

6517A

237-ALG-2

Cable

Red (HI)

Black

Green

INPUT

250V PEAK

237-ALG-2

Cable

6517A

INPUT

250V PEAK

COMMON

LINE

90-13 180-2

50, 60,

IN OUT

TRIGGER

LINK

Measured

Voltage

Shield (Optional)

Measured

Voltage

Red (HI)

Black (LO)

55VA

TRI

Safety

Earth

Ground

Guard

Safety Shield

1-12 Front Panel Operation Model 6517A Getting Started Manual

Guarding

Guarding should be used for high impedance (≥109Ω age measurements that use long input cables. In a high impedance circuit, guarding greatly reduces leakage currents. When using long input cables, guarding cancels the effects of cable capacitance that can signiﬁcantly slow down the measurement response time.

When GUARD is enabled, the INPUT triax connector is reconﬁgured to apply the guard potential to the inner shell of the INPUT triax connector. With this conﬁguration, the COMMON banana jack is used for input low. Figure 1-3 shows both the guarded and unguarded conﬁguration of the INPUT connector.

Perform the following steps to enable or disable guard:

1. Press CONFIG and then V to display the volts conﬁguration menu.

2. Use the  and  keys to place the cursor (blinking menu item) on GUARD and press ENTER.

3. Place the cursor on the desired selection (OFF to disable or ON to enable) and press ENTER.

4. Use the EXIT key to back out of the menu.

Current measurements

Assuming “BENCH” reset conditions, the basic procedure is as follows:

1. With zero check enabled (“ZeroCheck” displayed), select the amps function by pressing I. The Z-CHK key is used to enable/disable zero check.

2. To achieve optimum accuracy for low current measurements, zero correct the Model 6517A. To do this, use the RANGE  key to select the lowest measurement range (20pA) and press REL. With zero correct enabled, the REL indicator is on, and the message “ZCor” is displayed.

3. Select a measurement range or use autoranging:

a. To automatically select the most sensitive range, enable autorange. The AUTO

key enables and disables autorange. When enabled, the AUTO annunciator is on.

b. For manual ranging, use the RANGE  and  keys to select a measurement

range consistent with the expected current.

) voltage measurements and for volt-

Model 6517A Getting Started Manual Front Panel Operation 1-13

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE A

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNE

4. Connect the instrument to the current to be measured as shown in Figure 1-4.

CAUTION

Do not apply more than 250V peak (DC to 60Hz; 10 seconds per minute maximum on mA ranges), or instrument damage may occur.

5. Press Z-CHK to disable zero check and take a reading from the display.

NOTE

To disable zero correct, enable zero check and then press REL.

Figure 1-4

Current measurements

6517A

237-ALG-2

Input low

to shield

Cable

INPUT

250V PEAK

COMMON

Measured

Current

Shield

(Recommended

below 1µA)

Red (HI)

Black (LO)

connected

CAUTION: Maximum Input = 250V peak (DC to

60Hz) ; 10s per minute maximum on mA ranges.

IN OUT

TRIGGER

LINK

LIN

9 18

50,

1-14 Front Panel Operation Model 6517A Getting Started Manual

Resistance measurements

NOTE

The following procedure requires “BENCH” reset conditions. See “Bench defaults” to reset the instrument.

NOTE

WARNING

Accurate high resistance measurements require the use of a low-leakage test ﬁxture, such as the Model 8002A.

1. With zero check enabled (“ZeroCheck” displayed), select the ohms function by pressing R.

2. Select Auto V-Source ohms. In this mode, the V-Source is automatically set to a voltage (nominally 40V or 400V) that optimizes measurement accuracy. See “Auto V-Source” to select Auto V-Source ohms.

“BENCH” reset conditions selects Manual V-Source ohms. In this mode, you must manually set the V-Source level for the measurement. See Section 2, “Voltage Source,” for details on using the V-Source.

Selecting Auto V-Source ohms may set the V-Source to 400V.

3. Select a measurement range or use autoranging:

a. To automatically select the most sensitive range, enable autorange. The AUTO

key enables and disables autorange. When enabled, the AUTO annunciator is on.

b. For manual ranging, use the RANGE  and  keys to select a measurement

range consistent with the expected resistance.

4. Connect the Model 6517A to the test ﬁxture. Generic connections are shown in Figure 1-5A. Note that this connection scheme requires that ammeter LO be internally connected to V-Source LO. See “Conﬁguring V-Source” in Section 2 to control this internal LO-to-LO connection. If using the Model 8002A test ﬁxture, refer to Figure 1-5B.

NOTE

WARNING

For optimum accuracy, leakage currents in the test ﬁxture can be cancelled by performing REL on the current component of the measurement. To cancel leakage current, perform the procedure in “Amps Rel”.

5. Disable zero check by pressing Z-CHK and press OPER to source voltage to the test ﬁxture DUT.

6. Take a reading from the display.

7. Place the V-Source in standby when ﬁnished by again pressing OPER.

Place the V-Source in standby before making or breaking connections to the test ﬁxture or DUT.

Model 6517A Getting Started Manual Front Panel Operation 1-15

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PER

CAUTION:

FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING.

CAUTION:

FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING.

WARNING:

NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY.

Figure 1-5

Resistance measurements

A. Generic connections

6517A

237-ALG-2

Cable

Measured

Resistance

Red

Black

LO connected to shield

Shield

B. Connections using 8002A test fixture

8002-ILC-3 Interlock Cable

8002A HIGH RESISTANCE TEST FIXTURE

7078-TRX-3 Triax Cable

INPUT

250V PEAK

COMMON

PREAMP OUT

Note: V-Source low internally

connected to electrometer low.

COMMON

PREAMP OUT

250V PEAK

INPUT

250V PEAK

LO HI

V SOURCE

IN OUT

TRIGGER

V SOURCE

OUT

INTERLOCK

LINK

LINE RATING

90-134VAC

180-250VAC

50, 60, 400HZ

55VA MAX

(CHANGE

WITH FRO

8607 Banana Plug Cables

Warning: Connect of fixture to safety earth

ground using safety ground wire (supplied with 8002A test fixture).

Model 6517A

Note: Set fixture mode switch to

picoammeter operation.

1-16 Front Panel Operation Model 6517A Getting Started Manual

Auto V-Source

Auto V-Source should be used to achieve optimum accuracy for ohms measurements. With Auto V-Source selected, the V-Source is automatically set for either 40V or 400V. For the 2MΩ through 200GΩ ranges, the V-Source is set to 40V. For the 2TΩ through 200TΩ ranges, a 400V test voltage is used. With Manual V-Source selected, you can manually set the voltage level of the V-Source.

Perform the following steps to select the V-Source mode for the ohms function:

1. Press CONFIG and then R to display the ohms conﬁguration menu.

2. Use the press ENTER.

3. Place the cursor on AUTO (Auto V-Source ohms) or on MANUAL (Manual V-Source ohms) and press ENTER.

4. Use the EXIT key to back out of the menu.

 and  keys to place the cursor (blinking menu item) on VSOURCE and

Amps Rel

Amps Rel is used to cancel leakage current in a test ﬁxture for ohms measurements. Perform the following steps:

NOTE This procedure assumes that steps 1 through 4 of the Resistance Measurement

procedure have been performed.

1. With the V-Source in standby, remove the DUT from the test ﬁxture.

2. Select the amps (I) function and disable zero check. Make sure REL is disabled.

3. Place the V-Source in operate by pressing OPER. The VOLTAGE SOURCE OPERATE indicator is on when in operate.

4. Select the lowest possible measurement range to display the leakage current in the test ﬁxture.

5. Enable relative (REL annunciator on) by pressing REL. This zeroes the display, cancelling the leakage current reading.

6. Press OPER to place the V-Source in standby and enable zero check.

7. Perform the following steps to establish the amps Rel value for the ohms function.

a. Press CONFIG and then R to display the ohms conﬁguration menu.

b. Use the  and  keys, place the cursor (blinking menu item) on AMPSREL

and press ENTER.

c. Place the cursor on YES and press ENTER to use the amps Rel value for the

ohms measurement.

d. Use the EXIT key to back out of the menu.

8. Re-install the DUT in the test ﬁxture.

9. Select the ohms function (R) and proceed to step 5 of the Resistance Measurement procedure.

Model 6517A Getting Started Manual Front Panel Operation 1-17

Resistivity measurements

NOTE The following procedure to measure resistivity (surface or volume) requires the

use of the Keithley Model 8009 Resistivity Test Fixture. Refer to the Model 8009 Instruction Manual for details on using the test ﬁxture.

The following procedure requires “BENCH” reset conditions. See “Bench defaults” to reset the instrument.

1. With zero check enabled (“ZeroCheck” displayed), select the ohms function by pressing R.

2. Select Auto V-Source ohms. In this mode, the V-Source is automatically set to a voltage (nominally 40V or 400V) that optimizes measurement accuracy. See “Auto V-Source” located under “Resistance Measurements” to select Auto V-Source ohms.

NOTE “BENCH” reset conditions selects Manual V-Source ohms. In this mode, you

must manually set the V-Source level for the measurement. See “Voltage Source” for details on using the V-Source.

WARNING Selecting Auto V-Source ohms may set the V-Source to 400V.

3. Select a measurement range or use autoranging:

a. To automatically select the most sensitive range, enable autorange. The AUTO

key enables and disables autorange. When enabled, the AUTO annunciator is on.

b. For manual ranging, use the RANGE

range consistent with the expected resistance.

4. Connect the Model 6517A to the Model 8009 test ﬁxture as shown in Figure 1-6, and set the switch on the test ﬁxture to the desired measurement type (Surface or Volume).

5. Select the resistivity measurement mode as follows:

a. Press the CONFIG and then R to display the ohms conﬁguration menu.

b. Use the  and  keys to place the cursor (blinking menu item) on MEAS-

TYPE and press ENTER.

c. Place the cursor on RESISTIVITY and press ENTER.

NOTE The Model 6517A senses the switch position (surface or volume) on the Model

8009 through the interlock cable, and automatically conﬁgures the instrument for that measurement type.

 and  keys to select a measurement

1-18 Front Panel Operation Model 6517A Getting Started Manual

d. Cursor position (SURFACE or VOLUME menu item blinking) indicates the

selected measurement type:

• SURFACE — If Surface is the selected measurement type, you do not have to proceed any further into the menu structure. Use the EXIT key to exit from the menu.

• VOLUME — If Volume is the selected measurement type, proceed as follows to specify the thickness of the sample:

(1) With the cursor on VOLUME, press ENTER to display the parameters

menu for volume.

(2) Place the cursor on THICKNESS and press ENTER. The present thick-

ness parameter for the sample will be displayed.

(3) Use the cursor keys (

 and ) and the RANGE  and  keys to specify

the thickness (in millimeters) of the sample, and then press ENTER.

(4) Use the EXIT key to back out of the menu structure.

6. Disable zero check by pressing Z-CHK.

7. Press OPER to source voltage to the DUT and, after an appropriate electriﬁcation time, take a reading from the display. Typically, an electriﬁcation time of 60 seconds is used.

8. Place the V-Source in standby when ﬁnished by again pressing OPER.

WARNING Place the V-Source in standby before making or breaking connections

to the test ﬁxture or DUT.

Model 6517A Getting Started Manual Front Panel Operation 1-19

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING.

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY.

Figure 1-6

Resistivity measurements

Model 8009

METER SOURCE

TRIAX

250 MAX

HI-LO

INPUT

250V PEAK

LID

MAX INPUT

1100V

INTERLOCK

Warning: Connect of fixture to

6517-ILC-3 Interlock Cable

8607 Banana Plug Cable

7078-TRX-3 Triax Cable

LO HI

COMMON

PREAMP OUT

250V PEAK

safety earth ground using safety ground wire.

V SOURCE

INTERLOCK

OUT

LINE RATING

90-134VAC 180-250VAC

50, 60, 400HZ

55VA MAX

(CHANGE IEEE ADDRESS

WITH FRONT PANEL MENU)

IEEE-488

LINE FUSE

SLOWBLOW

1/2A, 250V

Model 6517A

1-20 Front Panel Operation Model 6517A Getting Started Manual

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE A

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNE

Charge measurements

Assuming “BENCH” reset conditions, the basic procedure is as follows:

1. With zero check enabled (“ZeroCheck” displayed), select the coulombs function by pressing Q.

2. Select a measurement range or use autoranging:

a. To automatically select the most sensitive range, enable autorange. The AUTO

key enables and disables autorange. When enabled, the AUTO annunciator is on.

b. For manual ranging, use the RANGE

range consistent with the expected charge reading.

3. Connect the test cable (see Figure 1-7) to the input of the Model 6517A and, with the input open, disable zero check. If needed, press REL to zero the display.

4. Connect the instrument to the charge to be measured as shown in Figure 1-7.

CAUTION Do not apply more than 250V peak (DC to 60Hz) or instrument dam-

age may occur.

5. Take a reading from the display.

 and  keys to select a measurement

NOTE The reading can be reset to zero by enabling zero check. If you wish to have the

reading reset to zero when a speciﬁed charge level is reached, enable Auto Discharge as explained in the following paragraph.

Figure 1-7

Charge measurements

6517A

237-ALG-2

Cable

Black (LO)

Input low connected to shield

INPUT

250V PEAK

COMMON

IN OUT

TRIGGER

LINK

Measured

Charge

Shield (Optional)

Red (HI)

LIN

9 18 50,

Model 6517A Getting Started Manual Front Panel Operation 1-21

Auto discharge

When enabled, Auto Discharge is used to automatically reset the charge reading to zero when the speciﬁed charge level is reached. After the integrator resets, the charge measurement process simply restarts at zero. Perform the following steps to enable or disable Auto Discharge.

1. Press the CONFIG and then Q to display the coulombs conﬁguration menu.

2. Use the DISCHARGE and press ENTER.

3. Perform step a to enable Auto Discharge or perform step b to disable it:

a. Enable Auto Discharge — Place the cursor on ON and press ENTER to dis-

b. Disable Auto Discharge — Place the cursor on OFF and press ENTER.

4. Use the EXIT key to exit from the menu.

 and  keys to place the cursor (blinking menu item) on AUTO-

play the present discharge level. Use the  and  keys, and the RANGE  and

 keys to set a different discharge level and press ENTER.

1-22 Front Panel Operation Model 6517A Getting Started Manual

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING.

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY.

External temperature and relative humidity measurements

The Model 6517A can make external temperature measurements from -25°C to 150°C using the Model 6517-TP type K thermocouple (which is a supplied accessory).

The Model 6517A can make relative humidity measurements (0 to 100%) using the Model 6517-RH humidity probe (which is available as an option).

Connections

The Models 6517-TP (thermocouple) and 6517-RH (humidity probe) connect to the rear panel connectors labeled “TEMP TYPE K” and “HUMIDITY” as shown in Figure 1-8.

NOTE It is recommended that the thermocouple junction of the Model 6517-TP be

electrically insulated from ground and voltage potentials. Erroneous reading will result if the thermocouple comes in contact with ground or a voltage potential.

Figure 1-8

External temperature and humidity

6517A

Model 6517-TP

Thermocouple

INPUT

250V PEAK

COMMON

PREAMP OUT

V SOURCE

Extension Cable (P/N CA-129-1)

Model 6517-RH Humidity Probe

LINE RATING

90-134VAC 180-250VAC

50, 60, 400HZ

55VA MAX

Model 6517A Getting Started Manual Front Panel Operation 1-23

Measurement control

BENCH reset disables temperature and humidity measurements. These measurements can be enabled from the front panel as follows:

1. Press MENU to display the main menu.

2. Use the press ENTER to display the menu items of the general menu.

3. Place the cursor on A/D-CONTROLS and press ENTER to display the A/D controls menu.

4. Place the cursor on DATA-STAMP and press ENTER. The present control state for temperature and humidity will be displayed. OFF indicates that the measurement is disabled, while ON indicates that the measurement is enabled.

5. To change the control state for temperature and/or humidity, place the cursor on the appropriate menu item and use the RANGE  and  keys to toggle the control state. With the desired states for temperature and humidity displayed (ON or OFF), press ENTER.

6. Use the EXIT key to back out of the menu.

NOTE The TEMPERATURE option also controls the temperature reading for the

 and  keys to place the cursor (blinking menu item) on GENERAL and

“Change From Cal Temp” multiple display. See Section 2, “Multiple Displays.”

Temperature units

All temperature readings by the Model 6517A can be displayed in °C, °F, or K. BENCH reset selects °C measurement units. Perform the following steps to change units:

1. Press MENU to display the main menu.

2. Use the  and  keys to place the cursor (blinking menu item) on GENERAL and press ENTER to display the menu items of the general menu.

3. Place the cursor on DISPLAY and press ENTER to display the SET READING DISPLAY menu.

4. Place the cursor on TEMP-UNITS and press ENTER. The blinking cursor indicates the present temperature units selection.

5. To change temperature units, place the cursor on the desired selection (°C, K, or °F) and press ENTER.

6. Use the EXIT key to back out of the menu.

1-24 Front Panel Operation Model 6517A Getting Started Manual

Display reading options

Temperature and humidity readings are available as multiple (NEXT) displays. Using multiple displays, temperature and humidity readings can accompany each normal A/D measurement, and they can be included as data storage elements for each reading stored in the buffer. See Section 2, “Multiple Displays.”

External temperature and humidity are selected as data store elements from the data store conﬁguration menu. See Section 2, “Buffer (Data Store).”

Measurement Options

2-2 Measurement Options Model 6517A Getting Started Manual

This section describes the details of making measurements. Conﬁguration options, triggers, reading storage, and scanning are just a few of the topics discussed. You will ﬁnd this information useful whether operating the Model 6517A from the front panel or IEEE-488 bus.

Multiple displays

Each measurement function and some operations provide “multiple displays” by using the bottom line of the front panel. These multiple displays provide multiple type measurements, show a reading in a different form, or give additional information about the reading.

Multiple displays are summarized in this section. All the multiple displays are shown in Table 2-1.

The NEXT and PREV (previous) DISPLAY keys scroll through the multiple displays for the selected function or operation. The multiple display mode can be cancelled by pressing and holding in either key.

Table 2-1

Multiple displays by function

Function Next display

All Time, day, and date

Bar graph Zero-centered bar graph Maximum and minimum values Relative and actual values Calculated and actual values Limits bar graph Relative humidity and external temperature Change from calibration temperature

Ohms (R) Source (V) and measure (I) values

Buffer Relative humidity and external temperature,

V-Source value, maximum reading, minimum reading, average reading, standard deviation, and print buffer data