Keithley 6517A User Manual

Model 6517A

Electrometer/High Resistance Meter
Getting Started Manual

A GREATER MEASURE OF CONFIDENCE

WARRANTY

Keithley Instruments, Inc. warrants this product to be free from defects in material and workmanship for a
period of 1 year from date of shipment.

Keithley Instruments, Inc. warrants the following items for 90 days from the date of shipment: probes, cables,
rechargeable batteries, diskettes, and documentation.

During the warranty period, we will, at our option, either repair or replace any product that proves to be defective.

To exercise this warranty, write or call your local Keithley representative, or contact Keithley headquarters in
Cleveland, Ohio. You will be given prompt assistance and return instructions. Send the product, transportation
prepaid, to the indicated service facility. Repairs will be made and the product returned, transportation prepaid.
Repaired or replaced products are warranted for the balance of the original warranty period, or at least 90 days.

LIMITATION OF WARRANTY

This warranty does not apply to defects resulting from product modification without Keithley’s express written
consent, or misuse of any product or part. This warranty also does not apply to fuses, software, non-rechargeable
batteries, damage from battery leakage, or problems arising from normal wear or failure to follow instructions.

THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES, EXPRESSED OR IMPLIED, INCLUD­ING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE.
THE REMEDIES PROVIDED HEREIN ARE BUYER’S SOLE AND EXCLUSIVE REMEDIES.

NEITHER KEITHLEY INSTRUMENTS, INC. NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR
ANY DIRECT, INDIRECT, SPECIAL, INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF
THE USE OF ITS INSTRUMENTS AND SOFTWARE EVEN IF KEITHLEY INSTRUMENTS, INC., HAS
BEEN ADVISED IN ADVANCE OF THE POSSIBILITY OF SUCH DAMAGES. SUCH EXCLUDED DAM­AGES SHALL INCLUDE, BUT ARE NOT LIMITED TO: COSTS OF REMOVAL AND INSTALLATION,
LOSSES SUSTAINED AS THE RESULT OF INJURY TO ANY PERSON, OR DAMAGE TO PROPERTY.

Keithley Instruments, Inc.

Sales Offices: BELGIUM:

CHINA:

Yuan Chen Xin Building, Room 705 • 12 Yumin Road, Dewai, Madian • Beijing 100029 • 8610-82251886 • Fax: [phone]

FINLAND:
FRANCE:
GERMANY:
GREAT BRITAIN:
INDIA:

1/5, Eagles Street • Langford Town • Bangalore 560 025 • 080 212 80-27 • Fax: [phone]

ITALY:

Viale San Gimignano, 38 • 20146 Milano • 02-48 39 16 01 • Fax: [phone]

JAPAN:

New Pier Takeshiba North Tower 13F • 11-1, Kaigan 1-chome • Minato-ku, Tokyo 105-0022 • 81-3-5733-7555 • Fax: [phone]

KOREA:

2FL., URI Building • 2-14 Yangjae-Dong • Seocho-Gu, Seoul 137-888 • 82-2-574-7778 • Fax: [phone]

NETHERLANDS:
SWEDEN:
TAIWAN:

28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: [phone]

1-888-KEITHLEY (534-8453) • www.keithley.com

Bergensesteenweg 709 • B-1600 Sint-Pieters-Leeuw • 02-363 00 40 • Fax: [phone]

Halsuantie 2 • 00420 Helsinki, Finland • 09-53 06 65 60 • Fax: [phone]

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Unit 2 Commerce Park, Brunel Road • Theale, Berkshire RG7 4AB • 0118 -929 75 00 • Fax: [phone]

Postbus 559 • 4200 AN Gorinchem • 0183-63 53 33 • Fax: [phone]

c/o Regus Business Centre • Frosundaviks Allé 15, 4tr • 16970 Solna • 08-50 90 46 00 • Fax: [phone]

13F-3, NO. 6, Lane 99, Pu-Ding Road, Hsinchu, Taiwan, ROC. • 886-3-572-9077• Fax: [phone]

5/03

Model 6517A Electrometer/High Resistance Meter

Getting Started Manual

©2000, Keithley Instruments, Inc.

All rights reserved.

Cleveland, Ohio, U.S.A.

Second Printing, June 2003

Document Number: 6517A-903-01 Rev. B

Manual Print History

The print history shown below lists the printing dates of all Revisions and Addenda created
for this manual. The Revision Level letter increases alphabetically as the manual undergoes
subsequent updates. Addenda, which are released between Revisions, contain important
change information that the user should incorporate immediately into the manual. Addenda
are numbered sequentially. When a new Revision is created, all Addenda associated with the
previous Revision of the manual are incorporated into the new Revision of the manual. Each
new Revision includes a revised copy of this print history page.

Revision A (Document Number 6517A-903-01) .................................................... September 2000

Revision B (Document Number 6517A-903-01) ..............................................................June 2003

All Keithley product names are trademarks or registered trademarks of Keithley Instruments, Inc.
Other brand names are trademarks or registered trademarks of their respective holders.

S

afety Precautions

The following safety precautions should be observed before using this product and any associated instrumentation. Although
some instruments and accessories would normally be used with non-hazardous voltages, there are situations where hazardous
conditions may be present.

This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions
required to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before us­ing the product. Refer to the manual for complete product specifications.

If the product is used in a manner not specified, the protection provided by the product may be impaired.

The types of product users are:

Responsible body

ment is operated within its specifications and operating limits, and for ensuring that operators are adequately trained.

Operators

instrument. They must be protected from electric shock and contact with hazardous live circuits.

Maintenance personnel

voltage or replacing consumable materials. Maintenance procedures are described in the manual. The procedures explicitly state
if the operator may perform them. Otherwise, they should be performed only by service personnel.

Service personnel

trained service personnel may perform installation and service procedures.

Keithley products are designed for use with electrical signals that are rated Measurement Category I and Measurement Category
II, as described in the International Electrotechnical Commission (IEC) Standard IEC 60664. Most measurement, control, and
data I/O signals are Measurement Category I and must not be directly connected to mains voltage or to voltage sources with
high transient over-voltages. Measurement Category II connections require protection for high transient over-voltages often as­sociated with local AC mains connections. Assume all measurement, control, and data I/O connections are for connection to
Category I sources unless otherwise marked or described in the Manual.

Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test fixtures.
The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than 30V RMS,

42.4V peak, or 60VDC are present.

circuit before measuring.

Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators
are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential
human contact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock.
If the circuit is capable of operating at or above 1000 volts,

Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance limited sourc­es. NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective de­vices to limit fault current and voltage to the card.

Before operating an instrument, make sure the line cord is connected to a properly grounded power receptacle. Inspect the con­necting cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.

When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input pow­er disconnect device must be provided, in close proximity to the equipment and within easy reach of the operator.

For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under
test. ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting ca-

is the individual or group responsible for the use and maintenance of equipment, for ensuring that the equip-

use the product for its intended function. They must be trained in electrical safety procedures and proper use of the

perform routine procedures on the product to keep it operating properly, for example, setting the line

are trained to work on live circuits, and perform safe installations and repairs of products. Only properly

A good safety practice is to expect that hazardous voltage is present in any unknown

no conductive part of the circuit may be exposed.

5/03

bles or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.

Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth) ground. Al­ways make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the voltage being measured.

The instrument and accessories must be used in accordance with its specifications and operating instructions or the safety of the
equipment may be impaired.

Do not exceed the maximum signal levels of the instruments and accessories, as defined in the specifications and operating in­formation, and as shown on the instrument or test fixture panels, or switching card.

When fuses are used in a product, replace with same type and rating for continued protection against fire hazard.

Chassis connections must only be used as shield connections for measuring circuits, NOT as safety earth ground connections.

If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use
of a lid interlock.

If a screw is present, connect it to safety earth ground using the wire recommended in the user documentation.

!

The symbol on an instrument indicates that the user should refer to the operating instructions located in the manual.

The symbol on an instrument shows that it can source or measure 1000 volts or more, including the combined effect of
normal and common mode voltages. Use standard safety precautions to avoid personal contact with these voltages.

The symbol indicates a connection terminal to the equipment frame.

The

WARNING

information very carefully before performing the indicated procedure.

The

CAUTION

ranty.

Instrumentation and accessories shall not be connected to humans.

Before performing any maintenance, disconnect the line cord and all test cables.

To maintain protection from electric shock and fire, replacement components in mains circuits, including the power transformer,
test leads, and input jacks, must be purchased from Keithley Instruments. Standard fuses, with applicable national safety ap­provals, may be used if the rating and type are the same. Other components that are not safety related may be purchased from
other suppliers as long as they are equivalent to the original component. (Note that selected parts should be purchased only
through Keithley Instruments to maintain accuracy and functionality of the product.) If you are unsure about the applicability
of a replacement component, call a Keithley Instruments office for information.

To clean an instrument, use a damp cloth or mild, water based cleaner. Clean the exterior of the instrument only. Do not apply
cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with
no case or chassis (e.g., data acquisition board for installation into a computer) should never require cleaning if handled accord­ing to instructions. If the board becomes contaminated and operation is affected, the board should be returned to the factory for
proper cleaning/servicing.

heading in a manual explains dangers that might result in personal injury or death. Always read the associated

heading in a manual explains hazards that could damage the instrument. Such damage may invalidate the war-

Table of Contents

1 Front Panel Operation

Product overview ........................................................................ 1-2

Display ....................................................................................... 1-8

Power-up .................................................................................... 1-8

Warm-up ............................................................................. 1-8

Bench defaults ............................................................................ 1-9

Changing functions .................................................................... 1-9

Voltage measurements .............................................................. 1-10

Guarding ........................................................................... 1-12

Current measurements .............................................................. 1-12

Resistance measurements ......................................................... 1-14

Auto V-Source ................................................................... 1-16

Amps Rel .......................................................................... 1-16

Resistivity measurements ......................................................... 1-17

Charge measurements .............................................................. 1-20

Auto discharge .................................................................. 1-21

External temperature and relative humidity measurements ..... 1-22

Connections ....................................................................... 1-22

Measurement control ........................................................ 1-23

Temperature units .............................................................. 1-23

Display reading options .................................................... 1-24

2 Measurement Options

Multiple displays ........................................................................ 2-2

Menus ......................................................................................... 2-5

Navigating menus ............................................................... 2-6

Voltage source ............................................................................ 2-8

Connections ......................................................................... 2-8

Basic operation .................................................................... 2-9

Configuring V-Source ....................................................... 2-10

Relative ..................................................................................... 2-10

Configuring rel .................................................................. 2-10

Zero check ................................................................................ 2-11

Zero correct .............................................................................. 2-11

Triggering ................................................................................. 2-12

Idle .................................................................................... 2-13

Control sources ................................................................. 2-14

Device action ..................................................................... 2-14

Output trigger .................................................................... 2-14

Counters (Advanced triggering) ........................................ 2-14

Bench default trigger model setup .................................... 2-15

Speed ........................................................................................ 2-15

Configuring speed ............................................................. 2-15

Resolution ................................................................................. 2-16

Configure resolution .......................................................... 2-16

Filter ......................................................................................... 2-16

Filter types ......................................................................... 2-16

Filter modes ....................................................................... 2-17

Median filter ...................................................................... 2-17

Configuring filters ............................................................. 2-18

Buffer (Data Store) ................................................................... 2-19

Storing readings ................................................................. 2-19

Math .......................................................................................... 2-20

Selecting and configuring math ......................................... 2-21

Enabling math ................................................................... 2-22

Additional math operations ............................................... 2-22

Test sequences .......................................................................... 2-23

Selecting and configuring a test sequence ......................... 2-23

Connections ....................................................................... 2-24

Running a test .................................................................... 2-25

Internal scanning ...................................................................... 2-26

Configure internal scanner ................................................ 2-26

Perform the scan ................................................................ 2-27

Close/Open channels ......................................................... 2-28

External scanning ..................................................................... 2-28

Trigger connections ........................................................... 2-28

Configure external channels .............................................. 2-29

Perform the scan ................................................................ 2-30

3 Remote Operation

Overview .................................................................................... 3-2

Software support ......................................................................... 3-2

TestPoint application software ............................................ 3-2

Demonstration/Startup programs ........................................ 3-2

LabView driver .................................................................... 3-2

IEEE-488 bus standards .............................................................. 3-3

RS-232 standard ......................................................................... 3-3

IEEE-488 bus connections .......................................................... 3-3

RS-232 connections .................................................................... 3-4

IEEE-488 interface, address and language selection .................. 3-4

RS-232 interface selection and configuration ............................. 3-5

Common commands ................................................................... 3-6

SCPI commands ......................................................................... 3-7

SCPI command syntax ............................................................... 3-8

Tree structure ....................................................................... 3-8

Long and short form commands .......................................... 3-9

Query commands ................................................................. 3-9

Default nodes ....................................................................... 3-9

Command syntax ............................................................... 3-10

SCPI signal oriented commands .............................................. 3-10

:FETCh? ............................................................................ 3-10

:MEASure[:<function>]? .................................................. 3-10

SCPI subsystem commands ..................................................... 3-11

Defaults ............................................................................. 3-11

Fresh readings ................................................................... 3-11

Function configuration ...................................................... 3-12

V-Source ............................................................................ 3-14

Data store (Buffer) ............................................................ 3-14

Open/close channels and scan ........................................... 3-14

Trigger model .................................................................... 3-15

Test sequences ................................................................... 3-16

Status register .................................................................... 3-17

Program examples .................................................................... 3-18

Changing function and range ............................................ 3-18

One-shot triggering ........................................................... 3-19

Continuous triggering #1 .................................................. 3-21

Continuous triggering #2 .................................................. 3-22

Generating SRQ on buffer full .......................................... 3-23

Storing readings in buffer ................................................. 3-24

Taking readings with the scanner card .............................. 3-26

Test Sequence — staircase sweep ..................................... 3-28

4 Specs and Accessories

List of Tables

2 Measurement Options

Table 2-1 Multiple displays by function ................................................. 2-2

Table 2-2 Summary of main menu.......................................................... 2-5

Table 2-3 Configuration settings for instrument operations.................... 2-6

Table 2-4 Configuration settings for each measurement function .......... 2-6

Table 2-5 Menu summary ....................................................................... 2-7

List of Illustrations

1 Front Panel Operation

Figure 1-1 Model 6517A front panel overview ....................................... 1-4

Figure 1-2 Model 6517A rear panel overview ......................................... 1-6

Figure 1-3 Voltage measurements ......................................................... 1-11

Figure 1-4 Current measurements ......................................................... 1-13

Figure 1-5 Resistance measurements .................................................... 1-15

Figure 1-6 Resistivity measurements .................................................... 1-19

Figure 1-7 Charge measurements .......................................................... 1-20

Figure 1-8 External temperature and humidity ...................................... 1-22

2 Measurement Options

Figure 2-1 Independent V-Source connections ........................................ 2-8

Figure 2-2 FVMI connections ................................................................. 2-9

Figure 2-3 Basic trigger model (simplified) .......................................... 2-12

Figure 2-4 Advanced trigger model (simplified) ................................... 2-13

Figure 2-5 Filter response/noise window .............................................. 2-17

Figure 2-6 Combining math calculations .............................................. 2-23

Figure 2-7 Typical FVMI connections .................................................. 2-25

Figure 2-8 Trigger connections using trigger link ................................. 2-29

Figure 2-9 Trigger connections using conventional external triggering 2-29

3 Remote Operation

Figure 3-1 IEEE-488 connections ........................................................... 3-3

Figure 3-2 Hierarchy of the example SENSe1 commands ...................... 3-8

1

Front Panel Operation

1-2 Front Panel Operation Model 6517A Getting Started Manual

Product overview

If you have any questions after reviewing this information, please contact your local
Keithley representative, or call one of our Applications Engineers at 1-800-348-3735 (U.S.
and Canada only). Worldwide phone numbers are listed in the front of this manual.

The Model 6517A is a 6½-digit electrometer/high resistance system with the following
measurement capabilities:

• DC voltage measurements from 1µV to 210V

• DC current measurements from 10aA to 21mA

• Charge measurements from 10fC to 2.1µC

• Resistance measurements from 10Ω to 210T

• Surface resistivity measurements

• Volume resistivity measurements

• External temperature measurements from -25°C to 150°C using the supplied
Model 6517-TP thermocouple

• Relative humidity measurements (0 to 100%) using the optional Model 6517-RH
probe

Ω

Model 6517A Getting Started Manual Front Panel Operation 1-3

Some additional capabilities of the Model 6517A include:

• Built-in V-Source — The 100V range provides up to 100V at 10mA, while the
1000V range provides up to 1000V at 1mA

• Data storage

• Single button zeroing (REL)

• Built-in math functions

• Filtering; averaging and median

• Built-in test sequences

• Remote operation using the IEEE-488 (GPIB) bus or the RS-232 interface

• Model 617 emulation using the DDC (device-dependent command) programming
language mode

• Scan (measure) channels of an external scanner (e.g., Model 706, 7001, or 7002)

• Scan (measure) channels of an internal scanner card (e.g., Model 6521 or 6522)
installed in the option slot

The Model 6517A front and rear panel overviews (Figure 1-1 and Figure 1-2) include
important abbreviated information that should be reviewed before operating the
instrument.

1-4 Front Panel Operation Model 6517A Getting Started Manual

Figure 1-1

Model 6517A front panel overview

Secondary Display Line

Primary Display Line

19

EDIT ERR REM TALK LSTN SRQ REAR REL FILT MATH 4W AUTO ARM TRIG SMPL

1234567891012345678910

PREV

DISPLAY

NEXT

POWER

6517A ELECTROMETER/HIGH RESISTANCE METER

VI RQ

RELZ-CHK

FILTER MATH

INFO LOCAL

STORE RECALL

OPTION VOLTAGE SOURCE

CARD OPER

TRIG SEQ

EXIT ENTERCONFIG MENU

RANGE

AUTO

RANGE

VOLTAGE

SOURCE

OPERATE

CAL

52 6 7 3 8 4

1 ANNUNCIATORS

ERR Questionable reading
REM In remote
TALK Addressed to talk
LSTN Addressed to listen
SRQ Service Request
REL Relative reading displayed
FILT Digital filter enabled
MATH Math calculation enabled
AUTO Autoranging enabled
ARM Trigger armed; not in idle
*(asterisk) Reading being stored

2 FUNCTION KEYS

Select measurement function; volts (V), amps (I), resistivity (R) or
coulombs (Q)

3 RANGE KEYS




AUTO Enables/disables autorange

4 HANDLE

Moves to higher range; increments digit
Moves to lower range; decrements digit

(not shown) Pull out and rotate to desired position.

5 DISPLAY KEYS

PREV/NEXT Scroll through multiple displays of a function

Model 6517A Getting Started Manual Front Panel Operation 1-5

6 OPERATION KEYS

Z-CHK Enables/disables zero check. Enable zero check before changing functions.
REL Enables/disables relative reading
FILTER Displays digital filter status for present function and toggles filter on/off
MATH Displays math calculation and toggles math on/off if configured
TRIG Triggers unit
SEQ Performs selected test sequence

and





INFO Shows context-sensitive information about the present display
LOCAL Cancels remote operation
STORE Enables data storage
RECALL Displays reading data (reading, number, time). Use PREV/NEXT DISPLAY for maxi-

CONFIG Configures functions and operations
MENU Saves/restores instrument conditions; sets up communications; performs calibration

EXIT Cancels selection, moves back within menu structure
ENTER Holds reading, enters selection, moves down within menu structure

Moves cursor among data entry digits, menu selections, and information displays

mum, minimum average, standard deviation.

and self-tests; defines limits, digital output, and other miscellaneous operations (see
Table 2-2)

7 VOLTAGE SOURCE KEYS

OPER Toggles V-source between operate and standby

and





8 VOLTAGE SOURCE OPERATE

Adjusts V-source value

Indicator on when in operate, off when in standby

9 OPTION CARD KEY

Use to program and operate an installed option. Also used to scan
external scanner channels.

1-6 Front Panel Operation Model 6517A Getting Started Manual

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY.

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING.

Figure 1-2

Model 6517A rear panel overview

23 5 4 9 8 10

1010V
PEAK

!

INPUT

250V PEAK

PREAMP OUT

TEMP

TYPE K

250 PEAK

OPTION SLOT

COMMON 2V ANALOG

OUTPUT

HUMIDITY

LO

V SOURCE

750V

PEAK

EXT TRIGINMTR COMP

RS232

OUT

!

INTERLOCK

DIGITAL

I/O

HI

SELECTED

LINE VOLTAGE

90-110V

105-125V

TRIG LINK

180-220V
210-250V

115V

LINE RATING

50-60HZ

50VA MAX

AC ONLY

IEEE-488

(CHANGE IEEE ADDRESS

WITH FRONT PANEL MENU)

LINE FUSE

SLOWBLOW

1/2A 90-125V

1/4A 180-250V

MADE

U.S.A.

IN

11

1

Input High
Input Low

Chassis Ground

Unguarded (Guard off)

Input High
Guard

Chassis Ground

Guarded (Guard on)

6 7 15 16 14 13 12

17

EXTERNAL TRIGGER INPUT

Trigger Reading

TTL HI

>10µsec

TTL LO

BNC CONNECTIONS

METER COMPLETE OUTPUT

Reading Complete

TTL HI

>10µsec

TTL LO

HI

LO (Chassis)

1 INPUT CONNECTOR (see Figure 1-2)

Unguarded Configuration Disable GUARD for amps, ohms, coulombs and unguarded volts

Guarded Configuration Enable GUARD for guarded volts measurements.

2 TEMP TYPE K

Connect the Model 6517-TP type K thermocouple for temperature

measurements.

measurements.

3 PREAMP OUT

Follows the signal amplitude applied to the INPUT terminal. With
GUARD on, PREAMP OUT is internally connected to the inner shell of the INPUT triax
connector to configure the input for guarded volts measurements. Referenced to
COMMON. See the Model 6517A User’s Manual for more information.

Model 6517A Getting Started Manual Front Panel Operation 1-7

4 2V ANALOG OUTPUT

to COMMON. Typically connected to a measuring device such as a chart recorder. See
the Model 6517A User’s Manual for more information.

5 COMMON

resistor.

6 CHASSIS GROUND

line cord. COMMON can be connected to chassis ground by installing the ground link.
For floating measurements, make sure the ground link connection between COMMON
and Chassis Ground is open.

7 HUMIDITY

measurements.

8 V-SOURCE HI and LO

9 LINE VOLTAGE SWITCH

line power voltage. A 90 to 125V line voltage requires the 115V setting, while a 180 to
250V line voltage requires the 230V setting.

10 POWER LINE INPUT

power cord.

11 LINE FUSE

For the 230V setting, use a ¼A, 250V, slow blow, 5×20mm fuse.

12 IEEE-488 CONNECTOR

shielded IEEE-488 cables.

Binding post that is internally connected to INPUT low through a 0.6Ω

Connect the optional Model 6517-RH probe for relative humidity

For the 115V line voltage setting, use a ½A, 250V, slow blow, 5×20mm fuse.

Binding post provides a scaled 0 to 2V output that is referenced

Binding post that connects the chassis to ground through the power

Banana jacks for the voltage source.

Two-position slide switch configures instrument for available

Connect to power line (50 or 60Hz) grounded outlet using 3-wire

Connects the instrument to the IEEE-488 (GPIB) bus. Use

13 TRIG LINK

and from other instruments.

14 DIGITAL I/O

lines.

15 RS-232

16 INTERLOCK

the Model 8002A High Resistance Test Fixture using the appropriate cable.

17 OPTION SLOT

in this slot.

An 8-pin micro DIN connector for sending and receiving trigger pulses to

An 8-pin micro DIN connector for the four TTL-compatible digital output

DB-9 connector for the RS-232 interface. Use a standard RS-232 cable.

Connects the safety interlock to the Model 8009 Resistivity Test Fixture or

An option card, such as the Model 6521 or 6522 scanner card, installs

1-8 Front Panel Operation Model 6517A Getting Started Manual

Display

As shown in the Model 6517A front panel overview (Figure 1-1), the front panel has three
lines of display information: the primary display line, the secondary display line, and
annunciators.

• Primary Display Line — The top line displays readings along with units. It can also
display measurement type, “hold”, math operating type, channel number, menu
headings and messages. Error and status messages are listed in Section 2 of the
User’s Manual.

• Secondary Display Line — The bottom line displays the range, V-Source value,
menu items, messages and multiple displays (see Measurement Options section of
this manual). Longer text strings are indicated by arrows on either end of the dis-



play line. Use the cursor keys (

and ) to display the additional information.

Power-up

WARNING

Use the front panel POWER switch to turn power on and off.

During power-up, the Model 6517A performs self-tests on its memory elements. If a fail­ure occurs, the instrument momentarily displays an error message and turns on the ERR
annunciator. If the instrument passes the self-tests, the firmware revision level and bus
interface information are displayed.

For complete information on the power-up sequence, see Section 2 in the User’s Manual.

Warm-up

The instrument is ready for use as soon as the power-up sequence is completed. However,
to achieve rated accuracy, allow the instrument to warm up for one hour. If the instrument
has been subjected to extreme temperatures, allow additional time to allow internal tem­peratures to stabilize.

Before turning on the Model 6517A, make sure it is connected to a
grounded power receptacle using the supplied power cord or the equiv­alent. Failure to properly ground the unit creates a shock hazard that
could result in injury or death.

Model 6517A Getting Started Manual Front Panel Operation 1-9

Bench defaults

The Model 6517A can save ten user setups in non-volatile memory. You can select one of
the user setups as the power-on default or have the instrument power up to either of the
two factory defaults (optimized for “BENCH” or “GPIB” operation).

Since the basic measurement procedures in this manual assume the BENCH defaults, reset
the instrument from the SAVESETUP item of the MAIN MENU by performing the fol­lowing steps:

1. Press the MENU key to display the main menu:

MAIN MENU

SAVESETUP COMMUNICATION CAL



TEST LIMITS STATUS-MSG GENERAL

2. If the SAVESETUP option is not blinking, press the  key until it is blinking and
then press ENTER to view the setup menu:

SETUP MENU

SAVE RESTORE POWERON RESET

3. Select the RESET option and press ENTER to view the reset menu:

RESET ORIGINAL DFLTS

BENCH GPIB

4. Select the BENCH option and press ENTER. The following message is displayed:

RESETTING INSTRUMENT

Enter to confirm; EXIT to abort

5. Press ENTER to confirm. The display will go to the volts function with auto-range
disabled and zero check enabled.



Other BENCH default settings for each function include:

• Triggers — Continuous measurements.

• Measurement speed (integration time) — Normal, 1 power line cycle.

• Digital filter — Enabled, averaging, 10 readings.

• Median filter — Enabled, rank 1.

• Display resolution — 5½ digits.

Note: See “Menus” in the Measurement Options section of this manual for details on nav­igating the Main Menu.

Changing functions

To avoid erratic operation, always enable zero check (“ZeroCheck” displayed) before
selecting one of the other measurement functions (V, I, R, or Q). The Z-CHK key controls
zero check. See “Zero Check” in Section 2 for more information on the zero check feature.

1-10 Front Panel Operation Model 6517A Getting Started Manual

Voltage measurements

Assuming “BENCH” reset conditions, the basic procedure is as follows:

1. With zero check enabled (“ZeroCheck” displayed), select the volts function by
pressing V. The Z-CHK key is used to enable/disable zero check.

2. Enable or disable guard as needed. See “Guarding” at the end of this procedure.

NOTE

NOTE

WARNING

With guard enabled (ON), the “Grd” message is displayed. However, if zero cor­rect is already enabled (“ZCor” displayed), then “Grd” will not be displayed.

3. To achieve optimum accuracy for low voltage measurements, zero correct the
Model 6517A. To do this, use the RANGE  key to select the lowest measurement
range (2V) and press REL. With zero correct enabled, the REL indicator is on.

With zero correct enabled, the “ZCor” message is displayed. However, if guard
is already enabled (“Grd” displayed), then “ZCor” will not be displayed.

4. Select a measurement range or use autoranging.

a. To automatically select the most sensitive range, enable autorange. The AUTO

key enables and disables autorange. When enabled, the AUTO annunciator is
on.

b. For manual ranging, use the RANGE  and  keys to select a measurement

range consistent with the expected voltage.

5. Connect the test cable(s) to the voltage to be measured. Figure 1-3A shows connec­tions for unguarded measurements, and Figure 1-3B shows connections for
guarded measurements.

Hazardous voltage may be present on the inner shield of the triax cable
when GUARD is on. A safety shield connected to safety earth ground
(as shown in Figure 1-3B) should be used for voltage measurements at
or above 30V.

CAUTION

6. Press Z-CHK to disable zero check and take a reading from the display.

Do not apply more than 250V peak (DC to 60Hz) to the input or
instrument damage may occur.

Model 6517A Getting Started Manual Front Panel Operation 1-11

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL O

R

5

W

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FU

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FU

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY

G

Figure 1-3

Voltage measurements

A. Unguarded (GUARD off)

6517A

237-ALG-2

Cable

Red (HI)

Black

Green

LO

!

INPUT

250V PEAK

237-ALG-2

Cable

6517A

!

INPUT

250V PEAK

COMMON

COMMON

LINE

90-13
180-2

50, 60,

IN OUT

TRIGGER

LINK

IN

Measured

Voltage

Shield (Optional)

Measured

Voltage

Red (HI)

+

Vs

-

Black (LO)

+

Vs

-

55VA

TRI

LI

Safety

Earth

Ground

Guard

Safety
Shield

1-12 Front Panel Operation Model 6517A Getting Started Manual

Guarding

Guarding should be used for high impedance (≥109Ω
age measurements that use long input cables. In a high impedance circuit, guarding greatly
reduces leakage currents. When using long input cables, guarding cancels the effects of
cable capacitance that can significantly slow down the measurement response time.

When GUARD is enabled, the INPUT triax connector is reconfigured to apply the guard
potential to the inner shell of the INPUT triax connector. With this configuration, the
COMMON banana jack is used for input low. Figure 1-3 shows both the guarded and
unguarded configuration of the INPUT connector.

Perform the following steps to enable or disable guard:

1. Press CONFIG and then V to display the volts configuration menu.

2. Use the  and  keys to place the cursor (blinking menu item) on GUARD and
press ENTER.

3. Place the cursor on the desired selection (OFF to disable or ON to enable) and
press ENTER.

4. Use the EXIT key to back out of the menu.

Current measurements

Assuming “BENCH” reset conditions, the basic procedure is as follows:

1. With zero check enabled (“ZeroCheck” displayed), select the amps function by
pressing I. The Z-CHK key is used to enable/disable zero check.

2. To achieve optimum accuracy for low current measurements, zero correct the
Model 6517A. To do this, use the RANGE  key to select the lowest measurement
range (20pA) and press REL. With zero correct enabled, the REL indicator is on,
and the message “ZCor” is displayed.

3. Select a measurement range or use autoranging:

a. To automatically select the most sensitive range, enable autorange. The AUTO

key enables and disables autorange. When enabled, the AUTO annunciator is
on.

b. For manual ranging, use the RANGE  and  keys to select a measurement

range consistent with the expected current.

) voltage measurements and for volt-

Model 6517A Getting Started Manual Front Panel Operation 1-13

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE A

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE A

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNE

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNE

0

5

4. Connect the instrument to the current to be measured as shown in Figure 1-4.

CAUTION

Do not apply more than 250V peak (DC to 60Hz; 10 seconds per
minute maximum on mA ranges), or instrument damage may occur.

5. Press Z-CHK to disable zero check and take a reading from the display.

NOTE

To disable zero correct, enable zero check and then press REL.

Figure 1-4

Current measurements

6517A

237-ALG-2

Input low

to shield

Cable

!

INPUT

250V PEAK

COMMON

Measured

Current

Shield

(Recommended

below 1µA)

Red (HI)

I

s

Black (LO)

connected

CAUTION: Maximum Input = 250V peak (DC to

60Hz) ; 10s per minute maximum on
mA ranges.

IN OUT

TRIGGER

LINK

LIN

9
18

50,

5

1-14 Front Panel Operation Model 6517A Getting Started Manual

Resistance measurements

NOTE

The following procedure requires “BENCH” reset conditions. See “Bench defaults” to
reset the instrument.

NOTE

WARNING

Accurate high resistance measurements require the use of a low-leakage test fix­ture, such as the Model 8002A.

1. With zero check enabled (“ZeroCheck” displayed), select the ohms function by
pressing R.

2. Select Auto V-Source ohms. In this mode, the V-Source is automatically set to a
voltage (nominally 40V or 400V) that optimizes measurement accuracy. See “Auto
V-Source” to select Auto V-Source ohms.

“BENCH” reset conditions selects Manual V-Source ohms. In this mode, you
must manually set the V-Source level for the measurement. See Section 2,
“Voltage Source,” for details on using the V-Source.

Selecting Auto V-Source ohms may set the V-Source to 400V.

3. Select a measurement range or use autoranging:

a. To automatically select the most sensitive range, enable autorange. The AUTO

key enables and disables autorange. When enabled, the AUTO annunciator is
on.

b. For manual ranging, use the RANGE  and  keys to select a measurement

range consistent with the expected resistance.

4. Connect the Model 6517A to the test fixture. Generic connections are shown in
Figure 1-5A. Note that this connection scheme requires that ammeter LO be inter­nally connected to V-Source LO. See “Configuring V-Source” in Section 2 to con­trol this internal LO-to-LO connection. If using the Model 8002A test fixture, refer
to Figure 1-5B.

NOTE

WARNING

For optimum accuracy, leakage currents in the test fixture can be cancelled by
performing REL on the current component of the measurement. To cancel leak­age current, perform the procedure in “Amps Rel”.

5. Disable zero check by pressing Z-CHK and press OPER to source voltage to the
test fixture DUT.

6. Take a reading from the display.

7. Place the V-Source in standby when finished by again pressing OPER.

Place the V-Source in standby before making or breaking connections
to the test fixture or DUT.

Model 6517A Getting Started Manual Front Panel Operation 1-15

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PER

CAUTION:

FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING.

CAUTION:

FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING.

WARNING:

NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY.

N

Figure 1-5

Resistance measurements

A. Generic connections

6517A

237-ALG-2

Cable

Measured

Resistance

R

X

Red

Black

LO connected
to shield

Shield

B. Connections using 8002A test fixture

8002-ILC-3 Interlock Cable

8002A HIGH RESISTANCE TEST FIXTURE

7078-TRX-3 Triax Cable

!

INPUT

250V PEAK

250V PEAK

COMMON

PREAMP OUT

Note: V-Source low internally

connected to electrometer low.

COMMON

PREAMP OUT

!

250V PEAK

INPUT

250V PEAK

LO HI

LO HI

V SOURCE

IN OUT

TRIGGER

V SOURCE

OUT

!

INTERLOCK

LINK

LINE RATING

90-134VAC

180-250VAC

50, 60, 400HZ

55VA MAX

(CHANGE

WITH FRO

IE

8607 Banana Plug Cables

Warning: Connect of fixture to safety earth

ground using safety ground wire
(supplied with 8002A test fixture).

Model 6517A

Note: Set fixture mode switch to

picoammeter operation.

1-16 Front Panel Operation Model 6517A Getting Started Manual

Auto V-Source

Auto V-Source should be used to achieve optimum accuracy for ohms measurements. With
Auto V-Source selected, the V-Source is automatically set for either 40V or 400V. For the
2MΩ through 200GΩ ranges, the V-Source is set to 40V. For the 2TΩ through 200TΩ
ranges, a 400V test voltage is used. With Manual V-Source selected, you can manually set
the voltage level of the V-Source.

Perform the following steps to select the V-Source mode for the ohms function:

1. Press CONFIG and then R to display the ohms configuration menu.

2. Use the
press ENTER.

3. Place the cursor on AUTO (Auto V-Source ohms) or on MANUAL (Manual
V-Source ohms) and press ENTER.

4. Use the EXIT key to back out of the menu.

 and  keys to place the cursor (blinking menu item) on VSOURCE and

Amps Rel

Amps Rel is used to cancel leakage current in a test fixture for ohms measurements. Per­form the following steps:

NOTE This procedure assumes that steps 1 through 4 of the Resistance Measurement

procedure have been performed.

1. With the V-Source in standby, remove the DUT from the test fixture.

2. Select the amps (I) function and disable zero check. Make sure REL is disabled.

3. Place the V-Source in operate by pressing OPER. The VOLTAGE SOURCE
OPERATE indicator is on when in operate.

4. Select the lowest possible measurement range to display the leakage current in the
test fixture.

5. Enable relative (REL annunciator on) by pressing REL. This zeroes the display,
cancelling the leakage current reading.

6. Press OPER to place the V-Source in standby and enable zero check.

7. Perform the following steps to establish the amps Rel value for the ohms function.

a. Press CONFIG and then R to display the ohms configuration menu.

b. Use the  and  keys, place the cursor (blinking menu item) on AMPSREL

and press ENTER.

c. Place the cursor on YES and press ENTER to use the amps Rel value for the

ohms measurement.

d. Use the EXIT key to back out of the menu.

8. Re-install the DUT in the test fixture.

9. Select the ohms function (R) and proceed to step 5 of the Resistance Measurement
procedure.

Model 6517A Getting Started Manual Front Panel Operation 1-17

Resistivity measurements

NOTE The following procedure to measure resistivity (surface or volume) requires the

use of the Keithley Model 8009 Resistivity Test Fixture. Refer to the Model 8009
Instruction Manual for details on using the test fixture.

The following procedure requires “BENCH” reset conditions. See “Bench defaults” to
reset the instrument.

1. With zero check enabled (“ZeroCheck” displayed), select the ohms function by
pressing R.

2. Select Auto V-Source ohms. In this mode, the V-Source is automatically set to a
voltage (nominally 40V or 400V) that optimizes measurement accuracy. See “Auto
V-Source” located under “Resistance Measurements” to select Auto V-Source
ohms.

NOTE “BENCH” reset conditions selects Manual V-Source ohms. In this mode, you

must manually set the V-Source level for the measurement. See “Voltage Source”
for details on using the V-Source.

WARNING Selecting Auto V-Source ohms may set the V-Source to 400V.

3. Select a measurement range or use autoranging:

a. To automatically select the most sensitive range, enable autorange. The AUTO

key enables and disables autorange. When enabled, the AUTO annunciator is
on.

b. For manual ranging, use the RANGE

range consistent with the expected resistance.

4. Connect the Model 6517A to the Model 8009 test fixture as shown in Figure 1-6,
and set the switch on the test fixture to the desired measurement type (Surface or
Volume).

5. Select the resistivity measurement mode as follows:

a. Press the CONFIG and then R to display the ohms configuration menu.

b. Use the  and  keys to place the cursor (blinking menu item) on MEAS-

TYPE and press ENTER.

c. Place the cursor on RESISTIVITY and press ENTER.

NOTE The Model 6517A senses the switch position (surface or volume) on the Model

8009 through the interlock cable, and automatically configures the instrument
for that measurement type.

 and  keys to select a measurement

1-18 Front Panel Operation Model 6517A Getting Started Manual

d. Cursor position (SURFACE or VOLUME menu item blinking) indicates the

selected measurement type:

• SURFACE — If Surface is the selected measurement type, you do not
have to proceed any further into the menu structure. Use the EXIT key to
exit from the menu.

• VOLUME — If Volume is the selected measurement type, proceed as fol­lows to specify the thickness of the sample:

(1) With the cursor on VOLUME, press ENTER to display the parameters

menu for volume.

(2) Place the cursor on THICKNESS and press ENTER. The present thick-

ness parameter for the sample will be displayed.

(3) Use the cursor keys (

 and ) and the RANGE  and  keys to specify

the thickness (in millimeters) of the sample, and then press ENTER.

(4) Use the EXIT key to back out of the menu structure.

6. Disable zero check by pressing Z-CHK.

7. Press OPER to source voltage to the DUT and, after an appropriate electrification
time, take a reading from the display. Typically, an electrification time of 60 sec­onds is used.

8. Place the V-Source in standby when finished by again pressing OPER.

WARNING Place the V-Source in standby before making or breaking connections

to the test fixture or DUT.

Model 6517A Getting Started Manual Front Panel Operation 1-19

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING.

CAUTION:FOR CONTINUED PROTECTION AGAINST FIRE HAZARD,REPLACE FUSE WITH SAME TYPE AND RATING.

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY.

WARNING:NO INTERNAL OPERATOR SERVICABLE PARTS,SERVICE BY QUALIFIED PERSONNEL ONLY.

Figure 1-6

Resistivity measurements

Model 8009

!

METER SOURCE

TRIAX

250 MAX

HI-LO

!

INPUT

250V PEAK

LID

MAX INPUT

1100V

INTERLOCK

Warning: Connect of fixture to

6517-ILC-3 Interlock Cable

8607 Banana Plug Cable

8607 Banana Plug Cable

7078-TRX-3 Triax Cable

LO HI

COMMON

PREAMP OUT

250V PEAK

safety earth ground using
safety ground wire.

V SOURCE

!

INTERLOCK

OUT

LINE RATING

90-134VAC
180-250VAC

50, 60, 400HZ

55VA MAX

(CHANGE IEEE ADDRESS

WITH FRONT PANEL MENU)

IEEE-488

LINE FUSE

SLOWBLOW

1/2A, 250V

Model 6517A