Keithley 6430 User Manual

Model 6430 Sub-Femtoamp Remote SourceMeter

Instruction Manual

A GREATER MEASURE OF CONFIDENCE

WARRANTY

Keithley Instruments, Inc. warrants this product to be free from defects in material and workmanship for a
period of 1 year from date of shipment.

Keithley Instruments, Inc. warrants the following items for 90 days from the date of shipment: probes, cables,
rechargeable batteries, diskettes, and documentation.

During the warranty period, we will, at our option, either repair or replace any product that proves to be
defective.

To exercise this warranty, write or call your local Keithley representative, or contact Keithley headquarters in
Cleveland, Ohio. You will be given prompt assistance and return instructions. Send the product, transportation
prepaid, to the indicated service facility. Repairs will be made and the product returned, transportation prepaid.
Repaired or replaced products are warranted for the balance of the original warranty period, or at least 90 days.

LIMITATION OF WARRANTY

This warranty does not apply to defects resulting from product modification without Keithley’s express written
consent, or misuse of any product or part. This warranty also does not apply to fuses, software, non­rechargeable batteries, damage from battery leakage, or problems arising from normal wear or failure to follow
instructions.

THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES, EXPRESSED OR IMPLIED, INCLUD­ING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE.
THE REMEDIES PROVIDED HEREIN ARE BUYER’S SOLE AND EXCLUSIVE REMEDIES.

NEITHER KEITHLEY INSTRUMENTS, INC. NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR
ANY DIRECT, INDIRECT, SPECIAL, INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF
THE USE OF ITS INSTRUMENTS AND SOFTWARE EVEN IF KEITHLEY INSTRUMENTS, INC., HAS
BEEN ADVISED IN ADVANCE OF THE POSSIBILITY OF SUCH DAMAGES. SUCH EXCLUDED DAM­AGES SHALL INCLUDE, BUT ARE NOT LIMITED TO: COSTS OF REMOVAL AND INSTALLATION,
LOSSES SUSTAINED AS THE RESULT OF INJURY T O ANY PERSON, OR DAMAGE T O PROPERTY.

Keithley Instruments, Inc. • 28775 Aurora Road • Cleveland, OH 44139 • 440-248-0400 • Fax: [phone] • http://www.keithley.com

BELGIUM: Keithley Instruments B.V. Bergensesteenweg 709 • B-1600 Sint-Pieters-Leeuw • 02/363 00 40 • Fax: [phone]
CHINA: Keithley Instruments China Y uan Chen Xin Building, Room 705 • 12 Yumin Road, Dewai, Madian • Beijing 100029 • 8610-62022886 • Fax: [phone]
FRANCE: Keithley Instruments Sarl 3, allée des Garays • 91127 Palaiseau Cedex • 01-64 53 20 20 • Fax: [phone]
GERMANY: Keithley Instruments GmbH Landsberger Strasse 65 • 82110 Germering • 089/84 93 07-40 • Fax: [phone]
GREAT BRITAIN: Keithley Instruments Ltd Unit 2 Commerce Park, Brunel Road • Theale • Reading • Berkshire RG7 4AB • 0118 929 7500 • Fax: [phone]
INDIA: Keithley Instruments GmbH Flat 2B, WILOCRISSA • 14, Rest House Crescent • Bangalore 560 001 • 91-80-509-1320/21 • Fax: [phone]
ITALY: Keithley Instruments s.r.l. Viale S. Gimignano, 38 • 20146 Milano • 02-48 39 16 01 • Fax: [phone]
NETHERLANDS: Keithley Instruments B.V. Postbus 559 • 4200 AN Gorinchem • 0183-635333 • Fax: [phone]
SWITZERLAND: Keithley Instruments SA Kriesbachstrasse 4 • 8600 Dübendorf • 01-821 94 44 • Fax: [phone]
TAIWAN: Keithley Instruments Taiwan 1 Fl. 85 Po Ai Street • Hsinchu, Taiwan, R.O.C. • 886-3572-9077 • Fax: [phone]

4/01

Model 6430 Sub-Femtoamp Remote SourceMeter

Instruction Manual

©1999, Keithley Instruments, Inc.

All rights reserved.

Cleveland, Ohio, U.S.A.

Fourth Printing, June 2001

Document Number: 6430-901-01 Rev. D

Manual Print History

The print history shown below lists the printing dates of all Revisions and Addenda
created for this manual. The Revision Level letter increases alphabetically as the manual
undergoes subsequent updates. Addenda, which are released between Revisions, contain
important change information that the user should incorporate immediately into the
manual. Addenda are numbered sequentially. When a new Revision is created, all Addenda
associated with the previous Revision of the manual are incorporated into the new Revision
of the manual. Each new Revision includes a revised copy of this print history page.

Revision A (Document Number 6430-901-01) ................................................................ May 1999

Addendum A (Document Number 6430-901-02) ............................................................ June 1999

Revision B (Document Number 6430-901-01) ...................................................... September 1999

Addendum B (Document Number 6430-901-02) .................................................. November 1999

Revision C (Document Number 6430-901-01) ........................................................... January 2000

Revision D (Document Number 6430-901-01) ............................................................... June 2001

All Keithley product names are trademarks or registered trademarks of Keithley Instruments, Inc.
Other brand names are trademarks or registered trademarks of their respective holders.

Safety Precautions

The following safety precautions should be observed before using this product and any associated in­strumentation. Although some instruments and accessories would normally be used with non-hazardous
voltages, there are situations where hazardous conditions may be present.

This product is intended for use by qualified personnel who recognize shock hazards and are familiar
with the safety precautions required to avoid possible injury. Read the operating information carefully
before using the product.

The types of product users are:
Responsible body is the individual or group responsible for the use and maintenance of equipment, for

ensuring that the equipment is operated within its specifications and operating limits, and for ensuring
that operators are adequately trained.

Operators use the product for its intended function. They must be trained in electrical safety procedures
and proper use of the instrument. They must be protected from electric shock and contact with hazardous
live circuits.

Maintenance personnel perform routine procedures on the product to keep it operating, for example,
setting the line voltage or replacing consumable materials. Maintenance procedures are described in the
manual. The procedures explicitly state if the operator may perform them. Otherwise, they should be
performed only by service personnel.

Service personnel are trained to w ork on li v e circuits, and perform safe installations and repairs of prod­ucts. Only properly trained service personnel may perform installation and service procedures.

Keithley products are designed for use with electrical signals that are rated Installation Category I and
Installation Category II, as described in the International Electrotechnical Commission (IEC) Standard
IEC 60664. Most measurement, control, and data I/O signals are Installation Category I and must not
be directly connected to mains voltage or to voltage sources with high transient over-voltages. Installa­tion Category II connections require protection for high transient o v er -v oltages often associated with lo­cal AC mains connections. The user should assume all measurement, control, and data I/O connections
are for connection to Category I sources unless otherwise marked or described in the Manual.

Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable con­nector jacks or test fixtures. The American National Standards Institute (ANSI) states that a shock haz­ard exists when voltage levels greater than 30V RMS, 42.4V peak, or 60VDC are present. A good safety

practice is to expect that hazardous voltage is present in any unknown circuit before measuring.

Users of this product must be protected from electric shock at all times. The responsible body must en­sure that users are prevented access and/or insulated from every connection point. In some cases, con­nections must be exposed to potential human contact. Product users in these circumstances must be
trained to protect themselves from the risk of electric shock. If the circuit is capable of operating at or
above 1000 volts, no conductive part of the circuit may be exposed.

Do not connect switching cards directly to unlimited power circuits. They are intended to be used with
impedance limited sources. NEVER connect switching cards directly to AC mains. When connecting
sources to switching cards, install protective devices to limit fault current and voltage to the card.

Before operating an instrument, make sure the line cord is connected to a properly grounded power re­ceptacle. Inspect the connecting cables, test leads, and jumpers for possible wear, cracks, or breaks be­fore each use.

When installing equipment where access to the main power cord is restricted, such as rack mounting, a
separate main input power disconnect device must be provided, in close proximity to the equipment and
within easy reach of the operator.

For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to
the circuit under test. AL WAYS remove power from the entire test system and discharge any capacitors before:
connecting or disconnecting cables or jumpers, installing or removing switching cards, or making internal
changes, such as installing or removing jumpers.

Do not touch any object that could provide a current path to the common side of the circuit under test or power
line (earth) ground. Always make measurements with dry hands while standing on a dry, insulated surface ca­pable of withstanding the voltage being measured.

The instrument and accessories must be used in accordance with its specifications and operating instructions
or the safety of the equipment may be impaired.

Do not exceed the maximum signal levels of the instruments and accessories, as defined in the specifications
and operating information, and as shown on the instrument or test fixture panels, or switching card.

When fuses are used in a product, replace with same type and rating for continued protection against fire hazard.
Chassis connections must only be used as shield connections for measuring circuits, NOT as safety earth

ground connections.
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation

requires the use of a lid interlock.
If a scre w is present, connect it to safety earth ground using the wire recommended in the user documentation.

!

The symbol on an instrument indicates that the user should refer to the operating instructions located in
the manual.

The symbol on an instrument shows that it can source or measure 1000 volts or more, including the com­bined effect of normal and common mode voltages. Use standard safety precautions to a v oid personal contact
with these voltages.

The WARNING heading in a manual explains dangers that might result in personal injury or death. Always
read the associated information very carefully before performing the indicated procedure.

The CAUTION heading in a manual explains hazards that could damage the instrument. Such damage may
invalidate the warranty .

Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and all test cables.
To maintain protection from electric shock and fire, replacement components in mains circuits, including the

power transformer, test leads, and input jacks, must be purchased from Keithley Instruments. Standard fuses,
with applicable national safety approvals, may be used if the rating and type are the same. Other components
that are not safety related may be purchased from other suppliers as long as they are equivalent to the original
component. (Note that selected parts should be purchased only through Keithley Instruments to maintain ac­curacy and functionality of the product.) If you are unsure about the applicability of a replacement component,
call a Keithley Instruments office for information.

To clean an instrument, use a damp cloth or mild, water based cleaner. Clean the exterior of the instrument
only. Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Prod­ucts that consist of a circuit board with no case or chassis (e.g., data acquisition board for installation into a
computer) should never require cleaning if handled according to instructions. If the board becomes contami­nated and operation is affected, the board should be returned to the factory for proper cleaning/servicing.

Rev . 2/01

Table of Contents

1 Getting Started

General information ................................................................... 1-2

Warranty information .......................................................... 1-2

Contact information ............................................................ 1-2

Manual addenda .................................................................. 1-2

Safety symbols and terms ................................................... 1-2

Inspection ............................................................................ 1-3

Options and accessories ...................................................... 1-3

Product overview ........................................................................ 1-6

Mainframe and Remote PreAmp familiarization ....................... 1-7

Mainframe front panel summary ........................................ 1-7

Mainframe rear panel summary .......................................... 1-9

Remote PreAmp summary ................................................ 1-10

Power-up .................................................................................. 1-12

Line power connection ...................................................... 1-12

Power-up sequence ........................................................... 1-13

System identification ......................................................... 1-13

Line frequency setting ....................................................... 1-13

Fuse replacement .............................................................. 1-14

Display ..................................................................................... 1-15

Display format .................................................................. 1-15

EDIT key ........................................................................... 1-15

TOGGLE key .................................................................... 1-15

Status and error messages ................................................. 1-16

Remote display programming ........................................... 1-16

Front panel tests ................................................................ 1-16

Disabling front panel display ............................................ 1-16

Default settings ......................................................................... 1-17

Saving and restoring user setups ....................................... 1-17

Power-on configuration ..................................................... 1-18

Factory default settings ..................................................... 1-18

Remote setups ................................................................... 1-20

Menus ....................................................................................... 1-21

Main menu ........................................................................ 1-21

Rules to navigate menus ................................................... 1-24

Editing source and compliance values .............................. 1-25

Toggling the source and measure display fields ................ 1-25

Configuration menus ......................................................... 1-26

2 Connections

Connection overview .................................................................. 2-2

Connecting Remote PreAmp to the mainframe .................. 2-2

Source-measure terminals ................................................... 2-3

Test fixture interlock ............................................................ 2-5

Connections to DUT ................................................................... 2-6

Sensing methods .................................................................. 2-6

Guarding methods ...................................................................... 2-9

Cable guard ......................................................................... 2-9

Ohms guard ....................................................................... 2-10

Guard selection .................................................................. 2-13

3 Basic Source-Measure Operation

CAUTION .................................................................................. 3-2

Operation overview .................................................................... 3-3

Source-measure capabilities ................................................ 3-3

Compliance limit ................................................................. 3-4

Setting the compliance limit ................................................ 3-5

Basic circuit configuration .................................................. 3-6

Operation considerations ............................................................ 3-6

Warm-up .............................................................................. 3-6

Auto zero ............................................................................. 3-6

NPLC caching ..................................................................... 3-7

V-source protection ............................................................. 3-8

Source delay ........................................................................ 3-9

Basic source-measure procedure .............................................. 3-10

Output control ................................................................... 3-10

Current measurements and capacitive loads ...................... 3-11

Front panel source-measure procedure ............................. 3-12

Remote command source-measure procedure ................... 3-15

Measure only ............................................................................ 3-17

Front panel measure only .................................................. 3-17

Remote command measure only ....................................... 3-18

Sink operation ........................................................................... 3-19

Overview ........................................................................... 3-19

Sink programming example .............................................. 3-19

4 Ohms Measurements

Ohms configuration menu .......................................................... 4-2

Ohms measurement methods ..................................................... 4-3

Selecting ohms measurement method ................................. 4-4

Auto ohms measurements ................................................... 4-4

Manual ohms measurements ............................................... 4-5

Ohms sensing ............................................................................. 4-6

Offset-compensated ohms .......................................................... 4-7

Measuring high resistance devices ...................................... 4-7

Enabling/disabling offset-compensated ohms .................... 4-8

Offset-compensated ohms procedure .................................. 4-8

Ohms source readback ............................................................... 4-9

6-wire ohms measurements ........................................................ 4-9

Remote ohms programming ..................................................... 4-10

Remote ohms commands .................................................. 4-10

Ohms programming example ............................................ 4-10

5 Source-Measure Concepts

Compliance limit ........................................................................ 5-2

Types of compliance ........................................................... 5-2

Maximum compliance values ............................................. 5-3

Compliance examples ......................................................... 5-3

Compliance principles ........................................................ 5-4

Determining compliance limit ............................................ 5-4

Overheating protection ............................................................... 5-5

Source-delay-measure cycle ....................................................... 5-6

Sweep waveforms ............................................................... 5-8

Operating boundaries ................................................................. 5-9

Source or sink ..................................................................... 5-9

I -Source operating boundaries ......................................... 5-10

V-Source operating boundaries ......................................... 5-14

Source I measure I and source V measure V .................... 5-18

Basic circuit configurations ...................................................... 5-18

Source I ............................................................................. 5-18

Source V ............................................................................ 5-20

Measure only (V or I) ....................................................... 5-21

Guard ........................................................................................ 5-22

Cable guard ....................................................................... 5-22

Ohms guard ....................................................................... 5-24

Guard sense ....................................................................... 5-24

Data flow .................................................................................. 5-26

Buffer considerations ........................................................ 5-28

6 Range, Digits, Speed, and Filters

Range and digits ......................................................................... 6-2

Range ................................................................................... 6-2

Digits ................................................................................... 6-5

Remote range and digits programming ............................... 6-6

Speed .......................................................................................... 6-7

Setting speed ....................................................................... 6-7

Remote speed programming ................................................ 6-8

Filters .......................................................................................... 6-9

Filter stages ......................................................................... 6-9

Auto filter .......................................................................... 6-13

Filter configuration ............................................................ 6-15

Filter control ...................................................................... 6-16

Remote filter programming ............................................... 6-16

7 Relative and Math

Relative ....................................................................................... 7-2

Front panel rel ..................................................................... 7-2

Remote rel programming .................................................... 7-3

Math operations .......................................................................... 7-4

Math functions ..................................................................... 7-4

Front panel math operations ................................................ 7-7

Remote math operations ...................................................... 7-8

User-defined math functions ............................................. 7-10

8 Data Store

Data store overview .................................................................... 8-2

Front panel data store ................................................................. 8-2

Storing readings ................................................................... 8-2

Recalling readings ............................................................... 8-2

Buffer statistics .................................................................... 8-3

Timestamp format ............................................................... 8-4

Timestamp accuracy ............................................................ 8-4

Buffer considerations .......................................................... 8-5

Remote command data store ...................................................... 8-6

Data store commands .......................................................... 8-6

Data store programming example ....................................... 8-7

9 Sweep Operation

Sweep types ................................................................................ 9-2

Linear staircase sweep ........................................................ 9-2

Logarithmic staircase sweep ............................................... 9-3

Custom sweep ..................................................................... 9-4

Source memory sweep ........................................................ 9-5

Configuring and running a sweep ............................................ 9-11

Front panel sweep operation ............................................. 9-11

Performing sweeps ............................................................ 9-13

Remote sweep operation ................................................... 9-18

10 Triggering

Trigger model (front panel operation) ...................................... 10-2

Idle .................................................................................... 10-2

Event detection .................................................................. 10-4

Trigger delay ..................................................................... 10-5

Source, delay, and measure actions ................................... 10-5

Counters ............................................................................ 10-6

Output triggers .................................................................. 10-6

Bench defaults ................................................................... 10-7

Operation summary ........................................................... 10-7

Trigger link ............................................................................... 10-8

Input trigger requirements ................................................. 10-8

Output trigger specifications ............................................. 10-9

External triggering example .............................................. 10-9

Configuring triggering ............................................................ 10-13

CONFIGURE TRIGGER menu ..................................... 10-13

Remote triggering .................................................................. 10-16

Trigger model (remote operation) ................................... 10-16

Idle and initiate ............................................................... 10-16

Event detection ................................................................ 10-18

Arm layer ........................................................................ 10-18

Trigger layer .................................................................... 10-19

Trigger delay ................................................................... 10-20

Source, delay, and measure actions ................................. 10-20

Counters .......................................................................... 10-21

Output triggers ............................................................... 10-21

GPIB defaults .................................................................. 10-22

Operation summary ......................................................... 10-22

Remote trigger commands .............................................. 10-23

Remote trigger example .................................................. 10-24

11 Limit Testing

Types of limits .......................................................................... 11-2

Pass/fail information .......................................................... 11-2

Data flow ........................................................................... 11-3

Limit 1 test (compliance) .................................................. 11-3

Limit 2, limit 3, and limit 5-12 tests .................................. 11-3

Limit test modes ................................................................ 11-4

Binning .............................................................................. 11-4

Operation overview .................................................................. 11-4

Grading mode .................................................................... 11-4

Sorting mode ..................................................................... 11-8

Binning systems ...................................................................... 11-10

Handler interface ............................................................. 11-10

Handler types ................................................................... 11-11

Basic binning systems ..................................................... 11-12

Single-element device binning ........................................ 11-12

Multiple-element device binning ..................................... 11-13

Digital output clear pattern ..................................................... 11-14

Auto-clear timing ............................................................ 11-14

Configuring and performing limit tests .................................. 11-15

Configuring limit tests ..................................................... 11-15

Performing limit tests ...................................................... 11-17

Remote limit testing ............................................................... 11-19

Limit commands .............................................................. 11-19

Limit test programming example .................................... 11-20

12 Digital I/O Port, Interlock, and Output Configuration

Digital I/O port ......................................................................... 12-2

Port configuration .............................................................. 12-2

Digital output configuration .............................................. 12-3

Controlling digital output lines ......................................... 12-4

Safety interlock ......................................................................... 12-6

Front panel output configuration .............................................. 12-7

Configure OUTPUT menu ................................................ 12-7

Output-off states ................................................................ 12-8

Output off states and inductive loads ................................ 12-9

Remote output configuration .................................................... 12-9

Output configuration commands ....................................... 12-9

Output configuration programming example .................. 12-10

13 Remote Operations

Differences: remote vs. local operation .................................... 13-2

Operation enhancements (remote operation) .................... 13-2

Local-to-remote transition ................................................ 13-2

Remote-to-local transition ................................................ 13-3

Selecting an interface ............................................................... 13-3

GPIB operation ........................................................................ 13-4

GPIB standards ................................................................. 13-4

GPIB connections ............................................................. 13-4

Primary address ................................................................. 13-6

General bus commands ............................................................ 13-6

REN (remote enable) ........................................................ 13-7

IFC (interface clear) .......................................................... 13-7

LLO (local lockout) .......................................................... 13-7

GTL (go to local) .............................................................. 13-7

DCL (device clear) ............................................................ 13-8

SDC (selective device clear) ............................................. 13-8

GET (group execute trigger) ............................................. 13-8

SPE, SPD (serial polling) .................................................. 13-8

Front panel GPIB operation ..................................................... 13-9

Error and status messages ................................................. 13-9

GPIB status indicators ....................................................... 13-9

LOCAL key .................................................................... 13-10

Programming syntax .............................................................. 13-10

Command words ............................................................. 13-10

Query commands ............................................................ 13-12

Case sensitivity ............................................................... 13-12

Long-form and short-form versions ................................ 13-12

Short-form rules .............................................................. 13-13

Program messages ........................................................... 13-13

Response messages ......................................................... 13-15

Message exchange protocol ............................................ 13-16

RS-232 interface operation .................................................... 13-16

Sending and receiving data ............................................. 13-16

Baud rate ......................................................................... 13-17

Data bits and parity ......................................................... 13-17

Terminator ....................................................................... 13-17

Flow control (signal handshaking) .................................. 13-18

RS-232 connections ........................................................ 13-18

Error messages ................................................................ 13-19

Programming example .................................................... 13-20

14 Status Structure

Overview .................................................................................. 14-2

Status byte and SRQ .......................................................... 14-2

Status register sets ............................................................. 14-2

Queues ............................................................................... 14-2

Clearing registers and queues ................................................... 14-4

Programming and reading registers .......................................... 14-5

Programming enable registers ........................................... 14-5

Reading registers .............................................................. 14-6

Status byte and service request (SRQ) ..................................... 14-7

Status Byte Register .......................................................... 14-8

Service Request Enable Register ....................................... 14-9

Serial polling and SRQ ...................................................... 14-9

Status byte and service request commands ..................... 14-10

Status register sets .................................................................. 14-11

Register bit descriptions .................................................. 14-11

Condition registers .......................................................... 14-16

Event registers ................................................................. 14-17

Event enable registers ...................................................... 14-17

Queues .................................................................................... 14-19

Output queue ................................................................... 14-19

Error queue ...................................................................... 14-19

15 Common Commands

Command summary .................................................................. 15-2

Command reference .................................................................. 15-3

*IDN? — identification query ........................................... 15-3

*OPC — operation complete ............................................ 15-3

*OPC? — operation complete query ................................ 15-3

*SAV <NRf> — save ........................................................ 15-4

*RCL <NRf> — recall ...................................................... 15-4

*RST — reset .................................................................... 15-5

*TRG — trigger ................................................................ 15-5

*TST? — self-test query ................................................... 15-6

*WAI — wait-to-continue ................................................. 15-6

16 SCPI Signal-Oriented Measurement Commands

Command summary ................................................................. 16-2

Configuring measurement function .......................................... 16-2

:CONFigure:<function> .................................................... 16-2

Acquiring readings ................................................................... 16-3

:FETCh? ............................................................................ 16-3

[:SENSe[1]]:DATA[:LATest]? .......................................... 16-4

:READ? ............................................................................. 16-4

:MEASure[:<function>]? .................................................. 16-5

17 SCPI Command Reference

Reference tables ....................................................................... 17-2

Calculate subsystems ............................................................. 17-22

CALCulate[1] ......................................................................... 17-22

Select (create) math expression name ............................. 17-22

Assign unit suffix ............................................................ 17-27

Define math expression ................................................... 17-27

Enable and read math expression result .......................... 17-30

CALCulate2 ........................................................................... 17-31

Select input path .............................................................. 17-31

Null feed reading ............................................................. 17-31

Read CALC2 ................................................................... 17-32

Configure and control limit tests ..................................... 17-33

Composite testing ............................................................ 17-37

Clear test results ............................................................. 17-39

CALCulate3 ........................................................................... 17-40

Select statistic .................................................................. 17-40

Acquire statistic .............................................................. 17-40

:DISPlay subsystem ............................................................... 17-41

Control display ................................................................ 17-41

Read display .................................................................... 17-43

Define :TEXT messages ................................................. 17-43

FORMat subsystem ................................................................ 17-44

Data format ..................................................................... 17-44

Data elements .................................................................. 17-46

CALC data elements ....................................................... 17-50

Byte order ........................................................................ 17-51

Status register format ...................................................... 17-51

OUTPut subsystem ................................................................ 17-52

Turn source on or off ....................................................... 17-52

Interlock control .............................................................. 17-52

Output-off states .............................................................. 17-53

SENSe1 subsystem ................................................................. 17-54

Select measurement functions ......................................... 17-54

Select measurement range ............................................... 17-57

Select auto range ............................................................. 17-58

Set compliance limit ........................................................ 17-59

Set measurement speed ................................................... 17-60

Configure and control filters ............................................ 17-60

SOURce subsystem ................................................................ 17-64

SOURce[1] ...................................................................... 17-64

Control source output-off ................................................ 17-64

Select function mode ....................................................... 17-65

Select sourcing mode ...................................................... 17-65

Select range ..................................................................... 17-66

Set amplitude for fixed source ......................................... 17-67

Set voltage limit ............................................................... 17-69

Set delay .......................................................................... 17-70

Configure voltage and current sweeps ............................. 17-71

Configure list ................................................................... 17-76

Configure memory sweep ................................................ 17-77

Set scaling factor ............................................................. 17-79

Sweep and list program examples ................................... 17-80

Soak time ......................................................................... 17-82

SOURce2 ......................................................................... 17-82

Setting digital output ....................................................... 17-82

Clearing digital output ..................................................... 17-84

STATus subsystem .................................................................. 17-86

Read event registers ......................................................... 17-86

Program event enable registers ........................................ 17-86

Read condition registers .................................................. 17-87

Select default conditions ................................................. 17-87

Error queue ...................................................................... 17-87

:SYSTem subsystem ............................................................... 17-89

Default conditions ........................................................... 17-89

Select guard mode ........................................................... 17-90

Initialize memory ............................................................ 17-90

Control beeper ................................................................. 17-91

Control auto zero ............................................................. 17-92

Control NPLC caching .................................................... 17-92

Select power line frequency setting ................................. 17-93

Error queue ...................................................................... 17-94

Simulate key presses ....................................................... 17-95

Read version of SCPI standard ........................................ 17-96

RS-232 interface .............................................................. 17-97

Query timestamp ............................................................. 17-97

Reset timestamp .............................................................. 17-98

Auto reset timestamp ...................................................... 17-98

Auto range change mode ................................................ 17-98

:TRACe subsystem ................................................................. 17-99

Read and clear buffer ...................................................... 17-99

Configure and control buffer ........................................... 17-99

Select timestamp format ............................................... 17-101

TRIGger subsystem .............................................................. 17-102

Clear input triggers ....................................................... 17-102

Initiate source/measure cycle ........................................ 17-102

Abort source/measure cycle .......................................... 17-103

Program trigger model .................................................. 17-103

18 Performance Verification

Introduction .............................................................................. 18-2

Verification test requirements ................................................... 18-2

Environmental conditions ................................................. 18-2

Warm-up period ................................................................ 18-3

Line power ........................................................................ 18-3

Recommended test equipment ................................................. 18-3

Test resistor construction ................................................. 18-5

Verification limits ..................................................................... 18-5

Example limits calculation ................................................ 18-5

Resistance limits calculation ............................................. 18-6

Limits calculation with test equipment uncertainty .......... 18-6

Performing the verification test procedures ............................. 18-6

Restoring factory defaults ................................................. 18-6

Test summary .................................................................... 18-7

Test considerations ............................................................ 18-7

Setting the source range and output value ........................ 18-8

Setting the measurement range ......................................... 18-8

Compliance considerations ...................................................... 18-8

Compliance limits ............................................................. 18-8

Types of compliance ......................................................... 18-8

Maximum compliance values ........................................... 18-9

Determining compliance limit ........................................ 18-10

Taking the unit out of compliance ................................... 18-10

Mainframe verification ........................................................... 18-10

Mainframe output voltage accuracy ................................ 18-10

Mainframe voltage measurement accuracy ..................... 18-12

Mainframe output current accuracy ................................ 18-12

Mainframe current measurement accuracy ..................... 18-14

Mainframe resistance measurement accuracy ................ 18-15

Remote PreAmp verification .................................................. 18-17

Connecting Remote PreAmp to the mainframe .............. 18-17

Remote PreAmp output voltage accuracy ....................... 18-18

Remote PreAmp voltage measurement accuracy ............ 18-19

Remote PreAmp output current accuracy ....................... 18-20

Remote PreAmp current measurement accuracy ............ 18-24

Remote PreAmp resistance measurement accuracy ........ 18-26

20Ω-200MΩ range accuracy ........................................... 18-26

2GΩ-200GΩ range accuracy ........................................... 18-28

2TΩ and 20TΩ range accuracy ....................................... 18-30

19 Calibration

Introduction .............................................................................. 19-2

Environmental conditions ......................................................... 19-2

T emperature and relativ e humidity .................................... 19-2

Warm-up period ................................................................. 19-2

Line power ......................................................................... 19-2

Calibration considerations ........................................................ 19-3

Calibration cycle ................................................................ 19-3

Recommended calibration equipment ...................................... 19-4

Unlocking calibration ............................................................... 19-5

Mainframe calibration .............................................................. 19-6

Mainframe calibration menu ............................................. 19-6

Mainframe calibration procedure ...................................... 19-6

Remote PreAmp calibration ................................................... 19-14

Connecting Remote PreAmp to the mainframe .............. 19-14

Remote PreAmp calibration menu .................................. 19-14

Remote PreAmp calibration procedure ........................... 19-15

Changing the password ........................................................... 19-21

Resetting the calibration password .................................. 19-21

Viewing calibration dates and calibration count ..................... 19-22

20 Routine Maintenance

Introduction .............................................................................. 20-2

Line fuse replacement ............................................................... 20-2

Front panel tests ........................................................................ 20-3

KEYS test .......................................................................... 20-3

DISPLAY PATTERNS test ............................................... 20-4

CHAR SET test ................................................................. 20-4

A Specifications

Accuracy calculations ............................................................... A-7

Measure accuracy ............................................................... A-7

Source accuracy ................................................................. A-7

Source-Delay-Measure (SDM) cycle timing ............................ A-8

Definitions .......................................................................... A-8

Timing diagrams ................................................................ A-9

B Status and Error Messages

Introduction ............................................................................... B-2

Status and error messages ......................................................... B-2

Eliminating common SCPI errors ............................................. B-8

C Data Flow

Introduction ............................................................................... C-2

FETCh? .............................................................................. C-3

CALCulate[1]:DATA? ....................................................... C-3

CALCulate2:DATA? .......................................................... C-3

TRACe:DATA? .................................................................. C-4

CALCulate3:DATA? .......................................................... C-4

D IEEE-488 Bus Overview

Introduction ............................................................................... D-2

Bus description .......................................................................... D-2

Bus lines .................................................................................... D-4

Data lines ........................................................................... D-4

Bus management lines ....................................................... D-5

Handshake lines ................................................................. D-5

Bus commands .......................................................................... D-6

Uniline commands ............................................................. D-7

Universal multiline commands .......................................... D-8

Addressed multiline commands ......................................... D-8

Address commands ............................................................ D-9

Unaddress commands ........................................................ D-9

Common commands .......................................................... D-9

SCPI commands ................................................................. D-9

Command codes ............................................................... D-10

Typical command sequences ............................................ D-12

IEEE command groups .................................................... D-13

Interface function codes .......................................................... D-14

E IEEE-488 and SCPI Conformance Information

Introduction ............................................................................... E-2

F Measurement Considerations

Floating measurement safety concerns ...................................... F-2

Low current measurements ........................................................ F-3

Leakage currents and guarding .......................................... F-3

Noise and source impedance .............................................. F-5

Generated currents .............................................................. F-6

Voltage burden .................................................................... F-9

Overload protection .......................................................... F-10

High impedance voltage measurements .................................. F-10

Loading effects ................................................................. F-10

Cable leakage resistance ................................................... F-11

Input capacitance (settling time) ...................................... F-11

High resistance measurements ................................................ F-13

Ohms measurement methods ........................................... F-13

Characteristics of high-valued resistors ........................... F-13

General measurement considerations ...................................... F-14

Ground loops .................................................................... F-14

Light ................................................................................. F-15

Electrostatic interference .................................................. F-15

Magnetic fields ................................................................. F-15

Electromagnetic Interference (EMI) ................................ F-16

G GPIB 488.1 Protocol

Introduction ............................................................................... G-2

Selecting the 488.1 protocol ...................................................... G-2

Protocol differences ................................................................... G-3

Message exchange protocol (MEP) .................................... G-3

Using SCPI-based programs .............................................. G-3

NRFD hold-off ................................................................... G-4

NDAC hold-off ................................................................... G-4

Trigger-on-talk ................................................................... G-5

Message available ............................................................... G-5

General operation notes ...................................................... G-5

GPIB reading speed comparisons .............................................. G-6

Sweep operation ................................................................. G-6

Single-shot operation .......................................................... G-7

List of Illustrations

1 Getting Started

Figure 1-1 Front panel ............................................................................. 1-7

Figure 1-2 Model 6430 rear panel ........................................................... 1-9

Figure 1-3 Remote preamp .................................................................... 1-10

Figure 1-4 Triax connectors ................................................................... 1-11

Figure 1-5 Main menu tree .................................................................... 1-23

2 Connections

Figure 2-1 Basic input/output configurations .......................................... 2-4

Figure 2-2 Two-wire sense connections .................................................. 2-6

Figure 2-3 Four-wire sense connections .................................................. 2-7

Figure 2-4 High-impedance guarding ...................................................... 2-9

Figure 2-5 Guarded ohms connections (basic) ...................................... 2-10

Figure 2-6 Guarded ohms connections (guard sense) ........................... 2-11

Figure 2-7 Guarded ohms connections (6-wire ohms) .......................... 2-12

3 Basic Source-Measure Operation

Figure 3-1 Fundamental source-measure configuration .......................... 3-6

4 Ohms Measurements

Figure 4-1 Ohms configuration ............................................................... 4-2

Figure 4-2 menu tree ................................................................................ 4-2

5 Source-Measure Concepts

Figure 5-1 Source-delay-measure (SDM) cycle ...................................... 5-6

Figure 5-2 Simplified trigger model ........................................................ 5-7

Figure 5-3 Three basic sweep waveform types ....................................... 5-8

Figure 5-4 Operating boundaries ........................................................... 5-10

Figure 5-5 I-Source boundaries ............................................................. 5-11

Figure 5-6 I-Source operating boundaries ............................................. 5-13

Figure 5-7 V-Source boundaries ............................................................ 5-15

Figure 5-8 V-Source operating examples .............................................. 5-17

Figure 5-9 Source I ................................................................................ 5-19

Figure 5-10 Source V ............................................................................... 5-20

Figure 5-11 Measure-only (V or I) .......................................................... 5-21

Figure 5-12 High-impedance measurements ........................................... 5-23

Figure 5-13 In-circuit ohms measurements ............................................. 5-24

Figure 5-14 In-circuit ohms measurements using guard sense ................ 5-25

Figure 5-15 Data flow front panel ........................................................... 5-27

6 Range, Digits, Speed, and Filters

Figure 6-1 Speed configuration menu tree ............................................... 6-8

Figure 6-2 3-stage filtering ....................................................................... 6-9

Figure 6-3 Repeat filter (count 10) ......................................................... 6-10

Figure 6-4 Median filter (rank 5) ........................................................... 6-11

Figure 6-5 Moving filter (count 10) ....................................................... 6-12

Figure 6-6 Configure filtering menu tree ............................................... 6-15

7 Relative and Math

Figure 7-1 Math configuration menu tree ................................................ 7-7

Figure 7-2 Connections for voltage coefficient tests ................................ 7-9

9 Sweep Operation

Figure 9-1 Linear staircase sweep ............................................................ 9-2

Figure 9-2 Logarithmic staircase sweep (example 5-point sweep

from 1 to 10 volts) ............................................................ 9-3

Figure 9-3 Custom pulse sweep ............................................................... 9-4

Figure 9-4 Custom sweep with different pulse widths ............................ 9-5

Figure 9-5 Six-point test branching example ........................................... 9-8

Figure 9-6 T ypical diode I-V curve and test points (not to scale) ............ 9-9

Figure 9-7 Sweep configuration menu tree ............................................ 9-12

Figure 9-8 Connections for diode I-V tests ............................................ 9-19

Figure 9-9 Diode I-V curve .................................................................... 9-19

10 Triggering

Figure 10-1 Trigger model (front panel operation) .................................. 10-3

Figure 10-2 Rear panel pinout ................................................................. 10-8

Figure 10-3 Trigger link input pulse specifications ................................. 10-8

Figure 10-4 Trigger link output pulse specifications ............................... 10-9

Figure 10-5 DUT test system ................................................................... 10-9

Figure 10-6 Trigger link connections ..................................................... 10-10

Figure 10-7 Operation model for triggering example ............................ 10-12

Figure 10-8 Configure trigger menu tree ............................................... 10-15

Figure 10-9 Trigger model (remote operation) ...................................... 10-17

Figure 10-10 Measure action ................................................................... 10-20

11 Limit Testing

Figure 11-1 Limits tests ........................................................................... 11-2

Figure 11-2 Grading mode limit testing ................................................... 11-5

Figure 11-3 Immediate binning ............................................................... 11-6

Figure 11-4 End binning .......................................................................... 11-6

Figure 11-5 Sorting mode limit testing .................................................... 11-9

Figure 11-6 Handler interface connections ............................................ 11-10

Figure 11-7 Binning system - single element devices ........................... 11-12

Figure 11-8 Binning system - multiple element devices ....................... 11-13

Figure 11-9 Digital output auto-clear timing example .......................... 11-15

Figure 11-10 Limits configuration menu tree .......................................... 11-17

Figure 11-11 Diode pass/fail limits ......................................................... 11-20

12 Digital I/O Port, Interlock, and Output Configuration

Figure 12-1 Interlock and digital I/O port ............................................... 12-2

Figure 12-2 Sink operation ...................................................................... 12-3

Figure 12-3 Source operation .................................................................. 12-4

Figure 12-4 Using test fixture interlock ................................................... 12-6

Figure 12-5 Output configuration menu tree ........................................... 12-7

13 Remote Operations

Figure 13-1 IEEE-488 connector ............................................................. 13-4

Figure 13-2 IEEE-488 connections ......................................................... 13-5

Figure 13-3 IEEE-488 connector location ............................................... 13-5

Figure 13-4 RS-232 interface connector ............................................... 13-18

14 Status Structure

Figure 14-1 SourceMeter status register structure ................................... 14-3

Figure 14-2 16-bit status register ............................................................. 14-5

Figure 14-3 Status byte and service request (SRQ) ................................. 14-7

Figure 14-4 Standard event status .......................................................... 14-11

Figure 14-5 Operation event status ........................................................ 14-13

Figure 14-6 Measurement event status .................................................. 14-15

Figure 14-7 Questionable event status ................................................... 14-16

17 SCPI Command Reference

Figure 17-1 ASCII data format .............................................................. 17-45

Figure 17-2 IEEE-754 single precision data format (32 data bits) ........ 17-45

Figure 17-3 Key-press codes ................................................................. 17-96

18 Performance Verification

Figure 18-1 Test resistor construction ...................................................... 18-5

Figure 18-2 Connections for mainframe voltage verification tests ........ 18-11

Figure 18-3 Connections for mainframe current verification tests ........ 18-13

Figure 18-4 Connections for mainframe resistance accuracy

verification .................................................................... 18-15

Figure 18-5 Connections for Remote PreAmp voltage

verification tests ............................................................ 18-18

Figure 18-6 Connections for 1µA-100mA range current

verification tests............................................................. 18-21

Figure 18-7 Connections for 1pA-100nA range current

verification tests............................................................. 18-22

Figure 18-8 Connections for Remote PreAmp 20Ω-200MΩ

range verification .......................................................... 18-27

Figure 18-9 Connections for Remote PreAmp 2GΩ-200GΩ

range verification .......................................................... 18-29

Figure 18-10 Connections for Remote PreAmp 2TΩ and 20TΩ

range verification .......................................................... 18-30

19 Calibration

Figure 19-1 Mainframe voltage calibration test connections ................... 19-7

Figure 19-2 Mainframe current calibration connections ....................... 19-10

Figure 19-3 Voltage burden calibration connections ............................. 19-16

Figure 19-4 1µA and 10µA range gain calibration connections ............ 19-17

Figure 19-5 1pA to 100nA range gain calibration connections ............. 19-19

20 Routine Maintenance

Figure 20-1 Rear panel ............................................................................. 20-2

A Specifications

Figure A-1 Case I timing diagram ........................................................... A-9

Figure A-2 Case II timing diagram ........................................................ A-10

Figure A-3 Case III timing diagram ...................................................... A-10

Figure A-4 Case IV timing diagram ...................................................... A-11

Figure A-5 Case V timing diagram ........................................................ A-12

Figure A-6 Case VI timing diagram ...................................................... A-12

C Data Flow

Figure C-1 Data flow block diagram ....................................................... C-2

D IEEE-488 Bus Overview

Figure D-1 IEEE-488 bus configuration .................................................. D-3

Figure D-2 IEEE-488 handshake sequence ............................................. D-6

Figure D-3 Command codes .................................................................. D-11

F Measurement Considerations

Figure F-1 Floating measurements .......................................................... F-2

Figure F-2 Guarding an ionization chamber ............................................ F-4

Figure F-3 Voltage burden ....................................................................... F-9

Figure F-4 Overload protection for ammeter input ............................... F-10

Figure F-5 Meter loading ....................................................................... F-11

Figure F-6 Effects of input capacitance ................................................. F-12

Figure F-7 Settling time ......................................................................... F-12

Figure F-8 Power line ground loops ...................................................... F-14

Figure F-9 Eliminating ground loops .................................................... F-14

G GPIB 488.1 Protocol

Figure G-1 IEEE-488 handshake sequence ............................................. G-4

List of Tables

1 Getting Started

Table 1-1 Line frequency remote commands ....................................... 1-14

Table 1-2 Basic display commands ...................................................... 1-16

Table 1-3 Factory default settings ........................................................ 1-19

Table 1-4 Main menu ........................................................................... 1-21

Table 1-5 Measurement configuration menus ...................................... 1-27

Table 1-6 Source and range configuration menus ................................ 1-28

Table 1-7 Rel, filter, and limit configuration menus ............................ 1-29

Table 1-8 Trigger configuration menu ................................................. 1-30

Table 1-9 Sweep, digits, speed, and data store configuration menus ... 1-31

Table 1-10 Output and display configuration menus ............................. 1-32

2 Connections

T able 2-1 Terminal equivalency between mainframe and

3 Basic Source-Measure Operation

Table 3-1 Compliance limits .................................................................. 3-4

Table 3-2 Compliance commands .......................................................... 3-5

Table 3-3 Typical NPLC cache test times .............................................. 3-8

Table 3-4 Auto source delay .................................................................. 3-9

Table 3-5 Maximum capacitive loads .................................................. 3-11

Table 3-6 Basic source-measure commands ........................................ 3-15

Table 3-7 Basic source-measure command sequence .......................... 3-16

Table 3-8 Measure only programming example .................................. 3-18

Table 3-9 Sink programming example ................................................. 3-19

Remote PreAmp ............................................................... 2-3

4 Ohms Measurements

Table 4-1 Auto ohms default test currents ............................................. 4-3

Table 4-2 Remote commands for basic ohms measurements .............. 4-10

Table 4-3 Commands for ohms programming example ....................... 4-10

5 Source-Measure Concepts

T able 5-1 Maximum compliance values ................................................ 5-3

Table 5-2 Compliance examples ............................................................ 5-5

Table 5-3 Buffer considerations ........................................................... 5-28

6 Range, Digits, Speed, and Filters

Table 6-1 Model 6430 ranges ................................................................. 6-2

Table 6-2 Range and digits commands ................................................... 6-6

Table 6-3 Range and digits programming example ................................ 6-7

Table 6-4 Speed commands .................................................................... 6-8

Table 6-5 Auto filter settings where NPLC = 0.01 to 0.10 ................... 6-13

Table 6-6 Auto filter settings where NPLC = 0.11 to 1.00 ................... 6-14

Table 6-7 Auto filter settings where NPLC = 1.01 to 10 ...................... 6-14

Table 6-8 Filter commands ................................................................... 6-16

Table 6-9 Filter programming example ................................................ 6-17

7 Relative and Math

Table 7-1 Rel commands ........................................................................ 7-3

Table 7-2 Rel programming example ..................................................... 7-3

Table 7-3 Math commands ..................................................................... 7-8

Table 7-4 Voltage coefficient programming example ............................. 7-9

Table 7-5 Commands for user-defined math functions ........................ 7-10

Table 7-6 User-defined math function programming example ............. 7-11

8 Data Store

Table 8-1 Data store commands ............................................................. 8-6

Table 8-2 Data store example ................................................................. 8-7

9 Sweep Operation

Table 9-1 Logarithmic sweep points ...................................................... 9-4

Table 9-2 Source memory saved configurations .................................... 9-7

Table 9-3 Linear and log staircase sweep commands .......................... 9-18

Table 9-4 Staircase sweep programming example (diode test) ............ 9-20

Table 9-5 Custom sweep commands .................................................... 9-20

Table 9-6 Custom sweep programming example ................................. 9-21

Table 9-7 Source memory sweep commands ....................................... 9-21

Table 9-8 Source memory sweep programming example .................... 9-22

10 Triggering

Table 10-1 Remote trigger command ................................................... 10-23

Table 10-2 Remote triggering example ................................................ 10-24

11 Limit Testing

Table 11-1 Limit commands ................................................................. 11-19

Table 11-2 Limits test programming example ...................................... 11-21

Table 11-3 Limits test results summary ............................................... 11-21

12 Digital I/O Port, Interlock, and Output Configuration

Table 12-1 Digital output line settings ................................................... 12-5

Table 12-2 Output configuration commands .......................................... 12-9

Table 12-3 Output configuration programming example ..................... 12-10

13 Remote Operations

Table 13-1 General bus commands ........................................................ 13-6

Table 13-2 PC serial port pinout .......................................................... 13-19

Table 13-3 RS-232 connector pinout ................................................... 13-19

14 Status Structure

Table 14-1 Common and SCPI commands to reset registers

and clear queues ............................................................. 14-4

Table 14-2 Data format commands for reading status registers ............. 14-7

Table 14-3 Status Byte and Service Request Enable Register

commands .................................................................... 14-10

Table 14-4 Status byte programming example .................................... 14-10

Table 14-5 Event register commands ................................................... 14-17

Table 14-6 Condition register commands ............................................ 14-17

Table 14-7 Program and read register programming example ............. 14-18

Table 14-8 Event enable registers commands ...................................... 14-18

Table 14-9 Error queue commands ...................................................... 14-20

15 Common Commands

Table 15-1 IEEE-488.2 common commands and queries ...................... 15-2

Table 15-2 *OPC programming example .............................................. 15-4

Table 15-3 *SAV, *RCL programming example ................................... 15-5

Table 15-4 *TRG programming example .............................................. 15-6

16 SCPI Signal-Oriented Measurement Commands

Table 16-1 Signal-oriented measurement command summary .............. 16-2

17 SCPI Command Reference

Table 17-1 CALCulate command summary .......................................... 17-3

Table 17-2 DISPlay command summary ............................................... 17-8

Table 17-3 FORMat command summary ............................................... 17-9

Table 17-4 OUTPut command summary ............................................... 17-9

Table 17-5 SENSe command summary ............................................... 17-10

Table 17-6 SOURce command summary ............................................. 17-13

Table 17-7 STATus command summary .............................................. 17-17

Table 17-8 SYSTem command summary ............................................ 17-18

Table 17-9 TRACe command summary .............................................. 17-19

Table 17-10 TRIGger command summary ............................................ 17-20

18 Performance Verification

Table 18-1 Recommended verification equipment ................................. 18-4

T able 18-2 Maximum compliance values ............................................... 18-9

Table 18-3 Mainframe output voltage accuracy limits ......................... 18-11

Table 18-4 Mainframe voltage measurement accuracy limits .............. 18-12

Table 18-5 Mainframe output current accuracy limits ......................... 18-13

Table 18-6 Mainframe current measurement accuracy limits .............. 18-14

Table 18-7 Mainframe resistance measurement accuracy limits .......... 18-16

Table 18-8 Remote PreAmp output voltage accuracy limits ................ 18-19

Table 18-9 Remote PreAmp voltage measurement accuracy limits ..... 18-20

Table 18-10 Remote PreAmp 1µA-100mA range output

current accuracy limits ................................................. 18-21

Table 18-11 Remote PreAmp 1pA-100nA range output current

accuracy limits .............................................................. 18-23

Table 18-12 Remote PreAmp 1µA-100mA range measurement

accuracy limits .............................................................. 18-24

Table 18-13 Remote PreAmp 1pA-100nA range measurement

accuracy limits .............................................................. 18-25

Table 18-14 Remote PreAmp 20Ω-200MΩ range measurement

accuracy limits .............................................................. 18-28

Table 18-15 Remote PreAmp 2GΩ-200GΩ range measurement

accuracy limits .............................................................. 18-30

Table 18-16 Remote PreAmp 2TΩ and 20TΩ range measurement

accuracy limits .............................................................. 18-31

19 Calibration

Table 19-1 Recommended calibration equipment .................................. 19-4

Table 19-2 Calibration unlocked states .................................................. 19-5

Table 19-3 Mainframe voltage calibration summary ............................. 19-9

Table 19-4 Mainframe current calibration summary ............................ 19-12

T able 19-5 Standard resistance values for 1pA-100nA

gain calibration ............................................................. 19-20

20 Routine Maintenance

Table 20-1 Power line fuse ..................................................................... 20-3

B Status and Error Messages

Table B-1 Status and error messages ..................................................... B-3