Keithley 595 Service manual

Model 595 Quasistatic CV Meter

Instruction Manual

A GREATER MEASURE OF CONFIDENCE

WARRANTY

Keithley Instruments, Inc. warrants this product to be free from defects in material and workmanship for a period of 1 year
from date of shipment.

Keithley Instruments, Inc. warrants the following items for 90 days from the date of shipment: probes, cables, rechargeable
batteries, diskettes, and documentation.

During the warranty period, we will, at our option, either repair or replace any product that proves to be defective.

To exercise this warranty, write or call your local Keithley representative, or contact Keithley headquarters in Cleveland, Ohio.
You will be given prompt assistance and return instructions. Send the product, transportation prepaid, to the indicated service
facility. Repairs will be made and the product returned, transportation prepaid. Repaired or replaced products are warranted for
the balance of the original warranty period, or at least 90 days.

LIMITATION OF WARRANTY

This warranty does not apply to defects resulting from product modification without Keithley’s express written consent, or
misuse of any product or part. This warranty also does not apply to fuses, software, non-rechargeable batteries, damage from
battery leakage, or problems arising from normal wear or failure to follow instructions.

THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING ANY
IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE. THE REMEDIES PRO­VIDED HEREIN ARE BUYER’S SOLE AND EXCLUSIVE REMEDIES.

NEITHER KEITHLEY INSTRUMENTS, INC. NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR ANY DIRECT,
INDIRECT, SPECIAL, INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE OF ITS
INSTRUMENTS AND SOFTWARE EVEN IF KEITHLEY INSTRUMENTS, INC., HAS BEEN ADVISED IN ADVANCE
OF THE POSSIBILITY OF SUCH DAMAGES. SUCH EXCLUDED DAMAGES SHALL INCLUDE, BUT ARE NOT LIM­ITED TO: COSTS OF REMOVAL AND INSTALLATION, LOSSES SUSTAINED AS THE RESULT OF INJURY TO ANY
PERSON, OR DAMAGE TO PROPERTY.

Keithley Instruments, Inc. 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: [phone]

1-888-KEITHLEY (534-8453) • www.keithley.com

Sales Offices: BELGIUM: Bergensesteenweg 709 • B-1600 Sint-Pieters-Leeuw • 02-363 00 40 • Fax: [phone]

CHINA: Yuan Chen Xin Building, Room 705 • 12 Yumin Road, Dewai, Madian • Beijing 100029 • 8610-8225-1886 • Fax: [phone]
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FRANCE: 3, allée des Garays • 91127 Palaiseau Cédex • 01-64 53 20 20 • Fax: [phone]
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GREAT BRITAIN: Unit 2 Commerce Park, Brunel Road • Theale • Berkshire RG7 4AB • 0118 929 7500 • Fax: [phone]
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2/03

Model 595 Quasistatic CV Meter

Instruction Manual

©1986, Keithley Instruments, Inc.

All rights reserved.

Cleveland, Ohio, U.S.A.

November 1986, Second Printing

Document Number: 595-901-01 Rev. B

Safety Precautions

The following safety precautions should be observed before using
this product and any associated instrumentation. Although some in­struments and accessories would normally be used with non-haz­ardous voltages, there are situations where hazardous conditions
may be present.

This product is intended for use by qualified personnel who recog­nize shock hazards and are familiar with the safety precautions re­quired to avoid possible injury. Read and follow all installation,
operation, and maintenance information carefully before using the
product. Refer to the manual for complete product specifications.

If the product is used in a manner not specified, the protection pro­vided by the product may be impaired.

The types of product users are:

Responsible body is the individual or group responsible for the use

and maintenance of equipment, for ensuring that the equipment is
operated within its specifications and operating limits, and for en­suring that operators are adequately trained.

Operators use the product for its intended function. They must be

trained in electrical safety procedures and proper use of the instru­ment. They must be protected from electric shock and contact with
hazardous live circuits.

Maintenance personnel perform routine procedures on the product

to keep it operating properly, for example, setting the line voltage
or replacing consumable materials. Maintenance procedures are de­scribed in the manual. The procedures explicitly state if the operator
may perform them. Otherwise, they should be performed only by
service personnel.

Service personnel are trained to work on live circuits, and perform

safe installations and repairs of products. Only properly trained ser­vice personnel may perform installation and service procedures.

Keithley products are designed for use with electrical signals that
are rated Installation Category I and Installation Category II, as de­scribed in the International Electrotechnical Commission (IEC)
Standard IEC 60664. Most measurement, control, and data I/O sig­nals are Installation Category I and must not be directly connected
to mains voltage or to voltage sources with high transient over-volt­ages. Installation Category II connections require protection for
high transient over-voltages often associated with local AC mains
connections. Assume all measurement, control, and data I/O con­nections are for connection to Category I sources unless otherwise
marked or described in the Manual.

Exercise extreme caution when a shock hazard is present. Lethal
voltage may be present on cable connector jacks or test fixtures. The
American National Standards Institute (ANSI) states that a shock
hazard exists when voltage levels greater than 30V RMS, 42.4V
peak, or 60VDC are present. A good safety practice is to expect

that hazardous voltage is present in any unknown circuit before
measuring.

Operators of this product must be protected from electric shock at
all times. The responsible body must ensure that operators are pre­vented access and/or insulated from every connection point. In
some cases, connections must be exposed to potential human con­tact. Product operators in these circumstances must be trained to
protect themselves from the risk of electric shock. If the circuit is
capable of operating at or above 1000 volts, no conductive part of

the circuit may be exposed.

Do not connect switching cards directly to unlimited power circuits.
They are intended to be used with impedance limited sources.
NEVER connect switching cards directly to AC mains. When con­necting sources to switching cards, install protective devices to lim­it fault current and voltage to the card.

Before operating an instrument, make sure the line cord is connect­ed to a properly grounded power receptacle. Inspect the connecting
cables, test leads, and jumpers for possible wear, cracks, or breaks
before each use.

When installing equipment where access to the main power cord is
restricted, such as rack mounting, a separate main input power dis­connect device must be provided, in close proximity to the equip­ment and within easy reach of the operator.

For maximum safety, do not touch the product, test cables, or any
other instruments while power is applied to the circuit under test.
ALWAYS remove power from the entire test system and discharge
any capacitors before: connecting or disconnecting cables or jump­ers, installing or removing switching cards, or making internal
changes, such as installing or removing jumpers.

Do not touch any object that could provide a current path to the com­mon side of the circuit under test or power line (earth) ground. Always
make measurements with dry hands while standing on a dry, insulated
surface capable of withstanding the voltage being measured.

The instrument and accessories must be used in accordance with its
specifications and operating instructions or the safety of the equip­ment may be impaired.

Do not exceed the maximum signal levels of the instruments and ac­cessories, as defined in the specifications and operating informa­tion, and as shown on the instrument or test fixture panels, or
switching card.

When fuses are used in a product, replace with same type and rating
for continued protection against fire hazard.

Chassis connections must only be used as shield connections for
measuring circuits, NOT as safety earth ground connections.

If you are using a test fixture, keep the lid closed while power is ap­plied to the device under test. Safe operation requires the use of a
lid interlock.

5/02

If or is present, connect it to safety earth ground using the
wire recommended in the user documentation.

!

The symbol on an instrument indicates that the user should re­fer to the operating instructions located in the manual.

The symbol on an instrument shows that it can source or mea­sure 1000 volts or more, including the combined effect of normal
and common mode voltages. Use standard safety precautions to
avoid personal contact with these voltages.

The WARNING heading in a manual explains dangers that might
result in personal injury or death. Always read the associated infor­mation very carefully before performing the indicated procedure.

The CAUTION heading in a manual explains hazards that could
damage the instrument. Such damage may invalidate the warranty.

Instrumentation and accessories shall not be connected to humans.

Before performing any maintenance, disconnect the line cord and
all test cables.

To maintain protection from electric shock and fire, replacement
components in mains circuits, including the power transformer, test
leads, and input jacks, must be purchased from Keithley Instru­ments. Standard fuses, with applicable national safety approvals,
may be used if the rating and type are the same. Other components
that are not safety related may be purchased from other suppliers as
long as they are equivalent to the original component. (Note that se­lected parts should be purchased only through Keithley Instruments
to maintain accuracy and functionality of the product.) If you are
unsure about the applicability of a replacement component, call a
Keithley Instruments office for information.

To clean an instrument, use a damp cloth or mild, water based
cleaner. Clean the exterior of the instrument only. Do not apply
cleaner directly to the instrument or allow liquids to enter or spill
on the instrument. Products that consist of a circuit board with no
case or chassis (e.g., data acquisition board for installation into a
computer) should never require cleaning if handled according to in­structions. If the board becomes contaminated and operation is af­fected, the board should be returned to the factory for proper
cleaning/servicing.

SPECIFICATIONS

CAPACITANCE (C) ACCURACY*

0 Yen,

IBws’c

RANGE REScmmON

mPF

2°F

20°F

+Exdusive of noise, for STEP v am5v and DELAY TIME 51 remnd. For other
parm~w, derateby(~m”,-V)x(DELAY1IMUlrecand) inpFat7.K. Double
the derating for every 10°C rise in ambient temperature above 23’C.

MkylMuM P-P NOISE (with supplied cable):

k(O.O25% rdg + 0.075pF) x (ltiV/STEP V) +2 counts With filter off,

o.lHz to 1oHz.

Q,t: Measures non-equilibrium current and leakage current in the device

under test during a capacitance measurement.
Display: 3 digits typical; resolution from O.MfA to O.OlnA per count

Measurement Time: DELAY TIME/S or 0.044s, whichever is greater.

Accuracy E1 Year, W-WC% * (1.0% rdg + 2 counts) exclusive of input

TEMPERATURE COEFPICIBNT lO”lB”C & 2S”-400Ch

+(O.OZ% rdg + 0.1 count)l°C.

10 fF 1.0 + 10

1w fF 0.8 + 2

1 PF

depending on range, STEP V, and DELAY TIME

Sampled at the end of each capacitance measurement.

bias current and noise.

CURRENT Q

+t?ag+munrr)

0.6 + 2

ACcuRAcK*

” Year)

W-WC

RANGE IlESOLuTfON *wdg+cou*)

20

PA

ZWPA 10 fA 1.5 + 2 0.15 + 0.3

2”A ml fA 0.25 + 6 0.015 + 3

20

Il.4

ml”*

2PA *w

20

PA

*wja 10 “A 0.1 + I 0.01 + 0.3

NMRR: 70dB on pA ranges, 6OdB on nA and pA ranges,

at 50 or 6OHz +O.l%.

1 fA 1.5 + 14 0.15 + 3

IPA 0.25 + 1 0.015 + 03

10oQ

PA

1 “A 0.1 + 4 0.01 + 3

0.1 + 4 0.01 + 3

0.1 + 1 0.01 + 0.3

MAylMuM ALI.cwABLE

Q/t AT HALF RANGE c

DEf.m! TIME =o.m

STEP ” 5 0.10”

5lxQpA

0.900 “A
9~..wo “A

TEMPERATURE

COEFFICIENT

o=wc k 28’MV

*mdg+m”“ts)PC

VOLTAGE SOURCE 0

OUTPET: -2O.OOV to ZO.OOV in O.OlV increments.
ACCURACY (1 Year, lB%WO: i(O.296 + 1OmV.

TEMPERATURE COEPFICIENT to=--WC & 28~4oTb

*(O.COj% + ZOOpVVT.

MAXIMUM OITI-IWT CURRENI: &ZmA; active current Iiit at <4mA

with annunciation.
SE’ITLING TIME: c3ms to rated accuracy.
NOISE: <(lppm of output voltage + lO@V) p-p from 0.1 to 1OHz.
STEP Voltage: Selectable as O.OlV, O.OZV, O.O5V, or O.lOV (iZ%). Polarity

selectable + or -_
DELAY TIME: 0.07s to 199.59s in 0.01s increments (*O.ffi%).
SITP TIME: DELAY TIME plus 0.04s typical.
WAVEFORM: OFF: Outputs O.OV kO.OlV.

DC: Outputs the programmed voltage.
STER Outputs changes in inaements of STEP V from pr*

grammed voltage in either staircase or squarewave.

SQUAREWAVE: Repeatedly toggles between the programmed voltage

and the programmed voltage plus STEP V, dwelling at each level for
step Time.

STAIRCASE: Repeatedly inuements the output by SlEP V until the upper

or lower LIMIT ii reached, dwelling at each iwei for ‘Step Time.

ANALOG OUTPUTS

c, I OUTPUT LEVEL: 1v = 10,wo counts on x 1 gain; 1v = 1Oco counts

on x10 gain.
” OUTPUT LEVEL: 1V = 1OV on voltage sowce output.
MAXMUM OUTPUT VOLTAGE: f7.V.
OUTPUT RESISTANCE: lkn.
ACCURACI: r(O.25% of displayed reading + 2mV).
RESPONSE TIME: Follows display.
ISOLATION: 30V peak from chassfs cm GUARD to ANALOG OurpuT

LO, which is connected to IEEE COMMON.

IEEE-488 BUS IMPLEMENTATION

MULTILINE COMMANDS: DCL, LLO, SDC, GFI; GTL, UNT, UNL,

SPE, sm.
UNILINE COMMANDS: IFC, REN, EOI, SRQ, ATN.
INTERFACE FUNCTIONS: SHI, AHl, T5, ‘CEO, I.4, LEO, SRl, RJR, PPU,

Xi, ‘ml, c28, El.

PROGRAMMABLE PA RAMETERS: Function, RANGE, ZERO CHECK,

CORRect, SLi’PPRESS, C/Co, STORE Co, Voltage Source Parameters,

WAVEFORM, Display Parameter, Filter, Trigger, Analog Output x 10,

PEN LIFT, Capacitance Correction, Calibration, Self Test, Output For-

mat, SRQ. Status, ASCII Terminator, EOI.
PLOTTER: Controls HF747OA plotter or equivalent using HPGL via IEEE-

488 for real time plotting of C, Q/t, OT I vs. V curves. Accessed by select-

ing Mode, 595 address 42 or 43. Talks to plotter on address 05. HPGL

commands used are IN, Ip, IW, PA, PD. PU, SC, SI, SP.

GENERAL

DISPLAY: 4%-d@ numeric LEDs with appropriate decimal point and

aolaritv indication. Sikned Zdkit al~hanuneric exponent.

IJiD‘iTp RATE: In I, one reading wh step Tiie.

OVERRANGE INDICATION: Display reads OL.
INPUT BIAS CURRENT @I functions): c5fA (5 x 10.‘IA) at 23°C.

/,~pmi$~Iy doubles for every 1O’C increase in ambient temperahue

1NP”T VOLTAGE BURDEN: <lmV.
MEASUREMENT SETiUN

(to 1% of step change) on pA ranges.

PROGRAMS: Rovide front panel access to mter; Trim+; tiog Output

x10, Corrected Capacitance, BXEa88 address, Alpha or Numeric Ex­ponent, plotter Y Hi Li+t, Y Lo Limit, Grid, 50/6OHz selection, and
Digital Calibration.

FILTER: ReAngP Typid White

Code we&ted Noise Rechei.m Typid “se

0

0 1 NO”e OFF
1 3 1.7 c or I YS. ” meas-ents
2 9 2.5 c or I YS. ” meanueme”ts
3 24 5 Steady c, I measluemenh

- -.

In c, one reading each 2x step Time.

G TIMEz Within one reading except 2.5s

MAXIMUM INPUTz 3oV peak, dc to @IF& sine wave.
nl- COMMON MODE VOLTAGE: 3OV nwimum, dc to 6OHz

sine wave.

NPLT CONNECTOR Isolated BNC on rear panel.

3UTFWT CONNECTORS: Mated BNCs on rear panel for VOLTAGE

SOURCE OUTPUT, EXTERNAL TRIGGER, and METER COMPLETE.

5way binding posts on rear panel for ANALOG OUTPUTs, PEN LIFT,

GUARD, and Chassis.

~rmRHAL TRIGGER: 777, comptiile EXTERNAL TRIGGER and

METER COMPLETE.

-nNIRONMENTz Operating: 0’ to 40°C, relative humidity 70% non-

condensing up to 35OC. Storage: -25O to +WC

XRMUP: 2 hours to rated accuracy (see manual for recommended

pmcedure).

;~~

POWER: 105125V or 21~25OV (internal switch selected), 5OI-k to M)&,

15VA max. 9&llOV and 18X22OV version available upon request.

DIMENSIONS, WEIGHT: l27mm high x 216mm wide x 359mm deep

(5 in. x 8% in. x 14% in.). Net weight 3.2kg (6 Ibs., 14 oz.).
ACCESSORY SUPPLIED: Two Model 4801 Low Noise BNC Input Cables.
ACCESSORIES AVAILABLE:

Model iO19A: Universal Fixed Rack Mounting Kit

Model 10195: Univenal Slide Rack Mounting Kit
Model 4801: Low Noise Input Cable, 1.2m (4 ft.), BNC to BNC
Model 4803: Low Noise Cable Kit
Model 5955: Calibration Standards
Mcdel61134: Test Shield

Model 7007-k Shielded IEEE-488 Digital Cable, lm (3.3 ft.)

Model 7037-Z Shielded IEEE-488 Diittal Cable, 2m (6.6 ft.)

595 SPECIFICATION CLARIFICATIONS

U VOLTAGE SOURCE WAVEFORM: (Tiies shown are for 6OHz)

< c 9.38 I j---s~p------

*Use STEP TIME 1 for each step while measuring current.

t,, = DELAY TIME, .05% stability
b, = t,, + 3ms ; -0, +ZOms
STEP TIME 1 = bx + 31ms (6OHz). ton. + 331x (5OHz)
Q/t Measurement Time (to.,) = torr + 8; 44ms minimum
STEP TIME 2 = t,, + 34nxs; -0, +ZOms @Hz), t,, + 36ms; -0, +20ms

(5OHz)

t, = 16.67ms (6OIiz). ZO.Wms (5OHz)

2) MAXIMUM ALLOWABLE Q/t ATHALFRANGEC: The~input dynamic
range available for the Q/t measurement is reduced by the amount re­quired to make the capacitance measurement (see chart below).

3) WHEN PROPERLY ZEROED: The instrument is zero CORRected on

the 2OpA range under the following conditions:
a. The instrument has warmed up for at least two hours.
b. Repeat as needed every 24 hours or if the ambient temperature

changes by more than 1°C.

41 NMRR: For on-range normal mode sine wave inputs only.

NMRR = 20 log [(peak-to-peak current input)@?&-to-peak current
display)] at 50 or 6OH.z +O.l%.

ALLOWABLE Q/t IN % OF Q/t (maw) vs. DELAY TIME

0.0, 0.1

--- Indicates change of Q/t display resolution.

1

DELAY TIME (seconds)

10

100

200

TABLE OF CONTENTS

SECTION l-GENERAL INFORMATION

1.1 J.N”IRODUCTION

1.2

1.3

1.4

FEATURES
MANUAL ADDENDA

SAFETYTERMS

.................................................

.......................................................................

.....................

........................................................ ..,__

UNPACKING AND INSPECTION

E

1.7

1.8

REPACKING FOR SHPMENT
WARRANlY INFORMATION
ACCESSORIES

.................................................................

.... ______

.....................................................

SECTION 2-GETTING STARTED

2.1

2.2

2.2.1

2.2.2~~

2.2.3

2.3

23.1

2.3.2

2.4

2.51

2.5.2

2.5.3

2.5.4

2.55

2.56

2.5.7

INTRODUCTION..

PREPARHION FOR USE

LinePower.. ..................................

LineVoltage Selection ........................................................................

LieFrequency

POWERUPPROCEDURE

PowerCord.........................~....................~....--.........................~

Defaults..

.............

RAM and ROM Test Messages

GENERAL DISPLAY MESSAGES ................................

INSTRUMENT FAMILIARIZATION.

Model595FrontPanel...............................---......-......-..-..........-....~~~~

Model595RearPanel..

Test Cormxtions for Capacitance and Ctient Measurements

Capacitance Example

CVExample.. ..................................

Measurin‘g Current: AnExample

IV Example ............... ._. ._..__ ._

...................

.......................................................................

.................................

..............

_______

..............

..........................................................................

_.__ __

_

..........................................

..

...............................................................

...............................................

..........

_

.............................................

..~. __r______

.................

.._

_

...............................

.

.....

.

....................................

............................

.......

..__

_._~_

.........................................

........

................................................

_.

. . _____ _..._....._........_~

___._ . .,._

.............................................

................................

................

._____

.._

_._

.............. l-l

......................

__ __ .....

.............

._

...........

.._

_._l .,_.____.

_._~_.______._.

.................................

........

_,

~:

.............................

..............

__

............................. 2-6

....................................

.._ .............................. 2-9

......

.................

. . .

.

. . .

................

.......

...

___

_.

...

.,

..
..~2- 1

...

....

;...~2- 2

_~__. 2-2

..

l-l
l-l

l-1
l-l
l-2 ..
l-2
l-2

2-l
2-l

~2-1~

2-l
2-l

2-l

2-2
2-2

2-4

2-7

2-8

2-n

2-12

SECTION 3-OPERATION

3.1 ;i INTRODUCTION ___._......~..___._........................... ___ . . . .

PART i-Front and Rear Panel Description

3.2

3.2.1

3.2.2

3.3

3.3.1 ..

3.3.2

TEST CONNECI-IONS

Cap&zitance C$yeclions
Connections for Cment Measurements

DETAILED FRONT PANEL CONTROL DESCRlPnONS

CURRENT

CAPACITANCE.. .....................

33.3 ~cl~-mREc,.
y. : SUPPRESS

ZERO CHECKand CORRect.......~..........~.........................I

RANGE A, v.. .........................................

A LIM.IT, v LIMIT and PRESET

3.3.9

DELAY TIME

.....

_,_ __._. I_____~~. . _.

................................

....................................................

............................................................

........................................................................

....................................................

.......................

.......

...............

_

; ;

...............

__.,__ _ .. . . . .._-... 3-l

.........................................

...........................................

..~ ...

____ ___.__. .............................................

_..__

................

......................................................

__ _.

. .

.

. .

.

. . . . . . . . . 3-l

. .

. .

. .

. .

. .

_.-

~. . . . . .

.............

__ _

~;.;.

...................... 3-2

..-

......

.__.

_._

.......

.......................

.._

.............

__ . _

.......

......

3-l

3-2

3-2
3-2~

3-3
3-3

3-3
3-4

3-5

3-5

3.3.10

3.3.3.11

3.3.12,

3.4

3.4.1

3.4.2

3.4.3

3.4.4

3.4.5

3.4.6

3.4.7

3.4.8

3.4.9

3.4.4.10

3.5

3.5.1

35.2

3.5.3

DISPLAY SOURCE
ADJUST A , V

+I-, Front Panel Trigger .......................... ._

FRONT PANEL PROGRAMS ................... :_ .. __ ._ ........................................... 3-6

Power Lime Frequency.. ............... ..___

Calibration

Filter. ................................. ..~~-.........................~ ........................

Trigger .............................. ~...;.~..;.;~. ....................... . ............. :.~..:.~ .. 3-10

Andog output xlmo

C~irectedCapacitance ........................................................................

IEEE-488Address..~..................................................................~..~ .... 3-11

Display (Alpha or Numeric) .................................................................. 3-11

Grid ....................................................................................... 3-13

Y HI-YLO ................................................................................ 3-13

REAR PANELS

ExternalTrigger.. ...........................................................................

MeterComplete....................................................................~--.- .... 3-14

Analog Output .............................................................................. 3-M

..........................

FEATURES.. ......................................................................... 3-13

..........................................................

.................................................................................

...........................................

.._.._._

...

..~.~---------................~.~............~~~ ........ 3-8

........................................................................

...................

.._.

.:~.~..;..I~;

...................

.......

3-6
3-6
3-6

3-8
3-8

3-71
%J.I

3-13

PART 2-MAKING CV, IV or Q/t-V Plots

3.6 SETTE’JG UP THE TEST FIXTURE .............................................................

3.7 SETTING UP MEASUREMENT PARAMETERS .................................................. ::

3.8 BEGINNINGTHEMEASUREMENT..

3.9

3.10 ANALOG PLOTTING ..........................................................................

3.11 PRINTING RESULTS .......................................................................... 3-19

3.12 USE OF JXI’ER ON CURVES ........................................... : ...................... 3-20

3.13 MEASUREMENTCONSID~ONS..;..~ ... .._. .......... .._._ ...................... . ......... 3-22

3.X3.1 Ground Loops .............................................................................. 3-22

3.X3.2 Electrostatic Interferences ....................................................................... 3-22

3.13.3 The~~EMFs.............................~...;...........~

3.X3.4

3.13.5

3.X3.6

D.&TALPLOTTING

RFI ........................................................................................ 3-23

Source Capacitance ......................................................................... 3-23

Engineering Units Conversion .................. 1.. ....................... ;. ..... ;~. ;. ............. 3-24

...................................................................

...................... . ....................................

..................................

~;

.......

3%
3%
3-19

3-23

SECTION 4-IEEE-488 PROGRAMMING

4.1

4.2

4.3

4.3.1

4.3.2

4.4

4.5

4.6

4.6.1

4.6.2

4.7

4.7.1

4.7.2

4.7.3

4.7.4

4.8

4.8.1

4.8.2

ii

INTRODUCTION .............................................................................. &l

SHORTCUT TO IEEE-488 OPERATION .......................................................... 41

BUS CONNECTIONS ....................... _.,_-,_ ...................................... .~_ ........ 41

Typical Controlled Systems ................................... .; ................................ 41

Cable Connections .. .._ ...................................................................... 42

PRIMARY ADDRESS PROG RAMMING ......................................................... 4-4

INTERRACEFUNCTIONCODES..;.;..;;. ............. .

CONI’ROLLER PROGRAMMIN

Controller Handler Software ..................... :. ............................................ 45

Interface BASIC Pro gramming Statements ........................................................ 4-6

FRONT PANEL ASPECTS OF IEEE-488 OPERATION ............................................. 4-6

BusError........................................................................~ ............ 46

TriggerOvemmE~or ........................................................................ 47

Number and Conflict Errors

WaitingforTriger ........................................................................... 47

GENERAL BUS COMMAND S

REN (Remote Enable) ........................................................................ 48

IFC (Interface clear) .......................................................................... 48

G ................................................................. 45

...................................................................

......................................................................

.............................

..;.

........

4-4

&7

48

4.83 LLO (Local Lockout) .........................................................................

4.8.4

4.8.5

4.86 SDC(SelectiveDevice clear) ................................................................. 4-10

4.8.7 GET (Group Execute Trigger) ................................................................. 410

ES ~;

4.9.1

4.9.2

4.9.3

4.9.4

4.9.5

4.9.6
;:;; ~:

4.9.9

4.9.10

4.9.n

4.9.12

4.9.13

4.9.14

49.15

49.16

4.9.37

4.9.18

4.9.19

4.9.20

4.9.21

4.9.22

4.9.23

4.9.24

4.9.25

4.10 PROGRAMMIN GEXAMYLES

4.10.1 Square Wave Capacitance Measurements ....................................................... 4-48

4.10.2 StaircaseMeasurements

4.10.3 Cti@ntMeasurements ........................... .

4.11

4.12 IEEE-PLOT..

4.13

GTL (Go To Local) and Local ..................................................................

DCL(D&ce Clear) ..........................................................................

SPE, SPD (Serial Polling). ..................................................................... 4-10

DEVICE-DEPENDENT CO

Programming Overviav........~ .............................................................. 4ll

Execute (X) ................................................................................. 4-16

Display (D) ................................................................................. 417

FundionO.................................; ............................................... 4-18

Ran@(R). .................................................................................... 419

ZeroCheck,ZeroCorrect(Z). ...... . ............ ;.~. ..... I..................... Y . ..i.. ....... 420

Suppress (N) ................................................................................ 421

F&r(r). ....................... ;..~.~.l~.~....~ .:. .... . ................ . ......................... 422

Egh Limit (H) ............................................................................. 423

Low Limit (L). ................................................................................ 424

Voltage Source (V) ........................................................................... 425

Step Voltage (S) ............................................................................. 4-26

Delay Tie (I) .............................................................................. 427

wavefoml (W) .............................................................................. 428

c/c,J (C) ................................................................................... 429

CapacitanceModifiers ................................................ . ............... :1~.~~430

Pr&s (G)

Analog output (0). .........................................................................

TriggerModeo.............~.....~............................................; ............

SRQ Mask (M) and Serial Poll Byte Format.

EOI and Bus Hold-off Modes (K) ............................................................. 438

Terminator(y).

status (u) .................................................................................. 44

Digital Calibration (A) ....................................................................... 446

Self-Test and Permanent Memory Storage u) .................................................... 4-47

TALK ONLY

BUS DP;TZ1TRANSMISSIONTIMES ............................................................ 450

........................

.............................................................................

..................................................................................

....................................................................................

IvcGANDs :..: ......................................................... 4u

.......................................

.~I~.

....................................................

....................................................

......................................................................

...........................................

..............

;

...........

:.~:.

49

49
49

; 431

433
434

435
4-40

~4-48

4-48

4-49
4-49
4-49

SECTION 5-APPLICATIONS

5.1

5.2

5.2.1

5.2.2 Voltage Coefficients of High Resistances

5.2.3 IVCharacteristicsofDiodes

5.2.4

5.25

5.3 APPLICATIONS OF THE CAPACITANCE FUNCTION

5.3.1

5.3.2 Characterizing the MOS Capacitor in Depletion and Accumulation

5.3.3 Characterizing the MOS Capacitor in Inversion

5.3.4

5.3.5 ~:

5.3.6 Comparison of the Feedback Charge Method with the Traditional Ramp Method

5.3.7

5.4

INTRODUCTION
APPLICATIONS OF THE

HighResistanceMeasurements...................................~ .............................

IV Characteristics of Transistors

~w LevelLeakageCurrentMeasurements ..................................................... 5-6

Ccmsiderationsfor CapadtanceMeasurem~nfS;.~.;;~.~;. ........... 1.~.

Determining Delay Tiie for Equilibrium Measurement

MOS Non-equilibrium and Roper Use of the Corrected Capacitance Program .................... 5-13

Comparison of the Feedback Charge Method with the Static or Q-V Method ...................... 5-19

BIBLIOGRAPHY OF QUASISTATIC CV MEASUREMENTS AND RELATED TOPICS

..............................................................................

CURRENTFUNCTION ...... __._._

..........................................................

...................................................................

...............................................................

...............................................

..................................................

..........................................

................

...............................

. .................... 5-l

............

5-l
5-1

5-l

5-2

5-4
5-S

.:.............. 54

5-8
5-9

510

.................. 5-17

................

5-21

iii

SECTION C-PERFORMANCE VERIFICATION

6.1 INTRODUCTION..

6.2 ENVIRONMENTAL CONDITIONS

6.3 INITIALCONDITIONS..

6.4
El

6.5.2

65.3

6.5.4 Capacitance Verification

6.5.5

RECOMMENDEDTESTEQUIPMENT.. ............... .,.:.

VERIFICATION PROCEDURES

InputCurrentVerification....................:.........................................~

Current Verification
Q/t Verification

Voltage Source Verification

............................................................................

..............................................................

......................

......................

......................

...............................................................................

.................................................

....................

SECTION 7-THEORY OF OPERATION

7.1

7.2

z3
%4
%4.1
%4.2
%4.3

7.4.4

7.5
z5.1
Z5.2
z5.3
z5.4
76

7.7
Z8
z9
ZlO

7.10.1

7.102
z10.3
ZlO.4
z10.5
ZlO.6

7.11

7.12

INTRODUCTION

CVMEASUREMENTMETHOD.. ...............................................................

OVERALL FUNCTIONAL DESCRIPTION

VCKTAGESOURCE.. ........... .................

D/A Converter

PrecisionStep Source.................................................~...............~

Output Stage.. ...........................

ResetCircuit.. .........................

PREAMPHFIER..

PreamplifierConfiguration..

InputandGain Stages................................................~

FeedbackElements..

Past Discharge Bridge .................. . ..................

Xl0 AMPLIFIER
MUITIPLFXER and BUFFERAMFLIFIER

-2VREF!.XF!NCESOURCE _ ..........

A/D CONVERTER..
DIGITAL CIRCUITRY

Microcomputer...........................~...-......................................-

Memory Elements

Device Selection.......................................................................~

IEEE488Bus..........................~..~..~.~

Input/output circuitry..

-. . -. .~
I&play cacti

ANALOG OUTPUTS
MAIN POWER SUPPLY

.............................

.......................................................

......................... _~.._

............

.....................

........................

..................

...........................................................................

...................................

..................... ,^.,..., -

............................................................................

...................

.......................................................................

____; ...........................................

.......................................

:.

............................................

.~___.

.....................................

.,_

..........

;. .......

_.

...............................................

..............................

i..;.;
.1..~

~.~.~._~._~_~.~._~.

.~;.Z;; __

........................................................

:.:::.:.‘; .... ~-..:;...;.~...:‘...:.:.:..:_..:.;..;.~;....::;..I~;’

.: .:.~.:~I~.

_.

.................

._ ..__

..-_ ._

...................

.... .1.~. .... .;....... -y..;...;;

....................................................

............................

..........................

...................

.................................................

..

.

.I

...........

..............

..~................-.--.........~

......... ..__

_.

......................................

... . . . . . . . . . . . . . . . . . . _.

;.

.:

.~;~I..

.....................

_._._ ..: .............. .._ .........

.................................

_

...............

.., .. ._ ........ ______,_________

__

........................

.

_,.___ _.___.__~.

.....

;.;.

... .1..~....‘.....1.....

......................

........................

.._

.__-____

_,

.........

.,,

.........

., _._,

.........

..............

..........

1-..~

..:

........

............

........

......

.........

.......

.....

....

64
E

6-1

6-2

6-2
6-3
6-6
66

6-7

7-1

7-1
7-2
7-Z
7-2

7-5

7-5
7-a
7-8
7-8

7-10

Ku

7-12

7-14

7-14

7-26

7-16

7-18

%I8

7-18
%I8

7-19
7-19

7-20
7-20
7-22

SECTION 8-MAINTENANCE

8.1

8.2

8.3

8.4

8.5

85.1

8.5.2

8.53

8.5.4

8.5.5

8.5.6

iv

INTRODUCTION

LINE FREQUENCY SELECTION
LINE VOITAGE SELECTION
FUSE REPLACEMENT
CALIBRATION

Recommended Calibrated Equipment
Environmental Conditions
Warm-Up Period
Ca&ration Jumper
;Frt$yr

.....................................................

.......................

.......................

.........................................................

......................

ration..

.....................................

......................................................................

~..I~.:.~:.

._

..........................................................

...................

...........................................

.....................................................

__.

.....

.~.~_._-~__

...............................................

.,

................................................

............................................

....................

_,

.........................

__

........

.;

.......................

_

_

.....

.....

_ .................

_.

..................

_.

..............

...................

8-l
8-l

81
8-2
8-2
8-2
8-3

8-3
8-3
8-5
8-5

._~.

8.5.7 Calibration Sequence ............. ..

8.58

8.5.9 Input Offset Voltage Adjustment

8.5.10

8.5X Input Current Adjustment

8.5.12 Capacitance Offset Compensation

8.5.73

8.5.14 Current Calibration

8.5.15

8.5.16

8.5.17

8.5.18

8.5.19 Additional Calibration Points

8.6

8.7

8.8 TROUBLESHOOTING ........................

8.8.1

8.8.2

8.8.3

8.8.4

8.85-- AIDConverterChecks.. ...............

8.8.6

8.8.7 Relay Configuration........~

8.8.8

8.8.9 Digital Ciitry

8.8.10

8.9

8.10 HANDLING AND CLEANING PRECAU'IIONS

DigitalCalibration....................................................~

............................................................... 8-6

Zen,HopCompensation......................................-....-

.................................................................... 8-8

Voltage SourceCalibration..

............................................................................

1,CAnalogOutputAdjustment ...............................................................

Q/t CaIibration

Capititance Calibration ......................................................................

Storage of Calibration Parameters

... DISASSEMBLY INSTRUCTION

SPECIAL HANDLING OF SIXTIC SENSITIVE DEVICES.

RecommendedTest Equipment ................................................................

Power UpSeIfTest

Self DiagnosticProgram ......................................................................

Power Supply Checks. .......... .._

Voltage Source Checks
Input Conditioning Circuitry Checks
DisplayBoard Checks

INPUT STAGE BALANCING PROCEDURE .......................................................

........................................................

.......................................................................... 8-18

.............................................................................

..................................................

......................... _,

................................................................. 815

.................................................................. M5

................. ~....; .... .

................................................................. 8-24

..............

........

.............................................................

.....

.._

..........................................................

.._..............~....~..................~............~ ... 8-30

__

_

..... _ ....................................

..

........................ 8-6

.......................... 8-7

..-

.............

__ _.

....................

...................................

.....

__.__.; ....... .._. ................................ &l7

.......................................

:;.~

...................................................

.....

_.__.:

..................................................

...

._

_.

............................

....................................

___.._.._

...

8-6

8-8

8-8
a10
813

&I3
&I.3

8-14

8-17
&I8

818

8-19
8-19

~8-19

8-24
8-24

8-31

8-31

SECTION 9--REPLACEABLE PAFiTS

9.1 ~~. INTRODUCTION. . . . . . . . . . . . . .___. . __. _. _. _. _. . . .__. . . . . . .__. _. . . . . . . . . 9-l

9.2 PARTS LIST . .._...._.... . . . . . ._ .___..__.._._.._._. .,. ..~ ._._._____.___.. . .._. .__.. . . . . . 9-l

9.3 ORDERING INFORMATION . . . . . . . . . . _ _ . . . . . . . _ _ . . . . _ . . . . . . . . . . . . . . . . . 9-1

9.4 ~~ FACTORY SERVICE . __. ..____ .__~__~.~ ____ .___~ ____ _____ ______. __. . __. .___. . . . . . . . . . . . . . . . . . 9-l

9.5 S-C DIAGRAMS AND COMPONENT LOCATION DRAWINGS . . _ . . . . _ _ _ . _ . . . _ . _ _ _ _ . _ _~. . 9-l

APPENDIX A
APPENDIX B
APPENDIX C

APPENDIX D ......................................................................................

APPENDIX E .......................................................................................

APPENDIX F .......................................................................................

APPENDIX G ........................................................................................

APPENDIX H

.......................................................................................

..........................................................................................

A-l

B-l

...................................................................................... C-l

D-l

E-l

Gl

...................................................................................... H-l

F-l

v/vi

SECTION 2-GETTING STARTED

LIST OF TABLES

2-I.

Display Messages . . . . . . . . . . . . . . . . . . . . ;~.- .._.. _ ___............_............. . . . .._ . . ..~.....~.~Y ..,.,.. 2-3

SECTION 3-OPERATION

FrontPanelPrograms.................................................~.......................-

z
3-3

Display ExponentValues .......................................................................

Engineering Units Conversion

...........................

SECTION 4-IEEE-488 PROGRAMMING

41
42
43
4-4
45

t73

IEEE488 Contact Designation ...........................................................

Model 595 Interface Function Codes.

BASIC Statements Necessary to Send Bus Commands ...............................................

IEEE-488FrontPanelMessages ...............................................................

General Bus Commands and Associated BASIC Statements

Device-Dependent Command Summary .........................................................

Bus Hold-Off Ties ................ __ __

Trigger to Reading Ready ‘Iiies~ (in Ksec) ..........................................

............................................................

....... _

SECTION B-PERFORMANCE VERIFICATION

Recommended Test Equipment for Performance Verification.

2

6-3
6-I
6-5 ...

Liits for Current Verification

DeterKnin g Capacitance Limits ....................................................................

CapacitanceVerification .........................................................................

Limits for Voltage Source Verification ................................................................

...........................................

1.

...................................

.........................

................................................

........................................

_ ..........

.. 3-7

3-12

:.

3-24

..

_ ........ 44

45
46

..- 46

., .............. 48

4-13

438

.-I

..........

: ............. 6-3

., . 450

6-2
6-6

6-7
6-7

SECTION 7THEORY OF OPERATION

7-1
7-2

RelaySwitchConfiguration..

Memory Mapping ..............................................................................

................................... ~..~.;.:..Y.~ .._.

SECTION S-MAINTENANCE

8-1
8-2
8-3 ..
8-4

8-6

Lie Voltage Selection (50~&X-Iz) ................................................................

Line Fuse Selection .............................................................................

Recommended Calibration Equipment

Current Calibration ..............................................................................

Capacitancecalibration ........................................................................

Recommended Troubleshooting Equipment

DiagnosticProgramPhases.........~ ............................................................

...........................................................

......................................................

...... .I

...........

~..~?ll

7-1

_ 8-l

8-2

8-3
8-u)
8-X
8-18
8-19

vii

8-8 PowerSupplyChecks

A/D~~Converter Checks
Voltage Source C,hecks

Relay Confiitihon

Amplifier Cams
833
a14

845
846
al7

Capacitance Circuitry Checks
Cu&ntCktiitryChecb
Digital Circuitry Checks
DisplayCircuitryChecks..

InputStageBalancing................-......~...........--...........-.-........~----...-~~~

...............................

..............................

........................................................................

....................

.............

...........................

........... ..__. _ .~-.

.._...........~~.~.~.........~.~..............~~.~...............~

........................................................

.............

SECTION g--REPLACEABLE PARTS

.-__-___

.

................

.....................

.

.........................................

~___~ .

...................................................

__~.~~.-~_~~__.

........................

..___.__. _..__

- .. -

...........................

_.,..-. _,_._.

..............

................ -

...

.,

.

...............

.~.~...~.~__ . 8-28

......

.......

....

_,_

8-19

8-20

i$
8-25

8-25

8-27
%3:

...

9-1
9-2
9-3
9-4

MotherBoard,Parts List....................................~~.~~..~

Display Board, Parts List..
Preamp Board, Parts List
Miscellaneous Parts, Parts List

.............................................

........................

............................................................

APPENDIX D

D-l

BASIC Staten-tents Necessary to Send Bus Commands . . . . . . _ . . . _ _ . . . . . . _ :. . _ . . D-l

APPENDIX F

Fl

F2

~-3 Typical Addressed Command Sequence.. . . . . . . .

M
F-5

IEEE488 Bus Command Summary . . . . . . . . . . .,~ .,__ ~___.~ __....__.._... .____.. ._. _. __ _..~ ..____ “TV... W

Hexadecimal and Decimal Command Codes.. . . _ _ . . _ _ . _ _ . . . _ . . . _ _ . _~_. . . . . . _ . . . . . _ . . F7

Typical Device-Dependent Command Sequence. . . _ . _ . . . _ . . . . . _ _ _ _ _ . _ _ _ _ _ __ _ _ _ _ _ _ . _ _

IEEE Command Group . . . . _ _ . _. . . . . _ . _ _ . . ___. _~_ ._ . . . _ . . . . _ . . . . . . . . . . _. . _. . . . . F7

APPENDIXG

Device-Dependent Command Summary . . . _ . . _ . . . _ _ _ . _ _ _ _ _ . . . . _ _ _ _ ..- _ _ _ _ _ __ _ _~_ _ _ . .

.............................

..~.

.............

............

..

.‘. I

:

. . . . ~.~ _,.. _.~ _.__ * . . . . _ . . . . . . . . . . . . . . . . . . . . . . . . . .

:

......

......................

_

.........

.

._

....

9-2

9-15
9-21
9-27

F7
M

G-l

SECTION 2-GETTING STARTED

LIST OF FIGURES

2-l
2-2

2-3 Typical Capacitance Measurement Corinetions . . . . .~. . . _ . _ . . _. . . . . . . . _ . . . . . . . . . . . . . . . . . . . . . . 2-7

2-4 Typical Cment Measurement Confections . . . . . . . . . . . . _ __ . . . _. ., -- ., . . ., . - -. . .,., . . . . . . . . . . . .~.

Model 595 Front Panel
Model 595 Rear Panel .

.._. . . . . . . . . . . . . .._..___... . . . . . . . . . . . . . . . . . .._.... . . . ~.-~ .._... _.__ ,...

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ..-...................................

z-j

2-7

SECTION 3-OPERATION

..-

_~_

...

..

..

3-l

3-2
3-3
3-5

3-9

3-10
3-14

3-14
3-18

3-22

CapacitanceMeasurementConnections.

ii

3-3
3-4
3-5
34

3-7 &&md Trigger P&e Specifications ............. .., .................................................

3-8
3-9 NCurvesofa6.3VZenerDiode..

tt
3-z

Cbnnections for Current Measurements.
Integrator Charge vs Tme Cur+ Ior a Capacitance Measurement
VoltageOutput Waveform

Exainple:[e-mail]. ................................

Coefficients in Filter 2
Meter Complete Pulse Specifications

MOSDeviceCVCurvewithFilters. ........................

~MultipleGroundPointsCreatingaGroundLoop..

EliminatingGrotidLoops.

..................

.........................

........

...........

.................

.

.........................................................

...............................

.

.......

. __

.

......................................

._, __ __

........................................

..-......................-.~..~...~~.-.~

.......................

~...~_.._.~.._

..

..

_,__.

..................................

.._._..,

........................

.............

.

... ............

.........

..~

__ _,_

.._ _____

........

.~~.------

..........

.....

.._._..._. 3-21

.....

..............

.......

.._

..............

_.._

.

........

__.._ _ _,._._ ., .._ ~.~3-22

;.m.

SECTION 4-IEEE-488 PROGRAMMING

....

42
43

43
44

432
437
442
443

4-44

.

.

2

41
42

43 IEE.E-488~connections..
44 Model 595 Rear Panel IEEE-488 Connedor
45

4-6

47

z

4la

4l.l

zg

SystemTypes

~IFXE-488 Connector.............................................................---.~....~.~..~~4 2

ContactAssignments...........................................--.-.....-........~- .............

GeneralDataFormat............................----.......................- ..................

SRQ Mask and Serial Poll ByteFormat.......................- ..................................

UO Machine Status Word (Default Conditions Shown).

~UlErrorStatusWord

U2 Data Status Word
U3DelayTme
U4VoltageSourceLfrmts
U5 Voltage SourceBlas Se~gs

.................

..................................

............................

.......................................................................... 443

.... . ...............

.....................................................

..~..~.-.~-~........~.....-~-.-.-..-.~.............-

..-......-.-- .............

.................................

...........................................

_..,_

.........................

___.~.~

.........................................

_____~_ _,.-_....,

.,

.................................

.............

.........................

.....

.,

__,__

.._....._..,._

.._

.............................................

_~^.

.

........

SECTION 5-APPLICATIONS

5-1

5-2

5-3

5-5

Current Measurement Corrections Using the Model 595 Voltage Source.. . . . . _ _ _ . . . . . . .

NCharacteristicsofaZenerDiode(5.1V)lN751.....___..___._ ___ _.___ ____ . ..__. _ ..___.__.._.... 5-3

Connections for Bipolar Common:Emilter N Characteristics . _ . _. . . . . _ .,_ . _ _ _ _. _ ______ _ _ . . _ . _. 5-4

Typical Bipolar Common-Emitter Characteristics . . . . . . . . . . . . . _ _ . _ . . . . . _ . . _ . . . . . . 5-4

Conmctions for Common-Source FET N Characteristics

5-l

_ _ _ . . . . .~. . . . . . . . _ . _ _ . _ _ _ . . . . _ _ 5-5

ix

5-6
5-7
5-8
5-9
5-10
5-11

5-12

Typical Common-Source FET lV Characteristics
Leakage Current Measurement.

................

Ca~acitorLeakageTests .......................................................................

cvs.vGwe..

.........................

Equivalent Circuits of the MOS Capacitor.

..-- .- ~.~..~_

...............................................

Recognizing Equilibrium Using C and Q/t VS. Delay Tie: Inversion: Substrate Voltage = +8V,

Squarewave Test Signal = +O.OZV

............................................

Corrected vs. Uncorrected CV Curves of a SimulatedLeaky Capacitor C(corrected) = C-(Q/t)

(StepTiie)/(VStep). .................. -.~ ..:.

5-13
5-14
5-15
5-16
5-17

Recognizing Equilibrium Using C vs. V and Q/t, ys,~,V
Misuse of Corrected Capacitance Program-on Non-Equilibrium Curves
Comparison of ~Quasistatic CV Methods

FrequencyResponse..

....................

Comparison of Quasistatic~ CV Methods

.......................................................

.......................................................

SECTION 6-PERFORMANCE VERIFICATION

6-l

6-2
6-3
6-4

Test Fixture Construction..

.............................

Setup for Current Verification (2001x.4 to 200SA Ranges)

Setup for Current Verification (2Op.A to 2OnA Ranges)
Setup for Voltage Source Verification

.................................................

SECTION 7-THEORY OF OPERATION

.......................

....................................

._

.................

......

................

.

..................

...........................................

......................

__ .,_.

..

_

._

,_.

..

.._ _

......

YI..;

..__

....

.. 1 .............

YT T

.......

..

:~.

..........

..................

..

_. __

_,_-__.

--.~.

1~;.

.......

-.

......

.....

............................. 5-16

;

..~........~.....-.......~

............................................ 6-l

.:

....

..............

_.

__ __.

......

.......

-._~.lT~-

.......

__ ._

.. _ ...

...

...

....

5-5
5-7
5-8
5-9

5-9
5-12
5-x

5-15
5-18

5-19
5-20

6-4
6-5
6-8

7-l
7-2
7-3
7-4
7-5
7-6
7-7
7-8
7-9
7-10
7-11
7-12

7-13
7-14
7-15
7-16
7-17
7-18
7-19

Feedback Charge Method
TiingVoltageandChargeWaveforms
Model 595 Simplified Diagram
Voltage Source D/A Converter Circuitry

PrecisionStep Source...............................................~.................~ ........

Output Stage Circuitry (Simplified)
Current Limiting for Output Stage
Voltage Source Reset Circuitry

BlockDiagramofInputPr~ampIifier.....................................~

Circuit Configuration for Current and Capacitances
Input Stage and Gain Stage

FeedbackElement ............................................................................

FasfDischargeCircuitry.. ..................

XlO~Amplifier Circuirry.......................................................~...........~.~

Multiplexer and Buffer

Multiplexer Phases.. ..............................................

-2V Reference Source
A/D Converter
Analog Outputs

...................................

..............................................................................

SECTION 8-MAINTENANCE

8-1
8-2
8-3

L-2
8-6

8-7

~Test Fiiture~~Conshuction

Calibration Jumper and Calibration Pots
Equipment for Zero Hop Compensation
Voltage Source Output Calibration Setup

V Analog Output Calibration Setup

Current Calibration Setup (200pA and 20nA Ranges)
Current Calibration Setup (20pA to 200& Ranges)

........................................................................

............ _~.:. .......................

..........................................

.................

:.

...... _ ......... .;

............................................

.................... ._

...............

:

..........

............. _ _,_ ......

...............

:

..................

...........

................................................

.~;

:~

...................................

........................................................................

........................................

.................

..;

...................................................

...................................

...................................

...............

- ..................

........................................

.......................

.............................

...... I

_~I

...........................

..I

.......

__

......................

............ .I

;

..,

................

........

........................

_.

..:.

~.;

........

..........

., . .~l.-. ...........

._

......

................

-.:.::

............

..

:

:.

.
.

. . .

.

.

,..

. . .
. . .

7-l

.....

_

....

7-2
7-3

7-4

:.~.

.,

........

7-5

.......

.._

7-6
7-7~~

........

.,

7-8
7-9
7-9

......

.;.

7-10
7-12

it

......

7-13

..

7-14

.

.,_, 7-15

.__

..

.;. .~I

......

....

7-16,
7-16
7-17

7-21

. ..~:;. ...... 8-2

............ 8-4~

............ 87

............ 8-9~

............. 8-9

........... 8-11

............

~812

x

C, I Analog Output Calibration Setup

Model595EqkdedView

8-10 Input Stage Balancing

......... _ __

................ ..___

..........................................................

.............................

.....

.__,.___ _____ _

. .._ . .__.,._...._._

.,__ - .._

.,_ .

..................

_

_

.. . .

.,

..

...... 8-13

......

_,

...

816

8-32

SECTION g--REPLACEABLE PARTS

9-l ~~ Mother Board, Component Location Drawing, Dwg. No. 595-100 _ . _ _. . . _. . . _ _. . . . _ _ _. . _. . . . _. . _ . 9-8

9-2
9-3
9-4

9-5 & Board, Component Location, Dwg. No. 595-160 . . . _ . . _ _ _ _ . _,_ _ __ .,. _ _ . _ _ . . . . . _ . _ . . . . 9-24

9-6

Mother Board, Schematic Diagram, Dwg. No. 59X06 _ . . . . . ___ __ . . _ _ _. . . . . _. _. . . ___ _. __ _ ._ . . . 9-9

Display Board, Component Location, Dwg. No. 595~ll0 _ _. _ _ _ _ _ _. _ _ _. _. . . . _. . . _ . . _ _ _ . .~.___~_ . . __ _ 9-18

Display Board, Schematic Diagram, Dwg. No. 595-116 . . . . . _ _ _ . . . . . . . _ . _ . . . _ . _ . . . . . _ _ _ _ . _~_ _ _ .9-19

Preamp Board, Schematic Diigram, Dwg. No. 595-166. . . . . _ . . .; _ _ . _ . _ __ . . . _ _ _ _ _ _ _ _ _ . _ . . _ . _ . . . 9-25

APPENDIX F

iEBE.BusConfiguration . . . .._..__._.._ _,_ _______._._. ~I __.___._ ______ .._.... _ __...__ _ ___.__.._.._..

IF,EB488HandshakeSequence _......_.__ ~...:~ __..__. _ _._.......___..._ _ .._. _____.__ .__.____._ _.__ F3

~3 Co-andcodes . .._......__....__....~. _.._.. _ .._. _ ._.__......_....--. _ .-.- ~_-_ _--.... _.._ .-..... F6

M

xi/xii

SECTION 1

GENERAL INFORMATION

1.1 INTRODUCTION

The Keithley Model 595 Quasistatic CV Meter is a sensitive

instrument designed to measure capacitance and current.

The Model 595 uses a unique feedback charge method to

stimulate and measure charge steps in the device under
test, from which capacitance is determined. (A DC voltage
is ah available to make basic current measurements). This
method of measuring capacitance is superior to the tradi­tional ‘%oltage ramp” method as it allows the user to
distinguish between error currents and the stimulated
signal charge. Correction of capacitance m+surrtients for
the effect of error currents is selectable and can be used
to improve measurement accuracy. The Model 595 has a
built-in &‘OV sowce with four precision ~step~voltage
sources. The measuring range of the Model 595 is O.OlpF
to 2OnF for capacitance measurements and lfA to ZOOfi
for current measurements. A 4% digit display and standard

data.

1.2 FEATURES

Some important Model 595 features include:

l Built-in Voltage Source-&IV @ 2mA voltage source with

lOmV resolution.

l Bias Waveforms-DC, square wave, and staircase voltage

bias waveforms allow the user to make stepped current
or capacitance measurements, as well as DC current
measurements.

l Voltage Steps-In -clOmV, 2OmV, 5OmV, and 1OOmV grada-

tions at 0.07 to 199.99sec intervals in O.Olsec increments.

l Q/t Measurement-Q/t monitors current during

capacitance measurement.

l Compensates for Error Currents-Selectable capacitance

correction for leakage current errors.

l 4% Digit Display-An easy-to-read front panel LED

display includes a 4% digit mantissa with selectable
alphanumeric or scientific range annunciation.

l Zero Correct-A front panel zero correct control allows

the user to cancel offsets internal to the Model 595.

l Reading Modifiers-Baseline suppression and C/C, nor-

malization of readings.

l Standard IEEE-488 Inte*ace--The built-in interface allows

full bus operation of the Model 595.

. CV and IV Outputs--Built-in C, Q/t or I vs. V analog out-

puts (with automatic pen lii) or IEEE488 digital plotter
output.

l Digital Calibration-The instrument may be digitally

calibrated from the front panel or over the IEEE-488 bus.

1.3 MANUAL ADDENDA

Information concerning improvements or changes to the
instrument which occur after the printing of this manual
will be found on an addendum sheet included with this
manual. Please be sure that you read thii information
before attempting to operates or service your instrument.

1.4 SAFETY TERMS

The following safety terms are used in this manual:
The WARNING heading as used in this manual explains

dangers that might result in personal injmy or death.
Always read the associated information very carefully
before perfotig the indicated procedure.

The CAUTION heading used in this manual explains
hazards that could damage the inshument. Such damage
may invalidate the warranty.

1.5 UNPACKING AND INSPECTION

The Model 595~Quasistatic CV Meter was carefully in-

spected before shipment; Upon receiving the instrument,
carefully unpack all items from the shipping carton and
check for any obvious signs of physical damage that might
have occurred during shipment. Report any damage to the
shipping agent at once. Retain the original packing material
in case reshipment becomes necessary.

l-l

The following items are included with every Model 595
shipment:

Model 595 Qua&static CV Meter
Model 595 Instruction Manual
Model 4801 Low Noise Coax Cables with BNC Connectors

(two)

Additional accessories as ordered.

If an additional instruction manual is required, order the
manual package (Keithley Part Number 595-901-00). The
memud package includes an instruction manual and all per­tinent addenda.

1.6 REPACKING FOR SHIPMENT

Before shipping the instrument should be carefully packed
in its original packing material.

If the instrument is to be returned to Keithley Instruments
for rep’air or calibration, include the following:

Write XI’ENTION REPAIR DEPARTMENT on the ship­ping label.

Include the warranty status of the instrument.
Complete the service form at the back of this manual.

1.6 ACCESSORIES

The following accessories are available to enhance Model
595 capabilities.

Model 1019A and 1019s Rack Mounting Kits-The Model
lOl9A is a fixed or stationary rack mounting kit with two
front panels provided to enable either single or dual side­by-side mounting of the Model 595 or other similar Keithley
instrument. The Model 10195 is a similar rack mounting
kit with a sliding mount configuration.

Model 4801 Coax Inp~ut Cables-The Model 48M, two of
which are included with every Model 595 shipment, are
low noise coaxial cables, 1.2m (48 in.) in length, with male
BNC connectors.

Model 4803 Low Noise Cable Kit-Kit includes 50 ft. of low
noise coaxial cable, 10 male BNC connectors, and five
female BNC chassis-mount connectors.

Model 6104 Test Shield-Model 6104 facilitates measure­ments with 2- or3terminal guarded connections. Provides
electrostatic shielding, high isolation resistance, and easy
connection to Model 595. Clips plug into banana jacks,
allowing modified connections. Shield has BNC connec­tor on one side, binding posts on the other. Useful when
making current measurements with external voltage source.

Model 6105 Resistivity Chamber-Guarded test future for
measuring volume and surface resistivitles. Assures good
elechostatic shielding and high insulation resistance.

1.7 WARRANTY INFORMATION

Warranty information for your Model 595 may be found in-

side the front cover of this manual. Should you need to
use the warranty, contact your Keithley representative or
the factory for information on obtaining warranty service.

Keithky Jhslmments, Inc. maintains service facilities in the

United States, West G
Netherlands, Switzerland, and Austria. Information con­cerning the operation, application, or service of your in­strument may be obtained from the applications engineer

at any of these locations.

ermany, Great Britain, France, the

Model 7007 Shielded IEEE488 Cables-The Model 7007
cables are designed to connect the Model 595 to the
IEEE488 bus and are available in two versions. The Model
7007-1 is lrn (3.3 ft.) in length, and Model 700%2 is 2m (6:6
ft.) jn length. Cables have shielded connectors on each end.

Model 7051 BNC-to-BNC Cables-Available in two lengths.
Model 7051-2 is 1.8m (2 ft.) in length, and Model 7051-S is
15m (5 ft.) in length.

l-2

SECTION 2

GETTING STARTED

2.1 INTRODUtilON

The Model 595 can be controlled from the front panel or
over the IEEE-488 bus. This section will acquaint the user
with front panel operation. IEEE-488 bus operation is
described in Section 4.

The following paragraphs will briefly describe the front
panel buttons and their operation to help the user get
started with the Model 595. Then rear panel descriptions
and power-up information will be presented. Lastly, basic
capacitance and current measurement examples will be
discussed.

2.2 PREPARATION FOR USE

Once the instrument is unpacked, it must be connected to
an appropriate power source as described below.

2.2.1 Line Power

The Model 595 is designed to operate from lO5XW or
210~25OV power sources. A special power transformer may
be installed for 90-1lOV and 195-235V ranges. The factory
set range is marked on the rear panel of the instrument.

2.2.3 Line Frequency

The Model 595 may be operated from either 50 or 6OHz

power sources. The line frequency of the instrument must
match the line frequency of the power source in order to
meet measurement noise specifications. See Section 8 for
details.

2.3 POWER UP PROCEDURE

2.3.1 Power Cord

Connect the female end of the power cord to the AC recep­tacle on the rear panel of the instrument. Connect the male
end of the cord to a grounded AC outlet.

WARNING
The Model 595 is equipped with a 3-wire power
cord that contains a seoarate around wire and
is designed to be used’with grounded outlets.
When proper connections are made, instrument
chassis is connected to power line ground.
Failure to use a gmunded outlet may result in
personal injury or death because of electric
shock.

CAUTION
Do not attempt to operate the instrument on a
supply voltage outside the indicated range, or
instrument damage might occur.

2.2.2 Line Voltage Selection

The operating voltage of the instrument is internally select-

able. Refer to Section 8 for the procedure to change or verify
the line voltage setting.

CAUTION
Be sure that the power line voltage agrees with
the indicated range on the rear panel of the in­strument. Failure to observe this precaution may
result in instrument damage. If necessary, the
line voltage may be changed as described in
Section 8.

2-l

2.3.2 Defaults

Set POWER switch to its ON position. After briefly display­ing “IX: and ‘to.“, the instrument will power up in the

following configuration:

l 2OnE CAPACITANCE range

l Z?ZROCHECKon

l VOLTAGE SOURCE = O.OOV

. WAVEFORM = 0.05V square wave

l DELAY TIME = O.Ct7sec

. VOIZCAGE SOURCE LIMITS = &?O.OOV

2.3.3 RAM and ROM Test Messages

NOTE

If the instrument is still under warranty (less than
one year from the date of shipment), and problems
develop, it should be retmned to Keithky In­struments for repair. See paragraph 1.6 for details
on returning the instrument.

2.4 GENERAL DISPLAY MESSAGES

The Model 595 has a display made up of a 4% digit signed
mantissa as well as a two digit alphanumeric exponent.
Messages are occasionally seen on the display to indicate
instrument status or errors in operation. These display
messages are listed in Table 2-1.

Both RAM and ROM are automatically tested as part of the
power up procedure. During normal power-up, “r.r.” and
“1.0.” will briefly appear while memory is being tested. Jf
a memory error occurs, the ‘%I.” or “1.0.” message will re­main on the display.

If the instrument was not able to read the stored calibra­tion constants and configuration, the decimal points in the
two exponent digits will flash.

If such errors occur, the instrument may be partially or com­pleteIy inoperative. Refer to Section 8 for more complete
details.

2.5 INSTRUMENT FAMILIARIZATION

The following figures, brief feature descriptions, and
measurement examples will acquaint the Model 595 user
with basic front and rear panel operation. For more in­depth information, see Section 3.

WARNING
The maximum commor+mode input voltage (the
voltage between input low and chassis ground)
is 30V peak. Exceeding this value may create a
stiock hazard.

CAUTION
The maximum voltage between input high and
input low is 30V peak. Exceeding this value may
cause damage to the instrument. Current inputs

that exceed 3mA may be erroneously displayed
as an on-scale reading.

2-2

Table 2-l. Display Messages

GETTING STARTED

Message

lJF!-

dc

I

nr

I

ntrr 1

Description

Voltage source is OFF (O.OOV 5~~ O.OlV) ar@ Model 595 is set to measure capacitance.

Voltage source is set to DC wavefoim and Model 595 is set to measure capacitance.

Software revision level; displayed as part of diagnostics.

Troubleshooting diagnostics (see Section~B). Phases: signal, ze@ and reference.

Overload (overrange input applied); -0L for negative value.

Bus Error: Instrument programmed while not in remote; or illegal command or command
Dption sent?

Number Error: Calibration, voltage source, waveform parameter, or program value beyond
allowable range.*

ttrr

iI

I t

r.r.

r,rl

I-,,?

Trigger Ovemm Error: Instrument triggered during a measurement conversion?

RAM Test Fallure: ON while RAM memory is being tested. If message remains, the test
failed.

ROM Test Faihne: ON while ROM memory is being tested. If message remains, the test
failed.

Flashing Decimal Polnts~ in Exponents: Power-up calibration constants are not in use (due to
nonvolatile memory error on power-up ~01 calibration adjustment without storage).

Decimal Points Turned On in Exponefit: Calibration program is in use.

l%e Model 595 is waiting fork a trigger (bus, external, or SHIFT, then +I- button).

1

2-3

GETTING STARTED

2.5.1 Model 595 Front Panel

Figure 2-1. Model 595 Front Panel

All front panel controls except POWER are momentary contact switches.
Many control buttons include an annunciator light to indicate the selected
function. Some buttons have a secondary function that may be entered
by pressing first SHIFT then the desired button. All such secondary func­tions are marked in yellow as is the SHIFT button. The controls are color­coded into functional groups for ease of operation.

1 POWER-AC POWER switch turns unit on or off.

cl

SHIFT-Enables access to secondary features (highlighted in
yellowl.

METER BLOCK

3 CURRENT-Configures the Model 595 to measure current from 1fA

cl

to 2oofi.

4 CAPACITANCE-Configures the Model 595 to measure capaci-

El

tance from .OlpF to 20nF.

2-4

-

w (SHIFT) Q/t-CAPACITANCE display modifier. Displays current,

which is measured at the end of each capacitance measurement.

6 SUPPRESS-Makes measurements relative to a stored baseline

q

reading. Next reading is saved and will be subtracted from all subse­quent readings. Applies only to current or capacitance
measurements (not Q/t).

7 C/Co-Divides all readings by a user-stored Co value. Applies only

0

to capacitance readings (not

8 (SHIFT) STORE Co-Saves next reading as the Co value for C/Co.

q

9 RANGE-Increments or decrements range (sensitivity). Three

0

capacitance ranges and eight current ranges.

10 ZERO CHECK-Used as a standby condition. No readings can be

cl

taken when enabled.

Q/t

or I).

GETTING STARTED

(SHIFT) CORRect-Cancels the effects of internal of&3 VoltagE

Best when applied on 2OpA range

VOLTAGE SOURCE BLOCK

(SHIFT) PRESET-Quickly *en VOLTAGE SOURCE to the upper or

14 STEP V-Displays voltage step size t+.D1, .02. .05, .lOV)

cl

case and *qu*r* wave

ADJUST A or V-Used to modify VOLTAGE SOURCE parameters
(LIMIT*, STEP V, DELAY TIME, and SOURCE voltage1 and PRO­GRAM parameters. Press SHIFT, then FAST for a faster rate.

value Press SHIFT, +/- to trigger a reading from front panel.

18 DISPLAY SOURCE-Show* VOLTAGE SOURCE value Correspond-

cl.

tng LED fl**hes when current limit of 2mA has been exceeded.

a value which is scaled to cancel the offseX on any range

v LIMIT-Displays VOLTAGE SOURCE adjustment LIMITs.

fl

Tcggles~vcltage step waveform between stair.

;~

voltage step-to-measurement time.

the sign of displayed STEP V or VOLTAGE SOURCE

PROGRAM BLOCK

20 MENU-Accesses front panel programs: FREQUENCY, CALIBRA-

0

TION, FILTER, TRIGGER, ANALOG OUTPUT, CORRECTED CAPA­CITANCE, IEEE-488 ADDRESS, DISPLAY. Accesses plotter
parameters: GRID, Y HI, Y LO.

21 (SHIFT) EXfT-Leaves PROGRAM MENU.

III

WAVEFORM BLOCK

22 OFF VOLTAGE SOURCE i* 0.00 + .OlV.

III -

q DC-Unit sourcing DC voltage.

VOLTAGE SOURCE outputs either a staircase or *ware

25 SELECT . or V-Used to select voltage source outp”r waveform.

cl

28 ,EEE 488 8”s INDICATORS-REMOTE, TALK and LISTEN repre-

cl -_

sent merface status of Model 595.

27 DISPLAY-4% digit signed manti**a with two-digit alphanumeric

cl

exponent.

2-5

GEl-ilNG STARTED

2.5.2 Model 595 Rear Panel

Figure 2-2. Model 595 Rear Panel

The rear pand of the Model 595 is illustrated in Figure 2-2.

AC RECEPTACLE-Connects to three-wire line cord.

protection on the AC power line input.

3 IEEE-488-Connects the instrument fo the IEEE-488 bus. IEEE-488

q .

mterface functions are marked above the connector.

for shields or the LO

5 C, I METER INPUT-Tefloninsulated BNC. Inner conductor is input

q

HI, outer conductor is GUARD.

VOLTAGE SOURCE OUTPUT-Isolated SNC connector. Inner con-

from this wtpuf to bias devices when making current or
capacitance measurements. Referenced to GUARD.

output HI. outer conductor is GUARD. Voltage is sourced

2-6

7 C, I ANALOG OUTPUT-6way binding posts that correspond to

El
cl

q

10 MET!3 COMPLETE OUTPUT-Isolated BNC connector provides

q

11 EXTERNAL TRIGGER INPUT-Isolated SNC connector. Negative

q

~~~:~

meter display IC Q/t or Il. Referenced to IEEE common.

8 V ANALOG OUTPUT--B-way binding posts that correspond to

voltage at which C, Q/t, or I measurement was taken. Referenced
m IEEE common.

9 PEN LIFT-Two 5-way binding porn; pen lift and IEEE common. Nor-

mally a TTL high output; TTL low during a staircase waveform.

Minimizes recorder pen blotting.

negarwe gomg TTL output pulse after a reading is completed.
Referenced to IEEE common.

edge tnggered, TTL level. Referenced to IEEE common.

Current Measurements

The Model 595 is supplied with two Model 4801 Low Noise
BNC Cables. Use these cables or similar low noise cables
when making measurements with the Model 595.

Most capacitance measurements can be made through one
of the test setups illustrated in Figure 2-3. A semiconduc­tor wafer in a “chuck and probe” apparatus is shown in
Figure 2-3A, a packaged capacitor in a test box is shown
in Figure 2-3B, and a setup with an external voltage source
is shown in Figure 2-3C.

A. MEASUREMENT SETUP FOR DEVICE ON A

SEMICONDUCTOR WAFER.

Refer to Figure 24A and 2-4B to see how to make current
measurement connections. If a voltage source is used (to
make resistance measurements, for -pie), see Figure

2-4 for connections. Use Figure 2-4A with an external
voltage source and Figure 2-48 for connections with the
Model 595’s voltage source.

A. USING EXTERNAL VOLTAGE SOURCE

~_--------

L- --

/-HOOEL

- - 595
REAR

PANEL

CONNECTORS

WAFER

8. MEASUREMENT SETUP FOR CAPACITOR
IN TEST BOX.

COAX CABLE
BNC CONNECTORS
METAL TEST BOX

C. MEASUREMENT SETUP FOR CAPACITOR AND

EXTERNAL VOLTAGE SOURCE

EXTERNAL VOLTAGE

OPTIONAL SHIELD

B. USING MODEL 595’S VOLTAGE SOURCE

c_--------

L- --

SOURCE

I

METAL TEST BOX

Figure 2-4. Typical Current Measurement

Connections

Use the above figures to make rough measurement con­nections when following the examples described in
paragraphs 2.5.4 through 2.53. Refer to paragraph 3.2 for
more details on test connections.

Figure 2-3. Typical Capacitance Measurement

Connections

2-7

GElTlNG STARTED

25.4 Capacitance Example

The following is an example capacitance measurement to

aquaint the user with typical measurement techniques. In
this particular example, the device under test (D.UX) has
a value of about 5OOpE

The initial measurement configuration is power OFF, with
connections as described in paragraph 2.5.3. The circuit is

Button Press

1. POWER

2. ZERO CHECK

3. RANGE V

4. SUPPRESS

5. ZERO CHECK

6. (Connect capacitance in fixture)

7. ZERO CJFIECK

8. SHIFT, then STORE Co

9. UC, -~ 1.0000*

10. SHIFT, then Q/t

Il. CAPACITANCE* 1.0000~

12. UC, .4562* nF

Display

IT.
I.O.

0.000

O.OOT

.ool2=

.oooo

.oooo

.4562*

.4562*

.oooo*

IiF
IIF

broken at the capacitor under test (i.e., the probe is lifted
from the wafer).

Follow the steps outlined below to make a capacitance
measurement. The first column indicates what button
should be pressed; the second column shows what will be

displayed on the Model 595, and the last column describes

the results of the action taken.

Remarks

Memow test (RAM)
Memo6 test (ROMj
2018 capacitance range, ZERO CHECKS on, square
wave.

ZERO CHFCK off, measuring stray capacitance of
fixture.

Go to range of desired resolution (D.U.T. will be
about 500pF).

SUFT’RESS on, stray value will be subtracted from
all readings.

ZERO .CHECK on while connecting device.
Display is value of D.UX (minus fixture strays).
ZERO CHECK off to resume measurement.

This value is stored as Co for normalization of
capacitance.

The measured capacitance is normalized to C&
The magnitude of current through the D.U.T at the

time of each capacitance measurement (i.e., after
delay time). Note: suppress and Co apply only to
the capacitance measurement, not to Q/t.

Return to normalized capacitance display.

UC0 off.

* This value depends on the capacitor under test, any strays present, etc.

2-8

GETTING STARTED

,...

2.5.5 CV Example

Now that the user is acquainted with making basic
capacitance measurements, the following example will il­lustrate the use of the voltage source to generate a stair­case waveform while measuring capacitance.

Button Press

1. POWER

CONFIGURE VOLTAGE SOlJIb

2. SELECT A

3. A LIMIT

4. ADJUST ‘I (hold)

5. v LIMIT

6. ADJUST A (hold)

z STEPV

8. Sm, then STEP V

9. ADJUST A

10. DELAY TIME

11. ADJUST A (hold)

12. DISPLAY SOURCE
I.3 ADJUST v (hold)

Display Remarks

IX Memory test (RAM)
LO. Memory test (ROM)

o.ooo IIF 2C!nF capacitance range, ZERO CHECK on, square wave.

.dc

Select DC (tmns off STEP WAVEFORM). Capacitance not
measured when voltage source set to DC.

20.00

04.00

Voltage source upper LIMIT (20V) displayed.
Adjust voltage source upper LIMIT to 4V. (Press SHIFT, then AD-

JUST for coarse adjustment)

-20.00

-01.00

~Voltage source lower LIMIT (-2OV) displayed.

Adjust voltage source lower LIMIT to -lV. (Press SHIFT then
ADJUST for coarse adjustment)

00.05

00.05

00.10

00.07

00.50

00.00

-0l.00

~Display present STEP magnitude‘and STEP type (square wave).

Change STEP type to staircase.
Adjust STEP voltage to .lV. ~~~
Display present DELAY TIME (0.07 seconds).

~Adjust~DELAY TIME to 0.5 seconds.

Display present voltage source setting (O.OOV).
Adjust voltage soUTCe to lower LIMIT. (note that -lV is the limit

of adjustment as set in step 6 above)

The power ups measurement configuration is identical to
that of the previous example. Note that the device is discon­netted at the box on the voltage source side.

STAIRCASE OPERATION

14. SELECT v

xX.xX v $&xt STEP waveform (set 10~ s@ircgse in step 8), observe that

source steps are O.lV. Source stops at upper LIMIT (4V) and

waveform becomes DC.

15. STWV

16 +I-

17. DISPLAY SOURCE

7.8. SELECT v

19.

PAUSING STAIRCASE WAVEFORM

00.10 ST Display STEP voltage.

-00.10 ST Change STEP direction.

04.00

V

Display voltage source output.

xX.xX v Select and start staircase.

-01.00 v Source stops at -lV and waveform becomes DC.

Use SELECT v to start staircase, SELECT A to pause, and SELECT v to continue.

2-9

Button Press

Display

Remarks

MEASURE CV

20. Set WAVEFORM to DC, STEP V to +.lOV. Described above.
.~, ..~..~..~~_

(CONNECT CAPACITANCE IN FitiRE)

21. SI-EFT, then v

-a.00

V Display and PRESET voltage sourc$ to value of r LIMIT.

LlMlT (PRESET)

22. DISPLAY SOURCE .dc

23. ZERO CHECK

24. SELECT v

.dc nF

xX.xXx nF

.dc

nF

III

Return display to meter.
Turn off ZERO CHECK.

Capacitance readings during staircase; “dc” appears when staircase

reaches upper LIMIT

NOTE: SC’PPRESS, C/Co; STORE Co, and Q/t may be selected or~c%nceJlecJ, and voltage source parameters may be
monitored, without affecting the staircase waveform. A parameter change, however, will “pause” the staircase (i.e.,
the waveform will change to DC).

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