Keithley 590 CV Instruction Manual

Model 590 CV Analyzer

Instruction Manual

A GREATER MEASURE OF CONFIDENCE

WARRANTY

Keithley Instruments, Inc. warrants this product to be free from defects in material and workmanship for a period of 1 year from date of shipment.

Keithley Instruments, Inc. warrants the following items for 90 days from the date of shipment: probes, cables, rechargeable batteries, diskettes, and documentation.

During the warranty period, we will, at our option, either repair or replace any product that proves to be defective.

To exercise this warranty, write or call your local Keithley representative, or contact Keithley headquarters in Cleveland, Ohio. You will be given prompt assistance and return instructions. Send the product, transportation prepaid, to the indicated service facility. Repairs will be made and the product returned, transportation prepaid. Repaired or replaced products are warranted for the balance of the original warranty period, or at least 90 days.

LIMITATION OF WARRANTY

This warranty does not apply to defects resulting from product modiﬁcation without Keithley’s express written consent, or misuse of any product or part. This warranty also does not apply to fuses, software, non-rechargeable batteries, damage from battery leakage, or problems arising from normal wear or failure to follow instructions.

THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING ANY IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE. THE REMEDIES PROVIDED HEREIN ARE BUYER’S SOLE AND EXCLUSIVE REMEDIES.

NEITHER KEITHLEY INSTRUMENTS, INC. NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR ANY DIRECT, INDIRECT, SPECIAL, INCIDENTAL OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE OF ITS INSTRUMENTS AND SOFTWARE EVEN IF KEITHLEY INSTRUMENTS, INC., HAS BEEN ADVISED IN ADVANCE OF THE POSSIBILITY OF SUCH DAMAGES. SUCH EXCLUDED DAMAGES SHALL INCLUDE, BUT ARE NOT LIMITED TO: COSTS OF REMOVAL AND INSTALLATION, LOSSES SUSTAINED AS THE RESULT OF INJURY TO ANY PERSON, OR DAMAGE TO PROPERTY.

Keithley Instruments, Inc. 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: 440-248-6168

1-888-KEITHLEY (534-8453) • www.keithley.com

Sales Ofﬁces: BELGIUM: Bergensesteenweg 709 • B-1600 Sint-Pieters-Leeuw • 02-363 00 40 • Fax: 02/363 00 64

CHINA: Yuan Chen Xin Building, Room 705 • 12 Yumin Road, Dewai, Madian • Beijing 100029 • 8610-8225-1886 • Fax: 8610-8225-1892 FINLAND: Tietäjäntie 2 • 02130 Espoo • Phone: 09-54 75 08 10 • Fax: 09-25 10 51 00 FRANCE: 3, allée des Garays • 91127 Palaiseau Cédex • 01-64 53 20 20 • Fax: 01-60 11 77 26 GERMANY: Landsberger Strasse 65 • 82110 Germering • 089/84 93 07-40 • Fax: 089/84 93 07-34 GREAT BRITAIN: Unit 2 Commerce Park, Brunel Road • Theale • Berkshire RG7 4AB • 0118 929 7500 • Fax: 0118 929 7519 INDIA: 1/5 Eagles Street • Langford Town • Bangalore 560 025 • 080 212 8027 • Fax: 080 212 8005 ITALY: Viale San Gimignano, 38 • 20146 Milano • 02-48 39 16 01 • Fax: 02-48 30 22 74 JAPAN: New Pier Takeshiba North Tower 13F • 11-1, Kaigan 1-chome • Minato-ku, Tokyo 105-0022 • 81-3-5733-7555 • Fax: 81-3-5733-7556 KOREA: 2FL., URI Building • 2-14 Yangjae-Dong • Seocho-Gu, Seoul 137-888 • 82-2-574-7778 • Fax: 82-2-574-7838 NETHERLANDS: Postbus 559 • 4200 AN Gorinchem • 0183-635333 • Fax: 0183-630821 SWEDEN: c/o Regus Business Centre • Frosundaviks Allé 15, 4tr • 169 70 Solna • 08-509 04 600 • Fax: 08-655 26 10 TAIWAN: 13F-3, No. 6, Lane 99, Pu-Ding Road • Hsinchu, Taiwan, R.O.C. • 886-3-572-9077 • Fax: 886-3-572-9031

2/03

Model 590 CV Analyzer

Instruction Manual

01987, Keithley Instruments, Inc.

Cl&elind, Ohio, U.S.A.

Fourth Printing, February 1999

Document Number: 590-901-01 Rev. D

Manual Print History

The print history shown belowlists the printing dates of %I1 Revisions and Addenda created for this manual. The Revision Level letter increases alphabetically as the manual undergoes subsequent updates. Addenda, which are released between Revi-

sions, contain important change information that the user should incorporate immediately into the manual. Addenda are nun- ~~

bered sequentially. When a new Revision is Mzated, all Addenda associated with the previous Revision of the manual ax

incorporated into the new Revision of the manual. Each new Revision includes a revised copy of this print history page.

Revision A (Document Number 590-901-01) ........................... I ...............Y ... .I......1 ....................... _. ................... .1987

Revision B (Document Number 590-901-01) .................................... .I.................................................~.~ ...............

Revision C (Doc~umcnt Number 590-90 I-01). ............................................ ..~.........................................~..~....-..~ ..

Addendum C (Document Numbei 590-901-02) ......................................................................... ..~ ..- October 1995

Addendum C (Documenr Number 590-901-03) .................. ..~..~...~ ... I ..I._ ............. ..~ ....................... F&my 1996

Addendum C (Document Number 590.901-04 ................. ..~

Revision D (Documenr Number 590-90 I-01) .................... I ......_.....I. . I..............................- ........... February 1999

.................................................................

April 1996

Safety Precautions

The following safety precautions should be observed before using this product and any associated instrumentation. Although some instruments and accessories would normally be used with non-hazardous voltages, there are situations where hazardous conditions may be present.

This product is intended for use by qualiﬁed personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the product. Refer to the manual for complete product speciﬁcations.

If the product is used in a manner not speciﬁed, the protection provided by the product may be impaired.

The types of product users are:

Responsible body is the individual or group responsible for the use

and maintenance of equipment, for ensuring that the equipment is operated within its speciﬁcations and operating limits, and for ensuring that operators are adequately trained.

Operators use the product for its intended function. They must be

trained in electrical safety procedures and proper use of the instrument. They must be protected from electric shock and contact with hazardous live circuits.

Maintenance personnel perform routine procedures on the product

to keep it operating properly, for example, setting the line voltage or replacing consumable materials. Maintenance procedures are described in the manual. The procedures explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.

Service personnel are trained to work on live circuits, and perform

safe installations and repairs of products. Only properly trained service personnel may perform installation and service procedures.

Keithley products are designed for use with electrical signals that are rated Installation Category I and Installation Category II, as described in the International Electrotechnical Commission (IEC) Standard IEC 60664. Most measurement, control, and data I/O signals are Installation Category I and must not be directly connected to mains voltage or to voltage sources with high transient over-voltages. Installation Category II connections require protection for high transient over-voltages often associated with local AC mains connections. Assume all measurement, control, and data I/O connections are for connection to Category I sources unless otherwise marked or described in the Manual.

Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test ﬁxtures. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than 30V RMS, 42.4V peak, or 60VDC are present. A good safety practice is to expect

that hazardous voltage is present in any unknown circuit before measuring.

Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential human contact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If the circuit is capable of operating at or above 1000 volts, no conductive part of

the circuit may be exposed.

Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance limited sources. NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective devices to limit fault current and voltage to the card.

Before operating an instrument, make sure the line cord is connected to a properly grounded power receptacle. Inspect the connecting cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.

When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input power disconnect device must be provided, in close proximity to the equipment and within easy reach of the operator.

For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under test. ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting cables or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.

Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth) ground. Always make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the voltage being measured.

The instrument and accessories must be used in accordance with its speciﬁcations and operating instructions or the safety of the equipment may be impaired.

Do not exceed the maximum signal levels of the instruments and accessories, as deﬁned in the speciﬁcations and operating information, and as shown on the instrument or test ﬁxture panels, or switching card.

When fuses are used in a product, replace with same type and rating for continued protection against ﬁre hazard.

Chassis connections must only be used as shield connections for measuring circuits, NOT as safety earth ground connections.

If you are using a test ﬁxture, keep the lid closed while power is applied to the device under test. Safe operation requires the use of a lid interlock.

5/02

If or is present, connect it to safety earth ground using the wire recommended in the user documentation.

The symbol on an instrument indicates that the user should refer to the operating instructions located in the manual.

The symbol on an instrument shows that it can source or measure 1000 volts or more, including the combined effect of normal and common mode voltages. Use standard safety precautions to avoid personal contact with these voltages.

The WARNING heading in a manual explains dangers that might result in personal injury or death. Always read the associated information very carefully before performing the indicated procedure.

The CAUTION heading in a manual explains hazards that could damage the instrument. Such damage may invalidate the warranty.

Instrumentation and accessories shall not be connected to humans.

Before performing any maintenance, disconnect the line cord and all test cables.

To maintain protection from electric shock and ﬁre, replacement components in mains circuits, including the power transformer, test leads, and input jacks, must be purchased from Keithley Instruments. Standard fuses, with applicable national safety approvals, may be used if the rating and type are the same. Other components that are not safety related may be purchased from other suppliers as long as they are equivalent to the original component. (Note that selected parts should be purchased only through Keithley Instruments to maintain accuracy and functionality of the product.) If you are unsure about the applicability of a replacement component, call a Keithley Instruments ofﬁce for information.

To clean an instrument, use a damp cloth or mild, water based cleaner. Clean the exterior of the instrument only. Do not apply cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with no case or chassis (e.g., data acquisition board for installation into a computer) should never require cleaning if handled according to instructions. If the board becomes contaminated and operation is affected, the board should be returned to the factory for proper cleaning/servicing.

SAFETY PRECAUTIONS

The following safety precautions should be observed before using the Model 590,

This inshment is intended for use by qualified personnel who reco&iie shock hazards and are familiar with the safety precautions required to avoid possible injury. Read over this manual carefully before operating the instrument.

Exercise extreme caution when a shock hazard is present at the instrument’s test output. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than 3OV RMS or 424V peak are present. A good safety practice is to expect that a hazardous voltage is present in any unknown circuit before measurement.

Do not exceed 3OV RMS (42.4V peak) between analog common and earth ground.

Inspct YOUI connecting cables for possible wear, sacks, or breaks before each use.

For maximum safety, do not touch the test leads or the ins&u.ment while power is applied to the circuit tider test. Turn the power off and discharge all capacitors before connecting or disconnecting the instrument.

Do not touch any object which could provide a current path to the common side of the circuit under test

or power line (earth) ground. Always make ~easureme~nts with&y hands while standing on a dry, insulated surface capable of withstanding the voltage being measured.

Do not exceed the instrument’s section of this manual.

xnaximum allowable bias input as defined in the specifications and operation

SPECIFICATIONS

59011OOk and 5901100kllM FRONT PANEL SPECIFICATIONS w/z Dii,

RANGE

2 PF 2&s OSIS O.lz% + I 50 x UC, + 2wl 4ns

2°F X0 fF 0.12% +~ (260 x GIG, + 5) SC‘7 fF 2ms loo ns 0.12% + ( 22 Y c/G, + 51 0.6s

7nlF

2oms

RESO‘uI?ON

O.lfF 0.12% + (E&l x GIG, + 200) 6 fF

10 fF 0.12% + (260 x G,Grs + 5) 90 fF 10 ns o.l2%+(22xuc,+ 5) 6ons

1 PF

1 $8

590&i and 5901100WlM FRONT PANEL SPECIFICATIONS Wh Diil

RANGE BESOLUTION

20 PF

ZCQ PS Yr%

2°F

2oms

Aamy is

1 fF 0.29% + (SO x G/G,, + 10) 6fF

10 “s 0.29% + (I20 x UC, + 10) 10 fF 0.29% t Y x GIGS + 5)

x-m “s 0.29% * I20 x UC, + 5) %f: I‘Q fF 0.29% + (SOI x GIG, + 51

1fi

maximum limit t-m Qz20; typical for Q<ZO.

ACCURACY u Y.zu)'

u)vs'C F-P NOISE5

iflads + counts)

0.25% + (260 x GIG, + 5js 9 fF

0.25% + ( 22 x UC, +-m-5)

*ccuRAcY 11 Years

lsswc F-F NOISE’

iwdg + umntsj

0.29% + (I20 x CIC,s +~ 5)

RLFRON

6,fi

FInm ON

4O”S

2WfF~~

1 PS

SHUNT CAPACZTANCT

LOADING EFFECt”

iwd8i-k)

0.1 % + (3 x G/G=)

0.1 % + (3 x UC”)

0.1 % + (3 x GIG,)

0.1 % + (3 x UC,)

0.02% + (20 x GlG,s) Km6 + ( 7 x CGS) 0.1’ % + (7 x CKn)

0.02% + (20 x GIG,)

0.02% + ( 7 x UC,,) 0.02% * (3 x UC,,)

0.1 % + (30 x GIG=) 0.02% + (2 x GIG”)

0.1 % + (10 x CICrs) 0.02% + (2 x UC,)

TEMPERATURE COEFFxaENr wuNT cAP*aTANcE

W-WC & 28%50~c

*&rag + counb,I~c

0.02% + (20 x G,G,s) 0.5 % + (W x GIGm)

0.02% + ( 8 x cic,s) 0.5 % + (lo x CGr)

0.02% + (20 x GIG,s) 0.35% + (40 Y. GIG,s)

0.02% + ( 8 x CICPr) 0.35% + (16 x C/Cd

0.1 % + (3 x GIG,,.)

0.02% + (2 x G/G,)

LOADING EFFECT”

l (%rdg + counts1

0.35% +~

0.33% +

40 x G,G,) 16 x C/CR)

NOTES:

1. G = conductance reading; C = capacitance reading; Gm = fuU scale cmductance; C, = f”U scale capacitme. Range and acc”racy designations based on parallel RC model.

2. Rant panel 2Jzarq is IeIative to C.&ration same pamI accuracy and source accuracy for total accuracy. Factcry calibration source accumcy is 0.06% for 1COkHz and 0.08% for lMHz. CAL is to be used to cancei initial zero, gai”, and phase error terms withi” 8 hours of measurement or whenever ambient temperature changes by more than 2oc.

accuracy. Add front

BIAS SOURCE

INTERNAL BIAS SOURCE OUTPUTz -20.00X’ to +2O.OOOV in 5mV

Step.

ACCURACY (1 Year, 18%8°0: i(O.ffi% setting + 10~1”) exdtive of

loading e*ms. DC OurPuT RBSISTANCE: 50 madmum. TEMPERARIRE COEFFICIBNT (Oa-180C & 28°-5000:

*(o.ws% + hv)IT. MAXIMUM ODTPllT CuBREm f5OmA. SETtTING TIME: <lms to 1% of f&l value. NOISE: Typically <2OOpV F-p, O.lHz-IMHz; 3mV F-p to 75MHz BIAS WAVEFORM:

~~.-STAIR:output~sinincrrmMtsofBIAsS?zFVfromFIRsT

BIAS V to LAST BIAS V, the” back to FIRST BIAS V.

PULSE Outputs pulse train; amplitude increments by BIAS STEP V

from FIRST BIAS V to LAST BIAS V (each pulse is from DKFAUIT

BIAS V to FIRST BIAS V for duration of SW TEwfE, then back to DEFAULT BIAS V). Also Fqwnmable for single pulse.

EXTz AUows application of external bias sauce (via VOLTAGE BIAS

mw.

BIAS PARAMETERS: FIRST BIAS V, LAST BIAS V, DEFAULT BIAS V,

BIAS STEP V, START TIME, STOP TIME, STEP TIME, COIJNT.~

ts the programmed value.

4. “Shunt Capacitance Loading’ is additional accwxy with equal shunt load cm Output and Input, per IOOpF shunt load.

5. Noise spedfied with SOOpF shunt loading on Output and Input. Noise on 2pF and 2OpF ranges is tvpical with 1oOpF shunt load; 5oOpF wiU increase noise no more than x2. Measured at 10 rdS/s rate.

CAPAClTANCE NON-LlNEAlUTYt <OS% of range, for Q>20 or

D<O.OS, 18”-28°C. TEST VOLTAGE: lSmV nns ilO%. TEST FRBQUBNCY: 89011Wkz 1CQkHz. 54ollMz IMHz. Tolerance: +O.l%.

BIAS STEP V: Rogrammable in 5mV steps to 20V. Polarity selectable +

or -.

ST-T ~~ After transition from DEFALILT~ Be V to FIRST BIAS V,

START TIME must elapse before first meas-ent. Programmable i”

inaements of 1024ps from 1 to 65,536 increments.

Accuracy: *(O.l% + hs). STEP TIME: The period between the ktitio” of BIAS STEP V and the

Start of the next meas”rwne”t. Programma

~frc!Qll to 65,536 fnaenlenis. Accuracy: ~f(O.l% +-lms).

STOP TIME: The period between the end of the final measurement and

the kawition from LAST BIAS V to DEFAULT BIAS V. Programmable

in increments of 1024us from 1 to 65,536 i”aeme”ts.

Accuracy: f(O.l% + lms). EXTERNAL VOLTAGE BIAS INPUT: Rear panel input tennhuls allow

application of &emal bias source up to f2MIV, i5Gm.A. Input Impedance: lwk0 paralkled by l$.

VOLTAGE BIAS MONITOR: Rear panel output terminals allow monitor

of the DC BIAS SOURCE output or extemauy applied VOLTAGE BIAS INPUT; Level: IV = 1V wt. Output Resistance: Ikn.

VOLTAGE BIAS DISPLAY: Front panel &-digit display allows direct

readback of the DC BIAS SOURCE output or ater”aUy applied VOL TAGE BJASINPLIT. Acnnacy *(O.O5% + 5 aunts). Temperature Caef-

ficient: *(0.005% +~ 0.1 count)/T.

ble in increments of 1024q

ANALYSIS CAPABILITY

(Rogrammiog and output an&able from front panel or IEEE-488 bus) READING BUFFERS A and B: Two data buffers allow storage and math-

ematical manipulation on up to 450 mea.sluemerlt triplets: capacttance, conductance, and voltage. In C vs. t, capxitmce and index only are stored (up to 1350 points).

1I;pefforms the inverse of C on the capacitance data stored in reading

~6:Anows~~tionofcapadtancereadings~~~inreadingbuffer

to a user-pmgammable reference value Co. Cm: Searches reading buffer far the maaimum capacitance value. G-6: Sequentiauy computes the difference between comes ondin

capacitance readings stored in reading buffer A and reading B # uffer

Iv,-V.1: Calculates the corresponding difference in applied voltage for

values of capatitance in reading buffer B equal to each valve in reading

bufferA. C vs. t: Akws fast measurement of capacitance vs. time (loo0 rdgls).

CABLE COMPENSATION

Rip to 8 setups can be stored in non-volatile memory)

CALIBRM’ION CAPAQTOR COMPENSATION: Corrects for emxs due

tocablesorswitchingmatrixupto5metarseffe

length. nvmlleeanwmen ts are made with cables and matrix terminated

with pmision reference capacitors in place of the DUT. Model 5907

CablelMath Calibration Cqa.itor Set required. Bus programmable only.

MHz only. Accuracy: *(05% + appltcable front panel specification),

typical. SINGLE-ENDED CABLE and S-PARAMETE R COMPENSATION can

also be made. See manual for detailed information.

IEEE-488 BUS IMPLEMENTATION MIJLTILmEcoMMAND s: DCL, LLO, SDC, GET, GTL, IJNT, SPR,

SPD. UNILINE COMMANDS: lFC, REN, EOI, SRQ, ATN. lh?TERFACE FUNCIION% S-D, AHI, TEO, LA, LEO, SRI, RLl, PFO, DC-l,

DTl, El, CO (for stand alone plotting C28 is used).

PROGRAMMABLE PARAMElXRs: Range, Function, Zero, Filter, Fre-

~??&ger,Taminat~,4XIDataPointStorage.

r&m, Display, Status, Service Request, Self Test, Output Format. TRANSLATOR: Up to 250 bytes of deSni!dore allow v&able pass@, def-

inttin decomposition and listing.

Bias Waveform, Bias Parameters, Plottin

Plotter Parameters

i!klibmiion, cable COG

GENERAL

DISPLAY: Three 4~-di@t displays for capadtance, conductance, and

voltage bias.

~~I~b~4md or autoranging (for rates up to 18 Id&; 10% wermnge

OVERRANGi INDICATION: Display reads OFLQ.

AVAILABLE MEASUREMENT RATES (to tntemal buff-):

4=&D&@ 1, 10, and 18 rdgls. 3yz-D&k 75 and loo0 rdgis.

FILTERc l-pole analog; pole at 37Hz. Filters t&b capacitance and conduc-

tame signals. For FlLTER off, multiply p-p noise specification by 5.

CAL: Initiates ti&ation to intm-d reference capacttor. Used to cancel

initial zero, gain, and phase errors.

ZRRO: Allows zeroing of on range readings. Allows relative readings to

be made with respect to a baseline value.

MAXTMUM OVERLOAD: OLn’PUT, Voltage Bias Input: 20X’ internal-

ly fused at ‘@. INFUT: Clamped by diodes to f0.N. M&mum current 2wmA. Analog output% w.

MAXIMUM COMMON MODE VOLTAGE (INPWI and OUTPUT, Volt~;~ In nt):

ANALOG 0LTFli-B (Capacitance and Conductance): Level: 2V output

at full range. Initial offset: i25mv. wt Reststance: lw. Response Time: lms to 1% of final value with fiiter off; 25ms maximum with filter on.

FTOlTBR: Digital plotter output centrals IU’747OA plotter or equivalent

using HPGL via IEEE-488 for real-time plotting of all measure*e*ts as well as results of math computations, with gdas and labels. Talks to plotter on address 05. HPGL commands used are lN, Ip, IW, PA, PD, Pu, SC, SI, SF.

PRONT PANEL SFFWS: Up to 7 fmnt panel setups can be stored in non-

voL@ile memory.

EXTERNAL TRIGGER: ‘lTL compatible Fxtenul Tr@ger Input and

output.

INPUT CONNECTORS: Isolated BNC f& m and Voltage Bias Input.

OUTPUT CONNECTORS: Isolated BNCs for OUTPUT, Voltige Bias Mont-

tar, and Analog Outputs. Non-isokd BNCs/or External Mgger.

ENVRONMEN’C Opding: O”-WC, relative humidity 70% nonamden-

sing up to 35T. storage: -250 to +wc. WARMUP: 1 hour to rates3 accu.racy. COOLING: Internal fan and filter for foxed air cooling. POW!% lOEl25V or ZlC-w1V (external switch selected), 5OHz to 6oHz,

loOVA madmum. 9&llOV and ISXZOV version available upon request.

DIMENSIONS, WEIGHT: l33nvn high x 435mm wide x 44&m deep

(5’/i in. x 17% in. x 17% in.). Net weight 9.Ikg (20 lbs.).

ACCESSORIES SUPPLIED: Tiko Model 70515 BNC cables.

ACCESSORIES AVAILABE

Model 5904: 2OnF/2OmS Adapta

Model 5905:

Model 5906:

Model 5907: Cable/M&ix Calibration Sources

Model 7w7-1: Shielded IEEE-188 Digital cable, lm (3.3 ft.)

Model 7007-2: Shielded IEEE&?8 Digital Cable, 2m (6.6 ft.)

Model 7051-2: BNC to BNC Cable, 0.5m (2 ft.)

Model 7053.5: BNC to BNC Cable, 1.5m (5 ft.)

Model 7051-10: BNC to BNC C&k, 3m (l0 ft.)

speciacaaans sub++ to change wtdlout nolice

30V rms, dc to 6LlHz. Rear panel switch allows con-

lNF

LiT low to chasw.

Cal&ration Sources and Adaptas for 5901lM. Cal&ration Source and Adapters for 5YO/lM, 59U/lOOk, 590/1OOk/lM, and 5904

5901lOOK ANALOG OUTPUT PERFORMANCE

ACCURACY ti Year)

180 -2vc

RANGE

20 pF 1%+~(5OxG/G,+l)

206

2LW pF 1% + (50 x G/G, + 0.5) 2OOps 1% + (20 x c/c,s + 0.5)

k(% reading + mv)

1% + (20 x UC, + 1 )

P-P NOISE’

ANALOG FILTER ON

TEMPERATURE coEFFIaEwI SHLNTCAPAClT.4NCZ

00 -w & 7.80 -WC LOADING EPFECl”

iph lwiblg + mv) iPh readbIg + mvl

0.2% i (l0 x GIG, + 0.1) 0.1 % + (0.3 x G/G&

0.2% + ( 4 x UC, + 0.1)

0.2% + (l0 x GIG, + 0.1) 0.1 % + (0.3 x GIG,)

0.2% + ( 4 x CGs + 0.1)

0.1 % + (0.3 x UC,)

0.1 % +~ (0.7 x UC,)

2nF ZUIS 2% + (20 x UC, + 0.5) 0.6~5

2onF 3% + (50 x GIG, + 0.5) 24hS 3% + (20 x UC, + 0.5)

2% + (50 x G/6+ 0.5)

900 fF

Accuracy stated for Q 220 Typical enor for Q <20 . Wing Model 5904 2onF12Om.S INPUT ADAFTFR.

NOTES:

1. G = conductance reading; C = capacitance reading; G, = fidl scale

conductance; C, = tidl scale capacitance.

2. Range and accuracy designations based on parallel RC model. 3v”Shunt Capacitance Loading’ is additional accumcy ermr with equal

shunt load on Test Output and Test Input, per lWpF load.

4 Noise specified with 5COpF shunt loading on Test Output and ‘I&t In-

put. Noise on 2pF and 20pF ranges is typical with loopF shunt loading;

ACCURACY (1 Year)

180 -WC P-P NOISE’

f(% reading + mvl ANALOG FIUER ON

2% + (75 x GIG, + 1) 2% C~( 30 x UC, + 1)

2% + (75 x GIG, + 1) 3% + (30 x UC, + 1) 0.9~ mv

L2mV

0.75mv

l.4~inV

20 pF

zoog

200 PF

2UiS

RANGE

a4% + (l0 x GIG, + 0.2) 0~2% + (0.2 x GIG,)

0.4% + ( 4 x UC,, + 0.2) 0.02% + (0.3 x UC,)

0.6% + (10 x GIG, + 0.1) 0.1% + (0.2 x GIG,)

0.4% C~( 4 x UC, + 0.1) 0.1 % + (0.2 x UC,)

5tXpF will increase noise no more than x2.

5.5904 must be caliimted with a particular 59011WK to achieve this ac-

clmxy level.

TESI VOIXAGE: l5mV rms fU)%. TEST FREQUENCY: l~33kHz. Tolerance: tOI%.

TEMPERATURE COEFFIaENT SIIUNTCAPAClTANC??

00 -WC & ‘28” -WC WADING EFFECT

iv0 readlug +~ mv)

0.15% + @ x GIG,)

*P/o reading + m&l

0.5 % + (25 x GIG,)

O.l5% + ( 6 x CIC,) 0.5 % + (1.0 x CL)

~J!.E% +~ U5 x GIG,)

0.15% + ( 6 x UC,)

0.35% + (4.0 x GIG&

0.35% + ('I.6 x C/G)

2nF UptolnF

zolns up to IGms

2& AbaelnF

2OmS Above 1GmS

NOTE%

5% + (I50 x GIG, + 1)

5% l (40 x c/c,* + 1) 5% + 300 x GIG, + 1)

7% + 40 x UC, + 1)

l. G = eonduaance reading C = capacitance reading; G, =

conductance; 6

2. Range and accuracy designations based on parallel RC model.

3. “Sh&t Capacitance Loading” is additional accumcy error with equal

= full scale capacitance.

0.3 mv

0.2.mv

03 mv

0.2 mv

full scale Input. Noise cm 2pF and 2GpF ranges is typic.4 with l0lpF shunt loading;

shunt load on Test Output and Test Input, per lwpF load.

4. Noise specified with 5oOpF shunt loading on Test Output and Test

0.15% + (l5 x GIG,)

OS%.+ (6 x~CIC;s)

0.15% + (I.5 x GIG,)

0.35% + ( 6 x UC,)

5oOpF will iraease noise no more than X2.

TEST VOLTAGE: l5mV rms flO%. TEST FREQUENCY: n4lj.z. ~&mnce: &u.%.

0.35% +~(40 x GIGm)

0.35% + 06 x gem)

0.35% + (4.0 x GIG,)

0.35% + 0.6 x UC,)

C~rttttins an overview of the instrument, incbxiing features, unpacking b.tstn~&ons, as well as a brief description of available accessories.

SECTION 1

General Information

Indudes an ov&ew of front and rear panel configuration and basic test procedures. Use the information in this section to get your Model 590 up and running as quickly as possibIe.

This section contains detailed information on operating

all available versions of the Model 590. Use this sec-

tion as a reference to all front panel operation.

Section 4 contains information on connecting the Model 590 to the IEEE488 bus and programming the instrument from a computer.

Outlines procedures necessary to verify &at the Model

590 and the 1OOlcHz and lMH.z modules are operating

within stated specifications.

SECTION 2

Getting Started

SECTION 3

Operation

,., ,.. ,”

SECTION 4 /

IEEE-488 Programming /

SECTION 5

Performance Verification

A complete description of operating principles for the instrument is located in this section. Analog, digital, microcomputer, and power supply circuits are described, as are the IEEE-488 interface, and the capacitame modules.

Details maintenance procedures for the Model 590, including fuse replacement, line voltage selection, calibration, and troubleshooting.

Includes replacement parts information, schematic

diagrams, and component location drawings for the

Mode1 590.

SECTION 6

Principles of Operation

SECTION 7

Maintenance

SECTION 8

Replaceable Parts

TABLE OF CONTENTS

SECTION 1 - GENERAL INFORMATION

1.1

1.2

INTRODUCTION FEAWS.. WARRANTY INFORMATION

:::

1.5

1.6

MANUAL ADDENDA .........................................................................

SAFETY TERMS AND SYMBOLS SPECIFICATIONS UNPACKING AND INSPECTION. _.,

~::L

1.7.2

1.7.3

1.8

1.8.1

1.8.2

1.8.3

1.8.4

1.10.1

1.10.2

PREPARATION FOR USE

REPACKING FOR SHIPMENT OM’IONAL ACCESSORIES

shipment contents ModuleComplement Additional Insfnxfion Manuals

LinePower..................................................................

Line Voltage Selection

LineFrequency

IEEE-488~P&&y Address

General Accessories Calibration and Verification Sources

.............................

....................................................................................

........

; .................... i ....................................

...............................................................

...........................

......

.........................

.......................

..............

....................

.....................................

...........................................

.................................

...............................

. . . . . . . . . . . . . . . . . . . . . . . . . . .

...................................

....................

SECTION 2 - GETTING STARTED

2.1

2.2

2.3

INTRODUCTION FRONT PANEL FAMILIARIZATION REAR PANEL F

2.4 POWERUPPROCEDURE..

2.4.1 Line Voltage Selection

2.4.2 Line Power Connections

2.4.3 Power Switch

2.4.4 Power Up Self Test and Display Messages Power Ups Confi

2.5

___ - -

2.5.1~ 'lest Connections.

WarmUpPen

BASIC MEASUREMENT TECHNIQUES

2.5.2 Basic One-Point Measurements

2.5.3

2.5.4

Basic Plotting Techniques Fundamental C vs f Measurements

.......................................

.....................

AMEUREATION .......................

.............................

.................................

...............................

.........................................

fration .....................................................................

..................

...........................

..............

...................

..........

; .................................................

..............

. .

.......................................

......................................

.....................................

..............

. . .

. .

. . .

..........

. .

. . .

. .

. . .

1-l l-l l-2 l-2 l-2

.................................

..................................

.................................

..................

..................................

. . . . . . . . . . . . . . . . l-3

. . . l-3

l-3

...... . ........................... l-3

2-l 2-l

2-w 2-16

2-16 2-16

..................

.................. . . . . . ..I......

.................. .............. 2-17

.................. .............. 2-19

..................

.................. ..............

...............

............... 2-16

...............

..............

2-16

2-17 2-17

2-20 2-24

SECTION 3 - OPERATION

3.1 INTRODUCTION . . . . . . . . . . . . . . . . . . . .

3.2

3.2.1 FrrorMessa

3.2.2 Informatio

DISPLAY MESSAGES. . . . . . . . . . . . . . . . . . . . . . .

es . . . . . . . . . . . .._..............

IA Messages.....................

............

..........

.................................. 3-l

. . .

.................................. 3-2

. . .

.................................. 3-2

. . .

3.3

3.3.1

3.3.2

3.3.3

3.4

3.4.1

3.4.2

3.4.3

3.5

3.5.1

3.5.2

3.5.3

3.5.4

3.5.5

3.6

3.6.1

3.6.2

3.6.3

3.6.4

3.6.5

3.7

3.7.1

3.1.2

3.7.3

3.1.4

3.8

3.8.1

3.82

3.8.3

3.9

3.9.1

3.9.2

3.9.3

3.9.4

3.9.5

3.9.6

3.9.7

3.10 USING ZERO.. ..................................................................

3.10.1

3.10.2 Storina Ca&itance and Conductance Baseline

3.10.3

3.10-4

3.10.5

3.11

3.11.1 Correction Procedure ........................................................

3.11.2

3.12 TRIGGERING THE INSTRUMENT

3.12.1

3.12.2 Programming the Trigger Source

3.12.3 Front Panel Ttizering..

3.12.4 Trigger Overrun Condltmns ....................................

3.125

3.12.6

3.12.7 External Triggering Example ............................................................................................

3.12.8

3.13

3.13.1

3.13.2 SHIFT/QUIT Key Operation .................... . ....... .

3.13.3

3.13.4 Display Cursor

3.13.5

TEST CONNECTIONS .................................................

BNC Test Jacks ...........................................................................................................

Typical Test Configuration ..............................................................

Grounded and Floating Operation ...........................

READINGS AND HARDWARE CONTROL ..............................................................

Capacitance and Conductance Displays.. .................

Bias Voltage Display .............................................................................................................................................

Hardware Control Considerations

RANGE SELECTION ................................................................................................

Available Ranges ..........................................................

Invalid Reading Indications ...................................................................................................................................

Manual Range Selection.. ................. ..t...................................~

Using Autoranging ...............................................................

Using the 20nF/20mS Range.. .................... . ...............

FREQUENCY SELECTION ...........................................................

Frequencies Available by Model.. ...................................................................................

Test Voltages .......................................................................................................................................................

Selecting a Frequency ...................................................

Frequency Error Messages ..................................................................................................................................

Disconnecting the Test Voltage

SERIESfPARALLEL MODEL ...............................................................................................................................

Measurement Model ~~~~~~~~~~~~...~......~............................................~~~~~~~~~~~~.~~~~~~~~~~.~~~~~~~~~~..~~.....................~....~~~ - 3-14

Model Selection

Conductance and Resistance Ranges.. .......................

Series and Parallel Equivalent Circuits.. ................

FILTER. .._._......_........._ ..... - ................ _.-- ..-- ....

Filter Control .~....~~~.~~~.~.............................~............................~~~~~~~~~~~~.~~.~..............~~

Typical Filter Response ............................................................................................................

Using the Filter.. ........................................ ..~

READING RATES.. ........................................... ..r..~ .- ~._- _._.........._..........-

Selecting a Reading Rate

Display Resolution ..................................................

Digital Filter

General Rate Selection Considerations .............

1000 Reading Per Second Rate Considerations ...........................................................................................

1000 Readings Per Second Instrument Settings

Typical Reading Rates

Enabling and Disabling~Zero ...................... ..- .......

Using-?& to Optimize Instrument Accuracy ...........................

Zero Considerations ....................................................

Examples of Zero Operation

DRIFT CORRECTION..

Internal Correction Sequence ......................... . .............................................

Selecting a Trigger Mode

External Trigger Input ..................................................

External Trigger Output.. .............................................

IEEE-488 Bus Triggering.. .............................. ..-. eze..-~.e~--- .: --

DATA KEYS ..................... ..-.......................-...-...- - ~-

Increment and Decrement ................................. ..~.~~

Numeric Input ...............................................................

ENTER

............................................................... -. ........... . . ..___.....-..........-...............................-...........-

.....................................................................

............................

......................................................... - ._...................................................................~

.............................................................................. -

..t..................................~

............................................ ._I...I..............-

.... . ..................... . ....

......................................

................. . ..............

................................

....

;........................................................... ~........................................... 3-18

.................................................... __

..................... :: ..;.

........................................................................................................................

.:x.

_____,_ ...........................

..~.~..........~ .... -:.:..e A.-. _-..._ ... . .......... :.:. 3-3 ............. ..I ........

..__..... .... ._._. . __.___ --- .... .._..............-..- ..- 3-4

....

:.;.::..:X

z.;:.

. _.........................................................- ........................... 3-8

.._ ....... ^ ._.______: ................. .._ ............................................. 3-8

.:.z ................ I__I ..... -:...:..1...- .................................. ;- ...... 3-10

..I ................................................................................... 3-13

..........................................................

..~

.._ ...................................................................................... 3-15

. _______: ....... . ... ..-. ______: ....... . ..; ........ . .......................................... 3-15

-.__----.--

- .___..-__

..~.~.-..........~...~ .. ~__-~ .... .._....._ ................. ..__..............- ................. 3-19~

. ......... ;;;. ........................................................................ I.. ........ 3-19

..................................................................................................

I ._.-. -__._;. ...... __.~. ... .._ ...... . ..... . ._ ................. _._ _ .................... 3-20-

Values ............... .x.. ...................................................... ..- ....... 3-20

. ....I........_ ........ _. ..... .._ .... _ __._.__l_ _. .._: __._........_ ............. 3-21

-- _........__ _ -_-

......

............................................................

.....

l..~..~.l.+. -.

..-..----.-........-

- .................................................................................... 3-27

1: w .__.__: .......... .._ ............. -..e .. -... -

.. _ .._ ............................................. ..~ - __._ ................ 3-30

. .._..._._.._.._. - ........... ..-

-...._- - _............l.........-.....-.- ..... .._ .................... 3-30

,.I., ~e.e.; -__-_.1:

. ....................................... L..- -.

... . .......

........ ..~ ............... ..~....~.~_ ...... .._ ................................. 3-10

............................................................................

..-

. ........................................... .._..........~.....~

..~

..- I .__-

.....

.....................................

.....................................................................................

. ............... :: ................................................ . ....... 3-20

...............................................................................

.._

. __._____.:. .......... ..~~~.~~~~~~~~.~~~~~~~~...~~.......~..~.......~ ......... . . 3-30

...........................

.._ ............ -. .............. ..-..........- .......... 3-17

.......................... .._.........- .. ..I . _._

.........................................................

.....

-_.__ ...... .._

......................

.....................................

.......................................................... :. ..... 3-29

_,_” _--_.-.__^ _.-__- -- ... _. ......... _....-. 3-30~ ~‘~ :

........

-~ _

:: .................................... . .......... :: ...... .~3-23

...............................................................

........

..~.~.~.-_ __

.......................................

..~.~.~ I ............................ ;;.3-7

...........................................

..~

.._....._ . -- ___._._.__._ - ..... 3-13

_- -____.__

.._..................~...~ ...... 3-15

..... .._._.._ .......................... 3-17

- ....... .._......................~

- ........l ...................... ..-

.............................................

.......

_ _..._._...__..._~.......~. _ _

_.,.: . ..?.

.....................

.--L-.; ___.._..__. _._ 3-27

.._...._

..^ .. ----- 3-3 : ., I ....

..................

..~~ ..................... 3-17

.....................

..........................

...

...........

X:.. ... .

.........................

............

.....

:.I..

3-6

..- _ 3-7 _ ~~~

3-8

3-9

3-10

...

13-13

3-13

3-14 3-14 3-14

.....

3-18

3-19

-. ..... .3-19

3-19

^ ^^

3-Z”

......

3-21 3-22

3-22~~; : : -

__ 3-24

3-24

.....

3-25 3-26

......

3-26 ..

::: ..I.

3-28

3-30

.......

3-31

3.13.6

...............................................................................................

3.13.7

3.13.8

3.14

3.14.1

3.14.2

3.14.3

3.14.4

3.14.5

3.14.6

3.14.7

3.14.8

3.15

3.15.1

3.15.2

3.15.3

3.15.4

3.16~

3.16.1

3.162

3.16.3

3.16.4

3.16.5

3.16.6

3.16.7

3.16.8

3.16.9

3.16.10

3.16.11

3.16.12

3.16.13

3.17

3.17.1

3.17.2

3.17.3

3.18

3.18~.1

3.18.2

3.19

3.19.1

3.19.2

3.19.3

3.20

3.20.1

320.2

3.21

3.21.1

3.21.2

3.21.3

321.4

3.21.5

3.22

3.22.1

3.222

3.22.3

3.23

3.23.1

323.2

3.213

3.23.4

Multiple

Parameter Entry

.......................................

Invalid Parameter Entry .~.............~......~~~~ - __._ ~.-._.--.l-

Data Key Examples BIAS VOLTAGE.. Selecting Programming

Controlling

a Bias Waveform ........................

Waveform Parameters ..............................

the Bias Voltage (BIAS ON) ..:Z....... ..............................................

..............................

...................................

_ _I___.,.-.I_

__- ____- ..........................................................................................

. l--.-----i __.._; .... 1.- _._.__ :...;. ....

Bias Waveform and Parameter Definiti&s.. Bias Step and Sweep Using External

Durations

Bias Sources

............................

.......................

..__._____....,

Monitoring the Bias Voltage .................................

External bias voltage measurement range.. BUFFER Buffer Definitions How Trigger

Accessing Transferriri~

PLOTTING Recommended Plotter Language Plotter Primary Plotter Bus Programming Graph Format Plotting a Initiating Aborting a Plot or Grid

Plotter Error.. .............

Plotter Scaling

OPERATION.. ...............................

.................................... . ..............

Modes Affect the A/D Buffer ..........................................................................................................

Buffer Information..

Buffer Contents :.:

.......................................

...........

DATA.. ........................... ..- .-

Plotters ........................................................................................................................................

syntax

......................................

Address

..........................................

Connections ................................... . ......

Plotter Setup Parameters

...............................................

Grid.. ........................ ..-..........-

the Plot.. .............................................

........................................................................................................................................

. ........... ;._________________._

.......

......................................................................................................................................................

Plot Types .......................................

..........................................................................................................

..................

................................. ._. ;;. ..........

...... ..- 1_.__ .____._ . ._ ...............................................................................

..~~

...........

Plot Examples .................................................................

SAVING AND RECALLING INSTRUMENT CONFIGURATIONS

Factory Default

SAVEing RECALLing SELF TEST..

Test Sequence

Running the Self Test

MATHEMATICAL FUNCTIONS-..... I

Displaying Math Functions.. Using Math Functions with the Plotter.. Math Function

Configurations _____.___: .........I

Configurations

.............................................

......................

.._............._

....................... ^ ........................................................................................................

...............................................

.............................

. ..,...-. ^____.__~ ...

................ .--..-.- ........... .___.~______ - _^_____ - .............................

.................

:i.. .......................... ____,______~ .............................

................................................................................................

Descnptlons ...... I ..... IL: ._____:.

C vs. t MEASUREMENTS ............................

Internal C vs. t Measurements

..........................................

.,..........................................~ ..................................................

. ..-. .. . - . ..-. --.--_-_--.

- - ..................................................................

.............. - ........I....~ .................

..- ...............................................

;..-1....... __

..........................................................................

..~.~ - :-:..-.--: ________ -___- ________ - ____._._._

........... . .......................................

..~

........

............................................

..” ..............................

__.__.__._.___ I.__ 3-36

..........

; .............................

. ___.______.________ 3-48

. _____: ______________._._;. .......

..~

...............................

..___ ........ ..- ................. . ...............................................................

:......................;

...........

;; ..;

...............................

:L _,.,_________: .....

.............. -__- .................................................................

. ___.;

. _--_

..-.- .- ____-.

*___.__I

..........

. ._^. _- ..- .-

........

I.__

.............. .......

:.:: ........ .

..........

:...~? .........................................

....

............... ..- .. -. .....................................

-. .........................

..-.............-.......- ...........

_.._ .............................................................

..... ..- ................ . .. .._

;..; ..:

..........

..................

__I._____ .z. .: .....

........................................ -:..-.

..-..-.........-.................................................................

... ............. ..--.....- .. -___-

__L__ ____~_L

................

...........................................................

_. .........................

..-

..................................

....................

..~................~ ................................................................

..............................................................

.. I I.,._.______ --.-..-.-..:

............................

................................

..I ...... - .......... -

.................................................

.........

_ .-

............................ ^ .....................

.......

.._ ........ L

..~..........~.~

..-.- ..-

._....._..............~

...............

.......................................

- .........................................................

..~ ................... . ..............

.: ..; ............... - ________________________________:

...... .....

..~.~. ..... ;_ I__._ _ .....................

L.: _______: ________~

.......

.............................

......................

.......

.________________ - .............................................

External C vs. t Measurements ............................................................................................................................

CABLE CORRECTION .............................

Cable Correction Methods .....................................

Front Panel

Cable Correction

.................................................................................................

Recalling Cable Correction Constants

Cable Cotiection Considerations ..~....~.~~~~...~~.~~~.~~.~~~~~~~~~~~_

Fundamental ANALOG Analog Output Analog Output

Typical Analog

MEASUREMENT

of Cable Correction

.............

OUTPUTS ..............................

Connections _____.__.___: _____I

Scaling ....................................................

Output Uses

..................................................

CONSIDERATIONS..

Ground Loops ........................................................................

Electromagnetic Interference (EMI) ................

Parasitic Cable Transmission

Capacitance

.....................................

Line Effects ...............

..~ .....................................................................................................

.._

....

..-

..................

.._....~ ....................................................

.............................

.................................................................................................................

..~.

. ..................... ~..................... 3-85

..............................

;..:: ____,____._._______: _.__;

....... . ..........

..- ............... ._..._._._.._ ._ -_--_I__ .______:

..... :: ____I ...... 1:: ...... .:. ...... 1.;:

...............................................................

..............

.._

..................... . .............................

......

........

............................................ - .......................

X;...: ..;. .... . ...............................................

..........

..................................

__I.____ .;

...........................................................................................

. ............. . .......................... -

..~...........~.............~ ..........

......................................... ;...;;; .;

....

..:.:;; ..; _________:

..........

............................

..- ............... . .....................

1___________~.

. ....... - ............................................

.._ .................................

..i

.....................

... ..-3-3 1

..;.

............... 3.60

. ____ 3-62

..................

... ..- 3-72

-___ 3.72

.._ ............ 3-73

________~.

....

. ........ 3-76

...............

..~

. ...... !:3-86

.......

............ :3-Y i

3.31

.3-31 .............

3-33 3-33 3-34

3-37 ’

j-50 3-51~

3.51 3-53 3-53 3-53~~ 3-56

:.3-57

3-57 3-57 3-58 3758 3-58

3-62 3-62 3-62 ... 3-62

3-62

3.63 3-63

...

3-7 1

..3-7 1

3.72

3-73

1.. 3-73 ., 3-74 3-75

~3-76

3-81 3-83 3-83

3.84

3-85

3.86

3-86

3.87 3-89 3-89 3-89 3-90

3-90

iii

SECTION 4 - IEEE-488 PROGRAMMING

....................................................

.....................................................

....................................................

INTRODUCTION ................................................................................. ~41

iI; %

41312

4.3.3

4.3.4

4.35

4.3.6 .E

4:5.1

4.5.2 i-z.1

416.2

4.7

4.7.1

4.7.2

4.7.3

4.7.4

4.8

4.8.1

4.8.2

4.8.3

4.8.4

4.8.5

4.8.6

4.8.7

4.8.8

4.9

4.9.1

4.9.2

4.9.3

4.9.4

4.9.5

4.9.6

4.9.7

4.9.8

4.9.9

4.9.10

4.9.11

4.9.12

4.9.13

4.9.14

4.9.15

4.9.x

4.9.17

4.9.18

4.9.19

4.9.20

4.9.21

4.9.22

4.923

4.9.24

4.9.25

A~SHORT-CUT TO IEEE-488 OPERATION ....................................................... 41

BUS CONNECTIONS .......... . . . . . . . . . .

Bus Connector ............... . . . . . . . . . .

-Multiple Connections .........

Recommended Cables ........ ..........

Connection Procedure ........ ..........

Bus Limitations .............. ..........

contact ~Assi@ments ....................

INTERFACE FUNCTION CODES ..........

PRIMARY ADDRESS SELECTION .........

~Address Limitations .....................

Pro ammin

CO&OLLE# PROG

Controller Handler Software ................ ..__..~..............*...~ ........................ 47

BASIC Interface Progr ~gstatements ...................................................... 47

FRONT PANEL ASPECTS OF IEEE-488 OPERATION ............................................. 48

FrontPanelErrorMessages...................................., ............................... 48

JEEE-488 StatusIndicators ................................................................... 410

LOCAL Key ................................................................................ 411

Simultaneous Front Pane1 and Bus Operation ................................................. 411

GENERAL BUS COMMAND PROGRAMMING ................................................. 411

REN (Remote Enable). ....................................................................... 4l2

IFC (Interface Clear) ........................ ; ................................................ 412

LLO (Local Lockout). ........................................................................ 412

GTL(GoToLocal). ......................................................................... 413

DCL(Device clear) .......................................................................... 413

SDC( Selective Device Clear) ................................................................. 414

GET (Group Execute Trigger) ................................................................ 414

~Serial Polling (SE, SPD) ..................................................................... 414

DEVICE-DEPENDENT COMMAND PROGRAMMING ........................................... 416

Execute 0 ................................................................................. 424

FrequenCy.0 ...........................

Range (R) ..............................

treading Rate (S) ........................

Trigger (T) ..............................

Bias Voltage Parameters (V) ..............

Waveform Type and Time (W) ...........

Bias Source Control (N). ..................................................................... 432

Data Format (G) ............................................................................ 433

Operation and Model (0) ..................................................................... 436

Buffer Control (B) ........................................................................... 438

Plotter Control (A) ..........................................................................

zero IZl.. .................................................................................. 442

FiIter‘(i!). ........................................... . ..................

status (UJ ............................................................

SRQ (MJ and Status Byte Format .......................................

SaveandRecaU(L). ...................................................

Measure and Assign Cab: LeParameters ........................................................ 463

Save and Recall C;?ble Corrections ............................................................ 465

Calibration (0) .............................................................................. 41

Terminator cr) .............................................................................. 467

EOIandBusHold-offonX(K). .............................................................. 468

Display (D) .................................................................................. 470

HitButton(H). ................... . ............................ . ........................... 471

Self Test CI) ................................................................................ i 472

thePrimaryAddress.. ............ . .... . ..... . .................................. 47

IUMMING ....... ;.I.. .......... . .............................. ...... .; ... 47

.-,

..........

..... ..~ .............................................

....................................................

........................................... ..- ...... 4-4

....................................................

.......................................................

.....................................................

.................................................... 47

...................................................

.....................................................

..... ..~ ............................................

...................................................

...................... 443

......................

427 :z

431

439

458 462

4.10.3 4X.4

4.10.5

4.10.6 4x.7

4.10.8

4.10.9

4.11

4.11.1

4.21.2 4x.3

4.11.4

4.11.5

4.12

4.12.1

4.122 4x.3

4.12.4 4x.5

4.12.6

4.123

4.13

4.X3.1

4.l3.2

TRANSLATOR..

.............................................

:.~.:. ...............

1:~ .._ .......... ~473

Defining Translator Words (ALIAS) _ _~ _ _ _ _ _ _ _ _ _ _ _ _ _ . _ ~. _~_ . _ _, . . . Enabling the Translator (NEW). Disabling the Translator (OLD)

...........................................................

.......................

..................

...................

Combining Translator Words (ALLAS and NEW). ...............................................

Reading Back Translator Words (LIST)

Purging Translator Words (FORGET) .............

..... ~:~.

....................................................

..................

.I:.

.:.

.......

.........

Obtaining Translator Status (U%U31) ...........................................................

Translator Pxameter Passing ($)

T~latorErrorHandling.....................~.~

...............................................................

..............................................

CABLE CORRECTION ...........................................................................

~Point Corredion .....................................................................

M&ix Parameter Correction .........

St~dardsCorrection.................;........~.~

SavingandRec~gCableSetups...........................;

Internal Correction Constants

PROGRAMMING EXAMPLES

.....................................

..... .__. __

.:. ...... .;

.................

.............................................

......................................................

...........................

................................

;

.......................

Programmin g for One-Point Measurements ...................................................

CV Plotter Progranwin g

cvLv~;,yar~~. .. ..

Obtaining Complete Instrument Status. .......................

Using the Tranilator

Using ti External Bias Source .............

BUSTRANSMISSIONTJMES

Factors Affecting Bus Ties.. Optimizing Measurement Speed..

...........................................................................

Orrna~on

................................................................

.........................................................................

...................................................

~_.

.........

...........

.................. .:

................................................

....................................

; ..................................

..................

_. ......

.._.

......................

;.:

___..__

...

........

ProgrammingExample.. ....................................................................

......

.; 487

4102 4-104

4-104

...

&XI6 4-106 y.

4112

4x4

41.14 4ll7

.._. .~:~Pll9

4-119 4120 4-120

474

4-75

P76

477

478

&79

480 4-83

4-85 486 487

- PERFORMANCE VERIFICATION

5.1

INTRODUCTION..

5.2 Eh!VlRONMENIALCONDITIONS

5.3 ~XNITIAL CONIXTIONS

5.4

5.5

5.5.2

5.53

55.5

5.5.6

RECOMMENDED TEST EQUIPMENT AND SOURCES .............................................

.VERIFICIU?ON LIMIT

FullScaleAccuracy..

SpiUoverCalculations................;...................~

Analog output calculations.. ........

AbsoluteValues.. ......................

5.6 ~~VQUFICKITONPROCEDURES..

5.6.1

5.6.2

5.6.3

Front Panel Verification gz3cfgut kification

odel5904~~ca~on .............................................................

56.4 VoltageVeriGcation

SECTION 6

6.1

6.2

~INTRODUCTION

FUNCTIONAL DESCRIPTION

- PRINCIPLES OF OPERATION

DIGIX4LCIRCUTI’RY.

ZYZ.1

6.3.2

6.3.3

6.3.4

6.3.5

6.3.6

Microprocessor

Memory Circuits.. ............................

HardwarrMukiplier.. .....................

Input/Output ............... ..~_~.

lEEE-488Interface ..................

DataSegmentLatcheswdDrivers..

........................ Z:: ... .

....... ___. ..............

-0NS .........................................................

..................................................

.........................................................

....................................

...........................................................................

............................

............................................ i ..... .._

...............................................................................

..... .:

i...~.:~.:..:~:~: ................................

....

.........

__ ................... _ ............................

..................................... 5-2

..~.~_

...........

.............................................

. .....................................................

..................

~__.

........... .._

..I.. ............................................... 61

..................................................................

. . ............................................. 6-5

.............................. .._._

._ _

......

..........................

..~~..--.~.....-.......~......*..........~....~

...........

..‘.

.....................................

...I..

......

:~.~..~.

..:. ... .: ...... .

.I~; ...........

. ___.______ ~.~.__~

.....

............................. 5-4

.1.

...........

.................................

...

_.____,,_

...

..,.....__. 6-3

......................

___.

...................

.............

.....

~~5-1

5-2

__._ 5-2

5-3

..~~5 3

5-4

5-10 5-17

5-17

6-3 6-6

6-6

5-l 5-1

5-1

6-l

6-7 6-7

6.4

6.4.1

6.4.2

6.43

6.4.4

6.4.5

6.4.6

6.5

6.5-l

6.5.2

6.53

6.5.4

6.5.5

6.5.6

6.5.7

22.1

6.6.2

6.6.3

6.6.4

6.6.5

6.6.6

6.6.7 El ~~;

6.8

68.1

6.8.2

6.9

6.9.1

6.9.2

6.9.3

5.9.4

6.9.5

69.5

1.9.7

ANALOG CIRculTRy.........~...;..~ ........................................................... 6-7

a0ck Signals ................................................................................. 6-9

Serial Control ................................................................................

6-9

statnsarcuits.. ...................................... ~..i..~. ................................. 6-10

Input Multiplexer

............................................................................

6-10

AID Converter ................................................................................. 6-13

VoltageSource

................... ..-

1OOkHz CAl?AUTANCE MODULE ...............................................................

........................................................

645

6X’

Circuit Overview ............................................................................ 6-17

Wavefmm Synthesizer ........................................................................

6-l9

Output Amplifier ............................................................................ &9

Automatic Gaincontrol.............;..;....................

InputAmplifiers.....................-~.........~...........................................~

SynchronousDetector Buffers..

...................................................................................

.......................................................................

.................................

6-19

&l9

6-20 6-20

lMHzCA.FACK4NCEMODULE.. ....... ~.~..L~.~ .:. ................................................ 6-21

circuitoverviav

............................................................................

6-21

WaxfonnSynthesizer ....................................................................... 6-21

OutputAmplifieT.. ............................................. .

............................

6-21

Automatic~GainControl ...................................................................... 6-23

Input Amplifiers ...................... ..- ................... ..~- ............................... 6-g

Synchronous Detector ................... ., ................................................... 6-24

Buffers

......................................................................................

624

POWER SUPPLIES ............................................................................ 6-24

AC Line Input ............................................................................... 6-24

~~~~~~~.:::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::::~:: Z$~~~~

DISPLAYANDKEYBOARDcJKUlTS

.........................................................

6-26

Displav ..................................................................................... 6-26

Kq&rd.. ................... .._ ........................................................... 6-27

CABLE CORRECJION PRINCIPLES ...... _ _ .................................................... 6-27

Error Models. ............................................................................... 6-27

InternalModelCorrections ................................................................... 6-29

II0 and Transmission Model Corrections ...................................................... 6-29

Cable Cometion Algorithm .................................................................. 6-30

DrivingPointcOrrection....................~ .................................................

6-3l

CalibrationSourceCorrection.............~........;.~...;...................; .................. 6-31

Sparker Correction ....................................................................... 6-31

SECTION 7 - MAINTENANCE

7.1

z2 FUSE REPLACEMENT z2.1

z2.2

z3 CALIBRP;[ION.................................~~...;.;...;................................~

7.3.1

7.3.2 z3.3 z3.4 z3.5 Z3.6 z3.7

Z3.8

7.3.9

JNTRODUCTION.. ....................................................... . ......... .I.:

..........................................................................

LineFuseRe lacement

ExtemaIBias putFuse ...................................................................... 7-2

Factory Calibration

........................................................................ 7-1

............................................................................

CalibrationCycle.. ........................ ..-...........-

EnvisonmentalConditio~ ..................................................................... 7-4

Recommended C&ration Equipment and Sources Caliiiion Switch

cdibmtion co

............................................................................

mmands.....................................................~ ............... ...* 7-5

..............................................

CalibmtionProgmn .................... ..~..;.~..............;;............;;;~;_......~.........~~7 .

Module Calibration

...........................................................................

Digital Calibration .................................................................

SPECIAL HANDLING OF STATIC-SENSITIVE DEVICES .........................................

....................................

.........

.....

7-1 7-1

7-3

7-3 7-4

7-4

7-6

7-10

7-17

DISASSEMBLY .._......_..-................~.-................................................. 7-17

TopandBottomCoverRemoval................... . . . . . . . . .._..... __ . . ..____. .,....._ __... ~__~ .._.

Z5.2

75.33

7.5.4

z5.5. Z6 Z6.1

7.6.2 Z6.3~~

7.6.4

7.6.5 Z6.6 Z6.7 Z6.8

76.9

7.7

Module and Circuit Board Removal and Replacement . . . . . . . . . . . _ . . _ _ _~_ . _ . . . _ _ . _ _ . 7-19

CaseDisassembly . . . . . . . . . . . . . . . . . . . . . . ..- _.._._ _.......... _ _.._._..............._ 7-19

Rear Panel Disassembly Front Panel Disassembly

TROUBLESHOOTING.. ........................................................................

Recommended Test Equipment

SelfTest...................................................~...........................~...-

Diagnostic Program Troubleshooting Sequence Power Supply Checks. MicrocomputerandDigitaICircuitryChe~~. MotherBoard..

DisplayBoard.. 1OOkHz and IMHr Capacitance Modules

FAN FILTER CLEANING AND REPLACEMENT ...................................................

..............................

.........................................................................

.......................................................................

.......................................................

...................

..................

...... .-. ..... : ....................

...........................

SECTION 8 - REPLACEABLE PARTS

.........

;1..

...... ..,

.........................

................................. __

..............................................

- ......

..........

_ .,_. ... _ . .-.

.......

.,:.

...

_. ...............................

.______ . ____ _ .__,.___

.___,_ . .._

....................

., __~.

....

....................

..,

.............

...........

_. ........ _:

_.____.,

...

.....

.._.

.~^

7!1.7

725 7-25 7% 7-25

7-25

7-28

7-30

7-30 7-30 7-30 7-30 7-30

8.1

8.2 2

8.5

8.6

INTRODUCTION ELECTRICALPAWS LISTS MECHANICALPARTS..

ORDERING IN.FOl=&LUION.. ..........................................

FACTORY SERVICE.. COMPONENT LOCATION DRAWINGS AND SCHEMATIC DIAGRAMS

APPENDIX A APPENDIX B APPENDIX C APPENDIX D APPENDIX E.. APPENDIX F APPENDIX G APPENDIX H

APPENDIX I

.................................................

.................................................................

..........................

...............

...................................

........

..~.I ..-.

...................................

_~.

.....................................................

~:.

...................................

._ ...................

.._.

...........................

...........................................................

__. .,._. ~_,~.

........................................ _.................................~

..........................................

............................... _ ---__.._.

.................................

......................................

.................................................

.~.~_~.

...............................

............... .._.

.......................

.............................................

..,

...................................

................

.._...._.

..............

..__ _ _~.__ __

.._..._ .......... 8-l

.........................

..........................

_._

...

.._I

.._..._

__.

...........

.....

............

.............

..............

.............

........

8-l

~A..~~& 1

8-l 8-l 8-1

A-l

B-l

..c- I

D-l

E-l

~-l

G-1

H-l

I-I

vii/viii

LIST OF TABLES

SECTION 1

l-l Standard Sets by Model Number. _ . . . . _ . . . . . _ _ . . . _ . . . . . . . . . _ . . _ _ .~. _ . . . . _ _ . _ _ _ _ _ _ _. _ . . . .

- GENERAL INFORMATION

SECTION 2 - GETTING STARTED

2-l Mode1 590 Front Panel Cross Reference

2-2 .. Model 590 Rear Panel Cross Reference. 2-3 Power Up Default Conditions 2-4 ~IniGl Control Settings for One Point Measure&&s ..I

2-5 Initial Control Settings for Plotting ........................

2-6 Initial Plotter Set U

...

2-7 --: Basic Settings for Cp

vs t Measurements

..............

.......................................................................

..........................................................

.........................................................

..................

....

....................................

;

.......................

................................

_ _._ ___

...................

., .,

............

~__

...........

.... ...................

SECTION 3 - OPERATION

......................................... 3-2

. . .

~.~..-...‘..-.-~..~-

.~_~.~.

...................................

....

;;i..

.._

~.~._.

.........................................

.................... 3-3

1.-.-.-

............................. ~:13

.;....... l....... II_

.._.

.......

;...~;;;...i Y

.._ .._

..............

Y...~:~..~~

..........

......

.._

....

;.__._ 3-21

......

.............. 3-26

_____

....

.....

........ ;;

..~3-18

._._ 3-57

~;;~3-87

3-14 3-15 3-16 3-17 3-18

3-19

ErrorMessages .......................................

InformationMessages Range Sommmy RangeError~Messages.. TestVoltageFrequencybyModel..

Frequency Ermr Messages

Resstance and ConduaanceRanges

Converkg Series-PamlIe Equivalent Circuits TypicalF~terResponseTimes..

ReadingRateSummary.. ...........................................................

ExsmplesofZeroOperation..

TriggerModes....................................................................~.~~..~

Trigger Mode and Source Combinations .........................................................

Trigger source DisplayMessages...............~.................................;

Biis Waveform Summary

Bias Vohge Parameter Summary

RecommendedPlotters

HP-GLInstructionsUsedbyModel590..~.~~.

PIotter Setup Pareeters

Factory Default Configurations for Save&e&i. ...................................................

SelfTestMessages..........................................................................~

InternalCvstSetupConditions..

External Cvst Setup Conditions

of Cable Connection Methods %%$&wtFullScaleValues

Analog Output Examples ...........................

........... .._......................................._

................................................................................

.............

.................................................................................................................................

.... . .. .;.I..;;. ......................

.......................................................................

..............................................

.........................................................................

:.~Y.-.:.

....

.......

............................

........

...............................................................

.............. ..................

... .

................................

-. ............

....... .~_. .........................................

:~.

...

...............................

:.:.

..............

..................................

.....

;;.;.....: .....................................................................

2-13 2-17 2-19 2-20 2-21 2-23

3-14 3-15 3-16

3-17

3-25 3-26

3-34 3-35~

3-58~ 3-60 3-7l

3-73 3-78

3-81 3-83

3-87

l-3

2-2

3-9 3-9

- IEEE-488 PROGRAMMING

3mma-y of Most Often Used IEEE-488 Commands . . . . . . . . . . _ . . . . . . . . . . . . . . . . . . . . . . . 4-3

IEEE Contact Designations . . . . . . . . . . . . . . . . . l...‘..... . . . . . . . . .._. ~ . . . . . . . . . . . . . . . . . . . _....,.. . . . 46

Model59OInterfaceFFunctionCodes . . . . . . . . . :: . . . . . _ . . . . . . . . . . . . . . . . . . . . . . . L . . . . . 47

45 46 47

i-i 410 411

43.2 413

414

415 416 417 418 419 420 421 422 423

HP-85 IEEE488 BASIC Statements .............................................................. 48

Front Panel IEEE-488 Messages ................... _ .,____....._ ........................................ 49

General Bus Commands and Associated BASIC Statements

PowerUp,DCL/SDCDefaultConditions ...................... _.___. ........................... 413

Order of Comman Device-Dependent Comman

dExecution ................................................................... 418

d Summary ......................................................... 418

Command GossReferencein AlphabeticalOrder ..1;.

Bias Voltage Parameter Summary .............................................................. 430

Examples of DataFormats ...................................................................... 433

PIotter Defaults..

U Command Format Summary ........................................

TyPicalBus Hold-off Times..

.............................................................................

......................... .

....................................................................

HitButton(H)CommaudSummary .............................................................. 471

Translator Reserved Words and Characters ...................................................... 473

TransIator Status Word Smnmary .............................................................. 480

Cable CorrectionMethods.. Cable Correction Comman

....................................................................

ds.. ............ . ~;.;;~;~.~.~.

....

Equipment Required for Matrix Parameter Correction ..... .Y..; Y.. ..... 1.. ............ ..~L ........ 487

Matrix Parameter CakuIation

......................................................................

Capacitance Standards Required for Cable Correction

SECTION 5 - PERFORMANCE VERIFICATION

......................................

........................

..... . .................. .

...........................................

411

I.................... 4-23

440 445

469

486

......

;..~ .I..

....

4-86

49.2

4102

5-1 5-2 53 5-4 5-5

Equipment and Sources Required for Verification

Conductance SourceParameters .................................................................

Instrument 1OLXHr Capacitance Verification Instrument 1OOkHz Conductance Verification IimfrumentlMfIzCapacitanceVerification.. Instrument lMH.z Conductance Verification

5-8 5-9 S-10 511 S-12

Analog Output 1OOkHz Capacitance Verification Analog Output 1~hH.z Conductsnce~ Verification Analog Output lMI-3z Capacitance Verification Analog Output lM.Hz Conductance Verification Internal Bias Source and. 20V Range Read-Bach Accuracy

Limits for 2OOV Read-Bach Range.

SECTION 6 -

6-l

Memory Map.

..............................................................

PRINCIPLES OF OPERATION

...................................

................................................. 5-2

.........................................................

....................................................... 5-7

.1...~

.....

..........................................

...................................................

................................................ 514

............................................

.................................................

.~_~_

RelayFunctiow.......................................~ ........................................

Multiplexer Control Signals

..................

.............. _

SECTION 7 - MAINTENANCE

7-l 7-2 .. Recommended C&ration Equipmnt and Sources 7-3

Et 7-6 1OOkH.i Calihation Summary 7-7 Model5904CalibrationSummary..

7-a lbfl-li Caliiration Summary ______ l.. 7-9 DrivingPointCslibrationSummary

I;ineFuseValues.................~....................................................~~ ........

.........

Cahiration Command S

Voltage Read-Bach Cahbmuon

J.ulyny..

urnmay.

Voltage Source calibration Summary

................

............

.....................................................

..................................................

.......................................................

................................................

_~.,

............................................................

..................

.................................. .._ .... _ .................... 7-16

:........;..

.........................................

......................

........

...................................... 7-4

...............................

......................

.__

..........

...

......

.........

.....

.........

._.,._._. 7-12

.........

5-3

~5-6

~~5-9

5-10 512

5-15 5-17 5-19 5-21

6-5 6-10 6-11

7-2

7-6 7-10

7-14 7-15 7-16

%l5

746 n.7

7-18

ecommended Troubleshooting Equipment

s.sages .. .._.._...-_..........._.................................~

P;o,,S-~.........;~.......................-

i ._....: _..__...._.__. _ _____.._...__.._..._.............................. . .

M&ocomputerandDigitaIChecks.. .......

Mother Board Checks .............................................................................

Display Board Checks ....... _. ................

l00kI-I~ Capacitance Module Checks

lMHz Capacitance Module Checks ...............................................................

.................. .-_ .......... : ........................

.....

.............................................................

:.:.::.

; ....................................................

....

..:...;;...~...:

7-25

............ 7-23

................................ 7-28

7-32

........ ;.:._:

.........

.%32

7-33 7-34

7-35 7-36

SECTION 8 -

~MotherBoard,PartsList

~~DisplayBoard,PartsList.................................................................~

:DigitaIBoard, PartsList...........................................................;

lOOkHz (5901) Module, Parts List .....................................................................

IMHz (5902) Module, Parts List ...........

IU590 Operational Amplifier (46CV), Parts List.

~-Case Parts

MiceIIaneousMechanicaIParts .................................................................

~~Model5904InputAdapter,Pa+Lkt..

REPLACEABLE PARTS

.........................................................................

..~1..~ ...... i.~. ...... .~i.~.;. ... .;.i.

.....................................................................................

.... Ir...-..:..l..~.T.T

APPENDIX C

..........................................................

......................................................

..... :. .....................................

d Sequence

C-4 C-5

IEEE-488 Bus Comnian d Summary .... .:

Hexadecimal and Decimal Command Codes Typical Addressed Command Sequewe~. Typical Device-Dependent Comman IEEE C

ommandGroup.............~...........................................................~.~~C- 7

APPENDIX I

I-l HP-85 and BASIC 2.0/4.0 Progmmmin

g Language Differences . . . . . . . . . . . . . . . . . . . . . .~. . I-l

...................................................

............

....................................................

......

............ 8-19

...... .;. ........... 8-39

..................... ~.i gn

~:;.

:. .. : ...... : .. C-7

8-2

8-13 831 8-47

8-50 851

C-3

C-7 C-7

xi/xii

LIST OF ILLUSTRATIONS

SECTION 2 -

2-1

2-2 2-3 2-4 2-5

Model590FrontPanel

Model590RearF’auel.. .............................................

Typical Test Connections FlottdngExample..

CvstWaveform.................................................................-

GETTING STARTED

..............

SECTION 3 - OPERATION

3-l

3-2 2

3-5 3-6

3-12 E

3-17

3-18

3-19

3-20

3-21

3-22-

3-23

3-24

3-25 3-26

3-27 3-28 3-29 330 331 3-32 3-33 3-34

3-35 3-36 3-37

Ez 3-40

InputandOutputJackCoufiguratioti.. Typical Test Connections EquivalentCircuitofTestConnections Floating/Grounded Operation of Analog Common Capacitors, Conductance f.Res&tance), and Bias Voltage Displays. Flow Chat of Autorangiug Operation Typical Test Connections Using Model 5904 20&20mS Adapter Frequency Selection Flow Chart Equivalent Citcuit of Parallel Capacitance and Conductance Equivalent Series and PsmBeI Impedances

TypicalAnalogFiIterResponse.. ...........

Zero OperationFlowcharts...................I

FrontPanel CAL Sequence Internal Drift Correction Sequence.

TriggerOvemmOperation.. ExternalTriggerInputPulseSpecification..

TriggerInputandOutputJackConfiguration.. ExternalTrigger OutputPulse Specificanon~ :.,~.

External Triggering Cormections~. BiasONKeyOperation.. Bias Switching Network (a) Software Implementation of Bias ON (b)

DC, One-Shot..

DC, Single Sweep

SiieStaircase,One-Shot..

Single Staricase, Sweep DualStsircase,One-Shot..

DualStaircase, Sin .......

PuIseTrain,One-S Pi Pulse Train, Single Sweep..

External, One-Shot.. ..............................................

External,Single-Sweep. ...................

Bii stepDurations.........................-...................~......~

External Bias Source Connections

Bii Monitor Connections. ...............

BufferOperationinOne-ShotMode.. ...........

BufferOperationinSweepMode .........

HP-GLSyntaxUsedbyModel590.. ....................................................

IEEE-488PlotterConnections.. ....................................... ____

Plotting Flowchart

PlotFonnat..........................--..........................................~.~-.~~.-..~

............................................ __

...................

IeSweep ~.~..~~-..T

ot..

.............................................................................

~; ................... ........................................

.....................................

._.,.,_ _,__,__~_~~^__. ..__

.... -..~.~.~.- ............. ~~.___(_. ............................

.................

....... ._____ . .._

.........

..................................... _,__,

.......... ..1~

................

...........

......

............

.....

~.~.-.-~

.......

....................................

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........................

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............................... 3-37

......................

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...............

............................... 3-44

_._:___ _._._._.__ ~____

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.....................

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:. .................... 3-6

_ ........................

..+~..‘.

.......................... 3-27

........ _ ............ 3-27

. ...... . ... ~_.:. ..... 3-28

_._.____._ ........ 336

............. _.,._._ __

..~

........................

.........................

.............. _.

............................

.................. _._. 3-59

.........

........

.............

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.......

..........

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.._., ..~ ... 3-17

.........

........

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............

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......... 3-41

.._._ _ . ._.._

.._ .......... 3-43

.._. ........ 3-54

...

,.__

___ 3-42

......

.......

........

....... 3-58

2-3 2-14 2-18

2-23

3-3

3-5

3-6

3-7

3-11 3-13

3-14

3-15 3-21

3-23 3-24

3-29~

3-38 3-39 3-40

3-45 3-46

3-47 3-49

3-50 3-52

3-55

3-60

. 3-61

341

E 3-44

E 3-47 3-48

3-49 3-50 3-51 3-52 3-53

2 3-56 3-57

SEC1

43 4-4 45

49 410 411

2% 414 415

416 417 418

419

420

4-21 422 423 424 425 426 425 428 429 430 431 432 433

2: 2s

C+sVExample

GvsVExample.. lK2vsVExample..

CvstExample:...............................~.........................................~...-

C/Co vs V Example CA-C, vs V Example.

Iv.,-V,]C=CONST Example.. ...............

MathFunctionDisplayFormats..

C vs t Waveform. .........................

ExternaI C vs t Connections cvstDisplayFomat.. Coimections for Cable Correction. Two-Port Network AnalogOutputComectionExample.. Multiple Ground Points Create a Ground Loop. Elimina&gGroundLoop.. Parasitic Capacitance

UON 4 - IEEE-488 PROGRAMMING

TypicatProgmmFlow Chart.. ..............................

IEEE-488Connector..

IEEE-488 Connections ...................................

IEEE-488ConnectorLocation.. .......................

ContaaAssignments ...........................................................................

General Data Format ................................

0 Command Data Format

UO Status Word Format (Hardware/Software Revision). ..........................................

UlErrorStatusWordFormat.. U2 Status Word Format (Buffer A Range Group)

U3 Status WOrd (Buffer A Trigger Group) .......................................................

U4 Status Word Format (Buffer A Zero Group). .......................................

U5 Status Word Format (Buffer A Bias Group) .........................................

U6~Statu5 Word Format (Buffer A Bias Voltage) .................................................

U7 Status Word Format @&er A Bias Times) ...................................................

US Status Word Format (Buffer A Position and Time). ...........................................

U9 Status Word Format (Buffer B Rang& Group). UlOStatusWord(BufferBT$gerGro~. Ull Status Word Format (8

U12 Status Word Format (Buffer B Bias Group). ........................................

U13 Status Word Format (Buffer B Bii Voltage). U14 Status Word Format (Bufferg Bii Tie)

U15 Status Word Format (Buffer B Position and Tie) ...........................................

U16 Status Word Format (Buffer A M&mum and Minimum Capacitance) U17StatusWordFormat(BufferAMaximumandhIinimumConductance).

U18 Status Word Format (Buffer A h4aximmn and Minimum Voltage). Ul9StatosWordFormat(BufferBMaximmnandMinimumCapacitance). U20 Status Word Format (Buffer B Maximum and Minimum Conductance) U21 Status Word Format (Buffer B Maximum and Minimum Voltage) U22 Status Word Format (Global Programmin U23 Status Word Format (Plotter Progmmmin g Parameters)

U24 Status Word Format (IEEE Output Parameters). .............................................

U25 Status Word Format (lEEE Input Parameter) ................................................

U26StatusWordFormat SRQMaskandStatusByteFonnat.. SRQ Timing with One-Shot Trigger Mode

SRQTimingwithSweepTriggerMode..

.............................................................................. 3-64

.......................................................................................................................................

...........................................................................

............................................................................

....................

.............................................................................

..................................

...........................................................................

...............................

..............................

......................................................................

. ....................... .

.................................

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er B Zero roup)

............................................................

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..- ................................................

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g Parameters) ......................................

L.1~. ................... ..i~.

.._ .....

..~-......-.~.~...............~

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.....................

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........................ 434

..........................

........................

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....................... 452

........................ 453

........................

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....

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.......

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.......

355~ 3-66

3-67 3-68 3-69 3-70

3-80 3-81

3-85 3-86~ 3-88 3-89

.....

3-89 3-91

.....

i ..... 4-4

44 4-5 46

437 4-48 ~48 448 4-49 4-49

_, _~.

449

...

4-49 450 450 450 4-51

....

451 451 452 452 452

453

453 454 454 455 456

457 459

459 460

xiv

U7.7 Status Word Format (Translator User Name List) 439 440 441

U29 Status Word Format (Reserved Name List).

_U30 Status Word Format (New/Old Status)

..................................................... 481

U31 Status Word Format (Translator User Translation List)

Connecting Methods.. ........................

~Sl%.rameterDefinition.. ............ .I.:.

ii-2 4-44

Test Configuration for S Parameter Examples

......

................................................. __ 493

S,, Real Component ...............................................................................

S,,ImaginqComponent

.....................................................................

S,, Real Component. ..........................................................................

S,,Ima@i*Component ... .

............ ~~~-~.

.....................................................

-S, Real Component.......................................~

z; 451 452 453 454 455 456 457 458 459 4760

S2* Imaginary Component

S,, Real Component. ............................................................................

~.S,,ImaginaryComponent

Connections for Standards Correction ...............

Status Word Showing KO, Kl Real and Imaginary Parameters

FlowchaItofOne-Point Program.. .............................................................

Flowchart of C vs V Plotting Example Program

Flowchart of c vs t Program ...........................................................................

FlowchartofBufferProgram.....;..; .........................................................

Ilowchart of Status Word Program ...................

Translator Program Flow Chart. ...............................................................

..........................................................................

..............................................

............................................

SECTION 5 - PERFORMANCE VERlFlCATlON

............................................ 481

.................................................. 481

....................................... 482

..~.........................................~ .... 484

::. ............... .:

.............

;: ........ .._

....

491 494

495 496

497

.....................................

498 499

4100

..- .... ~.~..:;T ..I.. ..... 4101

.; ......................................... 4lO3

................................... 4105

4107

:~.

......

4109 4111 4113

; ......................... ;. .............. 4114

4ll6

5-l. amounting Source onInstrument

General Flowchart of Instrument Verification

5-3 54

General Flowchart of Analog Output Verification

Connecting for Analog Output Capacitance Verification

5-5 ~Xonnections for Analog Output Conductance Verification

5-6 ~VoltageVerificationFlcwchart ..........

................................................................ 5-4

..................................................... 5-5

................................................ 5-11

.......................................... 5-13

........................................ 5-16

._ ....................................................... 5-18

5-7 Connections for Voltage Verification ............................................................

5-8 Connections for 2OOV Read-Back Verification

......................... : .......................... 5-22

SECTION 6 - PRINCIPLES OF OPERATION

6-1 6-2~ 6-3 6-4

22 6-7 6-8

220 6-11 6-12 6-13

6-14

BIodcDiagram................................................~.................................~6- 2

~DigitaICicuitBlockDiagmm .........................................................

6809 Microprocessor Progr Analog Circuitry Block Diagram

Serial ControlBitFormat

ainming Mode.

................................................................. 6-8

........................................................................ 6-9

Siiplified Schematic of Input Multiplexer

............................... ; ........................... 6-5

....................................................... 6-12

MeasurementPhase................~................~................................~

~Simplified Schematic of A/D Converter

Sii lified Schematic of VoltageSource

magram of 1OOkHz Capaatance Module

Bloc!

~-Block Diagram of lMHz Cap+tance Module

BlockDiagramofPowerSupply ..........

Block Diagram of Display and Keyboard Transmission Path Error Model

Electronics Error Model

......................................................................... 6-29

................................................................ 628

............................................................

.......................................................... 6-16

; ........................ .

........................................................

.._ ..................................................... 6-25

............................

...

.............

..........................

: _

5-20

~:. ........... 6-4

...........

6-13 6-14

....

.:.

6-18 6-22

6-26

SECTION 7 -

MAINTENANCE

7-Z 7-3

E 7-6 %7

%lo

7-12

T-13

7-14

a.5

7-16 7-27

Line Fuse Location ExtemalBiasPuse Location

Cdiiration Lock Switch Location Module Glibration Connections Module Calibration Adjustments Connections for 2OOV Read-Back Calibration.

Source Connections VoltageSourceCalibr~onAdjustmentLacations..

TopandBottomCoverRemoval.......................

Circuit Board Removal and Replacement. Cable Connections. i

Case Disassembly .....................

Rear Panel Disemb;y FrontPsnelDisassembl Troubleshooting Flow &art.. Troubleshooting Block Diagram.. Fan Filter Removal .

SEmION 8

8-l E E

8-6 8

8-9 810 all 842

Mother Board, Component Location Drawing, Dwg. No. 590-100 ...................................

Mother Board, Schematic Drawing, Dwg. ~No. 59O-los Display Board, Component Location hawing, Dwg. No. 5$WIO Display Board, Schematic Diagram, Dwg. No. 590-116 Digital Board, Component Location, Dwg. No. 590-120 Digital Board, Schematic Diagram, Dwg. No. 590-126

Model 5901 (lOOkHz), Component Location @awing, Dwg. No. 5901~lO0

Model 5901 (lOOkHz), Schematic Diagram, Dwg. No. 5901-106 ..................................

Model 5902 (iMHz), Compofient Lcatibn Drawing, Dwg. No. 5902~lO0

Model 5902 (IMHz), Schematic Drawing, Dwg. No. 5902-106 .....................

KI590 Operational Amplifier (U607), Coti&iment Location Drawing, Dwg. No. 5902-180 KI590 Operational Amplifier (X7607), Schematic Diagram, Dwg. No. 5902-B

...............................................................................

.....................................................................

......................

................

....................................................................

..................

..............................................

.....................................................................

...........................

................

...........................................

- REPLACEABLE PARTS

._.............~~.........................-.-..-

..........

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7-2 7-3

7-5

7-7

7-8

% U

7-1l

7-13

7-18

7-20

7-n

773

..-

7-26 ;g

7-30

7-31

8-8

8-9 8-16 817

8-24 8-25 8-36

__. 8-37

8-44 8-45

8-48 8-49

....

APPENDIX C

C-l IEEEBusConfigur&on.. c-2 IEEE Handshake Sequence c-3 CommandCodes..

xvi

.....................

............. ~...~....~i;

.......... .._

........................

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.~C-1

C-3

C-6

SECTION 1

GENERAL INFORMATION

1 .l INTRODUCTION

This section contains information on Model 590 features, warranty, manual addenda, specifications, and ssfety

terms and s bols. Also included are procedures for un-

packing and%specting the instrum ent, as well as a brief

description of available accessories.

The information in Section 1 is arranged as follows:

1.2 Features

1.3 Warranty Information

1.4 Manual Addenda

1.5 Safety Symbols and Terms

1.6 Specifications

1.7 Unpacking and inspection

1.8 Preparation for Use

1.10 Optional Accessories

1.2 FEATURES

The Model 590 CV Analyzer is a sophisticated instrument

designed as a complete solution for individuals requiring capacitance and conductance versus voltage measurements in semiconductor testing. The unit can test devices at either

1OOkHz or lMH.z, depending on installed modules. The Model 59011OOk tests at loOkHz, while the Model 59011M

operates at lMH.z. The Model 59O/lOOk/lM can test at both

1OOkHz and lMHz. Test voltage for both frequencies is

15mv RMS.

The Model 5901100k measures capacitance and conduc-

tance on four ranges: 2pF/&S, 2OpF/20@, 200 FI200pS,

and 2nFQrnS (the optional Model 5904 Input A apter can

extend the 1OOkHz measurement range to 2OnF/20mS).

Shnilarly, the Model 5901lM measures capacitance and

conductance at lMHz on three ran es: 20 F/200&,

2OOpF/2mS, and 2nFl2OniS. The Mode 59011 OkllM in- 5 B

eludes both measurement capabilities.

l A standard internal +2OV bias source that can generate

staircase, pulse imin, or DC waveforms. Provision to connect an external bias source of up to *2OOV DC are also included.

l Two 450-word internal buffers to store capacitance (C),

conductance (G), and bias voltage (V) data taken during testing. Two complete sets of C, G, V~d.ata can be stored; one set can be saved for plotting while another test is being performed.

l Standard plotter driver software allows the hIode 590

toTontro1 an intelligent digital plotter over the IEFE-488 bus, simplifying a variety of different plot types, including C vs V, G vs V, l/C= vs~ V, and Clc, vs V.

l Nominal reading rates of 1, 10, l&75, or loo0 readings

per second allow you to choose the best compromise between resolution, noise perfo-ce, and speed.

l Selectable analog filtering is included to minimize noise. l External trigger inputand output capabilities are included

to synchronize the Model 590 with other equipment such as external bias sources.

l Analog outputs of capacitance, conductance, and bias

voltage are included to allow the monitoring or analog plotting of these readings with external equipment.

l Isolated analog and digital sections, which allow

measurements with common mode voltages up to 3OV RMS.

l Internal calibration reference sources for maximum

accuracy.

*Built-in correction software to compensate for cable

transmission line effects that would otherwise degrade

accuracy. Up to seven sets of cable parameters can be stored for later recall at the touch of a button. The unit can also compensate for non-uniform transmission lines

with the aid of external standards.

l Internal math ability to simplify calculation of such para-

meters as parallel/series model, capacitance difference and ratio, and n-n&mum and minimum capacitance values.

l Up to seven different instrument configurations can be

stored and later recalled to simplify imimment conflguration. The factory configoration can also be recalled at the touch of a button.

l A standard IEEE-488 interface is included, allowing the

instrument to be programmed from a computer. Enhanced Keithley Translator software simplifies pro-

gramming.

l-l

GENERAL INFORMATION

1.3 WARRANTY INFORMATION

Warranty information for your Model 590 may be found

inside the front cover of this manual. Should it become necessary for you to use the warranty, contact your Keithley representative or the factory for information on obtaining warranty service. Keithley Instruments, Inc maintains service facilities in the United States, West Germany, Frame, the Netherlands, Switzerland, and Austria. Information concerning the operation, application, or service of your instrument may be directed to the applications engineer at one of these locations.

1.4 MANUAL ADDENDA

Information coneming changes or improvements to the in-

strument which occur after this manual has been printed will be found on an addendum sheet inchrded with the instrument. Please be sure to read this information before

attempting to operate or service the instrument.

1.5 SAFETY TERMS AND SYMBOLS

The following safety terms are used in this manual or found

ontheinstrum The symbol

should refer to the operating instructions in this manual for further details.

The WARNING heading used in this manual explains dangers that could result in personal injury or death. Always read the associated information very carefully before performing the indicated procedure.

The CAUTION heading used in this manual explains hazards that could damage the instument. Such damage may invalidate the warranty.

althea-~tindLatffthattheuser

immediately. Retain the original packing material in case

reshipment becomes necessary. 0

1.7.1 Shipment Contents

The following items are included with every Model 590 shipment:

Model 590 CV Analyzer Model 590 Instruction Manual Model 7051 RG-58, BNC test cables (2) Additional accessories as ordered.

1.7.2 Module Complement

Modules ordered with the unit will be shipped already in-

stalled and calibrated. Available models include: 59011OOk

59o/lM

5ti/lOOk/lM

Note that the module complement is indicated by model on the rear panel.

1OOkHz capacitance module only lMfiz capacitance module only Both 1OOkHz and lMHz capacitance

modules.

1.7.3 Additional Instruction Manuals

If an additional instruction manual is required, order the manual package, Keithley Part Number 590-901-00. The IMnual package indudes an instruction manual and all pertinent addenda.

1.8 PREPARATION iOR USE

1.6 SPECIFICATIONS

Detailed Model 590 specifications are located at the front of this manual.

1.7 UNPACKING AND INSPECTION

The Model 590 was carefully inspected and packed~before shipment. Upon receiving the instrument, carefully unpack ail items from the shipping carton and inspect for any obvious signs of physical damage that might have occurred

during shipment. Report any damage to the shipping agent

l-2

1.8.1 Line Power

The Model 590 is intended to operate from 105-l25V or 210-25OV AC power sources. A special power transformer

may be installed for $61lOV and 180~220V ranges. The fac-

tory set voltage range is marked on the rear panel.

1.8.2 Line Voltage Selection

The operating voltage is selected by a switch located on

the rear panel. Before using the instrument, make sure that the switch is in the correct position for the line voltage in y0i.u area.

GENERAL INFORMATION

CAUTION Do not attempt to operate the instrument on a line voltage outside the indicated range, or instrument damage may occur.

1.8.3 Line Frequency

The Model 590 may be operated from either 50 or 6OHr power sources.

1.8.4 IEEE-488 Primary Address

If the Model 590 is to be programmed over the IEEE-488

bus, it must be set to the correct primary address. The

primaryaddress has been set to 15 at the factory, but~it can easily be changed from the front panel, as described in Section 4.

1.9 REPACKING FOR SHIPMENT

Before shipment, the unit should be carefully packed in its original packing carton using all original packing materials.

Model 2289 Slide Rack Mount Kit-The Model 2289 Kit con- sists of two sets of flanged brackets, equipment slides, and hardware for mounting the Model 590 in a standard lP-inch equipment rack or cabinet.

Model 5904 Adapter-The Model 5904 extends the 1OOkHz measurement range of the instrument to 2OnF/2Oms. The Model 5904 mountsdirectly on the INPUT and ODTFUT jacks and includes BNC connectors for test cable connections. Note that the Model 5904 and Model 590 must be calibrated as a matched pair for stated accuracy.

Model 7007-l IEEE-488 Cable-The Model 7007-l lm (3.3 ft.) shielded IEEE-488 interface cable is equipped with a

shielded IEEE-488 connector (metric) on each end.

Model 7007-2 IEEE-488 Cable-The Model 7007-2 2m (6.6 A;) shielded IEEE-488 interface cable is equipped with a

shielded IEEE-488 metric-saew connector on each end.

Model 7051 BNC to BNC Cables-The Model 7051 cables

are made up RG-58 503 cable terminated with a male BNC connector on each end. Three lengths are available: The

Models 7051-2, 7051-5, and 7051-10 are 0.511-t (2 ft), 1.5m

(5 ft), and 3m (10 ft) in length respectively.

1.10.2 Calibration and Verification Sources

If the instrument is to be returned to Keithley Instruments for repair, completes the following:

Write ATTENTION REF’AIR DEPARTMENT on the shipping label.

In&de the warranty status of the instrument. Complete and h-&de the service form at the back of this m.snual.

1 .lO OPTIONAL ACCESSORIES

The following accessories for the Model 590 are available from Keithley Jnstruments, Inc. Contact your Keithley representative or the factory for information on obtaining these accessories.

1.10.1 General Accessories

Model2288 Fixed Rack Mount Kit-The Model 2288 Kit includes two ganged brackets and hardware for mounting Eb$eyiel 590 in a standard 19-inch equipment rack or

The calibration sources listed below are intended for use in field calibration or accoracy verification of the Model 590. Each source is mounted in a shielded test Rxture, which is equipped with BNC connectors. These fixtures are intended to connect directly to the front panel test INPUT and OUTf’UT jacks to avoid cable errors (except for the Model 5907 sources, which connect to cables through supplied adapters).

Sources used with each mode1 are summarhed in Table l-l. Table l-2 summarizes nominal source values.

Table l-l. Calibration Source Sets by Model

Number

*Used for cable correction only; not needed for normal

calibration.

1-3

Model 5905 Calibration SOWC~S-The Model 5905 set con- Table l-2. Calibration Sources and Nominal Values bins all the capacitance and conductance souxes necesmy to calibrate or verify accuracy for the Model 59011M. See Table l-2 for sources.

Model 5906 Calibration Sources-The Model 5906 sources are necessary to calibrate or verify the Model 590 when used with a Model 5904 ZO$/ZOmS Adapter, and are also needed to complete calibration or accuracy verification of a Model 59O/lOOk or a Model 59011OCkllM.

4.7pF, 18pF, 47pF, ISOpS, l.SmS, 18116

Model 5907 Calibration Sources-The Model 5907 sources are intended for cable correction when using the calibra-

tion capacitor method of cable correction. The Model 5907 includes both 47OpF and 1.8nF capacitance sources, and adapters for connecting the sources to the ends of the test cables.

“Model 5905 and 5906 include right angle ada er and

BNC short for driving point-cable correction c ai? ‘bration.

**Model 5907 inchxdes two female BNC-to-BNC adapters

to connect source to cables.

tModeI5906 also includes all sources in Model 5905.

l-4

SECTION 2

GETTING STARTED

2.1 INTRODUCTION

This section contains intmductory information on operating your instrument and is intended to help you get your Model

590 up and running as’quickly as possible. It includes a brief desaiption of operating CO~IIK& and test connedions. Once YOU are familiar with the material presented here, refer to Section 3 for more detailed information.

Section 2 is organized as follows:

2.2 Front Panel Familiarization: Briefly describes each

front panel control and test connection, outlines display operation, and lists where to find more detailed infor-

mation in Section 3.

2.3 Rear Panel Familiarization: Outlines each aspect of

switches.

2.4 Power Up Procedure: Describes how to connect the

ins&ument to line power, properly sekct line voltage, and

the typeof display messages to expect during the power

up cycle.

2.5 Basic Measurement Techniques: Gives step-by-step

procedures for making simple one-point measurements,

CV measurements, plotting data, and performing C vs t measurements.

2.2 FRONT PANEL FAMILIARIZATION

An overview of the Model 590 is given in the following paragmphs. The front panel of the instrument is shown in Figure Z-l, along with a brief desaiption of each item. Table

2-l is a cross reference to other sections of the man& where

more detailed information may be found.

2-l

Table 2-1. Model 590 Front Panel Cross Reference

IieXtl

1 LOCAL 2 POWERS 3 RANGE

4 Fi=Q 5 MODEL

6FILTBR 7 RATE 8 ZERO

16 GRID 17 SETUP/ABORT

18 A (Increment) 19 7 (Decrement) 20 ENTER 21 BUJZER 21 A-B 22 SHJlWQUlT

23-34 Data Entry 23 CABLE CAL*

24 CABLE #I* 25 SELF TEST* 26 SAVE* 27 RECALL* 28 IEEE* 29 l/C* 30 c/cl 31 c,"k 32 C,,-C, 33 ly,-V,] c=colist. 34 Cvst 35

Capacitance Display

Cotiductance Display

37 TALK, LISTEN, REMOTI

38 Bias Voltage Display 39 BUFFER and MEASURE 40 INPUT 41 OUTPUT

Description Cancel remote, restore local operation.

Control AC ‘power. Select mnge, auto, x10 attenuator. Select 1OOkHz or IME test fre uency. Select series R and C or paralle C and G. Control single-pole analog low-pass filter. Select 1, 10, 75, or 1000 reading per second rate.

Enable, disable baseline suppression.

Calibrate unit to internal standard. Initiate reading or sweep. Program trigger mode and source. Turn DC bias on or off.

Program bias wavefom type. Program bias voltages and times. Plot over IEEE-488 bus.

Draw grid and label graph.

Select grid type, labels, ,line,p pe? type, buffer, ;d scaling.

ABORT stops plottmg or gn generation.

Scroll through menu.

Enter parameters.

Display buffer A or buffer B data.

Transfer buffer A data to buffer B.

Add second function to some keys, cancel menu, buffer, or

parameters.

Program numeric data.

Scroll cursor when progmmming parameters.

Calibrate cable for 1OOkHz or lMJ& use (driving point only).

Select cable correction parameter set.

Perform test of internal components.

Store up to seven instrument setups in NVRAM.

RecaIl up to eight instrument setups from NVRAM.

Program IEEE-488 primary address (O-30).

Invert C and square value.

Display normalized capacitance.

Display

Display differ&t between buffers A & B

Plot AV at constant C.

Display C as a function oft time (buffer index).~

Display capacitance reading.

Display conductance read@g.

Show IEEE-488 bus status

Display programmed or measured bias voltage.

Indicate display and reading status.

BNC connector to measure test signal.

BNC output ~applies lOLX& or lMHz test voltage and bias

voltage to circmt under test.

maximum capacitance.

Paragraph

4.7

2.4

3.5

3.6

3.7

3.8

3.9

3.10

3.11 E

3:14

3.14

3.16

3.13

3.15

3.15 Several

3.13

3.20

3.18

3.17

3.17 E9

3:19

3.19

3.20

3.4

4.7

3.14

2.2

3.3

Press SHIFT first to access these modes.

2-2

GETTING STARTED

El LOCAL-Pressing this key when the unit +s in

remote (REMOTE on) returns the instrument to the local mode (REMOTE OFF) and restores operation of other front panel controls unless LLO (local lockout) is in effect.

POWER-POWER controls AC line power to the

instrument. The unit will be off when the switch is out (0 position) and on when the switch is in

(1 position). Before applying power, make sure

the line selection switch on the rear panel is in

the correct position for the AC line voltage in your

area.

CONTROL GROUP

RANGE-Press RANGE Iniefly to manually

select rtige: 2pF (1OOkHz only), TOpF, 2OOpF, or 21-3. Pressing and holding RANGE for more than

a half secon;d places the-tit in autoranging, as

shown b to cance auto and stay on present range. RANGE switches in X10 attenuator to extend

lOOkI& measurement range to 2OnF with exter-

nal optional input transformer (Model 5904).

Press !ZHFJ? RANGE again to cancel X10.

Autoranging is included for convenience only

and should not be used for time critical

AUTO indicator. Press RANGE a ain

NOTE

AFT

Ranges Include: 1OOkHZ

2pFl2pS

2nF/2ms 2OnF/2Oms* *Requires Model 5904 Input Transformer and X10

attenuator

FREQ-Press FREQ to select test frequency,

1oOkHz or IMHz at 15mV RMS. The excitation voltage is applied to the circuit under test along with the progr-ed bias voltage through the OUTPUT jack. The associated indicator wiU in-

dicate the selected frequency. CONFLICT mes- sage will be displayed if you attempts to use the X10 attenuator at lh4H.z. FREQ cti also be used

to disconnect internal test voltages from the

device under test. The tit will display DISCON:

NECT in this case.

MODEL-MODEL selects series or parallel de-

vice model (series resistance and capacitance or

parallel conductance and capacitance). The iostru-

ment always measures and stores buffer data in

arsllel form, but the series equivalent is calcu-

ated and displayed when the series model is

selected. The selected model is shown by the associated indicator.

2nF/20mS

Figure 2-1A. Model 590 Front Panel

2-3

GETTING STARTED

Full Scale Conductance/Resistance: Digital

Key# Rate Resolution Readings Fil&ing lOOkI%? llMH2 G R G

2im

2OOkfl 2oo!.Ls 2OkQ

2ms

2Oms 2OOQ FILTER-FILTER toggles the single-pole low-pass

analog filter on and off, as shown by the indicator adjacent to the FILTER button. The approximate

-3dB point for the filter & 37H.2, and the effects

of the filter are reflected both at the analog out-

puts on the rear panel and on the display. Note

that the filter increases in&ument response time. RATE-Press RATE then AN (or RATE) to saoll El CAL-J?ressing CAL performs an automatic one

through the rate selection menu: 1, 10, 75, or point calibration,of the selected module on the 1000 readings per second (or press the numeric current range using an internal 2OpF or 200pF key indicated below). Press ENTER to seled~ RATE, or QTJIT to return to the previous rate. The slower rates will provide more resolution and quieter readings, as indicated below. frequencies for optimum accuracy.

2ki-l 2oms 2kQ

2OOkQ 2OkQ calculated.

0 10001sec 3%*

pc g*

3 l/SW 4% C; G; V Yes

*Data displayed only after sweep is finished and

ZERO-ZERO provides means for supression of

a constant value from the readings, or it can be

used to cancel internal offsets to maximize ac-

ccuracy. Enabling ZERO stores the next reading

as the baseline value, which is then subtracted

from subsequent readings and stored in the bof-

fer header. Note that enabling zero reduces the

dynamic range of the measurement, and that the

zero value is carried from one mnge to another.

@~p+ling on range) capacitance source, and is

intended to corn

drift. CAL shoul

2 C. G. V Yes

nsate for shoe-term thermal

ge be used for each mnge at both

C only No C, G, V No

2-4

NOTE

NOTE Do not press and hold CAL during the

Reading rates are slightly different than indicated because of the way the unit generates its time base. See paragraph 3.9.

Figure 2-1A. Model 590 Front Panel (Cont.)

GETTING STARTED

TRIGGER GROUP

Ill

MANUAL-Pressing MANUAL will initiate a one-shot or sweep sequence depending on the selected trigger mode. This key is operational regardless of the selected trigger source. Pressing MANUAL while a reading or sweep is in progress will result in a trigger overrun error message.

MODE/SOURCE-Press MODE then AN , MODE, or numeric key (see list below) to select a trigger mode: one-shot or sweep, then press ENTER. In One-shot, the instnunent will process one reading per irigger, while in sweep the unit will process a complete reading sweep (one complete reading sequence at all programmed bias steps, with up to 450 readings stored in buffer A). Both modes are available with all trigger

sources.

Press SOURCE (SHIFT MODE) then MODE or

A/Y to scroll through available trigger sources

(or press the appropriate numeric key in the list

below). Press ENTER to program displayed

source: front panel (MANUAL button), external (a negative-going T%compatiile pulse applied to the rear panel trigger input jack), tis well as GET, X and talk commands sent over the IEEE-488 bus.

Front panel trigger messages include:

NUllltiC

Key #

1 2 3

*Always enabled regardless of selected source.

Message Description

TRIGGER MODE One reading

l-SHOT

TRIGGER MODE voile sweeo

SWEEP

TRIGGER SOURCE Front Panel

Fr MANLJAL TRIGGER SOURCE External trig-

EXT TRIGGER SOURCE IEEE talk TALK TRIGGER SOURCE IEEE GET

GET command

TRIGGER SOURCE IEEE X

~~X~~

per trigger per tiigge;

button*

ger pulse command

command

Figure 2-1B. Model 590 Front Panel

2-5

9-z

huO3) Wed W’Jd 069 IaPW ‘Bl-Z aJn6!d

Programmed

Message Limits Resolution

SIARTTJME lms to 65sec sToPT!mE lm to 65sec

lmsec lmsec

STEP TIME lms to 65sec lmsec FIRST BIAS V -20x7 to 2oV LAST BJAS V -20x7 to 2oV

STEP BJAS V -20V to 2ov

5mv 5mv

5mv DEFAULT -20V to 2oV ~5rnV BIAS V COUNT* 1 to 450 (1,350

ate looo/sec rate)

*Selects number of readings stored for external

and DC bias wavefom.

**Voltages can be programmed to lmV, but are

set in 5mV steps.

NOTES:

1. Multiply programmed times by 1.024 for actual time intervals.

2. Minimum stop time with pulse waveform is 50msec (IOlsec rate).

PLOTTER GROUP

El SETUP/ABORT-pressing SETUP enters the

PLOT-Pressing PLOT plots the data located in the selected buffer (A or B) on an intelligent plotter over the IEEE-488 bus using the current

SETUP parameters.

NOTE Disconnect the controller from the IEEE-488 bus of the Model 590 before using PLOT or GRID.

GRID-Pressing GRID draws labels, axes, and other parameters as appropriate for the selected buffer and the SETUF’ parameters.

plotter setup menu which allows selection of the parameters below. Use ~A or v to scroll through menu selections then press the appropriate mmher (below) when desired selection is displayed, then ENTER.

GETTING STARTED

Press ABORT (sm SETUP) to halt plqtting or grid generation.

Parameters include: Para-

Grid

meter Line Type Type Label Type 0

Dot at points FUJI grid Full labels Spaced dots Axis only Labels axis

and divisions

Dashes Long dash

Dash dot Long dash

Labels axis

OdY

No labels

short dash Long dash

short dash, long dash

meter Plot Type 0

Solid line

Type Buffer

c “S v

No Den A G vs V* B llc2 “S v ii -

c/co “S v c “S t**

c*-c, “S v [v.,-V,]C=CONST 1 1

- -

*R vs V with series model.

**Plots buffer index. Para-

meter X Axis

Auto scaling Auto scaling

1**

User-defined User-defined scaling

YAxis

scaling

*X axis scaled tq minimum and nmximum values

Y axis scaled according to range ~of function.

**Use numeric keys to enter scaling factors, then

press ENTER.

Figure 2-18. Model 590 Front Panel (Cont.)

2-7

GETTING STARTED

IATA GROUP

Increment (&-Increment is used to scroll through menu selections for other front panel operating modes such as TRIGGER MODE, PLOTTER SETUP, and BIAS WAVEFORM. In-

crement is also used to saoll through buffer locations when displaying buffer data.

Decrement (V-Like the incrementkey, decrement is used to scroll through parameter menus and buffer locations, but in the opposite

diI&iOIL

ENTER-ENTER is used as the last step in the menu and parameter selection process to a$ually perform the operation being programmed.

BUFFER-Pressing BUFFER allows you to view the contents of buffer A or buffer B on the front panel displays. Once in this mode, select the

desired buffer (A or B) and use A or V to-se-quentially access various buffer locations. The capacitance (C), conductance (G), and measured

bias voltage (I’) for each buffer location w-ill then

appear on the display as you access them. The BUFFER LED will be on while the unit is displaying buffer data. Pressing BUFFER while accessing the buf?er displays the last valid buffer location. Pressing ENTER displays the first~valid buffer location (location Xl). Press QUIT to etit the buffer.

tWHt

I-l-

A - B (SHIFT BUFFER)-A - B places the entire contents of buffer A into buffer B, including capacitance, conductance, and bias voltage values. Buffer A is the buffer into which AID readings are stored, and buffer B is the plotter buffer. Buffer A will be cleared after the data is

transferred. SHLFUQlJl’-SHIFT adds a secondary function

to certain other front panel keys, in&ding SETUP and RANGE (SHIFT RANGE~enables or disables the X10 attenuator. The shifted modes are marked below the keys in questions. While shift is enabled, the indicator to the right of that key will be on. To cancel shift, either select the mode in question, or press SHIFT a second time.

Tf you press a key which has no second functior~

after enabling shift, the primary function of that key will be performed. For example, SHlFlY

MODEL is the same as MODEL.

Press QUIT to retmn to normal operation while selecting menu options, programming parameters, or viewing buffer data.

2-a

Figure 2-1C. Model 590 Front Panel

GETTING STARTED

q to El NUMERIC DATA KEYS (C-9, k,-) - Ia

These keys are used to enter numeric data when programming such items asp bw~parmeters. If you wish to restore the previously programmed values, press the QUIT (SHIfT ENTER) key instead. Pressing the - key allows you to move the display cursor to the right while programming parameters.

Do not press - during power up, or insixument calibration may be altered if the CAL switch is in the unlocked position.

CABLE CAL*-Pressing this key performs opencircuit cable correction. Note that the opposite~m ends of the connecting cables must be left open

during the correction process. Once the correction is complete, you will be @en an opportunity to store the correction scheme for the particular cable (l-7) you are using at the update op-~~-- El

tion. TWO other forms of cable correction are

available only over the IEEE-483 bus, as discussed in Section 4.

CABLE #*-Use this key to select which of eight previously stored cable correction set ups you wish to use (O-7). Once selected, the unit will

automatically use the previously stored cable correction pammeters when making measurements. Note that correction set up #O turns offcable car- Ed rection and installs default values.

SELF TEST*-Use this key to perform a self test

on many internal components, including the

display. If no problems are found, ~the ins&ument will return to normal operation; however, if an error occurs, an INVALID mess&&ili be

displayed.

NOTE

Using cable correction can reduce the dynamic range of the capacitance and conductance readings.

SAVE*-SAVE allows you Jo save up to seven complete instrument configuations in NVRAM. To use this featue, simply select the operating configuration and then press the SAVE button. Key in the position (l-7) that you wish to save. Note that state 1 is the con&oration the unit will assume upon power up.

RECALL*-Use RECALL to assume machine operating configurations that were stored with the SAVE key, or the factory configuration. Upon entering this mode, you will be prompted for a configuration number. Key in the value (O-7) and press ENTER. Note that state 0 is a factory default configuration p ROM and cannot be altered.~ State 1 is the con-

figuration the ins@ument assumes upon power

up. RECALL can also be used to restore normal buffer display after using a math function.

IEEE*-Press IFEE to verify or program the lFEE4%3 primary address. Use the number keys tom select a primary address value (O-30). Press ENTER to program the new address. The programmed address will go into effecter immediately.

MATHEMATICAL FUNCTIONS The following calculations are performed on data

presently stored in the data buffers and are not stored in memory. fin order to uses these functions, you must select buffer display with the BLJFFER key. If reading normal instrument data, pressing one of these keys will have no effect.

l/C-Pressing l/C2 inverts *e ~apaci@nce value in each data~word of the selected buffer and then squares it; the’ value for each pointy wilI be displayed as you access that~ word location.

ermanently stored in

*SHIFT must be pressed first to access these modes.

Figure 2-1C. Model 590 Front Panel (Cont.)

2-Q

GEITING STARTED

C/Co-This feature allows you to display normalized capacitance data. Each capacitance value in the selected buffer will then be divided by Co and then displayed. The maximum capacitance presently stored in the buffer is automatically us-

ed for Co.

Cm,-Pressing 6, displays the maximum

capacitance value stored in the selected buffer.

CA&-This key allows you to q&tract ea&

capacitance value in buffer B from the cor-

responding values in buffer A.

W., -V,l C =CONST.-This function rotates the C-V plot axis by 90” and gives a display of the change in voltage (AV) as a function of constanf capacitance.

Figure 2-1C. Model 590 Front Panel (Cont.)

C vs t-This mode uses the bias waveform

parameters in effect when the readings were taken to display capacitance versus time. While in C vs t, you can use A/I to scroll through vaious buffer locations. The buffer location number will be shown in the L+z voltage display. You can calculate the time at a specific location as follows:

ti = tars + (tamp + l/R) (B) Where: ta = time at a s@ecific buffer locatioti~~

t t R = reading rate (readings per second)* B = buffer_location-cuq+r

*Use actual rate, not the nominal displayed value.-

Also multiply times by 1.024. Programmed timesmust be multiplied by 1.024

to obtain actual times.

programmed start time

szan = n.p

= prog-ed step time

2-l 0

GETTING STARTED

CAPACTMNCE DISPLAY-The normal capacitance display is a 4%-d@ 21,999, ~-19,999 co@ value. The decimal point along with the associated engineering units indicate the range. The displayed engineering units are pF and nF. The display will show dashes when no valid reading is available (for example, if the AID configuration is changed, or of no valid buffer data

is stored when accessing the buffer). Note that display resolution is 3% digits at the 75 and 1000 reading per second rates.

CONDUCTANCE DISPLAY-The nominal conductance display is a 4%digit (3%‘~ digits at the

75 and 1000 reading per second rates), 21,999,

- 19,999 Count value, with engineering units also

displayed in pS or mS for conductance (parallel model) or kQ or MQ for resistance (series model). Again? the decimal point indicates the selected range in conjunction with the displayed

engineering units. Like the capacitance display,

dashes will appear if no valid reading is

available.

IEEE-488 STATUS INDICATORS-The TALK,

LISTEN, and REMOTE LEDs indicate when the Model 590 has been placed in these modes when the unit is being programmed over the DEEE-488

bus. The TALK and LISTEN indictor show when

the unit has been addressed to talk or listen, respectively. These talk and listen commands are

derived from the unit’s primary address.

REMOTE will tmn on to indicate when the in-

strument is placed in remote by addressing the

unit to listen w.ith the REN line true. Note that

all front panel controls except LOCAL and POWER will be inoperative when REMOTE is on. Local operation can be restored by pressing

~LOCAL unless the IEEE-488 LLO (Local Lockout)

command is in effect.

BIAS VOLTAGE DISPLAY-The 4%-d@ bias

voltage display indicates the programmed or ac-

tual measured value of the internal *ZOV bias

source or the applied external bias voltage. While

progr&g bii parameters, the display will

show the progTammed value. When the unit is displaying readings or stored buffer values, the display will show the bias voltage as measued

by an internal A/D converter. This display will

also show buffer location in C vs t. Note that display resolution is 3% digits at the 75 and 1000

reading per second rates.

Figure 2-1D. Model 590 Front Panel

2-11

GETTING STARTED

BUFFER AND MEASURE-BUFFER will be on while the insinunent is displaying buffer data. MEASURE will turn on during a reading (one-

shot mode) or sweep (sweep mode) to indicate

a reading or sweep is in progress.

ZL -

INPUT INPUT is a BNC connector intended for

applying the measured test signal to the unit. The

center conductor of the jack is input high and the

shell of the jack, which is connected to analog

common, is input low (see below). The shell can be floated up to 30V RMS above chassis ground,

assuming the groun&ng switch on the rear panel

is in the floating position.

OUTPUT-OUTPUT provides a composite of the

l$kHz or lMHz (depending on selected frequency), l5mV RhG test voltage and the DC bias

voltage, either internal or external (WARNING:

up to ZOOV DC may be present between output

high and output low when an external bii

source is connected and selected). The center conductor is high, and the outer shell of the BNC jack is low, and is connected to analog common (see above). Maknmn common-mode voltage for OWIJT is 30V RhJS v&en the rear panel grownding switch is in the floating position.

I4 HIGH

BNC

CONNECTOR

LOW (ANALOG COMMON)

2-12

Figure 2-1 D. Model 590 Front Panel (Cont.)

The rear panel of the Model 590 is shown in Figure 2-2,

Table 2-2. Model 590 Rear Panel Cross Reference

GETTING STARTED

which also gives a brief description of each item. Table 2-2 lists oaraerauhs in this manual where more detailed informkio~o~ each subject may be found.

42 VOLTAGE BIAS INPUT

I 48 VOLTAGEBIASMONITOR 1 44 Grounding Switch 45 CONDUCTANCE 46 CAPACITANCE 47 IEEE-488 INTERFACE 48 EXTERNALTRIGGERlNPlJT 1

49 EXTERNAL TRIGGER OUTPUT

50 LINE VOLTAGE Selection Swit

51 LIh’EFUSE

52 tie Receptacle

53 Fan Fjlter

54 Exhaust Vents

Apply 2OOV m2ucimum DC bias voltage. Monitor internal or external bias voltage.

Select floating or grounded operation of analog common. Scaled O-2V conductance value. Scaled O-2V capacitance value. Interface unit to IEEE-488 bus. Input TTL pulses to trigger readings. Output TTL pulses to trigger other instruments. Select operating voltage range. Protect AC line input. Connection for AC input. Filter cooling air. Exhaust cooling air.

3.14

3.3

3.22

4.3

3.12

2.4

7.2

2.4

7.8

2.1

2-13

GETTING STARTED

El VOLTAGE BIAS INPUT-This BNC connector

is intended to apply external bias voltage up to

&!OOV DC, 5Gm4 maximum. Note that the input is internally fused to protect the insuument from over current conditions. The voltage~apphed toBL4SIhBXiTwillbeappBedtothecircuitunder

test through the OUTPUT jack only when exter-

nal biasing is selected with the WAVEFORM key

and when the bias voltage is turned on (BIAS

ON).

q ~~

VOLTAGE BIAS OUTPUT-This BNC output jack provides a means to monitor the selected bias voltage (external or internal) applied to the circuit under test. The output resistance is lkQ; thus, the input resistance of the monitoring in-

strument should be greater than lOOk to minimize the effects of loading.

VOLTAGE B!AS AND ANALDG OUTPUT

BNC JACKS

HIGH

(%U)G COMMON1

Ed GROUNDING SWITCH-The position of this

switch controls floating or grounded operation of the, following jacks: OUTPUT, INPUT,

VOLTAGE BIAS INPUT, VOLTAGE BIAS OUTPUT, and the two ANALOG OUTPUT jacks. When the switch is in the floating position, the

outer rings of these jacks can be floated up to 3oV

RMS above ground. When the switch is in the

grounded position, the rings are connected to

chassis ground.

dil E

!=LDATlNG

-EiiG

GROUNDED

CONDUCTANCE ANALOG OUTPUT-This

output jack provides a scaled voltage proportional

to the conductance reading. The range of the out-

put is 0-2V, full scale. For example, the nominal

output value ti be 1V with a 1OpS reading on

the 2GpF/2OpS range. Output impedance is lkR.

2-14

CAPACITANCE ANALOG OUTPUT-This

BNC jack provides a scaled output voltage that

is proportional to the capacitance reading. The

output range of the CAPACITANCE output is 0-2V full scale. For example, the nominal output voltage with a 14OpF reading on the 2OOpF/2oO~S range will be 1.4V. Output impedance is lkR.

Figure 2-2. Model 590 Rear Panel

GETTING STARTED

q IEEE-488~ INTERFACE-This c&n~tor pro-

vides a means to interface the Model 590 to the IEEE488 bus. When connected to a controller, ’ inslnunent operating modes can be pro:

gmnmed over the bus. CV plots can also be generated via the bus when the instrument is used in conjunction with an HP7470A or similar digital

plotter. IEEE-488 interface function codes are

marked adjacent to the connector.

EXTERNAL TRIGGER INPUT-EXTERNAL

TRlGGERlNPUT is aBNC jack to be used for ap- plying a trigger pulse to initiate a one-shot or sweep reading, depending on the trigser mode programmed with the TRIGGER MODE key.

Note that external trigger must be enabled, also

with the MODE key. Inputs to this jack must be

TlScompatible, negative-going pulses with a duration greater than 1~~. The center conductor is high and the outer ring, which is connected to IEEE common is low, as shown below.

TRIGGERS ON

LEADING EDGE

LINE VOLTAGE SELECTION SWITCH-The

position of this switch determines the operating voltage range of the instrument: lO~l25V or ZlO-25OV (a special transformer is available for

90-11OV and X30-2ZOV ranges). The factory

voltage range is marked below the switch. CAU-

TION Do not operate the instrument on a line voltage outside the indicated range, or ins&ument damage may occur.

•j ;‘NEW&

SO-1lOV OR 105~125V

LINE VOLTAGE

180-220V OR 210.250V

HIGH

LOW (IEEE-488 COMMON)

--RIG&R 8NC JAcl$S’

>l@C

q .

lhs BNC jack provides a ‘ITLcompa@&,

negative-going pulse when the instrument com-

pletes a one-shot reading or reading sweep,

depending on the selected trigger mode. The

center conductor is high, and the outer ring is low

(see above).

READING DONE (ONE SHOT)

Eil

STAYS HIGH DURINk

READING OR SWEEP

TTL HIGH

(3.4V TYPICALI

--4

(0.25V TYPICAL)

SWEEP DONE (SWEEP)

OR RE-TRIGGERED

LINE FUSE-The line fuse protects the AC power

line input of the instrument. When replacing the fuse, use only the type and rating specified on

the rear panel of the unit. CAUTION: Replacing then fuse with one that has a larger rating than specified may cause instrument damage.

AC INPUT RECEPTACLE-This receptacle is the

AC power line input for the unit. Use only the sumlied oower cord or the eauivslent with a pro-

p.&iy g&unded AC outlet t6 ensure conti~ed

protection against shock hazards. FAN FILTER-The fan filter keeps dirt from be-

ing &awn into the instrument by the internal cooling fan. The filter opening should be kept &se of obstructions to ensure proper instrument cooling. Clean the filter periodically to assure proper air flow (See Section 7).

EXHAUST VENTS-The exhaust vents direct air

from the inside of the instrument under pressure generated by~tbe internal cooling faq. They too

must be kept free of obstructions to ensure pro-

lx3 cooling.

Figure 2-2. Model 590 Rear Panel (Cont.)

2-l 5

GETTING START6D

2.4 POWER UP PROCEDURE

The steps in the following paragraphs will take you through the basic procedures for selecting the line voltage, connecthg the instrument to line power, and turning on the i.n8tTument.

2.4.1 Line Voltage Selection

The Model 590 can be operated on line voltages in the range of 105l25V or 210-UOV, 50 or 6OHz (a speci+ p0y.e:

transformer can be installed for 90-11OV and 180-220V

ranges). Before connecting the unit to line power, make

sue the line voltage selection switch is in the correct position for the power line voltage in your area. See Figure 2-2

for the location of this switch.

CAUTION Operating the instrument on a line voltage outside the indicated range may cause damage, possibly voiding the warranty.

2.4.2 Line Power Connections

2.4.4 Power Up Self Test and Display Messages

During the power up cycle, the instrument will perform the following:

1. A RAM and ROM checksum test. Jf ti error is found

as the result of one of these tests the insbument will display either all OS for a ROM failure, or alI As for a

RAM failure. Either type of error is considered fatal, and

the instrument will lock up. Refer to Section 7 for troubleshootinzz tmxedures.

If the instrmnent is still under warranty (less than otie year from the date of shipment), and a problem develops, it should be returned to Keithley Instruments, Inc. for repair. See paragaph 1.9 for information on retuning the unit.

Assuming the unit successfuUy passes the self test, it

2. will then briefly display the model number and software revision level, as in this example:

.,.

NOTE

590 REV D14

Using the supplied power cord, connect the instrument to an appropriate 50 or 6OHz AC power source. The female end of the cord connects to the AC receptacle on the rear panel of the instnunent. The other end of the power cord should be connected to a grounded AC outlet.

WARNING The Model 590 must be connected to a grounded outlet in order to maintain continued protection against possible shock hazards. Failure to use a grounded outlet may result in personal injury or death due to electric shock.

2.4.3 Power Switch

To tom on the power, simply push in the front panel POWER switch. Power is on when the switch is at the in-

ner position. To turn power off, press POWER a seconds time.

NOTE

Do not press and hold the CAL button during the

power up cycle, as doing so will cause the instrument to enter the diagnostic program. Refer to Section 7 for more information. Also, do not press and hold the cslibration may be compromised if the CAL switch is in the unlocked position.

- key during power up as instrument

In this instance, the software revision level is Dl, but your particulsx iostrmnent may be different. In any case, the software revision level should be recorded in case it becomes necessary to replace one of the ROMs in the future.

Next, the programmed rimary address will be

3. P displayed as in the examp e below:

IEEE ADDRESS 15

In this example, the factory default 15 is being &played. The adual disp

rimary address of

yed address will,

of course, depend on the programmed value. Following these display messages, the unit will begin

normal operation in accordance with the power up configuration discussed in the following paragraph.

2.4.5 Power Up Configuration

After the self testing and power up display messages are completed, the Model 590 will assume specific operating modes. The exact configuration is taken from save/recall

position 1. Table 2-3 summarizes the factory default iconfiguration for the unit. Note that many of these may be

different if you modify save/recall state 1. See paragraph

3.17 for more details.

2-16

GETTING STARTED

Table 2-3. Power Up Default Conditions

Mode Range

Flequency” Model Filter Rate zero Trigger Mode Trigger Source Bias Source

Bias Waveform

Start Time Stop Time

Step Tie First Bias Last Bias Bias Step Default Bias

Count (#readings DC or

external) Plotter Grid Type**

Plotter Pen Type**

plotter Line Type**

Plotter Label Type**

Plot Type**

Buffer to Plot**

XY s=*g**

IEEE Primary Address**

Cable #**

Condition 2nF

1oOkHZ

Parallel

On 10 readingslsec

Off Sweep

Front Panel (MANUAL)

lmsec ov

t; ov

450

0 (Full Grid)

1 (Fen #l)

7 (Solid Line)

0 (ml Labels) 0 (C vs v) 0 (Buffer A)

Off

15 7 (to front panel)

2.4.6 Warm Up Period

The Model 590 can be used immediately when it is first turned on. Note, however, that the unit must be allowed to warm up for at least one hour to achieve rated accumcy. Note, however, that you must use the CAL key to obtam rated accomcy if the ambient temperature changes by more

than 2%

2.5 BASIC MEASUREMENT TECHNIQUES

The following paragraphs wilI take you through simple step-by-step procedures to take one-point measurements, obtain simple CV lots, and measurements. TK s

ese proce ores are intended only to

erform fundamental C vs t

serve as a starting point, and they may not serve your

specific needs. Refer to Section 3 for detailed information on making these type of measurements.

2.5.1 Test Connections

Use the basic test connections shown in Figure 2-3 for the examples in tbis section. Paragraph 3.2 covers connecting methods in more detail.

“59011OOk or 590/1OOk/lM units

NOTE: This configuration can be altered with SAVE 1 except **. To restore tbis configuration, use RECALL 0.

2-l 7

GETTING STARTED

PROBER SHIELDS-

CONNECTED TO

CABLE SHIELDS

___--------

_---

A. CONNECTIONS

---

COAXIALCABLE

2-18

S. SIMPLIFIED EQUIVALENT CIRCUIT

Figure 2-3. Typical Test Connections

Table 2-4. Initial Control Settings for One Point Measurements

GETTING STARTED

Mode

Range ~~d-yY

Reading Rate

Trigger

Analog Filter FILTER Zero Baseline Bias waveform

First Bias PARAMETER -20v to +2ov

Bias Voltage Status ON

Control Setting

Comments

RANGE As required Use most sensitive range possible ZEL

1ookHz or lMH.2

Parallel Unit always measures using parallel model.

1 reading per second

Use cable correction at IMHz. Maximum resolution/minimum noise.

%TE l-shot Allows display to freeze single measurement.

On Minimize noise

ZERO Off

Use only to subtract baseline.

WAVEFORM DC Static bias level for one-point measurement.

Select desired bias level.

On Enable bias voltage before measuring.

2.5.2 Basic One-Point Measurements parallel form, and the resulting data is internally converted

to serial form when that model is selected. The analog out-

Ordinarily, the Model 590 would be used to take a number of readings with the resulting data plotted as a group of points. In some instances however, you may wish to take

a singIg reading with or without a specific bii voltage and display the result. Table 2-4 .mmnmizes recommended con-

trol settings for basic single-point measurements. Use the && proEe&,$ ~~~~f6~~~~~s~~l~-~o-m~~~~~~ on

put ‘w9’s refleas parallel mode1.

step 4: Se1ea a Readmg Rate

Since speed is not generally a requirement for single-point ~.~~~p+men+~

-------I ,

VW wordd~ p?&ly~~~se a rea&ngrafe of one per second for maximum resolution and minimum noise.

Step 1: Select Test Frequency If your unit is equipped with both 1OOkHz and IMHz

modules (see rear panel), you can select the test frequency by pressing the FREQ button. Measurements made through cables, at lMHz should.,use cable cow&on, as discussed in paragraph 3.21. Cable correction is not

Step 5: Select the Trigger Mode

To display a single reading place the ins&m-tent in the one-

shot ixigger mode by pressing the TRJGGER MODE key repeatedly until the I-SHOT message is displayed. Press ENTER to select the new trigger mode.

necessary when the device under test is connected directly to the front panel test jacks.

Step 2: Select a Range

Use the RANGE button to select a range consistent with the anticipated measurement, or use autoranging, if and dataenq keys. Theprogr

desired. For best accuracy, select the most sensitive range possible for the expected capacitance and conductance readings.

Step 3: Select Parallel or Series Model

The test circuit can be modeled either as a parallel conduc-

tame and capacitance, or as a series resistance and

capacitance. You can select the display model with the

MODEL key. Note that the insfnunent always measures in

Step 6: Program the DC Bias Source If you intend to ap~lv a DC biis voltaee to vour test cir-

cuit. use the WAVEF

r-d ~~~~ ~~~~

m~~:ORM key to select abCb&s waveform,

then program the first bias voltage with the Pm

nd bias source is f2OV. Before measuring, source with the BIAS ON key, unless you are not using the

bias voltage, in which case you should leave it turned off.

Step 7: Bigger a Reading

Press the TRIGGER MANUAL key to trigger and display a single set of capacitance, conductance, and biis voltage readings. The reading set will remain on the display until you press MANUAL again to trigger a new set of readings.

amma.bIe range of the inter-

turn on the bias

2-19

GETTING STARTED

Table 2-5. Initial Control Settings for Plotting

Mode Range poydw

1 control

1 RANGE

1 setting 1 comments

1 As rem&d 1 Use most sensitive

loo& or llvmz

Parallel Reading Rate Analog Filter Zero Baseline Trigger Bll Waveform Bii Start Time Bias stop Time Bii Step Time First Bias

Last Bias Step Biis Default Bias

RATE

FILTER ZERO MODE WAVEFORM PARAMETER

PARAMETER

10 per second Off Off

Sweep

Single staircase

lmsec

PARAMETER 10msec PARAMETER -5V

PARAMETER +5V

PARAMETER O.lV

1 i%&&viETERI OV

*These values depend on requised bias parameters.

2.5.3 Basic Plotting Techniques

Use the basic procedure below to take a set of data points and gaph the results on a plotter. Table 2-5 summarizes control settings for a basic CV plot. This method is usable only with a digitsl plotter. CV plots can also be obtained by using an X-Y recorder with the analog outputs (see paragraph 3.22).

ranee uossible. Use cable correction at”*. Unit measures pamIle model.

Best speed-resolution compromise.

Not necessary unless readings are noisy. Use only to subtract baseline. One complete reading sweep. Often used waveform.

* f

I *

Step 3: Select the Sweep Trigger Mode

Using the MODE key, select the sweep tigger mode. This mode will allow you to take one complete set of data points

for later plotting.

Step 4: Select the Bias Waveform

Step I: Connect the Plotter Connect an Hl’747OA plotter (or any other similar plotter

using HPGL) to the instrument with a suitable IEEE-488 cable.

NOTE

When performing stand-alone plotting, the plotter must be in the addressable mode using a primary address of 5. Also, disconnect the controller from the bus when plotting eoom the front pd.

Step 2: Select Control Fumtions

Using the appropriate front panel controls, select the range, test frequency, and model. Select a 10 reading per second rate with the RATE key.

U&the WAVEFORM key to select the required type of bias waveform. Typically, you will probably use either the single or dual staircase waveforms.

Step 5: Program Waveform Parameters For most waveform types, you can program start and stop

hold times; step delay times; and start, stop, and default voltage levels. Each of these parameters can be programm-

-- -c “--~?AR4h@,TER and data entry keys.

ed~ through .-

UJS “I ULS 1

Recommended values for the purposes of this demons&ation are listed in Table 2-5. After programming these parameters, make sure the biis voltage is turned on.

Step 6: Trigger a Readiig Sweep

With your circuit connected to the test jacks, press the MANUAL button to trigger a reading sweep. The instrument will cycle through the programmed bias steps, measure the capacitance, conductance, and actual bias voltage values, and store the data in the A/D buffer.

2-20

GETTING STARTED

Step 7: Place the Data in the Plot Buffer

Before data can be plotted, it should be transferred from

the A/D buffer to the plot buffer. To do so, preSS the A

- B (SHIFJI BUFFER) button. Once the transfer is com-

plete, you can tri writing your old 3

necessary (since you can plot directly from buffer A), but it is a good idea to transfer data to avoid possibly overwriting it.

Step 8: View the Data

Jf desired, you can view data points before plotting by pressing BUFFER. Select buffer B (if transferred in step 7),

then use A and V to scroll through data points. press QUlT to cancel buffer access.

Step 9: Set Up Plotter Parameters

Use the SETUP key to select the following plotter param@ers: grid type, pen type, line type, label type, plot type, buffer, and XY scaling. Table 2-6 lists recommended settings for simple plots. Use the numb the appropriate parameter, then press

ger a new reading sweep without over- ata. Note that this step is not absolutely

Table 2-6. lnitial Plotter Set Up

Description

Grid Type Pen Type Line Type Label type Plot Type Buffer X Scale Y Scale

*Use SEXUP or A I V to scroll through modes.

**Press number key then ENTER to program value.

Step_ 10: Plot the Data

To plot your data, press the PLOT key. Data previously placed in the plot buffer will then be graphed. Figure Z-4 sb.ows an example of a graph made in this manner. To stop

plotting, press the ABoRT key.

Step 11: Draw the Grid

Full Grid Pen #l

Dash-dot

FUJI Labels

cvsv

Buffer B

Make sure that you have paper and proper pens installed in the plotter, then press GRID. The instrument will then

command the plotter to draw the grid using previously selected setup parameters.

2-21

GETTING STARTED

2-22

II-.01 X W/k%‘z!) 33NVlIWdV3

Figure 2-4. Plotting Example

GETTING STARTED

DEFINITIONS:

ts,m=START TIME (PROGRAMMED)

tm.=STOP TIME (PROGRAMMED)

b=STEP TIME (PROGRAMMED)

tr=READING INTERVAL=tm,+l/R

lR=READING RATE)

TIME COMPUTATION:

t~=tmrr+(tsmr+llRl B

WHERE: B=SUFFER LOCATION #

t=TIME AT BUFFER LOCATION

A. CAPACITANCE

START

SWEEP

TRIGGER

8. BIAS VOLTAGE

Figure 2-5. C vs t Waveform

2-23

GETTING STARTED

Table 2-7. Basic Settings for C vs t Measurements

IvIoae

Range porgy

Reading Rate Analog Filter zero Trigger Waveform

Start Time Stop Tie

Step Tie Default Bias First Bias

count

cunrrv, mxullg

RANGE

l+=Q

As required

ykJ& or lMHL MODEL RATE lOOO/sec FILTER Off ZERO Off MODE Sweep WAVEFORM DC PARAMETER lmsec PARAMETER lmsec PARAMETER 10msec PARAMETER OV

PARAMETER +5v PARAMETER 100

C”UWLkZ‘lW

Do not overrange reading. Use cable correction at lMHs.

Unit measures parallel model.

Fastest rate.

Filter increases response time.

Use only to subtract baseline.

One complete sweep. Single level for C vs t. Minimum start time.

Minimum stop time. Nominal step time.

* *

Select number of readings.

Yl-tese values depend on required bii levels.

2.5.4 Fundamental C vs t Measurements

Use the following basic setup procedure for simple C vs t measurements. The procedure assumes that you have a

Step 4: Select a DC Bias Waveform

Press WAVEFORM repeatedly until you see the DC waveform display message. Press ENTER to program the

test circuit already connected to the instrument. Table 2-7 waveform typesummarizes typical control settings for these measure- ments. Figure 2-5 shows a typical C vs t waveform and also defines certain terms. For complete details on C vs t Step 5: se1ed a Reading Rate

measurements, refer to paragraph 3.20.

Use the RATE key to program the desired reading rate: 1, 10, 75, or 1000 readings per second. Keep iu mind that

Step 1: Select Measurement Frequency If your unit is equi ped to measure both at 1OOkHZ and

lMFJ.z, select the 2.

esrred frequency with the FREQ key.

~~~~ the interval between measurements is the sum of the

reading interval (reciprocal of the reading rate) and the pm

smmed step time. For the fastest possible C vs t measure-

gr merits, select a rate-of 1000 readings per second .

oiep L: Select a Range

Use the RANGE key to select the desired measurement range. Be sure to choose a range high enough to handle the largest reading you expect. Autorangin is not recommended for C vs t measurements, espe

cialfy at the faster

reading rates.

CI_- r). TX-..-_- ‘L^ c _.._^ - .b-Lser Mode

Press the MODE key until the SWEEP trigger mode ~o~~sge is displayed. Press ENTER to program the sweep

2-24

Step 6: Program Bias Waveform Parameters

Using the PAR&EZER and data entry keys, program the default bias, first bias, start; stop, and step times. Typically, the default bias is set to zero and the first bias is programmed to the amplitude of the pulse bias step, as shown

in Figue 2-5.

The progr-ed step time depends on the required time interval between measurements (the total time interval is the sum of the step time and the reciprocal of the reading rate). For the fastest possible measurements, program a

minimum step time along with the 1000 reading per second rate;

Step 7: Trigger a Reading Sweep

Step 10: Display and Compute C vs t Information

Press MANUAL to trigger a re&ng sweep. The ins&u-~ :.cess C vs Ho display the reading buffer location numbers.

ment will then perform the sweep and make measurements at the programmed intervals. As measurements are

taken, readings will be placed in the A/D buffer for later

The buffer location will replace the bias voltage informa- tion on the display. Use A/I to scroll through buffer loca- tions and display location information at those points.

recall. Note that valid data will not be displayed until the

sweep has been completed at the 100 and 1000 reading per second rates.

Cumulative time at a specific location can be computed as follows:

Step 8: Transfer Buffer Contents

Press the A - B button (SHFT BUFFER) to place data just taken into buffer B. Again, this step is not essential, but it is recommended to avoid posslMe lost data.

Step 9: Access Buffer Data

Press BLFFER to access data taken durinzx the reading

sweep. Select buffer B then use A or V to &roll throu& the various buffer locations. Note that data for each partic&x location includes a capacitance, conductance, and

bias voltage value (except fo;fhe 1000 reading per second

rate, which includes only capacitance data).

ta = 1.024 tshrt + WI24 tt, + 1 /R) (B)

Where: t, = time at a specific buffer location

t., = programmed St& time Lp = pronammed step time R = az reading rate‘ B = buffer location number

1.024 = multiplier to obtain actual times

Note that the actual (not~nominal) rates should be used

(see paragraph 3.9).

2-2512-26

SECT

ION 3

OPER,

3.1 INTRODUCTION

This section contains a complete, detailed desaiption of

each hont and rear panel aspect of the Model 590. The section is arranged as follows:

3.2 Display Messages: Lists display messages that may

be encountered during front panel operation of the instrument.

3.3 Test Connections: Details operation of the test INPUT and OUTPUT jacks on the front panel, and gives an example of typical test connections.

3.4 Readings and Hardware Control Aspects: Shows how to titerpret both capacitance and conductance readings from the front panel display, and details some aspects of hardware control.

tion, as well as use of the X10 attenuator tid optional Model 5904 Adapter to extend the measurement~range of the unit to 2OnF at 1OOkHz.

3.6 Frequency Selection: Details methods for 1oOkHz and lh@lz test frequency selection, as well as some precau-

tions necessary when using each frequency.

3.7 Series/ Parallel Model: Describes parallel (G and C)

and series (C and R) model selection, discusses seriespamIle equivalents.

3.6 Filter: Covers enabling and disabling the single-pole analog filter and gives a typical response curve.

3.9 Reading Rate: Describes selection of the 1, 10, ~100, and 1000 reading per second rates from the front panel.

4TION

3.13 Data Keys: Describes the operation of the numeric

keypad group for entering such parameters as bias voltages and times.

3.14 Bias Voltage: Gives the basic procedure for progmmmiug bii waveforms, voltages, ar@ *es, as well as the use of the rear panel external bias input and b&monitor output jacks.

3.16 Buffer Operation: Outlines methods to access the two

450-word data buffers from the front panel, and how to

transfer the contents of buffer A to buffer B.

3.16 Plotting Data: Details use of an external intelligent plotter to generate CV and other plots:

3.17 Save and Recall: Discusses procedures necessary to save and recall instrument con6guratiow in NVRAM.

3.16 Self Test: Outlines the self test program that can help

determine if any internal problems are present.

3.19Mathematical Functions: Describes the many mathematical functions that can be used as an aid in analyzing data located in one of the buffers.

3.20 C vs t Measurements: Details the procedure and principles behind making capacitance versus time measurements.

3.21 Cable Correction: Covers cable correction that Should be used to optimize accuracy when making measurements at lMH2.

3.22 Analog Outputs: Details operation of the capacitance and conductance analog outputs, and using an analog plotter.

3.10 Zero: Gives the basic procedure for using z&o to store a reading as a baseline value and then suppress that value from subsequent readings.

3.11 Drift Correction: Covers use of the front panel CAL key to perform drift correction using internal capacitance reference standards.

3.12 Triggering: Details methods of selecting the trigger source and mode and describes the operation of the rear panel triggeT input and output jacks.

3.23 Measurement Considerations: Discusses some important considerations to take into account when making measurements with the Model 590.

3.2 DISPLAY MESSAGES

During Model 590 operation and programming, you will

encounter a number of messages on the front panel display. Typical messages will be either of the informational or error variety, as discussed in the following paragraphs.

3-1

OPER9TlON

Table 3-1. Error Messages

Message

-.--pF,-.---US,-.---~ OVFL OVERLOAD

coNlwcT INVALID NEED 1OOkHz

NEEDlMHi TRlGOVRRRUN

MULTiPLIERFAIL

Description

No valid reading available

C, G, or V ovenange Module input overloaded Mode selection conflict, or already plotting

Parameter iuvalid, or self test error

1OOkHz CV module not installed lMHz CV module not installed

Unit triggered while processing reading or sweep. Self test indicates multiplier failure

3.2.1 Error Messages

Error messages are those messages which require some form of Crective action on your part in order to properly take a reading or program the instnxnent. For ekample, the OWL message indicates that the capacitance or conductance value being measured is too high for the selected measuring range.

Table 3-1 lists Model 590 error messages. Many bf these messages are also covered in pertinent paragraphs of the

Cormxtive Action

Trigger reading Move up range Move up range Do not use modes together Program valid parameter Do not select 1OOkHz module Do not select lMHz module ~ondil reading or sweep

See tro;bleshooting in

manual. Where applicable, the necessary corrective action is also given in the table.

3.2.2 Informational Messages

lnfonnational messages are induded as an aid in programming the unit. No comective action is necessary in this case, but you may still be required to enter a parameter at the prompt. Table 3-2 lists Model 590 informational messages. Again, most of these are covered in other parts of the manual.

3-2

Table 3-2. informational Messages

OPERATION

Message

TRIGGER MODE l-SHOT TRIGGER MODE SWEEP TRIGGER SOURCE FP TRIGGER J~OURCE EXT TRIGGER SOURCE TALK TRIGGER SOURCE GET TRIGGER SOURCE X BIAS WAVEFORM DC BIAS WAVEFORM STAB7 BIAS WAVEFORM DSTAIR BIAS WAVEFORM PULSE BIAS WAVEFORM EXT START TIME STOP TIME STEPTIME 1ST BIAS V LAST BIAS V STEP BIAS V DEFAULT BIAS V GRID TYPE O-l 0 PEN TYFE O-2 LINE TYPE o-7 LABEL TYPE O-3 G PLOT TYPE O-6 0 BUFFER O=A l=B 0 X SCALE N=O Y=l Y SCALE N=O Y=l UPDATE N=O Y=l BUFFER A=0 B=l IEEE ADDRESS SETUP NUMBER? CABLE NUMBER? BUSY READING RATE 10 SELF TEST CALCULATJNG DATA DISCONNECT

Key(s)

MODE 1~ MODE SOURCE SOURCE SOURCE SOURCE SOURCE WAVEFORM WAVEFORM WAVEFORM WAVEFORM WAVEFORM PARAMETER PARAMETER PARAMETER PARAMETER PARAMETER PARAMETER PARAMETER SEl-lJp ~~~~~

SETUP z:

SETUP ~~ SETUP

~~ CABLE CAL BUFFER IEEE SAVAVEYCALL

CAL RATE SELF TEST

1 Description I

One reading per trigger One sweep per trigger MANUAL button triggering

External trigger pulse triggeriug IEEE talk co IEEE GET co mmand triggering LEEEXCO mmand triggering DC~ bias level Single staircase bias waveform

Dual staircase bias waveform Pulse bii waveform External bias source initial delay &first bias step Fii delay after last bias step

Delay time for each bias step

Jnitlal bias voltage in waveform

Final bias voltage in waveform

Bias step size of each bias increments Bias voltage before and after sweep

Plotter grid type

plot pen number

Plotter line type

Plotter label type plot type

ye&p;

Y axis scaling

Update parameter?

Buffer selection

Display IEEE primary address

Setup position to save or recall

Cable # to save, recall

Unit performing calibration

Display/program reading rate

Unit running self test

Unit computing at end of sweep.

1 Test voltages disconnected from test jacks.

mmand triggering

3.3 TEST CONNECTIONS

The following paragraphs discuss methods for m&ng the

test connections necessary to measure capacitance and conductance with the Model 590. Grounded and floating

operation of the test jacks are also covered.

3.3.1 BNC Test Jacks

Both test INPUT and OUTPUT are BNC jacks, as shown

in Figure 3-l. The center conductor is high, and the outer Fg or shell of the jack (connected to analog common) is

low.

WARNING The INPUT and OUTPUT jacks may be floated up to 30V RMS above chassis ground when the

rear panel grounding switch is in the floating oosition. Exceedina this value may create a ihock hazard. -

3-3

OPERATION

,-HIGH

Figure 3-1. input and Output Jack Configuration

3.3.2 Typical Test Configuration

Use the test INPUT along with the test OUTPUT to make measurements, as shown in the typical example of Figure 3-2. Figure 3-3 shows the equivalent circuit of the test setup.

When making measurements, keep the following points inmind:

1. Use only RG-58 type of coaxial cable for both OUTPUT and INMJT. Maximum recommended cable length is

five meters. The Keithley Model 7051 cables can be used for connections.

2. When measuring through cables at lMH.z, ou should use cable cone&ion to compensate for cab e transmis- P

sion line effects. Paragraph 3.21 covers cable correction programming in detail.

3. The maximum common mode voltage for both the test OUTPUT and INPUT is 30V RMS, 42.4V peak when the,

rear paiwl grounding switch is in the floating position. Analog common caMot be floated above ground when the switch is in the grounded position.

4. Excessive shunt capacitance in the cable or test fixture.

may de

noise. ET3 noise figures.

ade accuracy of the measurement and increase

nsult the specifications for degradation and’

OPERATION

MODEL 590

RG-58 -

4XIAL CABLE

PROBER SHIELDS

CONNECTED TO CABLE SHIELDS

r---------~---~

r----~

L---------I

i----~-~--T---l,X~*~C~~SS,S

IEST CONNECTION PROCEDURE: ,. Connect the RG-58 BNC cable between the test OUT-

PUT and the test input terminal of the test fixture (not supplied).

!. Connect a second RG-58 BNC cable between test n\T-

PUT and the output of the test fixture.

;. Select grounded or floating operation with rear panel

switch. (WARNING: maximum common mode

voltage is 30V RMSL

RG-58 -

COAXIAL CABLE

----

=J , t ;

‘/=-I

FARADAY SHIELD (OPTIONAL)

4. Make sure probe shields are carried through as close to the wafer as possible; These shields should be con-

necked to ~&e BNC connecting cable shields.

5. A faraday shield, surrounding the wafer and chuck, incorporated into the test fixture, may be necessary to minimize noise. This shield must be insulated from the prober chassis and connected to analog common via the BNC cable shields.

&The prober chassis should be connected to earth

ground as indicated above.

Figure 3-2. Typical Test Connections

3-5

OPERATION

____------

MODEL 590

Figure 3-3. Equivalent Circuit of Test Connections

3.3.3 Grounded and Floating Operation

The outer rings of the TEST INPUT and OLJTPUT jacks are connected to analog common, which can either be con-~ netted to chassis ground or floated up to 30V R$fS above ground potential.

WARNING Do not exceed 30V RMS, 42.4V peak common mode voltage, or a possible shock hazard may result.

To selectgrounded or floating operation, simply place the rear panel gro@ing switch in the appropriate position,

as shown in Figure 3-4. Note that the rear panel BLAS and analog outputs will also be affected by this switch.

Grbuixded operation can be used in cases where it~is not necessary to float analog common or if noise caused by ground loops is not a problem. If analog co-on must

be floated above chassis ground potential, or if ground loop

problems occur (as may happen if other, grounded insinunents are connected to the test fixture), the instrument

should be operated with analog common floating. See

paragraph 323.1 for a detailed discussion of ground loops.

A. ANALOG COMMON FLDAnNG

R ANALOG COMMON GROUNDED

Figure 3-4. Floating/Grounded Operation of Analog

Common

3-6

OPERATION

CAPACITANCE

CONDUCTAN&? (PARALLEL1

, RESISTANY ISERIES),

Figure 3-5. Capacitance, Conductance (Resistance), and Bias Voltage Displays

3.4 READINGS AND HARDWARE CONTROL

The following paragraphs discuss capacitance and conductame readings and some hardware control notes.

BIAS

VOUAGE

tame, replacing the previously used mho). The display will

show conductance in S or mS when uarallel model is selected. Note, however, that the &tit will display resistance 5 this position when series model is selected, & discussed in paragraph 3.7.

3.4.1 Capacitance and Conductance Displays

Note that conductance is simulv the recimocal of resistance

and is calculated as follows! ’

Capacitance and conductance readings 5ve shown on the

front panel display, as shown in Figure 3-5. The

‘capacitance reading appears in the left portion of the

display, and the conductance reading appears in the right

G + jwC =

R + JwC

portion of the display. Both readings are a 3%digit or 4%digit signed value, depending on the selected reading rate. Where: G is the conductance in s&ens

R is the resistance in ohms C is~the parallel capacitance

The capacitance and conductance displays will show either

C’ is the series capacitance. the current reading, or a reading from one of the boffers, depending on the selected mode. During normal operation, the current reading will be displayed; however,

NOTES: capacitance and conductance readings from buffer A or buffex B will be displayed when you select that option with the buffer key.

1. The display will show dashes in place of numeric values if no valid reading is available. To d&play readings, trigger the unit with an appropriate triggers stimulus, as determined by the programmed trigger source.

The capacitance reading includes capacitance engineering units in pF or nF. 1pF equals 10~‘* farads, while 1nF is lo+ farads. Conductance readings are in units of siemens (the siemen is the internationally recognized unit of conduc-

2. The update rate of the displays in the sweep trigger mode depends on the relative reading rate selected with the RAE key. IvEASuRE indicates the relative -a&g rate. Only one reading set per trigger stimulus will be displayed in the one-shot tigger mode.

3-7

OPERATION

3. No valid data will be displayed until a sweep is completed at the 75 and 1000 reading per second rates.

4. When BUFFER is on, the unit is displaying buffer location data instead of the current reading.

5. Display resolution is 4% digits (+20,000 counts

nominal) at 1 and 10 readings per second, and 3% digits (+2,C!OO counts nominal) at the 75 and 1000 reading per second rates.

6. The actual display count limits are +21,999, -19,999

counts. Note that accuracy above +ZO,ooO counts is typical.

7. Shunt loading and cable correction reduce the dynamic range of capacitance and conductance measurements.

3.4.2 Bias Voltage Display

The bias voltage display is located at the right of the front panel, as shown in Figure 3-5. Depending on several factors, this display will show one of the following:

1. The current bias voltage: During normal operation, the unit measxxes the adual bias voltage applied to the circuit under test through the test OUTPLJT jack. If the internal bias source is selected, the display will show the actual bias voltage at that particular waveform step. If external bias is selected, the unit will measure and display that voltage.

2. A buffer bias voltage value: When accessing buffer inf-tion (with the BUFFER key), the display will show

the voltage bias step that was applied to the test circuit

at that particular point in time.

3. Buffer location: When displaying C vs t information,

this display will show a particular buffer location number. Time information can be computed from the display as discussed in paragraph 3.21.

3.4.3 Hardware Control Considerations a

Those keys which generally affect hardware operation include: RANGE, FILTER, ZERO, FREQ, RATE, and CAL. When using these keys, keep in mind the following point%

1. Changing one of these modes will abort an active sweep.

2. The A/D buffer pointer will be reset and data will be

cleared from the A/D buffer (buffer A).

3.5 RANGE SELECTION

The following paragraphs discuss manual and auto range

selection, as well as the use of the X10 attenuator with optional in ut transformer to extend the measurement range of the 1 Fil kHz module to 2OnF.

CONTROL

NOTES:

1. The voltage display will show dashes when no valid reading is available.

2. The voltage dis

counts nominal rates, and 3% digits (+2,ooO counts nominal) at the and loo0 per second rates. The display update rate depends on the reading rate (the relative reading rate is indicated by MEASURE). Note however, that no voltage data will be dis when the 75 or 100 g . selected.

3. The a&al display count limitation is +21,999, - 19,999 counts. Accuracy above +20,000 counts is typical.

4. The bias voltage must be turned on in order to read the bias voltage.

3-8

lay resolution is 4% digits (*ZO,OOO

at the 1 and 10 reading per second

layed during a reading sweep

readmg per second rate IS

3.5.1 Available Ranges

The available ranges depend on the measurement frequency, e summarized in Table 3-3. Note that the 2OnF range is not available when measuring at lMKz. The optional

Model 5904 input transformer must be used in conjunc-

tion with the X10 attenuator to extend the 1OOkHz measurement range to 2OnF. Also, there is no 2pF, lMH.z range.

Table 3-3 al+o shows full scale displayed values for.each range. These values show 4%-d@ resolution, whxh 1s

available only at the 1, 10, and 18 per second reading rates (the 18lsec rate is available only over the IEEE-488 bus).

Table 3-3. Range Summary

lOOkHa lMHz

Range

2pF/2pS 1.9999pFll.9999fi.S 2OpF/2Ofi 19.999pFl19.999pS 2OOpF/2OO*S 199.99pF/199.99@ 2llFLhS 1.9999rW1.9999mS

2OnF/2OmS** 19.999nF119.999mS - -

*4Yz-digit value for specified accuracy shown. Unit displays 3% digits with 75

and 1000 per second rates. Maximum display extends to +21,999 counts (+2,199

counts, 3% digits) with typical accuracy above 20,000 (2,000) counts.

**2OnF/2OmS range requires 5904 adapter and x10 attenuator, and is not available

at IMHz.

Full Range Reading* Range

ZOpF/200/6 19.999pF1199.99iS ZOOpF/2mS 199.99pF11.9999mS ZOpF/2OO@S 19.999RF1199.99pS

Full Range Reading*

Table 3-4. Range Error Messages

OPERATION

Message

OVFL

OVERLOAD Module input overload Move up range or appCONFLICT X10 attenuator csnnot be Do not use conflicting

3.5.2 Invalid Reading Indications

Basically, there are two conditions that may cause an invalid reading indication. Fit, either the capacitance or conductance’ reading (or possibly both) may exceed the count capability of the associated display area. In this case, the display for that parameter will display the following message:

OVFL

To correct this condition, select a higher range.

A more serious situation exists iu cases where the input~m~

amplifier of the CV module is saturating. In thiscase, the unit will display the following error message: ~~,-

OVERLOAD

Module saturation means that the test signal current is tooo high~for the test input amplifier. Under these circum-

Description / Corrective Action

I I

Capacitance or conductance Move up range or reading overrange

used at lMHz

stances, neither the capacitance nor conductance reading is valid due to the non-linear characteristics of the input circuits when saturated.

To correct this error, move the instrument up mnge until a valid reading is noted by the absence of error messages. Table 34 summaria es error messages assodated with improper range selection.

NOTES:

1. If an overload -occurs, the unit will cease waveform

&An overload condition is not flagged at the analog out-

3. An overload situation could be caused by an extraneous

apply smaller C or G ly smaller C or G modes

and buffer activity.

puts. An on-range reading may occur at the analog outputs under overload conditions.

signal appearing on the test INPUT jack. This signal

could come from external RFI or EMI sources not associated with the 1OOkH.z or IMHz test frequencies, or the DC bias voltage.

3-9

OPERATlON

3.5.3 Manual Range Selection

To select ranges manually, simply press the EANGE but-

ton briefly ( <‘/r second) to move the instrument up range. Each time you 8 ress RANGE, the instrument will move up one range. nce the highest range is reached, the unit vdl switch to the lowest range the next time you press

RANGE briefly.

Pressing RANGE briefl

mode is Presently enab ed. Jn this case, the unit will stay on the presently selected range.

NOTES:

1. Better overall accuracy and resolution can be obtained by using the lowest range possible for the measured capacitance and conductance.

2. Since capacitance and conductance ranges are paired together, it may be necessary to measure the capacitance or conductance on a less than optimum range in order to keep both readings on scale.

will also cancel autorange, if that

3.5.4 Using Autoranging

The Model 590 has a convenient autoranging feature which simplifies range selection. To enable autoranging, simply press and hold the RANGE button for more than one-half second. The instrument will then go into the autorange mode, as indictated by the AUTO LED. To cancel autoranging, briefly press the RANGE button a second time. The

insirument will then stay on the presently selected range.

4. Autoranging cannot be used with the 75 and 1,000 per second reading rates. The unit will generate ~a CONFLICT error under these conditions.

3.5.5 Using the 20nF/20mS Range

By using the internal X10 attenuator in conjunction with the optional Model 5904 2Ofi12OmS Adapter, the 1OOkHz

measurement ran e of the Model 590 can be extended to 2013, as describe ~below.

X10 Attenuator Use the procedure below to enable the X10 attenuator.

1. Connect the Model 5904 2Oti/2OmS Adapter to the test jacks (see below).

2. Using the RANGE key, place the instrument on the 2nF

(highest range).

3. Select a measurement frequency of 1OOkHz with the

=Q key.

4. Press SHIFT RANGE to enable the attenuator. The X10 LED next to the RANGE key will illuminate to indicate that the instrument is in that mode.

5. Take the readings from the display. The instrument will automatically scale the readings and display the proper

values.

6. To disable the X10 attenuator, press SHIFT RANGE a second time.

NOTES:

Keep in mind that autoranging is included for convenience only and should not be used for critical measurements because of possible effects on the readings.

Figure 3-6 shows a flow chart of autoranging operation.

NOTES:

1. Accuracy with other ran es than 20nF with the X10 adapter is not specified. innn,$ the Model 5904 X10 adapter is not recom-

2. When taking data with rapidly changing bias waveforms, manual rangin should be used to ensure con-

sistent timing for ea ci! pomt. Measurement time can

vary widely during autoranging.

3. The instrument will not autorange into the X10 mode.

3-10

d erefore, the useof autorang-

1. The X10 attenuator is intended for use with the optional Model 5904 2O.eF/2OmS Adapter (see below). Since the instrument has no way of sensing if the adapter is connected, incorrect readings will result if you enable the X10 attenuator without connecting the adapter, or use

the input adapter without the X10 attenuator enabled.

2. The X10 attenuator may be used with other ranges, if

desired, but accuracy for those ranges is not specified. The instrument will automatically scale the reading to reflect the X10 attenuation factor. In this situation, the

~available ranges will be 20pF/20pS, 2OOpF/200pS,

2nFQmS, and 2OnF/2OmS. The tit can be o&rated for Model 5905 used on the 2OpF through 2nF ranges, ii

desired. See paragraph 7.3.

3. The X10 attenuator is not available for use at lMHz. The following message will be displayed if you attempt to

enable the attenuator with a lMH!z test frequency selected, or if you attempt to enable to select a lMHr test frequency with the X10 attenuator enabled:

CONFLICT

DWIAY

ERROR

MESSAOE

END

OPERATION

Figure 3-6. Flow Chart of Autoranging Operation

4. The Model 5904 must be calibrated with a particular Model 590 to achieve stated front panel accuracy.

Input Transformer Connections Figure 3-7 shows typical connections when &ng the

1. Use only RGSS type coaxial cable to make the test connections. Maximum recommended cable length is five meters.

2. The maz&u.un common-mode voltage for tloating operation is 3OV RMS. 42.4V oeak.

3. Excessive shunt ~pacitake will degrade accuracy and increase noise.

3-1;

OPERATION

RG-58

OAXIAL CABLE

--I

PROBER SHIELDS

CONNECTED TO

CABLE SHIELDS

-- ,- -~~ --~

MODEL 590

r--

- -.-~-~-~-~.- - - _

r---

-----1

PROBERS

I 7

: ===s\ +!===j. 1 ’

WAFER 4

I cHucK-I

L---

-~--t---T---’

TEST CONNBCTION PROCEDURE:

1. Mount the Model 5904 adapter on the test OUTPUT and INPUT jacks. Be sure not to install the adapter upside down.

2. Connect an RG-58 BNC cable between the test output of the adapter and the test input of the test t%ture.

3. Connect a second RG-58 BNC cable between the test

fixture output and the test input of the adapter

mounted on the instrument.

4. Selects grounded or floating operating with the rear panel switch. (WARMNG: maximum common mode voltage is 3OV RMS.)

1 II

WAFER

FARADAY SHIELD (OPTIONAL1

L PROBER TEST FIXTURE CHASSIS

5. Probe shields, connected to cable shields, should be carried through as close to the wafer as possible.

6. A faraday shield may be necessary to minimme noise. This shield must be insulated from the prober chassis and connected to analog common via the cable shields.

7.The prober shield should be connected to earth ground as indicated above.

NOTE

Enable the X10 attenuator (SHB?T RANGE) when using the input adapter or else reading scaling will be off by a factor of 10.

3-12

Figure 3-7. Typical Test Connections Using Model 5904 20pFl20mS Adapter

3.6.2 Test Voltages

OPERATION

An intend signal somce supplies a 1OOkHz or lMH2,

15mV RMS test voltage. Available frequencies as well as

the frequency selection procedure are covered below.

CONTROL

RANGE

FREQ

RATE

q lOOK

•~MHZ

MoDEL urn

ol,,,

The nominal test outputLvoltage for both 1OOkHz and lMHz is 15mV RhE, with a tolerance of f 10%. The fre-

quzmm~~;~~pf~ both the 1OOkHz and lhG+ test

3.6.3 Selecting a Frequency

If your instrument is equipped for 1OOkH.z and lMH.z operation, you can select the desired operating frequency simply by pressing the FREQ button. Doing so will cause the unit to change to the other frequency, as indicated by the associated LED. Pressing FREQ again will sele~ct the disconnect~mode, as discussed in paragraph 3.6.5.

Figure 3-8 shows a flowchart outlining frequency selection.

NOTES:

1. Cable correction should be used when measuring through cables at lMH.z. See paragraph 3.21 for more information.

2. The 2pF rtige is not available at IMHz.

There are three available models of the 590. The Models 59011oOk and 5901lM supply test voltages at frequencies of 1oOkHz and lMHz res

will operate at either 1 &

maizes the available models, installed modules, and test frequencies. Available test frequencies are marked on the rear panel.

ectively. The Model 59O/lCWlM

kH.z or lh@iz. Table 3-5 sum-

Table 3-5. Test Voltage Frequency by Model

Model Test Voltage(s)

59011OOk 1ookHz, +O.l%; 15mv RMs*, ilO% 5901lM lMH2, +O.l%; 15mv RMs,* +lO% 590/1ookml lOokH2, lMH.z, +O.l%; 15mv

R&is*, ilO%

*Open &-wit value

DISCONNECT

Figure 3-8. Frequency Selection Flow Chart

3-13

OPERP;CION

3.6.4 Frequency Error Messages nored, but the second trigger will cause a trigger over-

ruu condition.

Error messages associated with frequency selection are summarized in Table 34.

3. No valid data will be stored or be made available over

lhe bus while in the disconnect mode.

Table 3-6. Frequency Error Messages

Message Description

NEED loOk 1OOkHz module not installed NFED lM IMHz module not installed CONFLICT X10 attenuator enabled when selecting

lMHz, or CAL or CABLE CAL pressed in disconnect

3.6.5 Disconnecting the Test Voltage

A second feature of the FREQ key allows you to disconnect the test and bias voltages from the device under test without havin to remove the connectin cables attached to the test EW voltages simply press FREQ until the DISCONNECT message is displayed. Internal relays will then disconnect the test and bias voltages from the front panel test INlWT

and OLJTPUT jacks, allowing the center conductors of

these jacks to float. In addition to the DISCONNECT messages, both the lOOkJ3z and lMHz LEDs will turn off while the unit is in the disconnect mode. To return to nor-

mal operation, simply press FREQ again.

NOTES:

and OUTPUT jacks.

5JT

+ . o &sconnect the

3.7 SERIES/PARALLEL MODEL

The following paragraphs cover measurement model, how

to select the model, and discuss series-parallel eqoivslents.

CONTROL

3.7.1 Measurement Model

1. Calibration, pressing, CAL, or CABLE CAL are illegal when the unit is in disconnect; the instrument will

The Model 590 measures the capacitance, C, and the con-

ductance, G, of an equivalent parallel circuit connected be-

display a CONFLICT message under these conditions. tween the test OUTPUT and test INPUT jacks. Figure 3-9

2. The fir.4 trigger received while in disconnect will be ig-

--------I

-__---~---

ANALOG COMMON

shows an equivalent circuit of the test configuration.

f) OUTPUT

-I

Figure 3-9. Equivalent Circuit of Parallel Capacitance and Conductance

3-14

OPERATlON

3.7.2 Model Selection

To alternate between series and parallel models, press the

MODEL key on the front panel. One of the associated LEDs will indicate whether series or parallel model is in

effect. When the series model is III effect, the unit mathematically converts parallel measured data to serial form (data is always stored internally in parallel form).

NOTES:

1. Buffer data is always stored in parallel form. Series con-

version is performed when buffer data is displayed, if that model is selected.

2. The analog outputs are always in parallel form.

3.7.3 Conductance and Resistance Ranges

With a psmllel model, the unit displays conductance. With a series model, however, the unit displays resistance. Equivalent full range conductance and resistance ranges for both frequencies are shown in Table 3-7.

3.7.4 Series and Parallel Equivalent Circuits

In a similar manner, the resistance and reactance of the series form of (b) are represented by R and X, respective-

ly. The impedance of the series &cuit is 2.

Y=G+JB

6 = oC, ICAPACITIVEI

B = 1 IINDUCTIVE)

iA1 PARALLEL CIRCUIT

Z=R+JX

X = 1 (CAPACITIVE)

X = w4 IINDUCTIVE)

(61 SERIES CIRCUIT

Figure 3-10. Series and Parallel Impedances

The net impedances of the equivalent series and parallel tits at a given frequency are equal. However, the indi-

vidual components are not. We can demonstrate this relationship mathematically as follows:

A complex impedance can be represented by a simple series or parallel equivalent circuit made up of a single resistive element and a single reactive element, as shown in Figure 3-10. In the parallel form of (a), the resistive element is represented as the conductance, G, while the reactance is represented by the susceptance, 8. The two

together mathematically combine to give the admittance, Y, which is simply the reciprocal of the circuit impedance.

Table 3-7. Resistance and Conductance Ranges

100kHz

Parallel Range

2pF/2pS 2pF/2Ma 2OpF/20fiS 2 2 F/20W1

E~ops 2% 232ko 2n%2Oms 2OnF/2oms*

Series Range Par+llel Range

2OpF/200kQ

2OnF/2OOn*

R+JX=

G + jB

To eliminate the imaginary form in the denominator of the right-hand term, we can multiply both the denominator and numerator by the conjugate sofa the denominator as follows:

R + jX =

G + jB

G - jB

lhmz

Series Range

2OpF/200kS 20 F/2&

2OpF/2OOkQ &O$$;kQ

*5904 and X10 attenuator required.

3-15

OPERATION

Performing the multiplication and combining terms, tie:For the series circuit, the dissipation factor is defined as: have:

G - jB

R+jX=

G= + B=

By using the dissi

If we assume the reactance is capacitive, we can substitute

- l/oC, fci? the reactance and UC, for the susceptance (C, is the equivalent series capacitance, and C, is the equivalent parallel capacitance). The above equation then becomes:

R-j ~1 G - joC,

Jn a lossless circuit (R and G both 0), C, and C, would be and 3Ofi respectively. From these values, we can calculate

equal. A practical circuit, however, does have loss because of the finite values of R or G. Thus, C, and C, are not equal-the greater the circuit loss, the larger the disparity 30 x 10-c between these two values.

Series and parallel capacitance values can be converted to their equivalent forms by taking into account a dissipation factor, D. D is simply the reciprocal of the Q of the circuit. For a parallel circuit, the dissipation factor is:~

G= + o=Cp=

summarized in Ta to another. Note that C, and C, are virtually identical for very small values of D. For example, if D is 0.01 C and C, are within 0.01% of one another.

Example: Assume that we make a measurement on a partid

equivalent circuit and obtain values for C, and G of 16opF the dissipation factor, D, as follows:

The eouivalent series cw&tance is then calculated as follows’:

.2 = WC&

ation factor along with the formulas

le 3-8, you can convert from one form

Zn(104l x 10’) (160 x 10-l*)

D = 0.3

C, = (1 + 0.09) 160pF C +T 174.4pF

Table 3-8. Converting Series-Parallel Equivalent Circuits

Resistance

capacitance Conductance

Model

m PamllelC,,G D=t =s G=(l+D’)C, R=&G

WI-

circuit Dissipation Factor Conversion Conversion

Series C, R

,, =- -~~wGK

c, =- G=

1 + D’ (l+D’)R

3-16

OPERATION

3.8 FILTER

The analog filter can be used to minimize the amounts of

noise appearing in the displayed readings, and at the

anal0 trol 0 f also given.

outputs. The following paragraphs describe con-

the analog titer; a typxal filter response curve is

CONTROL

RANGE

FREQ

q lOOK

0 0

01~~2

FILTER

RATE CAL~P

ZERO

MoDEL UC-J

L-

a*+

NOTES:

1. The analog filter increases instrument response time to changes in input signals for the conductance and capacitance readings. Thus, inaccurate readings may result if the filter is used while measuring with rapidly changing bias waveforms. Table 3-9 summarizes nominal response times to various percentage of final values.

2. The effects oft the analog filter are reflected at the capacitance and conductance analog outputs on the rear panel of the instrument.

3. The malog filter has no effect on the voltage bias reading.

4. Pressing FILTER will abort a sweep.

Table 3-8. Typical Filter Response Times

Percent of Fii Reading 1 Typical Filter Response

10%

0.1%

0.01%

1Omsec 2Omsec 3Omsec 4Omsec

3.8.2 Typical Filter Response

3.8.1 Filter Control

A typical response curve for the single-pole analog low-

To &able 01 &able the m&g filter, simply press fie pass filter is shown in Figure 3-11. Note that~ the filter

FlLTER key on the front panel. The on/off status of the filter is indicated by the associated LED.

-10

E =z

2 0 z

-20

-30

10 100 1000 loo00

FREQUENCY IHZ)

respmse rolls off at 6dB per octave (2OdB per decade) above the -3dB point of approximately 37Hz.

Figure 3-11. Typical Analog Filter Response

3-17

OPERATlOM

3.8.3 Using the Filter

Noise in the reading is usually seen as an unsteady display value that jumps around. In this situation, it is generally benefidal to leave the filter enabled to stabilize the

readings. However, using the filter with rapidly changing waveforms can degrade accuracy because of increased

response time, as indicated above.

CONTROL

If additional filterin

iucorporates digital

is require<, use a reading rate that

ki .

tenng, as dxussed in paragraph 3.9.

3.9 READING RATES

From the front panel, you can select reading rates of 1, 10,

75; or 1000 readings per second. A fifth rate, which is available only over the’IE?X488 bus, produces 18 readings per second with 4%-d@ display resolution.

NOTE

Because of the way the unit generates its time base, the actual reading rates are slightly ti:~ ferent than indicated. Table 3-10 lists actual intervals along with other pertinent informa-

tiOiL

3.9.1 Selecting a Reading Rate

Display or select the reading rate as follows:

1. Press the RATE key. The instrument will display the reading rate now in effect. For example, the display might show:

READING RATE 10

MoDEL cl@

In this case, a rate of 10 readings per second is in effect.

2. To return to normal operation without changing the rate, press QUIT. The instrument will then return to normal operation with the active sweep (if any) unaffected.

3. To scroll through available reading rates, press and hold

~the RATE or AIT key, or press the numeric key.

associated with that rate, as summarized in Table 3-10.

4. When the desired rate is shown, press the ENTER key

to program the displayed reading rate. The instrument will return to normal operation.

NOTES:

1. Re-progr Any stored data from the previous sweep will be lost.

2. No valid data will be displayed until the sweep is completed and calculations are performed at the 75 and loo0

per second rates.

cl*+

amming the rate will abort an active sweep..

Table 3-10. Reading Rate Summary

Display

Readings ‘Resolution Period

3% digits’ l2OpeC cc “G”‘yv C: G: V

C, G V

*Data displayed after sweep is completed.

3-18

3% digits* 24Opec

41% digits 2.4msec

4% digits 16.7ms.e~

Integration Integrations

Averaged

1 ~~~~~~~~ 1

Actual Readmg Effective

Interval (msec) Rate

1.024

13.3 75X/set

102.3 1024 0.977/set

976.56/&c

9.77/set

sweep (7

5 and 1006/set rates onl?), the fIont panel keys

will 6e in0 erative. The amount of time necessary for

cur

these cal

ations depends on the the number of data uoints taken in the sweep. A CALCULATING DATA &sage will be display&d.

4. Autoranging cannot be Fed at the 75~ 0: J,OO~&c reading rates. The unit will di if you attempt to program ert

lay a CONFLICT error

er of these rates with

autoranging enabled.

5. A CONFLICT error will o&u if you attempt to select l- 75 kc rates with more than 450 readings per sweep programmed.

3.9.2 Display Resolution

The display resolution for the 1 and 10 readingper second

rates is 41% digits. Display resolution at the 75 and 1000

er second rate is 3% digits. Note, however, that data will

t .

e &played only when the sweep is finished at the two

fastest rates.

3.9.3 Digital Filtering

OPERATION

at the expense of resolution. At the other extreme, you would opt for the 1 reading per second rate in situations requiring

rrxs4mu.m resolution and minimum noise.

3.9.5 1000 Reading Per Second Rate ~Consideraticns

When using the 1000 reading per second rate, the following points should be kept in mind.

1. Only capacitance data is taken; neither conductance nor bias voltage data is taken.

2. Data is placed intq the buffer in raw form and will be made available only when the reading sweep has been completed.

3. The only available bii waveforms are DC and external. A CONFLICT error will occur if you attempt to select

other waveforms.

4. MEASURE will be on during integration.

5,~Attempting to program control the Model 590 during the

sweep may destroy the timing integrity of the waveform.

6. Up to 1,350 readings can be stored in the buffer at the 10001sec rate.

to minim&x noise. A basic averaging scheme is used in both cases, with 4 integrations averaged at the llsec rate, and two integations averaged at the lO/sec rate. Since the

degree of filtering depends on the amount of averaging, the best noise performance can be expected at the slowest rate.

3.9.4 General Rate Selection Considerations

The primary factors affected by the reading rate (other than the absolute number of readings Peru second) are the integration period and the amount of resolution. Since reading noise is affected both by the integration period and the amount of ~digital filtering, the reading will have $he least noise at the 1 per second rate (longest integration period and most digital f&ring), and the most n&se at the 75 and 1000 per second rates (shortest integration period and no digital filtering).

Optimum rate selection, then, for your particular application will depend on required resolution and speed, as well as the amount of noise tolerable in the readings. For example,~ if speed is your primary requirement and you requjre capacitance, conductance, and bias voltage readings,

& tam C, G, and,V measureme@), but

3.9.6 1000 Readings Per Second Instrument Settings

To obtain a rate of 1000 readings per second, you must se=~~ lect~the following instrument settings:

l Trigger mode: Sweep (paragraph 3.12) l Trigger souye:~ internal (paragrap-t 3.12) l Bias waveform: DC or external (paragraph 3.14.1) l Step time: Ims (paragraph 3.14.2)

3.9.7Typical Reading Rates

Typical reading rates are

Internal Trigger Rate External Trigger Rate

Rate ImsDelay ZmsDelay lmsDelay 2msDela:

75 75

16.4

10 10

/ 1 1 1

Note: All rates include both start and stop times of lms.

summarized below.

64.6 68

16.1 16

9.5 9.6

1 0.97

9.5

3-19

OPERATION

3.10 USING ZERO

Zero can be used to store a set of capacitance and conductance readmgs as baseline values. Once stored, the baseline values are then subtracted from subsequent readings.

CONTROL

FILTER

ZERO

1. Make sure that zero is disabled (ZERO off).

2. Use the FRRQ key select the test frequency.

3. Select the reading rate and range, as required.

4. Connect the capacitance and conductance values to the instrument via the front-panel INPUT and OUTPUT jacks. See paragraph 3.3 for detailed information on testy

connections.

5. Press ZERO to enable zero.

6. Trigger the reading or sweep by applying the appropriate trigger stimulus. From the front panel, you can do so simply by pressing the MANUAL button. The process of triggering the instrumentwiU store the firsts

set of capacitance and conductance readings as baseline

values.

7. Connect the test circuit to be measured to the test jacks. Jfnecessa$ &i&e&e instiu%ent.-The stored baseline values will be subtracted from the actual readings, and the result will be displayed.

8. To disable zero, press ZERO a second time. Stored baseline values will be lost once zero is disabled.

3.10.3 Using Zero to Optimize Instrument Accuracy

The accuracy specifications given at the tiont of this manual

assume that the instruments has been properly zeroed us-

Zero is desaibed in the following paragraphs.

3.10.1 Enabling and Disabling Zero

To enable or disable zero, press the ZERO button; the in- lMHz modules, select the desired test trequency wrtn dicator to the right of the ZERO key indicates the state of the FREQ key. zero.

When zero is first enabled, the first capacitance and con-

ductance readings triggered after zero is enabled will be stored as the baseline values, from subsequent readings as long as zero is enabled. Theses zero vahres will also be stored in the buffer header to be used when accessing buffer data.

which will then ba

3 subtracted

3.10.2 Storing Capacitance and Conductance Baseline Values

Use the following basic procedure to store capacitance and

conductance parameters ss your baseline.

ing the fundamental procedure below. Jn order to optimize accuracy, it is recommended that you repeat the procedure below every hour, especially in situations where the ambient temperature varies considerably.

1. Ifyour instrument is equipped with both lOOkHa and

2. Select the desired reading rate and measurement range usine the RATE and RANGE keys.

3. Che& to see that zero is initiaUyWdisabled (ZERO off).

4. Connect the cables and test fixtore to the test INPUT and OUTPUT jacks, but leave the DUT (device under test) disconnected at~this time.

5. Press ZERO and trigger a reading or sweep by pressing

MANUAL. The capacitance and conductance displays

should then show a zero reading.

6. Corii%t the DUT to be measured to the fixture probes (or other similar test fixture connections).

7. Readings using the zeroed value can now be triggered and read in the normal manner. For optimum accuracy, it is recommended that the instrument be m-zeroed using the above procedure whenever the range, reading

rate, or frequency is changed.

. . .

3-20

OPERATION

tiep~ the following points in mind when using zero:

1. Zero reduces the dynamic range of the displayed readings. For example, if a 1OOpF baseline value is in effect on the 200pF range, a capacitance of 1OOpF will

overrange the reading even though a 10OpF reading is

well within the limits of the 20OpF range.

2. Zero calculations are performed on a parallel or series model, as appropriate.

3. Zero affects only displayed data; it does not modify the way it is measured and stored within the insinxnent.

4. Zero is not affected by pressing other keys.

5. Changing range or frequency leaves the same zero value active.

6. If the buffer is enabled (BUFFER KEY),~the zero values will be obtained from the buffer header. Figure 3-12 shows a flow chart of zero operation both with and without buffer operation.

7. The accuracy specifications listed at the front of this manual assume that the instrument has been properly zeroed using the procedure in paragraph 3.10.2 above.

8. Zero stores baseline values for capacitance and conductance or& no~bias~vo~fa~eobaseline values~are~storedl

changed.

START

ZERO

ON?

YES

Q-7

TURN

ZERO OFF

3.10.5 Examples of Zero Operation

Table 3-11 lists some examples to help clarify zero operation. This table lists stored baseline values, applied signals, and resulting front panel display values for those combina-

tiOll.5.

Table 3-11. Examples of Zero Operation

Stored Baseline 1 Applied Signal

5.OOpF/2.6& 1m/1oms llOpF115OmS

19.0OOpF/4.6@

680pF115mS

18OpF/lOOmS

Figure 3-12. Zero Operation Flowchart

1 Displayed Readings

14.OOOpF/2.00@S

-0.52OnF/5.00OmS

7O.CKlpF/-5OmS

3-21

OPEFIATlON

3.11 DRIFT CORRECTION

The front panel CAL button provides a means to perform internal drift correction, as described in the following paragraphs.

CONTROL

CAL

MooEL urn

3.11.1 Correction Procedure

Perform internal drift correction using the procedure below. A flowchart outlining the basic sequence is shown in Figure 3-13.

1. Select the 1 reading per second rate, or the slowest rate you intend to use (seenote below).

2. If your instrument is equipped with both 1OOkHz and lMHi mod&s, use FREQ to select the desired measurement frequency.

3. Select the first mnge to be c&rated with the RANGE key.

cl++

4. Press the CAL key. The instrument will cyde through the internal correction. sequence, a procedure that could take up to 10 seconds, depending on the selected rate. During the calibration process, the following message will be displayed:

BUSY

5. Repeat steps 3 and 4 for all ranges you intend to use.

6. Select the other test frequency, if installed, and repeat

steps 3 through 5 above for that frequency.

NOTES:

1. The unit should be corrected using the above procedure for each range and frequency you intend to use.

2. For optimum measurement acaracy, the correction pmcedure outlined above should be repeated at least once per hour, especially in situations where the ambient temperature varies widely.

3. During the correction sequence, the unit takes 10 readings of the @emal transfer standards. Thus, at the

l-reading per second rate, up to 10 seconds must be allowed for each correction. If greater speed is a requirement, use the 10 reading per second rate, which wiIl degrade correction accuracy only slightly.

4. Correction should be performed at a reading rate that

yields 4M-digit resolution (1 or 10 readings per second) in order to achieve good accuracy. For maximum accuracy, always correct the unit at a 1 reading per second rate, unless speed is a requirement as indicated above.

5. It is not necessary to disconnect external circuits from the test INPUT and OUTPUT, as the instrument

automatically does so during correction.

6. New correction constants obtained by this method is only temporary and will be lost when the power is turned

off.

7. Pressing CAL will abort an active measurement sweep.

8. Upon power up, default values of 0 and 1 are installed

for drift correction coefficents, effectively resulting jn no correction until CAL is used.

3-22

9. The CAL key is inoperative in autoranging or if cable

correction constants are in effect. A CONFLICT error

will occur iFyou press CAL under these conditions.

OPERATION

.3.11.2 Internal Correction Sequence

The general internal sequence the instrument follows when performing drift correction is outline below. Figures 3-14 shows an outline of the sequence.

The internal sequence is as follows:

1. The insizmnent recalls correction constants for the selected range and frequency from NVRAM. These con-

stants are derived during full instrument calibration, as

discussed in paragraph 7.3.

2. The unit disconnects the test INPUT and OLJTPIJT jacks

from internal circuitry. An open circuit measurement is then made to be used as a zero offset value.

3. The instrument then measures an internal 2OpF or 2OOpF cap%itor (depending on the selected range). Ten measurements per reading are made and then averaged in order to obtain a more accurate value.

4. The correction constant recalled in step 1 is divided by the results of the measurement in step 3. The resulting value is then stored in RAM and used by the instm-

ment as a compensating factor when taking normal

readings. This new correction values will then remain

in effect for the selected range and frequency for alI subsequent measurements until the power is turned off, or until CAL is pressed again.

Figure 3-13. Front Panel CAL Sequence

3-23

OPERATION

MEASURE INTERNAL

CAPACITOR

TRIGGER

MANUAL

MODE

SOURCE

C~%+ANT

REFERENCE

STORE NEW

Co%EoN

EXIT

Figure 3-14. Internal Drift Correction Sequence

3.12 TRIGGERING THE INSTRUMENT

A trigger stimulus is used to initiate either one ieadjng, or a groups of readings (called a sweep), depending on the selected trigger mode. Basically, two bigger modes are available: one-shot and sweep. The trigger stimuhrs itself depends on the programmed trigger source: front panel, external trigger input, or IEEE-488 GET, X , I mand triggers.

The following paragraphs discuss trigger source and mode,

as well as trigger ov- conditions, and external trigger input and output pulses.

3.12.1 Selecting a Trigger Mode

Available Trigger Modes There tie two basic trigger modes available, including:

1. One-shot: with each trigger, the instrument takes a single set of capacitance, conductance, and bias voltage readings, and stores the resulting data at a single word location in the A/D buffer. Data is also made available to the display and J.EEE-433 bus when ready. A pulse occurs at the external trigger output after each single set of readings is completed. When the waveform is complete (or the programmed number of points are taken), the next trigger will reset the buffer and begin storing readings at location one. For IEEE bus operation, an SRQ can be generated to signal to the controller that no more triggers should be sent. See Section 4 for IEEE488 bus information.

2. Sweep: a single trigger stimulus causes the insbxment to cycle through the programmed bias waveform sequence. A single set of capacitance, conductance, and bias voltage readings will be taben and stored in the AD buffer at each bias steu. As each stenoccurs. the resulting data will app& on the front panel and will be made available for transmission over the IEEE-488 bus. The instrument will intitiate a pulse at the exter-

MI trigger output jack at the end of the sweep. The display will continue to update after the sweep has been

nn,..-,e+arl

3-24

OPERATION

More information on the how the trigger modes affect the

Selection Procedure Use the procedure below to select the desired &igger mode.

1. Press the MODE button and note the following message is displayed:

TRIGGER MODE

2. Now press MODE or A/I repeatedly until the desired trigger mode message is displayed, or press the associated numeric key, as summarized in Table 3-12.

For example, for the sweep mode, the front panel

display message is:

TRIGGER MODE SWEEP

Similarly, the instrument will display the following message for the one-shot mode:

TRIGGER MODE 1 SHOT

3. Once the desired mode is displayed, press the ENTER

key. The instrument will then return to the previous

display with the new trigger mode in effect.

4. If you wish to cancel trigger mode selection without changing the selected mode, press QUIT.

NOTES:

2. Pressing RANGE, FREQ, FILTER, ZERO, GAL, TRIG-

GER MODE, any BIAS key, or re-programming the

reading rate will abort an active sweep without re-

triggering a sweep. In either case, any data stored in the A/D buffer will be cleared. To avoid loosing data in this situation, always transfer data to buffer B with the A

- B key before pressing other keys.

3. Triggering a sweep will clear data presently stored in the A/D buffer (buffer A).

4. Only capacitance data is taken at the 1880 reading per

second rate.

5. At the 75 and 1CWsec rates, a CALCULATING DATA message will be displayed at the end of a sweep before

the unit returns to normal operation.

3.12.2 Programming the Trigger Source

Available Trigger Sources The programmed trigger source provides the stimulus to

initiate a one-shot or sweep depending on the selected trigger mode. Trigger sources include:

1. Front panel MANUAL button. Note that this button is always operational regardless of the selected source (unless the unit is placed in remote over the IEEE-488 bus).

2. External trigger pulse. An appropriate pulse, applied to the external tigger input jack on the rear panel, provides the tigger stimuhrs.

3. IEEE command triggers. IEEE-488 GET, X, or talk com-

mands provide the stimulus when the appropriate source is selected.

1. To =boa m =cfive swew P*= the MODE key. me presently active sweep will be aborted, and the in&u-

ment will display the TRIGGER MODE message. Press ENTER to return to normal display, and initiate another trigger to begin another sweep, if desired.

Table 3-l 2. Trigger Modes

Numeric

Key # Display Message

0 TRIGGER MODE 1 SHOT

1 TRIGGER MODE SWEEP

Note that all trigger sources are available with all trigger modes, as summarized in Table 3-13.

NOTE

In order to ensure rapid response to a new trigger after a sweep, press MODE ENTER to turn off the A/D converter.

Description

One-shot (one reading per trigger) Single-sweep (one sweep per trigger)

3-25

OPERATION

Table 3-13. Trigger Mode and Source

Combinations

Front External IEEE IEEE IEEE

Source/Mode

One-shot X Sweep

Selection Procedure Select the desired trigger source as follows:

1. Press SOURCE (SHlFI MODE) and note that the following message is displayed:

Z.Press the MODE or A/I key repeatedly until the

desired trigger source is displayed (or press the associated numeric key, as indicated in Table 3-14). For

example, for external triggering, the display w+ll show:

Panel Trigger Talk GET X

:: X ::

TRIGGER SOURCE

3.12.3 Front Panel Triggering

To trigger the instrument from the front panel, simply press the MANUAL button. Note that this button is always operational regardless of the selected trigger source (unless the unit is placed in remote over the IEEE-+-, in which

case all front panel buttons except LOCAL will be locked out). Thus, front panel trigg!r~ source selection provides a me- to lock out-all other trigger sources when only front-panel triggering is desired.

The number of ~feadings the ‘instrument takes after MANUAL is pressed will depend on the selected trigger

mode. In the one-shot mode, you must press MANUAL

for each reading. Pressing MANUAL with the sweep mode active performs a complete reading sequence, with a group of capacitance, conductance, and bias voltage readings taken and stored with each biis step. If you press MANUAL and the instrument is not ready, an err01

message will be displayed, as discussed in the following

paragaph.

3.12.4 Trigger Overrun Conditions

TRIGGER SOURCE EXT

3. Once the desired trigger source is displayed, press the ENTER key. The instrument will then return to the

previous display with the new trigger source in effect.

At this point, the selected trigger stimulus must be ap-

plied to initiate the reading or sweep.

4. To return the display to normal without changing the

previously selected source, press the QUIT button instead.

Table 3-14. Trigger Source Display Messages

NumeriC

Key # Message

TRIGGER SOURCE Fl? MANUAL key only.* TRIGGER SOURCE EXT Pulse applied to EXTERNAL

TRIGGER SOURCE TALK IEEE tslk command. TRIGGER SOURCE GET TRIGGER SOURCE X IEEE X command.

Once the instrument is triggered, it will begin a reading or sweep, as discussed above. If another trigger is received while the unit is processing a reading or sweep (depen-

db,

g on trigger mode), a trigger overrun condition will oc-

cur, in which case the instrument will display the followjng error message:

TRIG-OVERRUN

Fiie 3-15 shows a flowchart of trigger overrun operation.

Trigger Source

TRIGGER JNPUT. IEE GET command.

3-26

*hJ.ANLJAL key is always operationa&

OPERATION

NOTES:

1. A reading or sweep is not aborted by a trigger overrun condition.

2. Only an active trigger source can create a trigger over- itiates a complete sweep sequence. -- nm situation. For example, if you select the externsl tng-

ger source, either an external trigger pulse or pressing MANUAL can create a trigger overron (recall that MANUAL is always active).

3. The instrument will not generate an overrun error if triggered during the stop time. At the end of the sweep, a new sweep will be started in this situation.

YES

As previously described, the effect of the external trigger pulse depends on the selected trigger mode. In the oneshot mode, a separate pulse is required for each reading set;mIn the sweet mode, however, one trizzer pulse in-

TRIGGERS ON

LEADING EDGE

NOTE

TRIGGER INITIATES ONE READING. IONE-SHOT) OR ONE SWEEP 6WEEP).

Figure 3-16. External Trigger Input Pulse

Specification

Figure 3-15. Trigger Overrun Operation

3.12.5 External Trigger Input

To use external triggering, first select that source with the MODE key as described in paragraph 3.12.2. The instru- ment will then be triggered when an input pulse with the spec%ications shown in Figure 3-16 is applied to the EXTERNAL TRIGGER INPUT jack. The unit is triggered on

the leading edge of the pulse, as shown on the diagram.

Note that the center conductor of the jack is high, and the outer ring, which is connected to IEEE common is low, as shown in Figure 3-16.

3.12.6 External Trigger Output

The externsl trigger output provides a negative-going, TKcompatible pulse as shown in Figure 3-18. The leading edge

of the trigger pulse indicates end of reading or end of sweep as the case may be.

me occurrence of this pulse occurs depends on the selected trigger mode as follows:

1. At the end of each reading in the one-shot mode.

2. At the end of the syeep in the sweep mode (1, 10, and 18 lsec reading rates).

3. In the 751sec and lOOO/sec rates, the pulse occurs after

alI cakulations are done in the sweep mode.

The center conductor of the external trigger output is high

and the outer ring, which is connected to IEEE common is low, as shown in Figm.e 3-l7,

3-27

OPERATION

HIGH

Low (IEEE488 COMMONI

Figure 3-17. Trigger Input and Output Jack

Configuration

Figure 3-16. External Trigger Output Pulse

Specification

3.12.7 External Triggering Example

- Figure 3-19 shows the basic circuit configuration for using the Model 590 along with Model 230 as an external bias voltage source. Connect~and program the instruments as

follows:

1. Using suitable coaxial cable, connect the 230 OUTPUT to the 590 VOLTAGE BIAS INPUT on the rear panel.

2. Using a BNC coaxial cable, connect the 230 EXTERNAL TRIGGER OUTPUT to the 590 EXTERNAL TRIGGER

~~~~~~ ~INMJT.

3. Select the STEP program mode on the Model 230 and program the various memory locations for voltage levels, current limits, and required dwell times. The

dwell time should be programmed to the desired step zisonsolt the Model 230 Instruction Manual for

4. Press the 590 MODE key and program the unit for the one-shot trigger mode. Press SHIFT MODE and select the external higger source.

5. Press the 590 WAVEFORM key repeatedly until the the EXT display message is shown, then press the ENTER key. Tlus step sets up the unit for use with the external bias souxe.

6. Connect the circuit under test to the 590 test INPUT and OurnuT jacks.

7. Select the 590 range, frequency, model, and reading rate, as required. -

- -

8. Press the 230 RESET key and turn on its output with the OPERATE key.

WARNING Up to + 1OlV may be present at the 590 TEST OUTPUT after the next step.

As an example of external triggering operation, let us

assume that the Model 590 is to be used with a Keithley

Model 230 Programmable Voltage Source. The Model 230

is~ capable of output voltages as high as * 101V. Thus, this instrument is ideal for testing devices which require higher

bias levels than the nominal *2OV level of the Model 590.

3-20

9. Press the BIAS ON key to turn on the voltage applied through the test OUTPUT jack.

~10. Start the measurement sequence by pressing the 230

START/STOP key. This action will trigger a 590 reading; Ate the end of the dwell time for location, a 590 reading will be triggered and stored.

NOTE

See paragraph 4.12 for an example program that demonstrates this process.

OPERATION

MQDEL 230

VOLTAGE SOURCE

Figure 3-19. External Triggering Connections

3.12.8 IEEE-488 Bus Triggering

To trigger a reading or sweep with an IEEE-488 trigger source, you must send the appropriate IEEF&8 command over the bus: X, talk, or GET, depending on the selected source See Section 4 for complete details.

WARNING:

HAZARDOUS VOLTAGE

MAY BE PRESENT AT TEST OUTPUT

Jf one of these commands has been selected as the trigger source, you can also trigger the instrument by pressing the MANUAL button unless the insimment is in remote.

3-29

OPERATION

T(j Eacj e b

QUIT

DATA

CABLE CAL

0 c”7 ti b

SAVE RECALL

ENTER

b cl3 ti

l/C2

BUFFER

A-B

3.13 DATA KEYS

The following paragraphs desaiie the operation of the O-9.

+I-, A and V keys, the SHIFT key, and ENTER and QUIT. BUFFER and A operation in paragraph 3.15.9.

B are discussed under buffer

+I-

0 r”l I

CA-CB

CABLE #

c/c,

WA-V&CONST.

press the SHIFT key a second time. If you press a key which has no shifted function with shift enabled, the primary function of that key will be performed. For example, pressing SHIFT FILTER performs the same operation as simply pressing FILTER.

SELF TEST

IEEE

CMAX

C vs T

3.13.1 Increment and Decrement

One purpose of inaement (A) and deaement (‘I) is to scroll through various buffer locations when viewing buffer data on the front panel. To use these keys with the buffer, simply press BUFFER, select the buffer to access at the prompt, then use A or V to sequentially scroll through buffer locations

A second purpose of A/V is to provide an alternate method of scrolling through menus when using RATE, WAVEFORM, PARAMETER, MODE, and SETUF’.

3.13.2 SHIFT/QUIT Key Operation

The SHIFI key is used to add secondary functions to some other front panel keys such as MODE (SOURCE). To access one of these shifted modes, simply press the SHIFT button followed by the desired key. Note that the indicator adjacent to the SJ%FT key will be on when shift is active.

To cancel shift without selecting a corresponding mode,

When progr you can return to normal display without making a change by pressing QUIT. QUIT can also be used to exit buffer

display.

amming parameters or selecting menu options,

3.13.3 Numeric Input

The numeric keys, which include O-9 and f are used to

program numeric data when programming such

parameters as bias wavefonnvoltages. Also, some plotter

setups are entered in numeric form.

To use these keys, simply press the desired mode button

and then enter your data with the number keys.

3.13.4 Display Cursor

During the process of programming numeric parameters, the display digit affeaed by~a key press will brighten to act as a display qursor. As you type in digits, the cursor will move to the right, and it will wrap around to the left after passing through the right most digit. The - key can be used to move the cursor to the right.

3-30

Use the ENTER key to update the active variables to the new values. A single press of ENTER wiU save all parameters just modified, and the unit will return to normal display.

3.13.8 Multiple Parameter Entry

When progmmmin not press ENTER after each entry. Instead, press the A or V key to scroll to the next parameter to be programmed. After changing the last parameter, press the ENTER key to modify all parameters just entered. If you press QUlT at any point, none of the parameters will be changed.

g two or more parameters, you need

3.13.7 Invalid Parameter Entry

Parameters are check for validity when you scroll to the next pammete: set and when the ENTER key is pressed.

If a p&meter outside the allowed range is programmed,

the unit will briefly display the following message:

INVALID

The unit wiu then return to the erroneous value.

3.13.8 Data Key Examples

OPERATION

hers in the voltage display area.

6. Press and hold A and note that the instrument scrolls through buffer locations in ascending order.

7. Release A, then press and hold v. Note that the in.ss.ent scrolls through buffer locations in descending

8. Press QUlT to return to the normal display.

Example 2: Lk~k~InaementlDeaement to Saoll Through

As discussed previously, the second purpose for A/I is

~for saolliqg through parameter menus, as in the follow-

ing example.

1. Press the WAVEFORM key and note that a bias

waveform type is shown on the front panel display. For

example, the display might show:

BIAS WAVEFORM DC

2. Press and hold the A key and note that you can saoll through bias waveform types.

3. Now press and hold the v key and note that you can scroll through available bias waveforms in the opposite direction.

4. Press QUlT to return to normal display without changing the previously programmed waveform.

5. Press ENTER to return to the normal display with the newly selected waveform in effect.

The examples below will help to clarify data key operation.

Example 1: Using Inaement and Decrement to Access the

Buffer

One purpose of A/V is to scroll through buffer locations

and display data stored there. The following procedure

demonstrates the basic process.

1. Using the MODE key, select the sweep trigger mode.

2. Press MANUAL to trigger a reading sweep.

3. Press BUFFER and select the A/D buffer at the prompt by pressing 0. Note that the BUFFER LED turns on to indicate that you are reading buffer data.

4. The instmment will then show data stored at the first buffer location. A typical display is:

1.8OOOpF 00.11~& +5.1OOV

5. Press the C vs t button to display buffer location num-

Example 3: Programming Single Numeric Parameters

To program a numeric parameter, simply press

PARAMETER and then key in the desired value, as in the

example below.

Using the WAVEFORM key, select a single staircase

WaVefOlTll.

Press the PARAMETER key repeatedly u&l the following message is displayed:

IST BIAS V +CHl.OOO

Now key in the desired voltage with the numeric keys. For example, to program a value of 4V, press: 0 4 0 0

0. Note that the digit affected by a keypress is highlighted on the display.

To complete programming, press the ENTER key. The voltage value wiIl be programmed, and the unit will return to the normal display mode.

3-31

OPERATlON

Example 4: Programming Multiple Parameters when pro*

necesw to press ENTER af& ea?h modification; instead,

you can scroll through the parameter menu, stopping at

each point to make the desired changes. The example

below demonstrates this process by progr

stop, and step times.

1. Use the WAVEFORM key to select a single staircase

waveform.

2. Press PARAMETER and note that the following prompt for start time is displayed:

In this instance, the default time of lmsec is displayed.

3. Key in the desired start time using the numeric keys.

For example, to program a 2.5sec start time, press the following keys: p 2~ 5 0 0.

4. Press the PARAMETER or A key. The unit will now

display the programmed stop time:

Again, the default lmsec value is displayed in this example.

5. Key in the desired value with the numeric keys. For ex-

ample, to program a 5.04secstop time press the following keys: 0 5 0 4 0.

6. Press PARAMETER nor A again to display the pro-

grammed step time, as in the example below:

amming more thsn one parameter, it is not

amming itart;

START TIME +OO.OOl

STOP TIME +OO.OOl

4. Press the + I- key a number of times and note that the

display alternates between a positive and negative value.

Example 6: Demonstrating an INVALID Error Message lf you attempt to program a~psae$er outside the allow-

ed range, the instrument will display the INVALID error message, as in the example below.

1. Press PARAMETER repeatedly until the following message is displayed:

1ST BIAS +05.000

The 5V value is due to Example 3 above.

2. Attempt to program a bias voltage above the allowed

+ 20V value by pressing the following keys in sequence:

30000.

3. Now press ENTER to complete progmmming. Note that

the instrument briefly displays the message below and then returns to the previously programmed parameter:

lNVALlD

4. Press A or V to attempt to scroll to the next p-eter

item. Again, the instrument briefly displays the INVALID error message and returns to the previously pro-

grammed parameter.

STEP TJMJZ +OO.OOl

7. Key in the desired value; for example, to program a

5Omsec step time, press the following keys: 0 0 0 5 0.

8. Press the ENTER key to complete programming of all three values. The unit will then return to normal

display.

Example 5: Using the +I- Key The + I-pokey is used to select positive or negative bias

voltage parameters, as in the following example.

1. Select a single staircase waveform using the WAVEFORM key.

2. Press the PARAMETER key until the following message is displayed:

1ST BIAS V +00X00 ~~~

3. Program a 5V voltage as follows: 0 5 0 0 0.

Example 7: Using ENTER and QUIT The ENTER key is the last step in the parameter or menu

selection process. ln contrast, the QUlT key allows you to cancel a mistake in parameter programming or menu selection w$hout act+ly changing previously programmed values. The example below demonstrates operation of ENTER and QUIT.

1. ~Press the MODE key and note the programmed trigger mode. For example, the display might show:

TRIGGER MODE SWEEP

2. Press MODE again to change the trigger mode.

3. Press ENTER to invoke the trigger mode change.

4. Press MODE and note that the new trigger mode pm-

grammed in steps 2 and 3 is now in effect. For example, if you changed from fie sweep to one-shot mode, the display will show.

TRIGGER MODE 1 SHOT

3-32

3.14.1 Selecting a Bias Waveform

OPERATION

7. Now press MODE again and note that the trigger mode was not changed because you used the QUlT button.

Example 8: Using the - Key to Move Cursor

- can be used during parameter programming to move the cursor. The example below will demonstrate +I& process.

1. Press PARAMETER tid note that the instrument displays the start~time, as in this example:

START TIME +OO.OOl

2. Press the

right.

- key and note that the cursor moves to the Selecting a Waveform

3.14 BIAS VOLTAGE

The following paragraphs contain information on selecting

a bii waveform programming bias waveform parameters, and turning on the bias voltage. Details on waveform definitions, external bias jnput, and bias voltage monitor

Available Waveforms

Bias waveforms available include: DC: any DC level in the range of -20V to +2OV.

Single staircase: stepping either up or down.

Dual staircase: stepping up then down or down then up. Pulse train: step up or down. External: external voltage applied to the BIAS INPUT jack.

Table 3-15 shows the general configuration of these

waveforms. Waveforms and parameters are defined in

detail in paragraph 3.14.4.

To select the required bias waveform, press and hold the

WAVEFORM or AIV key until the desired waveform is

displayed, as summarized in Table 3-15. Press ENTER to

select the displayed waveform. type.

If you wish to return to the previously programmed

waveform, press QUIT instead.

WAVEFORM

PARAMETER

Typical Waveform Uses

Typical uses for the various waveforms include:

1. DC A. One-shot: external time base C-t. B. Sweep: internal time base C-t, or “dumb” C-meter.

2. Single staircase A. One-shot: external time base C-V. B. Sweep: internal’time base C-V.

3. Dud staircase A. One-shot: external time base C-V with hysteresis.

8. Sweep: internal time base C-V with hysteresis.

4. Pulse A. One-shot:~extemal time base C-V, return to default

between points.

B. Sweep: internal time base C-V, retumto default be-

tween points.

5. External A. One-shot: external time base, external bias control. B. Sweep: internal time base, external bias control.

3-33

Table 3-15. Bias Waveform Summary

BIAS WAVEFORM DC Static DC levels

BIAS WAVEFORM PULSE

BIAS WAVEFORM EXT

External Bias Voltage

3.14.2 Programming Waveform Parameters

Parameter Types

Programmable parameters in&de such values as start and

stop hold times, as well as first andlast bias values. Table

3-16 summakes programmable parameters, display

messages, and the allowable range for each parameter.

NOTE

1. All parameters are note programmable for every waveform type. The instrument will prompt only for those parameters which apply to the particular waveform.

Table 3-16 indicates which parameters apply to the various waveforms.

2. The buffer can store a maximum of 450 readings (1,350

at lOOD/sec rate). Programming reading sweeps longer

than this will result in lost data. If more than450 (1,350) readings are programmed (a function of fkst and last voltage, as well as bias step size), only the first 450

(1,350) will be stored in the buffer.

3. The number of readings stored as part of the sweep for

all waveforms except DC and external de stop, and step voltages (see discussion b ef

ends on start,

ow). The numher of readings stored with external and DC waveforms depends on the COUNTparameter (COUNT 5450 or

s1,350).

4. Volta e parameters can be rogr-ed to lmV resolution,& achdy have 5m$ minimum steps. @

3-34

Table 3-16. Programmable Bias Voltage Parameters

STOP TIME STEP TIME ET BIAS V LAST BIAS V BIAS STEP V DEFAULT BIAS V

Description Liiw

Start time* Eg p-:

Fit bias voltage Last bias voltage Step voltage Default bias

lmsec to 65sec lmsec to 65sec lmsec to 65sec

-20v to +2ov

-20v to +2oJ7

-20v to +2ov

lesolution*

lmsec lmsec lmsec

5mv 5mv 5mV 5mv

X c

iticas

:: X

X X X X

Single

‘taircasc

X ::

X X X X

Dud

%llSl

X X X

;

3xtemal

:: X

voltage

COUNT

#Readings per sweep

1 to 450 (1,350 at l,OOO/sec rate:

NOTE: Voltage parameters can be programmed to lmV, but are set in 5mV steps. * Programmed times must be multiplied by 1.024 to obtain actual times.

X Indicates parameter applies to waveform.

5. Bias voltages of -2O.OOOV can be programmed, but the read-back display limit is -19.999V. Buffer data will reflect voltage values above -19.999V, however.

6. Once you have programmed all parameters, press the ENTER key. The instrument will then return to normal display.

6. The unit wiIl display a CONFLICT erzor if you attempt 7. To return to normal display without modifying parato program more than 450 readings per sweep. meters, press QUIT instead of ENTER.

Selecting Parameters

Number of Readings in a Sweep

Select your bias parameters as follows: The number of readings in a sweep for DC and external

waveforms is determined solely by the COUNT parameter.

1. Press and hold WAVEFORM or A (or press the

associated numeric key, as indicated in Table 3-15) to select the desired waveform. For example, for a single

Thus, to control the size of the sweep, you should pro-

am COUNT for the desired number in the range of l-450

1,350 at l,oOO/sec rate).

staircase, the display will show:

BIAS WAVEFORM STAIR

In contrast, the number of readings in the sweep for the staircase or pulse waveforms will depend on the pro-

2. Press ENTER to program the waveform.

3. Press and hold PARAME

TEE or A/l until the readings in a given sweep with a single staircase waveform

gr-ed first and last bias levels, as well as the ste with a maximum of 450. For example, the total num E

size

er of

parameter you wish to program is displayed. For ex- - be computed a.~ fokws: ample, to program start time, the displq will show:

START TIME +OO.OOl

(vz - VP)

+ *

4. Using the number keys, program the desired value. For

example, to program a step delay of O.lsec,~press: 0 0 where: n = number of *e=hgs

1 0 0.

5. Press PARAMETER or A to advance to the next

parameter, then key in the desired value. If ou key m an invalid parameter, the instrument

wd briefly

display the following error message: ~~~~~~~~~~~ ;

(Jf(V, - V,)/Vs is not an integer, add one to the above

Vr = last bias v, = first bias

V, = step bias.

calculation).

INVALID

3-35

OPERATION

Example: Assume that first and last bias values are -5V and +5V respectively, and that the bias step is O.lV. The number of readings in the sweep is:

(+5 - (-5)) +1

II=

“.I

n = 101 readings per sweep

Minimum Voltage Steps Althou h bias voltage parameters can be entered in 1mV

steps, t& actual minimum step size is 5mV due to hardwsxe constraints. The actual bias voltage is calculated as follows:

v,= Lv” _I x5

Where: V, = Actual bias voltage (mv)

V, = Progmnuned bias voltage (mV)

L -1

= -p&e the &,tegei of x,r,/s

The exact configmaiion of internal circuitzy differs depending on whether the internal or external bias source is used, as shown in Figure 3-21(a). Figure 3-21(b) shows an ~~~;o~ent circuit of software implementation of bias

NOTES

1. Pressing ON will abort any active sweep and reset the AID buffer.

2. When external bias is turned o?, and the unit is not triggered, the following will be &played:

W.-V

ENTER

Example: Assume a 1023V voltage is programmed. The

actual bias voltage is:

10,223

v,= L- _I x 5 = 10,22omv

vs = 10.22v

3.14.3 Controlling the Bias Voltage (BIAS ON)

Use the BIAS ON key to turn the bias voltage on or off. The indicator to the right of the ON key shows the state of the bias source. Note that this key controls both internal and external bias sources (when selected). Figure 3-20 shows a flowchart of ON key operation.

WARNING Up to 200V DC may be present at the test OUTPUT jack when the bias is turned on while using

an external bias source.

Figure 3-20. Bias ON Key Operation

3-36

l”%H=

:ME!Lz 3f

VOLTAGE

OPERATION

BIAS

MONITOR

OUTPUT

BIAS

INPUT

s9-

aD’....,.. ~~~ ,,,

MAX

3.9fl

‘“v

-h INTEXT BIAS ON

”

..,

1OOM

Figure 3-21. Bias Switching Network (a) Software Implementation of Bias ON (b)

3.14.4 Bias Waveform and Parameter Definitions

DefinXoi~s for the various bias waveforms and associated parameters are located in Fi applicable, a sepzate de~~%t%?%%3kr?~ wavefoorm and trigger mode combination.

Parameters are further defined as follows: Start Time: The time period, occurring on the f&t bias step,

from the point the instrument is fkst triggered until the

fit step iime.

Stoo Time: The time oeriod after the read& taken dur-

in ihat last bias step before the instrument r&ms to the dsauIt bias voltage.

Step Tie: The time period after a transition to a new bias step before the instrument begins a measurement (except for the, firsts step, which also includes the start time).

First Bias: The initial voItage setting of the bias waveform.

Last Bias: The final voltage setig of the bias waveform.

Step Bias: The incremental change of each step in the bias voltage waveform.

Default Bias: The bias voltage value both before and after

a sweep, or between pulses (pulse train only).

Count: This uarameter sets the number of readinzs Der

sweep for thi DC and external bias waveforms o$y:

3-3j

OPERATlON

NOTES: First Bias: +5v

Last Bias: -5V

1. To program a negative going staircase (or negative &en positive dual staircase) set the first bias more positive than the last bias, and use negative step bias values. For example, to step from +SV to -5V in 1OOmV increments, program the following values:

Step Bias: -O.lV

2. The final step bias value may be smaller than the progmmmed Step Bias, depending on First Bias, Last Bias,

and Step Bias Values.

------

DEFAULT BIAS

- NOTES:

TRIGGER EVENTS

FIRE-T BIAS

1. ONE TRIGGER PER READING IS REQUIRED.

2. NUMBER OF READI NGS IS DETERMINED BY COUNT PARAMETER.

3. BUFFER IS .RESET BY NEXT TRIGGER AFTER COUNT # OF READINGS ARE TAKEN.

:iiF&R

DEFAULT BIAS

-----

3-36

Figure 3-22. DC, One-Shot

DEFAULT WAS

OPERATION

TRIGGER EVENTS

FIRST BIAS

NOTE:

1. UNIT TAKES COUNT PARAMETER NUMBER OF READINGS PER TRIGGER EVENT

2. THE A/D BUFFER IS CLEARED BY A TRIGGER

Figure 3-23. DC, Single Sweep

3-39

OPERATION

TRIGGER EVENTS

1 f + I + 1 t c +

LAST BIAS

DEFAULT BIAS

NOTES

1. ONE TRIGGER PER READING REQUIRED. 2 NEXT TRIGGER AFTER AU STEPS TAKEN RESETS SUFFER.

J‘ k-L

BUF$

DEFAUU BIAS

DEFINITION OF LAST STEP

-LAST VDLTAGE STEP MAY ND7 BE FULL OC A a STEP BIAS

Figure 3-24. Single Staircase, One-Shot

3-40

OPERATION

E z

- DEFAULT BIAS DEFAULT BIAS

FIRST BIAS FIRST BIAS

LA’.3 BIAS LA’.3 BIAS

NOTES:

1. ONE SWEEP PER TRIGGER.

2. A TRIGGER RESETS THE BUFFER.

3. SEE FIGURE 3-5.4 ?t%k LAST STEP DEFINITION.

DEFAULT BIAS DEFAULT BIAS

Figure 3-25. Single Staircase, Sweep

3-41

OPERATION

t t 1 +

7 DEFAULT-El& ,

j FIRST B,AS.$$d

TRIGGER EVENTS

+ 1 t t

LAST BIAS

I.7

r-----J-+

NOTES:

1. ONE TRIGGER PER READING REWIRED.

2. TRIGGER AFTER ALL STEPS TAKEN RESETS BUFFER.

DEFAULT BIAS

1 FlRST BlA$

Figure 3-26. Dual Staircase, One-Shot

3-42

DEFAULT BIAS

OPERATION

NOTES:

1. ONE TRIGGER PER SWEEP REQUIRED.

2. TRIGGER RESETS BUFFER.

Figure 3-27. Dual Staircase, Single Sweep

3-43

OPERATION

BIAS

NOTES:

1. ONE TRIGGER PER READING REQUIRED.

2 FlRST TRIGGER AFTER LAST STEP RESETS BUFFER.

Figure i-28. bulse Train, One-Shot

3-44

OPERATION

TRIGGER

1 I

FIRST BIAS

‘7 STEP BIAS

LAST BIAS

DEFAULT BIAS

TRIGGER

DEFAULT BIA

NOTES:

1. ONE SWEEP PER TRIGGER

2. BUFFER IS RESET BY TRIGGER.

Figure 3-29. Pulse Train, Single Sweep

345

OPERATION

NOTE.9

1. COUNT # OF READINGS ARE STORED IN BUFFER

2. FIRST CYCLE ONLY INCLUDES START TIME.

3. LAST CYCLE ONLY INCLUDES STOP TIME.

4. FIRST TRIGGER AFTER COUNT # READINGS RESETS THE BUFFER.

5. WAVEFORM SHOWN DEPICTS EXTERNAL TRIGGER OUTPUT - NOT BIAS WAVEFORM,

Figure 3-30. External, One-Shot

3-46

Keithley 590 CV Instruction Manual

Specifications and Main Features

Frequently Asked Questions

User Manual