Keithley 2601, 2636, 2602, 2611, 2612 Reference Manual
...
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Series 2600 System SourceMeter
®
Reference Manual
2600S-901-01 Rev. C / January 2008
A GREATER MEASURE OF CONFIDENCE
WARRANTY
Keithley Instruments, Inc. warrants this product to be free from defects in material and workmanship for a period of
one (1) year from date of shipment.
Keithley Instruments, Inc. warrants the following items for 90 days from the date of shipment: probes, cables,
software, rechargeable batteries, diskettes, and documentation.
During the warranty period, Keithley Instruments will, at its option, either repair or replace any product that proves
to be defective.
To exercise this warranty, write or call your local Keithley Instruments representative, or contact
Keithley Instruments headquarters in Cleveland, Ohio. You will be given prompt assistance and return instructions.
Send the product, transportation prepaid, to the indicated service facility. Repairs will be made and the product
returned, transportation prepaid. Repaired or replaced products are warranted for the balance of the original
warranty period, or at least 90 days.
LIMITATION OF WARRANTY
This warranty does not apply to defects resulting from product modification without Keithley Instruments’ express
written consent, or misuse of any product or part. This warranty also does not apply to fuses, software,
non-rechargeable batteries, damage from battery leakage, or problems arising from normal wear or failure to follow
instructions.
THIS WARRANTY IS IN LIEU OF ALL OTHER WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING ANY
IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE. THE REMEDIES
PROVIDED HEREIN ARE BUYER’S SOLE AND EXCLUSIVE REMEDIES.
NEITHER KEITHLEY INSTRUMENTS, INC. NOR ANY OF ITS EMPLOYEES SHALL BE LIABLE FOR ANY
DIRECT, INDIRECT, SPECIAL, INCIDENTAL, OR CONSEQUENTIAL DAMAGES ARISING OUT OF THE USE
OF ITS INSTRUMENTS AND SOFTWARE, EVEN IF KEITHLEY INSTRUMENTS, INC. HAS BEEN ADVISED IN
ADVANCE OF THE POSSIBILITY OF SUCH DAMAGES. SUCH EXCLUDED DAMAGES SHALL INCLUDE, BUT
ARE NOT LIMITED TO: COST OF REMOVAL AND INSTALLATION, LOSSES SUSTAINED AS THE RESULT OF
INJURY TO ANY PERSON, OR DAMAGE TO PROPERTY.
A G R E A T E R M E A S U R E O F C O N F I D E N C E
Keithley Instruments, Inc.
Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139
440-248-0400 • Fax: 440-248-6168 • 1-888-KEITHLEY (1-888-534-8453) • www.keithley.com
3/07
Series 2600
System SourceMeter® Instruments
Reference Manual
©2008, Keithley Instruments, Inc.
All rights reserved.
Any unauthorized reproduction, photocopy, or use the information herein, in whole or in part without the prior written
approval of Keithley Instruments, Inc. is strictly prohibited.
TSP, TSP-Link, and TSP-Net are trademarks of Keithley Instruments, Inc.
All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments, Inc.
Other brand names are trademarks or registered trademarks of their respective holders
Cleveland, Ohio, U.S.A.
Document Number: 2600S-901-01 Rev. C / January 2008
Manual Print History Series 2600 System SourceMeter® Instruments Reference Manual
Manual Print History
The print history shown below lists the printing dates of all Revisions and Addenda created for this
manual. The Revision Level letter increases alphabetically as the manual undergoes subsequent
updates. Addenda, which are released between Revisions, contain important change information that the
user should incorporate immediately into the manual. Addenda are numbered sequentially. When a new
Revision is created, all Addenda associated with the previous Revision of the manual are incorporated
into the new Revision of the manual. Each new Revision includes a revised copy of this print history page.
Revision A (Document Number 2600S-901-01).....................................................May 2006
Revision B (Document Number 2600S-901-01)..........................................September 2007
Revision C (Document Number 2600S-901-01) ..............................................January 2008
All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments, Inc.
Other brand names are trademarks or registered trademarks of their respective holders.
2600S-901-01 Rev. C / January 2008
The following safety precautions should be observed before using this product and any associated instrumentation. Although some
instruments and accessories would normally be used with non-hazardous voltages, there are situations where hazardous conditions may
be present.
This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required
to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using the product. Refer
to the user documentation for complete product specifications.
If the product is used in a manner not specified, the protection provided by the product warranty may be impaired.
The types of product users are:
Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the equipment is
operated within its specifications and operating limits, and for ensuring that operators are adequately trained.
Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the instrument.
They must be protected from electric shock and contact with hazardous live circuits.
Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line voltage or
replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures explicitly state if the
operator may perform them. Otherwise, they should be performed only by service personnel.
Safety Precautions
Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained service
personnel may perform installation and service procedures.
Keithley Instruments products are designed for use with electrical signals that are rated Measurement Category I and Measurement
Category II, as described in the International Electrotechnical Commission (IEC) Standard IEC 60664. Most measurement, control, and
data I/O signals are Measurement Category I and must not be directly connected to mains voltage or to voltage sources with high transient
over-voltages. Measurement Category II connections require protection for high transient over-voltages often associated with local AC
mains connections. Assume all measurement, control, and data I/O connections are for connection to Category I sources unless otherwise
marked or described in the user documentation.
Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test fixtures. The
American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than 30V RMS, 42.4V peak,
or 60VDC are present. A good safety practice is to expect that hazardous voltage is present in any unknown circuit before measuring.
Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators are
prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential human contact.
Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If the circuit is capable of
operating at or above 1000V, no conductive part of the circuit may be exposed.
Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance-limited sources. NEVER
connect switching cards directly to AC mains. When connecting sources to switching cards, install protective devices to limit fault current
and voltage to the card.
Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the connecting
cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.
11/ 07
When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input power
disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.
For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under test.
ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting cables or jumpers,
installing or removing switching cards, or making internal changes, such as installing or removing jumpers.
Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth) ground. Always
make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the voltage being measured.
The instrument and accessories must be used in accordance with its specifications and operating instructions, or the safety of the
equipment may be impaired.
Do not exceed the maximum signal levels of the instruments and accessories, as defined in the specifications and operating information,
and as shown on the instrument or test fixture panels, or switching card.
When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard.
Chassis connections must only be used as shield connections for measuring circuits, NOT as safety earth ground connections.
If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use of a lid
interlock.
If a screw is present, connect it to safety earth ground using the wire recommended in the user documentation.
The ! symbol on an instrument indicates that the user should refer to the operating instructions located in the user documentation.
The symbol on an instrument shows that it can source or measure 1000V or more, including the combined effect of normal and
common mode voltages. Use standard safety precautions to avoid personal contact with these voltages.
The symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns.
The symbol indicates a connection terminal to the equipment frame.
If this symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be properly
disposed of according to federal, state, and local laws.
The WARNING heading in the user documentation explains dangers that might result in personal injury or death. Always read the
associated information very carefully before performing the indicated procedure.
The CAUTION heading in the user documentation explains hazards that could damage the instrument. Such damage may invalidate the
warranty.
Instrumentation and accessories shall not be connected to humans.
Before performing any maintenance, disconnect the line cord and all test cables.
To maintain protection from electric shock and fire, replacement components in mains circuits - including the power transformer, test leads,
and input jacks - must be purchased from Keithley Instruments. Standard fuses with applicable national safety approvals may be used if
the rating and type are the same. Other components that are not safety-related may be purchased from other suppliers as long as they
are equivalent to the original component (note that selected parts should be purchased only through Keithley Instruments to maintain
accuracy and functionality of the product). If you are unsure about the applicability of a replacement component, call a Keithley Instruments
office for information.
To clean an instrument, use a damp cloth or mild, water-based cleaner. Clean the exterior of the instrument only. Do not apply cleaner
directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with no case or chassis
(e.g., a data acquisition board for installation into a computer) should never require cleaning if handled according to instructions. If the
board becomes contaminated and operation is affected, the board should be returned to the factory for proper cleaning/servicing.
Table of Contents
1 Getting Started ....................................................................................... 1-1
Introduction................................................................................................. 1-2
Capabilities and features...................................................................... 1-2
Organization of manual sections.......................................................... 1-3
General information .................................................................................... 1-3
Warranty information............................................................................ 1-3
Contact information .............................................................................. 1-3
Safety symbols and terms.................................................................... 1-3
Unpacking and inspection.................................................................... 1-3
Options and accessories...................................................................... 1-4
User’s and Reference manuals............................................................ 1-5
Front and rear panel familiarization ............................................................ 1-6
Front panel summaries......................................................................... 1-6
Rear panel summaries ......................................................................... 1-9
Cooling vents............................................................................................ 1-13
Power-up .................................................................................................. 1-14
Line power connection ....................................................................... 1-14
Power-up sequence ........................................................................... 1-15
Beeper................................................................................................ 1-15
Display modes .......................................................................................... 1-16
Editing controls ......................................................................................... 1-17
Source and compliance editing .......................................................... 1-17
Menu navigation................................................................................. 1-18
Menu types......................................................................................... 1-19
Interface selection..................................................................................... 1-20
To select the GPIB interface............................................................... 1-21
To select the RS-232 interface ........................................................... 1-21
Error and status messages....................................................................... 1-21
Default settings......................................................................................... 1-21
Front panel setups.............................................................................. 1-21
Remote operation setups ................................................................... 1-22
Remote programming............................................................................... 1-24
Requesting readings .......................................................................... 1-24
Requesting command settings........................................................... 1-24
2 TSP Programming ................................................................................. 2-1
Introduction................................................................................................. 2-3
Test Script Processor (TSP)................................................................. 2-3
Run-time environment .......................................................................... 2-3
Queries................................................................................................. 2-4
Scripts .................................................................................................. 2-4
Named scripts ...................................................................................... 2-4
Functions.............................................................................................. 2-5
Scripts that create functions................................................................. 2-5
Programming overview............................................................................... 2-6
What is a chunk?.................................................................................. 2-6
What is a script?................................................................................... 2-6
Run-time environment .......................................................................... 2-7
Non-volatile memory ............................................................................ 2-7
TSP programming levels...................................................................... 2-8
Programming model for scripts ............................................................ 2-8
Installing the Test Script Builder software ................................................... 2-9
System connections.................................................................................... 2-9
Table of Contents Series 2600 System SourceMeter® Instruments Reference Manual
GPIB ..................................................................................................... 2-9
RS-232 ............................................................................................... 2-10
Using Test Script Builder ........................................................................... 2-11
Project Navigator ................................................................................ 2-11
Script Editor ........................................................................................ 2-11
Programming Interaction .................................................................... 2-11
Starting Test Script Builder.................................................................. 2-12
Opening communications................................................................... 2-13
Creating and modifying a script .......................................................... 2-15
Script launch configuration ................................................................. 2-19
Launching a script .............................................................................. 2-22
Running a TSP file.............................................................................. 2-23
Retrieving scripts from the Series 2600.............................................. 2-23
Instrument Console ............................................................................ 2-24
File management tasks....................................................................... 2-30
Using the expanded system ...................................................................... 2-33
Sending commands and statements .................................................. 2-33
Source-measure voltage and current ................................................. 2-33
Read and write to Digital I/O port........................................................ 2-33
Display user-defined messages ......................................................... 2-34
User scripts ............................................................................................... 2-34
Script examples .................................................................................. 2-34
Creating a user script ......................................................................... 2-36
Saving a user script ............................................................................ 2-37
Running a user script.......................................................................... 2-38
Modifying a user script........................................................................ 2-40
Script management ............................................................................ 2-40
Factory scripts........................................................................................... 2-42
Running a factory script ...................................................................... 2-42
Modifying a factory script.................................................................... 2-42
Differences: Remote versus local state .............................................. 2-43
Memory considerations for the runtime environment.......................... 2-44
Test Script Language (TSL) reference ...................................................... 2-45
Introduction......................................................................................... 2-45
Reserved words.................................................................................. 2-45
Variables and types ............................................................................ 2-45
Operators............................................................................................ 2-46
Functions ............................................................................................ 2-46
Tables/arrays ...................................................................................... 2-47
Precedence ........................................................................................ 2-48
Logical operators ................................................................................ 2-48
Concatenation .................................................................................... 2-49
Branching ........................................................................................... 2-50
Loop control........................................................................................ 2-51
Standard libraries................................................................................ 2-53
3 DUT Test Connections .......................................................................... 3-1
Input/output connectors............................................................................... 3-2
Input/output LO and chassis ground ........................................................... 3-3
Sensing methods ........................................................................................ 3-5
2-wire local sensing .............................................................................. 3-6
4-wire remote sensing .......................................................................... 3-7
Sense mode selection .......................................................................... 3-8
Contact check connections ......................................................................... 3-8
Multiple SMU connections......................................................................... 3-10
Guarding and shielding ............................................................................. 3-12
Guarding............................................................................................. 3-12
Noise shield ........................................................................................ 3-13
Safety shield ....................................................................................... 3-16
Using shielding and guarding together............................................... 3-18
Test fixture................................................................................................. 3-19
Floating a SMU ......................................................................................... 3-20
Output-off states........................................................................................ 3-23
Selecting the Output-off state ............................................................. 3-23
ii 2600S-901-01 Rev. C / January 2008
Series 2600 System SourceMeter® Instruments Reference Manual Table of Contents
4 Basic Operation...................................................................................... 4-1
Overview ..................................................................................................... 4-2
Operation overview ..................................................................................... 4-2
Source-measure capabilities ................................................................ 4-2
Compliance limit ................................................................................... 4-3
Setting the compliance limit.................................................................. 4-4
Basic circuit configurations ................................................................... 4-5
Operation considerations ............................................................................ 4-6
Warm-up ............................................................................................... 4-6
Auto zero .............................................................................................. 4-6
NPLC caching....................................................................................... 4-6
Basic source-measure procedure ............................................................... 4-8
Front panel source-measure procedure ............................................... 4-8
Remote source-measure procedure..................................................... 4-9
Measure only............................................................................................. 4-11
Sink operation ........................................................................................... 4-12
Ohms measurements ................................................................................ 4-12
Ohms calculations .............................................................................. 4-12
Ohms ranging ..................................................................................... 4-12
Basic ohms measurement procedure................................................. 4-12
Ohms sensing..................................................................................... 4-13
Sense selection .................................................................................. 4-14
Remote ohms programming ............................................................... 4-15
Power measurements ............................................................................... 4-16
Power calculations.............................................................................. 4-16
Basic power measurement procedure................................................ 4-16
Remote power programming .............................................................. 4-16
Contact check measurements................................................................... 4-17
Overview............................................................................................. 4-17
Contact check commands .................................................................. 4-18
Contact check programming example ................................................ 4-19
5 Sweep Operation.................................................................................... 5-1
Overview ..................................................................................................... 5-2
Section overview................................................................................... 5-2
Sweep overview.................................................................................... 5-2
Sweep characteristics ................................................................................. 5-3
Linear staircase sweeps ....................................................................... 5-3
Logarithmic staircase sweeps............................................................... 5-4
Pulse sweeps........................................................................................ 5-6
Custom (list) sweeps ............................................................................ 5-6
Sweep measurement storage............................................................... 5-7
Sweep functions.......................................................................................... 5-7
Staircase sweep functions .................................................................... 5-8
Pulse sweep functions.......................................................................... 5-8
Custom sweep functions....................................................................... 5-9
Running sweeps.......................................................................................... 5-9
Front panel............................................................................................ 5-9
Sweep programming examples ............................................................ 5-9
6 Range, Digits, Speed, Rel, and Filters .............................................. 6-1
Overview ..................................................................................................... 6-2
Range.......................................................................................................... 6-2
Available ranges ................................................................................... 6-2
Maximum source values and readings ................................................. 6-3
Ranging limitations ............................................................................... 6-3
Manual ranging..................................................................................... 6-3
Auto ranging ......................................................................................... 6-3
Low range limits.................................................................................... 6-3
Range considerations........................................................................... 6-4
Range programming............................................................................. 6-4
Digits ........................................................................................................... 6-6
Setting display resolution...................................................................... 6-6
Remote digits programming.................................................................. 6-6
2600S-901-01 Rev. C / January 2008 iii
Table of Contents Series 2600 System SourceMeter® Instruments Reference Manual
Speed .......................................................................................................... 6-6
Setting speed........................................................................................ 6-7
Remote speed programming ................................................................ 6-7
Rel............................................................................................................... 6-8
Front panel rel....................................................................................... 6-8
Remote rel programming...................................................................... 6-9
Filters ........................................................................................................ 6-10
Filter types .......................................................................................... 6-10
Response time considerations ........................................................... 6-10
Front panel filter control...................................................................... 6-10
Remote filter programming ................................................................. 6-13
7 Buffer (Data Store) ................................................................................. 7-1
Overview ..................................................................................................... 7-2
Data store overview .................................................................................... 7-2
Front panel data store................................................................................. 7-2
Buffer configuration............................................................................... 7-2
Storing readings.................................................................................... 7-3
Recalling readings ................................................................................ 7-3
Remote data store....................................................................................... 7-4
Data store commands........................................................................... 7-4
Reading buffers .................................................................................... 7-5
Time and date values ........................................................................... 7-7
Buffer status.......................................................................................... 7-8
Dynamically allocated buffers............................................................... 7-8
Buffer programming examples.............................................................. 7-9
8 Source-Measure Concepts .................................................................. 8-1
Overview ..................................................................................................... 8-2
Compliance limit.......................................................................................... 8-2
Maximum compliance........................................................................... 8-2
Compliance principles .......................................................................... 8-3
Sweep waveforms....................................................................................... 8-3
Staircase sweeps.................................................................................. 8-3
Pulse sweeps........................................................................................ 8-4
Overheating protection................................................................................ 8-4
Power equations to avoid overheating ................................................. 8-4
Operating boundaries.................................................................................. 8-7
Source or sink....................................................................................... 8-7
Continuous power operating boundaries.............................................. 8-8
I-Source operating boundaries ............................................................. 8-9
V-Source operating boundaries .......................................................... 8-13
Source I measure I, source V measure V........................................... 8-16
Basic circuit configurations........................................................................ 8-16
Source I .............................................................................................. 8-16
Source V............................................................................................. 8-17
Measure only (V or I) .......................................................................... 8-17
Contact check..................................................................................... 8-18
Guard ........................................................................................................ 8-19
Guard overview .................................................................................. 8-19
Guard connections ............................................................................. 8-20
Pulse concepts.......................................................................................... 8-22
Pulse period........................................................................................ 8-22
Pulse rise and fall times...................................................................... 8-22
Pulse duty cycle.................................................................................. 8-23
Settling time considerations ...................................................................... 8-23
Measurement Settling Time Considerations....................................... 8-23
Reduction in gain-bandwidth .............................................................. 8-24
In this section: ............................................................................................. 9-1
9 System Expansion (TSP-Link) ............................................................ 9-1
Overview ..................................................................................................... 9-2
Master and Slaves................................................................................ 9-2
System configurations .......................................................................... 9-2
iv 2600S-901-01 Rev. C / January 2008
Series 2600 System SourceMeter® Instruments Reference Manual Table of Contents
Connections ................................................................................................ 9-2
Initialization ................................................................................................. 9-3
Assigning node numbers ...................................................................... 9-3
Resetting the TSP-Link......................................................................... 9-4
Using the expanded system ........................................................................ 9-5
Accessing nodes................................................................................... 9-5
System behavior ................................................................................... 9-5
Triggering with TSP-Link ...................................................................... 9-6
TSP advanced features............................................................................... 9-6
Using groups to manage nodes on the TSP-Link network ................... 9-9
Running parallel test scripts................................................................ 9-10
Using the data queue for real-time communication............................ 9-11
Copying test scripts across the TSP-Link network ............................. 9-12
Removing stale values from the reading buffer .................................. 9-12
10 Digital I/O and Triggering ................................................................... 10-1
Overview ................................................................................................... 10-2
Digital I/O port ........................................................................................... 10-2
Port configuration................................................................................ 10-2
Digital I/O configuration ...................................................................... 10-3
Controlling digital I/O lines.................................................................. 10-4
Output Enable (Models 2601/2602) .......................................................... 10-7
Overview............................................................................................. 10-7
Operation............................................................................................ 10-7
Front panel control of Output Enable.................................................. 10-8
Remote control of Output Enable ....................................................... 10-8
Interlock (Models 2612/2612/2635/2636).................................................. 10-8
Overview............................................................................................. 10-8
Operation............................................................................................ 10-8
TSP-Link Synchronization lines .............................................................. 10-10
Connecting to TSP-Link.................................................................... 10-10
Digital I/O....................................................................................... 10-10
Remote TSP-Link synchronization line commands .......................... 10-10
Triggering ................................................................................................ 10-12
Triggering types................................................................................ 10-12
Measurement triggering.................................................................... 10-12
Front panel triggering........................................................................ 10-13
Remote triggering ............................................................................. 10-14
Hardware trigger modes.......................................................................... 10-15
Understanding synchronous triggering modes ................................. 10-20
11 Communications Interfaces .............................................................. 11 -1
Overview ................................................................................................... 11-2
Selecting an interface................................................................................ 11 -2
GPIB operation.......................................................................................... 11-2
GPIB standards .................................................................................. 11-2
GPIB connections............................................................................... 11-2
Primary address.................................................................................. 11-4
Terminator........................................................................................... 11 -5
General bus commands............................................................................ 11-6
REN (remote enable).......................................................................... 11-6
IFC (interface clear)............................................................................ 11-6
LLO (local lockout).............................................................................. 11-6
GTL (go to local) ................................................................................. 11-6
DCL (device clear).............................................................................. 11-6
SDC (selective device clear)............................................................... 11- 7
GET (group execute trigger)............................................................... 11 -7
SPE, SPD (serial polling).................................................................... 11-7
Front panel GPIB operation ...................................................................... 11-7
Error and status messages................................................................. 11 -7
GPIB status indicators ........................................................................ 11-7
LOCAL key ......................................................................................... 11-8
RS-232 interface operation ....................................................................... 11-8
2600S-901-01 Rev. C / January 2008 v
Table of Contents Series 2600 System SourceMeter® Instruments Reference Manual
Setting RS-232 interface parameters ................................................. 11-8
Sending and receiving data................................................................ 11 -9
Terminator........................................................................................... 11 -9
Baud rate ............................................................................................ 11 -9
Data bits and parity ........................................................................... 11-10
Flow control (signal handshaking) .................................................... 11-10
RS-232 connections ......................................................................... 11-11
Error messages ................................................................................ 11-11
12 Instrument Control Library ................................................................ 12-1
Command programming notes.................................................................. 12-2
Conventions........................................................................................ 12-2
Functions and attributes ..................................................................... 12-3
TSP-Link nodes .................................................................................. 12-4
Logical instruments............................................................................. 12-5
Reading buffers .................................................................................. 12-5
Time and date values ......................................................................... 12-7
ICL functions and attributes ...................................................................... 12-8
data queue functions ........................................................................ 12-15
delay function ................................................................................... 12-17
digio functions and attributes............................................................ 12-17
display functions and attributes ........................................................ 12-23
errorqueue functions and attribute.................................................... 12-35
exit function ...................................................................................... 12-36
format attributes................................................................................ 12-36
gpib attribute..................................................................................... 12-39
localnode attribute ............................................................................ 12-39
makegetter functions ........................................................................ 12-42
printbuffer and printnumber functions............................................... 12-43
reset function.................................................................................... 12-45
serial functions and attributes........................................................... 12-45
setup functions and attribute ............................................................ 12-48
smuX functions and attributes .......................................................... 12-48
status function and attributes .................................................................. 12-76
Status register sets ........................................................................... 12-76
Status byte and SRQ ........................................................................ 12-76
timer functions....................................................................................... 12-108
trigger functions..................................................................................... 12-109
tsplink function and attributes................................................................ 12-110
userstring functions ............................................................................... 12-116
waitcomplete function............................................................................ 12-118
13 Factory Scripts ..................................................................................... 13-1
Introduction ............................................................................................... 13-2
Factory script............................................................................................. 13-2
KIGeneral ........................................................................................... 13-2
KIPulse ............................................................................................. 13-12
Advanced features for Models 2635 and 2636 ....................................... 13-13
Variable off time between pulses in a pulse train.............................. 13-13
Simultaneous IV measurement during pulse.................................... 13-13
Additional hardware triggering parameters....................................... 13-14
Flash firmware upgrade .......................................................................... 13-35
14 Display Operations .............................................................................. 14-1
Display functions and attributes ................................................................ 14-2
Display features ........................................................................................ 14-2
Display screen .................................................................................... 14-2
Measurement functions ...................................................................... 14-3
Display resolution ............................................................................... 14-3
Display messages..................................................................................... 14-4
Clearing the display ............................................................................ 14-4
Cursor position ................................................................................... 14-4
Displaying text messages................................................................... 14-5
Input prompting ......................................................................................... 14-7
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Series 2600 System SourceMeter® Instruments Reference Manual Table of Contents
Menu................................................................................................... 14-7
Parameter value prompting ................................................................ 14-8
Annunciators ............................................................................................. 14-9
LOCAL lockout ........................................................................................ 14-10
Load test menu ....................................................................................... 14-10
Saving a user script .......................................................................... 14-11
Adding USER TESTS menu entries ................................................. 14-11
Deleting USER TESTS menu entries ............................................... 14-12
Running a test from the front panel .................................................. 14-12
Display triggering .................................................................................... 14-12
Key-press codes ..................................................................................... 14-13
Sending keycodes ............................................................................ 14-13
Capturing key-press codes ............................................................... 14-13
15 Performance Verification.................................................................... 15-1
Introduction ............................................................................................... 15-2
Verification test requirements.................................................................... 15-2
Environmental conditions.................................................................... 15-2
Warm-up period .................................................................................. 15-2
Line power .......................................................................................... 15-3
Recommended test equipment........................................................... 15-3
Verification limits ................................................................................. 15-3
Restoring factory defaults ......................................................................... 15-4
Performing the verification test procedures............................................... 15-5
Test summary ..................................................................................... 15-5
Test considerations ............................................................................. 15-5
Setting the source range and output value......................................... 15-5
Setting the measurement range ......................................................... 15-6
Output voltage accuracy ........................................................................... 15-6
Voltage measurement accuracy................................................................ 15-8
Output current accuracy............................................................................ 15-9
Series 2600 output current accuracy 100nA and higher..................... 15-9
Model 2635/2636 output current accuracy 1nA to 100nA ranges..... 15-11
Current measurement accuracy.............................................................. 15-14
Series 2600 current measurement accuracy 100nA and higher....... 15-14
Model 2635/2636 current measurement accuracy
100pA to 100nA ranges.................................................................... 15-15
16 Calibration.............................................................................................. 16-1
Introduction ............................................................................................... 16-2
Environmental conditions.......................................................................... 16-2
Temperature and relative humidity...................................................... 16-2
Warm-up period .................................................................................. 16-2
Line power .......................................................................................... 16-2
Calibration considerations......................................................................... 16-2
Calibration cycle ................................................................................. 16-3
Recommended calibration equipment................................................ 16-3
Calibration errors ................................................................................ 16-5
Calibration ................................................................................................. 16-5
Calibration steps................................................................................. 16-5
Calibration commands........................................................................ 16-7
Calibration procedure ......................................................................... 16-8
17 Routine Maintenance .......................................................................... 17-1
Introduction ............................................................................................... 17-2
Line fuse replacement............................................................................... 17-2
Front panel tests........................................................................................ 17-3
Keys test............................................................................................. 17-3
Display Patterns test........................................................................... 17-3
2600S-901-01 Rev. C / January 2008 vii
Table of Contents Series 2600 System SourceMeter® Instruments Reference Manual
A Specifications ........................................................................................ A-1
B Error and Status Messages ................................................................ B-1
Introduction ................................................................................................ B-2
Error summary ........................................................................................... B-2
Error effects on scripts ............................................................................... B-2
Reading errors ........................................................................................... B-2
C Common Commands ........................................................................... C-1
Common commands.................................................................................. C-2
Command summary ............................................................................ C-2
Script command equivalents................................................................ C-2
Command reference............................................................................ C-3
D Status Model........................................................................................... D-1
Overview .................................................................................................... D-2
Status byte and SRQ ........................................................................... D-2
Status register sets .............................................................................. D-2
Queues ................................................................................................ D-2
Status function summary ..................................................................... D-8
Clearing registers and queues ................................................................... D-8
Programming and reading registers........................................................... D-9
Programming enable and transition registers...................................... D-9
Reading registers .............................................................................. D-10
Status byte and service request (SRQ).................................................... D-10
Status byte register............................................................................ D-10
Service request enable register......................................................... D-12
Serial polling and SRQ ...................................................................... D-12
SPE, SPD (serial polling)................................................................... D-12
Status byte and service request commands...................................... D-12
Enable and transition registers .......................................................... D-13
Controlling node and SRQ enable registers ...................................... D-13
Status register sets................................................................................... D-15
System Summary Event Registers .................................................... D-15
Standard Event Register.................................................................... D-16
Operation Event Registers ................................................................ D-18
Measurement Event Registers .......................................................... D-24
Register programming example......................................................... D-27
Queues..................................................................................................... D-27
Output queue..................................................................................... D-27
Error queue........................................................................................ D-28
TSP-Link system status ........................................................................... D-28
Status model configuration example.................................................. D-28
E Speed Specification Test Conditions ............................................... E-1
Introduction ................................................................................................ E-2
Test system used ....................................................................................... E-2
Overview .................................................................................................... E-2
Sweep Operation Rates ...................................................................... E-2
Single Measurement Rates ................................................................. E-3
Function and Range Change Rates .................................................... E-3
Command Processing ......................................................................... E-3
Sweep Operation Rates............................................................................. E-3
Digital I/O handshaking:....................................................................... E-4
Measure to Memory............................................................................. E-4
Measure to GPIB ................................................................................. E-5
Source Measure to Memory ................................................................ E-5
Source Measure to GPIB..................................................................... E-5
Source Measure Pass/Fail to Memory................................................. E-5
Source Measure Pass/Fail to GPIB..................................................... E-5
Single Measurement Rates........................................................................ E-5
Measure to GPIB ................................................................................. E-6
Source Measure to GPIB..................................................................... E-6
viii 2600S-901-01 Rev. C / January 2008
Series 2600 System SourceMeter® Instruments Reference Manual Table of Contents
Source Measure Pass/Fail to GPIB ..................................................... E-6
Function/ Range Change Rates................................................................. E-6
Source Range Change Rate................................................................ E-7
Measure Range Change Rate............................................................. E-7
Function Change Rate......................................................................... E-7
Command Processing................................................................................ E-7
F Display Character Codes .................................................................... F-1
Introduction ................................................................................................ F-2
Display character dot patterns............................................................. F-5
2600S-901-01 Rev. C / January 2008 ix
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x 2600S-901-01 Rev. C / January 2008
List of Figures
Section Figure Title Page
1 Figure 1-1 Models 2601, 2611, 2602, 2612, 2635, and 2636 front panels...... 1-6
1 Figure 1-2 Models 2601/2611 and 2602/2612 rear panels ............................. 1-9
1 Figure 1-3 Models 2635/2636 rear panels ................................................. 1-11
1 Figure 1-4 Display modes ............................................................................. 1-16
2 Figure 2-1 Script example............................................................................... 2-7
2 Figure 2-2 Programming model for scripts...................................................... 2-9
2 Figure 2-3 GPIB cable................................................................................... 2-10
2 Figure 2-4 RS-232 cable (straight-through) .................................................. 2-10
2 Figure 2-5 Test Script Builder (example)....................................................... 2-12
2 Figure 2-6 Opening and closing communications......................................... 2-14
2 Figure 2-7 Creating and modifying a script using the Test Script Builder...... 2-15
2 Figure 2-8 Creating a project folder .............................................................. 2-16
2 Figure 2-9 Saving a script in the Test Script Builder ..................................... 2-17
2 Figure 2-10 Creating a new script file ............................................................. 2-18
2 Figure 2-11 Renaming a project folder and/or script file ................................. 2-19
2 Figure 2-12 Changing a launch configuration ................................................. 2-19
2 Figure 2-13 Opening the Run dialog box (launch configuration)..................... 2-20
2 Figure 2-14 Run dialog box (Script Attributes tab).......................................... 2-22
2 Figure 2-15 Relaunching a script from the Test Script Builder toolbar ............ 2-22
2 Figure 2-16 Re-launching a script from the Test Script Builder toolbar........... 2-23
2 Figure 2-17 Importing a script from memory of the Series 2600..................... 2-24
2 Instrument Console icons ............................................................ 2-25
2 Figure 2-18 Programming interaction tabs: Problems, Tasks and Command
Help ............................................................................................. 2-28
2 Figure 2-19 Programming interaction tabs: Language Help,
Bookmarks, Browser View........................................................... 2-29
2 Figure 2-20 Workspace Launcher and Select Workspace Directory............... 2-31
2 Figure 2-21 Importing a project from another workspace folder ..................... 2-32
2 Figure 2-22 Deleting a project......................................................................... 2-33
3 Figure 3-1 2602/2612 input/output connectors ............................................... 3-3
3 Figure 3-2 Model 2636 input/output connectors.............................................. 3-3
3 Figure 3-3 Model 2602/2612 input/output LO and chassis ground terminals.. 3-4
3 Figure 3-4 Model 2602/2612 Low-Noise Chassis Ground Banana
Jack and Chassis Screw................................................................ 3-5
3 Figure 3-5 Model 2602/2612 two-wire connections (local sensing)................ 3-6
3 Figure 3-6 Model 2602/2612 four-wire connections (remote sensing)............ 3-7
3 Figure 3-7 Contact check connections............................................................ 3-9
3 Figure 3-8 Model 2602/2612 two SMUs connected to a 3-terminal
device (local sensing) .................................................................. 3-10
3 Figure 3-9 Three SMUs connected to a 3-terminal device........................... 3-11
3 Figure 3-10 Models 2602 and 2612 high-impedance guarding....................... 3-12
3 Figure 3-11 Model 2636 high-impedance guarding (floating) ......................... 3-13
3 Figure 3-12 Model 2636 High-impedance guarding (non-floating).................. 3-13
3 Figure 3-13 Models 2602 and 2612 noise shield ............................................ 3-14
List of Figures Series 2600 System SourceMeter® Instruments Reference Manual
3 Figure 3-14 Model 2636 noise shield (non-floating) ....................................... 3-15
3 Figure 3-15 Model 2636 noise shield (floating) .............................................. 3-15
3 Figure 3-16 Safety shield for hazardous voltage using two
2601/2602 channels (>42V)......................................................... 3-16
3 Figure 3-17 Model 2601/2602-1 connections for test circuit shown in
Figure 3-16................................................................................... 3-16
3 Figure 3-18 Safety shield for Models 2611/2612/2635/2636 hazardous voltage
(200V maximum).......................................................................... 3-17
3 Figure 3-19 Model 2601/2602-1 connections for test circuit shown in
Figure 3-18................................................................................... 3-17
3 Figure 3-20 Model 2636 connections for test circuit shown in Figure 3-18 ..... 3-18
3 Figure 3-21 Model 2601/2602-1 connections for noise shield, safety shield,
and guarding ................................................................................ 3-18
3 Figure 3-22 Model 2636 connections for noise shield, safety shield,
and guarding ................................................................................ 3-19
3 Figure 3-23 Floating the Series 2600 .............................................................. 3-21
3 Figure 3-24 Model 2601/2602-1 SMU connections for the floating
configuration shown in Figure 3-23.............................................. 3-22
4 Figure 4-1 Fundamental source measure configuration.................................. 4-5
4 Figure 4-2 2-wire resistance sensing............................................................. 4-14
4 Figure 4-3 4-wire resistance sensing............................................................. 4-14
4 Figure 4-4 Contact check measurements...................................................... 4-18
5 Figure 5-1 Comparison of staircase sweep types............................................ 5-3
5 Figure 5-2 Linear staircase sweep .................................................................. 5-4
5 Figure 5-3 Logarithmic staircase sweep (1V to 10V, five steps)...................... 5-5
5 Figure 5-4 Pulse sweep example .................................................................... 5-6
5 Figure 5-5 Custom sweep example................................................................. 5-7
6 Figure 6-1 Moving average and repeating filters........................................... 6-12
6 Figure 6-2 Media Filter .................................................................................. 6-13
8 Figure 8-1 Two basic staircase sweep waveforms .......................................... 8-3
8 Figure 8-2 Pulse sweep example .................................................................... 8-4
8 Figure 8-3 Model 2601/2602 continuous power operating boundaries ........... 8-8
8 Figure 8-4 Model 2611/2612/2635/2636 continuous power operating
boundaries ..................................................................................... 8-9
8 Figure 8-5 Model 2601/2602 I-Source boundaries........................................ 8-10
8 Figure 8-6 Model 2611/2612/2635/2636 I-Source boundaries ...................... 8-11
8 Figure 8-7 I-Source operating examples ....................................................... 8-12
8 Figure 8-8 Model 2601/2602 V-Source boundaries....................................... 8-13
8 Figure 8-9 Model 2611/2612/2635/2636 V-Source boundaries..................... 8-14
8 Figure 8-10 V-Source operating examples ...................................................... 8-15
8 Figure 8-11 Source I configuration .................................................................. 8-16
8 Figure 8-12 Source V configuration................................................................. 8-17
8 Figure 8-13 Measure only configurations ........................................................ 8-18
8 Figure 8-14 Contact check circuit configuration .............................................. 8-19
8 Figure 8-15 Comparison of unguarded and guarded measurements.............. 8-21
8 Figure 8-16 Pulse period ................................................................................. 8-22
8 Figure 8-17 Pulse rise and fall times ............................................................... 8-22
9 Figure 9-1 TSP-Link connections .................................................................... 9-3
9 Figure 9-2 Multiple TSP-Link networks............................................................ 9-7
9 Figure 9-3 Single TSP-Link network with groups ........................................... 9-8
10 Figure 10-1 Digital I/O port .............................................................................. 10-2
10 Figure 10-2 Digital I/O port configuration......................................................... 10-4
10 Figure 10-3 Using Model 2601/2602 Output Enable ....................................... 10-7
10 Figure 10-4 Using Model 2611/2612/2635/2636 Interlock............................... 10-9
10 Figure 10-5 Measurement triggering sequence............................................. 10-13
11 Figure 11-1 IEEE-488 connector ..................................................................... 11-3
xii 2600S-901-01 Rev. C / January 2008
Series 2600 System SourceMeter® Instruments Reference Manual List of Figures
11 Figure 11-2 IEEE-488 connections.................................................................. 11-3
11 Figure 11-3 IEEE-488 and RS-232 connector locations.................................. 11 -4
11 Figure 11-4 RS-232 interface connector ....................................................... 11-10
13 Figure 13-1 Pulse sweep example ................................................................ 13-35
13 Figure 13-2 Pulse sweep example ................................................................ 13-35
14 Figure 14-1 Row/column format for display messaging .................................. 14-5
15 Figure 15-1 Connections for voltage verification ............................................. 15-7
15 Figure 15-2 Current verification connections (2602/2612(3A); 2636(1.5A)).. 15-12
15 Figure 15-3 Current verification connection ranges (2601/2602 (3A);
2611/2612/2635/2636 (1.5A))..................................................... 15-13
16 Figure 16-1 Connections for voltage calibration .............................................. 16-9
16 Figure 16-2 Connections for current calibration (100nA to 1A ranges) ......... 16-13
16 Figure 16-3 Connections for current calibration ............................................ 16-17
16 Figure 16-4 Connections for contact check 0W calibration ........................... 16-19
16 Figure 16-5 Connections for contact check 50W calibration ......................... 16-20
17 Figure 17-1 Line fuse replacement.................................................................. 17-2
D Figure D-1 Status model overview .................................................................. D-3
D Figure D-2 Status model (system summary and standard event registers) .... D-4
D Figure D-3 Status model (operation event registers) ...................................... D-5
D Figure D-4 Status model (questionable event registers)................................. D-6
D Figure D-5 Status model (measurement event registers) ............................... D-7
D Figure D-6 16-bit status register...................................................................... D-9
D Figure D-7 Status byte and service request (SRQ)....................................... D-11
D Figure D-8 Standard event register ............................................................... D-17
D Figure D-9 TSP-Link status model configuration example............................ D-30
2600S-901-01 Rev. C / January 2008 xiii
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xiv 2600S-901-01 Rev. C / January 2008
List of Tables
Section Table Title Page
1 Table 1-1 Connectors and triax cable conductors ....................................... 1-12
1 Table 1-2 Triax connector on ground module .............................................. 1-13
1 Table 1-3 Main Menu ................................................................................... 1-19
1 Table 1-4 Configuration menus.................................................................... 1-20
1 Table 1-5 Default settings ............................................................................ 1-23
2 Table 2-1 Example script to sweep V and measure I .................................. 2-34
2 Table 2-2 Example script using a function ................................................... 2-35
2 Table 2-3 Example interactive chunk fragment for a script.......................... 2-36
3 Table 3-1 Selecting the sense mode from the front panel ............................. 3-8
3 Table 3-2 Commands to select sense mode ................................................. 3-8
3 Table 3-3 Commands to select output-off state ........................................... 3-24
4 Table 4-1 Source-measure capabilities ......................................................... 4-3
4 Table 4-2 Maximum compliance values......................................................... 4-4
4 Table 4-3 Compliance commands ................................................................. 4-5
4 Table 4-4 Auto zero settings .......................................................................... 4-6
4 Table 4-5 Auto zero command and options ................................................... 4-7
4 Table 4-6 Basic source-measure commands .............................................. 4-10
4 Table 4-7 Basic contact check commands .................................................. 4-18
5 Table 5-1 Logarithmic sweep points .............................................................. 5-5
5 Table 5-2 Staircase sweep functions ............................................................. 5-8
5 Table 5-3 Pulse sweep functions ................................................................... 5-8
5 Table 5-4 Custom sweep functions................................................................ 5-9
5 Table 5-5 Sweep example parameters .......................................................... 5-9
6 Table 6-1 Source and measurement ranges ................................................. 6-2
6 Table 6-2 Range commands.......................................................................... 6-5
6 Table 6-3 Digits commands ........................................................................... 6-6
6 Table 6-4 Speed command............................................................................ 6-7
6 Table 6-5 Rel commands............................................................................... 6-9
6 Table 6-6 Filter commands .......................................................................... 6-13
7 Table 7-1 Data store commands.................................................................... 7-4
7 Table 7-2 Buffer storage control attributes..................................................... 7-6
7 Table 7-3 Buffer read-only attributes ............................................................. 7-6
7 Table 7-4 Buffer control programming examples........................................... 7-6
7 Table 7-5 Buffer read-only attribute programming examples......................... 7-6
7 Table 7-6 Recall attributes............................................................................. 7-7
7 Table 7-7 Buffer status bits ............................................................................ 7-8
8 Table 8-1 Maximum compliance limits........................................................... 8-2
8 Table 8-2 Model 2601/2602 Maximum Duty Cycle equation constants......... 8-6
8 Table 8-3 Model 2611/2612/2635/2636 Maximum Duty Cycle
equation constants......................................................................... 8-6
8 Table 8-4 Current Measure Settling Time1, 2.............................................. 8-23
8 Table 8-5 Current source gain-bandwidth.................................................... 8-24
9 Table 9-1 TSP-Link reset commands ............................................................ 9-4
9 Table 9-2 TSP-Link network group functions ............................................... 9-9
List of Tables Series 2600 System SourceMeter® Instruments Reference Manual
10 Table 10-1 Digital I/O bit weighting ................................................................ 10-5
10 Table 10-2 Digital I/O commands................................................................... 10-6
10 Table 10-3 Digital I/O bit weighting .............................................................. 10-10
10 Table 10-4 TSP-Link Triggering commands................................................. 10-10
10 Table 10-5 Hardware trigger mode summary .............................................. 10-15
11 Table 11-1 General bus commands............................................................... 11-6
11 Table 11-2 RS-232 interface commands ....................................................... 11-9
11 Table 11-3 RS-232 connector pinout ........................................................... 11-10
11 Table 11-4 PC serial port pinout ................................................................... 11-11
13 Table 13-1 KIGeneral TSP test script: PulseIMeasureV................................ 13-2
13 Table 13-2 KIGeneral TSP test script: PulseVMeasureI................................ 13-3
13 Table 13-3 KIGeneral TSP test script: SweepILinMeasureV ......................... 13-4
13 Table 13-4 KIGeneral TSP test script: SweepVLinMeasureI ......................... 13-5
13 Table 13-5 KIGeneral TSP test script: SweepILogMeasureV........................ 13-7
13 Table 13-6 KIGeneral TSP test script: SweepVLogMeasureI........................ 13-8
13 Table 13-7 KIGeneral TSP test script: SweepIListMeasureV ...................... 13-10
13 Table 13-8 KIGeneral TSP test script: SweepVListMeasureI ...................... 13-11
13 Table 13-9 Required true conditions for function execution......................... 13-12
13 Table 13-10 KIGeneral TSP test script: ConfigPulseIMeasureV.................... 13-14
13 Table 13-11 KIGeneral TSP test script: ConfigPulseVMeasureI.................... 13-16
13 Table 13-12 KIGeneral TSP test script: ConfigPulseIMeasureVSweepLin .... 13-18
13 Table 13-13 KIGeneral TSP test script: ConfigPulseVMeasureISweepLin.... 13-20
13 Table 13-14 KIGeneral TSP test script: ConfigPulseIMeasureVSweepLog... 13-22
13 Table 13-15 KIGeneral TSP test script: ConfigPulseIMeasureVSweepLog... 13-24
13 Table 13-16 KIGeneral TSP test script: ConfigPulseVMeasureISweepLog... 13-26
13 Table 13-17 KIGeneral TSP test script: QueryPulseConfig ........................... 13-28
13 Table 13-18 KIGeneral TSP test script: InitiatePulseTest .............................. 13-30
13 Table 13-19 KIGeneral TSP test script: InitiatePulseTestDual....................... 13-32
14 Table 14-1 Cross referencing functions/attributes to section topics............... 14-2
14 Table 14-2 Bit identification for annunciators............................................... 14-10
14 Table 14-3 Keycodes to send for display.sendkey....................................... 14-13
14 Table 14-4 Keycode values returned for display.getlastkey ......................... 14-14
15 Table 15-1 Recommended verification equipment......................................... 15-3
15 Table 15-2 Model 2601/2602 output voltage accuracy limits ......................... 15-8
15 Table 15-3 Model 2611/2612/2635/2636 output voltage accuracy limits ....... 15-8
15 Table 15-4 Model 2601/2602 voltage measurement accuracy limits ............. 15-9
15 Table 15-5 Model 2611/2612/2635/2636 voltage measurement
accuracy limits ............................................................................. 15-9
15 Table 15-6 Model 2601/2602 output current accuracy limits ....................... 15-10
15 Table 15-7 Model 2611/2612 output current accuracy limits........................ 15-10
15 Table 15-8 Model 2635/2636 output current accuracy limits ....................... 15-14
15 Table 15-9 Model 2635/2636 Characterization of Voltage Source settings . 15-15
15 Table 15-10 Model 2601/2602 current measurement accuracy limits ........... 15-15
15 Table 15-11 Model 2611/2612 current measurement accuracy limits............ 15-16
15 Table 15-12 Model 2635/2636 current measurement accuracy limits ........... 15-16
16 Table 16-1 Recommended calibration equipment ......................................... 16-4
16 Table 16-2 Model 2601/2602 calibration steps .............................................. 16-5
16 Table 16-3 Model 2611/2612 calibration steps .............................................. 16-6
16 Table 16-4 Model 2635/2636 calibration steps .............................................. 16-6
16 Table 16-5 Calibration commands ................................................................. 16-7
16 Table 16-6 Settings of Model 2635/2636 Characterization of
Voltage Source........................................................................... 16-18
17 Table 17-1 Line fuse ...................................................................................... 17-3
B Table B-1 Error queue commands ................................................................. B-2
B Table B-2 Error summary ............................................................................... B-3
xvi 2600S-901-01 Rev. C / January 2008
Series 2600 System SourceMeter® Instruments Reference Manual List of Tables
C Table C-1 Common commands..................................................................... C-2
C Table C-2 Script command equivalents......................................................... C-2
D Table D-1 Status functions and registers....................................................... D-8
D Table D-2 Commands to reset registers and clear queues ........................... D-9
D Table D-3 Status Byte and Service Request Enable Register commands.. D-13
D Table D-4 System node and SRQ enable register bit attributes.................. D-14
D Table D-5 Standard event commands ......................................................... D-17
D Table D-7 Operation event commands........................................................ D-18
D Table D-6 Status event status registers and bits ......................................... D-18
D Table D-8 Operation event commands........................................................ D-23
D Table D-9 Operation event commands........................................................ D-25
D Table D-10 Error queue commands .............................................................. D-28
F Table F-1 Display character codes (decimal 0-143)....................................... F-2
F Table F-2 Display character codes (decimal 144-255)................................... F-4
2600S-901-01 Rev. C / January 2008 xvii
List of Tables Series 2600 System SourceMeter® Instruments Reference Manual
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xviii 2600S-901-01 Rev. C / January 2008
In this section:
Top ic Page
Introduction ....................................................................................... 1-2
General information.......................................................................... 1-3
Front and rear panel familiarization ................................................ 1-6
Capabilities and features ..............................................................
Organization of manual sections ..................................................
Warranty information ....................................................................
Contact information.......................................................................
Safety symbols and terms ............................................................
Unpacking and inspection.............................................................
Options and accessories ..............................................................
User’s and Reference manuals
Front panel summaries.................................................................
Rear panel summaries..................................................................
Section 1
Getting Started
1-2
1-3
1-3
1-3
1-3
1-3
1-4
1-5
1-6
1-9
Cooling vents .................................................................................... 1-13
Power-up............................................................................................ 1-14
Line power connection..................................................................
Power-up sequence......................................................................
Beeper ..........................................................................................
Display modes................................................................................... 1-16
Editing controls................................................................................. 1-17
Source and compliance editing ....................................................
Menu navigation ...........................................................................
Menu types ...................................................................................
Interface selection ............................................................................ 1-20
To select the GPIB interface .........................................................
To select the RS-232 interface .....................................................
Error and status messages 1-21
Default settings ................................................................................. 1-21
Front panel setups ........................................................................
Remote operation setups..............................................................
Remote programming....................................................................... 1-24
Requesting readings.....................................................................
Requesting command settings .....................................................
1-14
1-15
1-15
1-17
1-18
1-19
1-21
1-21
1-21
1-22
1-24
1-24
Section 1: Getting Started Series 2600 System SourceMeter® Instruments Reference Manual
Introduction
Keithley Instruments Series 2600 System SourceMeter® instruments offer electronic component
and semiconductor device manufacturers a scalable, high throughput, highly cost-effective
solution for precision DC, pulse, and low frequency AC source-measure testing.
Capabilities and features
• Models 2601/2602 System SourceMeters:
– Source ±DC voltage from 1μV to 40.4V
– Source ±DC current from 1pA to 3.03A
– Measure ±DC voltage from 1μV to 40.8V
– Measure ±DC current from 1pA to 3.06A
• Models 2611/2612 System SourceMeters:
– Source ±DC voltage from 1μV to 202V
– Source ±DC current from 1pA to 1.515A
– Measure ±DC voltage from 1μV to 204V
– Measure ±DC current from 1pA to 1.53A
• Models 2635/2636 System SourceMeters:
– Source +/- DC voltage from 1uV to 202V
– Source +/- DC current from 20fA to 1.515A
– Measure +/- DC voltage from 1uV to 204V
– Measure +/- DC current from 1fA to 1.53A
• Resistance and power measurement functions
• Contact check function
• Two independent SourceMeter channels (Models 2602, 2612, and 2636 only)
• Four-quadrant sink or source operation
• Embedded Test Script Processor (TSP) accessible from any host interface; responds to
high-speed test scripts comprised of instrument control commands
• Factory script sweep functions: Linear staircase, logarithmic staircase, fixed pulse, and
custom sweeps
• Five user-saved setups
• Buffer storage and recall for at least 100,000 source-measure readings
• Filtering to reduce reading noise
• Supported remote interfaces: IEEE-488 (GPIB) and RS-232
• TSP-Link: Allows TSP-enabled instruments to trigger and communicate with each other
• Digital I/O port: Allows the Series 2600 to control other devices
1
1. All Model 2611/2612 System SourceMeters manufactured by Keithley Instruments support the contact check function. Models 2635
and 2636 do not support the contact check function. Only Models 2601/2602 with firmware Revision 1.1.0 or later and source measure
unit (SMU) hardware Revision E or later support the contact check function. To determine the firmware and SMU hardware revisions,
inspect the data returned by the print(localnode.info()) command. The InstFwRev and SMUBrdRev keys contain the
necessary information.
1-2 Return to Section Topics 2600S-901-01 Rev. C / January 2008
Series 2600 System SourceMeter® Instruments Reference Manual Section 1: Getting Started
Organization of manual sections
The manual sections in the PDF version of this manual can be viewed by clicking the “Bookmarks”
tab on the left side of this window. This tab also provides direct links to the various sections and
section topics.
The manual sections are also listed in the Table of Contents located at the beginning of this
manual.
General information
Warranty information
Warranty information is located at the front of this manual. Should your Series 2600 require
warranty service, contact the Keithley Instruments representative or authorized repair facility in
your area for further information. When returning the instrument for repair, be sure to complete and
return the service form at the back of this manual to provide the repair facility with the relevant
information.
Contact information
If you have any questions, please contact your local Keithley Instruments representative or call
one of our Application Engineers at 1-888-KEITHLEY (1-888-534-8453), U.S. and Canada only.
You can also contact us through our website at www.keithley.com.
Safety symbols and terms
The following symbols and terms may be found on the instrument or used in this manual:
!
The
located in the manual.
The symbol on the instrument shows that high voltage may be present on the terminal(s). Use
standard safety precautions to avoid personal contact with these voltages.
The symbol on an instrument shows that the surface may be hot. Avoid personal contact to
prevent burns.
The WARNING heading used in this manual explains dangers that might result in personal injury
or death. Always read the associated information very carefully before performing the indicated
procedure.
The CAUTION heading used in this manual explains hazards that could damage the instrument.
Such damage may invalidate the warranty.
symbol on an instrument indicates that the user should refer to the operating instructions
Unpacking and inspection
Inspection for damage
The Series 2600 was carefully inspected electrically and mechanically before shipment. After
unpacking all items from the shipping carton, check for any obvious signs of physical damage that
may have occurred during transit (there may be a protective film over the display lens, which can
be removed). Report any damage to the shipping agent immediately. Save the original packing
carton for possible future shipment. Before removing the Series 2600 from the bag, observe the
following handling precautions.
2600S-901-01 Rev. C / January 2008 Return to Section Topics 1-3
Section 1: Getting Started Series 2600 System SourceMeter® Instruments Reference Manual
Handling precautions
• Always grasp the Series 2600 by the covers or by the handle.
• After removing the Series 2600 from its anti-static bag, inspect it for any obvious signs of
physical damage. Report any such damage to the shipping agent immediately.
• When the Series 2600 is not installed and connected, keep the unit in its anti-static bag and
store it in the original packing carton.
Package content
The following items are included with every Series 2600 order:
• Model 2601, 2602, 2611, 2612, 2635, or 2636 SourceMeter with line cord
• TSP-Link cable for Models 2601, 2602, 2611, and 2612
• Accessories as ordered
• Certificate of calibration
• CD-ROMs that contain:
• PDFs of the User’s and Reference Manuals
• Test Script Builder script development software
The following additional items are included with the Models 2611, 2612, 2635, and 2636
SourceMeters:
• Model 2600-IAC Interlock connector adaptor
The following item is for Models 2601, 2602, 2611, and 2612 only:
• Device under test (DUT) interface connector kit for each SourceMeter channel; kit includes
one hooded screw terminal connector that mates with the SourceMeter measurement
terminals
The following items are for Models 2635 and 2636 only:
• SC-73-0 6" ground wire.
• TSP-Link cable
• 2600-ALG-2 low noise triax cable with alligator clips, UL approved for up to 42V, 2m (6.6ft)
(2 with Model 2636 and 1 with Model 2635)
• Quick start guide
Options and accessories
GPIB cables, interfaces, and adaptors (connects Series 2600 to the GPIB bus)
Models 7006-1 and 7006-2: Single-shielded GPIB cables. Terminated with one straight
connector (non-stacking) and one feed-through connector. Model 7006-1 is 1m long; Model
7006-2 is 2m long.
KPCI-488LP IEEE-488: Interface/Controller for the PCI Bus.
KPXI-488 IEEE-488: Interface Board for the PXI Bus.
1-4 Return to Section Topics 2600S-901-01 Rev. C / January 2008
Series 2600 System SourceMeter® Instruments Reference Manual Section 1: Getting Started
Models 7007-05, 7007-1, 7007-2, and 7007-4: Double-shielded premium GPIB cables. Each
end is terminated with a feed-through metal housing for longest life and best performance.
Model 7007-05 is 0.5m long; 7007-1 is 1m long; Model 7007-2 is 2m long; Model 7007-4 is 4m
long.
Model 7010: Shielded IEEE-to-IEEE adapter. Provides additional clearance between the rear
panel and GPIB cable connector. Allows easier access to cables and other connectors.
KUSB-488A IEEE-488: USB-to-GPIB Interface Adaptor
RS-232 cable (connects Series 2600 to the RS-232)
Model 7009-5 shielded RS-232 cable: This straight-through cable connects the RS-232 of
the Series 2600 to the RS-232 interface of your PC. This cable is 5ft. long and uses shielded
cable and connectors to reduce electromagnetic interference (EMI).
TSP-Link cable (connects Series 2600 to the TSP-Link)
CA-180-3A CAT 5 cable: This crossover CAT5 LAN cable connects the
TSP-Link of the Series 2600 to the TSP-Link of other instruments.
Digital I/O port cables (connects Digital I/O to other devices)
Series 2600-TLINK trigger cable: Connects the Digital I/O port of Series 2600 instruments to
other Keithley instruments equipped with Trigger Link (TLINK).
CA-126-1 DB-25 cable: DB-25 male to female DB-25 cable, 1.5m (5ft) long, used to connect
the Digital I/O port to other instruments.
User’s and Reference manuals
The User’s and Reference Manuals are provided on the product information CD-ROM in PDF
format. The User’s Manual provides the fundamental operating information for the instrument. The
Reference Manual provides additional information on the topics covered in the User’s Manual. The
Reference Manual also includes advanced operation topics and maintenance information.
2600S-901-01 Rev. C / January 2008 Return to Section Topics 1-5
Section 1: Getting Started Series 2600 System SourceMeter® Instruments Reference Manual
Front and rear panel familiarization
Front panel summaries
The front panels of the Series 2600 are shown in Figure 1-1. The descriptions of the front panel
controls follow Figure 1-1.
Figure 1-1
Models 2601, 2611, 2602, 2612, 2635, and 2636 front panel
Models 2601, 2611, and 2635
Model 2601 and Model 2611
s
SYSTEM SourceMeter
®
KEITHLEY SourceMeter
89
7
DISPLAY
CONFIG
POWER
SRC LIMITMEAS
5
4
SPEED
DIGITS
1
2
LOAD RUN STORE RECALL
1 2
SYSTEM SourceMeter
+ / -
MODE
6
0
REL
FILTER
3
0000
TRIG MENU
Models 2602, 2612, and 2636
Model 2602 and Model 2612
®
LOCAL
EXIT ENTER
KEITHLEY SourceMeter
DISPLAY
CONFIG
POWER
CHANNEL A CHANNEL B
89
7
SRC LIMITMEAS
5
4
SPEED
DIGITS
1
2
LOAD RUN STORE RECALL
REL
+ / -
MODE
SRC LIMITMEAS
6
0
FILTER
3
0000
SPEED
DIGITS
TRIG MENU
REL
LOCAL
EXIT ENTER
MODE
FILTER
RANGE
AUTO
3
RANGE
AUT O
RANGE
P
R
P
CURSOR
U
S
H
T
O
E
D
I
T
/
E
N
T
E
R
E
T
N
E
/
T
I
D
E
O
T
H
S
U
OUTPUT
ON/OFF
4
P
R
P
CURSOR
OUTPUT
U
S
H
/
E
N
T
E
R
CHAN B
T
O
E
D
I
T
E
T
N
E
/
T
I
D
E
O
T
H
S
U
CHAN A
ON/OFF ON/OFF
5
1 2
3
4
5
NOTE The Models 2601, 2611, and 2635 have one SourceMeter channel
(Channel A), and the Models 2602, 2612, and 2636 have two
SourceMeter channels (Channel A and Channel B).
1-6 Return to Section Topics 2600S-901-01 Rev. C / January 2008
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