INFICON BCG450-SP ATM User Manual

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Communication Protocol

Profibus

DP/V1 Interface for Bayard-Alpert Pirani Capacitance Diaphragm Gauge

BCG450-SP

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About this Document

This document describes the functionality and programming of the Profibus interface of the BCG450-SP gauge.

For safety information on and technical data of the gauges, please refer to the respective operating manuals (→  [1], [3]).

In information referring to the ionization vacuum measuring part of the gauge, the short designation "BA" (Bayard-Alpert measuring principle) is used.

The designation "Pirani" is used in information referring to the Pirani vacuum measuring part of the gauge.

Product Identification

Validity

In all communications with INFICON, please specify the information on the product nameplate. For convenient reference copy that information into the space provided below.

INFICON AG, LI-9496 Balzers

Model: PN: SN: V W

This document applies to products with part numbers BCG450-SP (with Profibus interface and switching functions)

353-554 353-556 (vacuum connection DN 40 CF-R)

The part number (PN) can be taken from the product nameplate.

(vacuum connection DN 25 ISO-KF)

Intended Use

Functional Principle

Trademarks

The BCG450-SP gauge allows vacuum measurement of non flammable gases and gas mixtures (pressure ranges →  [1], [3]).

The gauges can be operated with an INFICON controller or another instrument or control device.

The function of the gauge is described in the operating manual (→  [1], [2], [3]). The integrated Profibus interface allows operating the gauge in connection with

other suitable devices in a Profibus network according to the standard described in  [4], [5].

SEMI Profibus This document contains Profibus-specific information described and

Semiconductor Equipment and Materials International, California

defined in the Profibus standard EN 50170 (→  [5]).

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Contents

About this Document 2 Product Identification 2 Validity 2 Intended Use 2 Functional Principle 2 Trademarks 2

1 General Data 5

1.1 Data Rate 5

1.2 Device Address 5

1.3 Ident Number 5

1.4 Configuration Data 5

1.5 User Parameter Data 6

1.6 Types of Communication 6

2 Data Exchange Mode 7

2.1 Acyclic Data Transmission with Profibus DPV1 Functionality 7

2.2 Structure of the Cyclic Data Telegrams in Data Exchange Mode 8

2.2.1 Parameter Channel 9

2.2.1.1 PKE Parameter Signature Value 9

2.2.1.2 PWE Parameter (Process Value) 10

2.2.1.3 Error Code (Error Message) 10

2.3 Cyclic Message Telegrams 11

3 Block Model 12

3.1 Device Block 13

3.1.1 Information on the Individual Indices 14

3.1.1.1 Block Type ID 16 14

3.1.1.2 Device Type ID 17 14

3.1.1.3 Standard Revision Level ID 18 14

3.1.1.4 Device Manufacturer Identifier ID 19 14

3.1.1.5 Manufacturer Model Number ID 20 14

3.1.1.6 Software or Firmware Revision Level ID 21 14

3.1.1.7 Hardware Revision Level ID 22 14

3.1.1.8 Device Configuration ID 24 14

3.1.1.9 Device State ID 25 14

3.1.1.10 Exception Status ID 26 15

3.1.1.11 Exception Detail Alarm ID 27 16

3.1.1.12 Exception Detail Warning ID 28 18

3.1.1.13 Copy Common Exception Detail Alarm 0 ID 204 20

3.1.1.14 Copy Device Exception Detail Alarm 0 … 3 ID 205 20

3.1.1.15 Copy Device Exception Detail Alarm 4 … 5 ID 206 20

3.1.1.16 Copy Manufacturer Exception Detail Alarm 0 ID 207 21

3.1.1.17 Copy Common Exception Detail Warning 0 ID 208 21

3.1.1.18 Copy Device Exception Detail Warning 0 … 3 ID 209 21

3.1.1.19 Copy Device Exception Detail Warning 4 … 6 ID 210 21

3.1.1.20 Copy Manufacturer Exception Detail Warning 0 ID 211 21

3.1.2 Device Block, Device Behavior 21

3.1.2.1 Device Block State Command 22

3.2 Analog Input Block 23

3.2.1 One Of N Analog Input Function Block / SLOT 1 23

3.2.1.1 Block Type 23

3.2.1.2 Channel Instance Selector 23

3.2.1.3 PV Selector 23

3.2.2 Analog Sensor Input Function Block Instance 1 / SLOT 1 24

3.2.2.1 Process Value 24

3.2.2.2 Status 24

3.2.2.3 Data Type 24

3.2.2.4 Data Unit 25

3.2.2.5 Reading Valid 25

3.2.2.6 Full Scale 25

3.2.2.7 Safe State 26

3.2.2.8 Safe Value 26

3.2.2.9 Overrange 26

3.2.2.10 Underrange 26

3.2.3 Analog Sensor Input Function Block Instance 2 / SLOT 1 27

3.2.3.1 Process Value 27

3.2.3.2 Status 27

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3.2.3.3 Data Type 27

3.2.3.4 Data Unit 28

3.2.3.5 Reading Valid 28

3.2.3.6 Full Scale 28

3.2.3.7 Safe State 28

3.2.3.8 Safe Value 29

3.2.3.9 Overrange 29

3.2.3.10 Underrange 29

3.2.4 Analog Sensor Input Function Block Instance 3 / SLOT 1 30

3.2.4.1 Process Value 30

3.2.4.2 Status 30

3.2.4.3 Data Type 30

3.2.4.4 Data Unit 31

3.2.4.5 Reading Valid 31

3.2.4.6 Full Scale 31

3.2.4.7 Safe State 32

3.2.4.8 Safe Value 32

3.2.4.9 Overrange 32

3.2.4.10 Underrange 32

3.2.5 Analog Sensor Input Function Block Instances 5 and 6 / SLOT 1 33

3.2.5.1 Process Value 33

3.2.5.2 Status 34

3.2.5.3 Data Type 34

3.2.5.4 Data Unit 34

3.2.5.5 Reading Valid 34

3.2.5.6 Setpoint Function 34

3.2.5.7 "Percentage of Atmosphere" 34

3.2.5.8 Atmosphere Reached 36

3.3 Transducer Block 36

3.3.1 One Of N Vacuum Gauge Transducer Block / SLOT 1 36

3.3.1.1 One Of N Status Extension 36

3.3.2 Heat Transfer Vacuum Gauge Transducer Block / SLOT 1 / Instance 1 36

3.3.2.1 Block Type 36

3.3.2.2 Status Extension 36

3.3.2.3 Sensor Alarm 36

3.3.2.4 Sensor Warning 37

3.3.3 Hot Cathode Ion Gauge Transducer Block / SLOT 1 / Instance 2 37

3.3.3.1 Block Type 37

3.3.3.2 Status Extension 37

3.3.3.3 Sensor Alarm 37

3.3.3.4 Sensor Warning 38

3.3.3.5 Emission Status 38

3.3.3.6 Emission Current 38

3.3.3.7 Degas Status 38

3.3.3.8 Emission User Mode State 38

3.3.3.9 Hot Cathode Block State Command 39

3.3.4 Diaphragm Gauge Transducer Block / SLOT 1 / Instance 3 40

3.3.4.1 Block Type 40

3.3.4.2 Status Extension 40

3.3.4.3 Sensor Alarm 40

3.3.4.4 Sensor Warning 40

3.3.4 Atmosphere Sensor Transducer Block (Piezo Sensor) / SLOT 1 / Instance 4 41

3.3.4.1 Block Type 41

3.3.4.2 Atmosphere Sensor Block State Command 41

Appendix A: Definitions 42 Appendix B: Block Type 45 Appendix C: Electrical Connections 46 Appendix D: Literature 48

For cross-references to other documents, the symbol (→  [XY]) is used.

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1 General Data

1.1 Data Rate

1.2 Device Address

The gauge supports all data rates defined in the EN 50170 standard (→  [5]) up to 12 Mbaud. Automatic data rate setting is supported. Alternatively, a fixed data rate can be selected.

The device address ( node address) must be set via two rotary switches when the gauge is installed.

For unambiguous identification of the gauge in a Profibus environment, a node address is required. The node address setting is made on the gauge.

The node address (0 … 125 (00 … 7D

) (default value 5C

hex

) is set in hexadecimal form

dec

) via the "ADDRESS" switches.

hex

The "MSD" switch is used for setting the high-order address nibble and the "LSD" switch for defining the low-order address nibble.

The node address is polled by the firmware when the gauge is switched on. If the setting deviates from the stored value, the new value is taken over into the NVRAM. If a value >7D

hex

(>125

) is entered, the node address setting currently

dec

stored in the device remains valid. However, the address can be set via the Profibus master with the "Set Slave Address" service. This address setting will be stored in the EEPROM of the gauge.

1.3 Ident Number

1.4 Configuration Data

The ident number assigned to the gauge by the PNO (→  [4]) is:

Gauge Ident number (hexadecimal)

BCG450-SP 08E6

Depending on the standard telegrams used (→ section "Cyclic Message Telegrams"), the following configuration data have to be transmitted to the gauge during the configuration phase:

Standard telegram

Master ⇒ Slave

Standard telegram

Slave ⇒ Master

Configuration data

- 4 0x44, 0x84, 0x05, 0x05, 0x05, 0x03

- 5 0x44, 0x86, 0x05, 0x05, 0x05, 0x08

1 4 0xC6, 0x81, 0x84, 0x05, 0x05,

0x05, 0x05, 0x05, 0x03

1 5 0xC6, 0x81, 0x86, 0x05, 0x05,

0x05, 0x05, 0x05, 0x08

3 6 0xC6, 0x87, 0x8C, 0x0A, 0x0A,

0x05, 0x05, 0x05, 0x03

3 7 0xC6, 0x87, 0x8E, 0x0A, 0x0A,

0x05, 0x05, 0x05, 0x08

2 6 0xC8, 0x89, 0x8C, 0x0A, 0x05,

0x05, 0x0A, 0x05, 0x05, 0x05, 0x03

2 7 0xC8, 0x89, 0x8E, 0x0A, 0x05,

0x05, 0x0A, 0x05, 0x05, 0x05, 0x08

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1.5 User Parameter Data

Depending on the pressure unit setting ( data unit), the following configuration string has to be transmitted to the gauge (parameter data in hexadecimal format):

1.6 Types of Communication

Pressure unit User parameter data string COUNTS Torr 00 00 00 05 15 Micron 00 00 00 05 16 mbar 00 00 00 05 1C Pascal 00 00 00 05 1D

If COUNTS is selected as pressure unit, a value is output, which can be converted into a corresponding pressure value by means of a formula (→ section "Analog Sensor Input Function Block" for more information).

BCG450-SP works according to the Profibus DPV1 specification and can be addressed in cyclic or acyclic data traffic (→  [4]).

Acyclic data traffic should be used to make device or process specific settings such as definition of the Safe Values, Safe States etc. or for reading or writing of rarely used attributes.

Cyclic data traffic is used for continuous exchange of the required process parameter values, i.e. pressure value and status indications. A number of standard telegrams are available for cyclic data traffic. They can be selected according to requirements (→ section "Cyclic Message Telegrams").

00 00 00 03 E9

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2 Data Exchange Mode

2.1 Acyclic Data Transmission with Profibus DPV1 Functionality

Block, slot and index assignment

The reading and writing operations defined in Profibus are based on a slot index address scheme. In BCG450-SP, all device functions are organized in the following blocks:

• A device block describing all organizational parameters of the gauge (serial number, manufacturer, software version, …)

• An Analog Sensor Function Block describing the function of the pressure presentation

• An Analog Sensor Transducer Block describing the physical interface between the gauge and the process (emission current, ion current, …).

The block model is described in detail in section "Block Model". Each block is assigned to a separate slot. The exact assignment

Block ⇒ Slot ⇒ Index is described in section "Block Model". The Device Block is assigned to Slot 0, the transducer and functional blocks to Slot 1.

Index

254

Device

Block

Block_1 Block_2 Block_3

There are 254 indices per slot. The indices can have a width of 255 bytes. All values that can be accessed via Profibus have to be mirrored to one of these slots/ indices.

The parameters are generally numbered in ascending order, starting with index 16. Services such as "Degas On" or "Full scale" are numbered in descending order, starting with index 15.

0123

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Assignment of the block elements to the slot indices

Index

2.2 Structure of the Cyclic Data Telegrams in Data Exchange Mode

Parameter_n

Block_x

Parameter_2 Parameter_1

In Data Exchange mode, the DP master class 1 cyclically transmits data from and to all slaves that are connected to the bus.

In this document, data transmitted from the slave to the master are called "input data" and data transmitted from the master to the slave are called "output data".

The input and output data of the BCG450-SP has two logic parts:

1) the parameter channel

2) the process data channel There is a number of standard telegrams, consisting of: a) the parameter channel only

b) the process data channel only c) both, the parameter and process data channel

The parameter channels allows masters without Profibus DPV1 to access device specific parameters that are not part of the normal cyclic data telegram. For masters with Profibus DPV1, no parameter channel is required.

Parameter_0

Operation_1 Operation_2 Operation_n

optional

Block_Type_Name

Attributes

Public

Operations Public

optional

Private

Input data

Output data

The input data (transmitted by the BCG450-SP) consists of the 8 bytes of the parameter channel (if there is a parameter channel in the standard telegram) and of 5 … 7 bytes of process data depending on the selected standard telegram.

Byte Byte

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15

Parameter channel Process data

PKE IND res. PWE

Where: PKE = Parameter Signature Value

IND = Sub Index

res. = reserved PWE = Process Value

The output data (transmitted by the master) consist of 8 bytes of the parameter channel or, if there is no parameter channel in the standard telegram, of 0 bytes.

Byte

1 2 3 4 5 6 7 8

Parameter channel

PKE IND res. PWE

Reading or writing command and definition of the slot

Index No. of the index to be read (→ "Block Model")

Value to be read or written

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2.2.1 Parameter Channel

The structure of the parameter channel is described in the table below. The parameter channel (called PKW Interface hereinafter) consists of 8 bytes.

Octets

1 2 3 4 5 6 7 8

PKE IND res. PWE

The PKW Interface allows reading and writing of slave parameters with a maximum data length of 4 bytes. Strings cannot be read.

The slave generates exactly one response per instruction transmitted by the master. The instruction and response cannot be blocked. This means that exactly one instruction per output telegram can be transmitted to the slave and that exactly one response per input telegram can be transmitted to the master. 4 bytes of actual data can thus be transmitted at a time.

2.2.1.1 PKE Parameter Signature Value

Instruction signature

The instruction and response are represented in the first two bytes (PKE) of the parameter channel:

Bit position

15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0

AK res. Slot

Where: Bits Meaning

15 … 12

AK Instruction/response signature

11 … 8 Reserved

7 … 0 Define the slot from which data are read or onto which a

value is to be written

In Master ⇒ Slave communication, the AK field contains the instruction signature of the master.

In Slave ⇒ Master communication, the AK field contains the instruction signature of the slave.

AK Function

Master ⇒ Slave (Instruction signature)

normal

Function Slave ⇒ Master (Response signature)

error

0 No instruction 0 No response 1 Read parameter value 1

Transmit parameter value

(word)

Transmit parameter value (double word)

Transmit parameter value (byte)

2 Write parameter value

1 Transmit parameter value

(data type: word)

3 Write parameter value

2 Transmit parameter value

(data type: double word)

10 Write parameter value

11 Transmit parameter value

(data type: byte)

Instruction cannot be executed (error code)

(word)

(double word)

(byte)

On the left of the table, the instruction signatures of the master are listed according to their function. On the right of the table, the corresponding normal responses (AK Normal) and error codes (AK Error) transmitted by the slave are listed.

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Instruction – response sequence

1) The master transmits an instruction to the slave and repeats that instruction until it receives a response from the slave.

2) The slave keeps transmitting the response to the instruction until the master transmits a new instruction.

3) The master marks the end of the first instruction cycle by setting AK to zero. Only after that, a new instruction/response cycle may be started.

2.2.1.2 PWE Parameter (Process Value)

2.2.1.3 Error Code (Error Message)

The PWE represents the data element to be transmitted. If a byte is to be transmitted, that byte has to be in position 8 of the parameter

channel. Integers are transmitted with bytes 7 and 8. Double integer and float values are

transmitted with bytes 5 … 8.

In the event of a transmission error (AK response signature = 7), the slave transmits an error code in byte positions 7 and 8 (data type: INT16).

Error code Meaning

0 Undefined slot 1 Parameter not changeable 2 Lower or upper value range limit overflow 3 Index error

5 Data type error 17 Instruction not allowed in this state 18 Other errors

201 Already in requested state 202 Object state conflict

The following diagram shows an example of a data request from a master to a BCG450-SP via parameter channel.

Store

Data

DP-Master

Parameter

Request

(Client)

AK(IS) = 0

AK(RS) = 0

AK(IS) = 0

AK(RS) = 0

AK (IS) = 1

AK(RS) = 0

AK (IS) = 1

AK(RS) = 0

AK (IS) = 1

AK(RS) = 1

AK (IS) = 0

AK(RS) = 0

AK (IS) = 0

AK(RS) = 0

BCG450-SP

Parameter

Request (Server)

Fetch

Data

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2.3 Cyclic Message Telegrams

The message telegrams listed below are implemented in the gauge. They can be selected according to requirements. When selecting a message telegram, ascertain what output format of the measured value (integer/float) is required and whether a parameter channel is needed or not. The gauge can also be operated in such a way that the master does not transmit any output data to the slave.

Standard telegram

3 4

Master

⇔

Slave

M ⇒ S

M ⇒ S S ⇒ M

S ⇒ M

Byte Meaning

1 Transition Command 2 Transition Command Value for Hot Ion Gauges

1 … 8 Parameter Channel

9 Transition Command

10 Transition Command Value for Hot Ion Gauges

1 - 8 Parameter Channel

1 Exception status 2 One Of N status extension 3 One Of N PV selector

4 … 5 Process value UINT16

1 Exception status 2 One Of N status extension

3 One Of N PV selector 4 … 7 Process value float 1 … 8 Parameter channel

9 Exception status

10 One Of N status extension 11 One Of N PV selector

12 … 13 Process value UINT16

1 … 8 Parameter channel

9 Exception status

10 One Of N status extension 11 One Of N PV selector

12 … 15 Process value float

Configuration data

In the following table, the possible reasonable combinations are listed with the corresponding configuration data.

Standard telegram

Master ⇒ Slave

- 4 0x44, 0x84, 0x05, 0x05, 0x05, 0x03

- 5 0x44, 0x86, 0x05, 0x05, 0x05, 0x08

1 4 0xC6, 0x81, 0x84, 0x05, 0x05, 0x05,

1 5 0xC6, 0x81, 0x86, 0x05, 0x05, 0x05,

3 6 0xC6, 0x87, 0x8c, 0x0A, 0x0A, 0x05,

3 7 0xC6, 0x87, 0x8E, 0x0A, 0x0A,

2 6 0xC8, 0x89, 0x8c, 0x0A, 0x05, 0x05,

2 7 0xC8, 0x89, 0x8E, 0x0A, 0x05, 0x05,

Standard

Slave ⇒ Master

Configuration data

0x05, 0x05, 0x03

0x05, 0x05, 0x08

0x05, 0x05, 0x03

0x05, 0x05, 0x05, 0x08

0x0A, 0x05, 0x05, 0x05, 0x03

0x0A, 0x05, 0x05, 0x05, 0x08

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3 Block Model

Data to the BCG450-SP can be transmitted by means of a number of communication protocols and corresponding masters. Profibus defines a master class 1 as normal control unit of the slave (typically a PLC) and a master class 2 as configuration and service unit. The following communication protocols are defined according to the Profibus DPV1 standard.

MS0 Cyclic data traffic between master class 1 and slave MS1 Acyclic data traffic between master class 1 and slave MS2 Acyclic data traffic between master class 2 and slave

In the BCG450-SP, all functions that are made available by the gauge via Profibus are organized in blocks. Access to the individual parameters of the blocks is possible via acyclic services or, for byte, integer and float values, also in cyclic data traffic via the parameter channel.

Block types

The following block types are defined in the gauge. Device Block The Device Block contains all data that are required for de-

scribing the device and handling its state (status of Device State Machine).

Transducer Block The physical, process specific functions or interfaces between

the BCG450-SP and the process such as current and voltage values are represented in transducer blocks.

The following transducer blocks are implemented:

• One of N Vacuum Gauge Transducer Block

• Heat Transfer Vacuum Gauge Transducer Block (Pirani)

• Hot Cathode Ion Gauge Transducer Block (BA)

• Diaphragm Gauge Transducer Block (CDG)

Function Block Application specific values such as pressure values that result

from or can be calculated from the values of the transducer block are represented in the function blocks.

• One of N Analog Input Function Block

• Analog Input Function Block, Instance 1, Instance 2,

Instance 3, Instance 4, Instance 5, Instance 6.

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3.1 Device Block

The following table lists the services and parameters integrated in the Device Block (→ Appendix A for abbreviations).

ID Name Structure Data type Bytes Access Value Store 15 Device Block State Simple Unsigned8 1 1_R/W

2_R/W

16 Block Type Simple Octet string 4 1/2_R 1 N

17 Device Type Simple Visible string 8 1/2_R CG N

18 Standard Revision Level Simple Visible string 9 1/2_R E54-0997 N

19 Device Manufacturer

Simple Visible string 20 1/2_R INFICON AG N

Identifier

20 Manufacturer

Model Number

21 Software or Firmware

Simple Visible string 20 1/2_R e.g.

353-554

Simple Visible string 8 1/2_R e.g. 1.01 N

Revision Level

22 Hardware Revision Level Simple Visible string 8 1/2_R e.g. 1.0 N

23 Serial Number Simple Visible string 30 1/2_R e.g. 100 N

24 Device Configuration Simple Visible string 50 1/2_R e.g.

BCG450-SP

25 Device State Simple Unsigned8 1 1/2_R V

26 Exception Status Simple Unsigned8 1 0_XI

1/2_R

27 Exception Detail Alarm Record

28 Exception Detail

Record

→ below

- 1/2_R V

Warning

204 Common Exception

Simple UINT8 1 1/2_R V

Detail Alarm 0

205 Device Exception Detail

Alarm 0 … 3

206 Device Exception Detail

Alarm 4 … 5

207 Manufacturer Exception

Struct Array of

4 1/2_R V

4 bytes

Struct Array of

2 1/2_R V

2 bytes

Simple UINT8 1 1/2 _R V

Detail Alarm 0

208 Common Exception

Simple UINT8 1 1/2 _R V

Detail Warning 0

209 Device Exception Detail

Warning 0 … 3

210 Device Exception Detail

Warning 4 … 6

211 Manufacturer Exception

Struct Array of

4 1/2 _R V

4 bytes

Struct Array of 3

3 1/2_R V

bytes

Simple UINT8 1 1/2_R V

Detail Warning 0

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3.1.1 Information on the Individual Indices

3.1.1.1 Block Type ID 16

3.1.1.2 Device Type ID 17

3.1.1.3 Standard Revision Level

ID 18

3.1.1.4 Device Manufacturer

Identifier ID 19

3.1.1.5 Manufacturer Model

Number ID 20

3.1.1.6 Software or Firmware

Revision Level ID 21

3.1.1.7 Hardware Revision Level

ID 22

3.1.1.8 Device Configuration ID 24

3.1.1.9 Device State ID 25

The Block Type Parameter contains an ID which describes the block type. The block type ID of the Device Block 1. The other defined block types are listed in Appendix B.

The Device Type identifies the device type which is connected to the field bus via Profibus.

The Device Type of the BCG450-SP gauge is "CG", the abbreviation of "Combination Gauge".

This parameter describes the version of the "Sensor/Actuator Network Specific Device Model" published by the SEMI

(Semiconductor Equipment and Materials International, California), according to which the profile of this device has been developed.

The fixed setting of this parameter is "E54-0997".

This parameter describes the manufacturer of the device, "INFICON AG".

This parameter represents the part number of the gauge (→ section "Validity"). BCG450-SP is available with two different vacuum connection types each, for ex-

ample:

Gauge Vacuum connection Part number

BCG450-SP 25 KF 353-554

This parameter indicates the software version of the Profibus option in the following format: xxx_y.yy (where xxx is the version of the BCG450 firmware and y.yy is the version of the profibus board).

This parameter indicates the hardware version of the gauge in the format "1.0".

This parameter indicates the device name.

This parameter indicates the status of the gauge. Due to the structure of the Device State Machine, the following statuses are possible:

Parameter value Status

0 Undefined 1 Self testing 2 Idle 3 Self test exception 4 Executing 5 Abort 6 Critical fault

The device statuses are described in detail in section "Device Block, Device Behavior".

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3.1.1.10 Exception Status ID 26

The Exception Status describes the alarm and warning states of the gauge in an "Expanded error output format".

A difference is made between warnings and errors. Alarms and errors are divided into three groups (→ sections "Exception Detail

Alarm" and "Exception Detail Warning" for details):

• ALARM / Warning Device Common

For errors that occur independently of the type of device used, e.g. supply error, RAM, ROM, or EEPROM error.

• ALARM / Warning Device Specific

For device specific errors, e.g. filament rupture (Pirani), or cathode rupture (BA).

• ALARM / Warning Manufacturer Specific

For errors defined by the manufacturer that are not mentioned in the standard.

In each of the above groups, there are several error or warning conditions. The individual fields are presented in the "Exception Detail Alarm" and "Exception Detail Warning". If an error message occurs in "Exception Detail Alarm" or "Exception Detail Warning”, the corresponding bit is set in the Exception Status. Therefore, if bits 0 … 6 of the Exception Status are on "0" there is no warning message pending.

If a bit is set, the actual error can be read in the corresponding group. The Exception Status is output in cyclic data and informs on the current error status

using only one byte. If an error occurs, the current error status can be read via acyclic services or in cyclic data exchange via the parameter channel. This ensures that while the current error status is always available in the cyclic data, no unnecessary data overhead is transmitted.

Bit Function Meaning

0 ALARM, device common The bit is set if an error of the Alarm

Device Common group is detected.

1 ALARM, device specific The bit is set if an error of the Alarm

Device Specific group is detected.

2 ALARM, manufacturer specific The bit is set if an error of the Alarm

Manufacturer Specific group is detected.

- -

4 WARNING, device common The bit is set if an error of the Warning

Device Common group is detected.

5 WARNING, device specific The bit is set if an error of the Warning

Device Specific group is detected.

6 WARNING, manufacturer

specific

The bit is set if an error of the Warning Manufacturer Common group is detected.

7 Expanded Format Is constantly on "1" and marks the use of

the expanded error output format.

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3.1.1.11 Exception Detail Alarm ID 27

If, in the Exception Status, one of the bits 0 … 2 is set, the current error can be read in the "Exception Detail Alarm" parameter. The "Exception Detail Alarm" parameter consists of a total of 12 bytes that inform on the error status of the gauge.

Due to the use of the expanded error output format, these bytes have the following structure:

ByteNo Name Description Value

Common Exception Detail Alarm

Common Exception Detail Size

Indicates the number of subsequent bytes that contain the Common Exception Detail Alarm.

1 Common Exception

Detail 0

Contains current error messages from the Common Exception

Depending on

error status

Detail Alarm group.

2 Common Exception

Detail 1

Contains current error messages from the Common Exception Detail Alarm group.

Depending on

error status

Device Exception Detail Size

Indicates the number of subsequent bytes that contain the Device Exception Detail Alarm.

4 Device Exception

Detail 0 (CDG error data)

This error information from the Common Exception Detail Alarm group refers to Capacitance

Depending on

error status

Diaphragm gauge.

5 Device Exception

Detail 1 (CDG error data)

This error information from the Common Exception Detail Alarm group refers to Capacitance

Depending on

error status

Diaphragm gauge.

6 Device Exception

Detail 2 (Pirani error data)

7 Device Exception

Detail 3 (Pirani error data)

8 Device Exception

Detail 4 (BA error data)

9 Device Exception

Detail 5 (BA error data)

Manufacturer

Exception Detail

Size

11 Manufacturer

Exception Detail 0

This error information from the Common Exception Detail Alarm group refers to Pirani.

This error information from the Common Exception Detail Alarm group refers to BA.

Indicates the number of subsequent bytes that contain the Device Exception Detail Alarm.

Contains current error messages from the Manufacturer Exception

Depending on

error status

Depending on

error status

Depending on

error status

Depending on

error status

Depending on

error status

Detail Alarm group.

Bit Common Exception Detail 0 Bit Common Exception Detail 1

0 0 0 0 1 0 1 0 2 EPROM exception 2 0 3 EPROM exception 3 0 4 RAM exception 4 0 5 0 5 0 6 0 6 0 7 0 7 0

16 tira41e1 (2005-06) BCG450SPv1.cp

Device Exception Detail Alarm

Manufacturer Exception Detail Alarm 0

Bit Device Exception Detail 0

Referring to Capacitance diaphragm sensor

Bit Device Exception Detail 1

Referring to Capacitance

diaphragm sensor 0 Diaphragm Failure 0 0 1 0 1 Electronics/sensor error 2 0 2 0 3 0 3 0 4 0 4 0 5 0 5 0 6 0 6 0 7 0 7 0

This byte is a copy of Sensor Alarm

byte 0 of Capacitance diaphragm

sensor Transducer Block.

This byte is a copy of Sensor Alarm

byte 1 of Capacitance diaphragm

sensor Transducer Block.

Bit Device Exception Detail 2

Referring to Pirani

Bit Device Exception Detail 3

Referring to Pirani 0 0 0 0 1 0 1 Electronics/sensor error Pirani 2 0 2 0 3 0 3 0 4 0 4 0 5 0 5 0 6 0 6 0 7 0 7 0

This byte is a copy of Sensor Alarm

byte 0 of the Heat Transfer Vacuum

Gauge Transducer Block.

This byte is a copy of Sensor Alarm

byte 1 of the Heat Transfer Vacuum

Gauge Transducer Block.

Bit Device Exception Detail 4

Referring to BA

Bit Device Exception Detail 5

Referring to BA 0 0 0 0 1 0 1

Electronics/sensor error BA

2 0 2 0 3 0 3 0 4 0 4 0 5 0 5 0 6 0 6 0 7 0 7 0

This byte is a copy of Sensor Alarm byte 0 of the Hot Cathode Ion Gauge Transducer Block.

This byte is a copy of Sensor Alarm

byte 1 of the Hot Cathode Ion Gauge Transducer Block.

Manufacturer Exception Detail 0 is set to "1", if there is an internal communication

error in the gauge.

tira41e1 (2005-06) BCG450SPv1.cp 17

3.1.1.12 Exception Detail Warning ID 28

If, in the Exception Status, one of bits 4 … 6 is set, the current warning can be read in the parameter "Exception Detail Warning". The Exception Detail Warning parameter consists of a total of 13 bytes that inform on the error status of the gauge.

Due to the use of the expanded error output format, these bytes have the following structure:

ByteNo Name Description Value

Common Exception Detail Size

1 Common Exception

Detail 0

2 Common Exception

Detail 1

Device Exception Detail Size

4 Device Exception

Detail 0

5 Device Exception

Detail 1 (Capacitance diaphragm sensor)

6 Device Exception

Detail 2 (Capacitance diaphragm sensor)

7 Device Exception

Detail 3 (Pirani)

8 Device Exception

Detail 4 (Pirani)

9 Device Exception

Detail 5 (BA)

10 Device Exception

Detail 6 (BA)

Manufacturer

Exception Detail

Size

12 Manufacturer

Exception Detail

Indicates the number of subsequent bytes that contain the

2 Common Exception Detail Warning.

Contains current error messages from the Common Exception

Depending on

warning status

Detail Warning group. Contains current error messages

from the Common Exception

Depending on

warning status

Detail Warning group.

Indicates the number of subsequent bytes that contain the

5 Device Exception Detail Warning.

One of N Status Extension. Depending on

warning status

This error information from the Common Exception Detail

Depending on

warning status Warning group refers to Capacitance diaphragm sensor.

This error information from the Common Exception Detail

Depending on

warning status Warnings group refers to Capacitance diaphragm sensor.

This error information from the Common Exception Detail Alarm

Depending on

warning status group refers to Pirani.

This error information from the Common Exception Detail Alarm

Depending on

warning status group refers to Pirani.

This error information from the Common Exception Detail Alarm

Depending on

warning status group refers to BA.

This error information from the Common Exception Detail Alarm

Depending on

warning status group refers to BA.

Indicates the number of subsequent bytes that contain the

Device Exception Detail Warning. Contains current error messages

from the Manufacturer Exception

Depending on

warning status Detail Alarm group.

18 tira41e1 (2005-06) BCG450SPv1.cp

Common Exception Detail Warning

Device Exception Detail Warning

Bit Common Exception Detail 0 Bit Common Exception Detail 1

0 0 0 0 1 0 1 0 2 EPROM exception 2 0 3 EPROM exception 3 0 4 RAM exception 4 0 5 0 5 0 6 0 6 0 7 0 7 0

The warning bits are set in the same way as the error bits because here, warnings have the same meaning as errors.

Bit Device Exception Detail 0 Bit Device Exception Detail 1

Referring to CDG

0 Bit set if

0 0

Reading Invalid

1 Bit set if

1 0

Device Overrange

2 Bit set if

2 0

Device Underrange 3 0 3 0 4 0 4 0 5 0 5 0 6 0 6 0 7 0 7 0

This byte is a copy of the One Of N

Vacuum Gauge Transducer Block.

This byte is a copy of Sensor

Warning byte 0 of Capacitance

diaphragm sensor Transducer Block

Sensor Warning Byte 0.

Bit Device Exception Detail 2

Referring to CDG

Bit Device Exception Detail 3

Referring to Pirani 0 0 0 0 1 Electronics/Sensor Warning 1 0 2 0 2 0 3 0 3 0 4 0 4 0 5 0 5 0 6 0 6 0 7 0 7 0

This byte is a copy of Sensor

Warning byte 1 of Capacitance

diaphragm sensor Transducer Block.

This byte is a copy of Sensor

Warning byte 0 of the Heat Transfer

Vacuum Gauge Transducer Block.

tira41e1 (2005-06) BCG450SPv1.cp 19

Manufacturer Exception Detail Warning

Device Exception Detail 4

Bit

Referring to Pirani

Device Exception Detail 5

Bit

Referring to BA 0 0 0 0 1 Electronics/sensor warning

1 0

Pirani 2 0 2 0 3 0 3 0 4 0 4 0 5 0 5 0 6 0 6 0 7 0 7 0

This byte is a copy of Sensor

Warning byte 1 of the Heat Transfer

Vacuum Gauge Transducer Block.

Device Exception Detail 6

Bit

Referring to BA

This byte is a copy of Sensor

Warning byte 0 of the Hot Cathode

Ion Gauge Transducer Block.

0 0 1 Electronics/sensor warning 2 0 3 Pressure too high for degas 4 0 5 0 6 0 7 0

This byte is a copy of Sensor

Warning byte 1 of the Hot Cathode

Ion Gauge Transducer Block.

Bit Manufacturer Exception Detail Warning

0 0 1 Relay A set if atmospheric pressure is reached. 2 Relay B set if atmosphere pressure is reached. 3 0 4 0 5 0 6 0 7 0

The following parameters are copies of the ID 27 and ID 28. They are used only if you want to access these parameters by the parameter channel.

3.1.1.13 Copy Common Exception Detail Alarm 0 ID 204

3.1.1.14 Copy Device Exception Detail Alarm 0 … 3

This parameter corresponds to the Common Exception Detail Alarm of the Exception Detail Alarm (ID 27).

This parameter corresponds to the Device Exception Detail Alarm Byte 0 … 3 of the Exception Detail Alarm (ID 27).

ID 205

3.1.1.15 Copy Device Exception Detail Alarm 4 … 5

This parameter corresponds to the Device Exception Detail Alarm Byte 4 … 5 of the Exception Detail Alarm (ID 27).

ID 206

20 tira41e1 (2005-06) BCG450SPv1.cp

3.1.1.16 Copy Manufacturer Exception Detail Alarm 0 ID 207

3.1.1.17 Copy Common Exception Detail Warning 0 ID 208

3.1.1.18 Copy Device Exception Detail Warning 0 … 3 ID 209

This parameter corresponds to the Manufacturer Exception Detail Alarm Byte 0 of the Exception Detail Alarm (ID 27).

This parameter corresponds to the Common Exception Detail Warning Byte 0 of the Exception Detail Warning (ID 28).

This parameter corresponds to the Device Exception Detail Warning Byte 0 … 3 of the Exception Detail Warning (ID 28).

3.1.1.19 Copy Device Exception Detail Warning 4 … 6 ID 210

3.1.1.20 Copy Manufacturer Exception Detail Warning 0 ID 211

3.1.2 Device Block,

Device Behavior

This parameter corresponds to the Device Exception Detail Warning Byte 4 … 6 the Exception Detail Warning (ID 28).

This parameter corresponds to the Manufacturer Exception Detail Warning Byte 0 of the Exception Detail Warning (ID 28).

The BCG450-SP behaves as described in the status diagram below.

(0)

NORMAL

INIT

(

(13)

(14)

)

RUNNING

SELFTESTING

)

(

SELFTEST

EXCEPTION

)

(

)

IDLE

(5)

(4)

ABORT

Cyclic data traffic

Acyclic data traffic

(8)

(10)

CRITICAL

EXECUTING

(9)

FAULT

After the start, the gauge independently runs through the INIT and SELFTESTING status and eventually changes to the IDLE status (if there is no error) or to the SELFTEST_EXCEPTION status (if there is a gauge error).

When data traffic is taken up, a difference has to be made between cyclic and acyclic data traffic.

As soon as cyclic data interchange is taken up, the gauge automatically changes to the EXECUTING status.

In acyclic data traffic, a START service has to be transmitted to bring the gauge to the EXECUTING status.

tira41e1 (2005-06) BCG450SPv1.cp 21

Device statuses

3.1.2.1 Device Block State Command

Status name Description NORMAL The communication interface can respond to com-

mands. All defined blocks of the gauge exist.

RUNNING All block instances are initialized and the individual

parameters have their initial or default values. SELFTESTING In this status, the gauge performs a selftest. IDLE All blocks defined in the gauge are initialized and the

complete hardware has been tested and found free

of errors. The value defined in the Safe State is out-

put as measured value. SELFTESTEXCEPTION During the self test, an error has been detected. The

gauge has changed to the SELFTESTEXCEPTION

status. The cause of the error can be found in the

attributes Device Exception Detail Alarm/Warning of

the Device Block. The value defined in the Safe State

is output as measured value. EXECUTING The gauge functions normally and outputs the meas-

ured value. ABORT The Device Block is in the ABORT status. The gauge

specific measurement functions are not carried out. CRITICALFAULT A device error has occurred. The gauge specific

measurement functions are not carried out. The

value defined in the Safe State is output as meas-

ured value.

There are a number of special commands for bringing the gauge into a status it does not automatically go to.

ID Name Structure Data type Bytes Access Store Range

15 Device Block

State Command

Name Description

Simple Unsigned8 1 1_R/W

2_R/W

→ below

value

0 Inactive No action. 1 Reset Used for reinitializing the device. 2 Abort Brings the device to the ABORT status. 3 Recover Used for bringing the device from the ABORT

status into the Recovered State IDLE.

4 Execute Brings the unit to the EXECUTING status, in which

the gauge functions normally. As soon as cyclic data traffic is initialized, this status command is

executed automatically. 5 Stop Brings the gauge to the IDLE status. 6 Perform

Stops the running activity and starts SELFTEST.

Diagnostic

22 tira41e1 (2005-06) BCG450SPv1.cp

3.2 Analog Input Block

3.2.1 One Of N Analog Input Function Block / SLOT 1

All gauge functions of the BCG450-SP are described in the Analog Input Block. Since the gauge includes three measuring systems, there are also three Analog

Input Block Instances representing the Pirani measuring part, the ionization measuring part (BA) and the capacitance diaphragm gauge part (CDG) respectively.

ID Name

Structure Data type Bytes Access Store 16 Block Type Simple Octet string 4 2_R N 46 Channel Instance

Simple Unsigned8 1 1/2_R/W N

Selector

47 PV Selector Simple Unsigned8 1 0_XI 1/2_R D

The above parameters are described below.

3.2.1.1 Block Type

3.2.1.2 Channel Instance Selector

3.2.1.3 PV Selector

Measuring range

The value of the Block Type ID is "3" (→ table in Appendix A).

The gauge has three instances of the Analog Input Function Block and three instances of the Vacuum Gauge Transducer Block, or one instance of each block per measuring systems (Capacitance diaphragm sensor, Pirani and BA). There are two additional instances for describing the switching functions (→ section "Analog Sensor Input Function Block", Instances 5 and 6).

However, there is only one address range for both, querying and setting the corresponding parameters. The Parameter Channel Instance Selector is used for defining the parameters that are written into the address range.

If the Parameter Channel Instance Selector is set to "1", the attributes of Instance 1 are mapped into that address range and can be written or read by addressing Slot ⇒ Instance ⇒ Parameter-ID.

The PV Selector is determined by the gauge and defines the Analog Input Function Block Instance from which the measured value is copied into the cyclic output data telegrams. Therefore, the value output in the cyclic data is always the measured value of the active instance, i.e. the one that is currently measuring. While the gauge is measuring in the BA range, the measured value of the ionization vacuum meter is output in the cyclic data and while the gauge is measuring in the Pirani range, the measured value of the Pirani is output.

The measured values of Instances 5 and 6 (thresholds of the switching functions) are not output in the cyclic data.

The pressure ranges, in which measurement is performed either by the Pirani measuring part, by the BA measuring part or bye the Capacitance diaphragm sensor measuring part, and which are thus called "active", are indicated below:

Pressure [mbar] active

instance

1 < p < 1500 CDG

5.5×10-3 < p ≤ 10

-10

5×10

< p < 2×10

-2

Pirani

In the pressure range 1 … 10 mbar and 5.5×10-3… 2×10-2 mbar an averaging of the two corresponding measurement principles is done. The definition of one instance as the active instance in this pressure range is done approximately in the middle of the crossover region.

tira41e1 (2005-06) BCG450SPv1.cp 23

3.2.2 Analog Sensor Input Function Block Instance 1 / SLOT 1

3.2.2.1 Process Value

3.2.2.2 Status

3.2.2.3 Data Type

Instance 1 of the Analog Sensor Input Function Blocks describes the functionality of the Pirani measuring part of the gauge.

The following attributes are supported:

ID Name Structure Data type Bytes Access Store 19 Process Value

(PV)

Simple According to

Parameter Data Type

- 0_XI 1_R 2_R

20 Status Simple Unsigned8 1 0_XI

1/2_R

21 Data Type Simple Unsigned8 1 2_R/W N 22 Data Units Simple Unsigned16 2 2_R/W N 23 Reading Valid Simple Boolean 1 1_R

2_R

24 Full Scale Simple According to

- 1/2_R N

Data Type value

(Parameter 21) 39 Safe State Simple Unsigned8 1 1/2_R/W N 40 Safe Value Simple According to

- 1/2_R/W N Data Type value (Parameter 21)

44 Overrange Simple According to

- 1/2_R N Data Type value (Parameter 21)

45 Underrange Simple According to

- 1/2_R N Data Type value (Parameter 21)

The Process Value contains the measured value of the Pirani Device Instance in the currently selected data unit (ID 22) and in the selected data type (ID 21).

If the device is not in the EXECUTING State (ID 25, Device Block), the value defined in the Safe State is output.

Values output in the data unit COUNTS can be converted into a pressure value by means of the following formulas:

Calculation of the pressure (PV is the abbreviation used for Process Value):

mbar

Torr

Micron

(COUNTS / 2000) - 12.5

= 10

= 0.75006168 × PV

= 10-3 × PV

= 100 × PV

Torr

mbar

This parameter remains on "0".

Two data types are supported: Float and Integer16. In cyclic data exchange, the data type cannot be modified. The data type setting

can only be modified when the gauge is in the IDLE status. By defining the configuration data for cyclic data exchange (selection of standard telegrams), the data type used in the selected standard telegram is taken over. All settings previously made in acyclic data traffic are thus overwritten.

If the data type is set in one instance, that data type setting applies to all instances. Likewise, when a standard telegram is selected, the data type used by that standard telegram will be valid for all instances:

24 tira41e1 (2005-06) BCG450SPv1.cp

3.2.2.4 Data Unit

3.2.2.5 Reading Valid

Coding Data type

3 Integer16 8 Float

The gauge supports the following pressure units:

Coding Data type

1001 COUNTS 1301 Torr 1302 mTorr (Micron) 1308 mbar 1309 Pascal

For safety reasons, it is not possible to change the pressure unit while the gauge is cyclically interchanging data with a DP/V0 master.

The data unit setting can only be modified when the gauge is in the IDLE status.

In cyclic data traffic, the data unit must be set in the User Parameter Data. All settings previously made in acyclic data traffic are overwritten (→ section "User Parameter Data").

If the data unit is set in one instance, that data unit setting applies to all instances. Likewise, the data unit setting made in the User Parameter Data is valid for all instances.

This parameter indicates that the pressure reading is within a valid range, which means that:

3.2.2.6 Full Scale

• The gauge is in the EXECUTING status.

• There is no error (ID 26 or 27 of the Device Block)

• The measured value is lower than the overrange value and higher than the

underrange value.

If this value is set to zero, the pressure reading is not valid. In such a case, either check Exception Status (ID 26, Device Block) to find out whether there is an error or check One Of N Status Extension (ID 120, One Of N Vacuum Gauge Transducer Block) to find out whether the measured value is out of the specified measuring range (overrange or underrange mode).

This parameter contains the valid maximum value of the pressure reading (1000 mbar) in the currently selected data unit and data type.

Pressure unit Full scale COUNTS 31000 Torr 750.06168 mTorr (Micron) 750061.68 mbar 1000 Pascal 100000

tira41e1 (2005-06) BCG450SPv1.cp 25

3.2.2.7 Safe State

3.2.2.8 Safe Value

3.2.2.9 Overrange

3.2.2.10 Underrange

When the gauge is not in the EXECUTING status (ID 25, Device Block) or if there is a device error, a value defined by Safe State is output as pressure value. You can select among:

• "0"

• Full scale

• Last valid value

• Safe Value (user-definable in ID 40)

Safe State Coding PV behavior Zero 0 The Process Value (measured value ID 19) is set

to 0.

Full Scale 1 The Process Value (measured value ID 19) is set

to the full scale value (ID 24).

Hold Last Value 2 The Process Value is set to the last valid value

obtained in the EXECUTING status.

Use Safe Value 3 The Process Value (measured value ID 19) is set

to the Safe Value (ID 40).

The Safe Value is the value output with the Process Value parameter (ID 19) when an error occurs or the gauge goes to the NOT EXECUTING status. If this value is set to zero, it will remain on zero when the data unit is changed.

Overrange is the highest valid measured value at which Reading Valid is still on "1".

Pressure unit Overrange COUNTS 31000 Torr 750.06168 mTorr (Micron) 750061.68 mbar 1000 Pascal 100000

Underrange is the lowest valid measured value at which Reading Valid is still on "1".

Pressure unit Underrange COUNTS 20480.7254 Torr 4.12534×10

-3

mTorr (Micron) 4.12534 mbar 5.5×10

Pascal

-3

0.55

26 tira41e1 (2005-06) BCG450SPv1.cp

3.2.3 Analog Sensor Input Function Block Instance 2 / SLOT 1

3.2.3.1 Process Value

3.2.3.2 Status

3.2.3.3 Data Type

Instance 2 of the Analog Sensor Input Function Block describes the functionality of the BA measuring part of the gauge.

In Instance 2, the same attributes as in Instance 1 are supported:

ID Name Structure Data type Bytes Access Store

19 Process Value

(PV)

Simple According to

Parameter Data Type

- 0_XI 1_R 2_R

20 Status Simple Unsigned8 1 0_XI

1/2_R

21 Data Type Simple Unsigned8 1 2_R/W N 22 Data Units Simple Unsigned16 2 2_R/W N 23 Reading Valid Simple Boolean 1 1_R

2_R

24 Full Scale Simple According to

- 1/2_R N

Data Type value

(parameter 21) 39 Safe State Simple Unsigned8 1 1/2_R/W N 40 Safe Value Simple According to

- 1/2_R/W N Data Type value (parameter 21)

44 Overrange Simple According to

- 1/2_R N Data Type value (parameter 21)

45 Underrange Simple According to

- 1/2_R N Data Type value (parameter 21)

The Process Value contains the measured value of the BA Device Instance in the currently selected data unit (ID 22) and in the selected data type (ID 21).

If the device is not in the EXECUTING status (ID 25, Device Block), the value defined in the Safe State is output.

Values output in the data unit COUNTS can be converted into a pressure value by means of the following formulas:

Calculation of the pressure (PV is the abbreviation used for Process Value):

mbar

Torr

Micron

(COUNTS / 2000) - 12.5

= 10

= 0.75006168 × PV

= 10-3 × PV

= 100 × PV

Torr

mbar

This parameter is remains on "0".

Two data types are supported: Float and Integer16. In cyclic data traffic, the data type cannot be modified. The data type setting can

only be modified when the gauge is in the IDLE status. By defining the configuration data for cyclic data traffic (selection of standard telegram), the data type used in the selected standard telegram is taken over. All settings previously made in acyclic data traffic are thus overwritten.

Coding Data type

3 Integer16 8 Float

tira41e1 (2005-06) BCG450SPv1.cp 27

3.2.3.4 Data Unit

3.2.3.5 Reading Valid

The gauge supports the following pressure units:

Coding Pressure unit

1001 COUNTS 1301 Torr 1302 mTorr (Micron) 1308 mbar 1309 Pascal

For safety reasons, it is not possible to change the pressure unit while the gauge is cyclically interchanging data with a DP/V0 master.

The data unit setting can only be modified when the gauge is in the IDLE status.

In cyclic data traffic, the data unit must be set in the User Parameter Data. All settings previously made in acyclic data traffic are overwritten (→ section "User Parameter Data").

If the data unit is set in one instance, that data unit setting applies to all instances. Likewise, the data unit setting made in the User Parameter Data is valid for all instances.

This parameter indicates that the pressure reading is within a valid range, which means that:

3.2.3.6 Full Scale

3.2.3.7 Safe State

• The gauge is in the EXECUTING status.

• There is no error (ID 26 or 27 of the Device Block)

• The measured value is lower than the overrange value and higher than the

underrange value.

This parameter contains the valid maximum value of the pressure reading (1000 mbar) in the currently selected data unit and data type.

Pressure unit Full scale COUNTS 21602 Torr 1.5×10

-2

mTorr (Micron) 15 mbar 2×10

-2

Pascal 2

When the gauge is not in the EXECUTING state (ID 25, Device Block) or if there is a device error, a value defined by Safe State is output as pressure value. You can select among:

• "0"

• Full scale

• Last valid value

• Safe Value (user-definable in ID 40)

28 tira41e1 (2005-06) BCG450SPv1.cp

3.2.3.8 Safe Value

3.2.3.9 Overrange

Safe State Coding PV behavior Zero 0 The Process Value (measured value ID 19) is set

to 0.

Full Scale 1 The Process Value (measured value ID 19) is set

to the full scale value (ID 24).

Hold Last Value 2 The Process Value is set to the last valid value

obtained in the EXECUTING status.

Use Safe Value 3 The Process Value (measured value ID 19) is set

to the Safe Value (ID 40).

The Safe Value is the value output with the Process Value Parameter (ID 19) when an error occurs or the gauge goes to the NOT EXECUTING status. If this value is set to zero, it will remain on zero when the data unit is changed.

Overrange is the highest valid measured value at which Reading Valid is still on "1".

Pressure unit Overrange COUNTS 21602 Torr 1.5×10

-2

mTorr (Micron) 15 mbar 2×10

-2

Pascal 2

3.2.3.10 Underrange

Underrange is the lowest valid measured value at which Reading Valid is still on "1".

Pressure unit Underrange COUNTS 6397.95 Torr 3.7503×10 mTorr (Micron) 3.7503×10 mbar 5.0×10 Pascal 5.0×10

-10

-7

-10

-8

tira41e1 (2005-06) BCG450SPv1.cp 29

3.2.4 Analog Sensor Input Function Block Instance 3 / SLOT 1

Instance 3 of the Analog Sensor Input Function Block describes the functionality of the Capacitance diaphragm sensor measuring part of the gauge.

In Instance 3, the same attributes as in Instance 1 are supported:

ID Name Structure Data type Bytes Access Store 19 Process Value

(PV)

Simple According to

Parameter Data Type

- 0_XI 1_R 2_R

20 Status Simple Unsigned8 1 0_XI

1/2_R

21 Data Type Simple Unsigned8 1 2_R/W N 22 Data Units Simple Unsigned16 2 2_R/W N 23 Reading Valid Simple Boolean 1 1_R

2_R

24 Full Scale Simple According to

- 1/2_R N

Data Type value

(parameter 21) 39 Safe State Simple Unsigned8 1 1/2_R/W N 40 Safe Value Simple According to

- 1/2_R/W N Data Type value (parameter 21)

44 Overrange Simple According to

- 1/2_R N Data Type value (parameter 21)

45 Underrange Simple According to

- 1/2_R N Data Type value (parameter 21)

3.2.4.1 Process Value

3.2.4.2 Status

3.2.4.3 Data Type

The Process Value contains the measured value of the Capacitance diaphragm sensor Device Instance in the currently selected data unit (ID 22) and in the selected data type (ID 21).

If the device is not in the EXECUTING status (ID 25, Device Block), the value defined in the Safe State is output.

Values output in the data unit COUNTS can be converted into a pressure value by means of the following formulas:

Calculation of the pressure (PV is the abbreviation used for Process Value):

mbar

Torr

Micron

(COUNTS / 2000) - 12.5

= 10

= 0.75006168 × PV

= 10-3 × PV

= 100 × PV

Torr

mbar

This parameter is remains on "0".

Two data types are supported: Float and Integer16. In cyclic data traffic, the data type cannot be modified. The data type setting can

30 tira41e1 (2005-06) BCG450SPv1.cp

3.2.4.4 Data Unit

3.2.4.5 Reading Valid

Coding Data type

3 Integer16 8 Float

The gauge supports the following pressure units:

Coding Pressure unit

1001 COUNTS 1301 Torr 1302 mTorr (Micron) 1308 mbar 1309 Pascal

For safety reasons, it is not possible to change the pressure unit while the gauge is cyclically interchanging data with a DP/V0 master.

The data unit setting can only be modified when the gauge is in the IDLE status.

In cyclic data traffic, the data unit must be set in the User Parameter Data. All settings previously made in acyclic data traffic are overwritten (→ section "User Parameter Data").

If the data unit is set in one instance, that data unit setting applies to all instances. Likewise, the data unit setting made in the User Parameter Data is valid for all instances.

This parameter indicates that the pressure reading is within a valid range, which means that:

3.2.4.6 Full Scale

• The gauge is in the EXECUTING status.

• There is no error (ID 26 or 27 of the Device Block)

• The measured value is lower than the overrange value and higher than the

underrange value.

This parameter contains the valid maximum value of the pressure reading in the currently selected data unit and data type.

Pressure unit Full scale COUNTS 31352 Torr 1125.09252 mTorr (Micron) 1125092 mbar 1500 Pascal 150000

tira41e1 (2005-06) BCG450SPv1.cp 31

3.2.4.7 Safe State

3.2.4.8 Safe Value

3.2.4.9 Overrange

3.2.4.10 Underrange

When the gauge is not in the EXECUTING status (ID 25, Device Block) or if there is a device error, a value defined by Safe State is output as pressure value. You can select among:

• "0"

• Full scale

• Last valid value

• Safe Value (user-definable in ID 40)

Safe State Coding PV behavior Zero 0 The Process Value (measured value ID 19) is set

to 0.

Full Scale 1 The Process Value (measured value ID 19) is set

to the full scale value (ID 24).

Hold Last Value 2 The Process Value is set to the last valid value

obtained in the EXECUTING status.

Use Safe Value 3 The Process Value (measured value ID 19) is set

to the Safe Value (ID 40).

Overrange is the highest valid measured value at which Reading Valid is still on "1".

Pressure unit Overrange COUNTS 31352 Torr 1125.09252 mTorr (Micron) 1125092 mbar 1500 Pascal 150000

Underrange is the lowest valid measured value at which Reading Valid is still on "1".

Pressure unit Underrange COUNTS 25000 Torr 0.75006168 mTorr (Micron) 750.06168 mbar 1 Pascal 100

32 tira41e1 (2005-06) BCG450SPv1.cp

3.2.5 Analog Sensor Input Function Block Instances 5 and 6 / SLOT 1

3.2.5.1 Process Value

Instances 5 and 6 of the Analog Sensor Input Function Block describe the functionality of the two switching functions (Setpoint A / Setpoint B) of the gauge (setting the switching functions →  [2], [3]):

Instance Setpoint

5 A 6 B

With Process Values (ID 19), the current threshold setting (made by means of the potentiometers) is read; with Status, the relay status (open/closed) can be read.

ID Name Structure Data type Bytes Access Store

19 Process Value

(PV)

20 Status Simple Unsigned8 1 1_R

Simple Unsigned16 - 1_R

2_R

21 Data Type Simple Unsigned8 1 2_R

2_W

22 Data Units Simple Unsigned16 2 2_R

2_W

23 Reading Valid Simple Boolean 1 1_R

2_R

201 Setpoint

Function

202 Percentage of

atmosphere

203 Atmospheric

pressure

Simple Boolean 1 1_W

2_W

Simple Unsigned 16 2 1_W

2_W

Simple Boolean 1 1_W

2_W

reached

The Process Value contains the current setting of the threshold potentiometers for "Setpoint A" and "Setpoint B" in the currently selected data unit and data type.

If the pressure drops below the set threshold, the relay is closed. If after that, the pressure rises above that threshold with a hysteresis of 10%, the relay is opened again (→  [2], [3]).

The Process Value PV is output in the currently selected data unit and data type. Values output in the pressure unit COUNTS can be converted into a pressure value

by means of the following formulas:

mbar

(COUNTS / 2000) - 12.5

= 10

The threshold voltages of the Setpoint potentiometer converted into a pressure value by means of the following formulas:

mbar

(1.23011 × U) - 9.30102999

= 10

Where: U is the threshold voltage [V] of the corresponding Setpoint (A, B),

measured at the D-Sub connector (sensor cable connector) of the gauge (→  [2], [3]).

The upper pressure limit of the gauge is 1500 mbar ⇒ the resulting pressure value of the attribute "Percentage of Atmosphere" must be less than 1500 mbar, otherwise the relay may never be set. The allowed range for "Percentage of Atmosphere" is 1 … 140%.

tira41e1 (2005-06) BCG450SPv1.cp 33

3.2.5.2 Status

3.2.5.3 Data Type

3.2.5.4 Data Unit

3.2.5.5 Reading Valid

If the pressure drops below the set threshold, the relay is activated (normally open contact closed). If the pressure then rises above the set threshold with a hysteresis of 10%, the relay is deactivated again (normally open contact open).

Bit Definition

0 0 1 Low Alarm Exception: 0 = cleared, 1 = set 2 0 3 Low Warning Exception: 0 = cleared, 1 = set 4 0 5 0 6 0 7 0

Description → Instance 1.

This parameter is always on "1".

3.2.5.6 Setpoint Function

3.2.5.7 "Percentage of Atmosphere"

Defines whether the relays are controlled by the according potentiometer or by the result of the comparison between atmosheric pressure sensor and the vacuum (CDG) pressure value.

Byte value Definition

0 Setpoint function 1 atmosphere control (default)

If atmosphere control

is activated and the pressure of in the process chamber

(active sensor instance) falls below the process value of this instance 5 or 6, the relay will be closed.

The relay is opend if any of the sensor alarms occurs. The device state has to be EXECUTING to enable the relay to close.

General description of Atmosphere control →  [3].

If the pressure value (active value) is within a "window" specified by this attribute from the atmosphere pressure sensor value (instance 4), the relay will be closed.

34 tira41e1 (2005-06) BCG450SPv1.cp

Setpoint function "

Atmosphere Control"

Atmospheric pressure threshold =

Where:

Atmospheric pressure × N

—————————————

100

Atmospheric pressure threshold

[mbar] : If the pressure inside the vacuum chamber rises

above this threshold, the relay "Atmosheric pressure reached" is energized.

Atmospheric

[mbar] : Atmospheric pressure (100%, ambient)

pressure N [%] : "Percentage of Atmosphere"

(1 … 140%, default value = 5%)

(Example values in the diagram below are printed in italic)

Measuring signal

(Pressure p)

1500 mbar

980 mbar

833 mbar

Upper limit of measuring range of gauge

Atmospheric pressure (100%, am bient)

"Percentage of Atmosphere"

(85%)

(Atmospheric pressure threshold)

816 mbar

Hysteresis

(2% of atmospheric pressure threshold)

Relay status "Atmospheric pressure rea c hed"

The (piezo) sensor measuring atmospheric pressure can be calibrated to the value of the Capacitance Diaphragm Gauge pressure (

→  41).

ID202 value

The value "Percentage of Atmosphere" has to be entered as follows:

N' = 10 × N

Where: N = "Percentage of Atmosphere", as described above

N' = Value to be entered in ID202

(range 10 … 1400

1 … 140%)

Example: For a "Percentage of Atmosphere" of 50(%) enter 500 in ID202.

tira41e1 (2005-06) BCG450SPv1.cp 35

3.2.5.8 Atmosphere Reached

If the Setpoint Function is set to Atmosphere Control and the relay is closed, this byte is set to one, if the relay is open or not energized, the value is zero.

Additionally the following information is copied into the Manufacturer Exeption Detail Warning:

• Bit 1 of Manufacturer Exeption Detail Warning is set if relay A is energized and

atmospheric pressure is reached.

• Bit 2 of Manufacturer Exeption Detail Warning is set if relay B is energized and

atmospheric pressure is reached.

3.3 Transducer Block

3.3.1 One Of N Vacuum Gauge Transducer Block / SLOT 1

3.3.1.1 One Of N Status Extension

3.3.2 Heat Transfer Vacuum Gauge Transducer Block / SLOT 1 / Instance 1

3.3.2.1 Block Type

3.3.2.2 Status Extension

ID Name Structure Data type Bytes Access Store

120 One Of N Status

Extension

Simple UINT8 1 1_R

2_R

This parameter indicates whether the overrange or underrange of the gauge is exceeded.

Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0

0 0 0 0 0 Underrange

Exceeded

If the gauge is operated in its overrange or underrange (p < 5×10

Overrange

Exceeded

-10

mbar or

Reading

Invalid

p > 1500 mbar), the corresponding bit and additionally the bit "Reading Invalid" is set.

If an error occurs, the bit "Reading Invalid" as well as the corresponding error bits in Device Block (ID 26, 27, 28 Device Block) are set.

ID Name Structure Data type Bytes Access Store 101 Block Type Simple Octet string 4 2_R 102 Status Extension Simple UINT8 1 1/2_R V 103 Sensor Alarm Struct Array of 2 bytes 2 1/2_R V 104 Sensor Warning Struct Array of 2 bytes 2 1/2_R V

According to the table in Appendix A, the Block Type ID has the value "13".

This parameter indicates whether the overrange or underrange of the Heat Transfer Vacuum Gauge device instance is exceeded.

Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0

0 0 0 0 0 Underrange

Exceeded

Overrange

Exceeded

Reading

Invalid

If the instance is operated in its overrange or underrange, the corresponding bit and additionally the bit "Reading Invalid" is set.

If an error occurs, the bit "Reading Invalid" as well as the corresponding error bits in Device Block (ID 26, 27, 28 Device Block) are set.

3.3.2.3 Sensor Alarm

This parameter indicates the detectable errors occurring in connection with the Pirani measuring part. The present implementation allows detection of one error.

Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 Byte 0 0 0 0 0 0 0 0 0 Byte 1 0 0 0 0 0 0 Electronics Failure

Electronics Failure includes a sensor error.

The Sensor Alarm bits defined here are copied into the Device Block ID 27 in the "Device Exception Detail Alarm" range of the Pirani measuring part.

36 tira41e1 (2005-06) BCG450SPv1.cp

3.3.2.4 Sensor Warning

3.3.3 Hot Cathode Ion Gauge Transducer Block / SLOT 1 / Instance 2

3.3.3.1 Block Type

3.3.3.2 Status Extension

This parameter indicates the detectable warnings occurring in connection with the Pirani measuring part. The present implementation allows detection of one warning.

Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 Byte 0 0 0 0 0 0 0 0 0 Byte 1 0 0 0 0 0 0 Electronics Warning 0

The Sensor Warning bits defined here are copied into the Device Block ID 28 in the "Device Exception Detail Warning" range of the Pirani measuring part.

ID Name Structure Data type Bytes Access Store Initial Value 14 Hot Cathode

Block State

Rec 1 1_W

2_W

FALSE

Command

101 Block Type Simple Octet

4 2_R 16

string

102 Status

Extension

103 Sensor

Alarm

104 Sensor

Warning

105 Emission

Status

106 Emission

Current

109 Degas

Status

201 Emission

User Mode

Simple UINT8 1 1_R

2_R

Struct Array of

2 bytes

Struct Array of

2 bytes

2 1_R

2_R

2 1_R

2_R

Simple Boolean 1 1_R/W

2_R/W

Simple FLOAT 4 1_R/W

2_R/W

Simple Boolean 1 1_R

2_R

Simple Boolean 1 1_R

2_R

V 0

State

According to the table in Appendix A, the Block Type ID has the value "16".

This parameter indicates that the overrange or underrange of the Hot Cathode Ion Gauge instance is exceeded.

Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0

0 0 0 0 0 Underrange

Exceeded

Overrange

Exceeded

Reading

Invalid

If the instance is operated in its overrange or underrange, the corresponding bit and additionally the bit "Reading Invalid" is set.

If an error occurs, the bit "Reading Invalid" as well as the corresponding error bits in Device Block (ID 26, 27, 28 Device Block) are set.

3.3.3.3 Sensor Alarm

This parameter indicates the detectable errors occurring in connection with the BA measuring part. The present implementation allows detection of one error.

Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 Byte 0 0 0 0 0 0 0 0 0 Byte 1 0 0 0 0 0 0 Electronics Failure

Electronics Failure includes a sensor error.

The Sensor Alarm bits defined here are copied into the Device Block ID 27 in the "Device Exception Detail Alarm" range of the BA measuring part.

tira41e1 (2005-06) BCG450SPv1.cp 37

3.3.3.4 Sensor Warning

3.3.3.5 Emission Status

3.3.3.6 Emission Current

3.3.3.7 Degas Status

This parameter indicates the detectable warnings occurring in connection with the BA measuring part. The present implementation allows detection of one warning.

Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 Byte 0 0 0 0 0 0 0 0 0 Byte 1 0 0 0 0 Pressure too

high for degas

0 Electronics

Warning

The Sensor Warning bits defined here are copied into the Device Block ID 28 in the "Device Exception Detail Warning" range of the BA measuring part.

This parameter indicates the emission status of the gauge.

Emission status Bit 1 Bit 0 Meaning

False 0 0 Emission Off TRUE 0 1 Emission current low TRUE 1 0 Emission current high TRUE 1 1 Degas

This parameter indicates the value of the emission current in mA.

Emission current [mA] Bit 1 Bit 0

0 0 0

0.025 0 1 5 1 0

20 1 1

This parameter indicates whether the gauge is in Degas mode.

Degas Status Bit 1 Bit 0 Meaning

FALSE 0 0 Degas Off

TRUE 1 1 Degas On

3.3.3.8 Emission User Mode State

This parameter indicates whether the gauge is in Automatic oder Manual Emission Mode.

Emission User

Mode State

Byte

value

Meaning

FALSE 0 Manual Mode

TRUE 1 Automatic Mode

38 tira41e1 (2005-06) BCG450SPv1.cp

3.3.3.9 Hot Cathode Block State Command

This service is used for activating the Degas mode via Profibus.

Byte Name Structure Data type Bytes Access

0 State Command Simple Unsigned8 2 1 State Command

Simple Unsigned8 1

Data Field

2 Value Simple Unsigned8 1

State

Name Description

Command

0 Inactive No action 1 Set Degas

State

3 Set

Emission State

128 Emission

User Mode

Activates/deactivates the Degas mode This service is used for activating/deactivating the

Degas mode (p < 7.2

×10

-6

mbar). If the Degas mode has not been deactivated with Degas Off before, it is automatically turned off after 3 minutes.

The Degas State can only be changed if p < Degas On Limit, otherwise the command returns the error “Object State Conflict“.

The State Command Data Field Value can have the following values: 0

Degas Off

Degas On

Turns the emission ON or OFF according to the target value

Target Value: 0 Target Value: 1

⇒ Switch emission OFF ⇒ Switch emission ON

The device supports two modes :

Automatic Mode

Emission is switched on or off by the integrated Pirani automatically.

If the emission is switched on and is then switched off manually, the emission will be switched on again only if the pressure rises above the 3.2 drops below 2.4

×10

-2

mbar.

-2

×10

mbar and then

Manual Mode

Emission is switched on or off by the command "Set Emission State"

• If during run time the pressure exceeds 3.2×10

-2

mbar, the triple gauge switches off the emission automatically. The measurement value equals the Pirani value.

• If the emission is switched off by the user while the

pressure is still in Ioni range, the measurement value equals the Pirani value. There is no automatic change to the BA range by the BCG450.

Target Value: 0

tira41e1 (2005-06) BCG450SPv1.cp 39

⇒ sets Manual Mode

⇒ sets Automatic Mode

3.3.4 Diaphragm Gauge Transducer Block / SLOT 1 / Instance 3

3.3.4.1 Block Type

3.3.4.2 Status Extension

3.3.4.3 Sensor Alarm

According to the table in Appendix A, the Block Type ID has the value "14". This parameter indicates whether the overrange or underrange of the diaphragm

gauge device instance is exceeded.

Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0

0 0 0 0 0 Underrange

Exceeded

If the instance is operated in its overrange or underrange, the corresponding bit and additionally the bit "Reading Invalid" is set.

If an error occurs, the bit "Reading Invalid" as well as the corresponding error bits in Device Block (ID 26, 27, 28 Device Block) are set.

This parameter indicates the detectable errors occurring in connection with the diaphragm gauge measuring part. The present implementation allows detection of one error.

Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 Byte 0 0 0 0 0 0 0 0 0 Byte 1 0 0 0 0 0 0 Electronics Failure

Electronics Failure includes a sensor error.

The Sensor Alarm bits defined here are copied into the Device Block ID 27 in the "Device Exception Detail Alarm" range of the the capacitance diaphragm gauge measuring part.

Overrange

Exceeded

Reading

Invalid

3.3.4.4 Sensor Warning

This parameter indicates the detectable warnings occurring in connection with the diaphragm gauge measuring part. The present implementation allows detection of one warning.

Bit7 Bit6 Bit5 Bit4 Bit3 Bit2 Bit1 Bit0 Byte 0 0 0 0 0 0 0 0 0 Byte 1 0 0 0 0 0 0 Electronics Warning 0

The Sensor Warning bits defined here are copied into the Device Block ID 28 in the "Device Exception Detail Warning" range of the diaphragm gauge measuring part.

40 tira41e1 (2005-06) BCG450SPv1.cp

3.3.4 Atmosphere Sensor Transducer Block (Piezo Sensor) / SLOT 1 / Instance 4

ID Name Structure Data type Bytes Access Store

14 Atmosphere

gauge Block State Command

101 Block Type Simple Octet string 4 2_R

REC 2 1_W

2_W

3.3.4.1 Block Type

3.3.4.2 Atmosphere Sensor Block

State Command

The Block Type ID has the value: "01 00 00 00" (octet string).

This service is used for activating the adjustment of the Piezo sensor to the Capacitance diaphragm sensor via Profibus.

The atmosphere pressure sensor can be adjusted to the internal (vacuum chamber) Capacitance diaphragm sensor.

If you want to adjust the atmosphere pressure sensor to the Capacitance diaphragm sensor, proceed as follows:

n Vent the vacuum system to atmospheric pressure o Send the "Release User ATM adjust" command p Perform the "User ATM adjust command" as specified below.

After this procedure, the atmosphere pressure sensor will give the same pressure value as the Capacitance diaphragm sensor at atmospheric pressure.

ID Name Structure Data type Bytes Access

14 Atmosphere gauge Block

State Command Transition Command Simple Unsigned8 1 Transition Command

Target Value

Record

Simple Usingned8 1

→ below

2 1/2_W

State

Command

0 Inactive No action

128 Adjust

Name Description

Piezo / CDG

This service is used for activating the adjustment of the piezo sensor to the Capacitance diaphragm sensor.

The Transition Command Target Value can have the following values:

⇒ executes a User ATM adjust

⇒ releases User ATM adjust

tira41e1 (2005-06) BCG450SPv1.cp 41

Appendix A: Definitions

Data types

Definitions

Store characteristics

Abbreviation Range Data type INT8 -27 … (27 - 1) Integer 1 byte INT16 -215 … (2 INT32 -231 … (231 - 1) Integer 4 byte UINT8 0 … (28 - 1) Unsigned integer 1 byte UINT16 0 … (216 - 1) Unsigned integer 2 byte UINT32 0 … (231 - 1) Unsigned integer 4 byte FLOAT

VSTRING(n) ISO 646 and ISO 2375 OSTRING(n) Octet string

Term Meaning

Byte Number of bytes used by a data structure (integer value)

Store This parameter defines whether the values are stored in non-

Default Manufacturer-defined value

Abbreviation Meaning

V "Volatile": Value is not saved to the RAM or EEPROM and is lost

N "Nonvolatile": Value is saved to the RAM or EEPROM and is not

±3.402×10

volatile memory (

in the event of a power failure

lost in the event of a power failure

- 1) Integer 2 byte

Floating Point, IEEE 754 Short Real Number, 4 byte

→ store characteristics)

Data access

Abbreviation Meaning 1_R/W Acyclically readable and writeable by a Master Class 1 2_R/W Acyclically readable and writeable by a Master Class 2 1/2_R/W Acyclically readable and writeable by a Master Class 1 and 2 1_R Acyclically readable by a master Class 1 2_R Acyclically readable by a master Class 2 1/2_R Acyclically readable by a master Class 1 and 2 1_W Acyclically writeable by a master Class 1 2_W Acyclically writeable by a master Class 2 1/2_W Acyclically writeable by a master Class 1 and 2 0_XI Cyclic output data with master Class 1

42 tira41e1 (2005-06) BCG450SPv1.cp

Excerpts from: "PROFIBUS Profile for SEMI" (→  4)

The following table explains terms used in connection with the Profibus.

Term Meaning Alert Elements Alert Elements are used to communicate notification mes-

sages from slave to master when warnings, alarms or events are detected.

Application A software functional unit consisting of an interconnected

aggregation of function blocks, events and objects, which may be distributed and which may have interfaces with other applications.

Characteristic An characteristic is a property or characteristic of an entity.

(Au) In block applications a block interface is defined by input/output parameters. These parameters have characteristics called parameter characteristics. Examples are access rights and identification names.

(IT) The UML defines characteristics as a feature within a classifier that describes a range of values that instances of the classifier may hold. It is a property of a class instance (object).

Block (Block Instance)

A logical processing unit of software comprising an individual, named copy of the block and associated parameters specified by a block type, which persists from one invocation of the block to the next. Concept similar to the class/ object approach, but well suited to the automation requirements.

Class (IT) A class represents a template for several objects and

describes how these objects are structured internally. Objects of the same class have the same definition both for their operations and for their information structures.

Configuration (of a system/device)

A step in system design: selecting functional units, assigning their locations and identifiers and defining their interconnections.

Data Structure An aggregate whose elements need not be of the same

data type, and each of them is uniquely referenced by an offset identifier.

Data Type A data item with certain characteristics and permissible

operations on that data, e.g. INT8.

Device A physical entity capable of performing one or more speci-

fied functions in a particular context and delimited by its interfaces.

Direction of Data Input data are transmitted from the device to the bus. Out-

put data are transmitted from the bus to the device. Direction of Flow A positive set point causes a flow from P to A. Entity A particular thing, such as a person, place, process, object,

concept, association or event. Function (1) A specific purpose of an entity.

(2) One of a group of actions performed by an entity. Function Block A named block consisting of one or more input, output and

contained parameters. Function blocks represent the basic

automation functions performed by an application which is

as independent as possible from the specifics of I/O devices

and the network. Each function block processes input

parameters according to a specified algorithm and an inter-

nal set of contained parameters. They produce output pa-

rameters that are available for use within the same function

block application or by other function block applications.

tira41e1 (2005-06) BCG450SPv1.cp 43

Excerpts from: "PROFIBUS Profile for SEMI" (cont.)

Term Meaning Function Block

Application

Application of an automation system performed by a Device Block, Function Block, Transducer Block and accompanied elements.

Instance A set of data related to an invocation of a function block or a

class.

Internal Resolution (ir)

The internal resolution is 16383 (3FFF

-16384 (C000

) for -100% of the range.

hex

) for 100% and

hex

Mode Determines the block operating mode and available modes

for a block instance.

Object (IT) A software entity having identity, attributes and behav-

ior.

Parameter A variable that is given a constant value for a specified

application and that may denote the application.

Device Block A Device Block is a named block. Hardware specific pa-

rameters of a field device, which are associated with a resource, are made visible through the Device Block. Similar to transducer blocks, they insulate function blocks from the physical hardware by a set of implementation independent

hardware parameters. Record A set of data items of different data types treated as a unit. Resource A resource is considered to be a logical subdivision within

the software (and possibly hardware) structure of a device.

Resources have independent control of their operation. The

definition of a resource may be modified without affecting

other resources within a device. A resource accepts and

processes data and/or events from the process and/or

communication interfaces and returns data and/or events to

the process and/or communication interfaces, as specified

by the applications utilizing the resource. An interoperable

network view of applications is provided through device re-

sources. Each resource specifies the network visible as-

pects of one or more local applications (or parts of distri-

buted applications). Simple Variable A single variable which is characterized by a defined Data

Type. Substitute Value In case an optional parameter has not been implemented,

the device behaves according to the substitute value for this

parameter. Transducer Block Transducer Block is a named block. Transducer blocks

insulate function blocks from the specifics of I/O devices,

such as sensors, actuators, and switches. Transducer

blocks control access to I/O devices through a device in-

dependent interface defined for use by function blocks.

Transducer blocks also perform functions, such as cali-

bration and linearization, on I/O data to convert it to a de-

vice independent representation. Their interface to function

blocks is defined as one or more implementation independ-

ent I/O channels. Variable A software entity that may assume any one of a set of val-

ues. The values of a variable are usually restricted to a

certain data type.

44 tira41e1 (2005-06) BCG450SPv1.cp

Appendix B: Block Type

Currently defined Block Type IDs

Block Name Block Type ID Device Block 1 Sensor Analog Input Function Block 2 One of N Channel Sensor Analog Input Function Block 3 Multi Channel Sensor Analog Input Function Block 4 Discrete Input Function Block 5 Actuation Analog Output Function Block 6 Discrete Output Function Block 7 Analog Output Function Block 8 Single Stage Controller Function Block 9 Gas Calibration Transducer Block 10 Flow Transducer Block 11 Sensor Analog Input Ambient Temperature Transducer Block 12 Heat Transfer Vacuum Gauge... Diaphragm Gauge

14 Cold Cathode Ion Gauge 15 Hot Cathode Ion Gauge

16 Trip Point Function Block 17 Reserved 18 … 28 - 1 Manufacturer-specific 28 … 216 - 1

Pirani measuring system

BA measuring system

CDG measuring system

tira41e1 (2005-06) BCG450SPv1.cp 45

Appendix C: Electrical Connections

Technical data of BCG450 gauges →  [1], [2], [3].

Sensor cable connection

Threshold values

SP A

SP B

Degas

Measuring

signal

( )

SP A SP B

42 k

3 6

1 4

9 11 13

2 12

Ω

Degas

1.25 AT

Ident.

24V

Common (power GND 24V supply) Ground (housing, vacuum connection)

D-Sub,15 pins,

female,

soldering side

Electrical connection

Pin 1 Relay switching function A, n.o. contact

Pin 2 Measuring signal output 0 … +10.13 V Pin 3 Threshold (setpoint) A Pin 4 Relay switching function A, com contact

0 … +10 V

Pin 5 Supply common 0 V Pin 6 Threshold (setpoint) B

0 … +10 V Pin 7 Degas on, active high 0 V/+24 V Pin 8 Supply +24 V Pin 9 Relay switching function B, n.o. contact

Pin 10 Gauge identification Pin 11 Relay switching function B, com contact

Pin 12 Measuring signal common Pin 13 Do not connect Pin 14 Do not connect Pin 15 Do not connect

Do not connect pin 3 and pin 6 for normal operation of the gauge. These pins are reserved for adjustment of the setpoint potentiometers.

Relay assignement can be reprogrammed (→  34).

46 tira41e1 (2005-06) BCG450SPv1.cp

Profibus connection

1 5

6 9

Pin 1 not connected Pin 2 not connected Pin 3 RxD/TxD-P Pin 4 CNTR-P Pin 5 DGND Pin 6 VP Pin 7 not connected Pin 8 RxD/TxD-N Pin 9 not connected

Only to be connected if an optical link module is used.

Only required as line termination for devices at both ends of bus cable

→  [4]).

(

D-Sub, 9 pins, male soldering side

tira41e1 (2005-06) BCG450SPv1.cp 47

Appendix D: Literature

 [1] www.inficon.com

Instruction Sheet TripleGauge™, Bayard-Alpert Pirani Capacitance Diaphragm Gauge BCG450, BCG450-SD, BCG450-SP tima40e1 INFICON AG, LI–9496 Balzers, Liechtenstein

 [2] www.inficon.com

Instruction Sheet TripleGauge™, Bayard-Alpert Pirani Capacitance Diaphragm Gauge BCG450-SD, BCG450-SP tima41e1 INFICON AG, LI–9496 Balzers, Liechtenstein

 [3] www.inficon.com

Operating Manual Bayard-Alpert Pirani Capacitance Diaphragm Gauge BCG450, BCG450-SD, BCG450-SP tina40e1 INFICON AG, LI–9496 Balzers, Liechtenstein

 [4] www.profibus.com

(Profibus user organization)

 [5] European Standard for Profibus EN 50170

48 tira41e1 (2005-06) BCG450SPv1.cp