INFICON BCG450-SD ATM User Manual

Communication Protocol

DeviceNet™

Interface for Bayard-Alpert Capacitance Diaphragm Gauge

BCG450-SD

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Intended Use of this Document

This Communication protocol contains instructions for operating the vacuum gauges BCG450-SD (featuring DeviceNet interfaces) as slaves together with a DeviceNet master.

This manual describes the functionality of DeviceNet for programming purposes. For more information refer to the "DeviceNet specifications" of the Open DeviceNet Vendor Association (ODVA) (→  [2]) and the corresponding european standard (→  [3]).

For specifications and operation instructions of the vacuum gauges refer to the appropriate documents:

BCG450-SD →  [1], [4], [5], [6]

DeviceNet Interface

Abbreviations

The following description of the DeviceNet Interface is compliant to the DeviceNet specification of the Open DeviceNet Vendor Association.

This manual describes the functionality of a DeviceNet Group 2 Only Slave and supports Explicit Messaging and the I/O Polling.

We reserve the right to make technical changes without prior notice.

Abbr. Meaning

NV Nonvolatile; attribute value is maintained through power cycles

V Volatile

INT Integer value (Range –32767 … 32768)

UINT Unsigned integer value (Range 0 … 65635)

USINT Unsigned character value (Range 0 … 255)

FLOAT Floating point value (Range according to IEEE 754)

XX XX XX

Hexadecimal number (Radix = 16)

Decimal number (Radix = 10)

Binary number (Radix = 2)

Trademarks

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DeviceNet™ Open DeviceNet Vendor Association Inc.

Contents

Intended Use of this Document 2 DeviceNet Interface 2 Abbreviations 2 Trademarks 2

1 Start-Up of the Slave 4

1.1 Power Supply Requirements 4

1.2 Front View of the BCG450-SD 4

1.3 Connectors on the Device 5

1.4 Side View of the BCG450-SD 6

1.5 Indicators and Switches 6

1.5.1 Module Status LED 6

1.5.2 Network Status LED 7

1.5.3 Node Address Switch 7

1.5.4 Data Rate Switch 7

1.5.5 Setpoint 7

2 Object Structure 8

2.1 Connection Object 8

2.1.1 Vendor-Specific Object Extension on Instance 2 Poll Connection 8

2.2 Identity Object 9

2.2.1 Class Attributes 9

2.2.2 Instance Attributes 9

2.3 S-Device Supervisor Object 9

2.3.1 Class Attributes 9

2.3.2 Instance Attributes 10

2.3.2.1 Semantics 11

2.3.3 S-Device Supervisor Object States 15

2.3.4 S-Device Supervisor Common Services 15

2.3.5 S-Device Supervisor Object Specific Services 16

2.4 S-Analog Sensor Object 16

2.4.1 Class Attributes 16

2.4.2 Instance Attributes 17

2.4.2.1 Instance Attributes of Instance 1 / Pirani Instance 17

2.4.2.2 Semantics of S-Analog Sensor Instance 1 18

2.4.2.3 Instance Attributes of Instance 2 / Hot Cathode Ion Gauge 20

2.4.2.4 Semantics of S-Analog Sensor Instance 2 21

2.4.2.5 Instance Attributes of Instance 3 / Capacitance Diaphragm Gauge 23

2.4.2.6 Semantics of S-Analog Sensor Instance 3 24

2.4.2.7 Object-Specific Services on Instance 3 / Capacitance Diaphragm Gauge 25

2.4.2.8 Instance Attributes of Instance 21 / Setpoint A (Instance 22 / Setpoint B) 26

2.4.3 Common Services 29

2.4.4 Object-Specific Services on Instance 2 / Hot Cathode Ion Gauge 29

2.4.4.1 SET DEGAS STATE 29

2.4.4.2 SET EMISSION STATE 29

2.4.4.3 Emission Control Mode 30

2.4.5 Behavior 30

3 I/O Assembly Object 31

3.1 I/O Assembly Instances 31

3.2 I/O Assembly Object Instance Data Attribute Format 32

Appendix 33

A: Range of Values 33 B: Specific Codes 33 C: Conversion of a Floating Number According to IEEE 754 33 D: Typical Start-Up Procedure 34 E: Literature 37

For cross-references within this document, the symbol (→  XY) is used, for crossreferences to further documents listed under literature, the symbol (→  [Z]).

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1 Start-Up of the Slave

1.1 Power Supply Requirements

1.2 Front View of the BCG450-SD

The BCG450-SD has to be powered with two voltages:

1.) 24 Volt DC, 20 W at the 15 pole Sub-D connector for the gauge itself;

2.) 24 Volt DC nominal, <2 W range +11 … +25 V) at the DeviceNet micro style connector for the DeviceNet transceiver.

Position Function

1 Address Switch × 10, decimal 2 Address Switch × 1, decimal 3 DeviceNet connector 4 Data Rate Switch 5 Network Status LED 6 Module Status LED 7 "Sensor cable" connector

(Power, analog I/O, RS232C I/O and Relay contacts)

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1.3 Connectors on the Device

The BCG450-SD uses a "Sealed Micro-Style Connector" for the DeviceNet connection. The DeviceNet part of the gauge is powered via the DeviceNet connector.

Pin Assignment of the Sealed Micro-Style Connector

Pin Assignment of the 15 pin D-Sub connector

Pin Function

1 Drain 2

V+ nominal +24 V (range +11 … +25 V) 3V– 4 CAN_H 5 CAN_L

Pin Function

1 Relay Setpoint A, n.o. contact 2 Measuring signal output (0 … +10.13 V) 3 Threshold Setpoint A, output (0 … +10 V)

4 Relay Setpoint A, common contact 5 Supply sensor electronics common

6 Threshold Setpoint B output (0 … +10 V) 7 Degas on, active high 8 Supply sensor electronics +24 Volt 9 Relay Setpoint B, n.o. contact

10 Gauge identification 11 Relay Setpoint B, common contact

12 Signal common GND 13 do not connect 14 do not connect 15 do not connect

Type of setpoint function assigned to relays is programmable (→  26).

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1.4 Side View of the BCG450-SD

1.5 Indicators and Switches

Position Function

8 Potentiometer for Setpoint A threshold 9 Potentiometer for Setpoint B threshold

10 Special Calibration service / do not use

1.5.1 Module Status LED

Device State LED State Description Power Off dark No power applied to device Device Self-Test flashing

green/red Device Operational green Device is operating normally. Unrecoverable Fault red Device has detected an unrecoverable fault Recoverable Fault flashing red Device has detected a recoverable fault,

Device is in self-test

e.g. missing DeviceNet power supply

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1.5.2 Network Status LED

1.5.3 Node Address Switch

1.5.4 Data Rate Switch

1.5.5 Setpoint

The network status LED indicates the status of the DeviceNet communication link.

State LED state To indicate Not Powered/not online dark Device is not online.

• The device has not completed the Duplicate MAC_ID test yet.

• The device may not be powered, look at Module Status LED.

Online, not connected flashing

green

Device is online but has no connections in the established state.

• The device has passed the Dup_MAC_ID test, is online, but has no established connections to other nodes.

• The device is not allocated to a master.

Link OK online, connected green The device is online and has connec-

tions in the established state.

• The device is allocated to a master.

Connection time out flashing

red

One or more I/O Connections are in the timed out state.

Critical link failure red Failed communication device. The

device has detected an error that has rendered it incapable of communicating on the network (Duplicate MAC ID, or Bus–off).

During device initialization, the node address switches are read by the device firmware. If the switches specify a valid DeviceNet MAC ID, i.e. a value from 0 … 63, this value is used as the device MAC ID. If the specified MAC ID differs from the value stored in the device’s non-volatile RAM (NVRAM), the new MAC ID will be saved in NVRAM. If the switches specify an invalid DeviceNet MAC ID, i.e. a value greater than 63, the current value stored in the device’s NVRAM is used as the device MAC ID.

A single, rotary switch is provided for configuring the data rate of the device. The switch has three valid positions for the DeviceNet data rates, 125, 250, and 500 kBaud, where:

1 125 kBaud 2 250 kBaud 5 500 kBaud

All remaining switch positions specify software selection of the data rate.

The device has two setpoint relays 1) (Setpoint A and Setpoint B). The setpoints of these relays are adjustable only by two potentiometers (marked SETPOINT A and SETPOINT B).

The relay contacts are available at the 15-pin D-Sub connector.

Type of setpoint function assigned to relays is programmable (→  26).

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2 Object Structure

2.1 Connection Object

2.1.1 Vendor-Specific Object Extension on Instance 2 Poll Connection

Class Code 05h = 05

The connection class allocates and manages the internal resources associated with both I/O and explicit messaging connections. The specific instance generated by the connection class is referred to as a connection instance or a connection object.

The following Instances of the connection object are supported:

• Instance 1: Explicit Messaging

• Instance 2: I/O-Polling

Please refer to the DeviceNet specification for further information.

For the selection of the active input assembly the following vendor specific attribute can be used.

Vendor specific extension:

AttributeIDRequirement in

Implementation

100 Optional Get/Set NV Poll Produce

Access

Rule

NV/V Name DeviceNet

Assembly Instance

This vendor-specific attribute facilitates the configuration of the data assembly, sent by the BCG450-SD to the DeviceNet Master as Poll response. It offers the possibility to select a (predefined) data assembly via a configuration tool + EDS file (→  [1]). Attribute 100 allows the user to configure the Poll I/O Data Assembly via EDS even when the Poll Connection of the BCG450-SD is in the established state. The Assembly Number is stored non volatile. Modifications of the Poll Produce Assembly Instance will take effect only after a reset of the BCG450-SD.

Thus, definition of the BCG450-SD data assembly can be done in two ways:

1) Standard methode (without using attribute 100): The DeviceNet Master configures the "Produced Connection Path" Attribute of the Poll connection (Connection Instance 2) when establishing communication to the BCG450-SD. This requires a master to support expanded explicit messaging capabilities.

2) Directly setting Attribute 100 e.g. by a configuration tool (e.g. RS Networks) + Device Reset.

Description of Attribute Semantics

Data Type

USINT Contains the Instance num-

ber of the assembly used by this connection to send data

1, 2, 4, 5, 8, 9, 10, 12, 13

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2.2 Identity Object

Class Code 01h = 01

2.2.1 Class Attributes

Attribute ID Access Rule Name DeviceNet

1 Get Revision UINT Revision of this object.

2 Get Max Instance UINT Maximum instance number of

This object provides identification of and general information about the device.

Description of Attribute Semantics of Values

Data Type

The current value assigned to this Note: All class definitions are required to include this class attribute.

an object currently created in this class level of the device.

attribute is one (01). If updates that

require an increase in this value are

made, then the value of this attribute

increases by one.

The largest Instance number of a

created object at this class hierarchy

level.

2.2.2 Instance Attributes

Attribute ID Access Rule NV/VName DeviceNet Data Type Description of Attribute

1 Get NV Vendor ID UINT 79 02 Manufacturer identification

Value: 633 (INFICON) 2 Get NV Device Type UINT 1Ch = Vacuum pressure gauge 3 Get NV Product Code UINT 13 4 Get NV Revision STRUCT 5 Get NV Status WORD 6 Get NV Serial Number UDINT 7 Get NV Product Name SHORT STRING BCG450-SD

Services

2.3 S-Device Supervisor

Service Code Name Description 5 (05h) Reset 0 = last installation,

1 = default installation

14 (0Eh) Get_Attribute_Single

Class Code 30h = 48

Object

2.3.1 Class Attributes

Attribute ID Access

Rule

1 Get Revision UINT Revision of this object The current value assigned to this at-

2 Get Max

Name DeviceNet

Data Type

UINT Maximum instance number of an

Instance

Description of Attribute Semantics of Values

tribute is one (01). If updates that require an increase in this value are made, then the value of this attribute increases by one.

The largest Instance number of a creobject currently created in this class level of the device.

ated object at this class hierarchy level.

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2.3.2 Instance Attributes

Attribute ID Access Rule NV/VName DeviceNet Data Type Description of Attribute

3 Get NV DeviceType SHORT STRING ASCII Text, "CG" combination gauge 4 Get NV SEMI Standard

Revision Level

5 Get NV Manufacturer’s Name SHORT STRING "INFICON" 6 Get NV Manufacturer’s Model

Number

7 Get NV Software Revision

Level

8 Get NV Hardware Revision

Level

9 Get NV Manufacturer’s Serial

Number

10 Get NV Device Configuration SHORT STRING Depending on device configuration

11 Get V Device Status USINT 12 Get V Exception Status BYTE 13 Get V

Exception Detail Alarm

Common Exception Detail

Size 2 USINT Number of common detail bytes Detail 0 ARRAY of: Detail 1 BYTE

Device Exception Detail

Size 6 USINT Number of device detail bytes Detail 0 ARRAY of: S-Analog Sensor Instance 3

Detail 1 BYTE S-Analog Sensor Instance 3

Detail 2 S-Analog Sensor Instance 1

Detail 3 S-Analog Sensor Instance 1

Detail 4 S-Analog Sensor Instance 2

Detail 5 S-Analog Sensor Instance 2

Manufacturer Exception Detail

Size 1 USINT Number of Manufacturer detail bytes Detail 0 ARRAY of: Serial communication alarm

SHORT STRING Specifies the revision level of the SEMI

S/A network standard to which the device complies (for example "E54-0997").

SHORT STRING for example: BCG450-SD

SHORT STRING ASCII Text, for example "xxxyyy"

xxx version of the measuring print yyy version of the DeviceNet print

SHORT STRING ASCII text, for example "1.001"

SHORT STRING ASCII text

(→ Appendix B)

→ "Semantics" section below. → "Semantics" section below.

STRUCT of: A structure of three structures containing

a bit mapped representation of the alarm detail

STRUCT of:

→ "Semantics" section below. → "Semantics" section below.

STRUCT of:

(Capacitance Diaphragm Gauge)

Sensor alarm byte 0

(Capacitance Diaphragm Gauge)

Sensor alarm byte 1

(Pirani) Sensor Alarm byte 0

(Pirani) Sensor alarm byte 1

(Hot cathode) Sensor Alarm byte 0

(Hot cathode) Sensor alarm byte 1

STRUCT of:

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Attribute ID Access Rule NV/VName DeviceNet Data Type Description of Attribute

14 Get V

Exception Detail

STRUCT of: A structure of three structures containing

Warning

Common Exception

STRUCT of:

Detail

Size 2 USINT Number of Common Detail Bytes Detail 0 ARRAY of: Detail 1 BYTE

Device Exception

STRUCT of:

Detail

Size 7 USINT Number of Device Detail Bytes Detail 0 ARRAY of: S-Analog Sensor

Detail 1 ARRAY of: S-Analog Sensor Instance 3

Detail 2 BYTE S-Analog Sensor Instance 3

Detail 3 BYTE

Detail 4

Detail 5 S-Analog Sensor Instance 2

Detail 6 S-Analog Sensor Instance 2

Manufacturer

STRUCT of:

Exception Detail

Size 1 USINT Number of Manufacturer Detail Bytes

Detail 0 Byte serial common warning 15 Set NV Alarm Enable BOOL 16 Set NV Warning Enable BOOL

a bit mapped representation of the warning detail

→ "Semantics" section below. → "Semantics" section below.

Class Level Status Extension

(Capacitance Diaphragm Gauge)

Sensor Warning Byte 0

(Capacitance Diaphragm Gauge)

Sensor Warning Byte 1 S-Analog Sensor Instance 1 (Pirani)

Sensor Warning Byte 0 S-Analog Sensor Instance 1 (Pirani)

Sensor Warning Byte 1

(hot cathode) Sensor Warning Byte 0

(hot cathode) Sensor Warning Byte 1

→ "Semantics" section below. → "Semantics" section below.

2.3.2.1 Semantics

Device Status

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This attribute represents the current state of the device. Its value changes as the state of the device changes. The following values are defined:

Attribute Value State

0 Undefined 1 Self Testing 2 Idle 3 Self-Test Exception 4 Executing 5 Abort 6 Critical Fault

In case of a Self-Test Exception restart the device with a reset out of the box (Identity Object Class 1, Instance 1, Service 5, Service target value: 1).

Exception Status

A single byte attribute whose value indicates the status of the alarms and warnings for the device. The device supports the Expanded Mode.

For the Expanded Mode, bit seven of Exception Status attribute is set to one; exceptions are reported through the communication of this Exception Status attribute, formatted as specified in the table below. In addition, the Exception Detail attributes are supported. The Exception Status bits are determined by a logical ”OR” of the related Exception Detail bits, as indicated.

Exception Status Bit Map

Exception Detail Alarm and Exception Detail Warning

Bit Function

0 ALARM/device-common

(The alarm or warning is not specific to the device type or device type

manufacturer.) 1 ALARM/device-specific 2 ALARM/manufacturer-specific 3 reserved, set to 0 4 WARNING/device-common 5 WARNING/device-specific 6 WARNING/manufacturer-specific 7

1 Expanded Method

The formats of these two attributes are identical. Therefore, they are described together:

Attributes that relate the detailed status of the alarms or warnings associated with the device. Each attribute is a structure containing three members; these three members, respectively relate the detailed status of exceptions that are common (i.e., not device-specific), device-specific but not manufacturer-specific, and manufacturer-specific. The common and device-specific detail are defined below. A manufacturer-specific detail has a length of 1 byte. A SIZE value of one indicates that one byte detail is defined for the associated exception detail structure.

Each of the three structure members is defined as a structure containing an ordered list (i.e., array) of bytes of length SIZE, and an unsigned integer whose value is SIZE. Each of the bytes in each array has a specific mapping. This mapping is formatted as 8 bits representing 8 independent conditions, whereas a value of 1 indicates that the condition is set (or present), and a value of 0 indicates that the condition is cleared (or not present). Note that if a device does not support an exception detail, the corresponding bit is never set. The bitmaps for alarms and warnings in the corresponding attributes are structured in parallel so that a condition may have either alarm or warning set depending on severity. If a condition inherently cannot be both alarm and warning, then the parallel bit position corresponding to the other state will remain "0".

Common Exception Detail

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This structure relates exception conditions (i.e. alarms or warnings) which are common to all devices within the Hierarchy of Semiconductor Equipment Devices. The Detail element of the structure is an ordered list (i.e., array) of bytes of length [SIZE=2] which is the value of the structure element Size. For each byte in the Detail field, all bits which are not identified are reserved for future standardization.

Two bytes Common Exception Detail are provided: Common Exception Detail [0] and Common Exception Detail [1]. The specific exception associated with each of the bitmaps is given in the table below. The SIZE for this revision is two (2).

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