INFICON BCG450 ATM User Manual

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Operating Manual

TripleGauge™

Bayard-Alpert Pirani Capacitance Diaphragm Gauge

BCG450 BCG450-SD BCG450-SP

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Product Identification

In all communications with INFICON, please specify the information on the product nameplate. For convenient reference copy that information into the space provided below.

INFICON AG, LI-9496 Balzers

Model: PN: SN: V W

Validity

Intended Use

This document applies to products with the following part numbers:

BCG450 (without display)

353-550 (vacuum connection DN 25 ISO-KF) 353-551

(vacuum connection DN 40 CF-R)

353-561 (vacuum connection DN 25 ISO-KF, with baffle)

BCG450 (with display)

353-552 (vacuum connection DN 25 ISO-KF) 353-553

(vacuum connection DN 40 CF-R)

BCG450-SD (with DeviceNet interface and switching functions)

353-557 (vacuum connection DN 25 ISO-KF) 353-558

(vacuum connection DN 40 CF-R)

353-562 (vacuum connection DN 25 ISO-KF, with baffle)

BCG450-SP (with Profibus interface and switching functions)

353-554 (vacuum connection DN 25 ISO-KF) 353-556

(vacuum connection DN 40 CF-R)

The part number (PN) can be taken from the product nameplate.

If not indicated otherwise in the legends, the illustrations in this docu-

ment correspond to gauge with part number 353-552. They apply to the other gauges by analogy.

All BCG450 versions are shipped with an instruction sheet (→  [8]). BCG450-SD and BCG450-SP come with a supplementary instruction sheet describing the fieldbus interfaces and the switching functions (→  [9]).

We reserve the right to make technical changes without prior notice.

The BCG450, BCG450-SD and BCG450-SP gauges have been designed for vacuum measurement of gases in the pressure range 5×10

-10

… 1500 mbar.

They must not be used for measuring flammable or combustible gases in mixtures containing oxidants (e.g. atmospheric oxygen) within the explosion range.

The gauges can be operated in connection with the INFICON Vacuum Gauge Controller VGC401, VGC402 or VGC403 or with other control devices.

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Functional Principle

Trademarks

Due to the combination of three sensor technologies incorporated in the gauge (Capacitance diaphragm sensor, Pirani sensor and hot cathode ionisation sensor (BA)), a minimized gas type dependence is achieved.

Between 10 mbar and atmospheric pressure, the capacitance diaphragm sensor operates without any gas type dependence. Below 1 mbar, the Pirani sensor and the hot cathode ionisation sensor take over with only a small gas type dependence.

-3

Between 1 … 10 mbar and 5×10

… 2×10-2 mbar the gauges built in electronic circuits take care of continuous and smooth crossovers between the ranges. Over the whole measurement range, the measurement signal is output as a logarithm of the pressure.

The hot cathode is switched on by the Pirani measurement system only below the switching threshold of 2.4×10 off when the pressure exceeds 3.2×10

-2

mbar (to prevent filament burn-out). It is switched

-2

mbar.

Gauge adjustment is carried out automatically, no manual adjustment is required.

A user programmable atmospheric pressure switching function is incorporated.

DeviceNet™ Open DeviceNet Vendor Association, Inc.

TripleGauge™ INFICON AG, Balzers

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Contents

Product Identification 2 Validity 2 Intended Use 2 Functional Principle 3 Trademarks 3

Safety 6

1.1 Symbols Used 6

1.2 Personnel Qualifications 6

1.3 General Safety Instructions 7

1.4 Liability and Warranty 7

2 Technical Data 8 3 Installation 13

3.1 Vacuum Connection 13

3.1.1 Removing and Installing the Electronics Unit 15

3.1.2 Using the Optional Baffle 16

3.2 Power Connection 17

3.2.1 Use With INFICON VGC40x Vacuum Gauge Controller 17

3.2.2 Use With Other Controllers 18

3.2.2.1 Making an Individual Sensor Cable 18

3.2.2.2 Making a DeviceNet Interface Cable (BCG450-SD) 21

3.2.2.3 Making a Profibus Interface Cable (BCG450-SP) 22

3.2.3 Using the Optional Power Supply (With RS232C Line) 23

4 Operation 25

4.1 Measuring Principle, Measuring Behavior 25

4.2 Operational Principle of the Gauge 27

4.3 Putting the Gauge Into Operation 28

4.4 Degas 28

4.5 Emission Control Mode 29

4.6 Atmosphere Switching Function 30

4.6.1 Functional Principle 30

4.6.2 Programming the Atmospheric Pressure Threshold 31

4.6.3 Wiring the relay "Atmospheric Pressure Reached" (BCG450) 32

4.7 Display (BCG450) 32

4.8 RS232C Interface 33

4.8.1 Description of the Functions 34

4.8.1.1 Output String (Transmit) 34

4.8.1.2 Input String (Receive) 36

4.9 DeviceNet Interface (BCG450-SD) 38

4.9.1 Description of the Functions 38

4.9.2 Operating Parameters 38

4.9.2.1 Operating Software 38

4.9.2.2 Node Address Setting 38

4.9.2.3 Data Rate Setting 39

4.9.3 Status Lights 39

4.10 Profibus Interface (BCG450-SP) 40

4.10.1 Description of the Functions 40

4.10.2 Operating Parameters 40

4.10.2.1 Operating Software 40

4.10.2.2 Node Address Setting 40

4.11 Switching Functions (BCG450-SD, -SP) 41

4.11.1 Setting the Switching Functions 41

5 Deinstallation 43

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6 Maintenance, Repair 45

6.1 Maintenance 45

6.1.1 Cleaning the Gauge 45

6.2 Adjusting the Gauge 45

6.3 Adjusting the Atmosphere Sensor 45

6.4 What to Do in Case of Problems 47

6.5 Replacing the Sensor 49

7 Options 50 8 Spare Parts 50 9 Storage 50 10 Returning the Product 51 11 Disposal 51

Appendix 52

A: Relationship Measuring Signal – Pressure 52 B: Gas Type Dependence 53 C: Literature 55

Declaration of Contamination 56

For cross-references within this document, the symbol (→  XY) is used, for cross- references to further documents and data sources, the symbol (→  [Z]).

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1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environmental damage.

Caution

Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.

Notice

1.2 Personnel Qualifications

Hint, recommendation

The result is O.K.

The result is not as expected.

Optical inspection

Waiting time, reaction time

Skilled personnel

All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the product.

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1.3 General Safety Instructions

1.4 Liability and Warranty

• Adhere to the applicable regulations and take the necessary precautions for the process media used.

Consider possible reactions between the materials (→  11) and the process media.

Consider possible reactions of the process media (e.g. explosion) due to the heat generated by the product.

• Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document.

• Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

Communicate the safety instructions to all other users.

INFICON assumes no liability and the warranty becomes null and void if the enduser or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations etc.) on the product

• use the product with accessories not listed in the corresponding product docu-

mentation.

The end-user assumes the responsibility in conjunction with the process media used.

Gauge failures due to contamination or wear and tear, as well as expendable parts

(e.g. filament), are not covered by the warranty.

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2 Technical Data

Measurement principle

Measuring range

Emission

Degas

Output signal

Pressure range

10 … 1500 mbar capacitance diaphragm sensor

1 … 10 mbar crossover range

-2

2×10

5×10

… 1 mbar Pirani sensor

-3

…2×10-2 mbar crossover range

-10

…5×10-3 mbar hot cathode ionisation (BA)

Range (air, O2, CO, N2) 5×10

-10

… 1500 mbar, continuous

Accuracy

-8

1×10

… 50 mbar ±15% of reading

50 … 950 mbar ±5% of reading

950 … 1050 mbar ±2.5% of reading

(after 10 min. stabilisation)

-8

Repeatability

Gas type dependence

5% of reading, 10 (after 10 min. stabilisation)

→ Appendix B

… 10-2 mbar

Switching on threshold Switching off threshold

Emission current

p ≤7.2×10

7.2×10

-6

mbar

-6

mbar < p < 3.2×10-2 mbar

Emission current switching

25 µA ⇒ 5 mA 5 mA ⇒ 25 µA

2.4×10-2 mbar

-2

3.2×10

mbar

5 mA 25 µA

-6

7.2×10

3.0×10

mbar

-5

mbar

Degas emission current (p <7.2×10

-6

mbar)

≈20 mA (P

degas

≈4 W)

Control input signal 0 V/+24 VDC, active high

(control via RS232 →  33)

Duration max. 3 min, followed by automatic stop

A new degas cycle can only be started after a waiting time of 30 minutes.

In degas mode, BCG450 gauges keep supplying measurement values, however their tolerances may be higher than during normal operation.

Output signal (measuring signal) 0 … +10.13 V

Measuring range 0.774 … +10.13 V

(5×10

-10

mbar … 1500 mbar

Relationship voltage-pressure logarithmic, 0.75 V/decade

→ Appendix A)

(

Error signal +0.1 V Diaphragm sensor or

EEPROM error +0.3 V BA sensor error +0.5 V Pirani sensor error (→  47)

Minimum load impedance

10 kΩ

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Display (BCG450)

Power supply

Display panel

Background illumination

Dimensions

Pressure units (pressure p)

LCD matrix, 32×16 pixels

two colors red/green

16.0 mm × 11.2 mm

mbar (default), Torr, Pa (selecting the pressure unit →  33)

DANGER

The gauge may only be connected to power supplies, instruments or control devices that conform to the requirements of a grounded extralow voltage (SELV). The connection to the gauge has to be fused

Operating voltage at the gauge +24 VDC (+20 … +28 VDC) 1)

Power consumption

Standard Degas Emission start (<200 ms)

Power consumption

BCG450 BCG450-SD BCG450-SP

Fuse necessary 1.25 AT

(INFICON controllers fulfill these requirements).

ripple max. 2 V

≤0.5 A ≤0.9 A ≤1.4 A

≤18 W ≤20 W ≤20 W

Sensor cable connection

BCG450-SD requires an additional, separate power supply for the

DeviceNet interface (→  21).

Supply voltage at the DeviceNet connector, (Pin 2 and Pin 3)

+24 VDC (+11 … +25 VDC)

Power consumption <2 W

The gauge is protected against reversed polarity of the supply voltage.

For reasons of compatibility, the expression "sensor cable" is used for all

BCG450 versions in this document, although the pressure reading of the gauges with fieldbus interface (BCG450-SD and BCG450-SP) is nor-

Electrical connector

mally transmitted via the corresponding bus.

BCG450 BCG450-SD, -SP

D-Sub,15-pin, male

→  19 →  20

Measuring cable shielded, number of conductors de-

pending on the functions used (max. 15 conductors plus shielding)

Cable length (supply voltage 24 V

Analog and fieldbus operation

RS232C operation

Gauge identification

)

≤35 m, conductor cross-section 0.25 mm² ≤50 m, conductor cross-section 0.34 mm² ≤100 m, conductor cross-section 1.0 mm²

≤30 m

42 kΩ resistor between Pin 10 and Pin 5 (sensor cable)

Measured at sensor cable connector (consider the voltage drop as function of

the sensor cable length).

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RS232C interface

DeviceNet interface (BCG450-SD)

Switching functions

BCG450

BCG450-SD, -SP

Adjustment range

→ Atmosphere switching function

2 (setpoints A and B)

-9

mbar … 100 mbar

1×10

Setpoints adjustable via potentiometers, one floating, normally open relay contact per setpoint (→  20, 41)

(Adjusting the setpoints via field bus is described in the corresponding bus sections.)

Relay contact rating

Atmosphere switching function

BCG450

Relay contact rating

BCG450-SD/SP

Relay contact rating

Data rate

Data format

Connections (sensor cable connector) TxD (Transmit Data) RxD (Receive Data) Supply common (GND)

≤60 VDC, ≤0.5 ADC

Atmospheric pressure threshold programmable via serial interfaces (→  30)

Atmospheric pressure threshold programmable via RS232

Floating, normally open relay contact "atmosphere pressure reached" available at the sensor cable connector

≤30 VAC/DC, ≤0.3 AC/DC

Atmospheric pressure threshold and relay function "atmosphere pressure reached" programmable via fieldbus interfaces (→  [1] or [2]).

≤60 VDC, 0.5 ADC (same as SP A/B)

9600 Baud

binary 8 data bits one stop bit no parity bit no handshake

Pin 13 Pin 14 Pin 5

Function and communication protocol of the RS232C interface →  33

Fieldbus name DeviceNet

Standard applied

Communication protocol, data format

Interface, physical CAN bus

Data rate (adjustable via "RATE"

switch)

→  [6]

→  [1], [4]

125 kBaud 250 kBaud 500 kBaud (default) "P" (125 kBaud, 250 kBaud, 500 kBaud programmable via DeviceNet (→  [1])

Node address (MAC ID)

(Adjustable via "ADDRESS", "MSD", "LSD" switches)

0 … 63

(default = 63

dec

"P" (0 … 63 programmable via DeviceNet, →  [1])

dec

)

DeviceNet connector Micro-Style, 5-pin, male

Cable Shielded, special DeviceNet cable,

5 conductors (→  21 and  [4])

Cable length, system wiring According to DeviceNet specifications

(→  [6], [4])

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Profibus interface (BCG450-SP)

Materials used

Ambiance

Fieldbus name Profibus

Standard applied

Communication protocol data format

Interface, physical RS485

Data rate

Node address

Local (Adjustable via hexadecimal "ADDRESS", "MSD", "LSD" switches)

Default setting

Via Profibus (hexadecimal "ADDRESS" switches set to >7d

hex

(>125

dec

))

→  [7]

→  [9], [7]

≤12 MBaud (→  [2])

00 … 7D

hex

(0 … 125

hex

00 … 7D

(0 … 125

hex

dec

)

Profibus connection D-Sub, 9-pin, female

Cable Shielded, special Profibus cable

(→  22 and  [5])

Cable length, system wiring According to Profibus specifications

(→  [7], [5])

Materials exposed to vacuum

Housing, supports, screens Feedthroughs Insulator Cathode Cathode holder Pirani element Sensor diaphragm Sensor contacts

Internal volume

DN 25 ISO-KF DN 40 CF-R

stainless steel NiFe, nickel plated glass iridium, yttrium oxide (Y2O3) molybdenum tungsten, copper ceramic (Al

2O3

)

SnAg

≈24 cm ≈34 cm3

Pressure max. 5 bar (absolute)

Admissible temperatures

Storage

Operation

Bakeout

-20 … 70 °C

0 … 50 °C

+150 °C (at vacuum connection, without electronics unit, horizontally mounted

Relative humidity (year's mean / during 60 days)

≤65 / 85% (no condensation)

Use indoors only

altitude up to 2000 m NN

Mounting orientation any

Degree of protection IP 30

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Dimensions [mm]

4-40UNC 2B

DN 25 ISO-KF

DN 40 CF-R

Weight

Gauges with DeviceNet connector are 14 mm longer.

353-550, 353-552, 353-561

353-551, 353-553 353-554, 353-557, 353-562 353-556, 353-558

≈305 g ≈565 g ≈445 g ≈710 g

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3 Installation

3.1 Vacuum Connection

DANGER: overpressure in the vacuum system >1 bar

Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized.

Do not open any clamps while the vacuum system is pressurized. Use the type of clamps which are suited to overpressure.

DANGER: overpressure in the vacuum system >2.5 bar

KF flange connections with elastomer seals (e.g. O-rings) cannot withstand such pressures. Process media can thus leak and possibly damage your health.

Use O-rings provided with an outer centering ring.

DANGER

The gauge must be electrically connected to the grounded vacuum chamber. This connection must conform to the requirements of a protective connection according to EN 61010:

• CF connections fulfill this requirement

For gauges with a KF vacuum connection, use a conductive metallic clamping ring.

Caution: vacuum component

Dirt and damages impair the function of the vacuum component.

When handling vacuum components, take appropriate measures to ensure cleanliness and prevent damages.

Caution: dirt sensitive area

Touching the product or parts thereof with bare hands increases the desorption rate.

Always wear clean, lint-free gloves and use clean tools when working in this area.

DANGER

Caution

The gauge may be mounted in any orientation. To keep condensates

and particles from getting into the measuring chamber, preferably choose a horizontal to upright position. See dimensional drawing for space requirements (→  12).

• The gauge is supplied with a built-in grid. For potentially contaminating applications and to protect the electrodes against light and fast charged particles, installation (→  16) of the optional baffle is recommended (→  50).

• The sensor can be baked at up to 80 °C (at vacuum connection, horizontally mounted). At temperatures exceeding 50 °C, the electronics unit has to be removed (→  15).

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Procedure

 Remove the protective lid.

The protective lid will be needed for maintenance..

 Make the flange connection to the vacuum system

INFICON recommends to install the gauge without applying vacuum

grease.

Seal with centering ring

When installing the gauge, make sure that the area around the con-

nector is accessible for the tools required for adjustment while the gauge is mounted (→  41, 45).

When installing the gauge, allow for installing/deinstalling the connectors and accommodation of cable loops.

If you are using a gauge with display, make sure easy reading of the display is possible.

Seal with centering ring and baffle (Option)

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3.1.1 Removing and Installing the Electronics Unit

Required tools/material

Removing the electronics unit

• Allen key, AF 2.5

 Unscrew the hexagon socket set screw (1) on the side of the electronics

unit (2).

Installing the electronics unit

 Remove the electronics unit without twisting it.

 Place the electronics unit (2) on the sensor (3) (be careful to correctly align

the pins and notch (4)).

 Slide the electronics unit in to the mechanical stop and lock it with the hexa-

gon socket set screw.

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3.1.2 Using the Optional Baffle

Requirement

Required tools / material

Installation

In severely contaminating processes and to protect measurement electrodes optically against light and fast charged particles, replacement of the built-in grid by the optional baffle (→  50) is recommended.

The gauge is deinstalled (deinstallation gauge →  43).

• Baffle (→  50)

• Pointed tweezers

• Pin (e.g. pencil)

• Screwdriver No 1

 Carefully remove the grid with tweezers.

 Carefully place the baffle onto the sensor opening.

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 Using a pin, press the baffle down in the center until it catches.

Deinstallation

3.2 Power Connection

3.2.1 Use With INFICON VGC40x Vacuum Gauge Controller

Carefully remove the baffle with the screwdriver.

If the gauge is used with an INFICON VGC40x controller, a corresponding sensor cable is required (→  [3]). The sensor cable permits supplying the gauge with power, transmitting measurement values and gauge statuses, and making parameter settings.

Caution

Caution: data transmission errors

The attempt to operate a fieldbus gauge (BCG450-SD / -SP) with the VGC40x Vacuum Gauge Controller (RS232C) causes data transmission errors.

Fieldbus gauges must not be operated with an INFICON VGC40x

Required material

• Sensor cable (→  [3], INFICON sales literature)

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controller.

Procedure

 Plug the sensor connector into the gauge and secure it with the locking

screws.

 Connect the other end of the sensor cable to the INFICON controller and

secure it.

3.2.2 Use With Other Controllers

3.2.2.1 Making an Individual

Sensor Cable

Cable type

Procedure

The gauge can now be operated with the VGC40x controller.

The gauge can also be operated with other controllers.

Especially the fieldbus versions BCG450-SD (DeviceNet) and BCG450-SP (Profibus) are usually operated as part of a network, controlled by a master or bus controller. In such cases, the control system has to be operated with the appropriate software and communication protocol.

For reasons of compatibility, the expression "sensor cable" is used for all

BCG450 versions in this document, although the pressure reading of the gauges with fieldbus interface (BCG450-SD or BCG450-SP) is normally transmitted via DeviceNet or Profibus.

The sensor cable is required for supplying all BCG450 types with power. It also permits access to the relay contacts of the switching functions (→  20).

The application and length of the sensor cable have to be considered when determining the number and cross sections of the conductors (→  9).

 Open the cable connector (D-Sub, 15-pin, female).  Prepare the cable and solder/crimp it to the connector as indicated in the

diagram of the gauge used:

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Sensor cable connection BCG450

Atmospheric

pressure

reached

TxD

RS232

Electrical connection

RxD

Degas

Measuring

signal

Common (power GND 24V supply)

Ground (housing, vacuum connection)

42 k

Degas

1.25 AT

Ident.

D-Sub,15-pin, female, soldering side

Pin 1 Relay "Atmosphere reached", n.o. contact

Pin 2 Measuring signal output 0 … +10.13 V

Pin 4 Relay "Atmosphere reached", com contact

Pin 5 Supply common 0 V

Pin 7 Degas on, active high 0 V/+24 V

Pin 8 Supply +24 V

Pin 10 Gauge identification

Pin 12 Measuring signal common

Pin 13 RS232, TxD

Pin 14 RS232, RxD

Pin 15 Do not connect

Pins 3, 6, 9 and 11 are not connected internally.

24V

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Sensor cable connection BCG450-SD, -SP

Threshold values

SP A

SP B

( )

SP A SP B

3 6

Degas

Measuring

signal

42 k

Common (power GND 24V supply)

Ground (housing, vacuum connection)

Electrical connection

Pin 1 Relay switching function A, n.o. contact

Degas

1.25 AT

Ident.

D-Sub,15-pin, female, soldering side

Pin 2 Measuring signal output 0 … +10.13 V

Pin 3 Threshold (setpoint) A

Pin 4 Relay switching function A, com contact

Pin 5 Supply common 0 V

Pin 6 Threshold (setpoint) B

0 … +10 V

Pin 7 Degas on, active high 0 V/+24 V

Pin 8 Supply +24 V

Pin 9 Relay switching function B, n.o. contact

Pin 10 Gauge identification

Pin 11 Relay switching function B, com contact

Pin 12 Measuring signal common

Pin 13 Do not connect

Pin 14 Do not connect

Pin 15 Do not connect

Do not connect pin 3 and pin 6 for normal operation of the gauge. These pins are reserved for adjustment of the setpoint potentiometers (→  42).

Relay assignement can be reprogrammed for atmosphere switching

function via serial interfaces (→  31 and  [1] or [2]).

24V

0 … +10 V

WARNING

Incorrect connection, incorrect polarity or inadmissible supply voltages can damage the gauge.

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For cable lengths up to 5 m (0.34 mm2 conductor cross-section) the out-

put signal can be measured directly between the positive signal output (Pin 2) and supply common GND (Pin 5). At greater cable lengths, differential measurement between signal output (Pin 2) and signal common (Pin 12) is recommended.

 Reassemble the cable connector.  On the other cable end, terminate the cable according to the requirements of

the gauge controller you are using.

 Plug the sensor connector into the gauge and secure it with the locking

screws.

3.2.2.2 Making a DeviceNet Interface Cable

(BCG450-SD)

Cable type

Procedure

 Connect the other end of the sensor cable to the connector of the instrument

or gauge controller you are using.

The gauge can now be operated via analog and RS232C interface.

For operating BCG450-SD via DeviceNet, an interface cable conforming to the DeviceNet standard is required. If no such cable is available, make one according to the following indications.

A shielded special 5 conductor cable conforming to the DeviceNet standard has to be used (→  [4], [6]).

 Make the DeviceNet cable according to the following indications.

Pin 1 Drain

Pin 2 Supply +24 VDC (DeviceNet interface only)

Pin 3 Supply common GND (DeviceNet interface only)

Pin 4 CAN_H

Pin 5 CAN_L

Micro-Style, 5-pin, (DeviceNet)

female, soldering side

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 Plug the DeviceNet (and sensor) cable connector into the gauge.

3.2.2.3 Making a Profibus Interface Cable

(BCG450-SP)

Cable type

Procedure

Sensor cable

DeviceNet cable

 Lock the DeviceNet (and sensor) cable connector.

The gauge can now be operated via DeviceNet interface (→  38).

For operating BCG450-SP via Profibus, an interface cable conforming to the Profibus standard is required.

If no such cable is available, make one according to the following indications.

Only a cable that is suited to Profibus operation may be used (→  [5], [7]).

 Make the Profibus interface cable according to the following indications:

1 5

D-Sub, 9-pin male, soldering side

6 9

Pin 1 Do not connect

Pin 2 Do not connect

Pin 3 RxD/TxD-P

Pin 4 CNTR-P

Pin 5 DGND

Pin 6 VP

Pin 7 Not connected internally

Pin 8 RxD/TxD-N

Pin 9 Not connected internally

Only to be connected if an optical link module is used.

Only required as line termination for devices at both ends of bus cable

(→  [5]).

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3.2.3 Using the Optional Power Supply (With RS232C Line)

Technical data

 Plug the Profibus (and sensor) cable connector into the gauge.

Sensor cable

Profibus cable

 Lock the Profibus (and sensor) cable connector.

The gauge can now be operated via Profibus interface (→  40).

The optional 24 V power supply (→  50) allows RS232C operation of the BCG450 gauge with any suitable instrument or control device.

The instrument or control device needs to be equipped with a software that supports the RS232C protocol of the gauge (→  33).

Mains connection

Mains voltage 90 … 250 VAC 50 … 60 Hz

Mains cable 1.8 meter (Schuko DIN and U.S. con-

nectors)

Output (operating voltage of gauge, Vs)

Voltage 21 … 27 VDC, set to 24 VDC

Current Max. 1.5 A

Gauge connection

Connector D-Sub, 15-pin, female

24 VDC cable 5 m, black

Connection of the instrument or control device

RS232C connection D-Sub, 9 pin, female

Cable 5 m, black, 3 conductors, shielded

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Wiring diagram

Connecting the power supply

RS232C

D-Sub, 9-pin

Mains

90 ... 250 VAC

50 ... 60 Hz

BCG450

D-Sub,

15-pin

+24 V

GND

 Connect the power supply to the the gauge and lock the connector with the

screws.

 Connect the RS232C line to the instrument or control device and lock the

connector with the screws.

RS232C

Power supply

BCG450

 Connect the power supply to the mains.

The gauge can now be operated via RS232C interface (→  33).

Mains

tina40e1-b (2011-04)

4 Operation

4.1 Measuring Principle,

Measuring Behavior

Bayard-Alpert (BA)

The BCG450 vacuum gauges consist of three separate measuring systems (hot cathode Bayard-Alpert (BA) Pirani sensor and capacitance diaphragm sensor).

The BA measuring system uses an electrode system according to Bayard-Alpert which is designed for a low x-ray limit.

The measuring principle of this measuring system is based on gas ionization. Electrons emitted by the hot cathode (F) ionize a number of molecules proportional to the pressure in the measuring chamber. The ion collector (IC) collects the thus generated ion current I ment instrument. The ion current is dependent upon the emission current I

and feeds it to the electrometer amplifier of the measure-

, the

gas type, and the gas pressure p according to the following relationship:

= Ie × p × C

Factor C represents the sensitivity of the gauge head. It is generally specified for N

The lower measurement limit is 5×10

To usefully cover the whole range of 5×10

-10

mbar (gauge metal sealed).

-10

mbar … 10-2 mbar, a low emission current is used in the high pressure range (fine vacuum) and a high emission current is used in the low pressure range (high vacuum). The switching of the emission current takes place at decreasing pressure at approx. 7.2×10 creasing pressure at approx. 3.2×10 BCG450 can temporarily (<2 s) deviate from the specified accuracy.

-5

mbar. At the switching threshold, the

-6

mbar, at in-

Pirani

ECF

+– +–

200V40V

(Degas 250V)

Diagram of the BA measuring system

F hot cathode (filament) IC ion collector EC anode (electron collector)

Within certain limits, the thermal conductibility of gases is pressure dependent. This physical phenomenon is used for pressure measurement in the thermal conductance vacuum meter according to Pirani. A self-adjusting bridge is used as measuring circuit (→ schematic). A thin tungsten wire forms the sensor element. Wire resistance and thus temperature are kept constant through a suitable control circuit. The electric power supplied to the wire is a measure for the thermal conductance and thus the gas pressure. The basic principle of the self-adjusting bridge circuit is shown in the following schematic.

tina40e1-b (2011-04) 25

Schematic

Capacitance diaphragm sensorr

Schematic

Pirani sensor

The bridge voltage V

is a measure for the gas pressure and is further processed

electronically (linearization, conversion).

A capacitance diaphragm sensor consists of a reference vacuum chamber, separated from the measured gas pressure by a diaphragm. The capacitance of a pair of electrodes attached to the diaphragm and the chamber is measured electronically. A pressure difference acting upon the diaphragm will deflect it and cause a change of capacitance between the electrodes. A pressure related measuring signal is produced, ready for further processing.

Reference vacuum chamberDiaphragm Electrodes

Measuring range

Measured gas

pressure

Measuring

signal

Capacitance

measurement

The BCG450 gauges continuously cover the measuring range

-10

5×10

mbar … 1500 mbar.

• The Pirani constantly monitors the pressure.

• The hot cathode (controlled by the Pirani) is activated only at pressures

<2.4×10

-2

mbar.

If the measured pressure is higher than the switching threshold, the hot cathode is switched off and the Pirani measurement value is output.

-2

If the Pirani measurement drops below the switching threshold (p = 2.4×10 the hot cathode is switched on. After heating up, the measured value of the hot cathode is fed to the output. In the crossover range of 5.5×10

-3

… 2.0×10-2 mbar,

mbar),

the output signal is generated from both measurements.

-2

Pressure rising over the switching threshold (p = 3.2×10

mbar) causes the hot

cathode to be switched off. The Pirani measurement value is output.

• Above 10 mbar (up to 1500 mbar) the measurement signal of the capacitance diaphragm sensor is used.

In the crossover range 1 … 10 mbar a mixture of the Pirani sensor signal and the capacitance diaphragm sensor signal is processed.

tina40e1-b (2011-04)

Gas type dependence

4.2 Operational Principle of the Gauge

Field Bus Versions (BCG450-SD, BCG450-SP)

Due to the capacitance diaphragm sensor used in the upper pressure range, a minimized gas type dependence is achieved.

Pressure range Measuring principle Gas type dependence

10 … 1500 mbar

1 … 10 mbar

2×10-2 … 1 mbar Pirani sensor

5×10-3 …

-2

mbar

2×10

-10

5×10

…

-3

5×10

Pressure indicated applies to dry air, O2, CO and N2 and has to be converted

mbar

capacitance diaphragm sensor

capacitance diaphragm sensor and Pirani sensor

Pirani sensor and hot cathode ionisation sensor (BA)

hot cathode ionisation sensor (BA)

independent of gas type, no correction required

crossover range

for other gases (→ Appendix B).

The analog measuring signals of the BA and Pirani sensors are converted into a digital form by a micro-controller and subsequently converted to a value representing the measured total pressure. After further processing this value is available as an analog measurement signal (0 … +10.13 V) at the output (sensor cable connector Pin 2 and Pin 12). The maximum output signal is internally limited to +10.13 V (1500 mbar). The measured value can be read as digital value through the RS232C interface (only BCG450) (Pins 13, 14 and 5) (→  33). Gauges with a display show the value as pressure. The default setting of the displayed pressure unit is mbar. It can be modified via the RS232C interface (only BCG450) (→  33).

In addition to converting the output signal, the micro controller's functions include monitoring of the emission, calculation of the total pressure based on the measurements of the three sensors, and communication via RS232C interface (only BCG450).

With the built-in atmoshere switching function an atmospheric pressure threshold can be programmed. If the pressure rises above this value a (semi conductor) relay "atmospheric pressure reached" is activated. The thresold can be programmed by the user as a percentage of the actual atmospheric pressure (ambient).

These gauges can be used in a network together with other equipment meeting the respective standards. Technical data, interface and communication is described in separate sections (→  38 for DeviceNet and  40 for Profibus).

Two adjustable switching functions are integrated in the gauge. The corresponding relay contacts are available at the sensor cable connector (→  8, 20, 41).

The basic sensor and sensor electronics of all BCG450 versions are identical.

tina40e1-b (2011-04) 27

4.3 Putting the Gauge Into Operation

4.4 Degas

Contamination

When the operating voltage is supplied (→ Technical Data), the output signal is available between Pin 2 (+) and Pin 12 (–) of the sensor cable connector (Relationship Output Signal – Pressure → Appendix A).

Allow for a stabilizing time of approx. 10 min. Once the gauge has been switched on, permanently leave it on irrespective of the pressure.

Communication via the digital interfaces is described in separate sections of this document.

Gauge failures due to contamination or wear and tear, as well as

expendable parts (e.g. filament), are not covered by the warranty.

Deposits on the electrode system of the BA sensor can lead to unstable measurement readings.

The degas process allows in-situ cleaning of the electrode system by heating the electron collector grid to approx. 700 °C by electron bombardment.

Depending on the application, this function can be activated by the system control via one of the gauges digital interfaces. The BCG450 automatically terminates the degas process after 3 minutes, if it has not been stopped before.

The degas process should be run at pressures below 7.2×10-6 mbar

(emission current 5 mA).

For a repeated degas process, the control signal first has to change from On (+24 V) to Off (0 V), to then start degas again with a new On (+24 V) command. It is recommended that the degas signal be set to Off again by the system control after 3 minutes of degassing, to achieve an unambiguous operating status.

A new degas cycle can only be started after a waiting time of

30 minutes.

tina40e1-b (2011-04)

4.5 Emission Control Mode

General

The emission control mode function defines the rules by which the emission of the gauge is switched on and off.

The manual mode feature has a positive effect on gauge live time, mainly in process situations where the process chamber has to be vented frequently.

Emission Control Mode Description

• Automatic (AUTO)

• Manual (MAN)

The emission control mode parameter is only accessible via the serial

interfaces and described in the respective sections (→  33,  [1] and [2]).

(Switching the emission on/off via RS232 →  37)

By default, the automatic mode is active and the emission is switched on and off automatically by the gauge. However, the emission will only be switched on if the pressure falls below "Switching on pressure" (→  8). If the pressure rises above the "Switching off pressure" (→  8) the emission is switched off. However, the user can switch off the emission any time via the interfaces (→ below).

If the emission is switched off manually while it is in the on state, it is switched on again only after pressure has exeeded "Switching off pressure" and subsequently fallen below "Switching on pressure".

In manual mode, the emission can be switched on and off by the user. However, switching on the emission is only possible if the pressure is below "Switching on pressure" (→  8). If the pressure rises above the "Switching off pressure" (→  8) while the emission is on, the emission will be switched off by the gauge.

tina40e1-b (2011-04) 29

4.6 Atmosphere Switching Function

4.6.1 Functional Principle

The Atmosphere Switching Function is used to define an atmospheric pressure threshold where a (semiconductor) relay "Atmospheric pressure reached" is activated or deactivated 1).

The atmospheric pressure threshold is user programmable as a percentage of the ambient atmospheric pressure (100%)

A separate sensor built into the gauge (measuring ambient atmospheric pressure ) is used as a reference.

The following rule applies:

Atmospheric pressure threshold =

Atmospheric pressure × N

—————————————

100

where:

Atmospheric pressure threshold

Atmospheric pressure

N [%] : User programmable percentage value

[mbar] : If chamber pressure rises above this value, the

"Atmospheric pressure reached" relay is activa-

ted

[mbar] : Ambient atmospheric pressure (100%)

(measured outside the vacuum chamber)

(admissible range: 1 … 140%

, default = 99%)

The measuring range of the gauge is limited to 1500 mbar. If the calcu-

lated atmospheric pressure threshold exceeds 1500 mbar, the relay will never be activated. Keep this in mind when choosing N.

It is possible to calibrate the atmospheric pressure sensor (→  45).

Depending on gauge version, access to "Atmospheric pressure reached" relay

contacts differ:

BCG450: A hard wired (semiconductor) relay contact is available between pins 1 and 4 at the sensor cable connector (→  19 and  32).

BCG450-SD/SP: The function of the setpoint relays SP A/B (→  20) can be reprogrammed to perform as "Atmospheric pressure reached" relays. Reprogramming is carried out via fieldbus. (further information →  [1] or [2]).

(Default setting: relays are assigned to (SP A / B) setpoints)

Programming of the percentage N can only be carried out via the serial inter-

faces (RS232, DeviceNet or Profibus, →  33,  [1] or [2]).

A fixed hysteresis of 2% of the atmospheric pressure threshold is programmed

(→ example below).

tina40e1-b (2011-04)

Example

The following diagram shows the functional principle using example values

(italic = example values):

Measuring signal

(Pressure p)

4.6.2 Programming the Atmospheric Pressure Threshold

Programming via RS232

1500 mbar

980 mbar

833 mbar

Upper limit of measuring range of gauge

Atmospheric pressure (100%, ambient)

Atmospheric pressure

threshold (85%)

816 mbar

Hysteresis (2% of atmospheric pressure threshold)

Relay status "Atmospheric pressure reached"

Programming the atmospheric pressure threshold can only be carried out via the serial interfaces.

The relevant parameter: percentage of atmospheric pressure (N) is sent to the gauge in a 5 byte long command string (general information on RS232 interface →  33):

Byte No. Function Value Comment

0 Length of data string 0x03 hex set value

1 Data 0x11 hex

2 Data 0x10 hex

3 Data 0x01 … 0x8C hex 1)

4 Check sum

(of bytes No. 1 … 3)

Admissible range of percentage value (N):

0x01

… 0x8C

hex

= 1

dec

Example:

Atmospheric pressure = 1000 mbar (example)

0x00 … 0xFF hex low byte of sum, high

byte is ignored

… 140

= 1% … 140% (default = 99%).

dec

N = 99% (default) Hysteresis = 2% (fixed)

⇒ Atmospheric pressure threshold = 990 mbar

⇒ If the pressure exceeds 990 mbar, the relay "Atmosphere reached". is

activated. As the pressure drops below 970 mbar, the relays is deactivated.

It is possible to calibrate the atmospheric pressure sensor (→  45).

Programming via fieldbus interfaces

The definition of the function assigned to the relays (SP A/B or "Atmospheric pressure reached") and the value "Percentage of atmospheric pressure" (N) is described in the communication protocol of the respective interface version (for DeviceNet →  [1], for Profibus →  [2]).

tina40e1-b (2011-04) 31

4.6.3 Wiring the relay "Atmospheric Pressure Reached" (BCG450)

The signal: atmospheric pressure reached is made available via a floating n. o. contact of a photo MOS relay contact at the sensor cable connector (→  19)

Specifications of the n. o. contact:

Load voltage (VL) ≤30 V AC/DC

Load current ≤300 mA AC/DC

tmospheric pressure

reached

4.7 Display (BCG450)

Pressure Display

Sensor cable

connector

Load

Diode

Contact specifications for fieldbus gauges BCG450-SD/SP can be found in the

section: Technical Data since the (reprogrammed) setpoint relays (SP A/B) are used (→  20,  [1] or [2]).

In case of capacitive loads, the charging current has to be limited to the max.

current value specified above (e.g. using a current limiting resistor R

For inductive loads, voltage peaks have to be suppressed by a parallel diode as shown. To minimize inductance, keep the wiring as short as possible.

The gauges with part number

353-552 and 353-553

have a built-in two-line display with an LCD matrix of 32×16 pixels. The first line shows the pressure, the second line the pressure unit, the function and possible errors. The background illumination is usually green, in the event of an error, it changes to red. The pressure is displayed in mbar (default), Torr or Pa. The pressure unit can be changed via RS232C interface (→  33).

Pressure reading

Pressure unit

Function Display

Function display

(none)

Pirani operation

E Emission 25 μA

. Emission 5 mA

E D Degas

tina40e1-b (2011-04)

Error Display

No error (green background illumination)

Pirani sensor error (red background illumination)

BA sensor error (red background illumination)

Diaphragm sensor error (red background illumination)

EEPROM error (red background illumination)

Internal data connection failure (red background illumination)

4.8 RS232C Interface

What to do in case of problems →  47.

The built-in RS232C interface allows transmission of digital measurement data and instrument conditions as well as the setting of instrument parameters.

Caution

Caution: data transmission errors

The attempt to operate a fieldbus gauge (BCG450-SD / -SP) with the RS232C interface causes data transmission errors.

Fieldbus gauges must not be operated with the RS232C interface.

tina40e1-b (2011-04) 33

4.8.1 Description of the Functions

Operational parameters

Electrical connections

4.8.1.1 Output String (Transmit

Format of the output string

Synchronization

The interface works in duplex mode. A nine byte string is sent continuously without a request approx. every 20 ms.

Commands are transmitted to the gauge in a five byte input (receive) string.

• Data rate

• Byte

9600 Baud set value, no handshake

8 data bits 1 stop bit

• TxD

• RxD

• GND

Pin 13

Pin 14

Pin 5

(Sensor cable connector)

)

The complete output string (frame) is nine bytes (byte 0 … 8). The data string is seven bytes (byte 1 … 7).

Byte No. Function Value Comment

0 Length of data string 7 set value

1 Page number 5 for BCG450

2 Status

3 Error

4 Measurement high byte 0 … 255

5 Measurement low byte 0 … 255

6 Software version 0 … 255

→ Status byte

→ Error byte

→ Calculation of pressure value

→ Software version

7 Response value 13 for BCG450

8 Check sum 0 … 255

Synchronization of the master is achieved by testing three bytes:

→ Synchronization

Byte No. Function Value Comment

0 Length of data string 7 set value

1 Page number 5 for BCG450

8 Check sum of bytes 1 … 7 0 … 255 Low byte of check

High order bytes are ignored in the check sum.

sum

tina40e1-b (2011-04)

Status byte

Error byte

Software version

Calculation of the pressure value

Bit 1 Bit 0 Definition

0 0 emission off

0 1

emission 25 μA

1 0 emission 5 mA

1 1 degas

Bit 2 Definition

x reserved for future use

Bit 3 Definition

0 ⇔ 1

toggle bit, changes with every

string received correctly

Bit 5 Bit 4 Definition

0 0 current pressure unit mbar

0 1 current pressure unit Torr

1 0 current pressure unit Pa

Bit 7 Bit 6 Definition

x x reserved for future use

Bit No. Definition

Message on display

(only BCG450 353-552

and 353-553)

0 diaphragm sensor error "FAIL Cap"

1 reserved for future use —

2 Pirani sensor error "FAIL Pir"

3 reserved for future use —

4 BA sensor error "FAIL Ion"

5 reserved for future use —

6 hardware failure, EEPROM failure "FAIL EL"

7 reserved for future use —

The software version of the gauge can be calculated from the response value of byte 6 of the transmitted string according to the following rule:

Version No = Value

(Example: According to the above formula, Value

Byte 6

/ 20

of 32 means software ver-

Byte 6

sion 1.6)

The pressure can be calculated from bytes 4 and 5 of the transmitted string. Depending on the currently selected pressure unit (→ byte 2, bits 4 and 5), the appropriate rule must be applied.

As result, the pressure value results in the usual decimal format.

mbar

Torr

= 10

((high byte × 256 + low byte) / 4000 - 12.5)

= 10

((high byte × 256 + low byte) / 4000 - 12.625)

((high byte × 256 + low byte) / 4000 - 10.5)

tina40e1-b (2011-04) 35

Example

4.8.1.2 Input String (Receive)

Format of the input string

The example is based on the following output string:

Byte No. 0 1 2 3 4 5 6 7 8

Value 7 5 0 0 242 48 20 13 69

The instrument or controller (receiver) interprets this string as follows:

Byte No. Function Value Comment

0 Length of data

7 set value

string

1 Page number 5 BCG450

2 Status 0

Emission = off Pressure unit = mbar

3 Error 0

Measurement 4 5

High byte Low byte

6 Software version 20

No error

Calculation of the pressure:

242

((242 × 256 + 48) / 4000 - 12.5)

p = 10

Software version = 20 / 20 = 1.0

= 1000 mbar

7 Sensor type 13 BCG450

8 Check sum 69

5 + 0 + 0 + 242 + 48 + 20 + 13 = 328

= 01 48

dec

hex

High order byte is ignored ⇒

= 72

Check sum = 48

hex

dec

For transmission of the commands to the gauge, a string (frame) of five bytes is sent (without <CR>). Byte 1 to byte 3 form the data string.

Byte No Function Value Comment

0 Length of data string 3 set value

1 Data

2 Data

3 Data

4 Check sum

High order bytes are ignored in the check sum.

(of bytes No 1 … 3) 0 … 255

→ admissible input strings

(low byte of sum)

tina40e1-b (2011-04)

Admissible input strings

For commands to the gauge, six defined strings are used:

Byte No.

Command: 0 1 2 3 4

Set the unit mbar on the display 1) 3 0x10 0x8E 0 0x9E

Set the unit Torr on the display 1) 3 0x10 0x8E 1 0x9F

Set the unit Pa on the display 1) 3 0x10 0x8E 2 0xA0

Storage of current unit 3) 3 0x20 0x07 - 0x27

Switch degas on (switches itself off after 3 min.) 3 0x10 0xC4 1 0xD5

Switch degas off (before 3 min.) 3 0x10 0xC4 0 0xD4

Read software version 4) 3 0x00 0xD1 - 0xD1

Reset 3 0x40 0 0 0x40

Switch emission on 5) 3 0x40 0x10 1 0x51

Switch emission off 5) 3 0x40 0x10 0 0x50

Emission Control Mode automatic (AUTO) 6) 3 0x10 0x8A 1 0x8B

Emission Control Mode manual (MAN) 6) 3 0x10 0x8A 0 0x8A

Only required for gauges with display (353-552 and 353-553). Transmitted data

is not affected by this setting.

Only low order byte of sum (high order byte is ignored).

Current unit is stored in power-failure-safe NV RAM.

Response value in byte no. 6 of transmitted string.

On/off switching requirements →  29.

Defines the Emission Control Mode (→  29)

AUTO = emission on/off automatically controlled by the gauge MAN = emission on/off controlled via interfaces

tina40e1-b (2011-04) 37

4.9 DeviceNet Interface (BCG450-SD)

4.9.1 Description of the

Functions

4.9.2 Operating Parameters

4.9.2.1 Operating Software

4.9.2.2 Node Address Setting

This interface allows operation of BCG450-SD with part number

353-557, 353-558 and 353-562

in connection with other devices that are suited for DeviceNet operation. The physical interface and communication firmware of BCG450-SD comply with the DeviceNet standard (→  [4], [6]).

Two adjustable switching functions are integrated in BCG450-SD. The corresponding relay contacts are available at the sensor cable connector (→  8, 20, 41).

The basic sensor and sensor electronics of all BCG450 gauges are identical.

Caution

Caution: data transmission errors

The attempt to operate the BCG450-SD with the RS232C interface causes data transmission errors.

Via this interface, the following and further data are exchanged in the standardized DeviceNet protocol (→  [1]):

• Pressure reading

• Pressure unit (Torr, mbar, Pa)

• Degas function

• Status and error messages

• Status of the switching functions

As the DeviceNet protocol is highly complex, the parameters and programming of BCG450-SD are described in detail in the separate Communication Protocol (→  [1]).

Before the gauge is put into operation, it has to be configured for DeviceNet operation. A configuration tool and the device specific EDS file (Electronic Data Sheet) are required for this purpose. The EDS file can be downloaded via internet (→  [3]).

For unambiguous identification of the gauge in a DeviceNet environment, a node address is required. The node address setting is made on the gauge or programmed via DeviceNet.

The BCG450-SD must not be operated with the RS232C interface.

Set the node address (0 … 63

) via the "ADDRESS" "MSD"

dec

and "LSD" switches. The node address is polled by the firmware when the gauge is switched on. If the setting deviates from the stored value, the new value is taken over into the NVRAM. If a setting higher than 63 is made, the previous node address setting remains valid.

Default address setting is 63

dec

If the „MSD“ switch is in the "P" position, the node address is programmable via DeviceNet (→  [1]).

tina40e1-b (2011-04)

4.9.2.3 Data Rate Setting

4.9.3 Status Lights

"STATUS MOD" (gauge status):

"STATUS NET" (network status):

Electrical connections

The admissible data rate depends on a number of factors such as system parameters and cable length →  [4], [6]). It can be set on the gauge or pro- grammed via DeviceNet.

By means of the "RATE" switch, the data rate can be set to 125 ("1"), 250 ("2") or 500 kBaud ("5").

If the switch is in any of the "P" positions, the data rate is programmable via DeviceNet (→  [1]).

Two lights (LEDs) on the gauge inform on the gauge status and the current DeviceNet status.

Light status Description

Dark No supply

Flashing

Selftest

red/green

Green Normal operation

Red Non recoverable error

Flashing red Recoverable error (e.g.

missing DeviceNet power supply

Light status Description

Dark Gauge not online:

− Selftest not yet concluded

− No supply, → "STATUS MOD" light

Flashing

green

Gauge online but no communication:

− Selftest concluded but no communication to other nodes established

− Gauge not assigned to any master

Green Gauge online; necessary connections established

Flashing red One or several input/output connections in "time out" status

Red Communication error. The gauge has detected an error that im-

pedes communication via the network (e.g. two identical node addresses (MAC IC) or "Bus-off")

The gauge is connected to the DeviceNet system via the 5-pin DeviceNet connector (→  21).

tina40e1-b (2011-04) 39

4.10 Profibus Interface (BCG450-SP)

4.10.1 Description of the

Functions

4.10.2 Operating Parameters

4.10.2.1 Operating Software

4.10.2.2 Node Address Setting

Electrical connections

This interface allows operation of BCG450-SP with part number

353-554 and 353-556

in connection with other devices that are suited for Profibus operation. The physical interface and communication firmware of BCG450-SP comply with the Profibus standard (→  [7], [5].

Two adjustable switching functions are integrated in the BCG450-SP. The corresponding relay contacts are available at the sensor cable connector (→  8, 20, 41).

The basic sensor and sensor electronics of all BCG450 gauges are identical.

Caution

Caution: data transmission errors

The attempt to operate the BCG450-SP with the RS232C interface causes data transmission errors.

Via this interface, the following and further data are exchanged in the standardized Profibus protocol (→  [2]):

• Pressure reading

• Pressure unit (Torr, mbar, Pa)

• Degas function

• Status and error messages

• Status of the switching functions

As the DeviceNet protocol is highly complex, the parameters and programming of BCG450-SP are described in detail in the separate Communication Protocol (→  [2]).

For operating the gauge via Profibus, prior installation of the BCG450 specific GSD file is required on the bus master side. This file can be downloaded via internet (→  [3]).

For unambiguous identification of the gauge in a Profibus environment, a node address is required. The node address setting is made on the gauge.

The gauge is connected to Profibus via the 9-pin Profibus connector (→  22).

The BCG450-SP must not be operated with the RS232C interface.

The node address (0 … 125 (00 … 7D

) via the "ADDRESS", "MSD", and "LSD" switches.

hex

) is set in hexadecimal form

dec

The node address is polled by the firmware when the gauge is switched on. If the setting deviates from the stored value, the new value is taken over into the NVRAM. If a value >7D (>125

) is entered, the node address setting currently stored

dec

hex

in the device remains valid but it can now be defined via Profibus ("Set slave Address", →  [2]).

Default address setting is 5C

hex

tina40e1-b (2011-04)

4.11 Switching Functions

(BCG450-SD, -SP)

The gauges BCG450-SD and BCG450-SP have two independent, manually settable switching functions. Each switching function has a floating normally open relay contact 1). The relay contacts are accessible at the sensor cable connector (→  20).

The threshold values of switching functions A and B can be set within the pressure range 1×10

-9

mbar … 1000 mbar via potentiometers "SETPOINT A" and

"SETPOINT B".

Threshold

= 0.75 × (log p

Setpoint

– c) + 7.75

where constant c is pressure unit dependent (→ Appendix A).

Measuring signal

(Pressure p)

(Setpoint A, B)

Hysteresis 10% U

Threshold

4.11.1 Setting the Switching Functions

Required tools

Switching function

Off

Time t

The hysteresis of the switching functions is 10% of the threshold setting.

Both setpoint relays (SP A/B, →  20) can be reprogrammed by the user to

work as atmosphere switching function relays (→  30 and  [1] or [2]) (SP A/B = default setting).

The threshold values of the two switching functions "SETPOINT A" and "SETPOINT B" are set locally on the potentiometers of the gauge that are accessible via the openings on one side of the gauge housing.

• Voltmeter

• Ohmmeter or continuity checker

• Screwdriver, max. ø2.5 mm

tina40e1-b (2011-04) 41

Procedure

The procedure for setting thresholds is identical for both switching functions.

 Put the gauge into operation.  Connect the + lead of a voltmeter to the threshold measurement point of the

selected switching function ("Setpoint A" Pin 3, "Setpoint B" Pin 6) and

its – lead to a ground contact nearby (eg. grounded locking screw nut of

connector or vacuum connection of the gauge).

The threshold voltages are referenced to ground (housing,

vacuum connection), not to Pin 5 (common power GND 24 V

supply).

( )

max. ø2.5

Setpoint A Pin 3 Setpoint

Pin 6

 Using a screwdriver (max. ø2.5 mm), set the voltage of the selected

switching function (Setpoint A, B) to the desired value U

Setting of the switching functions is now concluded.

There is no local visual indication of the statuses of the switching func-

tions. However, a functional check of the switching functions (On/Off) can be made with one of the following methods:

• Reading the status via fieldbus interface →  [1] for BCG450-SD, →  [2] for BCG450-SP.

• Measurement of the relay contacts at the sensor cable connector

with a ohmmeter/continuity checker (→  20).

Threshold

tina40e1-b (2011-04)

5 Deinstallation

DANGER: contaminated parts

Contaminated parts can be detrimental to health and environment.

Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

Caution: vacuum component

Dirt and damages impair the function of the vacuum component.

When handling vacuum components, take appropriate measures to ensure cleanliness and prevent damages.

DANGER

Caution

Procedure

Caution: dirt sensitive area

Touching the product or parts thereof with bare hands increases the desorption rate.

Always wear clean, lint-free gloves and use clean tools when working in this area.

 Vent the vacuum system.

Before taking the gauge out of operation, make sure that this has

no adverse effect on the vacuum system.

Depending on the programming of the superset controller, faults may occur or error messages may be triggered.

Follow the appropriate shut-down and starting procedures.

 Take gauge out of operation.  Disconnect all cables from the gauge.

tina40e1-b (2011-04) 43

 Remove gauge from the vacuum system and replace the protective lid.

tina40e1-b (2011-04)

6 Maintenance, Repair

6.1 Maintenance

6.1.1 Cleaning the Gauge

DANGER

DANGER: contaminated parts

Contaminated parts can be detrimental to health and environment.

Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary

Small deposits on the electrode system can be removed by baking the anode (Degas →  28). In the case of severe contamination, the baffle can be exchanged easily (→  16). The sensor itself cannot be cleaned and needs to be replaced in case of severe contamination (→  49).

A slightly damp cloth normally suffices for cleaning the outside of the unit. Do not use any aggressive or scouring cleaning agents.

precautions when handling contaminated parts.

6.2 Adjusting the Gauge

6.3 Adjusting the Atmosphere Sensor

Make sure that no liquid can penetrate the product. Allow the product to

dry thoroughly before putting it into operation again.

Gauge failures due to contamination or wear and tear, as well as

expendable parts (e.g. filament), are not covered by the warranty.

The gauge is factory-calibrated. Through the use in different climatic conditions, fitting positions, aging or contamination (→  28) and after exchanging the sensor (→  49) a shifting of the characteristic curve can occur. However, readjustments are automatically carried out during operation of the gauge.

The ambient atmospheric pressure of the gauge is measured by a separate sensor built into the electronics unit of the gauge (outside the vacuum chamber).

This sensor can be calibrated against the Capacitance Diaphragm sensor in the gauge. While the gauge is in a vented state, the gauge electronics compares the output signals of the two sensors and carries out the necessary adjustments to the atmospheric pressure sensor signal.

The following adjustment procedure can only be carried out via the

serial interfaces.

Adjustment via RS232 interface (BCG450)

tina40e1-b (2011-04) 45

 Vent vacuum system (or operate gauge in the deinstalled state)

 Two 5 byte long command strings have to be sent to the gauge in succes-

sion (general RS232 information →  33):

String No. 1 (Unlock atmosphere sensor adjustment):

Byte No. Function Value Comment

0 Length of data string 0x03 hex set value

1 Data 0x10 hex

2 Data 0x1C hex

3 Data 0x00 hex

4 Check sum

(of bytes No. 1 … 3)

String No. 2 (execute sensor adjustment):

Byte No. Function Value Comment

0 Length of data string 0x03 hex set value

1 Data 0x40 hex

2 Data 0x20 hex

3 Data 0x01 hex

4 Check sum

(of bytes No. 1 … 3)

0x2C hex low byte of sum, high

byte is ignored

0x61 hex low byte of sum, high

byte is ignored

After the conclusion of this procedure, the separate atmospheric pressor

sensor is calibrated to match the Capacitance Diaphragm sensor.

tina40e1-b (2011-04)

6.4 What to Do in Case of Problems

Required tools / material

Troubleshooting (BCG450)

In the event of a fault or a complete failure of the output signal, the gauge can easily be checked.

• Voltmeter / ohmmeter

• Allen key, AF 2.5

• Spare sensor (if the sensor is faulty)

The output signal is available at the sensor cable connector (Pin 2 and Pin 12).

In case of an error, it may be helpful to just turn off the mains supply and

turn it on again after 5 s.

Problem Possible cause Correction

Output signal permanently ≈0V

Sensor cable defective or not correctly connected

Check the sensor cable

No supply voltage Turn on the power supply

Gauge in an undefined

status

Output signal +0.1 V

EEPROM error Turn the gauge off and on

Display: "FAIL EL"

Turn the gauge off and on again after 5 s (reset)

again after 5 s (reset)

Replace electronics

Output signal +0.1 V Display: "FAIL Cap"

Output signal +0.3 V Display: "FAIL Ion"

Output signal +0.5 V Display: "FAIL Pir"

Electronics unit not

Diaphragm sensor error (sensor defective)

Hot cathode error (sensor defective)

Pirani error (sensor defective)

mounted correctly on sen-

Replace the sensor (→  49)

Check the connections (Electronics — sensor)

sor

Display: "no Signal" Internal data connection

not working

Turn the gauge off and on again after 5 s

Replace the electronics unit

tina40e1-b (2011-04) 47

Troubleshooting (sensor)

If the cause of a fault is suspected to be in the sensor, the following checks can be made with an ohmmeter (the vacuum system need not be vented for this purpose).

Separate the sensor from the electronics unit (→  15). Using an ohmmeter, make the following measurements on the contact pins.

Ohmmeter measure-

ment between pins

2 + 4

4 + 5

6 + 7

4 + 10

6 + 10

3 + 10

9 + 10

6 + 3

9 + 3

≈37 Ω >>37 Ω

≈0.15 Ω >>0.15 Ω

∞ << ∞

∞ <<

Possible cause

Pirani element 1 broken

Pirani element 2 broken

Filament of hot cathode broken

Electrode - short circuit to ground

∞

Electrode - short circuit to ground

∞

Electrode - short circuit to ground

∞

Short circuit between electrodes

∞

Short circuit between electrodes

∞

All unmarked pins in the diagram are used by the diaphragm sensor

electronics and cannot be utilized for diagnostic purposes (do not connect an ohm meter/continuity checker to these pins).

View on sensor pins

Hot cathode ca. 0.15 Ohm

7 8

Not connected

Pirani sensor 1 ca. 37 Ohm

Pirani sensor 2 ca. 37 Ohm

5 3

Anode

GND (connected to sensor housing)

Ion collector

Correction

Troubleshooting on Fieldbus Gauges (BCG450-SD, -SP)

All of the above faults can only be remedied by replacing the sensor (→  49).

Error diagnosis of fieldbus gauges can only be performed as described above for the basic sensor and sensor electronics. Diagnosis of the fieldbus interface can only be done via the superset bus controller (→  [1], [2]).

For diagnosis of the BCG450-SD (DeviceNet) gauges, the status lights might produce some useful information (→  39).

tina40e1-b (2011-04)

6.5 Replacing the Sensor

Required tools / material

Procedure

Replacement is necessary, when

• the sensor is severely contaminated

• the sensor is mechanically deformed

• the sensor is faulty, e.g. filament of hot cathode broken (→  47)

• the sensor is faulty, e.g. Pirani element broken (→  47)

• Allen key, AF 2.5

• Spare sensor (→  50)

 Deinstall the gauge (→  43).  Deinstall the electronics unit from the faulty sensor and mount it to the new

sensor (→  15).

tina40e1-b (2011-04) 49

7 Options

8 Spare Parts

Part number

24 VDC power supply / RS232C line (→  23)

Baffle DN 25 ISO-KF / DN 40 CF-R (→  16)

353-511

353-512

Seal with centering ring and baffle DN 25 ISO-KF 211-113

When ordering spare parts, always indicate:

• All information on the product nameplate

• Description and part number

Part number

Replacement sensor BCG450, vacuum connection

DN 25 ISO-KF (including allen key)

Replacement sensor BCG450, vacuum connection

DN 25 ISO-KF with baffle (including allen key)

Replacement sensor BCG450, vacuum connection

DN 40 CF-R (including allen key)

354-492

354-489

354-493

9 Storage

Caution: vacuum component

Inappropriate storage leads to an increase of the desorption rate and/or may result in mechanical damage of the product.

Cover the vacuum ports of the product with protective lids or grease free aluminum foil. Do not exceed the admissible storage temperature range (→  11).

Caution

tina40e1-b (2011-04)

10 Returning the Product

WARNING

WARNING: forwarding contaminated products

Contaminated products (e.g. radioactive, toxic, caustic or biological hazard) can be detrimental to health and environment.

Products returned to INFICON should preferably be free of harmful substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed decla-

Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.

Products not accompanied by a duly completed declaration of contamination are returned to the sender at his own expense.

ration of contamination (→  56).

11 Disposal

Separating the components

Contaminated components

Other components

DANGER

DANGER: contaminated parts

Contaminated parts can be detrimental to health and environment.

Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

WARNING

After disassembling the product, separate its components according to the following criteria:

Contaminated components (radioactive, toxic, caustic or biological hazard etc.) must be decontaminated in accordance with the relevant national regulations, separated according to their materials, and disposed of.

Such components must be separated according to their materials and recycled.

WARNING: substances detrimental to the environment

Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimental to the environment.

Dispose of such substances in accordance with the relevant local regulations.

tina40e1-b (2011-04) 51

Appendix

A: Relationship Measuring

Signal – Pressure

Conversion formulae

Conversion curve

Conversion table

p = 10

(U - 7.75) / 0.75 + c

U = 0.75 × (log p - c) + 7.75

where U p c

[V] [mbar] 0

[V] [Pa] 2

[V] [Torr] -0.125

Pressure p [mbar]

1E+04

1E+03

1E+02

1E+01

1E+00

1E–01

1E–02

1E–03

1E–04

Sensor error

1E–05

1E–06

1E–07

1E–08

1E–09

1E–10

Inadmissible range

1.0 2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0

0.0

Measuring signal U[V]

Output signal U

[V]

0.1 / 0.3 / 0.5

[mbar]

Sensor error (→  47)

0.51 … 0.774 Inadmissible range

0.774 5×10

-10

3.75×10

1.00 1×10-9 7.5×10

1.75 1×10-8 7.5×10-9 1×10-6

2.5 1×10-7 7.5×10-8 1×10-5

3.25 1×10-6 7.5×10-7 1×10-4

4.00 1×10-5 7.5×10-6 1×10-3

4.75 1×10-4 7.5×10-5 1×10-2

5.50 1×10-3 7.5×10-4 1×10-1

6.25 1×10-2 7.5×10-3 1×100

7.00 1×10-1 7.5×10-2 1×101

7.75 1×100 7.5×10-1 1×102

8.50 1×101 7.5×100 1×103

9.25 1×102 7.5×101 1×104

10.00 1×103 7.5×102 1×105

>10.13 Inadmissible range

Pressure p

[Torr]

-10

Inadmissible range

[Pa]

5×10-8

1×10-7

tina40e1-b (2011-04)

B: Gas Type Dependence

Indication range above 10

-2

mbar

Pressure indicated (gauge adjusted for air)

p [mbar]

8 6

–1

8 6

–2

8 6

–3

8 6

–4

246

–3

246

–2

Pirani

sensor

–1

246 246

Cross-

over

range

246

Capacitance

diaphragm

sensor

Air, O2, CO, N

246

eff

[mbar]

tina40e1-b (2011-04) 53

Calibration in pressure range

-2

… 1 mbar

Calibration in pressure range

-3

mbar

<10

The gas type dependence in the pressure range 10-2 … 1 mbar (Pirani sensor range) can be compensated by means of the following formula:

= C × indicated pressure

eff

where Gas type Calibration factor

He 0.8

Ne 1.4

Ar 1.7

Kr 2.4

Xe 3

0.5

Air, O2, CO, N2 1

CO2 0.9

Water vapor 0.5

Freon 12 0.7

(The above calibration factors are mean values.)

The gas type dependence in the pressure range <10-3 mbar can be compensated by means of the following formula (gauge adjusted for air):

= C × indicated pressure

eff

where Gas type Calibration factor C

He 5.9

Ne 4.1

Ar 0.8

Kr 0.5

Xe 0.4

Air, O2, CO, N2 1

2.4

(The above calibration factors are mean values.)

A mixture of gases and vapors is often involved. In this case, accurate

determination is only possible with a partial-pressure measuring instrument.

tina40e1-b (2011-04)

C: Literature

 [1] www.inficon.com

Communication Protocol DeviceNet™ BCG450-SD tira40e1 INFICON AG, LI–9496 Balzers, Liechtenstein

 [2] www.inficon.com

Communication Protocol Profibus BCG450-SP tira41e1 INFICON AG, LI–9496 Balzers, Liechtenstein

 [3] www.inficon.com

Product descriptions and downloads INFICON AG, LI–9496 Balzers, Liechtenstein

 [4] www.odva.org

Open DeviceNet Vendor Association, Inc. DeviceNet™ Specifications

 [5] www.profibus.com

Profibus user organization

 [6] European Standard for DeviceNet EN 50325

 [7] European Standard for Profibus EN 50170

 [8] www.inficon.com

Instruction Sheet TripleGauge™ BCG450, BCG450-SD, BCG450-SP tima40e1 INFICON AG, LI–9496 Balzers, Liechtenstein

 [9] www.inficon.com

Instruction Sheet TripleGauge™ BCG450-SD, BCG450-SP tima41e1 INFICON AG, LI–9496 Balzers, Liechtenstein

tina40e1-b (2011-04) BCG450 v1.om 55

Declaration of Contamination

The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted. Non-completion will result in delay.

This declaration may only be completed (in block letters) and signed by authorized and qualified staff.

Description of product

Type Part number Serial number

The product is free of any substances which are damaging to health. yes

Reason for return

Operating fluid(s) used

Used in copper process

no  yes

Process re lated contamination of product:

toxic no  1) yes caustic no  1) yes  biological hazard no  yes  2) explosive no  yes  2) radioactive no  yes  2) other harmful substances no  1) yes



1) or not containing any amount of hazardous residues that exceed the permissible ex posure limits



(Must be drained before shipping.)

Seal product in plastic bag and mark it with a corresponding label.



2) Products thus contami nated will not be ac cepted without written evidence of decontami nation.

Harmful substances, gases and/or by-products

Please list all substances, gases, and by-products which the product may have come into contact with:

Trade/product name

Chemical name (or symbol)

Precauti ons associated with substance

Action if human contact

Legally binding declaration:

We hereby declare that the information on this form is complete and accurate and that we will assume any further costs that may arise. The contaminated product will be dispatched in accordance with the applicable regulations.

Organization/company

Address Post code, place

Phone Fax

Name

Date and legally binding signature Company stamp

This form can be downloaded from our website.

Copies: Original for addresee - 1 copy for accompanying documents - 1 copy for file of sender

tina40e1-b (1104) BCG450 v1.om

Notes

tina40e1-b (2011-04) BCG450 v1.om 57

Notes

tina40e1-b (2011-04) BCG450 v1.om

Notes

tina40e1-b (2011-04) BCG450 v1.om 59

LI–9496 Balzers Liechtenstein Tel +423 / 388 311 1 Fax +423 / 388 3700

Original: German tina40d1-b (2011-04) reachus@inficon.com

t i na40e1- b

www.inficon.com

INFICON BCG450 ATM User Manual

Specifications and Main Features

Frequently Asked Questions

User Manual