INFICON BCG450 ATM User Manual

Operating Manual

TripleGauge™

Bayard-Alpert Pirani Capacitance Diaphragm Gauge

BCG450 BCG450-SD BCG450-SP

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Product Identification

In all communications with INFICON, please specify the information on the product nameplate. For convenient reference copy that information into the space provided below.

INFICON AG, LI-9496 Balzers

Model: PN: SN: V W

Validity

Intended Use

This document applies to products with the following part numbers:

BCG450 (without display)

353-550 (vacuum connection DN 25 ISO-KF) 353-551

(vacuum connection DN 40 CF-R)

353-561 (vacuum connection DN 25 ISO-KF, with baffle)

BCG450 (with display)

353-552 (vacuum connection DN 25 ISO-KF) 353-553

(vacuum connection DN 40 CF-R)

BCG450-SD (with DeviceNet interface and switching functions)

353-557 (vacuum connection DN 25 ISO-KF) 353-558

(vacuum connection DN 40 CF-R)

353-562 (vacuum connection DN 25 ISO-KF, with baffle)

BCG450-SP (with Profibus interface and switching functions)

353-554 (vacuum connection DN 25 ISO-KF) 353-556

(vacuum connection DN 40 CF-R)

The part number (PN) can be taken from the product nameplate.

If not indicated otherwise in the legends, the illustrations in this docu-

ment correspond to gauge with part number 353-552. They apply to the other gauges by analogy.

All BCG450 versions are shipped with an instruction sheet (→  [8]). BCG450-SD and BCG450-SP come with a supplementary instruction sheet describing the fieldbus interfaces and the switching functions (→  [9]).

We reserve the right to make technical changes without prior notice.

The BCG450, BCG450-SD and BCG450-SP gauges have been designed for vacuum measurement of gases in the pressure range 5×10

-10

… 1500 mbar.

They must not be used for measuring flammable or combustible gases in mixtures containing oxidants (e.g. atmospheric oxygen) within the explosion range.

The gauges can be operated in connection with the INFICON Vacuum Gauge Controller VGC401, VGC402 or VGC403 or with other control devices.

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Functional Principle

Trademarks

Due to the combination of three sensor technologies incorporated in the gauge (Capacitance diaphragm sensor, Pirani sensor and hot cathode ionisation sensor (BA)), a minimized gas type dependence is achieved.

Between 10 mbar and atmospheric pressure, the capacitance diaphragm sensor operates without any gas type dependence. Below 1 mbar, the Pirani sensor and the hot cathode ionisation sensor take over with only a small gas type dependence.

-3

Between 1 … 10 mbar and 5×10

… 2×10-2 mbar the gauges built in electronic circuits take care of continuous and smooth crossovers between the ranges. Over the whole measurement range, the measurement signal is output as a logarithm of the pressure.

The hot cathode is switched on by the Pirani measurement system only below the switching threshold of 2.4×10 off when the pressure exceeds 3.2×10

-2

mbar (to prevent filament burn-out). It is switched

-2

mbar.

Gauge adjustment is carried out automatically, no manual adjustment is required.

A user programmable atmospheric pressure switching function is incorporated.

DeviceNet™ Open DeviceNet Vendor Association, Inc.

TripleGauge™ INFICON AG, Balzers

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Contents

Product Identification 2 Validity 2 Intended Use 2 Functional Principle 3 Trademarks 3

Safety 6

1.1 Symbols Used 6

1.2 Personnel Qualifications 6

1.3 General Safety Instructions 7

1.4 Liability and Warranty 7

2 Technical Data 8 3 Installation 13

3.1 Vacuum Connection 13

3.1.1 Removing and Installing the Electronics Unit 15

3.1.2 Using the Optional Baffle 16

3.2 Power Connection 17

3.2.1 Use With INFICON VGC40x Vacuum Gauge Controller 17

3.2.2 Use With Other Controllers 18

3.2.2.1 Making an Individual Sensor Cable 18

3.2.2.2 Making a DeviceNet Interface Cable (BCG450-SD) 21

3.2.2.3 Making a Profibus Interface Cable (BCG450-SP) 22

3.2.3 Using the Optional Power Supply (With RS232C Line) 23

4 Operation 25

4.1 Measuring Principle, Measuring Behavior 25

4.2 Operational Principle of the Gauge 27

4.3 Putting the Gauge Into Operation 28

4.4 Degas 28

4.5 Emission Control Mode 29

4.6 Atmosphere Switching Function 30

4.6.1 Functional Principle 30

4.6.2 Programming the Atmospheric Pressure Threshold 31

4.6.3 Wiring the relay "Atmospheric Pressure Reached" (BCG450) 32

4.7 Display (BCG450) 32

4.8 RS232C Interface 33

4.8.1 Description of the Functions 34

4.8.1.1 Output String (Transmit) 34

4.8.1.2 Input String (Receive) 36

4.9 DeviceNet Interface (BCG450-SD) 38

4.9.1 Description of the Functions 38

4.9.2 Operating Parameters 38

4.9.2.1 Operating Software 38

4.9.2.2 Node Address Setting 38

4.9.2.3 Data Rate Setting 39

4.9.3 Status Lights 39

4.10 Profibus Interface (BCG450-SP) 40

4.10.1 Description of the Functions 40

4.10.2 Operating Parameters 40

4.10.2.1 Operating Software 40

4.10.2.2 Node Address Setting 40

4.11 Switching Functions (BCG450-SD, -SP) 41

4.11.1 Setting the Switching Functions 41

5 Deinstallation 43

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6 Maintenance, Repair 45

6.1 Maintenance 45

6.1.1 Cleaning the Gauge 45

6.2 Adjusting the Gauge 45

6.3 Adjusting the Atmosphere Sensor 45

6.4 What to Do in Case of Problems 47

6.5 Replacing the Sensor 49

7 Options 50 8 Spare Parts 50 9 Storage 50 10 Returning the Product 51 11 Disposal 51

Appendix 52

A: Relationship Measuring Signal – Pressure 52 B: Gas Type Dependence 53 C: Literature 55

Declaration of Contamination 56

For cross-references within this document, the symbol (→  XY) is used, for cross- references to further documents and data sources, the symbol (→  [Z]).

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1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environmental damage.

Caution

Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.

Notice

1.2 Personnel Qualifications

Hint, recommendation

The result is O.K.

The result is not as expected.

Optical inspection

Waiting time, reaction time

Skilled personnel

All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the product.

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1.3 General Safety Instructions

1.4 Liability and Warranty

• Adhere to the applicable regulations and take the necessary precautions for the process media used.

Consider possible reactions between the materials (→  11) and the process media.

Consider possible reactions of the process media (e.g. explosion) due to the heat generated by the product.

• Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document.

• Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

Communicate the safety instructions to all other users.

INFICON assumes no liability and the warranty becomes null and void if the enduser or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations etc.) on the product

• use the product with accessories not listed in the corresponding product docu-

mentation.

The end-user assumes the responsibility in conjunction with the process media used.

Gauge failures due to contamination or wear and tear, as well as expendable parts

(e.g. filament), are not covered by the warranty.

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2 Technical Data

Measurement principle

Measuring range

Emission

Degas

Output signal

Pressure range

10 … 1500 mbar capacitance diaphragm sensor

1 … 10 mbar crossover range

-2

2×10

5×10

… 1 mbar Pirani sensor

-3

…2×10-2 mbar crossover range

-10

…5×10-3 mbar hot cathode ionisation (BA)

Range (air, O2, CO, N2) 5×10

-10

… 1500 mbar, continuous

Accuracy

-8

1×10

… 50 mbar ±15% of reading

50 … 950 mbar ±5% of reading

950 … 1050 mbar ±2.5% of reading

(after 10 min. stabilisation)

-8

Repeatability

Gas type dependence

5% of reading, 10 (after 10 min. stabilisation)

→ Appendix B

… 10-2 mbar

Switching on threshold Switching off threshold

Emission current

p ≤7.2×10

7.2×10

-6

mbar

-6

mbar < p < 3.2×10-2 mbar

Emission current switching

25 µA ⇒ 5 mA 5 mA ⇒ 25 µA

2.4×10-2 mbar

-2

3.2×10

mbar

5 mA 25 µA

-6

7.2×10

3.0×10

mbar

-5

mbar

Degas emission current (p <7.2×10

-6

mbar)

≈20 mA (P

degas

≈4 W)

Control input signal 0 V/+24 VDC, active high

(control via RS232 →  33)

Duration max. 3 min, followed by automatic stop

A new degas cycle can only be started after a waiting time of 30 minutes.

In degas mode, BCG450 gauges keep supplying measurement values, however their tolerances may be higher than during normal operation.

Output signal (measuring signal) 0 … +10.13 V

Measuring range 0.774 … +10.13 V

(5×10

-10

mbar … 1500 mbar

Relationship voltage-pressure logarithmic, 0.75 V/decade

→ Appendix A)

(

Error signal +0.1 V Diaphragm sensor or

EEPROM error +0.3 V BA sensor error +0.5 V Pirani sensor error (→  47)

Minimum load impedance

10 kΩ

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Display (BCG450)

Power supply

Display panel

Background illumination

Dimensions

Pressure units (pressure p)

LCD matrix, 32×16 pixels

two colors red/green

16.0 mm × 11.2 mm

mbar (default), Torr, Pa (selecting the pressure unit →  33)

DANGER

The gauge may only be connected to power supplies, instruments or control devices that conform to the requirements of a grounded extralow voltage (SELV). The connection to the gauge has to be fused

Operating voltage at the gauge +24 VDC (+20 … +28 VDC) 1)

Power consumption

Standard Degas Emission start (<200 ms)

Power consumption

BCG450 BCG450-SD BCG450-SP

Fuse necessary 1.25 AT

(INFICON controllers fulfill these requirements).

ripple max. 2 V

≤0.5 A ≤0.9 A ≤1.4 A

≤18 W ≤20 W ≤20 W

Sensor cable connection

BCG450-SD requires an additional, separate power supply for the

DeviceNet interface (→  21).

Supply voltage at the DeviceNet connector, (Pin 2 and Pin 3)

+24 VDC (+11 … +25 VDC)

Power consumption <2 W

The gauge is protected against reversed polarity of the supply voltage.

For reasons of compatibility, the expression "sensor cable" is used for all

BCG450 versions in this document, although the pressure reading of the gauges with fieldbus interface (BCG450-SD and BCG450-SP) is nor-

Electrical connector

mally transmitted via the corresponding bus.

BCG450 BCG450-SD, -SP

D-Sub,15-pin, male

→  19 →  20

Measuring cable shielded, number of conductors de-

pending on the functions used (max. 15 conductors plus shielding)

Cable length (supply voltage 24 V

Analog and fieldbus operation

RS232C operation

Gauge identification

)

≤35 m, conductor cross-section 0.25 mm² ≤50 m, conductor cross-section 0.34 mm² ≤100 m, conductor cross-section 1.0 mm²

≤30 m

42 kΩ resistor between Pin 10 and Pin 5 (sensor cable)

Measured at sensor cable connector (consider the voltage drop as function of

the sensor cable length).

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RS232C interface

DeviceNet interface (BCG450-SD)

Switching functions

BCG450

BCG450-SD, -SP

Adjustment range

→ Atmosphere switching function

2 (setpoints A and B)

-9

mbar … 100 mbar

1×10

Setpoints adjustable via potentiometers, one floating, normally open relay contact per setpoint (→  20, 41)

(Adjusting the setpoints via field bus is described in the corresponding bus sections.)

Relay contact rating

Atmosphere switching function

BCG450

Relay contact rating

BCG450-SD/SP

Relay contact rating

Data rate

Data format

Connections (sensor cable connector) TxD (Transmit Data) RxD (Receive Data) Supply common (GND)

≤60 VDC, ≤0.5 ADC

Atmospheric pressure threshold programmable via serial interfaces (→  30)

Atmospheric pressure threshold programmable via RS232

Floating, normally open relay contact "atmosphere pressure reached" available at the sensor cable connector

≤30 VAC/DC, ≤0.3 AC/DC

Atmospheric pressure threshold and relay function "atmosphere pressure reached" programmable via fieldbus interfaces (→  [1] or [2]).

≤60 VDC, 0.5 ADC (same as SP A/B)

9600 Baud

binary 8 data bits one stop bit no parity bit no handshake

Pin 13 Pin 14 Pin 5

Function and communication protocol of the RS232C interface →  33

Fieldbus name DeviceNet

Standard applied

Communication protocol, data format

Interface, physical CAN bus

Data rate (adjustable via "RATE"

switch)

→  [6]

→  [1], [4]

125 kBaud 250 kBaud 500 kBaud (default) "P" (125 kBaud, 250 kBaud, 500 kBaud programmable via DeviceNet (→  [1])

Node address (MAC ID)

(Adjustable via "ADDRESS", "MSD", "LSD" switches)

0 … 63

(default = 63

dec

"P" (0 … 63 programmable via DeviceNet, →  [1])

dec

)

DeviceNet connector Micro-Style, 5-pin, male

Cable Shielded, special DeviceNet cable,

5 conductors (→  21 and  [4])

Cable length, system wiring According to DeviceNet specifications

(→  [6], [4])

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Profibus interface (BCG450-SP)

Materials used

Ambiance

Fieldbus name Profibus

Standard applied

Communication protocol data format

Interface, physical RS485

Data rate

Node address

Local (Adjustable via hexadecimal "ADDRESS", "MSD", "LSD" switches)

Default setting

Via Profibus (hexadecimal "ADDRESS" switches set to >7d

hex

(>125

dec

))

→  [7]

→  [9], [7]

≤12 MBaud (→  [2])

00 … 7D

hex

(0 … 125

hex

00 … 7D

(0 … 125

hex

dec

)

Profibus connection D-Sub, 9-pin, female

Cable Shielded, special Profibus cable

(→  22 and  [5])

Cable length, system wiring According to Profibus specifications

(→  [7], [5])

Materials exposed to vacuum

Housing, supports, screens Feedthroughs Insulator Cathode Cathode holder Pirani element Sensor diaphragm Sensor contacts

Internal volume

DN 25 ISO-KF DN 40 CF-R

stainless steel NiFe, nickel plated glass iridium, yttrium oxide (Y2O3) molybdenum tungsten, copper ceramic (Al

2O3

)

SnAg

≈24 cm ≈34 cm3

Pressure max. 5 bar (absolute)

Admissible temperatures

Storage

Operation

Bakeout

-20 … 70 °C

0 … 50 °C

+150 °C (at vacuum connection, without electronics unit, horizontally mounted

Relative humidity (year's mean / during 60 days)

≤65 / 85% (no condensation)

Use indoors only

altitude up to 2000 m NN

Mounting orientation any

Degree of protection IP 30

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Dimensions [mm]

4-40UNC 2B

DN 25 ISO-KF

DN 40 CF-R

Weight

Gauges with DeviceNet connector are 14 mm longer.

353-550, 353-552, 353-561

353-551, 353-553 353-554, 353-557, 353-562 353-556, 353-558

≈305 g ≈565 g ≈445 g ≈710 g

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3 Installation

3.1 Vacuum Connection

DANGER: overpressure in the vacuum system >1 bar

Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized.

Do not open any clamps while the vacuum system is pressurized. Use the type of clamps which are suited to overpressure.

DANGER: overpressure in the vacuum system >2.5 bar

KF flange connections with elastomer seals (e.g. O-rings) cannot withstand such pressures. Process media can thus leak and possibly damage your health.

Use O-rings provided with an outer centering ring.

DANGER

The gauge must be electrically connected to the grounded vacuum chamber. This connection must conform to the requirements of a protective connection according to EN 61010:

• CF connections fulfill this requirement

For gauges with a KF vacuum connection, use a conductive metallic clamping ring.

Caution: vacuum component

Dirt and damages impair the function of the vacuum component.

When handling vacuum components, take appropriate measures to ensure cleanliness and prevent damages.

Caution: dirt sensitive area

Touching the product or parts thereof with bare hands increases the desorption rate.

Always wear clean, lint-free gloves and use clean tools when working in this area.

DANGER

Caution

The gauge may be mounted in any orientation. To keep condensates

and particles from getting into the measuring chamber, preferably choose a horizontal to upright position. See dimensional drawing for space requirements (→  12).

• The gauge is supplied with a built-in grid. For potentially contaminating applications and to protect the electrodes against light and fast charged particles, installation (→  16) of the optional baffle is recommended (→  50).

• The sensor can be baked at up to 80 °C (at vacuum connection, horizontally mounted). At temperatures exceeding 50 °C, the electronics unit has to be removed (→  15).

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Procedure

 Remove the protective lid.

The protective lid will be needed for maintenance..

 Make the flange connection to the vacuum system

INFICON recommends to install the gauge without applying vacuum

grease.

Seal with centering ring

When installing the gauge, make sure that the area around the con-

nector is accessible for the tools required for adjustment while the gauge is mounted (→  41, 45).

When installing the gauge, allow for installing/deinstalling the connectors and accommodation of cable loops.

If you are using a gauge with display, make sure easy reading of the display is possible.

Seal with centering ring and baffle (Option)

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3.1.1 Removing and Installing the Electronics Unit

Required tools/material

Removing the electronics unit

• Allen key, AF 2.5

 Unscrew the hexagon socket set screw (1) on the side of the electronics

unit (2).

Installing the electronics unit

 Remove the electronics unit without twisting it.

 Place the electronics unit (2) on the sensor (3) (be careful to correctly align

the pins and notch (4)).

 Slide the electronics unit in to the mechanical stop and lock it with the hexa-

gon socket set screw.

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3.1.2 Using the Optional Baffle

Requirement

Required tools / material

Installation

In severely contaminating processes and to protect measurement electrodes optically against light and fast charged particles, replacement of the built-in grid by the optional baffle (→  50) is recommended.

The gauge is deinstalled (deinstallation gauge →  43).

• Baffle (→  50)

• Pointed tweezers

• Pin (e.g. pencil)

• Screwdriver No 1

 Carefully remove the grid with tweezers.

 Carefully place the baffle onto the sensor opening.

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 Using a pin, press the baffle down in the center until it catches.

Deinstallation

3.2 Power Connection

3.2.1 Use With INFICON VGC40x Vacuum Gauge Controller

Carefully remove the baffle with the screwdriver.

If the gauge is used with an INFICON VGC40x controller, a corresponding sensor cable is required (→  [3]). The sensor cable permits supplying the gauge with power, transmitting measurement values and gauge statuses, and making parameter settings.

Caution

Caution: data transmission errors

The attempt to operate a fieldbus gauge (BCG450-SD / -SP) with the VGC40x Vacuum Gauge Controller (RS232C) causes data transmission errors.

Fieldbus gauges must not be operated with an INFICON VGC40x

Required material

• Sensor cable (→  [3], INFICON sales literature)

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controller.

Procedure

 Plug the sensor connector into the gauge and secure it with the locking

screws.

 Connect the other end of the sensor cable to the INFICON controller and

secure it.

3.2.2 Use With Other Controllers

3.2.2.1 Making an Individual

Sensor Cable

Cable type

Procedure

The gauge can now be operated with the VGC40x controller.

The gauge can also be operated with other controllers.

Especially the fieldbus versions BCG450-SD (DeviceNet) and BCG450-SP (Profibus) are usually operated as part of a network, controlled by a master or bus controller. In such cases, the control system has to be operated with the appropriate software and communication protocol.

For reasons of compatibility, the expression "sensor cable" is used for all

BCG450 versions in this document, although the pressure reading of the gauges with fieldbus interface (BCG450-SD or BCG450-SP) is normally transmitted via DeviceNet or Profibus.

The sensor cable is required for supplying all BCG450 types with power. It also permits access to the relay contacts of the switching functions (→  20).

The application and length of the sensor cable have to be considered when determining the number and cross sections of the conductors (→  9).

 Open the cable connector (D-Sub, 15-pin, female).  Prepare the cable and solder/crimp it to the connector as indicated in the

diagram of the gauge used:

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