HP 4155A, 4156A Quick Start Manual

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Parameter Analyzer

Quick Start Guide

c



Copyright Hewlett-Packard

Company 1993

All Right Reserved.

Reproduction, adaptation, or

translation without prior written

permission is prohibited, except as

allowed under the copyright laws.

HP Part Number

04155-90200

First edition, September 1993

Printed in Japan

Product Warranty

This Hewlett-Packard product is warranted against

defects in material and workmanship for a period of

one year from date of shipment. During the warranty

period, Hewlett-Packard will, at its option, either repair

or replace products which prove to be defective.

Warranty service of this product will be performed at

Buyer's facility at no charge within Hewlett-Packard

service travel areas. Outside Hewlett-Packard service

travel areas, warranty service will be performed at

Buyer's facility only upon Hewlett-Packard's prior

agreement and Buyer shall pay Hewlett-Packard's

round trip travel expenses. In all other cases, products

must be returned to a service facility designated b

y

Hewlett-Packard.

For products returned to Hewlett-Packard for warranty

service, Buyer shall prepay shipping charges to

Hewlett-Packard and Hewlett-Packard shall pay

shipping charges to return the product to Buyer.

However, Buyer shall pay all shipping charges, duties,

and taxes for products returned to Hewlett-Packard

from another country.

Hewlett-Packard warrants that its software and

rmware designated by Hewlett-Packard for use with

an instrument will execute its programming

instructions when properly installed on that instrument.

Hewlett-Packard does not warrant that the operation

of the instrument, or software, or rmware will be

uninterrupted or error free.

Limitation of Warranty

The foregoing warranty shall not apply to defects

resulting from improper or inadequate maintenance by

Buyer, Buyer-supplied software or interfacing,

unauthorized modications or misuse, operation outside

of the environment specications for the products, or

improper site preparation or maintenance.

No other warranty is expressed or implied.

Hewlett-Packard specically disclaims the implied

warranties of merchantability and tness for a

particular purpose.

Exclusive Remedies

The remedies provided herein are the Buyer's sole and

exclusive remedies. Hewlett-Packard shall not be liable

for any direct, indirect, special, incidental, or

consequential damages, whether based on contract,

tort, or any other legal theory.

Assistance

Product maintenance agreements and other customer

assistance agreements are available for

Hewlett-Packard products.

For any assistance, contact your nearest

Hewlett-Packard Sales Oce.

Certication

Hewlett-Packard Company certies that this product

met its published specications at the time of shipment

[from the factory]. Hewlett-Packard further certies

that its calibration measurements are traceable to the

National Institute of Standards and Technology

(

NIST

), to the extent allowed by the Institute's

calibration facility, and to the calibration facilities of

other International Standards Organization members.

Yokogawa-Hewlett-Packard, Ltd.

9-1, Takakura-cho, Hachioji-shi, Tokyo 192 Japan

HP 4155A and HP 4156A

HP 4155A Semiconductor Parameter Analyzer and HP 4156A Precision

Semiconductor Parameter Analyzer are full automatic and high performance

instruments designed to measure, to display graphically, and to analyze the

dc parameters and characteristics of semiconductor devices such as diodes,

transistors, ICs, solar cells, and wafers during the fabrication process. So you

can evaluate device design, process design, fabrication environments, and so

on with the HP 4155A/4156A.

In semiconductor research and development laboratories

4155A/4156A provides precise characteristics evaluation, which is an

important step in the development of new high performance devices

and gives design engineers an easy to use method of device parameter

acquisition|an essential element in computer aided design (CAD).

On the production line, the HP 4155A/4156A provides real-time feedback

on wafer evaluation to improve the semiconductor process and to increase

production yields.

For semiconductor end users, the HP 4155A/4156A is ideal for circuit design

applications and incoming inspection.

, the HP

,

3

HP 4155A/4156A|At a Glance

Secondary softkeys

Primary softkeys

LINE switch

Flexible disk drive

Keyboard interface

Rotary

knob

LINE switch You use the LINE switch to apply electric power

Flexible disk drive You can use 3.5-inch diskette as the mass storage

which is inserted in this exible disk drive.

Keyboard interface You can control the HP 4155A/4156A from keyboard,

which is connected to the keyboard interface, as well

as from the front-panel keys.

Primary softkeys You use primary softkeys to move pages and to change

the secondary softkey menu.

Secondary softkeys You use secondary softkeys to select variable names,

alternatives, and changing items.

Rotary knob You use rotary knob to change the setting value and to

move a marker.

4

.

,

SMU terminals

Intlk interface

SMU terminals

HP 4155A

Intlk interface

SMU terminals Either voltage or current output is forced from the

Intlk interface To prevent you from electric shock, the HP

HP 4156A

SMU terminals, and measurement signal is put to the

SMU terminals.

4155A/4156A has interlock function. The signals for

the interlock function go through the Intlk interface.

5

In This Guide Book

This guide book is a quick start guide for HP 4155A and HP 4156A. It

introduces a basic measurement and its analysis without a lot of explanation

and details.You can perform the following measurement and analysis through

this guide book:



Measuring Vg{pId



Analyzing its graph and nding threshold voltage (Vth).

characteristics of a MOS FET.

You will nd quick instructions for starting measurements with an HP

4155A/4156A.

Key Conventions.

The following key conventions are used in this guide:

4

Front-panel key

5

Text shown like this represents a key physically located

on the HP 4155A/4156A.

NNNNNNNNNNNNNNNNNNNNNNNNNNNNN

Softkey

Screen Text

Text shown like this represents a softkey.

Text printed in this typeface indicates text displayed on

the HP 4155A/4156A.

Bold

Text shown like this indicates a term dened in the

glossary.

Italic

Text shown like this referees to a related document, or is

used for emphasis.

Finding Further Information.

This guide book is written for beginners of HP 4155A/4156A. See the

following books for further information on the HP 4155A/4156A:

HP 4155A/4156A User's Guide

(HP part number 04155-90000)

provides information on how to use the HP 4155A/4156A.

HP 4155A/4156A Programmer's Guide

(HP part number 04155-90100)

provides information on how to control the HP 4155A/4156A with remote

commands.

HP Instrument BASIC Users Handbook

(HP part number E2083-90000)

provides information on how to use HP Instrument BASIC, which is

programming language built-in the HP 4155A/4156A.

6

Getting Started

Getting Started

This guide introduces how to use HP 4155A Semiconductor Parameter

Analyzer and HP 4156A Precision Semiconductor Parameter Analyzer. Basic

operations of the HP 4155A/4156A are provided.

This guide consists of the following three sections:



Making a measurement

sample device (MOS FET).



Analyzing a result

threshold voltage (Vth) of the MOS FET.



If you have a problem

encounter while using this guide.

Before going to the next page, make sure you have prepared the following:



HP 4155A or HP 4156A



HP 16442A test xture



Test device (n-channel MOS FET, enhancement type)

In this guide, the test device used is a Siliconix SD214DE.

: preparing for measurements and measuring a

: analyzing the results graphically and searching for the

: providing solutions to problems you may

This guide book assumes that you have already installed

your HP 4155A/4156A. If not, refer to \Installation" in the

HP 4155A/4156A User's Task Guide.

2

.

Making a Measurement

In this section, you learn how to execute the measurements with an

HP 4155A/4156A and to display the measurement results graphically.

Id-Vg measurement of a MOS FET is provided as an example.You learn

step-by-step how to perform this measurement.

You measure the device under test (DUT) by using the measurement circuit as

shown in the following diagram. SMU2 and SMU3 sweep the same voltage to

the gate and drain. SMU3 measures the drain current (Id). The source and

substrate are connected to circuit common.

You should get result similar to the following gure

from 0 V to 2 V) is assigned to X axis

p

@

Id

@V g

is assigned to Y2 axis.

p

,

Id

is assigned to Y1 axis, and

. Gate voltageVg(swept

3

Getting Started

Making a Measurement

Step 1. Prepare for the measurement

Before executing measurement, congure HP 4155A/4156A and accessories.

1. Make sure that the HP 4155A/4156A is o.

2. Connect the HP 16442A test xture to HP 4155A/4156A. See next gure.

3. If you use the keyboard, connect it to the HP 4155A/4156A.

When you use the HP 4155A, connect as follows:

HP 4155A cable HP 16442A

Triaxial

Triaxial

Triaxial

Triaxial

1

)

2

)

2

)

2

)

2

)

Intlk

SMU 1 (blue label)

SMU 2 (blue label)

SMU 3 (blue label)

SMU 4 (blue label)

Intlk

SMU 1

SMU 2

SMU 3

SMU 4

1

Interlock/LED cable: HP 16493J

2

Triaxial cable: HP 16493C.You do not need to connect SMU4 for this measurement.

3

Coaxial cable: HP 16493B.You do not need to connect VSUs and VMUs for this measurement.

(

Interlock/LED

(

(

(

(

Triaxial cable

HP 4155A cable HP 16442A

VSU 1

VSU 2

VMU 1

VMU 2

HP 16442A

(

(

(

(

Coaxial

Coaxial

Coaxial

Coaxial

3

)

3

)

3

)

3

)

VSU 1

VSU 2

VMU 1

VMU 2

Coaxial cable

Interlock/LED

cable

HP 4155A

Connecting HP 4155A to HP 16442A Test Fixture

4