HP 4145A Operating And Service Manual
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OPERATION AND SERVICE MANUAL
MODEL 4145A
SEMICONDUCTOR
PARAMETER ANALYZER
SERIAL NUMBERS
This manual applies to instruments with
serial numbers prefixed 2149J- and above.
0 COPYRIGHT: YOKOGAWA-HEWLETT-PACKARD, LTD., 1982
9-1, TAKAKURA-CHO, HACHIOJI-SHI, TOKYO, JAPAN
Manual Part No. 04145-90000
Microfiche Part No. 04145-90050
Printed: AUG. 1984
Table of Contents
Model 4145A
TABLE OF CONTENTS
Section
Title Page
I GENERAL
INFORMATION
l-l.
Introduction . . . . . . . . . . . . . l-l
1-4. Description . . . . . . . . . . . . . . 1-2
1-11. Specifications . . . . . . . . . . . l-3
1-13. Safety Considerations . . . . l-3
1-16. Instruments Covered by
Manual . . . . . . . . . . . . . . . . 1-3
l-21. Options . . . . . . . . . . . . . . . . . . l-4
l-23. Accessories Supplied . . . . . 1-4
l-25. Accessories Available . . . . l-4
l-27.
Warranty Limitation for
Accessories . . . . . . . . . . . l-4
II
INSTALLATION
2-l.
Introduction . . . . . . . . . . . . . 2-l
2-3. Initial Inspection . . . . . . . 2-l
2-5.
Preparation for Use . . . . . . 2-l
2-6. Power Requirements . . . . . . . 2-l
2-8. Line Voltage and Fuse
Selection . . . . . . . . . . . . . 2-l
2-10. Line Frequency Filter . . . . 2-l
2-12.
Power Cable . . . . . . . . . . . . . . 2-2
2-16.
Operating Environment . . . . 2-2
2-19. Installation Instructions.
2-2
2-21.
Installation
of Options
907, 908 and 909 . . . . . . 2-2
2-23.
Storage and
Shipment . . . . . 2-4
2-24.
Environment . . . . . . . . . . . . . . 2-4
2-26. Packaging
. . . . . . . . . . . . e . . .
2-4
III
OPERATION
3-l. Introduction . . . . . . . . . . . . . 3-l
3-3.
Panel Features . . . . . . . . . . . 3-2
3-5. Flexible Disc Handling . . . 3-10
3-7. CRT Display . . . . . . . . . . . . . . 3-10
3-10. Self Test . . . . . . . . . . . . . . . . 3-12
3-12. Error Messages/Error Codes 3-12
3-14.
Initial Control Setting . . 3-18
3-16. User-Area Filing
Operations . . . . . . . . . . . . 3-18
3-18. Arithmetic Capabilities . . 3-19
3-21.
Source and Measurement
Channels . . . . . . . . . . . . . . 3-21
3-23. Stimulus/Measurement
Units (SMU) . . . . . . . . . . . 3-21
3-25. Voltage Sources (Vs) and
Voltage Monitors (Vm) . 3-23
3-27. Compliance . . . . . . . . . . . . . . . 3-23
3-29.
Sweep Measurement . . . . . . . . 3-24
3-33. Time Domain Measurement . . 3-26
3-35. Integration Time . . . . . . . . . 3-27
ii .
Section Title
Page
3-37. Auto-Calibration ........ 3-27
3-40. Display Pages ...........
3-28
3-42. Page Control
............ 3-28
.
3-45. MENU Page ............... 3-30
3-47. CHANNEL
DEFINITION Page . 3-30
3-49.
SOURCE SETUP Page .... ..'. 3-30
3-51. MEAS & DISP MODE SETUP
Page ................. 3-30
3-53. GRAPHICS PLOT Page ...... 3-30
3-55. LIST DISPLAY Page ....... 3-30
3-57.
MATRIX DISPLAY Page ..... 3-30
3-59. SCHMOO PLOT Page ........ 3-30
3-61. AUTO SEQUENCE SETUP Page. 3-31
3-63. OUTPUT SEQUENCE SETUP
Page
................. 3-31
3-65. USER FILE CATALOG Page . . 3-31
3-67.
OPERATION GUIDE Page .... 3-31
3-69.
DIAGNOSTICS Page ........ 3-31
3-71. Softkey Prompt (SKP) .... 3-31
3-73.
System Messages ......... 3-31
3-75.
Time Domain Measurement
Setup ................ 3-74
3-77. DUT Connection .......... 3-76 _1 .-'
3-79. DUT Connection Using the
16058A ............... 3-76
3-81. DUT Connection Using the
Connector Plate ...... 3-80
3-83. Floating Measurement .... 3-82
3-85. Guarding ................ 3-82
3-87. Applications Package .... 3-83
3-89.
HP-IB Interface ......... 3-86
3-91.
Connection to
HP-IB ..... 3-86
3-93. HP-IB
Status Indicators . 3-86
3-95.
LOCAL Key
...............
3-86
3-97.
HP-IB
Control Switch .... 3-86
3-99. HP-IB Interface
Capabilities
......... 3-87
3-101. HP-IB Control Modes ..... 3-87
3-103.
HP-GL
Control of the CRT 3-87
3-105. Remote Program Codes and
Parameter Setting .... 3-88
3-107. HP-GL Commands .......... 3-97
3-109. Device Clear ............ 3-100
3-111. Data Output ............. 3-101
3-113. Service Request Status
Byte ................. 3-102
3-115. Programming Guide for
4145A ................ 3-104
3-117.
PLOT .................... 3-108 __
3-119. PRINT ................... 3-110
3-121. External Display ........
3-111' ‘-*we
3-123. Disc Copy
............... 3-112
3-125. Head Cleaning ........... 3-113
Model 4145A Table of Contents
TABLE OF CONTENTS
L’
Section Title Page
3-127. Protection againt Hazard-
ous Voltage Exceeding
+42V . . . ..d........... 3-114
3-129. PLOT/PRINT Operations
Using HP-IB Controller 3-114
3-131. Measurement Ranges and
Resolution . . . . . . . . . . . 3-116
3-133. Resolution and Format for
Displayed Data and Data
Output . . . . . . . . . . . . . . . 3-118
IV PERFORMANCE TEST
4-l.
Introduction . . . . . . . . . . . . .
4-1
4-3. Equipment Required . . . . . . . 4-1
4-5.
Test Record . . . . . . . . . . . . . . 4-l
4-7. Calibration Cycle .* . . . . . . 4-1
4-9. Graphics Display Unit
Intensity and Focus
Check . . . . . . . . . . . . . . . . .
4-2
4-10. Page and Key Function
Check . . . . . . . . . . . . . . . . .
4-4
4-11. SMU Accuracy Test
. . . . . . . . 4-5
4-12. VS Accuracy Test . . . . . . . . . 4-19
4-13. VM Accuracy Test
. . . . . . . . . 4-22
4-14. External CRT X-Y-Z Output
L'
Check . . . .._............ 4-25
4-15.
HP-IB
Interface Test . . . . . 4-27
V
ADJUSTMENT
5-l. Introduction . . . . . . . . . . . . .
5-1
5-3. Safety Requirement . . . . . . . 5-l
5-7.
Equipment.Required . . . . . . . 5-l
5-9. Adjustment Relationships . 5-1
5-11. Adjustment Locations . . . . . 5-1
5-13.
Initial
Operation
Procedure . . . . . . . . . . . . . 5-3
5-15. Basic Operating Checks . . . 5-3
5-17. Top Cover Removal
. . . . . . . . 5-3
5-19. Bottom Cover Removal . . . . .
5-3
5-21. A3 Board Access . . . . . . . . . . 5-3
5-23. Graphics Display Unit
Intensity and Focus
Check and Adjustment . . 5-6
5-24. DC Power Supply Adjustment 5-8
5-25. Sample Hold Switch AC
Offset Adjustment . . . . . 5-11
5-26. Demultiplexer Noise
Rejection Adjustment . . 5-13
5-27. D-A Converter Gain
Adjustment . . . . . . . . . . . . 5-16
5-28. A-D Converter Gain
Adjustment . . . . . . . . . . . . 5-18
5-29. VM Range Adjustment . . . . . . 5-20
5-30. Mass Storage Unit Test . . . 5-23
5-32. Flexible-disc Drive Access 5-23
Section
5-34.
5-36.
5-38.
5-40.
5-43.
5-46.
5-49.
5-52.
Title Page
Disc Check . . . . . . . . . . . . . . .
Flexible-disc Drive Checks
and Adjustments ..a....
Sure Flexible-disc Drive
Checks and Adjustment .
MSU DIAGNOSTICS Mode . . . . .
MSU Read Test . . . . . . . . . . . .
MSU Write Test . . . ...*.....
MSU EXERCISER . . . . . . . . . ..e
Drive Belt Tension Check
and Adjustment . . . . . . . .
5-23
5-23
5-23
5-24
5-26
5-28
5-30
5-32
5-53.
Index
Timing Check and
Adjustment . . . . . . . . . . . . 5-33
5-54.
Track Alignment Check
and Adjustment'........ 5-34
5-55. Track Zero Switch Check
and Adjustment
. ..e....e 5-38
5-56.
Jitter
Check and
Adjustment . . . . . . . . e . . . 5-41
5-57. Index Detector Alignment
Check and Adjustment . . 5-43
VI REPLACEABLE PARTS
6-l.
Introduction . . . . . . . . . . . . . 6-l
6-3.
Abbreviations .....O...... 6-l
6-5. Replaceable Parts List ..* 6-l
6-7.
Ordering Information . . . . . 6-2
6-10.
Direct Mail Order System . 6-2
VII
MANUAL CHANGES
7-1. Introduction . . . . . . . . . . . . . 7-1
7-3. Manual Changes . . . . . . . . . . . 7-l
VIII SERVICE ’
8-l.
Introduction . . . . . . . . . . . . . 8-l
8-3. Safety Considerations . . . . 8-l
8-5.
Recommended Test Equipment 8-l
8-7. Troubleshooting . . . . . . . . . . 8-l
8-9. Repair . . . . . . . . . . . . . . . . . . . 8-l
8-11.
Block,,iDiagram Discussion . 8-2
8-13. Board Level Theory . . . . . . . 8-4
8-15. Troubleshooting Guide . . . . 8-6
8-17. Assembly Removal . . . . . . . . . 8-8
8-18. Assembly Locations . . . . . . .
8-8
8-20. Al through A8 Board Removal 8-9
8-22. Al3 through Al6
Board Removal . . . . . . . . . . 8-9
8-24. Front Panel Removal . . . . . . 8-9 ry
8-26. Display (1345A) Removal . . 8-10
8-28. Rear Assembly A Removal
8-11
8-30. All and A12 Board Remova;: 8-11
8-32. Rear Assembly B Removal . . 8-12
8-34. FDD and A9 Board Removal . 8-13
8-36. Al Graphic Display
Control Board. . . . . . . . . . 8-69
. . .
111
-
Table of Contents
Model 4145A
TABLE OF CONTENTS
i
Section
Title Page Section
Title
‘---I
Page
8-38.
A2 Microprocessor
Digital Control Board . . . . . . 8-72
8-40.
A3 SMU Control and A-D
Converter Board . . . . . . . . . . . . 8-78
8-42. A4 D-A Converter Board . . . . . . . 8-84
8-44. A5
SMU Board . . . . . . . . . . . . . . . . . 8-98
8-46. A9 HP-IB and MSU
Control Board . . . . . . . . . . . . . . 8-111
8-48.
A10 Keyboard and
Display Control Board . . . . . . 8-115
8-50.
All Switching Power
Supply Board . . . . . . . ...*....
8-120
8-52. Al3
SMU Power Source
Board . . . . . . . . . . . . . . . . . . . . . . 8-129
8-54.
A16 Vs/Vm Board . . . . . . . . . . . . . . 8-138
LIST OF TABLES
Number Title
Page Number
Title Page
l-l. Specifications
................ l-5
1-2.
Reference Data ................ 1-13
1-3.
Accessories Supplied
.......... 1-16
HP-IB Interface Test Program . m 4-29
Controller Instructions and
Operator Response for
HP-IB
Interface Test Program . . . . . 4-33
Error Messages for HP-IB
Interface Test Program . . . . . 4-35 .-
u
4-12.
4-l 3.
4-14.
3-l.
4145A Self Test . . . . . . . . . . . . . . .
3-l 2
3-2.
Error Messages . . . . . . . ..?......
3-13
3-3.
Operational Error-Codes . . . . . . .
3-l 5
3-4.
Self Test Error-Codes . . . . . . . . .
3-17
3-5.
Arithmetic Operators . . . . . . . . . . 3-19
3-6.
SMU Source Ranges . . . . . . . . . . . . .
3-22
3-7.
Application Package Setups . . . .
3-83
3-8. HP-IB Interface Capabilities . .
3-87
3-9.
HP-GL Commands . . . . . . . . . . . . . . . .
3-97
3-l 0.
Recommended HP-IB Plotters . . . .
3-l 08
3-l 1.
Recommended
HP-IB
Printers . . . .
3-110
3-12.
Recommended External Displays .
3-l
11
3-13.
Number of Output/Display Digits
3-118
5-l. Adjustable Components . ...+.... 5-2
5-2.
Adjustment Requirements . . . . . . . 5-4
5-3.
Check Points and Limits . . ...*. 5-10
5-4.
Test Point/Trimmer Capacitor
5-5.
5-6.
5-7.
Combination . . . . . . . . . . . . . . . . 5-14
MSU
DIAGNOSTICS
Mode . . . . . . . . . . 5-24
Message on MSU
EXERCISER
Page . 5-30
MSU EXERCISER
Softkey Prompts . 5-31
List of Reference Designators
and Abbreviations .......... 6-l
Manufacturers Codes ........... 6-2
Replaceable Parts ............. 6-3
6-l.
4-A
4-8
4-T.
4-2.
4-3.
Recommended Test Equipment . . . .
Source Parameter Changes . . . . . .
Test Limits for Voltage Control
Accuracy Test
. . . . . . . . . . . . . .
Source Parameter Changes . . . . . .
Test Limits for Voltage
Measurement Accuracy Test . .
Source Parameter Changes . . . . . .
Test Limits for Current
Measurement Accuracy Test . .
Source Parameter Changes . . ..e.
Test Limits for Current Control
Accuracy Test . . . . . . . . . . . . . .
Test Limits for SU Accuracy
Test ......................e
Test Limits for MU Accuracy
Test ..*....................
6-2.
6-3.
4-8
4-l 2
4-4.
4-5.
7-l. Manual Chanqes by Serial
4-12
4-15
Number .:....l.............. 7-l
Parts Change Information ...... 7-27
4-6.
4-7.
7-2.
8-l.
Hardware-related Error Codes . . 8-6
8-2.
SMU Status Codes . . . . . . . . . . . . . .
8-6
8-3. Jumper Settings . . . . . . . . . . . . . . . 8-19
8-4.
List of Digital Section
4-15
4-l 8
Troubleshooting Flow Diagrams 8-22
Program Locations . . . . . . . . . . . . .
8-76
Relationship between Current
and Range Resistors . . . . . . . . 8-103
V Monitor Amplifier Ranging . . . 8-104
4-8.
4-9.
4-18
4-10.
4-21 8-5.
8-6.
4-11.
4-24
8-7.
iv
Model 4145A
List of Illustrations
LIST OF ILLUSTRATIONS
L
Number Title Page
l-l. Model 4145A and Accessories .... l-l
3-38.
l-2. Serial Number Plate ............ l-3
3-39.
2-l. Voltage and Fuse Selection .....
2-2
2-2.
Power Cable Supplied
...........
2-3
2-3.
Rack Mount Kit ................. 2-5
3-l.
3-2.
3-3.
3-4.
3-5.
3-6.
3-7.
3-8.
3-9.
3-10.
3-11.
L-
I
3-12.
3-13.
3-14.
3-15.
3-16.
3-17.
3-18.
3-19.
3-20.
3-21 .
3-22.
3-23.
3-24.
3-25.
3-26.
3-27.
3-28.
3-29.
3-30.
3-31.
3-32.
3-33;
3-34.
3-35.
b’ +”
3-36.
3-37.
Contents of Section
III ........ 3-l
Front Panel Features ........... 3-2
Rear Panel Features ............ 3-8
Disc Installation
and Removal . . 3-10
Useable Display Area ........... 3-11
Operator Adjustment ............ 3-11
Byte Size of Arithmetic
Expressions .................
3-20
Source and Measurement Channels
of the 4145A ................ 3-21
Simplified Circuit Diagram of
One of the Four SMUs ........ 3-21
Specifiable Voltage/Current
output
......................
3-22
Simplified Circuit Diagram of Vs 3-23
Simplified Circuit Diagram of Ym 3-23
Voltage/Current Output
Specified by the
COMPLIANCE . 3-23
Staircase Sweep Output .........
3-24
Relationship Between VARl and
VAR2 ........................ 3-25
Relationship Between VARl and
VARl' ....................... 3-26
Time Domain Measurement ........ 3-27
Page Control Keys ..............
3-28
Page Flow and the Relationship . 3-29
MENU Page
...................... 3-32
CHANNEL
DEFINITION Page ........ 3-34
SOURCE SETUP Page ..............
3-38
MEAS
& DISP
MODE SETUP Page .... 3-42
GRAPHICS
PLOT Page .............
3-48
LIST DISPLAY
Page ..............
3-54
MATRIX DISPLAY
Page ............
3-57
SCHMOO PLOT Page
............... 3-59
AUTO SEQUENCE SETUP Page .......
3-62
OUTPUT SEQUENCE SETUP Page .....
3-66
4145A FILE
CATALOG Page ........
3-67
OPERATION GUIDE Page ........... 3-70
DIAGNOSTICS Page ............... 3-71
Time Domain Measurement Setup . . 3-74
DUT Connection Using the 1605811. 3-76
DUT Connection Using the
Connector Plate ............. 3-80
Example of Guarding ............ 3-82
Connection Examples for
Application Package ......... 3-85
Number Title Page
3-40.
3-41.
3-42.
3-43.
3-44.
3-45.
3-46.
3-47.
3-48.
3-49.
3-50.
3-51.
4-l.
4-2.
4-3.
4-4.
4-5.
4-6.
4-7.
4-8.
4-9.
4-l 0.
4-l 1.
4-12.
4-l 3.
4-14.
4-15.
4-l 6.
4-17.
5-l .
5-2.
5-3.
5-4.
5-5.
5-6.
5-7.
5-8.
5-9.
HP-IB
Control Switch .......... 3-86
Remote Program Codes and
Parameter Setting ..........
3-88
Data Output Format ............ 3-l 00
Status Byte for the 4145A ..... 3-102
Sample Program 1 .............. 3-105
Sample Program 2
.............. 3-107
Plot Function ................. 3-108
Print Function ................ 3-110
External Display .............. 3-111
Disc Copy
.....................
3-112
Head Cleaning ................. 3-l-13
Programs for
HP-IB
controlled
PLOT Operations ............ 3-115
Measurement Ranges and
Resolution ................. 3-116
Display/Output Format ......... 3-119
Test Pattern for GDU .......... 4-2
GDU Connector Location ........ 4-3
Display for Key Function Check. 4-4
Voltage Control Accuracy Test
Setup ......................
4-5
Measurement Setup .............
4-6
Voltage Measurement Accuracy
Test Setup ................. 4-9
Measurement Setup
............. 4-10
Measurement Setup .............
4-13
Measurement Setup .............
4-l 6
SU Accuracy Test Setup ........ 4-19
Measurement Setup .............
4-21
MU Accuracy Test Setup ........
4-22
Measurement Setup .............
4-23
External CRT X-Y-Z Output
Check Setup ................
4-25
Scope Displays of X-Y-Z
Output (Example)
...........
4-26
HP-IB Interface Test
Setup .... 4-27
Program Listing
of HP-IB
Interface Test .............. 4-30
Test
Pattern for GDU .......... 5-6
INTENSITY
and FOCUS Locations . 5-6
Connector Location ............ 5-7
DC Power Supply Adjustment
Setup ......................
5-8
AllR17 Adjustment ............. 5-9
A5Jl Check .................... 5-10
Check Point Locations ......... 5-10
Sample Hold Switch AC Offset
Adjustment Setup ........... 5-11
AC Offset Adjustment .......... 5-12
5-l 0.
Check/Adjustment Point
Locations . . . . . . . . . . . . . . . . . . 5-12
__
V
~ -_ -- - _---
List of Illustrations
Model 4145A
LIST OF ILLUSTRATIONS
Number
5-14.
5-15.
5-16.
5-17.
5-18.
5-19.
5-20.
5-21.
5-22.
5-23.
5-24.
5-25.
5-26.
5-27.
5-28.
5-29.
5-30.
5-31.
5-32.
5-33.
5-34.
5-35.
5-36.
5-37.
5-38.
5-39.
5-40.
6-l.
Title
Page Number
D-A Converter Gain Adjustment
Setup . . . . . . . . . . . . . . . . . . . . . . . 5-16
Check/Adjustment Point
Locations . . . . . . . . . . . . . . . . . . . 5-17
Results from LED Annunciators . . 5-18
Check/Adjustment Point
Locations l . . . . . . . . . . . . . . . . . . 5-19
Vm Range Adjustment Setup . . . . . . 5-20
Test Point Locations . . . . . . . . . . . 5-22
Flexible-disc Drive Access .,... 5-23
Component Locations for MSU
DIAGNOSTICS Mode Setting . . . . 5-25
CRT Display of MSU DIAGNOSTICS
Page . . . . . . . . . . . . . . . . . . . . . . . .
5-25
CRT Display of MSU Read Test . . . 5-26
CRT Display of MSU Write Test . . 5-28
CRT Display fo MSU EXERCISER
Page . . . . . . . . . . . . . . . . . . . . . . . . 5-30
Drive Belt Tension Check and
Adjustment Setup . . . . . . . . . . . .
5-32
Index Timing Checks and
Adjustment . . . . . . . . . . . . . . . . . . 5-33
R47 Location . . . . . . . . . . . . . . . . . . . 5-33
Track Alignment Check and
Adjustment . . . . . . . . . . . . . . . . . . 5-34
Scope Display of Bursts ^l....... 5-35
Check/Adjustment Point Locations 5-37
Track Zero Switch and Adjustment
Setup . . . . . . . . . . . . . . . . . . . . . . . 5-38
Scope Display of Track Zero
Switch Switching
. . . . . . . . . . . . 5-39
Check/Adjustment Point Locations 5-40
Jitter Check and Adjustment
Setup . . . . . . . . . . . . . . . . . . . . . . . 5-41
Scope Display of Jitter . . . . . . . . 5-42
Check/Adjustment Point Locations 5-42
Index Detector Alignment Check
and Adjustment Setup . . . . . . . . 5-43
Index Detector Alignment Gap . . . 5-44
Check/Adjustment Point Locations 5-45
Major Mechanical Parts
(Exploded View) ..,...,,...., 6-29
8-l.
8-2.
8-3.
8-4.
8-5.
8-6.
8-7.
8-8.
8-9.
8-10.
8-11.
8-12.
8-13.
8-14.
8-15.
8-16.
8-17.
8-18.
8-19.
8-20.
8-21.
8-22.
8-23.
8-24.
8-25.
8-26.
8-27.
8-28.
8-29.
8-30.
8-31.
8-32.
8-33.
8-34.
8-35.
Title
-- .&
Page
Four Major Sections of the 4145A 8-3
Overall Block Diagram .......... 8-5
Assembly Level Trouble Isolation
Flow Diagram
................ 8-7
Assembly Locations ............. 8-8
Front Panel Removal ............
8-9
1345A Removal .................. 8-10
Rear Assembly A Removal ........ 8-11
All and A12 Board Removal
...... 8-12
Rear Assembly B Removal ........ 8-12
A19 Board Assembly
.............
8-13
FDD and A9 Board Removal ....... 8-13
Flow Diagram Notes ............. 8-14
Signature Analysis .............
8-21
Al Board Troubleshooting
Flow Diagram ................ 8-25
A2 Board Troubleshooting
Folw Diagram ................
8-31
A3 Board Troubleshooting
Flow Diagram ................ 8-43
A4 Board Troubleshooting
Folw Diagram
................ 8-53
A9 Board Troubleshooting
Flow Diagram ................ 8-59
A10 Board Troubleshooting
Flow Diagram ................ 8-65
Schematic Diagram Note .........
8-68
Block Diagram of Al Board ...... 8-69
Al Graphic Display Control Board
Assembly Component Locations. 8-70
Al Graphic Display Control Board
Assembly Schematic Diagram . . 8-71
Block Diagram of the A2 Board . . 8-72
A2 Microprocessor Digital
Control Board Assembly
Component Locations
......... 8-74
A2 Microprocessor Digital
Control Board Assembly
Schematic Diagram ...........
8-75
Block Diagram of the.A3 Board . . 8-78
A3 SMU Control and A-D Converter
Board Assembly Component
Locations ................... 8-80
A3 SMU Control and A-D Converter
.Board Assembly Schematic
Diagram ..................... 8-81
Block Diagram of A4 Board ...... 8-84
I-V Converter Output ........... 8-85
Analog Switch
.................. 8-85
A4 D-A Converter Board Assembly
Component Locations .........
8-86
A4 D-A Converter Board Assembly
Schematic Diagram ...........
8-87
A5 Board Troubleshooting
Flow Diagram ................ 8-88
vi
List of Illustrations
Model 4145A
LIST OF ILLUSTRATIONS
Number
8-36.
8-37.
8-38.
8-39.
8-40.
8-41.
8-42.
8-43.
8-44.
8-45.
8-46.
8-47.
8-48.
8-49.
8-50.
8-51.
8-52.
8-53.
~, --
8-54.
8-55.
8-56.
8-57.
8-58.
8-59.
8-60.
8-61.
8-62.
8-63.
8-64.
8-65.
8-66.
8-67.
8-68.
Title
Page
Self-Test Waveform . . . . . . . . . . . . . 8-97
SMU Board Block Diagram . . . . . . . . 8-98
SMU V Mode Operation . . . . . . . . . . . 8-99
SMU I Mode Operation . . . . . . . . . . . 8-99
Current Compliance in V Mode . . 8-100
V Error Amplifier . . . . . . . . . . . . . 8-100
Three Control Modes . . . . . . . . . . . 8-101
Example of Diode Feedback . . . . . 8-102
Power Amplifier Output Stage . . 8-102
Range Resistors . . . . . . . . . . . . . . . 8-103
Range Resistor Circuit . . . . . . . . 8-104
A5 SMU Board Assembly
Component Locations . . . . . . . . 8-106
A5 SMU Board Assembly
Schematic Diagram . . . . . . . . . . 8-107
A9
HP-IB and MSU
Control Board
Assembly Component Locations 8-112
A9 HP-IB and MSU Control Board
Assembly Schematic Diagram . 8-113
Block Diagram of Key Control . . 8-115
A10 Keyboard and Display Board
Assembly Component Locations 8-116
A10 Keyboard and Display Board
Assembly Component Locations 8-117
All Board Troubleshooting
Flow Diagram ..T............ 8-118
Rectifier Circuit . . . . . . . . . . . . . 8-120
Switching Circuit . . . . . . . . . . . . . 8-120
Power Loss Detection Circuit . . 8-121
All Switching Power Supply
Board Assembly
Component Locations
" . . . . . . . 8-122
All Switching Power Supply
Board Assembly
Schematic Diagram . . . . . . . . . . 8-123
Al2 Board Troubleshooting
Flow Diagram . . . . . . . . . . . . . . . 8-124
Al2 DC Power Supply Board
Assembly Component Locations 8-126
Al2 DC Power Supply Board
Assembly Schematic Diagram . 8-127
Al3 Board Troubleshooting
Folw Diagram . . . . . . . . . . . . . . . 8-128
Voltage Change Sequence . . . . . ...8-129
Al3 SMU Power Source'Board
Assembly Component Locations.8-130
Al3 SMU Power Source Board
Assembly Schematic Diagram . 8-131
Al5 Board Troubleshooting
Flow Diagram . . . . . . . . . . . . . . . 8-132
Al5 Floating Power Supply Board
Assembly Component Locations 8-68
Number
Title
Page
8-69. Al5 Floating Power Supply Board
Assembly Schematic Diagram . 8-69
8-70. Al6 Board Troubleshooting
Flow Diagram . . . . . . . . . . . . . . . 8-136
8-71. Vs Block Diagram . . . . . . . . . . . . . . 8-138
8-72. Vm Block Diagram . . . . . . . . . . . . . . 8-138
8-73. Al6 Vs/Vm Board Assembly
Component Locations . . . . . . . . 8-140
8-74.
Al6 Vs/Vm Board Assembly
Schematic Diagram . . . . . . . . . . 8-141
vii
Model 4145A
SECTION I
SECTION I
GENERAL INFORMATION
l-l. INTRODUCTION
l-2. This operation and service manual
contains the information required to install,
operate, test, adjust, and service the
Hewlett-Packard Model 4145A Semiconductor
Parameter Analyzer. Figure l-l shows the
instrument and supplied accessories. This
section covers
specifications,
instrument
l-3. Listed on the title page of this manual is
a microfiche part number that can be used to
order 4 x 6 inch microfilm transparencies of the
manual. Each microfiche contains up to 60
photo-duplicates
of the manual pages. The
microfiche package also includes the latest
manual changes supplement as well as all
pertinent service notes. To order an additional
manual, use the part number listed on the title
page of this manual. identification, description, options, accessories,
and other basic information.
4145A
04145-61622
-p&+-/y,,
G
04145-61623
04145-61,630
e7
required)
i P-L ==-? lm?-&oC3
Figure l-l. Model 4145A and Accessories.
SECTION I
Model 4145A
l-4. DESCRIPTION
l-5. The
Hewlet t-Packard Model 4145A
Semiconductor Parameter Analyzer is a fully
automatic, high performance, programmable test
instrument designed to measure, analyze, and
graphically display the DC characteristics of a
wide range of semiconductor devices, such as
diodes, bipolar transistors, field-effect
transistors, wafers, ICs, etc. Main applications
include computer-aided design (CAD) of ICs, new
device evaluation, materials evaluation,
component selection for circuit design,
incoming/outgoing inspection, semiconductor
process control, quality control, and quality
assurance. It is equipped with four
programmable stimulus/measurement units
@MU), two programmable voltage source units
(Vs), two voltage monitor units (Vm), a fully
interactive graphics
display,
removable
flexible-disc storage, softkeys, full arithmetic
keyboard, and HP-IB. And it can be used on the
bench or as part of a complete measurement
system in the laboratory or on the production
line.
l-6.
For device stimulation and characteristics
measurement, the 4145A has eight channels.
Channels 1 through 4 are stimulus/measurement
units (SMU); channels 5 and 6 are voltage source
units (Vs); and channels 7 and 8 are voltage
monitor units (Vm).
_..
Each SMU channel has three modes of operation:
voltage
source/current monitor (V), current
source/voltage monitor (I), and common (COM).
Source voltage and source current can be held
constant or swept linearly or logarithmically.
When used as a voltage source/current monitor
(V mode), each SMU can be programmed to
output DC voltages from OV to +lOOV over three
ranges--OV to f 19.999V, *2OV to +39.998V, and
+4OV to +lOOV--with a resolution of lmV, 2mV,
and 5mV, respectively.
When used as a current
source/voltage monitor (I mode), each SMU can
be programmed to output currents from *lpA to
+lOOmA over nine ranges, with a resolution of
1pA max.
(current measurement resolution is
50fA max.), depending on the current range.
Current through the sample in V mode and
voltage across the sample in I mode can be
limited to prevent damage to the sample.
The two Vs channels are programmable voltage
source& Output voltage can be held constant or
linearly or logarithmically swept from OV to
f 20V with 1mV resolution. The voltage sources
are used when many bias and voltage sources are
required.
Of the six source channels (four SMUs, two Vs),
any combination of three can be automatically
swept in a linear or logarithmic staircase manner
within the range of each channel. Hold times
from 0 to 650 sec$ds and delay times from 0 to
6.5 seconds can be programmed. In a
multi-channel sweep
setup, one channel
functions as the main sweep channel. One of the
other channels can be swept synchronously with
the main channel, while one other channel can be
swept subordinately to the main channel. SMUs
not swept can be used as constant current or
constant voltage sources.
The two Vm channels are used to measure
voltages up to +2OV.
1-7. Measurement results, measurement
setups, operator prompts, error messages, and
diagnostics are displayed on a fully interactive,
microprocessor based graphics display.
Measurement results can be displayed in one of
four modes : graphic, list, matrix, and schmoo.
Front Panel softkeys provide a wide range of
automatic display control functions, such as
AUTO SCALE, STORE, RECALL, CURSOR,
MARKER, vertical and horizontal ZOOM, LINE
(two), GRAD, l/GRAD, X intercept, Y intercept,
and INTERPOLATE. Softkeys are used in all
phases of instrument operation--from
measurement
setup
to measurement
analysis-and make overall instrument operation
quick and easy.
By pressing the PLOT key or PRINT key, the
presently displayed screen, whether a
measurement result or measurement setup, can
be dumped directly onto an HP-IB compatible
printer/plotter, providing clear, inexpensive hard
copies.
The plot area is user selectable within
the limits of the printer/plotter, and if a
multi-pen plotter is used, multi-color plots can
be made automatically. All PLOT and PRINT
operations are done automatically, without a
controller. Also, the 4145A’s display is equipped
with X-Y-Z outputs to allow connection of a
large-screen graphics display.
The 4145A is fluent in HP-GL (Hewlett- Packard
Graphics Language), permitting external control
of its display via the HP-IB.
Cursor and marker positioning is user
controllable via the front panel, and X-Yl-Y2
coordinates are digitally displayed on the CRT.
l-2
Model 4145A
SECTION I
l-8.
The 4145A is equipped with a flexible-disc
drive unit that accommodates a singlesided,
L
single-density, 13.3cm (5.25 in.), 92K byte disc.
One cleaning disc and five work-discs--each
containing the necessary operating system
software, four general purpose measurement
programs, and 36.6K bytes of user area-are
furnished with the 4145A. Up to 47
measurement setup programs or 11 sets of
measurement data, plus auto sequence programs,
can be stored (SAVE) in the user area and
recalled (GET) later. Additional discs can be
purchased to increase storage capability, and the
entire user area of each disc can be quickly
copied.
l-9.
All instrument functions are handled by a
high speed microprocessor, under the control of
the operating system software stored on each
furnished flexible disc. Measurement setup,
display mode selection, graphic scaling,
diagnostics, operation guide, menu, and catalog
are arranged as individual display pages. Paging
is controlled by the MENU, PREV, and NEXT
keys. Instructions, softkey labels, and error
messages and codes are displayed on each page.
Also, the 4145A is remotely controllable via the
HP-IB and the 4145A’s display can be used as an
independent display via the HP-IB.
L’
l-10. Furnished with the 4145A is the 16058A, a
specially designed shielded test fixture which
connects to the 4145A’s rear panel.
Eight
different interchangeable DUT boards are
provided, allowing measurement of diodes;
S-terminal and 4-terminal transistors; 8-pin,
lo-pin, and 12-pin devices; and 18-pin and 24-pin
DIP ICs. The 16058A is equipped with a
lightshielded lid to allow stable measurement of
light-sensitive devices, such as photo diodes,
photo transistors, and photo resistors. Also, to
insure operator safety when potentially
dangerous voltages are applied to a sample, a
warning will be displayed on the 4145A if the
test fixture lid is open and measurement will not
be made until the lid is closed. For
user-fabricated test fixtures and jigs, a special
connector, four S-meter triaxial cables, and four
S-meter coaxial cables are also furnished.
l-l 1. SPECIFICATIONS
1-12. Complete specifications of the Model
4145A Semiconductor Parameter Analyzer are
given in Table l-l. These specifications are the
performance standards or limits against which
the instrument is tested. The test procedures
for the specifications are covered in Section IV,
Performance Tests.
Table l-2 lists Reference
Data. Reference Data are not specifications but
are typical characteristics included as additional
information for the operator. When the 4145A
Semiconductor Parameter Analyzer is shipped
from the factory,
it meets the specifications
listed in Table l-l.
1-13. SAFETY CONSIDERATIONS
1-14. The Model 4145A
Semiconductor
Parameter Analyzer has been designed to
conform to the safety requirements of an IEC
(International Electromechanical Committee)
Safety Class I instrument and is shipped from the
factory in a safe condition.
1-15. This operation and service manual
contains information, cautions, and warnings
which must be followed by the user to ensure
safe operation and to maintain the instrument in
a safe condition.
1-16. INSTRUMENTS COVERED BY MANUAL
1-17. Hewlett-Packard uses a two-section nine
character serial number which is stamped on the
serial number plate (Figure 1-2) attached to the
instrument’s rear-panel. The first four digits and
the letter are the serial prefix and the last five
digits are the suffix. The letter placed between
the two sections identifies the country where the
instrument was manufactured. The prefix is the
same for all identical instruments; it changes
only when a change is made to the instrument.
The suffix, however, is assigned sequentially and
is different for each instrument. The contents
of this manual apply to instruments with the
serial number prefix(es) listed under SERIAL
NUMBERS on the title page.
Figure l-2. Serial Number Plate.
l-3
SECTION I
1-18. An instrument manufactured after the
printing of this manual may have a serial number
prefix that is not listed on the title page. This
unlisted serial number prefix indicates the
instrument is different from those described in
this manual. The manual for this new instrument
may be accompanied by a yellow Manual
Changes supplement or have a different manual
part number. This supplement contains “change
information” that explains how to adapt the
manual to the newer instrument.
1-19. In addition to change information, the
supplement
may
contain information for
correcting errors (called Errata) in the manual.
To keep this manual as current and accurate as
possible, Hewlet t-Packard recommends that you
periodically request the latest Manual Changes
supplement. The supplement for this manual is
identified with the manual print date and part
number, both of which appear on the manual’s
title page. Complimentary copies of the
supplement
are available from HewlettPackard. If the serial prefix or number of an
instrument is lower than that on the title page of
this manual, see Section VII, Manual Changes.
l-20. For information concerning a serial
number prefix that is not listed on the title page
or in the Manual Change supplement, contact the
nearest Hewlett-Packard office. -j_
1-21. OPTIONS
l-22. Options are modifications to the standard
instrument that implement the user’s special
requirements for minor functional changes. The
4145A has four options :
Option 907 : Front Handle Kit.
Furnishes Carrying handles for
both ends of front-panel.
Option 908 : Rack Frange Kit.
Furnishes flanges for rack
mounting
for both ends of
front-panel.
Option 909 : Rack Flange and Front Handle
Kit. Furnishes both front handles
and rack flanges for instrument.
Option 910 : An extra copy of the Operation
and Service Manual.
Model 4145A
l-23. ACCESSORIES SUPPLIED
l-24. The Model 4145A
Semiconductor *-/
Parameter Analyzer, along with its furnished
accessories, is shown in Figure l-l.
The
Additionally, a spare fuse (HP Part No.
21 lo-0015 or 2110-0305) and an Operation and
Service Manual (HP Part No. 04145-90000) are
furnished with the 4145A.
l-25. ACCESSORIES AVAILABLE
l-26. The Model 16261A* Software Disc Set,
containing five software discs, is available when
extra discs are required.
l-27. Warranty Limitation for Accessories
l-28. The Personality
Board (P/N:
16058-60003)
and eight
16058 6O~~~~““furn~~~ 16058-60004 through -
.
with the 16058A Test Fixture are warranted
against defects in material and workmanship for
a period of three months from the date of
delivery. During the warranty period,
Hewlett-Packard Company will, at its option,
either repair or replace components which prove
to be defective. This warranty does not apply to
defects resulting from
improper use or
inadequate maintenance.
Installation procedures for these options are
given in Section II.
l-4
-,- - .-- -.
-
Model 4145A
SECTION I
Table l-l. Specifications (Sheet 1 of 8)
* Specifications listed below are for the 4145A only.
For 16058A specifications, refer to
the 16058A Operation Note.
GENERAL INFORMATION
Basic Functions :
Measures the DC current through voltage-biased devices and the
DC voltage across current-biased devices; Arithmetic calculation; Displays
measurement results and calculation results on a built-in CRT display; graphics
analysis capabilities; storage and recall of measurement setups, measurement data,
and auto-sequence programs.
c
Source and Measurement Units :
Stimulus/Measurement Units (SMU) : Four SMU channels. Each SMU can be
programmed to function as a variable or constant DC voltage source/current
monitor or as a variable or constant DC current source/voltage monitor.
Voltage Sources (Vs) : Two Vs channels.
Each Vs c?an be programmed to
function as a variable or constant DC voltage source.
Voltage Monitors (Vm) : Two Vm channels. Each Vm can measure DC
voltages up to +2OV.
^I SOURCE/MEASUREMENT FUNCTIONS
Measurement and output accuracies are specified at 23 O +5 OC after the
instrument has been allowed to warm up for at least 40 minutes, with AUTO CAL
set to ON, INTEG TIME set to SHORT and referenced to SMU common. Specified
accuracy doubles for operation between 10 O C and 40 ’ C.
Stimulus/Measurements Units (SMU) : Four SMU channels. Each SMU measures
current when operating as a voltage source, or measures voltage when operating as
a current source. Source and measurement ranges, resolution, and accuracy
specifications are given in the tables below.
Accuracy specifications in the below tables are given as +n% of specified output or
measured value, +n% of range value. 10 is output current (I), Vo is output voltage
w.
Vo 1 t age Range Resolution
+2ov 1mV
+4ov 2mV
+lOOV
5mV
Accuracy
0.1%+0.05%+0.4fi*Io
Max. Current
lOOmA
SOlIlA
2omA
l-5
---
SECTION I Model 4145A
Table l-l. Wecifications (Sheet 2 of 8)
I
Current Range
I
Resolution
I
Accuracy
+lOOmA lOOnA
+lOmA
1 OpA
0.3%+(0.1+0.2*Vo/100)%
I
+1000l~A
I
II-IA
I
I
+1 OOuA
I
1 OOnA
I
I
*lOuA
I
1 OnA
I
111 0.5%+(0.1+0.2*Vo/100)%
111 1%+(0.1+0.2*Vo/100)%+5pA
Max. Voltage
2ov (>SOmA)
4ov (>2OmA)
1oov (62OmA)
Setting Resolution :
Voltage, 4*1/2 digits (1mV max.);
Current, 4 digits (1pA max.).
Measurement Resolution :
Voltage, 4*1/2 digits (1 mV max.);
Current, 4 digits (50fA max.).
Ranging :
Automatic.
Current/Voltage Limiting (Compliance) :
Current output from an SMU
operating as a voltage source and
voltage output from an SMU
operating as a current source can be
limited.
Compliance Range : Current, 50pA to maximum allowable output current of
each voltage range; Voltage, OV to maximum allowable
output voltage of each current range.
Accuracy: Current compliance, accuracy of current source+1 % of range +lOpA;
Voltage compliance, accuracy of voltage source.
Residual Resistance (Voltage Source/Current Measurement Mode) : 0.452.
Input Resistance (Current Source/Voltage Measurement Mode) : Z- 101k.
Capacitive Load : 6 1 OOOpF.
l-6
Model 4145A
SECTION I
Table l-l. Snecifimtions (Sheet
3
of 8)
Voltage Sources (Vs) : Two Vs channels. Each Vs can be programmed to function
as a variable or constant DC voltage source. Output ranges, resolution, and
accuracy specifications are given in the table below.
Output Voltage Range Resolution
Accuracy
Max. Output Current
+2ov 1mV 0.5% of setting +lOmV lOmA
Output Impedance : Less than 0.2R
Capacitive Load : 2 1OOOpF
Voltage Monitors (Vm) :
Two Vm channels. output ranges, resolution,
and
accuracy specifications are given in the table below.
Measurement Voltage Range
Resolution
I
Accuracy
1
I
1OOPV
I
0.5% of reading + 1OmV
I
I
1mV
I
0.2% of reading + 1OmV
I
Input Impedance : lMR+ 1%
Capacitance in Parallel with Output : 150pF+ 10 %
l-7
SECTION I Model 4145A
Table l-l. Snwifications (Sheet 4
of 8)
SPECIFICATIONS COMMON TO ALL CHANNELS
Maximum Withstand Voltage :
1OOV (SMU, guard terminal, Vs, and Vm)
Maximum Voltage Between Common and GND : Less than +42V.
Source Modes (SMUs Only) : V (voltage source/current monitor),
I (current source/voltage monitor), and COM*.
Source Functions (SMUs Only) :
VAR 1, staircase sweep;
VARl’, synchronous (VARl) staircase sweep;
VARZ, subordinate (VARl) staircase sweep;
CONST, constant source (voltage or current).
* : In COM mode, output voltage is OV and compliance is 105mA.
Voltage/Current Sweep : Output from each SMU (voltage or current) and each Vs
(voltage) can be swept by assigning source function VARl, VARl’, or VARZ.
Max. Number of Steps : 512 in single-sweep measurements, up to 575 in
multi-sweep measurements.
VARl : Main sweep. Linear or logarithmic sweep is selectable.
Linear Sweep :
Staircase sweep in accordance with the user specified
START, STOP, and STEP values.
Log Sweep :
Staircase sweep in accordance with the user specified START
and STOP values-and selected LOG step (10, 25, or 50 points per decade).
VAR2 :
Subordinate linear staircase sweep in accordance with the user speci-
fied START, STEP, an NO. OF STEPS values.
VAR2 source channel output is
incremeneted one STEP each time the VARl source channel completes one sweep.
VARl’ : Staircase sweep synchronized with the VARl sweep. Sweep is made with
a user specified, fixed ratio or offset value. VARl’ output is calculated as :
VARl’ = a x VARl (fixed ratio)
VARl’ = b + VARl (fixed offset)
where “al* is the user-specified ratio (from 20.01 to +lO) and ‘lb” is the
user-specified offset value. Ratio and offset must be such that the VARl’ source
channel does not exceed its maximum output limit.
HOLD TIME :
0 to 650 seconds, 1Oms resolution (max.). Accuracy is _+0.5%+9ms.
DELAY TIME : 0 to 6.5 seconds, lms resolution. Accuracy is +O.l%+5xN for
GRAPHICS and SCHMOO plots and +O.l%+lOxN for LIST and MATRIX displays.
Where N is the number of measurement channels used in the measurement.
Output Sequence : The order in which the source channels begin output is fully
programmable.
Measurement Modes : SINGLE, REPEAT, APPEND
Integration Time (at each measurement point) : SHORT, 3.6ms; MED, 20ms at 50Hz
line frequency, 16.7ms at 60Hz line frequency; LONG, 16 times MED.
l-8
Model 4145A SECTION I
Table l-l. Specifications (Sheet 5 of 8)
DISPLAY FUNCTIONS
Display : CRT. Electrostatic focus and deflection, post accelerated.
Alu-
minized P-3 1 phosphor.
Screen Size : 16cm (6.25in) diagonal.
Screen Resolution : 2048 x 2048 points.
Display Characters and Symbols :
Upper-case
alphabetic characters, numerics,
comma ( ) @ R O
entered frAm9 th’e iront(W&,l 5 % # y CL k, e7 my I-I, n, P, +, -) *, /, J- 7 A . All are
.
Display Modes : GRAPHICS, LIST, MATRIX, SCHMOO, and TIME DOMAIN.
GRAPHICS Display : Two-axes (X-Y) or three-axes (Y-Y, -Y2) plot of
measured parameters and USER FUNCTION calculations.
LIST Display : Used in conjunction with VARl sweep. Up to six measure-
ment parameters and USER FUNCTION results can be displayed for each step
of the VARl source channel.
MATRIX Display : Used in conjunction with VARl and VAR2 sweeps. Up to
six columns of sweep-dependent measurement results or USER FUNCTION
results can be displayed.
SCHMOO Display : Used in conjunction with VARl and VAR2 sweeps.
Sweep-dependent measurement results or calculation results are displayed on
an X-Y-Z graph.
TIME DOMAIN Display : Measurement and calculation results are displayed
on a two-axes (X-Y) or three-axes (X-Y, -Y2 ) graph as a function of time.
VARl sweep is replaced by time.
Parameters : Initial Wait Time, 0 to 100 seconds (1 Oms resolution);
Measurement Interval, 1Oms to 10 seconds (1 Oms resolution); Number of
Readings, 5 12.
l-9
SECTION I
Model 4145A
TRhle l-l. Srwcifimtions (Sheet G of 8)
ARITHMETIC AND ANALYSIS FUNCTIONS
Arithmetic Functions : Arithmetic
expressions can be entered and executed
directly from the front panel. Results are displayed on the CRT.
Arithmetic Operators : +, -, *, /, /- , EXP (Napierian constant), LOG
(common log), LN (natural log), ** (exponentiation), ABS (absolute), EEX
(scientific notation), and A (differential calculation).
Keyboard Operation : Arithmetic expressions are executed by pressing
the EXECUTE key. Results are displayed on the CRT.
USER FUNCTION : Up to two USER FUNCTION can be defined as arith-
metic expressions. USER FUNCTIONS are executed during measurement and
the results are displayed with measurement results.
Physical Constants : Three commonly used physical constants are perma-
nently stored in memory. The stored value of each constant has seven-digit
accuracy but only the five most significant digits are displayed.
q : Electron Charge, 1.6O2189x1O-1g C
k : Boltzmann’s Constant, 1.380662~10 -2 3 J/ O K
e : Dielectric Constant of vacuum, 8.854185~10 -12F/m.
Engineering Units : m (10V3 ), p (lo+ ), n (lo-’ ), p (10-12)
Analysis Functions :
Overlay Graph Comparison :
A GRAPHIC plot can be stored and later
recalled to obtain an overlay comparison of two measurements. -A SCHMOO
plot can also be stored, but when the RECALL key is pressed, only the stored
plot is displayed. Pressing RECALL a second time redisplays the previous
plot. Only one set of data can be stored and scaling information is not
included.
Auto Retrieve Function : Measurement data obtained in any display mode
is automatically redisplayed whenever the display mode is changed. However,
when the value of a measurement setup parameter is changed, all
measurement data is cleared.
MARKER :
On a GRAPHICS plot, the MARKER can be moved along a plotted
curve or line. The X, Y1 , and Y2 coordinates at the MARKER location are
digitally displayed on the CRT.
INTERPOLATE : Allows positioning of the MARKER between two measurement
points. The X, Y1, and Ye coordinates at the MARKER location are
estimated and digitally displayed on the CRT.
CURSOR : On a GRAPHICS plot, the CURSOR is two intersecting and
perpendicular lines which can be positioned at any point on the graph. There
are two GRAPHICS cursors : LONG and SHORT. The X, Y 1, and Y2
coordinates at the CURSOR location are digitally displayed on the CRT.
On a SCHMOO plot the CURSOR highlights the symbol at a measurement
point and only the Z-axis value is digitally displayed on the CRT.
On LIST and MATRIX displays the CURSOR is a moveable pointer ( b ).
l-10
Model 4145A
SECTION I
T:,hlp l-l _ Snp~ifimtinm fS.hppt 7 nf $2)
A--..- A A. -p----‘- - .,*-....., \- ..--- , _a .,,
AUTO SCALE : GRAPHIC plots can be automatically resealed after meas-
surement, providing optimum display of measurement results.
ZOOM Function (t-t, +-+ , 3 , $ ) : Used in conjunction with
the CURSOR on GRAPHIC plots. Expands (+-3, i ) or contracts (+-t, t ) the
graph in the indicated direction and in reference to the CURSOR location.
MOVE WINDOW : Repositions the LONG or SHORT CURSOR to the exact center
of the plot area and moves displayed plots in reference to the CURSOR.
LINE : Draws a straight line between two moveable cursors.
X and Y
axes intercepts are digitally displayed, as are the line gradient (GRAD) and
gradient reciprocal (l/GRAD) values.
MASUREMENT/DISPLAY SETUP AND STORAGE FUNCTIONS
Measurement/Display Setup : Interactive fill-in-the-blank programming of channel
definitions, source outputs, and measurement/display modes.
Measurement Setup Storage : The existing measurement setup can be stored in
the user-area on the flexible disc and recalled later by using the SAVE and GET
keys, respectively.
Measurement Data Storage : The existing measurement results can be stored in
the user-area on the flexible disc and recalled later by using the SAVE and GET
key, respectively.
Auto-Sequence Program : A series of different measurements can be programmed
for automatic execution. The maximum number of program steps is 24, and
useable commands are GET, SINGLE, SAVE D, PLOT, PRINT, PAUSE, WAIT, and
PAGE.
Storage Medium : 5.25 in. single-sided, single-density, soft-sectored mini flex-
ible disc.
User-Area : 92K bytes.
Number of User Records : 131
Record Allocation : Measurement setup (file type P), 3 records;
Measurement data (file type D), 12 records;
Auto-sequence program (file type S), 1 record.
SECTION I
Model 4145A
Tahla l-l
Cnonifinotinnc
(Chant Q nf Q\
GENERAL SPECIFICATIONS
Data Input/Output :
External CRT Analog Output : From 0 to +l Vdc’, X and Y outputs (in
series with approx. 330R) Z output (in series with approx. 240R), via rear panel
BNC connectors. Frequency Bandwidth, DC - 2MHz.
External Plotter/Printer Output : Measurement data and all data appear-
ing on the CRT may be output via the HP-IB to an HP plotter/printer operated
in the LISTEN ONLY Mode. Output is initiated using the PLOT or PRINT key.
HP-GL Control : The CRT of the 4145A may be program controlled in the
Graphics Display Mode via an HP-IB compatible Controller.
HP-IB and Remote-Control Functions :
The 4145A may be interfaced to any HP
controller or other instrument having HP-IB interface capability. (HP-IB is
Hewlett-Packard’s implementation of IEEE-488 and ANSI-MC.l.l standards.)
Self -Test Function :
At power ON, the 4145A automatically verifies its own
operational status. HP-IB and DIAGNOSTICS page allow Self-Test to be performed
at any time.
Operating Temperature Range: 10°C to+40°C;670% RH(40OC)
Permissible Temperature Change:51 O C/5 min.;
Maximum Wet-bulb temperature : 29 O C
Power Requirements : 199/120/22OV+lO% : 240V -10% + 5%;
48 - 66Hz; Max. 270VA
Dimensions : 426W x 235H x 612D (mm) (approx.)
Weight : Approx. 27 kg
Approx. 33kg (incuding accessories)
Model 4145A
SECTION I
Tnhlo l-9 Rnfnrnnna nata (Chant 1 r\f ‘2)
REFERENCE DATA
(The following information is reference data only.
It is not guaranteed specifications, nor
does it include Test Fixture specifications.)
Measurement Time : (Response time
+ ranging time + integration time)/1 point
measurement
Response Time : The following calculation is applicable where current range
does not change (settling and set-up time + SMU wait time).
I
Current Range
I
Settling and Set-Up Time
I
SMU Wait Time
I
Ranging Time : 4ms - 74ms (depending on range)
Measurement Time :
(Ranging time must be added.)
Settling and
Set-Up
Time
I
Delay
Time
Example : \ Minimum measurement time = 2.7ms + 0.2ms + 3.6ms = 6.5ms. In the d
Graphics Display Mode, write time (L5.6ms) must be added.
SECTION I Model 4145A
Table l-2. Reference Data (Sheet 2 of 3)
STIMULUS/MEASUREMENT UNIT (SMU)
Offset Current when operated as a Voltmeter : 6pA + 2pA x Vo/lOO
Offset Voltage when operated as a Current Meter : 1OmV + 0.4Q x IO
Noise Characteristics : (all values typical)
Voltage Source Noise : 0.01% of range (RMS)
Current Source Noise : 0.1% of range+3pA+O.OlpAxCg (RMS)
(Cg : Guard capacitance in pF)
Voltage Monitor : 0.02% of range (peak-to-peak)
Current Monitor : 0.3% of range + 1OpA
(peak-to-peak)
Output Overshoot : (all values typical)
Voltage Source Overshoot : 5mV
Current Source Overshoot : 1% or less
Current Range Switching Transient Noise : (All values typical)
Range Increment :
0.01% of voltage range +lOmV
Range Decrement : When switching into 1OnA or 1nA range, 1OmV + lOO/(lO +
Cx)mV where Cx = load capacitance (pF); when switching into
all other ranges, 10mV.
Guard Capacitance : 5 7OOpF
Guard Potential Offset : 1mV (typical)
Guard Current Induced Potential Error : 1OORxIg (Ig = guard current)
Voltage Sources (Vs)
Output Noise : 6 mVrms (typical)
Voltage Monitors (Vm)
Noise Level : 0.3mVp-p at 2V-range (when Integration time is set to MED or
LONG), 3mVp-p at 20V range.
REFERENCE DATA COMMON TO ALL UNITS
Noise Rejection : (Integration time set to MED or LONG.)
Normal Mode Rejection : L 60dB (typical)
Common Mode Rejection : (all values typical)
Current Source/Measurement : 2 lpA/lV
1-14
16058-60003
16058-60004
16058-60005
Personality Board
PTFE Blank Board
Socket Board (Transistor)
1
Blank PTFE board for measurement of
high resistance devices.
4145A
SECTION I
Table l-3. Accessories Supplied (Sheet 2 of 5)
No.
0
3
Dimension of Socket (Unit in mm)
2.54
on -- -w-w
II
I
16.54
II0 B-B- - - II
HP P/N and Description
16058-60006 :
Socket Board for 24 pin DIP ICs.
0
4
2.54
P II11 --w--w- II
no
--m---m 0
9
16058-60007 :
Socket Board for 18 pin DIP ICs.
0
5
20
Q-El
1.14
lt-
30
M
-
w
-.e
16058-60008 :
Socket Board with two pairs of sockets
for measurement of axial lead devices
such as diodes.
0
6
16058-60009 :
Socket Board with an 8-pin socket.
0
7
16058-60010 :
Socket Board with a lo-pin socket.
0
8
16058-60011 :
Socket Board with a 12-pin socket.
1-17
SECTION I
Model 4145A
Table l-3. Accessories Supplied (Sheet 3 of 5)
No. Dimension of Socket (Unit in mm)
HP P/N and Description
Cable length : Approx. 115 16058-61600 :
Connect ion Cable (large-t o-Small) used
0
9
for interconnecting the Personality Board
to the Socket Board. Twelve cables are
furnished.
0
10
Cable length : Approx. 115 16058-61601 :
Connect ion Cable (small-to-small) used
for interconnecting
the Connect ion
Switch to the Socket Board. Eight cables
are furnished.
0
11
Cable length : Approx. 115 16058-61602 :
Miniature Clip Lead used for direct
connection to DUT. Eight leads are
furnished.
0
12
16058-60100 :
Carrying-case for all 16058A accessories.
Configuration
Description
Connector Plate (04145-60001) :
Connector Plate for measurements made
without the 16058A. For example, direct
connection for a wafer probe. Dimensions
are given below.
1-18
Model 4145A
Table l-3. Accessories Supplied (Sheet 4 of 5)
SECTION I
Configuration
Description
Three-meter triaxial (m) Cable
(04145-61622):
Triaxial (m) cable for connection between
the 4145A’s SMU terminals and the
Connector Plate. Cable length is 3m.
Four cables are furnished.
Refer to
Figure 3-35 for the usage.
Three-meter BNC (m) Cable
(04145-61630):
BNC (m) cable for connection between
the 4145A’s Vs or Vm terminals and the
Connector Plate. Cable length is 3m.
Four cables are furnished. Refer to
Figure 3-35 for the usage.
Shorting Connector (04145-61623) :
Allows SMU output voltage to exceed
+42V when the 16058A Test Fixture is not
used. With the Shorting Connector
connected to the System Cable connector
on the rear panel, the instrument’s _
fixture-lid-open detector is disabled, and
the instrument
assumes a fixture-
lid-closed condition.
WARNING
A POTENTIAL SHOCK HAZARD
EXISTS WHEN THE SHORTING
CONNECTOR IS CONNECTED
TO THE 4145A. DO NOT TOUCH
THE OUTPUT TERMINAL OR
INNER CONDUCTOR OF SMU
DURING MEASUREMENT.
SECTION I
Model 4145A
Table l-3. Accessories Supplied (Sheet 5 of 5)
Configuration Description
1
rA %au
Software Discs (04145-61100) :
Disc set includes 5 Software Discs, Cleaning
Disc (P/N: 9164-0168), labels, and
write-protect tabs. If extra discs are
required,
order the 16261A Software Disc
Set. It contains 5 software Discs.
Note
Software
discs cannot be
purchased individually.
l-20
-3
--
---
Model 4145A
SECTION II
INSTALLATION
Z-l. INTRODUCTION
SECTION II
WARNING
2-2. This section provides installation instructions for the Model 4145A Semiconductor
Parameter Analyzer. This section also includes
information on initial inspection and damage
claims, preparation for using the 4145A, and
packaging, storage, and shipment.
IF THE INSTRUMENT IS TO BE
ENERGIZED VIA AN EXTERNAL
AUTOTRANSFORMER UNIT FOR
VOLTAGE REDUCTION, BE SURE
THAT THE COMMON TERMINAL IS
CONNECTED TO THE NEUTRAL
POLE OF THE POWER SUPPLY.
2-3. INITIAL INSPECTION
2-8. Line Voltage and Fuse Selection
2-4. The 4145A Semiconductor
Parameter
Analyzer, as shipped from the factory, meets all
the specifications listed in Table l-l. Upon
receipt,
inspect the shipping container for
damage. If the shipping container or cushioning
material is damaged, it should be kept until the
contents of the shipment have been checked for
completeness and the instrument has been
checked mechanically and electrically. The
contents of the shipment should be as shown in
Figure l-l. The procedures for checking the
general electrical operation are given in Section
III (Paragraph
3-10 SELF ,,,TEST) and the
procedures for checking the 4145A Semiconductor Parameter Analyzer
against
its
specifications are given in Section IV. First, do
the self test. If the 4145A is electrically
questionable, then do the Performance Tests to
determine whether the 4145A has failed or not.
If the contents are incomplete, if there is
mechanical damage or defects (scratches, dents,
broken switches, etc.), or if the performance
does not meet the self test or performance tests,
notify the nearest Hewlett-Packard office (see
list at back of this manual). The HP office will
arrange for repair or replacement without
waiting for claim settlement.
2-5. PREPARATION FOR USE
CAUTION
BEFORE TURNING THE 4145A LINE
SWITCH TO ON, VERIFY THAT THE
INSTRUMENT IS SET TO THE
VOLTAGE OF THE POWER TO BE
SUPPLIED.
2-9. Figure 2-l provides instructions for line
voltage and fuse selection.
The line voltage
selection switch and the proper fuse are factory
installed for 100 or 120 volts ac operation.
CAUTION
USE PROPER FUSE FOR LINE
VOLTAGE SELECTED.
CAUTION
MAKE SURE THAT ONLY FUSES
FOR THE
REQUIRED RATED
CURRENT AND OF THE SPECIFIED
TYPE ARE USED FOR REPLACEMENT. THE
USE OF
MENDED FUSES AND THE
SHORT-CIRCUITING OF
FUSE-
HOLDERS MUST BE AVOIDED.
2-6. POWER REQUIREMENTS
2-10. LINE FREQUENCY FILTER
2-7. The 4145A requires a power source of 100,
120, 220 Volts ac +lO%, or 240 Volts ac +5%-lo%,
48 to 66Hz single phase; power consumption is
270VA maximum.
2-11. To reject the effects of line-frequency
noise, set the FILTER switch on the rear panel
to the frequency of the ac power source.
2-l
SECTION II
Model 4145A
2-12. POWER CABLE
2-13. To protect operating personnel,
the
National Electrical Manufacturer’s Association
(NEMA) recommends that the instrument panel
and cabinet be grounded. The Model 4145A is
equipped with a three-conductor power cable
which, when plugged into an appropriate
receptacle, grounds the instrument. The offset
pin on the power cable is the ground wire.
assistance is needed for selecting the correct
power cable, contact the nearest Hewlett-
Packard off ice.
2-16. OPERATING ENVIRONMENT
2-17. Temperature.
The instrument may be
operated in temperatures from +lO°C to +40 OC.
2-14.
To preserve the protection feature when
operating
the instrument from a two Contact
outlet, use a three prong to two prong adapter
(HP Part No.
1251-8196) and connect the
grounding tab on
the adapter to power line
ground.
CAUTION
2-l 8. Humidity. The
instrument may be
operated in environments with relative
humidities to ‘7 0% at 40 O C.
However, the
instrument should be protected from
temperature extremes which cause condensation
within the instrument.
THE MAINS PLUG MUST ONLY BE
INSERTED IN A SOCKET OUTLET
PROVIDED WITH A PROTECTIVE
EARTH CONTACT. THE
PRO-
TECTIVE ACTION MUST NOT BE
NEGATED BY THE USE OF AN
EXTENSION
CORD (POWER CABLE)
WITHOUT PROTECTIVE CONDUC-
TOR
(GROUNDING).
2-19.
INSTALLATION INSTRUCTIONS
2-20. The HP Model 4145A can be operated on
the bench or in a rack mount. The 4145A is
ready for bench operation as shipped from the
factory.
For bench operation a two-leg
instrument stand is used. For use, the instrument
stands are designed to be pulled towards the
front of instrument.
2-21. Installation of Options 907, 908 and 909.
2-15. Figure 2-2 shows the available power
cords, which may be used in various countries
including the standard power cord furnished with
the instrument. HP Part number, applicable
standards for power plug, power cord color,
electrical characteristics and countries using
each power cord are listed in the figure. If
2-22. The 4145A can be installed in a rack and
be operated as a component of a measurement
system.
Rack mounting information for the
4145A is presented in Figure 2-3.
IOOV OPERATION 12OV OPERATION
220V OPERATION
240V OPERATION
22ov-
ir
12ov* 22ove 12ov- 22ow 12ov-
240vwi r Ioovw
240V N
IOOV-
240vwl TOOV-
ir
cll
Fuse : 2.5A 250V 2,
(HP P/N: 2110-0015)
Fuse :
1.25A 250V CL
(HP P/N : 2110-0305)
Figure 2-l. Voltage and Fuse Selection.
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