Edwards nXDS series, nXDS6i, nXDS20i, nXDS15i, nXDS6iC Instruction Manual

...
Instruction Manual
nXDS Scroll Pump
A735-01-880
Issue C Original
Description Item Number
nXDS6i A735-01-983 nXDS10i A736-01-983 nXDS15i A737-01-983 nXDS20i A738-01-983
nXDS6iC A735-02-983 nXDS10iC A736-02-983 nXDS15iC A737-02-983 nXDS20iC A738-02-983
nXDS6iR A735-03-983 nXDS10iR A736-03-983 nXDS15iR A737-03-983 nXDS20iR A738-03-983
We, Edwards Limited, Crawley Business Quarter, Manor Royal, Crawley, West Sussex, RH10 9LW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s)
nXDS6i scroll pump 100-127/200-240V, 50/60Hz A735-01-983 nXDS10i scroll pump 100-127/200-240V, 50/60Hz A736-01-983 nXDS15i scroll pump 100-127/200-240V, 50/60Hz A737-01-983 nXDS20i scroll pump 100-127/200-240V, 50/60Hz A738-01-983 nXDS6iC scroll pump 100-127/200-240V, 50/60Hz A735-02-983 nXDS10iC scroll pump 100-127/200-240V, 50/60Hz A736-02-983 nXDS15iC scroll pump 100-127/200-240V, 50/60Hz A737-02-983 nXDS20iC scroll pump 100-127/200-240V, 50/60Hz A738-02-983 nXDS6iR scroll pump 100-127/200-240V, 50/60Hz A735-03-983 nXDS10iR scroll pump 100-127/200-240V, 50/60Hz A736-03-983 nXDS15iR scroll pump 100-127/200-240V, 50/60Hz A737-03-983 nXDS20iR scroll pump 100-127/200-240V, 50/60Hz A738-03-983
to which this declaration relates is in conformity with the following standard(s) or other normative document(s)
EN1012-2:1996+A1:2009 Compressors and Vacuum Pumps - Safety Requirements – Part 2 EN61010-1:2010 Safety Requirements for Electrical Equipment for Measurement, EN61326-1:2013 Electrical equipment for measurement, control and laboratory Use.
(Class A Emissions, EMC requirements. General requirements
Industrial Immunity) EN50581:2012 Technical Documentation for the Assessment of Electrical and
Products with respect to the Restriction of Hazardous Substances EN13463-1:2009 Non-electrical equipment for use in potentially explosive
EN13463-5:2011 Non-electrical equipment for use in potentially explosive CAN/CSA-C22.2 No.61010.1-04 Safety Requirements for electrical equipment for Measurement,
Control and Laboratory Use, Part 1: General requirements UL61010-1, 2nd Edition Safety Requirements for electrical equipment for Measurement, Control and Laboratory Use, Part 1: General requirements
and fulfils all the relevant provisions of 2006/42/EC Machinery Directive
2014/35/EU Low Voltage Directive 2014/30/EU Electromagnetic Compatibility (EMC) Directive 2014/34/EU ATEX Directive on use in Potentially Explosive Atmospheres
II 3 G c IIB T4 Internal Atmospheres Only, Tech File ref MPTR 0271
2011/65/EU Restriction of Certain Hazardous Substances (RoHS) Directive
Note: This declaration covers all product serial numbers from the date this Declaration was signed
onwards.
10.08.2015, Burgess Hill
Mr Peter Meares Senior Technical Support Manager, General Vacuum
This product has been manufactured under a quality management system certified to ISO 9001:2008
Vacuum Pumps Control and Laboratory Use. General Requirements
Electronic
atmospheres. Basic method and requirements atmospheres. Protection by constructional safety ‘c’
Date and Place
P200-06-720 Issue D
P200-10-019
Product
Product Label
Meaning
20
20
This product cont ain s h azardous substance s in at least one of the
Pump Type
Pump Size
RV Pumps
RV3,5,8,12, E Lab, nRVi
EM Small Pumps
E2M0.7, 1.5, E1M18, E2M18, 28, 30, nE2M40i
nEXT Pumps
nEXT 85, 240, 300, 400, Splitflow
nXDS pumps
nXDS 6, 10, 15, 20
EXT pumps
EXT75DX
XDS pumps
XDS35, 46, 100
Diaphragm
XDD 1, D lab
Turbo Pump Carts
T station, nEXT station
Cast Aluminium
Brass pipe Fittings
Recyclable Natural Wood
Recyclable Cardboard
Recyclable Polypropylene
Recyclable Mild Steel
Issue C
Material Declaration
In accordance with the requirements of the Chinese regulatory requirement on the Management Methods for the Restriction of the Use of Hazardous Substances in Electrical and Electronic Products Order No. 32 (also known as ‘China RoHS2’) an d SJ/T 11364 Mark ing for t he Re stricte d Use of Hazardo us Subst ances i n Elec tronic and Electr ical Products:
Product Labels
All pumps in the
list below
部件名称
Part name
铸铝
铜管管件
homogeneous materials used which are above the limit requireme n t in GB/T 26572 as detailed in the declarat ion table below. These parts can safe ly b e used for the environmental protection use period as indicated.
材料成分声明
Materials Content Declaration
危险物险
Lead
(Pb)
X O O O O O
X O O O O O
Mercury
(Hg)
Cadmium
(Cd)
六价铬
Hexavalent
Chromium
(Cr VI)
多溴联苯
Polybrominated biphenyls (PBB)
多溴二苯醚
Polybrominated diphenyl ethers
(PBDE)
铜接头
Brass Connectors O 表示该有害物质在该部件的所有均质材料中的含量低于 GB/T 26572 标准规定的限量要求。
O: Indicates th at the hazardous sub stance contained in all of the hom ogeneous materials for this part is b elow the limit requirement in GB/T 26572.
X 表示该有害物质在该部件的至少一种均质材料中的含量超出 GB/T26572 标准规定的限量要求。 X: Indicates that the hazardous substance contain ed in at least one of the h omogeneous materials used for this part is above th e l imit requirement of GB/T26572.
NOTES: These products are E U RoHS compliant, the foll owing Exemptions apply: 6(b) Lead as an alloying elemen t in aluminiu m containing up to 0.4% by weight. 6(c) Copper alloy containing up to 4% lead by weight
X O O O O O
Packaging Informat ion
Pallet Over-shipper Protection Pieces Support Braces
This page intentionally blank.
A735-01-880 Issue C

Contents

Section Page
1 Introduction ........................................................................................1
1.1 Scope of this manual.................................................................................................... 1
1.2 ATEX directive implication............................................................................................. 2
1.3 General description ..................................................................................................... 2
1.4 Pump controller.......................................................................................................... 2
1.5 Logic interface........................................................................................................... 3
1.6 Gas ballast control ...................................................................................................... 4
2 Technical data .....................................................................................7
2.1 Operating and storage conditions..................................................................................... 7
2.2 Performance.............................................................................................................. 7
2.2.1 General.................................................................................................................... 7
2.2.2 Pumping media........................................................................................................... 8
2.2.3 Performance characteristics........................................................................................... 8
2.3 Mechanical data ........................................................................................................ 11
2.3.1 General................................................................................................................... 11
2.3.2 Sound and vibration data.............................................................................................. 11
2.3.3 Construction............................................................................................................. 11
2.4 Electrical data .......................................................................................................... 11
2.5 Logic interface data.................................................................................................... 12
2.6 LED indicators........................................................................................................... 14
Contents
3 Installation ....................................................................................... 15
3.1 Safety..................................................................................................................... 15
3.2 System design considerations......................................................................................... 15
3.3 Unpack and inspect .................................................................................................... 17
3.4 Position the pump ...................................................................................................... 17
3.4.1 Mechanical fixing ....................................................................................................... 17
3.5 Connect to the vacuum system....................................................................................... 17
3.6 Electrical installation .................................................................................................. 18
3.6.1 Fuses and circuit breakers ............................................................................................ 18
3.6.2 Electrical supply connection.......................................................................................... 19
3.6.3 Disconnect the pump from the electrical supply.................................................................. 19
3.7 Connection for remote control and monitoring.................................................................... 19
3.7.1 Connect the logic interface to the control equipment ........................................................... 19
4 Operation......................................................................................... 21
4.1 Operational modes ..................................................................................................... 21
4.2 Manual operation ....................................................................................................... 21
4.2.1 Start and stop ........................................................................................................... 22
4.2.2 Standby................................................................................................................... 22
4.3 Parallel control and monitoring ...................................................................................... 23
4.4 Analogue speed control................................................................................................ 24
4.4.1 Hardware configuration ............................................................................................... 25
4.4.2 Operation ................................................................................................................ 25
4.5 Auto-run.................................................................................................................. 26
4.6 Use of gas ballast control ............................................................................................. 26
4.6.1 Gas ballast control ..................................................................................................... 26
4.7 Start up procedure ..................................................................................................... 26
4.8 To achieve ultimate vacuum.......................................................................................... 27
4.9 To pump condensable vapours ....................................................................................... 27
cg/0187/01/17
4.10 Shut down................................................................................................................ 27
© Edwards Limited 2017. All rights reserved. Page i Edwards and the Edwards logo are trademarks of Edwards Limited.
A735-01-880 Issue C
Contents
5 Maintenance...................................................................................... 29
5.1 Safety information...................................................................................................... 29
5.2 Maintenance plan....................................................................................................... 30
5.3 Inspect and clean the inlet strainer ................................................................................. 30
5.4 Clean the external fan cover ......................................................................................... 30
5.5 Check the pump performance (service indicator)................................................................. 30
5.6 Replace the tip-seals................................................................................................... 31
5.7 Replace the pump bearings (service indicator).................................................................... 31
5.8 Replace the pump controller (service indicator) .................................................................. 31
5.9 Electrical safety check................................................................................................. 31
5.10 Service indicator codes................................................................................................ 32
5.11 Fault finding............................................................................................................. 32
5.11.1 The pump has failed to start or has stopped....................................................................... 32
5.11.2 The pump has failed to achieve the required performance ..................................................... 32
5.11.3 The pump has poor ultimate vacuum................................................................................ 33
5.11.4 The pump is noisy ...................................................................................................... 33
5.11.5 The pump surface temperature is high ............................................................................. 33
5.11.6 Alarm indicator codes.................................................................................................. 34
6 Storage and disposal ................ ..... ..... .................................................. 37
6.1 Storage ................................................................................................................... 37
6.2 Disposal .................................................................................................................. 37
7 Spares and accessories ......................................................................... 39
7.1 Introduction ............................................................................................................. 39
7.2 Accessories .............................................................................................................. 40
7.2.1 Silencer................................................................................................................... 41
7.2.2 Gas ballast adaptor..................................................................................................... 41
7.2.3 Gas ballast adaptor blank ............................................................................................. 41
7.2.4 Vibration isolators...................................................................................................... 41
7.2.5 Inlet/exhaust filter..................................................................................................... 41
7.2.6 Exhaust nozzle .......................................................................................................... 42
7.2.7 Chemical resistance conversion kit.................................................................................. 42
7.2.8 Electrical cables ........................................................................................................ 42
7.2.9 Pump-to-controller cable ............................................................................................. 42
7.3 Spares .................................................................................................................... 43
7.3.1 Tip-seal kit (Youtube video https://www.youtube.com/watch?v=vKnh9dxOyhE) ........................... 43
7.3.2 Cooling fan............................................................................................................... 43
7.3.3 Gas ballast knob ........................................................................................................ 43
7.3.4 Silencer spares kit...................................................................................................... 43
7.3.5 Inlet/exhaust filter spares ............................................................................................ 43
7.3.6 Bearing replacement kit (not field serviceable)................................................................... 44
7.3.7 Exhaust and ballast valve kit ......................................................................................... 44
For return of equipment, complete the HS Forms at the end of this manual.
Page ii © Edwards Limited 2017. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
A735-01-880 Issue C

Illustrations

Figure Page
1 nXDS scroll pump ......................................................................................................... 3
2 Quick start guide (manual control mode)............................................................................. 5
3 nXDS6i Performance characteristics................................................................................... 9
4 nXDS10i Performance characteristics ................................................................................. 9
5 nXDS15i Performance characteristics ................................................................................10
6 nXDS20i Performance characteristics ................................................................................10
7 LED indicators............................................................................................................14
8 Installation drawing.....................................................................................................16
9 User interface panel ....................................................................................................22
10 Logic interface connections - parallel control ......................................................................23
11 Logic interface connections - analogue speed control.............................................................24
12 Analogue speed control.................................................................................................25
13 Poor ultimate vacuum flow chart.....................................................................................33
14 Noisy pump flow chart..................................................................................................34
15 nXDS accessories.........................................................................................................40
Contents

Tables

Table Page
1 nXDS Control modes...................................................................................................... 6
2 Operating and storage conditions...................................................................................... 7
3 Environmental conditions ............................................................................................... 7
4 General characteristics.................................................................................................. 7
5 Performance characteristics............................................................................................ 8
6 General mechanical data...............................................................................................11
7 Sound and vibration data...............................................................................................11
8 Electrical ratings for continuous operation..........................................................................11
9 Recommended fuses ....................................................................................................11
10 Logic interface technical data.........................................................................................12
11 Logic interface connector pins ........................................................................................13
12 LED indicators............................................................................................................14
13 Maintenance plan........................................................................................................30
14 Flashing service codes ..................................................................................................32
15 Flashing error codes.....................................................................................................35
16 Silencer....................................................................................................................41
17 Gas ballast adaptor......................................................................................................41
18 Gas ballast blank adaptor ..............................................................................................41
19 Vibration isolators.......................................................................................................41
20 Inlet/exhaust filter......................................................................................................41
21 Exhaust nozzle ...........................................................................................................42
22 Chemical resistance conversion kit...................................................................................42
23 Electrical cables .........................................................................................................42
24 Pump-to-controller cables .............................................................................................42
25 Tip-seal kit................................................................................................................43
26 Cooling fan................................................................................................................43
27 Gas ballast knob .........................................................................................................43
28 Silencer spares kit.......................................................................................................43
© Edwards Limited 2017. All rights reserved. Page iii Edwards and the Edwards logo are trademarks of Edwards Limited.
A735-01-880 Issue C
Contents
29 Inlet/exhaust filter spares ............................................................................................. 43
30 Bearing replacement kit ................................................................................................44
31 Exhaust and ballast valve kit ..........................................................................................44

Associated publications

Publication title Publication number
Vacuum Pump and Vacuum System Safety P400-40-100 nXDS Serial Comms Interface Instruction Manual A735-01-860
Page iv © Edwards Limited 2017. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
A735-01-880 Issue C
CAUTION
WARNING

1Introduction

1.1 Scope of this manual

This manual provides installation, operation and maintenance instructions for the Edwards nXDS series of scroll pump. The pump must be used as specified in this manual. Read this manual before installing and operating the pump.
Important safety information is highlighted as WARNING and CAUTION instructions; these instructions must be obeyed. The use of WARNINGS and CAUTIONS is defined below.
Warnings are given where failure to observe the instruction could result in injury or death to people.
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated equipment and process.
Introduction
Pressures are stated as absolute pressures unless otherwise stated. The following warning labels are on the pump:
Warning – refer to accompanying documentation.
Warning – risk of electric shock.
Warning – hot surfaces.
© Edwards Limited 2017. All rights reserved. Page 1 Edwards and the Edwards logo are trademarks of Edwards Limited.
A735-01-880 Issue C
Introduction

1.2 ATEX directive implication

This equipment is designed to meet the requirements of Group II Category 3 equipment in accordance with Directive 94/9/EC of the European Parliament and the Council of 23rd March 1994 on the approximation of the laws of the Member States concerning equipment and protective systems intended for use in potentially explosive atmospheres. (The ATEX Directive).
The ATEX Category 3 applies in respect of potential ignition sources internal to the equipment. An ATEX Category has not been assigned in respect of potential ignition sources on the outside of the equipment as the equipment has not been designed for use where there is an external potentially explosive atmosphere.
There is no potential source of ignition within the pump during normal operation but there may be potential sources of ignition under conditions of foreseeable and rare malfunction as defined in the Directive. Accordingly, although the pump is designed to pump flammable materials and mixtures, operating pr ocedures should ensure that under all normal and reasonably foreseeable conditions, these materials and mixtures are not wi thin explosive limits. Category 3 is considered appropriate for the avoidance of ignition in the case of a rare malfunction which allows flammable materials or mixtures to pass through the pump whilst within their explosive limits.
When flammable materials are present within the equipment:
Do not allow air to enter the equipment.Ensure the system is leak tight.
Further details can be obtained by contacting Edwards. Refer to the address page at the back of this instruction manual.

1.3 General description

The nXDS pump is shown in Figure 1. The nXDS pump is a truly dry vacuum pump as all the bearings, with their hydrocarbon lubricant, are isolated from
the vacuum space. The nXDS pump is suitable for use on vapour handling processes, and may be used for some pumping applications involving corrosive substances. For information on pump ing flammable gases, contact Edwards.
The body of the pump includes a fixed scroll and an orbiting scroll. The orbiting scroll is controlled by an electric motor through an eccentric cam on the motor drive shaft. The movement of the orbiting scroll, meshed with the fixed scroll, forms successive crescent shaped volumes in the pump. Gas that enters the pump through the inlet is compressed by the movement of the orbiting scroll and swept towards the centre of the fixed scroll. The compressed gas enters the exhaust port near the centre of the fixed scroll and is exhausted from the pump through the outlet.
Refer to Section 2.1 for details of operating conditions.

1.4 Pump controller

The integral pump controller manages the supply of current to a three-phase electric motor in accordance with operating conditions. The controller monitors power and temperature, and will protect the pump in the event of operation under sustained high load or under fault conditions.
The controller provides the user interface (refer to Figure 1). The pump may be operated in these modes:
Manually, using the buttons on the interface panel. Refer to Figures 2 and 9.Remotely via serial communications or d igital and analogue process control (parallel), via the 15-way D-type
logic interface connector. Refer to Section 1.5.
Page 2 © Edwards Limited 2017. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Figure 1 - nXDS scroll pump
1. Lifting eye
2. NW25 inlet port
3. Gas ballast control
4. Cooling fan
5. NW25 exhaust port
6. Rubber feet
7. 15-way D-type connector
8. USB port (service mode only)
9. User interface panel
10.Mains power connector
11.Secondary earth bond point
A735-01-880 Issue C
Introduction

1.5 Logic interface

The pump controller can be operated via the 15-way D-type logic interface connector. The signals on the logic interface are of the following types:
Control inputs: these are switch-type and analogue signals that are used to control the pumpStatus outputs: these outputs identify the status of the system Tab
The logic interface has been designed to support both serial contro l, parallel control and monitoring, operating though one connector. For serial control either RS232 or RS485 can be selected.
For Control Modes refer to Table 1. For Logic interface data refer to Section 2.5.
© Edwards Limited 2017. All rights reserved. Page 3 Edwards and the Edwards logo are trademarks of Edwards Limited.
A735-01-880 Issue C
Introduction

1.6 Gas ballast control

To pump high vapour loads, gas ballast can be delivered into the pump to prevent condensati on of the vapour carried by the pumped gases.
Air can be introduced to the low vacuum stages through the gas ballast control (Figure 1, item 3). Alternatively, an inert gas such as nitrogen can be supplied through a suitable external valve and by using the appropriate adaptor, available as an accessory. Refer to Section 7.
Page 4 © Edwards Limited 2017. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Figure 2 - Quick start guide (manual control mode)
OPERATION SELECT STATUS SECTION
Apply power
MAINS
POWER
The pump will remain off (factory default). The POWER INDICATOR will illuminate.
3.6.2
Start the pump
START
BUTTON
The pump will accelerate up to full running speed.
*
The RUN INDICATOR will flash while accelerating. The RUN INDICATOR will remain on when the pump reaches full speed.
*
The pump is set to 30 Hz rotational full speed (factory default)
4.2.1
Stop the pump STOP BUTTON
The pump will decelerate and stop running. The RUN INDICATOR will flash while decelerating. The RUN INDICATOR will go off when the pump has stopped.
4.2.1
Select and deselect the standby speed
STANDBY MODE
SELECT BUTTON
When engaged, the STANDBY INDICATOR will illuminate and the pump will run at the standby speed setting. Factory default is 70% of full speed.
4.2.2
Increase or decrease the pump speed when in standby mode
ST ANDBY SPEED
INCREASE
BUTTON
The pump speed will increase. The INCREASE STANDBY INDICATOR will remain illuminated when the pump reaches a maximum of 100% of full speed.
4.2.2
ST ANDBY SPEED
DECREASE
BUTTON
The pump speed will decrease. The DECREASE STANDBY INDICATOR will remain illuminated when the pump reaches a minimum of 67% of full speed.
4.2.2
Select and deselect the Auto-run function
START or STOP
BUTTON (>8 sec)
When engaged, the AU TO-RUN IND ICATOR will illuminate. The pump will re-start automatically after the power has been restored.
4.5
A735-01-880 Issue C
Introduction
© Edwards Limited 2017. All rights reserved. Page 5 Edwards and the Edwards logo are trademarks of Edwards Limited.
A735-01-880 Issue C
Introduction
Table 1 - nXDS Control modes
Configuration Control mode Manual/Section
Manual control
via
nXDS user interface
Serial control
via (TIC)
*Turbo Instrument
Controller or
Turbo Controller
Parallel control
via (TAG)
Turbo & Active Gauge
Controller
Parallel control
via Digital I/O
e.g. PLC control
Section 1
Figure 2
in this manual
Manual
D397-22-880
Manual
D395-92-880
Section 1.4
in this manual
Parallel control
via Digital I/O and
Analogue speed
control source
Serial control
via RS232 or
RS485 Comms
Interface
Note: Table 1 shows additional Edwards products, such as DX / nEXT Turbo pumps and a ctive ga ug e s tha t can be
controlled at the same time using the various control methods displayed above.
Section 4.4
Figure 11
Manual
A735-01-860
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Edwards and the Edwards logo are trademarks of Edwards Limited.
A735-01-880 Issue C
WARNING

2Technical data

If the nXDS pump is operated outside the specified limits, the pump housing may become hot.

2.1 Operating and storage conditions

Table 2 - Operating and storage conditions
Operating and storage conditions nXDS
Ambient temperature range (storage) –30 °C to +70 °C Ambient temperature range (operation) +5 °C to +40 °C Maximum humidity (storage in original packaging) 95% RH Maximum humidity (operation) 90% RH
Table 3 - Environmental conditions
Environmental conditions
Pollution Pollution degree 2 Installation Installation category II Altitude restriction Max 3000 m Area of use Indoor
Technical data

2.2 Performance

2.2.1 General

Table 4 - General characteristics
Description nXDS6i nXDS10i nXDS15i nXDS20i
3h-1
Peak pumping speed (m Maximum permitted continuous inlet pressure (mbar) Maximum permitted exhaust pressure (bar gauge) Maximum permitted gas ballast inlet pressure (bar gauge) 0.5 0.5 0.5 0.5 Maximum recommended chamber volume to pump down
from atmospheric pressure (litres) Maximum pressure rise when stopped, with no inlet or gas
ballast flow (mbar) Leak tightness (mbar ls
*
These pumps are designed to pump down from atmospheric pressure, but prolonged operation at inlet pressures higher than specified may reduce bearing life.
These pumps are intended to exhaust to atmospheric pressure. High exhaust pressure may reduce tip-seal life.
Larger volumes may be pumped, but prolonged operation at inlet pressures higher than specified may reduce bearing life. The nXDS20i is optimised for constant throughput and is not recommended for cyclic duty.
) 6.2 11.4 15.1 22.0
*
-1
)1 x 10
200 200 200 50
1111
25 50 75 75
7777
-6
1 x 10
-6
1 x 10
-6
1 x 10
-6
Note: If the pump is operated outside the specified limits, then the pump housing may become hot; the controller
may reduce the motor speed; and tip seal wear rate will be increased.
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A735-01-880 Issue C
WARNING
Technical data

2.2.2 Pumping media

Do not use the nXDS pump to pump pyrophoric or explosive gas mixtures.
The pump is designed to pump the following gases:
AirCarbon dioxideHeliumCarbon monoxide Nitrogen ArgonOxygen (O
)
2
The pump can be used to pump water vapour. Caution must be taken to ensure that vapour does not condense inside the pump. Refer to Section 4.6.1 on how to prevent condensation of water vapour in the pump.
If pumping a vapour or gas no t in the list above, contact Edwards for advice.

2.2.3 Performance characteristics

The position of the gas ballast control defines the performance characteristics of the pump. These performance characteristics are listed in Table 5.
Table 5 - Performance characteristics
Description nXDS6i nXDS10i nXDS15i nXDS20i
Pump ultimate (mbar)
Gas ballast flow (l min-1)
Gas ballast position 0 2 x10 Gas ballast position 1 5 x 10
-2
-2
Gas ballast position 1 12 16 31 24
7 x 10 4 x 10
-3
-2
7 x 10 4 x 10
-3
-2
3 x 10 6 x 10
-2
-2
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