to which this declaration relates is in conformity with the following standard(s) or other normative
document(s)
EN1012-2:1996+A1:2009 Compressors and Vacuum Pumps - Safety Requirements – Part 2
EN61010-1:2010 Safety Requirements for Electrical Equipment for Measurement,
EN61326-1:2013 Electrical equipment for measurement, control and laboratory Use.
(Class A Emissions,EMC requirements. General requirements
Industrial Immunity)
EN50581:2012 Technical Documentation for the Assessment of Electrical and
Products with respect to the Restriction of Hazardous Substances
EN13463-1:2009 Non-electrical equipment for use in potentially explosive
EN13463-5:2011 Non-electrical equipment for use in potentially explosive
CAN/CSA-C22.2 No.61010.1-04 Safety Requirements for electrical equipment for Measurement,
Control and Laboratory Use, Part 1: General requirements
UL61010-1, 2nd Edition Safety Requirements for electrical equipment for Measurement,
Control and Laboratory Use, Part 1: General requirements
and fulfils all the relevant provisions of
2006/42/EC Machinery Directive
2014/35/EU Low Voltage Directive
2014/30/EU Electromagnetic Compatibility (EMC) Directive
2014/34/EU ATEX Directive on use in Potentially Explosive Atmospheres
II 3 G c IIB T4 Internal Atmospheres Only, Tech File ref MPTR 0271
2011/65/EU Restriction of Certain Hazardous Substances (RoHS) Directive
Note: This declaration covers all product serial numbers from the date this Declaration was signed
onwards.
10.08.2015, Burgess Hill
Mr Peter Meares
Senior Technical Support Manager, General Vacuum
This product has been manufactured under a quality management system certified to ISO 9001:2008
Vacuum Pumps
Control and Laboratory Use. General Requirements
Electronic
atmospheres. Basic method and requirements
atmospheres. Protection by constructional safety ‘c’
Date and Place
P200-06-720 Issue D
P200-10-019
Product
Product Label
Meaning
20
20
This product cont ain s h azardous substance s in at least one of the
Pump Type
Pump Size
RV Pumps
RV3,5,8,12, E Lab, nRVi
EM Small Pumps
E2M0.7, 1.5, E1M18, E2M18, 28, 30, nE2M40i
nEXT Pumps
nEXT 85, 240, 300, 400, Splitflow
nXDS pumps
nXDS 6, 10, 15, 20
EXT pumps
EXT75DX
XDS pumps
XDS35, 46, 100
Diaphragm
XDD 1, D lab
Turbo Pump Carts
T station, nEXT station
Cast Aluminium
Brass pipe Fittings
Recyclable Natural Wood
Recyclable Cardboard
Recyclable Polypropylene
Recyclable Mild Steel
Issue C
Material Declaration
In accordance with the requirements of the Chinese regulatory requirement on the Management Methods for the
Restriction of the Use of Hazardous Substances in Electrical and Electronic Products Order No. 32 (also known as
‘China RoHS2’) an d SJ/T 11364 Mark ing for t he Re stricte d Use of Hazardo us Subst ances i n Elec tronic and Electr ical
Products:
Product Labels
All pumps in the
list below
部件名称
Part name
铸铝
铜管管件
homogeneous materials used which are above the limit requireme n t
in GB/T 26572 as detailed in the declarat ion table below.
These parts can safe ly b e used for the environmental protection use
period as indicated.
O: Indicates th at the hazardous sub stance contained in all of the hom ogeneous materials for this part is b elow
the limit requirement in GB/T 26572.
X:表示该有害物质在该部件的至少一种均质材料中的含量超出 GB/T26572 标准规定的限量要求。
X: Indicates that the hazardous substance contain ed in at least one of the h omogeneous materials used for
this part is above th e l imit requirement of GB/T26572.
NOTES: These products are E U RoHS compliant, the foll owing Exemptions apply:
6(b) Lead as an alloying elemen t in aluminiu m containing up to 0.4% by weight.
6(c) Copper alloy containing up to 4% lead by weight
X O O O O O
Packaging Informat ion
Pallet Over-shipper Protection Pieces Support Braces
Edwards and the Edwards logo are trademarks of Edwards Limited.
A735-01-880 Issue C
CAUTION
WARNING
1Introduction
1.1Scope of this manual
This manual provides installation, operation and maintenance instructions for the Edwards nXDS series of scroll
pump. The pump must be used as specified in this manual. Read this manual before installing and operating the
pump.
Important safety information is highlighted as WARNING and CAUTION instructions; these instructions must be
obeyed. The use of WARNINGS and CAUTIONS is defined below.
Warnings are given where failure to observe the instruction could result in injury or death to
people.
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process.
Introduction
Pressures are stated as absolute pressures unless otherwise stated.
The following warning labels are on the pump:
This equipment is designed to meet the requirements of Group II Category 3 equipment in accordance with Directive
94/9/EC of the European Parliament and the Council of 23rd March 1994 on the approximation of the laws of the
Member States concerning equipment and protective systems intended for use in potentially explosive atmospheres.
(The ATEX Directive).
The ATEX Category 3 applies in respect of potential ignition sources internal to the equipment. An ATEX Category has
not been assigned in respect of potential ignition sources on the outside of the equipment as the equipment has not
been designed for use where there is an external potentially explosive atmosphere.
There is no potential source of ignition within the pump during normal operation but there may be potential sources
of ignition under conditions of foreseeable and rare malfunction as defined in the Directive. Accordingly, although
the pump is designed to pump flammable materials and mixtures, operating pr ocedures should ensure that under all
normal and reasonably foreseeable conditions, these materials and mixtures are not wi thin explosive limits.
Category 3 is considered appropriate for the avoidance of ignition in the case of a rare malfunction which allows
flammable materials or mixtures to pass through the pump whilst within their explosive limits.
When flammable materials are present within the equipment:
Do not allow air to enter the equipment.
Ensure the system is leak tight.
Further details can be obtained by contacting Edwards. Refer to the address page at the back of this instruction
manual.
1.3General description
The nXDS pump is shown in Figure 1.
The nXDS pump is a truly dry vacuum pump as all the bearings, with their hydrocarbon lubricant, are isolated from
the vacuum space. The nXDS pump is suitable for use on vapour handling processes, and may be used for some
pumping applications involving corrosive substances. For information on pump ing flammable gases, contact Edwards.
The body of the pump includes a fixed scroll and an orbiting scroll. The orbiting scroll is controlled by an electric
motor through an eccentric cam on the motor drive shaft. The movement of the orbiting scroll, meshed with the
fixed scroll, forms successive crescent shaped volumes in the pump. Gas that enters the pump through the inlet is
compressed by the movement of the orbiting scroll and swept towards the centre of the fixed scroll. The compressed
gas enters the exhaust port near the centre of the fixed scroll and is exhausted from the pump through the outlet.
Refer to Section 2.1 for details of operating conditions.
1.4Pump controller
The integral pump controller manages the supply of current to a three-phase electric motor in accordance with
operating conditions. The controller monitors power and temperature, and will protect the pump in the event of
operation under sustained high load or under fault conditions.
The controller provides the user interface (refer to Figure 1). The pump may be operated in these modes:
Manually, using the buttons on the interface panel. Refer to Figures 2 and 9.
Remotely via serial communications or d igital and analogue process control (parallel), via the 15-way D-type
Edwards and the Edwards logo are trademarks of Edwards Limited.
Figure 1 - nXDS scroll pump
1. Lifting eye
2. NW25 inlet port
3. Gas ballast control
4. Cooling fan
5. NW25 exhaust port
6. Rubber feet
7. 15-way D-type connector
8. USB port (service mode only)
9. User interface panel
10.Mains power connector
11.Secondary earth bond point
A735-01-880 Issue C
Introduction
1.5Logic interface
The pump controller can be operated via the 15-way D-type logic interface connector. The signals on the logic
interface are of the following types:
Control inputs: these are switch-type and analogue signals that are used to control the pump
Status outputs: these outputs identify the status of the system Tab
The logic interface has been designed to support both serial contro l, parallel control and monitoring, operating
though one connector. For serial control either RS232 or RS485 can be selected.
For Control Modes refer to Table 1.
For Logic interface data refer to Section 2.5.
To pump high vapour loads, gas ballast can be delivered into the pump to prevent condensati on of the vapour carried
by the pumped gases.
Air can be introduced to the low vacuum stages through the gas ballast control (Figure 1, item 3). Alternatively, an
inert gas such as nitrogen can be supplied through a suitable external valve and by using the appropriate adaptor,
available as an accessory. Refer to Section 7.
Edwards and the Edwards logo are trademarks of Edwards Limited.
A735-01-880 Issue C
WARNING
2Technical data
If the nXDS pump is operated outside the specified limits, the pump housing may become hot.
2.1Operating and storage conditions
Table 2 - Operating and storage conditions
Operating and storage conditionsnXDS
Ambient temperature range (storage)–30 °C to +70 °C
Ambient temperature range (operation)+5 °C to +40 °C
Maximum humidity (storage in original packaging)≤ 95% RH
Maximum humidity (operation)90% RH
Table 3 - Environmental conditions
Environmental conditions
PollutionPollution degree 2
InstallationInstallation category II
Altitude restrictionMax 3000 m
Area of useIndoor
Technical data
2.2Performance
2.2.1General
Table 4 - General characteristics
DescriptionnXDS6inXDS10inXDS15inXDS20i
3h-1
Peak pumping speed (m
Maximum permitted continuous inlet pressure (mbar)
Maximum permitted exhaust pressure (bar gauge)
Maximum permitted gas ballast inlet pressure (bar gauge)0.50.50.50.5
Maximum recommended chamber volume to pump down
from atmospheric pressure (litres)
Maximum pressure rise when stopped, with no inlet or gas
ballast flow (mbar)
Leak tightness (mbar ls
*
These pumps are designed to pump down from atmospheric pressure, but prolonged operation at inlet
pressures higher than specified may reduce bearing life.
†
These pumps are intended to exhaust to atmospheric pressure. High exhaust pressure may reduce tip-seal
life.
‡
Larger volumes may be pumped, but prolonged operation at inlet pressures higher than specified may
reduce bearing life. The nXDS20i is optimised for constant throughput and is not recommended for cyclic
duty.
)6.211.415.122.0
*
†
‡
-1
)1 x 10
20020020050
1111
25507575
7777
-6
1 x 10
-6
1 x 10
-6
1 x 10
-6
Note:If the pump is operated outside the specified limits, then the pump housing may become hot; the controller
may reduce the motor speed; and tip seal wear rate will be increased.
Do not use the nXDS pump to pump pyrophoric or explosive gas mixtures.
The pump is designed to pump the following gases:
Air
Carbon dioxide
Helium
Carbon monoxide
Nitrogen
Argon
Oxygen (O
)
2
The pump can be used to pump water vapour. Caution must be taken to ensure that vapour does not condense inside
the pump. Refer to Section 4.6.1 on how to prevent condensation of water vapour in the pump.
If pumping a vapour or gas no t in the list above, contact Edwards for advice.
2.2.3Performance characteristics
The position of the gas ballast control defines the performance characteristics of the pump. These performance
characteristics are listed in Table 5.
Table 5 - Performance characteristics
DescriptionnXDS6inXDS10inXDS15inXDS20i
Pump ultimate
(mbar)
Gas ballast flow
(l min-1)
Gas ballast position 02 x10
Gas ballast position 15 x 10