Edwards nEXT 240D, nEXT series, nEXT 240T, nEXT 300D, nEXT 400D Instruction Manual

...

B800-00-880

Issue D Original

Instruction Manual

nEXT Turbomolecular Pumps

nEXT240, nEXT300 and nEXT400

Description Item Number

nEXT240D B812XXXXX

nEXT240T B813XXXXX

nEXT300D B822XXXXX

nEXT300T B823XXXXX

nEXT400D B832XXXXX

nEXT400T B833XXXXX

This product has been manufactured under a quality system certified to ISO9001:2008

Declaration of Conformity

We, Edwards Limited, Crawley Business Quarter, Manor Royal, Crawley, West Sussex, RH10 9LW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s)*

B812 XXXXX nEXT 240D B813 XXXXX nEXT 240T B822 XXXXX nEXT 300D B823 XXXXX nEXT 300T B832 XXXXX nEXT 400D B833 XXXXX nEXT 400T

to which this declaration relates is in conformity with the following standard(s) or other normative document(s)

EN ISO 12100-2: 2003 Safety of Machinery. Basic Concepts, General Principles for + A1: 2009 Design. Technical Principals EN1012-2:1996, A1: 2009 Compressors and Vacuum Pumps. Safety Requirements. Vacuum Pumps EN61010-1: 2010 Safety Requirements for Electrical Equipment for Measurement,

Control and Laboratory Use. General Requirements

EN 61326-1: 2006 Electrical equipment for measurement, control and laboratory

Use. EMC requirements. General requirements. EN50581:2012 Technical Documentation for the Assessment of Electrical and Electronic Products with respect to the Restriction of Hazardous Substances C22.2 61010-1-04: 2004 Safety requirements for electrical equipment for measurement, Control and laboratory use – Part 1: General requirements UL61010A: 2002 Safety requirements for electrical equipment for measurement, Control and laboratory use – Part 1: General requirements

and fulfils all the relevant provisions of 2006/42/EC Machinery Directive

2006/95/EC Low Voltage Directive 2004/108/EC Electromagnetic Compatibility (EMC) Directive 2011/65/EU

†

Restriction of Certain Hazardous Substances (RoHS) Directive

* The material numbers cover a family of pumps where the following component features may vary according to the

variant; ‘X’ denotes combinations of variants of the geometry of pump inlet ports, geometry or position of exhaust port and the material and geometry of the pump casing.

†

i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for

cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). The RoHS Directive does not legally apply to industrial vacuum equipment until July 2019 (July 2017 for instruments).

Note: This declaration covers all product serial numbers from the date this Declaration was signed

onwards.

21.11.2013, Burgess Hill

Mr Peter Meares, GV Technical Support Manage

Date and Place

P20

-03-600 Issue

Contents

B800-00-880 Issue D

Contents

Section Page

1 Introduction ....................................................................................... 1

1.1 Scope and definitions ................................................................................................... 1

1.2 General description ..................................................................................................... 2

1.3 Pump controller .......................................................................................................... 3

1.4 Operational features .................................................................................................... 3

1.4.1 Power limit setting ...................................................................................................... 3

1.4.2 Standby speed ............................................................................................................ 4

1.4.3 Timer ...................................................................................................................... 4

1.4.4 Analogue output ......................................................................................................... 4

1.4.5 Automatic vent options ................................................................................................. 4

1.4.6 Normal speed setting .................................................................................................... 5

1.5 Logic interface ........................................................................................................... 5

1.5.1 Parallel control and monitoring ....................................................................................... 5

1.5.2 Serial control and monitoring .......................................................................................... 6

1.5.3 Serial control with parallel monitoring ............................................................................... 6

1.5.4 Parallel control with serial monitoring or serial configuration ................................................... 6

1.5.5 Controller configuration (serial configuration) ...................................................................... 6

2 Technical data .................................................................................... 9

2.1 General .................................................................................................................... 9

2.2 Pumping media ........................................................................................................... 9

2.3 Vent gas specification and vent control data ......................................................................22

2.4 Purge gas specification ................................................................................................23

2.5 Cooling water ............................................................................................................23

2.6 Materials exposed to gases pumped .................................................................................23

2.7 Electrical data ...........................................................................................................24

2.8 Logic interface connector .............................................................................................24

2.9 Controller connector socket .......................................................................................... 27

2.10 Indicator LED’s ..........................................................................................................28

2.11 Operating and storage environment .................................................................................28

3 Installation ....................................................................................... 29

3.1 Unpack and inspect ..................................................................................................... 29

3.2 Typical installation .....................................................................................................29

3.3 Connection to the vacuum system ...................................................................................30

3.3.1 Inlet screen (supplied fitted on CF only) ............................................................................ 31

3.3.2 Mechanical fixing .......................................................................................................31

3.3.3 Inlet connection and orientation ..................................................................................... 31

3.3.4 Base mounting ........................................................................................................... 32

3.3.5 Backing connection ..................................................................................................... 32

3.3.6 Interstage connection (variants only) ............................................................................... 33

3.4 Purge gas connection ...................................................................................................33

3.4.1 Connect the purge gas .................................................................................................33

3.4.2 Recommended purge gas flow ........................................................................................33

3.5 Electrical installation ..................................................................................................33

3.5.1 Introduction .............................................................................................................33

3.5.2 Earth (ground) connections ...........................................................................................34

3.5.3 Connect the logic interface to the TIC ..............................................................................34

3.5.4 Connect the logic interface to the customer control equipment ...............................................34

3.5.5 Connect the electrical supply .........................................................................................34

3.6 Connection for parallel control and monitoring ................................................................... 36

3.7 Connection for serial control and monitoring ......................................................................36

mv/11/2013

B800-00-880 Issue D

Edwards and the Edwards logo are trademarks of Edwards Limited.

Contents

3.7.1 Connect the serial interface to the customer control equipment ..............................................36

3.7.2 Serial Enable .............................................................................................................39

3.7.3 Serial protocol ...........................................................................................................39

3.7.4 Message structure .......................................................................................................41

3.7.5 Command set ............................................................................................................ 42

3.7.6 multi-drop operation ................................................................................................... 46

3.8 Connection for mixed parallel and serial operation ............................................................... 46

3.9 Vent valve selection, connection and control ...................................................................... 46

3.9.1 Manual vent valve ...................................................................................................... 47

3.9.2 TAV5 or TAV6 solenoid vent valve ....................................................................................47

3.9.3 Vent valve control ......................................................................................................47

3.9.4 Alternative valve connected to the vacuum system .............................................................. 48

3.10 Cooling ................................................................................................................... 49

3.10.1 Introduction .............................................................................................................49

3.10.2 Forced air cooling .......................................................................................................49

3.10.3 Water cooling ............................................................................................................49

4 Operation ........................................................................................ 51

4.1 Configuring the nEXT pump using serial commands ...............................................................51

4.1.1 Power limit setting .....................................................................................................51

4.1.2 Powering a fan from the Controller .................................................................................. 52

4.1.3 Controlled venting options ............................................................................................52

4.1.4 Standby speed setting .................................................................................................. 53

4.1.5 Normal speed setting ...................................................................................................53

4.1.6 Timer setting and options .............................................................................................54

4.1.7 Analogue signal options ................................................................................................ 55

4.1.8 Factory settings .........................................................................................................55

4.1.9 Assigning a multi-drop address .......................................................................................55

4.2 Configuring the nEXT pump using a TIC .............................................................................56

4.3 Before starting the pump .............................................................................................. 57

4.3.1 Close the vent valve .................................................................................................... 57

4.3.2 Pre-start checks ......................................................................................................... 57

4.4 Operation with parallel control and monitoring ...................................................................58

4.4.1 Start the pump ..........................................................................................................58

4.4.2 Running at standby speed .............................................................................................58

4.4.3 Stop the pump ........................................................................................................... 58

4.4.4 Parallel monitoring .....................................................................................................58

4.5 Operation with serial control and monitoring ......................................................................58

4.5.1 Delayed start ............................................................................................................ 58

4.5.2 Start the pump ..........................................................................................................59

4.5.3 Standby speed ........................................................................................................... 59

4.5.4 Stop the pump ........................................................................................................... 59

4.5.5 Temperature readings ................................................................................................. 59

4.5.6 Link parameter readings ...............................................................................................60

4.5.7 Measured motor speed ................................................................................................. 60

4.6 Mixed parallel and serial operation .................................................................................. 60

4.7 Operation with a TIC ...................................................................................................62

4.8 Decelerating and venting .............................................................................................. 62

4.9 Operation at extreme conditions ..................................................................................... 63

4.9.1 Operation with high inlet pressure ................................................................................... 63

4.9.2 Operation at high temperatures ...................................................................................... 63

4.9.3 Protection against over-speed ........................................................................................ 63

4.9.4 Electrical supply failure ............................................................................................... 63

4.10 Bakeout ...................................................................................................................64

5 Maintenance ..................................................................................... 67

5.1 Introduction .............................................................................................................67

5.2 Bearing and oil cartidge maintenance ............................................................................... 67

5.3 Rotor life ................................................................................................................. 67

Contents

B800-00-880 Issue D

5.4 Clean the external surfaces of the pump ...........................................................................67

5.5 Fault finding ............................................................................................................. 68

5.5.1 Flashing service codes ................................................................................................. 71

5.5.2 Decoding service status words ........................................................................................ 71

5.5.3 Controller run time ..................................................................................................... 72

5.5.4 Pump run time ..........................................................................................................72

5.5.5 Pump cycles ............................................................................................................. 72

5.5.6 Bearing run time ........................................................................................................73

5.5.7 Oil cartridge run time .................................................................................................. 73

5.5.8 Flashing error codes .................................................................................................... 73

5.5.9 Decoding system status words ........................................................................................74

5.5.10 Useful service information ............................................................................................76

6 Storage and disposal ........................................................................... 77

6.1 Storage ...................................................................................................................77

6.2 Disposal ...................................................................................................................77

7 Service, spares and accessories .............................................................. 79

7.1 Introduction .............................................................................................................79

7.2 Service ....................................................................................................................79

7.2.1 Returning a pump for service .........................................................................................79

7.2.2 Bearing and oil cartridge on-site maintenance .................................................................... 79

7.3 Spares .....................................................................................................................80

7.3.1 ISX inlet screen ..........................................................................................................80

7.3.2 Inlet strainer ............................................................................................................. 80

7.3.3 Inlet-flange seals and integrated inlet screens ....................................................................80

7.3.4 NW16 and NW25 Ports ................................................................................................. 81

7.4 Accessories ...............................................................................................................81

7.4.1 Installation ...............................................................................................................81

7.4.2 ACX air cooler ...........................................................................................................81

7.4.3 WCX water cooler ....................................................................................................... 81

7.4.4 BX bakeout band ........................................................................................................82

7.4.5 TAV vent valve and vent port adaptor ...............................................................................82

7.4.6 VRX vent restrictor .....................................................................................................82

7.4.7 Vent port adaptor .......................................................................................................83

7.4.8 PRX purge restrictor ....................................................................................................83

7.4.9 C-Clamp Adaptor Kit ................................................................................................... 83

7.4.10 Interface Cable ..........................................................................................................83

7.4.11 TIC PC Program .......................................................................................................... 83

Index .............................................................................................. 87

For return of equipment, complete the HS Forms at the end of this manual.

Illustrations

Figure Page

1 nEXT240 performance curve ..........................................................................................14

2 nEXT300 performance curve ..........................................................................................14

3 nEXT400 performance curve ..........................................................................................15

4 nEXT 240 dimensions (mm) ............................................................................................16

5 nEXT 300 dimensions (mm) ............................................................................................18

6 nEXT 400 dimensions (mm) ............................................................................................20

7 Max allowed rate of pressure rise during venting: pressure against time (pump initially at full speed) ..22

8 Interface circuits for nEXT turbo pump controllers ...............................................................26

B800-00-880 Issue D

Edwards and the Edwards logo are trademarks of Edwards Limited.

Contents

9 Controller connector showing pin numbers .........................................................................27

10 Typical pumping system with a nEXT pump ........................................................................30

11 Logic interface connections - parallel control .....................................................................35

12 Controller status information ......................................................................................... 37

13 Logic interface connections - RS232 serial control ................................................................ 38

14 Logic interface connections - RS485 serial control ................................................................ 38

15 Conceptual diagram for multi-drop connection using RS232 interface ......................................... 40

16 RS485 multi-drop connection .........................................................................................41

17 Logic interface connection - mixed parallel and serial operation .............................................. 45

18 Maximum relative humidity to avoid condensation with water cooling ........................................ 50

19 Serial and parallel control flowchart ................................................................................62

20 nEXT exploded accessories view ..................................................................................... 84

21 nEXT exploded accessories view ..................................................................................... 85

Tables

Table Page

1 Power limits .............................................................................................................. 3

2 General data .............................................................................................................. 9

3 nEXT 240 pumps technical data ......................................................................................10

4 nEXT 300 pumps technical data ......................................................................................11

5 nEXT 400 pumps technical data ......................................................................................12

6 nEXT pumps technical data ...........................................................................................13

7 Vent gas specification and vent control .............................................................................22

8 Purge gas specification ................................................................................................23

9 Cooling water specification ...........................................................................................23

10 Logic interface technical data ........................................................................................24

11 Logic interface connector pins .......................................................................................25

12 Controller technical data ..............................................................................................27

13 Indicator LED’s ..........................................................................................................28

14 Operating and storage environment .................................................................................28

15 Checklist of components ...............................................................................................29

16 Summary of commands that can be sent to the nEXT pump .....................................................42

17 Command abbreviations ...............................................................................................43

18 Error codes ...............................................................................................................44

19 Vent options .............................................................................................................48

20 Vent restrictor orifice diameter (with atmospheric pressure at the inlet of the vent valve) .............. 48

21 Power limit setting .....................................................................................................51

22 Analogue signal options ................................................................................................55

23 Serial enable matrix .................................................................................................... 61

24 Behaviour of a pump when the power is re-instated after an electrical supply failure .....................64

25 Fault finding ............................................................................................................. 68

26 Flashing service codes .................................................................................................71

27 Service flags .............................................................................................................71

28 Flashing error codes .................................................................................................... 73

29 Hexadecimal conversion table ........................................................................................74

30 Status flag ................................................................................................................75

31 Example decoding of system status words .......................................................................... 76

32 Service tool kits ......................................................................................................... 79

33 Service kits .............................................................................................................. 80

34 Inlet screens ............................................................................................................. 80

35 Inlet strainers ...........................................................................................................80

36 Inlet flange seals and integrated inlet screens .................................................................... 80

37 NW16 and NW25 ports ..................................................................................................81

38 ACX air cooler ...........................................................................................................81

39 WCX water cooler ....................................................................................................... 81

Contents

B800-00-880 Issue D

40 BX bakeout band ........................................................................................................ 82

41 TAV vent valve and vent port adaptor ...............................................................................82

42 Vent restrictors .........................................................................................................82

43 Vent port adaptor .......................................................................................................83

44 PRX purge restrictor .................................................................................................... 83

45 C-clamp adaptor tool kit .............................................................................................. 83

46 C-clamp adaptor port kit ..............................................................................................83

This page has been intentionally left blank.

B800-00-880 Issue D

Edwards and the Edwards logo are trademarks of Edwards Limited.

Introduction

B800-00-880 Issue D

1Introduction

1.1 Scope and definitions

This manual provides installation, operation and maintenance instructions for Edwards nEXT Turbomolecular Pumps. The pumps must be used as specified in this manual. Read this manual before installing and operating the pumps.

Important safety information is highlighted as WARNING and CAUTION instructions; these instructions must be obeyed. The use of WARNINGS and CAUTIONS is defined below.

CAUTION

Cautions are given where failure to observe the instruction could result in damage to the equipment, associated equipment and process

The units used throughout this manual conform to the SI international system of units of measurement; where appropriate US equivalent units of measurement are also given. When flow rates are specified, the abbreviation ‘sccm’ is used to mean standard cubic centimetres per minute. This is a flow of 1 cm3 min

-1

at an ambient temperature

of 0 °C and a pressure of 1013 mbar (1.013 x 10

Pa).

The following warning labels are on the pump:

WARNING

Warnings are given where failure to observe the instruction could result in injury or death to people.

Warning - refer to accompanying documentation.

Warning - risk of electric shock.

Warning - hot surfaces.

Protective conductor terminal.

B800-00-880 Issue D

Edwards and the Edwards logo are trademarks of Edwards Limited.

Introduction

1.2 General description

CAUTION

Do not attempt to separate the controller from the pump since this will cause damage to the electrical connections.

A nEXT pump consists of a turbomolecular pump with a permanently attached controller containing drive electronics.

The controller controls the electrical supply to the pump with the exception of standby speed control. It has no manual controls and can only be operated through the logic interface. To operate the nEXT pump, connect it to the customer control equipment and power supply or, alternatively, use the Edwards TIC Turbo Instrument Controller or TIC Turbo Controller.

The controller drives the brush-less d.c. motor in the pump.

There are three main variants of the nEXT pump,

 The ‘S’ or ‘Simplex’ variant contains only turbomolecular blades.

 The ‘D’ or ‘Duplex’ variant contains turbomolecular blades and a drag mechanism allowing operation at

higher backing pressures than pure turbomolecular pumps.

 The ‘T’ or ‘Triplex’ variant contains turbomolecular blades, a drag mechanism and a regenerative

mechanism. The regenerative stage offers the option to utilise ‘boost’ mode.

Also available is an ‘iD’ or ‘iT’ interstage variant, which provides an interstage port between the turbomolecular blades and drag mechanism. For SEM and TEM applications, an ‘L’ variant is available, which offers considerably lower vibration and stray magnetic field emissions.

nEXT pumps are supplied with an inlet screen fitted into the centering O-ring for ISO version pumps and into envelope for CF version pumps. nEXT pumps with an NW25 interstage port are supplied with an inlet strainer that fits into the interstage port. The inlet screen and inlet strainer protect the pump against damage that would be caused by debris entering the pump.

The nEXT pumps have a vent port for venting the pump and vacuum system to atmospheric pressure. The pump is supplied with a manual vent valve fitted; this can be replaced with a TAV5 or TAV6 solenoid-operated vent valve (available as accessories – refer to Section 7). The TAV valve can be directly controlled by the on-board controller.

The nEXT pumps have a purge port: an inert purge gas can be introduced to protect the bearing and motor from corrosion. An optional vent port adapter and purge restrictor can be fitted to the purge port to control the flow rate of the purge gas and to filter the gas supply. (Refer to Section 7).

Air coolers and a water-cooling block are available as optional accessories to cool the nEXT pumps. (Refer to

Section 7).

WARNING

Improper use of the equipment could cause damage to it or injury to people. The user is responsible for the safe operation, installation and monitoring of the system.

WARNING

The drive contains electrolytic capacitors and, under certain fault conditions, may emit dangerous fumes. Ensure that the drive is operated in a well-ventilated area.

Introduction

B800-00-880 Issue D

1.3 Pump controller

The pump controller contains the drive electronics that control the pump operation and the TAV vent valve. There is a connector socket on the side of the controller where the TAV vent valve can be plugged in. (Refer to Section 2.9)

The controller has three indicator LED’s that signal the general status, operation and service status of the pump.The LEDs can be used for fault finding if a problem should occur. (Refer to Section 2.10)

The drive electronics system has a number of built-in safety features to protect the nEXT pumps from damage in the event of sustained high pressure or temperature.

 The electronics constantly monitors the temperature inside the controller and the temperature of the motor

within the pump. If either part becomes too hot, the controller reduces the power supplied to the pump motor and the pump speed will drop. If the pump rotational speed falls below 50% of full speed, the electronics may trip into a Fail condition, depending on the system configuration. (Refer to Section 1.4.3).

 If the pump inlet pressure increases, the power supplied to the pump motor increases to counteract the gas

frictional load. However, when the built-in maximum power limit is reached, the speed of the pump will start to drop. If the pump rotational speed falls below 50%% full speed, the electronics may trip into Fail condition, depending on how the system has been configured. (Refer to Section 1.4.3).

 In the event of an electrical supply failure, the controller uses the motor within the pump as a generator.

This means the nEXT pumps have their own regenerative supply and do not require a separate battery for emergency power backup. The regenerated energy is used to maintain the electrical supply to the controller and any vent valve or fan attached to the controller connector until the pump speed falls to below 50% of full rotational speed: this will ensure that the vent valve remains shut until below 50% of full rotational speed and will prevent the pump from venting at full speed. It also ensures that the serial link and signals on the parallel interface remain active until the pump speed falls below 50%.

1.4 Operational features

In addition to the basic start and stop commands, the nEXT pumps have several other features that allow pump operation to be tailored to a particular application. Refer to Table 10 for factory default settings of the parameters discussed in the following sections.

OEM supplied pumps may have drive parameters and default user-selectable settings which differ from those stated in this instruction manual in order to suit certain process requirements. Please contact the OEM in the first instance for further information and advice.

1.4.1 Power limit setting

Select the maximum power that will be drawn by the pump (refer to Section 4.1.1). The more power supplied, the quicker the pump will accelerate to reach full speed. If the application requires fast cycling, set the power limit to the maximum value. If ramp time is not important in the application, use a lower power limit, down to a minimum value (refer to Table 1).

Ensure that the power supply is capable of delivering sufficient power to the nEXT pump. By choosing a lower power limit setting, a smaller power supply may be used. For more information, refer to Section 2.7.

Table 1 - Power limits

Pump Standard default setting

Maximum value

setting

Minimum value setting

nEXT240, nEXT300 and nEXT400 160 W 200 W 50 W

B800-00-880 Issue D

Edwards and the Edwards logo are trademarks of Edwards Limited.

Introduction

1.4.2 Standby speed

In standby mode, the pump rotational speed is lower than the full rotational speed. The default setting for standby speed is 70% of full speed. Note that in order to run at standby speed, the pump must also be in the start condition.

If the application does not require the pump to be running at maximum speed at all times, use the standby speed feature rather than switching the pump off. This feature can be used for vacuum system tuning or as a system power saving option.

The standby speed is a user-selectable value (refer to Section 4.1.4).

1.4.3 Timer

When the pump is started, an internal timer is automatically started within the drive electronics. The default timer setting is 8 minutes. If the pump fails to reach 50% of full rotational speed within the timeout period, the controller will signal a Fail and will decelerate the pump to rest. This feature prevents the controller from driving the pump at maximum power for a long time. The pump may fail to reach 50% speed if the gas load is too high (for example if there is a leak in the system), if the backing pump fails or if the pump is too hot.

The timeout period is a user-selectable feature (refer to Section 4.1.6). If the application requires the pump to ramp up slowly, extend the timeout period. The timer is permanently enabled for ramp-up.

The timer has an additional function: if the pump rotational speed drops below 50% of full speed for any reason, the pump time can be set to recover rather than trigger a fail condition. The timer starts as soon as the speed drops to below 50% full speed. If, during the timeout period, the pump recovers to above 50% full speed then the timer will be reset. If the pump rotational speed fails to recover by the end of the timeout period, the controller will trigger a fail condition and will decelerate the pump to rest. When the pump is shipped, the timer function is enabled, however, it can be disabled. With the timer disabled, the pump will fail and decelerate to rest as soon as pump rotational speed falls below 50%.

1.4.4 Analogue output

The pump controller produces an analogue output for monitoring four different system parameters:

 Measured pump rotational speed (default condition)

 Measured motor power

 Measured motor temperature

 Measured controller temperature

The analogue output signal ranges from 0 to 10 V and is directly proportional to the system parameter (refer to

Section 2.8).

Connect the analogue output to a suitable meter or indicator to display the appropriate system parameter or connect it to the customer control equipment (for example, to operate other components in the pumping system at preset values).

Only one system parameter can be monitored at a time using the analogue output. However, it is easy to configure the controller to monitor a different system parameter (refer to Section 4.1.7).

1.4.5 Automatic vent options

An Edwards TAV vent valve can be connected directly to the nEXT pump’s controller. The controller is capable of providing a number of different venting options.

The drive electronics can control the rate of venting. Using this feature the pump can be vented from full rotational speed in a controlled manner that will not damage the pump bearings. Once the pump rotational speed has dropped to below 50% of maximum speed, it is safe to hard vent (open the vent valve fully).

Introduction

B800-00-880 Issue D

There are many venting options available, including:

 Hard vent when rotational speed drops below 50%

 Controlled vent when above 50% speed and hard vent below 50% speed

 Hard vent immediately through a suitable restrictor

Controlled venting gives the benefit of a quicker ramp down time by controlling the vent rate through a single large orifice across the pump speed range. A full list of the venting options is given in Section 3.9

In addition there is a feature that allows a delayed start of the nEXT pump. With this feature, the vent valve can be closed before starting the nEXT pump. This allows the backing pump to reduce the pressure in the vacuum system before starting the nEXT pump.

If the controller is not used to control a TAV vent valve, it can be used to run a fan instead. The controller can be configured so that the fan is permanently enabled.

1.4.6 Normal speed setting

The normal speed is a user-selectable parameter that can be set anywhere from 50% to 100% of full rotational speed. When the pump reaches normal speed, a signal is available on the normal pin of the logic interface connector. This signal can be used to control the application since it shows that pump speed, and therefore vacuum performance, has reached a specific minimum level. The default setting is 80% of full rotational speed. Refer to Section 4.1.5 for instructions on altering the normal speed setting.

1.5 Logic interface

The pump controller can only be operated through the logic interface. The signals on the logic interface are of three types:

 Control inputs: these are switch-type signals that are used to control the pump

 Status outputs: these outputs identify the status of the system

 Analogue output: this provides a 0 – 10 V output for a number of pump parameters.

The logic interface has been designed to support both serial and parallel control and monitoring, operating through one connector. For serial control either RS232 (default) or RS485 can be selected using the RS485/RS232 slide switch located on the controller (refer to Section 3.7).

The logic interface can be plugged directly into the Edwards TIC Turbo Controller or TIC Turbo Instrument Controller and then use the functionality that they provide. Alternatively, the logic interface can be connected to the customer control system. The most useful arrangements are described in the sections below.

For more information about the logic interface, refer to Section 2.8.

1.5.1 Parallel control and monitoring

The simple parallel interface is a quick and easy way to control the pump. This is the same interface used on existing 24 V Edwards Turbo Pumps. The controls that are available to use are start and standby. The system status can be monitored using the normal, fail and analogue output signals.

Note: The serial enable switch MUST be open (no connection) and the slide sw itch mu st be in the RS2 32 po sition

(refer to Section 3.7).

Refer to Section 3.6 for more detailed instructions of how to use the parallel interface.

B800-00-880 Issue D

Edwards and the Edwards logo are trademarks of Edwards Limited.

Introduction

A system operating with only a parallel connection is not capable of adjusting the configuration settings stored in the controller (for example, power limit setting or controlled venting options). In this case, all these features would be at their factory default settings. It is possible to manually adjust the standby speed if standby mode is selected, howev er, t he co ntroller should be configured separately before fitting the nEXT pump to the system. This is covered in more detail in Section 1.5.5.

1.5.2 Serial control and monitoring

The serial communications link provides complete control and monitoring by using just three signal lines. The serial data lines share the same connector pins as the parallel signals standby and fail. The serial data lines can be configured to provide an RS485 compliant or RS232 compatible interface by setting the position of the RS485/RS232 slide switch (refer to Section 3.7)

The serial enable signal MUST be linked to 0 V for the system to accept commands from the serial link. This is a safety feature and acts as an interlock. For pure serial control, the parallel start signal will be left unconnected.

The controller will still provide the normal and analogue signals on the logic interface connector even when operating under serial control. The status of the normal signal and the value of the system parameter on the analogue output can also be obtained by interrogating the system status via the serial link.

For more information about the serial interface, refer to Section 3.7.

1.5.3 Serial control with parallel monitoring

Since normal and analogue signals remain available even using serial control, it is possible to control the pump via the serial link whilst monitoring these signals in the parallel interface.

The serial link uses the same connector pins as the parallel signals standby and fail so these parallel control and monitoring signals are not available. The serial enable signal MUST be linked to 0 V and the parallel start signal will be left unconnected.

1.5.4 Parallel control with serial monitoring or serial configuration

This method of control is best for users who normally wish to operate the pump in parallel control mode but occasionally want to adjust the configuration settings stored in the controller or to monitor operational status of the pump via the serial link.

The serial enable signal must be linked to 0 V for serial communications to take place. Whilst operating under parallel control with the serial link active, the parallel start control signal is available (as described in Section 1.5.1.) but the standby control line is not since it is used as a serial data line.

If the serial enable line is deactivated at any time whilst the RS485/RS232 slide switch is in the RS232 position, the serial link should also be disconnected. Edwards suggests making a special cable for serial communications that includes a link between serial enable and 0 V. This way, serial enable is automatically activated when the cable is connected and then deactivated when the cable is removed.

1.5.5 Controller configuration (serial configuration)

All the configuration settings stored within the controller are retained even when power to the nEXT pump is removed. This means that it is possible to use a separate system to configure the controller before fitting the nEXT pump to the application. This gives the benefit of tailoring the pump functionality to a customer application and allows the pump to be operated using a simple parallel interface system.

To configure the nEXT pump, either use a customer simple serial system or use the Edwards TIC Turbo Controller or Turbo Instrument Controller. The TICs have a feature which allows storage of a nEXT pump’s configuration. The configuration can then be downloaded to another nEXT pump. This is useful when configuring a number of nEXT pumps with the same settings before they are fitted to a system.

Introduction

B800-00-880 Issue D

Note: The RS485/RS232 slide switch must be in the (default) RS232 position if the TIC is to be used to configure

the nEXT pump. Refer to Section 3.7.1.

The TIC is supplied with a Windows

based PC program which allows the nEXT pump to be configured from a single

PC. The program has a simple user interface which means that it is not necessary to use the ASCII message protocol described in Section 3.7. The TIC PC program has a facility to save multiple nEXT pump configurations which can then be downloaded into other nEXT pumps.

B800-00-880 Issue D

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This page has been intentionally left blank.

Technical data

B800-00-880 Issue D

2Technical data

2.1 General

2.2 Pumping media

Table 2 - General data

General items Reference data

Performance Refer to Table 3, 4 and 5; Figure 1, 2 and 3

Dimensions Refer to Figure 4, 5 and 6

Maximum inlet flange temperature

nEXT240 75 °C

nEXT300 80 °C

nEXT400 70 °C

Maximum permitted external magnetic field 5 mT Radial

Reduce gas load when operating in magnetic field

Pollution degree EN61010 Pollution degree 2

Equipment type Fixed equipment, for indoor use only

Enclosure protection (installed) IP40

WARNING

Vent dangerous gases and gas mixtures safely. Do not expose people to these gases. If pumping hazardous gases or vapours, observe the safety recommendations of the supplier of the gas/ vapour.

WARNING

Do not use the nEXT pump to pump pyrophoric or explosive gas mixtures as it is not suitable for this purpose. The pump and its connections are not designed to contain an explosion.

WARNING

In the interstage and booster versions of the nEXT pumps, gas pumped through the interstage port will mix with gas pumped through the pump inlet. Ensure that the gases will not react or combine to form dangerous gases and substances.

WARNING

Do not exceed the maximum continuous operating pressure. Doing so can result in dangerous rotor temperatures and will shorten the life of the pump.

B800-00-880 Issue D

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Technical data

Note: Concentrations of gases may be modified by the compression of the pump.

The pumps are designed to pump the following residual gases normally used in high-vacuum systems:

The pump can be used to pump oxygen and water vapour, subject to the following conditions:

 Oxygen – when the pump is purged by an inert gas, oxygen can be pumped at concentrations above 20% by

volume. Refer to Section 2.4 for Purge gas specification. However, if the pump is not purged, the oxygen concentration must be less than 20% by volume.

 Water vapour - ensure that vapour does not condense inside the pump; refer to Section 3.10.3.

If pumping a gas not listed above, contact the supplier for advice. If the supplier is not contacted, the pump warranty may be invalidated. The pump is not suitable for pumping aggressive or corrosive gases.

WARNING

Do not expose any part of the human body to vacuum.

WARNING

Do not use a nEXT pump to pump mercury vapour and do not allow mercury (for example, from a McLeod gauge) to come into contact with the pump. If mercury vapour is pumped, the pump rotor may corrode and fail.

 Air  Carbon dioxide  Methane  Neon  Propane  Krypton  Butane  Helium  Carbon monoxide  Ethane  Nitrogen  Argon  Hydrogen

Table 3 - nEXT 240 pumps technical data

Parameter

nEXT240D

ISO100

nEXT240D

CF100

nEXT240T

ISO100

nEXT240T

CF100

Mass 5.7 kg 8.8 kg 6 kg 9.1 kg

Inlet flange DN100ISO-K DN100CF DN100ISO-K DN100CF

Outlet flange DN25NW DN25NW DN25NW DN25NW

Ven t port

⅛ inch BSPP ⅛ inch BSPP ⅛ inch BSPP ⅛ inch BSPP

Purge port

⅛ inch BSPP ⅛ inch BSPP ⅛ inch BSPP ⅛ inch BSPP

Interstage port DN25NW DN25NW DN25NW DN25NW

Booster port DN25NW DN25NW DN25NW DN25NW

Inlet pumping speed

He H

240 l/s 230 l/s 165 l/s

Inlet compression ratio

He H

>1 x 10

3 x 10

1 x 10

>1 x 10

3 x 10

1 x 10

>1 x 10

1 x 10

1.5 x 10

>1 x 10

1 x 10

1.5 x 10

Technical data

B800-00-880 Issue D

Note: Pumping speeds quoted are without an inlet screen.

Interstage pumping sSpeed

He H

13 l/s 13 l/s 11 l/s

Peak booster pumping speed (nitrogen)

RV12 bac king p ump XDS10 backing pump

--26 m

3h-1

24 m3h

-1

26 m3h

-1

24 m3h

-1

Ultimate pressure

<6 x 10

-8

mbar <5 x 10

-10

mbar <6 x 10

-8

mbar <5 x 10

-10

mbar

Ultimate pressure 48 hours after bakeout for CF version and without bakeout for ISO version with 2-stage rotary vane backing pump.

Table 4 - nEXT 300 pumps technical data

Parameter

nEXT300D

ISO100

nEXT300D

CF100

nEXT300T

ISO100

nEXT300T

CF100

Mass 5.7 kg 8.5 kg 6 kg 8.8 kg

Inlet flange DN100ISO-K DN100CF DN100ISO-K DN100CF

Outlet flange DN25NW DN25NW DN25NW DN25NW

Vent po rt

⅛ inch BSPP ⅛ inch BSPP ⅛ inch BSPP ⅛ inch BSPP

Purge port ⅛ inch BSPP ⅛ inch BSPP ⅛ inch BSPP ⅛ inch BSPP

Interstage port DN25NW DN25NW DN25NW DN25NW

Booster port DN25NW DN25NW DN25NW DN25NW

Inlet pumping speed

He H

300 l/s 340 l/s 280 l/s

Inlet compression ratio

He H

>1 x 10

1 x 10

5 x 10

>1 x 10

1 x 10

5 x 10

>1 x 10

3 x 10

1 x 10

>1 x 10

3 x 10

1 x 10

Interstage pumping speed

He H

13 l/s 13 l/s 11 l/s

Peak booster Pumping speed (nitrogen)

RV12 bac king p ump XDS10 backing pump

--26 m

3h-1

24 m3h

-1

26 m3h

-1

24 m3h

-1

Ultimate pressure

Ultimate pressure 48 hours after bakeout for CF version and without bakeout for ISO version with 2-stage rotary vane backing pump.

<6 x 10

-8

mbar <5 x 10

-10

mbar <6 x 10

-8

mbar <5 x 10

-10

mbar

Table 3 - nEXT 240 pumps technical data (continued)

Parameter

nEXT240D

ISO100

nEXT240D

CF100

nEXT240T

ISO100

nEXT240T

CF100

B800-00-880 Issue D

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Technical data

Note: Pumping speeds quoted are without an inlet screen

Table 5 - nEXT 400 pumps technical data

Parameter

nEXT400D

ISO160

nEXT400D

CF160

nEXT400T

ISO160

nEXT400T

CF160

Mass 6.5 kg 9.5 kg 6.8 kg 9.8 kg

Inlet flange DN160ISO-K DN160CF DN160ISO-K DN160CF

Outlet flange DN25NW DN25NW DN25NW DN25NW

Vent po rt ⅛ inch BSPP ⅛ inch BSPP ⅛ inch BSPP ⅛ inch BSPP

Purge port ⅛ inch BSPP ⅛ inch BSPP ⅛ inch BSPP ⅛ inch BSPP

Interstage port DN25NW DN25NW DN25NW DN25NW

Booster port DN25NW DN25NW DN25NW DN25NW

Inlet pumping speed

He H

400 l/s 390 l/s 325 l/s

Inlet compression ratio

He H

>1 x 10

1 x 10

5 x 10

>1 x 10

1 x 10

5 x 10

>1 x 10

1 x 10

>1 x 10

1 x 10

Interstage pumping speed

He H

13 l/s 13 l/s 11 l/s

Peak booster Pumping speed (nitrogen)

RV12 bac king p ump XDS10 backing pump

--26 m

3h-1

24 m3h

-1

26 m3h

-1

24 m3h

-1

Ultimate pressure

Ultimate pressure 48 hours after bakeout for CF version and without bakeout for ISO version with 2-stage rotary vane backing pump.

<1 x 10

-8

mbar <1 x 10

-10

mbar <1 x 10

-8

mbar <2 x 10

-10

mbar

Technical data

B800-00-880 Issue D

Table 6 - nEXT pumps technical data

Parameter nEXT240D nEXT240T nEXT300D nEXT300T nEXT400D nEXT400T

Critical backing pressure N

9.5 mbar 20 mbar 9.5 mbar 20 mbar 10 mbar 20 mbar

Critical backing pressure He 7 mbar 8.5 mbar 7.5 mbar 8.5 mbar 8.5 mbar 8.5 mbar

Critical backing pressure H

2.5 mbar 3 mbar 2.9 mbar 3 mbar 3 mbar 3 mbar

Maximum continuous inlet flow (at ultimate backing pressure)

Values for ma ximum continuous inlet pressure obtained using a RV12 backing pump at sea level in negligible magnetic field. Values for maximum continuous backing pressure obtained under no flow conditions at sea level in negligible magnetic field. Refer to Section 3.9 for cooling conditions. Above these pressures, rotational speed drops below nominal.

Nitrogen:

Water cooling (40

C Ambient)

†

Cooling water temperature 15 oC at a flow rate of 30 l hr-1.

45 sccm 55 sccm 95 sccm 65 sccm 105 sccm 50 sccm

Force air cooling (35

C Ambient) 30 sccm 50 sccm 115 sccm 100 sccm 90 sccm 105 sccm

Natural convection (30 °C Ambient)

10 sccm 10 sccm 35 sccm 25 sccm 45 sccm 25 sccm

Argon:

Water cooling (40

C Ambient) 35 sccm 35 sccm 63 sccm 42 sccm 70 sccm 49 sccm

Force air cooling (35

C Ambient) 20 sccm 28 sccm 76 sccm 70 sccm 70 sccm 77 sccm

Natural convection (30

C Ambient)

7 sccm 7 sccm 20 sccm 20 sccm 28 sccm 20 sccm

Maximum continuous backing pressure (at ultimate inlet pressure)

Nitrogen:

Water cooling (40

C Ambient)

†

6 mbar 2.75 mbar 6.75 mbar 4.75 mbar 7.5 mbar 4 mbar

Force air cooling (35

C Ambient) 4.75 mbar 2.75 mbar 7 mbar 8 mbar 7.5 mbar 9 mbar

Natural convection (30

C Ambient)

1 mbar 0.4 mbar 2.75 mbar 1 mbar 4 mbar 1.25 mbar

Argon:

Water cooling (40

C Ambient) 4.75 mbar 2.75 mbar 6 mbar 3.75 mbar 6.5 mbar 4 mbar

Force air cooling (35

C Ambient) 3 mbar 1.5 mbar 6.5 mbar 7 mbar 6.5 mbar 8 mbar

Natural convection (30

C Ambient)

0.5 mbar 0.2 mbar 2 mbar 0.75 mbar 3 mbar 1.2 mbar

Recommended backing pump RV12 / XDS10

Operation attitude Vertical and upright to horizontal ± 2

Vertical only for ‘nL’ variant pumps

Normal rotational speed 60,000 revolutions per minute

Starting Time to 90% Speed (160 W) 115 sec 140 sec 155 sec 175 sec 175 sec 200 sec

Starting Time to 90% Speed (200 W) 95 sec 120 sec 135 sec 150 sec 150 sec 170 sec

Sound pressure level (1 metre away) < 45 dB(A) ± 3dB(A) Declared dual number noise emission values in

accordance with ISO4871

B800-00-880 Issue D

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Technical data

Figure 1 - nEXT240 performance curve

Figure 2 - nEXT300 performance curve

Technical data

B800-00-880 Issue D

Figure 3 - nEXT400 performance curve

B800-00-880 Issue D

Edwards and the Edwards logo are trademarks of Edwards Limited.

Technical data

Figure 4 - nEXT 240 dimensions (mm)

Technical data

B800-00-880 Issue D

Figure 4 - nEXT 240 dimensions (mm) - figure legend

1. Earth point

2. LED indicators on drive unit

3. Removable cap RS485/RS232 switch vent valve socket

4. Base mounting holes and fan mountings

5. Booster port B

6. Interstage port

7. Booster port A

8. Backing port

9. 24/48 V Supply

10. Body purge port

11. Electrical drive unit

12. Envelope vent port ⅛ inch BSP

13. Envelope vent

B800-00-880 Issue D

Edwards and the Edwards logo are trademarks of Edwards Limited.

Technical data

Figure 5 - nEXT 300 dimensions (mm)

Technical data

B800-00-880 Issue D

Figure 5 - nEXT 300 dimensions (mm) - figure legend

1. Earth point

2. LED indicators on drive unit

3. Removable cap RS485/RS232 switch vent valve socket

4. Base mounting holes and fan mountings

5. Booster port B

6. Interstage port

7. Booster port A

8. Backing port

9. 24/48 V Supply

10. Body purge port

11. Electrical drive unit

12. Envelope vent port ⅛ inch BSP

13. Envelope vent

B800-00-880 Issue D

Edwards and the Edwards logo are trademarks of Edwards Limited.

Technical data

Figure 6 - nEXT 400 dimensions (mm)

Technical data

B800-00-880 Issue D

Figure 6 - nEXT 400 dimensions (mm) - figure legend

1. Earth point

2. LED indicators on drive unit

3. Removable cap RS485/RS232 switch vent valve socket

4. Base mounting holes and fan mountings

5. Booster port B

6. Interstage port

7. Booster port A

8. Backing port

9. 24/48 V Supply

10. Body purge port

11. Electrical drive unit

12. Envelope vent port ⅛ inch BSP

13. Envelope vent

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Edwards nEXT 240D, nEXT series, nEXT 240T, nEXT 300D, nEXT 400D Instruction Manual

Specifications and Main Features

Frequently Asked Questions

User Manual