Edwards nEXT240, nEXT300, nEXT400, nEXT400D, nEXT300T Instruction Manual
...
Instruction Manual
nEXT Turbomolecular Pumps
nEXT240, nEXT300 and nEXT400
B800-00-880
Issue A Original
Description Item Number
nEXT240D B812XXXXX
nEXT240T B813XXXXX
nEXT300D B822XXXXX
nEXT300T B823XXXXX
nEXT400D B832XXXXX
nEXT400T B833XXXXX
B800-00-880 Issue A
Contents
Section Page
1 Introduction ....................................................................................... 1
1.1 Scope and definitions ................................................................................................... 1
1.2 General description ..................................................................................................... 2
1.3 Pump controller .......................................................................................................... 3
1.4 Operational features .................................................................................................... 3
1.4.1 Power limit setting ...................................................................................................... 3
1.4.2 Standby speed ............................................................................................................ 3
1.4.3 Timer ...................................................................................................................... 4
1.4.4 Analogue output ......................................................................................................... 4
1.4.5 Automatic vent options ................................................................................................. 4
1.4.6 Normal speed setting .................................................................................................... 5
1.5 Logic interface ........................................................................................................... 5
1.5.1 Parallel control and monitoring ....................................................................................... 5
1.5.2 Serial control and monitoring .......................................................................................... 5
1.5.3 Serial control with parallel monitoring ............................................................................... 6
1.5.4 Parallel control with serial monitoring or serial configuration ................................................... 6
1.5.5 Controller configuration (serial set-up) .............................................................................. 6
Contents
2 Technical data .................................................................................... 7
2.1 General ................................................................................................................... 7
2.2 Pumping media ........................................................................................................... 7
2.3 Vent gas specification and vent control data ...................................................................... 17
2.4 Purge gas specification ................................................................................................ 18
2.5 Cooling water ............................................................................................................18
2.6 Materials exposed to gases pumped .................................................................................18
2.7 Electrical data ........................................................................................................... 19
2.8 Logic interface connector .............................................................................................19
2.9 Controller connector socket .......................................................................................... 20
2.10 Indicator LEDs ...........................................................................................................23
2.11 Operating and storage environment .................................................................................23
3 Installation ....................................................................................... 25
3.1 Unpack and inspect ..................................................................................................... 25
3.2 Typical installation .....................................................................................................25
3.3 Connection to the vacuum system ...................................................................................26
3.3.1 Inlet-screen (supplied fitted on CF only) ............................................................................27
3.3.2 Mechanical fixing .......................................................................................................27
3.3.3 Inlet-connection and orientation .....................................................................................27
3.3.4 Base mounting ........................................................................................................... 28
3.3.5 Backing connection ..................................................................................................... 28
3.3.6 Interstage connection (variants only) ............................................................................... 29
3.4 Purge gas connection ...................................................................................................29
3.4.1 Connect the purge gas .................................................................................................29
3.4.2 Recommended purge gas flow ........................................................................................29
3.5 Electrical installation ..................................................................................................29
3.5.1 Introduction .............................................................................................................29
3.5.2 Earth (ground) connections ...........................................................................................29
3.5.3 Connect the logic interface to the TIC ..............................................................................29
3.5.4 Connect the logic interface to your control equipment ..........................................................30
3.5.5 Connect the electrical supply .........................................................................................30
3.6 Connection for parallel control and monitoring ................................................................... 31
3.7 Connection for serial control and monitoring ......................................................................32
IA/030/03/09
© Edwards Limited 2009. All rights reserved. Page i
Edwards and the Edwards logo are trademarks of Edwards Limited.
B800-00-880 Issue A
Contents
3.7.1 Connect the serial interface to your control equipment .........................................................32
3.7.2 Serial enable .............................................................................................................34
3.7.3 Serial protocol ...........................................................................................................35
3.7.4 Message structure .......................................................................................................36
3.7.5 Command set ............................................................................................................ 37
3.7.6 Simultaneous parallel and serial operation ......................................................................... 39
3.7.7 Multi-drop operation ...................................................................................................40
3.8 Vent options, vent valve connection and control .................................................................. 40
3.8.1 Manual vent valve ...................................................................................................... 40
3.8.2 TAV5 or TAV6 solenoid vent valve ....................................................................................40
3.8.3 Controlled venting ...................................................................................................... 41
3.8.4 Alternative valve connected to the vacuum system ..............................................................42
3.9 Cooling ...................................................................................................................42
3.9.1 Introduction .............................................................................................................42
3.9.2 Forced air cooling ....................................................................................................... 42
3.9.3 Water-cooling ...........................................................................................................43
4 Operation ........................................................................................ 45
4.1 Configuring the nEXT pump using serial commands ...............................................................45
4.1.1 Power limit setting .....................................................................................................45
4.1.2 Powering a fan from the Controller .................................................................................. 46
4.1.3 Controlled venting options ............................................................................................46
4.1.4 Standby speed setting .................................................................................................. 47
4.1.5 Normal speed setting ...................................................................................................47
4.1.6 Timer setting and options .............................................................................................48
4.1.7 Analogue signal options ................................................................................................ 49
4.1.8 Factory settings .........................................................................................................49
4.1.9 Assigning a multi-drop address .......................................................................................49
4.2 Configuring the nEXT pump using a TIC .............................................................................50
4.3 Start-up ..................................................................................................................51
4.3.1 Close the vent valve .................................................................................................... 51
4.3.2 Pre-start checks ......................................................................................................... 51
4.4 Operation with parallel control and monitoring ...................................................................52
4.4.1 Start the pump ..........................................................................................................52
4.4.2 Running at standby speed .............................................................................................52
4.4.3 Stop the pump ........................................................................................................... 52
4.4.4 Parallel monitoring .....................................................................................................52
4.5 Operation with serial control and monitoring ...................................................................... 52
4.5.1 Delayed start ............................................................................................................ 52
4.5.2 Start the pump ..........................................................................................................53
4.5.3 Standby speed ........................................................................................................... 53
4.5.4 Stop the pump ........................................................................................................... 53
4.5.5 Temperature readings ................................................................................................. 53
4.5.6 Link parameter readings ...............................................................................................54
4.5.7 Measured motor speed ................................................................................................. 54
4.6 Simultaneous parallel and serial operation ......................................................................... 54
4.7 Operation with a TIC ...................................................................................................54
4.8 Decelerating and venting .............................................................................................. 54
4.9 Operation at extreme conditions ..................................................................................... 55
4.9.1 Operation with high inlet pressure ................................................................................... 55
4.9.2 Operation at high temperatures ......................................................................................55
4.9.3 Operation at over-speed ...............................................................................................55
4.9.4 Electrical supply failure ............................................................................................... 55
4.10 Bakeout ...................................................................................................................56
5 Maintenance ..................................................................................... 59
5.1 Introduction .............................................................................................................59
5.2 Bearing and oil cartidge maintenance ............................................................................... 59
5.3 Rotor life ................................................................................................................. 59
Page ii © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
B800-00-880 Issue A
5.4 Clean the external surfaces of the pump ...........................................................................60
5.5 Fault finding .............................................................................................................60
5.5.1 Flashing Service Codes ................................................................................................. 63
5.5.2 Flashing error codes .................................................................................................... 63
5.5.3 Decoding system status words ........................................................................................64
5.5.4 Useful service information ............................................................................................66
6 Storage and disposal ........................................................................... 67
6.1 Storage ...................................................................................................................67
6.2 Disposal ...................................................................................................................67
7 Service, spares and accessories .............................................................. 69
7.1 Introduction .............................................................................................................69
7.2 Service ....................................................................................................................69
7.2.1 Returning a pump for service .........................................................................................69
7.2.2 Bearing and oil cartridge on-site maintenance .................................................................... 69
7.3 Spares .....................................................................................................................70
7.3.1 ISX inlet-screen ......................................................................................................... 70
7.3.2 Inlet-strainer ............................................................................................................70
7.3.3 Inlet-flange seals and integrated inlet screens ....................................................................70
7.4 Accessories ...............................................................................................................70
7.4.1 Installation ...............................................................................................................70
7.4.2 ACX air-cooler ...........................................................................................................70
7.4.3 WCX water-cooler ...................................................................................................... 71
7.4.4 BX bakeout band ........................................................................................................71
7.4.5 TAV vent-valve and vent-port adaptor ..............................................................................71
7.4.6 VRX vent-restrictor .....................................................................................................71
7.4.7 Vent-port adaptor ......................................................................................................72
7.4.8 PRX purge-restrictor ....................................................................................................72
Contents
Index .............................................................................................. 75
For return of equipment, complete the HS Forms at the end of this manual.
Illustrations
Figure Page
1 nEXT240 Performance Curve .......................................................................................... 12
2 nEXT300 Performacne Curve .......................................................................................... 12
3 nEXT 240D dimensions (mm) ..........................................................................................14
4 nEXT 300D dimensions (mm) ..........................................................................................15
5 nEXT 400D dimensions (mm) .........................................................................................16
6 Maximum allowed rate of pressure rise during venting: pressure against time (with pump initially at full
rotational speed) 17
7 Controller Connector showing pin numbers ........................................................................ 21
8 Interface circuits for nEXT turbo pump controllers ...............................................................22
9 Typical pumping system with a nEXT pump ........................................................................26
10 Logic interface connections - parallel mode .......................................................................31
11 Controller status information ......................................................................................... 33
16 Schematic diagram of the logic interface connections ...........................................................39
17 Maximum relative humidity to avoid condensation with water cooling ........................................ 43
18 nEXT exploded accessories view ..................................................................................... 73
19 nEXT exploded accessories view ..................................................................................... 74
© Edwards Limited 2009. All rights reserved. Page iii
Edwards and the Edwards logo are trademarks of Edwards Limited.
B800-00-880 Issue A
Contents
Tables
Table Page
1 Power limits .............................................................................................................. 3
2 General data .............................................................................................................. 7
3 nEXT 240 pumps technical data ....................................................................................... 8
4 nEXT 300 pumps technical data ....................................................................................... 9
5 nEXT 400 pumps technical data ....................................................................................... 9
6 nEXT pumps technical data ...........................................................................................11
7 nEXT400 Performance Curve .......................................................................................... 13
8 Vent gas specification and vent control ............................................................................. 17
9 Purge gas specification ................................................................................................ 18
10 Cooling water specification ...........................................................................................18
11 Logic interface technical data ........................................................................................ 19
12 Logic interface connector pins .......................................................................................20
13 Controller technical data ..............................................................................................21
14 Indicator LEDs ...........................................................................................................23
15 Operating and storage environment .................................................................................23
16 Checklist of components ...............................................................................................25
17 Summary of commands that can be sent to the nEXT pump ..................................................... 37
18 Command abbreviations ...............................................................................................38
19 Error codes ............................................................................................................... 38
20 Vent options .............................................................................................................41
21 Vent-restrictor orifice diameter (with atmospheric pressure at the inlet of the vent-valve) ..............42
22 Power limit setting .....................................................................................................45
23 Analogue signal options ................................................................................................ 49
24 Behaviour of a pump when the power is re-instated after an electrical supply failure .....................57
25 Fault finding .............................................................................................................60
26 Flashing service codes ................................................................................................. 63
27 Flashing error codes .................................................................................................... 63
28 Hexadecimal conversion table ........................................................................................ 64
29 Status flags .............................................................................................................. 65
30 Example decoding of system status words .......................................................................... 65
31 Inlet-flange seals and intergrated inlet screens ...................................................................70
32 Vent restrictors .........................................................................................................71
Trademark credits
Windows™ is trademark of Microsoft Corporation.
Page iv © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
B800-00-880 Issue A
This page has been intentionally left blank.
Page v © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
B800-00-880 Issue A
CAUTION
WARNING
1Introduction
1.1 Scope and definitions
This manual provides installation, operation, maintenance and storage instructions for the Edwards nEXT
Turbomolecular Pumps. You must use the nEXT pumps as specified in this manual. If you do not, the protection
provided by the nEXT pumps may be impaired.
Read this manual before you install and operate the nEXT pump. Important safety information is highlighted as
WARNING and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined
below.
Warnings are given where failure to observe the instruction could result in injury or death to
people.
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process
Introduction
The units used throughout this manual conform to the SI international system of units of measurement; where
appropriate US equivalent units of measurement are also given. When flow rates are specified, the abbreviation
‘sccm’ is used to mean standard cubic centimetres per minute. This is a flow of 1 cm
of 0 ºC and a pressure of 1013 mbar (1.013 x 10
In accordance with standard EN61010, the following warning label appears on the nEXT pump:
Warning - refer to accompanying documentation.
5
Pa).
3
-1
min
at an ambient temperature
© Edwards Limited 2009. All rights reserved. Page 1
Edwards and the Edwards logo are trademarks of Edwards Limited.
B800-00-880 Issue A
CAUTION
WARNING
WARNING
Introduction
1.2 General description
Improper use of the equipment could cause damage to it or injury to people. The user is
responsible for the safe operation, installation and monitoring of the system.
The Drive contains electrolytic capacitors and, under certain fault conditions, may emit dangerous
fumes. Ensure that the Drive is operated in a well-ventilated area.
Do not attempt to separate the Controller from the pump since this will cause damage to the electrical
connections.
The nEXT pumps consist of the turbomolecular pump with a permanently attached controller containing drive
electronics.
The controller controls the electrical supply to the pump with the exception of standby speed control. It has no
manual controls and can only be operated through the logic interface. To operate the nEXT pump you must connect
it to your own control equipment and power supply or alternatively use the Edwards TIC Turbo Instrument Controller
or TIC Turbo Controller.
The controller drives the brush-less d.c. motor in the pump.
There are three main variants of the nEXT pump,
The “S” or “Simplex” variant contains only turbomolecular blades.
The “D” or “Duplex” variant contains turbomolecular blades and a Siegbahn drag mechanism allowing
operation at higher backing pressures than pure turbomolecular pumps.
The “T” or “Triplex” variant contains turbomolecular blades, a Siegbahn drag mechanism and a regenerative
mechanism. The regenerative stage offers the option to utilise “boost” mode.
Also available is an “iD” or “iT” interstage variant, which provides an interstage port between the turbomolecular
blades and Siegbahn drag mechanism.
nEXT pumps are supplied with an inlet-screen fitted into the centering O-ring for ISO version pumps and into envelope
for CF version pumps. nEXT pumps with an NW25 interstage port are supplied with an inlet-strainer that fits into the
interstage-port. The inletscreen and inlet-strainer protect the pump against damage that would be caused by debris
entering the pump.
The nEXT pumps have a vent-port for venting the pump and vacuum system to atmospheric pressure. The pump is
supplied with a manual vent-valve fitted; this can be replaced with a TAV5 or TAV6 solenoid-operated vent-valve
(available as accessories – see Section 7). The TAV valve can be directly controlled by the on-board controller.
The nEXT pumps have a purge-port: an inert purge gas can be introduced to protect the bearing and motor from
corrosion. An optional vent-port adapter and purge restrictor can be fitted to the purge-port to control the flow rate
of the purge gas and to filter the gas supply. (Refer to Section 7).
Air-coolers and a water-cooling block are available as optional accessories to cool the nEXTpumps. (Refer to
Section 7).
Page 2 © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
B800-00-880 Issue A
1.3 Pump controller
The pump controller contains the drive electronics that control the pump operation and the TAV vent valve. There
is a connector socket on the side of the controller where the TAV vent valve can be plugged-in. (Refer to Section 2.9)
The controller has three indicator LEDs that signal the general status, operation and service status of the pump, that
can also be used for fault finding if a problem should occur. (Refer to Section 2.10)
The drive electronics system has a number of built-in safety features to protect the nEXT pumps from damage in the
event of sustained high pressure or temperature:
The electronics constantly monitors the temperature inside the controller and the temperature of the motor
within the pump. If either part becomes too hot, the controller reduces the power supplied to the pump
motor and the pump speed will drop. If the pump rotational speed falls below 50% full speed, the electronics
may trip into a Fail condition, depending on how you have configured the system. (Refer to Section 1.4.3).
If the nEXT pump's inlet pressure increases, the power supplied to the pump-motor increases to counteract
the gas frictional load. However, when the built-in maximum power limit is reached, the speed of the pump
will start to drop. If the pump rotational speed falls below 50% full speed, the electronics may trip into Fail
condition, depending on how the system has been configured. (Refer to Section 1.4.3).
In the event of an electrical supply failure, the drive electronics uses the motor within the pump as a
generator. This means the nEXT pumps have their own regenerative supply and do not require a separate
battery for emergency power back-up. The regenerated energy is used to maintain the electrical supply to
the vent valve until the pump speed falls to below 50% of full rotational speed: this will ensure that the vent
valve remains shut until below 50% of full rotational speed and will prevent the pump from venting at full
speed.
Introduction
1.4 Operational features
In addition to the basic start and stop commands, the nEXT pumps have several other features which allow you to
tailor the pump operation to your particular application. Refer to Table 14 for factory default settings of the
parameters discussed in the following Sections.
1.4.1 Power limit setting
You can select the maximum power that will be drawn by the pump (refer to Section 4.1.1). The more power you
supply, the quicker the pump will accelerate to reach full speed. Therefore if your application requires fast cycling,
you should set the power limit to the maximum value. If ramp time is not important in your application, you can use
a lower power limit, down to a minimum value, refer to Table 1.
Tab l e 1 - Pow er li mi ts
Pump Standard default setting
nEXT240, nEXT300 & nEXT400 160 W 200 W 50 W
You must make sure that the power supply you use is capable of delivering sufficient power to the nEXT pump. By
choosing a lower power limit setting, you could use a smaller power supply. For more information, refer to
Section 2.7.
1.4.2 Standby speed
Maximum value
setting
Minimum value setting
In Standby mode the pump rotational speed is lower than the full rotational speed. The default setting for standby
speed is 70% of full speed. Note that in order for standby speed to be selected, the pump must also be in the start
condition.
© Edwards Limited 2009. All rights reserved. Page 3
Edwards and the Edwards logo are trademarks of Edwards Limited.
B800-00-880 Issue A
Introduction
If your application does not require the pump to be running at maximum speed at all times, you can use the Standby
speed feature rather than switching the pump off. This feature can be used for vacuum system tuning or as a system
power saving option.
The Standby speed is a user-selectable value (refer to Section 4.1.4).
1.4.3 Timer
When the pump is started, an internal timer is automatically started within the drive electronics. The default timer
setting is 8 minutes. If the pump fails to reach 50% of full rotational speed within the timeout period, the controller
will signal a Fail and will decelerate the pump to rest. This feature prevents the controller from driving the pump at
maximum power for a long time. The pump may fail to reach 50% speed if the gas load is too high (for example if
there is a leak in the system), if the backing pump fails, or if the pump is too hot.
The timeout period is a user-selectable feature (refer to Section 4.1.6), so if your application requires the pump to
ramp up slowly, you can extend the timeout period. The Timer is permanently enabled for ramp-up.
The Timer has an additional function: if the pump rotational speed drops below 50% full speed for any reason, you
may wish to allow the pump time to recover rather than trigger a Fail condition. The Timer starts as soon as the speed
drops to below 50% full speed. If, during the timeout period, the pump recovers to above 50% full speed then the
Timer will be reset. If the pump rotational speed fails to recover by the end of the timeout period, the controller
will trigger a Fail condition and will decelerate the pump to rest. When you receive the pump, the Timer function
will be enabled, however you can disable it if you wish to. With the Timer disabled, the pump will Fail and decelerate
to rest as soon as pump rotational speed falls below 50%.
1.4.4 Analogue output
The pump controller produces an analogue output that allows you to monitor four different system parameters:
Measured pump rotational speed (default condition)
Measured motor power
Measured motor temperature
Measured controller temperature
The analogue output signal ranges from 0 to 10 V and is directly proportional to the system parameter (refer to
Section 2.8).
Connect the analogue output to a suitable meter or indicator to display the appropriate system parameter or connect
to your control equipment (for example, to operate other components in the pumping system at preset values).
You can only monitor one system parameter at a time using the analogue output. However, it is easy to configure the
controller to monitor a different system parameter (refer to Section 4.1.7).
1.4.5 Automatic vent options
An Edwards TAV vent valve can be connected directly to the nEXT pump’s controller. The controller is capable of
providing a number of different venting options.
The drive electronics can control the rate of venting. Using this feature the pump can be vented from full rotational
speed in a controlled manner that will not damage the pump bearings. Once the pump rotational speed has dropped
to below 50% of maximum speed, it is safe to hard vent (open the vent valve fully.)
There are many venting options available to you, such as:
Hard vent when rotational speed drops below 50%
Controlled vent when above 50% speed and hard vent below 50% speed
Hard vent immediately through a suitable restrictor
Page 4 © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
B800-00-880 Issue A
A full list of the venting options is given in Section 3.8
In addition there is a feature that allows a delayed start of the nEXT pump. With this feature you can close the vent
valve before you start the nEXT pump. This allows the backing pump to reduce the pressure in the vacuum system
before starting the nEXT pump.
If you do not wish to use the controller to control a TAV vent valve, you could use it to run a fan instead. You can
configure the controller so that the fan is permanently enabled.
1.4.6 Normal speed setting
The Normal Speed is a user-selectable parameter that can be set anywhere from 50% to 100% of full rotational speed.
When the pump reaches Normal Speed, a signal is available on the Normal pin of the logic interface connector. You
can use this signal to control your application since it shows that pump speed, and therefore vacuum performance,
has reached a specific minimum level. The default setting is 80% of full rotational speed. Refer to Section 4.1.5 for
instructions on altering the Normal Speed setting.
1.5 Logic interface
The pump controller can only be operated through the logic interface. The signals on the logic interface are of three
types:
Introduction
Control inputs: these are switch-type signals that are used to control the pump
Status outputs: these outputs identify the status of the system
Analogue output: this provides a 0 – 10 V output for a number of pump parameters.
The logic interface has been designed to support both serial and parallel control and monitoring, operating through
one connector. For serial control either RS232(default) or RS485 can be selected using a slide switch located on the
controller (see Section 3.7).
The logic interface can be plugged directly into the Edwards TIC Turbo Controller or TIC Turbo Instrument Controller
and then use the functionality that they provide. Alternatively, the logic interface can be connected to a customers
own control system. The most useful arrangements are described in the sections below.
For more information about the logic interface, refer to Section 2.8.
1.5.1 Parallel control and monitoring
The simple parallel interface is a quick and easy way to control the pump; this is the same interface used on existing
24V Edwards Turbo Pumps. The controls that are available to use are Start and Standby. You can monitor the system
status using the Normal, Fail and Analogue output signals.
Note: The Serial Enable switch MUST be open (no connection) and the slide switch must be in the RS232 position
(see Section 3.7).
Refer to Section 3.6 for more detailed instructions of how to use the parallel interface.
A system operating with only a parallel connection has no facility to adjust the configuration settings stored in the
controller(for example, power limit setting or controlled venting options). This would place a restriction in that all
these features would be at their factory default settings. It is possible to manually adjust the standby speed if standby
mode is selected. However, the Controller could be configured separately before fitting the nEXT pump to the
system. This is covered in more detail in Section 1.5.5.
1.5.2 Serial control and monitoring
The serial communications link provides complete control and monitoring by using just three signal lines. The Serial
data lines share the same connector pins as the parallel signals Standby and Fail. The serial data lines can be
© Edwards Limited 2009. All rights reserved. Page 5
Edwards and the Edwards logo are trademarks of Edwards Limited.
B800-00-880 Issue A
Introduction
configured to provide an RS485 compliant or RS232 compatible interface by setting the position of the slide switch
(see Section 3.7)
Th e S erial En a ble signa l M UST be li n k ed to 0 V f o r t he syst e m to accep t c ommands f r o m the ser i a l link. T h i s is a safe t y
feature and acts as an interlock. For pure serial control the parallel start signal will be left unconnected.
The controller will still provide the Normal and Analogue signals on the logic interface connector even when operating
under serial control. The status of the Normal signal and the value of the system parameter on the analogue output
can also be obtained by interrogating the system status via the Serial link.
For more information about the Serial interface, refer to Section 3.7.
1.5.3 Serial control with parallel monitoring
Since Normal and Analogue signals remain available even using Serial control, it is possible to control the pump via
the Serial link whilst monitoring these signals in the parallel interface.
The serial link uses the same connector pins as the parallel signals Standby and Fail respectively so these parallel
control and monitoring signals are not available. The Serial Enable signal MUST be linked to 0 V and the parallel start
signal will be left unconnected.
1.5.4 Parallel control with serial monitoring or serial configuration
This method of control is best for users who normally wish to operate the pump in parallel mode but occasionally
want to adjust the configuration settings stored in the Controller or to monitor operational status of the pump via
the serial link.
Whilst operating under parallel control with the serial link active, the start control signal is available (as described
in Section 1.5.1.) but the standby control line is not since it is used as a serial data line.
The Serial Enable signal must be linked to 0 V for serial communications to take place. We suggest that you make a
special cable for serial communications that includes a link between Serial Enable and 0 V. This way, Serial Enable
is automatically activated when the cable is connected and then deactivated when the cable is removed.
1.5.5 Controller configuration (serial set-up)
All the configuration settings stored within the Controller are retained even when power to the nEXT pump is
removed. This means that it is possible to use a separate system to configure the Controller before fitting the nEXT
pump to your application. This gives the benefit of tailoring the pump functionality to a customer application and
allows the pump to be operated using a simple parallel interface system.
To configure the nEXT pump, either use your own simple serial system or use the Edwards TIC Turbo Controller or
Turbo Instrument Controller. The TICs have a feature which allows storage of a nEXT pump’s configuration. The
configuration can then be downloaded to another nEXT pump. This is useful when configuring a number of nEXT
pumps with the same settings before they are fitted to a system.
Note: The RS485/RS232 slide switch must be in the (default) RS232 position if the TIC is to be used to configure
the nEXT pump. Refer to Section 3.7.1.
TM
The TIC is supplied with a Windows
PC. The program has a simple user interface which means that it is not necessary to use the ASCII message protocol
described in Section 3.7. The TIC PC Program has a facility to save multiple nEXT pump configurations which can then
be downloaded into other nEXT pumps.
based PC program which allows the nEXT pump to be configured from a single
Page 6 © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
2Technical data
WARNING
WARNING
WARNING
WARNING
2.1 General
Tab l e 2 - G ene r al da ta
General items Reference data
Performance Refer to Table 3, 4 and Figure 1
Dimensions Refer to Figure 3, 4 and 5
Maximum inlet-flange temperature
nEXT240 75°C
nEXT300 80°C
nEXT400 70°C
Maximum permitted external magnetic field 5mT Radial*
B800-00-880 Issue A
Technical data
Pollution degree EN61010 Polution degree 2
Equipment type Fixed equipment, for indoor use only
Enclosure protection (installed) IP40
*Reduce gas load when operating in magnetic field
2.2 Pumping media
Vent dangerous gases and gas mixtures safely, do not expose people to these gases. If pumping
hazardous gases or vapours, observe the safety recommendations of the supplier of the gas/
vapour.
Do not use the nEXT pump to pump pyrophoric or explosive gas mixtures, as it is not suitable for
this purpose. The pump and its connections are not designed to contain an explosion.
In the interstage and booster versions of the nEXT pumps, gas pumped through the interstage port
will mix with gas pumped through the pump inlet. Ensure that the gases will not react or combine
to form dangerous gases and substances.
Do not exceed the maximum continuous operating pressure. Doing so can result in dangerous rotor
temperatures and will shorten the life of the pump.
© Edwards Limited 2009. All rights reserved. Page 7
Edwards and the Edwards logo are trademarks of Edwards Limited.
B800-00-880 Issue A
CAUTION
WARNING
Technical data
Do not expose any part of the human body to vacuum.
Do not use a nEXT pump to pump mercury vapour and do not allow mercury (for example, from a McLeod gauge)
to come into contact with the pump. If you do, the pump rotor may corrode and fail.
Note: Concentrations of gases may be modified by the compression of the pump.
The pumps are designed to pump the following residual gases normally used in high-vacuum systems:
Air Carbon dioxide
Methane Neon
Propane Krypton
Butane Helium
Carbon monoxide Ethane
Nitrogen Argon
Hydrogen
You can use the pump to pump oxygen and water vapour, subject to the following conditions:
Oxygen – when the pump is purged by an inert gas, oxygen can be pumped at concentrations above 20% by
volume. Refer to Section 2.4 for Purge gas specification. However, if the pump is not purged, the oxygen
concentration must be less than 20% by volume.
Water vapour - you must ensure that vapour does not condense inside the pump; refer to Section 3.9.3.
If you wish to pump a gas not in the list above, contact your supplier for advice. If you do not contact your supplier,
you may invalidate the warranty on the pump. The pump is not suitable for pumping aggressive or corrosive gases.
Table 3 - nEXT 240 pumps technical data
Parameter
nEXT240D
ISO100
nEXT240D
CF100
nEXT240T
ISO100
nEXT240T
CF100
Mass 5.7kg 8.8kg 6kg 9.1kg
Inlet Flange DN100ISO-K DN100CF DN100ISO-K DN100CF
Outlet Flange DN25NW DN25NW DN25NW DN25NW
Vent Port 1 / 8 inch BSPP 1 / 8 inch BSPP 1 / 8 inch BSPP 1 / 8 inch BSPP
Purge Port 1 / 8 inch BSPP 1 / 8 inch BSPP 1 / 8 inch BSPP 1 / 8 inch BSPP
Interstage Port DN25NW DN25NW DN25NW DN25NW
Booster Port DN25NW DN25NW DN25NW DN25NW
Inlet Pumping Speed
Inlet Compression Ratio
N
He
H
N
He
H
2
240 l/s
230 l/s
2
2
2
165 l/s
>1 x 10
3 x 10
1 x 10
11
5
4
240 l/s
230 l/s
165 l/s
>1 x 10
3 x 10
1 x 10
240 l/s
230 l/s
165 l/s
11
5
4
>1 x 10
1 x 10
1.5 x 10
11
6
4
240 l/s
230 l/s
165 l/s
>1 x 10
1 x 10
1.5 x 10
11
6
4
Page 8 © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
B800-00-880 Issue A
Interstage Pumping Speed
N
He
H
2
2
13 l/s
13 l/s
11 l/s
Peak Booster Pumping Speed (Nitrogen)
RV12 b acking pu mp
-
XDS10 backing pump
Ultimate Pressure
*
Ultimate pressure 48 hours after bakeout for CF version and without bakeout for ISO version with 2-stage rotary
*
<6 x 10-8mbar <5 x 10
13 l/s
13 l/s
11 l/s
-
-10
mbar <6 x 10-8mbar <5 x 10
13 l/s
13 l/s
11 l/s
26m3h
24m3h
-1
-1
13 l/s
13 l/s
11 l/s
26m3h
24m3h
-10
-1
-1
mbar
vane backing pump.
Pumping speeds quoted are without an inlet screen
Table 4 - nEXT 300 pumps technical data
Technical data
Parameter
nEXT300D
ISO100
nEXT300D
CF100
nEXT300T
ISO100
nEXT300T
CF100
Mass 5.7kg 8.5kg 6kg 8.8kg
Inlet Flange DN100ISO-K DN100CF DN100ISO-K DN100CF
Outlet Flange DN25NW DN25NW DN25NW DN25NW
Vent Port 1 / 8 inch BSPP 1 / 8 inch BSPP 1 / 8 inch BSPP 1 / 8 inch BSPP
Purge Port 1 / 8 inch BSPP 1 / 8 inch BSPP 1 / 8 inch BSPP 1 / 8 inch BSPP
Interstage Port DN25NW DN25NW DN25NW DN25NW
Booster Port DN25NW DN25NW DN25NW DN25NW
Inlet Pumping Speed
Inlet Compression Ratio
N
He
H
N
He
H
2
300 l/s
340 l/s
2
2
2
280 l/s
>1 x 10
1 x 10
5 x 10
11
6
4
300 l/s
340 l/s
280 l/s
>1 x 10
1 x 10
5 x 10
300 l/s
340 l/s
280 l/s
11
6
4
>1 x 10
3 x 10
1 x 10
11
6
5
300 l/s
340 l/s
280 l/s
>1 x 10
3 x 10
1 x 10
11
6
5
Interstage Pumping Speed
N
He
H
2
13 l/s
13 l/s
2
11 l/s
13 l/s
13 l/s
11 l/s
13 l/s
13 l/s
11 l/s
13 l/s
13 l/s
11 l/s
Peak Booster
Pumping Speed (Nitrogen)
RV12 b acking pu mp
XDS10 backing pump
--26m
3h-1
24m3h
-1
-1
26m3h
24m3h
-1
Ultimate Pressure
*
Ultimate pressure 48 hours after bakeout for CF version and without bakeout for ISO version with 2-stage rotary
*
<6 x 10-8mbar <5 x 10
-10
mbar <6 x 10-8mbar <5 x 10
-10
mbar
vane backing pump.
Pumping speeds quoted are without an inlet screen
Table 5 - nEXT 400 pumps technical data
Parameter
nEXT400D
ISO160
nEXT400D
CF160
nEXT400T
ISO160
nEXT400T
CF160
Mass 6.5kg 9.5kg 6.8kg 9.8kg
Inlet Flange DN160ISO-K DN160CF DN160ISO-K DN160CF
© Edwards Limited 2009. All rights reserved. Page 9
Edwards and the Edwards logo are trademarks of Edwards Limited.
B800-00-880 Issue A
Technical data
Outlet Flange DN25NW DN25NW DN25NW DN25NW
Vent Port 1 / 8 inch BSPP 1 / 8 inch BSPP 1 / 8 inch BSPP 1 / 8 inch BSPP
Purge Port 1 / 8 inch BSPP 1 / 8 inch BSPP 1 / 8 inch BSPP 1 / 8 inch BSPP
Interstage Port DN25NW DN25NW DN25NW DN25NW
Booster Port DN25NW DN25NW DN25NW DN25NW
Inlet Pumping Speed
Inlet Compression Ratio
Interstage Pumping Speed
Peak Booster
Pumping Speed (Nitrogen)
RV12 b acking pu mp
XDS10 backing pump
N
He
H
N
He
H
N
He
H
2
400 l/s
390 l/s
2
2
2
2
325 l/s
>1 x 10
1 x 10
5 x 10
13 l/s
11
8
5
13 l/s
2
11 l/s
--26m
400 l/s
390 l/s
325 l/s
>1 x 10
1 x 10
5 x 10
13 l/s
13 l/s
11 l/s
400 l/s
390 l/s
325 l/s
11
8
5
>1 x 10
>1 x 10
1 x 10
11
8
6
13 l/s
13 l/s
11 l/s
3h-1
-1
24m3h
400 l/s
390 l/s
325 l/s
>1 x 10
>1 x 10
1 x 10
13 l/s
13 l/s
11 l/s
26m3h
24m3h
11
8
6
-1
-1
Ultimate Pressure
*
Ultimate pressure 48 hours after bakeout for CF version and without bakeout for ISO version with 2-stage
*
<1 x 10-8mbar <1 x 10
-10
mbar <1 x 10-8mbar <2 x 10
rotary vane backing pump.
Note: Pumping speeds quoted are without an inlet screen
-10
mbar
Page 10 © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
© Edwards Limited 2009. All rights reserved. Page 11
Edwards and the Edwards logo are trademarks of Edwards Limited.
Table 6 - nEXT pumps technical data
Parameter nEXT240D nEXT240T nEXT300D nEXT300T nEXT400D nEXT400T
Critical Backing Pressure N
2
9.5 mbar 20 mbar 9.5 mbar 20 mbar 10 mbar 20 mbar
Critical Backing Pressure He 7 mbar 8.5 mbar 7.5 mbar 8.5 mbar 8.5 mbar 8.5 mbar
Critical Backing Pressure H
2
Maximum Continuous Inlet Flow (at ultimate backing pressure)
*
2.5 mbar 3 mbar 2.9 mbar 3 mbar 3 mbar 3 mbar
Nitrogen:
Water Cooling (40oC Ambient)
Force Air Cooling (35
Natural Convection (30
o
C Ambient) 30 sccm 50 sccm 115 sccm 100 sccm 90 sccm 105 sccm
o
C Ambient) 10 sccm 10 sccm 35 sccm 25 sccm 45 sccm 25 sccm
†
45 sccm 55 sccm 95 sccm 65 sccm 105 sccm 50 sccm
Argon:
Water Cooling (40
Force Air Cooling (35
o
C Ambient) 35 sccm 35 sccm 63 sccm 42 sccm 70 sccm 49 sccm
o
C Ambient) 20 sccm 28 sccm 76 sccm 70 sccm 70 sccm 77 sccm
Natural Convection (30oC Ambient) 7 sccm 7 sccm 20 sccm 20 sccm 28 sccm 20 sccm
Maximum Continuous Backing Pressure (at ultimate inlet pressure)
*
Nitrogen:
Water Cooling (40oC Ambient)
Force Air Cooling (35
o
C Ambient) 4.75 mbar 2.75 mbar 7 mbar 8 mbar 7.5 mbar 9 mbar
Natural Convection (30
†
o
C Ambient) 1 mbar 0.4 mbar 2.75 mbar 1 mbar 4 mbar 1.25 mbar
6 mbar 2.75 mbar 6.75mbar 4.75 mbar 7.5 mbar 4 mbar
Argon:
Water Cooling (40
Force Air Cooling (35
o
C Ambient) 4.75 mbar 2.75 mbar 6 mbar 3.75 mbar 6.5 mbar 4 mbar
o
C Ambient) 3 mbar 1.5 mbar 6.5 mbar 7 mbar 6.5 mbar 8 mbar
Natural Convection (30oC Ambient) 0.5 mbar 0.2 mbar 2 mbar 0.75 mbar 3 mbar 1.2 mbar
Recommended Backing Pump RV12 / XDS10
Operation attitude Vertical and upright to horizontal ±2
o
Normal Rotational Speed 60,000 revolutions per minute
Starting Time to 90% Speed
‡
125 sec 150 sec 160 sec 190 sec 180 sec 210 sec
Sound Pressure Level (1 metre away) < 45 dB(A) ± 3dB(A) Declared dual number noise emission values in accordance with ISO4871
*
Values for maximum continuous inlet pressure obtained using a RV12 backing pump at sea level in negligible magnetic field. Values for maximum
continuous backing pressure obtained under no flow conditions at sea level in negligible magnetic field. Refer to Section 3.9 for cooling conditions.
Above these pressures, rotational speed drops below nominal.
†
Cooling water temperature 15oC at a flow rate of 30l hr-1.
‡
Power limit setting 160W.
B800-00-880 Issue A
Technical data
B800-00-880 Issue A
Technical data
Figure 1 - nEXT240 Performance Curve
Figure 2 - nEXT300 Performacne Curve
Page 12 © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Table 7 - nEXT400 Performance Curve
B800-00-880 Issue A
Technical data
© Edwards Limited 2009. All rights reserved. Page 13
Edwards and the Edwards logo are trademarks of Edwards Limited.
B800-00-880 Issue A
1. Earth point
2. Envelope vent
3. Removable cap RS232/RS485 switch vent valve
socket
4. LED indicators on drive unit
5. Base mounting holes and fan mountings
6. Booster port B
7. Interstage port
8. Booster port A
9. 24/48V Supply
10. Body purge port
11. Electrical drive unit
12. Envelope vent port 1/8” BSP
Technical data
Figure 3 - nEXT 240D dimensions (mm)
Page 14 © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Figure 4 - nEXT 300D dimensions (mm)
1. Earth point
2. Envelope vent
3. Removable cap RS232/RS485 switch vent valve
socket
4. LED indicators on drive unit
5. Base mounting holes and fan mountings
6. Booster port B
7. Interstage port
8. Booster port A
9. 24/48V Supply
10. Body purge port
11. Electrical drive unit
12. Envelope vent port 1/8” BSP
B800-00-880 Issue A
Technical data
© Edwards Limited 2009. All rights reserved. Page 15
Edwards and the Edwards logo are trademarks of Edwards Limited.
B800-00-880 Issue A
1. Earth point
2. Envelope vent
3. Removable cap RS232/RS485 switch vent valve
socket
4. LED indicators on drive unit
5. Base mounting holes and fan mountings
6. Booster port B
7. Interstage port
8. Booster port A
9. 24/48V Supply
10. Body purge port
11. Electrical drive unit
12. Envelope vent port 1/8” BSP
Technical data
Figure 5 - nEXT 400D dimensions (mm)
Page 16 © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
B800-00-880 Issue A
2.3 Vent gas specification and vent control data
Although the pump may be vented to atmosphere, high relative humidity of the air may greatly increase the
subsequent pump-down time. To reduce pump-down times you should vent with dry, clean gases. Refer to Section 3.8
for a description of the vent options and the vent valve connection refer to Section 4.1.3 for configuring the venting
options.
Table 8 - Vent gas specification and vent control
Vent gas specification and control Reference data
Vent gas Dry air, nitrogen, argon or other inert gases
Maximum dew point at atmospheric pressure -22 °C
Maximum size of particulates 1
Maximum concentration of oil 0.1 parts per million
Recommended time for rotational speed to reach 50% > 15 seconds
Maximum allowed rate of pressure rise Refer to Figure 5
Figure 6 - Maximum allowed rate of pressure rise during venting: pressure against time (with pump initially at
full rotational speed)
µm
Technical data
© Edwards Limited 2009. All rights reserved. Page 17
Edwards and the Edwards logo are trademarks of Edwards Limited.
B800-00-880 Issue A
Technical data
2.4 Purge gas specification
Table 9 - Purge gas specification
Purge gas specification Reference data
Purge gas Dry air, nitrogen, argon or other inert gases
Maximum dew point at atmospheric pressure -22 °C
Maximum size of particulates 1
Maximum concentration of oil 0.1 parts per million
Allowable purge gas flow (when required) 20 to 50 sccm (0.33 to 0.84 mbar l s
Recommended purge gas flow 25 sccm (0.42 mbar l s-1, 42 Pa l s-1)
Maximum allowable purge gas supply pressure 1 bar (gauge); 14.5 psig, 2 x 105 Pa
Table 10 - Cooling water specification
Cooling water specification Reference data
Quality Mechanically clean and optically clear with no deposits
pH value 6.0 to 8.0
Maximum calcium carbonate concentration 75 parts per million
Maximum chloride concentration 100 parts per million
Minimum oxygen concentration 4 parts per million
Minimum cooling water flow rate (at 15 °C) 15 l hr
Water temperature 10 to 20°C
Maximum water pressure 5 bar (gauge), 73.5 psig, 6 x 10
Materials exposed to cooling-water Nickel plated brass
µm
or turbidity
-1
-1
or 33 to 84 Pa l s-1)
5
Pa
2.5 Cooling water
Refer to Table 7 for the cooling water specification corresponds to a typical high-quality drinking water specification.
Check with your water supply authority if you are in doubt about the quality of your supply.
2.6 Materials exposed to gases pumped
The following materials and component types are exposed to the gases pumped:
Aluminium alloys, stainless steels, fluoroelastomer and nitrile O-rings, hydrocarbon lubricant, rare earth
magnets, silicon nitride, carbon-fibre reinforced epoxy resin, fire retardant polypropylene, polyamide, PVC,
Titanium, Silicon, Torlon and Ceramic.
Page 18 © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Loading...