Edwards iXH, iXL, pXH Instruction Manual

Instruction Manual

iXH, iXL and pXH Dry Pumping Systems

M561-00-880

Issue C Original

iXH and pXH Dry Pumping Systems

ACXXXXXXXXX0

Booster Size

Low Voltage

0 = None 1 = 600G 2 = r 3 = 1200 4 = 1800 5 = 3000 6 = 4500 7 = 6000

Dry Pump

Standard

0 = None (pXH) 1 = 100 2 = 200 3 = 300 4 = r 5 = r 6 = r 7 = r

TMS System

0 = Standard 1 = T-Variant 2 = T-Variant + heated booster 3 = r 4 = r 5 = r

Gas Module

0 = None (pXH) 6 = Single Mode + 1 = Loadlock (44 slm flow) (4 slm flow) 2 = Single Mode 7 = Single Mode + (44 slm flow) (96 slm flow) 3 = Single Mode 8 = Single Mode + (96 slm flow) (133 slm flow) 4 = Single Mode 9 = Single Mode + (133 slm flow) (204 slm flow) 5 = Single Mode A = Multi Mode (204 slm flow) (44 slm flow)

B = Multi Mode (96 slm flow) C = Multi Mode (133 slm flow) D = Multi Mode

(204 slm flow)

Exhaust

0 = r 1 = Standard without check valve. 2 = r 3 = Standard with check valve.

Seals

0 = r 1 = r 2 =Standard

Pump Motor

0 = None 1 = 4.5 kW 2 = 7.5 kW 3 = 11 kW

Booster Motor

0 = None 1 = 1.9 kW 2 = 4.5 kW 3 = 7.5 kW 4 = r

High Voltage

A = None B = 600G C = r D = 1200 E = 1800 F = 3000 G = 4500 H = 6000

Harsh

A = 100 B = 200 C = 300 D = 450 E = 500

Where r = reserved for future use

Special Features

0 = None 1 = Application Specific 2 = Application Specific 3 = Application Specific 4 = Application Specific 5 = Application Specific 6 = Application Specific 7 = Application Specific 8 = Application Specific 9 = Application Specific

iXL Dry Pumping Systems

ASXXXXXXXX00

Where r = reserved for future use

Booster Size

Low Voltage 0 = None

1 = r 2 = r 3 = r 4 = 1800 5 = 3000

High Voltage A = None

B = r C = r D = r E = 1800 F = 3000

TMS System

0 = Standard 1 = r

Exhaust

0 = r

1 = Standard

without

check valve.

2 = r

3 = r

Seals

0 = r 1 = r 2 = Standard 3 = EES

Pump Motor

0 = None 1 = 4.5 kW 2 = 7.5 kW 3 = 11 kW

Booster Motor

0 = None 1 = r 2= 4.5 kW 3 = 7.5 kW 4 = r

Gas Module 0 = None

1 = Loadlock (4 slm flow) 2 = r 3 = r 4 = r

Dry Pump 0 = None

1 = r 2 = r 3 = 250 4 = r 5 = 500 6 = 750

Declaration of Conformity

We, Edwards Limited, Crawley Business Quarter, Manor Royal, Crawley, West Sussex RH10 9LW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s)

Low Volt Systems High Volt Systems (200 - 230V) (380 - 460V)

iXH100 AC010xy21000 ACA10xy21000 iXH200H AC0B0xy22000 ACAB0xy22000 iXH610 AC110xy21100 ACB10xy21100 iXH1210 AC310xy21200 ACD10xy21200 iXH1210H AC3A0xy22200 ACDA0xy22200 iXH1210HT AC3A1xy22200 ACDA1xy22200 iXH1220H AC3B0xy22200 ACDB0xy22200 iXH1220HT AC3B1xy22200 ACDB1xy22200 iXH1220HTX AC3B2xy22200 ACDB2xy22200 iXH1820 AC420xy22200 ACE20xy22200 iXH1820H AC4B0xy22200 ACEB0xy22200 iXH1820T AC421xy22200 ACE21xy22200

Where x = 1, 2, 3, 4, 5, 6, 7, 8, 9, A, B, C or D depending on gas module type Where y=1 means 'no check valve' and y=3 means 'check valve supplied'

to which this declaration relates is in conformity with the following standard(s) or other normative document(s):

EN1012-2: 1997 Compressor and Vacuum Pumps Safety Requirements; Part 2 - Vacuum Pumps. EN61010-1: 2010 Safety Requirements for Electrical Equipment for Measurement, Control and

Laboratory Use; Part 1 – General Requirements.

EN 61326-1: 2006 Electrical equipment for measurement, control and laboratory use -

EMC requirements (Industrial Location Immunity – Class A Emissions)

EN50581:2012 Technical Documentation for the Assessment of Electrical and Electronic Products

with respect to the Restriction of Hazardous Substances

ANSI/UL 61010-1 and CAN/CSA-C22.2 No. 61010-1, 2

Safety Requirements for Electrical Equipment for Measurement, Control and Laboratory Use, Part 1: General Requirements

SEMI S2-0709 - Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

when installed in accordance with the instruction manual supplied with the pump, following the provisions of:

2006/95/EC Low Voltage Directive. 2004/108/EC Electromagnetic Compatibility Directive. 2006/42/EC Machinery Safety Directive.

2011/65/EU* Restriction of Certain Hazardous Substances (RoHS) Directive

* i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive ). The RoH S Directive does not legally apply to industrial vacuum equipment until July 2019 (July 2017 for instruments).

Note: This declaration covers all product serial numbers from the date this Declaration was signed

onwards.

22.10.2013, Burgess Hill

Mr Mark Hope, Global Technical Support Manag er Date and Place

Edition July 12, 2004, including revision July 22, 2005 -

This product has been manufactured under a quality system certifie

to ISO9001:2008

P200-02-320 Issue J

Declaration of Conformity

We, Edwards Limited, Crawley Business Quarter Manor Royal, Crawley, West Sussex RH10 9LW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s)

Low Volt Systems High Volt Systems

(200-230V) (380-460V)

iXH3030 AC530xy22300 ACF30xy22300 iXH3030T AC531xy22300 ACF31xy22300 iXH3030TX AC532xy22300 ACF32xy22300 iXH3045H AC5D0xy23310 ACFD0xy23310 iXH4545HT AC6D1xy23300 ACGD1xy23300 iXH4545HT - ACGD1B123390 iXH6045H AC7D0xy23300 ACHD0xy23300 iXH6045H AC7D02123310 ACHD02123310 iXH6045HT AC7D1xy23300 ACHD1xy23300 iXH450H AC0D0xy23000 ACAD0xy23000 pXH4500 AC6000120300 ACG000120300 pXH4500 - ACG000120310 pXH6000 AC7000120300 ACH000120300 iXL500Q AS450zy23300 ASE50zy23300

Where y = 1 means 'no check valve' and y=3 means 'check valve supplied' Where z = 1, 2, 3, 5, A or B depending on gas module type for iXL

EN 61326-1: 2006 Electrical equipment for measurement, control and laboratory use - EMC requirements (Industrial Location Immunity – Class A Emissions)

22.10.2013, Burgess Hill

Mr Mark Hope, Global Technical Support Manager Date and Place

iXL500R AS550zy23300 ASF50zy23300

Where x = 1, 2, 3, 4, 5, 6, 7, 8, 9, A, B, C or D depending on gas module type

to which this declaration relates is in conformity with the following standard(s) or other normative document(s)

EN1012-2: 1997 Compressor and Vacuum Pumps Safety Requirements. Part 2 - Vacuum Pumps EN61010-1: 2010 Safety Requirements for Electrical Equipment for Measurement, Control and Laboratory

EN50581:2012 Technical Documentation for the Assessment of Electrical and Electronic Products

ANSI/UL 61010-1 and CAN/CSA-C22.2 No. 61010-1, 2 Safety Requirements for Electrical Equipment for Measurement, Control and Laboratory Use, Part 1: General Requirements

SEMI S2-0709 - Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

when installed in accordance with the instruction manual supplied with the pump, following the provisions of:

2006/95/EC Low Voltage Directive 2004/108/EC Electromagnetic Compatibility Directive 2006/42/EC Machinery Safety Directive 2011/65/EU* Restriction of Certain Hazardous Substances (RoHS) Directive

* i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). The RoHS Directive does not legally apply to industrial vacuum equipment until July 2019 (July 2017 for instruments).

Note: This declaration covers all product serial numbers from the date this Declaration was signed onwards.

This product has been manufactured under a quality system certified to ISO9001:2008

Use. Part 1 – General Requirements.

with respect to the Restriction of Hazardous Substances

Edition July 12, 2004, including revision July 22, 2005 -

P200-02-720 Issue K

Declaration of Conformity

We, Edwards Limited, Crawley Business Quarter, Manor Royal, Crawley, West Sussex, RH10 9LW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s)

Low Volt Systems High Volt Systems (200-230V) (380-460V)

iXH500H AC0E0xy23000 ACAE0xy23000 iXH3050H AC5E0xy23310 ACFE0xy23310 iXH3050HTX AC5E2xy23300 ACFE2xy23300

iXH4550HT AC6E1xy23300 ACGE1xy23300 iXH6050H AC7E0xy23300 ACHE0xy23300 iXH6050HT AC7E1xy23300 ACHE1xy23300

Where x = 1, 2, 3, 4, 5, 6, 7, 8, 9, A, B, C or D depending on gas module type

to which this declaration relates is in conformity with the following standard(s) or other normative document(s) EN1012-2:1996, A1: 2009 Compressors and Vacuum Pumps. Safety Requirements.

Part 2 - Vacuum Pumps. EN61010-1: 2010 Safety Requirements for Electrical Equipment for Measurement,

EN 61326-1: 2006 Electrical equipment for measurement, control and laboratory

EN50581:2012 Technical Documentation for the Assessment of Electrical and Electronic Products

ANSI/UL 61010-1 and CAN/CSA-C22.2 No. 61010-1, 2nd Edition July 12, 2004, including revision July 22, 2005 – Safety

Requirements for Electrical Equipment for Measurement, Control and Laboratory Use - Part 1: General Requirements and fulfils all the relevant provisions of 2006/42/EC Machinery Directive

2006/95/EC Low Voltage Directive 2004/108/EC Electromagnetic Compatibility (EMC) Directive 2011/65/EU* Restriction of Certain Hazardous Substances (RoHS) Directive

* i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). The RoHS Directive does not legally apply to industrial vacuum equipment until July 2019 (July 2017 for instruments).

Note: This declaration covers all product serial numbers from the date this Declaration was signed onwards.

22.10.2013, Burgess Hill

Where y = 1 means ‘no check valve’ and y = 3 means ‘check valve supplied’

Control and Laboratory Use. Part 1 - General Requirements. Use - EMC requirements. (Industrial Location Immunity

- Class A Emissions)

with respect to the Restriction of Hazardous Substances

Mr Mark Hope, Global Technical Support Manager Date and Place

This product has been manufactured under a quality system certified to ISO9001:2008

P200-06-000 Issue C

Declaration of Conformity

We, Edwards Limited, Crawley Business Quarter, Manor Royal, Crawley, West Sussex RH10 9LW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble the technical file, that the product(s)

Low Volt Systems High Volt Systems

(200-230V) (380-460V)

iXL250Q AS43001x2300 ASE3001x2300 iXL750Q AS46001x4300 ASE6001x4300

Where x = 2 means 'standard booster oilbox evacuation' and x=3 means 'external booster oilbox evacuation'

EN 61326-1: 2006 Electrical equipment for measurement, control and laboratory use - EMC requirements (Industrial Location Immunity – Class A Emissions)

iXL750R AS56001x4300 ASF6001x4300

to which this declaration relates is in conformity with the following standard(s) or other normative document(s)

EN1012-2: 1997 Compressor and Vacuum Pumps Safety Requirements. Part 2 - Vacuum Pumps EN61010-1: 2010 Safety Requirements for Electrical Equipment for Measurement, Control and Laboratory

ANSI/UL 61010-1 and CAN/CSA-C22.2 No. 61010-1, 2 Safety Requirements for Electrical Equipment for Measurement, Control and Laboratory Use, Part 1: General Requirements

when installed in accordance with the instruction manual supplied with the pump, following the provisions of:

2006/95/EC Low Voltage Directive 2004/108/EC Electromagnetic Compatibility Directive 2006/42/EC Machinery Safety Directive

Note: This declaration covers all product serial numbers from the date this Declaration was signed onwards.

Mr Mark Hope, Global Technical Support Manager Date and Place

This product has been manufactured under a quality system certified to ISO9001:2008

Use. Part 1 – General Requirements.

Edition July 12, 2004, including revision July 22, 2005 -

22.10.2013, Burgess Hill

P200-06-620 Issue B

P601-01-100

2020

NWNW

Issue C Original

The Chinese regulatory requirement on the Control of Pollution Caused by Electronic Information Products No. 39 (also known as ‘China RoHS’) mandates that manufacturers of certain categories of electronic products sold in Ch ina after 1st March 2007 –

 Mark the product and packaging

 Define the Product’ s Environment Protection Use Period (EPUP)

 Provide a Materials Content Declaration.

Product Labels

Product Product Label Meaning

All iXH, iXL500 and

pXH models

Indicates toxic or hazardous substance contained in at least one of the homogeneous materials used for this part is above the limit requirement in SJ/T11363-2006. Environmental Protection Use Period is 20 years.

Packaging information

Pallet Overshipper Protection Pieces Support Braces

Recyclable Natural Wood Recyclable Cardboard Recyclable Polypropylene Recyclable Mild Steel

Environment Protection Use Period (EPUP)

This is the period in years during which the toxic or hazardous substances or elements contained in this product will not leak or mutate under normal operating conditions so that the use of such electronic information products will not result in any severe environmental pollution, any bodily injury or damage to any assets.

The Environmental Protection Use Period is 20 years for this product. For the purposes of EPUP, normal operating conditions are considered to be use in accordance with the product’s

instruction manual.

Materials Content Declaration for all iXH, iXL & pXH models

Toxic or Hazardous Substances and Elements

Part name

Motor (Mechanical Booster)

Motor (pump) O O O O O O Pump & Booster O O O O O O Electronics and Controls O O X O O O Cooling System O O O O O O Purge System O O O O O O O: Indicates that this toxic or hazardous substance contained in all of the homogeneous materials for this part is below the limit requirement in

SJ/T11363-2006. X: Indicates that this toxic or hazardous substance contained in at least one of the homogeneous materials used for this part is above the limit requirement in SJ/T11363-2006.

Lead (Pb) Mercury (Hg) Cadmium (Cd)

OO O O O O

Hexavalent

Chromium (Cr (VI))

Poly brominated

biphenyls (PBB)

Poly bromi nat ed

diphenyl ethers (PBDE)

DJD 24/03/10

M561-00-880 Issue C

Section Page

1 Introduction .......................................................................................1

1.1 Scope and definitions ................................................................................................... 1

1.2 Applications ............................................................................................................... 2

1.3 Description ................................................................................................................ 2

1.4 Priority of control ........................................................................................................ 2

1.5 Active utility control .................................................................................................... 3

2 Technical data ....................................................................................5

2.1 General technical data .................................................................................................. 5

2.2 Performance data ........................................................................................................ 7

2.3 Loading data .............................................................................................................. 8

2.4 Nitrogen purge data ..................................................................................................... 9

2.5 Electrical data ...........................................................................................................11

2.6 Cooling-water data .....................................................................................................17

2.7 T variants ................................................................................................................20

2.8 T rac er gas analysis .....................................................................................................20

Contents

3 Installation .................................................... ................................... 23

3.1 Locate the dry pumping system ......................................................................................24

3.2 Lubric ation ............................................................................................................... 25

3.3 Connect the dry pumping system to your vacuum/exhaust system .............................................25

3.4 Connect to your factory extraction system (optional) ............................................................27

3.5 Connect the nitrogen supply ..........................................................................................28

3.5.1 Flammable/pyrophoric materials ....................................................................................28

3.5.2 Gas purges ...............................................................................................................29

3.6 Leak-test the system ...................................................................................................29

3.7 Electrical supply ........................................................................................................29

3.7.1 Mains supply cable connection .......................................................................................31

3.8 Connect an additional RF earth (ground) (optional) ..............................................................35

3.9 Connect to your emergency stop circuit ............................................................................35

3.10 Connect and set up the cooling-water ..............................................................................36

3.11 Accessories ............................................................................................................... 37

3.12 Commission the system ................................................................................................37

3.13 Install additional safety equipment ..................................................................................38

4 Operation ........................................................................................ 39

4.1 Start-up ..................................................................................................................39

4.1.1 MicroTIM operation .....................................................................................................40

4.1.2 PDT operation ...........................................................................................................40

4.1.3 Front panel control operation ........................................................................................40

4.2 Status indicators ........................................................................................................40

4.3 Manual shut-down ......................................................................................................41

4.3.1 Shut-down modes .......................................................................................................41

4.3.2 MicroTIM operation .....................................................................................................41

4.3.3 PDT operation ...........................................................................................................41

4.3.4 Front panel control operation ........................................................................................41

4.4 Automatic shut-down ..................................................................................................42

4.5 Unplanned shut-down and alarms ....................................................................................43

4.6 Emergency stop .........................................................................................................44

4.7 Restart the pump after an emergency stop or automatic shut-down ..........................................44

4.8 Advanced control and monitoring ....................................................................................44

gea/0179/01/12

M561-00-880 Issue C

Contents

5 Maintenance ..................................................................................... 45

5.1 Safety and maintenance frequency ..................................................................................45

5.2 Relocate the system for maintenance ...............................................................................46

5.3 Draining the cooling water ............................................................................................47

5.4 General maintenance ..................................................................................................48

5.5 Inspect the connections, pipelines, cables and fittings ..........................................................48

5.6 Gas module configuration .............................................................................................49

5.6.1 iXH single mode and single mode+ ...................................................................................49

5.6.2 Multi mode ...............................................................................................................49

5.6.3 iXL variants ..............................................................................................................50

5.7 System operating temperature configuration ......................................................................50

6 Transportation, storage and disposal ........................................................ 51

6.1 Transportation ..........................................................................................................51

6.2 Storage ...................................................................................................................51

6.3 Disposal ...................................................................................................................51

7 Service, spares and accessories .............................................................. 53

7.1 Introduction .............................................................................................................53

7.2 S ervice ....................................................................................................................53

7.3 Ordering accessories ...................................................................................................54

Appendix A1 Pump display terminal .................................................................. 57

A1.1 LEDs .......................................................................................................................57

A1.2 Pump start / stop and control ........................................................................................57

A1.3 Warning / Alarm display and acknowledgement ...................................................................58

A1.4 Menus ..................................................................................................................... 58

A1.4.1 Normal menu ............................................................................................................58

A1.4.2 Status menu .............................................................................................................59

A1.4.3 SETUP menu .............................................................................................................60

A1.4.4 COMMANDS menu .......................................................................................................61

A1.4.5 INV FAULT HIST (Display Inverter Fault History) menu ...........................................................61

A1.4.6 SOFTWARE VERSION Display menu ...................................................................................62

A1.4.7 FIT ACCESSORY menu ..................................................................................................62

A1.4.8 IP Configuration menu .................................................................................................62

A1.4.9 Display attributes menu ...............................................................................................63

Appendix A2 Troubleshooting .......................................................................... 65

A2.1 Warnings .................................................................................................................65

A2.1.1 LED warning indicators ................................................................................................. 65

A2.1.2 PDT warnings ............................................................................................................65

A2.2 Alarms ....................................................................................................................68

A2.2.1 LED alarm indicators ...................................................................................................68

A2.2.2 PDT alarms ...............................................................................................................68

A2.3 Inverter warnings and alarms .........................................................................................70

A2.4 Other problems .........................................................................................................75

A2.4.1 Pump controller communications ....................................................................................75

For return of equipment, complete the HS Forms at the end of this manual.

Page ii © Edwards Limited 2012. All ri ghts reserved.

Edwards and the Edwards logo are trademarks of Edwards Limited.

M561-00-880 Issue C

Illustrations

Figure Page

1 Applications ............................................................................................................... 2

2 The front panel controls ................................................................................................ 3

3 Front view of pumping system ......................................................................................... 3

4 The controls/connectors on the rear of the pump ................................................................. 4

5 Centre of gravity and levelling foot loads ........................................................................... 9

6 Reduce the effective system footprint ..............................................................................25

7 Connecting the pump inlet ............................................................................................27

8 The Harting Han

9 The Harting 100A axial screw module cable-mounted connector ...............................................33

10 Customer connection kit - combination low volts iXL750 ........................................................34

11 Electrical connector locking mechanism ............................................................................35

A1 Pump display terminal .................................................................................................57

K 4/4 cable-mounted connector ...............................................................32

Tables

Contents

Table Page

1 General technical data .................................................................................................. 5

2 General technical data .................................................................................................. 6

3 Performance data ........................................................................................................ 7

4 Loading data (refer to Figure 5) ....................................................................................... 8

5 Nitrogen purge data for iXH and iXL systems ........................................................................ 9

6 Gas module types and flows ..........................................................................................10

7 Electrical data iXH100 to iXH1820/H/T .............................................................................11

8 General electrical data ................................................................................................14

9 Electrical connections ..................................................................................................15

10 Wire assembly according to VDE 0295 ...............................................................................16

11 Water cooling system data ............................................................................................17

12 Cooling water supply temperature ...................................................................................18

13 Water consumption data ...............................................................................................19

14 Heater data ..............................................................................................................20

15 Tracer gas test parameters ...........................................................................................20

16 Tracer gas test system parameters ..................................................................................20

17 Worst case test results .................................................................................................21

18 Extraction rates required by system variant .......................................................................22

19 Alarm actions ............................................................................................................42

20 Pump protection sensors ..............................................................................................43

21 Dry pump and booster temperature settings .......................................................................50

22 Accessories ...............................................................................................................54

23 Seismic bracket kits ....................................................................................................55

24 Exhaust check valve kits ...............................................................................................55

A1 Pump start control ......................................................................................................57

A2 Pump stop and control .................................................................................................58

A3 Normal menu ............................................................................................................58

A4 Normal menu ............................................................................................................59

A5 Status menu .............................................................................................................59

A6 SETUP menu .............................................................................................................60

A7 COMMANDS menu .......................................................................................................61

A8 GAS VALVES menu ......................................................................................................61

A9 INV FAULT HIST (Display Inverter Fault History) menu ...........................................................61

A10 FIT ACCESSORY menu ..................................................................................................62

M561-00-880 Issue C

Contents

A11 IP Configuration menu .................................................................................................62

A12 Display attributes menu ...............................................................................................63

A13 SELECT LINE (Normal display selection menu) .....................................................................63

A14 UNITS (Units to display) ................................................................................................63

A15 Warnings .................................................................................................................65

A16 Alarms ....................................................................................................................68

A17 Hexadecimal to digital conversion ...................................................................................70

A18 Inverter alarm codes ...................................................................................................71

A19 Inverter warnings codes ...............................................................................................72

A20 Inverter diagnostic display text ......................................................................................73

Associated publications

Publication title Publication number

Vacuum Pump and Vacuum System Safety P400-40-100 Semiconductor Pumping Application Guide P411-00-090

Trademark Credits

Han® is a registered trademark of Harting Electric GmbH EtherCon® is a registered trademark of Neutrik® AG Fomblin® is a registered trademark of Solvay Solexis SpA

Edwards and the Edwards logo are trademarks of Edwards Limited.

M561-00-880 Issue C

CAUTION

WARNING

1Introduction

1.1 Scope and definitions

This manual provides installation, operation and maintenance instructions for the Edwards iXH, iXL and pXH dry pumping systems. You must use your pumping system as speci fied i n th is man ual otherw is e the protecti on provided by the equipment may be impaired.

Read this manual before you install and operate your pump. Important safety information is highlighted as WARNING and CAUTION instructions; you must obey these instructions. The use of WARNINGS and CAUTIONS is defined below.

Warnings are given where failure to observe the instruction could result in injury or death to people.

Cautions are given where failure to observe the instruction could result in damage to the equipment, associated equipment and/or process.

Introduction

The units throughout this manual conform to the SI international system of units of measurement. The following warning labels are on the pump:

Warning - Refer to accompanying documentation.

Warning - Risk of electric shock. Warning - Heavy object.

Warning - Hot surfaces. Protective earth (ground).

Warning - Moving parts present.

Warning - Maximum angle between paired slings

Warning - use protective equipment. RF earth (ground).

M561-00-880 Issue C

Introduction

The following warnings only appear in this manual:

Warning - Risk of explosion. Warning - pressurised.

Material Safety Data Sheets for chemicals supplied by Edwards can be obtained by contacting Edwards, or on www.edwardsvacuum.com.

1.2 Applications

iXH, iXL and pXH pumping systems are intended for use on the Semiconductor, Solar and FPD processes shown in

Figure 1.

Figure 1 - Applications

iXH, iXL and pXH applications

ALD Metal Etch RTP

HDP-CVD Metrology SACVD

Implant Source Oxide etch Silicon Etch

Lithography PECVD Strip/Ashing

Load lock PVD Pre-Clean Transfer

LPCVD PVD Process

MOCVD RTA The iXL systems are intended for use on clean duty applications. If you use the system on an application for which it is not suitable, you may invalidate your warranties. If in doubt,

contact Edwards who will advise you as to the suitability of the system for any particular application.

1.3 Description

The iXH dry pump range has been developed to m ee t the demanding requirements for process pumping solutions in the Semiconductor, Flat Panel and Solar industries. The range se ts new standards for harsh process capability, reliability and reduced cost of ownership in lo w footprint packages.

The iXL pump range has been developed to meet cyclic loadlock duty applications used in the flat panel and solar industries.

The pXH booster systems are not intended for use as stand-alone units. Each system must be backed using a suitable Edwards dry pump selected to match process and performance specifications.

1.4 Priority of control

The pumping system can be controlled by a number of modules: the front control panel (refer to Figure 2), a Pump Display Terminal (PDT), the Edwards System Controller or by the tool through the MicroTIM or one of the serial interfaces. Only one of these can have control of the system at any one time. That is, once one of these has control of the system, control requests from the others are denied.

In addition to the control modules listed above, the pXH proximity booster can control or be controlled by the Edwards backing pump. C ontact Edwards for more information on how to control a pXH using an iXH or other Edwards pumping system.

The PDT indicates who is in control. LEDs are also provided on the rear pane l, front panel or PDT, which illuminate to indicate 'in control'.

Edwards and the Edwards logo are trademarks of Edwards Limited.

M561-00-880 Issue C

Item

Control/connector identification

1EMS button 2 Running LED (green) 3 Start button 4Stop button 5 Local control button 6 Local control LED (green) 7 Power LED (green) 8 Warning LED (amber)

9Alarm LED (red) 10 Green Mode LED (green) 11 PDT (Pump Display Terminal)

connection

Item

Control/connector identification

1 Front panel control 2 Levelling feet (4 off) 3Castors (4 off) 4 Seismic bracket (4 off if

fitted) 5 Pumped gas inlet connection 6 RF Earth (ground) cable 7Extraction port 8 Lifting eyebolts (4 off)

1.5 Active utility control

The Active Utility Control (Green Mode) function reduces utility consumption of the system while on stand-by. The Green Mode functionality is controlled by the on/off process signal from the Tool Interface Module. Contact Edwards for advice on application and activation.

Figure 2 - The front panel controls

Introduction

Figure 3 - Front view of pumping system

Note: iXH 100, iXH 200H and iXH 610 variants have only two eyebolts provided for lifting.

M561-00-880 Issue C

Item Control/connector identification

1 Ethernet LAN LED (green) 2 Ethernet link LED (yellow) 3 Ethernet connection 4Power LED (green) 5System interface 6 Warning LED (yellow) 7 Running and Alarm LEDs (2 colours,

either green or red) 8 Accessory interface 9 MicroTIM in control LED (green)

10 EMS interface

11 Micro TIM connection (if fitted) 12 Electrical supply connection 13 Electrical connector locking

mechanism 14 Nitrogen purge connection 15 Cooling water supply connection 16 Protective earth (ground) stud 17 Exhaust gas outlet connection 18 Cooling water return connection 19 RF earth (ground) stud

Item Control/connector identification

Introduction

Figure 4 - The controls/connectors on the rear of the pump

Edwards and the Edwards logo are trademarks of Edwards Limited.

Edwards and the Edwards logo are trademarks of Ed wards Limited.

2Technical data

2.1 General technical data

Table 1 - General technical data

Characteristics

Body dimensions

Pump

Units mm kg dB(A) mm/s kg force kg force mm

iXH100 784 x 390 x 526 260 < 70 < 1.5 < 20 < 4 ISO63 NW40 105 iXH200H 901 x 390 x 526 287 < 70 < 1.5 < 20 < 4 ISO63 NW40 105 iXH450H 1000 x 517 x 650 455 < 70 < 1.5 < 20 < 10 ISO63 NW40 105 iXH500H 1000 x 517 x 650 490 < 70 < 1.5 < 20 < 10 ISO63 NW40 105

iXH610 784 x 390 x 780 355 < 70 < 1.5 < 20 < 4 ISO100 NW40 105

iXH1210/H 784 x 390 x 780 413 - 430 < 70 < 1.5 < 20 < 4 ISO100 NW40 105

iXH1220H/T 901 x 390 x 780 455 - 460 < 70 < 1.5 < 20 < 4 ISO100 NW40 105

iXH1820/H/T 901 x 390 x 780 471 - 487 < 70 < 1.5 < 20 < 4 ISO160 NW40 105

iXH3030/T 915 x 517 x 966 619 - 624 < 70 < 1.5 < 20 < 10 ISO160 NW40 105

iXH3045H 1000 x 517 x 966 776 70 < 1.5 < 20 < 10 ISO160 NW40 105

iXH3050H 1000 x 517 x 966 811 70 < 1.5 < 20 < 10 ISO160 NW40 105 iXH4545HT 1000 x 517 x 966 814 70 < 1.5 < 20 < 10 ISO200 NW40 105 iXH4550HT 1000 x 517 x 966 849 70 < 1.5 < 20 < 10 ISO200 NW40 105

iXH6045H/T 1080 x 517 x 966 860 - 865 74 < 1.5 < 20 < 10 ISO250 NW40 105 iXH6050H/T 1080 x 517 x 966 899 70 < 1.5 < 20 < 10 ISO250 NW40 105

pXH4500 1086 x 517 x 531 400 < 70 < 1.5 < 20 < 10 ISO200 ISO160 - pXH6000 1086 x 517 x 531 435 < 70 < 1.5 < 20 < 10 ISO250 ISO160 -

iXL250Q 1092 x 390 x 830 515 <64 <1.5 <20 <10 ISO160 NW40 105 iXL500Q 1186 x 517 x 966 860 < 70 < 1.5 < 20 < 10 ISO160 NW50 105

iXL500R 1186 x 517 x 966 874 < 70 < 1.5 < 20 < 10 ISO160 NW50 105

Length x Width x

Height

(excludes exhaust

enclosure)

Mass (excluding packaging)

Noise level

(at ultimate)

Typical

vibration

level at inlet

Initial force to push the

pump

†

Sustained

force to push

the pump

†

Pump inlet

flange

(bolted)

Exhaust gas

outlet

Extraction

diameter

port

M561-00-880 Issue C

Technical data

Body dimensions

Pump

Units mm kg dB(A) mm/s kg force kg force mm

iXL750Q 1622 x 517 x 1031 918 <70 <1.5 22 <10 ISO160 NW50 105

iXL750R 1622 x 517 x 1031 976 <70 <1.5 22 <10 ISO160 NW50 105

Contact Edwards for installation drawings

†

Measured in laboratory on level concrete surface

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Item Description Rating Units

Operating conditions

Materials in contact with process gas

Degree of protection provided by enclosure

Length x Width x

Height

(excludes exhaust

enclosure)

Mass (excluding packaging)

Intended use Indoor Ambient temperature range:

Operating 5 to 40 °C Storage -45 to 55 °C

Maximum relative humidity: 80% for temperatures up to 31 °C decreasing linearly to 50% relative

Maximum operating altitude 2000 m Pollution degree 2 (IEC 61010) Pump, shaft and rotors Ca st Iron, Steel Seals PTFE and fluoroelastomer Gas system Stainless steel, aluminium, brass, PTFE and fluoroelastomer Enclosure protection when installed IP21D (IEC60529)

Table 1 - General technical data (continued)

Characteristics

Noise level

(at ultimate)

Table 2 - General technical data

Typical

vibration

level at inlet

humidity at 40 °C

Initial force to push the

pump

†

Sustained

force to push

the pump

†

Pump inlet

flange

(bolted)

Exhaust gas

outlet

Extraction

port

diameter

M561-00-880 Issue C

Edwards and the Edwards logo are trademarks of Ed wards Limited.

2.2 Performance data

Table 3 - Performance data

Characteristics

Pump

Units m

Typical peak pumping speed

/h mbar mbar

iXH100 100 < 3 x 10 iXH200H 215 < 3 x 10 iXH450H 500 < 3 x 10 iXH500H 500 < 3 x 10

iXH610 665 < 5 x 10

iXH1210/H 1025 - 1065 < 5 x 10

iXH1220H/T 1200 - 1250 < 5 x 10

iXH1820/H/T 1700 - 1900 < 5 x 10

iXH3030/T 2750 - 2900 < 5 x 10

iXH3045H 3225 < 5 x 10

iXH3050H 3200 < 5 x 10 iXH4545HT 4450 < 5 x 10 iXH4550HT 4220 < 5 x 10

iXH6045H/T 5000 - 5200 < 5 x 10 iXH6050H/T 5000 - 5200 < 5 x 10

pXH4500 N/A < 5 x 10 pXH6000 N/A < 5 x 10

iXL250Q 1900 < 1 x 10 iXL500Q 2150 < 5 x 10

iXL500R 3100 < 5 x 10

iXL750Q 2300 < 1 x 10

iXL750R 3450 < 1 x 10

Speed may be limited

†

Ultimate achieved when pXH used in conjunction with an appropriate backing pump. Please contact Edwards to discuss your application. The pXH does not have a shaft seal purge.

Ultimate

(shaft seal purge only)

-2

-3

-3†

-3

Maximum continuous inlet pressure

1000 1000

1000

1000 1000 1000 1000

1000

M561-00-880 Issue C

Technical data

M561-00-880 Issue C

2.3 Loading data

Table 4 - Loading data (refer to Figure 5)

Pump

Unitsmmmmmmmmmm kg kg kg kg

iXH100 697 295 165.5 311 280 80 59 51 70 iXH200H 814 403 165.5 311 261 77 76 66 68 iXH450H 924 443 220 427 323 122 112 106 115 iXH500H 924 422 220 427 324 137 115 109 129

iXH610 697 329 165.5 311 374 100 89 78 88

iXH1210/H 697 330 165.5 311 430 122 106 94 108

Edwards and the Edwards logo are trademarks of Edwards Limited.

iXH1220H/T 814 457 165.5 311 430 107 136 120 94

iXH1820/H/T 814 400 165.5 311 433 134 127 112 118

iXH3030/T 829 395 230 436 545 183 147 131 164

iXH3045H 924 422 220.5 427 534 218 183 171 203

iXH3050H 924 409 220 427 524 233 185 174 219 iXH4545HT 924 422 220.5 427 539 228 192 180 214 iXH4550HT 924 411 220.5 427 529 243 195 183 228

iXH6045H/T 1004 398 220.5 427 549 269 177 166 252 iXH6050H/T 1004 388 220.5 427 539 285 179 168 267

pXH4500 990 460.5 225 438 325 110 96 90 104 pXH6000 990 422 224.5 438 326 128 95 90 122

iXL250Q 1038 421 130.5 261 463 154 103 103 154 iXL500Q 1110 497 219 427 468 212 172 164 202

iXL500R 1110 497 219 427 468 241 195 185 229

iXL750Q 1547 730.9 169 338 512.2 215 244 244 215

iXL750R 1547 722.1 169 338 534.6 229 259 259 229

ABCDE1234

Dimension to centre of gravity Load at levelling foot position

Edwards and the Edwards logo are trademarks of Ed wards Limited.

Figure 5 - Centre of gravity and levelling foot loads

2.4 Nitrogen purge data

Table 5 - Nitrogen purge data for iXH and iXL systems

Characteristics Rating Units

Nitrogen supply pressure range 2.5-6.9 bar gauge

Nitrogen supply quality To ISO 8573 Nitrogen inlet connection 1/4 inch tube fitting

Note: pXH systems do not have a nitrogen purge facility.

M561-00-880 Issue C

36 - 100 psi gauge

Technical data

Edwards and the Edwards logo are trademarks of Edwards Limited.

Note: If you are not sure which gas module is fitted to your system, find the product code number on the label on the rear of the pump and then refer to the

product configurators at the start of this manual.

Table 6 - Gas module types and flows

For iXH systems:

Gas module type

Loadlock Shaft seal only 4 4 - - - - -

Single mode

Single mode +

Multi mode

Contact Edwards

Note: H variant pumps fitted with Single Mode+ modules include the innovative Gas Buster

Description

Gas ballast purge with harsh/medium manually selected

Gas ballast purge with harsh/medium manually selected + inlet purge

Gas ballast purge with electronically selected harsh/medium + inlet purge + exhaust purge

Module

sizes

available

44 44 28 - - - slm

96 96 56 - - - slm 133 133 88 - - - slm 204 204 133 - - - slm

44 44 28 60 - - slm

96 96 56 122 - - slm 133 133 88 173 - - slm 204 204 133 264 - - slm

44 44 22 60 94 110 slm

96 96 34 122 146 172 slm 133 133 65 173 183 223 slm 204 204

Total fl ow,

harsh

setting

Total flow,

medium

setting

inlet purge for improved powder handling.

Total flow with inlet

purge

264 254 314 slm

Total fl ow

with

exhaust

purge

Total flow with inlet

and exhaust

purge

Units

M561-00-880 Issue C

For iXL systems:

iXL systems are designed for use on clean applications only.

Edwards and the Edwards logo are trademarks of Ed wards Limited.

2.5 Electrical data

Table 7 - Electrical data iXH100 to iXH1820/H/T

Characteristics iXH100 iXH200H iXH450H iXH500H iXH610 iXH1210 iXH1210H iXH1220H/T iXH1820/H/T Units

Dry pump motor rating 4.5 7.5 11 11 4.5 4.5 7.5 7.5 7.5 kW Mechanical booster

motor rating Current rating

(200 - 230 V systems) Current rating

(380 - 460 V systems) Recommended branch

circuit fuse UL (200 - 230 V systems)

Recommended branch circuit fuse IEC (200 - 230 V systems)

Recommended branch circuit fuse UL (380 - 460 V systems)

Recommended branch circuit fuse IEC (380 - 460 V systems)

Min cable size for 200 230 V systems (or corresponding AWG size)

Min cable size for 380 460 V systems (or corresponding AWG size)

Mains connector Han

----1.94.54.54.54.5kW

21 38 44 44 28 28 38 38 38 A

11 20 23 23 14 14 20 20 20 A

25 45 55 55 35 35 45 45 45 A

25 40 45 45 30 30 40 40 40 A

15 25 30 30 20 20 25 25 25 A

15 20 25 25 15 15 20 20 20 A

6 (8)

K 4/4 Han® K 4/4 Han® K 4/4 Han® K 4/4 Han® K 4/4 Han® K 4/4 Han® K 4/4 Han® K 4/4 Han® K 4/4 -

10 (6) 10 (6) 10 (6) 6 (8)

6 (8)

10 (6) 10 (6) 10 (6) mm2 (AWG)

6 (8)

mm2 (AWG)

M561-00-880 Issue C

The minimum geometric wire gauge for Han® K 4/4 is 6mm2 and minimum AWG size is 8 AWG

Technical data

M561-00-880 Issue C

Table 7 - Electrical data iXH3030/T to pXH6000 (continued)

Characteristics iXH3030/T iXH3045H iXH3050H iXH4545HT iXH4550HT iXH6045H/T iXH6050H/T pXH4500 pXH6000 Units

Dry pump motor rating7.5111111111111 - - kW Mechanical booster

7.5 7.5 7.5 7.5 7.5 7.5 7.5 7.5 7.5 kW

motor rating Current rating

44 63 63 63 63 63 63 28 28 A

(200 - 230 V systems) Current rating

23 32 32 32 32 32 32 14 14 A

(380 - 460 V systems) Recommended branch

55 80 80 80 80 80 80 35 35 A circuit fuse UL (200 - 230 V systems)

Recommended branch

45 65 65 65 65 65 65 30 30 A circuit fuse IEC

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(200 - 230 V systems) Recommended branch

30 40 40 40 40 40 40 20 20 A circuit fuse UL (380 - 460 V systems)

Recommended branch

25 35 35 35 35 35 35 15 15 A circuit fuse IEC (380 - 460 V systems)

Min cable size for 200 -

10 (6) 25 (4) 25 (4) 25 (4) 25 (4) 25 (4) 25 (4) 6 (8)

6 (8)

mm2 (AWG) 230 V systems (or corresponding AWG size)

Min cable size for 380 -

6 (8)

10 (6)

†

10 (6)

†

10 (6)

†

10 (6)

†

10 (6)

†

10 (6)

†

6 (8)

mm2 (AWG) 460 V systems (or corresponding AWG size)

Mains connector Han

K 4/4 Han® 100 A

module

The minimum geometric wire gauge for Han® K 4/4 is 6mm² and minimum AWG size is 8 AWG

†

The minimum geometric wire gauge for Han® 100A module is 10mm² and minimum AWG size is 6 AWG

Han® 100 A

module

Han® 100 A

module

Han® 100 A

module

Han® 100A

module

Han® 100A

module

Han® K 4/4 Han® K 4/4 -

Edwards and the Edwards logo are trademarks of Ed wards Limited.

Table 7 - Electrical data iXL250Q, iXL500Q/R and iXL750Q/R (continued)

Characteristics iXL250Q iXL500Q iXL500R i XL750Q iXL750R Units

Dry pump motor rating 7.5 11 11 22 22 kW Mechanical booster motor rating 4.5 7.5 7.5 7.5 705 kW Current rating (200 - 230 V systems) 38 75 63 140 135 A Current rating (380 - 460 V systems) 20 40 32 78 74 A Recommended branch circuit fuse UL (200 - 230 V

systems) Recommended branch circuit fuse IEC (200 - 230 V

systems) Recommended branch circuit fuse UL (380 - 460 V

systems) Recommended branch circuit fuse IEC (380 - 460 V

systems) Min cable size for 200 - 230 V systems (or corresponding

AWG size) Min cable size for 380 - 460 V systems (or corresponding

AWG size) Mains connector for 200 - 230 V systems Han

Mains connector for 380 - 460 V systems Han® K 4/4 Han® 100 A

†

The minimum geometric wire gauge for Han® 100A module is 10mm² and minimum AWG size is 6 AWG

50 100 80 170 160 A

35 80 65 140 135 A

25 50 40 95 90 A

20 50 35 80 75 A

10 (8) 25 (4) 25 (4) 50 (1/0) 50 (1/0) mm

6 (8)

K 4/4 Han® 100 A

10 (6)

module

†

Han® 100 A

10 (6)

module

†

25 (4) 25 (4) mm2 (AWG)

Han® 200 A

module

Han® 100 A

module

Han® 200 A

module

Han® 100 A

module

(AWG)

M561-00-880 Issue C

Technical data

Description Rating Units

Supply voltage 3-phase either 200 - 230 or 380 - 460 (see rating plate) V a.c. Frequency 50/60 Hz Wiring configuration 3 wire plus earth (ground) Branch circuit protection requirement Current rating, refer to Table 7 Fuse Class gG (IEC 60269), UL class T, class J or class RK5, Bussmann type JJS or equivalent

Voltage tolerance range +/- 10% Installation category II (IEC 60664) Input supply voltage unbalance Should not exceed 2% when assessed over any one minute period Short circuit current rating (when installed with

Edwards and the Edwards logo are trademarks of Edwards Limited.

class T or class J fuses) Second protective earth (ground) conductor Must be fitted with cross-sectional area at least equal to phase conductor size up to 16 mm Maximum permitted overcurrent protection for

systems with the Han

for 200 - 230 V systems 60 A for 380 - 460 V systems 35 A

Typical earth leakage

For 200 - 230 V systems

- for iXL750Q and iXL750R

- for all other systems For 380 - 460 V systems

- for iXL750Q and iXL750R

- for all other systems

If you use overcurrent protection above the ra tings in Table 7 for systems with the Han® K 4/4, the minimum cable sizes no longer apply and you must ensure that the pump cable size is appropriately rated and in accordance with local legislation and electrical regulations. Ensure that cable size is compatible with the mains connector, refer to Table 9.

†

Typical earth leakage values were measured at steady-state conditions. Note that higher leakage currents ma y occur: i) under transient conditions such as power on or pump acceleration or ii) with abnormal supply configurations such as a missing or earthed phase or unbalanced supply voltages.

K 4/4 mains connector

†

t characteristic rate d to 600 V

200 kA

9 <5

18 <10

Table 8 - General electrical data

mA mA

M561-00-880 Issue C

Contact Edwards for more information about configuration requirements for earth leakage reduction.

Edwards and the Edwards logo are trademarks of Ed wards Limited.

Table 9 - Electrical connections

Description Mating Connector description / external supply rating Internal supply rating Mains connection

Refer to insta llation section for wiring diagram

Harting Han® Axial Screw module 100A (2 off required), 09 14 002 2753 10-25 mm

Harting Han® Axial Screw module 200A (3 off required), part number of mating

40 - 70 mm2 wire. Use fine stranded wire (VDE 0295 class 5, refer to Table 10)

PDT Interface (front) XLR type 5-way plug 24 V d.c. 0.2 A System Interface (rear) XLR type 5-way plug 24 V d.c. 0.75 A

Ethernet interface EMS interface

External emergency stop switch Pin 1 - supply, Pin 2 - return

Note: If there is no external connection a link plug must be fitted to operate the pump.

Internal emergency stop switch Pin 3 - common, Pin 4 - normally open 30 V a.c. 1 A, 60 V d.c. 0.55 A

Comms 24 V supply Pin 5 - supply, Pin 6 - 0 V supply common

Chassis

Refer to Table 7 for the mains connector fitted to each variant.

Connector is either:

Harting Han® K 4/4-F finger safe

09 38 008 2703, 6-16 mm

(VDE 0295 class 5, refer to Table 10), 8.9mm max insulation diameter

or 09 14 002 2751, 16-35 mm2 fine stranded wire

(VDE 0295 class 5, refer to Table 10)

half suitable for 25 - 40 mm

Standard RJ45 type or Neutrik® EtherCon® RJ45 (IEEE802.3i

wire is 09 14 001 2763 or 09 14 001 2762 for

XLR type 6-way plug

fine stranded wire

10 Base T Ethernet)

24 V d.c. 100 mA

24 V d.c. 0.75 A

M561-00-880 Issue C

Technical data

+ 61 hidden pages

Edwards iXH, iXL, pXH Instruction Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Contents

Illustrations

Tables

Associated publications

Trademark Credits

1Introduction

1.1 Scope and definitions

1.2 Applications

1.3 Description

1.4 Priority of control

1.5 Active utility control

2Technical data

2.1 General technical data

2.2 Performance data

2.3 Loading data

2.4 Nitrogen purge data

2.5 Electrical data