X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
Model SLA7840
5
Brooks® Model SLA7840 Remote Transducer
Pressure/Flow Controller
Model SLA7840D
Digital I/O DeviceNet
TM
Model SLA7840A
Analog I/O
Page 2
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
Model SLA7840
August, 2009
Essential Instructions
Read this page before proceeding!
Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because
these instruments are sophisticated technical products, you must properly install, use and maint ain them to ensure they
continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your
safety program when installing, using and maintaining Brooks Products.
•Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct
manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.
•If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.
•Follow all warnings, cautions and instructions marked on and supplied with the product.
•Inform and educate your personnel in the proper installation, operation and maintenance of the product.
•Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable
local and national codes. Connect all products to the proper electrical and pressure sources.
•T o ensure proper performance, use qualified personnel to inst all, operate, update, program and maintain the product.
•When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument.
Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at
risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.
•Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being
performed by qualified persons, to prevent electrical shock and personal injury .
Pressure Equipment Directive (PED)
All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the
Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland
and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.
•Section 1 of this manual contains important safety and operating instructions related to the PED directive.
•Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment.
•All Brooks Instrument Flowmeters fall under fluid group 1.
•Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED.
•Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).
ESD (Electrostatic Discharge)
Handling Procedure:
1. Power to unit must be removed.
2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal
device is installed, removed or adjusted.
3. Printed circuit cards must be transported in a conductive container . Boards must not be removed from protective enclosure
until immediately before installation. Removed boards must immediately be placed in protective container for transport,
storage or return to factory.
Comments
This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic
designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small
amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function
properly, exhibit early failure.
Page 3
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
Dear Customer ,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks
Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.
The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.
We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com
Y ours sincerely ,
Brooks Instrument
Model SLA7840
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Model SLA7840
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
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Page 5
ContentsInstallation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
4-3Model SLA7840 S t andard Restrictors .............................................................................................. 4-7
ii
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Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
1-1 Scope
1-2 Purpose
Section 1 Introduction
Model SLA7840
Thank you for purchasing a Brooks Instrument Model SLA7840 Remote
Transducer (RT). This manual Part Number 541B048AHG is a complete
installation and operation manual for your instrument.
This manual is organized into the following sections:
Section 1Introduction
Section 2Installation
Section 3Operation
Section 4Maintenance & T roubleshooting
Section ACE Certification
Back CoverWarranty , Local Sales/Service Cont act Information
1-3 Description
It is recommended that this manual be read in its entirety before attempting
to operate or repair the Brooks Model SLA7840.
Brooks Instrument’s Model SLA7840 is a 1-1/8" wide profile metal sealed
instrument that controls pressure while measuring flow rate. The Model
SLA7840 receives a remote pressure transducer signal, and using
adjustable integral PID control electronics and a control valve, maintains a
desired set pressure. In addition to the pressure function, the Model
SLA7840 provides a 0-5 V signal that is linear with mass flow rate. The
Model SLA7840 can also be configured as a mass flow controller for
calibration or test purposes.
Superior Valve Technology
The co-planar valve offers unmatched performance. Due to its simplified
construction, the valve exhibits superior repeatability , stability, and
response time. Instruments are less sensitive to pressure variations in the
process because of the larger valve control range. The co-planar valve
also offers lower leak-by rates compared to other metal sealed controllers.
These advancements ensure a more stable process over time.
Highly Adaptable Configurations
The 1-1/8" body offers a compact, space saving footprint. The SLA7840 is
easily retrofitable to existing gas box designs that utilize the traditional
1-1/2" body platform. Likewise, the all-digital electronics is adaptable and
allows the SLA7840 to serve as a direct replacement for existing analog
products bringing with them greatly improved accuracy and reliability .
1-1
Page 8
Section 1 IntroductionInstallation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
Model SLA7840
Broad Array of Communication Options
Brooks offers the Model SLA7840 with a traditional 0-5 volt analog option.
Brooks also offers control interface with DeviceNetTM, a high-speed
(up to 500k baud) digital communication network. Brooks’ communication
capabilities and device-profiles have been certified by the ODV A
(Open DeviceNet Vendor’s Association). Other network protocols are in
development. Talk to your Brooks representative about your specific
needs.
Reduced Cost of Ownership
The Model SLA7840 allows multi-gas and multi-range capabilities to
reduce customer inventory . Storage and pre-programming of up to 10 gas
calibrations easily permits users to switch between different gases and
ranges on a single device. Also, the greater control range provided by the
co-planar valve gives users the option to decrease the number of parts
needed to control their entire process.
August, 2009
TM
1-4 Specifications
WARNING
Do not operate this instrument in excess of the specifications
listed below. Failure to heed this warning can result in serious
personal injury and/or damage to the equipment.
PERFORMANCE CHARACTERISTICS: Flow
Flow Ranges**
Model SLA7840
Any range from 0-3 sccm to 0-30,000 sccm N2eq.
**Standard 0o and 101kPa (760 Torr). Per SEMI Guideline E12-96.
Flow Accuracy
±1.0% of rate, including linearity (20% to 100% full scale),
±0.2% of full scale (below 20% full scale.)
Flow Repeatability
±0.20% of rate
1-2
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Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
Section 1 Introduction
Model SLA7840
Analog I/O Pin Connections for 15-pin D-Connector:
Flow T emperature Sensitivity
Zero: Less than 0.035% F.S. per 0C
Sp an: Less than 0.1% of rate per 0C
Flow Settling Time
Less than 1 second to within ±2% full scale of final value for a
0-100% step per SEMI Guideline E17-91.
PERFORMANCE CHARACTERISTICS:
Pressure Ranges
Dependent upon remote transducer, maximum 500 p sig.
External Sensor Input
Suitable for pressure sensors with maximum 0-10 Vdc output signals.
Pressure Control Range
20:1
Pressure Settling Time
Less than 1 second typical for a 20-100% setpoint step with maximum 2%
overshoot. Actual pressure response highly dependent on system design.
RATINGS:
Operating Pressure
500 psig maximum
Pressure Equipment Directive (PED) 97/23/EC: Equipment falls under
Sound Engineering Practice (SEP).
Leak Integrity
Inboard to Outboard: 1x10
-10
atm scc/sec Helium max.
Ambient T emperature Limit s
Operating: 0°C to 60°C (32°F to 140°F)
Non-Operating: -25°C to 100°C (-13°F to 212°F)
Fluid Temperature Limits
0°C to 65°C (32°F to 149°F)
1-3
Page 10
Section 1 IntroductionInstallation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
Model SLA7840
PHYSICAL:
Materials of Construction
316L (V AR), 316L, and high-alloy ferritic stainless steel.
External/internal seals: Nickel
V alve seat: 316L st ainless steel - st andard
Internal Wetted Surface Finish: 32 Ra maximum
Analog I/O option:15-pin D-Connector, male:
DeviceNet I/O option: 5-pin Micro-Connector, male
Power Supply Volt age
Analog I/O option: +15 Vdc, +5% (traditional -15 Vdc pin is ignored)
DeviceNet I/O option: 1 1-25 Vdc
Page 11
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
Section 1 Introduction
Model SLA7840
Power Requirements:
Watt s, typicalWatt s, max.
Analog I/O option3.64.0
DeviceNet I/O option6.97.6
Setpoint Input (Analog I/O option only)
0-5 Vdc: Input will accept signals to 5.5 Vdc (110% F.S.).
Input resistance: 360 Kohm min.
Flow Output (Analog I/O option only)
0-5 Vdc into 2 Kohm minimum load.
Output will indicate process variable up to 5.5 Vdc
(1 10% F.S.).
Valve Override Signal (Analog I/O option only)
Left floating/unconnected – instrument controls valve to command setpoint
Connected to signal at or above 5.0 Volts (maximum 16 Vdc)
– valve is forced open
Connected to signal at or below 0.0 Volts (minimum -1 Vdc)
– valve is forced closed
5 Volt Reference Signal (Analog I/O option)
For use with potentiometer command setpoint input
±0.2%, into 1K ohm (minimum load)
Mode Select Signal
Select whether to control in external sensor mode (pressure) or flow mode.
Open (disconnected) = unit operation in flow control mode
Closed (grounded) = unit operation in pressure control mode
External Sensor Input
0-10 Vdc: Input will accept signals to 10.2 Vdc.
Input resistance = 480 Kohm nominal.
1-5
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Section 1 IntroductionInstallation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
Model SLA7840
August, 2009
Figure 1-1 Model SLA7840A Analog I/O Controller with 1/4" VCR Connections
Figure 1-2 Model SLA7840D Digital I/O DeviceNet Controller with 1/4" VCR Connections
1-6
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Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
2-1 General
2-2 Receipt of Equipment
Section 2 Installation
Model SLA7840
This section provides installation instructions for the Brooks Model SLA7840
Remote Transducer. Figures 1-1 and 1-2 show the Model SLA7840
dimensions, gas connections and electrical connection locations for an RT.
When the instrument is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability .
A report should be submitted to your nearest Product Service Department.
Brooks Instrument
407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel (215) 362 3700
Fax (215) 362 3745
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com
Remove the envelope containing the packing list. Outside of your clean area,
carefully remove the equipment from the packing case. Make sure spare
parts are not discarded with the packing material. Inspect for damaged or
missing parts.
This device has been assembled, calibrated and double-vacuum bagged in
a Class 100 clean room. In your semi-clean area,remove the outer bag
only . Pass your Model SLA7840 Ultra-Clean Metal Seal Remote
Transducer Controller into your clean area. Remove the second clean
room compatible bag only when the equipment is ready to be tested and/or
installed in your clean system.
If intermediate or long-term storage of equipment is required, it is
recommended that the equipment be stored in accordance with the
following:
a. In the original vacuum bag and shipping container.
b. In a sheltered area with the following conditions:
1. Ambient temperature 21°C (70°F) nominal, 40°C (104°F) maximum
and 7°C (45°F) minimum.
2. Relative humidity 45% nominal, 60% maximum and 25% minimum.
2-1
Page 14
Section 2 Installation
Model SLA7840
2-4 Return Shipment
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
Prior to returning any instrument to the factory , contact your nearest Brooks
location for a Return Materials Authorization Number (RMA#). This can be
obtained from one of the following locations:
Brooks Instrument
407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel (215) 362 3700
Fax (215) 362 3745
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com
Brooks InstrumentBrooks Instrument
Neonstraat 31-4-4 Kitasuna Koto-Ku
6718 WX Ede, NetherlandsTokyo, 136-0073 Japan
P.O. Box 428Tel +81 (0) 3 5633 7100
6710 BK Ede, NetherlandsFax +81 (0) 3 5633 7101
Tel +31 (0) 318 549 300Email: BrooksAs@BrooksInstrument.com
Fax +31 (0) 318 549 309
E-mail: BrooksEu@BrooksInstrument.com
2-5 Transit Precautions
2-6 Removal from Storage
Instrument must have been purged in accordance with the following:
Completion of form RPR003-1, Brooks Instrument Decontamination
Statement. A copy of this form can be downloaded from the Brooks website
www.brooksinstrument.com or is available from any Brooks Instrument
location listed above. This is required before any Brooks Personnel can
begin processing. Copies of the form can be obtained from any Brooks
Instrument location listed above. Provide a Material Safety Data Sheet
(MSDS) for the fluid(s) used in the instrument.
To safeguard against damage during transit, transport the instrument to the
installation site in the same container used for transportation from the
factory if circumstances permit.
2-2
Upon removal from storage, a visual inspection should be conducted to
verify the condition of the equipment is “as received.” If the equipment has
been in storage in conditions in excess of those recommended (See
Section 2-3), the device should be subjected to a pneumatic pressure test
in accordance with applicable vessel codes. To maintain the ultra-clean
integrity , this service should be performed by the factory or one of the
authorized service centers.
Page 15
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
2-7 Gas Connections
2-8 In-Line Filter
Section 2 Installation
Model SLA7840
Standard inlet and outlet connections supplied on the Model SLA7840 are
1/4"(M) VCR or Downport surface mount per Semi 2787. Prior to
installation ensure all piping is clean and free from obstructions. Install
piping in such a manner that permits easy access to the instrument if
removal becomes necessary .
It is recommended that an in-line filter be installed upstream from the
mass flow controller to prevent the possibility of any foreign material
entering the flow sensor or control valve. The filtering element should be
replaced periodically or ultrasonically cleaned.
Table 2-1 Recommended Filter Size
Maximum Flow RateRecommended Filter
100 sccm1 micron
500 sccm2 microns
1 to 5 slpm7 microns
10 to 30 slpm15 microns
2-9 Installation
Recommended installation procedures:
a. The Model SLA7840 RT should be located in a clean, dry
atmosphere relatively free from shock and vibration.
b. Leave sufficient room for access to Self-zero function push-button.
c. Install in such a manner that permits easy removal if the instrument
requires servicing.
d. The Model SLA7840 RT can be installed in any position. However,
mounting in orientations other than the original factory calibration
(see calibration data sheet supplied with the instrument) can result in
a ±0.2% maximum full scale shift after rezeroing.
2-3
Page 16
Section 2 Installation
Model SLA7840
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
e. When installing a controller with 1/4" (m) VCR end fittings and with full
scale flow rates of 10 slpm or greater, be aware that sharp, abrupt angles
in the system piping directly upstream of the device may cause a small
shift in accuracy. If possible, have at least ten pipe diameters of straight
tubing upstream of the controller.
2-10 Electrical Interface (Analog I/O)
The Model SLA7840 RT is controlled using analog 0-5 Vdc signals. The
minimum set of connections which must be made to the Model SLA7840
RT includes +15 Vdc, supply common, and a setpoint signal. The setpoint
signal is supplied as a 0 to 5 Vdc analog signal. All signals are supplied via
the 15-pin D-Connector. Refer to Figures 2-2, 2-3 and 2-4 for connections.
The Model SLA7840 RT electrical interface is designed to facilitate lowloss, quiet signal connections. Separate returns (commons) are supplied
for the analog setpoint, analog flow signal, and the power supply . These
commons are electrically connected together on the Model SLA7840 RT
PC board.
Voltage I/O Version
• Signal Common
• Signal Output
• +15 Vdc Supply
• Setpoint Input
• Setpoint Common
• Supply Common
2-4
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Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
Section 2 Installation
Model SLA7840
NOTICE
The Brooks (electric/electronic) equipment bearing the CE mark
has been successfully tested to the regulations of the Electro
Magnetic Compatibility (EMC directive 89/336/EEC). Special
attention is required when selecting the signal cable to be used
with CE marked equipment.
Brooks supplies high quality cables which meet the
specifications for CE certification. If you provide your own signal
cable you should use a cable which is completely screened with a
100% shield. D-Connectors should also be shielded using a metal
shield. If applicable, metal cable glands must be used to provide
cable screen clamping. The cable screen should be connected to
the metal shell or gland and shielded at both ends over 360
degrees. The shield should be terminated to an earth ground. See
Appendix A for CE Certification of Mass Flow Equipment.
2-11 Operation Check Procedure (Analog I/O)
a. Mount the RT in its final orient ation.
b. Apply power to the RT and allow approximately one hour for the
instrument to warm up and stabilize its temperature.
c. Do NOT supply gas to the RT. Ensure that the differential pressure
across the RT is 0 psid. Ensure that the RT is set for flow mode.
d. Check the RT zero output signal.
e. The analog output signal should be equivalent to 0.0 ± 0.2% FS
(0.000 ± 0.010 Vdc). If the zero exceeds one of these limits, follow
the re-zeroing procedure in Section 3-5.
f.Turn on the gas supply. A positive flow signal may be present due to
valve leak-thru. At 0% setpoint the flow signal output < 0.5% FS
0.025 Vdc.
g. If flow signal at 0% setpoint is > 0.5%, then there is too much
leak-through across the valve, and the RT would need a valve
valve adjustment.
h. Supply a setpoint voltage between 1 and 5 Vdc.
i.Check the RT analog output signal. The output voltage signal
should match the setpoint voltage (± 20mV) within 10 seconds after
the setpoint is changed.
j.If flow output signal does not match setpoint, and pressure settings
are correct, this could indicate a problem in the RT. A secondary
issue could be the gas type. When checking with a surrogate gas,
ensure that there is enough pressure to the RT in order to flow the
correct amount of the surrogate gas.
Example:
Checking an RT calibrated for 100 sccm SF6 (sulfur hexafluoride). The
sensor factor using N2 (nitrogen) is 0.27, therefore the equivalent N
needed is 100/0.27 = 370.4 sccm. This may require a pressure increase
2
2-5
Page 18
Section 2 Installation
Model SLA7840
2-12 Electrical Interface (DeviceNet I/O)
Power and network signals are interfaced to the MFC through the standard
5-pin Micro-connector on the device. This connector is specified in the
DeviceNet Specification, Vol. 1, Section 9-3.6.3 and is defined as a male,
sealed, micro-style connector . The figure below illustrates the electrical
connections to the device.
Figure 2-2 15-Pin D-Connector Shielded Cable Hookup
Diagram - Voltage I/O Version
Figure 2-3 Common Electrical Hookups for 15-Pin D-Connector Voltage I/O Version
2-6
Page 19
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
3-1 Overview
This section contains the following information:
• Theory of Operation
• Functional Description
3-2 Theory of Operation for Flow Measurement
The thermal mass flow measurement system consists of two components:
the restrictor and the flow sensor. Figure 3-4 contains a diagram of the flow
stream through the RT with an enlarged view of the flow sensor . Gas flow
entering the RT is sep arated into two paths; one straight through the
restrictor and the other through the flow sensor . This is represented in
Figure 3-1 where the total flow A+B enters the R T and is separated into
streams A and B. The streams are joined again at the far side of the
restrictor.
Section 3 Operation
Model SLA7840
The separation of the flow streams is caused by the restrictor . During flow
conditions there will be a pressure differential across the restrictor which
forces gas to flow in the sensor. The pressure difference caused by the
restrictor varies linearly with total flow rate. The sensor has the same linear
pressure difference versus flow relationship. The ratio of sensor flow to the
flow through the restrictor remains constant over the range of the RT
(A/B = constant). The full scale flow rate of the RT is established by
selecting a restrictor with the correct pressure differential for the desired
flow.
The flow sensor is a very narrow , thin-walled stainless steel tube. Onto this
tube are built upstream and downstream temperature sensing elements on
either side of a heating element. Constant power is applied to the heater
element, which is located at the midpoint of the sensor tube. During noflow conditions, the amount of heat reaching each temperature sensor is
equal, so temperatures T1 and T2 (Fig. 3-1) are equal. Gas flowing
through the tube carries heat away from the upstream temperature sensor
and toward the downstream sensor. The temperature difference, T2 - T1,
is directly proportional to the gas mass flow. The equation is:
DT = A x P x Cp x m
Where,
DT = Temperature difference T2 - T1 (°K)
A = Constant of proportionality (S
2
-°K2/kJ2)
P = Heater Power
Cp = specific heat of the gas at constant pressure (kJ/kg - °K)
m = Mass Flow (kg/s)
A bridge circuit and a dif ferential amplifier interpret the temperature
difference and generate an electrical signal directly proportional to the gas
mass flow rate.
3-1
Page 20
Section 3 Operation
Sensor
Flow A
Flow B
Model SLA7840
3-3 Theory of Operation for Remote Transducer
A user supplied pressure sensor, with a full scale output signal of 5 or
10 Vdc, monitors the pressure in a vessel or a feed or exhaust line from
the vessel. The control electronics in the Model SLA7840 compares the
pressure signal to a setpoint and acts to regulate the flow through the
integral solenoid control valve to stabilize the pressure at the setpoint. An
integral mass flow sensor identical in design to the Brooks Model SLA7840
provides a 5 Vdc full scale signal proportional to the flow through the
control valve. A system block diagram is shown in Figure 3-1.
The integration of mass flow sensor , control electronics and control valve
into one unit results in a compact size. The mounting dimensions are
comparable to a mass flow controller . Refer to Figure 3-2.
In the upstream pressure regulation mode shown in Figure 3-4, the
pressure controller is placed at the outlet of the pressure vessel. The
pressure in the process upstream of the controller will be constant
independent of downstream variation. Pressure control takes place at the
outlet side of the pressure vessel.
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
TMF principle of measurement
TMF principle of measurement
TMF principle of measurement
T1
Upstream
Temperature
Sensor
Inlet
Flow A & B
Figure 3-1 Flow Sensor Operational Diagram
Sensor
Sensor
Flow A
Flow A
Heater
Heater
Restrictor
Flow B
Flow B
T2
Downstream
Temperature
Sensor
Valve (if equipped)
Outlet
Flow A & B
3-2
Page 21
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
Section 3 Operation
Model SLA7840
Figure 3-2 Model SLA7840 System Block Diagram
Figure 3-3 Model Typical Application of Downstream Controller
3-3
Page 22
Section 3 Operation
Model SLA7840
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
Figure 3-4 Typical Application of Upstream Controller
3-4 Analog Mode of Operation
A. Functional Description
The analog interface is consistent with other Brooks analog RTs. This
includes a 0-5 volt setpoint input, 0-5 volt flow signal output and V alve
Override input. Before operating the Model SLA7840, apply power and
warm-up the instrument for approximately one hour . After warm-up, apply
gas pressure then proceed by following the instructions in the following
sections.
B. Analog Setpoint
This input allows the user to establish the RT setpoint. The usable range of
this input is from 0 to 5.5 Vdc which corresponds to 0 to 1 10% of the RT
full scale flow rate. Setpoints below 50 mV will be treated as 0 volt
setpoints. For setpoints below 0 Vdc the R T behaves as if a 0 Vdc setpoint
is present. Setpoints above 5.5 Vdc will cause a setpoint of at least 1 10%
FS.
C. Analog Flow Signal
This output is used to indicate the flow signal. The range of this signal is
from -0.5 to 5.5 Vdc, with the range of 0 to 5.5 Vdc corresponding to a
calibrated flow signal of 0 to 1 10% of the full scale flow rate. A negative
flow signal indicates reverse flow through the device, but is NOT
calibrated. The analog flow signal is capable of resolving signals to 1.0 mV.
3-4
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Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
Section 3 Operation
Model SLA7840
D. Valve Override
This input allows the valve to be forced to its most closed state or its most
open state, regardless of setpoint. If this input is not electrically connected
the MFC will operate according to the current values of the other MFC
inputs. If this input is held at 0 Vdc, the valve will be forced to its most
closed state. If this input is held to +15 Vdc the valve will be forced to its
most open state.
E. Mode Select Pin
Pin 13 on the 15 pin 'D' connector allows for selection of RT operating
mode. The Mode Select Pin is controlled similar to operating a switch. If
the connection to the pin is 'OPEN', then the RT will operate in its flow
control mode. If the connection to the pin is 'CLOSED' to Signal Common
(Pin #10), then the RT will operate in its pressure control mode.
When the mode select pin changes state, the device performs any
required processing to change the mode, then returns to normal operation.
Typical time required to change modes is approximately 0.5 seconds.
3-5 DeviceNet Mode of Operation
NOTE: It is recommended to change operating modes during no-flow
conditions.
F. Zeroing the RT (Self-zero)
It may be desirable to re-zero the flow sensor if it is operated at its
temperature extremes or if it is positioned in an attitude other than that
specified on the customer order.
Note: Before zeroing the instrument, zero pressure differential MUST be
established across the device. If there is pressure across the device during
the zero process, any detected flow through the sensor will be
misinterpreted as the zero flow reading. This will result in calibration
inaccuracy during normal operation.
Once zero differential pressure is established and verified, press the
recessed, momentary push-button (Self-zero button) located on the side of
the device (see Fig. 3-2) to start the Self-zero function.
The zero process requires approximately 200 msec. During this time, the
device will set its output signal to 0.0 Vdc.
For information on DeviceNet capabilities for Brooks Model SLA7840 refer
to the DeviceNet Supplemental Instruction Manual (X-DPT -DeviceNetSLA7000-RT-eng).
3-5
Page 24
Section 3 Operation
Model SLA7840
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
3-6 Calibration Data Set s
Figure 3-5 Externally Accessible Adjustment
The Model SLA7840 is capable of storing up to 10 sets of gas calibration
data in either analog or DeviceNet modes of operation.
In the analog mode, the user must use the Brooks Service ToolTM to switch
between the various active gas calibration data sets. For more information
about the Brooks Service Tool, please contact your nearest Brooks sales
Representative.
In the DeviceNet mode of operation, the user may use the DeviceNet
protocol itself to switch between active gas calibration data sets. For
detailed information about performing this and other DeviceNet operations,
please reference the Brooks DeviceNet Supplemental Manual for Remote
Transducer Pressure/Flow Controllers.
3-6
Page 25
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
4-1 Overview
Section 4 Maintenance
& Troubleshooting
Model SLA7840
No routine maintenance is required on the Model SLA7840. If an in-line
filter is used, the filtering elements should be periodically replaced. This
section provides the following information:
• Troubleshooting
• Application Information
4-2 Troubleshooting
WARNING
If it becomes necessary to remove the controller from the system
after exposure to toxic, pyrophoric, flammable or corrosive gas,
purge the controller thoroughly with a dry inert gas such as
Nitrogen before disconnecting the gas connections. Failure to
correctly purge the controller could result in fire, explosion or
death. Corrosion or contamination of the mass flow controller,
upon exposure to air, may also occur.
4-1
Page 26
Section 4 Maintenance
& Troubleshooting
Model SLA7840
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
This section contains suggestions to help diagnose RT related problems in
the gas distribution system and answers commonly asked questions.
As reference, a Bench Flow Circuit can be set up similar to Figure 4-1.
Flow Mode Issues
a. Problem: Flow/flow signal doesn’t reach setpoint.
Failure of the flow rate or flow signal to achieve the setpoint could be
caused by a number of factors:
1. Insufficient pressure drop across the Model SLA7840 RT (low or no
pressure). If there is not enough pressure differential across the RT, it is
impossible for the RT’s valve orifice to pass the full scale flow rate. To
check for this condition, compare the actual inlet/outlet pressure drop
with that specified on the order. Increase the pressure if necessary.
2. Clogged sensor tube. If the RT sensor tube is clogged, the flow signal
will be very low or zero while the actual flow will be at the valve’s
maximum rate.
3. Clogged restrictor. If the RT restrictor becomes clogged, a much
larger portion of the flow stream will pass through the sensor rather
than going straight through the restrictor. The symptom of this condition
is a substantially reduced actual flow with a flow signal that matches the
setpoint.
4. If the Valve Override pin is active, the valve will be forced open or
closed. Set this pin to its normal level before setting a setpoint.
5. If flow output signal does not match setpoint, and pressure settings are
correct, this could indicate a problem in the RT. A secondary issue
could be the gas type. When checking with a surrogate gas, ensure
that there is enough pressure to the RT in order to flow the correct
amount of the surrogate gas.
b. Problem: Flow rate in excess of 100% at zero setpoint.
1. Valve Override pin set to open.
c. Problem: Flow/flow signal ‘unstable’.
Model SLA7840 RT performance is tuned during calibration at the
conditions specified on the order. If the conditions in use (inlet and outlet
pressure, temperature, attitude, gas or mixture type) are different or
become different over time, the RT may not perform as it did when it left
the factory . There are numerous solutions to this situation:
4-2
1. Restore the conditions to the values as they appear on the order.
Page 27
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
Section 4 Maintenance
& Troubleshooting
Model SLA7840
2. ‘Adaptive valve control’ the RT . The RT contains a function which
allows it to learn about its environment. Adaptive valve control helps to
match the valve performance to the gas, pressure, and temperature of
actual use. The RT must be returned to the factory or a trained field
service technician can modify "Adaptive V alve Control" settings.
d. Question: What is the purpose of the push-button on the side of the
MFC?
Answer: This push-button is used to start a Self-zero function, do
NOT press it unless you are performing this function as described in
Section 3-5.
Figure 4-1 Bench Troubleshooting Circuit
4-3
Page 28
Section 4 Maintenance
& Troubleshooting
Model SLA7840
Table 4-1 Sensor Troubleshooting
SENSOR
SCHEMATIC
Remove the sensor connector from the PC Board for this procedure.
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
PIN
NO.FUNCTION
1Heater
Upstream
2Temperature
Sensor (Su)
Downstream
3Temperature
Sensor (Sd)
4Sensor Common
5Heater Common
6Thermistor
7Thermistor
OHMMETER CONNECTIONRESULT IF ELECTRICALLY FUNCTIONAL
Open circuit on ohmmeter. If either heater (1) or
Pin 1 or 4 to meter bodysensor common (4) are shorted, an ohmmeter
reading will be obtained.
Pin 4 to Pin 2Nominal 1100 ohms reading, depending on
Pin 4 to Pin 3
Pin 5 to Pin 1Nominal 1000 ohm reading.
Pin 6 to Pin 7Nominal 580 ohm reading.
temperature and ohmmeter current.
4-4
Page 29
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
4-3 Gas Conversion Factors
Section 4 Maintenance
& Troubleshooting
Model SLA7840
If a RT controller is operated on a gas other than the gas it was calibrated
with, a scale shift will occur in the relation between the output signal and
the mass flow rate. This is due to the difference in heat capacities between
the two gases. This scale shift can be approximated by using the ratio of
the molar specific heat of the two gases or by sensor conversion factor .
Consult factory or nearest Brooks Instrument rep for a list of sensor
conversion factors is given in Table 4-5. To change to a new gas, multiply
the output reading by the ratio of the gas factor for the desired gas by the
gas factor for the calibration gas used.
Example:
The controller is calibrated for Nitrogen.
The desired gas is Carbon Dioxide (CO2)
The output reading is 75 sccm when Carbon Dioxide is flowing
Then 75 x 0.740 = 55.5 sccm of (CO2)
In order to calculate the conversion factor for a gas mixture, the following
formula should be used:
Where,
P1 = percentage (%) of gas 1 (by volume)
P2 = percentage (%) of gas 2 (by volume)
Pn = percentage (%) of gas n (by volume)
Example: The desired gas is 20% Helium (He) and 80% Chlorine (Cl) by
volume. The desired full scale flow rate of the mixture is 20 slpm. Sensor
conversion factor for the mixture is:
Since 2 gases are in the mix;
Nitrogen equivalent flow = 20/.945 = 21.16 slpm Nitrogen
It is generally accepted that the mass flow rate derived from this equation
is only accurate to ±5%. The sensor conversion factors given in Table 4-3
are calculated based on a gas temperature of 21°C and a pressure of one
atmosphere. The specific heat of most gases is not strongly pressure, and/
or temperature, dependent. However , gas conditions that vary widely from
these reference conditions may cause an additional error due to the
change in specific heat caused by pressure and/or temperature.
4-5
Page 30
Section 4 Maintenance
& Troubleshooting
Model SLA7840
4-4 Orifice Sizing
4-5 Restrictor Sizing
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
The flow controller's orifice is factory-sized to a preselected gas, operating
pressure and flow range. Note that the orifice is marked with its size in
thousandths of an inch. When changing the gas operating pressure (inlet
or outlet), or flow range consult the factory for re-sizing information
Table 4-2 Orifice Capacities
Orifice Size (inches)Minimum Flow Rate (sccm)
0°C(21.1°C)
0.00135.3(5.7)
0.00212.5(13.5)
0.00339.2(42.2)
0.00482.5(88.9)
0.0055190(205)
0.007374(403)
0.010748(806)
0.0141364(1469)
0.0202673(2879)
0.0326490(6991)
0.04812980(13980)
0.06222000(2879)
0.07831900(34400)
Inlet Pressure = 10 psig
Outlet Pressure = 10 inches of water (0.4 psig) or less
Note: Flow Rate based on Nitrogen
The restrictor assembly is a ranging device for the sensor portion of the
controller. It creates a pressure drop which is linear with flow rate. This
diverts a sample quantity of the process gas flow through the sensor . Each
restrictor maintains a ratio of sensor flow to restrictor flow , however, the
total flow through each restrictor is different. Different restrictors (active
area) have different pressure drops and produce controllers with different
full scale flow rates. For a discussion of the interaction of the various parts
of the controller, you are urged to review Section 3-2, Theory of Operation.
If the restrictor assembly has been contaminated with foreign matter , the
pressure drop versus flow characteristics will be altered and it must be
cleaned or replaced. It may also be necessary to replace the restrictor
assembly when the mass flow controller is to be calibrated to a new flow
rate.
Restrictor assembly replacement should be performed only by trained
personnel. Consult Factory / Service center.
Restrictors
The Model SLA7840 remote transducer controller uses two types of
restrictor assemblies depending on full scale flowrate and expected service
conditions.
1. Wire mesh for Nitrogen equivalent flow rates above 3.4 slpm. These
restrictor assemblies are made from a cylinder of wire mesh and are
easily cleaned if they become contaminated in service.
2. Anti-Clog Laminar Flow Element (A.C.L.F.E.) - This type of restrictor
assembly is used for Nitrogen equivalent flow rates less than 3.4 slpm.
4-6
Page 31
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
If a mixture of two or more gases is being used, the restrictor selection
must be based on a Nitrogen equivalent flow rate of the mixture.
Example:
The desired gas is 20% Helium (He) and 80% Chlorine (Cl) by volume.
The desired full scale flow rate of the mixture is 20 slpm. Sensor
conversion factor for the mixture is:
Nitrogen equivalent flow = 20/.945 = 21.16 slpm Nitrogen. In this example
a Size 4 Wire Mesh Assembly would be selected.
Range
NOTES: • If two sizes are allowed because of overlap, select the larger size.
• Restrictor size not required to enter order.
4-7
Page 32
Section 4 Maintenance
& Troubleshooting
Model SLA7840
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
THIS PAGE
INTENTIONALLY
LEFT BLANK
4-8
Page 33
Installation and Operation Manual
Section A CE Certification
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
Dansk
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Emne:Tillæg til instruktions manual.
Reference:CE mærkning af Masse Flow udstyr
Dato:Januar-1996.
Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj
(EMC direktivet 89/336/EEC).
Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.
Kvaliteten af signal kabler og stik:
Brooks lever kabler af høj kvalitet, der imødekommer specifikationerne til CE mærkning.
Hvis der anvendes andre kabel typer skal der benyttes et skærmet kabel med hel skærm med 100% dækning.
Forbindelses stikket type “D” eller “cirkulære”, skal være skærmet med metalhus og eventuelle PG-forskruninger skal enten
være af metal eller metal skærmet.
Skærmen skal forbindes, i begge ender, til stikkets metalhus eller PG-forskruningen og have forbindelse over 360 grader.
Skærmen bør være forbundet til jord.
“Card Edge” stik er standard ikke af metal, der skal derfor ligeledes benyttes et skærmet kabel med hel skærm med 100%
dækning.
Skærmen bør være forbundet til jord.
Forbindelse af stikket; venligst referer til vedlagte instruktions manual.
Med venlig hilsen,
Model SLA7840
Deutsch
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Subject:Nachtrag zur Bedienungsanleitung.
Referenz:CE Zertifizierung für Massedurchflußgeräte
Datum:Januar-1996.
Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Verträglichkeit (EMC Richtlinie 89/336/
EEC) erhalten die Brooks-Geräte (elektrische/elektronische Komponenten) das CE-Zeichen.
Bei der Auswahl der Verbindungskabel für CE-zertifizierte Geräte sind spezielle Anforderungen zu beachten.
Qualität der Verbindungskabel, Anschlußstecker und der Kabeldurchführungen
Die hochwertigen Qualitätskabel von Brooks entsprechen der Spezifikation der CE-Zertifizierung.
Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten, daß eine
100 %igenSchirmababdeckung des Kabels gewährleistet ist.
·“D” oder “Rund” -Verbindungsstecker sollten eine Abschirmung aus Metall besitzen.
Wenn möglich, sollten Kabeldurchführungen mit Anschlußmöglichkeiten für die Kabelabschrimung verwendet werden.
Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchführungen über den vollen Umfang von
360 ° anzuschließen.
Die Abschirmung ist mit dem Erdpotential zu verbinden.
Platinen-Steckverbindunger sind standardmäßige keine metallgeschirmten Verbindungen. Um die Anforderungen der CE-
Zertifizierung zu erfüllen, sind Kabel mit einer 100 %igen Schirmababdeckung zu verwenden.
Die Abschirmung ist mit dem Erdpotential zu verbinden.
Die Belegung der Anschlußpins können Sie dem beigelegten Bedienungshandbuch entnehmen.
A-1
Page 34
Section A CE Certification
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
Model SLA7840
English
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Subject:Addendum to the Instruction Manual.
Reference:CE certification of Mass Flow Equipment
Date:January-1996.
The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro
Magnetic Compatibility (EMC directive 89/336/EEC).
Special attention however is required when selecting the signal cable to be used with CE marked equipment.
Quality of the signal cable, cable glands and connectors:
Brooks supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used
providing cable screen clamping.
The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to a earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE
certification.
The shield should be terminated to a earth ground.
For pin configuration : Please refer to the enclosed Instruction Manual.
August, 2009
Español
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Asunto:Addendum al Manual de Instrucciones.
Referencia:Certificación CE de los Equipos de Caudal Másico
Fecha:Enero-1996.
Los equipos de Brooks (eléctricos/electrónicos) en relación con la marca CE han pasado satisfactoriamente las pruebas
referentes a las regulaciones de Compatibilidad Electro magnética (EMC directiva 89/336/EEC).
Sin embargo se requiere una atención especial en el momento de seleccionar el cable de señal cuando se va a utilizar un
equipo con marca CE.
Calidad del cable de señal, prensaestopas y conectores:
Brooks suministra cable(s) de alta calidad, que cumple las especificaciones de la certificación CE .
Si usted adquiere su propio cable de señal, debería usar un cable que esté completamente protegido en su conjunto con un
apantallamiento del 100%.
Cuando utilice conectores del tipo “D” ó “Circular” deberían estar protegidos con una pantalla metálica. Cuando sea posible,
se deberán utilizar prensaestopas metálicos provistos de abrazadera para la pantalla del cable.
La pantalla del cable deberá ser conectada al casquillo metálico ó prensa y protegida en ambos extremos completamente
en los 360 Grados.
La pantalla deberá conectarse a tierra.
Los conectores estandar de tipo tarjeta (Card Edge) no son metálicos, los cables utilizados deberán ser protegidos con un
apantallamiento del 100% para cumplir con la certificación CE.
La pantalla deberá conectarse a tierra.
Para ver la configuración de los pines: Por favor, consultar Manual de Instrucciones adjunto.
A-2
Page 35
Installation and Operation Manual
Section A CE Certification
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
Français
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Sujet:Annexe au Manuel d’Instructions.
Référence:Certification CE des Débitmètres Massiques à Effet Thermique.
Date:Janvier 1996.
Messieurs,
Les équipements Brooks (électriques/électroniques) portant le label CE ont été testés avec succès selon les règles de la
Compatibilité Electromagnétique (directive CEM 89/336/EEC).
Cependant, la plus grande attention doit être apportée en ce qui concerne la sélection du câble utilisé pour véhiculer le signal
d’un appareil portant le label CE.
Qualité du câble, des presse-étoupes et des connecteurs:
Brooks fournit des câbles de haute qualité répondant aux spécifications de la certification CE.
Si vous approvisionnez vous-même ce câble, vous devez utiliser un câble blindé à 100 %.
Les connecteurs « D » ou de type « circulaire » doivent être reliés à la terre.
Si des presse-étoupes sont nécessaires, ceux ci doivent être métalliques avec mise à la terre.
Le blindage doit être raccordé aux connecteurs métalliques ou aux presse-étoupes sur le pourtour complet du câble, et à
chacune de ses extrémités.
Tous les blindages doivent être reliés à la terre.
Les connecteurs de type « card edge » sont non métalliques. Les câbles utilisés doivent être blindés à 100% pour satisfaire à
la réglementation CE.
Tous les blindages doivent être reliés à la terre.
Se référer au manuel d’instruction pour le raccordement des contacts.
Model SLA7840
Greek
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
1996
A-3
Page 36
Section A CE Certification
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
Model SLA7840
Italiano
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Oggetto:Addendum al manuale di istruzioni.
Riferimento:Certificazione CE dei misuratori termici di portata in massa
Data:Gennaio 1996.
Questa strumentazione (elettrica ed elettronica) prodotta da Brooks Instrument, soggetta a marcatura CE, ha superato con
successo le prove richieste dalla direttiva per la Compatibilità Elettomagnetica (Direttiva EMC 89/336/EEC).
E’ richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a marchio
CE.
Qualità dei cavi di segnale e dei relativi connettori:
Brooks fornisce cavi di elevata qualità che soddisfano le specifiche richieste dalla certificazione CE. Se l’utente intende usare
propri cavi, questi devono possedere una schermatura del 100%.
I connettori sia di tipo “D” che circolari devono possedere un guscio metallico. Se esiste un passacavo esso deve essere metallico
e fornito di fissaggio per lo schermo del cavo.
Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360° e questo vale per entrambe le
estemità.
Lo schermo deve essere collegato ad un terminale di terra.
I connettori “Card Edge” sono normalmente non metallici. Il cavo impiegato deve comunque avere una schermatura del 100%
per soddisfare la certificazione CE.
Lo schermo deve essere collegato ad un terminale di terra.
Per il corretto cablaggio dei terminali occorre fare riferimento agli schemi del manuale di istruzioni dello strumento.
August, 2009
Nederlands
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Onderwerp: Addendum voor Instructie Handboek
Referentie: CE certificering voor Mass Flow Meters & Controllers
Datum: Januari 1996
Dames en heren,
Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en voldoen aan
de wetgeving voor Electro Magnetische Compatibiliteit (EMC wetgeving volgens 89/336/EEC).
Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde produkten.
Kwaliteit van de signaalkabel en kabelaansluitingen:
·Brooks levert standaard kabels met een hoge kwaliteit, welke voldoen aan de specificaties voor CE certificering.
Indien men voorziet in een eigen signaalkabel, moet er gebruik gemaakt worden van een kabel die volledig is
afgeschermd met een bedekkingsgraad van 100%.
·“D” of “ronde” kabelconnectoren moeten afgeschermd zijn met een metalen connector kap. Indien kabelwartels worden
toegepast, moeten metalen kabelwartels worden gebruikt die het mogelijk maken het kabelscherm in te klemmen
Het kabelscherm moet aan beide zijden over 360° met de metalen connectorkap, of wartel verbonden worden.
Het scherm moet worden verbonden met aarde.
·“Card-edge” connectors zijn standaard niet-metallisch. De gebruikte kabels moeten volledig afgeschermd zijn met een
bedekkingsgraad van 100% om te voldoen aan de CE certificering.
Het scherm moet worden verbonden met aarde.
Voor pin-configuraties a.u.b. verwijzen wij naar het bijgesloten instruktie handboek.
Hoogachtend,
A-4
Page 37
Installation and Operation Manual
Section A CE Certification
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
Norsk
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Vedrørende:Vedlegg til håndbok
Referanse:CE sertifisering av utstyr for massestrømsmåling og regulering
Dato:Januar 1996
Til den det angår
Brooks Instrument elektrisk og elektronisk utstyr påført CE-merket har gjennomgått og bestått prøver som beskrevet i EMC
forskrift om elektromagnetisk immunitet, direktiv 89/336/EEC.
For å opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det måletekniske utstyret.
Utførelse av signalkabel og tilhørende plugger:
·Brooks Instrument tilbyr levert med utstyret egnet kabel som møter de krav som stilles til CE-sertifisering.
·Dersom kunden selv velger kabel, må kabel med fullstendig, 100% skjerming av lederene benyttes.
“D” type og runde plugger og forbindelser må være utført med kappe i metall og kabelnipler må være utført i metall for jordet
innfesting av skjermen. Skjermen i kabelen må tilknyttes metallet i pluggen eller nippelen i begge ender over 360°, tilkoblet
elektrisk jord.
·Kort-kantkontakter er normalt utført i kunststoff. De tilhørende flatkabler må være utført med fullstendig, 100% skjerming
som kobles til elektrisk jord på riktig pinne i pluggen, for å møte CE sertifiseringskrav.
For tilkobling av medleverte plugger, vennligst se håndboken som hører til utstyret.
Vennlig hilsen
Model SLA7840
Português
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Assunto:Adenda ao Manual de Instruções
Referência:Certificação CE do Equipamento de Fluxo de Massa
Data:Janeiro de 1996.
O equipamento (eléctrico/electrónico) Brooks com a marca CE foi testado com êxito nos termos do regulamento da
Compatibilidade Electromagnética (directiva CEM 89/336/EEC).
Todavia, ao seleccionar-se o cabo de sinal a utilizar com equipamento contendo a marca CE, será necessário ter uma
atenção especial.
Qualidade do cabo de sinal, buchas de cabo e conectores:
A Brooks fornece cabo(s) de qualidade superior que cumprem os requesitos da certificação CE.
Se fornecerem o vosso próprio cabo de sinal, devem utilizar um cabo que, na sua totalidade, seja isolado com uma blindagem de 100%.
Os conectores tipo “D” ou “Circulares” devem ser blindados com uma blindagem metálica. Se tal for necessário, deve utilizar-
se buchas metálicas de cabo para o isolamento do aperto do cabo.
O isolamento do cabo deve ser ligado à blindagem ou bucha metálica em ambas as extremidades em 360º.
A blindagem deve terminar com a ligação à massa.
Os conectores “Card Edge” não são, em geral, metálicos e os cabos utilizados devem ter um isolamento com blindagem a
100% nos termos da Certificação CE..
A blindagem deve terminar com ligação à massa.
Relativamente à configuração da cavilha, queiram consultar o Manual de Instruções.
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Section A CE Certification
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
Model SLA7840
Suomi
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Asia: Lisäys Käyttöohjeisiin
Viite: Massamäärämittareiden CE sertifiointi
Päivämäärä: Tammikuu 1996
Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC).
Erityistä huomiota on kuitenkin kiinnitettävä signaalikaapelin valintaan.
Signaalikaapelin, kaapelin läpiviennin ja liittimen laatu
Brooks toimittaa korkealaatuisia kaapeleita, jotka täyttävät CE sertifikaatin vaatimukset. Hankkiessaan signaalikaapelin itse, olisi
hankittava 100%:sti suojattu kaapeli.
“D” tai “Circular” tyyppisen liitimen tulisi olla varustettu metallisuojalla. Mikälì mahdollista, tulisi käyttää metallisia kaapeliliittimiä
kiinnitettäessä suojaa.
Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa päissä 360°:n matkalta.
Suojan tulisi olla maadoitettu.
“Card Edge Connector”it ovat standarditoimituksina ei-metallisia. Kaapeleiden täytyy olla 100%: sesti suojattuja jotta ne olisivat
CE sertifikaatin mukaisia.
Suoja on oltava maadoitettu.
Nastojen liittäminen; katso liitteenä oleva manuaali.
Ystävällisin terveisin,
August, 2009
Svensk
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Subject: Addendum to the Instruction Manual
Reference: CE certification of Mass Flow Equipment
Date: January 1996
Brooks (elektriska / elektronik) utrustning, som är CE-märkt, har testats och godkänts enligt gällande regler för elektromagnetisk
kompabilitet (EMC direktiv 89/336/EEC).
Speciell hänsyn måste emellertid tas vid val av signalkabel som ska användas tillsammans med CE-märkt utrustning.
Kvalitet på signalkabel och anslutningskontakter:
Brooks levererar som standard, kablar av hög kvalitet som motsvarar de krav som ställs för CE-godkännande.
Om man använder en annan signalkabel ska kabeln i sin helhet vara skärmad till 100%.
“D” eller “runda” typer av anslutningskontakter ska vara skärmade. Kabelgenomföringar ska vara av metall alternativt med
metalliserad skärmning.
Kabelns skärm ska, i bada ändar, vara ansluten till kontakternas metallkåpor eller genomföringar med 360 graders skärmning.
Skärmen ska avslutas med en jordförbindelse.
Kortkontakter är som standard ej metalliserade, kablar som används måste vara 100% skarmade för att överensstämma med CE-
certifieringen.
Skärmen ska avslutas med en jordförbindelse.
För elektrisk anslutning till kontaktstiften hänvisas till medföljande instruktionsmanual.
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Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
August, 2009
Model SLA7840
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Page 40
Installation and Operation Manual
X-PR-SLA7800-RT-eng
Part Number: 541B048AAG
Model SLA7840
LIMITED WARRANTY
Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use
and service and that the Software will execute the programming instructions provided by Seller until the expiration of the
earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
Products purchased by Seller from a third party for resale to Buyer (“Resale Products”) shall carry only the warranty extended
by the original manufacturer.
All replacements or repairs necessitated by inadequate preventive maintenance, or by normal wear and usage, or by fault of
Buyer, or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions, or by abuse,
accident, alteration, misuse, improper installation, modification, repair, storage or handling, or any other cause not the fault of
Seller are not covered by this limited warranty, and shall be at Buyer’s expense.
Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty
period or ninety (90) days, whichever is longer. This limited warranty is the only warranty made by Seller and can be
amended only in a writing signed by an authorized representative of Seller.
BROOKS SERVICE AND SUPPORT
Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with
outstanding service and support to back it up. We operate first class repair facilities located around the world to provide
rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability
for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant
International Standards.
Visit www.BrooksInstrument.com to locate the service location nearest to you.
August, 2009
ST ART-UP SERVICE AND IN-SITU CALIBRATION
Brooks Instrument can provide start-up service prior to operation when required.
For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate
the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable
to the relevant international quality standards.
CUSTOMER SEMINARS AND TRAINING
Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons.
Please contact your nearest sales representative for more details.
HELP DESK
In case you need technical assistance:
Americas
Europe +31 (0) 318 549 290
Asia +81 (0) 3 5633 7100
Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change
without notice.