Page 1
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008 Model SLA7810 & SLA7820
Brooks® Metal Sealed Pressure Controllers
Model SLA7810A/SLA7820A
Analog I/O,
Pressure Controller
Model SLA7810D/SLA7820D
Digital I/O DeviceNet
Pressure Controller
TM
Page 2
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008Model SLA7810 & SLA7820
Essential Instructions
Read this page before proceeding!
Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because
these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they
continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your
safety program when installing, using and maintaining Brooks Products.
• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct
manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.
• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.
• Follow all warnings, cautions and instructions marked on and supplied with the product.
• Inform and educate your personnel in the proper installation, operation and maintenance of the product.
• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable
local and national codes. Connect all products to the proper electrical and pressure sources.
• T o ensure proper performance, use qualified personnel to inst all, operate, update, program and maintain the product.
• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument.
Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at
risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.
• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being
performed by qualified persons, to prevent electrical shock and personal injury.
Pressure Equipment Directive (PED)
All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the
Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland
and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.
• Section 1 of this manual contains important safety and operating instructions related to the PED directive.
• Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment.
• All Brooks Instrument Flowmeters fall under fluid group 1.
• Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED.
• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).
ESD (Electrostatic Discharge)
Handling Procedure:
1. Power to unit must be removed.
2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal
device is installed, removed or adjusted.
3. Printed circuit cards must be transported in a conductive container . Boards must not be removed from protective enclosure
until immediately before installation. Removed boards must immediately be placed in protective container for transport,
storage or return to factory .
Comments
This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic
designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small
amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function
properly , exhibit early failure.
Page 3
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008 Model SLA7810 & SLA7820
Dear Customer ,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks
Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.
The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.
We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com
Y ours sincerely ,
Brooks Instrument
Page 4
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008Model SLA7810 & SLA7820
THIS PAGE WAS
INTENTIONALLY
LEFT BLANK
Page 5
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008
Paragraph Page
Number Number
Section 1 Introduction
1-1 Scope .............................................................................................................................................1-1
1-2 Description .....................................................................................................................................1-1
1-3 Principle of Operation .....................................................................................................................1-2
1-4 Specifications .................................................................................................................................1-8
1-5 Controller Specifications ................................................................................................... ..............1-9
Section 2 Installation
2-1 General ..........................................................................................................................................2-1
2-2 Receipt of Equipment .....................................................................................................................2-1
2-3 Recommended Storage Practice.................................................................................................... 2-1
2-4 Return Shipment ............................................................................................................................2-2
2-5 Transit Precautions.........................................................................................................................2-2
2-6 Typical Configuration......................................................................................................................2-2
2-7 Gas Process Connections ..............................................................................................................2-2
2-8 Installation Procedures ...................................................................................................................2-3
2-9 In-Line Filter ...................................................................................................................................2-4
2-10 Electrical Interface..........................................................................................................................2-4
2-1 1 Remote Setpoint (Command) Input Analog Mode ..........................................................................2-5
Model SLA7810 & SLA7820
Contents
Section 3 Operation
3-1 Overview ........................................................................................................................................3-1
3-2 Proportional Band and Integration Time Constant Adjustment.......................................................3-2
Section 4 Maintenance
4-1 Overview ........................................................................................................................................4-1
4-2 Troubleshooting ..............................................................................................................................4-2
Section A CE Certification
CE Certification of Mass Flow Equipment.......................................................................................A-1
FIGURES
Figure Page
Number Number
1-1 Model SLA7810/SLA7820 Pressure Transducer ............................................................................1-2
1-2 Model SLA7810/SLA7820 Silicon Chip Configuration..................................................................... 1-3
1-3 Model SLA7810/SLA7820 System Block Diagram .........................................................................1-3
1-4 Models SLA7810A and SLA7820A Analog I/O Controller with 1/4” VCR Connections................... 1-4
1-5 Models SLA7810D and SLA7820AD Digital I/O DeviceNet Controller with 1/4” VCR Connections ....1-4
1-6 Model SLA7820 Controller Upstream .............................................................................................1-5
1-7 Model SLA7810 Controller Downstream.........................................................................................1-5
1-8 Typical Application of Upstream Controller ..................................................................................... 1-6
2-1 Common Electrical Connections, Analog I/O ..................................................................................2-5
i
Page 6
Contents
Model SLA7810 & SLA7820
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008
THIS PAGE WAS
INTENTIONALLY
LEFT BLANK
ii
Page 7
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008
1-1 Scope
1-2 Description
Section 1 Introduction
Model SLA7810 & SLA7820
Thank you for purchasing a Brooks
Pressure Controller . This instruction manual is intended to provide the user
with all the information necessary to install, operate and maintain the
Brooks
Model SLA7810/SLA7820 Pressure Controller . This manual is
organized into sections:
Section 1 - Introduction
Section 2 - Installation
Section 3 - Adjustment and Maintenance
Section A - CE Certification
It is recommended that this manual be read in its entirety before attempting
to operate or repair the Model SLA7810/SLA7820.
Brooks Instrument’s Model SLA7810/SLA7820 are 1-1/8” wide profile metal
sealed instruments that accurately measure and control upstream or
downstream pressure. The heart of these devices is a solid-state pressure
transducer , which produces an electrical output proportional to pressure.
The electronics use this signal to operate a control valve and to provide an
output signal. The SLA7800 Series family of pressure measurement and
control products offers unp aralleled flexibility and performance and is
designed for use in advanced gas handling systems. The result is the
most accurate, repeatable, and responsive controllers on the market today!
Instrument Model SLA7810/SLA7820
Superior V alve Technology
The co-planar valve offers unmatched performance. Due to its simplified
construction, the valve exhibits superior repeatability, stability , and
response time. Instruments are less sensitive to pressure variations in the
process because of the larger valve control range. The co-planar valve
also offers lower leak-by rates compared to other metal sealed controllers.
These advancements ensure a more stable process over time.
Highly Adaptable Configurations
The 1-1/8” body offers a compact, space saving footprint. The SLA7800
Series family of pressure controllers is easily retrofitable to existing gas
box designs that utilize the traditional 1-1/2” body platform. Likewise, the
all-digital electronics is adaptable and allows the SLA7800 Series to serve
as a direct replacement for existing analog products bringing with them
greatly improved accuracy and reliability .
Broad Array of Communication Options
Brooks offers the SLA7800 Series pressure controllers with a traditional 05 volt analog option. Brooks also offers control interface with DeviceNetTM,
a high-speed (up to 500k baud) digital communication network. Brooks’
communication capabilities and device-profiles have been certified by the
ODV A (Open DeviceNet Vendor’s Association). Other network protocols
are in development. Talk to your Brooks representative about your specific
needs.
1-1
Page 8
Section 1 Introduction
Model SLA7810 & SLA7820
1-3 Principle of Operation
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008
Reduced Cost of Ownership
The Models SLA7810 and SLA7820 allow multi-gas and multi-range
capabilities to reduce customer inventory . Storage and pre-programming
of up to 10 pressure applications easily permits users to switch between
different gases and ranges on a single device. Also, the greater control
range provided by the co-planar valve gives users the option to decrease
the number of parts needed to control their entire process.
The pressure to be measured acts on a stainless steel diaphragm. This
pressure is transmitted to the actual sensing element, a silicon chip (refer
to Figure 1-1). The chip consists of an anisotropically etched diaphragm
with four piezo resistive resistors, configured in a Wheatstone bridge,
etched into its surface (refer to Figure 1-2). The mechanical deformation of
this diaphragm results in an imbalance of the resistors, which is
proportional to pressure. An amplifier provides output to the control circuit
as well as the electrical output signal.
In addition to the pressure transducer the Model SLA7810/SLA7820 has
an integral control valve and control circuitry . A difference between the
pressure and set point signals will cause the electronics to modulate the
control valve in order to maintain the desired pressure.
A system block diagram is shown in Figure 1-3.
The integration of pressure transducer, control electronics and control
valve into one unit results in a compact size. The mounting dimensions are
comparable to a mass flow controller . Refer to Figures 1-4 and 1-5.
The “upstream pressure regulation mode” is shown in Figure 1-6 places
the pressure controller at the outlet of the pressure vessel. The pressure in
the process upstream of the controller will be constant independent of
downstream variation. Pressure measurement and control takes place at
the outlet side of the pressure vessel.
1-2
Figure 1-1 Model SLA7810/SLA7820 Pressure Transducer
Page 9
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008
Section 1 Introduction
Model SLA7810 & SLA7820
Figure 1-2 Model SLA7810/SLA7820 Silicon Chip Configuration
Figure 1-3 Model SLA7810/SLA7820 System Block Diagram.
1-3
Page 10
Section 1 Introduction
Model SLA7810 & SLA7820
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008
Figure 1-4 Model SLA7810A/SLA7820A Analog I/O Controller with 1/4" VCR Connections
Figure 1-5 Model SLA7810D/SLA7820D Digital I/O DeviceNet Controller with 1/4" VCR Connections
1-4
Page 11
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008
Section 1 Introduction
Model SLA7810 & SLA7820
When the pressure controller is used in the “downstream pressure
regulation” mode as shown in Figure 1-7, the pressure in the process
vessel will be constant independent of upstream variation, provided the
upstream pressure does not fall below the downstream setting. Pressure
measurement and control takes place at the inlet side of the pressure
vessel.
The most common application of the pressure controller is in conjunction
with a mass flow controller (refer to Figure 1-8). Mass flow controllers
accurately measure and control the required quantity of process gas flows.
In this figure, the mass flow controllers will supply the desired quantity and
mixture of process gas while the pressure controller will maintain the
desired reactor pressure by varying the gas outflow . This system allows the
process reactants to be varied while maintaining a const ant reaction
pressure.
The Model SLA7810/SLA7820 Pressure Controller has proportional and
integral control action. The reset or integral control is combined with the
proportional control action (normally referred to as P.I. control). Both
proportional band and integration time are customer adjustable with a
Brooks service tool.
Pressure Controller
Figure 1-6 Model SLA7820 Controller Upstream
Pressure Controller
Figure 1-7 Model SLA7810 Controller Downstream
Vessel
Vessel
1-5
Page 12
Section 1 Introduction
Model SLA7810 & SLA7820
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008
Note: The Controller Mode and valve type are determined at the time of
order. Mechanical p arts must be changed to convert modes or valve types.
Upstream Controller Mode - The controller is set to maintain the
upstream process pressure constant, independent of downstream
pressure or flow variations (ref. Fig. 1-6). This is factory configured.
Downstream Controller Mode The controller is set to maintain the
downstream process pressure constant, independent of upstream
pressure or flow variations. This is factory configured.
Normally Open/Normally Closed Control Valve - Both Normally Open
(N.O.) and Normally Closed (N.C.) configurations are available. Normally
Closed is the standard valve type. The Normally Open valve may be
specified when Safety , Operation or Process considerations warrant this
type of valve.
V olt age Input s/Output s are factory configured and available on the
analog version of the device. This must be specified when ordered.
1-6
Mass Flow
Controllers
Reactor
Figure 1-8 Typical Application of Upstream Controller
Model SL7820
Page 13
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008
1-4 Specifications
Section 1 Introduction
Model SLA7810 & SLA7820
Pressure Ranges
7.25 psia to 290 psia full scale (Met al Seals)
Flow Rates
0-30,000 sccm* (Nitrogen Equivalent).
*Standard pressure and temperature in accordance with SEMI
(Semiconductor Equipment and Materials Institute) standard: 32°F (0°C)
and 101 kPa (760 Torr). Other reference conditions available upon request.
Accuracy
±0.5% F.S., including linearity and
hysteresis for precision control
Repeatability
±0.1% full scale
Control Range
20:1
Zero Stability
0.1% full scale per 30 days
Ambient T emperature Limit s
Operating: 0°C to 60°C (32°F to 140°F)
Non-operating: -25°C to 100°C (-13°F to 212°F)
T emperature Sensitivity
±0.1% of F.S. per °C
Maximum Transducer Pressure
21.75 psia for 0-14.5 psia range
108.5 psia for 14.5-72.5 psia range
435 psia for 72.5-290 psia range
Maximum Design Pressure
500 psig
Pressure Equipment Directive (PED) 97/23/EC:
Equipment falls under Sound Engineering Practice (SEP)
1-7
Page 14
Section 1 Introduction
Model SLA7810 & SLA7820
1-5 Controller Specifications
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008
Maximum Fluid Operating T emperature
0°C to 65°C (32°F to 149°F)
Leak Integrity
Inboard to Outboard: 1x10-10 atm scc/sec Helium max.
Digital sof tware
Can store 10 selectable P and I settings.
Input/Output Offset
< 0.2% full scale (voltage)
Proportional Gain
User adjustable via Service port or over DeviceNet interface.
Integration Time
User adjustable via Service port or over DeviceNet interface.
Control Action
Upstream or downstream pressure control
1-8
Materials of Construction
316L V AR, 316L, and high-alloy
ferritic stainless steel.
External/internal seals: nickel
V alve seat: 316L stainless steel
Internal wetted Surface Finish 32 Ra.
Page 15
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008
Section 1 Introduction
Model SLA7810 & SLA7820
Electrical Connections
Analog I/O option: 15-pin, male
Digital I/O DeviceNet option: 5-pin Micro-Connector , male
Power Supply Volt age
Electrical Connections (continued)
Analog option: +15 Vdc, ±5%
(traditional -15 Vdc pin is ignored)
Digital I/O DeviceNet option: 11-25 Vdc nominal = +24 Vdc
Power Requirements
Analog I/O option, with valve: 3.6 Watts Typical, 4.0 Watts Max.
Digital I/O DeviceNet option, w/valve: 6.9 Watts Typical, 7.6 Watts Max
Class III Equipment: The dc Mains input shall be supplied from a SEL V
(Separated Extra-Low V oltage) source.
Output Signals
Pressure Output (Analog I/O option only)
0-5 Vdc into 2 Kohm-minimum load. Output will indicate process-variable
up to 5.5 Vdc (1 10% F.S.).
5 V olt Reference Output
5 Volt s ±0.2% min Load 1 Kohms.
Pressure Setpoint Signals
Command-Setpoint Input (Analog I/O option only)
0-5 Vdc: Input will accept signals to 5.5 Vdc (1 10% F.S.).
Input resistance: 200 Kohm nominal.
Process Connections
Standard inlet and outlet connections supplied on the Model SL7810
and Model SL7820 are 1/4"(M) VCR
TM
(standard)
C Seal (SEMI 2787.1)
CS Seal (SEMI 2787.5)
W Seal (SEMI 2787.3)
Environmental Conditions
Installation Category: “I”
Pollution Degree: 2
Humidity: 50-80% Relative Humidity
Meter Altitude: 6562 feet (2,000 meters)
For Indoor Use ONLY
Mains supply voltage fluctuations not to exceed ±10% of the nominal
voltage
Valve Override Signal (Analog I/O option only)
IF Left floating, unconnected or grounded instrument controls valve to
setpoint.
IF Connected to signal at or above 10.0 V olt s, valve is forced open.
IF Connected to signal at or below 0.0 V olt s, valve is forced closed.
1-9
Page 16
Section 1 Introduction
Model SLA7810 & SLA7820
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008
THIS PAGE WAS
INTENTIONALLY
LEFT BLANK
1-10
Page 17
Installation and Operation Manual
Section 2 Installation
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December , 2008 Model SLA7810 & SLA7820
2-1 General
This section provides installation instructions for the Brooks Model
SLA7810/20 PC. Figure 1-2 through Figure 1-8 show the Model SLA7810/
20 dimensions, gas connections and electrical connection locations for an
MFC.
2-2 Receipt of Equipment
When the instrument is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability .
A report should be submitted to your nearest Product Service Department.
Brooks Instrument
407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel (215) 362-3700
Fax (215) 362-3745
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com
2-3 Recommended Storage Practice
Brooks Instrument Brooks Instrument
Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel 011-81-3-5633-7100
6710 BK Ede, Netherlands Fax 011-81-3-5633-7101
Tel 31-318-549-300 Email: BrooksAs@BrooksInstrument.com
Fax 31-318-549-309
E-mail: BrooksEu@BrooksInstrument.com
Remove the envelope containing the packing list. Outside of your clean area,
carefully remove the equipment from the packing case. Make sure spare
parts are not discarded with the packing material. Inspect for damaged or
missing parts.
This device has been assembled, calibrated and double-vacuum bagged in
a Class 100 clean room. In your semi-clean area,remove the outer bag
only . Pass your Model SLA7810/20 Metal Seal Pressure Controller into
your clean area. Remove the second clean room compatible bag only
when the equipment is ready to be tested and/or installed in your clean
system.
If intermediate or long-term storage of equipment is required, it is
recommended that the equipment be stored in accordance with the
following:
a. In the original vacuum bag and shipping container.
b. In a sheltered area with the following conditions:
1. Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum
and 7°C (45°F) minimum.
2. Relative humidity 45% nominal, 60% maximum and 25% minimum.
2-1
Page 18
Section 2 Installation Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December , 2008Model SLA7800 & SLA7820
2-4 Return Shipment
Prior to returning any instrument to the factory , contact your nearest Brooks
location for a Return Materials Authorization Number (RMA#). This can be
obtained from one of the following locations:
Brooks Instrument
407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554-FLOW (3569)
Tel (215) 362-3700
Fax (215) 362-3745
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com
Brooks Instrument Brooks Instrument
Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel 011-81-3-5633-7100
6710 BK Ede, Netherlands Fax 011-81-3-5633-7101
Tel 31-318-549-300 Email: BrooksAs@BrooksInstrument.com
Fax 31-318-549-309
E-mail: BrooksEu@BrooksInstrument.com
2-5 Transit Precautions
Instrument must have been purged in accordance with the following:
Completion of form RPR003-1, Brooks Instrument Decontamination
Statement. A copy of this form can be downloaded from the Brooks website
www.brooksinstrument.com or is available from any Brooks Instrument
location listed above. This is required before any Brooks Personnel can
begin processing. Copies of the form can be obtained from any Brooks
Instrument location listed above. Provide a Material Safety Data Sheet
(MSDS) for the fluid(s) used in the instrument.
the
P
To safeguard against damage during transit, transport the instrument to the
installation site in the same container used for transportation from the
factory if circumstances permit.
2-6 T ypical Configurations
2-2
A pressure controller system can be built in up stream or downstream
control configurations (refer to Figures 1-5 and 1-6). When the controller is
placed downstream (upstream pressure controller) of the pressure vessel,
the flow is usually determined by the MFC(s) in the line upstream of the
vessel.
Page 19
Installation and Operation Manual
Section 2 Installation
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December , 2008 Model SLA7810 & SLA7820
With the pressure controller upstream of the vessel (downstream pressure
controller), the most likely application is controlling a subatmospheric
pressure in the vessel. The inlet of the pressure controller can be at
atmospheric gas pressure or at vapor pressure of a liquid source. The flow
in this situation is usually determined by the characteristics of a vacuum
pump.
2-7 Gas Connections
Standard inlet and outlet connections supplied on the Model SLA7810 and
Model SLA7820 are 1/4"(M) VCR. Prior to installation ensure all piping is
clean and free from obstructions. Install piping in such a manner that
permits easy access to the instrument if removal becomes necessary.
2-8 Installation Procedures
Installation Procedures
a. The Model SLA7810/SLA7820 should be located in a clean, dry
atmosphere relatively free from shock and vibration.
b. Leave sufficient room for access to the electrical components .
c. Install in such a manner that permits easy removal if the instrument
requires cleaning.
d. The Model SLA7810/SLA7820 pressure controller may be installed in
any position.
Note: The control valve in the Model SLA7810/SLA7820 provides precision control and
is not designed for positive shut-off. If positive shut-off is required, it is
recommended that a separate shut-off valve be installed in-line.
2-3
Page 20
Section 2 Installation Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December , 2008Model SLA7800 & SLA7820
2-9 In-Line Filter
2-10 Electrical Interface
It is recommended that an in-line filter, such as the Brooks Model 5848, be
installed upstream from the controller to prevent the possibility of any
foreign material entering the meter. The filter porosity should be
approximately ten times smaller than the orifice used in the installation,
however, it is recommended that the minimum porosity that does not
restrict the flow rate being used. The filtering element should be
periodically replaced or cleaned.
Signal: D-conn
Setpoint/Command Common 1
Pressure Signal Out 2
15V Power Supply 5
15V(unused) 6
Setpoint/Command Input 8
Power Supply Common 9
Output Signal Common 10
+5V Reference 11
Valve Override 12
Application Select Pin 13
No Connections 3, 4, 7,14,15
2-4
Note: The Setpoint Return is internally connected to Signal Return and Supply Voltage
Common.
Page 21
Installation and Operation Manual
Section 2 Installation
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December , 2008 Model SLA7810 & SLA7820
+
1
+
Power Supply
15 Vdc
Com
Notes:
1. The commons for the setpoint input and signal output are not isolated from power supply common.
2. Tie cable shields should connect to ground at one end only.
9
Figure 2-1 Common Electrical Connections, Analog I/O
8
15
Signal Output
Common
Voltage Signal: Setpoint and Output
Voltage
Setpoint
Input
Voltage Output
Note
V
Indicator or
Receiver
+
Electrical Interface DeviceNet Mode
Electrical Interface in DeviceNet mode is covered in the DeviceNet
Supplemental Instruction Manual for Brooks Models SLA7810 and
SLA7820
(X-DeviceNet-PC-eng)
2-11 Remote Setpoint (Command) Input Analog Mode
If the pressure controller will be commanded by an external voltage or
current signal, the command potentiometer is not used.
The command hookup is as follows:
a. V olt age Signal: Connect the external setpoint signal to Terminal 8 and
the external setpoint return to Terminal 1. Refer to Figure 2-1.
b. Note: The setpoint return is internally connected to signal return and
power supply common. Current supplied by the device providing the set
point will not be returned on the current loop.
TM
2-5
Page 22
Section 2 Installation Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December , 2008Model SLA7800 & SLA7820
THIS PAGE WAS
INTENTIONALLY
LEFT BLANK
2-6
Page 23
Section 3 OperationInstallation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008 Model SLA7810 & SLA7820
3-1 Overview
This section contains the following information:
• Proportional Band and Integration Time Const ant Adjustment
3-2 Proportional Band and Integration Time Constant Adjustment
The Model SLA7810/SLA7820 Pressure Controller has proportional and
integral control action. The reset, or integral, control is combined with the
proportional control actions, commonly referred to as P.I. control. Both
proportional band and integration time are user adjustable by using special
commands over a DeviceNet connection or using Brooks Service Software.
The dynamic behavior of the control system is influenced by flow range,
pressure range, fluid type, orifice size and system volume. Therefore, the
pressure controller may need adjustment in the field to achieve the best
dynamic response.
The factory settings usually result in stable control. For most systems the
dynamic response is adequate with the factory settings. Improved response
can be had by final tuning the P. and I. software parameters in the intended
application by the user. The tuning of the P. and I. constants does not affect
the calibration of the instrument.
Definitions
Both proportional and integral control actions are defined with respect to a
step response error signal. The error signal is the difference between the
actual pressure and the setpoint. Since no control system is instantaneous,
an error signal will be present while the controller is attempting to reach
setpoint.
The SLA7810 and SLA7820 employ digital P.I. controls. There are no
potentiometers to adjust these values.
Proportional Control
Proportional control is a basic continuous control mode in which the
controller output is proportional to the error input signal to the controller. It
provides very rapid response and is relatively stable. Used alone,
proportional control has one disadvantage: at steady state; it exhibits an
offset. That is there is a dif ference between the desired value, or setpoint
and the actual value of the controlled variable. An integral action added to
the proportional mode eliminates offset.
Proportional control is sometimes called proportional gain. The gain of the
controller is high when the error is large, and low when the error is small.
3-1
Page 24
Section 3 Operation
Model SLA7810 & SLA7820
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008
Integral Control
Integral or reset action is an integration of the input error signal over time.
This means that with integral action the value of the manipulated variable
changes at a rate proportional to the error. With integral action present
there can be no offset at steady state since the manipulated variable will
continue to change as long as an error is present.
Characteristics of P.I. Control
By using both proportional and integral control actions, rapid control can be
achieved with out a steady state offset. T ypically there is a slight decrease
in system stability due to the presence of the integral mode. The dynamic
response of the system is better than the response would be with integral
alone. Because the two controller modes are interactive the P.I. controller
is somewhat more difficult to tune.
Tuning the P.I. control
Using the Brooks Service tool, read the current values of P. and I. It is
highly recommended that the P. and I. values be recorded before
adjustment. This will allow easy return to the factory settings. The Brooks
Service tool is covered in another document. Increasing the P. parameter
will increase the proportional band thus increasing the system response
time. If the proportional band is too high, the system may overshoot the
setpoint, or oscillate.
Increasing the Integral parameter will increase the integration time, making
the system respond slower , but more stable.
Most applications require fast response time. This can be achieved by
using a low Integral number and a high Proportional number. P. and I.
should be adjusted so the controller reaches setpoint in the minimum time,
without overshoot or oscillation.
Check the adjustment in the system over the expected range of pressures
and flows.
3-2
Page 25
Section 4 MaintenanceInstallation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008 Model SLA7810 & SLA7820
4-1 Overview
No
4-2 Troubleshooting
Routine maintenance is required on the Models SLA7810 and SLA7820.
If an in-line filter is used, the filtering element should be periodically
replaced. This section provides the Following information:
• Troubleshooting
4-1
Page 26
Section 4 Maintenance
Model SLA7810 & SLA7820
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008
This section contains suggestions to help diagnose pressure controller
related problems in the gas distribution system and answers commonly
asked questions.
A. System Checks
The Model SLA7810/SLA7820 is generally used as a component in gas
handling systems, which can be quite complex. This can make the task of
isolating a malfunction in the system a difficult one. An incorrectly
diagnosed malfunction can cause many hours of unnecessary down time.
If possible, make the following system checks before removing a
suspected defective pressure controller for bench troubleshooting or return
to the factory , especially if the system is new.
1. Verify a low resist ance common connection and that the correct power
supply voltage and signals are reaching and leaving the controller (for
Analog I/O). The Break-out Board (P/N S-273-Z-649-AAA) will make
this job much easier.
2. Verify that the process gas connections have been correctly terminated
and leak checked.
3. If the pressure controller appears to be functioning but cannot achieve
setpoint, verify that sufficient inlet pressure and pressure drop are
available at the controller to provide the required flow.
4. V erify correct zero position and/or re-zero device.
a. Connect the power cable to the PC.
b. Allow the PC to warm-up for a minimum of 15 minutes.
c. Close any inlet valves connected to PC.
d. Connect vacuum pump to PC outlet.
e. For upstream PC (SLA7820) give zero (0%) set point to device.
For downstream PC (SLA7810) give full scale (100%) set point to
device.
f. Turn on the vacuum pump. When the pressure gauge reads less
than 1.0 mm Hg, press the zero button on the device.
g. Output process value should nominally read less than 10 mVdc
(0.2% full scale). If reading is greater than 10 mVdc
(0.2% full scale), consult factory .
B. Bench T esting
A basic bench test can be performed to isolate the cause of a problem or
to verify the proper operation of the pressure controller. This method can
be used if the full scale calibration pressure of the Pressure Controller is
greater than 14.7 psia (atmospheric).
4-2
1. Connect the Pressure controller to the appropriate power supply as
required for either Analog or DeviceNet.
2. Apply power to the pressure controller .
Page 27
Section 4 MaintenanceInstallation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008 Model SLA7810 & SLA7820
Example of calculations (Analog Version)
a. Pressure controller is calibrated to 1000 torr full scale
b. Therefore a 5 volt output represents 1000 torr.
c. When the pressure controller is open to atmosphere, the actual output
signal from the pressure controller is 3.78 V olts DC.
Atmospheric pressure is nominally 14.7 psia (760 torr)
d. The calculated analog output is: (760 torr/1000 torr) x 5 VDC= 3.80
Vdc.
e. The actual output of the pressure controller is within 5% of the
calculated value.
Example of calculations (DeviceNet Version)
a. Pressure controller is calibrated to 1000 torr full scale.
b. 100% output equals 1000 torr .
c. When the pressure controller is open to atmosphere, the actual output
signal from the pressure controller is 78%.
Atmospheric pressure is nominally 14.7 psia (760 torr)
d. The calculated output is: (760 torr/1000 torr) x 100%= 76%
e. The actual output of the pressure controller is within 5% of the
calculated value.
If the pressure controller output is within limits, the problem is in the control
valve or the system itself. Please contact Brooks Instrument for further
recommendations.
C. Disassembly
It is not practical to disassemble the controller in the field. The spacing
between the valve and the orifice is critical and could change when
disassembled and reassembled. New screws and metal seals must be
used for all pressure boundary components.
4-3
Page 28
Section 4 Maintenance
Model SLA7810 & SLA7820
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008
THIS PAGE WAS
INTENTIONALLY
LEFT BLANK
4-4
Page 29
Installation and Operation Manual
Section A CE Certification
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008
Dansk
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Emne : Tillæg til instruktions manual.
Reference : CE mærkning af Masse Flow udstyr
Dato : Januar-1996.
Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj
(EMC direktivet 89/336/EEC).
Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.
Kvaliteten af signal kabler og stik:
Brooks lever kabler af høj kvalitet, der imødekommer specifikationerne til CE mærkning.
Hvis der anvendes andre kabel typer skal der benyttes et skærmet kabel med hel skærm med 100% dækning.
Forbindelses stikket type “D” eller “cirkulære”, skal være skærmet med metalhus og eventuelle PG-forskruninger skal enten
være af metal eller metal skærmet.
Skærmen skal forbindes, i begge ender, til stikkets metalhus eller PG-forskruningen og have forbindelse over 360 grader.
Skærmen bør være forbundet til jord.
“Card Edge” stik er standard ikke af metal, der skal derfor ligeledes benyttes et skærmet kabel med hel skærm med 100%
dækning.
Skærmen bør være forbundet til jord.
Forbindelse af stikket; venligst referer til vedlagte instruktions manual.
Med venlig hilsen,
Model SLA7810 & SLA7820
Deutsch
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Subject : Nachtrag zur Bedienungsanleitung.
Referenz : CE Zertifizierung für Massedurchflußgeräte
Datum : Januar-1996.
Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Verträglichkeit (EMC Richtlinie 89/336/
EEC) erhalten die Brooks-Geräte (elektrische/elektronische Komponenten) das CE-Zeichen.
Bei der Auswahl der Verbindungskabel für CE-zertifizierte Geräte sind spezielle Anforderungen zu beachten.
Qualität der Verbindungskabel, Anschlußstecker und der Kabeldurchführungen
Die hochwertigen Qualitätskabel von Brooks entsprechen der Spezifikation der CE-Zertifizierung.
Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten, daß eine
100 %igenSchirmababdeckung des Kabels gewährleistet ist.
·“D” oder “Rund” -Verbindungsstecker sollten eine Abschirmung aus Metall besitzen.
Wenn möglich, sollten Kabeldurchführungen mit Anschlußmöglichkeiten für die Kabelabschrimung verwendet werden.
Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchführungen über den vollen Umfang von
360 ° anzuschließen.
Die Abschirmung ist mit dem Erdpotential zu verbinden.
Platinen-Steckverbindunger sind standardmäßige keine metallgeschirmten Verbindungen. Um die Anforderungen der CE-
Zertifizierung zu erfüllen, sind Kabel mit einer 100 %igen Schirmababdeckung zu verwenden.
Die Abschirmung ist mit dem Erdpotential zu verbinden.
Die Belegung der Anschlußpins können Sie dem beigelegten Bedienungshandbuch entnehmen.
A-1
Page 30
Section A CE Certification
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
Model SLA7810 & SLA7820
English
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Subject : Addendum to the Instruction Manual.
Reference : CE certification of Mass Flow Equipment
Date : January-1996.
The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro
Magnetic Compatibility (EMC directive 89/336/EEC).
Special attention however is required when selecting the signal cable to be used with CE marked equipment.
Quality of the signal cable, cable glands and connectors:
Brooks supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used
providing cable screen clamping.
The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to a earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE
certification.
The shield should be terminated to a earth ground.
For pin configuration : Please refer to the enclosed Instruction Manual.
December, 2008
Español
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Asunto : Addendum al Manual de Instrucciones.
Referencia : Certificación CE de los Equipos de Caudal Másico
Fecha : Enero-1996.
Los equipos de Brooks (eléctricos/electrónicos) en relación con la marca CE han pasado satisfactoriamente las pruebas
referentes a las regulaciones de Compatibilidad Electro magnética (EMC directiva 89/336/EEC).
Sin embargo se requiere una atención especial en el momento de seleccionar el cable de señal cuando se va a utilizar un
equipo con marca CE.
Calidad del cable de señal, prensaestopas y conectores:
Brooks suministra cable(s) de alta calidad, que cumple las especificaciones de la certificación CE .
Si usted adquiere su propio cable de señal, debería usar un cable que esté completamente protegido en su conjunto con un
apantallamiento del 100%.
Cuando utilice conectores del tipo “D” ó “Circular” deberían estar protegidos con una pantalla metálica. Cuando sea posible,
se deberán utilizar prensaestopas metálicos provistos de abrazadera para la pantalla del cable.
La pantalla del cable deberá ser conectada al casquillo metálico ó prensa y protegida en ambos extremos completamente
en los 360 Grados.
La pantalla deberá conectarse a tierra.
Los conectores estandar de tipo tarjeta (Card Edge) no son metálicos, los cables utilizados deberán ser protegidos con un
apantallamiento del 100% para cumplir con la certificación CE.
La pantalla deberá conectarse a tierra.
Para ver la configuración de los pines: Por favor, consultar Manual de Instrucciones adjunto.
A-2
Page 31
Installation and Operation Manual
Section A CE Certification
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008
Français
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Sujet : Annexe au Manuel d’Instructions.
Référence : Certification CE des Débitmètres Massiques à Effet Thermique.
Date : Janvier 1996.
Messieurs,
Les équipements Brooks (électriques/électroniques) portant le label CE ont été testés avec succès selon les règles de la
Compatibilité Electromagnétique (directive CEM 89/336/EEC).
Cependant, la plus grande attention doit être apportée en ce qui concerne la sélection du câble utilisé pour véhiculer le signal
d’un appareil portant le label CE.
Qualité du câble, des presse-étoupes et des connecteurs:
Brooks fournit des câbles de haute qualité répondant aux spécifications de la certification CE.
Si vous approvisionnez vous-même ce câble, vous devez utiliser un câble blindé à 100 %.
Les connecteurs « D » ou de type « circulaire » doivent être reliés à la terre.
Si des presse-étoupes sont nécessaires, ceux ci doivent être métalliques avec mise à la terre.
Le blindage doit être raccordé aux connecteurs métalliques ou aux presse-étoupes sur le pourtour complet du câble, et à
chacune de ses extrémités.
Tous les blindages doivent être reliés à la terre.
Les connecteurs de type « card edge » sont non métalliques. Les câbles utilisés doivent être blindés à 100% pour satisfaire à
la réglementation CE.
Tous les blindages doivent être reliés à la terre.
Se référer au manuel d’instruction pour le raccordement des contacts.
Model SLA7810 & SLA7820
Greek
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
1996
A-3
Page 32
Section A CE Certification
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
Model SLA7810 & SLA7820
Italiano
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Oggetto : Addendum al manuale di istruzioni.
Riferimento : Certificazione CE dei misuratori termici di portata in massa
Data : Gennaio 1996.
Questa strumentazione (elettrica ed elettronica) prodotta da Brooks Instrument, soggetta a marcatura CE, ha superato con
successo le prove richieste dalla direttiva per la Compatibilità Elettomagnetica (Direttiva EMC 89/336/EEC).
E’ richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a marchio
CE.
Qualità dei cavi di segnale e dei relativi connettori:
Brooks fornisce cavi di elevata qualità che soddisfano le specifiche richieste dalla certificazione CE. Se l’utente intende usare
propri cavi, questi devono possedere una schermatura del 100%.
I connettori sia di tipo “D” che circolari devono possedere un guscio metallico. Se esiste un passacavo esso deve essere metallico
e fornito di fissaggio per lo schermo del cavo.
Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360° e questo vale per entrambe le
estemità.
Lo schermo deve essere collegato ad un terminale di terra.
I connettori “Card Edge” sono normalmente non metallici. Il cavo impiegato deve comunque avere una schermatura del 100%
per soddisfare la certificazione CE.
Lo schermo deve essere collegato ad un terminale di terra.
Per il corretto cablaggio dei terminali occorre fare riferimento agli schemi del manuale di istruzioni dello strumento.
December, 2008
Nederlands
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Onderwerp : Addendum voor Instructie Handboek
Referentie: CE certificering voor Mass Flow Meters & Controllers
Datum : Januari 1996
Dames en heren,
Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en voldoen aan
de wetgeving voor Electro Magnetische Compatibiliteit (EMC wetgeving volgens 89/336/EEC).
Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde produkten.
Kwaliteit van de signaalkabel en kabelaansluitingen:
· Brooks levert standaard kabels met een hoge kwaliteit, welke voldoen aan de specificaties voor CE certificering.
Indien men voorziet in een eigen signaalkabel, moet er gebruik gemaakt worden van een kabel die volledig is
afgeschermd met een bedekkingsgraad van 100%.
· “D” of “ronde” kabelconnectoren moeten afgeschermd zijn met een metalen connector kap. Indien kabelwartels worden
toegepast, moeten metalen kabelwartels worden gebruikt die het mogelijk maken het kabelscherm in te klemmen
Het kabelscherm moet aan beide zijden over 360° met de metalen connectorkap, of wartel verbonden worden.
Het scherm moet worden verbonden met aarde.
· “Card-edge” connectors zijn standaard niet-metallisch. De gebruikte kabels moeten volledig afgeschermd zijn met een
bedekkingsgraad van 100% om te voldoen aan de CE certificering.
Het scherm moet worden verbonden met aarde.
Voor pin-configuraties a.u.b. verwijzen wij naar het bijgesloten instruktie handboek.
Hoogachtend,
A-4
Page 33
Installation and Operation Manual
Section A CE Certification
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008
Norsk
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Vedrørende : Vedlegg til håndbok
Referanse : CE sertifisering av utstyr for massestrømsmåling og regulering
Dato : Januar 1996
Til den det angår
Brooks Instrument elektrisk og elektronisk utstyr påført CE-merket har gjennomgått og bestått prøver som beskrevet i EMC
forskrift om elektromagnetisk immunitet, direktiv 89/336/EEC.
For å opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det måletekniske utstyret.
Utførelse av signalkabel og tilhørende plugger:
· Brooks Instrument tilbyr levert med utstyret egnet kabel som møter de krav som stilles til CE-sertifisering.
· Dersom kunden selv velger kabel, må kabel med fullstendig, 100% skjerming av lederene benyttes.
“D” type og runde plugger og forbindelser må være utført med kappe i metall og kabelnipler må være utført i metall for jordet
innfesting av skjermen. Skjermen i kabelen må tilknyttes metallet i pluggen eller nippelen i begge ender over 360°, tilkoblet
elektrisk jord.
· Kort-kantkontakter er normalt utført i kunststoff. De tilhørende flatkabler må være utført med fullstendig, 100% skjerming
som kobles til elektrisk jord på riktig pinne i pluggen, for å møte CE sertifiseringskrav.
For tilkobling av medleverte plugger, vennligst se håndboken som hører til utstyret.
Vennlig hilsen
Model SLA7810 & SLA7820
Português
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Assunto : Adenda ao Manual de Instruções
Referência : Certificação CE do Equipamento de Fluxo de Massa
Data : Janeiro de 1996.
O equipamento (eléctrico/electrónico) Brooks com a marca CE foi testado com êxito nos termos do regulamento da
Compatibilidade Electromagnética (directiva CEM 89/336/EEC).
Todavia, ao seleccionar-se o cabo de sinal a utilizar com equipamento contendo a marca CE, será necessário ter uma
atenção especial.
Qualidade do cabo de sinal, buchas de cabo e conectores:
A Brooks fornece cabo(s) de qualidade superior que cumprem os requesitos da certificação CE.
Se fornecerem o vosso próprio cabo de sinal, devem utilizar um cabo que, na sua totalidade, seja isolado com uma blindagem de 100%.
Os conectores tipo “D” ou “Circulares” devem ser blindados com uma blindagem metálica. Se tal for necessário, deve utilizar-
se buchas metálicas de cabo para o isolamento do aperto do cabo.
O isolamento do cabo deve ser ligado à blindagem ou bucha metálica em ambas as extremidades em 360º.
A blindagem deve terminar com a ligação à massa.
Os conectores “Card Edge” não são, em geral, metálicos e os cabos utilizados devem ter um isolamento com blindagem a
100% nos termos da Certificação CE..
A blindagem deve terminar com ligação à massa.
Relativamente à configuração da cavilha, queiram consultar o Manual de Instruções.
A-5
Page 34
Section A CE Certification
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
Model SLA7810 & SLA7820
Suomi
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Asia : Lisäys Käyttöohjeisiin
Viite : Massamäärämittareiden CE sertifiointi
Päivämäärä : Tammikuu 1996
Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC).
Erityistä huomiota on kuitenkin kiinnitettävä signaalikaapelin valintaan.
Signaalikaapelin, kaapelin läpiviennin ja liittimen laatu
Brooks toimittaa korkealaatuisia kaapeleita, jotka täyttävät CE sertifikaatin vaatimukset. Hankkiessaan signaalikaapelin itse, olisi
hankittava 100%:sti suojattu kaapeli.
“D” tai “Circular” tyyppisen liitimen tulisi olla varustettu metallisuojalla. Mikälì mahdollista, tulisi käyttää metallisia kaapeliliittimiä
kiinnitettäessä suojaa.
Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa päissä 360°:n matkalta.
Suojan tulisi olla maadoitettu.
“Card Edge Connector”it ovat standarditoimituksina ei-metallisia. Kaapeleiden täytyy olla 100%: sesti suojattuja jotta ne olisivat
CE sertifikaatin mukaisia.
Suoja on oltava maadoitettu.
Nastojen liittäminen; katso liitteenä oleva manuaali.
Ystävällisin terveisin,
December, 2008
Svensk
Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.
Subject : Addendum to the Instruction Manual
Reference : CE certification of Mass Flow Equipment
Date : January 1996
Brooks (elektriska / elektronik) utrustning, som är CE-märkt, har testats och godkänts enligt gällande regler för elektromagnetisk
kompabilitet (EMC direktiv 89/336/EEC).
Speciell hänsyn måste emellertid tas vid val av signalkabel som ska användas tillsammans med CE-märkt utrustning.
Kvalitet på signalkabel och anslutningskontakter:
Brooks levererar som standard, kablar av hög kvalitet som motsvarar de krav som ställs för CE-godkännande.
Om man använder en annan signalkabel ska kabeln i sin helhet vara skärmad till 100%.
“D” eller “runda” typer av anslutningskontakter ska vara skärmade. Kabelgenomföringar ska vara av metall alternativt med
metalliserad skärmning.
Kabelns skärm ska, i bada ändar, vara ansluten till kontakternas metallkåpor eller genomföringar med 360 graders skärmning.
Skärmen ska avslutas med en jordförbindelse.
Kortkontakter är som standard ej metalliserade, kablar som används måste vara 100% skarmade för att överensstämma med CE-
certifieringen.
Skärmen ska avslutas med en jordförbindelse.
För elektrisk anslutning till kontaktstiften hänvisas till medföljande instruktionsmanual.
A-6
Page 35
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
December, 2008
Model SLA7810 & SLA7820
THIS PAGE WAS
INTENTIONALLY
LEFT BLANK
Page 36
Installation and Operation Manual
X-PR-SLA7800-PC-eng
Part Number: 541B047AAG
Model SLA7810 & SLA7820
LIMITED WARRANTY
Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use
and service and that the Software will execute the programming instructions provided by Seller until the expiration of the
earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
Products purchased by Seller from a third party for resale to Buyer (“Resale Products”) shall carry only the warranty extended
by the original manufacturer.
All replacements or repairs necessitated by inadequate preventive maintenance, or by normal wear and usage, or by fault of
Buyer, or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions, or by abuse,
accident, alteration, misuse, improper installation, modification, repair, storage or handling, or any other cause not the fault of
Seller are not covered by this limited warranty, and shall be at Buyer’s expense.
Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty
period or ninety (90) days, whichever is longer. This limited warranty is the only warranty made by Seller and can be
amended only in a writing signed by an authorized representative of Seller.
BROOKS SERVICE AND SUPPORT
Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with
outstanding service and support to back it up. We operate first class repair facilities located around the world to provide
rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability
for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant
International Standards.
Visit www.BrooksInstrument.com to locate the service location nearest to you.
December, 2008
ST ART-UP SERVICE AND IN-SITU CALIBRATION
Brooks Instrument can provide start-up service prior to operation when required.
For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate
the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable
to the relevant international quality standards.
CUSTOMER SEMINARS AND TRAINING
Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons.
Please contact your nearest sales representative for more details.
HELP DESK
In case you need technical assistance:
Americas
Europe +(31) 318 549 290 Within Netherlands 0318 549 290
Asia
Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change
without notice.
TRADEMARKS
Brooks.......................................................... Brooks Instrument, LLC
DeviceNet ..................... Open DeviceNet Vendors Association, Inc.
ODVA............................ Open DeviceNet Vendors Association, Inc.
VCR ......................................................................... Cajon Company
1-888-554-FLOW
+011-81-3-5633-7100
Loading...