Brooks Instrument SLA6900 Series, SLA6800 Series, SLA6950, SLA6960, SLA6850 Installation And Operation Manual

Artisan Technology Group is your source for quality

new and certied-used/pre-owned equipment

• FAST SHIPPING AND

DELIVERY

• TENS OF THOUSANDS OF
IN-STOCK ITEMS

• EQUIPMENT DEMOS

• HUNDREDS OF
MANUFACTURERS

SUPPORTED

• LEASING/MONTHLY
RENTALS

• ITAR CERTIFIED
SECURE ASSET SOLUTIONS

SERVICE CENTER REPAIRS

Experienced engineers and technicians on staff
at our full-service, in-house repair center

Instra

Remotely inspect equipment before purchasing with
our interactive website at www.instraview.com

Contact us: (888) 88-SOURCE | [e-mail] | www.artisantg.com

SM

REMOTE INSPECTION

View

WE BUY USED EQUIPMENT

Sell your excess, underutilized, and idle used equipment
We also offer credit for buy-backs and trade-ins

www.artisantg.com/WeBuyEquipment

LOOKING FOR MORE INFORMATION?

Visit us on the web at www.artisantg.com for more
information on price quotations, drivers, technical

specications, manuals, and documentation

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Brooks® Delta Class
SLA6900 Series UHP and
SLA6800 Series Metal Seal
Mass Flow Controllers and Meters

Model SLA6950A

Analog I/O

Mass Flow Controller

Model SLA6950D

Digital I/O DeviceNet

Mass Flow Controller

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

TM

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng

Part Number: 541B100AAG

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

August, 2009

Essential Instructions

Read this page before proceeding!

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because
these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they
continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your
safety program when installing, using and maintaining Brooks Products.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct
manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

• Inform and educate your personnel in the proper installation, operation and maintenance of the product.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable
local and national codes. Connect all products to the proper electrical and pressure sources.

• T o ensure proper performance, use qualified personnel to inst all, operate, update, program and maintain the product.

• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument.
Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at
risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being
performed by qualified persons, to prevent electrical shock and personal injury.

Pressure Equipment Directive (PED)

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the
Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland
and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.

• Section 1 of this manual contains important safety and operating instructions related to the PED directive.

• Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED.

• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

ESD (Electrostatic Discharge)

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal
device is installed, removed or adjusted.

3. Printed circuit cards must be transported in a conductive container . Boards must not be removed from protective enclosure
until immediately before installation. Removed boards must immediately be placed in protective container for transport,
storage or return to factory .

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic
designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small
amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function
properly , exhibit early failure.

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009

Dear Customer ,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com

Y ours sincerely ,
Brooks Instrument

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Part Number: 541B100AAG

August, 2009

THIS PAGE WAS
INTENTIONALLY

LEFT BLANK

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009

Paragraph Page
Number Number

Section 1 Introduction

1-1 Scope ............................................................................................................................................... 1-1

1-2 Purpose ............................................................................................................................................ 1-1

1-3 Description ....................................................................................................................................... 1-1

1-4 Specifications ................................................................................................................................... 1-2

Section 2 Installation

2-1 General ............................................................................................................................................ 2-1

2-2 Receipt of Equipment....................................................................................................................... 2-1

2-3 Recommended Storage Practice ..................................................................................................... 2-2

2-4 Return Shipment .............................................................................................................................. 2-2

2-5 Removal from Storage ..................................................................................................................... 2-2

2-6 Gas Connections.............................................................................................................................. 2-3

2-7 Installation ........................................................................................................................................ 2-3

2-8 In-Line Filter ..................................................................................................................................... 2-4

2-9 Electrical Interface............................................................................................................................ 2-4

2-10 Operation Check Procedure............................................................................................................. 2-5

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Contents

Section 3 Operation

3-1 Overview .......................................................................................................................................... 3-1

3-2 Theory of Operation ......................................................................................................................... 3-1

3-3 Features ........................................................................................................................................... 3-2

3-4 Adaptive Valve Control ..................................................................................................................... 3-4

3-5 Analog Mode of Operation ............................................................................................................... 3-4

Section 4 Maintenance & Troubleshooting

4-1 Overview .......................................................................................................................................... 4-1

4-2 Troubleshooting................................................................................................................................ 4-2

4-3 Gas Conversion Factors .................................................................................................................. 4-6

4-4 Orifice Sizing .................................................................................................................................... 4-7

4-5 Restrictor Sizing.............................................................................................................................. 4-10

Section A CE Certification

A-1 CE Certification of Mass Flow Equipment........................................................................................A-1

Warranty , Local Sales/Service Contact Information.......................................................................Back Cover

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

i

Contents

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Figures

Figure Page
Number Number

1-1 Model SLA6950/SLA6850 Series MFC Dimensions ........................................................................ 1-5

1-2 Model SLA6960/SLA6860 Series MFM Dimensions ........................................................................ 1-6

1-3 Model SLA6950/SLA6850 Series Digital I/O DeviceNet MFC's ....................................................... 1-7

2-1 D-Connector Shielded Cable Hookup Diagram - Voltage I/O Versions ............................................ 2-6

2-2 Common Electrical Hookups............................................................................................................2-6

3-1 Flow Sensor Operational Diagram (VCRTM End Connections Shown) ............................................. 3-2

3-2 Externally Accessible Adjustment..................................................................................................... 3-3

3-3 Flow Control System Block Diagram (MFC Only) ............................................................................ 3-6

4-1 Bench Troubleshooting Circuit ......................................................................................................... 4-4

4-2 Model SLA6950 Orifice Sizing Nomograph..................................................................................... 4-14

4-3 Example Nomograph ...................................................................................................................... 4-15

Tables

Table Page
Number Number

2-1 Recommended Filter Size................................................................................................................ 2-4

3-1 Typical Resistor Values for Calibration Select.................................................................................. 3-5

4-1 Bench Troubleshooting for MFC/MFM ............................................................................................. 4-4

4-2 Sensor Troubleshooting ................................................................................................................... 4-5

4-3 Orifice Capacities ............................................................................................................................. 4-6

4-4 Conversion Factors (Nitrogen Base) ............................................................................................... 4-11

4-5 Model SLA6900/SLA6800 Series Standard Restrictors .................................................................. 4-16

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng

Part Number: 541B100AAG

August, 2009

ii

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009

1-1 Description

1-2 Purpose

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Section 1 Introduction

Thank you for purchasing a Brooks Instrument Delta Class Metal-Sealed
Mass Flow Product. This manual, X-TMF-SLA6900-SLA6800-MFC-eng is a
complete installation and operation manual for your instrument.

The Brooks® SLA6900/SLA6800 Series are mass flow measurement devices
designed for accurately measuring (MFM's) and rapidly controlling (MFC's)
flows of gases. This instruction manual is intended to provide the user with all
the information necessary to install, operate and maintain these products.
This manual is organized into the following sections.

Section 1 Introduction
Section 2 Installation
Section 3 Operation
Section 4 Maintenance
Section A CE Certification

1-3 Description

It is recommended that this manual be read in its entirety before attempting to
operate or repair the SLA6900/SLA6800 Series.

The Brooks SLA6960/SLA6860 Series Mass Flow Meters (MFM) are high
precision gas flow measuring devices. The SLA6950/SLA6850 Mass Flow
Controllers (MFC) are a complete, closed-loop system for controlling flow.
They are designed for use in advanced, ultra-clean gas handling systems
requiring deterministic performance, superior accuracy , and diagnostic
capabilities. These instrument s feature ultra-polished internal surfaces
(SLA6900 Series) and all metal inboard and outboard seals (SLA6900 &
SLA6800 Series).

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

1-1

Section 1 Introduction

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

1-4 Specifications

WARNING

Do not operate this instrument in excess of the specifications
listed below. Failure to heed this warning can result in serious
personal injury and/or damage to the equipment.

Physical:
PERFORMANCE CHARACTERISTICS:

Flow Ranges*

Models SLA6950, SLA6960, SLA6850 & SLA6860
Any range from 0-3 sccm to 0-30,000 sccm N
Models SLA6951, SLA6961, SLA6851 & SLA6861
Any range from 20-100 slpm N2 eq.
Up to 200 slpm H2 flows possible (consult factory)

*Standard: 0° and 101kPa (760 Torr). Per SEMI Guideline E12-96. For full scale flow rates
greater than 50 sccm Nitrogen equivalent.

Control Range

(50:1) - elastomeric valve seat
(33:1) - metal valve seat

2

Part Number: 541B100AAG

August, 2009

eq.

1-2

Accuracy

±1.0% of rate, including linearity (20% to 100% F.S.), ±0.2% of F.S. (below
20% full scale)

Repeatability

±0.20% of rate

T emperature Sensitivity

Zero: Less than 0.075% F.S. per °C
Sp an: Less than ±1% F.S. shift over 10-50°C range

Settling Time

Less than 800 ms to within ±2% full scale of final value for a 0-100% step per
SEMI Guideline E17-91.
(Refer to Figure 1)

RATINGS:
Operating Pressure

1500 psig maximum
150 psi (10.35 bar) maximum operating pressure
recommended for optimal performance

Pressure Equipment Directive (PED) 97/23/EC

Sound Engineering Practice

Pressure Differential Range

Model SLA6950, SLA6850
5-50 psid (3.45 bar max.)
Model SLA6951, SLA6851
10-50 psid (3.45 bar max.)
Minimum and Maximum pressure drop depends on
gas and FS flow rate (consult factory)

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Section 1 Introduction

Leak Integrity

-10

Inboard to Outboard: 1x10

atm scc/sec Helium max.

Ambient T emperature Limit s

Operating: 0°C to 60°C (32°F to 140°F)
Non-Operating: -25°C to 100°C (-13°F to 212°F)

Maximum Fluid Operating T emperature

0°C to 65°C (32°F to 149°F)

PHYSICAL:

Materials of Construction (SLA6900 Series)

316L Vacuum Arc Remelt (VAR), 316L, and high-alloy ferritic st ainless steel.
External/internal seals: Nickel
V alve seat: 316L st ainless steel - st andard
Internal wetted surface finish 5 Ra

Materials of Construction (SLA6800 Series)

316L Vacuum Arc Remelt (VAR), 316L, and high-alloy ferritic st ainless steel.
External/internal seals: Nickel
V alve seat: 316L st ainless steel - st andard
Internal Wetted Surface Finish: 32 Ra

Outline Dimensions

Refer to Figures 2-9.

Process Connections (SLA6900 Series)

1/4" male VCR

TM

CS Seal (SEMI spec. 2787.5 4/98)
C Seal (SEMI spec. 2787.1 4/98)

Process Connections (SLA6800 Series)

1/4" male VCR

TM

CS Seal (SEMI spec. 2787.5 4/98)
C Seal (SEMI spec. 2787.1 4/98)

ELECTRICAL CHARACTERISTICS:
Electrical Connections

Analog I/O option: 15-pin D-Connector, male
DeviceNet I/O option: 5-pin Micro-Connector, male

EMC Directive 89/336/EC

per 61326

Power Supply V oltage

Analog I/O option: +15 Vdc, ±5%

(traditional -15 Vdc pin is ignored)

DeviceNet I/O option: nominal = 1 1-25 Vdc

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

1-3

Section 1 Introduction

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Power Requirements

Watts, typ. Watts, max.

Analog I/O option, no valve: 1.80
Analog I/O option, with valve: 2.60 4.00
DeviceNet I/O option, no valve: 3.80
DeviceNet I/O option, with valve: 4.90 7.60

Command-Setpoint Input (Analog I/O option only)

0-5 Vdc: Input will accept signals to 5.5 Vdc (1 10% F.S.).
Input resistance: 360 k ohm min.

Flow Output (Analog I/O option only)

0-5 Vdc into 2K ohm minimum load.
Output will indicate process variable up to 6 Vdc
(120% F.S.).

V alve Override Signal (Analog I/O option only)

Left floating/unconnected – instrument controls valve to command setpoint
Connected to signal at or above 5.0 Volts
– valve is forced open
Connected to signal at or below 0.0 Volt s
– valve is forced closed

Part Number: 541B100AAG

August, 2009

5 V olt Reference Signal (Analog I/O option & 15 PIN only)

For use with potentiometer command setpoint input
±0.2%, into 1 K ohm (minimum load)

Calibration-Select Signal (15 Pin Only)

Select one of ten gases and P.I.D. tuning settings in analog mode.

1-4

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009

Anaolg I/O D Connector

1/4" VCR Connections

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Section 1 Introduction

Analog I/O D-Connector

Downport Connections

Figure 1-1 SLA6950/SLA6850 Series Analog I/O MFC Dimensions.

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

1-5

Section 1 Introduction

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Part Number: 541B100AAG

August, 2009

Digital I/O DeviceNet
1/4" VCR Connections

Figure 1-2 SLA6960/SLA6860 Series Digital I/O DeviceNet MFM Dimensions.

1-6

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Digital I/O DeviceNet
Downport Connections

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009

Digital I/O, DeviceNet

1/4" VCR Connections

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Section 1 Introduction

Digital I/O DeviceNet

Downport Connections

Figure 1-3 Model SLA6950/SLA6850 Series Digital I/O DeviceNet MFC Dimensions

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

1-7

Section 1 Introduction

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Part Number: 541B100AAG

August, 2009

THIS PAGE WAS
INTENTIONALLY

LEFT BLANK

1-8

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

2-1 General

2-2 Receipt of Equipment

Section 2 Installation

This section provides installation instructions for the Brooks® SLA6950/
SLA6850 Series MFC's and SLA6960/SLA6860 Series MFM's.
Figure 1-1 shows the SLA6950/SLA6850 Series dimensions, gas connections
and electrical connection locations for the MFC's, refer to Figure 1-2 ('D"
Connector) for the SLA6960/SLA6860 Series MFM's .

When the equipment is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should immediately be notified regarding his
liability. A report should be submitted to the Product Service Department,
Brooks Instrument, 407 West Vine Street, Hatfield, Pennsylvania 19440.

Remove the envelope containing the packing list. Outside of your clean area,
carefully remove the equipment from the packing case. Make sure spare
parts are not discarded with the packing material. Inspect for damaged or
missing parts.

The SLA6900/SLA6800 UHP Series devices have been assembled,
calibrated and double-vacuum bagged in a Class 100 clean room. In your
semi-clean area, remove the outer bag only . Pass Ultra-Clean Met al Seal
Mass Flow Device into your clean area. Remove the second clean room
compatible bag only when the equipment is ready to be tested and/or installed
in your clean system.

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]
E-mail: [e-mail]

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

2-1

Section 2 Installation

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

2-3 Recommended Storage Practice

If intermediate or long-term storage is required for equipment, as supplied by
Brooks Instrument, it is recommended that said equipment be stored in
accordance with the following:

a. In the original vacuum bag and shipping container.
b. In a sheltered area with the following conditions:

1. Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum and
7°C (45°F) minimum.

2. Relative humidity 45% nominal, 60% maximum and 25% minimum.

2-4 Return Shipment

Prior to returning any Brooks equipment to the factory , contact the factory for
a Return Materials Authorization Number (RMA#). This can be obt ained at
Brooks Instrument, Product Service Department, 407 West Vine Street,
Hatfield, P A 19440, or call toll free 1-888-554-FLOW (3569).

Part Number: 541B100AAG

August, 2009

2-5 Removal from Storage

Also, completion of Form RPR003-1, Brooks Instrument Decontamination
Statement, as well as, a Material Safety Data Sheet (MSDS) for the fluid(s)
used in the meter, is required before any Brooks Personnel can begin
processing the equipment. Copies of the form can be obtained at the
locations listed below.

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]

E-mail: [e-mail]

Upon removal from storage, a visual inspection should be conducted to verify
the condition of the equipment is “as received.” If the equipment has been in
storage in conditions in excess of those recommended (See Section 2-3), the
device should be subjected to a pneumatic pressure test in accordance with
applicable vessel codes. To maintain the ultra-clean integrity, this service
should be performed by the factory or one of the authorized service centers.

2-2

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009

2-6 Gas Connections

2-7 Installation

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Section 2 Installation

Standard inlet and outlet connections supplied on the SLA6900/SLA6800
Series are 1/4"(M) VCR. Prior to installation ensure all piping is clean and
free from obstructions. Install piping in such a manner that permits easy
access to the instrument if removal becomes necessary.

Recommended installation procedures:
a.The SLA6900/SLA6800 Series MFM should be located in a clean, dry

atmosphere relatively free from shock and vibration.
b.Leave sufficient room for access to Self-zero function push-button.
c.Install in such a manner that permits easy removal if the instrument

requires servicing.

d.The SLA6900/SLA6800 Series MFM can be installed in any position.

However, mounting in orientations other than the original factory calibration

(see calibration data sheet supplied with the instrument) can result in a

±0.5% maximum full scale shift after re-zeroing.

CAUTION

Use caution when installing surface mount (downported)
controllers. Most metal seals can not be reused after
compression. Follow the seal manufacturers’ recommendations
for installation. Tighten the mounting screws in 10 in-lb.
increments such that the seal undergoes uniform compression.
Final torque values depend on the screw and hardware material
and lubrication.

e.When installing a mass flow controller or meter with full scale flow rates of

10 slpm or greater, be aware that sharp, abrupt angles in the system piping

directly upstream of the controller may cause a small shift in accuracy. If

possible, have at least ten pipe diameters of straight tubing upstream of the

mass flow controller or meter.

2-3

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Section 2 Installation

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

2-8 In-Line Filter

It is recommended that an in-line filter be installed upstream from the mass
flow controller or meter to prevent the possibility of any foreign material
entering the flow sensor or control valve (MFC). The filtering element should
be replaced periodically or ultrasonically cleaned.

Part Number: 541B100AAG

August, 2009

2-9 Electrical Interface

Table 2-1. Recommended Filter Size.

Maximum Flow Rate Recommended Filter

100 sccm 1 micron
500 sccm 2 microns

1 to 5 slpm 7 microns

10 to 30 slpm 15 microns

The SLA6900/SLA6800 Series MFM's are controlled using analog 0-5 Vdc
signals. The minimum set of connections which must be made to the Model
SLA6950/SLA6850 MFC and Model SLA6960/SLA6860 MFM include +15
Vdc, supply common, and a setpoint signal. The setpoint signal is supplied as
a
0 to 5 Vdc analog signal. All signals are supplied via the 15-pin ‘D’ connector.

The SLA6900/SLA6800 Series MFM's electrical interface is designed to
facilitate low-loss, quiet signal connections. Separate returns (commons) are
supplied for the analog setpoint, analog flow signal, and the power supply .
These commons are electrically connected together on the SLA6900/
SLA6800 Series MFM's PC board.

Voltage I/O Version

• Chassis Ground

• Signal Common

• Signal Output

• +15 Vdc Supply

• -15 Vdc Supply (not used by SLA6950 MFC)

• Setpoint Input

• Setpoint Common

• Supply Common

2-4

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009

2-10 Operation Check Procedure

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Section 2 Installation

NOTICE

The Brooks (electric/electronic) equipment bearing the CE mark
has been successfully tested to the regulations of the Electro
Magnetic Compatibility (EMC directive 89/336/EEC). Special
attention is required when selecting the signal cable to be used
with CE marked equipment.

Brooks supplies high quality cables which meet the
specifications for CE certification. If you provide your own signal
cable you should use a cable which is completely screened with a
100% shield. D-Connectors should also be shielded using a metal
shield. If applicable, metal cable glands must be used to provide
cable screen clamping. The cable screen should be connected to
the metal shell or gland and shielded at both ends over 360
degrees. The shield should be terminated to an earth ground. See
Appendix A for CE Certification of Mass Flow Equipment.

a. Mount the MFC/MFM in its final orientation.
b. Apply power to the MFC/MFM and allow approximately one hour for the

instrument to warm up and stabilize its temperature.

c. Do NOT supply gas to the MFC/MFM. Ensure that the differential pressure

across the MFC/MFM is zero.
d. Check the MFC/MFM zero.
e. The analog output signal should be 0.000 Vdc ± 0.2%. If the zero exceeds

one of these limits, follow the re-zeroing procedure in Section 3-5 (analog

mode).
f. Turn on the gas supply. A positive flow signal may be present due to valve

leak-thru (MFC only). Leak-thru may be significant (3.0%) with metal valve

seats.
g. Supply a setpoint voltage between 1 and 5 Vdc.
h. Check the analog output signal. The output voltage signal should match the

setpoint voltage (± 20mV) within 10 seconds after the setpoint is changed.

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

2-5

Section 2 Installation

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Analog I/O Pin Connections:

Signal: 15-pin D-conn 9-pin D-conn

Setpoint/Command Common 18

Flow/Signal Out 22

+15v 53

-15v (unused) 69

Setpoint/Command In 86

Power Supply Common 94

SIgnal Common, Output Return 10 7

+5v reference 11

Valve Override 12 1

Calibration Select Pin 13

Chassis Ground 14

Remote Transducer In 15

No Connections 3,4,7 5

Part Number: 541B100AAG

August, 2009

Note:* indicates MFC's only

Figure 2-1 D-Connector Shielded Cable Hookup Diagram - Voltage I/O Versions.

Figure 2-2 Common Electrical Hookups.

2-6

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009

3-1 Overview

3-2 Theory of Operation for Flow Measurement

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

This section contains the following information:

• Theory of Operation

• Features

The thermal mass flow measurement system consists of two components:
the restrictor and the flow sensor. Figure 3-1 contains a diagram of the flow
stream through the MFC/MFM with an enlarged view of the flow sensor. Gas
flow entering the MFC/MFM is separated into two paths; one straight through
the restrictor and the other through the flow sensor. This is represented in
Figure 3-1 where the total flow A+B enters the MFC/MFM and is separated
into streams A and B. The streams are joined again at the far side of the
restrictor.

Section 3 Operation

The separation of the flow streams is caused by the restrictor . During flow
conditions there will be a pressure differential across the restrictor which
forces gas to flow in the sensor.
The pressure difference caused by the restrictor varies linearly with total flow
rate. The sensor has the same linear pressure difference versus flow
relationship. The ratio of sensor flow to the flow through the restrictor remains
constant over the range of the MFC/MFM (A/B = constant). The full scale flow
rate of the MFC/MFM is established by selecting a restrictor with the correct
pressure differential for the desired flow .

The flow sensor is a very narrow , thin-walled stainless steel tube. Onto this
tube are built upstream and downstream temperature sensing elements on
either side of a heating element. Constant power is applied to the heater
element, which is located at the midpoint of the sensor tube. During no-flow
conditions, the amount of heat reaching each temperature sensor is equal, so
temperatures T1 and T2 (Fig. 3-1) are equal. Gas flowing through the tube
carries heat away from the upstream temperature sensor and toward the
downstream sensor. The temperature difference, T2 - T1, is directly
proportional to the gas mass flow. The equation is:

DT = A x P x Cp x m

Where,

DT = Temperature difference T2 - T1 (°K)
A = Const ant of proportionality (S2-°K2/kJ2)
P = Heater Power
Cp = specific heat of the gas at constant pressure (kJ/kg - °K)
m = Mass Flow (kg/s)

A bridge circuit and a dif ferential amplifier interpret the temperature dif ference
and generate an electrical signal directly proportional to the gas mass flow
rate.

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

3-1

Section 3 Operation

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

3-3 Features

Note: All SLA6950/SLA6850 Series mass flow controllers and SLA6960/
SLA6860 Series mass flow meters are configured at the factory according to
customer order and do not require adjustment. Not all features are available
on all instruments.

The SLA6950/SLA6850 Series is a full-featured digital MFC. The SLA6950/
SLA6850 Series performs much like a traditional analog MFC, but with
improved accuracy, step response and valve control. The analog interface
matches that of Brooks' popular analog MFCs so the SLA6950/SLA6850
Series can be retrofitted into tools using analog MFCs. Other versions of the
SLA6950/SLA6850 Series can provide a variety of digital protocols, for
example DeviceNet.

The SLA6950/SLA6850 Series is capable of storing up to 10 different sets of
gas calibration data. Each set includes a calibration curve, PID controller
settings, valve performance data, and information about the calibration
conditions. The SLA6950/SLA6850 Series can contain calibrations for
different gases or for the same gas at multiple conditions (pressures, full­scale flow rates). Section 3-5 Analog Mode of Operation describes more
information about the data contained in the calibration table and how to
access the data.

Part Number: 541B100AAG

August, 2009

Calibrations will appear in the calibration table in the same order as they
appeared on the SLA6950/SLA6850 Series customer order, unless otherwise
specified. The first listed gas will appear as calibration #1 the second as
calibration #2 and so on. Note that unless specified otherwise on the

3-2

Figure 3-1 Flow Sensor Operational Diagram (VCRTM End Connections Shown)

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Section 3 Operation

ZERO

BUTTON

Figure 3-2 Externally Accessible Adjustment.

customer order Model SLA6900/SLA6800's containing a single calibration will
have that calibration stored in calibration #1.

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

3-3

Section 3 Operation

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

3-4 Adaptive Valve Control (MFC only)

The SLA6950/SLA6850 Series offers a feature, called adaptive valve control,
which allows the instrument to learn about the process gas and operating
conditions. If multiple calibrations are being used, the adaptive valve control
procedure must be performed separately for each calibration.
The adaptive valve control process requires that the process gas be supplied
to the SLA6900/SLA6800 Series at the pressure and temperature which will
exist during the process.

If the system conditions have changed so substantially that the Model 6950
becomes unstable, the adaptive valve control algorithm determines new gains
which will stabilize the instrument and restore the step response to the factory
performance level.

3-5 Analog Mode of Operation

A. Functional Description
The analog interface is consistent with other Brooks analog MFCs/MFMs.
This includes a 0-5 volt setpoint input, 0-5 volt flow signal output, V alve
Override input, and Calibration Select input pin. All analog signals available
are on the 15 pin D-connector with each signal on the same pin as the Brooks
Model 5964 MFC (see Fig. 2-1 for connections). Note that one formerly
unused connector pin, pin 13, now allows selection of up to ten separate
calibrations. The contents of the ten calibrations are determined from the
customer order, only those calibrations ordered will be available in the
instrument. Unless otherwise specified, a SLA6950/SLA6850 Series ordered
with only one calibration will have that calibration stored in calibration #1.
Before operating the SLA6950/SLA6850 Series, apply power and warm-up
the instrument for approximately one hour. After warm-up, apply gas pressure
then proceed by following the instructions in the following sections.

B. Analog Setpoint (MFC Only)
This input allows the user to establish the MFC setpoint. The usable range of
this input is from 0 to 5.5 Vdc which corresponds to 0 to 1 10% of the MFC full
scale flow rate. The setpoint input is capable of responding to input changes
of 0.5 mV or less. Setpoints below 45 mV will be treated as 0 volt setpoints.
For setpoints below 0 Vdc the MFC behaves as if a 0 Vdc setpoint is present.
Setpoints above 5.5 Vdc will cause a setpoint of at least 110% FS.

C. Analog Flow Signal
This output is used to indicate the flow signal. The range of this signal is from

-0.6 to 6.0 Vdc, with the range of 0 to 6.0 Vdc corresponding to a calibrated
flow signal of 0 to 120% of the full scale flow rate. A negative flow signal
indicates reverse flow through the device, but is NOT calibrated. The analog
flow signal is capable of resolving signals to 0.5 mV.

D. V alve Override (MFC Only)
This input allows the valve to be forced to its most closed state or its most open
state, regardless of setpoint. If this input is not electrically connected the MFC
will operate according to the current values of the other MFC inputs. If this input
is held at 0 Vdc or -15Vdc, the valve will be forced to its most closed state. If this
input is held to +15 Vdc the valve will be forced to its most open state.

Part Number: 541B100AAG

August, 2009

3-4

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Section 3 Operation

E. Calibration Select Pin
Connector pin 13 on the 15 pin 'D' connector, allows selection of one of ten
calibrations stored in the device. This pin is designed to accept pull-down
resistors referenced to signal common (pin 10).
Table 3-1 shows typical resistor values required for selecting calibrations 1
through 10. Note, these resistor values should be within ± 1% tolerance. The
default condition is with no resistor connected which activates Calibration #1.

When the calibration select pin changes state, the device performs any
required processing to change the calibration, then returns to normal
operation. If the device determines that the selected calibration is not valid,
(where applicable) the valve is driven to the closed state and the flow signal is
set to zero. T ypical time required to change calibrations is approximately 0.5
seconds.

NOTE: It is recommended to change calibrations during no-flow conditions.

Table 3-1 Typical Resistor Values for Calibration Select

DEFAULT = CAL # 1 (External resistor not installed)

CAL # RESISTOR VALUE (kohms)

1 Not Installed
2 0 or short
3 665
4 324
5 191
6 124
7 80.6
8 52.3
9 30.9

10 15

F. Zeroing the MFC (Self-zero)

It may be desirable to re-zero the flow sensor if it is operated at its
temperature extremes or if it is positioned in an attitude other than that
specified on the customer order.
Note: Before zeroing the instrument, zero pressure differential MUST be
established across the device. If there is pressure across the instrument
during the zero process, any detected flow through the sensor will be
misinterpreted as the zero flow reading. This will result in calibration
inaccuracy during normal operation.

Once zero differential pressure is established and verified, press the
recessed, momentary push-button (Self-zero button) located on the side of
the device (see Fig. 3-2) to start the Self-zero function.

The zero process requires approximately 200mil/sec. During this time, the
device will set its output signal to 0.0 Vdc.

3-5

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Section 3 Operation

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Part Number: 541B100AAG

August, 2009

Figure 3-3 Flow Control System Block Diagram. (MFC only)

3-6

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009

4-1 Overview

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Section 4 Maintenance

& Troubleshooting

No routine maintenance is required on the SLA6900/SLA6800 Series. If an in­line filter is used, the filtering elements should be periodically replaced. This
section provides the following information:

• Troubleshooting

• Gas Conversion Factors

• Orifice Sizing*

• Restrictor Sizing

* indicates MFC only

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

4-1

Section 4 Maintenance
& Troubleshooting

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-TMF-eng

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

4-2 Troubleshooting

Part Number: 541B100AAG

August, 2009

This section contains suggestions to help diagnose MFC/MFM related
problems in the gas distribution system and answers commonly asked
questions.

Brooks PN# S273Z668AAA breakout kit can be used as an accessory for
diagnosing electrical problems.

a. Problem: Flow/flow signal doesn’t reach setpoint. (MFC Only)

Failure of the flow rate or flow signal to achieve the setpoint could be caused
by a number of factors:

1. Insufficient pressure drop across the SLA6950/SLA6850 MFC (low or no

pressure). If there is not enough pressure differential across the MFC, it is

impossible for the MFC’s valve orifice to pass the full scale flow rate. To

check for this condition, compare the actual inlet/outlet pressure drop with

that specified on the order. Increase the pressure if necessary.

2. Setpoint is below minimum. MFCs with metal seats may have a

leak-through rate of up to 3% of full scale. These instruments are not

guaranteed to operate below setpoints of 3.3% FS.

4-2

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Section 4 Maintenance

& Troubleshooting

3. Clogged sensor tube. If the MFC sensor tube is clogged, the flow signal will

be very low or zero while the actual flow will be at the valve’s maximum

rate.

4. Clogged restrictor. If the MFC restrictor becomes clogged, a much larger

portion of the flow stream will pass through the sensor rather than going

straight through the restrictor. The symptom of this condition is a subst antially

reduced actual flow with a flow signal that matches the setpoint.

5. If the Valve Override pin is active, the valve will be forced open or closed.

Set this pin to its normal level before setting a setpoint.

b. Problem: Flow rate in excess of 100% at zero setpoint.

1. V alve Override pin set to open.

c. Problem: Flow/flow signal ‘unstable’.

SLA6950/SLA6850 MFC performance is tuned during calibration at the

conditions specified on the order. If the conditions in use (inlet and outlet

pressure, temperature, attitude, gas or mixture type) are different or

become different over time, the MFC may not perform as it did when it left

the factory . There are numerous solutions to this situation:

1. Restore the conditions to the values as they appear on the order.

2. ‘Adaptive valve control’ the MFC. The MFC contains a function which

allows it to learn about its environment. Adaptive valve control help s to

match the valve performance to the gas, pressure, and temperature of

actual use. Carefully read the section on adaptive valve control in Section

3-4.

d. Question: What is the purpose of the recessed push-button on the

side of the MFC?

Answer: This push-button is used to start a Self-zero function, DO NOT

press it unless you are performing this function as described in Section 3-5.

Inlet Pressure = 10 psig
Outlet Pressure = 10 inches of water (0.4 psig) or less
Note: Flow Rate based on Nitrogen

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

4-3

Section 4 Maintenance
& Troubleshooting

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-TMF-eng

Part Number: 541B100AAG

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Table 4-1 Bench Troubleshooting for MFC/MFM.

Trouble Possible Cause Check/Corrective Action

Output stays at zero level regardless Closed or clogged flow path up- or downstream or Open valve(s). Clean filter(s). Remove any foreign material from gas delivery system.
of command and there is no flow the controller.
through the controller.

Clogged Control Valve. Check TP3 with the command at 100%. If the voltage is more negative than -11V,

-0 volts applied to the valve override input Check valve override input. Refer to Section 2-10 for terminal assignments.
Defective sensor. Check sensor resistance. Refer to Table 4-2.
Defective printed circuit board. Replace printed circuit board.
Clogged Sensor tube and restrictor and/or a

clogged orifice. Notify Factory Service Center.

Output signal stays at +6.8 Volts +15 Volts applied to the valve override input. Check the valve override terminal. Refer to Section 2-10 for terminal assignments.
regardless of command and through the controller.
there is flow Defective printed circuit board. Replace printed circuit board.

Setpoint input floating. Connect command signal. Refer to Section 2-10 for terminal assignments.

Valve stuck open or leaky. Notify Factory Service Center.

Output signal follows set-point at Leaky control valve Notify Factory Service Center.
higher commands but will not go to
zero.

Output signal follows set-point at Insufficient inlet pressure or pressure drop. Adjust pressures, inspect in-line filters and clear/replace as necessary.
lower commands but does not reach
full scale. Wrong gas or conditions. Check Factory Calibration Information.

Partially clogged sensor Notify Factory Service Center.
Partially clogged valve. Notify Factory Service Center.

Controller grossly out of calibration. Partially clogged sensor. Notify Factory Service Center.
Flow is higher than desired.

Controller grossly out of calibration. Partially clogged restrictor. Notify Factory Service Center.
Flow is lower than desired.

Controller oscillates. Pressure drop or inlet pressure excessive. Adjust pressures.

Oversized orifice. Check orifice size. Refer to Section 4-3.
Wrong gas or conditions. Check Factory Calibration Information.
Faulty pressure regulator. Check regulator output.
Defective printed circuit board. Replace printed circuit board.

disassemble and repair the control valve. Refer to Sections 4-3 and 4-4.

August, 2009

Figure 4-1 Bench Troubleshooting Circuit

4-4

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009

Table 4-2. Sensor Troubleshooting.

SENSOR

SCHEMATIC

Remove the sensor connector from the PC Board for this procedure.

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

PIN
NO. FUNCTION

1 Heater
2 Temperature

3 Temperature
4 Sensor Common

5 Heater Common

Section 4 Maintenance

& Troubleshooting

Upstream

Sensor (Su)

Downstream

Sensor (Sd)

OHMMETER CONNECTION RESULT IF ELECTRICALLY FUNCTIONAL

Open circuit on ohmmeter. If either heater (1) or

Pin 1 or 4 to meter body sensor common (4) are shorted, an ohmmeter

reading will be obtained.

Pin 4 to Pin 2 Nominal 1100 ohms reading, depending on

Pin 4 to Pin 3

Pin 5 to Pin 1 Nominal 1000 ohm reading.
Pin 6 to Pin 7 Nominal ohm reading.

temperature and ohmmeter current.

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

4-5

Section 4 Maintenance
& Troubleshooting

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-TMF-eng

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Table 4-3 Orifice Capacities.

Orifice Size (inches) Minimum Flow Rate (sccm)

0°C (21.1°C)

0.0013 5.3 (5.7)

0.002 12.5 (13.5)

0.003 39.2 (42.2)

0.004 82.5 (88.9)

0.0055 190 (205)

0.007 374 (403)

0.010 748 (806)

0.014 1364 (1469)

0.020 2673 (2879)

0.032 6490 (6991)

0.048 12980 (13980)

0.062 22000 (2879)

0.078 31900 (34400)

0.093 42500 (45800)

0.120 69300 (74700)

Part Number: 541B100AAG

August, 2009

4-3 Gas Conversion Factors

If a mass flow controller is operated on a gas other than the gas it was
calibrated with, a scale shift will occur in the relation between the output
signal and the mass flow rate. This is due to the difference in heat capacities
between the two gases. This scale shift can be approximated by using the
ratio of the molar specific heat of the two gases or by sensor conversion
factor. A list of sensor conversion factors is given in Table 4-4. T o change to a
new gas, multiply the output reading by the ratio of the gas factor for the
desired gas by the gas factor for the calibration gas used.

Example:

The controller is calibrated for Nitrogen.
The desired gas is Carbon Dioxide (CO2)
The output reading is 75 sccm when Carbon Dioxide is flowing
Then 75 x 0.773 = 57.98 sccm of (CO2)

In order to calculate the conversion factor for a gas mixture, the following
formula should be used:

4-6

Where,
P1 = percentage (%) of gas 1 (by volume)
P2 = percentage (%) of gas 2 (by volume)

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009

4-4 Orifice Sizing

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Section 4 Maintenance

& Troubleshooting

Pn = percentage (%) of gas n (by volume)
Example: The desired gas is 20% Helium (He) and 80% Chlorine (Cl2) by

volume. The desired full scale flow rate of the mixture is 20 slpm. Sensor
conversion factor for the mixture is:

Nitrogen equivalent flow = 20/.945 = 21.16 slpm Nitrogen
It is generally accepted that the mass flow rate derived from this equation is

only accurate to ±5%. The sensor conversion factors given in Table 4-5 are
calculated based on a gas temperature of 21°C and a pressure of one
atmosphere. The specific heat of most gases is not strongly pressure, and/or
temperature, dependent. However, gas conditions that vary widely from these
reference conditions may cause an additional error due to the change in
specific heat caused by pressure and/or temperature.

The Orifice Sizing Nomograph, Figure 4-2, is used to calculate the control
valve's orifice size when changing any or all of the following factors from the
original factory calibration:

gas
operating pressure (inlet and outlet)
flow range

The flow controller's orifice is factory-sized to a preselected gas, operating
pressure and flow range. Note that the orifice is marked with its size in
thousandths of an inch. When changing the aforementioned factors, calculate
the new orifice size by following the procedure and example outlined in the
following paragraphs.

Example: Determine the orifice size for the following conditions:

Gas: Hydrogen
Flow Rate: 2,000 sccm
Outlet Pressure: 30 psig
Inlet Pressure: 50 psig

1. Determine Nitrogen equivalent flow rate (refer to T able 4-4).

OR

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

4-7

Section 4 Maintenance
& Troubleshooting

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-TMF-eng

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Where:
Q

NITROGEN

= Nitrogen equivalent flow rate (sccm)

Part Number: 541B100AAG

August, 2009

Q

GAS

ρρ

ρ

ρρ

NITROGEN

ρρ

ρ

ρρ

GAS

SG

GAS

= Desired flow rate of the gas (sccm)
= Density of Nitrogen at 70°F
= Density of the gas (taken at customer temperature)
= Specific gravity of the gas (t aken at customer

temperature)

Refer to Table 4-5 for densities.
Example:

Q

= 2,000 sccm

gas

= 2,000 x .269

4-8

= 538 sccm Nitrogen
In order to calculate the orifice conversion factor when using a gas mixture,

the following formula must be used:

Where P

P
P

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

= percent age by volume of gas 2

2

= percent age by volume of gas n

n

= percent age by volume of gas 1

1

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Section 4 Maintenance

& Troubleshooting

Example: Find the Nitrogen equivalent for 20 slpm of a 20% Helium and 80%
Chlorine gas mixture.

Q

Nitrogen

=Q

(orifice conversion factor)

gas

= 20 x 1.439
= 28.78 slpm Nitrogen

2. If inlet and outlet pressures are given in gauge pressure (psig) add 14.7 to

convert to absolute pressure (psia).

Outlet Pressure — 30 psig + 14.7 = 44.7 psia

Inlet Pressure — 50 psig + 14.7 = 64.7 psia

3. Determine Critical Pressure Drop

Critical pressure drop occurs when the outlet pressure (psia) is less than

half the inlet pressure (psia) or

If these conditions exist, the pressure drop (Dp) should be calculated as

follows:

Dp = Pressure drop (psi)
Pin= Inlet pressure (psia)

If these conditions do not exist, pressure drop equals the inlet pressure

minus the outlet pressure.

Then Dp = 64.7 - 44.7 = 20 psi

4. Using the nomograph, locate the pressure drop (psi) on the vertical line

marked "Dp" (Point A).

5. Locate the Nitrogen equivalent flow rate (sccm Nitrogen) on the vertical line

marked "Q

6. Draw a line connecting Dp and Q

Nitrogen

" (Point B).

and extend it to the baseline. Mark

Nitrogen

this point (Point C).

7. Locate inlet pressure (psia) on the vertical line marked "Pin" (Point D).

8. Draw a line connecting P

(Point D) and baseline (Point C) and then extend

in

this line to the vertical line marked Do (orifice diameter, inches) (Point E).

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

4-9

Section 4 Maintenance
& Troubleshooting

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-TMF-eng

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

9. This point on the line is the minimum orifice size for the given

conditions. If this point is between two orifice sizes, select the next largest

size orifice to ensure adequate flow. If the orifice selected falls below .0013,

choose .0013 size orifice.

For the example in Figure 4-3, the .007 size orifice would be selected.

4-5 Restrictor Sizing

The restrictor assembly is a ranging device for the sensor portion of the
controller. It creates a pressure drop which is linear with flow rate. This divert s
a sample quantity of the process gas flow through the sensor. Each restrictor
maintains a ratio of sensor flow to restrictor flow , however, the total flow
through each restrictor is different. Different restrictors (active area) have
different pressure drops and produce controllers with dif ferent full scale flow
rates. For a discussion of the interaction of the various parts of the controller ,
you are urged to review Section 3-2, Theory of Operation.

Part Number: 541B100AAG

August, 2009

If the restrictor assembly has been contaminated with foreign matter , the
pressure drop versus flow characteristics will be altered and it must be
cleaned or replaced. It may also be necessary to replace the restrictor
assembly when the mass flow controller is to be calibrated to a new flow rate.

Restrictor assembly replacement should be performed only by trained
personnel. Consult Factory / Service center.

Restrictors

The SLA6900/SLA6800 Series mass flow controller/meter uses two types of
restrictor assemblies depending on full scale flowrate and expected service
conditions.

1. Wire mesh for Nitrogen equivalent flow rates above 3.4 slpm. These
restrictor assemblies are made from a cylinder of wire mesh and are easily
cleaned if they become contaminated in service.

2. Anti-Clog Laminar Flow Element (A.C.L.F.E.) - This type of restrictor
assembly is used for Nitrogen equivalent flow rates less than 3.4 slpm.

Sizing

All SLA6900/SLA6800 Series Restrictor Assemblies are factory adjusted to
provide a specific pressure drop for each flow rate. This corresponds to the
desired full scale flow rate. A list of restrictor assemblies used in the
SLA6900/SLA6800 Series mass flow controller/meter is shown in Table 4-4.

Example:

The desired gas is Silane (SiH4).
The desired full scale flow rate is 200 sccm.
Sensor conversion factor is 0.625 from Table 4-4.
Nitrogen equivalent flow = 200/0.625 = 320 sccm Nitrogen

In the example above a Size P restrictor would be selected.

4-10

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng

Section 4 Maintenance

& Troubleshooting

Part Number: 541B100AAG
August, 2009

Table 4-4 Conversion Factors (Nitrogen Base).

GAS NAME FORMULA SENSOR ORIFICE DENSITY (KG/m3)

Acetylene C2H
Air Mixture 0.998 1.018 1.293
Allene C
Ammonia NH
Argon Ar 1.395 1.195 1.784
Arsine AsH

Boron Trichloride BCL
Boron Trifluoride BF
Bromine Pentafluoride BrF
Bromine Trifluoride BrF
Bromotrifluoroethylene C
Bromotrifluoromethane f-13B1 CBrF
1,3-Butadiene C4H
Butane C4H
1-Butene C4H
CIS-2-Butene C4H
Trans-2-Butene C4H

Carbon Dioxide CO
Carbon Disulfide CS
Carbon Monoxide CO 0.995 1.000 1.250
Carbon Tetrachloride CCL
Carbon Tetrafluoride f-14 CF
Carbonyl Fluoride COF
Carbonyl Sulfide COS 0.680 1.463 2.180
Chlorine CL
Chlorine Dioxide CLO
Chlorine Trifluoride CLF
2-Chlorobutane C4H9Cl 0.234 1.818 4.134
Chlorodifluoromethane f-22 CHCLF
Chloroform (Trichloromethane) CHCL
Chloropentafluoroethane f-115 C2CLF
Chlorotrifluoroethylene C2CLF
Chlorotrifluoromethane f-13 CCLF
Cyanogen (CN)
Cyanogen Chloride CLCN 0.618 1.480 2.730
Cyclobutane C4H
Cyclopropane C3H

Deuterium D
Diborane B2H
Diboromodifluoromethane f-12B2 CBr2F
1,2-Dibromotetrafluoroethane f-114B2 C2Br2F
Dichlorodifluoromethane f-12 CCL2F
Dichlorofluoromethane f-21 CHCL2F 0.456 1.985 4.912
Dichlorosilane SiH2CL
1,2-Dichloroethane C2H4Cl
1,2-Dichlorotetrafluoroethane f-114 C2CL2F
2,2 Dichloro C2HC12F
1,1-Difluoro-1-Chloroethane C2H3CLF
1,1-Difluoroethane CH3CHF
1,1-Difluoroethylene CH2:CF
Diethylsilane C4H12Si 0.183 1.775 3.940
Difluoromethane f-32 CF2H
Dimethylamine (CH3)2NH 0.370 1.269 2.013
Dimethylether (CH3)2O 0.392 1.281 2.055
2,2-Dimethylpropane C(CH3)
Disilane Si2H

Ethane C2H
Ethanol C2H6O 0.394 1.282 2.057
Ethylacetylene C4H
Ethyl Chloride C2H5CL 0.408 1.516 2.879

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

FACTOR FACTOR @0°C, 1 atm

0.615 0.970 1.173

0.478 1.199 1.787

0.786 0.781 0.771

0.754 1.661 3.478

0.443 2.044 5.227

0.579 1.569 3.025

0.287 2.502 7.806

0.439 2.214 6.108

0.326 2.397 7.165

0.412 2.303 6.615

0.354 1.413 2.491

0.257 1.467 2.593

0.294 1.435 2.503

0.320 1.435 2.503

0.291 1.435 2.503

0.740 1.255 1.977

0.638 1.650 3.393

0.344 2.345 6.860

0.440 1.770 3.926

0.567 1.555 2.045

0.876 1.598 3.214

0.693 1.554 3.011

0.433 1.812 4.125

0.505 1.770 3.906

0.442 2.066 5.340

0.243 2.397 7.165

0.337 2.044 5.208

0.430 1.985 4.912

0.498 1.366 2.322

0.387 1.413 2.491

0.505 1.224 1.877

0.995 0.379 0.177

0.448 1.000 1.235

0.363 2.652 8.768

0.215 2.905 10.53

0.390 2.099 5.492

0.442 1.897 4.506

0.382 1.879 4.419

0.231 2.449 7.479

0.259 2.336 6.829

0.341 1.957 4.776

0.415 1.536 2.940

0.458 1.512 2.860

0.627 1.360 2.411

0.247 1.613 3.244

0.332 1.493 2.779

0.490 1.038 1.357

0.365 1.384 2.388

3H4

2

2

3

3

5

3

BrF

2

2

4

2

2

3

3

3

3

6

10

8

8

8

4

2

2

3

2

3

5

3

3

2

8

6

6

2

4

2

2

2

4

3

2

2

2

2

4

6

6

6

Ref. No. J-836D508 gasdata.doc Vsn. 8.6

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

4-11

Section 4 Maintenance
& Troubleshooting

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-TMF-eng

Part Number: 541B100AAG

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Table 4-4 Conversion Factors (Nitrogen Base) Continued.

GAS NAME FORMULA SENSOR ORIFICE DENSITY (KG/m3)

Ethylene C2H
Ethylene Oxide C

Fluorine F
Fluoroform f-23 CHF
Germane GeH
Germanium Tetrachloride GeCl

Halothane (R-123B1) C2HBrClF
Helium He 1.386 0.378 0.178
Hexafluoroacetone F3CCOCF
Hexaflorobenzine C6F
Hexafluoroethane f-116 C
Hexafuoropropylene (HFP) C
Hexamethyldisilane (HMDS) (CH2)6Si
Hexane C6H
Hydrogen H
Hydrogen Bromide HBr 0.987 1.695 3.645

4

O 0.589 1.254 1.965

2H4

2

3

4

4

3

3

6

2F6

3F6

2

14

2

Hydrogen Chloride HCL 0.983 1.141 1.639
Hydrogen Cyanide HCN 0.744 0.973 1.179
Hydrogen Fluoride HF 0.998 0.845 0.893
Hydrogen Iodide HI 0.953 2.144 5.789
Hydrogen Selenide H2Se 0.837 1.695 3.613
Hydrogen Sulfide H2S 0.850 1.108 1.539

Iodine Pentafluoride IF
Isobutane C4H
Isobutene C4H
Isopentane C5H

5

10

8

12

Krypton Kr 1.382 1.729 3.708
Methane CH

Methylacetylene C3H
Methyl Bromide CH3Br 0.646 1.834 4.236
3-Methyl-1-butene C5H
Methyl Chloride CH3CL 0.687 1.347 2.308

4

4

10

Methyl Fluoride CH3F 0.761 1.102 1.518
Methyl Mercaptan CH4S 0.588 1.313 2.146
Methyl Silane CH6Si 0.393 1.283 2.061
Methyl Trichlorosilane (MTS) CH3Cl3Si 0.267 2.310 6.675
Methyl Vinyl Ether C3H6O 0.377 1.435 2.567
Monoethanolamine C2H7NO 0.305 1.477 2.728
Monoethylamine C2HH5NH
Monomethylamine CH3NH

2

2

Neon Ne 1.398 0.847 0.902
Nickel Carbonyl Ni(CO)
Nitric Oxide NO 0.995 1.030 1.339
Nitrogen N
Nitrogen Dioxide NO
Nitrogen Trifluoride NF
Nitrogen Trioxide N2O
Nitrosyl Chloride NOCL 0.644 1.529 2.913

4

2

2

3

3

Nitrous Oxide N2O 0.752 1.259 1.964
Octofluorocyclobutane C4F

Oxygen O
Oxygen Difluoride OF
Ozone O

Pentafluorethane f-125 C2HF
Pentane (n-Pentane) C5H
Perchloryl Fluoride CLO3F 0.448 1.905 4.571
Perfluorobutane C4F
Perfluoro-2-Butene C4F
Perfluoromethyl-vinylether PMVE 0.296 2.029 5.131

8

2

2

3

5

12

10

8

FACTOR FACTOR @0°C, 1 atm

0.619 1.000 1.261

0.924 1.163 1.695

0.529 1.584 3.127

0.649 1.653 3.418

0.268 2.766 9.574

0.257 2.654 8.814

0.219 2.434 7.414

0.632 2.577 8.309

0.255 2.219 6.139

0.249 2.312 6.663

0.139 2.404 7.208

0.204 1.757 3.847

1.008 0.269 0.090

0.283 2.819 9.907

0.260 1.440 2.593

0.289 1.435 2.503

0.211 1.605 3.222

0.763 0.763 0.717

0.473 1.196 1.782

0.252 1.584 3.127

0.359 1.269 2.013

0.565 1.067 1.420

0.212 2.371 7.008

1.000 1.000 1.251

0.758 1.713 2.052

0.501 1.598 3.168

0.443 1.649 3.389

0.169 2.672 8.933

0.988 1.067 1.429

0.672 1.388 2.402

0.738 1.310 2.138

0.287 2.070 5.360

0.212 1.605 3.222

0.738 2.918 10.61

0.268 2.672 8.933

August, 2009

4-12

Ref. No. J-836D508 gasdata.doc Vsn. 8.6

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng

Section 4 Maintenance

& Troubleshooting

Part Number: 541B100AAG
August, 2009

Table 4-4 Conversion Factors (Nitrogen Base) Continued.

GAS NAME FORMULA SENSOR ORIFICE DENSITY (KG/m3)

Perfluoropropane C3F
Pentane (n-Pentane) C
Phosgene COCL
Phosphine PH
Phosphorous Pentafluoride PF
Phosphorous Trifluoride PF
Propane (same as CH
Propylene (Propene) C

Rhenium Hexafluoride ReF
Silane SiH

Silicon Tetrachloride SiCL
Silicon Tetrafluoride SiF
Sulfur DioxideSO
Sulfur Hexafluoride SF
Sulfur Tetrafluoride SF
Sulfur TrioxideSO
Sulfuryl Fluoride SO

Tetrachloromethane CCL
Tetrafluoroethylene (TFE) C2F
Tetrafluorohydrazine N2F
Trichlorofluoromethane f-11 CCL3F 0.374 2.244 6.281
TrichlorosilaneSiHCL
Trimethyloxyborane (TMB) B(OCH3)
1,1,2-Trichloro-1,1,2-Triflouroet f-113 C2CL3F
Trimethylamine(CH3)3N 0.316 1.467 2.639
Tungsten Hexafluoride WF

Uranimum Hexafluoride UF
Vinyl BromideC2H3Br 0.524 1.985 4.772

Vinyl ChlorideC2H3CL 0.542 1.492 2.788
Vinyl FluorideC2H3F 0.576 1.281 2.046

Water Vapor H2O 0.861 0.802 0.804
Xenon Xe 1.383 2.180 5.851

2

3

3CH2CH3

4

2

3

3

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

FACTOR FACTOR @0°C, 1 atm

8

5H12

0.504 1.881 4.418

0.783 1.100 1.517

5

)C

3

3H8

3H6

6

0.625 1.070 1.440

4

4

0.728 1.529 2.858

6

4

0.535 1.691 3.575

2F2

4

4

4

0.329 2.201 6.038

3

3

6

6

0.179 2.591 8.396

0.212 1.605 3.222

0.346 2.109 5.620

0.495 1.770 3.906

0.343 1.274 2.008

0.401 1.234 1.875

0.230 3.279 13.41

0.310 2.465 7.579

0.395 1.931 4.648

0.270 2.348 6.516

0.353 1.957 4.776

0.423 1.931 4.648

0.344 2.345 6.858

0.361 1.905 4.526

0.367 1.926 4.624

0.300 1.929 4.638

0.231 2.520 7.920

0.227 3.264 13.28

0.220 3.548 15.70

Ref. No. J-836D508 gasdata.doc Vsn. 8.6

Note: If the calculated flow rate is such that two different size restrictors could
be used, always select the larger size.
If a mixture of two or more gases is being used, the restrictor selection must
be based on a Nitrogen equivalent flow rate of the mixture.

Example:
The desired gas is 20% Helium (He) and 80% Chlorine (Cl2) by volume. The
desired full scale flow rate of the mixture is 20 slpm. Sensor conversion factor
for the mixture is:

Nitrogen equivalent flow = 20/.945 = 21.16 slpm Nitrogen. In this example a
Size 4 Wire Mesh Assembly would be selected.

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

4-13

Section 4 Maintenance
& Troubleshooting

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-TMF-eng

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Part Number: 541B100AAG

August, 2009

Figure 4-2 Model SLA6950 Series Orifice Sizing Nomograph.

4-14

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Section 4 Maintenance

& Troubleshooting

Figure 4-3 Example Nomograph.

4-15

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Section 4 Maintenance
& Troubleshooting

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-TMF-eng

Part Number: 541B100AAG

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Table 4-5 Model SLA6900/SLA6800 Series Standard Restrictors.

Size Low High ACLFE Wire Mesh

SCCM Nitrogen Equivalent Flow* Part Number

D 8.038 11.38 S110Z275BMG

E 11.25 15.93 S110Z276BMG

F 15.75 22.30 S110Z277BMG
G 22.05 31.23 S110Z278BMG
H 30.88 43.73 S110Z279BMG

J 43.23 61.21 S110Z280BMG

K 60.52 85.70 S110Z281BMG

L 84.73 119.9 S110Z282BMG
M 118.6 167.9 S110Z283BMG
N 166.0 235.2 S110Z284BMG

P 232.5 329.3 S110Z285BMG
Q 325.4 460.9 S110Z286BMG
R 455.7 645.3 S110Z287BMG

S 638.0 903.4 S110Z288BMG

T 893.2 1265. S110Z289BMG
U 1250. 1771. S110Z290BMG

V 1750. 2479. S110Z291BMG
W 2451. 3471. S110Z292BMG

X 3431. 4859. S110Z319BMG

Y 4804. 6802. S110Z321BMG

1 6724. 9523. S110Z317BMG

2 9388. 13337. S110Z228BMG

3 13176. 18667. S110Z226BMG

4 18457. 30060. S110Z224BMG

Range

August, 2009

*Materials: BMG = 316 Stainless Steel Electropolished

NOTES:• For flow rates less than 8 sccm, use the low flow plug, P/N 618K019BMG in place of a restrictor assembly.

• If two sizes are allowed because of overlap, select the larger size.

• Restrictor size not required to enter order .

4-16

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Installation and Operation Manual

CE Certificationof Mass Flow Equipment

X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

CE Certification of Mass Flow Equipment

Dansk

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Emne : Tillæg til instruktions manual.
Reference : CE mærkning af Masse Flow udstyr
Dato : Januar-1996.

Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj
(EMC direktivet 89/336/EEC).
Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.

Kvaliteten af signal kabler og stik:

Brooks lever kabler af høj kvalitet, der imødekommer specifikationerne til CE mærkning.
Hvis der anvendes andre kabel typer skal der benyttes et skærmet kabel med hel skærm med 100% dækning.
Forbindelses stikket type “D” eller “cirkulære”, skal være skærmet med metalhus og eventuelle PG-forskruninger skal enten
være af metal eller metal skærmet.
Skærmen skal forbindes, i begge ender, til stikkets metalhus eller PG-forskruningen og have forbindelse over 360 grader.
Skærmen bør være forbundet til jord.
“Card Edge” stik er standard ikke af metal, der skal derfor ligeledes benyttes et skærmet kabel med hel skærm med 100%
dækning.
Skærmen bør være forbundet til jord.
Forbindelse af stikket; venligst referer til vedlagte instruktions manual.
Med venlig hilsen,

Deutsch

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Subject : Nachtrag zur Bedienungsanleitung.
Referenz : CE Zertifizierung für Massedurchflußgeräte
Datum : Januar-1996.

Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Verträglichkeit (EMC Richtlinie 89/336/
EEC) erhalten die Brooks-Geräte (elektrische/elektronische Komponenten) das CE-Zeichen.
Bei der Auswahl der Verbindungskabel für CE-zertifizierte Geräte sind spezielle Anforderungen zu beachten.

Qualität der Verbindungskabel, Anschlußstecker und der Kabeldurchführungen

Die hochwertigen Qualitätskabel von Brooks entsprechen der Spezifikation der CE-Zertifizierung.
Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten, daß eine
100 %igenSchirmababdeckung des Kabels gewährleistet ist.

·“D” oder “Rund” -Verbindungsstecker sollten eine Abschirmung aus Metall besitzen.
Wenn möglich, sollten Kabeldurchführungen mit Anschlußmöglichkeiten für die Kabelabschrimung verwendet werden.
Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchführungen über den vollen Umfang von
360 ° anzuschließen.

Die Abschirmung ist mit dem Erdpotential zu verbinden.
Platinen-Steckverbindunger sind standardmäßige keine metallgeschirmten Verbindungen. Um die Anforderungen der CE­Zertifizierung zu erfüllen, sind Kabel mit einer 100 %igen Schirmababdeckung zu verwenden.
Die Abschirmung ist mit dem Erdpotential zu verbinden.

Die Belegung der Anschlußpins können Sie dem beigelegten Bedienungshandbuch entnehmen.

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

A-1

CE Certification of Mass Flow Equipment

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng

Part Number: 541B100AAG

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

August, 2009

English

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Subject : Addendum to the Instruction Manual.
Reference : CE certification of Mass Flow Equipment
Date : January-1996.

The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro
Magnetic Compatibility (EMC directive 89/336/EEC).
Special attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used
providing cable screen clamping.

The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to a earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE
certification.

The shield should be terminated to a earth ground.
For pin configuration : Please refer to the enclosed Instruction Manual.

Español

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Asunto : Addendum al Manual de Instrucciones.
Referencia : Certificación CE de los Equipos de Caudal Másico
Fecha : Enero-1996.

Los equipos de Brooks (eléctricos/electrónicos) en relación con la marca CE han pasado satisfactoriamente las pruebas
referentes a las regulaciones de Compatibilidad Electro magnética (EMC directiva 89/336/EEC).
Sin embargo se requiere una atención especial en el momento de seleccionar el cable de señal cuando se va a utilizar un
equipo con marca CE

Calidad del cable de señal, prensaestopas y conectores:

Brooks suministra cable(s) de alta calidad, que cumple las especificaciones de la certificación CE .
Si usted adquiere su propio cable de señal, debería usar un cable que esté completamente protegido en su conjunto con un
apantallamiento del 100%.

Cuando utilice conectores del tipo “D” ó “Circular” deberían estar protegidos con una pantalla metálica. Cuando sea posible,
se deberán utilizar prensaestopas metálicos provistos de abrazadera para la pantalla del cable.
La pantalla del cable deberá ser conectada al casquillo metálico ó prensa y protegida en ambos extremos completamente
en los 360 Grados.
La pantalla deberá conectarse a tierra.

Los conectores estandar de tipo tarjeta (Card Edge) no son metálicos, los cables utilizados deberán ser protegidos con un
apantallamiento del 100% para cumplir con la certificación CE.
La pantalla deberá conectarse a tierra.

Para ver la configuración de los pines: Por favor, consultar Manual de Instrucciones adjunto.

A-2

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Installation and Operation Manual

CE Certificationof Mass Flow Equipment

X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Français

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Sujet : Annexe au Manuel d’Instructions.
Référence : Certification CE des Débitmètres Massiques à Effet Thermique.
Date : Janvier 1996.

Messieurs,
Les équipements Brooks (électriques/électroniques) portant le label CE ont été testés avec succès selon les règles de la
Compatibilité Electromagnétique (directive CEM 89/336/EEC).
Cependant, la plus grande attention doit être apportée en ce qui concerne la sélection du câble utilisé pour véhiculer le signal
d’un appareil portant le label CE.

Qualité du câble, des presse-étoupes et des connecteurs:

Brooks fournit des câbles de haute qualité répondant aux spécifications de la certification CE.
Si vous approvisionnez vous-même ce câble, vous devez utiliser un câble blindé à 100 %.
Les connecteurs « D » ou de type « circulaire » doivent être reliés à la terre.
Si des presse-étoupes sont nécessaires, ceux ci doivent être métalliques avec mise à la terre.
Le blindage doit être raccordé aux connecteurs métalliques ou aux presse-étoupes sur le pourtour complet du câble, et à
chacune de ses extrémités.

Tous les blindages doivent être reliés à la terre.
Les connecteurs de type « card edge » sont non métalliques. Les câbles utilisés doivent être blindés à 100% pour satisfaire à
la réglementation CE.
Tous les blindages doivent être reliés à la terre.
Se référer au manuel d’instruction pour le raccordement des contacts.

Greek

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

1996

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

A-3

CE Certification of Mass Flow Equipment

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng

Part Number: 541B100AAG

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

August, 2009

Italiano

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Oggetto : Addendum al manuale di istruzioni.
Riferimento : Certificazione CE dei misuratori termici di portata in massa
Data : Gennaio 1996.

Questa strumentazione (elettrica ed elettronica) prodotta da Brooks Instrument, soggetta a marcatura CE, ha superato con
successo le prove richieste dalla direttiva per la Compatibilità Elettomagnetica (Direttiva EMC 89/336/EEC).
E’ richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a
marchio CE.

Qualità dei cavi di segnale e dei relativi connettori:

Brooks fornisce cavi di elevata qualità che soddisfano le specifiche richieste dalla certificazione CE. Se l’utente intende
usare propri cavi, questi devono possedere una schermatura del 100%.
I connettori sia di tipo “D” che circolari devono possedere un guscio metallico. Se esiste un passacavo esso deve essere
metallico e fornito di fissaggio per lo schermo del cavo.
Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360° e questo vale per entrambe le
estemità.

Lo schermo deve essere collegato ad un terminale di terra.
I connettori “Card Edge” sono normalmente non metallici. Il cavo impiegato deve comunque avere una schermatura del 100%
per soddisfare la certificazione CE.

Lo schermo deve essere collegato ad un terminale di terra.
Per il corretto cablaggio dei terminali occorre fare riferimento agli schemi del manuale di istruzioni dello strumento.

Nederlands

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Onderwerp : Addendum voor Instructie Handboek
Referentie : CE certificering voor Mass Flow Meters & Controllers
Datum : Januari 1996

Dames en heren,
Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en voldoen aan
de wetgeving voor Electro Magnetische Compatibiliteit (EMC wetgeving volgens 89/336/EEC).
Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde produkten.

Kwaliteit van de signaalkabel en kabelaansluitingen:

• Brooks levert standaard kabels met een hoge kwaliteit, welke voldoen aan de specificaties voor CE certificering.
Indien men voorziet in een eigen signaalkabel, moet er gebruik gemaakt worden van een kabel die volledig is
afgeschermd met een bedekkingsgraad van 100%.

• “D” of “ronde” kabelconnectoren moeten afgeschermd zijn met een metalen connector kap. Indien kabelwartels worden
toegepast, moeten metalen kabelwartels worden gebruikt die het mogelijk maken het kabelscherm in te klemmen
Het kabelscherm moet aan beide zijden over 360° met de metalen connectorkap, of wartel verbonden worden.
Het scherm moet worden verbonden met aarde.

• “Card-edge” connectors zijn standaard niet-metallisch. De gebruikte kabels moeten volledig afgeschermd zijn met een
bedekkingsgraad van 100% om te voldoen aan de CE certificering. Het scherm moet worden verbonden met aarde.

Voor pin-configuraties a.u.b. verwijzen wij naar het bijgesloten instruktie handboek.
Hoogachtend,

A-4

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Installation and Operation Manual

CE Certificationof Mass Flow Equipment

X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

Norsk

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Vedrørende : Vedlegg til håndbok
Referanse : CE sertifisering av utstyr for massestrømsmåling og regulering
Dato : Januar 1996

Til den det angår

Brooks Instrument elektrisk og elektronisk utstyr påført CE-merket har gjennomgått og bestått prøver som beskrevet i EMC
forskrift om elektromagnetisk immunitet, direktiv 89/336/EEC.
For å opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det måletekniske utstyret.

Utførelse av signalkabel og tilhørende plugger:

• Brooks Instrument tilbyr levert med utstyret egnet kabel som møter de krav som stilles til CE-sertifisering.

• Dersom kunden selv velger kabel, må kabel med fullstendig, 100% skjerming av lederene benyttes.
“D” type og runde plugger og forbindelser må være utført med kappe i metall og kabelnipler må være utført i metall for
jordet innfesting av skjermen. Skjermen i kabelen må tilknyttes metallet i pluggen eller nippelen i begge ender over
360°, tilkoblet elektrisk jord.

• Kort-kantkontakter er normalt utført i kunststoff. De tilhørende flatkabler må være utført med fullstendig, 100% skjerming
som kobles til elektrisk jord på riktig pinne i pluggen, for å møte CE sertifiseringskrav.

For tilkobling av medleverte plugger, vennligst se håndboken som hører til utstyret.
Vennlig hilsen

Português

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Assunto : Adenda ao Manual de Instruções
Referência : Certificação CE do Equipamento de Fluxo de Massa
Data : Janeiro de 1996.

O equipamento (eléctrico/electrónico) Brooks com a marca CE foi testado com êxito nos termos do regulamento da
Compatibilidade Electromagnética (directiva CEM 89/336/EEC).
Todavia, ao seleccionar-se o cabo de sinal a utilizar com equipamento contendo a marca CE, será necessário ter uma
atenção especial.

Qualidade do cabo de sinal, buchas de cabo e conectores:

A Brooks fornece cabo(s) de qualidade superior que cumprem os requesitos da certificação CE.
Se fornecerem o vosso próprio cabo de sinal, devem utilizar um cabo que, na sua totalidade, seja isolado com uma
blindagem de 100%.
Os conectores tipo “D” ou “Circulares” devem ser blindados com uma blindagem metálica. Se tal for necessário, deve utilizar­se buchas metálicas de cabo para o isolamento do aperto do cabo.

O isolamento do cabo deve ser ligado à blindagem ou bucha metálica em ambas as extremidades em 360º.
A blindagem deve terminar com a ligação à massa.
Os conectores “Card Edge” não são, em geral, metálicos e os cabos utilizados devem ter um isolamento com blindagem a
100% nos termos da Certificação CE..

A blindagem deve terminar com ligação à massa.
Relativamente à configuração da cavilha, queiram consultar o Manual de Instruções.

Suomi

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

A-5

CE Certification of Mass Flow Equipment

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng

Part Number: 541B100AAG

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

August, 2009

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Asia : Lisäys Käyttöohjeisiin
Viite : Massamäärämittareiden CE sertifiointi
Päivämäärä : Tammikuu 1996

Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC).
Erityistä huomiota on kuitenkin kiinnitettävä signaalikaapelin valintaan.

Signaalikaapelin, kaapelin läpiviennin ja liittimen laatu

Brooks toimittaa korkealaatuisia kaapeleita, jotka täyttävät CE sertifikaatin vaatimukset. Hankkiessaan signaalikaapelin itse,
olisi hankittava 100%:sti suojattu kaapeli.
“D” tai “Circular” tyyppisen liitimen tulisi olla varustettu metallisuojalla. Mikälì mahdollista, tulisi käyttää metallisia
kaapeliliittimiä kiinnitettäessä suojaa.

Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa päissä 360°:n matkalta.
Suojan tulisi olla maadoitettu.

“Card Edge Connector”it ovat standarditoimituksina ei-metallisia. Kaapeleiden täytyy olla 100%: sesti suojattuja jotta ne
olisivat CE sertifikaatin mukaisia.

Suoja on oltava maadoitettu.
Nastojen liittäminen; katso liitteenä oleva manuaali.
Ystävällisin terveisin,

Svensk

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Subject : Addendum to the Instruction Manual
Reference : CE certification of Mass Flow Equipment
Date : January 1996

Brooks (elektriska / elektronik) utrustning, som är CE-märkt, har testats och godkänts enligt gällande regler för
elektromagnetisk kompabilitet (EMC direktiv 89/336/EEC).
Speciell hänsyn måste emellertid tas vid val av signalkabel som ska användas tillsammans med CE-märkt utrustning.

Kvalitet på signalkabel och anslutningskontakter:

Brooks levererar som standard, kablar av hög kvalitet som motsvarar de krav som ställs för CE-godkännande.
Om man använder en annan signalkabel ska kabeln i sin helhet vara skärmad till 100%.
“D” eller “runda” typer av anslutningskontakter ska vara skärmade. Kabelgenomföringar ska vara av metall alternativt med
metalliserad skärmning.

Kabelns skärm ska, i bada ändar, vara ansluten till kontakternas metallkåpor eller genomföringar med 360 graders
skärmning.

Skärmen ska avslutas med en jordförbindelse.
Kortkontakter är som standard ej metalliserade, kablar som används måste vara 100% skarmade för att överensstämma med
CE-certifieringen.

Skärmen ska avslutas med en jordförbindelse.
För elektrisk anslutning till kontaktstiften hänvisas till medföljande instruktionsmanual.

A-6

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng
Part Number: 541B100AAG
August, 2009

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

THIS PAGE WAS

INTENTIONALLY

LEFT BLANK

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Installation and Operation Manual

X-TMF-SLA6900-SLA6800-MFC-eng

Part Number: 541B100AAG

Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's

LIMITED WARRANTY

Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use
and service and that the Software will execute the programming instructions provided by Seller until the expiration of the
earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
Products purchased by Seller from a third party for resale to Buyer (“Resale Products”) shall carry only the warranty extended
by the original manufacturer.
All replacements or repairs necessitated by inadequate preventive maintenance, or by normal wear and usage, or by fault of
Buyer, or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions, or by abuse,
accident, alteration, misuse, improper installation, modification, repair, storage or handling, or any other cause not the fault of
Seller are not covered by this limited warranty, and shall be at Buyer ’s expense.
Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty
period or ninety (90) days, whichever is longer. This limited warranty is the only warranty made by Seller and can be
amended only in a writing signed by an authorized representative of Seller.

BROOKS SERVICE AND SUPPORT

Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with
outstanding service and support to back it up. We operate first class repair facilities located around the world to provide
rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability
for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant
International Standards.

Visit www.BrooksInstrument.com to locate the service location nearest to you.

August, 2009

ST ART-UP SERVICE AND IN-SITU CALIBRATION

Brooks Instrument can provide start-up service prior to operation when required.
For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate
the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable
to the relevant international quality standards.

CUSTOMER SEMINARS AND TRAINING

Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons.

Please contact your nearest sales representative for more details.

HELP DESK

In case you need technical assistance:

Americas

1 888 554 FLOW
Europe [phone]
Asia [phone]

Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change
without notice.

TRADEMARKS

Brooks..........................................................Brooks Instrument, LLC

557 Dry Silicone .....................................................Dow Corning Co.

Freon................................................ E. I. DuPont deNemours & Co.

Kalrez..........................................................DuPont Dow Elastomers

Teflon ............................................... E. I. DuPont deNemours & Co.

TruCal .......................................................... Brooks Instrument, LLC

VCO ......................................................................... Cajon Company

VCR ......................................................................... Cajon Company

Viton..............................................DuPont Performance Elastomers

Vol-U-Meter .................................................Brooks Instrument, LLC

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Artisan Technology Group is your source for quality

new and certied-used/pre-owned equipment

• FAST SHIPPING AND

DELIVERY

• TENS OF THOUSANDS OF
IN-STOCK ITEMS

• EQUIPMENT DEMOS

• HUNDREDS OF
MANUFACTURERS

SUPPORTED

• LEASING/MONTHLY
RENTALS

• ITAR CERTIFIED
SECURE ASSET SOLUTIONS

SERVICE CENTER REPAIRS

Experienced engineers and technicians on staff
at our full-service, in-house repair center

Instra

Remotely inspect equipment before purchasing with
our interactive website at www.instraview.com

Contact us: (888) 88-SOURCE | [e-mail] | www.artisantg.com

SM

REMOTE INSPECTION

View

WE BUY USED EQUIPMENT

Sell your excess, underutilized, and idle used equipment
We also offer credit for buy-backs and trade-ins

www.artisantg.com/WeBuyEquipment

LOOKING FOR MORE INFORMATION?

Visit us on the web at www.artisantg.com for more
information on price quotations, drivers, technical

specications, manuals, and documentation