Brooks Instrument SLA5840 User Manual

Installation and Operation Manual

X-PR-SLA5800-RT-eng
Part Number: 541B120AAG
August, 2009

Delta Class Remote Transducer
Pressure Controller/Flowmeter

Brooks® Model SLA5840

Model SLA5840A

Analog I/O

Model SLA5840D

Digital I/O DeviceNet

Installation and Operation Manual

X-PR-SLA5800-RT-eng

®

Model SLA5840

Part Number: 541B120AAG

August, 2009Brooks

Essential Instructions

Read this page before proceeding!

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because
these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they
continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your
safety program when installing, using and maintaining Brooks Products.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct
manual, please see back cover for local sales office contact information. Save this instruction manual for future reference.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

• Inform and educate your personnel in the proper installation, operation and maintenance of the product.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable
local and national codes. Connect all products to the proper electrical and pressure sources.

• T o ensure proper performance, use qualified personnel to inst all, operate, update, program and maintain the product.

• When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument.
Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at
risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being
performed by qualified persons, to prevent electrical shock and personal injury.

Pressure Equipment Directive (PED)

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the
Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland
and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with.

• Section 1 of this manual contains important safety and operating instructions related to the PED directive.

• Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED.

• Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

ESD (Electrostatic Discharge)

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal
device is installed, removed or adjusted.

3. Printed circuit cards must be transported in a conductive container . Boards must not be removed from protective enclosure
until immediately before installation. Removed boards must immediately be placed in protective container for transport,
storage or return to factory .

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic
designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small
amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function
properly, exhibit early failure.

Installation and Operation Manual

X-PR-SLA5800-RT-eng
Part Number: 541B120AAG
August, 2009

Dear Customer ,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com

Y ours sincerely ,
Brooks Instrument

Brooks® Model SLA5840

®

Model SLA5840

Installation and Operation Manual

X-PR-SLA5800-RT-eng

Part Number: 541B120AAG

August, 2009Brooks

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Installation and Operation Manual

X-PR-SLA5800-RT-eng
Part Number: 541B120AAG
August, 2009

Paragraph Page
Number Number

Section 1 Introduction

1-1 Scope .........................................................................................................................................1-1

1-2 Purpose ......................................................................................................................................1-1

1-3 Description .................................................................................................................................1-1

1-4 Specifications .............................................................................................................................1-2

Section 2 Installation

2-1 General ......................................................................................................................................2-1

2-2 Receipt of Equipment.................................................................................................................2-1

2-3 Recommended Storage Practice ...............................................................................................2-1

2-4 Return Shipment ........................................................................................................................2-2

2-5 Removal from Storage ...............................................................................................................2-2

2-6 Gas Connections........................................................................................................................2-2

2-7 Installation ..................................................................................................................................2-2

2-8 In-Line Filter ...............................................................................................................................2-3

2-9 Operation Check Procedure (Analog I/O) ..................................................................................2-4

2-10 Digital I/O: DeviceNet or F

OUNDATION Fieldbus..........................................................................2-4

Brooks® Model SLA5840

Contents

Section 3 Operation

3-1 Overview ....................................................................................................................................3-1

3-2 Theory of Operation for RT ........................................................................................................3-1

3-3 Features .....................................................................................................................................3-1

3-4 Analog I/O Mode of Operation....................................................................................................3-2

Section 4 Maintenance & Troubleshooting

4-1 Overview ....................................................................................................................................4-1

4-2 Troubleshooting..........................................................................................................................4-2

4-3 Gas Conversion Factors ............................................................................................................4-4

4-4 Orifice Sizing..............................................................................................................................4-5

4-5 Restrictor Sizing .........................................................................................................................4-8

Section A CE Certificate

CE Certificate of Mass Flow Equipment ................................................................................................A-1

Warranty, Local Sales/Service Cont act Information....................................................................... Back Cover

i

Contents Installation and Operation Manual

X-PR-SLA5800-RT-eng

Part Number: 541B120AAG

Brooks® Model SLA5840

Figures

Figure Page
Number Number

1-1 Model SLA5840 Analog I/O Controller with 1/4" T ube Connections...........................................1-5

1-2 Model SLA5840 Digital I/O DeviceNet Controller with 1/4" T ube Connections...........................1-5

2-1 D-Connector Shielded Cable Hookup Diagram - Voltage I/O Options .......................................2-5

2-2 Common Electrical Hookups Voltage I/O Version ......................................................................2-5

3-1 Externally Accessible Adjustment for all Meters/Controllers.......................................................3-3

4-1 Bench Troubleshooting Circuit ...................................................................................................4-3

4-2 Model SLA5850 Orifice Sizing Nomograph ...............................................................................4-13

4-3 Example Nomograph ................................................................................................................4-14

Tables

Table Page
Number Number

2-1 Recommended Filter Size..........................................................................................................2-3

4-1 Conversion Factors (Nitrogen Base)..........................................................................................4-9

4-2 Orifice Capacities ......................................................................................................................4-14

4-3 Delta Class EL Series Models SLA5850 & SLA5860 Standard Restrictors...............................4-15

August, 2009

ii

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Part Number: 541B120AAG
August, 2009

1-1 Scope

1-2 Purpose

Section 1 IntroductionInstallation and Operation Manual

Brooks® Model SLA5840

Thank you for purchasing a Brooks Instrument Remote Transducer
Pressure Controller/Flowmeter Product. This manual, X-PR-SLA5800-RT­eng is an installation and operation manual for your instrument.

If you have purchased a Brooks® Digital Mass Flow Product with DeviceNet
Communications, a separate DeviceNet Instruction Manual shall also be
provided as part of the operating documentation.

The Brooks Digital Products are mass flow measurement devices
designed for accurately measuring and controlling both pressure and the
flows of gases. This instruction manual is intended to provide the user with
all the information necessary to install, operate and maintain the Brooks® RT.
This manual is organized into the following sections.

1-3 Description

Section 1 Introduction
Section 2 Installation
Section 3 Operation
Section 4 Maintenance & T roubleshooting
Section A CE Certification
Back Cover Warranty , Local Sales/Service Cont act Information

It is recommended that this manual be read in its entirety before attempting
to operate or repair these Brooks Digital products.

The Brooks® Model SLA5840 Pressure Controller/Flowmeter controls
pressure while also measuring flow rate. The Model SLA5840 receives a
remote pressure transducer signal, and using adjustable integral PID
control electronics and control valve, will maintain a desired set pressure.
In addition to the pressure control function, the Model SLA5840 provides a
0-5 V signal which is linear with mass flow rate. The Model SLA5840 can
also be configured as a mass flow controller for calibration or test
purposes.

Brooks now offers control interface with DeviceNetTM, a high-speed (up to
500k baud) digital communication network adopted by the Semiconductor
industry . Brooks' communications capabilities and device-profile have been
certified by the ODV ATM (Open DeviceNet Vendors’ Association). Other
network protocols are in development. Talk to your Brooks representative
about your specific needs.

The MFC's microprocessor uses a multi-point calibration curve, to deal
with residual sensor non-linearity , yielding a highly accurate process signal.
The microprocessor then executes Brooks’ proprietary Adaptive V alve

1-1

Section 1 Introduction

Brooks® Model SLA5840

Installation and Operation Manual

X-PR-SLA5800-RT-eng

Part Number: 541B120AAG

August, 2009

Control algorithm to rapidly adjust the valve actuation to match setpoint.
Process data and commands may be wired using either traditional 5 volt

analog connections or digital communications networks, the measurement
and control performance is the same!

The SLA5800 family of products takes advantage of modular design in
both mechanical and electrical construction. This modularity allows for
simplified customer ordering and factory configuration, enabling Brooks to
more easily meet the ever changing needs of our global customers.
Brooks' production flexibility translates into reduced lead times for our
customers. This flexibility allows products using both traditional analog
connections or leading edge network communications protocols.

The SLA5800 series of controllers can directly replace existing analog
products bringing with them greatly improved accuracy . Analog and digital
applications will see settling time improvements with an insensitivity to
varying process conditions, due to Brooks' proprietary Adaptive Valve Control
algorithm.

1-4 Specifications

Performance Characteristics:
Flow Ranges**

Model SLA5840
Any range from 0-3 sccm to 0-30,000 sccm N2 eq.

**Standard: 0° and 101kPa (760 Torr). Per SEMI Guideline
E12-96.

Flow Control Range

(50:1) - elastomeric valve seat

Flow Accuracy

±1.0% of rate, including linearity (20% to 100% F.S .), ±0.2% of F.S. (below
20% full scale)

Flow Repeatability

±0.20% of rate

1-2

Flow T emperature Sensitivity

Zero: Less than 0.05% F.S. per °C
Sp an: Less than 0.1% of rate per°C

Flow Settling Time

Actual flow:
Less than 800 ms to within ±2% full scale of final value for a 0-100% step.
Constant step response of less than 800 ms for all other transient steps.

X-PR-SLA5800-RT-eng
Part Number: 541B120AAG
August, 2009

Section 1 IntroductionInstallation and Operation Manual

Brooks® Model SLA5840

Performance Characteristics: Pressure
Pressure Ranges

Dependent upon remote sensor transducer, maximum 1500 psig.

External Sensor Input

Suitable for pressure sensors with maximum 0-10 Vdc output signals.

Pressure Control Range

100:1 for elastomer valve seat

Pressure Settling Time

Less than 1 second typical for a 20-100% setpoint step with maximum 2%
overshoot. Actual pressure response highly dependent on system design.

RATINGS:
Operating Pressure

1500 psig maximum

(PED) Pressure Equipment Directive 97/23/EC:

Equipment falls under Sound Engineering Practice (SEP)

Leak Integrity

Inboard to Outboard: 1x10-9 atm scc/sec Helium max.

Ambient T emperature Limit s

Operating: 0°C to 60°C (32°F to 140°F)
Non-Operating: -25°C to 100°C (-13°F to 212°F)

Fluid Temperature Limits

0°C to 65°C (32°F to 149°F)

Physical Characteristics:

Materials of Construction

316L Vacuum Arc Remelt (VAR), 316L, and high-alloy ferritic stainless
steel.
V alve Seat: fluoroelastomers,Buna-N, Kalrez

External/internal seals: Viton® fluoroelastomers, Buna-N or Kalrez

®

®

Internal Wetted Surface Finish: 32 Ra

Outline Dimensions

Refer to Figures 1-1 & 1-2.

Process Connections

Refer to Figures 1-1 & 1-2.

Electrical Characteristics:
Electrical Connections

Analog I/O option: 15-pin, male
Digital I/O DeviceNet option: 5-pin Micro-Connector male.

Power Supply V oltage

Analog I/O option: +15 Vdc, ±5%

(traditional -15 Vdc pin is ignored)

Digital I/O DeviceNet option: 1 1 - 25Vdc

1-3

Section 1 Introduction

Brooks® Model SLA5840

Installation and Operation Manual

X-PR-SLA5800-RT-eng

Part Number: 541B120AAG

August, 2009

Power Requirements

Analog I/O option, with valve: 2.6 4.0
Digital I/O DeviceNet option, with valve: 4.9 7.6

Analog I/O Pin Connections:
Signal: 15-pin D-conn

Setpoint/Command Common 1
Flow/Signal Out 2
+15v dc power 5
Setpoint/Command In 8
Power Supply Common 9
Output Signal Common 10
+5V reference 11
Valve Override 12
Mode Select Pin 13
External Sensor 15
no-connections 3, 4, 6, 7, 14

Watts, typ. Watts, max.

Setpoint Input (Analog I/O option only)

0-5 Vdc: Input will accept signals to 5.5 Vdc (1 10% F.S.).
Input resistance: 360K ohm min.

Flow Output (Analog I/O option only)

0-5 Vdc into 2K ohm minimum load.
Output will indicate process variable up to 6 Vdc (120% F .S.).

V alve Override Signal (Analog I/O option only)

Left floating/unconnected – instrument controls valve to command setpoint
Connected to signal at or above 5.0 Volts

– valve is forced open
Connected to signal at or below 0.0 Volt s

– valve is forced closed

5 Volt Reference Signal (Analog I/O option & 15 PIN only)

5.0 Vdc + 0.2% output available for potentiometer
command setpoint input ( 1K ohm minimum load).

Mode Select Signal (15 Pin Only)

Select whether to control in external sensor (pressure) mode or flow mode.

EMC Directive (89/336/EEC) per 61326.

1-4

X-PR-SLA5800-RT-eng
Part Number: 541B120AAG
August, 2009

Section 1 IntroductionInstallation and Operation Manual

Brooks® Model SLA5840

Figure 1-1 Model SLA5840 Analog I/O Controller with 1/4" Tube Connections

Figure 1-2 Model SLA5840 DeviceNet Digital I/O Controller with 1/4" Tube Connections

1-5

Section 1 Introduction

Brooks® Model SLA5840

Installation and Operation Manual

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Part Number: 541B120AAG

August, 2009

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Installation and Operation Manual

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2-1 General

2-2 Receipt of Equipment

Section 2 Installation

Brooks® Model SLA5840

This section provides installation instructions for the Brooks® Delta Class
EL Series. Section 1, Figures 1-1 and 1-2 show the dimensions and
electrical connections.

When the instrument is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is
damaged, the local carrier should be notified at once regarding his liability .
A report should be submitted to your nearest Product Service Department.

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

2-3 Recommended Storage Practice

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]
E-mail: [e-mail]

Remove the envelope containing the packing list. Carefully remove the
instrument from the packing case. Make sure spare part s are not
discarded with the packing materials. Inspect for damaged or missing
parts.

If intermediate or long-term storage of equipment is required, it is
recommended that the equipment be stored in accordance with the
following:

a. Within the original shipping container.
b. Stored in a sheltered area, preferably a warm, dry, heated warehouse.
c. 32°C (90°F) maximum,45°F (7°C) minimum.
d. Relative humidity 45% nominal, 60% maximum, 25% minimum.

Upon removal from storage a visual inspection should be
conducted to verify the condition of equipment is "as received".

2-1

Section 2 Installation

Brooks® Model SLA5840

2-4 Return Shipment

Installation and Operation Manual

X-PR-SLA5800-RT-eng

Part Number: 541B120AAG

August, 2009

Prior to returning any instrument to the factory , contact your nearest Brooks
location for a Return Materials Authorization Number (RMA#). This can be
obtained from one of the following locations:

Brooks Instrument

407 W. V ine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel [phone]
Fax [phone]
E-m ail: BrooksAm @BrooksInstrument.com
www.BrooksInstrument.com

Brooks Instrument Brooks Instrument

Neonstraat 3 1-4-4 Kitasuna Koto-Ku
6718 WX Ede, Netherlands Tokyo, 136-0073 Japan
P.O. Box 428 Tel [phone]
6710 BK Ede, Netherlands Fax [phone]
Tel [phone] Email: [e-mail]
Fax [phone]
E-mail: [e-mail]

2-5 Removal from Storage

2-6 Gas Connections

2-7 Installation

Any instrument returned to Brooks requires completion of Form RPR003-1,
Brooks Instrument Decontamination S tatement, as well as, a Material
Safety Data Sheet (MSDS) for the fluid(s) used in the instrument. This is
required before any Brooks Personnel can begin processing. Copies of the
form can be obtained from any Brooks Instrument location listed above.

Upon removal from storage, a visual inspection should be conducted to
verify the condition of the equipment is “as received.” If the equipment has
been in storage in conditions in excess of those recommended
(See Section 2-3), the device should be subjected to a pneumatic pressure
test in accordance with applicable vessel codes.

Prior to installation ensure all piping is clean and free from obstructions.
Install piping in such a manner that permits easy access to the instrument
if removal becomes necessary .

2-2

Installation and Operation Manual

X-PR-SLA5800-RT-eng
Part Number: 541B120AAG
August, 2009

Section 2 Installation

Brooks® Model SLA5840

Recommended installation procedures:
a. The Delta Class EL Series RT should be located in a clean, dry atmo-

sphere relatively free from shock and vibration.
b. Leave sufficient room for access to Self-zero function push-button.
c. Install in such a manner that permits easy removal if the instrument

requires servicing.

d. The Delta Class EL Series R T can be inst alled in any position. How-

ever, mounting in orientations other than the original factory calibration

(see calibration data sheet supplied with the instrument) can result in a

<±0.5% maximum full scale shift after re-zeroing.
e. When installing a mass flow controller or meter with full scale flow rates

of 10 slpm or greater, be aware that sharp, abrupt angles in the system

piping directly upstream of the controller may cause a small shift in

accuracy . If possible, have at least ten pipe diameters of straight tubing

upstream of the mass flow controller or meter. This is not required for

meters with an integrated filter.

2-8 In-Line Filter

It is recommended that an in-line filter be installed upstream from the mass
flow controller or meter to prevent the possibility of any foreign material
entering the flow sensor or control valve. The filtering element should be
replaced periodically or ultrasonically cleaned.

Table 2-1 Recommended Filter Size

Models Maximum Flow Rate Recommended Filter
SLA5840 100 ccm 2 micron
SLA5840 500 ccm 2 micron
SLA5840 1 to 5 lpm 10 micron
SLA5840 10 to 100 lpm 40 micron

2-3

Section 2 Installation

Brooks® Model SLA5840

2-9 Electrical Interface

Installation and Operation Manual

X-PR-SLA5800-RT-eng

Part Number: 541B120AAG

August, 2009

The Delta Class EL Series RT's are controlled using analog 0-5 Vdc
signals. For an analog unit the minimum set of connections which must be
made to the RT include +15 Vdc, supply common, and a setpoint signal.
The setpoint signal is supplied as a 0 to 5 Vdc analog signal. All signals are
supplied via the 15-pin 'D' connector .

The Delta Class EL Series electrical interface is designed to facilitate
low-loss, quiet signal connections. Separate returns (commons) are
supplied for the analog setpoint, analog flow signal, and the power supply .
These commons are electrically connected together on the PC board.

Voltage I/O Version

• Chassis Ground

• Signal Common

• Signal Output

• +15 Vdc Supply

• Setpoint Input

• Setpoint Common

• Supply Common

2-10 Operation Check Procedure

For a DeviceNet unit, 1 1-25 Vdc power and communication I/O are
supplied via the standard 5-PIN Circular Micro-Connector.

a. Mount the RT in its final orientation.
b. Apply power to the RT and allow approximately 45 minutes for the

instrument to completely warm up and stabilize its temperature.
c. Make sure the RT is set for flow mode.
d. Do NOT supply gas to the RT. Ensure that the differential pressure

across the RT is zero.
e. Check the RT zero.
f. The analog output signal should be 0.000 Vdc ± 0.2%. If the zero

exceeds one of these limits, follow the re-zeroing procedure in Section 3-4.
g. Turn on the gas supply. A positive flow signal may be present due to

slight valve leak-thru (RT only).
h. Supply a setpoint signal between 1 and 5 Vdc.
i. Check the analog output signal. The output signal should match the

setpoint voltage (± 10mV) within 10 seconds after the setpoint is

changed.

2-4

Installation and Operation Manual

X-PR-SLA5800-RT-eng
Part Number: 541B120AAG
August, 2009

Section 2 Installation

Brooks® Model SLA5840

Figure 2-1 D-Connector Shielded Cable Hookup Diagram - Voltage I/O Options

Figure 2-2 Common Electrical Hookups Voltage I/O Version

2-5

Section 2 Installation

Brooks® Model SLA5840

Installation and Operation Manual

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Installation and Operation Manual

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3-1 Overview

3-2 Theory of Operation for RT

Section 3 Operation

Brooks® Model SLA5840

This section contains the following information:

• Theory of Operation

• Features

A user supplied pressure sensor, with a full scale pressure as low as
10 mTorr or as high as several hundred psi and a full scale output signal of
5 or 10 Vdc, monitors the pressure in a vessel or a feed or exhaust line
from the vessel. The control electronics in the Model 5866RT compare the
pressure signal to a setpoint and act to regulate the flow through the
integral solenoid control valve to stabilize the pressure at the setpoint. An
integral mass flow sensor identical in design to the Brooks Model 5860E
provides a 5 Vdc full scale signal proportional to the flow through the
control valve. A system block diagram is shown in Figure 1-1.

3-3 Features

The integration of mass flow sensor , control electronics and control valve
into one unit results in a compact size. The mounting dimensions are
comparable to a mass flow controller . Refer to Figure 1-2.

In the upstream pressure regulation mode shown in Figure 1-3, the
pressure controller is placed at the outlet of the pressure vessel. The
pressure in the process upstream of the controller will be constant
independent of downstream variation. Pressure control takes place at the
outlet side of the pressure vessel.

Note: All Brooks Digital Series mass flow meters are configured at the
factory according to customer order and do not require adjustment. Not all
features are available on all instruments.

The Brooks Digital is a full-featured digital MFC. The Brooks Digital
performs much like a traditional analog MFC, but with improved accuracy ,
step response and valve control. The analog interface matches that of
Brooks' popular analog MFCs so it can be retrofitted into tools using
analog MFCs. Other versions of the Delta Class can provide a variety of
digital protocols, for example DeviceNet and RS-485.

The Brooks Digital equipment is capable of storing up to 10 different sets
of gas calibration data. Each set includes a calibration curve, PID controller
settings, valve performance data, and information about the calibration
conditions. The Brooks Digital equipment can cont ain calibrations for
different gases or for the same gas at multiple conditions (pressures, full­scale flow rates). Section 3-4 Analog I/O Mode of Operation describes
more information about the data contained in the calibration table and how
to access the data.

3-1

Section 3 Operation Installation and Operation Manual

X-PR-SLA5800-RT-eng

Part Number: 541B120AAG

Brooks® Model SLA5840

The DeviceNet Instruction Manual describes further details on specific
communication features.

Calibrations will appear in the calibration table in the same order as they
appeared on the customer order, unless otherwise specified. The first listed
gas will appear as calibration #1 the second as calibration #2 and so on.
Note that unless specified otherwise on the customer order any unit containing
a single calibration will have that calibration stored in calibration position 1.

3-4 Analog I/O Mode of Operation

The following paragraphs describe the basic features of the Brooks Digital
Series RT's. NOTE: Read Section 3-3, Features, before reading this
section. See DeviceNet Supplemental Instruction Manual for specific
details on communication features.

August, 2009

A. Functional Description

The analog interface is consistent with other Brooks analog RT. This
includes a 0-5 volt setpoint input, 0-5 volt flow signal output, V alve Override
input, and Mode Select input pin. All analog signals available are on the 15
pin D-connector. (See Fig. 2-1 for connections). Note that one formerly
unused connector pin, pin 13, now allows selection of up to ten separate
calibrations. The contents of the ten calibrations are determined from the
customer order. Only those calibrations ordered will be available in the
instrument. Unless otherwise specified, a Delta Class RT ordered with only
one calibration will have that calibration stored in calibration #1. Before
operating the RT, apply power and warm-up the instrument for
approximately 45 minutes. After warm-up, apply gas pressure then
proceed by following the instructions in the following sections.

B. Analog I/O Setpoint

This input allows the user to establish the RT setpoint. The usable range of
this input is from 0 to 5.5 Vdc which corresponds to 0 to 110% of the R T full
scale flow rate. Setpoints below 45 mV will be treated as 0 volt setpoints.
For setpoints below 0 Vdc the RT behaves as if a 0 Vdc setpoint is present.
Setpoints above 5.5 Vdc will cause a setpoint of at least 110% FS.

C. Analog I/O Flow Signal

This output is used to indicate the flow signal. The range of this signal is
from -0.6 to 6.0 Vdc, with the range of 0 to 6.0 Vdc corresponding to a
calibrated flow signal of 1 to 120% of the full scale flow rate. A negative
flow signal indicates reverse flow through the device, but is NOT
calibrated.

3-2

D. Valve Override

This input allows the valve to be forced to its most closed state or its most
open state, regardless of the setpoint. If this input is not electrically connected
the RT will operate according to the current values of the other RT inputs. If
this input is held at 0 Vdc or -15Vdc the valve will be forced to its most
closed state. If this input is head at +5 Vdc or greater (max. =24 Vdc).

Installation and Operation Manual

X-PR-SLA5800-RT-eng
Part Number: 541B120AAG
August, 2009

Section 3 Operation

Brooks® Model SLA5840

ZERO

BUTTON

Figure 3-1 Externally Accessible Adjustment for all Meters/Controllers.

3-3

Section 3 Operation Installation and Operation Manual

X-PR-SLA5800-RT-eng

Part Number: 541B120AAG

Brooks® Model SLA5840

E. Mode Select Pin

Connector Pin 13, on the15 pin D-Connector allows selection of one of ten
calibrations stored in the device. This pin is designed to accept pull-down
resistors referenced to signal common (Pin 10).

Table 3-1 shows typical resistor values required for selecting calibrations 1
through 10. Note, these resistor values should be within ± 1% tolerance.
The default condition is with no resistor connected which activates
Calibration #1.

When the calibration select pin changes state, the device performs any
required processing to change the calibration, then returns to normal
operation. If the device determines that the selected calibration is not valid,
(where applicable) the valve is driven to the closed state and the flow
signal is set to zero. Typical time required to change calibrations is
approximately 1.0 second.

NOTE: It is recommended to change calibration curve selection during no-flow
conditions.

F. Zeroing the MFC (Self-zero)

It may be desirable to re-zero the flow sensor if it is operated at its
temperature extremes or if it is positioned in an attitude other than that
specified on the customer order.

August, 2009

Note: Before zeroing the instrument, zero pressure differential MUST be established
across the device. If there is pressure across the instrument during the zero process,
any detected flow through the sensor will be misinterpreted as the zero flow reading.
This will result in calibration inaccuracy during normal operation.
Once zero differential pressure is established and verified, press the recessed,
momentary push-button (self-zero button) located on the side of the device
(See Figure 3-1) to start the self-zero function. The zeroing process requires
approximately 10 mseconds.

Once zero differential pressure is established and verified, press the
recessed, momentary push-button (Self-zero button) located on the side of
the device (See Fig. 3-1) to start the Self-zero function.

The zero process requires approximately 200 msec. During this time, the
device will set its output signal to 0.0 Vdc.

3-4

Installation and Operation Manual

X-PR-SLA5800-RT-eng
Part Number: 541B120AAG
August, 2009

4-1 Overview

Section 4 Maintenance

& Troubleshooting

Brooks® Model SLA5840

No routine maintenance is required on the Brooks Digital RT's. If an in-line
filter is used, the filtering elements should be periodically replaced. This
section provides the following information:

• Troubleshooting

• Gas Conversion Facors

• Orifice Sizing*

• Restrictor Sizing
* indicates MFC only

4-1

Section 4 Maintenance
& Troubleshooting

Brooks® Model SLA5840

4-2 Troubleshooting

Installation and Operation Manual

X-PR-SLA5800-RT-eng

Part Number: 541B120AAG

August, 2009

This section contains suggestions to help diagnose simple RT related
problems in the gas distribution system and answers commonly asked
questions.

Brooks part #S273Z668AAA can be used as an accuracy for diagnosing
electrical problems.

a. Problem: No response to input commands/No output status signal.

1. The unit may not be receiving power . Check that module status
LED is green.

2. Connections may not be secure. Check all cable connections.

b. Problem: Flow/flow signal doesn't reach setpoint. (MFC Only)

Failure of the flow rate or flow signal to achieve setpoint could be caused

by a number of factors:

1. Insufficient pressure drop across the MFC (low or no pressure).
If there is not enough pressure differential across the MFC, it is
impossible for the MFC's valve orifice to pass the full scale flow

rate. To check for this condition, compare the actual inlet/outlet
pressure drop as read from pressure gauges with that specified
on the order (shown in Figure 4-1). Increase the pressure if
necessary.

4-2

Installation and Operation Manual

X-PR-SLA5800-RT-eng
Part Number: 541B120AAG
August, 2009

Section 4 Maintenance

& Troubleshooting

Brooks® Model SLA5840

2. Clogged sensor tube. If the MFC sensor tube is clogged, the flow
signal will be very low or zero while the actual flow will be at the
valve's maximum rate.

3. Clogged restrictor. If the MFC restrictor becomes clogged, a much
larger portion of the flow stream will pass through the sensor rather
than going straight through the restrictor . The symptom of this

condition is a substantially reduced actual flow with a flow signal

that matches the setpoint.

4. V alve Override pin is active. If the valve override pin is active, the
valve will be forced open or closed. Set this pin to its normal level
before setting a setpoint.

Figure 4-1 Bench Troubleshooting Circuit

4-3

Section 4 Maintenance
& Troubleshooting

Brooks® Model SLA5840

4-3 Gas Conversion Factors

Installation and Operation Manual

X-PR-SLA5800-RT-eng

Part Number: 541B120AAG

August, 2009

If an RT is operated in flow control mode on a gas other than the gas it was
calibrated with, a scale shift will occur in the relation between the output
signal and the mass flow rate. This is due to the difference in heat
capacities between the two gases. This scale shift can be approximated by
using the ratio of the molar specific heat of the two gases or by sensor
conversion factor . A list of sensor conversion factors is given in T able 4-1.
To change to a new gas, multiply the output reading by the ratio of the
sensor factor for the desired gas to the sensor factor for the calibration gas
used.

Actual Gas Flow Rate = Output Reading x

Sensor Factor of the New Gas

Sensor Factor of the Calibration Gas

Example:

The RT is calibrated for Nitrogen. (Sensor factor - 1.000)
The desired gas is Carbon Dioxide (CO

) (Sensor factor = 0.740)

2

The output reading is 75 sccm when Carbon Dioxide is flow
Then 75 x 0.740 = 55.5 sccm of CO

2

1.000

In order to calculate the sensor conversion factor for a gas mixture, the
following forumula should be used:

100

100 100 100

Sensor Conversion Factor

Mixture

P

=

1

Sensor Sensor Sensor

Conversion Conversion Conversion

Factor

++

1

P

2

Factor

P

3

2

Factor

3

Where,
P1 = percentage (%) of gas 1 (by volume)
P2 = percentage (%) of gas 2 (by volume)
P3 = percentage (%) of gas n (by volume)

4-4

Example: The desired gas is 20% Helium (He) (Sensor Factor = 1.386)
and 80% Chlorine (Cl2) (Sensor factor = 0.876) by volume. The desired full
scale flow rate of the mixture is 20 slpm. Sensor conversion factor for the
mixture is:

100

Mixture Factor = = 0.945

20 80

1.386 0.876

+

To calculate the sensor Nitrogen equivalent flow of the gas sensor mixture,
use the actual gas flow rate calculation above.

Nitrogen equivalent flow - 20 x 1.000 - 21.16 slpm Nitrogen

Installation and Operation Manual

X-PR-SLA5800-RT-eng
Part Number: 541B120AAG
August, 2009

4-4 Orifice Sizing

Section 4 Maintenance

& Troubleshooting

Brooks® Model SLA5840

It is generally accepted that the mass flow rate derived from this equation
is only accurate to ±5%. The sensor conversion factors given in Table 4-1
are calculated based on a gas temperature of 80° C and a pressure of one
atmosphere. The specific heat of most gases is not strongly pressure,
and/or temperature, dependent. However , gas conditions that vary widely
from these reference conditions may cause an additional error due to the
change in specific heat caused by pressure and/or temperature.

The Orifice Sizing Nomograph, Figure 4-2, is used to calculate the control
valve's orifice size when changing any or all of the following factors from
the original factory calibration:

gas
operating pressure (inlet and outlet)
flow range

The flow controller's orifice is factory-sized to a preselected gas, operating
pressure and flow range. Note that the orifice is marked with its size in
thousandths of an inch corresponding with Table 4-2 showing the orifice
capacities for each standard size. When changing the aforementioned
factors, calculate the new orifice size by following the procedure and
example outlined in the following paragraphs.

Example: Determine the orifice size for the following conditions:
Gas: Hydrogen
Flow Rate: 2,000 sccm
Outlet Pressure: 30 psig
Inlet Pressure: 50 psig

1. Determine the orifice Nitrogen equivalent flow rate (refer to Table 4-1).

Q

NITROGEN

=Q

GAS

x

P

GAS

P

NITROGEN

OR

Q

NITROGEN

=Q

GAS

x

SG
SG

GAS

NITROGEN

Where:
Q

NITROGEN

Q

GAS

P

NITROGEN

P

GAS

SG

GAS

SG

NITROGEN

= Orifice Nitrogen equivalent flow rate (sccm)
= Orifice Desired flow rate of the gas (sccm)
= Density of Nitrogen at 0°C
= Density of the gas (taken at customer temperature)
= Specific gravity of the gas (taken at customer temperature)
= Specific gravity of the Nitrogen at 0°C

Refer to Table 4-1 for densities.

4-5

Section 4 Maintenance
& Troubleshooting

Brooks® Model SLA5840

Installation and Operation Manual

X-PR-SLA5800-RT-eng

Part Number: 541B120AAG

August, 2009

Example:
Q

GAS

P
P

Q

NITROGEN

GAS

NITROGEN

= 2,000 sccm

= .269

=Q

GAS

x

P

GAS

P

NITROGEN

= 2,000 x .269
= 538 sccm Nitrogen

In order to calculate the orifice conversion factor when using a gas mixture,
the following formula must be used:

Where P

= percentage of volume of gas 1

1

P

= percentage of volume of gas 2

2

P

= percentage of volume of gas n

3

4-6

Example: Find the Orifice Nitrogen equivalent of 20 slpm of a 20% Helium
(He) (orifice factor = 0.378) and 80% Chlorine (Cl2) (Orifice factor = 1.598)
gas mixture.

Orifice
Conversion = 20 (.378) + 80 (1.598)
Factor 100
Mixture

Q

NITROGEN

=Q

x Orifice Conversion factor

GAS

= 20 x 1.439
= 28.78 slpm Nitrogen

2. If inlet and outlet pressure are given in gauge pressure (psig) add 14.7
to convert to absolute pressure (psia).

Outlet Pressure — 30 psig + 14.7 = 44.7 psia
Inlet Pressure — 50 psig + 14.7 = 64.7 psia

Installation and Operation Manual

X-PR-SLA5800-RT-eng
Part Number: 541B120AAG
August, 2009

Section 4 Maintenance

& Troubleshooting

Brooks® Model SLA5840

3. Determine Critical Pressure Drop
Critical pressure drop occurs when the outlet pressure (psia) is less than

half the inlet pressure (psia) or

P outlet <

P inlet
2

If these conditions exist, the pressure drop (Dp) should be calculated as
follows:

P

Dp =

in

2

Dp = Pressure drop (psi)
P

= Inlet pressure (psia)

in

If these conditions do not exist, pressure drop equals the inlet pressure
minus the outlet pressure.

Is 44.7 psia < ? — No.

64.7 psia
2

Then Dp = 64.7 - 44.7 = 20 psi

4. Using the nomograph, locate the pressure drop (psi) on the vertical line
marked "Dp" (Point A).

5. Locate the Nitrogen equivalent flow rate (sccm Nitrogen) on the vertical
marked "Q

NITROGEN

" (Point B).

6. Draw a line connecting Dp and Q

NITROGEN

and extend it to the baseline.

Mark this point (Point C).

7. Locate inlet pressure (psia) on the vertical line marked "Pin" (Point D).

8. Draw a line connecting Pin (Point D) and baseline (Point C) and then
extend this line to the vertical line marked Do (orifice diameter, inches)
(Point E).

9. This point on the line is the minimum orifice size for the given conditions.
If this point is between two orifice sizes, select the next largest size orifice
to ensure adequate flow. If the orifice selected falls below .0013, choose
.0013 size orifice.

For the example in Figure 4-3, the .007 size orifice would be selected.4-5
Restrictor Sizing

4-7

Section 4 Maintenance
& Troubleshooting

Brooks® Model SLA5840

4-5 Restrictor Sizing

Installation and Operation Manual

X-PR-SLA5800-RT-eng

Part Number: 541B120AAG

August, 2009

The restrictor assembly is a ranging device for the sensor portion of the
controller. It creates a pressure drop which is linear with flow rate. This
diverts a sample quantity of the process gas flow through the sensor . Each
restrictor maintains a ratio of sensor flow to restrictor flow , however, the
total flow through each restrictor is different. Different restrictors (active
area) have different pressure drops and produce controllers with different
full scale flow rates. For a discussion of the interaction of the various parts of
the controller, you are urged to review Section 3-2, Theory of Operation.

If the restrictor assembly has been contaminated with foreign matter , the
pressure drop versus flow characteristics will be altered and it must be
cleaned or replaced. It may also be necessary to replace the restrictor
assembly when the mass flow controller is to be calibrated to a new flow
rate. Restrictor assembly replacement should be performed only by trained
personnel. Consult factory/Service Center .

Restrictors

The mass flow controller/meter uses different types of restrictor
assemblies depending on full scale flowrate and expected service
conditions.

For Models SLA5840 RT

1. Wire mesh for Nitrogen equivalent flow rates above 3.4 slpm. These
restrictor assemblies are made from a cylinder of wire mesh and are easily
cleaned if they become contaminated in service.

2. Anti-Clog Laminar Flow Element (ACLFE) or Sintered Met al Restrictor
Assemblies are used for Nitrogen equivalent flow rates less than 3.4 slpm.

4-8

Installation and Operation Manual

X-PR-SLA5800-RT-eng

Section 4 Maintenance

& Troubleshooting

Part Number: 541B120AAG
August, 2009

Table 4-1Conversion Factors (Nitrogen Base).

GAS NAME FORMULA SENSOR ORIFICE DENSITY (KG/m3)

Acetylene C2H
Air Mixture 0.998 1.018 1.293
Allene C
Ammonia NH
Argon Ar 1.395 1.195 1.784
Arsine AsH

Boron Trichloride BCL
Boron Trifluoride BF
Bromine Pentafluoride BrF
Bromine Trifluoride BrF
Bromotrifluoroethylene C2BrF
Bromotrifluoromethane f-13B1 CBrF
1,3-Butadiene C4H
Butane C
1-Butene C
CIS-2-Butene C4H
Trans-2-Butene C4H

Carbon Dioxide CO
Carbon Disulfide CS
Carbon Monoxide CO 0.995 1.000 1.250
Carbon Tetrachloride CCL
Carbon Tetrafluoride f-14 CF
Carbonyl Fluoride COF
Carbonyl Sulfide COS 0.680 1.463 2.180
Chlorine CL
Chlorine Dioxide CLO
Chlorine Trifluoride CLF
2-Chlorobutane C4H9Cl 0.234 1.818 4.134
Chlorodifluoromethane f-22 CHCLF
Chloroform (Trichloromethane) CHCL
Chloropentafluoroethane f-115 C2CLF
Chlorotrifluoroethylene C2CLF
Chlorotrifluoromethane f-13 CCLF
Cyanogen (CN)
Cyanogen Chloride CLCN 0.618 1.480 2.730
Cyclobutane C4H
Cyclopropane C3H

Deuterium D
Diborane B2H
Diboromodifluoromethane f-12B2 CBr2F
1,2-Dibromotetrafluoroethane f-114B2 C2Br2F
Dichlorodifluoromethane f-12 CCL2F
Dichlorofluoromethane f-21 CHCL2F 0.456 1.985 4.912
Dichlorosilane SiH2CL
1,2-Dichloroethane C2H4Cl
1,2-Dichlorotetrafluoroethane f-114 C2CL2F
2,2 Dichloro C2HC12F
1,1-Difluoro-1-Chloroethane C2H3CLF
1,1-Difluoroethane CH3CHF
1,1-Difluoroethylene CH2:CF
Diethylsilane C4H12Si 0.183 1.775 3.940
Difluoromethane f-32 CF2H
Dimethylamine (CH3)2NH 0.370 1.269 2.013

2

3H4

3

3

3

3

5

3

3

3

6

4H10

4H8

8

8

2

2

4

4

2

2

2

3

2

3

5

3

3

2

8

6

2

6

2

4

2

2

2

4

3

2

2

2

2

Dimethylether (CH3)2O 0.392 1.281 2.055
2,2-Dimethylpropane C(CH3)
Disilane Si2H

Ethane C2H
Ethanol C2H6O 0.394 1.282 2.057
Ethylacetylene C4H
Ethyl Chloride C2H5CL 0.408 1.516 2.879

4

6

6

6

FACTOR FACTOR @0°C, 1 atm

0.615 0.970 1.173

0.478 1.199 1.787

0.786 0.781 0.771

0.754 1.661 3.478

0.443 2.044 5.227

0.579 1.569 3.025

0.287 2.502 7.806

0.439 2.214 6.108

0.326 2.397 7.165

0.412 2.303 6.615

0.354 1.413 2.491

0.257 1.467 2.593

0.294 1.435 2.503

0.320 1.435 2.503

0.291 1.435 2.503

0.740 1.255 1.977

0.638 1.650 3.393

0.344 2.345 6.860

0.440 1.770 3.926

0.567 1.555 2.045

0.876 1.598 3.214

0.693 1.554 3.011

0.433 1.812 4.125

0.505 1.770 3.906

0.442 2.066 5.340

0.243 2.397 7.165

0.337 2.044 5.208

0.430 1.985 4.912

0.498 1.366 2.322

0.387 1.413 2.491

0.505 1.224 1.877

0.995 0.379 0.177

0.448 1.000 1.235

0.363 2.652 8.768

0.215 2.905 10.53

0.390 2.099 5.492

0.442 1.897 4.506

0.382 1.879 4.419

0.231 2.449 7.479

0.259 2.336 6.829

0.341 1.957 4.776

0.415 1.536 2.940

0.458 1.512 2.860

0.627 1.360 2.411

0.247 1.613 3.244

0.332 1.493 2.779

0.490 1.038 1.357

0.365 1.384 2.388

Brooks® Model SLA5840

Ref. No. J-836D508 gasdata.doc Vsn. 8.6

4-9

Section 4 Maintenance
& Troubleshooting

Installation and Operation Manual

X-PR-SLA5800-RT-eng

Part Number: 541B120AAG

Brooks® Model SLA5840

Table 4-1 Conversion Factors (Nitrogen Base) Continued.

GAS NAME FORMULA SENSOR ORIFICE DENSITY (KG/m3)

Ethylene C2H
Ethylene Oxide C

Fluorine F
Fluoroform f-23 CHF
Germane GeH
Germanium Tetrachloride GeCl

Halothane (R-123B1) C
Helium He 1.386 0.378 0.178
Hexafluoroacetone F3CCOCF
Hexaflorobenzine C
Hexafluoroethane f-116 C
Hexafuoropropylene (HFP) C3F
Hexamethyldisilane (HMDS) (CH
Hexane C
Hydrogen H
Hydrogen Bromide HBr 0.987 1.695 3.645

4

O 0.589 1.254 1.965

2H4

2

3

4

4

HBrClF

2

3

3

6F6

2F6

6

2)6Si2

6H14

2

Hydrogen Chloride HCL 0.983 1.141 1.639
Hydrogen Cyanide HCN 0.744 0.973 1.179
Hydrogen Fluoride HF 0.998 0.845 0.893
Hydrogen Iodide HI 0.953 2.144 5.789
Hydrogen Selenide H
Hydrogen Sulfide H2S 0.850 1.108 1.539

Iodine Pentafluoride IF
Isobutane C4H
Isobutene C4H
Isopentane C5H

Se 0.837 1.695 3.613

2

5

10

8

12

Krypton Kr 1.382 1.729 3.708
Methane CH

Methylacetylene C3H
Methyl Bromide CH3Br 0.646 1.834 4.236
3-Methyl-1-butene C5H
Methyl Chloride CH3CL 0.687 1.347 2.308

4

4

10

Methyl Fluoride CH3F 0.761 1.102 1.518
Methyl Mercaptan CH4S 0.588 1.313 2.146
Methyl Silane CH6Si 0.393 1.283 2.061
Methyl Trichlorosilane (MTS) CH3Cl3Si 0.267 2.310 6.675
Methyl Vinyl Ether C3H6O 0.377 1.435 2.567
Monoethanolamine C2H7NO 0.305 1.477 2.728
Monoethylamine C2HH5NH
Monomethylamine CH3NH

2

2

Neon Ne 1.398 0.847 0.902
Nickel Carbonyl Ni(CO)
Nitric Oxide NO 0.995 1.030 1.339
Nitrogen N
Nitrogen Dioxide NO
Nitrogen Trifluoride NF
Nitrogen Trioxide N2O
Nitrosyl Chloride NOCL 0.644 1.529 2.913

4

2

2

3

3

Nitrous Oxide N2O 0.752 1.259 1.964
Octofluorocyclobutane C4F

Oxygen O
Oxygen Difluoride OF
Ozone O

Pentafluorethane f-125 C2HF
Pentane (n-Pentane) C5H
Perchloryl Fluoride CLO3F 0.448 1.905 4.571
Perfluorobutane C4F
Perfluoro-2-Butene C4F
Perfluoromethyl-vinylether PMVE 0.296 2.029 5.131

8

2

2

3

5

12

10

8

FACTOR FACTOR @0°C, 1 atm

0.619 1.000 1.261

0.924 1.163 1.695

0.529 1.584 3.127

0.649 1.653 3.418

0.268 2.766 9.574

0.257 2.654 8.814

0.219 2.434 7.414

0.632 2.577 8.309

0.255 2.219 6.139

0.249 2.312 6.663

0.139 2.404 7.208

0.204 1.757 3.847

1.008 0.269 0.090

0.283 2.819 9.907

0.260 1.440 2.593

0.289 1.435 2.503

0.211 1.605 3.222

0.763 0.763 0.717

0.473 1.196 1.782

0.252 1.584 3.127

0.359 1.269 2.013

0.565 1.067 1.420

0.212 2.371 7.008

1.000 1.000 1.251

0.758 1.713 2.052

0.501 1.598 3.168

0.443 1.649 3.389

0.169 2.672 8.933

0.988 1.067 1.429

0.672 1.388 2.402

0.738 1.310 2.138

0.287 2.070 5.360

0.212 1.605 3.222

0.738 2.918 10.61

0.268 2.672 8.933

August, 2009

4-10

Ref. No. J-836D508 gasdata.doc Vsn. 8.6

Installation and Operation Manual

X-PR-SLA5800-RT-eng

Section 4 Maintenance

& Troubleshooting

Part Number: 541B120AAG
August, 2009

Table 4-1 Conversion Factors (Nitrogen Base) Continued.

GAS NAME FORMULA SENSOR ORIFICE DENSITY (KG/m3)

FACTOR FACTOR @0°C, 1 atm

Brooks® Model SLA5840

Perfluoropropane C
Pentane (n-Pentane) C5H
Phosgene COCL
Phosphine PH
Phosphorous Pentafluoride PF
Phosphorous Trifluoride PF
Propane (same as CH3CH2CH3)C
Propylene (Propene) C

Rhenium Hexafluoride ReF
Silane SiH

Silicon Tetrachloride SiCL
Silicon Tetrafluoride SiF
Sulfur Dioxide SO
Sulfur Hexafluoride SF
Sulfur Tetrafluoride SF
Sulfur Trioxide SO
Sulfuryl Fluoride SO2F

Tetrachloromethane CCL
Tetrafluoroethylene (TFE) C2F
Tetrafluorohydrazine N2F
Trichlorofluoromethane f-11 CCL3F 0.374 2.244 6.281
Trichlorosilane SiHCL
Trimethyloxyborane (TMB) B(OCH3)
1,1,2-Trichloro-1,1,2-Triflouroet f-113 C2CL3F
Trimethylamine (CH3)3N 0.316 1.467 2.639
Tungsten Hexafluoride WF

Uranimum Hexafluoride UF

3F8

12

2

3

5

3

3H8

3H6

6

4

4

4

2

6

4

3

2

4

4

4

3

3

3

6

6

0.179 2.591 8.396

0.212 1.605 3.222

0.504 1.881 4.418

0.783 1.100 1.517

0.346 2.109 5.620

0.495 1.770 3.906

0.343 1.274 2.008

0.401 1.234 1.875

0.230 3.279 13.41

0.625 1.070 1.440

0.310 2.465 7.579

0.395 1.931 4.648

0.728 1.529 2.858

0.270 2.348 6.516

0.353 1.957 4.776

0.535 1.691 3.575

0.423 1.931 4.648

0.344 2.345 6.858

0.361 1.905 4.526

0.367 1.926 4.624

0.329 2.201 6.038

0.300 1.929 4.638

0.231 2.520 7.920

0.227 3.264 13.28

0.220 3.548 15.70

Vinyl Bromide C2H3Br 0.524 1.985 4.772
Vinyl Chloride C2H3CL 0.542 1.492 2.788
Vinyl Fluoride C2H3F 0.576 1.281 2.046

Water Vapor H2O 0.861 0.802 0.804
Xenon Xe 1.383 2.180 5.851

Ref. No. J-836D508 gasdata.doc Vsn. 8.6

4-11

Section 4 Maintenance
& Troubleshooting

Brooks® Model SLA5840

Installation and Operation Manual

X-PR-SLA5800-RT-eng

Part Number: 541B120AAG

August, 2009

Sizing

All Delta Class EL Series Restrictor Assemblies are factory adjusted to
provide a specific pressure drop for each flow rate. This corresponds to the
desired full scale flow rate. A list of restrictor assemblies used in the Delta
Class EL Series mass flow controllers/meters are shown in Tables 4-3, 4-4
and 4-5.

Example:

Select a resistor for a Delta Class EL Series SL5850
The desired gas is Silane (SiH4).
The desired full scale flow rate is 200 sccm.
Sensor conversion factor is 0.625 from Table 4-1.
Sensor Nitrogen equivalent flow = 200 x

In the example above a Size P restrictor would be selected from Table 4-3.

Note: If the calculated flow rate is such that two different size restrictors
could be used, always select the larger size.

1.000 = 320 sccm Nitrogen

0.625

If a mixture of two or more gases is being used, the restrictor selection
must be based on a Nitrogen equivalent flow rate of the mixture.

Example:
Select a resistor for a Delta Class EL Series SL5850
The desired gas is 20% Helium (He) (Sensor factor = 1.386 and 80%

Chlorine (Cl2) (Sensor factor = 0.876) by volume. The desired full scale
flow rate of the mixture is 20 slpm. Sensor conversion factor for the
mixture is:

Sensor Nitrogen equivalent flow = 20 x 1.000 = 21.16 slpm Nitrogen.

0.945

In this example a Size 4 Wire Mesh Assembly would be selected.

4-12

Installation and Operation Manual

X-PR-SLA5800-RT-eng
Part Number: 541B120AAG
August, 2009

Section 4 Maintenance

& Troubleshooting

Brooks® Model SLA5840

Figure 4-2 Model SLA5840 Series Orifice Sizing Nomograph.

4-13

Section 4 Maintenance
& Troubleshooting

Brooks® Model SLA5840

Installation and Operation Manual

X-PR-SLA5800-RT-eng

Part Number: 541B120AAG

August, 2009

Figure 4-3 Example Nomograph.
Table 4-2 Orifice Capacities

Orifice Size (inches) Minimum Flow Rate (sccm)

(0°C) (21.1°C)

0.0013 5.3 (5.7)

0.002 12.5 (13.5)

0.003 39.2 (42.2)

0.004 82.5 (88.9)

0.0055 190 (205)

0.007 374 (403)

0.010 748 (806)

0.014 1364 (1469)

0.020 2673 (2879)

0.032 6490 (6991)

0.048 12980 (13980)

0.062 22000 (2879)

0.078 31900 (34400)

0.093 42500 (45800)

0.120 69300 (74700)
Inlet Pressure = 10 psig
Outlet Pressure = 10 inches of water (0.4 psig) or less
Note: Flow Rate based on Nitrogen

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Installation and Operation Manual

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A

K

V

W

X

X-PR-SLA5800-RT-eng
Part Number: 541B120AAG
August, 2009

Table 4-3 Delta Class EL Series Models SLA5850 & SLA5860 Standard Restrictors.

Size

No Restrictor ( ALL BODY SIZES)

Restrictor size selected from the table below is based on sensor Nitrogen equivalent flow

Section 4 Maintenance

& Troubleshooting

Brooks® Model SLA5840

Plug (Nitrogen equivalent flows of 8.022 SCCM or less)

Min. Flow Max. Flow

(SCCM Nitrogen equivalent flow at 0° C)

B
C Plug (Nitrogen flows <= 8.022 SCCM)
D
E
F
G
H
J

L
M
N 165.7 234.7
P
Q
R
S
T
U

Y
1
2
3
4

8.022 11.36 S110Z296BMA S110Z275BMT

11.23 15.90 S110Z297BMA S110Z276BMT

15.72 22.26 S110Z298BMA S110Z277BMT

22.01 31.17 S110Z299BMA S110Z278BMT

30.82 43.64 S110Z300BMA S110Z279BMT

43.14 61.09 S110Z301BMA S110Z280BMT

60.40 85.53 S110Z302BMA S110Z281BMT

84.56 119.7 S110Z303BMA S110Z282BMT

118.4 167.6 S110Z304BMA S110Z283BMT

232.0 328.6 S110Z306BMA S110Z285BMT

324.8 460.0 S110Z307BMA S110Z286BMT

454.8 644.0 S110Z308BMA S110Z287BMT

636.7 901.6 S110Z309BMA S110Z288BMT

891.4 1262 S110Z310BMA S110Z289BMT
1248 1767 S110Z311BMA S110Z290BMT
1747 2474 S110Z312BMA S110Z291BMT
2446 3464
3424 4849 S110Z319BMA
4794 6789 S110Z321BMA
6711 9504 S110Z317BMA
9369 13310 S110Z228BMA
13150 18630 S110Z226BMA
18420 30000 S110Z224BMA

NOTES:

Models SLA5850 / SLA5860

-----

1) If two sizes are allowed because of overlap, select the larger size.

2) If customer has requested a calibration based on a 21.1'C (70'F) reference
temperature, divide the air equivalent flow rate by 1.077 before using the sizing table.

Part Number

Sintered

618K019BMT

S110Z305BMA S110Z284BMT

S110Z313BMA S110Z292BMT

Part Number Part Number

CLFE Wire Mesh

4-15

Section 4 Maintenance
& Troubleshooting

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Installation and Operation Manual

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Part Number: 541B120AAG

August, 2009

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4-16

Installation and Operation Manual

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Section A, CE Certification of

Mass Flow Equipment

Part Number: 541B120AAG
August, 2009

Dansk

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Emne : Tillæg til instruktions manual.
Reference : CE mærkning af Masse Flow udstyr
Dato : Januar-1996.

Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj
(EMC direktivet 89/336/EEC).

Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.

Kvaliteten af signal kabler og stik:

Brooks lever kabler af høj kvalitet, der imødekommer specifikationerne til CE mærkning.
Hvis der anvendes andre kabel typer skal der benyttes et skærmet kabel med hel skærm med 100% dækning.
Forbindelses stikket type “D” eller “cirkulære”, skal være skærmet med metalhus og eventuelle PG-forskruninger skal enten

være af metal eller metal skærmet.
Skærmen skal forbindes, i begge ender, til stikkets metalhus eller PG-forskruningen og have forbindelse over 360 grader.
Skærmen bør være forbundet til jord.
“Card Edge” stik er standard ikke af metal, der skal derfor ligeledes benyttes et skærmet kabel med hel skærm med 100%

dækning.
Skærmen bør være forbundet til jord.
Forbindelse af stikket; venligst referer til vedlagte instruktions manual.
Med venlig hilsen,

Brooks® Model SLA5840

Deutsch

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Subject : Nachtrag zur Bedienungsanleitung.
Referenz : CE Zertifizierung für Massedurchflußgeräte
Datum : Januar-1996.

Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Verträglichkeit (EMC Richtlinie 89/336/
EEC) erhalten die Brooks-Geräte (elektrische/elektronische Komponenten) das CE-Zeichen.

Bei der Auswahl der Verbindungskabel für CE-zertifizierte Geräte sind spezielle Anforderungen zu beachten.

Qualität der Verbindungskabel, Anschlußstecker und der Kabeldurchführungen

Die hochwertigen Qualitätskabel von Brooks entsprechen der Spezifikation der CE-Zertifizierung.
Bei Verwendung eigener Verbindungskabel sollten Sie darauf achten, daß eine
100 %igenSchirmababdeckung des Kabels gewährleistet ist.

•“D” oder “Rund” -Verbindungsstecker sollten eine Abschirmung aus Metall besitzen.

Wenn möglich, sollten Kabeldurchführungen mit Anschlußmöglichkeiten für die Kabelabschrimung verwendet werden.
Die Abschirmung des Kabels ist auf beiden Seiten des Steckers oder der Kabeldurchführungen über den vollen Umfang von

360 ° anzuschließen.
Die Abschirmung ist mit dem Erdpotential zu verbinden.
Platinen-Steckverbindunger sind standardmäßige keine metallgeschirmten Verbindungen. Um die Anforderungen der CE-

Zertifizierung zu erfüllen, sind Kabel mit einer 100 %igen Schirmababdeckung zu verwenden.
Die Abschirmung ist mit dem Erdpotential zu verbinden.
Die Belegung der Anschlußpins können Sie dem beigelegten Bedienungshandbuch entnehmen.

A-1

Section A, CE Certification of
Mass Flow Equipment

Installation and Operation Manual

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Brooks® Model SLA5840

English

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Subject : Addendum to the Instruction Manual.
Reference : CE certification of Mass Flow Equipment
Date : January-1996.

The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro
Magnetic Compatibility (EMC directive 89/336/EEC).

Special attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used

providing cable screen clamping.
The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to a earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE

certification.
The shield should be terminated to a earth ground.
For pin configuration : Please refer to the enclosed Instruction Manual.

August, 2009

Español

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Asunto : Addendum al Manual de Instrucciones.
Referencia : Certificación CE de los Equipos de Caudal Másico
Fecha : Enero-1996.

Los equipos de Brooks (eléctricos/electrónicos) en relación con la marca CE han pasado satisfactoriamente las pruebas
referentes a las regulaciones de Compatibilidad Electro magnética (EMC directiva 89/336/EEC).

Sin embargo se requiere una atención especial en el momento de seleccionar el cable de señal cuando se va a utilizar un
equipo con marca CE

Calidad del cable de señal, prensaestopas y conectores:

Brooks suministra cable(s) de alta calidad, que cumple las especificaciones de la certificación CE .
Si usted adquiere su propio cable de señal, debería usar un cable que esté completamente protegido en su conjunto con un

apantallamiento del 100%.
Cuando utilice conectores del tipo “D” ó “Circular” deberían estar protegidos con una pantalla metálica. Cuando sea posible,

se deberán utilizar prensaestopas metálicos provistos de abrazadera para la pantalla del cable.
La pantalla del cable deberá ser conectada al casquillo metálico ó prensa y protegida en ambos extremos completamente

en los 360 Grados.
La pantalla deberá conectarse a tierra.
Los conectores estandar de tipo tarjeta (Card Edge) no son metálicos, los cables utilizados deberán ser protegidos con un

apantallamiento del 100% para cumplir con la certificación CE.
La pantalla deberá conectarse a tierra.
Para ver la configuración de los pines: Por favor, consultar Manual de Instrucciones adjunto.

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Section A, CE Certification of

Mass Flow Equipment

Part Number: 541B120AAG
August, 2009

Français

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Sujet : Annexe au Manuel d’Instructions.
Référence : Certification CE des Débitmètres Massiques à Effet Thermique.
Date : Janvier 1996.

Messieurs,
Les équipements Brooks (électriques/électroniques) portant le label CE ont été testés avec succès selon les règles de la

Compatibilité Electromagnétique (directive CEM 89/336/EEC).
Cependant, la plus grande attention doit être apportée en ce qui concerne la sélection du câble utilisé pour véhiculer le signal

d’un appareil portant le label CE.

Qualité du câble, des presse-étoupes et des connecteurs:

Brooks fournit des câbles de haute qualité répondant aux spécifications de la certification CE.
Si vous approvisionnez vous-même ce câble, vous devez utiliser un câble blindé à 100 %.
Les connecteurs « D » ou de type « circulaire » doivent être reliés à la terre.
Si des presse-étoupes sont nécessaires, ceux ci doivent être métalliques avec mise à la terre.
Le blindage doit être raccordé aux connecteurs métalliques ou aux presse-étoupes sur le pourtour complet du câble, et à

chacune de ses extrémités.
Tous les blindages doivent être reliés à la terre.
Les connecteurs de type « card edge » sont non métalliques. Les câbles utilisés doivent être blindés à 100% pour satisfaire à

la réglementation CE.
Tous les blindages doivent être reliés à la terre.
Se référer au manuel d’instruction pour le raccordement des contacts.

Brooks® Model SLA5840

Greek

A-3

Section A, CE Certification of
Mass Flow Equipment

Installation and Operation Manual

X-PR-SLA5800-RT-eng

Part Number: 541B120AAG

Brooks® Model SLA5840

Italiano

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Oggetto : Addendum al manuale di istruzioni.
Riferimento : Certificazione CE dei misuratori termici di portata in massa
Data : Gennaio 1996.

Questa strumentazione (elettrica ed elettronica) prodotta da Brooks Instrument, soggetta a marcatura CE, ha superato con
successo le prove richieste dalla direttiva per la Compatibilità Elettomagnetica (Direttiva EMC 89/336/EEC).

E’ richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a
marchio CE.

Qualità dei cavi di segnale e dei relativi connettori:

Brooks fornisce cavi di elevata qualità che soddisfano le specifiche richieste dalla certificazione CE. Se l’utente intende
usare propri cavi, questi devono possedere una schermatura del 100%.

I connettori sia di tipo “D” che circolari devono possedere un guscio metallico. Se esiste un passacavo esso deve essere
metallico e fornito di fissaggio per lo schermo del cavo.

Lo schermo del cavo deve essere collegato al guscio metallico in modo da schermarlo a 360° e questo vale per entrambe le
estemità.

Lo schermo deve essere collegato ad un terminale di terra.
I connettori “Card Edge” sono normalmente non metallici. Il cavo impiegato deve comunque avere una schermatura del 100%

per soddisfare la certificazione CE.
Lo schermo deve essere collegato ad un terminale di terra.
Per il corretto cablaggio dei terminali occorre fare riferimento agli schemi del manuale di istruzioni dello strumento.

August, 2009

Nederlands

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Onderwerp : Addendum voor Instructie Handboek
Referentie: CE certificering voor Mass Flow Meters & Controllers
Datum : Januari 1996

Dames en heren,
Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en voldoen aan

de wetgeving voor Electro Magnetische Compatibiliteit (EMC wetgeving volgens 89/336/EEC).
Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde produkten.

Kwaliteit van de signaalkabel en kabelaansluitingen:

• Brooks levert standaard kabels met een hoge kwaliteit, welke voldoen aan de specificaties voor CE certificering.
Indien men voorziet in een eigen signaalkabel, moet er gebruik gemaakt worden van een kabel die volledig is

afgeschermd met een bedekkingsgraad van 100%.

• “D” of “ronde” kabelconnectoren moeten afgeschermd zijn met een metalen connector kap. Indien kabelwartels worden
toegepast, moeten metalen kabelwartels worden gebruikt die het mogelijk maken het kabelscherm in te klemmen

Het kabelscherm moet aan beide zijden over 360° met de metalen connectorkap, of wartel verbonden worden.
Het scherm moet worden verbonden met aarde.

• “Card-edge” connectors zijn standaard niet-metallisch. De gebruikte kabels moeten volledig afgeschermd zijn met een
bedekkingsgraad van 100% om te voldoen aan de CE certificering.

Het scherm moet worden verbonden met aarde.
Voor pin-configuraties a.u.b. verwijzen wij naar het bijgesloten instruktie handboek.
Hoogachtend,

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Section A, CE Certification of

Mass Flow Equipment

Part Number: 541B120AAG
August, 2009

Norsk

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Vedrørende : Vedlegg til håndbok
Referanse : CE sertifisering av utstyr for massestrømsmåling og regulering
Dato : Januar 1996

Til den det angår

Brooks Instrument elektrisk og elektronisk utstyr påført CE-merket har gjennomgått og bestått prøver som beskrevet i EMC
forskrift om elektromagnetisk immunitet, direktiv 89/336/EEC.

For å opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det måletekniske utstyret.

Utførelse av signalkabel og tilhørende plugger:

• Brooks Instrument tilbyr levert med utstyret egnet kabel som møter de krav som stilles til CE-sertifisering.

• Dersom kunden selv velger kabel, må kabel med fullstendig, 100% skjerming av lederene benyttes.

“D” type og runde plugger og forbindelser må være utført med kappe i metall og kabelnipler må være utført i metall for jordet
innfesting av skjermen. Skjermen i kabelen må tilknyttes metallet i pluggen eller nippelen i begge ender over 360°, tilkoblet
elektrisk jord.

• Kort-kantkontakter er normalt utført i kunststoff. De tilhørende flatkabler må være utført med fullstendig, 100% skjerming

som kobles til elektrisk jord på riktig pinne i pluggen, for å møte CE sertifiseringskrav.
For tilkobling av medleverte plugger, vennligst se håndboken som hører til utstyret.
Vennlig hilsen

Brooks® Model SLA5840

Português

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Assunto : Adenda ao Manual de Instruções
Referência : Certificação CE do Equipamento de Fluxo de Massa
Data : Janeiro de 1996.

O equipamento (eléctrico/electrónico) Brooks com a marca CE foi testado com êxito nos termos do regulamento da
Compatibilidade Electromagnética (directiva CEM 89/336/EEC).

Todavia, ao seleccionar-se o cabo de sinal a utilizar com equipamento contendo a marca CE, será necessário ter uma
atenção especial.

Qualidade do cabo de sinal, buchas de cabo e conectores:

A Brooks fornece cabo(s) de qualidade superior que cumprem os requesitos da certificação CE.
Se fornecerem o vosso próprio cabo de sinal, devem utilizar um cabo que, na sua totalidade, seja isolado com uma blindagem de 100%.
Os conectores tipo “D” ou “Circulares” devem ser blindados com uma blindagem metálica. Se tal for necessário, deve utilizar-

se buchas metálicas de cabo para o isolamento do aperto do cabo.
O isolamento do cabo deve ser ligado à blindagem ou bucha metálica em ambas as extremidades em 360º.
A blindagem deve terminar com a ligação à massa.
Os conectores “Card Edge” não são, em geral, metálicos e os cabos utilizados devem ter um isolamento com blindagem a

100% nos termos da Certificação CE..
A blindagem deve terminar com ligação à massa.
Relativamente à configuração da cavilha, queiram consultar o Manual de Instruções.

A-5

Section A, CE Certification of
Mass Flow Equipment

Installation and Operation Manual

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Brooks® Model SLA5840

Suomi

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Asia : Lisäys Käyttöohjeisiin
Viite : Massamäärämittareiden CE sertifiointi
Päivämäärä : Tammikuu 1996

Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC).
Erityistä huomiota on kuitenkin kiinnitettävä signaalikaapelin valintaan.

Signaalikaapelin, kaapelin läpiviennin ja liittimen laatu

Brooks toimittaa korkealaatuisia kaapeleita, jotka täyttävät CE sertifikaatin vaatimukset. Hankkiessaan signaalikaapelin itse,
olisi hankittava 100%:sti suojattu kaapeli.

“D” tai “Circular” tyyppisen liitimen tulisi olla varustettu metallisuojalla. Mikälì mahdollista, tulisi käyttää metallisia
kaapeliliittimiä kiinnitettäessä suojaa.

Kaapelin suoja tulisi olla liitetty metallisuojaan tai liittimeen molemmissa päissä 360°:n matkalta.
Suojan tulisi olla maadoitettu.
“Card Edge Connector”it ovat standarditoimituksina ei-metallisia. Kaapeleiden täytyy olla 100%: sesti suojattuja jotta ne

olisivat CE sertifikaatin mukaisia.
Suoja on oltava maadoitettu.
Nastojen liittäminen; katso liitteenä oleva manuaali.
Ystävällisin terveisin,

August, 2009

Svensk

Brooks Instrument
407 West Vine St.
Hatfield, PA 19440
U.S.A.

Subject : Addendum to the Instruction Manual
Reference : CE certification of Mass Flow Equipment
Date : January 1996

Brooks (elektriska / elektronik) utrustning, som är CE-märkt, har testats och godkänts enligt gällande regler för
elektromagnetisk kompabilitet (EMC direktiv 89/336/EEC).

Speciell hänsyn måste emellertid tas vid val av signalkabel som ska användas tillsammans med CE-märkt utrustning.

Kvalitet på signalkabel och anslutningskontakter:

Brooks levererar som standard, kablar av hög kvalitet som motsvarar de krav som ställs för CE-godkännande.
Om man använder en annan signalkabel ska kabeln i sin helhet vara skärmad till 100%.

“D” eller “runda” typer av anslutningskontakter ska vara skärmade. Kabelgenomföringar ska vara av metall alternativt med
metalliserad skärmning.

Kabelns skärm ska, i bada ändar, vara ansluten till kontakternas metallkåpor eller genomföringar med 360 graders
skärmning.

Skärmen ska avslutas med en jordförbindelse.
Kortkontakter är som standard ej metalliserade, kablar som används måste vara 100% skarmade för att överensstämma med

CE-certifieringen.
Skärmen ska avslutas med en jordförbindelse.
För elektrisk anslutning till kontaktstiften hänvisas till medföljande instruktionsmanual.

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August, 2009

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Brooks® Model SLA5840

LIMITED WARRANTY

Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use
and service and that the Software will execute the programming instructions provided by Seller until the expiration of the
earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
Products purchased by Seller from a third party for resale to Buyer (“Resale Products”) shall carry only the warranty extended
by the original manufacturer.
All replacements or repairs necessitated by inadequate preventive maintenance, or by normal wear and usage, or by fault of
Buyer, or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions, or by abuse,
accident, alteration, misuse, improper installation, modification, repair, storage or handling, or any other cause not the fault of
Seller are not covered by this limited warranty, and shall be at Buyer’s expense.
Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty
period or ninety (90) days, whichever is longer. This limited warranty is the only warranty made by Seller and can be
amended only in a writing signed by an authorized representative of Seller.

BROOKS SERVICE AND SUPPORT

Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with
outstanding service and support to back it up. We operate first class repair facilities located around the world to provide
rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability
for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant
International Standards.

Visit www.BrooksInstrument.com to locate the service location nearest to you.

August, 2009

ST ART-UP SER VICE AND IN-SITU CALIBRATION

Brooks Instrument can provide start-up service prior to operation when required.
For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate
the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable
to the relevant international quality standards.

CUSTOMER SEMINARS AND TRAINING

Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons.

Please contact your nearest sales representative for more details.

HELP DESK

In case you need technical assistance:

Americas
Europe [phone]
Asia [phone]

Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change
without notice.

TRADEMARKS

Brooks.......................................................... Brooks Instrument, LLC

DeviceNet .................... Open DeviceNet Vendors Association, Inc..

Kalrez..........................................................DuPont Dow Elastomers

Teflon ............................................... E. I. DuPont deNemours & Co.

Viton..............................................DuPont Performance Elastomers

VCO ................................................................................... Cajon Co.

VCR ................................................................................... Cajon Co.

1 888 554 FLOW