Bronkhorst EL-FLOW Prestige User Manual

Instruction Manual

EL-FLOW Prestige series Thermal Mass Flow Meters/Controllers

Doc. no.: 9.17.084A Date: 17-06-2015

ATTENTION

Please read this Instruction Manual carefully before installing and operating the instrument. Not following the guidelines could result in personal injury and/or damage to the equipment.

Bronkhorst High-Tech B.V.

Disclaimer

The information in this manual has been reviewed and is believed to be wholly reliable. No responsibility, however, is assumed for inaccuracies. The material in this manual is for information purposes only.

Bronkhorst High-Tech B.V.

June 2015

Symbols

Important information. Discarding this information could cause injuries to people or damage to the instrument or installation.

	Helpful information. This information will facilitate the use of this instrument.
wwwi	Additional info available on the internet or from your local sales representative.

Receipt of equipment

Check the outside packing box for damage incurred during shipment. When the packing box is damaged, then the local carrier must be notified at once regarding his liability, if so required. At the same time a report should be submitted to your local sales representative.

Carefully remove the equipment from the packing box. Verify that the equipment was not damaged during shipment. Should the equipment be damaged, then the local carrier must be notified at once regarding his liability, if so required. At the same time a report should be submitted to your local sales representative.

Check the packing list to ensure that you received all of the items.

Do not discard spare or replacement parts with the packing material and inspect the contents for damage.

Refer to "Removal and return instructions" about return shipment procedures.

Equipment storage

The equipment should be stored in its original packing in a cupboard warehouse or similar. Care should be taken not to subject the equipment to excessive temperatures or humidity.

Copyright

© 2015 Bronkhorst High-Tech B.V.

All rights reserved. This documentation is protected by copyright. Subject to technical and optical changes as well as printing errors.

The information contained in this document is subject to change at any time without prior notification. Bronkhorst High-Tech B.V. reserves the right to modify or improve its products and modify the contents without being obliged to inform any particular persons or organizations. The device specifications and the contents of the package may deviate from what is stated in this document.

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Warranty

Bronkhorst products are warranted against defects in material and workmanship for a period of three years from the date of shipment provided they are used in accordance with the ordering specifications and not subjected to abuse or physical damage. Products that do not operate properly during this period may be repaired or replaced at no charge. Repairs are normally warranted for one year or the balance of the original warranty, whichever is the longer.

wwwi	See also paragraph 9 of the Conditions of sales:
	http://www.bronkhorst.com/files/corporate_headquarters/sales_conditions/en_general_terms_of_sales.pdf

The warranty includes all initial and latent defects, random failures, and undeterminable internal causes.

It excludes failures and damage caused by the customer, such as contamination, improper electrical hook-up, physical shock etc.

Re-conditioning of products primarily returned for warranty service that is partly or wholly judged non-warranty may be charged for.

Bronkhorst High-Tech B.V. or affiliated company prepays outgoing freight charges when any part of the service is performed under warranty, unless otherwise agreed upon beforehand, however, if the product has been returned collect to our factory or service center, these costs are added to the repair invoice. Import and/or export charges, foreign shipping methods/carriers are paid by the customer.

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Table of contents

1	Scope of this manual
	......................................................................................................................................................................	6
1.1	Introduction......................................................................................................................................................................	6
1.2	Intended......................................................................................................................................................................use	6
1.3	Product......................................................................................................................................................................description	6
1.4	References......................................................................................................................................................................to other applicable documents	7
1.5	Model......................................................................................................................................................................key	8
2	Starting up
	......................................................................................................................................................................	9
2.1	Check......................................................................................................................................................................functional properties	9
2.2	Check......................................................................................................................................................................operating conditions	9
2.2.1	Rated......................................................................................................................................................................pressure test inspection	9
2.2.2	Sealings......................................................................................................................................................................	9
2.2.3	Environmental......................................................................................................................................................................ratings	9
2.3	Piping......................................................................................................................................................................requirements	9
2.4	Instrument......................................................................................................................................................................mounting	10
2.5	Leak......................................................................................................................................................................check	10
2.6	Electrical......................................................................................................................................................................connection	10
2.7	Analog....................................................................................................................................................................../ digital operation	11
2.7.1	Analog....................................................................................................................................................................../ local operation	11
2.7.2	Digital......................................................................................................................................................................RS232 operation	11
2.7.3	Digital......................................................................................................................................................................RS485 / bus operation	11
2.8	Micro......................................................................................................................................................................switch operation	11
2.9	Zeroing......................................................................................................................................................................(using micro switch)	12
2.10	Purging......................................................................................................................................................................	12
2.11	Supply......................................................................................................................................................................pressure	12
2.12	Calibration......................................................................................................................................................................	12
2.13	Maintenance......................................................................................................................................................................	12
3	Basic operation
	......................................................................................................................................................................	13
3.1	Mass......................................................................................................................................................................flow measurement and control	13
3.1.1	Changing......................................................................................................................................................................fluidset, range or operating conditions	13
3.1.2	Valve......................................................................................................................................................................Safe State	14
3.2	Communication......................................................................................................................................................................interfaces	14
3.2.1	Using......................................................................................................................................................................multiple interfaces	15
3.3	Analog......................................................................................................................................................................operation	16
3.3.1	Hook......................................................................................................................................................................-up	16
3.4	Basic......................................................................................................................................................................RS232 operation	16
3.4.1	Hook......................................................................................................................................................................-up	17
3.4.2	FlowDDE......................................................................................................................................................................	18
3.4.3	Software......................................................................................................................................................................(DDE applications)	19
3.4.4	Baud......................................................................................................................................................................rate setup	19
3.5	Basic......................................................................................................................................................................RS485 (FLOW-BUS/Modbus) operation	20
3.5.1	Hook......................................................................................................................................................................-up	21
3.5.2	Software......................................................................................................................................................................	22
3.5.3	Baud......................................................................................................................................................................rate, node address and parity setup	22
3.6	Other......................................................................................................................................................................field bus configurations	23
3.6.1	Hook......................................................................................................................................................................-up	23
3.6.2	Baud......................................................................................................................................................................rate, node address and parity setup	23

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3.7	LED......................................................................................................................................................................indications	24
3.8	Micro......................................................................................................................................................................switch functions	26
3.9	Basic......................................................................................................................................................................parameters and properties	27
3.9.1	Introduction......................................................................................................................................................................	27
3.9.2	Basic......................................................................................................................................................................measurement and control parameters	28
3.9.3	Basic......................................................................................................................................................................identification parameters	28
3.9.4	Basic......................................................................................................................................................................alarm and counter settings	29
3.9.5	Zeroing......................................................................................................................................................................(using digital operation)	29
3.9.6	Instrument......................................................................................................................................................................parameter list	29
4	Advanced operation
	......................................................................................................................................................................	32
4.1	Sealing......................................................................................................................................................................material compatibility	32
4.2	Advanced......................................................................................................................................................................parameters and properties	33
4.2.1	Advanced......................................................................................................................................................................measurement and control parameters	33
4.2.2	Special......................................................................................................................................................................instrument parameters	33
4.2.3	Advanced......................................................................................................................................................................fluidset, range and operating conditions parameters	35
4.2.4	Advanced......................................................................................................................................................................alarm parameters	39
4.2.5	Advanced......................................................................................................................................................................counter parameters	41
4.3	Field......................................................................................................................................................................bus operation	42
4.3.1	FLOW......................................................................................................................................................................-BUS master/slave controller operation	42
4.3.2	Changing......................................................................................................................................................................baud rate, node address and parity	42
4.4	Special......................................................................................................................................................................instrument features	43
4.4.1	Customized......................................................................................................................................................................IO options (pin 5)	43
4.4.2	Changing......................................................................................................................................................................default control mode	45
5	Troubleshooting and service
	......................................................................................................................................................................	46
5.1	Diagnostics......................................................................................................................................................................	46
5.2	Troubleshooting......................................................................................................................................................................	47
5.3	Service......................................................................................................................................................................	48
6	Removal and return instructions
	......................................................................................................................................................................	49

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1Scope of this manual

1.1Introduction

This manual covers the EL-FLOW Prestige series mass flow meters/controllers for gases. Examples of the instrument series are shown in the pictures below. This manual includes product information, installation instructions, operation, maintenance and troubleshooting.

1.2Intended use

The intended use of the EL-FLOW Prestige instruments is to accurately measure and/or control gas flow rates of a specified gas at conditions noted on the instrument label. The gas in the pressurized system in which the instrument is mounted has to be clean and dry. The instruments are suited for general purpose indoor (dry) applications, like laboratories and in well protected (OEM) housings. The instruments can be used for either (fast) switching gas flow or for controlling a constant flow rate (mass flow controllers only).

1.3Product description

EL-FLOW Prestige is the next generation of Bronkhorst Mass Flow Meters/ Controllers using the latest, highly accurate, thermal bypass sensor technology and featuring excellent control characteristics. Thanks to the advanced sensor technology in combination with a state-of-the-art pc-board, the instruments feature improved long-term stability as well as an unsurpassed temperature stability. Furthermore, due to a power efficient microprocessor, the power consumption of the instrument is reduced. The mass flow meters and controllers can be supplied in full scale ranges from 0,7 mln/min up to 20 ln/min Air-equivalent at max. 64 or 100

bar (1000 or 1500 psi) pressure rating.

EL-FLOW Prestige offers high flexibility due to the multi-gas/multi-range functionality. This function, now extended to 25 gases and mixtures thereof, is easily accessible via the FlowTuneTM software or PLC; there is no need to disconnect the instrument from your system. For additional gas types the user can calculate accurate fluid properties for conversion by means of our free, online software tool Fluidat® on the Net. Users of EL-FLOW Prestige instruments can rescale their instruments on site, saving time and money for dismounting and recalibration.

Numerous input/output options can be installed through the programmable sub-D 9-pin connector (from factory). In addition to the various analog signal options and the standard RS232 communication, there are such options as RS485 communication, digital frequency/pulse output, alarm output/reset, valve purge/close and analog valve output. Furthermore Bronkhorst offers various integrated fieldbus options: DeviceNetTM, PROFIBUS DP, Modbus RTU/ASCII, EtherCAT®, PROFINET and FLOW-BUS.

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1.4References to other applicable documents

Basic instructions	Dimensional drawings

	Document 9.17.083			Document 7.15.176
	Quick installation guide EL-FLOW Prestige			Dimensional drawing FG-110C
				Document 7.15.177
				Dimensional drawing FG-111B
				Document 7.15.178
				Dimensional drawing FG-200CV / FG-210CV
				Document 7.15.179
				Dimensional drawing FG-201CV / FG-211CV
				Document 7.15.180
				Dimensional drawing FG-201CS
	Advanced instructions			Hook-up diagrams
	Document 9.17.027			Document 9.16.119
	Instruction manual RS232 interface			Hook-up diagram LAB MBC3 RS232 and Analog
	Document 9.17.024			Document 9.16.120
	Instruction manual FLOW-BUS interface			Hook-up diagram LAB MBC3 FLOW-BUS
	Document 9.17.025			Document 9.16.121
	Instruction manual PROFIBUS DP interface			Hook-up diagram LAB MBC3 PROFIBUS DP
	Document 9.17.026			Document 9.16.122
	Instruction manual DeviceNetTM interface			Hook-up diagram LAB MBC3 DeviceNetTM
	Document 9.17.035			Document 9.16.123
	Instruction manual Modbus interface			Hook-up diagram LAB MBC3 Modbus
	Document 9.17.063			Document 9.16.124
	Instruction manual EtherCAT® interface			Hook-up diagram LAB MBC3 EtherCAT®
	Document 9.17.095			Document 9.16.147
	Instruction manual PROFINET interface			Hook-up diagram LAB MBC3 PROFINET
				Document 9.16.118
				Hook-up diagram LAB MBC3 Custom bus & IO
				configurations
wwwi			These documents can be found at: http://www.bronkhorst.com/en/downloads

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1.5Model key

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2Starting up

2.1Check functional properties

Before installing your EL-FLOW Prestige mass flow meter/controller it is important to read the label on the backside of the instrument and check:

Flow rate

Fluid to be measured

Upand downstream pressures

Temperature

Valve type (N.C.= Normally Closed, N.O.= Normally Opened) Input/output signal (see also section 2.6)

2.2Check operating conditions

2.2.1Rated pressure test inspection

Each EL-FLOW Prestige instrument is pressure tested to at least 1.5 times the maximum operating pressure of the instrument. Each instrument is helium leak tested to at least 2x10-9 mbar l/s Helium outboard.

The tested pressure is stated on the instrument with a red-colored sticker. Before installation, make sure that the test pressure is in accordance with normal safety factors for your application. If there is no Pressure Testing Sticker on the device or if the test pressure is incorrect, the instrument should not be mounted in the process line and be returned to the factory.

2.2.2Sealings

EL-FLOW Prestige instruments are equipped from factory with sealings compatible with the requested gas type. However the instruments have multi-gas/multi-range functionality on board. If another gas or mixture is used, always make sure that the gas/ mixture is compatible with the installed sealing materials. Refer to section 4.1 for a compatibility list.

2.2.3Environmental ratings

EL-FLOW Prestige instruments are suitable for use in conditions between -10…70 °C and relative humidity of 10…90 %RH, unless specified otherwise. Please note that EL-FLOW Prestige instruments have an ingress protection of IP-40, implying that the electronics housing and electrical connection do not offer any protection against moist environments.

Make sure that process gases do not condensate in the instrument due to (changing) environmental conditions, condensed process fluids may seriously harm the instrument's functionality! E.g. do not use moist air as process gas at low temperatures.

2.3Piping requirements

For reliable measurement always make sure the fluid stream is clean. Use filters to assure a moisture-, oiland particle free gas stream. Recommended pore-size: 5 µm. If back flow can occur, a downstream filter and a check valve are recommended too. For high flow rates select a suitable filter size, to avoid too high pressure drop.

Do not install small diameter piping on high flow rates, because the inlet jet flow may affect the accuracy

Do not mount abrupt angles directly on inand outlet, especially not on high flow rates. At least 10 pipe diameters

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distance between the angle and the instrument is recommended.

Do not mount pressure regulators directly on the inlet of gas flow meters/controllers, but allow at least 25 pipe diameters of piping.

2.4Instrument mounting

Install the EL-FLOW Prestige meter/controller in the line, in accordance with the direction of the FLOW arrow. The arrow for flow direction is indicated on the body of the instrument. Tighten the fittings according to the instructions of the supplier of the fittings. The use of Swagelok RS-type stainless steel adapters is recommended.

	For EL-FLOW Prestige instruments the upright position is preferred. When mounting an instrument in upor
	downward position, zeroing of the instrument is advised (see section 2.9), especially at high pressures (> 10 bar).
	Avoid installation in close proximity of mechanic vibration and/or heat sources.
	At the bottom side of the instrument a number of mounting holes are present, for stable fixation of the instrument.
	Refer to the dimensional drawing for the instrument for the exact position of the mounting holes.
wwwi	Dimensional drawings can be found at: http://www.bronkhorst.com/en/downloads

2.5Leak check

Check the system for leaks before applying (fluid) pressure. Especially if toxic, explosive or other dangerous fluids are used!

2.6Electrical connection

Electrical connection must be made with standard cables or according to the applicable hook-up diagrams. The factory installed 9-pin sub-D settings are indicated on the instrument back-side label. Make sure that the power supply is suitable for the power ratings as indicated on the instrument label and that double or reinforced insulation is used for the power supply.

wwwi	Applicable hook-up diagrams for EL-FLOW Prestige can be found at:
	http://www.bronkhorst.com/en/downloads
	EL-FLOW Prestige instruments are powered with +15…+24 Vdc. Several
	hook-up examples and standard cables are found in chapter 3.
		The instruments contain electronic components that are susceptible to damage by electrostatic discharge. Proper
		handling procedures must be taken during installation, removing and connecting the electronics.
		The instruments described in this manual carry the CE-mark and are compliant with the EMC requirements. However
		compliance with the EMC requirements is not possible without the use of proper cables and connector/gland
		assemblies. Bronkhorst High-Tech B.V. recommends the use of their standard cables. These cables have the right
		connectors and if loose ends are used, these will be marked to prevent wrong connection. When using other cables,
		cable wire diameters should be sufficient to carry the supply current and voltage losses must be kept as low as
		possible. When in doubt: contact your distributor.
		When connecting the system to other devices (e.g. PLC), be sure that the integrity of the shielding is not affected. Do
		not use unshielded wire terminals.

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2.7Analog / digital operation

2.7.1Analog / local operation

Connect the EL-FLOW Prestige to the power supply/readout unit using a cable with 9-pin sub-D connector

2.7.2Digital RS232 operation

Digital operation over RS232 can be established when using the following setup or using a Bronkhorst E-8000 readout/control unit. See section 3.4.1 for connecting to an E-8000. Connecting the instrument with an RS232 cable or an RS232 cable with a USB to RS232 converter to a PC will allow you to use (free) Bronkhorst software for Windows, such as FlowDDE and FlowPlot. Make sure that the instrument back-side label indicates RS232 settings for the 9-pin sub-D connector and apply the proper baud rate settings. If the instrument is not set for RS232 communication, please refer to section 3.4 for switching to RS232 communication settings via the 'Configuration Mode'.

wwwi		A PiPS (Plug-in Power Supply, art.nr.: 7.03.422) is available to power a single instrument and can be used instead of
		the DB9 Loose-end cable as shown in the example above. Detailed information can be found in the manual PiPS
		(9.17.055) which can be downloaded at the download section from the website: http://www.bronkhorst.com/en/
		downloads
2.7.3	Digital RS485 / bus operation
		With digital operation over RS485 or Ethernet a bus-system with multiple instruments can be set up. For RS485
		FLOW-BUS or Modbus operation over the 9-pin sub-D connector or via an additional field bus driver (if installed), see
		section 3.5. For operation via other additional field bus systems (e.g. DeviceNetTM, EtherCAT®), refer to section 3.6 or
		the specific field bus manual.

2.8Micro switch operation

Using the two colored LEDs and the micro switch on the EL-FLOW Prestige, several actions can be monitored and started. The green LED is used for status indication. The red LED is used for errors, warnings and messages. The switch can be used to start several actions, such as auto-zero, restore factory settings and bus-initialization actions, if applicable. See specific zero-procedure below (section 2.9) for more details.

The micro switch on top of the EL-FLOW Prestige can be operated with a thin, metal or hard plastic pin. For example the end of a paperclip.

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2.9Zeroing (using micro switch)

The zero-point of each instrument is factory adjusted. If so required the zero point may be re-adjusted over RS232, fieldbus or by means of using the micro switch. Procedure for zeroing by micro switch (for zeroing through a command via BUS/RS232 see section 3.9.5):

1.Warm-up, pressure up the system and fill the instrument according to the process conditions.

2.Make sure no flow is going through the instrument by closing valves near the instrument.

3.The setpoint must be zero.

4.Press micro switch and hold it. After a short time the red LED will go ON and OFF, then the green LED will go ON. At that moment (which is 8...12 s after pressing) release the switch.

5.The zeroing procedure will start at that moment and the green LED will blink fast. The procedure will take approx. 5 seconds.

6.When the indication is showing 0% signal and the green indication LED is burning continuously again, then the zeroing action was successful.

2.10Purging

Do not apply pressure until electrical connections are made. When applying pressure to the system, avoid pressure shocks in the system and increase pressure gradually. Also decrease pressure gradually when required.

In systems for use with corrosive or reactive fluids, purging for at least 30 minutes with a dry, inert gas (like Nitrogen or Argon) is absolutely necessary before use. After use with corrosive or reactive fluids, complete purging is also required before exposing the system to air.

Let the EL-FLOW Prestige warm-up for at least 30 minutes for best accuracy.

2.11Supply pressure

It is recommended to turn on power before applying pressure on the instrument and to switch off power after removing pressure. Turn on fluid supply gently. Avoid pressure shocks and bring the instrument gradually up to the level of the actual operating conditions. Also switch off fluid supply gently.

2.12Calibration

Each EL-FLOW Prestige instrument is factory calibrated. Bronkhorst High-Tech B.V. certifies that all instruments meet the rated accuracy. Calibration is performed using measurement standards traceable to the Dutch Metrology Institute (VSL). Calibration certificates are included in the shipment. Periodical inspection, recalibration or verification of the accuracy may be subject to individual requirements of the end-user.

Unless specified otherwise, EL-FLOW Prestige instruments are N2 calibrated. The calibration is converted to the

customer’s fluid and conditions using a detailed conversion model. This conversion model provides all the fluid data and calculations for the applicable process conditions and is also used for the multi-gas/multi-range functionality of the instrument.

2.13Maintenance

No routine maintenance is required to be performed on the meters/controllers when they are used with clean gas, compatible with the wetted materials in the instruments. Units may be flushed with clean, dry inert gas.

In case of severe contamination it may be required to clean the inside of the instrument. After cleaning a recalibration is needed. Bronkhorst High-Tech B.V. has a trained staff available. Contact your local supplier for cleaning and recalibration options.

If the equipment is not properly serviced, serious personal injury and/or damage to the equipment could be the result. It is therefore important that servicing is performed by trained and qualified personnel.

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3Basic operation

3.1Mass flow measurement and control

After correct installation of the EL-FLOW Prestige Mass Flow Meter (MFM) or Mass Flow Controller (MFC) and when all safety precautions have been taken into account (see chapter 2) the instrument can immediately be used for measuring/ controlling the required flow rate in the system by means of the selected communication interface(s).

Here are some general guidelines for mass flow measurement/control:

EL-FLOW Prestige MFMs/MFCs are most accurate at the specified inlet/outlet pressure, temperature and process gas conditions, however the instrument will function properly in a wide range of varying conditions. It is strongly advised to use the FlowTuneTM software available with the instrument to set the correct process conditions if the actual process conditions differ from the conditions for which the instrument is set (see section 3.1.1).

Although EL-FLOW Prestige MFMs/MFCs have excellent temperature stability, the best accuracy is achieved when temperature gradients across the instruments are avoided; so make sure that the gas temperature equals the ambient temperature and mount the instruments on a rigid (heat conducting) surface.

EL-FLOW Prestige MFCs handle pressure shocks in the system well, but are not insensitive to pressure fluctuations. For optimum control stability, provide a stable (pressure controlled) inlet pressure with sufficient buffer volume between the pressure regulator and the MFC and avoid installing multiple MFCs or other control valves in close proximity to another with small volume piping in between.

Mass Flow control

When an MFC (either with normally closed (n.c.) or normally opened (n.o.) valve) is hooked-up, the control valve closes

when no setpoint is given. When the MFC receives a setpoint from the active setpoint source, the internal PID controller will immediately open the control valve until the required flow rate is achieved and it will maintain that flow rate until another setpoint is given.

3.1.1Changing fluidset, range or operating conditions

When the EL-FLOW Prestige instrument is used for other processes/conditions than indicated on the instrument label, use the FlowTuneTM software for setting the instrument for the required conditions. With FlowTune the following settings can be changed:

Store up to eight different fluid sets

Select one of 25 pre-installed gases per fluidset or compose any mixture consisting of these gases

Insert fluid properties for any other gas/mixture per fluidset Change inletand/or outlet pressure according to actual process conditions

Re-range the full scale (FS) flow rate within the instrument's accepted flow range

Change the control speed per fluidset for faster or slower (smoother) flow control

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The multi-gas/multi-range functionality is available for the full temperature and pressure range for the instrument, within the limitations of the instrument that is connected. FlowTune checks the changes for the following limitations:

Rangability of the flow sensor for the selected fluid

Rangability of the control valve for the selected fluid

Accuracy indication for the given flow range

Compatibility of selected gases with the installed sealing materials (see also section 4.1)

Limitations to the operation conditions

		For connection to FlowTune, make sure that the instrument back-side label indicates RS232 settings for the 9-pin
		sub-D connector and apply the proper baud rate settings. If the instrument is not set for RS232 communication, use
		the micro switch on top of the instrument to overrule the custom settings and switch to RS232 communication
		settings: press and hold the micro switch at power-up and wait (12…16 sec) until both green and red LEDs flash
		(0.2 sec on, 0.2 sec off). Release the switch to activate the ‘Configuration Mode’. In the ‘Configuration Mode’ the bus
		type and baud rate for the 9-pin sub-D side connector are set to RS232 FLOW-BUS (Propar) at 38400 Baud. The
		‘Configuration Mode’ remains active after power down. Use the same procedure to deactivate the ‘Configuration
		Mode’.
		The EL-FLOW Prestige instrument will automatically adjust the controller settings to the new process conditions.
		there is no need to adjust controller PID settings manually.
		It is advised to use FlowTune only in a non-operational environment. FlowTune will force the instrument to the 'Valve
		Safe State' mode (see section 3.1.2) when the connection is made. Be sure to close the communication properly to
		restore the instrument to its normal operating mode.
wwwi		The FlowTune software for EL-FLOW Prestige and the applicable manual document 9.17.046 can be downloaded at
		the download section from the website: http://www.bronkhorst.com/en/downloads

Using custom fluids or fluid properties

With FlowTune it is possible to insert fixed fluid properties for any other gas/mixture. The required fluid properties are density, heat capacity, thermal conductivity and dynamic viscosity. It is possible to use custom fluid data, however Bronkhorst advises to use the FLUIDAT® on the Net website for calculation of fluid properties at the customer process conditions. FLUIDAT® is a collection of routines to calculate physical properties of gases (and liquids). These routines are made available at the FLUIDAT® on the Net website.

wwwi	FLUIDAT® on the Net can be accessed via the website: http://www.fluidat.com. FLUIDAT® on the Net is free to use,
	but only registered users have full access to fluids and functionality. Registration is possible via the FLUIDAT®
	website.

3.1.2Valve Safe State

When an MFC is not powered, the control valve automatically returns to its 'Safe State', which is closed for a 'normally closed (n.c.)' valve and fully opened for a 'normally opened (n.o.)' valve. During operation, certain communication errors may cause the MFC to go to the 'Valve Safe State' mode to protect the system, e.g. when fieldbus communication fails (PROFIBUS DP, DeviceNetTM, EtherCAT® and PROFINET only). Also when fluidset configuration of the instrument is incorrect, the instrument may go to the 'Valve Safe State' mode. See section 3.7 for more information and the LED indications for the 'Valve Safe State' mode or section 4.2.3 for the fluidset configuration parameters.

3.2Communication interfaces

Numerous input/output options can be installed on EL-FLOW Prestige instruments via both the 9-pin sub-D connector on the side of the instrument and the optional field bus connector on top of the instrument.

Analog and RS232	FLOW-BUS and Modbus	PROFIBUS	DeviceNet™	EtherCAT® and PROFINET
(or RS485)

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Via the 9-pin sub-D side connector the instrument can be operated by means of:

Analog interface (section 3.3): 0…5 Vdc; 0…10 Vdc; 0…20 mA or 4…20 mA

Digital RS232 interface (section 3.4 and document 9.17.027): (FLOW-BUS (Propar) protocol)

Digital RS485 interface (section 3.5): (Modbus RTU, Modbus ASCII or FLOW-BUS protocols)

The following optional field bus interfaces can be installed:

FLOW-BUS interface (section 3.5 and document 9.17.024)

Modbus (RTU or ASCII) interface (section 3.5 and document 9.17.035)

PROFIBUS DP interface (section 3.6 and document 9.17.025)

DeviceNetTM interface (section 3.6 and document 9.17.026)

EtherCAT® interface (section 3.6 and document 9.17.063)

PROFINET interface (section 3.6 and document 9.17.095)

The interpretation of the LED indications and use of the micro switch button on top of the instrument is discussed in section 3.7 and section 3.8 respectively.

3.2.1Using multiple interfaces

The analog interface is always present on EL-FLOW Prestige instruments. An interface to any available field bus is optional. Operation via analog interface, RS232/RS485 (side connector) and an optional field bus (top connector) can be performed at the same time. When using multiple interfaces, reading of parameters can be done simultaneously. When changing a parameter value, the last value sent by any of the interfaces will be valid.

Control mode

A controller setpoint is accepted from either the analog or digital interface, but not both. Analog or digital operation is selected at ordering and indicated on the instrument backside label. The inactive setpoint source is indicated between brackets (…), see example below. The parameter ‘Control Mode’ indicates from which source a controller setpoint is accepted: analog or digital. See section 4.2.2 for more information regarding the ‘Control Mode’ parameter.

Factory communication settings

The factory selected communication and side connector pinning settings are indicated on the instrument backside label. See example below for a description of the communication information indicated on the instrument label:

1.Model key (see explanation of the model key in section 1.5)

2.Field bus (top connector) (example: none)

3.Customized IO settings (pin 5), see section 4.4.1 for more information (example: default setting)

4.Analog interface (pin 2, 3) (example: inactive setpoint source, measure always available)

5.Digital interface (pin 1, 6) (example: RS232, active setpoint source)

6.Side connector digital interface settings (protocol, medium, baud rate, parity) (example: FLOW-BUS (Propar) communication over RS232 interface with baud rate 115200 Baud and no parity)

9.17.084

EL-FLOW Prestige

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