Bronkhorst EL-FLOW Prestige User Manual

Instruction Manual

EL-FLOW Prestige series

Thermal Mass Flow Meters/Controllers

Doc. no.: 9.17.084A Date: 17-06-2015

ATTENTION

Please read this Instruction Manual carefully before installing and operating the instrument.

Not following the guidelines could result in personal injury and/or damage to the equipment.

Important information. Discarding this information could cause injuries to people or damage to the instrument or installation.

Helpful information. This information will facilitate the use of this instrument.

i

www

Additional info available on the internet or from your local sales representative.

Check the packing list to ensure that you received all of the items. Do not discard spare or replacement parts with the packing material and inspect the contents for damage.

Bronkhorst High-Tech B.V.

Disclaimer

The information in this manual has been reviewed and is believed to be wholly reliable. No responsibility, however, is assumed for inaccuracies. The material in this manual is for information purposes only.

Bronkhorst High-Tech B.V.

June 2015

Symbols

Receipt of equipment

Check the outside packing box for damage incurred during shipment. When the packing box is damaged, then the local carrier must be notified at once regarding his liability, if so required. At the same time a report should be submitted to your local sales representative.

Carefully remove the equipment from the packing box. Verify that the equipment was not damaged during shipment. Should the equipment be damaged, then the local carrier must be notified at once regarding his liability, if so required. At the same time a report should be submitted to your local sales representative.

Refer to "Removal and return instructions" about return shipment procedures.

Equipment storage

The equipment should be stored in its original packing in a cupboard warehouse or similar. Care should be taken not to subject the equipment to excessive temperatures or humidity.

Copyright

© 2015 Bronkhorst High-Tech B.V. All rights reserved. This documentation is protected by copyright. Subject to technical and optical changes as well as printing errors. The information contained in this document is subject to change at any time without prior notification. Bronkhorst High-Tech B.V. reserves the right to modify or improve its products and modify the contents without being obliged to inform any particular persons or organizations. The device specifications and the contents of the package may deviate from what is stated in this document.

EL-FLOW Prestige 9.17.0842

i

www

See also paragraph 9 of the Conditions of sales:

http://www.bronkhorst.com/files/corporate_headquarters/sales_conditions/en_general_terms_of_sales.pdf

Bronkhorst High-Tech B.V.

Warranty

Bronkhorst products are warranted against defects in material and workmanship for a period of three years from the date of shipment provided they are used in accordance with the ordering specifications and not subjected to abuse or physical damage. Products that do not operate properly during this period may be repaired or replaced at no charge. Repairs are normally warranted for one year or the balance of the original warranty, whichever is the longer.

The warranty includes all initial and latent defects, random failures, and undeterminable internal causes.

It excludes failures and damage caused by the customer, such as contamination, improper electrical hook-up, physical shock etc.

Re-conditioning of products primarily returned for warranty service that is partly or wholly judged non-warranty may be charged for.

Bronkhorst High-Tech B.V. or affiliated company prepays outgoing freight charges when any part of the service is performed under warranty, unless otherwise agreed upon beforehand, however, if the product has been returned collect to our factory or service center, these costs are added to the repair invoice. Import and/or export charges, foreign shipping methods/carriers are paid by the customer.

9.17.084

EL-FLOW Prestige 3

1 Scope of this manual

1.1 Introduction

This manual covers the EL-FLOW Prestige series mass flow meters/controllers for gases. Examples of the instrument series are shown in the pictures below. This manual includes product information, installation instructions, operation, maintenance and troubleshooting.

1.2 Intended use

The intended use of the EL-FLOW Prestige instruments is to accurately measure and/or control gas flow rates of a specified gas at conditions noted on the instrument label. The gas in the pressurized system in which the instrument is mounted has to be clean and dry. The instruments are suited for general purpose indoor (dry) applications, like laboratories and in well protected (OEM) housings. The instruments can be used for either (fast) switching gas flow or for controlling a constant flow rate (mass flow controllers only).

1.3 Product description

EL-FLOW Prestige is the next generation of Bronkhorst Mass Flow Meters/ Controllers using the latest, highly accurate, thermal by- pass sensor technology and featuring excellent control characteristics. Thanks to the advanced sensor technology in combination with a state-of-the-art pc-board, the instruments feature improved long-term stability as well as an unsurpassed temperature stability. Furthermore, due to a power efficient microprocessor, the power consumption of the instrument is reduced. The mass flow meters and controllers can be supplied in full scale ranges from 0,7 mln/min up to 20 ln/min Air-equivalent at max. 64 or 100

bar (1000 or 1500 psi) pressure rating.

EL-FLOW Prestige offers high flexibility due to the multi-gas/multi-range functionality. This function, now extended to 25 gases and mixtures thereof, is easily accessible via the FlowTuneTM software or PLC; there is no need to disconnect the instrument from your system. For additional gas types the user can calculate accurate fluid properties for conversion by means of our free, online software tool Fluidat® on the Net. Users of EL-FLOW Prestige instruments can rescale their instruments on site, saving time and money for dismounting and recalibration.

Numerous input/output options can be installed through the programmable sub-D 9-pin connector (from factory). In addition to the various analog signal options and the standard RS232 communication, there are such options as RS485 communication, digital frequency/pulse output, alarm output/reset, valve purge/close and analog valve output. Furthermore Bronkhorst offers various integrated fieldbus options: DeviceNetTM, PROFIBUS DP, Modbus RTU/ASCII, EtherCAT®, PROFINET and FLOW-BUS.

EL-FLOW Prestige 9.17.0846

Bronkhorst High-Tech B.V.

Basic instructions

Dimensional drawings

Document 9.17.083

Quick installation guide EL-FLOW Prestige

Document 7.15.176

Dimensional drawing FG-110C

Document 7.15.177

Dimensional drawing FG-111B

Document 7.15.178

Dimensional drawing FG-200CV / FG-210CV

Document 7.15.179

Dimensional drawing FG-201CV / FG-211CV

Document 7.15.180

Dimensional drawing FG-201CS

Advanced instructions

Hook-up diagrams

Document 9.17.027

Instruction manual RS232 interface

Document 9.16.119

Hook-up diagram LAB MBC3 RS232 and Analog

Document 9.17.024

Instruction manual FLOW-BUS interface

Document 9.16.120

Hook-up diagram LAB MBC3 FLOW-BUS

Document 9.17.025

Instruction manual PROFIBUS DP interface

Document 9.16.121

Hook-up diagram LAB MBC3 PROFIBUS DP

Document 9.17.026

Instruction manual DeviceNetTM interface

Document 9.16.122

Hook-up diagram LAB MBC3 DeviceNet

TM

Document 9.17.035

Instruction manual Modbus interface

Document 9.16.123

Hook-up diagram LAB MBC3 Modbus

Document 9.17.063

Instruction manual EtherCAT® interface

Document 9.16.124

Hook-up diagram LAB MBC3 EtherCAT®

Document 9.17.095

Instruction manual PROFINET interface

Document 9.16.147

Hook-up diagram LAB MBC3 PROFINET

Document 9.16.118

Hook-up diagram LAB MBC3 Custom bus & IO configurations

i

www

These documents can be found at: http://www.bronkhorst.com/en/downloads

1.4 References to other applicable documents

9.17.084

EL-FLOW Prestige 7

1.5 Model key

Bronkhorst High-Tech B.V.

EL-FLOW Prestige 9.17.0848

Bronkhorst High-Tech B.V.

Before installing your EL-FLOW Prestige mass flow meter/controller it is important to read the label on the backside of the instrument and check:

Flow rate Fluid to be measured Up- and downstream pressures Temperature Valve type (N.C.= Normally Closed, N.O.= Normally Opened) Input/output signal (see also section 2.6)

The tested pressure is stated on the instrument with a red-colored sticker. Before installation, make sure that the test pressure is in accordance with normal safety factors for your application. If there is no Pressure Testing Sticker on the device or if the test pressure is incorrect, the instrument should not be mounted in the process line and be returned to the factory.

Make sure that process gases do not condensate in the instrument due to (changing) environmental conditions, condensed process fluids may seriously harm the instrument's functionality! E.g. do not use moist air as process gas at low temperatures.

For reliable measurement always make sure the fluid stream is clean. Use filters to assure a moisture-, oil- and particle free gas stream. Recommended pore-size: 5 µm. If back flow can occur, a downstream filter and a check valve are recommended too. For high flow rates select a suitable filter size, to avoid too high pressure drop.

Do not install small diameter piping on high flow rates, because the inlet jet flow may affect the accuracy Do not mount abrupt angles directly on in- and outlet, especially not on high flow rates. At least 10 pipe diameters

2 Starting up

2.1 Check functional properties

2.2 Check operating conditions

2.2.1 Rated pressure test inspection

Each EL-FLOW Prestige instrument is pressure tested to at least 1.5 times the maximum operating pressure of the instrument. Each instrument is helium leak tested to at least 2x10-9 mbar l/s Helium outboard.

2.2.2 Sealings

EL-FLOW Prestige instruments are equipped from factory with sealings compatible with the requested gas type. However the

instruments have multi-gas/multi-range functionality on board. If another gas or mixture is used, always make sure that the gas/ mixture is compatible with the installed sealing materials. Refer to section 4.1 for a compatibility list.

2.2.3 Environmental ratings

EL-FLOW Prestige instruments are suitable for use in conditions between -10…70 °C and relative humidity of 10…90 %RH, unless

specified otherwise. Please note that EL-FLOW Prestige instruments have an ingress protection of IP-40, implying that the electronics housing and electrical connection do not offer any protection against moist environments.

2.3 Piping requirements

9.17.084

EL-FLOW Prestige 9

distance between the angle and the instrument is recommended. Do not mount pressure regulators directly on the inlet of gas flow meters/controllers, but allow at least 25 pipe diameters of piping.

2.4 Instrument mounting

Install the EL-FLOW Prestige meter/controller in the line, in accordance with the direction of the FLOW arrow. The arrow for flow direction is indicated on the body of the instrument. Tighten the fittings according to the instructions of the supplier of the fittings. The use of Swagelok RS-type stainless steel adapters is recommended.

For EL-FLOW Prestige instruments the upright position is preferred. When mounting an instrument in up- or downward position, zeroing of the instrument is advised (see section 2.9), especially at high pressures (> 10 bar). Avoid installation in close proximity of mechanic vibration and/or heat sources.

At the bottom side of the instrument a number of mounting holes are present, for stable fixation of the instrument. Refer to the dimensional drawing for the instrument for the exact position of the mounting holes.

i

www

Dimensional drawings can be found at: http://www.bronkhorst.com/en/downloads

Check the system for leaks before applying (fluid) pressure. Especially if toxic, explosive or other dangerous fluids are used!

Electrical connection must be made with standard cables or according to the applicable hook-up diagrams. The factory installed 9-pin sub-D settings are indicated on the instrument back-side label. Make sure that the power supply is suitable for the power ratings as indicated on the instrument label and that double or reinforced insulation is used for the power supply.

i

www

Applicable hook-up diagrams for EL-FLOW Prestige can be found at:

http://www.bronkhorst.com/en/downloads

EL-FLOW Prestige instruments are powered with +15…+24 Vdc. Several

hook-up examples and standard cables are found in chapter 3.

The instruments contain electronic components that are susceptible to damage by electrostatic discharge. Proper handling procedures must be taken during installation, removing and connecting the electronics.

The instruments described in this manual carry the CE-mark and are compliant with the EMC requirements. However compliance with the EMC requirements is not possible without the use of proper cables and connector/gland assemblies. Bronkhorst High-Tech B.V. recommends the use of their standard cables. These cables have the right connectors and if loose ends are used, these will be marked to prevent wrong connection. When using other cables, cable wire diameters should be sufficient to carry the supply current and voltage losses must be kept as low as possible. When in doubt: contact your distributor.

When connecting the system to other devices (e.g. PLC), be sure that the integrity of the shielding is not affected. Do not use unshielded wire terminals.

Bronkhorst High-Tech B.V.

2.5 Leak check

2.6 Electrical connection

EL-FLOW Prestige 9.17.08410

Bronkhorst High-Tech B.V.

Connect the EL-FLOW Prestige to the power supply/readout unit using a cable with 9-pin sub-D connector

Digital operation over RS232 can be established when using the following setup or using a Bronkhorst E-8000 readout/control unit. See section

3.4.1 for connecting to an E-8000. Connecting the instrument with an RS232 cable or an RS232 cable with a USB to RS232 converter to a PC will allow you to use (free) Bronkhorst software for Windows, such as FlowDDE and FlowPlot. Make sure that the instrument back-side label indicates RS232 settings for the 9-pin sub-D connector and apply the proper baud rate settings. If the instrument is not set for RS232 communication, please refer to section 3.4 for switching to RS232 communication settings via the 'Configuration Mode'.

i

www

A PiPS (Plug-in Power Supply, art.nr.: 7.03.422) is available to power a single instrument and can be used instead of the DB9 Loose-end cable as shown in the example above. Detailed information can be found in the manual PiPS (9.17.055) which can be downloaded at the download section from the website: http://www.bronkhorst.com/en/

downloads

With digital operation over RS485 or Ethernet a bus-system with multiple instruments can be set up. For RS485 FLOW-BUS or Modbus operation over the 9-pin sub-D connector or via an additional field bus driver (if installed), see section 3.5. For operation via other additional field bus systems (e.g. DeviceNetTM, EtherCAT®), refer to section 3.6 or the specific field bus manual.

Using the two colored LEDs and the micro switch on the EL-FLOW Prestige, several actions can be monitored and started. The green LED is used for status indication. The red LED is used for errors, warnings and messages. The switch can be used to start several actions, such as auto-zero, restore factory settings and bus-initialization actions, if applicable. See specific zero-procedure below (section 2.9) for more details.

The micro switch on top of the EL-FLOW Prestige can be operated with a thin, metal or hard plastic pin. For example the end of a paperclip.

2.7 Analog / digital operation

2.7.1 Analog / local operation

2.7.2 Digital RS232 operation

2.7.3 Digital RS485 / bus operation

2.8 Micro switch operation

9.17.084

EL-FLOW Prestige 11

Bronkhorst High-Tech B.V.

Do not apply pressure until electrical connections are made. When applying pressure to the system, avoid pressure shocks in the system and increase pressure gradually. Also decrease pressure gradually when required.

In systems for use with corrosive or reactive fluids, purging for at least 30 minutes with a dry, inert gas (like Nitrogen or Argon) is absolutely necessary before use. After use with corrosive or reactive fluids, complete purging is also required before exposing the system to air.

Let the EL-FLOW Prestige warm-up for at least 30 minutes for best accuracy.

It is recommended to turn on power before applying pressure on the instrument and to switch off power after removing pressure. Turn on fluid supply gently. Avoid pressure shocks and bring the instrument gradually up to the level of the actual operating conditions. Also switch off fluid supply gently.

Unless specified otherwise, EL-FLOW Prestige instruments are N2 calibrated. The calibration is converted to the

customer’s fluid and conditions using a detailed conversion model. This conversion model provides all the fluid data and calculations for the applicable process conditions and is also used for the multi-gas/multi-range functionality of the instrument.

If the equipment is not properly serviced, serious personal injury and/or damage to the equipment could be the result. It is therefore important that servicing is performed by trained and qualified personnel.

2.9

The zero-point of each instrument is factory adjusted. If so required the zero point may be re-adjusted over RS232, fieldbus or by means of using the micro switch. Procedure for zeroing by micro switch (for zeroing through a command via BUS/RS232 see section

3.9.5):

1. Warm-up, pressure up the system and fill the instrument according to the process conditions.

2. Make sure no flow is going through the instrument by closing valves near the instrument.

3. The setpoint must be zero.

4. Press micro switch and hold it. After a short time the moment (which is 8...12 s after pressing) release the switch.

5. The zeroing procedure will start at that moment and the green LED will blink fast. The procedure will take approx. 5 seconds.

6. When the indication is showing 0% signal and the green indication LED is burning continuously again, then the zeroing action was successful.

Zeroing (using micro switch)

red LED will go ON and OFF, then the green LED will go ON. At that

2.10 Purging

2.11 Supply pressure

2.12 Calibration

Each EL-FLOW Prestige instrument is factory calibrated. Bronkhorst High-Tech B.V. certifies that all instruments meet the rated accuracy. Calibration is performed using measurement standards traceable to the Dutch Metrology Institute (VSL). Calibration certificates are included in the shipment. Periodical inspection, recalibration or verification of the accuracy may be subject to individual requirements of the end-user.

2.13 Maintenance

No routine maintenance is required to be performed on the meters/controllers when they are used with clean gas, compatible with the wetted materials in the instruments. Units may be flushed with clean, dry inert gas.

In case of severe contamination it may be required to clean the inside of the instrument. After cleaning a recalibration is needed. Bronkhorst High-Tech B.V. has a trained staff available. Contact your local supplier for cleaning and recalibration options.

EL-FLOW Prestige 9.17.08412

Bronkhorst High-Tech B.V.

EL-FLOW Prestige MFMs/MFCs are most accurate at the specified inlet/outlet pressure, temperature and process gas conditions, however the instrument will function properly in a wide range of varying conditions. It is strongly advised to use the FlowTuneTM software available with the instrument to set the correct process conditions if the actual process conditions differ from the conditions for which the instrument is set (see section 3.1.1).

Although EL-FLOW Prestige MFMs/MFCs have excellent temperature stability, the best accuracy is achieved when temperature gradients across the instruments are avoided; so make sure that the gas temperature equals the ambient temperature and mount the instruments on a rigid (heat conducting) surface.

EL-FLOW Prestige MFCs handle pressure shocks in the system well, but are not insensitive to pressure fluctuations. For optimum control stability, provide a stable (pressure controlled) inlet pressure with sufficient buffer volume between the pressure regulator and the MFC and avoid installing multiple MFCs or other control valves in close proximity to another with small volume piping in between.

Mass Flow control

When an MFC (either with normally closed (n.c.) or normally opened (n.o.) valve) is hooked-up, the control valve closes when no setpoint is given. When the MFC receives a setpoint from the active setpoint source, the internal PID controller will immediately open the control valve until the required flow rate is achieved and it will maintain that flow rate until another setpoint is given.

Store up to eight different fluid sets Select one of 25 pre-installed gases per fluidset or compose any mixture consisting of these gases Insert fluid properties for any other gas/mixture per fluidset Change inlet- and/or outlet pressure according to actual process conditions Re-range the full scale (FS) flow rate within the instrument's accepted flow range Change the control speed per fluidset for faster or slower (smoother) flow control

3 Basic operation

3.1 Mass flow measurement and control

After correct installation of the EL-FLOW Prestige Mass Flow Meter (MFM) or Mass Flow Controller (MFC) and when all safety precautions have been taken into account (see chapter 2) the instrument can immediately be used for measuring/ controlling the required flow rate in the system by means of the selected communication interface(s).

Here are some general guidelines for mass flow measurement/control:

3.1.1 Changing fluidset, range or operating conditions

When the EL-FLOW Prestige instrument is used for other processes/conditions than indicated on the instrument label, use the FlowTuneTM software for setting the instrument for the required conditions. With FlowTune the following settings can be changed:

9.17.084

EL-FLOW Prestige 13

Bronkhorst High-Tech B.V.

For connection to FlowTune, make sure that the instrument back-side label indicates RS232 settings for the 9-pin sub-D connector and apply the proper baud rate settings. If the instrument is not set for RS232 communication, use the micro switch on top of the instrument to overrule the custom settings and switch to RS232 communication settings: press and hold the micro switch at power-up and wait (12…16 sec) until both

green and red LEDs flash (0.2 sec on, 0.2 sec off). Release the switch to activate the ‘Configuration Mode’. In the ‘Configuration Mode’ the bus type and baud rate for the 9-pin sub-D side connector are set to RS232 FLOW-BUS (Propar) at 38400 Baud. The ‘Configuration Mode’ remains active after power down. Use the same procedure to deactivate the ‘Configuration Mode’.

The EL-FLOW Prestige instrument will automatically adjust the controller settings to the new process conditions. there is no need to adjust controller PID settings manually.

It is advised to use FlowTune only in a non-operational environment. FlowTune will force the instrument to the 'Valve Safe State' mode (see section 3.1.2) when the connection is made. Be sure to close the communication properly to restore the instrument to its normal operating mode.

i

www

The FlowTune software for EL-FLOW Prestige and the applicable manual document 9.17.046 can be downloaded at the download section from the website: http://www.bronkhorst.com/en/downloads

i

www

FLUIDAT® on the Net can be accessed via the website: http://www.fluidat.com. FLUIDAT® on the Net is free to use, but only registered users have full access to fluids and functionality. Registration is possible via the FLUIDAT® website.

The multi-gas/multi-range functionality is available for the full temperature and pressure range for the instrument, within the

imitations of the instrument that is connected. FlowTune checks the changes for the following limitations:

l

Rangability of the flow sensor for the selected fluid Rangability of the control valve for the selected fluid Accuracy indication for the given flow range Compatibility of selected gases with the installed sealing materials (see also section 4.1) Limitations to the operation conditions

Using custom fluids or fluid properties

With FlowTune it is possible to insert fixed fluid properties for any other gas/mixture. The required fluid properties are density, heat capacity, thermal conductivity and dynamic viscosity. It is possible to use custom fluid data, however Bronkhorst advises to use the FLUIDAT® on the Net website for calculation of fluid properties at the customer process conditions. FLUIDAT® is a collection of routines to calculate physical properties of gases (and liquids). These routines are made available at the FLUIDAT® on the Net website.

3.1.2 Valve Safe State

When an MFC is not powered, the control valve automatically returns to its 'Safe State', which is closed for a 'normally closed (n.c.)' valve and fully opened for a 'normally opened (n.o.)' valve. During operation, certain communication errors may cause the MFC to go to the 'Valve Safe State' mode to protect the system, e.g. when fieldbus communication fails (PROFIBUS DP, DeviceNetTM, EtherCAT® and PROFINET only). Also when fluidset configuration of the instrument is incorrect, the instrument may go to the 'Valve Safe State' mode. See section 3.7 for more information and the LED indications for the 'Valve Safe State' mode or section 4.2.3 for the fluidset configuration parameters.

3.2 Communication interfaces

Numerous input/output options can be installed on EL-FLOW Prestige instruments via both the 9-pin sub-D connector on the side of the instrument and the optional field bus connector on top of the instrument.

Analog and RS232 FLOW-BUS and Modbus PROFIBUS DeviceNet™ EtherCAT® and PROFINET (or RS485)

EL-FLOW Prestige 9.17.08414

Bronkhorst High-Tech B.V.

1. Model key (see explanation of the model key in section 1.5)

2. Field bus (top connector) (example: none)

3. Customized IO settings (pin 5), see section 4.4.1 for more

information (example: default setting)

4. Analog interface (pin 2, 3) (example: inactive setpoint source, measure always available)

5. Digital interface (pin 1, 6) (example: RS232, active setpoint source)

6. Side connector digital interface settings (protocol, medium, baud rate, parity) (example: FLOW-BUS (Propar) communication over RS232 interface with baud rate 115200 Baud and no parity)

Via the 9-pin sub-D side connector the instrument can be operated by means of:

Analog interface (section 3.3): 0…5 Vdc; 0…10 Vdc; 0…20 mA or 4…20 mA Digital RS232 interface (section 3.4 and document 9.17.027): (FLOW-BUS (Propar) protocol) Digital RS485 interface (section 3.5): (Modbus RTU, Modbus ASCII or FLOW-BUS protocols)

The following optional field bus interfaces can be installed:

FLOW-BUS interface (section 3.5 and document 9.17.024) Modbus (RTU or ASCII) interface (section 3.5 and document 9.17.035) PROFIBUS DP interface (section 3.6 and document 9.17.025) DeviceNetTM interface (section 3.6 and document 9.17.026) EtherCAT® interface (section 3.6 and document 9.17.063) PROFINET interface (section 3.6 and document 9.17.095)

The interpretation of the LED indications and use of the micro switch button on top of the instrument is discussed in section 3.7 and section 3.8 respectively.

3.2.1 Using multiple interfaces

The analog interface is always present on EL-FLOW Prestige instruments. An interface to any available field bus is optional. Operation via analog interface, RS232/RS485 (side connector) and an optional field bus (top connector) can be performed at the same time. When using multiple interfaces, reading of parameters can be done simultaneously. When changing a parameter value, the last value sent by any of the interfaces will be valid.

Control mode

A controller setpoint is accepted from either the analog or digital interface, but not both. Analog or digital operation is selected at ordering and indicated on the instrument backside label. The inactive setpoint source is indicated between brackets (…), see example below. The parameter ‘Control Mode’ indicates from which source a controller setpoint is accepted: analog or digital. See

section 4.2.2 for more information regarding the ‘Control Mode’ parameter.

Factory communication settings

The factory selected communication and side connector pinning settings are indicated on the instrument backside label. See example below for a description of the communication information indicated on the instrument label:

9.17.084

EL-FLOW Prestige 15

Bronkhorst High-Tech B.V.

When operating the instrument through the analog interface it is possible to connect the instrument simultaneously to RS232 for reading/changing parameters (e.g. settings or fluid selection).

Refer to the hook-up diagram for analog operation (document 9.16.119) or use a 9-pin sub-D loose-end cable to connect the required signals.

Make sure that the instrument back-side label indicates RS232 settings for the 9-pin sub-D connector and apply the proper Baud rate settings. If the instrument is not set for RS232 communication, use the micro switch on top of the instrument to overrule the custom settings and switch to RS232 communication settings: press and hold the micro switch at power-up and wait (12…16 sec) until both green and red LEDs flash (0.2 sec on, 0.2 sec off). Release the switch to activate the ‘Configuration Mode’. In the ‘Configuration Mode’ the bus type and baud rate for the 9-pin sub-D side connector are set to RS232 FLOW-BUS (Propar) at 38400 Baud. The ‘Configuration Mode’ remains active after power down. Use the same procedure to deactivate the ‘Configuration Mode’.

3.3

The following analog signals are available for each instrument through the 9-pin sub-D side connector:

Measured value (analog output) at pin 2 Setpoint (analog input/setpoint) at pin 3

The factory selected analog interface (0…5 Vdc; 0…10 Vdc; 0…20 mA or 4…20 mA) can be found in the model key of the instrument (section 1.5) and in the pin description at the instrument backside label.

Pin 5 is used for customized I/O configurations. However, by default it is set as an analog output:

Valve output (control signal only) 0…10 Vdc at pin 5 (default)

For customized pin 5 I/O configurations see section 4.4.1. The factory selected pin 5 configuration can be found in the model key of the instrument (section 1.5) and in the pin description at the instrument backside label.

Analog operation

3.3.1 Hook-up

3.4 Basic RS232 operation

Digital RS232 (or bus) operation adds a lot of extra features to the instruments compared to analog operation, such as:

Up to eight selectable and customizable fluids (section 3.1.1) Multi gas / multi range functionality (section 3.1.1) Direct reading at readout/control module or host computer (section 3.4.1) Self-testing and diagnostics (section 5.1) Identification (section 3.9.3) Adjustable minimum and maximum alarm limits (section 3.9.4) (Batch) counter (section 3.9.4)

Each instrument process is controlled (internally) by specific parameters. The instrument parameter values are accessible through the available digital interfaces to influence the instrument behavior. In this section it is explained how to operate an instrument using RS232 communication.

EL-FLOW Prestige 9.17.08416

3.4.1 Hook-up

A special T-part cable (7.03.366) is required for connecting the 9pin sub-D side connector of an EL-FLOW Prestige instrument to a COM port of a pc for RS232 communication. Optionally use an RS232 to USB2.0 converter (9.09.122) to connect to a USB port. Use a Plug-in Power Supply (PiPS) (7.03.422) for powering the instrument.

Alternatively use a 9-pin sub-D loose-end cable and refer to the hook-up diagram for RS232 operation (document 9.16.119) to connect the required signals, typically for connection to PLC or microcontroller devices.

If an instrument is powered through the bus connector on top of the instrument (if present), the 9-pin sub-D side connector can be connected to a COM port directly using the T-part cable 7.03.366 or cable 7.03.367. The figure on the right shows a hook-up example for DeviceNet™.

Keep in mind that the 9-pin sub-D configuration of a Bronkhorst instrument differs from the 9-pin sub-D configuration of a PC COM-port. Make sure the correct cables are used for hook-up. When in doubt, always check the hook-up diagrams associated with the instruments.

When an EL-FLOW Prestige instrument is used in combination with an E-8000 readout/ control unit equipped with an RS232 interface, the instrument can be powered and operated using the 9-pin subD (female) connector at the rear of the E-8000 module and a cable

7.03.016 or equivalent. With the display interface and control

buttons most digital functions described in this document can be used. See E-8000 manual (document 9.17.076) for more information.

When an EL-FLOW Prestige instrument is used in combination with a BRIGHT B1 or B2 readout/control module, most digital functions are available by using the display interface and control buttons. If a BRIGHT module is connected, no other RS232 communication with the instrument can be established. For more information see the BRIGHT manual (document 9.17.048).

Bronkhorst High-Tech B.V.

E-8000

BRIGHT

9.17.084

EL-FLOW Prestige 17

Bronkhorst High-Tech B.V.

How to setup a DDE link with FlowDDE is described in the help-file of the FlowDDE application and in the instruction manual document 9.17.067. Programming examples are available for making applications in: Visual Basic, LabVIEW and Microsoft Excel.

When not using FlowDDE for communication with the instrument, each parameter value is addressed by:

Node address of the instrument Process number on the instrument Parameter number on the instrument

Refer to section 3.9 for more information regarding instrument parameters.

i

www

For more information regarding FlowDDE, see document 9.17.067 'Instruction manual FlowDDE' which can be found on: http://www.bronkhorst.com/files/downloads/manuals_english/917067manual_flowdde.pdf

3.4.2

RS232 communication can be used for operating the instrument using the Bronkhorst FlowDDE server application. Dynamic Data Exchange (DDE) provides the user a basic level of interprocess communication between Windows applications. FlowDDE is a DDE server application. Together with a client application, either self-made or with a SCADA-program from third parties, it is possible to create an easy way of data exchange between the flow meter/controller and a Windows application. For example, a cell in Microsoft Excel could be linked to the measured value of the EL-FLOW Prestige and when the measured value changes, it will be updated automatically in the Excel spreadsheet.

The FlowDDE server offers the user a different and user-friendly interface to the instrument. FlowDDE makes use of specific parameter numbers for communicating with the instrument. A DDE-parameter number is a unique number in a special FlowDDE instruments/parameter database and not the same as the parameter number from the process on an instrument. Node-address and process number will be translated by FlowDDE to a channel number.

DDE-client applications communicate to the FlowDDE server by using DDE messages. Before messages can be exchanged, a DDE link has to be made. A DDE link consists of three parts: the server, the topic and an item. For separation the characters '|' and '!' may be used, so a DDE link in e.g. Microsoft Excel becomes: Server|Topic!Item.

For standard instrument parameters and the FlowDDE server, these are:

Server: FlowDDE or FlowDDE2 Topic: ‘C(X)’ for channel number X Item: ‘P(Y)’ for parameter number Y

An example of a DDE link in a Microsoft Excel cell is =FlowDDE|’C(1)’!’P(8)’ to read parameter 8 of channel 1.

FlowDDE

EL-FLOW Prestige 9.17.08418

Bronkhorst High-Tech B.V.

i

www

FlowDDE and other Bronkhorst applications are available on the support CD or can be downloaded from the Bronkhorst internet site: http://www.bronkhorst.com/en/products/accessories_and_software/

bronkhorst_flowware/

Mode:

Digital

Interface/medium:

RS232

Protocol:

FLOW-BUS (Propar)

Baud rate:

9600

16200

38400

57600 115200 230400 460800

Node address:

3

Parity:

None

Make sure that the instrument’s baud rate corresponds with the baud rate of the application the instrument is communicating with, otherwise no communication can be established.

For RS232 communication, the maximum cable length is 10 m for baud rates up to 38400 Baud. For higher baud rates, use cable lengths of maximum 3 m.

i

www

For more information regarding communication through an RS232 interface, see document 9.17.027: RS232 interface with FLOW-BUS for digital instruments. http://www.bronkhorst.com/files/downloads/ manuals_english/917027manual_rs232_interface.pdf

3.4.3 Software (DDE applications)

Examples of free Bronkhorst DDE client applications: FlowDDE, FlowPlot and FlowView. Other software programs supporting DDE are for example MS-Office, LabVIEW, InTouch and Wizcon.

Bronkhorst® software applications 'FlowView' (left) and 'FlowPlot' (right)

3.4.4 Baud rate setup

EL-FLOW Prestige instruments support the following baud rates for RS232 communication. The factory selected baud rate is

indicated on the instrument back-side label. Refer to section 4.3.2 for changing the baud rate settings for the instrument. The default baud rate for RS232 communication is 38400 Baud.

RS232 communication options

Changing RS232 settings of the 9-pin sub-D side connector interface

Refer to section 4.3.2 for changing the baud rate settings for the instrument.

9.17.084

EL-FLOW Prestige 19

Bronkhorst High-Tech B.V.

i

www

More detailed information about Modbus can be found at http://www.modbus.org or any website of the (local) Modbus organization of your country (when available).

3.5

This section is limited to RS485 FLOW-BUS or Modbus communication. For communication through other field bus interfaces see section 3.6.

FLOW-BUS or Modbus communication is available only if either the FLOW-BUS or Modbus RJ-45 connector on top of the instrument is present, or if the 9-pin sub-D side connector is set for FLOW-BUS or Modbus communication. The label at the back of the instrument indicates the factory settings of the connector pinning.

FLOW-BUS

FLOW-BUS is a Bronkhorst designed field bus, based on RS485 technology, for digital communication between devices, offering the possibility of host-control by a pc.

Characteristics:

Baud rates of 187500 (default) or 400000 Baud +15…24 Vdc supply voltage Easy installation and communication with other Bronkhorst devices Automatic node search and bus optimization (gap fixing) PC communication via (local host) FLOW-BUS – RS232 interface Connection of max. 120 instruments on a single bus Maximum bus length: 600 m

See document 9.17.024 for more information about FLOW-BUS communication.

Modbus

Modbus is a 3-wire, RS485-based field bus communication system for parameter value exchange. In this system each instrument/ device is equipped with a micro-controller for its own dedicated task but also for exchanging parameter value information with other devices connected to the same Modbus system. In a Modbus system Bronkhorst instruments always serve as Modbus slaves. There is no mutual communication between Modbus slaves, only between master and slave. The master device is for example a pc.

Basic RS485 (FLOW-BUS/Modbus) operation

Characteristics:

Several selectable baud rates between 9600 and 256000 Baud (default: 19200 Baud) +15…24 Vdc supply voltage connection of max. 247 instruments on a single bus supports RTU and ASCII protocols

See document 9.17.035 for more information about Modbus communication.

EL-FLOW Prestige 9.17.08420

Bronkhorst High-Tech B.V.

Power the instruments in a FLOW-BUS local-host system by hooking-up the power supply directly on the FLOW-BUS line and not by powering a set of instruments through the 9-pin sub-D connector on one of the digital instruments.

i

www

For possible power supply and communication options, refer to document 9.17.076 'Instruction manual E-8000 PS / readout and control module': http://www.bronkhorst.com/files/downloads/manuals_english/917076--manual_e-

8000.pdf

3.5.1

The illustrations below show examples of a number of EL-FLOW Prestige instruments in an RS485 bus-system. Note that many other bus configurations are possible, contact your local sales representative for more information. Please check the total power consumption of your instruments and do not exceed the maximum power of the power supply.

FLOW-BUS setup (example)

In the example below an E-8000 power supply/readout control unit with FLOW-BUS is connected to two EL-FLOW Prestige instruments via the RJ-45 top-connector FLOW-BUS interface. In this example one instrument serves as 'local host' for communicating with a pc to all instruments on the bus via an available RS232 connector. Note: communication with all the instruments on the FLOW-BUS system is possible when using an EL-FLOW Prestige instrument as local-host RS232/FLOW-BUS interface. It is also possible to use multiple local-host RS232/FLOW-BUS interfaces in a FLOW-BUS system simultaneously.

Hook-up

Modbus setup (example)

In the example below the Modbus power supply is provided by an E-8000. The EL-FLOW Prestige instruments are connected to the bus via RS485 cables with RJ-45 connector and a Multiport connector. The RS485 - USB2.0 adapter can be used to connect the system to a Modbus master device.

9.17.084

EL-FLOW Prestige 21

Bronkhorst High-Tech B.V.

Note: an instrument with 9-pin sub-D side connector set for RS485 FLOW-BUS or Modbus communication will not respond when connecting to an RS232 configuration. If the instrument is not set for RS232 communication, use the micro switch on top of the instrument to overrule the custom settings and switch to RS232 communication settings: press and hold the micro switch at power-up and wait (12…16 sec) until both

green and red LEDs flash (0.2 sec on, 0.2 sec off). Release the switch to activate the ‘Configuration Mode’. In the ‘Configuration Mode’ the bus type and baud rate for the 9-pin sub-D side connector are set to RS232 FLOW-BUS (Propar) at 38400 Baud. The ‘Configuration Mode’ remains active after power down. Use the same procedure to deactivate the ‘Configuration Mode’.

Mode:

Digital

Interface/medium:

RS485

Protocol:

FLOW-BUS

Modbus RTU

Modbus ASCII

Baud rate:

187500

400000

9600

19200

38400 56000

57600 115200 128000 256000

9600

19200

38400

56000

57600 115200 128000 256000

Node address:

3…125

1…247

Parity:

None

None; Even; Odd

In case the FLOW-BUS or Modbus RJ-45 field bus connector is used for bus communication, the node address can be easily set by using the rotary switches on the side of the instrument. Use the ‘MSD’ (Most Significant Digit) to set the ‘tens’ of the bus-address and the ‘LSD’ (least Significant Digit) to set the ‘unit’ of the bus-address (the example on the right reads ‘63’). Set the rotary switches to '00' for automatic installation. Refer to the corresponding field bus manual, document 9.17.024 (FLOW-BUS) or document 9.17.035 (Modbus) for more details. For changing the baud rate or parity settings use the RS232 interface to change the corresponding parameters (see section 4.3.2).

Any changes made to the instrument communication settings will not be restored after a factory reset. See section

5.2 for more details.

3.5.2

When using a pc to communicate with EL-FLOW Prestige instruments only the FLOW-BUS protocol is supported by Bronkhorst software. When using Modbus operation, software from third parties, such as LabVIEW, ModScan or a Modbus PLC must be used to serve as Modbus master.

Software

3.5.3 Baud rate, node address and parity setup

EL-FLOW Prestige instruments are configured from factory as indicated on the instrument back-side label. If there is a need of

changing any of the specified RS485 settings, see the tables below for the supported configurations. The default selections are presented in bold.

RS485 FLOW-BUS/Modbus communication options

Changing RS485 settings of the RJ-45 top connector interface

Changing RS485 settings of the 9-pin sub-D side connector interface

In case the 9-pin sub-D side connector is set for RS485 communication, the baud rate or node address can be changed by using the micro switch or by changing the settings in the ‘Configuration Mode’. Refer to section 3.8 for changing node address and baud rate with the micro switch. Other communication parameters can be changed only in the ‘Configuration Mode’. Activate the ‘Configuration Mode’ by pressing the micro switch at start-up according the description in section 3.5.2 above. In ‘Configuration Mode’ the bus type and baud rate are set to RS232 FLOW-BUS (Propar) at 38400 Baud. Change the appropriate parameters as described in section 4.3.2. When finished, deactivate the ‘Configuration Mode’ using the same procedure. Now the instrument is ready to use in the desired configuration with the adjusted baud rate, node address or parity.

EL-FLOW Prestige 9.17.08422

Bronkhorst High-Tech B.V.

Mode:

Digital

Connector:

9-pin D-sub (female)

5-pin M12 (male)

2x RJ45 (in/out)

2x RJ45

Interface/medium:

RS485

Ethernet

Protocol:

PROFIBUS DP

DeviceNet

TM

EtherCAT®

PROFINET

Baud rate:

Autodetect

(9600) (19200) (45450) (93750)

(187500)

(500000) (1500000) (3000000) (6000000)

(12000000)

125000

250000 500000

100000000

Node address:

0…126

0...63

0 (n/a)

Parity:

Even

None

3.6 Other field bus configurations

The following field buses are optionally available for the EL-FLOW Prestige instruments. For all mentioned field bus systems the ELFLOW Prestige instruments serve as slaves on the master/slave bus system. There is no mutual communication between slaves,

only between master and slave.

PROFIBUS DP

PROFIBUS DP is a 2-wire, RS485-based industrial data communication standard (field bus) which allows automation components (like sensors, actuators and controllers) to exchange information. For more information regarding the PROFIBUS DP interface refer to document 9.17.025.

DeviceNet

The DeviceNetTM interface offers direct connection to a DeviceNetTM network according to the Mass Flow Controller Profile specified by the ODVA. The Bronkhorst DeviceNetTM instrument is a Group 2 Only Server device which messages comply with the Controlled Area Network (CAN) 2.0A standard and with the DeviceNetTM protocol. See document 9.17.026 for more information about the DeviceNetTM interface.

EtherCAT®

TM

Ethernet for Control Automation Technology (EtherCAT®) is an open high performance Ethernet-based field bus system. The EtherCAT® interface is described in more detail in document 9.17.063.

PROFINET

The PROFINET interface is 100% Ethernet-compatible and is used for data exchange between IO controllers (PLC, etc.) and IO devices (slaves, field devices). PROFINET uses the proven communication model and application view of PROFIBUS DP. Refer to document 9.17.095 for more information.

3.6.1 Hook-up

See the following documents for hook-up diagrams and instructions for setting up bus communication with the following communication interfaces:

PROFIBUS DP interface: hook-up diagram 9.16.121 and manual 9.17.025 DeviceNetTM interface: hook-up diagram 9.16.122 and manual 9.17.026 EtherCAT® interface: hook-up diagram 9.16.124 and manual 9.17.063 PROFINET interface: hook-up diagram 9.16.147 and manual 9.17.095

3.6.2 Baud rate, node address and parity setup

In the table below for the supported configurations for PROFIBUS DP, DeviceNetTM, EtherCAT® and PROFINET are shown. The default selections are presented in bold.

PROFIBUS DP, DeviceNetTM, EtherCAT® and PROFINET communication options

9.17.084

EL-FLOW Prestige 23

Bronkhorst High-Tech B.V.

green 'Mode'

LED

Time

Indication

Off

Continuous

Power-off or program not running

On

Continuous

Normal Operation Mode

Short flash

0.1 sec on, 2 sec off

Valve Safe State Mode There is no bus communication (PROFIBUS DP, DeviceNetTM, EtherCAT® and PROFINET only). Valves are in safe state. This LED indication is also active when the instrument is in ‘Initialization Mode' (Init Reset = '73')

Normal flash

0.2 sec on,

0.2 sec off

Special Function Mode The instrument is busy performing a special function, e.g. autozero or self-test

Long flash

2 sec on,

0.1 sec off

Configuration Mode The instrument is in configuration mode. In the configuration mode the baud rate and bus type for the 9-pin sub-D side connector are set to 38k4 and RS232 FLOW-BUS (Propar)

Changing PROFIBUS DP node address

e node address can be easily set by using the rotary switches on the side of the instrument. Use the ‘MSD’ (Most Significant Digit)

Th to set the ‘tens’ of the bus-address and the ‘LSD’ (least Significant Digit) to set the ‘unit’ of the bus-address.

Changing DeviceNet node address and data rate

The node address and data rate can be easily set by using the rotary switches on the side of the instrument. Use the ‘MSD’ (Most Significant Digit) to set the ‘tens’ of the bus-address and the ‘LSD’ (least Significant Digit) to set the ‘unit’ of the bus-address. Set the 'MSD' rotary switch to 'P' to select programmable bus-address. For the data rate setting select '1' for 125000 Baud, '2' for 250000 Baud, '5' for 500000 Baud and 'P' for programmable data rate.

Changing EtherCAT Second Address

EtherCAT supports the use of a Second Address. Bronkhorst instruments have 3 rotary switches, with which a Second Address can be set in the range of 0 – 4095 (0xFFF). This value of the rotary switches will be copied to the Configured Station Alias register (address 0x0012:0x0013) at instrument start-up.

3.7 LED indications

The following LED indicators are present on top of the instrument:

‘Mode’ LED: green used for operation mode indication ‘Error’ LED: red used for error/warning messages ‘NET’ LED: green/red / used for Network status (DeviceNet™ only) ‘MOD’ LED: green/red / used for Module status (DeviceNet™ only) ‘Status’ LED: green/red / used for status indication (EtherCAT® and PROFINET only)

Examples:

Analog and RS232 FLOW-BUS and Modbus PROFIBUS DeviceNet™ EtherCAT® and PROFINET

For EtherCAT® and PROFINET the following LED indicators are integrated in the RJ-45 connectors:

Amber LED: Ethernet Speed indicator Green LED: Ethernet Link/Activity indicator

The tables below list the possible indications by the LEDs on top of the instrument:

Green LED indications

EL-FLOW Prestige 9.17.08424

Bronkhorst High-Tech B.V.

red 'Error' LED

Time

Indication

Off

Continuous

No error

On

Continuous

Critical error message A serious error occurred in the instrument. The instrument needs servicing before further use.

Short flash

0.1 sec on, 2 sec off

Field bus specific warning message

FLOW-BUS: Node occupied: re-install instrument PROFIBUS DP: No data exchange between master and slave (automatic

recovery) Modbus: Data is received or transmitted DeviceNetTM: Not used EtherCAT®: Instrument is not in OP mode (see EtherCAT® manual

document 9.17.063 for more details) PROFINET: No application relation established

Normal flash

0.2 sec on,

0.2 sec off

Incorrect fluidset configuration and/or field bus specific warning message

The fluidset configuration of the instrument is incorrect (in this case the valves are in safe state, see section 4.2.3) and/or: FLOW-BUS: Waiting for communication, check communication settings of

all FLOW-BUS devices in the field bus setup. Usually the ‘last

node address’ setting of one of the devices is incorrect. PROFIBUS DP: Not used Modbus: Not used DeviceNetTM: Not used EtherCAT®: Not used PROFINET: Not used

Long flash

2 sec on,

0.1 sec off

Field bus specific warning message

FLOW-BUS: Not used PROFIBUS DP: A requested parameter is not available (see PROFIBUS DP

manual document 9.17.025 for more details)

Modbus: Not used DeviceNetTM: Not used EtherCAT®: Error detected in EtherCAT® configuration (see EtherCAT®

manual document 9.17.063 for more details) PROFINET: Configuration error. For example a requested parameter is not

available (see PROFINET manual document 9.17.095 for more details).

Wink mode:

green ‘Mode’ LED / red ‘Error’ LED turn by turn

Wink

Time

Indication

/ Slow wink

1 sec on, 1 sec off

Alarm indication Minimum alarm, limit/maximum alarm, power-up alarm, limit reached or batch reached.

/ Normal wink

0.2 sec on,

0.2 sec off

Wink mode By sending a command via ‘Wink’ parameter the instrument can wink with the LEDs to indicate its position in a (large) system.

/ Fast wink

0.1 sec on,

0.1 sec off

Switch released Selected action started.

Red LED indications

LED wink indications

DeviceNetTM LED indications

Specific LED indications are applicable to instruments with DeviceNetTM interface. Note: the ‘NET’ and ‘MOD’ LEDs are bi-colored LEDs (green/red). Refer to the DeviceNetTM manual, document 9.17.026, for more information.

EtherCAT LED indications Specific LED indications are applicable to instruments with EtherCAT interface. Refer to the EtherCAT manual, document

9.17.063, for more information.

PROFINET LED indications Specific LED indications are applicable to instruments with PROFINET interface. Refer to the PROFINET manual, document

9.17.095, for more information.

9.17.084

EL-FLOW Prestige 25

Bronkhorst High-Tech B.V.

The micro switch on top of the EL-FLOW Prestige can be operated with a thin, metal or hard plastic pin, for example the end of a paperclip.

LEDs

Time pushed

Indication

green ‘Mode’ LED

red ‘Error’ LED

Off

0…1 sec.

No action

Pressing a switch briefly by accident will not start any unwanted reaction of the instrument.

Off

1…4 sec.

In case of min/max alarm or counter batch reached: Reset alarm (only if reset by micro switch has been enabled). For FLOW-BUS only: if the node address is occupied, this function will install a free node-address on FLOW-BUS.

Off

On (red)

4…8 sec.

Reset instrument

Instrument program will be restarted and all warning and error messages will be cleared. During start-up the instrument will perform a (new) self-test.

On (green)

Off

8…12 sec.

Auto-zero

Instrument will be re-adjusted for measurement of zero-flow, see section 2.9.

On (green)

On (red)

12…16 sec.

Prepare instrument for FLASH mode for firmware update. Instrument shuts down and both LEDs turn off. At next power-up the instrument will be active again.

LEDs

Time pushed

Indication

green ‘Mode’ LED

red ‘Error’ LED

Off

0…4 sec.

No action

Pressing a switch briefly by accident will not start any unwanted reaction of the instrument.

Off

Normal flash

0.2 sec on,

0.2 sec off

4…8 sec.

Restore factory settings

All parameter settings (except field bus/communication settings) will be restored to the original factory settings.

Normal flash

0.2 sec on, 0.2 sec off

On (red)

8…12 sec.

For FLOW-BUS only: install a free node-address on FLOW-BUS.

Normal flash

0.2 sec on, 0.2 sec off

Normal flash

0.2 sec on,

0.2 sec off

12…16 sec.

Activate ‘Configuration Mode’

The baud rate and bus type for the 9-pin sub-D side connector are set to 38k4 and RS232 FLOW-BUS (Propar). The ‘Configuration Mode’ is recognized by the green LED blinking 2 sec on, 0.1 sec off. The ‘Configuration Mode’ is deactivated only after applying this micro switch action again.

3.8

By means of manual operation of the micro push-button switch some important actions for the instrument can be selected or started. These options are available in both analog and digital operation mode. These functions are:

Reset alarm Reset instrument (firmware program reset) Auto-zero Restore factory settings (in case of accidentally changing of the settings) Activate 'Configuration Mode' (for changing communication settings via RS232)

Using digital RS485 operation via the 9-pin sub-D side connector it is also possible to read/set:

Bus-address (node-address) (only required for RS485)

When the micro switch is pressed, both LEDs will start indicating different patterns in a loop. The switch has to be pressed down until the two LEDs are indicating the right pattern. When the switch is released, the selected action is started. The tables below describe the micro switch functions that can be started in normal operation mode and during power-up:

Micro switch functions

LED indications using micro switch at normal operation mode of an instrument

LED indications using micro switch at power-up situation of an instrument

EL-FLOW Prestige 9.17.08426

Bronkhorst High-Tech B.V.

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

[type]

RW

[x]…[y]

[DDE par]

[Pro]/[Par]

[address]/[index]

Within this manual, a reference to a parameter name is denoted by writing the DDE parameter number in front of the parameter name, e.g ‘8Measured Value’. See section 3.9.6 for a parameter list, sorted by DDE parameter number.

i

www

See document 9.17.027: ‘RS232 interface with FLOW-BUS for digital instruments’ for detailed information. http:// www.bronkhorst.com/files/downloads/manuals_english/917027manual_rs232_interface.pdf

3.9

Basic parameters and properties

3.9.1 Introduction

Most instrument parameters can only be accessed with digital communication. For each communication protocol the instrument parameters are accessed differently. When using Bronkhorst software programs FlowView or FlowPlot, easy access is provided to the mostly used parameters by menu interfaces. When using other communication methods the addressing method for the supported communication protocol is presented for a number of basic parameters in a table as shown below:

Type

Unsigned char 1 byte unsigned integer (0...255) Unsigned int 2 byte unsigned integer, MSB first (0...65535) Unsigned long 4 byte unsigned integer, MSB first (0...4294967295) Float 4 byte floating point, IEEE 32-bit single precision, MSB first Unsigned char [x] x byte array (text string)

Access

R The parameter is read-only RW The parameter can be read and written RW

Range

Some parameters only accept values within a certain range: [x] Minimum value of the range [y] Maximum value of the range

The parameter is protected and can only be written when the ‘Init Reset’ parameter is set to 64. See section 4.2.2 for more details.

FlowDDE Parameter number within FlowDDE. Refer to section 3.4.2 for more information about FlowDDE.

FLOW-BUS

Within the FLOW-BUS protocol (Propar when using RS232) parameters are divided into a ‘Process’ and a ‘Parameter’ number. To address parameters using the FLOW-BUS/Propar protocol write both numbers: [Pro] Process number [Par] Parameter number

Modbus

Parameters can be read or written via the Modbus protocol by specifying either the PDU Address or the register number. The PDU Address is a hexadecimal number (identifiable by the ‘0x’ prefix), which corresponds to the decimal register number minus one, e.g. PDU Address 0x0000 equals register number 1, PDU Address 0x000A equals register number 11 etc.): [address] Hexadecimal PDU Address [index] Decimal register number For the Modbus protocol every two bytes are addressed separately.

PROFIBUS DP, DeviceNetTM, EtherCAT® or PROFINET

Refer to the specific field bus manual for reading/changing parameters via field bus communication.

9.17.084

EL-FLOW Prestige 27

Bronkhorst High-Tech B.V.

The parameters below are most easily accessible via FlowPlot or FlowView software or any of the Bronkhorst readout/control units (BRIGHT, E-8000).

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned int

R

0…41942 (65535*)

8

1/0

0x0020/33

*In case the instrument is prepared for bi-directional measurement, the negative signals with an output range of

-73.73...-0.003% are presented in a range of 41943…65535 (so value 65535 represents -0.003%), whereas the positive signals 0…131.07% are still presented in the range 0…41942. (In FlowDDE the numbers are converted to negative values automatically).

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned int

RW

0…32000

9

1/1

0x0021/34

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char[16]

RW-115

113/6

0xF130…0xF136/ 61745…61751

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char[16]

RW -93

113/4

0xF120…0xF127/ 61729…61736

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char[20]

R -92

113/3

0xF118…0xF11F/ 61721…61728

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char[27]

RW -91

113/2

0xF111…0xF117/ 61713…61719

3.9.2 Basic measurement and control parameters

The list below provides the most basic parameters for digital communication with the instrument.

Measured Value (Measure)

The ‘8Measured Value’ indicates the amount of mass flow metered by the instrument. The signal of 0…100% is presented in a range of 0…32000. The maximum measured value output is 131.07%, which is 41942. A floating point variable of the measured value,

205

‘

Fmeasure’, is also available in the capacity and capacity unit for which the instrument has been set, see section 4.2.1.

Setpoint

The ‘9Setpoint’ is used to set the required mass flow rate for the controller. The signals have the same range as the ‘8Measured Value’, only the setpoint is limited between 0 and 100% (0…32000). A floating point variable of the setpoint, ‘ available in the capacity and capacity unit for which the instrument has been set, see section 4.2.1.

206

Fsetpoint’, is also

3.9.3 Basic identification parameters

User Tag

115

The ‘

User Tag’ parameter allows the user to give the instrument a custom tag name, with a maximum of 16 characters.

Customer Model

This parameter is used to add extra information to the model number information, such as a customer-specific model number.

Serial Number

This parameter consists of a max. 20-byte string with instrument serial number for identification, e.g.: ‘M1111111A’.

BHT Model Number

This parameter shows the Bronkhorst instrument model type information.

EL-FLOW Prestige 9.17.08428

Bronkhorst High-Tech B.V.

The alarm and counter settings are most easily accessible via FlowPlot or FlowView software or any of the Bronkhorst readout/control units (BRIGHT, E-8000). For more information about the alarm parameters see section

4.2.4, for the counter parameters see section 4.2.5.

The auto-zero function is most easily accessible via FlowPlot software. Select 'Instrument Settings' and use the 'Auto zero' button in the 'Basic' tab.

FlowDDE parameter

Parameter name

Purpose

Section

1

Wink

Special instrument parameter

Section 4.2.2

7

Init Reset

Special instrument parameter

Section 4.2.2

8

Measured Value (Measure)

Measurement/control

Section 3.9.2

9

Setpoint

Measurement/control

Section 3.9.2

11

Analog Input

Measurement/control

Section 4.2.1

12

Control Mode

Special instrument parameter

Section 4.2.2

21

Capacity

Fluidset property

Section 4.2.3

22

Sensor Type

Special instrument parameter

Section 4.2.1

24

Fluid Number

Fluidset property

Section 4.2.3

25

Fluid Name

Fluidset property

Section 4.2.3

28

Alarm Info

Alarm settings

Section 4.2.4

55

Valve Output

Measurement/control

Section 4.2.1

58

Calibration Mode

Special instrument parameter

Section 3.9.5

86

IOStatus

Special instrument parameter

Section 4.4.2

90

Device Type

Diagnostics

Section 5.1

91

BHT Model Number

Identification

Section 3.9.3

92

Serial Number

Identification

Section 3.9.3

93

Customer Model

Identification

Section 3.9.3

105

Firmware Version

Diagnostics

Section 5.1

114

Reset

Special instrument parameter

Section 4.2.2

115

User Tag

Identification

Section 3.9.3

3.9.4

Basic alarm and counter settings

3.9.5 Zeroing (using digital operation)

To start the auto-zero function by digital operation use the following procedure:

1. Set parameter ‘12Control Mode’ to value 9 (Calibration Mode); the

2. Set parameter ‘58Calibration Mode’ to value 9 (Auto-zero)

3. The auto-zero function has started

4. Check parameter ‘58Calibration Mode’:

o value 0 = idle (auto-zeroing succeeded), ‘12Control Mode’ is set to previous value. o value 9 = auto-zero active o value 255 = error: restart auto-zero (step 2), ‘12Control Mode’ is set to previous value.

green LED will flash normally (0.2 sec on, 0.2 sec off)

3.9.6 Instrument parameter list

The table below lists the relevant parameters for the EL-FLOW Prestige, sorted by FlowDDE parameter number.

9.17.084

EL-FLOW Prestige 29

Bronkhorst High-Tech B.V.

FlowDDE parameter

Parameter name

Purpose

Section

116

Alarm Maximum Limit

Alarm settings

Section 4.2.4

117

Alarm Minimum Limit

Alarm settings

Section 4.2.4

118

Alarm Mode

Alarm settings

Section 4.2.4

120

Alarm Setpoint Mode

Alarm settings

Section 4.2.4

121

Alarm New Setpoint

Alarm settings

Section 4.2.4

122

Counter Value

Counter settings

Section 4.2.5

124

Counter Limit

Counter settings

Section 4.2.5

126

Counter Setpoint Mode

Counter settings

Section 4.2.5

127

Counter New Setpoint

Counter settings

Section 4.2.5

128

Counter Unit

Counter settings

Section 4.2.5

129

Capacity Unit

Fluidset property

Section 4.2.3

130

Counter Mode

Counter settings

Section 4.2.5

139

Slave Factor

FLOW-BUS master/slave control

Section 4.3.1

142

Temperature

Fluidset property

Section 4.2.3

156

Reset Alarm Enable

Alarm settings

Section 4.2.4

157

Reset Counter Enable

Counter settings

Section 4.2.5

158

Master Node

FLOW-BUS master/slave control

Section 4.3.1

170

Density

Fluidset property

Section 4.2.3

175

Identification Number

Diagnostics

Section 5.1

178

Pressure Inlet

Fluidset property

Section 4.2.3

181

Fluid Temperature

Fluidset property

Section 4.2.3

182

Alarm Delay Time

Alarm settings

Section 4.2.4

201

Fieldbus 1 baudrate

Fieldbus settings

Section 4.3.2

205

Fmeasure

Measurement/control

Section 4.2.1

206

Fsetpoint

Measurement/control

Section 4.2.1

250

Heat Capacity

Fluidset property

Section 4.2.3

251

Thermal Conductivity

Fluidset property

Section 4.2.3

252

Viscosity

Fluidset property

Section 4.2.3

254

Controller Speed (Kspeed)

Fluidset property

Section 4.2.3

288

IO Switch Status

Special instrument parameter

Section 4.4.1

309

Fieldbus 2 address

Fieldbus settings

Section 4.3.2

310

Fieldbus 2 baudrate

Fieldbus settings

Section 4.3.2

335

Fieldbus 1 parity

Fieldbus settings

Section 4.3.2

336

Fieldbus 2 parity

Fieldbus settings

Section 4.3.2

346

Mix Fraction Type

Fluidset property

Section 4.2.3

347

Mix Fraction Temperature

Fluidset property

Section 4.2.3

348

Mix Fraction Pressure

Fluidset property

Section 4.2.3

EL-FLOW Prestige 9.17.08430

FlowDDE parameter

Parameter name

Purpose

Section

349

Mix Fraction Index

Fluidset property

Section 4.2.3

350

Mix Fraction

Fluidset property

Section 4.2.3

351

Mix Component Name

Fluidset property

Section 4.2.3

DDE parameter list

Bronkhorst High-Tech B.V.

9.17.084

EL-FLOW Prestige 31

Bronkhorst High-Tech B.V.

Gas

Modelkey: ...-V-...

Static seals: Viton® Dynamic seals: FFKM (viton for n.o. valves or FDA/USP class VI)

Modelkey: ...-E-...

Static seals: EPDM Dynamic seals: EPDM

Modelkey: ...-K-...

Static seals: Kalrez®/FFKM Dynamic seals: FFKM

Remarks

Air

Ar (Argon)

CH4 (Methane)

CO (Carbon monoxide)

CO2 (Carbon dioxide)

max: 10 bar(g), 50°C

C2F6 (Freon-116)

C2H2 (Acetylene)

/ *

* FFKM dyn. seal only

C2H4 (Ethylene)

max: 10 bar(g)

C2H6 (Ethane)

C3H6 #2 (Propylene)

max: 10 bar(g)

max: 58 bar(g)

C3H8 (Propane)

Cl2 (Chlorine)

Dry gas only

He (Helium)

H2 (Hydrogen)

H2S (Hydrogen sulfide)

NF3 (Nitrogen

trifluoride)

NH3 (Ammonia)

NO (Nitric oxide)

N2 (Nitrogen)

N2O (Nitrous oxide)

max: 20 bar(g), 50°C

O2 (Oxygen)

SF6 (Sulfur

hexafluoride)

SiH4 (Silane)

/ *

* FFKM dyn. seal only

Xe (Xenon)

Do not use process gases/mixtures that are incompatible with the sealing materials the EL-FLOW Prestige instrument is equipped with and do not exceed the indicated maximum operating pressure/temperature. Using the instrument outside the given operating limits may lead to serious damage to the instrument.

4 Advanced operation

4.1 Sealing material compatibility

EL-FLOW Prestige instruments are equipped from factory with sealings compatible with the requested gas type. However the instruments have multi-gas/multi-range functionality on board, if another gas or mixture is used, always make sure that the gas/ mixture is compatible with the installed sealing materials. As factory standard, the instruments are provided with Viton® static seals with FFKM dynamic seals. EPDM sealed instruments or full Kalrez®/FFKM are available as an option, see the model key indication ...-V-..., ...-E-... or ...-K-... on the instrument back-side label. Each sealing material has its specific compatibility with used process gases. See the table below for compatibility with the 25 most used process gases:

Sealing material compatibility list

EL-FLOW Prestige 9.17.08432

Bronkhorst High-Tech B.V.

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

FloatR-3.4E+38…

3.4E+38

205

33/0

0xA100…0xA101/ 41217…41218

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

FloatRW0…3.4E+38

206

33/1

0xA119…0xA11A/ 41241…41242

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned long

RW

0… 16777215

55

114/1

0x001F/32

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned int

R

0…65535

11

1/3

0x0023/36

All parameters described in this section have influence on the behavior of the EL-FLOW Prestige. Please be aware that wrong settings can disorder the output. To avoid unintentional changes, some parameters are locked (shown by the

symbol). To unlock parameters set parameter ‘7Init Reset’ to ‘Unlocked’.

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char

RW

82/64

7

0/10

0x000A/11

4.2 Advanced parameters and properties

4.2.1 Advanced measurement and control parameters

Measured Value (Fmeasure)

Floating point variable of the ‘8Measured Value’. The ‘ capacity unit for which the instrument has been set. The ‘

205

Fmeasure’ parameter shows the measured value in the capacity and

205

Fmeasure’ parameter is dependent of ‘

129

Capacity Unit’ and ‘22Sensor

Type’.

Setpoint (Fsetpoint)

Floating point variable of the ‘9Setpoint’. The ‘ which the instrument has been set. The ‘

206

Fsetpoint’ parameter shows the setpoint in the capacity and capacity unit for

206

Fsetpoint’ parameter is dependent of ‘

129

Capacity Unit’ and ‘22Sensor Type’.

Valve Output

This parameter is the digital steering signal for driving the control valve, where 0…16777215 corresponds with 0…100%.

Analog Input

Depending on the analog mode, 0…5 Vdc, 0…10 Vdc, 0…20 mA or 4…20 mA is converted to a number in the range 0…32000. The digitized ‘11Analog Input’ is in the same range as ‘8Measured Value’ (0…32000 corresponds to 0…100%). This parameter can be used as setpoint or slave factor when the instrument is used as ‘analog slave’ or ‘FLOW-BUS analog slave’, see ‘12Control Mode’.

4.2.2 Special instrument parameters

Init Reset

The ‘7Init Reset’ parameter is used to unlock secured parameters for writing (see the following values:

Value 82: Locked mode, secured parameters are read-only Value 64: Unlocked mode, secured parameters are writeable and readable

This parameter is always set to ‘Locked’ (value 82) at power-up.

9.17.084

EL-FLOW Prestige 33

symbol). This parameter can be set to the

Bronkhorst High-Tech B.V.

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char

R

0…5

114

115/8

0x0E68/3689

Make sure the ‘

114

Reset’ value is accepted by sending a 0 first. The ‘

114

Reset’ parameter may be disabled by the

‘

156

Reset Alarm Enable’ or ‘

157

Reset Counter Enable’ parameters.

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char [27]

W

0…910/0

0x0000/1

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned int

RW

0…255

12

1/4

0x0024/37

Value

Mode

Instrument action

Setpoint source

Slave factor

0

BUS/RS232

Normal operation, controlling

Bus or RS232

1

Analog Input

Normal operation, controlling

Analog input

2

FLOW-BUS Slave

Controlling as slave of other instrument on bus

‘FLOW-BUS master output’ x ‘

139

Slave Factor’ / 100%

‘

139

Slave Factor’

3

Valve Close

Close valve

4

Controller Idle

Stand-by on bus/RS232, controlling is stopped; Valve Output freezes in current position

7

Setpoint 100%

Controlling at setpoint 100%

Fixed 100%

8

Valve Fully Open

Valve fully opened

9

Calibration Mode

Calibration mode enabled (factory only)

10

Analog Slave

Controlling as slave of other instrument on analog input

‘11Analog Input’ x ‘

139

Slave

Factor’ /100%

‘

139

Slave Factor’

12

Setpoint 0%

Controlling at setpoint 0%

Fixed 0%

13

FLOW-BUS Analog Slave

Controlling as slave of other instrument on bus, slave factor is set with signal on analog input

‘FLOW-BUS master output’ x ‘11Analog Input’ x ‘

139

Slave

Factor’ / 100%

‘11Analog Input’

18

RS232

Normal operation, controlling

RS232

Reset

This parameter is used to reset program, counter or alarms.

Value 0: no reset Value 1: Reset counter Value 2: Reset alarm Value 3: Reset counter Value 4: Reset counter and counter off Value 5: Reset firmware program (soft reset)

Wink

Any text string value between '1' and '9' lets the instrument wink (normal wink) (red and green turn by turn) for that number of seconds for identifying its position. Default value = '0'.

Control Mode

The ‘12Control Mode’ is used to select different controlling modes of the instrument and determines from which sources controller setpoints are accepted. The following control modes are available:

EL-FLOW Prestige 9.17.08434

Bronkhorst High-Tech B.V.

Value

Mode

Instrument action

Setpoint source

Slave factor

20

Valve Steering

Setpoint is redirected to ‘55Valve Output’ with controller idle

21

Analog Valve Steering

Analog input is redirected to ‘55Valve Output’ with the controller idle

22

Valve Safe State

valve is in safe (unpowered) state (closed for N.C. valves and fully opened for N.O. valves)

For information about master/slave controller operation through the FLOW-BUS interface, see section 4.3.1.

See section 4.4.2 for changing the default control mode using the ‘86IOStatus’ parameter.

For changing fluidset, flow range or operating conditions it is strongly advised to use the FlowTune

TM

software

available with the EL-FLOW Prestige instrument. FlowTune checks any changes for compatibility of the process conditions with the instrument. When the parameters discussed in this section are changed manually, no such checks are performed and the instrument output may become disordered or the instrument may even be damaged if used in conditions the instrument is not suited for. Consult Bronkhorst service personnel when in doubt.

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char

RW

0…7241/16

0x0030/49

The '24Fluid Number' parameter is also accessible via FlowPlot or FlowView software or any of the Bronkhorst readout/control units (BRIGHT, E-8000).

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char[10]

RW -25

1/17

0x8188…0x818C/33161…33165

Use the FlowTune

TM

software to set the instrument for using (fixed) custom fluid properties, e.g. obtained from

FLUIDAT on the Net.

When no valid '25Fluid Name' is entered or when insufficient or invalid fluid properties are entered, the instrument will be forced into the 'Valve Safe State' mode until a valid fluidset configuration is made.

Instrument control modes

After power-up the ‘12Control Mode’ will be set to ‘Analog input’ or ‘BUS/RS232’, depending on the customer’s default setting for analog or digital operation. If however the ‘12Control Mode’ is set to a value other than 0, 1, 9 or 18 the actual control mode setting is maintained after power-up.

4.2.3 Advanced fluidset, range and operating conditions parameters

Fluid Number

With the ‘24Fluid Number’ parameter any of the maximum 8 available fluid sets can be selected. Each fluid set has its specific (configurable) properties, such as ‘25Fluid Name’, ‘21Capacity’, etc. Default value = 0 (fluid 1).

Fluid Name

This parameter consists of the fluid name for the selected ‘24Fluid Number’. This parameter may contain three value types:

Gas name, e.g. 'N2', 'He', 'C3H6 #2'. CAS number, e.g. '7727-37-9', '7440-59-7', '115-07-1' 'Mix': when the ‘25Fluid Name’ value is 'Mix', the instrument will use the gas mixture stored in the parameters '

347

Type', '

Mix Fraction Temperature', '

Name'. The instrument will ignore custom (fixed) fluid properties stored in the parameters '

251

'

Thermal Conductivity' and '

252

Viscosity'.

348

Mix Fraction Pressure', '

349

Mix Fraction Index', '

350

Mix Fraction', '

170

Density', '

346

351

250

Mix Fraction

Mix Component

Heat Capacity',

9.17.084

EL-FLOW Prestige 35

Bronkhorst High-Tech B.V.

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Float

RW

1E-10...1E+10

21

1/13

0x8168...0x8169/33129...33130

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char[7]

RW

See below

129

1/31

0x81F8...0x81FB/33273...33276

Mass flow

Normal volume flow (1.01325 bar(a), 0 °C)

Standard volume flow (1.01325 bar(a), 20 °C)

(Custom) volume flow (

246

Capacity Unit Pressure,

245

Capacity Unit Type

Temperature)

ug/h, ug/min, ug/s, mg/h, mg/min, mg/s, g/h, g/min, g/s, kg/h, kg/min, kg/s

uln/h, uln/min, uln/s, mln/h, mln/min, mln/s, ln/h, ln/min, ln/s, ccn/h, ccn/min, ccn/s, mm3n/h, mm3n/m, mm3n/s, cm3n/h, cm3n/m, cm3n/s, m3n/h, m3n/min, m3n/s, scfh, scfm, scfs, sccm, slm

uls/h, uls/min, uls/s, mls/h, mls/min, mls/s, ls/h, ls/min, ls/s, ccs/h, ccs/min, ccs/s, mm3s/h, mm3s/m, mm3s/s, cm3s/h, cm3s/m, cm3s/s, m3s/h, m3s/min, m3s/s

ul/h, ul/min, ul/s, ml/h, ml/min, ml/s, l/h, l/min, l/s, cc/h, cc/min, cc/s, mm3/h, mm3/m, mm3/s, cm3/h, cm3/m, cm3/s, m3/h, m3/min, m3/s, cfh, cfm, cfs

Due to compatibility the maximum string length is limited to 7 characters. Therefore some unit names are truncated. For instance mm3n/m means mm

3

n

/min.

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

FloatRW0.2...5

254

114/30

0xF2F0...0xF2F1/62193...62194

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

FloatR-250...500

142

33/7

0xA138...0xA139/41273...41274

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

FloatRW0...3.4E+38

143

33/8

0xA140...0xA141/41281...41282

Capacity

This parameter sets the maximum readout/control value (100%) for the active ‘24Fluid Number’ in readout units corresponding to

129

the '

Capacity Unit' parameter. The '21Capacity' is scaled when '

of the mixture parameter) are changed for the active fluidset.

Capacity Unit

For EL-FLOW Prestige the following units can be set:

178

Pressure Inlet', '

181

Fluid Temperature' or '25Fluid Name' (or any

Unit type list

Controller Speed (Kspeed)

This parameter sets the controller speed factor for the selected fluidset. The '

254

Kspeed' parameter is set from factory between value '0.5' (slow) and '2' (fast). The default value is '1'. Slower or faster settings are possible between values 0.2 and 5 at the customer's responsibility.

Actual Temperature

Indication of the actual ambient temperature in °C.

Pressure

Indication of the actual (inlet) pressure in bar(a). By default this parameter value is equal to the value of ' parameter can be used for active pressure correction by setting parameter ' writing the actual pressure to '

354

143

Pressure'. After power reset the parameter value is reset to the value of '

Conversion Condition Selection' to value 3 and

EL-FLOW Prestige 9.17.08436

178

Inlet pressure'. This

178

Inlet pressure'.

Bronkhorst High-Tech B.V.

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Float

RW

0...3.4E+38

178

113/13

0xF168...0xF169/61801...61802

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Float

RW

-250...500

181

113/16

0xF180...0xF181/61825...61826

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Float

RW

0...3.4E+38

170

33/21

0xA1A8...0xA1A9/41385...41386

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Float

RW

0...3.4E+38

250

113/18

0xF190...0xF191/61841...61842

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Float

RW

0...3.4E+38

251

113/20

0xF1A0...0xF1A1/61857...61858

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Float

RW

0...3.4E+38

252

113/21

0xF1A8...0xF1A9/61865...61866

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char

RW

0...2

346

126/4

0x0FC4/4037

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Float

RW

-250...500

347

126/5

0xFE28...0xFE29/65065...65066

Pressure Inlet

(Fixed) inlet pressure in bar(a), used for capacity calculations.

Fluid Temperature

(Fixed) temperature, used for capacity calculations.

Density

Density for the selected fluidset in kg/m3. Read-only parameter.

Heat Capacity

Heat capacity for the selected fluidset in J/kg·K. Read-only parameter.

Thermal Conductivity

Thermal conductivity for the selected fluidset in W/m·K. Read-only parameter.

Viscosity

Dynamic viscosity for the selected fluidset in Pa·s. Read-only parameter.

Mix Fraction Type

Set the fraction type for the mixture:

Value 0: Volume fraction Value 1: Mass fraction Value 2: Mole fraction

Mix Fraction Temperature

Temperature for the mixture specification in °C

9.17.084

EL-FLOW Prestige 37

Bronkhorst High-Tech B.V.

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Float

RW

0...3.4E+38

348

126/6

0xFE30...0xFE31/65073...65074

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char

RW

0...4

349

126/7

0x0FC7/4040

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

FloatRW0...1

350

126/8

0xFE40...0xFE41/65089...65090

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char[10]

RW -351

126/9

0xFE48…0xFE4C/65097…65101

Mix Fraction Pressure

Pressure for the mixture specification in bar(a).

Mix Fraction Index

Index for the gas component in the mixture (max. 5 components).

Mix Fraction

Mix fraction for the active mix component between 0 and 1, 0 = 0%, 1 = 100%

Mix Component Name

This parameter consists of the fluid name for the active mix component. This parameter may contain two value types:

Gas name, e.g. 'N2', 'He', 'C3H6 #2'. CAS number, e.g. '7727-37-9', '7440-59-7', '115-07-1'

EL-FLOW Prestige 9.17.08438

Bronkhorst High-Tech B.V.

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char

RW

0...3

118

97/3

0x0C23/3108

For DeviceNetTM only modes 0 and 1 are available.

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char

R

0…255

28

1/20

0x0034/53

Bit

Low (0)

High (1)

Description

LED indication

0

No error

An error occurred

Alarm register 2 contains an error

On (red) /

normal flash

1

No error

A warning occurred

Alarm register 1 contains a warning

On (red) /

normal flash

2

No error

Minimum alarm

‘Measured Value’ < ‘Alarm Minimum Limit’

/ Slow wink

3

No error

Maximum alarm

‘Measured Value’ > ‘Alarm Maximum Limit’

/ Slow wink

4

No error

Batch counter alarm

Batch counter reached its limit

/ Slow wink

5

No error

This bit only: Together with bit 2 or 3:

Power-up alarm (probably a power dip occurred) Response alarm (too much difference between ‘8Measured Value’ and ‘9Setpoint’)

/ Slow wink

6

No error

Master/slave alarm

'Setpoint' out of limits due to ‘Slave Factor’ (> 100%)

N/A 7

No error

Hardware alarm

Hardware error

On (red)

4.2.4

Advanced alarm parameters

Bronkhorst digital instruments have a built-in alarm function. It is used to indicate several types of alarm:

System errors System warnings Min/max alarms Response alarms Batch alarm Master/slave alarms

The alarm types can be set with the parameter ‘ parameter ‘28Alarm Info’. After an alarm, an automatic setpoint change can be set using the parameters ‘

121

and ‘

Alarm New Setpoint’. It is also possible to set an alarm delay to prevent overreaction to small disturbances using the

parameter ‘

182

Alarm Delay Time’. How an alarm can be reset is controlled by the parameter ‘

118

Alarm Mode’. When an alarm occurs, the type of alarm can be read out using

156

Reset Alarm Enable’. It can bit-wise

120

Alarm Setpoint Mode’

be set to automatic, reset, external or keyboard/micro switch. Note: when an alarm is disabled, it will only switch off after the set

156

‘

Alarm Delay Time’ has passed.

Alarm Mode

Available alarm modes:

Value 0: Alarm off Value 1: Alarm on absolute limits Value 2: Alarm on limits related to setpoint (response alarm) Value 3: Alarm when instrument powers-up (e.g. after power-down)

Alarm Info

This parameter contains 8 bits with status information about (alarm) events in the instrument (convert value to binary number to see which bits are active).

Alarm events

9.17.084

EL-FLOW Prestige 39

Bronkhorst High-Tech B.V.

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char

RW

0…255

182

97/7

0x0C27/3112

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned int

RW

0…32000

116

97/1

0x0C21/3106

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned int

RW

0…32000

117

97/2

0x0X22/3107

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char

RW

0…1

120

97/5

0x0C25/3110

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned int

RW

0…32000

121

97/6

0x0C26/3111

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char

RW

0…15

156

97/9

0C029/3114

Bit

Low (0)

High (1)

Description

0

OffOnReset by micro switch

1

OffOnExternal reset (not used)

2

OffOnReset by parameter ‘Reset’

3

OffOnAutomatic reset (when alarm conditions no longer apply)

Alarm Delay Time

This value represents the time in seconds the alarm action will be delayed when an alarm limit has been exceeded. This value also delays the alarm off action if an alarm limit is no longer exceeded. Default value = '0'.

Alarm Maximum Limit

Maximum limit for the ‘8Measured Value’ to trigger the maximum alarm situation (after ‘ represents 0…100% signal. The ‘

116

Alarm Maximum Limit’ value must be greater than the ‘

value = '0'.

Alarm Minimum Limit

Minimum limit for the ‘8Measured Value’ to trigger the minimum alarm situation (after ‘ represents 0…100% signal. The ‘

117

Alarm Minimum Limit’ value must be smaller than the ‘

value = '0'.

Alarm Setpoint Mode

Value 0: No setpoint change at alarm (default) Value 1: New setpoint at alarm enabled (set at value ‘

121

Alarm New Setpoint’)

Alarm New Setpoint

182

Alarm Delay Time’). Range 0…32000

117

Alarm Minimum Limit’ value. Default

182

Alarm Delay Time’). Range 0…32000

118

Alarm Maximum Limit’ value. Default

New (safe) setpoint during an alarm until reset. Range 0…32000 represents 0…100% setpoint. Default value = '0'.

Reset Alarm Enable

Available alarm reset options (convert value to binary number to see which bits are active):

Alarm reset options

Default value: value 15, all conditions above are enabled.

EL-FLOW Prestige 9.17.08440

Bronkhorst High-Tech B.V.

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char

RW

0...2

130

104/8

0x0D08/3337

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

FloatRW0… 10000000

122

104/1

0x0D01/3330

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

FloatRW0…9999999

124

104/3

0x0D03/3332

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char

RW

0…1

126

104/5

0x0D05/3334

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned int

RW

0…32000

127

104/6

0x0D06/3335

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char

RW

0…15

157

104/9

0x0D09/3338

Bit

Low (0)

High (1)

Description

0

OffOnReset by micro switch

1

OffOnExternal reset (not used)

2

Off

On

Reset by parameter ‘

114

Reset’

3

OffOnAutomatic reset (when alarm conditions no longer apply)

4.2.5

Advanced counter parameters

Counter Mode

Available counter modes:

Value 0: Counter off (default) Value 1: Counting upwards continuously Value 2: Counting up to limit in ‘

124

Counter Limit’ (batch counter)

Counter Value

Actual counter value in units selected at parameter ‘

128

Counter Limit

Counter limit/batch size in units selected at parameter ‘

Counter Unit’.

128

Counter Unit’. Default setting is 0 ln.

Counter Setpoint Mode

Value 0: No setpoint change at batch limit (default) Value 1: Setpoint change at batch limit (set at value ‘

127

Counter New Setpoint’)

Counter New Setpoint

New (safe) setpoint when a counter limit is reached until reset. Range 0…32000 represents 0…100% setpoint. Default value = '0'.

Reset Counter Enable

Available counter reset options (convert value to binary number to see which bits are active):

Counter reset options

Default value: value 7; bits 0, 1 and 2 are enabled.

9.17.084

EL-FLOW Prestige 41

Bronkhorst High-Tech B.V.

Setpoints from master instruments can be received via FLOW-BUS only. The parameters for master/slave control can be changed through both RS232 and FLOW-BUS.

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char

RW

1…125

158

33/14

0x042E/1071

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

FloatRW0…500

139

33/1

0x0421/1058

Any changes made to the instrument communication settings will not be restored after a factory reset. See section

5.2 for more details.

Type

Access

Range

FlowDDE

FLOW

-BUS

Modbus

Unsigned long

RW

0…10000000000

201

125/9

0xFD48...0xFD49/64841...64842

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char

RW

0…2

335

125/12

0x0FAC/4013

4.3

Field bus operation

4.3.1 FLOW-BUS master/slave controller operation

EL-FLOW Prestige instruments offer possibilities for master/slave control via FLOW-BUS. The output value of any instrument

connected to FLOW-BUS is automatically available to all other instruments (without extra wiring). To setup master/slave control the ‘12Control Mode’ of the instrument can be set to ‘FLOW-BUS Slave’ (value 2) or to ‘FLOW-BUS Analog Slave’ (value 13), depending on how the ‘ possible to have multiple masters and slaves in a FLOW-BUS system. A slave instrument can also be a master for other instruments.

Master Node

Set the master node for the instrument.

Slave Factor

The controller output from the master instrument is multiplied by the ‘ Example: if a master output is 80% and the ‘ 40%.

139

Slave Factor’ should be set. Via the parameter ‘

139

Slave Factor’ value = 50, then the slave instrument setpoint is 80% x 50%/100% =

158

Master Node’ the master device for the instrument is set. It is

139

Slave Factor’/100% to get the slave instrument setpoint.

4.3.2 Changing baud rate, node address and parity

Top connector communication

Change the node address of the instrument by using the instructions for the applicable field bus in chapter 3. Change the baud rate or parity of the installed field bus (top connector) with the following parameters using the RS232 interface:

Fieldbus 1 baudrate

For the accepted values see the applicable field bus in chapter 3.

Fieldbus 1 parity

The following values are accepted: 0 – no parity 1 – odd parity 2 – even parity

EL-FLOW Prestige 9.17.08442

Bronkhorst High-Tech B.V.

Note: an instrument with 9-pin sub-D side connector set for RS485 FLOW-BUS or Modbus communication will not respond when connecting to an RS232 configuration. If the instrument is not set for RS232 communication, use the micro switch on top of the instrument to overrule the custom settings and switch to RS232 communication settings: press and hold the micro switch at power-up and wait (12…16 sec) until both

green and red LEDs flash (0.2 sec on, 0.2 sec off). Release the switch to activate the ‘Configuration Mode’. In the ‘Configuration Mode’ the bus type and baud rate for the 9-pin sub-D side connector are set to RS232 FLOW-BUS (Propar) at 38400 Baud. The ‘Configuration Mode’ remains active after power down. Use the same procedure to deactivate the ‘Configuration Mode’.

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char

RW

0…255

309

124/10

0xFC50/64593

Type

Access

Range

FlowDDE

FLOW

-BUS

Modbus

Unsigned long

RW

0…10000000000

310

124/9

0xFC48...0xFC49/64585...64586

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char

RW

0…2

336

124/12

0xFC60/64609

The customized IO options are factory installed, as indicated by last three characters of the model key (presented on the back-side label of the instrument). These IO options cannot be changed manually.

A1V

0…10 Vdc output, controller (default selection)

Analog signal for pump or external valve steering (control signal only).

When the controller output is used for pump or external valve steering (Mass Flow Meters only), make sure the ‘

231

Valve Maximum’ is set to 0.3 [A]. For Mass Flow Controllers, the controller output is limited to a value below

10 Vdc due to the maximum valve current restriction.

B1V

4…20 mA output, controller

Analog signal for pump or external valve steering (control signal only).

Side connector RS485 communication

ange the baud rate, node address or parity of the side-connector RS485 (FLOW-BUS or Modbus) interface (if installed) with the

Ch following parameters in the 'Configuration Mode'.

Fieldbus 2 address

For the accepted values see the applicable field bus in chapter 3.

Fieldbus 2 baudrate

For the accepted values see the applicable field bus in chapter 3.

Fieldbus 2 parity

The following values are accepted: 0 – no parity 1 – odd parity 2 – even parity

4.4 Special instrument features

4.4.1 Customized IO options (pin 5)

EL-FLOW Prestige instruments offer various customized input/output functions through pin 5 of the 9-pin sub-D side connector as

an option. A number of the (factory installed) programmable IO options are offered as standard, these options are described in this section. The last three characters of the model key (presented on the back-side label of the instrument) indicate the installed IO configuration, see also section 1.5. The standard options are described below (the default selection is …-A1V). Refer to document

9.16.118 for the applicable hook-up diagrams.

9.17.084

EL-FLOW Prestige 43

Bronkhorst High-Tech B.V.

When the controller output is used for pump or external valve steering (Mass Flow Meters only), make sure the ‘

231

Valve Maximum’ is set to 0.3 [A]. For Mass Flow Controllers, the controller output is limited to a value below

10 Vdc due to the maximum valve current restriction.

C3A

Digital output, min/max alarm

During a min/max alarm, pin 5 is pulled down to 0 Vdc.

C4A

Digital output, counter alarm

During a counter alarm, pin 5 is pulled down to 0 Vdc.

C5S

Digital output, enabled by setpoint (for shut-off control)

Pin 5 is pulled down to 0 Vdc at a controller setpoint, e.g. for shut-off valve activation.

For factory selected analog control (…-A#-C5S):

When the ‘12Control Mode’ is set for analog control by factory, the minimum setpoint at which the device (shutoff valve) connected to pin 5 is activated is 1.9%, to avoid that possible noise on the analog input does accidentally activate the device.

For factory selected digital control (…-D#-C5S):

When the ‘12Control Mode’ is set for digital control by factory, the setpoint threshold for activating the device connected to pin 5 is any value > 0.

Note: If the instrument is forced into ‘Valve Safe State’, the digital output is not affected, so a (n.c.) shut-off valve connected to pin 5 will not close when the (n.c.) controller is in ‘Valve Safe State’.

Make sure to use 24Vdc power supply corresponding to the shut-off valve specifications. Cable 7.03.572 (T-part 9pin D-sub/loose end) or 7.03.603 (T-part 9-pin D-sub/DIN43650C) can be used for this operating option.

Example for -C5S- or -C0I- hook-up

C0I

Digital output, high/low switch via remote parameter (for shut-off control)

Pin 5 is pulled down to 0 Vdc when writing value 1 to parameter ‘

288

IO Switch Status’, this is undone by writing

value 0.

A device connected to pin5 (e.g. a shut-off valve) can be activated/de-activated by writing the parameter ‘

288

IO

Switch Status’.

Note: If the instrument is forced into ‘Valve Safe State’, the digital output is also affected, so a (n.c.) shut-off valve connected to pin 5 will be closed when the (n.c.) controller is in ‘Valve Safe State’.

Make sure to use 24Vdc power supply corresponding to the shut-off valve specifications. Cable 7.03.572 (T-part 9pin D-sub/loose end) or 7.03.603 (T-part 9-pin D-sub/DIN43650C) can be used for this operating option.

D9E

Digital frequency output, measure

Measurement value is translated to a frequency within given frequency range.

The default frequency range to represent 0…100% flow is 0…10000 Hz. Any other frequency range must be specified on order.

F9B

Digital pulse output, batch counter

Pin 5 is pulled down to 0 Vdc when a given batch size is reached (during a given pulse length).

By default, a pulse is given at each 1x the ‘

128

Counter Unit’ batch value, with a pulse length of 1 s. For instance,

when the ‘

128

Counter Unit’ is set to ln, a pulse is given each time 1 ln has passed through the instrument. An

EL-FLOW Prestige 9.17.08444

Bronkhorst High-Tech B.V.

alternative pulse length must be specified on order.

Provide a pull-up resistor of 5...10 kOhm to create 15...24 Vdc at pin 5 according to the hook-up diagram document 9.16.118.

Example for -F9B- hook-up

H1E

4…20 mA input, external sensor

Sensor input, this function disables the internal sensor.

I3C

Digital input, controller mode valve close

Valve closes when pin 5 is connected to 0 Vdc.

This function switches between the default ‘12Control Mode’ and mode (‘Valve Close’) (value 3). When the default ‘12Control Mode’ is ‘digital’ the default value is 0 (‘BUS/RS232’ mode), when the default ‘12Control Mode’ is ‘analog the default value is 1 (‘Analog Input’ mode).

I8C

Digital input, controller mode valve purge

Valve is fully opened when pin 5 is connected to 0 Vdc.

This function switches between the default ‘12Control Mode’ and mode (‘Valve Fully Open’) (value 8). When the default ‘12Control Mode’ is ‘digital’ the default value is 0 (‘BUS/RS232’ mode), when the default ‘12Control Mode’ is ‘analog' the default value is 1 (‘Analog Input’ mode).

I1R

Digital input, reset counter

The counter resets when pin 5 is connected to 0 Vdc.

Example for -I1R- or -I2R- hook-up

I2R

Digital input, reset alarm

The alarm resets when pin 5 is connected to 0 Vdc.

4.4.2 Changing default control mode

Instruments are factory-set with the control mode set for either analog or digital setpoint source. See parameter ‘12Control Mode’ to change the control mode. However after every (power-up) reset the instrument will return to its default control mode. To change the control mode permanently use the following procedure:

Changing default digital operation to default analog operation:

1. Set parameter ‘7Init Reset’ to 64

2. Read parameter ‘86IOStatus’

3. Add 64 to the read value

4. Write the new value to parameter ‘86IOStatus’

5. Set parameter ‘7Init Reset’ to 82

Changing default analog operation to default digital operation:

1. Set parameter ‘7Init Reset’ to 64

2. Read parameter ‘86IOStatus’

3. Subtract 64 from the read value

9.17.084

EL-FLOW Prestige 45

Bronkhorst High-Tech B.V.

When errors or warnings occur, connect the instrument to the Bronkhorst support software to determine the cause of the error or warning. For any fluidset related errors/warnings, make connection to the FlowTune software for diagnostics. For other errors/warnings, connect the instrument to FlowPlot and open the 'Alarm & Count' section under 'Instrument Settings' to determine the cause of the alarm/warning message.

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char[6]

R-105

113/5

0xF128…0xF12A/ 61737…61739

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char

RW

0...255

175

113/12

0x0E2C/3629

Type

Access

Range

FlowDDE

FLOW-BUS

Modbus

Unsigned char[6]

R-90

113/1

0xF108…0xF10A/ 61705…61707

6

8

4. Write the new value to parameter ‘

5. Set parameter ‘7Init Reset’ to 82

Note: do not use this procedure if customized IO options -C5S- (digital output, enabled by setpoint), -I3C- (digital input, controller mode valve close) or - I8C- (digital input, controller mode valve purge) are installed.

IOStatus’

5 Troubleshooting and service

5.1 Diagnostics

Firmware Version

Revision number of firmware.

Identification Number

Bronkhorst (digital) device/instrument identification number. For EL-FLOW Prestige instruments the following values are applicable:

Value 7: DMFC (Digital Mass Flow Controller) Value 8: DMFM (Digital Mass Flow Meter)

Device Type

The device type: DMFC or DMFM is stored in this read-only parameter.

EL-FLOW Prestige 9.17.08446

Bronkhorst High-Tech B.V.

Symptom

Possible cause

Action

No power (LEDs not burning)

No power supply

Check power supply

Check cable connection

Internal fuse blown due to long lasting shortage

Return to factory

Zero output signal

No setpoint accepted, incorrect control mode

Check analog/digital control mode (section 4.2.2)

No setpoint given, setpoint too low

Give setpoint >2%

Valve in 'Safe State' (normally closed valves)

Remove cause of 'Valve Safe State' (see section 3.1.2)

Pcb/sensor failure

Return to factory

Laminar flow element blocked/ contaminated

Return to factory

Maximum output signal (131.07%)

Flow too high, valve fully open

Close valve

Pcb/sensor failure

Return to factory

Valve in 'Safe State' (normally opened valves)

Remove cause of 'Valve Safe State' (see section 3.1.2)

Setpoint cannot be achieved

Pressure difference across instrument insufficient to achieve requested flow rate

Check inlet/outlet pressure Valve blocked or damaged

Return to factory

Stoppage

Remove contamination

Flow signal is gradually decreasing without setpoint change

Pressure difference across instrument insufficient to achieve requested flow rate

Check inlet/outlet pressure

Process gas condensation occurs

Decrease pressure or increase gas temperature

Oscillating controller output

Controller adjustment wrong, PID settings too fast

Set '

254

Controller Speed (Kspeed)' to

lower value

Inlet/outlet pressure too high or too low

Adjust pressure/set correct instrument pressure with FlowTune

Wrong gas selected

Set correct process gas with FlowTune

Inlet pressure control is oscillating

Replace pressure regulator or increase buffer volume between controller instruments (section 2.3)

'Cross-talk' with other controller instruments in process line

Increase buffer volume between controller instruments (section 2.3)

Valve is damaged

Return to factory

Non-zero output signal when valve is closed

Valve is leaking (through valve)

Check valve specifications for leak-

5.2

In this section a number of possible errors/malfunctions of the instrument are listed.

LED indications See section 3.7 for interpretation of specific LED indications of the instrument

Factory reset

In case (re)setting of the instrument has led to unexpected or non-recoverable behavior, it is possible to reset the instrument to the settings applied at the factory during production. Use the 'Restore Settings' tab under 'Instrument Settings' in FlowPlot or use the micro switch on top of the instrument (section 3.8) to restore the instrument to the original factory settings. Note that any changes made to the instrument communication settings will not be restored after a factory reset. If digital communication with the instrument can not be re-established, see section 3.4 to overrule the actual 9-pin sub-D communication settings with the 'Configuration Mode' (using the micro switch) and use the RS232 communication mode to re-establish communication.

Troubleshooting list

Troubleshooting

9.17.084

EL-FLOW Prestige 47

Bronkhorst High-Tech B.V.

Symptom

Possible cause

Action

tightness through valve

Non-zero offset signal (occurs at upward/ downward placement at higher pressures)

Auto-zero instrument (section 2.4/ section 2.9)

5.3 Service

For current information on Bronkhorst High-Tech B.V. and service addresses please visit our website:

http://www.bronkhorst.com

Do you have any questions about our products? Our Sales Department will gladly assist you selecting the right product for your application. Contact sales by e-mail:

sales@bronkhorst.com

For after-sales questions, our Customer Service Department is available with help and guidance. To contact CSD by e-mail:

support@bronkhorst.com

No matter the time zone, our experts within the Support Group are available to answer your request immediately or ensure appropriate further action. Our experts can be reached at:

+31 573 45 88 39

Bronkhorst High-Tech B.V. Nijverheidsstraat 1A NL-7261 AK Ruurlo The Netherlands

EL-FLOW Prestige 9.17.08448

Bronkhorst High-Tech B.V.

i

www

The declaration on contamination form is available at the Bronkhorst download site:

http://www.bronkhorst.com/files/support/safety_information_for_returns.pdf

6 Removal and return instructions

Instrument handlings:

Purge gas lines When toxic or dangerous fluids have been used, the customer should pre-clean the instrument Remove instrument from line The instrument must be at ambient temperature before packaging Insert the instrument into a plastic bag and seal the bag Place the bag in a appropriate shipping container

Add documentation:

Reason of return Failure symptoms Contaminated condition Declaration on Contamination form: 9.17.032

When returning material, always describe the problem and if possible the work to be done, in a covering letter.

It is absolutely required to notify the factory if toxic or dangerous fluids have been metered with the instrument!

This to enable the factory to take sufficient precautionary measures to safeguard the staff in their repair department. Take proper care of packing, if possible use the original packing box.

Contaminated instruments must be dispatched with a completely filled in 'declaration on contamination form'. Contaminated instruments without this declaration will not be accepted.

Important:

Clearly note, on top of the package, the customer clearance number of Bronkhorst High-Tech B.V., namely:

NL801989978B01

If applicable, otherwise contact your distributor for local arrangements.

9.17.084

EL-FLOW Prestige 49

Bronkhorst EL-FLOW Prestige User Manual

Specifications and Main Features

Frequently Asked Questions

User Manual

Table of contents

1 Scope of this manual

1.1 Introduction

1.2 Intended use

1.3 Product description

1.4 References to other applicable documents

1.5 Model key

2 Starting up

2.1 Check functional properties

2.2 Check operating conditions

2.2.1 Rated pressure test inspection

2.2.2 Sealings

2.2.3 Environmental ratings

2.3 Piping requirements

2.4 Instrument mounting

2.5 Leak check

2.6 Electrical connection

2.7 Analog / digital operation

2.7.1 Analog / local operation

2.7.2 Digital RS232 operation

2.7.3 Digital RS485 / bus operation

2.8 Micro switch operation

Zeroing (using micro switch)

2.10 Purging

2.11 Supply pressure

2.12 Calibration

2.13 Maintenance

3 Basic operation

3.1 Mass flow measurement and control

3.1.1 Changing fluidset, range or operating conditions

3.1.2 Valve Safe State

3.2 Communication interfaces

3.2.1 Using multiple interfaces

Analog operation

3.3.1 Hook-up

3.4 Basic RS232 operation

3.4.1 Hook-up

FlowDDE

3.4.3 Software (DDE applications)

3.4.4 Baud rate setup

Basic RS485 (FLOW-BUS/Modbus) operation

Hook-up

Software

3.5.3 Baud rate, node address and parity setup

3.6 Other field bus configurations

3.6.1 Hook-up

3.6.2 Baud rate, node address and parity setup

3.7 LED indications

Micro switch functions

Basic parameters and properties

3.9.1 Introduction

3.9.2 Basic measurement and control parameters

3.9.3 Basic identification parameters

Basic alarm and counter settings

3.9.5 Zeroing (using digital operation)

3.9.6 Instrument parameter list

4 Advanced operation

4.1 Sealing material compatibility

4.2 Advanced parameters and properties

4.2.1 Advanced measurement and control parameters

4.2.2 Special instrument parameters

4.2.3 Advanced fluidset, range and operating conditions parameters

Advanced alarm parameters

Advanced counter parameters

Field bus operation

4.3.1 FLOW-BUS master/slave controller operation

4.3.2 Changing baud rate, node address and parity

4.4 Special instrument features

4.4.1 Customized IO options (pin 5)

4.4.2 Changing default control mode

5 Troubleshooting and service

5.1 Diagnostics

Troubleshooting

5.3 Service

6 Removal and return instructions