Instruction manual
EL-FLOW Base series
Mass Flow Controllers
Doc. no.: 9.17.061I Date: 06- 02-2 014
ATTENTION
Please read this instruction manual carefully before installing and operating the instrument.
Not following the guidelines could result in personal injury and/or damage to the equipment.
BRONKHORST HIGH-TECH
Even though care has been taken in the preparation and
publication of the contents of this manual, we do not
assume legal or other liability for any inaccuracy, mistake,
mis-statement or any other error of whatsoever nature
contained herein. The material in this manual is for
information purposes only, and is subject to change
without notice.
Bronkhorst High-Tech B.V.
June 2011
Page 2 EL-FLOW Base Series Mass Flow Controllers 9.17.061
BRONKHORST HIGH-TECH
TABLE OF CONTENTS
1 General Product Information ........................................................................................................... 4
1.1 Introduction ....................................................................................................................................................... 4
1.2 Intended Use ...................................................................................................................................................... 4
1.3 Symbols .............................................................................................................................................................. 4
1.4 Product Support References .............................................................................................................................. 4
1.5 Warranty ............................................................................................................................................................ 5
1.6 Product Description ........................................................................................................................................... 5
1.7 Operating Principles ........................................................................................................................................... 8
1.8 Maintenance ...................................................................................................................................................... 9
2 Installation Instructions ................................................................................................................. 10
2.1 Introduction ..................................................................................................................................................... 10
2.2 Unpacking and inspection ................................................................................................................................ 10
2.3 Rated pressure test inspection ........................................................................................................................ 10
2.4 Instrument mounting ....................................................................................................................................... 10
2.5 Fluidic connections .......................................................................................................................................... 11
2.6 In-line filter usage ............................................................................................................................................ 11
2.7 Piping requirements ........................................................................................................................................ 11
2.8 Electrical connections ...................................................................................................................................... 12
2.9 Power and warm-up ........................................................................................................................................ 12
2.10 Pressure supply / Start-up ............................................................................................................................... 12
2.11 System purging ................................................................................................................................................ 13
2.12 Zeroing ............................................................................................................................................................. 13
3 Basic Operation ............................................................................................................................. 14
3.1 General ............................................................................................................................................................ 14
3.2 Analog operation ............................................................................................................................................. 14
3.3 Basic RS232 Flowbus operation ....................................................................................................................... 14
3.4 Modbus RS485 operation ................................................................................................................................ 15
3.5 Push-button operation .................................................................................................................................... 22
3.6 LED indications ................................................................................................................................................. 22
3.7 Basic Parameters and Properties ..................................................................................................................... 23
4 Advanced Operation ..................................................................................................................... 25
4.1 Reading and Changing Instrument Parameters ............................................................................................... 25
4.2 Using other gasses than specified .................................................................................................................... 30
5 Troubleshooting ............................................................................................................................ 31
5.1 General ............................................................................................................................................................ 31
5.2 LED indications ................................................................................................................................................. 31
5.3 Troubleshooting summary general .................................................................................................................. 31
6 Removal and Return Instructions ................................................................................................... 33
7 Service .......................................................................................................................................... 34
9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 3
BRONKHORST HIGH-TECH
1 General Product Information
1.1 Introduction
This user guide covers the EL-FLOW Base Series mass flow controllers for gasses as shown in the pictures
below. Included herein is product information, installation instructions, operation, maintenance,
troubleshooting and technical specifications.
F-201CB F-201AB F-202BB
/min – 20 ln/min 20 ln/min – 70 ln/min 70 ln/min – 200 ln/min
8 ml
n
1.2 Intended Use
The intended use of EL-FLOW Base instruments is to control gas flow rates of the specified gas noted on
the instrument label. The gas has to be clean.
The instruments can be used for either (fast) switching or controlling a constant flow rate.
1.3 Symbols
Important information. Discarding this information could cause injuries to people or damage to the
Instrument or installation.
Helpful information. This information will facilitate the use of this instrument.
Additional info available on the internet or from your local sales representative.
1.4 Product Support References
Instructions:
Operating instructions digital instruments, document nr. 9.17.023.
RS232 interface with FLOW-BUS protocol, document nr. 9.17.027.
Technical drawings:
Hookup EL-FLOW Base, document nr. 9.16.091
Dimensional drawing F-201AB, document nr. 7.15.165
Dimensional drawing F-201CB, document nr. 7.15.166
Dimensional drawing F-202BB, document nr. 7.15.170
These documents can be found at:
http://www.bronkhorst.com/en/downloads
Page 4 EL-FLOW Base Series Mass Flow Controllers 9.17.061
PC
-
Board
Mass Flow
Sensor
Laminar Flow
Element
9
pin SubD
Connector
Control Valve
Body
1.5 Warranty
The products of Bronkhorst High-Tech B.V. are warranteed against defects in material and workmanship
for a period of three years from the date of shipment, provided they are used in accordance with the
ordering specifications and the instructions in this manual and that they are not subjected to abuse,
physical damage or contamination.
Products that do not operate properly during this period may be repaired or replaced at no charge.
Repairs are normally warranted for one year or the balance of the original warranty, whichever is the
longer.
See also paragraph 9 of the Conditions of sales.
The warranty includes all initial and latent defects, random failures, and undeterminable internal causes.
It excludes failures and damage caused by the customer, such as contamination, improper electrical
hook-up, physical shock etc.
Re-conditioning of products primarily returned for warranty service that is partly or wholly judged nonwarranty may be charged for.
Bronkhorst High-Tech B.V. prepays outgoing freight charges when any party of the service is performed
under warranty, unless otherwise agreed upon beforehand, however, if the product has been returned
collect to Bronkhorst High-Tech B.V., these costs are added to the repair invoice. Import and/or export
charges, foreign shipping methods/carriers are paid for by the customer.
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1.6 Product Description
1.6.1 General Description
An EL-FLOW Base mass flow controller consists of a thermal mass flow sensor, a laminar flow element
which acts as a bypass, a solenoid proportional control valve and a digital electronic PC-board for PIDcontrol and communication.
There are three different basic models for different flow rates (F-201CB, F-201AB and F-202BB).
Within each model there is variation in laminar flow element size, orifice size and sealing material. These
variables are optimized for the customer’s gas and process conditions.
9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 5
1.6.2 Model Key
Example: F-201CB-200-ABD-00-V
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Range: 200 ml/min
Analog output: 0-10Vdc
Seals: Viton
1.6.3 Seals
The instrument is fitted with either Viton or Kalrez seals. Which sealing material is used is shown in the
last character of the model key.
Bronkhorst High-Tech B.V. has gathered a material compatibility chart from a number of sources
believed to be reliable. However, it is a general guide only. Operating conditions may substantially
change the accuracy of this guide. Therefore there is no liability for damages accruing from the use of
this guide.
The customer’s application will demand its own specific design or test evaluation for optimum reliability.
Check if the seals like O-rings, plunger and packing gland of capillary are suitable for the used gas and
process.
Page 6 EL-FLOW Base Series Mass Flow Controllers 9.17.061
2
1
2
1
ρ
ρ
⋅
⋅
=
p
p
C
C
CF
n
p
C
n
ρ
Check FLUIDAT® on http://www.fluidat.com
are made available at the FLUIDAT® on the Net website.
1.6.4 Calibration
EL-FLOW Base instruments are Air calibrated. Bronkhorst High-Tech B.V. certifies that all instruments
meet the rated accuracy. They have been calibrated using measurement standards traceable to the
standards of the Dutch Metrology Institute (VSL).
The calibration is converted to the customer’s gas and conditions using a detailed conversion model.
This conversion adds a level of calibration uncertainty.
Thumb rule for calculating the conversion uncertainty is typical:
Uncertainty < 2% x CF for CF > 1
Uncertainty < 2% / CF for CF < 1
With CF defined as the approximate conversion factor, which can be calculated with:
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in which:
(1) calibration fluid (Air)
(2) customer fluid
FLUIDAT® is a collection of routines to calculate physical properties of gases and liquids. These routines
EL-FLOW Base instruments are standard delivered without calibration certificate. Calibration certificates
can be ordered together with the instruments. Contact your local sales representative for more
information.
1.6.5 Features
Each instrument consists of an Analog interface, a digital RS-232 interface and a digital ModBus/RS485
interface. The analog and the digital interface can be used together at the same time.
According to the pin-designation both RS232 and Modbus/RS485 are assigned to the same pins. When
connecting these pins to either of the two, the instrument will automatically detect which protocol to
use.
Digital operation adds a lot of extra features (compared to analog operation) to the instruments.
Such as:
• setpoint slope (ramp function on setpoint for smooth control)
• direct reading at readout/control module or host computer
• several control/setpoint modes (e.g. purge/close valve)
• identification (serial number, model number, device type, user tag)
• adjustable controller settings for custom controller response
specific heat
density at normal conditions
9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 7
BRONKHORST HIGH-TECH
mpsignal
cKV Φ⋅⋅=
Sensor flow
10 mln/min Air
LFE(4x) flow
10 mln/min Air
10 mln/min Air
10 mln/min Air
10 mln/min Air
1.7 Operating Principles
1.7.1 Thermal Gas Flow Sensor Principle
The gas flow sensor operates on a principle of heat transfer by sensing the temperature difference along
a heated section of a capillary tube. Part of the total flow is forced through the capillary by means of a
laminar flow element in the main stream generating a pressure difference.
The design of the laminar flow device is such that flow conditions in both the capillary and laminar flow
device are comparable, thereby resulting in proportional flow rates through the meter. The delta-T
sensed by the upstream and downstream temperature sensors on the capillary depends on the amount
of heat absorbed by the gas flow.
The transfer function between gas mass flow and signal can be described by the equation:
= output signal
V
signal
= specific heat
c
p
K = constant factor
= mass flow
Φ
m
Thermal sensor in a bridge configuration
The temperature sensors are part of a bridge circuit. The imbalance is linearised and amplified to the
desired signal level.
1.7.2 Bypass Principle
The measurement part of an EL-FLOW Base consists of a thermal sensor and a laminar flow element
(LFE). A laminar flow element consists of a stack of discs with precision etched flow channels. The flow
through each channel is proportional to the flow through the sensor. In this way, by adding more or less
laminar flow discs, the total flow rate of an instrument can be adjusted while using the same sensor flow
rate.
In general instruments with these sensors may be mounted horizontal, as well as in a vertical position, at
low operating pressures.
Example of a 50 ml
/min measurement part
n
Page 8 EL-FLOW Base Series Mass Flow Controllers 9.17.061
flowcontrol
valve
If the equipment is not properly serviced, serious personal injury and/or damage to the equipment
personnel.
1.7.3 Solenoid Valve Principle
The control valve used in the EL-FLOW Base series is a standard, direct operated control valve. It is a
normally closed solenoid valve. The plunger is lifted by the force of the magnetic field of the coil. The
diameter of the orifice under the plunger is optimised for the customer’s application.
BRONKHORST HIGH-TECH
The control valve is not designed to provide positive shut-off. It is recommended to install a separate
shut-off valve in the line if so required. Also pressure surges, as may occur during system pressurisation
must be avoided.
1.8 Maintenance
No routine maintenance is required to be performed on the controllers when they are used with clean
gas.
Units may be flushed with clean, dry inert gas.
In case of severe contamination it may be required to clean the inside of the instrument. After cleaning a
recalibration is needed. Bronkhorst High-Tech B.V. has a trained staff of servicemen available. Contact
your local supplier for cleaning and recalibration options.
could be the result. It is therefore important that servicing is performed by trained and qualified service
9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 9
BRONKHORST HIGH-TECH
Before installing an EL-FLOW Base it is important to read the attached label and check:
damaged or missing parts.
The tested pressure is stated on the flow controller with a RED COLOURED sticker. Check test pressure
the process line and be returned to the factory.
2 Installation Instructions
2.1 Introduction
This chapter discusses how to prepare the system and install an EL-FLOW Base mass flow controller.
2.2 Unpacking and inspection
Check the outside packing box for damage incurred during shipment. Should the packing box be
damaged, then the local carrier must be notified at once regarding his liability, if so required. At the
same time a report should be submitted to your distributor.
Carefully remove the equipment from the packing box. Verify that the equipment was not damaged
during shipment. Should the equipment be damaged, then the local carrier must be notified at once
regarding his liability, if so required. At the same time a report should be submitted to your distributor.
Refer to chapter 6, Removal and Return Instructions, about return shipment procedures.
- Flow rate
- Fluid to be measured
- Up- and downstream pressures
- Input/output signal
- Temperature
Do not discard spare or replacement parts with the packing material and inspect the contents for
2.3 Rated pressure test inspection
Each EL-FLOW Base is pressure tested to at least 1.5 times the working pressure of the process
conditions stipulated by the customer, with a minimum of 8 bar.
Each instrument is helium leak tested to at least 2⋅10
before installing in the line.
If the sticker is not available or the test pressure is incorrect, the instrument should not be mounted in
Pressure testing sticker
-9
mbar l/s Helium outboard.
2.4 Instrument mounting
The bottom side of an EL-FLOW Base consists of two mounting holes for stable mechanical fixation of
the instrument. Refer to the following documents for exact position of the mounting holes.
Page 10 EL-FLOW Base Series Mass Flow Controllers 9.17.061
Dimensional drawing F-201AB, document nr. 7.15.165.
Dimensional drawing F-201CB, document nr. 7.15.166.
Dimensional drawing F-202BB, document nr. 7.15.170.
The preferred mounting position of EL-FLOW Base mass flow controllers is horizontal. Other mounting
positions may introduce a zero shift and/or little gas and pressure dependency of the zero signal. When
DO NOT install small diameter piping on high flow rates, because the inlet jet flow will affect the
meters of piping (at least 25 pipe diameters).
mounting an instrument other than horizontal, zeroing of the instrument is advised. The zeroing
procedure is described in chapter 2.12.
Avoid installation in close proximity of mechanic vibration and/or heat sources.
2.5 Fluidic connections
The fluid connections of EL-FLOW Base instruments consist of ¼” BSPP female thread. The adapter
chambers are optimised for the use of Swagelok RS-type adapters combined with AS013 (70°Sh) o-rings
for leak tight installation.
BRONKHORST HIGH-TECH
Bronkhorst highly recommends the use of Swagelok RS-type stainless steel adapters, e.g. part number
SS-400-1-4RS.
Adapters can be ordered separately to the instruments. Contact your local distributor for more
information.
Always check your system for leaks, before applying fluid pressure. Especially if toxic, explosive or other
dangerous fluids are used.
2.6 In-line filter usage
Fluids to be measured should be absolutely free of dirt, oil, moisture and other particles. Fluids that are
heavily contaminated or contain particulates are detrimental to precision. If liquid phases enter the
sensor chamber, the function of the sensor and the mass flow controller may be impaired.
It is recommended to install an in-line filter or liquid separator upstream of the flow controller, and if
backflow can occur, a downstream filter is recommended too. Be aware of the pressure drop caused by
the filter.
Contact your distributor for further information.
2.7 Piping requirements
Be sure that piping is absolutely clean!
accuracy.
DO NOT mount abrupt angles direct on in- and outlet, especially not on high flow rates. At least 10 pipe
diameters distance between the angle and the instrument is recommended.
DO NOT mount pressure regulators direct on the inlet of gas flow meters/controllers, but allow some
9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 11
!
2.8 Electrical connections
2.8.1 Interface
EL-FLOW Base instruments can be operated by means of:
1. Analog interface (0...5Vdc or 0...10Vdc or 0...20mA or 4...20mA)
2. RS232 interface with FLOW-BUS protocol
3. RS485 interface with Modbus protocol
All above operation options are standard available in EL-FLOW Base instruments.
According to the pin-designation both RS232 and RS485 are assigned to the same pins. When connecting
these pins to either of the two, the instrument will automatically detect which protocol to use. When
sending a frequent request to the instrument, it will be capable of recognising the protocol,
once the instrument detect this protocol, it will send an answer.
The instrument will remember the detected protocol as long as the instrument is powered. This auto
detection can not be switched off or by-passed.
For electrical hook-up diagrams refer to document 9.16.091, “Hook-up EL-FLOW Base”
This documents can be found at:
http://www.bronkhorst.com/en/downloads
BRONKHORST HIGH-TECH
2.8.2 Power Supply
EL-FLOW Base controllers are powered with +15 Vdc to +24 Vdc.
When providing your own power supply be sure that voltage and current rating are according to the
specifications of the instrument(s) and furthermore that the source is capable of delivering enough
power to the instrument(s). Refer to Hookup EL-FLOW Base, document nr. 9.16.091, for more details.
Bronkhorst High-Tech B.V. recommends the use of their standard cables. These cables have the right
connectors and if loose ends are used, these will be marked to prevent wrong connection.
When using other cables, cable wire diameters should be sufficient to carry the supply current and
voltage losses must be kept as low as possible. When in doubt: contact your distributor.
EL-FLOW Base instruments carry the CE-mark. Therefore they have to comply with the EMC
requirements as are valid for these instruments. However compliance with the EMC requirements is not
possible without the use of proper cables and connector/gland assemblies.
When connecting the system to other devices (e.g. to PLC), be sure that the integrity of the shielding is
not affected. Do not use unshielded wire terminals.
2.9 Power and warm-up
Before switching on power, check if all connections have been made according to the hook-up diagram.
It is recommended to turn on power before applying pressure on the instrument and to switch off
power after removing pressure.Check fluid connections and make sure there is no leakage. If needed
purge the system with a proper fluid. Only purging with gases is allowed. Turn on power and allow at
least 30 minutes warming up and stabilizing. During warm-up period, fluid pressure may either be on or
off.
2.10 Pressure supply / Start-up
When applying pressure to the system, take care to avoid pressure shocks in the system and increase
pressure gradually up to the level of the actual operating conditions.
Page 12 EL-FLOW Base Series Mass Flow Controllers 9.17.061
2.11 System purging
If explosive gases are to be used, purge the process with inert dry gas like Nitrogen, Argon etc. for at
least 30 minutes.
In systems with corrosive or reactive fluids, purging with an inert gas is absolutely necessary, because if
the tubing has been exposed to air, introducing these fluids will tend to clog up or corrode the system
due to a chemical reaction with oxygen or moist air.
Complete purging is also required to remove such fluids from the system before exposing the system to
air. It is preferred not to expose the system to air, when working with these corrosive fluids.
2.12 Zeroing
The zero point of each instrument is factory adjusted. However, the zero point may shift slightly due to
temperature, pressure, gas type and mounting position influences. If so required, the zero point of the
instrument may be re-adjusted.
Zeroing is possible over RS232 Flowbus, RS485 ModBus or by means of using the micro switch. Zeroing
by means of using the micro switch is described in this manual.
• Warm-up, pressure up the system and fill the instrument according to the process conditions.
• Make sure no flow is going through the instrument by closing valves near the instrument.
• The setpoint must be zero.
• Press the micro switch and hold it. After a short time the red LED will go ON and OFF, then the green
LED will go ON. At that moment release the micro switch.
• The zeroing procedure will start at that moment and the green LED will blink fast. The zeroing
procedure waits for a stable signal and saves the zero. If the signal is not stable zeroing will take long
and the nearest point to zero is accepted. The procedure will take approx. 10 sec.
• When indication is showing 0% signal and the green indication LED is burning continuously again,
then zero has been performed well.
For information how to start the zeroing procedure over RS232 FlowBus or RS485 ModBus check
chapter 4.1.4, “Auto Zeroing”
BRONKHORST HIGH-TECH
9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 13
When operating the instrument through the analog interface it is possible to connect the instrument
or other fluid selection).
Physical layer and communication protocol are detected automatically upon reception of messages.
protocol. After every power-up the communication detection mode is active.
3 Basic Operation
3.1 General
An EL-FLOW base instrument can be operated by means of:
• Analog interface (0...5Vdc/0...10Vdc/0...20mA/4...20mA)
• Digital RS232 Flowbus interface (connected to COM-port by means of special cable on 38400 Baud)
• Digital RS485 Modbus interface.
Operation via analog or digital interface can be performed at the same time. A special parameter called
“control mode” indicates to which setpoint the controller should respond.
3.2 Analog operation
At analog operation following signals are available:
• measured value (analog output)
• setpoint (analog input)
The type of installed analog interface (0-5V, 0-10V, 0-20mA or 4-20mA) can be found in the model key of
the instrument. Refer to paragraph 1.6.2.
Setpoints below 2% of the full scale will be interpreted as 0% setpoint.
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simultaneously to RS232 or Modbus/RS485 for reading/changing parameters (e.g. controller response
3.3 Basic RS232 Flowbus operation
RS232 Flowbus communication can be used for operating your instrument using the Bronkhorst
FLowDDE server application.
These messages must be sent using the correct combination of physical layer and communication
Dynamic Data Exchange (DDE) provides the user a basic level of inter process communication between
Windows applications.
FlowDDE is a DDE server application. Together with a client-application, either self-made or with a
SCADA-program from 3rd-parties, it is possible to create an easy way of data exchange between the flow
controller and a Windows application.
For example, a cell in Microsoft Excel could be linked to the measured value of the flow controller and
when the measured value changes, it will be automatically updated in the Excel spreadsheet.
Page 14 EL-FLOW Base Series Mass Flow Controllers 9.17.061
FlowDDE and other Bronkhorst applications are available at the Bronkhorst download site:
A special RS232 cable (7.03.366) can be ordered separately. It consists of a T-part with 1 male and 1
connect power-supply and analog interface through the (analog) sub-D 9 connector.
Base
FlowDDE
Application 1
Application 2
Application n
RS232
DDE-link
DDE-link
DDE-link
Windows based Personal Computer
Instrument
BRONKHORST HIGH-TECH
server
Examples of DDE client applications: FlowPlot, FlowView, MS-Office, LabView, Intouch, Wizcon.
The FLowDDE server also offers a lot of test facilities and user adjustable settings for efficient
communication with the connected flow controller.
How to setup a DDE link with FlowDDE is described in the help-file of the FlowDDE application.
Programming examples are available for making applications in: Visual Basic, LabView and Excel.
FLowDDE parameter numbers:
Reading/changing parameter values via FLowDDE offers the user a different interface to the instrument.
Besides the application name: ‘FLowDDE’ there is only need of:
• topic, used for channel number: ‘C(X)’
• item, used for parameter number: ‘P(Y)’
A DDE-parameter number is a unique number in a special FLowDDE instruments/parameter database
and not the same as the parameter number from the process on an instrument.
Node-address and process number will be translated by FLowDDE to a channel number.
http://www.bronkhorst.com/en/downloads
female sub-D 9 connector on one instrument-side and a normal female sub-D 9 connector on the side of
the computer. By means of this cable it is possible to offer RS232 communication and still be able to
3.4 Modbus RS485 operation
This chapter is limited to the description of the interface between the Modbus Mass Flow Controller
with a master device. It will explain how to install an EL-FLOW Base instrument to your Modbus system.
It only contains the information that is needed most.
The implementation of the Modbus interface is based on the following standards:
[1] MODBUS Application Protocol Specification V1.1b, December 28, 2006
[2] MODBUS over Serial Line specification and implementation guide V1.02
There is no mutual communication between Modbus slaves; only between master and slave.
More detailed information about Modbus can be found at http://www.modbus.org or any website of
the (local) Modbus organisation of your country (when available).
9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 15
BRONKHORST HIGH-TECH
Physical layer and communication protocol are detected automatically upon reception of messages.
protocol. After every power-up the communication detection mode is active.
These messages must be sent using the correct combination of physical layer and communication
3.4.1 Slave address, baud rate and parity setup
Default instruments will be delivered to customers on address 1 and with a baud rate of 19200 baud and
EVEN parity.
The slave address, baud rate and parity of the Bronkhorst meter/controller Modbus slave can be
changed to fit the instrument in your existing Modbus network. Changing the slave address, baud rate
and parity can be done in the following ways.
Using RS232: FlowDDE
‘Off-line’ via the RS232 communication port by means of FlowDDE. This program can be used to
read/change parameters, including the slave address, baud rate and parity.
Connect your Bronkhorst meter/controller Modbus slave instrument to a free COM-port using the
special cable with on one side a T-part with male and female sub-D 9 connector and on the other side a
female sub-D 9 connector (part number 7.03.366). The single sub-D 9 connector should be connected to
your COM-port and the female sub-D 9 of the T-part to the male sub-D 9 of the instrument. Standard
cables are approx. 3 meters. Maximum length between PC and instrument allowed is approximately 10
meters.
Start FlowDDE and open communication via the menu (as shown below) or by pressing <F3>.
Once the DDE server is active, open the FlowDDE Test Form via the menu (as shown below) or by
pressing <F6>.
Page 16 EL-FLOW Base Series Mass Flow Controllers 9.17.061
Green LED
Red LED
Time
Indication
amount of count
flashes (0...12)
Off
0 ... 12 sec.
Maximum
tens in bus-address for instrument
Off
Amount of count flashes
(0...9)
0 ... 9 sec.
Maximum
units in bus-address for instrument
amount of count
amount of count flashes
1 ... 3 sec.
baud rate setting for instrument
3 = 38400 Baud
The following screen appears:
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To read/change the slave address, parameter 199: Bus address must be selected. To read/change the
baud rate, parameter 201: Baudrate must be selected. And to read/change the parity parameter 335:
Bus1 Parity must be selected. To change one of these parameters parameter 7: Initreset has to be set to
‘64’ first.
Valid values for the slave address are between 1 and 247, valid values for the baud rate are 9600, 19200
and 38400, valid values for parity are 0 (= None), 1 (= Odd) and 2 (= Even). The changed values will be
effective immediately after changing.
Note: There are no hardware switches available on the Bronkhorst High-Tech instruments for Slave
address and Baud rate setting.
Using micro-switch and LEDs on top of the instrument
Readout bus-address/MAC-ID and baud rate:
Pressing the switch 3x briefly with intervals of max. 1 second in normal running/operation mode will
trigger the instrument to “show” its bus-address/MAC-ID and baud rate.
For indication the bus-address/MAC-ID the green LED will flash the amount of tens and the red LED the
amount of units in the number. For indication of baud rate setting, both LEDs will flash.
The flashes are called “count-flashes” and have a pattern of 0.5 sec. on, 0.5 sec. off.
Table: LED indications for bus-address and baud rate
flashes (1...3)
Note: Value zero will be indicated by a period of 1 sec. off (0.5 sec. off + 0.5 sec. off).
Examples:
• For bus-address 35 / 9600 baud the green LED will flash 3 times, the red LED will flash 5 times and
both LEDs will flash 1 time.
• For bus-address 20 / 19200 baud the green LED will flash 2 times, the red LED will flash 0 times and
both LEDs will flash 2 times.
• For bus-address 3 / 38400 the green LED will flash 0 times, the red LED will flash 3 times and both
LEDs will flash 3 times.
Change bus-address/MAC-ID and baud rate:
Pressing the switch 5x briefly with intervals of max. 1 second in normal running/operation mode will
trigger the instrument to enter the bus configuration mode.
Within the time-out period of 60 sec. it is possible to start changing the bus-address/MAC-ID of the
instrument (see table below).
9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 17
Table 7: Procedure for changing bus-address and baud rate
(1...3)
Maximum
1 = 9600 Baud
2 = 19200 Baud
BRONKHORST HIGH-TECH
Step
Action
Indication
time
handling
1
Set instrument to
mode”
both LEDs off
Press switch 5x briefly
2
Set tens of bus-
Green LED flashes
time-out:
Press switch and count green flashes
attempt.
3
Set units of bus-
red LED flashes
time-out:
Press switch and count red flashes
attempt.
4
Set baud rate of
both red and green
time-out:
Press switch and count red and green
change
“bus config
address
Address
field bus
communication.
1 = 9600 Baud
2 = 19200 Baud
3 = 38400 Baud
0.1 sec on,
0.1 sec off
count-flashes
start when switch
is pressed:
0.5 sec on,
0.5 sec off
0.1 sec on,
0.1 sec off
count-flashes
start when switch
is pressed:
0.5 sec on,
0.5 sec off
LED flashes
0.1 sec on,
0.1 sec off
count-flashes
start when switch
is pressed:
0.5 sec on,
0.5 sec off
60 sec
60 sec
60 sec
for tens of bus-address.
Release when wanted amount has
been count.
Counts up to max. 12 and than starts
at 0 again.
When counting fails, keep switch
pressed and restart counting for next
for units of bus-address/MAC-ID.
Release when wanted amount has
been count.
Counts up to max. 9 and then starts
at 0 again.
When counting failed, keep switch
pressed and restart counting for next
flashes for baud rate setting.
Release when wanted amount has
been count.
Counts up to max. 3 and than starts
at 0 again.
When counting failed, keep switch
pressed and restart counting for next
attempt.
Note: selection of 0 means: No
Instrument returns to normal running/operation mode.
Changes are valid when they are made within the time-out times.
Actual setting can be checked by pressing the switch 3x briefly with intervals of max. 1 sec. for readout
the bus-address/MAC-ID and baud rate.
Note 1:
Value zero will be indicated by a period of 1 sec. off (0.5 sec. off + 0.5 sec. off).
When value zero is wanted, press switch shortly and release it again within 1 sec.
Note 2:
Before each action of flash-counting, the LED(s) to be used for counting will flash in a high frequency.
(Pattern: 0.1 sec on, 0.1 sec off). As soon as the switch is pressed-down, this LED (or both LEDs) will be
off and the counting sequence will start.
Note 3:
The parity setting cannot be read or changed using the micro-switch.
3.4.2 Implementation class
The physical and data link layer are implemented conforming to the "basic slave" implementation class
as described in document [2], “MODBUS over Serial Line specification and implementation guide V1.02”.
The following options have been implemented:
Page 18 EL-FLOW Base Series Mass Flow Controllers 9.17.061
!
The maximum message size for the Read Holding Registers function is 100 bytes at 9600 baud (200
may be received.
Parameter
Options
Remarks
Addressing
address configurable from 1 to 247
(default 1)
see section 3.4.1
broadcast support
Yes baud rate
9600, 19200 (default), 38400
see section 3.4.1
parity
None, Odd, Even (default)
see section 3.4.1
transmission mode
RTU/ASCII
Auto detection
data bits
RTU=8, ASCII=7
not configurable
electrical interface
RS485 2W-cabling
See document:
9.16.091 - Hook-up diagram EL-FLOW Base
connector type
DB9 Male
See document:
9.16.091 - Hook-up diagram EL-FLOW Base
More detailed information about Modbus can be found at http://www.modbus.org or any website of
the (local) Modbus organisation of your country (when available).
3.4.3 Response time
This slave device will respond on each valid request from the master within 100 msec. This means that
the response timeout setting of the master should be set to a value larger than or equal to 100 ms.
3.4.4 Supported Modbus functions
This section describes the supported Modbus function codes. Refer to document [1] “MODBUS
Application Protocol Specification V1.1b, December 28, 2006” for more details.
BRONKHORST HIGH-TECH
More detailed information about Modbus can be found at http://www.modbus.org or any website of
the (local) Modbus organisation of your country (when available).
Read Holding Registers (03)
Possible exception responses:
• 02, ILLEGAL DATA ADDRESS, in case of reading of non-existing address, or reading a part of a
multiregister parameter (float, long, etc)
• 03, ILLEGAL DATA VALUE, in case of reading less than 1 or more than 125 registers
• 04, SLAVE DEVICE FAILURE, in case of reading a write-only register
bytes at 19200 baud and 400 bytes at 38400 baud). When this size is exceeded, corrupted responses
Write Single Register (06)
Possible exception responses:
• 02, ILLEGAL DATA ADDRESS, in case of writing to non-existing address, or writing to a part of a
multiregister parameter (float, long, etc)
• 04, SLAVE DEVICE FAILURE, in case of writing to read-only register
• 04, SLAVE DEVICE FAILURE, in case of writing illegal value to register
Write Multiple Registers (16)
Possible exception responses:
• 02, ILLEGAL DATA ADDRESS, in case of writing to non-existing address, or writing to a part of a
multiregister parameter (float, long, etc)
• 03, ILLEGAL DATA VALUE, in case of reading less than 1 or more than 123 registers
• 04, SLAVE DEVICE FAILURE, in case of writing to read-only register
• 04, SLAVE DEVICE FAILURE, in case of writing illegal value to register
When one of the written registers raises an exception, the value written to all subsequent registers are
discarded (ignored).
9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 19
BRONKHORST HIGH-TECH
Sub-function code (dec)
Name
00
Return Query Data
10
Clear Counters and Diagnostics Register
11
Return Bus Message Count
12
Return Bus Communication Error Count
13
Return Bus Exception Error Count
14
Return Slave Message Count
15
Return Slave No Response Count
16
Return Slave NAK Count (always 0)
17
Return Slave Busy Count (always 0)
18
Return Bus Character Overrun Count
!
The maximum message size for the Return Query Data sub function is 100 bytes at 9600 baud (200
may be received.
MODBUS REGISTERS
Hex
Dec
Wink
Unsigned char
W
0x0000
0x0001
1
Value 14592
Init/reset
Unsigned char
RW
0x000A
0x000B
11 Valve output
Unsigned int
RW
0x001F
0x0020
32
0..32767
Measure
Unsigned int
R
0x0020
0x0021
33 Setpoint
Unsigned int
RW
0x0021
0x0022
34 Setpoint slope
Unsigned int
RW
0x0022
0x0023
35 Analog input
Unsigned int
R
0x0023
0x0024
36 Setp. control modes
Unsigned char
RW
0x0024
0x0025
37 Sensor type
Unsigned char
RW
0x002E
0x002F
47 Capunit
Unsigned char
RW
0x002F
0x0030
48 Fluid number
Unsigned char
RW
0x0030
0x0031
49 Alarminfo
Unsigned char
R
0x0034
0x0035
53 Temperature
Unsigned int
R
0x0427
0x0428
1064
Identnumber
Unsigned char
RW
0x0E2C
0x0E2D
3629
ContrResp
Unsigned char
RW
0x0E45
0x0E46
3654
CycleTime
Unsigned char
R
0x0E4C
0x0E4D
3661
Diagnostics (08)
The following sub-functions are supported:
bytes at 19200 baud and 400 bytes at 38400 baud). When this size is exceeded, corrupted responses
Possible exception responses:
• 01, ILLEGAL FUNCTION, in case of not-supported sub-function
• 03, ILLEGAL DATA VALUE, in case of an incorrect value for the data field
Report Slave ID (17)
The Slave ID field in the response is a string with the same contents as FlowDDE parameter 1 (indent
number + version nr/serial nr). The Run Indicator Status field in this message will indicate ON when the
device is in normal operating mode (FB_NORMAL).
Possible exception responses:
• 04, SLAVE DEVICE FAILURE, in case of an internal error
3.4.5 Available parameters
Modbus registers (in the data model) are numbered from 1 to 65536. In a Modbus PDU (Protocol Data
Unit) these registers are addressed from 0 to 65535.
The following table lists the most commonly used parameters.
PARAMETER NAME PARAMETER
TYPE
ACCESS PDU ADDRESS
hex
REGISTER NUMBER
REMARK
Page 20 EL-FLOW Base Series Mass Flow Controllers 9.17.061
RespStable
Unsigned char
RW
0x0E51
0x0E52
3666
RespOpen0
Unsigned char
RW
0x0E52
0x0E53
3667
Calibration mode
Unsigned char
RW
0x0E61
0x0E62
3682
Monitor mode
Unsigned char
RW
0x0E62
0x0E63
3683
Reset
Unsigned char
W
0x0E68
0x0E69
3689
Sensor zero potmeter
Unsigned char
RW
0x0E85
0x0E86
3718
Modbus slave addr.
Unsigned char
RW
0x0FAA
0x0FAB
4011
Polycnst A
Float
RW
0x8128..0x8129
0x8129..0x812A
33065..33066
Polycnst B
Float
RW
0x8130..0x8131
0x8131..0x8132
33073..33074
Polycnst C
Float
RW
0x8138..0x8139
0x8139..0x81A
33081..33082
Polycnst D
Float
RW
0x8140..0x8141
0x8141..0x8142
33089..33090
TdsDn
Float
RW
0x8158..0x8159
0x8159..0x815A
33113..33114
TdsUp
Float
RW
0x8160..0x8161
0x8161..0x8162
33121..33122
Capacity
Float
RW
0x8168..0x8169
0x8169..0x816A
33129..33130
Fluid name
String (10 bytes)
RW
0x8188..0x818C
0x8189..0x818D
33161..33165
Capacity unit string
String (7 bytes)
RW
0x81F8..0x81FB
0x81F9..0x81FC
33273..33276
Fmeasure
Float
R
0xA100..0xA101
0xA101..0xA102
41217..41218
Fsetpoint
Float
RW
0xA118..0xA119
0xA119..0xA11A
41241..41242
Temperature
Float
R
0xA138..0xA139
0xA139..0xA13A
41273..41274
Capacity 0%
Float
RW
0xA1B0..0xA1B1
0xA1B1..0xA1B2
41393..41394
Device type
String (6 bytes)
R
0xF108..0xF10A
0xF109..0xF10B
61705..61707
Model number
String (14 bytes)
RW
0xF110..0xF116
0xF111..0xF117
61713..61719
Serial number
String (16 bytes)
RW
0xF118..0xF11F
0xF119..0xF120
61721..61728
Manufacturer config
String (16 bytes)
RW
0xF120..0xF127
0xF121..0xF128
61729..61736
Firmware version
String (5 bytes)
R
0xF128..0xF12A
0xF129..0xF12B
61737..61739
Usertag
String (13 bytes)
RW
0xF130..0xF136
0xF131..0xF137
61745..61751
IOStatus
Unsigned char
RW
0xF258..0xF259
0xF259..0xF25A
62041..62042
PID Kp
Float
RW
0xF2A8..0xF2A9
0xF2A9..0xF2AA
62121..62122
PID Ti
Float
RW
0xF2B0..0xF2B1
0xF2B1..0xF2B2
62129..62130
PID Td
Float
RW
0xF2B8..0xF2B9
0xF2B9..0xF2BA
62137..62138
Kspeed
Float
RW
0xF2F0..0xF2F1
0xF2F1..0xF2F2
62193..62194
Dynamic displ. factor
Float
RW
0xF508..0xF509
0xF509..0xF50A
62729..62730
Static displ. factor
Float
RW
0xF510..0xF511
0xF511..0xF512
62737..62738
Exp. Smoothing filt.
Float
RW
0xF520..0xF521
0xF521..0xF522
62753..62754
Modbus baud rate
Long integer
RW
0xFD48..0xFD49
0xFD49..0xFD4A
64841..64842
BRONKHORST HIGH-TECH
Notes:
• Access indicates whether parameter can be Read and/or Written.
• When a byte parameter is read, the upper 8-bits of the Modbus register will be 0. When a byte
parameter is written, the upper 8-bits must be set to 0.
• Long integer parameters have a length of 4 bytes and are mapped on two consecutive Modbus
registers. The first register contains bit 32-16, the second register contains bit 15-0.
• Floating point parameters have a length of 4 bytes and are mapped on two consecutive Modbus
registers. Floats are in single precision IEEE format (1 sign bit, 8 bits exponent and 23 bits fraction).
The first register contains bit 32-16, the second register contains bit 15-0.
• String parameters can have a length of maximal 16 bytes and can take up to 8 Modbus registers
where each register contains two characters (bytes). The upper byte of the first register contains the
first character of the string. When writing strings, the write action should always start from the first
register as a complete block (it is not possible to write a part of a string). If the string is shorter than
the specified maximum length the string should be terminated with a 0.
9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 21
LED’s
Time
Indication
Green
Red
Off
Off
0 – 1 sec
Pressing a switch shortly by accident will not cause
operation” for more detials.
Off
Off
1 – 4 sec
Off
On
4 – 8 sec
Reset instrument
self-test
On
Off
8 – 12 sec
Auto-zero
connected to power for at least 30 minutes!
On
On
12 – 16 sec
Prepare instrument for FLASH mode for firmware update.
At next power-up instrument will be active again.
LED’s
Time
Pushed
Indication
Green
Red
off
Off
0 – 4 sec
No action
cause unwanted reactions of the instrument
off
normal flash
4 – 8 sec
Restore parameters
restored to situation of final test at BHT production
normal flash
Off
8 – 12 sec
No action
normal flash
normal flash
12 – 16 sec
Manual install. The bus address and baudrate can be
address/MAC-ID and baud rate).
LED’s
Time
Indication
Green
Red
slow wink
0.2 sec on,
0.2 sec off
Wink mode
By a command send to the instrument.
fast wink
0.1 sec on,
0.1 sec off
Switch-released, selected action started.
Green LED
Time
Indication
Off
Continuously
Power-off or program not running
On
Continuously
Normal running/operation mode
Flash
0.2 sec on,
Special function mode
3.5 Push-button operation
By means of manual operation of the micro push-button switch some important actions for the
instrument can be selected/started. These options are available in both analog and digital operation
mode.
BRONKHORST HIGH-TECH
Pushed
unwanted reactions of instrument.
Pressing the switch 3x briefly with intervals of max. 1 sec.
will force instrument to indicate its bus-address/MAC-ID
and evt. baud rate. Check chapter 3.4, “
Instrument program will be restarted and all warning and
error message will be cleared
During (new) start-up instrument will perform a (new)
Modbus RS485
Instrument will be re-adjusted for measurement of zeroflow (not for pressure meter/controller)
NOTE: First make sure there is no flow and instrument is
Instrument shuts down and both LEDs turn off.
LED indications using micro-switch at normal running mode of an instrument
Pressing a switch shortly by accident will not
All parameter settings (except field bus settings) will be
changed by means of micro-switch en LEDs.
The procedure is described in 3.4.1 (Change bus-
LED indications using micro-switch at power-up situation of an instrument
3.6 LED indications
Green and Red LED turn-by-turn indication modes (no switch used)
Page 22 EL-FLOW Base Series Mass Flow Controllers 9.17.061
Green LED
Time
Indication
0.2 sec off
Instrument is busy performing any special function.
E.g. auto-zero or self-test
Red LED
Time
Indication
Off
Continuously
No error
Flash
Variable
Bus activity on the Modbus interface
On
Continuously
Critical error message
Instrument needs service before further using
Type
Access
Range
FlowDDE
FlowBus
ModBus
[type]
RW
[x]…[y]
[FB]
[Pro]/[Par]
[address]/[index]
Green LED indication modes (no switch used)
A serious error occurred in the instrument
Red LED indication modes (no switch used)
3.7 Basic Parameters and Properties
3.7.1 Introduction
Every parameter has its own properties. These properties are given in a table as shown:
BRONKHORST HIGH-TECH
Type
Unsigned char 1 byte character
Unsigned char[x] x byte array (string)
Unsigned int 2 byte unsigned integer
Float 4 byte floating point
Access
R The parameter is read-only
RW The parameter can be read and write
RW The parameter can only be written when the Init Reset parameter is set to 64. See Chapter
4.1.1, General Product Information for more details.
Range
Some parameters only accept values within a certain range:
[x] Minimal value of the range.
[y] Maximal value of the range.
FlowDDE
Parameter number in FlowDDE. Check chapter 3.3, “Basic RS232 Flowbus operation”, for detailed
information.
FlowBus
Process and parameter number to address parameters using the FlowBus protocol.
[Pro] Flowbus process number
[Par] Flowbus parameter number
Check document 9.17.027 , “RS232 interface with FLOW-BUS protocol”, for detailed information.
ModBus
PDU Address and register number to address parameters using the ModBus protocol.
[address] Hexadecimal PDU address .
[index] Decimal register number.
For the ModBus protocol every 2 bytes are addressed separately. Check chapter 3.4, “Modbus RS485
operation” for more details.
9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 23
Type
Access
Range
FlowDDE
FlowBus
ModBus
Unsigned int
R
0…41942
8
1/0
0x0020/33
Type
Access
Range
FlowDDE
FlowBus
ModBus
Unsigned int
RW
0…41942
9
1/1
0x0021/34
Type
Access
Range
FlowDDE
FlowBus
ModBus
Unsigned int
RW
0…18
12
1/4
0x0024/37
Value
Mode
Instrument action
Setpoint source
0
DIGITAL_INPUT
Controlling
RS232/RS485
1
ANALOG_INPUT
Controlling
Analog input
3
VALVE_CLOSE
Valve closed
4 CONTROLLER_IDLE
Idle 5
TEST_MODE
Test mode enabled
7 SETPOINT_100
Controlling @100%
Fixed 100%
8
VALVE_OPEN
Valve full opened
9 CALIBRATION_MODE
Calibration mode enabled
12
SETPOINT_0
Controlling @0%
Fixed 0%
18
RS232_INPUT
Controlling
RS232 FlowBus
3.7.2 Basic Parameters
Measured Value (Measure)
The measured value indicates the amount of mass flow metered by the instrument.
The signal of 0...100% will be presented in a range of 0...32000. The maximum signal to be expected is
131.07 %, which is: 41942.
Setpoint
Setpoint is used to set the wanted amount of mass flow.
Signals are in the same range as the measured value, only setpoint is limited between 0 and 100 %.
Control Mode
The Controller mode is used to select different functions of the instrument. The following modes are
available:
BRONKHORST HIGH-TECH
After power-up the control mode will always be set to DIGITAL_INPUT or ANALOG_INPUT, depending on
customer’s requirement. Check chapter 4.1.6, Changing Default Control Mode, to change the start-up
mode.
Page 24 EL-FLOW Base Series Mass Flow Controllers 9.17.061
!
All parameters described in this chapter have influence on the behaviour of the mass-flow meter. Please
parameters use set parameter “Init Reset” to “UN-LOCKED”
Type
Access
Range
FlowDDE
FlowBus
ModBus
Unsigned char
RW
82/64
7
0/10
0x000A/11
Value
Mode
Instrument action
82
LOCKED
Advanced parameters are
read-only
64
UN_LOCKED
Advanced parameters are
write- en readable.
Type
Access
Range
FlowDDE
FlowBus
ModBus
Unsigned char[20]
R - 92
113/3
0xF118..0xF11F/61721..61728
Type
Access
Range
FlowDDE
FlowBus
ModBus PDU
Unsigned char[14]
R - 91
113/2
0xF111..0xF117/61713..61719
Type
Access
Range
FlowDDE
FlowBus
ModBus PDU
Unsigned char[5]
R - 105
113/5
0xF128..0XF12A/61737..61739
Type
Access
Range
FlowDDE
FlowBus
ModBus PDU
Unsigned char[13]
RW
-
115
113/6
0xF130..0xF136/61745..61751
BRONKHORST HIGH-TECH
4 Advanced Operation
4.1 Reading and Changing Instrument Parameters
4.1.1 Introduction
be aware that wrong settings can disorder the output and control response.
To avoid un careless changes of these parameters, these parameters are locked. To un-lock these
Init Reset
The Init Reset parameter is used to ‘Un-Lock’ advanced parameters for writing. This parameter knows
the following values:
This parameter is always set to “LOCKED” at power-up.
4.1.2 Identification
Serial number
This parameter consists of a maximum 20-byte string with instrument serial number for identification.
Example: “M0202123A”
BHT Model number
Bronkhorst High-Tech instrument model number information string.
Firmware version
Revision number of firmware. Eg. “V1.12”
Usertag
User definable alias string. Maximum 13 characters allow the user to give the instrument his own tag
name.
It is advised here to limit the name up to 7 characters when using E-7000 readout and control modules.
These modules can display the tag name of an instrument only up to 7 characters.
Eg.: “Room1s6”
9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 25
Type
Access
Range
FlowDDE
FlowBus
ModBus PDU
Unsigned char[16]
RW
-
93
113/4
0xF120..0xF127/61729..61736
Type
Access
Range
FlowDDE
FlowBus
ModBus PDU
Unsigned char[10]
RW
-
25
1/17
0x8188..0x818C/33161..33165
Type
Access
Range
FlowDDE
FlowBus
ModBus PDU
Unsigned char[7]
R - 129
1/31
0x81F8..0x81FB/33273..33276
Type
Access
Range
FlowDDE
FlowBus
ModBus PDU
Float
R
±1E-10… ±1E+10
21
1/13
0x8168..0x8169/33129..33130
Type
Access
Range
FlowDDE
FlowBus
ModBus PDU
Float
R
±1E-10… ±1E+10
183
33/22
0xA1B0..0xA1B1/41393..41394
Type
Access
Range
FlowDDE
FlowBus
ModBus
Unsigned int
RW
0…18
12
1/4
0x0024/37
Type
Access
Range
FlowDDE
FlowBus
ModBus
Unsigned int
RW
9
58
115/1
0x0E61/3682
Value
Mode
Instrument action
0
IDLE
Idle 9 AUTO_ZERO
Auto-zeroing
255
ERROR
Idle
Customer model
Digital instrument manufacturing configuration information string.
This string can be used by Bronkhorst High-Tech to add extra information to the model number
information.
4.1.3 Fluid Information
Next parameters give information about the fluid range of the instrument.
Fluid name
Fluid name consists of the name of the fluid. Up to 10 characters are available for storage of this name.
Fluid unit
The Fluid unit can be read by parameter ‘capacity unit’. This parameter contains the unit in maximal 7
characters.
BRONKHORST HIGH-TECH
Fluid Capacity (@100%)
Capacity is the maximum value (span) at 100% for direct reading in sensor base units.
Fluid Capacity (@0%)
This is the capacity zero point (offset) for direct reading in sensor base units.
4.1.4 Auto Zeroing
To start the auto zero-procedure two parameters should be written:
Control Mode
Check chapter 3.7.2, “Basic Parameters”, for available control modes.
Calibration Mode
Procedure:
Step 1: Set Control Mode to CALIBRATION_MODE (9)
Step 2: Set Calibration Mode to AUTO_ZERO(9)
Step 3: Check Calibration Mode,
Page 26 EL-FLOW Base Series Mass Flow Controllers 9.17.061
IDLE Auto-zeroing succeeded
AUTO_ZERO Auto-zeroing active
ERROR Auto-zeroing failed
Settling time is defined as the time to reach the setpoint (and stay) within ± 2% of the initial setpoint
Type
Access
Range
FlowDDE
FlowBus
ModBus PDU
Float
RW
0…1E+10
167
114/21
0xF2A8..0xF2A9/62121..62122
Type
Access
Range
FlowDDE
FlowBus
ModBus PDU
Float
RW
0…1E+10
254
114/1
0xF2F0..0xF2F1/62193..62194
Type
Access
Range
FlowDDE
FlowBus
ModBus PDU
Float
RW
0…1E+10
168
114/22
0xF2B0..0xF2B1/62129..62130
Type
Access
Range
FlowDDE
FlowBus
ModBus PDU
Float
RW
0…1E+10
169
114/23
0xF2B8..0xF2B9/62137..62138
∫
d
+
K
S
+
-
Curve
Sensor
Control Valve
Flow
Setpoint
Kp
K
K
K
P I D
4.1.5 Controller Response Adjustment
The controller settling time of EL-FLOW Base instruments is factory adjusted to approximately 1 second
at customer process conditions.
When real process conditions differ from supplied data, or when a faster or slower controller response is
needed, a readjustment can be performed.
The picture below shows the basic controller diagram of the EL-FLOW Base. It consists of a standard PID
controller with a number of add-ons.
BRONKHORST HIGH-TECH
open
speed
dt
Basically, when a faster or slower controller response is needed, only the controller gain Kspeed or Kp
has to be changed.
normal
stable
Corr
Kp (PIDKp)
Proportional action of the PID controller.
Kspeed
Ti (PIDTi)
Integration action in seconds of the PID controller.
The value should not be changed.
Td (PIDTd)
Differentiation action in seconds of the PID controller.
Default Value: 0.0
This value should not be changed.
9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 27
BRONKHORST HIGH-TECH
Type
Access
Range
FlowDDE
FlowBus
ModBus PDU
Unsigned char
RW
0…255
165
114/18
0x0E52/3667
Type
Access
Range
FlowDDE
FlowBus
ModBus PDU
Unsigned char
RW
0…255
72
114/5
0x0E45/3654
05
.1
)
128
(
__
contresp
oldresponsenewresponse
−
⋅=
Type
Access
Range
FlowDDE
FlowBus
ModBus PDU
Unsigned char
RW
0…255
141
114/17
0x0E51/3666
05.1
)128(
__
respstable
old
responsenewresponse
−
⋅=
Type
Access
Range
FlowDDE
FlowBus
ModBus PDU
Unsigned char
RW
0…255
86
114/11
0xF258/62041
])400[( xOR
Kopen (RespOpen0)
Controller response when starting-up from 0% (when valve opens).
Value 128 is default and means: no correction.
Otherwise controller speed will be adjusted as follows:
(128-RespOpen0)
New response = old response * 1.05
Knormal (ContrResp)
Controller response during normal control (at setpoint step)
Value 128 is default and means: no correction.
Otherwise controller speed will be adjusted as follows:
Kstable (RespStable)
Controller response when controller is stable (within band of 2% of setpoint)
Value 128 is default and means: no correction.
Otherwise controller speed will be adjusted as follows:
4.1.6 Changing Default Control Mode
Instruments are delivered with either analog or digital signal as default setpoint, depending on
customer’s requirement.
After every (power on) reset the instrument will return to its default control mode.
The default control mode can be changed with the following parameter:
IOStatus
Bit 6 [7..0] represents the former analog jumper.
1 = default control mode is analog
0 = default control mode is digital
Procedure for changing default digital operation to default analog operation:
• Read IOStatus
• Add 64 to the read value
• Write IOstatus
Procedure for changing default analog operation to default digital operation:
• Read IOStatus
Page 28 EL-FLOW Base Series Mass Flow Controllers 9.17.061
])400[( xAND
factor
factor
cycletime
−
⋅=
1
τ
Type
Access
Range
FlowDDE
FlowBus
ModBus PDU
Float
RW
0 … 1.0
56
117/1
0xF508..0xF509/62729..62730
Type
Access
Range
FlowDDE
FlowBus
ModBus PDU
Float
RW
0 … 1.0
57
117/2
0xF511..0xF512/62737..62738
Type
Access
Range
FlowDDE
FlowBus
ModBus PDU
Unsigned char
R
0…255
52
114/12
0x0E4C/3661
Type
Access
Range
FlowDDE
FlowBus
ModBus PDU
Unsigned char
RW
0…255
86
114/11
0xF258/62041
• Subtract 64 from the read value
• Write IOstatus
4.1.7 Display Filter
The output signal of an EL-FLOW Base instrument (measured value) is filtered. The filter has dynamic
behaviour: when a change in sensor signal is detected, the measured value will be less filtered than
when the sensor signal is constant and stable.
There are two filter constants: Static Display Factor and Dynamic Display Factor.
These two factors can be transformed into time constants using the following formula:
The measured value is filtered with a first order low pass filter with a filter time constant between these
two τ values.
Dynamic Display Factor
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Static Display Factor
CycleTime
Note: The unit of parameter CycleTime is 10ms. Example: value 0.2 means 2ms
4.1.8 Disabling Micro Sw i t ch
It is possible to disable the Micro Switch on top of the instrument. This can prevent undesired use of this
button.
Disabling the micro switch can be performed with the following parameter:
IOStatus
Bit 3 [7..0] is used to disable the micro switch.
0 = micro switch disabled
1 = micro switch enabled
Procedure to enable the micro switch:
• Read IOStatus
• Add 8 to the read value
• Write IOstatus
Procedure to disable the micro switch:
• Read IOStatus
• Subtract 8 from the read value
• Write IOstatus
9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 29
BRONKHORST HIGH-TECH
Check FLUIDAT® on http://www.fluidat.com
are made available at the FLUIDAT® on the Net website.
Diameter [mm]
Kv
Normally closed
∆p max. [bard]
Normally opened
∆p max. [bard]
0,05
4,50
4,33 x 10-5
3,50 x 10
40
5
30
n.a..
4.2 Using other gasses than specified
Each instrument has been calibrated and adjusted for customer process conditions.
Controllers or valves may not operate correctly, if process conditions vary too much, because of the
restriction of the orifice in the valve.
For flowmeters performance and accuracy may be affected tremendously if physical fluid properties
such as heat capacity and viscosity change due to changing process conditions.
Check chapter 1.7, “Operating Principles”, for detailed information about the sensor principle.
4.2.1 Software for conversion fact or calculation
Bronkhorst High-Tech B.V. gathered the physical properties of over 600 fluids in a database called
FLUIDAT.
Application software, such as FLOW CALCULATIONS, enables the user to calculate accurate conversion
factors, not only at 20°C/1 atm but at any temperature/pressure combination, both for gases and for
liquids.
Apply to your distributor for more details of this software.
FLUIDAT® is a collection of routines to calculate physical properties of gases and liquids. These routines
4.2.2 Maximum pressure drop
For (pilot) solenoid operated control valves with small orifices the maximum allowable pressure drop for
gases is according to the table.
0,07
0,10
0,14
0,20
0,30
0,37
0,50
0,70
1,00
1,30
1,50
1,70
2,00
For pilot operated valves the maximum pressure drop is limited to 20 bard. If the pressure drop during
start-up is higher, it is preferred to install a bypass valve. During start-up this valve should be opened.
Also the minimum pressure drop is limited. For exact figures consult factory or proceed according to the
technical data and/or additional instructions given by the sales office or department.
8,48 x 10-5
1,73 x 10
3,39 x 10
6,93 x 10
1,56 x 10
2,37 x 10
4,33 x 10
8,48 x 10
1,73 x 10
2,93 x 10
3,90 x 10
5,00 x 10
6,63 x 10
30
-4
30
-4
30
-4
30
-3
30
-3
30
-3
30
-3
24
-2
12
-2
8
-2
6
-2
5
-2
3,6
-1
20
20
20
20
20
20
20
15
8
5
n.a.
n.a.
n.a
Page 30 EL-FLOW Base Series Mass Flow Controllers 9.17.061
Symptom
Possible cause
Action
No output signal
No power supply
1a) check power supply
1b) check cable connection
Output stage blown-up due to long lasting
shortage and/or high-voltage peaks
1c) return to factory
Supply pressure too high, or differential
pressure across meter too high
1d) lower supply pressure
Valve blocked/contaminated
1e) connect 0 .. 15 Vdc to valve and
only)
Screen in inlet fitting blocked
1f) clean screen
Sensor/capillary failure
1g) return to factory
Maximum output signal
Output stage blown-up
2a) return to factory
Sensor/capillary failure
2b) return to factory
Output signal much lower than
Screen blocked/contaminated
3a) clean screen
LFD blocked/contaminated and/or liquid in
3b) remove LFD and clean; dry meter
2
N
Valve blocked/contaminated
3c) clean valve
Valve internal damage (swollen seat in
plunger)
3d) replace plunger assembly and adjust
valve or return
Incorrect type of gas is used and/or
pressure/diff. pressure
3e) try instrument on conditions for
which it was designed
Flow is gradually decreasing
3
NH
10483
HC,HC
4a) decrease supply pressure and/or heat
Valve adjustment has changed
4b) see ‘1e’
Oscillation
Supply pressure/diff. pressure too high
5a) lower pressure
Pipeline too short between pressure regulator
and MFC
5b) increase length or diameter of piping
upstream
Pressure regulator is oscillating
5c) replace pressure regulator or try ‘5b’
Valve sleeve or internals damaged
5d) replace damaged parts and adjust
valve, see ‘1e’ or return to factory
Controller adjustment wrong
5e) adjust controller
5 Troubleshooting
5.1 General
For a correct analysis of the proper operation of a flow/pressure meter or controller it is recommended
to remove the unit from the process line and check it without applying fluid supply pressure. In case the
unit is dirty, this can be ascertained immediately by loosening the compression type couplings and, if
applicable the flange on the inlet side.
Energizing or de-energizing of the instrument of the instrument indicates whether there is an electronic
failure.
After that, fluid pressure is to be applied in order to check behaviour.
If there should be suspicion of leakage in case of a gas unit, do not check for bubbles with a leak
detection liquid under the cover as this may lead to a short-circuit in the sensor or p.c.board.
5.2 LED indications
The two LEDs on the instrument give information about the status of the instrument. Check chapter 3.6,
“LED indications” for detailed info.
BRONKHORST HIGH-TECH
5.3 Troubleshooting summary general
setpoint signal or desired flow
meter
slowly increase voltage while supply
pressure is ‘on’. The valve should open at
7V ± 3V; if not open, then cleaning parts
and adjust valve (qualified personnel
with air or
9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 31
Condensation, occurs with
hydrocarbons such as
,
etc.
gas to be measured
BRONKHORST HIGH-TECH
Symptom
Possible cause
Action
Small flow at zero setpoint
Valve leaks due to damaged plunger or dirt in
orifice
6a) clean orifice and/or, when replacing
plunger assembly, see ‘1e’
Pressure too high or much too low
6b) apply correct pressure
High flow at zero setpoint
Damaged diaphragm (only applicable to
valves with membrane)
7a) replace membrane seal
Page 32 EL-FLOW Base Series Mass Flow Controllers 9.17.061
The declaration on contamination form is available at the Bronkhorst download site:
BRONKHORST HIGH-TECH
6 Removal and Return Instructions
Instrument handlings:
• Purge gas lines
• Remove instrument from line
• Insert the instrument into a plastic bag and seal the bag
• Place the bag in a appropriate shipping container
Add documentation:
• Reason of return
• Failure symptoms
• Contaminated condition
• Declaration on Contamination form: 9.17.032
When returning material, always describe the problem and if possible the work to be done, in a covering
letter.
It is absolutely required to notify the factory if toxic or dangerous fluids have been metered with the
instrument!
This to enable the factory to take sufficient precautionary measures to safeguard the staff in their repair
department. Take proper care of packing, if possible use the original packing box; seal instrument in
plastic
etc.
Contaminated instruments must be dispatched with a completely filled in 'declaration on
contamination form'. Contaminated instruments without this declaration will not be accepted.
Note:
If the instruments have been used with toxic or dangerous fluids the customer should pre-clean the
instrument.
Important:
Clearly note, on top of the package, the customer clearance number of Bronkhorst High-Tech B.V.,
namely:
NL801989978B01
If applicable, otherwise contact your distributor for local arrangements.
http://www.bronkhorst.com/en/downloads/
9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 33
7 Service
For current information on Bronkhorst High-Tech and service addresses please visit our website:
Do you have any questions about our products? Our Sales Department will gladly assist you selecting the
right product for your application. Contact sales by e-mail:
For after-sales questions, our Customer Service Department is available with help and guidance. To
contact CSD by e-mail:
No matter the time zone, our experts within the Support Group are available to answer your request
immediately or ensure appropriate further action. Our experts can be reached at:
BRONKHORST HIGH-TECH
http://www.bronkhorst.com
sales@bronkhorst.com
support@bronkhorst.com
+31 573 45 88 39
Page 34 EL-FLOW Base Series Mass Flow Controllers 9.17.061
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