Instruction manual
C.E.M.
Controlled Evaporator
and Mixer
W-300B
Doc. no.: 9.17.082A Date: 10-06- 2014
ATTENTION
Please read this instruction manual carefully before installing and operating the instrument.
Not following the guidelines could result in personal injury and/or damage to the equipment.
BRONKHORST HIGH-TECH B.V.
page 2 9.17.082
Even though care has been taken in the preparation and
publication of the contents of this manual, we do not assume
legal or other liability for any inaccuracy, mistake, misstatement or any other error of whatsoever nature contained
herein. The material in this manual is for information
purposes only, and is subject to change without notice.
Bronkhorst HIGH-TECH B.V.
July 2011
Warranty
The products of Bronkhorst High-Tech B.V. are warranteed
against defects in material and workmanship for a period of
three years from the date of shipment, provided they are
used in accordance with the ordering specifications and the
instructions in this manual and that they are not subjected to
abuse, physical damage or contamination. Products that do
not operate properly during this period may be repaired or
replaced at no charge. Repairs are normally warranted for
one year or the balance of the original warrant, whichever is
longer.
See also paragraph 9 of the Conditions of sales.
The warranty includes all initial and latent defects, random
failures, and undeterminable internal causes.
It excludes failures and damage caused by the customer,
such as contamination, improper electrical hook-up,
dropping etc.
Re-conditioning of products primarily returned for warranty
service that is partly or wholly judged non-warranty may be
charged for.
Bronkhorst HIGH-TECH B.V. prepays outgoing freight
charges when any party of the service is performed under
warranty, unless otherwise agreed upon beforehand.
However, if the product has been returned collect to
Bronkhorst HIGH-TECH B.V., these costs are added to the
repair invoice. Import and/or export charges, foreign
shipping methods/carriers are paid for by the customer.
BRONKHORST HIGH-TECH B.V.
Safety Precautions
The following safety precautions should be observed before
using this product and any associated instrumentation.
Although some instruments and accessories would normally
be used with non-hazardous voltages, there are situations
where hazardous conditions may be present.
This product is intended for use by qualified personnel who
recognize shock hazards and are familiar with the safety
precautions required to avoid possible injury. Read the
operating information carefully before using the product.
Before operating an instrument, make sure the line cord is
connected to a properly grounded power receptacle. Inspect
the connecting cables, test leads, and jumpers for possible
wear, cracks, or breaks before each use.
The instrument and accessories must be used in
accordance with its specifications and operating instructions
or the safety of the equipment may be impaired.
When fuses are used in a product, replace with same type
and rating for continued protection against fire hazard.
Opening of the equipment is not allowed. There are no
repairable parts inside. In case of a defect please return the
equipment to Bronkhorst High-Tech.
The
symbol on an instrument indicates that the user
should refer to the operating instructions located in the
manual.
Surfaces near the
symbol may be hot.
To maintain protection from electric shock and fire,
replacement components in mains circuits, must be
purchased from Bronkhorst®. Standard fuses, with
applicable national safety approvals, may be used if the
rating and type are the same. Other components that are
not safety related may be purchased from other suppliers as
long as they are equivalent to the original component. (Note
that selected parts should be purchased only through
Bronkhorst® to maintain accuracy and functionality of the
product.) If you are unsure about the applicability of a
replacement component, call a Bronkhorst® office for
information.
page 4 9.17.082
BRONKHORST HIGH-TECH B.V.
Short-Form Operation Instruction
- Before installing your CEM system it is
important to check:
* flow rate
* fluids to be controlled/evaporated
* up- and downstream pressures
* output signals
* heater temperature
- Watch the red-coloured stickers and make sure the
testpressures are in agreement with normal safety
factors for your application.
- Check if the piping system is clean. Always install filters
to assure particle free fluids.
- Install the CEM system and tighten the fittings
according to the instructions of the supplier of the
fittings.
- Check the system for leaks before applying fluid
pressure.
- In systems with corrosive or reactive fluids, purging with
an inert gas is absolute necessary before use. Complete
purging after use with corrosive or reactive fluids is also
required before exposing the system to air.
- Apply the controlled power to the heatexchanger
and wait till the temperature is stabilised.
- Your CEM system is now ready for operation.
- Be sure that your liquid system is free of gas bubbles. If
needed remove the de-aerate plug on top of the CEM
control valve for de-aeration.
9.17.042 page 5
BRONKHORST HIGH-TECH B.V.
TABLE OF CONTENTS
1 Introduction
1.1 General ......................................................................................................................................... page 7
1.2 Principle of operation .................................................................................................................... page 7
1.3 CEM set-up ................................................................................................................................... page 7
2 Installation
2.1 Receipt of equipment .................................................................................................................... page 8
2.2 Return shipment ............................................................................................................................ page 8
2.3 Service .......................................................................................................................................... page 8
2.4 Mounting position .......................................................................................................................... page 8
2.5 Liquid filling ................................................................................................................................... page 8
2.6 In-line filter..................................................................................................................................... page 9
2.7 Fluid connections .......................................................................................................................... page 9
2.8 Electrical connections ................................................................................................................... page 9
2.8.1 General ......................................................................................................................................... page 9
2.8.2 Pin configuration ........................................................................................................................... page 9
2.9 Electrical specifications ............................................................................................................... page 10
2.9.1 Functional diagram ..................................................................................................................... page 10
2.9.2 Electrical specifications ............................................................................................................... page 10
2.10 Caution ........................................................................................................................................ page 10
2.11 Supply pressure .......................................................................................................................... page 11
2.12 System purging ........................................................................................................................... page 11
2.13 Seals ........................................................................................................................................... page 11
3 Operation
3.1 General ....................................................................................................................................... page 12
3.2 Power and warm-up .................................................................................................................... page 12
3.3 Start-up/close-down .................................................................................................................... page 12
4 Readout and control unit
4.1 Application with BHT standard Readout and Control unit ........................................................... page 14
4.1.1 General ....................................................................................................................................... page 14
4.1.2 Rearpanel connector ................................................................................................................... page 14
4.1.3 Operation .................................................................................................................................... page 14
4.2 Application with none BHT standard Readout and Control unit .................................................. page 15
4.2.1 Recommended graphical diagram heater system ...................................................................... page 15
5 Cables
5.1 EMC and cables .......................................................................................................................... page 16
Appendices
1 Recommendations for handling the Bronkhorst High-Tech DLI (CEM) System
A. Vacuum system
B. Non Vacuum system
2 Enclosures
page 6 9.17.082
BRONKHORST HIGH-TECH B.V.
Mix
Liquid
Gas
C
ONTROLLED
VAPORATOR
E
M
IXER
Control valve assembly
Purge connector
Liquid-gas mixing
device
Liquid
Gas
Heat exchanger
Process
1 Introduction
1.1 General
The Bronkhorst HIGH-TECH B.V. series CEM system is a unique
system to realise Mass Flow Control of vapour & mixtures,
containing up to 1200 g/h vapour. A complete system is a
combination of a mixing valve, a heating device, a liquid meter with
control function and a mass flow controller for the carrier gas. The
liquid flow through the liquid meter is controlled by the mixing valve.
A complete system also incorporates a readout/control unit,
including power supply for operation of the CEM system
devices.
1.2 Principle of operation
The abbreviation "CEM" stands for:
"C" the control of a flow of gas mixture, gas, liquid or liquid/gas mixture
"E" the evaporation of a flow of liquid/gas mixture by means of a temperature controlled heating device
"M" the mixing of a gas and a liquid (vapour).
At room temperature the liquid, for instance water or TEOS, is drawn from a container with an inert gas
blanket, or membrane, and measured by a liquid mass flow meter type µ-FLOW* or LIQUI-FLOW
required flow rate is controlled to the setpoint value by a control valve that forms an integral part of the CEM
system.
A carrier gas, controlled by a MFC* is used to stimulate the evaporation process as a mixing component, and
furthermore to transport the vapour.
The process is highly repeatable and efficient.
Subsequent total evaporation of the liquid is achieved in the CEM.
* For operation of these devices consult the appropriate instruction manuals.
1.3 CEM set-up
The CEM system is built up around 3 different parts; a control
valve, a mixing device and a heat exchanger in which heat is added
to the mixture of fluids for evaporation and furthermore to prevent
condensation. The temperature of the heat exchanger is controlled
by a temperature controller which is part of the readout and control
unit.
®
*. The
9.17.042 page 7
BRONKHORST HIGH-TECH B.V.
2 INSTALLATION
2.1 Receipt of equipment
Check the outside packing box for damage incurred during shipment. Should the packing box be damaged,
then the local carrier must be notified at once regarding his liability, if so required. At the same time a report
should be submitted to:
BRONKHORST HIGH-TECH B.V.
RUURLO HOLLAND
Remove the envelope containing the packing list; carefully remove the equipment from the packing box.
Do not discard spare- or replacement parts with the packing material and inspect the contents for damaged
or missing parts.
2.2 Return shipment
When returning material, always describe the problem and if possible the work to be done, in a covering
letter.
It is absolutely required to notify the factory if toxic or dangerous gases have been metered with the
instrument!
This to enable the factory to take sufficient precautionary measures to safe-guard the staff in their repair
department. Take proper care of packing, if possible use the original packing box; seal instrument in plastic
etc.
Contaminated instruments must be dispatched with a completely filled in 'declaration on contamination form'.
(In the back of this manual)
Contaminated instruments without this declaration will not be accepted.
Note:
If the instruments have been used with toxic or dangerous gases the customer should pre-clean the
instrument.
Important:
Clearly note, on top of the package, the customer clearance number of BRONKHORST HIGH-TECH B.V.,
namely:
NL801989978B01
2.3 Service
If this equipment is not properly serviced, serious personal injury and/or damage to the equipment could be
the result. It is therefore important that trained and qualified service personnel perform servicing.
BRONKHORST HIGH-TECH B.V. has a trained staff of servicemen available.
2.4 Mounting position
Preferably the CEM system is mounted in a vertical position, with the control valve section pointing upwards
and the vapour output pointing downwards.
Avoid installation in close proximity of mechanic vibration or strong heat sources.
2.5 Liquid filling
The purge connector can be used to remove the air from the liquid system. If available, use vacuum to deaerate the valve and liquid flowmeter before filling with liquid.
page 8 9.17.082
BRONKHORST HIGH-TECH B.V.
Pinnumber
Description
A
F
Not connected
Safety switch
Pinnumber
Description
110…120Vac supply
Description
220…240Vac supply
A
E
PE
Heater (N)
PE
Not connected
2.6 In-line filter
Although fluids and piping should be absolutely free from dirt, it is recommended to install inline filters
upstream of the flowmeter(s).
2.7 Fluid connections
The liquid meter should be installed according to its manual. The outlet of this meter should be connected to
the liquid input port of the CEM valve. The controller section of the liquid flowmeter controls the CEM valve.
Electrical connections should be made according to the customer system description.
The outlet of the gas flow controller must be connected to the gas input part of the CEM valve.
The vapour outlet of the CEM should be directly coupled to the process, this tube should be heated at a
temperature higher than the heater in order to assure that the vapour will not condense in this line. Avoid
“cold spots” in the outlet.
* Note: Always check your system for leaks, before applying fluid pressure. Especially if toxic, explosive or
other dangerous fluids are used.
2.8 Electrical connections
2.8.1 General
Bronkhorst HIGH-TECH B.V. recommends using their standard Readout and Control module and standard
cables, which have been tested together with the system. These cables are always supplied with the CEM
system.
When not using the standard Readout and Control unit please read chapter 4.
2.8.2 Pin configuration
The heat exchanger is equipped with two connectors:
connector (1) 6-pin male
B
C
D
E
Not connected
PT100 (T-sensor)
PT100 (T-sensor)
Safety switch
connector (2) 5-pin male
B
C
D
Heater (N)
Heater (L)
Heater (L)
9.17.082
Not connected
Heater (N)
Heater (L)
page 9
BRONKHORST HIGH-TECH B.V.
2.9 Electrical specifications
2.9.1 Functional diagram
2.9.2 Electrical specifications
Heater
The heater consists of two heater elements with a resistance of approx. 19,25 ± 0.5 Ohm each.
For 110…120Vac-power supply: two heater elements switched parallel.
For 220…240Vac-power supply: two heater elements switched serial.
Temperature sensor
Heraeus Sensor PT 100 sensor M-K 2515 1PT100
Safety switch:
Pepi Miniature Thermostat Model C, CH version
Switch temperature: 200 ºC
Contact rating: 24Vdc max / 3A max.
Controlled power supply
110…120Vac or 220…240Vac max. (Factory adjusted)
50-60 Hz
Power 1650VA max.
Max. Ambient temperature
50°C max.
2.10 Caution
Each system is pressure tested to at least 1.5 times the working pressure of the process conditions stipulated
by the customer, with a minimum of 8 bar.
This testpressure is stated on the CEM valve with a Red Coloured sticker.
Check testpressure before installing in the line.
If this sticker is not available, or the testpressure is incorrect, the instrument should not be mounted in the
process line and be returned to the factory.
Each instrument is leak tested to at least 2 ⋅10
-9
mbar.l/s Helium.
page 10 9.17.082
BRONKHORST HIGH-TECH B.V.
2.11 Supply pressure
Do not apply pressure until electrical connections are made. W hen applying pressure to the system, take
care to avoid pressure shocks in the system, and increase pressure gradually. Be sure that all setpoints are
at zero when doing so.
2.12 System purging
If corrosive or reactive fluids are used, purging with an inert gas is absolutely necessary, because if the tubing
has been exposed to air, introducing these fluids will tend to clog up or corrode the system due to a chemical
reaction with air or moist air.
Complete, long term purging is also required to remove such fluids from the system before exposing it to air.
It is preferred not to expose the system to air, when working with these corrosive fluids. Cycled purging and
evacuating is preferred.
2.13 Seals
Bronkhorst HIGH-TECH B.V. has gathered a material compatibility chart from a number of sources believed
to be reliable.
However, it is a general guide only. Operating conditions may substantially change the accuracy of this guide.
Therefore is no liability for damages accruing from the use of this guide. The customer’s application demands
its own specific design or test evaluation for optimum reliability. So check if the seals are correct for your
process. However the CEM system has metal seals for all connections. Only the valve plunger is an
elastomer.
9.17.082
page 11
BRONKHORST HIGH-TECH B.V.
877.0
)3.47325.
1013(
3.473
=
−
=X
754.12877.
0 =⋅=Φ⋅=Φ
gas
water
X
56.84
][4
.22
][60
][18][754.1
ln
min
min
ln
=
⋅⋅
mol
hmol
g
3 Operation
3.1 General
The Bronkhorst HIGH-TECH B.V. CEM system is designed in such a way that it will meet user process
requirements. In order to achieve good results, it should be operated according to the guidelines stated in the
following paragraphs.
3.2 Power and warm-up
Before switching on power, check if you have connected all devices according to the system description
and/or hook-up diagram. Check the liquid and gas connections, and make sure there are no leakages, turn
on power for at least 30 minutes to warm up flow controllers. For start up of the liquid controller consult the
appropriate manual. During this warming-up period the temperature of the heat exchanger might be brought
up to its operating point.
3.3 Start-up/close-down
Be sure that the temperature of the heat exchanger is in accordance with the process conditions to be
adjusted, and furthermore should all pressure levels have the correct values.
After this has been assured, first start bringing up the carrier gas flow to the correct level. Once this flow has
been stabilised, the liquid flow can be applied to the system, by gradually increasing the setpoint of the liquid
controller. Now your CEM system should be operating.
When closing down operation of the system proceed in reverse order.
First stop the liquid flow, and after that the gas flow.
Note:
Make sure there is always gas flow whenever liquid flow is present.
Operation example:
Application: Generation of humid gas
The CEM system can be used for generating certain humidity in a gas stream. The F-201 gas flow controller
controls the gas flow and the LIQUI-FLOW ® controller controls the humidity, the water.
The water is mixed with the gas and consequently evaporated. The humidity at a certain temperature
corresponds with a certain ratio of gas and water, this ratio can be set by the flow controllers.
Example:
At atmospheric pressure, at 80°C, 2 ln/min Air has to be moistened. Which water flow is needed for a r.h. of
50%. The vapor pressure of water at 80°C is 473.3 mbar according to Fluidat.
At 100% r.h., the (mole) ratio between gas and water is
MoleRatio:
So in a gas flow of 2 ln/min, the saturated water flow (100% r.h.) is:
and in [g/h]
page 12 9.17.082
[ln/min]
[g/h]
BRONKHORST HIGH-TECH B.V.
100.%. ⋅=
sat
e
e
hr
6.236
100
3.47350=⋅
=e
305.0
)6.23625.1013(
6.236
=
−
=X
61.
0
2305
.0
=
⋅=
Φ⋅
=
Φ
gaswater
X
41.29
][4.22
][60][18][61.0
ln
min
min
ln
=
⋅⋅
mol
hmol
g
By 50% r.h., the (mole) ratio between gas and water:
the moleRatio:
so in a gas flow of 2 ln/min, the saturated water flow (50% r.h.) is:
[ln/min]
and in [g/h]
[g/h]
At 50% r.h., the waterflow is 29.41 g/h.
(*) Assumptions: Consider water vapour as an ideal gas, 1 mole of ideal gas at normal
conditions = 22.4 l, 1 mole of water is 18 g and 1 hour is 60 min.
1 atm. = 1013.25 mbar.
[mbar]
9.17.082
page 13
BRONKHORST HIGH-TECH B.V.
Pinnumber
Description
A
F
Not connected
Safety switch
Pinnumber
Description
110…120Vac supply
Description
220…240Vac supply
A
E
PE
Heater (N)
PE
Not connected
4 Readout and Control unit
The use of standard readout unit, manufactured by Bronkhorst HIGH-TECH B.V. is recommended.
4.1 Application with BHT standard Readout and Control unit
4.1.1 General
The BHT Readout and Control unit with temperature control unit offers the ability to power the CEM and to
set the desired temperature for the heater system of the CEM. The temperature inside the CEM is monitored
with a PT-100 temperature sensor, the signal of which is being used by the temperature controller to control
the adjusted temperature.
4.1.2 Rearpanel connector
connector (1) 6-pin female
B
C
D
E
connector (2) 5-pin female
B
C
D
For other signals consult manual 9.17.076
4.1.3 Operation
For operation of the E-8000 based R/C panel consult manual 9.17.076.
page 14 9.17.082
Not connected
PT100 (T-sensor)
PT100 (T-sensor)
Safety switch
Heater (N)
Heater (L)
Heater (L)
Not connected
Heater (N)
Heater (L)
BRONKHORST HIGH-TECH B.V.
4.2 Application with none BHT Readout and Control unit
4.2.1 Recommended graphical diagram heater system
In the drawing below the recommended electrical diagram of a heater controlled system is shown.
For proper connection, please consult the appropriate hook-up diagrams.
CAUTION !!
When using the CEM system without the BHT Readout and Control unit the following guidelines should be
followed:
• The heat exchanger does not contain a fuse. This should be connected externally.
• The heat exchanger is not suitable for constant ac power supply.
• The heat exchanger should be part of a temperature-controlled loop.
• The safety switch inside the heat exchanger is not part of the ac power supply circuit.
9.17.082
page 15
BRONKHORST HIGH-TECH B.V.
Warning: the “CEM power” connector is a mains power inlet.
5 Cables
5.1 EMC and cables
All system set-ups described in this manual carry the CE-mark.
Therefore they have to comply with the EMC requirements as are valid for this kind of equipment.
However compliance with the EMC requirements is not possible without the use of proper cables and
connector/packing gland assemblies.
Screens of cables should be carefully connected at both ends of the cable to the metal housing of the
connector for good EMC behaviour.
For sensors and valves follow the guidelines as explained in the appropriate manuals.
Use standard Bronkhorst® cables 7.03.583 for connecting the CEM W-300B to the Readout unit or
7.03.584 for connecting the CEM W-300B to a non-BHT control unit.
The symbol on the CEM indicates the location of the power inlet
page 16 9.17.082
APPENDIX 1
Recommendations for handling
the Bronkhorst High-Tech DLI
(CEM) system
Vacuum system
Non Vacuum system
BRONKHORST HIGH-TECH B.V.
1
Procedure:
Actions:
A1) Evacuate the lines “Vacuum”
Start pumps
A2) Evacuate all lines
Close: 2,3,5,10 and 9.
dry follow procedure of E3, E4, (E5).
A3) Purge line between inert gas source and
valve 2.
Close: 4.
Open valve 2 briefly for some seconds.
A4) Purge line between process gas source and
gas MFC.
Give setpoint = 0 to LFM (6 closes).
Open valve 9 briefly for some seconds.
A5) Pump down liquid supply.
Open 3 for some time, close 3.
A6) Pressurize liquid supply.
Close 1, give right pressure on inert gas
supply. Open 2, open 3 briefly.
A7) Fill the system with liquid.
(1)
Let gas flow in the carrier gas line during
Open 5 briefly, allow mixing valve 6 to fill.
A8) Optional: degassing mixing valve.
Open 7, a needle valve will be best, to
avoid too much liquid be pumped away.
A9) The system is now ready for use.
Vacuum
Liquid
14356810
11
9
MFC
Carrier
Processgas
Vacuum
7
LFM
Inertgassupply
2
Process
Vacuum
Valve
Heatedline
CEM
Liquid
Gas
Startup using Vacuum
A) To fill the system:
Connect inert gas on carrier gas inlet.
Open : 1,4,7,11.
Give setpoint to gas and liquid control
(the control valves 6 and 8 open).
Pump for a long time.
Remark: if the system is not completely
filling of the system.
Close 7.
App. 1, page 3
BRONKHORST HIGH-TECH B.V.
Procedure:
Actions:
B1)Set the CEM heater at right temperature.
Give setpoint to the heater, wait until
temperature is reached.
B2) Start gas flow.
(1)
Open 9. Give setpoint to gas MFC.
B3) Start liquid flow.
(2)
Give setpoint to liquid flow controller, wait
until stabilization.
B4) Connect process.
Open 10, close 11.
Procedure:
Actions:
C1) Disconnect process.
Open 11, close 10.
C2) Stop liquid flow.
Give setpoint = 0 to liquid flow controller.
C3) Optional: Stop gas flow.
(1)
Give setpoint = 0 to gas MFC.
Procedure:
Actions:
D1) Relief the supply pressure from the liquid
Close 2, close 5 and open 1 for some
Relief pressure inert gas supply, open 2.
D2) Leave system unused.
Close 3. Preferably, keep pumping the lines,
close 2, open 1.
D3) Before startup, pressurize liquid supply.
Close 1 and open 2.
Open 3 and 5.
D4) System is now ready for use.
Proceed according to B.
Procedure:
Actions:
E1) Follow procedure “How to leave system
overnight” until “leave system unused”.
See D1 and D2.
E2) Purge liquid out of lines.
Open 4 and 7.
E3) Purge lines with inert gas.
Close 1.
Open 2 briefly for some time.
E4) Evacuate liquid lines (cont.).
Close 2, open 1.
E5) Optional: Repeat last two steps for a few
times.
B) To start the process:
C) To stop the process:
D) How to leave system overnight:
supply and lines.
seconds.
E) To empty and purge the system:
1
Make sure that the carrier gas is always flowing when the liquid flow is on. Preferably,
let always gas flow in the carrier gas line when the system is filled with liquid.
2
Close supply pressure of the liquid vessel during the process. The pressure controller of
the inert gassupply can influence the stability of the liquid flow controller.
3
If the liquid is reactive or aggressive, be sure to remove air (and water vapor) carefully, before
introducing liquid in the system.
4
If the liquid is reactive, aggressive, poisonous, toxic, or flammable, beware that the system is
purged fully (preferably with inert liquid, E3, E4, E5) before opening the system.
Remarks:
- In case of non-pure liquids, place a filter just before the Liqui-Flow.
- Mount the CEM system vertical.
(3,4)
App. 1, page 4
Liquid4356
8
10
11
9
MFC
Carrier
Processgas
Vacuum
7
LFM
Inertgassupply
2
Process
Vacuum
Valve
Heatedline
CEM
Liquid
Gas
Procedure:
Actions:
A1)Purge all lines
Close: 3, 5 and 10.
Purge for a long time.
A2) Pressurize liquid supply.
Close 4, give right pressure on inert gas
supply. Open 3.
A3) Fill the system with liquid.
(1)
Let gas flow in the carrier gas line during
then close 7.
A4) The system is now ready for use.
Startup without using Vacuum
A) To fill the system:
Connect inert gas on carrier gas inlet.
Open : 2, 4, 7, 9 and 11.
Give setpoint to gas controller, the control
valve 8 opens.
Give setpoint = 0 to liquid - flow controller
filling of the system.
Open 5 briefly, allow mixing valve 6 to fill.
Wait until all gas bubbles left the system,
1
Make sure that the carrier gas is always flowing when the liquid flow is on. Preferably,
let always gas flow in the carrier gas line when the system is filled with liquid.
App. 1, page 5
BRONKHORST HIGH-TECH B.V.
Procedure:
Actions:
B1) Set the CEM heater at right temperature.
Give setpoint to the heater, wait until the
temperature is stabilized.
B2) Start gas flow.
(1)
Give setpoint to gas MFC.
B3) Start liquid flow.
(2)
Give setpoint to liquid flow controller, wait
until stabilization.
B4) Connect process.
Open 10, close 11.
Procedure:
Actions:
C1) Disconnect process.
Open 11, close 10.
C2) Stop liquid flow.
Give setpoint = 0 to liquid flow controller.
C3) Optional: Stop gas flow.
(1)
Give setpoint = 0 to gas MFC.
Procedure:
Actions:
D1) Relief the supply pressure from the liquid
supply and lines.
Close 5.
Relief pressure inert gas supply. Open 2.
D2) Leave system unused.
Close 3. Close 2.
D3) Before startup, pressurize liquid supply.
Open 2.
Open 3 and 5.
D4) System is now ready for use.
Proceed according to B.
Procedure:
Actions:
E1) Follow procedure “How to leave system
overnight” until “leave system unused”.
See D1 and D2.
E2) Purge liquid out of lines.
Open 4 and 7, open 2
E3) Purge lines with inert gas.
Purge for long time.
E4) Optional: Purge with inert liquid.
Connect inert liquid to inert gas supply .
Proceed according to E2.
E5) Optional: Alter E3 and E4 for a few times.
B) To start the process:
C) To stop the process:
D) How to leave system overnight:
E) To empty and purge the system:
1
Make sure that the carrier gas is always flowing when the liquid flow is on. Preferably,
let always gas flow in the carrier gas line when the system is filled with liquid.
2
Close supply pressure of the liquid vessel during the process. The pressure controller of
the inert gas supply can influence the stability of the liquid flow controller.
3
If the liquid is reactive or aggressive, be sure to remove air (and water vapor) carefully, before
introducing liquid in the system.
4
If the liquid is reactive, aggressive, poisonous, toxic, or flammable, beware that the system is
purged fully (preferably with inert liquid, E3, E4, E5) before opening the system.
Remarks:
- In case of non-pure liquids, place a filter just before the Liqui-Flow.
- Mount the CEM system vertical.
(3,4)
App. 1, page 6
APPENDIX 2
Enclosures (if applicable)
Declaration on contamination
Dimensional drawings
Hook-up diagram
1
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