Agilent Technologies VPI401205060, VPI252205060, VPI251205060, VPI401335060, VPI402665060 Instruction Manual
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Vacuum Products Division
Vacuum Pump
Isolation (VPI) Valve
INSTRUCTION MANUAL
Manual No. 699912117
Revision F
December 2012
Vacuum Pump Isolation (VPI) Valve
Vacuum Pump
Isolation (VPI) Valve
Dust-Off is a registered trademark of Falcon Safety Products, Inc.
Krytox is a registered trademarks of DuPont.
TriScroll is a trademark of Agilent, Inc.
Viton is a registered trademark of DuPont Dow Elastomers.
Apiezon L is a registered trademark of M & I Materials.
Copyright 2012
Agilent, Inc.
Vacuum Pump Isolation (VPI) Valve
Contents
Warranty ............................................................................................................................................ 9
Warranty Replacement and Adjustment ...................................................................................... 9
Hazard and Safety Information .................................................................................................. 10
Contacting Agilent ......................................................................................................................11
Section 1. Introduction ..................................................................................................................... 13
1.1 Description ........................................................................................................................... 13
1.2 Operating Principles..............................................................................................................13
1.3 Operation Sequence............................................................................................................. 14
1.4 Technical Specifications ....................................................................................................... 16
Section 2. Installation .......................................................................................................................17
2.1 Electrical .............................................................................................................................. 17
2.2 Installing VPI Valve to Agilent TriScroll™ Vacuum Pump..................................................... 18
2.2.1 TriScroll 300, 320, 600, and 620.................................................................................. 18
2.2.2 Wiring........................................................................................................................... 18
2.2.3 TriScroll 300, 600 Inverter............................................................................................ 20
2.3 Mechanical............................................................................................................................22
Section 3. Service ............................................................................................................................ 23
3.1 Disassembly .........................................................................................................................23
3.2 Repair of Sub-Assemblies .................................................................................................... 24
3.2.1 Piston/Diaphragm Sub-Assembly ................................................................................24
3.2.2 Nose Piece O-ring Replacement.................................................................................. 25
3.3 Reassembly .......................................................................................................................... 26
3.4 Troubleshooting.................................................................................................................... 27
3.4.1 VPI Valve Cannot Be Pumped Down to High Vacuum ................................................27
3.4.2 VPI Valve Leaks in Closed Position.............................................................................27
3.4.3 VPI Valve Closes Too Slowly....................................................................................... 28
3.4.4 VPI Valve Opens Too Slowly or Not Completely .........................................................28
3.4.5 VPI Valve Fails to Open...............................................................................................28
3.4.6 Closing Causes Large Burst of Air into System ...........................................................28
3.4.7 Solenoid Valve is Hot...................................................................................................29
3.5 Factory Repair ...................................................................................................................... 30
3.6 Replacement Parts ............................................................................................................... 31
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Vacuum Pump Isolation (VPI) Valve
Figures
1 Operating Sequence............................................................................................................14
2 Single Phase Motor Electrical Connections......................................................................... 19
3 Three Phase Motor Electrical Connections.......................................................................... 19
4 VPI Application in TriScroll 300, 600 Inverter Pumps ..........................................................20
5 Installation Diagram.............................................................................................................22
6 Assembly View and Replacement Parts.............................................................................. 23
7 Assembly View and Replacement Parts.............................................................................. 26
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Vacuum Pump Isolation (VPI) Valve
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Vacuum Pump Isolation (VPI) Valve
Tables
1 Technical Specifications ..................................................................................................... 16
2 Operating Voltages............................................................................................................. 17
3 VPI Valve Installation Data ................................................................................................. 18
4 Replacement Parts/Kits ...................................................................................................... 31
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Vacuum Pump Isolation (VPI) Valve
Warranty
Products manufactured by Seller are warranted against defects in materials and workmanship for twelve
(12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty
claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the
purchase price of the Product. Items expendable in normal use are not covered by this warranty. All
warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole
opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of
Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of
the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the repaired or replaced parts. After expiration of
the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,
and transportation.
Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or
damage caused by use of its Products other than in accordance with proper operating procedures.
Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of
law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any warranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements made
by any person, including representatives of Seller, which are inconsistent or in conflict with the terms of
this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of
Seller.
Warranty Replacement and Adjustment
All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,
and must be received within the applicable warranty period by Seller or its authorized representative.
Such claims should include the Product serial number, the date of shipment, and a full description of
the circumstances giving rise to the claim. Before any Products are returned for repair and/or adjustment, written authorization from Seller or its authorized representative for the return and instructions as
to how and where these Products should be returned must be obtained. Any Product returned to Seller
for examination shall be prepaid via the means of transportation indicated as acceptable by Seller.
Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on
any item that has been altered or has been returned by non-acceptable means of transportation. When
any Product is returned for examination and inspection, or for any other reason, Customer shall be
responsible for all damage resulting from improper packing or handling, and for loss in transit, notwithstanding any defect or non-conformity in the Product. In all cases, Seller has the sole responsibility for
determining the cause and nature of failure, and Seller’s determination with regard thereto shall be
final.
If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will
be notified and the Product returned at its expense; in addition, a charge for testing and examination
may be made on Products so returned.
3/1/00
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Vacuum Pump Isolation (VPI) Valve
Hazard and Safety Information
This manual uses the following standard safety protocols:
WARNING
CAUTION
NOTE
Operators and service personnel must be aware of all hazards associated with this
equipment. They must know how to recognize hazardous and potentially hazardous
conditions, and know how to avoid them. The consequences of unskilled, improper, or
careless operation of the equipment can be serious. This product must only be operated and
maintained by trained personnel. Every operator or service person must read and
thoroughly understand operation/maintenance manuals and any additional information
provided by Agilent, Inc. All warning and cautions should be read carefully and strictly
observed. Consult local, state, and national agencies regarding specific requirements and
regulations. Address any safety, operation, and/or maintenance questions to your nearest
Agilent, Inc. office.
The warning messages are for attracting the attention of the
operator to a particular procedure or practice which, if not
followed correctly, could lead to serious injury.
The caution messages are displayed before procedures, which
if not followed, could cause damage to the equipment.
The notes contain important information.
Vacuum Equipment and Cleanliness
Cleanliness is vital when servicing any vacuum equipment.
CAUTION
NOTE
10
Do not use silicone oil or silicone grease.
Use powder-free butyl or polycarbonate gloves to prevent
skin oils from getting on vacuum surfaces.
Do not clean any aluminum parts with Alconox®. Alconox
is not compatible with aluminum and will cause damage.
Normally, it is unnecessary to use vacuum grease.
However, if it must be used, avoid silicone types, and
use it sparingly. Apiezon®L grease is recommended
(Agilent Part Number 695400004).
O-ring Care
When removing, checking or replacing O-rings, keep in mind the following:
Vacuum Pump Isolation (VPI) Valve
NOTE
CAUTION
Contacting Agilent
Agilent recommends replacing all O-rings during routine
maintenance or during any maintenance procedure requiring
that O-rings be removed.
Remove O-rings carefully with your fingers. Do not use metal
tools for this task. This prevents scratching of any sealing
surfaces.
❑
Wipe all O-rings clean with a lint-free cloth before
installation to ensure that no foreign matter is present to
impair the seal.
❑
Do not use alcohol, methanol or other solvents on O-rings.
To do so causes deterioration and reduces their ability to
hold a vacuum.
❑
If applicable, apply a small amount of Apiezon®L grease
and wipe the O-rings “shiny” dry.
In the United States, you can contact Agilent Customer Service at 1-800-882-7426. See the
back cover of this manual for a listing of our sales and service offices.
Visit our web site at:
http://www.chem.agilent.com/en-US/Products/Instruments/vacuum/pages/default.aspx.
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