3M Zeta Plus EC User Manual
Zeta Plus™ EC
Purifier Cartridges
Trace Metals Reduction from Critical Process Chemicals
Zeta Plus EC purifiers are high capacity purifiers designed to remove metallic ion
contaminants such as Ca, Fe, and Na
from photoresists, solvents, ink jet, and
wastewater applications in a single pass.
The purifiers offer unique advantages
in contaminant reduction because of enhanced electro-kinetic properties. Since
most suspended particles have a negative charge, the strong positive electrokinetic charge of Zeta Plus EC enables
the adsorption of contaminants that are
too small for removal by mechanical
straining.
The Scanning Electron Micrograph
(SEM) in Figure 1 illustrates the en-
Figure 1: SEM Illustrates the enhanced
particle removal mechanism
hanced particle removal mechanism.
Features & Benefits
Zeta Plus EC Charged Media
n Reduction of trace metals to low digit ppb levels
n Superior metal reduction capacity, lower cost-of-ownership
n Reduced residence time compared to Ion Exchange Column
Graded Density Construction
n Large surface area increases contact time between the fluid and reactive sites of the purifier
n Increased Purifier lifetime
High Flow Rates
n Increased throughputs as compared to ion exchange columns.
Wide Range of Configurations
n Allows for the same purification media to be used during laboratory, pilot and full production
scale-up
n Low hold-up volume disk filters allow material suppliers to perform testing in a rapid and cost-
effective manner
Low Cartridge Extractables
n Excellent downstream cleanliness
Quality Manufacturing
n ISO 9001:2008 Registered Quality Management System
n Repeatable and reliable performance.
Applications
Photoresists
Resins
Ancillary Chemicals
Wastewater
Solvents
Ink Jet
Table 1: Single Pass Metals Removal from
PGMEA
Metal
Ca 10 1160 < D.L.
Fe 10 838 < D.L.
Na 10 902 20
Detection
Limit (ppb)
Influent
Level (ppb)
Effluent
Level (ppb)
Superior Metals Reduction Capacity Provided by Zeta Plus EC Purifiers
Zeta Plus EC Purifiers contain charge technology that captures trace metals (Tables 1
and 2) such as Ca, Fe, and Na to low parts per billion levels in single pass or recirculation mode applications. Unlike competitive purifiers that only contain purification
technologies on the surface of the media, Zeta Plus EC Purifiers are able to capture
ionic contaminants throughout the entire depth of the media. This design provides
a more efficient means of purification per surface area while increasing flow and
lifetime.
Table 2: Single Pass Metals Removal from ECA
Metal
Ca 10 590 < D.L.
Fe 10 230 < D.L.
Na 10 850 < D.L.
Detection
Limit (ppb)
Influent
Level (ppb)
Effluent
Level (ppb)
Table 3: Extractable Metals Content of
Zeta Plus EC Filters in PGMEA
Metal
Ca 4.0 < D.L.
Cr 2.0 < D.L.
Cu 1.0 < D.L.
Fe 5.0 < D.L.
K 1.0 < D.L.
Na 5.0 < D.L.
Detection Limit
(ppb)
Effluent Level
(ppb)
Zeta Plus EC Purifier Extractables
The purifier’s clean materials of construction provide little to no contribution of ionic or
organic contaminants to the process chemical. Ionic and organic contaminants can extract
from other filter materials, which may change the photo-speed, viscosity, or molecular
weight of the chemical. An extractable test was performed to determine the amount of
contaminants extracted from PGMEA and the results were quantified using a Graphite
Furnace Atomic Absorption Spectrometer (Table 3).
Zeta Plus EC Purifier Scale-Up
For laboratory and pilot scale testing, 3M Purification offers low hold-up volume Zeta
Plus EC purifier disks (47 mm, 90 mm, 142 mm) and housings to allow end users to assess parameters such as material compatibility, photo-speed, and trace metals removal
in a rapid and cost effective manner. The compact size allows for easy replacement and
installation of purification media while reducing the waste of expensive chemicals. Zeta
Plus EC purifier disks contain the same filter media as full size Zeta Plus EC purifier
cartridges, ensuring repeatable and reliable performance throughout laboratory, pilot, and
full production testing. This makes the scale-up process simple, linear, and predictable.
In full scale production, Zeta Plus EC cartridges are offered in diameter sizes of 8”, 12”,
and 16” providing up to 37 ft2 of surface area in a single cartridge. Zeta Plus Housings
can vertically accommodate 1, 2, 3, or 4 Zeta Plus EC cartridges, allowing the end user to
tailor the filtration system to their required flow rate.
Zeta Plus EC Purifier Lifetime
The lifetime of the purifier will vary based on the ionic contamination loading in the
fluid, the batch or bath size, and the desired metal effluent specification. As a result, the
purifier should be sized based on the desired flow rate for the application. 3M Purification
recommends 0.25 gpm (0.95 lpm) flow rate per 1 ft2 (0.09 m2) of Zeta Plus EC media for
a 1cps fluid and 0.1 gpm (0.38 lpm) flow rate per 1 ft2 (0.09 m2) of Zeta Plus EC media for
10 cps fluids. Table 4 provides the cartridge configurations, dimensions, surface area, and
recommended flow rate for each Zeta Plus EC purifier cartridge.
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