3M LHV User Manual

NanoSHIELD™ Hollow
Fiber Series LHV

Filter Tubes

Low Hold-Up volume Testing of Experimental Photoresists
and Ancillary Chemicals

NanoSHIELD™ hollow fiber series LHV filter tubes have been specially designed to
provide superior particle retention and low hold-up volume for advanced photoresists and
ancillary chemicals. Utilizing Hollow Fiber Technology (HFT), NanoSHIELD hollow fi­ber series filters are able to deliver high f low rates with low hold-up volume, to minimize
the waste of experimental photoresist formulations. The tubes are offered in 1/4” and 3/8”
outside diameters thereby allowing common compression fittings to connect directly to
the outside of the NanoSHIELD hollow fiber series LHV tube. In addition, a syringe can
also be used to inject fluid directly into the tube.

These small compact filter tubes allow material suppliers to assess parameters such as
material compatibility, photo-speed, particle retention, and lithography in a rapid and cost
effective manner. NanoSHIELD hollow fiber series LHV filter tubes contain the same
filter media as full size NanoSHIELD hollow fiber series filter cartridges and capsules,
ensuring a consistent level of quality throughout laboratory, pilot, and full-scale produc­tion testing. The NanoSHIELD hollow fiber series family of products is offered in several
configurations to allow the end user to match the volume of fluid with the appropriate
filter in an effort to reduce chemical waste.

NanoSHIELD LHV filter tubes are ideally suited for critical applications requiring high
particle retention and high f low rates at 0.01, 0.02, 0.05, and 0.1 µm.

Features & Benefits

Applications

193 nm
Photoresists

ARC, BARC,
TARC

Etchants/
Strippers

Polyimide Solvents

Alcohols

Bases

Developers

Hollow Fiber Technology.

n More filtration per surface area as compared to pleated filters.
n Provides both lower operating and differential pressure across the filter to minimize outgassing

and micro-bubble formation.

Polypropylene and Polyethylene Construction.

n

Excellent chemical resistance to photoresists and ancillary chemicals.

n No IPA pre-wetting and system flushing required.

0.01 µm and 0.02 µm Retention Ratings.

n Superior removal of particles, gels, and micro-bubbles.
n Reduced micro-bridge and wafer level defects for 193 nm photoresists.

Small Compact Design.

n Reduced hold-up volume and waste of expensive chemicals.

NanoSHIELD™ Hollow Fiber Series LHV Filter Tube

NanoSHIELD™ Hollow Fiber Series LHV Filter Tube Specifications

Membrane Material Hollow Fiber Polyproylene

Tubing Material Polyethylene

Potting Material Polyethylene

Filtration Surface Area – 1/4” tube 3.9 in2 (25 cm2)

Filtration Surface Area – 3/8” tube 17 in2 (110 cm2)

Outside Diameter (nominal)

1

/4” (6.4 mm), 3/8” (9.5 mm)

Length (nominal) 4.1” (10.5 cm)

Maximum Operating Pressure 58 psig @ 77°F (4 bar @ 25°C)

Maximum Operating Temperature 104°F (40°C)

Absolute Removal Ratings (µm) 0.01, 0.02, 0.05, and 0.1

Maximum Differential Pressure 28 psid @ 77°F (1.9 bar @ 25°C)

Filter Integrity 100% Tested

LHV
Tubes

Laboratory
Testing on New
Formulations

SDC
Capsules

Pilot Scale
Production up to
1 gallon

MDC
Capsules

Pilot Scale
Production up to
5 gallons

LDC
Capsules

Pilot Scale
Production up to
100 gallons

HFP Filter
Cartridges

Full Scale Produc-
tion greater than
100 gallons

Full Scale-Up – The NanoSHIELD™ Hollow Fiber Series Filter Family

Ordering Guide

LHV

SDC

MDC

LDC

HFP

Media Removal Rating Configuration

NSP

001 - 0.01 µm
002 - 0.02 µm
005 - 0.05 µm
010 - 0.1 µm

Example – A single package (5 pieces) of 1/4” x 4” tubes, rated at 0.01 micron, would be NSP001T15.

Important Notice

3M Purifi cation Inc. MA KES NO WAR RANTI ES, EXP RESS OR IM PLIED, INCLUDING , BUT NOT LIMIT ED TO, ANY IMPLIE D WARRA NTY OF ME RCHAN TA BILIT Y OR FITNE SS FOR A PART ICULAR PU RPOSE. Since a variet y
of factors can affect the use and performance of a 3M Purification Inc. product in a par ticular application, some of which are uniquely within the user’s knowledge and control, user is responsible for determining whether or
not the 3M Purification Inc. product is fit for a particular purpose and suitable for user’s method of application.

Limitation of Remedies and Liability

If the 3M Purification Inc. product is proved to be defective, TH E EXC LUS IVE R EMEDY, AT 3M Purification Inc.’S OP TION, SHALL B E TO REF UND THE PURCHASE PRIC E OR TO REPAIR O R REPLAC E THE D EFECTIVE
PROD UCT. 3M Purification Inc. shall not otherwise be liable for loss or damages, whether direct, indirect, special, incidental or consequential, regardless of the legal theor y asser ted, including, but not limited to, contract,
negligence, warranty or strict liability.

Warranty

Seller warrants its equipment against defects in work manship and material for a period of 12 months from date of shipment from the factor y under normal use and service and otherwise when such equipment is used in
accordance with instructions furnished by Seller and for purposes disclosed in writing at the time of purchase, if any. Any unauthorized alteration of modification of the equipment by Buyer will void this warranty. Seller’s
liability under this warranty shall be limited to the replacement or repair, F.O.B., point of manufacture, of any defective equipment or part which, having been returned to the factory, transportation charges prepaid, has
been inspected and determined by Seller to be defective. THI S WARRANTY IS IN LIEU OF A NY OTHER WA RRAN TY, EITHE R EXPRESSED OR IMP LIED, AS TO DE SCRIPT ION, QUALIT Y, MERCH ANTABILIT Y, FITN ESS FOR AN Y
PARTICULA R PURPOSE OR USE, OR AN Y OTHER MAT TER. Under no circumstances shall Seller be liable to Buyer or any third part y for any loss of profit s or other direct or indirect costs, expenses, losses or consequential
damages ar ising out of or as a result of a ny defects in or failure of i ts products or any p art or parts th ereof or arising out of or as a result of pa rts or componen ts incorporated in S eller’s equipment but n ot supplied by the Seller.

3M Purification Inc.

400 Research Parkway
Meriden, CT 06450
U.S.A.
Phone [phone]
(2 03) 23 7-55 41
Fax [phone]
www.3Mpurification.com

T - Tu be

Outside Diameter
and Length

1 - 1/4” x 4”
2 - 3/8” x 4”

Your Local Distributor:

Quantity

5 - 5 per pack

Please recycle. Printed in U.S.A.

NanoSHIELD is a trademark of 3M Company.

© 3M 2011. All rights reserved.

70-0201-8782-2 REV 1011b