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Instruction Manual
IPUP T100L, EC100L
Date: 2006/12
IPUP T100L V3.4
EC100L V2.1
Page 2
IPUP T100L / EC100L Instruction Manual
Dear Customers:
Thank you for purchasing IPUP T100L / EC100L dry vacuum pumps manufactured by TOYOTA
INDUSTRIES CORPORATION. Please read through this manual for ensuring correct operation
and handling and for ensuring a long service life.
ｈｔｔｐ：
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IPUP T100L / EC100L Instruction Manual
INDEX Page
1. INTRODUCTION 6
1-1. Scope 7
1-2. Description 8
1-3. Technical Data 9
1-3-1. Technical data table 9
1-3-2. Technical data drawing 10
1-4. CE marking certificate 14
1-5. SEMI S2 certificate 15
2. SAFETY 16
2-1. General 17
2-2. Identified label symbols 17
2-3. Safety Instruction 18
2-3-1. Power supply 18
2-3-2. EMO system 18
2-3-3. Safety sensors 18
2-4. Safety Precaution 19
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IPUP T100L / EC100L Instruction Manual
INDEX Page
3. INSTALLATION 22
3-1. General 23
3-2. Unpacking Precaution 23
3-3. Moving procedure 24
3-3-1. Hoisting the pump to move 24
3-3-2. Moving the pump 25
3-4. Installation Procedure 27
3-4-1. Installation precaution 27
3-4-2. Pump positioning method 28
3-4-3. Method of fixation 29
3-4-4. When using two vertically stacked pumps 30
3-5. Connection to the pumping circuit 31
3-6. Electrical connection 32
3-6-1. Precaution 32
3-6-2. Power source 32
3-6-3. Electrical connection method 33
3-7. Signal 34
3-7-1. Outline 34
3-7-2. SPI connector wiring 34
3-7-3. SPI Pin assignment 35
3-7-4. External output for monitoring system 36
3-8. Cooling water 37
3-8-1. Specification of cooling water 37
3-8-2. Connection of cooling water 38
3-9. Operation condition setting 39
3-9-1. Initial setting 39
3-9-2. Setting items 39
3-10. Pump storage 40
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IPUP T100L / EC100L Instruction Manual
INDEX Page
4. OPERATION 41
4-1. Indication 42
4-2. Main Switch 43
4-3. Operation Method 44
4-4. Control by SPI 45
4-4-1. SPI connection 45
4-4-2. Adjustment before operation 45
4-4-3. Pump running with SPI 45
4-5. Control by Hand-held controller 46
4-5-1. Hand-held controller connection 46
4-5-2. Key functions 46
4-5-3. Operation by hand-held controller 46
4-5-4. Display Menu 47
4-6. Changing Operation Modes 48
4-6-1. Changing from local to remote mode 48
4-6-2. Changing from remote to local mode 48
4-7. Setting 49
4-7-1. Alarm Log 49
4-7-2. Updating Clock 50
4-7-3. REMOTE/LOCAL mode setting 51
4-7-4. Operation condition setting 52
4-7-5. Other function setting 54
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IPUP T100L / EC100L Instruction Manual
INDEX Page
5. TROUBLESHOOTING 60
5-1 Pump does not start 61
5-2 Error message 62
5-3 Pump is running and no error messages are indicated 64
6. MAINTENANCE 65
6-1 General 66
6-2 Overhaul Maintenance Intervals 66
6-3 Pump Removal & Return Procedure 67
6-4 Pump Disposal 68
6-5 Application Form for Pump Return 69
7. APPENDIX 70
7-1. Electrical Circuit Diagram 71
7-2. Cooling Diagram 72
7-3. Material Safety Data Sheet 73
7-3-1. Lubricant 73
8. EC100L V2.1 APPENDIX 82
8-1. Scope 82
8-2. Technical Data drawing 83
8-3. Moving Procedure 87
8-4. Electrical Circuit Diagram 89
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IPUP T100L / EC100L Instruction Manual
1. INTRODUCTION Page
1-1. Scope 7
1-2. Description 8
1-3. Technical Data 9
1-3-1. Technical data table 9
1-3-2. Technical data drawing 10
1-4. CE marking certificate 14
1-5. SEMI S2 certificate 15
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IPUP T100L / EC100L Instruction Manual
SPI connecto
r
Power switch
1. INTRODUCTION
1-1. Scope
This manual covers the IPUP T100L, EC100L dry vacuum pump for semiconductor equipment.
These pumps are suitable for loadlock, transfer chamber and all other clean process.
Adjuster
Cooling water in
Power supply
connector
Handheld
controller
RS232C
connector
Cooling water out
Inlet NW50 ISO KF
Exhaust NW25 ISO KF
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IPUP T100L / EC100L Instruction Manual
Gear
L.P. side
H.P.
1. INTRODUCTION
1-2. Description
The IPUP T100L / EC100L is a roots type vacuum pump that rotates a pair of
synchronized, timing gears. The pump is driven by a 3-phase induction motor. Bearings
and gears on the high pressure side are lubricated by fluoric type oil. Nitrogen is not
required for shaft seals. Ceramic balls are used in the bearings on the low pressure side
which are lubricated by fluoric type grease. The pump and motor are equipped with an
indirect cooling system.
This product has following features including high reliability and low running cost in
addition to low power consumption taking the global ecology into account and
specifications that ensure customer satisfaction.
IPUP T100L V3.4 features:
- ATL listing
- Automatic restart in case of 1second power loss
Inlet
- Low power consumption. (1.3 kW)
- RoHS Compliance
EC100L V2.1 features:
- ATL listing
- 0.55 kW, 58% reduced power consumption. (vs IPUP T100L V3.4)
- RoHS Compliance
Ceramic
bearing
Bearing
Motor
Pump
Exhaust
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IPUP T100L / EC100L Instruction Manual
Power consumption
Utility
1. INTRODUCTION
1-3. Technical Data
1-3-1. Technical data table
Dimensions and
weight
Item Unit IPUP T100L EC100L
Dimensions
(LxHxW)
Weight kg
Maximum revolution
(Default rpm setting)
pumping speed
Ultimate pressure
(at Default rpm
at ultimate pressure
Noise level （at ultimate pressure） dB(A) <55
Lubricant quantity cm3 110(1)
Inlet flange NW50
Exhaust flange NW25
(at Default rpm setting)
Environment
UL classification
Ambient temperature °C 15 to 30
Pollution degree 2
Installation Category
Cooling
water
Power
supply
Supply pressure
Number of phases
Full load current A 12
Max. power capacity kVA 4.6
1) The lubricant is added to the appropriate level at the factory. Never change the lubricant
level.
2) Cooling water should satisfy water quality standard of Japan Refrigeration and Air
Conditioning Industry Association. Refer to “3-8-1characteristics of cooling water”
3) Voltage tolerance: ±10%
The above utilities are required for the pump. Be careful as
performance and reliability are not guaranteed unless the
requirements listed are satisfied.
mm
r/min 5250 4650
Peak
setting)
Humidity % Max 90 (no condensation)
Connector Inch 1/4
Type
Flow Rate L/min Min. 1.5
Temperature °C 10 to 25
Input voltage V 208(3)
Frequency Hz 50/60
m3/h 100
l/min 1670
Pa 1.2
Torr 0.009
kW 1.3 0.55
MＰａ 6.67×10-3 Maximum continuous inlet pressure
Torr 50
II
kPaG Min300 Max700
Bar Min3.0 Max7.0
3
590×300×280 590×300×280
105 104
Non-corrosive industrial water or treated soft
water(2)
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IPUP T100L / EC100L Instruction Manual
136 280
280
78
25
420 85
190 310
590
105 21.8
1. INTRODUCTION
1-3. Technical Data
1-3-2. Technical Data drawing
IPUP T100L Dimension Diagram
Unit: mm
208.5
107
73.5
3
45
27.5
300
274
230
25
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1. INTRODUCTION
1-3. Technical Data
1-3-2. Technical Data drawing (continued)
Position of IPUP T100L center of gravity
Unit: mm
L
H
W
3
1
4
2
Pump
weight (kg)
104 263 146 151
1 (kg) 2(kg) 3 (kg) 4 (kg)
25.5 31.7 24.4 22.4
Position of pump center of gravity
L (mm) W (mm) H (mm)
Weight distribution at adjusters
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IPUP T100L / EC100L Instruction Manual
3
73.5
208.5 374.5
509.5
300
601
575
274
1. INTRODUCTION
1-3. Technical Data
1-3-2. Technical Data drawing (continued)
Dimensions for two horizontally installed IPUP T100L pumps
Unit: mm
280
136
22
235
21.8
45.4
590
Positions of stacking brackets
216
530
Bottom
218
530
Top View
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IPUP T100L / EC100L Instruction Manual
1. INTRODUCTION
1-3. Technical Data
1-3-2. Technical Data drawing (continued)
Position of center of gravity for two horizontally installed IPUP T100L pumps
Unit: mm
H
L
W
3
1
4
2
weight (kg)
208 263 146 301
1 (kg) 2 (kg) 3 (kg) 4 (kg)
51 63.4 48.8 44.8
Position of pump center of gravity Pump
L (mm) W (mm) H (mm)
Weight distribution at adjusters
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IPUP T100L / EC100L Instruction Manual
1. INTRODUCTION
1-4. CE marking certificate
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IPUP T100L / EC100L Instruction Manual
1. INTRODUCTION
1-5. SEMI S2 certificate
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IPUP T100L / EC100L Instruction Manual
2. SAFETY PRECAUTION Page
2-1. General 17
2-2. Identified label symbols 17
2-3. Safety Instruction 18
2-3-1. Power supply 18
2-3-2. EMO system 18
2-3-3. Safety sensors 18
2-4. Safety Precaution 19
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IPUP T100L / EC100L Instruction Manual
2. SAFETY PRECAUTION
2-1. General
A dangerous voltage for the human body is used inside the IPUP T100L / EC100L.
Improper operation may possibly result in a serious accident. Thoroughly read this
manual to prevent accidents before using the product.
2-2. Identified label symbols
Observe important safety precautions which are clearly identified by WARNING or
CAUTION symbols.
Wear various protective gear when operating the product and comply with all
warnings and dangers indicated by the following symbols.
A hazard that could cause injury or death if you don’t follow
the rules.
WARNING
A hazard related to electrical that cause injury or death if
you don’t follow these rules.
WARNING
A hazard related to temperature that causes injury or death
WARNING
if you don’t follow these rules.
A hazard that causes an accident resulting in injury or
damage to the process.
CAUTION
Refer to the references and follow the instructions.
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IPUP T100L / EC100L Instruction Manual
2. SAFETY PRECAUTION
2-3. Safety Instruction
2-3-1. Power supply
IPUP T100L / EC100L are not provided with a 10000 AIC main circuit breaker. Supply
power to the pump from process tool with a 15 A max main circuit breaker. (in US UL489,
in Europe EN60947-2 approval)
Do not place pump where power-disconnecting devices become difficult to access.
2-3-2. EMO system
This product has no EMO device as it is designed as a built-in pump. The user is required
to install an EMO unit within 10ft travel from the pump, which shuts off the power.
2-3-3. Safety sensors
The IPUP T100L / EC100L pumps have a number of safety sensors to detect overload,
over-temperature of pump, over-temperature of motor, by these sensors.
Sensors Function
Circuit protector Overcurrent protection in case of overload
Thermistor for pump body
Temperature switches for pump
motor
Converter for pump Overcurrent protection in case of overload
Measurement and monitoring of pump body
temperature
Monitoring of motor over-temperature
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IPUP T100L / EC100L Instruction Manual
2. SAFETY PRECAUTION
2-4. Safety Precaution
Cautions related to safety are listed below.
The performance and safety of this product are guaranteed only when the
pump is operated within the parameter ranges specified herein.
The IPUP T100L / EC100L is designed for loadlock, transfer
chamber and all other clean chambers. Never use the
WARNING
If any modification is made to the product by the customer,
WARNING
The circuit between the power supply connector and the main
pump in processes using corrosive, explosive, poisonous or
flammable gases.
performance and safety are not guaranteed. In such cases,
we will not be responsible for any failures.
switch remains live even after power is turned off. An
WARNING
electric shock will occur if you touch the live area. Be sure to
disconnect the power cable.
Harmful voltage or current exists in the pump. When
working with the cover open, be sure to turn the pump main
WARNING
switch off and disconnect the power cable to avoid getting an
electric shock.
After turning the power off, voltages of 60 VDC or more
remain in internal parts such as the FC converter. When
WARNING
operating with cover open, wait 30 sec. after turning the
power off. Also, wait 30 sec. when turning power on again.
Only qualified, well-trained personnel can operate this product
with its cover open for installation or other reasons.
WARNING
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IPUP T100L / EC100L Instruction Manual
2. SAFETY PRECAUTION
2-4. Safety Precaution (continued)
As this pump is designed as a processing tool for other
WARNING
T100L does not need daily maintenance and daily cleaning.
WARNING
WARNING
equipment, it does not have a lock - out / tag - out device.
The entire tool must comply with OSHA requirements for
proper lock -out / tag -out during installation or maintenance.
Never open the side panel to prevent electric shock or burn
injury.
Never move the IPUP T100L / EC100L while the pump is
running.
When operation is needed soon after stopping the pump,
wear gloves and other protective gear as mechanical parts
WARNING
inside the cover and output piping are as hot as 70°C or
more. Pay special attention when working.
The oil level is adjusted at the factory before shipment. Never
change the oil level.
CAUTION
Use shielded communication cables and connectors to
prevent malfunctions caused by noise.
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IPUP T100L / EC100L Instruction Manual
down before beginning work.
2. SAFETY PRECAUTION
2-4. Safety Precaution (continued)
The following warning labels are attached to the IPUP T100L / EC100L
This is located on the side of the pump and
indicates that an electric shock may occur if you
touch live internal parts. Always turn the power
off and disconnect the power cable before
beginning work.
This is located on the upper face of the pump
and indicates that attempts to lift it by hand may
result in back injury. If it is necessary to lift the
pump, use an appropriate device.
This is located on the rear face of the pump and
indicates that some internal components
become hot. Touching them with bare hands
may result in burns. Wear gloves or other
protective gear or wait until they have cooled
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This is below the main switch on the front face of the pump.
It requires a 30 second wait after the switch is turned off and
before the switch can be turned back on.
This is located on the upper face of EC100L
pump and indicates your hand may be caught
between the handle and enclosure. Before
using or pulling the handle, check that the
handle is firmly locked.
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IPUP T100L / EC100L Instruction Manual
3. INSTALLATION Page
3-1. General 23
3-2. Unpacking Precaution 23
3-3. Moving Procedure 24
3-3-1. Hoisting the pump to move 24
3-3-2. Using the optional handle to move 25
3-4. Installation Procedure 27
3-4-1. Installation precaution 27
3-4-2. Pump positioning method 28
3-4-3. Method of fixation 29
3-4-4. When using two vertically stacked pumps 30
3-5. Connection to the pumping circuit 31
3-6. Electrical connection 32
3-6-1. Precaution 32
3-6-2. Power source 32
3-6-3. Electrical connection method 33
3-7. Signal 34
3-7-1. Outline 34
3-7-2. SPI connector wiring 34
3-7-3. SPI pin assignmment 35
3-7-4. External output for monitoring system 36
3-8. Cooling water 37
3-8-1. Specification of cooling water 37
3-8-2. Connection of cooling water 38
3-9. Operation condition setting 39
3-9-1. Initial setting 39
3-9-2. Setting items 39
3-10. Pump storage 40
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IPUP T100L / EC100L Instruction Manual
3. INSTALLATION
3-1. General
Only qualified, well-trained personnel can install this product.
When unpacking, confirm that the all parts listed in attached option list are included.
3-2. Unpacking Precaution
When packed, the product weighs about 130kg.
WARNING
CAUTION
Use an appropriate means of transportation and avoid lifting it
by yourself.
Preventive measures must be taken not to incline the pump
during transportation and setting in position. (required :usage
within angles of 10 degrees with horizontal)
Before starting operation, pump inclination angle must be
adjusted to be within angles of 2 degrees with horizontal.
If the pump has been damaged upon unpacking, notify the
transportation company and have them take the necessary
action, or your service representative, as the case may be
needed. It is recommended that packing materials be kept as
they may be needed in the future.
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IPUP T100L / EC100L Instruction Manual
3. INSTALLATION
3-3. Moving procedure
3-3-1. Hoisting the pump to move
Using the L-shape brackets screwed to the upper surface of the enclosure, hoist the
pump as follows:
1. Insert the hoist hooks provided in each L-shape bracket.
2. Prepare wire ropes and hook them to the hoist.
3. Lift the pump using a hoist.
Wire rope
The pump itself weighs about 104kg.
Use a hoist or other appropriate device
when lifting it up.
L-shape bracket
Hoist hook provided
(3 Hoist hooks)
Use the hoist and wire ropes after confirmation that they are
suitable for the load.
WARNING
Never work under a hoisted pump. Only authorized,
qualified personnel are permitted to hoist the pump.
WARNING
Preventive measures must be taken not to incline the pump
during transportation.(required :usage within angles of 10
CAUTION
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degrees with horizontal)
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IPUP T100L / EC100L Instruction Manual
3. INSTALLATION
3-3. Moving procedure (continued)
3-3-2. Moving the pump
Use appropriate cart or moving equipment to move the pump. Make sure that all four
adjusters on the pump are DOWN to prevent any sliding of the pump on the cart or
moving equipment. Move the cart at a speed of 4 km/h or less.
Do not move hurriedly to prevent rolling over. Move at a
speed of 4 km/h or less.
WARNING
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IPUP T100L / EC100L Instruction Manual
handle is firmly locked before using it
WARNING
3. INSTALLATION
3-3. Moving procedure (continued)
3-3-2. Using the optional handle to move (continued)
Never use the optional handle for hoisting the pump.
WARNING
Never sit down on the optional handle.
Pay attention so as not to trap your
hands between the optional handle
and cover when using or stowing the
optional handle.
Only use the optional handle for pushing the pump.
WARNING
Never move the pump while it is running.
WARNING
Check that the optional
or after stowing it.
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IPUP T100L / EC100L Instruction Manual
equipment
.
3. INSTALLATION
3-4. Installation Procedure
3-4-1. Installation precaution
Install the pump horizontally. Before starting operation,
pump inclination angle must be adjusted to be within angles
WARNING
of 2 degrees with horizontal.
It cannot be operated at any angle or vertically.
Before using the pump, be sure to fix it firmly to either the
floor or the equipment using earthquake protection
WARNING
Install the pump on a hard and flat surface.
Install the pump in place using proper transportation device.
The pump performance will vary depending on the types of
fittings and connectors used.
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IPUP T100L / EC100L Instruction Manual
3. INSTALLATION
3-4. Installation Procedure (continued)
3-4-2. Pump positioning method
Four adjusters are provided on the bottom of pump. Carry out positioning by observing
the following instructions:
1. Turn the adjusters clockwise to lower them using an M10 spanner or the like.
2. Lower them until they contact the floor firmly and the wheels and free caster are
floating. Adjust them to make the pump parallel with the floor.
Adjuster height setting nut （M10）
Adjuster
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IPUP T100L / EC100L Instruction Manual
53.5 and over 4.5 and over
3. INSTALLATION
3-4. Installation Procedure (continued)
3-4-3. Method of fixation
・In case of fixing the pump to the equipment
Fix the pump to the equipment using the bracket as shown in following figure.
Bracket
Bolt : M10×1.5mm
Screw hole for fixing.
(M10x1.5mm, 4 places)
・In case of fixing the pump to the floor
Fix the adjusters to the floor using the bracket as shown in following figure.
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IPUP T100L / EC100L Instruction Manual
M8 stacking Bolt & Washer
3. INSTALLATION
3-4. Installation Procedure (continued)
3-4-4. When using two vertically stacked pumps.
It is possible to operate two vertically stacked IPUP T100L / EC100L pumps. Observe
the following instructions for stacking two pumps vertically.
1. Check that all three stacking brackets are fixed on the enclosure.
2. Place the lower pump on a hard and flat floor and fix firmly based on “3-4-2. Pump
positioning method “.
3. Hoist up the upper pump and place it on top of the lower one.
4. Check that the holes of the three stacking brackets on the upper face of the lower
pump are aligned with those on the upper pump. ( Refer to the following figure.)
5. Firmly position the adjusters of the upper pump on the upper face of the lower
pump.
6. Fix upper and lower pump stacking brackets with M8 stacking bolts in 3 places.
Three stacking bolts are provided with every pump.
adjuster
Be sure to fix upper and lower pump in case of earthquake for
WARNING
vertically stacked pumps.
Never lift two vertically stacked pumps at once. The stacking
stacking bracket on lower face of upper cover
stacking bracket on upper face of lower cover
WARNING
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brackets are only designed for a single pump.
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IPUP T100L / EC100L Instruction Manual
3. INSTALLATION
3-5. Connection to the pumping circuit
Specifications for the vacuum pump inlet and outlet are as listed below;
· Inlet flange: NW50
· Exhaust flange: NW25
Connect the inlet flange to your vacuum line and the exhaust flange to your exhaust line
with appropriate vacuum parts.
Remove blank caps from the inlet and outlet of the pump.
WARNING
These protect the pump from contamination during
transportation or storage. It is dangerous to leave them in
when operating the pump.
Inlet flange
Exhaust flange
Check if the vacuum accessory connected to the pump inlet
can withstand 0.1MPa negative pressure against the
WARNING
atmospheric pressure.
Check for leakage after all pipes have been connected.
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IPUP T100L / EC100L Instruction Manual
3. INSTALLATION
3-6. Electrical connection
3-6-1. Precaution
Connection of main power cable to the equipment must be
WARNING
With regard to the wiring method and careful study of power
WARNING
Until all electrical connections are completed, keep the pump
WARNING
Electrical connections required for operation of internal parts
performed by a qualified person.
supply cord / cable is described in the NEC (National
Electric Code) article 400. Consider your installation and
usage.
main switch OFF.
are done at the factory before shipment.
3-6-2. Power source
An electronic circuit in the pump automatically corrects any
For the power source, see the table below.
IPUP T100L will automatically restart to avoid system down
power phase deviation.
Item Specifications
Number of phases 3
Voltage 208V (Voltage tolerance±10%)
Frequency 50/60 Hz
Rated current 12A
Max. power capacity 4.6 kVA
Cable outside diameter
Conductor diameter 2.08 mm2 and over
Conductor material Copper
when 1 second power loss occurs.
AWG14/4
UL Style 2587/2501
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M4 screw (2 places)
2 3
12
34
3. INSTALLATION
3-6. Electrical connection (Continued)
3-6-3. Electrical connection method
· The main power supply connector is located as shown below.
1. Connect the female connector to the main power supply connector on the pump
· Observe the following instructions when connecting the main power supply
connector:
rear panel and fix by turning the ferrule clockwise.
Straight type female connector
Connector cover
2. Fix the connector cover onto the cover using two M4 bolts.
T100L / EC100L(option)
4
1
EC100L
Power connector (male connector)
T100L
EC100L(option)
Receptacle
Amphenol
T3110-000
Amphenol
Female Plug
T3109-101
EC100L
JL04V-2E18-10PE-B
JL04V-6A18-10SE-EB
Clamp for plug:
JL04-18CK-13
No Phase
1 L1
2 L2
3 L3
4 GND
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IPUP T100L / EC100L Instruction Manual
3. INSTALLATION
3-7. Signal
3-7-1. Outline
The IPUP T100L / EC100L is designed as a built-in pump of the APPLIED MATERIALS
equipment and controlled through the APPLIED MATERIALS SPI. The pump is able to
be operated by an equipment through SPI interface as well as monitoring pump status.
１、 Starting and stopping of the IPUP T100L / EC100L
２、 Monitoring of dry contact output status (DC24V, 0.2A)
３、 Control of IPUP T100L / EC100L revolution
If you use the external monitoring output, you can install the monitoring system,
and monitor the pump detail information. (The monitoring system is option.)
Treat suitably according to signal output from the pump on
WARNING
equipment side.
3-7-2. SPI connector wiring
The SPI connector is located on the rear panel of the pump.
Front view (pin assignment)
1
3
7 10
11
15 16
Rated value of dry contact output of SPI is DC24V and 0.2A.
WARNING
2
6
14
Receptacle
Female Plug
Maker Model No.
Tyco Electronics AMP
CPC 206036-1
Tyco Electronics AMP
CPC 206037-1
If a voltage or current exceeding these values is supplied,
the electronic circuits may be damaged.
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3. INSTALLATION
3-7. Signal (continued)
3-7-3. SPI Pin assignmment
Function
Pump ON/OFF
Pump running
DC24V
Output (option)
Warning
Hazard
Jumper
Final valve
interlock
Rotation speed
Pin
No.
1 2 COM
3 4 Signal
5 6 +24V
7 8 Signal
9
10
11
12
13
14
15
16
Signal Dry contact state
· Pin 2 DC0V: Pump Off
Signal
COM
COM
COM
Signal
COM
Jumper
Signal
COM
Signal
COM
· Pin 2 DC24V Pump On
· Contact Closed: Pump On
· Contact Open: Pump Off
· DC +24V is always on when pump has
power and circuit protector for 24V is on. *
· Contact Closed: Normal
· Contact Open: Warning
· Contact Closed: Normal
· Contact Open: Hazard
· Contact Closed: Pump On
· Contact Open: Pump Off
· DC: 0V: 5250 rpm
· DC: 10V: 1000 rpm
IN
/OUT
OUT
OUT
OUT
OUT
OUT
IN
IN
* DC+24V (option) can be utilized to operate the pump if process tool does not supply DC+24V to start or
stop the pump.
Pump status
Pump running Close Close Close Close Close
Pump stopped Open Close Close Close Open
Pump running + warning Close Open Close Close Close
Pump stopped + hazard Open Close Open Close Open
Power off Open Open Open Close Open
3-4 7-8 9-10 11-12 13-14
SPI contacts
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IPUP T100L / EC100L Instruction Manual
1 2
9 8 7 6
5 4 3
DC24V
5 6 5
3. INSTALLATION
3-7. Signal (continued)
3-7-3. SPI Pin assignmment (continued)
Pump Starting/Stopping
Pump Running
Circuit protector
DC24V(option)
Warning
Final valve interlock
Hazard
1
2
3
4
6
7
8
9
10
11
12
13
14
1
2
3
4
7
8
9
10
11
12
13
14
Load
Load
Load
Load
DC24V
Load
Rotation speed control
15
16
15
16
DC 0V-10V
3-7-4. External output for monitoring system
The RS232 connector is located on the rear panel of the pump for pump monitoring
system. (The pump monitoring system is option.)
（As viewed from the rear panel）
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IPUP T100L / EC100L Instruction Manual
3. INSTALLATION
3-8. Cooling water
3-8-1. Specification of cooling water
Use cooling water with the following characteristics in order to prevent clogging and
corrosion of the IPUP T100L / EC100L cooling system.
Type
Flow rate 1.5L/min or more
Water temperature
Pressure 300 - 700 kPaG (3.0 to 7.0 bar)
Pressure difference
between inlet and outlet
Particle size 0.03 mm2 or less
pH value 6.0 - 8.0
Electric conductivity
Chlorine ion Cl
Sulfate ion SO
All iron Fe 0.3ppm or less
M alkalinity CaCO3 75ppm or less
Total hardness CaCO
Sulfur ion S2- None
Ammonium ion NH
Silica SiO2 50ppm or less
Manganese 0.2ppm or less
-
4
Non-corrosive industrial water or
treated soft water
10°C - 25°C
0.2 MPa or more
500μΩ-1/cm or less
80ppm or less
2-
200ppm or less
120ppm or less
3
+
None
4
If water having the above particle size is not available, install
a filter on the IN side of the cooling water circuit. At this
WARNING
time, pay attention so that the cooling water pressure does
not drop below the specified range.
Do not let water flow until immediately before starting the
pump. Opening the cooling water valve allows cooling
CAUTION
water to flow through the electrical components and pump.
If cooling water flows for a long time while the pump is
stopped, condensation may occur in the electrical parts,
causing short-circuiting.
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IPUP T100L / EC100L Instruction Manual
Cooling water
IN
Cooling water
OUT
3. INSTALLATION
3-8. Cooling water
3-8-2. Connection of cooling water
Cooling water connectors are located as shown below.
（continued）
Part Maker Part number
Cooling water IN
Cooling water OUT
Parker
Parker
SH2-62
SH2-63
When multiple pumps are used at a time, connect the
cooling water piping in parallel. If connected in series,
WARNING
malfunctions may occur as the cooling water temperature of
the downstream pump is high.
Connect IN and OUT correctly. Otherwise, the pump will
WARNING
not be cooled down correctly, resulting in a problem.
The customer should wait until the pump cool down
adequately after stopping the pump, when you remove the
CAUTION
quick coupling.
Install the drain tray (850×450×10) under the pump in
preparation for the cooling water leakage to comply with
SEMI-S2-0200. Installing a water leak detector is
recommended.
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IPUP T100L / EC100L Instruction Manual
3. INSTALLATION
3-9. Operation condition setting
3-9-1. Initial setting
Setting method Default
Pump rotation speed
Maintenance warning Hand-held controller 18000Hr
Temperature indication
unit
Buzzer Hand-held controller On
Communication method Hand-held controller RS232
Monitoring ID Hand-held controller 00
Refer to chapter 4 “Operation”, for the setting method of each item using the hand-held
Set the operation condition of the pump for your process
before using the pump. In case of using in improper condition,
performance and safety are not guaranteed. In such cases, we
will not be responsible for any failures.
Remote: External signal via SPI
Local: Hand-held controller 5250rpm
Hand-held controller
-
℃
controller.
3-9-2. Setting items
1. Pump rotation speed
The pump rotation speed can be changed using the hand-held controller.
Ultimate pressure, pumping speed and power consumption, etc. will change
according to pump rotation speed.
2. Maintenance warning
The maintenance warning time can be changed using the hand-held controller
Set the maintenance time to your intended use.
The default value is 18,000 hours.
3. Temperature indication unit
Temperature unit shown on Hand-held controller can be changed.
4. Buzzer
The buzzer can be turned On or OFF, when alarm (warning or hazard) occurs.
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IPUP T100L / EC100L Instruction Manual
3. INSTALLATION
3-9. Operation condition setting (Continued)
3-9-2. Setting items (continued)
5.
Communication method
Communication method of external monitoring output can be changed from RS232C
to RS485. This is used on Dry Pump Monitoring System (option). When this option is
not used, do not change initial setting.
6. Monitoring ID
Monitoring ID is used on Dry Pump Monitoring System (option). When this option is
not used, do not change initial setting.
3-10. Pump storage
1. Seal the Inlet and Exhaust as when it is shipped from the factory.
2. Fix the pump using adjusters.
3. Store at an ambient temperature of between -10°C and +60°C.
4. Store the pump under clean and dry conditions until it is needed.
Never stack pumps vertically. Otherwise, they may fall
down.
WARNING
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IPUP T100L / EC100L Instruction Manual
4. OPERATION Page
4-1. Indication 42
4-2. Main Switch 43
4-3. Operation Method 44
4-4. Control by SPI 45
4-4-1. SPI connection 45
4-4-2. Adjustment before operation 45
4-4-3. Pump running with SPI 45
4-5. Control by Hand-held controller 46
4-5-1. Hand-held controller connection 46
4-5-2. Key functions 46
4-5-3. Operation by hand-held controller 46
4-5-4. Display Menu 47
4-6. Changing Operation Modes 48
4-6-1. Changing from local to remote mode 48
4-6-2. Changing from remote to local mode 48
4-7. Setting 49
4-7-1. Alarm Log 49
4-7-2. Updating Clock 50
4-7-3. REMOTE/LOCAL mode setting 51
4-7-4. Operation condition setting 52
4-7-5. Other function setting 54
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IPUP T100L / EC100L Instruction Manual
4. OPERATION
4-1. Indication
On the front panel there are indicator LEDs that display the pump operating status.
The indicator LEDs light up or go off according to the pump operating status when the
pump main switch is ON.
GREEN LED
ON
OFF
YELLOW LED
RED LED
Indicator LEDs and pump status
Power ON GREEN Power
Pump Running - RUN
Warning
When the pump is running with warning and intermittent
buzzer sounds.
Hazard
When the pump stops due to hazard and buzzer sounds.
The pump cannot be restarted until the hazard is resolved.
LOCAL mode - LOCAL
LED
YELLOW WARNING
RED HAZARD
Hand-held
Controller
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IPUP T100L / EC100L Instruction Manual
converter error
(FC Alarm).
4. OPERATION
4-2. Main Switch
Power ON
The main power switch is located on the front panel as shown below.
·Turning this switch on （by pressing the 1 mark side） turns the green indicator LED
light up.
· When the hand-held controller is in use, the POWER indicator LED light up.
Main Switch
ON
OFF
Do not use a sharp object to push the switch. A sharp object
may damage the switch.
Power OFF
Make sure the pump has stopped.
·Turn the switch off （by pressing the 0 mark side）.
· When the hand-held controller is in use, the POWER indicator LED light will go out.
Make sure the main power switch on the pump is off and the
WARNING
cuircit breaker on your facility is off before unplugging the
power connector.
When turning on after turning off, wait 30 seconds so that
the electricity of the DC capacitor in the converter can be
discharged. Otherwise, the pump cannot start due to
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IPUP T100L / EC100L Instruction Manual
4. OPERATION
4-3. Operation Method
The pump has the following operation modes:
· Remote mode using the SPI of APPLIED MATERIALS.
· Local mode using the hand-held controller.
The following actions are possible in the remote mode using SPI:
· run and stop
· pump status monitoring
· changing the rotational speed
The following actions are possible in the local mode using the handheld controller:
· run and stop
· settings
· check alarm logs.
· buzzer stop (when hazard/warning occurs)
· alarm reset (when hazard/warning occurs)
· changing the rotational speed
Start of pump
1. The motor begins operation.
2. Input from the sensors are processed.
3. TotalRunHours count starts.
4. Power Consumption count starts.
Stop of pump
1. The motor stops operation （slow stop）
During stopping, hand-held controller LED lights intermittently.
2. The data count stops.
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IPUP T100L / EC100L Instruction Manual
4
10
4. OPERATION
4-4. Control by SPI
4-4-1. SPI connection
The SPI connector is located on the rear panel of the pump.
Connect and fix the SPI cable of the equipment to the SPI connector.
CAUTION
4-4-2. Adjustment before operation
·Apply 0 to 10VDC between SPI connector pins 15 and 16 to adjust the revolution.
·The pump revolution decreases as the voltage is increased between 0VDC (MAX rev)
and 8VDC (1000rpm) while it remains constant at voltages between 8VDC and
10VDC (1000rpm).
·If no voltage is set between pins 15 and 16, the pump operates at the maximum
Rated value of dry contact output of SPI is DC24V and 0.2A. If a
voltage or current exceeding these values is supplied, the
electronic circuits may be damaged.
revolution.
T100L 5250
EC100L 4650
4-4-3. Pump running with SPI
Apply 24-VDC voltage between pins 1 and 2 to start the pump.
CAUTION
Alarm cannot be cleared through SPI when alarm is
generated. Turn the pump main switch off / on to clear the
Alarm (Wait 30 seconds when turning on after turning off.)
Speed [rpm]
1000
0
0 2
Min 1000rpm
6 8
Voltage [ V ]
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IPUP T100L / EC100L Instruction Manual
4. OPERATION
4-5. Control by Hand-held controller
4-5-1. Hand-held controller connection
Connect the connector of the hand-held controller provided to the connector identified
as KEYBOARD on the front panel of the pump.
4-5-2. Key functions
Key Explanation Function
SET key
RUN key
STOP key
Buzzer stop
Alarm Reset key
Menu Select key
Parameter Select key
·Pressing this key on parameter set
screen enters currently selected
parameter.
·Starts pump.
·Stops pump.
·Pressing this key changes Operation
mode in stop condition.
(Remote→Local)
·Stops warning buzzer.
·Resets alarm.
·Goes to menu (Main, Detail,
Setting).
·Moves highlighted position to right in
setting mode
·Changes parameter to following or
preceding one.
·Changes digit at setting mode.
4-5-3. Operation by hand-held controller
Check if the pump is in the LOCAL mode.
Start of Pump: Press the RUN key on the hand-held controller.
Stop of Pump: Press the STOP key on the hand-held controller.
Alarm Reset: Press the BUZZER STOP/ALARM RESET key after the root cause of
alarm is removed, then the buzzer will stop. Press it again, then alarm will be reset.
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CAUTION
The pump will stop when pump is running in local mode and
the hand-held controller is disconnected.
When the pump is running in local mode and receives the
pump-on-signal through SPI pins 1/2 the mode automatically
will be changed from local mode to remote mode.
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IPUP T100L / EC100L Instruction Manual
4. OPERATION
4-5. Control by Hand-held controller(Continued)
4-5-4. Display Menu
change item
change item
“↑↓”key
“↑↓”key
5250rpm
1:Remote
5250rpm
1:Remote
Remote/Local Set?
DateTimeSet?
Display Message
Display Message
Item
Item
04/02/01 20:10
Remote/Local Set?
DateTimeSet?
04/02/01 20:10
Setting MenuMenu Title
Setting MenuMenu Title
Mode set
Date,Time set
Mode set
Date,Time set
※
※
※
※
18000 Hr
18000 Hr
Rev speed Set?
Rev speed Set?
MNTWarnTime Set?
MNTWarnTime Set?
Maintenance warning
time set
Motor Speed set
Maintenance warning
time set
Motor Speed set
※
※
※
※
change item
change item
“↑↓”key
“↑↓”key
1:YES
1:YES
1:℃
1:℃
Buzzer Set?
Buzzer Set?
MonitorType Set?
Temp Unit Set?
Temp Unit Set?
Temp Unit set
Temp Unit set
※
※
MonitorType Set?
Buzzer set
Buzzer set
Communication Mode set
Communication Mode set
※
※
※
※
“>”key
change Menu
“>”key
change Menu
1:RS232
1:RS232
ID_No:00
ID_No:00
To Main Menu
Push “>” Key
To Main Menu
Push “>” Key
Setting Reset?Reset
Setting Reset?Reset
Monitor_ID Set?
Monitor_ID Set?
Change Menu
Monitering ID set
Monitering ID set
※
※
Change Menu
※
※
“>”key
change Menu
“>”key
change Menu
168 V
168 V
Motor Voltage
Motor Power
Display Message
Display Message
Item
Item
Display Message
Display Message
Main Menu Detail Menu Setting Menu
Main Menu Detail Menu Setting Menu
Item
Item
1.50kW
Motor Voltage
Motor Power
1.50kW
Detail MenuMenu Title
Detail MenuMenu Title
Motor Power
Motor Power
Serial Number
Serial Number
Main MenuMenu Title
Main MenuMenu Title
Serial Number
Serial Number
Integral Power
500.5 kWh
Integral Power
500.5 kWh
Motor Voltage
Motor Voltage
Power Consumption
Power Consumption
※
※
5250rpm
5250rpm
Rev speed
DD/MM/YY HH:mm
04/02/01 20:10
12E001 v1.0
Rev speed
DD/MM/YY HH:mm
04/02/01 20:10
12E001 v1.0
Rotor Speed
Date,Time
Rotor Speed
Date,Time
v3.3
v3.3
9000 H
9000 H
Soft Version
Soft Version
Maintenance Time
Maintenance Time
Soft version
Soft version
Maintenance Time
Maintenance Time
change
item
change
item
“↑↓”key
“↑↓”key
5.5 A
5.5 A
Temperature
Temperature
Motor Current
Motor Current
Motor Current
Motor Current
Pump Temperautre
Pump Temperautre
To Main Menu
Push “>” Key
To Main Menu
Push “>” Key
To Setting Menu
Alarm Log?Alarm Log
Alarm Log?Alarm Log
※
※
110℃
110℃
Total Run Hours
2543 Hr
Total Run Hours
2543 Hr
Total Run Hours
Total Run Hours
Push “>” Key
To Setting Menu
Push “>” Key
Change Menu
Change Menu
Change Menu
Change Menu
※Can be used “Set Key”
※Can be used “Set Key”
“>”key
change Menu
“>”key
change Menu
<<HAZARD>>
11 PumpOverLoad
To Detail Menu
Push “>” Key
<<HAZARD>>
11 PumpOverLoad
To Detail Menu
Push “>” Key
Warning/Hazard
Change Menu
Warning/Hazard
Change Menu
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IPUP T100L / EC100L Instruction Manual
4. OPERATION
4-6. Changing Operation Modes
4-6-1. Changing from local to remote mode
Method 1: Apply 24-VDC voltage between pins 1 and 2 of APPLIED MATERIALS
Method 2: Select REMOTE on the hand-held controller.
The LOCAL indicator LED of the hand-held controller goes off.
Method 3: Disconnect the hand-held controller from the front panel connector,
After transition to the remote mode, the pump operates according to the
parameters for the remote mode.
Upon power ON, the pump is set to LOCAL mode.
SPI, which automatically causes transition to the remote mode.
which automatically causes transition to the remote mode.
When the hand-held controller is disconnected, the pump
changes to remote mode, regardless of whether the pump is
running or stopped.
4-6-2. Changing from remote to local mode
Stop pump by SPI control.
Chose alternative method from following two method.
Method 1:Select LOCAL on the hand-held controller display.
Method 2: Press the STOP key.
· When the mode changes to local mode, the LOCAL indicator LED of the hand-held
controller lights up.
Changes from the handheld controller are not possible when
the pump is running in remote mode.
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IPUP T100L / EC100L Instruction Manual
4. OPERATION
4-7. Setting
4-7-1. Alarm Log
·Check the alarm log to investigate the root cause of the alarm when the alarm is
generated.
How to check
NO.
1 Go to Detail Menu (refer to 4-5-4) Detail Menu
2
3
4
Operation step Key to be used Indication
Select “Alarm Log”
using UP and DOWN
keys.
Press SET key to enter
Alarm Log.
Press UP and DOWN
key, show history of
alarm.
Alarm Log?
W 05/08/04 10:10
12 PumpTempHigh
W 15/06/04 02:20
11 PumpOverload
Press SET key to
5
return mode.
Warning :W
Hazard :H
AlarmCode
When FC Alarm occurs, handheld controller displays FCAlarm Error Number.
H 05/08/04 12:10
22 FC Alarm [02]
Alarm log saves the last 30 warning and hazard events in its memory.
Date DD/MM/YY HH:mm
W 05/06/04 10:10
12 PumpTempHigh
Alarm Log?
FCAlarm
ErrorNumber
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IPUP T100L / EC100L Instruction Manual
Indicated values are in the order of day
,
month and year.
4. OPERATION
4-7. Setting (continued)
4-7-2. Updating Clock
It is necessary to adjust the pump clock to your local date and time to ensure correct
maintenance schedule and alarm log before beginning operation.
Date and Time changing method:
NO.
1 Go to Detail Menu (refer to 4-5-4) Detail Menu
2 Go to Setting Menu (refer to 4-5-4) Setting Menu
3
4
5
Operation step Key to be used Indication
Select date parameter
using UP and DOWN
keys.
Press SET key to enter
setting mode.
Shift highlighted value
to desired one using
RIGHT key.
DateTimeSet?
01/07/01 13:25
DD/MM/YY HH:mm
01/07/01 13:25
DD/MM/YY HH:mm
01/07/01 13:25
Change value using UP
6
and DOWN keys.
Press SET key to
7
complete setting.
DD/MM/YY HH:mm
01/07/01 14:25
DD/MM/YY HH:mm?
01/07/01 14:25
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4. OPERATION
4-7. Setting (continued)
4-7-3. REMOTE/LOCAL mode
·Use the hand-held controller to change mode.
NO.
1 Go to Detail Menu (refer to 4-5-4) Detail Menu
2 Go to Setting Menu (refer to 4-5-4) Setting Menu
3
3
4
Operation step Key to be used Indication
Select mode setting
parameter using UP
and DOWN keys.
Press SET key to enter
setting mode.
Change the mode
using RIGHT key.
Remote/Localset?
1:Remote
Remote/Localset?
1:Remote/2:Local
Remote/Localset?
1:Remote/2:Local
Press SET key to
complete mode
5
change.
Remote/Localset?
2:Local
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4. OPERATION
4-7. Setting (continued)
4-7-4. Operation condition
4-7-4-1. Motor revolution
The pump rotational speed can be changed using the hand-held controller.
NO.
1 Go to Detail Menu (refer to 4-5-4) Detail Menu
2 Go to Setting Menu (refer to 4-5-4) Setting Menu
3
4
5
Operation step Key to be used Indication
Select revolution
setting parameter using
UP and DOWN keys.
Press SET key to enter
input mode.
Shift highlighted value
to desired one using
RIGHT key.
Rev Speed Set?
5250rpm
Rev Speed Set?
5250rpm
Rev Speed Set?
5250rpm
Change using UP and
6
DOWN keys.
Press SET key to
7
complete change.
Setting range for IPUP T100L is from 1000rpm to 5250rpm.
Setting range for EC100L is from 1000rpm to 4650rpm.
Rev Speed Set?
5150rpm
Rev Speed Set?
5150rpm
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4. OPERATION
4-7. Setting (continued)
4-7-4. Operation condition (continued)
4-7-4-2. Maintenance Warning Time
The maintenance warning time can be changed using the hand-held controller
NO.
1 Go to Detail Menu (refer to 4-5-4) Detail Menu
2 Go to Setting Menu (refer to 4-5-4) Setting Menu
3
4
5
Operation step Key to be used Indication
Select revolution
setting parameter using
UP and DOWN keys.
Press SET key to enter
input mode.
Shift highlighted value
to desired one using
RIGHT key.
MNTWarnTime Set?
018000 Hr
MNTWarnTime Set?
018000 Hr
MNTWarnTime Set?
018000 Hr
Change using UP and
6
DOWN keys.
Press SET key to
7
complete change.
Setting range is 0 hour to 300000 hours.
When the maintenance warning time is set to 0 Hr the
maintenance warning will be disabled. (Regardless of pump
running hours, the maintenance warning will not be
generated.)
MNTWarnTime Set?
118000 Hr
MNTWarnTime Set?
118000 Hr
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4. OPERATION
4-7. Setting (continued)
4-7-5. Other function
4-7-5-1. Buzzer
The buzzer can be turned On or OFF, when alarm (warning or hazard) occurs.
NO.
1 Go to Detail Menu (refer to 4-5-4) Detail Menu
2 Go to Setting Menu (refer to 4-5-4) Setting Menu
Select revolution
setting parameter using
3
UP and DOWN keys.
Press SET key to enter
4
input mode.
Operation step Key to be used Indication
Buzzer Setting?
1:Yes
Buzzer Setting?
1:Yes/2:No
Change using RIGHT
5
key.
Press SET key to
6
complete change.
Buzzer Setting?
1:Yes/2:No
Buzzer Setting?
2:No
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4. OPERATION
4-7. Setting (continued)
4-7-5. Other function(continued)
4-7-5-2. Temperature indication unit setting
Temperature unit shown on Hand-held controller can be changed.
NO.
1 Go to Detail Menu (refer to 4-5-4) Detail Menu
2 Go to Setting Menu (refer to 4-5-4) Setting Menu
3
4
Operation step Key to be used Indication
Select revolution
setting parameter using
UP and DOWN keys.
Press SET key to enter
input mode.
Temp Unit Set?
1: °C
Temp Unit Set?
1: °C/2: °F
Change using RIGHT
5
key.
Press SET key to
6
complete change.
Temp Unit Set?
1: °C/2: °F
Temp Unit Set?
2: °F
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4. OPERATION
4-7. Setting (continued)
4-7-5. Other function (continued)
4-7-5-3.
Communication method of external monitoring output can be changed from RS232C to
RS485.
NO.
Communication method
Operation step Key to be used Indication
1 Go to Detail Menu (refer to 4-5-4) Detail Menu
2 Go to Setting Menu (refer to 4-5-4) Setting Menu
Select revolution
setting parameter using
3
UP and DOWN keys.
Press SET key to enter
4
input mode.
MonitorType Set?
1: RS232
MonitorType Set?
1: RS232/2:RS485
Change using RIGHT
5
key.
Press SET key to
6
complete change.
MonitorType Set?
1: RS232/2:RS485
MonitorType Set?
1: RS485
This is used on Dry Pump Monitoring System (option). When
this option is not used, do not change initial setting.
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4. OPERATION
4-7. Setting (continued)
4-7-5 . Other function (continued)
4-7-5-4. Monitoring ID
NO.
1 Go to Detail Menu (refer to 4-5-4) Detail Menu
2 Go to Setting Menu (refer to 4-5-4) Setting Menu
3
4
5
Operation step Key to be used Indication
Select revolution
setting parameter using
UP and DOWN keys.
Press SET key to enter
input mode.
Change using RIGHT
key.
Monitor_ID Set?
ID_No:00
Monitor_ID Set?
ID_No:00
Monitor_ID Set?
ID_No:01
Press SET key to
6
complete change.
Monitor_ID Set?
ID_No:01
Monitoring ID is used on Dry Pump Monitoring System
(option). When this option is not used , do not change initial
setting.
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IPUP T100L / EC100L Instruction Manual
w
XXXXX
W
H
→
XXXXX
. X
k W
H
4. OPERATION
4-7. Setting (continued)
4-7-5. Other function (continued)
4-7-5-5. Integral Power Consumption
Electrical energy consumption can be displayed during any period.
The date/time when the measurement is started and electrical energy consumption is
alternately displayed every 5 seconds.
Electrical energy consumption can be reset with the hand-held controller.
The electrical energy consumption can be reset.
NO.
1 Go to Detail Menu (refer to 4-5-4) Detail Menu
I n t e g r a l P o
Automatic change
0 2 / 0 1 / 0 2 1 5 : 0 5
Operation step Key to be used Indication
e r
. X k
foreach5second
Select revolution
3
setting parameter using
UP and DOWN keys.
Press SET key to enter
4
input mode.
Change using RIGHT
5
key.
Press SET key to
6
complete change.
Integration of the electrical energy consumption is restarted when it is reset.
Converter output values are indicated and may vary from
actual values.
Integral Power
xxxxx.xkWh
Integral Reset?
1:Yes/2:No
Setting Reset?
1:Yes/2:No
Setting Reset?
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IPUP T100L / EC100L Instruction Manual
4. OPERATION
4-7. Setting (continued)
4-7-5. . Other function (continued)
4-7-5-6. Setting reset
NO.
1 Go to Detail Menu (refer to 4-5-4) Detail Menu
2 Go to Setting Menu (refer to 4-5-4) Setting Menu
3
4
5
Operation step Key to be used Indication
Select revolution
setting parameter using
UP and DOWN keys.
Press SET key to enter
input mode.
Change using RIGHT
key.
Setting Reset?
Setting Reset?
1:Yes/2:No
Setting Reset?
1:Yes/2:No
Press SET key to
6
complete change.
If “YES” is selected while “Setting Reset” is displayed, the
following items return to the initial setting.
Motor speed T100L:5250rpm
EC100L:4650rpm
Temperature unit °C
Buzzer ON
Communication method RS232
Monitoring ID 0
Setting Reset?
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5. TROUBLESHOOTING Page
5-1. Pump does not start. 61
5-2. Error messages 62
5-3. Pump is running and no error messages are indicated. 64
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IPUP T100L / EC100L Instruction Manual
ction.
5. TROUBLESHOOTING
5-1. Pump does not start.
Green LED on the pump
does not turn on.
Nothing is displayed on
the hand-held controller.
Pump does not start in
remote mode.
Pump does not start in
local mode.
When turning on after turning off, wait 30 seconds so that
the electricity of the DC capacitor in the converter can be
discharged. Otherwise, the pump cannot start due to
converter error (FC Alarm).
Problem Possible Root Cause
Power failure - -
Power failure
Bad connection
Power failure - -
Signal failure
Pump status error - - - Confirm that hazard is not generated.
Power failure - -
Signal failure
Pump status error
Warning
- -
- -
Hazard
Troubleshooting
- Check input power voltage.
- Check the pump main switch.
- Check input power voltage.
- Check the pump main switch.
- Check the hand-held controller conne
- Check input power voltage.
- Check the pump main switch.
- Check the signal cable.
- Check if the signal voltage is 24 VDC
between pin 1 and pin 2 in the SPI
connector.
- Resend the pump-on-signal more than 30
seconds after terminating the
pump-on-signal.
- Check input power voltage.
- Check the pump main switch.
- Check the hand-held controller connection.
- Confirm that the run key is pushed
correctly.
- Check if the pump is in local mode.
- Confirm that the pump-on-signal is not sent
through the SPI.
- Confirm that hazard is not generated.
Main switch trips. Power failure - - - Check input power voltage.
Pump does not start when the pump-on-signal is sent through the SPI
before the pump main switch is turned on. Make sure the pump main
switch is ON, terminate the pump-on-signal and resend the
pump-on-signal after 30 seconds.
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5. TROUBLESHOOTING
5-2. Error message
No.
Error Message Error Description
11
PumpOverLoad
12
PumpTempHigh
13
PumpTempLow
14
TempSensDown Thermistor failure ○ ○
15
WaterShortage
21
FC Comm[**]
22
FC Alarm[**] Converter error is generated. - ○ Refer to following error numbers.
FC Alarm[00] or
FC Alarm[99]
FC Alarm[01]
FC Alarm[02]
FC Alarm[03]
FC Alarm[04]
FC Alarm[05]
FC Alarm[06]
FC Alarm[07] External forced trip signal is received. - ○
FC Alarm[08]
FC Alarm[10]
FC Alarm[12] Current output signal error.
FC Alarm[13] Converter parameter has changed.
FC Alarm[14]
FC Alarm[16]
Actual motor speed stays lower than
setting speed for certain time.
Pump temperature is higher than
Alarm level.
Pump temperature is low under
running condition for a long time.
Pump temperature stays higher than
setting for long time.
(Cannot control pump temperature)
Communication failure between
converter and CPU is generated.
Motor does not rotate after receiving
pump run indication.
Under constant speed condition the
converter input current exceeds
over-current limit.
During acceleration the converter
input current exceeds over-current
limit.
During deceleration the converter
input current exceeds over-current
limit.
Converter input current exceeds
over-current limit.
Converter internal DC voltage
increases.
Module Temperature exceeds
temperature limit.
Converter output current exceeds the
rated current.
Rotation speed exceeds the limit
speed.
Running signal is received when
turning the power on or power failure
or reset.
Communication failure happens more
than setting.
Warning
○ ○
-
○ -
○ -
○ -
- ○
- ○
- ○
- ○
- ○
- ○
- ○
- ○
- ○
- ○
- ○
- ○
- ○
Hazard
○
Troubleshooting
- Check if air is not rushing in. (Leaking,
Broken valve, e.t.c.)
- Check if exhaust is not clogged.
- Check cooling water flow rate.
- Check cooling water temperature.
- Check if cooling water doesn’t flow
backwards.
- Check cooling water flow rate.
- Check cooling water temperature is not too
cold.
- Contact your service representative for
repair.
- Check cooling water flow rate.
- Check cooling water temperature.
- Check if cooling water doesn’t flow
backwards.
- Check input power voltage.
- Turn off the pump main switch, wait one
minute and turn it on.
- Check if there is not any electrical noise
source around pump.
- Check input power voltage.
- Turn off the pump main switch, wait 30
seconds and turn it on.
- Check if there is not any electrical noise
source around pump.
- Check if motor is not overloaded.
- Check cooling water flow rate.
- Check cooling water flow rate.
- Check cooling water temperature.
- Check if cooling water doesn’t flow
backwards.
- Check input power voltage.
- Check if there is not any electrical noise
source around pump.
- Check input power voltage.
- Check if motor is not overloaded.
- Check input power voltage.
- Turn off the pump main switch, wait 30
seconds and turn it on.
- Check input power voltage.
- Turn off the pump main switch, wait 30
seconds and turn it on.
- Check if there is not any electrical noise
source around pump.
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5. TROUBLESHOOTING
5-2. Error message (continued)
Error Message Error Description
No.
51 MainteTime Total run hour exceeds setting.
90 Battery Low RAM Error
Warning
○ -
○ -
Hazard
Troubleshooting
- Contact your service representative for
repair.
- Change the maintenance warning time
setting if you would like to continue
running the pump.
- Need Battery replacement. Contact your
service representative for repair.
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IPUP T100L / EC100L Instruction Manual
the coupler
5. TROUBLESHOOTING
5-3. Pump is running and no error messages are indicated.
Hazard
Problem Possible Root Cause
Bad vacuum
Cannot connect
or nipple of cooling water
Plumbing Problem - -
Rotational Speed
Connection - - - Check the model of coupler and nipple.
Temperature - - - Wait until pump is cool enough.
Warning
- -
Troubleshooting
- Check foreline leakage.
- Check if exhaust is not clogged.
- Check the inlet o-ring screen.
- Check if rotational speed is normal.
- Remote mode; check the signal voltage
between SPI pin 15 and 16 from your
system. (0V for Max. speed)
- Local mode; Check rotational speed setting
with hand-held controller.
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IPUP T100L / EC100L Instruction Manual
6. MAINTENANCE Page
6-1 General 66
6-2 Overhaul Maintenance Intervals 66
6-3 Pump Removal & Return Procedure 67
6-4 Pump Disposal 68
6-5 Application Form for Pump Return 69
ｈｔｔｐ：
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IPUP T100L / EC100L Instruction Manual
6. MAINTENANCE
6-1 General
The IPUP T100L / EC100L do not need daily maintenance or daily cleaning.
6-2 Overhaul Maintenance Intervals
· Overhaul Maintenance Time default setting is 18000 hours. When the maintenance
time has expired, the system automatically notifies the operator of the WARNING
information.
· When the item "Total Run Hour" on the hand-held controller exceeds "Maintenance
Time”, the pump should be returned to TOYOTA INDUSTRIES CORPORATION
using the following procedure.
Only qualified, well-trained personnel can overhaul this
product.
CAUTION
ｈｔｔｐ：
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IPUP T100L / EC100L Instruction Manual
6. MAINTENANCE
6-3 Pump Removal & Return Procedure
Follow the Pump Removal & Return Procedure and take notice of
appropriate precautions, when you need to remove and return the
pump. If you do not, you can cause injury to people and damage to
equipment.
Hazardous substances may be present in the pumps and piping. Use
suitable protective gloves and clothing with a recommended respirator.
Before performing work, be sure to perform lockout/tagout procedures
for the main disconnect device of the power supply with a
lockout/tagout device in compliance with OSHA requirements.
Be sure to include chemical information for any chemicals used on the
Application Form for returning the pump. If this information is not
included, we may refuse to perform maintenance on the pump.
Preventive measures must be taken not to incline the pump during
transportation. (required :usage within angles of 10 degrees with
horizontal)
ｈｔｔｐ：
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IPUP T100L / EC100L Instruction Manual
6. MAINTENANCE
6-3 Pump Removal & Return Procedure (Continued)
1. Only qualified, well-trained personnel can perform pump removal. Check the process
gases which the pump has been exposed to. Use personal safety protective equipment as
instructed in your company safety guideline.
2. Turn off and lockout the circuit breaker that supplies power to the pump. The circuit
breaker is located on the process tool power supply rack.
3. Disconnect all facility connections from the pump.
4. Install seals in the inlet and outlet flanges of the pump with o-rings, blank caps and
clamps/bolts.
5. Copy the Application Form for Returning pump on the next page and enter the
necessary items.
6. Send the Application Form for Returning pump to your Service Representative by
facsimile.
7. Put the original application in an envelope, attach the envelope to the packed pump and
return it together with the pump.
6-4 Pump Disposal
If disposing of the pump (or if disposing of by-products generated in processing), please
decontaminate to follow the regulations in effect in your area. If you have any questions
about how to dispose of a part, (excluding the disposal of by-products generated in
processing) please contact your service representative.
ｈｔｔｐ：
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IPUP T100L / EC100L Instruction Manual
6. MAINTENANCE
6-5 Application Form for Pump Return
Customer
Co. name：
Division：
Name.：
Tel No.：
FAX No：
Title：
Pump Information
Model Name
Reason：
Chemical Information
¨Corrosive Yes □ No □
¨Flammable Yes □ No □
¨Explosive Yes □ No □
¨Radioactive Yes □ No □
¨Bio. active Yes □ No □
¨Others Yes □ No □
Serial No.:
Special Note:
¨Are any polluting materials used?
Yes □ No □
Details of substances the returned pump was in contact with
Process Information
Process：
Date of failure：
Notice:
Enter all materials and byproducts used
accurately without omissions.
No. Substance
1
2
3
4
5
Covenant
I conducted an appropriate survey on the above subjects and entered the related
information correctly without omitting anything. As for the product, the transportation
procedure specified on the preceding page was strictly observed.
Date: Signature:
Chemical
symbol
Handling
precautions
Action against contact
with body
ｈｔｔｐ：
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IPUP T100L / EC100L Instruction Manual
7. APPENDIX Page
7-1. Electrical Circuit Diagram 71
7-2. Cooling Diagram 72
7-3. Material Safety Data Sheet 73
7-3-1. Lubricant 73
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IPUP T100L / EC100L Instruction Manual
7. APPENDIX
7-1. Electrical Circuit Diagram
HANDHELD
CONTROLLER
CPU-
CN6
PWER ON
(GREEN)
CN‑
LED‑G
G Y R
(YELLOW)
WARNING
HAZARD
(RED)
CN‑
LED‑Y
CN‑
LED‑R
MAIN CONTROL BOARD
CPU-CN4
CPU-CN7A
CPU-
CN7B
S.P.I
R1
S1
PE
CPU-CN9 CPU-CN2
R3,S3
T1
OVER CURRENT
(250V/12.0A)
<SWITCH>
T2
(250V/15A)
THERMAL
BREAKER
CIRCUIT
R2
S2
BOARD
FILTER
DC POWER SUPPLY 2
+24V GND
CN1
CN2
S3,T3
GND
T3
R3
S3
POWER IN
AC208V 3PH
ELECTRICAL BOX
T100L ASSY
CN-POW
EXTERNAL
MONITOR
INPUT
MODULE
CN-FC
CONVERTOR
FREQUENCY
(2.2kW)
CONVERTER
Brake Resistor
GND
-THERMISTOR
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71
W
KLIXON
(2.2kW)
U
V
MOTOR
Page 73
IPUP T100L / EC100L Instruction Manual
Motor temperature sensor
Motor
7.Converter
Water In
7. APPENDIX
7-2. Cooling Diagram
Cooling Path
Water Out
6
Pump
1
2
5
3
Tc
M
Temperature sensor
Tc
M
Cooling plate （4 places）
Part name Part name
1 Pump low pressure area 5 Pump body temperature sensor
2 Pump high pressure area 6 Motor temperature sensor
3 Gear box 7 Converter
4 Indirect cooling plate (4 places)
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7. APPENDIX
7-3. Material Safety Data Sheet
7-3-1. Lubricant
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7. APPENDIX
7-3. Material Safety Data Sheet(continued)
7-3-1. Lubricant (continued)
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7. APPENDIX
7-3. Material Safety Data Sheet(continued)
7-3-1. Lubricant (continued)
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7. APPENDIX
7-3. Material Safety Data Sheet(continued)
7-3-1. Lubricant (continued)
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IPUP T100L / EC100L Instruction Manual
7. APPENDIX
7-3. Material Safety Data Sheet(continued)
7-3-1. Lubricant (continued)
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7. APPENDIX
7-3. Material Safety Data Sheet(continued)
7-3-1. Lubricant (continued)
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7. APPENDIX
7-3. Material Safety Data Sheet(continued)
7-3-1. Lubricant (continued)
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7. APPENDIX
7-3. Material Safety Data Sheet(continued)
7-3-1. Lubricant (continued)
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7. APPENDIX
7-3. Material Safety Data Sheet(continued)
7-3-1. Lubricant (continued)
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IPUP T100L / EC100L Instruction Manual
Power switch
SPI con
necto
ｒ
Adjuster
8. EC100L V2.1 APPENDIX
8-1. Scope
This appendix covers the EC100L V2.1 dry vacuum pump for semiconductor equipment.
EC100L is suitable for loadlock, transfer chamber and all other clean process.
Power supply
connector
Inlet NW50 ISO KF
Handheld
controller
RS232C
connector
Cooling water out
Exhaust NW25 ISO KF
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IPUP T100L / EC100L Instruction Manual
136 280
280
78
25
420 85
190 310
590
105 21.8
8. EC100L V2.1 APPENDIX
8-2. Technical Data
8-2-1. Technical Data drawing
EC100L Dimension Diagram
Unit: mm
208.5
107
73.5
3
45
27.5
300
274
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230
25
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IPUP T100L / EC100L Instruction Manual
8. EC100L V2.1 APPENDIX
8-2. Technical Data
8-2-1. Technical Data drawing (continued)
Position of EC100L center of gravity
Unit: mm
L
H
W
3
1
4
2
Position of pump center of gravity Pump
weight (kg)
104 263 146 151
1 (kg) 2(kg) 3 (kg) 4 (kg)
25.5 31.7 24.4 22.4
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L (mm) W (mm) H (mm)
Weight distribution at adjusters
84
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IPUP T100L / EC100L Instruction Manual
3 73.5 208.5 374.5 509.5
300
601
575
274
8. EC100L V2.1 APPENDIX
8-2. Technical Data
8-2-1. Technical Data drawing (continued)
Dimensions for two horizontally installed EC100L pumps
Unit:mm
280
136
22
235
21.8
45.4
590
Positions of stacking brackets
216
530
Bottom
218
530
Top View
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8. EC100L V2.1 APPENDIX
8-2. Technical Data
8-2-1. Technical Data drawing(continued)
Position of center of gravity for two horizontally installed EC100L pumps
Unit:mm
H
L
W
1
3
4
2
weight (kg)
208 263 146 301
1 (kg) 2 (kg) 3 (kg) 4 (kg)
51 63.4 48.8 44.8
Position of pump center of gravity Pump
L (mm) W (mm) H (mm)
Weight distribution at adjusters
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110°
8. EC100L V2.1 APPENDIX
8-3. Moving procedure
8-3-1. Using handle to move
Two wheels and one free caster are provided on the bottom of the pump. Use the handle
stowed in the upper surface of the pump for smooth movement. Observe the following
procedure when using the handle stowed in the upper surface of the pump.
1. Grip the handle and pull it upwards to release the lock.
2. Confirm that all four adjusters are up.
3. Raise the handle toward the front panel while keeping hold of it.
4. Set the handle at about 110° and then press it down to lock it in position.
5. Pull the handle up to release it and return it to its original position.
Handle
1. Pull up.
3. Raise the handle.
Grip
4. Press handle
Adjuster
2. Confirm that all four adjusters are up.
Do not move the pump hurriedly to prevent rolling over.
WARNING
Move the pump at a speed of 4 km/h or less.
Pay attention not to trap your feet or body when moving the
WARNING
pump.
Confirm that all four adjusters on the bottom of pump are UP
WARNING
when moving.
down to lock.
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Check that the handle is firmly locked before using it
8. EC100L V2.1 APPENDIX
8-3. Moving procedure
8-3-1. Using handle to move (continued)
Never use the handle for hoisting the pump.
WARNING
Never sit down on the handle.
WARNING
Only use the handle for pushing the pump.
WARNING
Pay attention so as not to trap your
hands between the handle and cover
when using or stowing the handle.
Never move the pump while it is running.
WARNING
Only use the handle for pushing the pump.
or after stowing it.
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IPUP T100L / EC100L Instruction Manual
8. EC100L V2.1 APPENDIX
8-4. Electrical Circuit Diagram
http://www.toyota-industries.com/ TOYOTA INDUSTRIES CORPORATION
89
Page 91
TOYOTA INDUSTRIES CORPORATION
Japan
Sales Dept. Compressor Division
2-1 Toyoda-cho, Kariya-shi, Aichi 448-8671, Japan
E-mail : drypump@mm.toyota-shokki.co.jp
Tel +81-566-27-5699 Fax +81-566-27-5688
U.S.A
Toyota Tsusho America Inc., Fremont Office
44901 Industrial Drive, Fremont, CA 94538, U.S.A
E-mail : drypump@mm.toyota-shokki.co.jp
Tel +1-510-440-8615 Fax +1-510-440-8108
[Printed in Japan]
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