Sigma SQM-160 User Manual

SQM-160

Sigma

instruments

Rate/Thickness Monitor

User’s Guide

Version 2.0

ΣΣ

Safety Information

Read this manual before installing, operating, or servicing this equipment. Do not install substitute parts, or perform any unauthorized modification of the product. Return the product to Sigma Instruments for service and repair to ensure that safety features are maintained.

Safety Symbols

WARNING: Calls attention to a procedure, practice, or condition, that could possibly cause bodily injury or death.

CAUTION: Calls attention to a procedure, practice, or condition, that could possibly cause damage to equipment or permanent loss of data.

Refer to manual for specific Warning or Caution information to avoid personal injury or equipment damage.

Hazardous voltages may be present. Earth ground symbol.

Chassis ground symbol.

Warranty Information

This Sigma Instruments product is warranted against defects in material and workmanship for a period of 1 year from the date of shipment, when used in accordance with the instructions in this manual. During the warranty period, Sigma Instruments will, at its option, either repair or replace products that prove to be defective.

Limitation of Warranty

Defects from, or repairs necessitated by, misuse or alteration of the product, or any cause other than defective materials or workmanship are not covered by this warranty. NO OTHER WARRANTIES ARE EXPRESSED OR IMPLIED, INCLUDING BUT NOT LIMITED TO THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE. UNDER NO CIRCUMSTANCES SHALL SIGMA INSTRUMENTS BE LIABLE FOR CONSEQUENTIAL OR OTHER DAMAGES RESULTING FROM A BREACH OF THIS LIMITED WARRANTY, OR OTHERWISE.

Return Policy

The purchaser may return this product in like new condition within 30 days after shipment for any reason. In case of return, purchaser is liable and responsible for all freight charges in both directions.

Table of Contents

Chapter 1 Quick Start

1.0 Introduction ..................................................................................................................1-1

1.1 Installation.....................................................................................................................1-4

1.2 Front Panel...................................................................................................................1-1

1.3 Rear Panel....................................................................................................................1-2

1.4 System Connections ...................................................................................................1-3

1.5 Film Setup.....................................................................................................................1-5

1.6 Depositing a Film.........................................................................................................1-6

Chapter 2 Operation

2.0 Introduction...................................................................................................................2-1

2.1 Menu Selection............................................................................................................2-1

2.2 Film Parameters Setup...............................................................................................2-2

2.3 System Parameters Setup.........................................................................................2-4

2.4 Sensor Selection.........................................................................................................2-7

2.5 Sensor Min/Max Frequency.......................................................................................2-8

2.6 Sensor Tooling.............................................................................................................2-9

2.7 Rate/Thickness or Frequency Display ......................................................................2-10

2.8 Crystal Life Display......................................................................................................2-10

2.9 Zero Thickness.............................................................................................................2-11

2.10 Shutter Operation......................................................................................................

2.11 Simulate Mode...........................................................................................................

Chapter 3 Options

3.0 Introduction...................................................................................................................

3.1 Option Card Installation..............................................................................................

3.2 Four Sensor Card........................................................................................................

3.3 Analog Output Card.....................................................................................................

Chapter 4 MonComm Software

4.0 Introduction...................................................................................................................4-1

4.1 Installation.....................................................................................................................4-1

4.2 Run MonComm............................................................................................................4-1

4.3 Add and Delete Films..................................................................................................4-2

4.4 Download Films............................................................................................................4-3

4.5 Graph Data ...................................................................................................................4-4

4.6 Save Data .....................................................................................................................4-5

4.7 Edit System Parameters.............................................................................................4-6

4.8 Load Defaults...............................................................................................................4-6

Chapter 5 Maintenance

5.0 Introduction...................................................................................................................5-1

5.1 Fuse Replacement......................................................................................................5-1

Appendix

A. Material Parameters B. Specifications C. I/O Connections D. Declaration of Conformity

Chapter 1 Quick Start

1.0 Introduction

Congratulations on your purchase of the SQM-160 Deposition Rate/Thickness Monitor. The SQM-160 is an easy-to-use instrument for measuring many types of thin film coatings. This chapter will help to get you up and running quickly. Please review the entire manual for detailed operational, programming, and safety information.

1.1 Installation

Refer to Sections 1.3 and 1.4 for detailed system hookup information.

Rack Installation

Power Connection

Sensor Connections

Digital I/O Connections

Computer Connection

The SQM-160 occupies a 3.5” high, half-rack space. An optional kit (900-008) is available to adapt to a full rack. Install the unit in a 19” rack with the supplied hardware.

WARNING: The SQM-160 is shipped with a ½ A Fuse for use with 90–120 VAC. If your line voltage is 180–240 VAC, replace the fuse with the ¼A fuse included with your SQM-160.

WARNING: Verify that the Voltage Selector Switch located next to the power switch matches your line voltage.

Plug the SQM-160 into your power source with the included power cord.

Connect the BNC cables and oscillator from your vacuum chamber feedthrough to the desired SQM-160 Sensor Input(s).

Refer to Appendix C for details on wiring digital I/O to the SQM-160 Relay I/O connector.

If you would like to use the supplied Windows software to collect data or program the SQM-160, attach a 9 pin straightthru cable from the SQM-160 RS-232 connector to your computer’s serial port.

Option Connections

Move the rear panel power switch to the On (|) position. The SQM-160 will briefly display its software version, then go to normal operating mode.

If you purchased the Analog Output Option (502-021), connect a BNC cable form the Rate or Thickness connector to your chart recorder.

1-1

Chapter 1 Quick Start

1.2 Front Panel

Display1 Display2 Crystal Status LEDs

Control Knob

Rate A/s Thickness kA

Zero

Xtal Life

Open

Closed

Shutter

Control Configuration

Control Section

Time

Sigma

instruments

SQM-160

Rate/Thickness Monitor

Time SP

Thk SP

Final Thk

Crystal Status

Next Prev Clear Program

Clear

Configuration SectionSetpoint LEDs

Front Panel Controls

Display 1 Displays rate and thickness in normal operation.

Displays setup parameter name in program mode.

Display 2 Displays deposition time in normal operation.

Displays setup parameter value in program mode.

Control Section

Zero thickness reading. Toggle Display 1 between Crystal Life and Rate/Thickness readings. Toggle shutter relay on/off.

Configuration Section

Program enters setup mode. Next/Prev moves thru menus. Clear cancels change and returns value to its original setting.

Setpoint LEDs Illuminate when the indicated setpoint is reached.

Crystal Status LEDs

Illuminate when a crystal is active and operating. Flashes when an active crystal fails.

Control Knob Used to adjust values or scroll though menu selections.

Pushing the control knob stores the current setting.

1-2

Chapter 1 Quick Start

1.3 Rear Panel

Option A Card

3 4 5 6

Sensor 1 Sensor 2

Manufactured By

Sigma

instruments

Rate Thick

RS-232

Model No. SQM-160

Ser No. 80901

Option B Card

Relay I/O

Ground

110

Line Fuse

Fuse 1/2 A SB at 120VAC Fuse 1/4 A SB at 240VAC

220

Rear Panel Connections

Sensor 1 & 2 Connection to quartz crystal sensor remote oscillator. See

Section 1.4 for detailed hookup.

RS-232 Connection to computer serial port for programming and data

acquisition.

Relay I/O Connects 4 relays and 4 digital inputs to external equipment for

process control. See Appendix C for connections.

Option A Card Provides an additional four sensor measurement channels.

Option B Card Provides two 0-5V analog outputs for rate and thickness

readings.

Ground Terminal

Measurement ground terminal.

Voltage Selector WARNING: Select 115V for 90-120VAC, 230V for 180-240VAC.

Line Fuse WARNING: Replace line fuse only with a fuse of the specified

type and rating.

Power Connector WARNING: Use removable power cords only of the specified

type and rating.

1-3

Chapter 1 Quick Start

1.4 System Connections

The diagram and table below identifies typical vacuum system components and their function.

Sensor

In-Vac

Cable

Feedthrough

6" BNC Cable

Oscillator

Source Shutter

10' BNC Cable

Ground Wire

Option A Card

Sensor 1 Sensor 2

Manufactured By

Sigma

instruments

RS-232

Model No. SQM-160 Ser No. 80901

Option B Card

Relay I/O

Ground

Line Fuse

Fuse 1/2 A SB at 120VAC Fuse 1/4 A SB at 240VAC

220

110

System Components

Sensor Holds the quartz crystal used to measure rate and thickness.

Crystals must be replaced occasionally.

In-Vac Cable A coax cable, typically 30” long, that connects the sensor to the

feedthrough.

Feedthrough Provides isolation between vacuum and atmosphere for

electrical and cooling lines.

6” BNC Cable Provides a flexible connection from the feedthrough to the

oscillator. Keep this cable as short as possible.

Oscillator Contains the electronics to operate the quartz crystal. Total

cable length to the crystal should be under 40”.

10’ BNC Cable Connects the oscillator to the SQM-160. Lengths up to 100’

are acceptable.

Ground Wire A wire, typically braided, that connects the vacuum system to

the SQM160 ground terminal.

1-4

Chapter 1 Quick Start

1.5 Film Setup

This section will help you setup the SQM-160 to measure a film. Refer to Chapter 2 for detailed film programming instructions.

Note: User actions with front panel controls are indicated by a Box. Results shown on displays, are indicated by a Dashed Box.

Enter Program Mode

Select a Film Turn the Control Knob to select one of the nine possible films,

Set Film Parameters

Set System Parameters

If the Crystal Life display is shown, press Xtal Life to return to Rate/Thickness mode. Press Program to enter the film setup menu. Pressing the program switch while in program mode returns the SQM-160 to normal mode.

then press the Control Knob to enter the film parameters menu.

Turn the Control Knob to set the first film parameter (density). The parameter value is shown in Display 2. Press the Control Knob to save the value and move to the next film parameter. If you press Clear, the film parameter returns to its original value. Continue to set each parameter. When the last film parameter is entered, the SQM-160 returns to normal mode. See Chapter 2 for detailed instructions on setting Film Parameters.

To Enter the system menu, press Program, then Prev. Set system parameters by turning, then pushing, the Control Knob as described above. See Chapter 2 for detailed instructions on

setting System Parameters.

If the sensor(s) you selected during film setup are connected to the SQM-160, the Crystal Status LEDs should be lit. If not, return to the Film Parameters menu and set the Sensor Average parameter to the desired sensor(s).

If the Crystal Status LED is flashing, it is most likely that sensor is not properly connected. Sigma supplies a small test crystal with each oscillator module that can be used to test sensor connections external to the vacuum chamber. Referring to Section

1.4, disconnect the oscillator from its 6” BNC cable. Attach the test crystal to the oscillator’s feedthrough connector. The Crystal Status LED will remain lit if the external sensor connections are correct.

Refer to the Sensor Selection, Frequency Display and Sensor Min/Max sections of Chapter 2 for information that can assist in troubleshooting sensor problems.

1-5

Chapter 1 Quick Start

1.6 Depositing a Film

If you have followed this Quick Start chapter, you are ready to deposit a film. Follow the procedure below to begin deposition.

Verify Sensor Operation

Display Rate/Thickness

Zero Thickness

Start Deposition

The Rate and Thickness displays should begin to move from zero. Please take time to review the remainder of this manual for detailed operational, programming, and safety information.

Verify that the Crystal Status LED for the measuring sensor is lit, and not flashing.

Display 1 should be displaying Rate on the left and Thickness on the right. If the Crystal Life display mode is active, press the Xtal Life switch to return to Rate/Thickness mode. If the Program Mode is active, press Program to return to normal mode.

If needed, press the Zero switch to zero the thickness reading.

Apply power to your source evaporation supply. If the SQM160 shutter relay is connected, press the Shutter switch to begin deposition.

If the displays remain at zero, check your system setup to assure that you are actually evaporating. Also check that the deposited material is reaching the sensor.

If the display is erratic or noisy, first check your sensor connections. Refer to the Timebase, Rate Filter and Rate Resolution sections of Chapter 2 for information that can help in troubleshooting noisy reading problems.

If the rate and thickness readings do not match your expectations, refer to the Film Parameter (Density, Z-Factor, Tooling) and Sensor Tooling sections of Chapter 2.

1-6

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