Sierra Mass-Trak 810M, Mass-Trak 810C, Mass-Trak 810S-L, Mass-Trak 810 Series, Mass-Trak 810S-M Instruction Manual

Sierra 810 Series

Mass-Trak

®

Mass Flow Instruments

Instruction Manual

Part Number: IM-81

Revision H 4/15

GLOBAL SUPPORT LOCATIONS: WE ARE HERE TO HELP!

IMPORTANT CUSTOMER NOTICE: OXYGEN SERVICE

Sierra Instruments, Inc. is not liable for any damage or personal injury, whatsoever,
resulting from the use of Sierra Instruments standard mass flow meters or controllers for
oxygen gas. You are responsible for determining if this mass flow meter or controller is
appropriate for your oxygen application. You are responsible for cleaning the mass flow
meter or controller to the degree required for your oxygen flow application.

© COPYRIGHT SIERRA INSTRUMENTS 2014

No part of this publication may be copied or distributed, transmitted, transcribed, stored in
a retrieval system, or translated into any human or computer language, in any form or by
any means, electronic, mechanical, manual, or otherwise, or disclosed to third parties
without the express written permission of Sierra Instruments. The information contained in
this manual is subject to change without notice.

TRADEMARKS

Mass-Trak® 810 Series is a Registered Trademark of Sierra Instruments, Inc. Other
product and company names listed in this manual are trademarks or trade names of their

respective manufacturers.

CORPORATE HEADQUARTERS

5 Harris Court, Building L Monterey, CA 93940
Phone [phone] [phone] Fax [phone]

www.sierrainstruments.com

EUROPE HEADQUARTERS

Bijlmansweid 2 1934RE Egmond aan den Hoef
The Netherlands
Phone [phone] Fax [phone]

ASIA HEADQUARTERS

Second Floor Building 5, Senpu Industrial Park
25 Hangdu Road Hangtou Town
Pu Dong New District, Shanghai, P.R. China
Postal Code 201316
Phone: + 8621 5879 8521 Fax: [phone]

Series 810 Table of Contents

TABLE OF CONTENTS

Chapter 1 Introduction

Introduction .................................................

1-1

Using this Manual ...................................

1-2

Safety Information ...............................

1-3

Receipt of System Components .........

1-3

Technical Assistance .............................

1-3

The 810 Series Flow Sensing Principle

1-4

Chapter 2 Installation

Installation Overview .....................................

2-1

Before Beginning an Installation.....................................

2-1

Installing the Transducer (Plumbing) ...........

2-2

Compression Fittings ...........................

2-2

VCO Fittings ........................................

2-3

VCR Fittings .........................................

2-3

1/4-inch Female NPT Fittings .............

2-3

Installing the Transducer (Electrical) ...........

2-4

D-connector PIN assignments .............

2-5

Chapter 3 Operation

Mass Flow Meter Operation .........................

3-1

Mass Flow Controller Operation ...................

3-1

Setpoint Adjustment ...............................

3-2

Setpoint Configuration............................

3-3

Over-Range Condition ...........................

3-4

Auto Shut-Off Function .......................

3-5

Manual Valve Override .......................................

... 3-5

ValvePurg e.. ... .......... ... ....... ..

............................. 3-5

Chapter 4 Maintenance

Flow Path Maintenance and Cleaning

4-1

Sensor Maintenance and Inspection .........

4-2

Valve Maintenance ..........................................

4-3

Valve Adjustment Procedure .................

4-4

Transducer Calibration .................................

4-5

Chapter 5 Troubleshooting

Transducer Troubleshooting Charts...........

5-1

Returning Equipment to the Factory ............

5-2

Table of Contents Series 810

Appendix A Conversion Formulas and Gas Tables

Appendix B Product Specifications & Mounting

Appendix C Pin Connections

Appendix D Purge and Valve Off Connections

Appendix E Warranty Policy

List of Figures

1-1. Mass-Trak Features (Typical) ...............................

1-1

1-2. Flow Paths through the Transducer ....................

1-4

1-3. Flow Measuring Principle .....................................

1-4

1-4 Sensor Temperature Distribution ..... ........ ......... ...... .... ...1-5

1-5 Linear Range of Transducer Output Signal .........................1 -5

2-1. Minimum Restriction Diameters ..................................................... 2-4

2-2. Transducer D-Connector Pin Assignments .................................

2-5

3-1 Dip Switch Settings.............................. ................ .... ..

3-3

4-1. Stainless Steel Low Flow Internals ............................................

4-2

4-2. Stainless Steel Medium Flow Internals .......................................

4-2

4-3. Nylon Transducer Internals .........................................................

4-2

Series 810 Instruction Manual Chapter 1 Introduction

Chapter 1 Introduction

Sierra's Mass-Trak' mass flow meters and controllers are designed
to accurately measure and control flows of process gases. This
instruction manual covers the installation, operation and maintenance
of the Mass-Trak product line, which includes the following Sierra
models:

Model 810M Mass-Trak Flow Meter
Model 810C Mass-Trak Flow Controller
Model 810S-L Mass-Trak Flow Controller for flows up to 15

SLPM

Model 810S-M Mass-Trak Flow Controller for flows from 15

to 100 SLPM
All of these models can be ordered with or without a digital
display.

Sierra Instruments' Series 810 Mass-Trak products can be
calibrated to measure and control the mass flow rate of gases in
several ranges from 0-10 standard cubic centimeters per minute
(SCCM) to 0-100 standard liters per minute (SLPM). Accuracy is
±1.5% of full scale over a wide temperature and pressure range, and
time response is 5 seconds to within 2% of set point. Detailed
product specifications may be found in Appendix B.

Mass -Trak Design (typical)

Figure 1-1. Mass-Trak Design (typical)

Mass-Trak is ideally suited to a wide range of gas flow applications
including general process control, laboratories, instrument OEM's,
gas panels, and flow calibration.

FLOW

ZERO

SET POINT

IM-81 1-1

Chapter 1 Introduction Series 810 Instruction Manual

Mass-Trak requires a regulated 24 VDC external power source. The
0-5 VDC and 4-20 mA output signals, which are linearly
proportional to gas mass flow rate, are provided for recording, data
logging, or control. A 15-pin "D" connector is provided for power
input, output signal and set point control. Mass-Trak is available in
a variety of configurations with either a nylon or stainless steel flow
body. A 24VDC power supply is available as an option.

Using This Manual

This manual is organized into five chapters:

Chapter 1 includes the introduction and theory of operation

Chapter 2 provides installation, plumbing and wiring

instructions

Chapter 3 describes operation and features

Chapter 4 covers routine maintenance

Chapter 5 contains the troubleshooting guide and service

recommendations

There are also 5 Appendices:

Appendix A lists conversion formula and gas tables

Appendix B includes the product specifications,

dimensional drawings and mounting instructions

Appendix C describes the PIN connections

Appendix D describes the purge and valve off connections

Appendix E details the warranty policy for the product

Throughout this manual, we use the word

transducer

as a generic
term to represent all models of Sierra's 810 Series Mass-Trak
instruments.

1-2 IM-81

Series 810 Instruction Manual Chapter 1 Introduction

Safety Information

Caution and warning statements are used throughout this book to
draw your attention to important information.

Warning! Caution!

This statement appears with information that This statement appears with information that is
is important to protect people and equipment important for protecting your equipment and
from damage. Pay very close attention to all performance. Read and follow all cautions that
warnings that apply to your application. apply to your application.

Receipt of System Components

When receiving a Sierra transducer, carefully check the outside
packing carton for damage incurred in shipment. If the carton is
damaged, notify the local carrier and submit a report to the factory or
distributor. Remove the packing slip and check that all ordered
components are present and match your specifications (as ordered).
Make sure any spare parts or accessories are not discarded with the
packing material. Do not return any equipment to the factory without
first contacting Sierra Customer Service.

Technical Assistance

If you encounter a problem with your transducer, review the
configuration information for each step of the installation, operation
and set up procedures as explained in this manual. Verify that your
settings and adjustments are consistent with factory
recommendations. Refer to Chapter 5, Troubleshooting, for specific
information and recommendations.

If the problem persists after following the troubleshooting procedures
outlined in Chapter 5, contact Sierra Instruments by fax or by E-mail
(see inside front cover). For urgent phone support you may call (800)
866-0200 or [phone] between 8:00 a.m. and 5:00 p.m. PST.
In Europe contact Sierra Instruments BV at [phone]. When
contacting Technical Support, make sure to include this information:

The flow range, serial number, Sierra order number and

model number (all marked on the transducer nameplate)

The problem you are encountering and any corrective action

taken

Application information (gas, pressure, temperature, pipe

and fitting configuration)

IM-81 1-3

Chapter 1 Introduction Series 810 Instruction Manual

The 810 Mass -Trak Flow Sensing Principle

The operating principle of Mass-Trak transducers is based on heat
transfer and the first law of thermodynamics. During operation
process gas enters the instrument's flow body, where it encounters
the laminar flow bypass. The laminar flow bypass generates a
pressure drop, P1~P2, forcing a small fraction of the total flow to
pass through the sensor tube (m1). The remainder of the flow
continues through the body (m2). (Figure 1-2)

Figure 1-2. Flow Paths through the Transducer

Two resistance temperature detector (RTD) coils around the sensor
tube direct a constant amount of heat (H) into the gas stream. In
actual operation, the gas mass flow carries heat from the upstream
coil to the downstream coil. The resulting temperature difference
(OT) is detected by the RTD coils and gives the output signal. Since
the molecules of the gas carry away the heat, the output signal is
linearly proportional to gas mass flow. (Figure 1-3)

Figure 1-3. Flow Measuring Principle

Figure 1-3 shows the mass flow through the sensor tube as
inversely proportional to the temperature difference of the coils.

1-4 IM-81

Series 810 Instruction Manual Chapter 1 Introduction

Figure 1-4. Sensor Temperature Distribution

The RTD coils are legs of a bridge circuit with an output voltage in
direct proportion to the difference in the coils' resistance; the result is
the temperature difference (OT), Figure 1-4. Two other parameters,
heat input (H) and coefficient of specific heat (Cp) are both constant.
The resulting output is nearly linear over the transducer's normal
operating range (Figure 1-5).

Figure 1-5. Linear Range of the Transducer's Output Signal

For mass flow

controllers

, once the gas flows through the
monitoring section, it is then controlled by the built-in servo-control
valve. All models of the Mass-Trak utilize Sierra's proprietary high­efficiency Fast-Trak Electromagnetic Valve. The normally closed
Fast-Trak valve is similar to an on/off solenoid valve, except that the
current to the valve coil, and hence the magnetic field, is modulated
so that the ferromagnetic valve armature, or valve plug, assumes the
exact height above the valve's orifice required to maintain the
valve's command flow. The result is nearly infinite resolution.

IM-81 1-5

Series 810 Instruction Manual Chapter 2 Installation

Chapter 2 Installation

Installation Overview

Mass-Trak- transducers are supplied with female NPT, compression,
VCO, or VCR process connections. To ensure a successful installation,
inlet and outlet tubing should be in a clean state prior to plumbing the
transducer into the system. The shipping caps covering the inlet/outlet
fittings should not be removed until immediately prior to installation.

Before Beginning the Installation

Before installing the transducer, verify the following:

1. Ensure that the installation site conforms to the specific operating

parameters recorded on the transducer's nameplate.

This is critical as
each transducer is factory-configured for a specific gas and flow range,
pressure differential, temperature range and mounting orientation. The
line pressure should not exceed the upper limit for the model in hand:
150 psig (Models 810M, 810C), 500 psig (Model 810S-M) or 1000
psig (Model 810S-L). The temperature should not exceed 122°F
(50°C).

2. Double-check to be sure that the transducer o-ring material is compatible

with the gas to be measured.

3. If the gas contains any particulate matter, install an in-line filter

upstream of the transducer. Recommended filter size: 15 micron for
flows of 10 to 30 slpm, 30 micron for flows above 30 slpm.

4. Do not locate the transducer in areas subject to sudden temperature

changes, excessive moisture, and frequent drafts or near equipment
radiating significant amounts of heat. Be sure to allow adequate space
for cable connectors and wiring.

5. Ensure the installation location provides a minimum of two inches of

straight pipe upstream and downstream from the process connections.

6. For controllers, use a properly sized pressure regulator and verify that

the controller orifice size is the smallest in the system. There can be no
restrictions (such as valves, tubing or pipe internal diameters, reducers,
etc.) upstream or downstream of the controller with a dimension that is
less than the valve orifice diameter.

7. Output Signals: The Mass-Trak has 0-5 VDC (0-10 VDC optional) and
4-20 mA output signals that are linearly proportional to the gas mass
flow rate. The instrument was calibrated using either voltage or current
output as specified on the data tag. Note that there may be a slight
difference between the voltage and the current output signals (up to

IM-81 2-1

Chapter 2 Installation Series 810 Instruction Manual

Caution!

Only qualified

personnel should

install the transducer.

1 %). Using the output that is recorded on the data tag will optimize
instrument performance.

8. Integral Display: The 3 1/2 digit LCD display reads directly in

engineering units or percent of full scale. The full-scale range and gas
are shown on the instrument data tag. The decimal point for the flow
rate is set at the factory and will show automatically (e.g., "5.54"
SLM or "76.4" %).

9. Over range conditions are indicated by the display and/or output going

to a high level, approximately 150% of the full-scale range. After the
over-range condition has been removed, it may take several minutes for
the Mass-Trak to recover and resume normal operation.

10. The transducer has stringent power supply requirements. Because the
valve on flow controllers is operated in a control loop, power supply
variations cannot be tolerated. See Appendix B for a complete listing of
power requirements.

Installing the Transducer-Plumbing

Follow the installation instructions that are applicable to your
transducer's process connection. Before use, all plumbing should be
checked carefully for leaks and the transducer should be purged with
dry nitrogen. Ensure that the tubing is free from burrs, or sharp rims
that may result from cutting.

CAUTION: All instruments are leak-tested prior to shipping. To
check your installation, test the fittings only. Do not use liquid leak
detectors such as Snoop® to search for leaks inside or outside the
Mass-Trak. Instead, monitor pressure decay.

Compression Fittings

1. Position the transducer with the flow
direction arrow pointing in the direction of
flow.

2. Verify the position of the front and back

ferrule as shown above. Insert the tubing into the fitting. Be sure
that the tubing rests firmly on the shoulder of the fitting and that the
nut is finger-tight. Scribe the nut at the six o'clock position.

3. While holding the fitting body steady with a backup wrench , tighten

the nut 1-1/4 turns, watching the scribe mark make one complete
revolution and continue to the nine o'clock position. For 1/16-inch,
1/8-inch and 3/16-inch (2, 3 and 4 mm) sizes, tighten only 3/4 turns
from finger-tight. Do not over-tighten!

2-2 IM-81

Series 810 Instruction Manual Chapter 2 Installation

4. Check the system's entire flow path thoroughly for leaks. (Do not
use liquid leak detectors. Instead, monitor pressure decay.

Exposing the transducer to leak detector fluid may damage the unit.)

VCO Fittings

1. Position the transducer with the flow direction arrow pointing in the

direction of flow.

2. Tighten the nut finger-tight, and then 1/4 turn tighter with a wrench.

Do not over-tighten!

3. Check the system's entire flow path thoroughly for leaks. (Do not

use liquid leak detectors. Instead, monitor pressure decay. Exposing the
transducer to leak detector fluid may damage the unit.)

VCR Fittings

1. Position the transducer with the flow direction arrow pointing in the

direction of flow.

2. Install new washers that are compatible with the gas to be used.

3. Tighten the nut finger-tight, and then 1/4 turn tighter with a wrench. Do

not over-tighten!

4. Check the system's entire flow path thoroughly for leaks. (Do not

use liquid leak detectors. Instead, monitor pressure decay. Exposing the
transducer to leak detector fluid may damage the unit.)

1/4 inch Female NPT

(standard on nylon flow bodies

)

1. Position the transducer with the flow direction arrow pointing in the

direction of flow.

2. Use a good quality paste pipe thread sealant. Apply to the inlet and

outlet fittings.

3. Tighten the fittings by hand. Then, tighten no more than 1 turn.

Caution! Do not over-tighten. Damage to the instrument may result from
over-tightening fittings.

IM-81 2-3

Chapter 2 Installation Series 810 Instruction Manual

IMPORTANT—Straight-run requirement (critical for nylon
flow body instruments

)

Install a section of straight pipe at least five pipe diameters in length
upstream of the transducer. DO NOT use reducers. In the case of a
flow meter, at least two pipe diameters downstream are required for
optimum performance. In the case of a flow controller, there can be
no restrictions (such as valves, tubing or pipe internal diameters,
reducers, etc.) upstream or downstream of the MFC with a
dimension that is less than the valve orifice diameter. Failure to
comply with this requirement will result in severely impaired
performance and possible oscillations in flow controllers. Refer to
Table 2-1 below for minimum restriction diameters upstream or
downstream of the flow controller.

Flow Ranges

Relative to N2

Valve Orifice Diameter

(Typical-in inches)

0-10 to 0-2000 SCCM

0.020

0-2 to 0-11 SLM

0.040

0-11 to 0-22 SLM

0.055

0-15 to 0-28 SLM

0.063

0-20 to 0-50 SLM

0.073

0-51 to 0-73 SLM

0.094

0-61 to 0-100 SLM

0.110

Table 2-1 Typical Minimum Restriction Diameters (Under Standard

Pressure Conditions of 30 PSIG Inlet and Ambient Outlet)

Installing the Transducer—Mechanical Mounting

Please refer to Appendix B for mechanical mounting instructions.

Installing the Transducer—Electrical Connections

Caution!

The transducer is not a
loop-powered device!
Do NOT apply power to
the 4-20 mA output or
input connections.

The Mass-Trak transducers require a 24VDC power supply. If you are
using the Power-Pak power supply, connect it to the 15-pin "D" connector
on the side of the transducer. If you are supplying your own power source,
it must be a regulated 24 VDC with ripple not to exceed 100 mV peak to­peak and capable of producing at least 340 mA (8 watts).

Mass-Trak is provided with a 15-pin "D" connector located on the side of
the enclosure. The pin numbers and assignments for the Mass-Trak "D"
connector are shown in Figure 2-2. The connections for input power,
output signal and input signal (controllers only) are supplied via the "D"
connector. Additional pin assignments can be found in Appendix C.

2-4 IM-81