Pfeiffer Vacuum PCR 280 Operating Instructions Manual

OPERATING INSTRUCTIONS

Translation of the original instructi ons

PCR 280

Compact Pirani Capacitance Gauge

5181 BEN / B (2017-01)

Product Identification

In all communications with Pfeiffer Vacuum, please specif y the
information given on the product nameplate. For convenient
reference copy that information into the space provided below.

Validity

This document applies to products with part numbers

PT R26 855
PT R26 856

The part number (No) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this

document correspond to gauges with the vacuum connection
DN 16 ISO-KF. They apply to gauges with the other vacuum
connection by analogy.

We reserve the right to make technical changes without prior
notice.

2

(DN 16 ISO-KF)
(DN 16 CF-F)

BG 5181 BEN / B (2017-01)

Intended Use

The Compact Pirani Capacitance Gauge PCR 280 has been
designed for vacuum measurement of gases in the pressure
range of 5×10-5 … 1500 hPa.

It must not be used for measuring flammable or combustible
gases in mixtures containing oxidants (e.g. atmospheric oxygen)
within the explosion range.

Functional Principle

The PCR gauge is a combination gauge consisting of a Pirani
sensor and a diaphragm capacitive sensor. Both sensors are
constantly active.

At low pressures, only the signal of the Pirani sensor is used for
pressure measurement; at high pressures, only the signal of the
diaphragm capacitive sensor. To determine the output signal in
the intermediate range, both signals are used proportionally to
the pressure.

Patents

EP 0689669 B1, 0689670 B1, 0658755 B1
US Patents 5608168, 4031997, 5583297

Scope of Delivery

1× gauge in clean room packaging
1× pin for adjusting settings via buttons
1× Operating Instructions English
1× Operating Instructions German
1× Operating Instructions French

BG 5181 BEN / B (2017-01)

3

Contents

Product Identification 2
Validity 2
Intended Use 3
Functional Principle 3
Patents 3
Scope of Delivery 3

1 Safety 5

1.1 Symbols Used 5

1.2 Personnel Qualifications 5

1.3 General Safety Instructions 6

1.4 Liability and Warranty 6

2 Technical Data 7

2.1 Output Signal vs. Pressure 11

2.2 Gas Type Dependence 12

3 Installation 13

3.1 Vacuum Connection 13

3.2 Power Connection 16

4 Operation 18

4.1 Light-emitting diode (LED) 18

4.2 Gas Type Dependence 19

5 Deinstallation 20

6 Maintenance, Repair 22

6.1 Adjusting the Gauge 22

6.2 Troubleshooting 23

7 Returning the Product 24

8 Disposal 25

Conversion Table 26

ETL Certification 26

EU Declaration of Conformit y 27

For cross-references within this document, the symbol (→  XY)
is used.

4

BG 5181 BEN / B (2017-01)

1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environ­mental damage.

Caution

Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.

Notice

<…> Labeling

1.2 Personnel Qualifications

Skilled personnel

All work described in this document may only be carried out by
persons who have suitable technical training and the neces­sary experience or who have been instructed by the end-user
of the product.

BG 5181 BEN / B (2017-01)

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1.3 General Safety Instructions

• Adhere to the applicable regulations and take the necessary

precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process

media due to the heat generated by the product.

• Adhere to the applicable regulations and take the necessary

precautions for all work you are going to do and consider the
safety instructions in this document.

• Before beginning to work, find out whether any vacuum com-

ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin­ated parts.

Communicate the safety instructions to all other users.

1.4 Liability and Warranty

Pfeiffer Vacuum assumes no liability and the warranty becomes
null and void if the end-user or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of interventions (modifications, alterations etc.)

on the product

• use the product with accessories not listed in the product

documentation.

The end-user assumes the responsibility in conjunction with the
process media used.

Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. filament) are not covered by the warranty.

6

BG 5181 BEN / B (2017-01)

2 Technical Data

Measurement range 5×10-5 … 1500 hPa
Measurement principle

10 hPa … 1500 hPa

1 … 10 hPa crossover range
5×10-5 … 1 hPa thermal conductance acc. to

Accuracy (N2)

5×10-4 … 1×10-3 hPa

1×10-3 … 100 hPa

100 … 950 hPa

950 … 1050 hPa

Repeatability (N2)

1×10-3 … 1100 hPa

Output signal (measurement signal)

Voltage range 0 … +8.68 V
Measurement range +1.2 … +8.68 V
Error signal 0 V (default)
Voltage vs. pressure 1 V/decade, logarithmic

Output impedance

Load impedance

Response time

Gauge identification

HV adjustment at <10-5 hPa
ATM adjustment at >100 hPa

diaphragm capacitive
sensor

Pirani

±50% of reading
±15% of reading
±5% of reading
±2.5% of reading

±2% of reading

2 × 4.7 Ω, short circuit-proof
>10 kΩ
<30 ms

3.01 kΩ

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7

Supply

DANGER

The gauge may only be connected to power sup­plies, instruments, or control devices that conform
to the requirements of a grounded protective extra­low voltage (PELV) and limited power source
(LPS), Class 2. The connection to the gauge has to

Supply voltage

be fused.

Class 2 / LPS

at the gauge

+15 … +30 VDC

Ripple ≤1 Vpp

Power consumption ≤2.5 W
Fuse to be connected 1 AT

Electrical connection Hirschmann GO 6 UM,

6-pin, male

Tightening torque ≤0.2 Nm

Sensor cable shielded

0.14 mm2/conductor

Cable length ≤100 m

Grounding concept

Vacuum connection to
signal common

Materials exposed to vacuum

Vacuum connection
Filament
Feedthrough
Orifice
Diaphragm
Further materials

→ "Power Connection"

connected via 10 kΩ

stainless steel 1.4435
W
glass
stainless steel
ceramic
Ni, NiFe, stainless steel

1.4301, SnAg

8

BG 5181 BEN / B (2017-01)

Internal volume

DN 16 ISO-KF
DN 16 CF-F

4.7 cm
8 cm3

3

Permissible pressure (absolute) ≤500 kPa
Bursting pressure (absolute) 1000 kPa

Permissible temperatures

Operation
Vacuum connection
Filament
Storage

Relative humidity

Year's mean
During 60 days

1)

+10 °C … +50 °C
≤80 °C
<160 °C
–20 °C … +65 °C

≤65% (no condensation)
≤85% (no condensation)

Mounting orientation any
Use indoors only, altitude up to

2000 m NN

Degree of protection IP 40

Weight <120 g

1)

For horizontal mounting orientation only. During bakeout, meas-

urement range, accuracy, and repeatability may deviate from
specifications.

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9

Dimensions [mm]

45

30 22.5

10

14.5

DN 16 ISO-KF

79.5 20

30.9

DN 16 CF-F

16.5

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2.1 Output Signal vs. Pressure

Pressure p

1E+05

1E+04

1E+03

1E+02

1E+01

1E+00

Error

1E–01

Underrange

1E–02

1E–03

1E–04

1E–05

0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5

2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0

1.2

p = 10

Output signal U [V]

(U-c)

⇔

U = c + log10 p

valid in the range 5×10-5 hPa <p< 1500 hPa

U p c U p c

[V] [hPa] 5.5 [V] [ micron] 2.625
[V] [µbar] 2.5 [V] [Pa] 3.5

[V] [Torr] 5.625 [V] [kPa] 6.5
[V] [mTorr] 2.625

where p pressure

U output signal
c constant (pressure unit dependent)

Pa

hPa

Torr

Overrange

8.68

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11

2.2 Gas Type Dependence

Indicated pressure (gauge calibrated for air)

p [hPa]

4

2

3

10

8
6

4

2

2

10

8
6

4

2

1

10

8
6

4

2

0

10

8
6

4

2

–1

10

8
6

4

2

–2

10

8
6

4

2

–3

10

8
6

4

2

–4

10

–4

–3

246

10

246

10

Calibration factors

valid for Pirani pressure range below 1 hPa

p

= C × indicated pressure

Gas type Calibration

He
Ne

Ar
Kr

Xe

eff

factor C

0.8

1.4

1.7

2.4

3.0

12

Pirani

sensor

–2

–1

246 246

10

10

Gas type Calibration

H2

Capacitive

Crossover

diaphragm

range

sensor

Air, O2, CO, N
He
Ar

0

1

246

CO2

Freon 12

246

10

10

air, O2, CO, N2

water vapor

BG 5181 BEN / B (2017-01)

2

10

2

246

p

eff

factor C

0.5

1.0

0.9

0.5

0.7

3

10

[hPa]

2

3 Installation

WARNING

WARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and

3.1 Vacuum Connection

impacts.

DANGER

DANGER: overpressure in the vacuum system
>100 kPa

Injury caused by released parts and harm caused
by escaping process gases can result if clamps are
opened while the vacuum system is pressurized.

Do not open any clamps while the vacuum system
is pressurized. Use the type clamps which are
suited to overpressure.

DANGER

DANGER: overpressure in the vacuum system
>250 kPa

KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Process
media can thus leak and possibly damage your
health.

Use O-rings provided with an outer centering ring.

BG 5181 BEN / B (2017-01)

13

DANGER

DANGER: protective ground
Products that are not correctly connected to ground

can be extremely hazardous in the event of a fault.
Electrically connect the gauge to the grounded

vacuum chamber. This connection must conform to
the requirements of a protective connection ac­cording to EN 61010:

• CF flanges fulfill this requirement.

• For gauges with a KF flange, use a conductive

metallic clamping ring.

Caution

Caution: vacuum component
Dirt and damages impair the function of the vac-

uum component.
When handling vacuum components, take appro-

priate measures to ensure cleanliness and prevent
damages.

Caution

Caution: dirt sensitive area
Touching the product or parts thereof with bare

hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean

tools when working in this area.

14

BG 5181 BEN / B (2017-01)

Mount the gauge so that no vibrations occur. The gauge

may be mounted in any orientation. To keep conden­sates and particles from getting into the measuring
chamber preferably choose a horizontal to upright posi­tion and consider using a seal with centering ring and
filter. If adjustment should be possible after the gauge
has been installed, be sure to install it so that the but­tons can be accessed with a pin.

Remove the protective lid and connect the product to the
vacuum system.

Seal with centering ring

Clamp

Keep the protective lid.

BG 5181 BEN / B (2017-01)

or

Protective lid

Seal with centering
ring and filter

15

3.2 Power Connection

Make sure the vacuum connection is properly made

(→  13).

DANGER

The gauge may only be connected to power sup­plies, instruments or control devices that conform
to the requirements of a grounded protective extra­low voltage (PELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
be fused.

Ground loops, differences of potential, or EMC problems

may affect the measurement signal. For optimum signal
quality, please do observe the following notes:

• Connect the cable shield to ground on one side via

the connector housing. Do not connect the other side
of the shield.

• Connect the supply common with protective ground

directly at the power supply.

• Use differential measurement input (signal common

and supply common conducted separately).

• Potential difference between supply common and

housing ≤18 V (overvoltage protection).

16

BG 5181 BEN / B (2017-01)

If no sensor cable is available, make one according to the
following diagram. Connect the sensor cable.

Electrical connection

Pin 1 Gauge identification
Pin 2 Measurement signal
Pin 3 Signal common
Pin 4 Supply
Pin 5 Supply common (GND)
Pin 6 Screen

BG 5181 BEN / B (2017-01)

2

3 1

64

5

Hirschmann GO 6

6-pin

soldering side

Female cable connector
(tightening torque ≤0.2 Nm)

17

4 Operation

When the supply voltage is applied, the measurement signal is
available at the connector (→ "Power Connection").

Allow a stabilization period of at least 10 minutes. It is advisable
to operate the gauge continuously, irrespective of the pressure.

The gauge is factory calibrated. Due to long time operation or
contamination, a zero drift could occur. Periodically check the
zero and adjust it if necessary (adjusting the gauge →  22).

4.1 Light-emitting diode (LED)

For factory setting only

ST

Status

ADJ

LED State Meaning

<ST> off no supply voltage

lit green measurement mode
lit solid or is

blinking red

error (→  23)

18

BG 5181 BEN / B (2017-01)

4.2 Gas Type Dependence

Pressure range Measurement

principle

10 … 1500 hPa

1 … 10 hPa

diaphragm
capacitive sensor

diaphragm
capacitive sensor
and Pirani sensor

5×10-5 … 1 hPa Pirani sensor proportional to

Gas type dependence

independent of gas
type, no correction
required

crossover range

)

2

pressure

2)

The pressure reading applies to dry air, O2, CO and N2. For other

gases, it has to be converted (calibration factors (→  12).

BG 5181 BEN / B (2017-01)

19

5 Deinstallation

WARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks and

impacts.

DANGER: contaminated parts
Contaminated parts can be detrimental to health

and environment.
Before beginning to work, find out whether any

parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

WARNING

DANGER

Caution

Caution: vacuum component
Dirt and damages impair the function of the vac-

uum component.
When handling vacuum components, take appro-

priate measures to ensure cleanliness and prevent
damages.

BG 5181 BEN / B (2017-01)

20

Caution

Caution: dirt sensitive area
Touching the product or parts thereof with bare

hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean







tools when working in this area.

Vent the vacuum system.

Put the gauge out of operation.

Untighten the fastening screw and disconnect the sensor

cable.

Remove gauge from the vacuum system and install the

protective lid.

Protective lid

BG 5181 BEN / B (2017-01)

21

6 Maintenance, Repair

Gauge failures due to contamination and wear and tear,

as well as expendable parts (e.g. filament), are not
covered by the warranty.

Pfeiffer Vacuum assumes no liability and the warranty becomes
null and void if any repair work is carried out by the end-user or
third parties.

6.1 Adjusting the Gauge

The gauge is factory calibrated. Due to long time operation or
contamination, a zero drift could occur. Periodically check the
zero and adjust it if necessary.

For adjusting the zero, operate the gauge under the same con­stant ambient conditions and in the same mounting orientation
as normally.

The gauge is adjusted to default values. However, it can also be
adjusted to other pressure values, if the exact pressure value is
known (reference measurement).



If you are using a seal with centering ring and filter, check

that they are clean or replace them if necessary
(→ "Deinstallation").



Put the gauge into operation and operate it at atmospheric

pressure for at least 10 minutes.



Briefly press the <ADJ> button with a pin (max. ø1.1 mm)

and the ATM adjustment is carried out: The Pirani sensor is
adjusted to 1000 hPa by default.

22

BG 5181 BEN / B (2017-01)



Evacuate the vacuum system to p << 10-5 hPa and wait at

least 2 minutes.



Press the <ADJ> button with a pin and the HV adjustment

is carried out: The gauge is adjusted to 5×10-5 hPa
(default).

If the pressure value 4.99×10-5 hPa is output at the mea-

surement value output or on the LCD display, the adjust­ment has been successful. Otherwise, repeat the adjust­ment procedure.

The adjustment of the diaphragm capacitive sensor is

carried out automatically by the gauge itself, whenever
the gauge is in operation for at least 15 minutes at pres­sures <1×10-2 hPa.

6.2 Troubleshooting

In case of an error, it may be helpful to just turn off the

mains supply and turn it on again after 5 s.

ATM

HV

BG 5181 BEN / B (2017-01)

23

Problem Possible cause Correction

Output signal per­manently ≈0V

No supply voltage Turn on the power supply

<ST> lit solid red Gauge in an undefined status Turn the gauge off and on

Pirani sensor defective Replace the gauge

Diaphragm sensor defective

<ST> is blinking red EEPROM error Turn the gauge off and on

Replace the gauge

Sensor cable defective or not
correctly connected

Check the sensor cable

again after 5 s (reset)

again after 5 s (reset)

7 Returning the Product

WARNING

WARNING: forwarding contaminated products
Contaminated products (e.g. radioactive, toxic,

caustic or microbiological hazard) can be detrimen­tal to health and environment.

Products returned to Pfeiffer Vacuum should pref­erably be free of harmful substances. Adhere to the
forwarding regulations of all involved countries and
forwarding companies and enclose a duly com-

*)

Form under www.pfeiffer-vacuum.com

Products that are not clearly declared as "free of harmful sub­stances" are decontaminated at the expense of the customer.

Products not accompanied by a duly completed declaration of
contamination are returned to the sender at his own expense.

pleted declaration of contamination *).

24

BG 5181 BEN / B (2017-01)

8 Disposal

DANGER

DANGER: contaminated parts
Contaminated parts can be detrimental to health

and environment.
Before beginning to work, find out whether any

parts are contaminated. Adhere to the relevant re­gulations and take the necessary precautions when

Separating the components

After disassembling the product, separate its components ac­cording to the following criteria:

• Contaminated components

• Other components

handling contaminated parts.

WARNING

WARNING: substances detrimental to the environ­ment

Products or parts thereof (mechanical and electric
components, operating fluids etc.) can be detrimen­tal to the environment.

Dispose of such substances in accordance with the
relevant local regulations.

Contaminated components (radioactive, toxic, caustic or bio­logical hazard etc.) must be decontaminated in accordance
with the relevant national regulations, separated according to
their materials, and disposed of.

Such components must be separated according to their ma­terials and recycled.

BG 5181 BEN / B (2017-01)

25

-

3

-

5

-

3

-

3

-

3

Conversion Table

mbar

bar

Pa
hPa
kPa
Torr

mm HG

mbar bar Pa hPa kPa Torr

1 1×10

1×103 1 1×105 1×103 100 750

0.01 1×10

1 1×10

10 0.01 1×103 10 1 7.5

1.332 1.332×10-3 133.32 1.3332 0.1332 1

ETL Certification

RECOGNIZED
COMPONENT

3103457

ETL LISTED

The product PCR 280

• conforms to the UL Standard UL 61010-1

• is certified to the CAN/CSA Standard

100 1 0.1 0.75

1 0.01 1×10

100 1 0.1 0.75

1 Pa = 1 N/m2

7.5×10

C22.2 No. 61010-1-12

mm HG

26

BG 5181 BEN / B (2017-01)

EU Declaration of Conformity

We, Pfeiffer Vacuum, hereby declare that the equipment
mentioned below complies with the provisions of the Directive
relating to electromagnetic compatibility 2014/30/EU and the
Directive on the restriction of the use of certain hazardous
substances in electrical and electronic equipment 2011/65/EU.

Compact Pirani Capacitance Gauge

PCR 280

Standards

Harmonized and international / national standards and specifi­cations:

• EN 61000-6-2:2005

• EN 61000-6-3:2007 + A1:2011

• EN 61010-1:2010

measurement, control and laboratory use)

• EN 61326-1:2013

measurement, control and laboratory use)

Manufacturer / Signatures

Pfeiffer Vacuum GmbH, Berliner Straße 43, D-35614 Asslar

12 April 2016

(EMC: generic immunity standard)

(EMC: generic emission standard)

(Safety requirements for electrical equipment for

(EMC requirements for electrical equipment for

Dr. Ulrich von Hülsen
Managing director

BG 5181 BEN / B (2017-01)

27

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technological perfection, competent advice and reliable service.

COMPLETE RANGE OF PRODUCTS

From a single component to complex systems:
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We can support you with your plant layout and provide first-class on-site-service worldwide.

Pfeiffer Vacuum GmbH

Headquarters ● Germany
Tel.: [phone]
[e-mail]

Are you looking for a
perfect vacuum solution?
Please contact us

www.pfeiffer-vacuum.com

bg5181b en/ b