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Translation of the original instructions
HiPace 80
Turbopump
Operating Instructions
PT 0208 BEN/D (1010)
EN
Table of contents
Table of contents
1 |
About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
3 |
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1.1 |
Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
3 |
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1.2 |
Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
3 |
2 |
Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
5 |
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2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 2.2 Protective equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 2.3 Proper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 2.4 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3 |
Transport and storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
8 |
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3.1 |
Transport . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
8 |
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3.2 |
Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
8 |
4 |
Product description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
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4.1 Product identification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 4.2 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 4.3 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .10
5 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11
5.1 Set-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11 5.2 Preparatory work. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11 5.3 Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11 5.4 Connections to the turbopump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .15
6 |
Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
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6.1 |
Commissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
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6.2 |
Operation modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
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6.3 |
Function description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
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6.4 |
Monitoring of the operation conditions. . . . . . . . . . . . . . . . . . . . . . . . . . . |
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6.5 |
Switching off and venting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
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7 |
Maintenance / replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
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7.1 |
Maintenance intervals and responsibilities . . . . . . . . . . . . . . . . . . . . . . . . |
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7.2 |
Replacing the operating fluid reservoir . . . . . . . . . . . . . . . . . . . . . . . . . . . |
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7.3 |
Replacing the electronic drive unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
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8 |
Decommissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
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8.1 |
Shutting down for longer periods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
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8.2 |
Re-starting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
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8.3 |
Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
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9 |
Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
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9.1 Rectifying malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . |
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10 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30 11 Spare parts HiPace 80 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31 12 Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32 13 Technical data and dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
13.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34 13 Technical data and dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34 13.3 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
Declaration of conformity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
2
About this manual
1About this manual
1.1 Validity
Applicable documents
This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning of the designated product and provides the most important information for safe use of the unit. The description follows applicable EU guidelines. All information provided in this operating manual refer to the current state of the product's development. The documentation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from
www.pfeiffer-vacuum.net.
HiPace 80 |
Operating instructions |
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Operating instructions "Electronic drive unit TC 110" |
PT 0204 BN* |
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Declaration of conformity |
Part of this document |
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*also available via www.pfeiffer-vacuum.net |
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For information about other certifications, if applicable, please see the signet on the product or:
•www.tuvdotcom.com
•TUVdotCOM-ID 0000021320
1.2 Conventions
Safety instructions The safety instructions in Pfeiffer Vacuum operating manuals are the result of risk evaluations and hazard analyses and are oriented on international certification standards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this document, the following hazard levels and information are considered:
DANGER
Immediate danger
Death or very severe injuries can occur.
WARNING
Possible danger
Injuries or severe property damages can occur.
CAUTION
Possible danger
Injuries or property damages can occur.
NOTE
Command or note
Command to perform an action or information about properties, the disregarding of which may result in damage to the product.
3
About this manual
Pictograph definitions
Instructions in the text
Abbreviations used
Symbols used
4
Prohibition of an action or activity in connection with a source of danger, the disregarding of which may result in serious accidents.
Warning of a displayed source of danger in connection with operation of the unit or equipment.
Command to perform an action or task associated with a source of danger, the disregarding of which may result in serious accidents.
Work instruction: here you have to do something.
DCU: Display and operating unit
HPU: Handheld programming unit
TC: Electronic drive unit for turbopump
TPS: Mains pack
The following symbols are used consistently throughout the diagrams:
H High vacuum flange
VV Fore-vacuum flange
Electric connection
Cooling water connection
F Venting connection
SG Sealing gas connection
Safety
2Safety
2.1 Safety precautions
NOTE
Duty to inform
Each person involved in the installation, operation or maintenance of the vacuum pump must read and observe the safety-related parts of these operating instructions.
The operator is obligated to make operating personnel aware of dangers originating from the vacuum pump, the pumped medium and the entire system.
NOTE
Installation and operation of accessories
Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The installation, operation and maintenance of connected devices are described in detail in the operating instructions of the individual components.
For information on order numbers of components, see "Accessories".
Use original accessory parts only.
NOTE
Checking the safety system against excess rotation speed
To provide the functioning of the integrated safety system for avoiding excess rotation speed, the pump must run-up from the standstill at least once a year.
Switch off the pump and await the complete standstill (rotation speed = 0 Hz).
Run-up the pump according to this operating instructions.
WARNING
Danger - Electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.
Make sure that the system is integrated in an emergency off safety circuit.
Consult Pfeiffer Vacuum for special requirements.
WARNING
Danger of electric shock
In case of defect, the parts connected to the power supply are under voltage.
Always keep the mains connection freely accessible so you can disconnect it at any time.
•Do not expose any body parts to the vacuum.
•Observe all safety and accident prevention regulations.
•Regularly check the proper observance off all safety measures.
•Power supply: The turbopump power supply must apply to the requirements of double insulation between mains input voltage and operating voltage according to the regulations of IEC 61010 and IEC 60950. Therefore Pfeiffer Vacuum recommends to use exclusively original-power packs and -accessories. Only in this case Pfeiffer Vacuum is able to guarantee the compliance of the European and North American guidelines.
•A safe connection to the protective earthing conductor (PE) is recommended (protection class III).
•Do not loosen any plug connection during operations.
•Wait for the rotor to reach standstill before peforming work on the high vacuum flange.
5
Safety
•Keep leads and cables well away from hot surfaces (> 70 °C).
•Never fill or operate turbopump with cleaning agent.
•Do not operate the turbopump with open high vacuum flange.
•Do not carry out any unauthorized modifications or conversions to the pump.
•When returning the turbopump observe the shipping instructions.
2.2Protective equipment
kg
Determined situations concerning the handling of vacuum pumps require wearing of personal protective equipment. The owner, respectively the employer are obligated to provide adequate equipment to any operating persons.
DANGER
Danger to health by hazardous substances during maintenance or installation
Depending on the process vacuum pumps, components or operating fluids can be contaminated by toxic, reatcive or radioactive substances.
Wear adequate protective equipment during maintenance and repairs or in case of reinstallation.
WARNING
Risk of injury through falling objects
When transporting vacuum pumps by hand, there is a danger through loads slipping and falling down.
Carry small and mid-size vacuum pumps two-handed.
Carry vacuum pumps > 20 kg by a suitable lifting device.
Wear safety shoes with steel toe cap according to directive EN 347.
CAUTION
Risk of injury through hot surfaces
Vacuum pumps can become hot during operation.
Allow the pump to cool before maintenance and repairs.
If necessary wear protective gloves according to directive EN 420.
CAUTION
Risk of injury through sharp edges
Rotor and stator disks of turbopumps have very sharp edges.
Before any working wait for the complete standstill of the pump.
Do not reach in the high vacuum flange.
If necessary wear protective gloves according directive EN 420.
2.3 Proper use
NOTE
CE conformity
The manufacturer's declaration of conformity becomes invalid if the operator modifies the original product or installs additional components.
Following installation into a plant and before commissioning, the operator must check the entire system for compliance with the valid EU directives and reassess it accordingly.
•The vacuum pump may only be used to generate a vacuum.
•Only operate the turbopump with an approved backing pump.
6
Safety
2.4 Improper use
Improper use will cause all claims for liability and warranties to be forfeited. Improper use is deemed to be all use for purposes deviating from those mentioned above, especially:
•Pumping of corrosive or explosive media.
•Pumping of condensing vapors.
•Pumping of liquids.
•Pumping of dusts.
•Operation with improper high gas throughput.
•Operation with improper high fore-vacuum pressures.
•Operation with improper gas mode.
•Operation with improper high levels of insulated heat input.
•Venting with improper high venting rates.
•Use of the vacuum pump to generate pressure.
•The operation of the devices in potentially radioactive areas.
•Operation in potentially explosive areas.
•The operation of the devices in systems where the turbopumps are subjected to impact-like stress and vibrations or the effect of periodically occurring forces.
•The use of accessories, which are not named in this manual.
warranty seal |
NOTE |
Closure seal
The product is sealed at the factory. Damaging or removal of a closure seal leads to the loss of liability and warranty entitlements.
Do not open the product within its warranty period!
For process-related shorter maintenance intervals please contact the Pfeiffer Vacuum Service.
7
Transport and storage
3Transport and storage
3.1 Transport
Reuse the transport container. Vacuum pumps should be transported or shipped in the original packing only.
Only remove the protective covers from the high vacuum and the fore-vacuum side immediately before connection.
Keep the original protective covers.
Always transport the turbopump in an upright position.
3.2 Storage
Close the flange openings by using the original protective covers.
Close further connection ports by using the corresponding protective covers.
Store the pump only indoors at temperatures between -25 °C and +55 °C.
In rooms with moist or aggressive atmospheres, the pump must be airproof shrink-wrapped in a plastic bag together with a bag of desiccant.
8
Product description
4Product description
4.1 Product identification
Pump types |
The product designations of Pfeiffer vacuum turbomolecular pumps are self-ex- |
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planatory and permit conclusions about the different versions. The product desig- |
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nation consists of a family designation (1), the size (2), which is oriented on the |
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pumping speed, and if applicable the additional properties (3) of the pump. |
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HiPace(1) 80(2) (3) |
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1. Family designation |
2. Model designation |
3. Property designation |
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HiPace |
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80 = Model designation of |
none = Standard version |
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the pump related to its |
U = Upside-down installation orientation |
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pumping speed class |
C = Corrosive gas version |
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P = Process |
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M = Active magnetic bearing |
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T = Temperature management system |
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Pump features |
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Characteristics |
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HiPace 80 |
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HV flange |
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DN 63 ISO-K |
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DN 63 CF |
DN 40 ISO-KF |
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Flange material |
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Aluminium |
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Stainless steel |
Aluminium |
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To correctly identify the product when communicating with Pfeiffer Vacuum, al- |
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ways have the information from the rating plate available. |
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D-35614 Asslar |
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Mod.: HiPace 300 |
Oil: |
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DN 100 ISO-K, 3P |
S(N2): 260 l/s |
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n,f: |
60000 1/min, 1000 Hz |
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Mod.-No.: PM P03 900 |
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Mass: 6.7 kg |
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Ser. No.: |
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Made in Germany 2007/07 |
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Fig. 1: Example for a rating plate |
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Scope of delivery |
• HiPace 80 with TC 110 and 24 VDC ± 5 % |
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•Protective cover for the high vacuum and the fore-vacuum flange
•Operating instructions
4.2 Function
The turbopump HiPace 80 forms a complete unit together with the electronic drive unit TC 110. For the voltage supply only Pfeiffer Vacuum power supplies may be used (e.g.TPS or DCU).
9
Product description
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9 |
Electronic drive unit |
H |
200 |
Pump housing |
215 |
Pump lower part |
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9 |
235 |
Fore-vacuum flange |
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250 |
Venting connection |
200 |
320 |
Anti-vibration buffer |
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X3 |
Multi-functional con- |
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nection |
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X3 |
F |
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250 |
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235 |
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320 |
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Fig. 2: |
View of HiPace 80 with TC 110 |
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Cooling |
• |
Convection cooling |
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• |
Air cooling (optional) |
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Water cooling (optional) |
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In the case of excess temperature the electronic drive unit reduces the drive power |
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automatically. Depending on the application and the HiPace different cooling vari- |
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ants are selectable. |
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Rotor bearing |
Hybrid bearing TurboDrag pump |
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• High vacuum side: maintenance-free permanent magnetic bearing. |
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• Fore-vacuum side: ceramic ball bearing. |
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Drive |
Electronic drive unit TC 110 |
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4.3 Range of application
The pump HiPace 80 must be installed and operated under the following ambient conditions:
Installation location |
weather protected (indoors) |
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Protection category |
IP 54 |
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Protection class |
III |
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Temperature |
+5 °C to +30 °C with convection cooling without gas throughput |
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+5 °C to +35 °C with air cooling |
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+5 °C to +40 °C with water cooling |
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Relative humidity |
max. 80 %, at T ≤ 31 °C, up to max. 50% at T ≤ 40 °C |
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Atmospheric pressure |
77 kPa - 106 kPa |
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Installation altitude |
2000 m max. |
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Degree of pollution |
2 |
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Permissible surr. magnetic |
≤3 mT |
field |
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Overvoltage category |
II |
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Connection voltage TC |
24 VDC ±5% |
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10
Installation
5Installation
DANGER
Danger from the turbopump being torn-off
In case of sudden blocking of the rotor, torques of up to 620 Nm can occur, which can lead with incorrect attachment to tearing the turbopump off. The energy released thereby can hurl the entire pump or fragments from their inside around the area. This can cause severest injuries (possibly resulting in death) and large property damage.
Precisely follow installation instructions.
Only use Pfeiffer Vacuum original components (accessories) for installation.
NOTE
Installation and operation of accessories
Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The installation, operation and maintenance of connected devices are described in detail in the operating instructions of the individual components.
For information on order numbers of components, see "Accessories".
Use original accessory parts only.
5.1 Set-up
When installing the pump, observe the following conditions:
•The ambient conditions specified for the area of use.
•When using a casing heating and a water cooling unit the temperature of the connected flange of the vacuum chamber must not exceed 120 °C.
•The pump may be fastened to the floor only after consultation with Pfeiffer Vacuum.
•It is not allowed to operate the device in systems where impact-like stresses and vibrations or periodically forces occur.
5.2Preparatory work
Ensure sufficient cooling for the turbopump.
Where magnetic fields > 3 mT are involved, a suitable shielding must be used. Check installation location and consult Pfeiffer Vacuum if needed!
The maximum permissible rotor temperature for the turbopump is 90 °C. If high temperatures arise for process reasons, the radiated heat input must not exceed 0.9 W. Install suitable screening sheets, if necessary (design information on request).
5.3 Assembly
•Ensure the greatest possible cleanliness when installing any high vacuum parts. Unclean components prolong the pump-down time.
•All flange components must be grease-free, dust-free and dry at installation.
•The operating fluid reservoir is already installed and filled for the turbopump HiPace 80.
Earthquake safety An earthquake can result in contact with the safety bearings. All forces occuring hereby are safely absorbed by the properly installed flange connections.
The vacuum chamber must be secured by the customer against shifting and tipping.
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Installation
Use of a splinter shield or protection screen
Vibration damper
Mounting orientation
SC |
Vacuum chamber |
SC |
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SC |
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SC |
SC = Safety Connection |
SC |
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Fig. 3: Example: How to secure against shifting and tipping by external tremors
The installation of a Pfeiffer Vacuum centering ring with splinter shield or protection screen in the high vacuum flange protects the turbopump against foreign bodies coming from the chamber. The volume flow rate is reduced.
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Reduced volume flow rate in % |
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H2 |
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He |
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N2 |
Ar |
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Splinter shield DN 40 |
6 |
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9 |
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17 |
18 |
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Splinter shield DN 63 |
3 |
|
6 |
|
15 |
16 |
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Protection screen DN 63 |
1 |
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1 |
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4 |
4 |
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DANGER
Danger from the turbopump and vibration dumper being torn-off
In case of sudden blocking of the rotor, an applied vibration dumper cannot compensate any of the occurring forces. There is a danger of the turbopump being torn-off and thereby resulting severest injuries and property damages. Applicable safeguards must be taken to compensate possible occurring torques.
Definetely consult with Pfeiffer Vacuum.
Do not exceed the max. permissible temperature at the vibration dumper (100° C).
When using dry backing pumps Pfeiffer Vacuum HiPace pumps are designed for installation in any orientation.
Support pipes in front of the vacuum pump or remove them. No force from the pipe system may be exerted on the fixed pump.
To avoid contamination via the fore-vacuum line when using oil-sealed backing pumps the fore-vacuum flange should always point vertically downward (± 25°).
VV |
25° max |
VV |
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Fig. 4: Recommended orientation of the fore-vacuum flange
The maximum axial loading capacity of the high vacuum flange is 200 N (equals 20 kg). A one-sided load on the high vacuum flange is not permitted.
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