We suggest that you read this
manual, particularly the chapter on
installation and operation, before
you start to use this pump so that
you can obtain optimum levels
of performance and complete
satisfaction from this equipment.
The performance and
operational safety of this
product are guaranteed provided
it is used normally in the
operating conditions defined in
this manual.
It is the customer’s task to:
- train operators to use the
product if they do not speak the
language the manual is written
in,
- ensure operators know the safe
practices to apply when using
the product.
ENIntroduction
EN – 1
This product complies with the requirements of European Directives. listed in
the Declaration of Conformity contained in page 56 of this manual.
Copyright/Intellectual property:
The use of adixen products are subject to copyright and intellectual
property rights in force in any jurisdiction.
All rights reserved. including copying this document in whole or any part
without prior written authorization from adixen Vacuum Products.
Specifications and information are subject to change without notice by
adixen Vacuum Products.
Indicates a potentially hazardous situation which, if not avoided, could result
in property damage.
Indicates a potentially hazardous situation which, if not avoided, could result
in moderate or minor injury. It may also be used to alert against unsafe
practices.
Indicates a potentially hazardous situation which, if not avoided, could result
in death or severe injury.
Indicates an imminently hazardous situation that, if not avoided, will result
in death or severe injury (extreme situations).
Before switching on the appliance, study the user’s manual and make sure
you follow the safety instructions it gives. You can recognise these by the
‘Caution’, ‘Warning’ and ‘Danger’ symbols.
Good practice tips and manufacturer’s recommendations are in a grey box.
EN – 2
MANUEL P/N: 105527
EDITION : 04 - July 2012
Translated from original version
Contents
Introduction
Presentation of the product range ......................................................... 4
2033 - 2063 m
Operating principle of the rotary vane pump ......................................... 6
Replacement of all shaft seals ................................................................ 50
Reassembling the pump ......................................................................... 52
Declaration of contamination ............................................................ 54
Declaration of Conformity ................................................................. 56
Nomenclature
Spare parts lists ....................................................................................N – 1
EN – 3
Presentation of the product range
A wide range
Specific solutions adapted to
various applications
SD series
C1 series
C2 series
H1 series
Oil seal rotary vane pumps are used in all vacuum technology applications.
They can be used on their own to achieve a maximum vacuum of 10
or in pumping assemblies. e.g. at the exhaust of a diffusion pump or turbomolecular
pump.
Standard pumps for several purposes (non-corrosive applications).
Manufacture of light bulbs, production of TV tubes, manufacture of electronic tubes,
metallurgy, centrifuges, etc.
Pumps suited to the pumping of corrosive gases.
R&D, laboratories, freeze-drying, pumping of solvents, etc.
Pumps with increased resistance to meet the requirements of the more
aggressive processes of the semiconductor industry.
Ion implantation, sputtering, etc.
Sealed pumps offering maximum tightness.
Pumping of pure or precious gases:
- Helium 3 used by cryogenists,
- Radioactive gases used in nuclear applications, either for the recycling of CFC or
refrigerated gas.
The 33 to 63m3/h pump models,
have following main characteristics:
– A direct drive motor making
them very compact.
– An anti-suckback system
ensures the tightness of the
pump during accidental or
voluntary shutdowns.
– A gas ballast enables the
pumping of condensable vapors.
– The universal three-phase
motor can be disassembled
independently of the rest of
the pump, without the need to
drain the oil case.
– On the oil case, a sight glass
can be used to inspect the oil
level easily when filling the oil
case and during the operation of
the pump.
– A neutral gas purge is used
to degas oil and dilute pumped
gases on C1 and C2 series
models.
– An oil casing purge is used to
dilute the pumped gases on C2
series models.
– Sensor connections for oil
pressure or temperature sensors
are available on C2 series
models.
10
9
1112
1. Oil case
2. Base
3. Frame
4. Electric motor
5. Gas ballast control
6. Spring hook (lifting device)
7. Inlet end fitting
8. Exhaust end fitting
9. Oil case filling plug
The inlet and exhaust end fittings are PNEUROP ISO-KF standardized.
They can be used to connect many of our accessories (see page 14).
The main remplacement parts are interchangeable: This enables easier disassemblyassembly operations and replacement without changing the pump’s performance.
Various accessories can be used to adapt the pump to meet the requirements of your
application.
13
8
2
3
10. Sensor connections (C2 Series)
11. Oil level sight glass
12. Oil draining plug
13. Oil filter (C1 Series)
111
847659
12
ENIntroduction
EN – 5
Operating principle
of the rotary vane pump
Single-stage
rotary vane pump
The pumping cycle is
given below:
Inlet
Transfer
This is a volumetric pump, with a functional part composed of:
• A hollow cylindrical stator with inlet and exhaust valves.
• A rotor mounted eccentrically inside the stator for pumping.
• Two vanes sliding in the rotor, forced against the stator by centrifugal force and
springs.
In. Exh.
As the vane passes in front of the inlet
orifice, an increasing space is formed into
which the gas from the chamber to be
evacuated expands.
When the second vane passes, the space is
closed.
In. Exh.
The gas trapped in the space between the
two vanes is transferred to the exhaust
orifice as the rotor rotates.
Compression
Exhaust
In. Exh.
The space communicates with the exhaust.
which is fitted with a valve: the gas is
compressed until the safety valve is opened.
In. Exh.
The gas is expelled into the oil casing when
the pressure is sufficient to open the valve.
EN – 6
Two-stage
rotary vane pump
To improve the backing pressure and flowrate at low pressure, two stages are
connected in series. The second is similar to the first both structurally and operationally.
The gases pulled in by the first stage (low pressure) are transferred to the second stage
(high pressure) and discharged through the high pressure (HP) valve.
In.
Low pressure stage
ApplicationsTwo stage rotary vane pumps are the best choice for application requiring an ultimate
vacuum as low as 3.75.10
Note: when operating a two stage vane pump continously, greater than half an hour
- above 1.0 Torr,
- or with opened gas ballast,
the unit should be equipped with an oil mist eliminator equipped with an oil return
system.
-3
Torr (5 x 10-3 mbar).
High pressure stage
Exh.
ENIntroduction
EN – 7
Oil - Noise limiter - Antisuckback
Oil
Choosing the right oilNot all oils produce the same ultimate pressure in a given pump. Ultimate pressure
Lubrication
Oil has several important functions in the pump:
– It lubricates mechanical components (bearings, seals, rotor, vanes, etc.).
– It makes moving parts relatively tight by limiting internal leakage.
– It carries away the heat produced by the compressed gases.
depends on the saturated vapor pressure of the oil, its viscosity and its ability to dissolve
gases.
Good pumping conditions are related to the type of oil used. The choice depends on:
– Expected pump performance.
– Chemical aggression and corrosion of pumped gases.
– Accessories used.
– Desired maintenance intervals and total operating cost.
The manufacturer has selected various types of oil for its pumps (see page 17).
The pump is equipped with a lubrication system which regulates the oil flow rate
required in the vacuum pump. In addition this system also ensures the gassing of
the lubrication oil and therefore the low noise level of the pump.
When the pump begins
to operate, the cooled
oil (from the bottom of
the oil casing) is pulled
in by the oil pump (2)
and drawn in through
the oil inlet tube (3). It is
then agitated by a venturi
tube (4) and forced
into the chamber (6)
which is adjusted by the
diaphragm spring system (7).
The discharge pressure of the oil pump (2) lifts the diaphragm off its seat (8) allowing
oil to reach the functional block via the oil injection line (through seats) (8). An orifice
(9) equipped with a jet located in the oil lubrification systems allows trapped gases to
be expelled out of the chamber (6).
C1 series
C1 series pumps are equipped with an automobile type oil filter, which traps particles
from the oil pumps exhaust. Due to its construction, its life time is reduced when
pumping on corrosive products in large quantities. In this case, an auxiliary oil filtering
system is recommended and the filter is replaced by a stainless steel short-circuit
stopper (see accessories page 14).
9
8
7
6
EN – 8
Anti-noise
Parallel to the oil flow, there is a small orifice in the venturi tube (5), which reduces the
noise level at ultimate pressure. Because of the negative pressure created at the end of
the venturi tube (5), gases are entrained into the moving layers of oil dampening pump
noise, allowing the fluid to become more compressible.The added gases will affect the
ultimate pressure, therefore, a compromise between sound level and ultimate pressure
has to be reached as follows:
- Tightening down air intake tube (5) decreases the oil flowrate at the intake of the oil
pump (2) and increases the amount of gas mixture in the oil. The sound level decreases
but the ultimate pressure increases.
- Unscrewing tube (5) increases the oil flowrate at the intake of the oil pump (2) and
decreases the amount of air mixture with the oil. The sound level increases but the
ultimate pressure decreases.
This adjustment can be performed via the oil fill port while the pump is in operation at
ultimate pressure.
Anti-suckback
and tightness at
stopping
Gas ballast
When the pump is stopped or the power is turned off, the anti-suckback device (6),
(7) and (8) isolates the functional block of the pump against air or oil returning to the
chamber being evacuated.
When the pump stops, the discharge pressure of the oil pump (2) drops rapidly through
the jet (9). Diaphragm (7) under pressure from spring and the difference of pressure is
forced againts its seat (8) thus closing off the injection line through the seat (8).
The seal is also ensured by flush-mounted o-rings between the faces of the functional
parts (stators, flanges, housing...) and by spring loaded check valves in the discharge
ports.
When condensable vapors are being
pumped, gas is compressed beyond
its saturated vapor pressure in
the «compression» phase and
can condense, impairing pump
performance and life.
The gas ballast can be used to inject
a certain quantity of air (inert or dry
gas) into the last stage of the pump
during the «compression» phase so
that the partial pressure of the pumped gas is less than its saturated vapor pressure
at the temperature of the pump. Condensation is therefore impossible if this limit is
not reached.The maximum admissible vapor pressure is obtained at pump inlet for this
value.
At the end of «compression», the pressure in the exhaust chamber is greater than
atmospheric pressure. An anti-suckback device (valve + spring) prevents the gases and
oil from being draw back into the inlet.
The saturated vapor pressure of a body is higher when the system is hot than when
it is cold; therefore, the pump must reach operating temperature before pumping
condensable vapors.
In.
Exh.
air
COMPRESSION
ENIntroduction
EN – 9
Gas ballast (cont’d)
Using the gas ballast increases the ultimate pressure of the pump as well
as the temperature.
The gas ballast control, located on the frame cannot be used to set the gas
injection flow rate.
When the gas ballast control is open, the pump is not tight when stopped.
To guarantee this tightness, install an automatic gas ballast.
The functioning in permanent regime with opened gas ballast draws away
important oil losses (mist) by exhaust: use an accessory OME 40 HP + ODK
(see page 14) or control the oil level very often.
C1 and C2 pump series:
Because of the danger present if the gas ballast (C1 series) or purge gas
ballast (C2 series) was to be opened to atmosphere, remove the plug and
connect the port to a neutral gas supply line (see page 31).
EN – 10
Technical characteristics
For industry:
SD Series
Corrosive applications:
C1 Series
CharacteristicsUnit2033 SD2063 SD
FrequencyHZ50605060
Number of stages22
Nominal rotation speedrpm1500180015001800
3
m
Nominal flow rate
Flow rate Pneurop method
Partial ultimate pressure
(1)
with A120 oil
/h
cfm
m3/h
cfm
Torr/mbarPa3.75.10
Ultimate pressure with gas ballast closedTorr/mba/Pa2.25.10
Ultimate pressure with gas ballast open
(3)
Torr/mbar/Pa1.5.10
30
27
-4
/ < 5.10
5.10
23.3
18.8
-2
-3
60
55
-4
3.75.10-4 / < 5.10
-3
/ 3.10
/ 3.10
-2
-2
/ 2.10
5 .10
/ 2
42.4
38
-2
-1
Maximum pressure in continuous operation
• without oil recovery
• with oil recovery
Torr/mbar/Pa
7.5 / < 10 / 1.10
75 / > 100 / 1.10
3
4
Maximum exhaust relative overpressure bar0.5
Oil capacity (case)l3.67
Maximum water vapor pumping capacity
(3) (1)
Torr/mbar
Pa
30
3.10
3
25.10
2
25
Water vapor pumping capacityg/h7001200
Weight (pump + motor)
(2)
kg (lb)65.5 (144.4)102 (224.9)
Inlet and exhaust end fittingsDN 40 ISO-KF
Ambient operating temperature°Cmin 12 / max 45
Ambient storage temperature°Cmin 5 / max 65
CharacteristicsUnit2033 C12063 C1
FrequencyHZ50605060
Number of stages22
Nominal rotation speedrpm1500180015001800
3
/h CFM30
Nominal flow rate
Flow rate Pneurop method
Partial ultimate pressure
(1)
with A120 oilTorr/mbar/Pa3.75.10
m
3
/h CFM27
m
Ultimate pressure with gas ballast closedTorr/mbar/Pa2.25.10
Ultimate pressure with gas ballast open
(3)
Torr/mbar/Pa1.5.10
23.3
18.8
-4
-3
-2
/ 5.10
/ 3.10
/ 2.10
60
55
-4 /
-3 /
-2 /
5.10
3.10
2
42.4
38
-2
-1
Maximum pressure in continuous operation
• without oil recovery
• with oil recovery
Torr/mbar/Pa
7.5 / < 10 / 1.10
75 / > 100 / 1.10
3
4
Maximum exhaust relative overpressurebar0.5
Oil capacityl3.67
Maximum water vapor pumping capacity
(3) (1)
Torr/mbar
Pa
30
3.10
3
25.10
2
25
Water vapor pumping capacityg/h7001200
Weight (pump + motor)
(2)
kg (lb)68.5(150)105.5 (232.6)
Inlet and exhaust end fittingsDN 40 ISO-KF
Ambient operating temperature°Cmin 12 / max 45
Ambient storage temperature°Cmin 5 / max 65
(1)
Partial ultimate pressure and vapor pressure measured according to Pneurop 6602 specifications
with A120 oil charge. It may vary if other oils are used (see page 17).
(2)
These values are for pumps equipped with IE2 European three-phase motors.
Note: The pressure measurements were made with a capacitive diaphragm pressure gauge
measuring a total pressure in the absence of a cold trap. Measurements using a Pirani type
gauge can give different pressure values.
(3)
Vapor pressure measured with an automatic gas ballast.
-4
ENIntroduction
EN – 11
Technical characteristics (cont’d)
Corrosive applications:
C2 Series
CharacteristicsUnit2033 C22063 C2
FrequencyHZ50605060
Number of stages22
Nominal rotation speedrpm1500180015001800
Nominal flow rate
Flow rate Pneurop method
(1)
Partial ultimate pressure
Ultimate pressure with gas ballast closedTorr/mbar/Pa2.25.10
Maximum pressure in continuous operation
with A120 oilTorr/mbar/Pa3.75.10
• without oil recovery
• with oil recovery
Maximum exhaust relative overpressure bar0.5
Oil capacity (case)l3.67
Weight (pump + motor)
Inlet and exhaust end fittingsDN 40 ISO-KF
Ambient operating temperature°Cmin 15 / max 45
Ambient storage temperature°Cmin 5 / max 65
(1)
Partial ultimate pressure measured according to Pneurop 6602 specifications with A113 oil
(2)
3
m
/h
cfm
m3/h
cfm
Torr/mbar/Pa
kg (lb)66.5(145.5)102.5 (226)
30
23.3
27
18.8
7.5 / < 10 / 1.10
75 / > 100 / 1.10
-4
-3
/ 5.10
/ 3.10
60
55
-4 /
-3 /
5.10
3.10
42.4
-2
-1
charge. It may vary if other oils are used (see page 17).
(2)
These values are for pumps equipped with IE2 European three-phase motors.
Note: The pressure measurements were made with a capacitive diaphragm pressure gauge
measuring a total pressure in the absence of a cold trap. Measurements using a Pirani type
gauge can give different pressure values.
38
3
4
Materials
The pumps are made in different materials to address the requirements of all major vacuum
applications.
MaterialsSD SeriesC1 SeriesC2 Series
Valves FPM
Optional valvesPAI
Oil sight glassGlass Glass PA
O-rings, lip sealsFPM
RotorsCarbon steel
HP, LP valvesAbestos free plastic
Stators, central housing, platesCast iron (without Cu, Zn, Cad)
Oil casing Aluminium
Friction ringsAlloy of zincGraphite
EN – 12
Pump dimensions
0
SD Series
!
"
%XHAUST
$%
C1 Series
2
%XHAUST
#
&
'
3
"#
/IL¬CASING¬PURGE
¬.04
L
A
H
$RAIN¬PLUG
'
¬HOLES¬¬MM¬v
A
)NERT¬GAS¬CONNECTION
¬.04
&ILL¬PLUG
¬¬'
D
L
+
/
H
$.
D
(*
$.
&ILL¬PLUG
¬¬'
+
%XHAUST)NLET
$.
'AS¬BALLAST
P/N
114449
119997
.
-
,
0
1
%XHAUST)NLET
$.
(*
'AS¬BALLAST
119998
2033 motors
Dimensions
(mm/inch)
ldha
270
170
140
10.6
267
10.5
267
10.5
6.7
1777137
1777137
5.5
5.4
5.4
200
7.9
143
5.6
143
5.6
Weight
(kg/lb)
21.7
47.8
18.2
40.1
16.4
36.2
ENIntroduction
4
-
/IL¬FILTER
$
C2 Series
!
"
/IL¬CASING
$
PURGE
¬.04
%
%XHAUST
Dimensions en mm
(inch)
,
$RAIN¬PLUG
%
&
'
'AS¬BALLAST
#
¬.04
L
A
¬'
¬HOLES¬¬MM¬v
&ILL¬PLUG
¬¬'¬
)NLET
$.
/
(
%XHAUST
$.
*
0
1
"UBBLER
CONNECTION¬.
/IL¬PRESSURE¬SENSOR
CONNECTION¬¬.04
2063 motors
H
D
+
$RAIN¬PLUG
'
&
'
¬HOLES¬¬MM¬v
/
0
1
/IL¬TEMPERATURE
SENSOR¬CONNECTION
-
5
-
,
P/N
114450
119979
119980
Dimensions
(mm/inch)
ldha
300
190
150
11.8
321
12.6
321
12.6
7.5
196
7.7
196
7.7
5.9
144
5.7
144
5.7
230
9.1
149
5.92657.3
149
5.92657.3
Weight
(kg/lb)
29.8
65.7
20332063
A
455
17.7
529
20.6
B
288
11.2
342
13.3
C
103
4
118
4.6
D
31
1.2
29
1.13
E
206
8
229
8.9
F
375
14.6
459
17.9
G
437
17
521
20.3
53
56
2.1
U
T
S
R
Q
P
O
N
M
L
K
J
H
362 to 385
323
164
336
42
14.1 to 15
12.5
6.3
13.1
1.6
2
410 to 422
371
186
385
45
16 to 6.4
14.4
7.2
15
1.7
12
0.46
12
0.46
140
5.4
190
7.4
213
8.3
264
10.2
91
3.5
91
3.5
452
17.6
526
20.5
389 to 398
15 to 5.5
438 to 447
17 to 17.4
353
13.7
402
15.6
EN – 13
Accessories
NameSD C1 C2Part numberLocationFonctions
Oil mist
eliminator
High pressure oil mist
OME 40 HP+
Oil level switch
Oil draining kit
Oil draining kit
Sorption trap
Automatic gas ballast
Shock mount
Oil short-circuit
Possible without restrictions Possible with restrictions Out of question
OME 40 S
OME 40 C1
OME 40 C2
eliminator
OLS 36
ODK 136
ODK 236
ST 40
AGB 36
Oil filter
DE1
Oil filter
DE2
adaptor
104887
068785
068492
200024Exhaust
104377On oil casing
118773Gas ballast
118776: 220/240V
50/60 Hz
118777: 115V 60 HZ
104731 -115V
053380 220 V
068391: 230V 50/60Hz
104367 115V 60Hz
068990 220V 50/60Hz
068991 115V 50/60Hz
104374 220V 50/60Hz
104375 115V 50/60Hz
082691
LAX 100 model D
054273
Exhaust
Inlet
Inlet
Gas ballast
External device
Between base
and machine
frame
On the wessel
pipe fitting
• Separates oil droplets and particles contained in
exhaust gases emitted by the pump.
• Separates oil droplets and particles contained in
exhaust gases emitted by the pump when pump
operate in high pressure and/or in frequent cycles.
Can be fitted to ODK 136 and ODK 236.
Provide information about oil level inside oil
casing of RVP, whenever the pump is located in an
unaccessible area.
• Connect to the OME 40 HP+, it is used to
recover oil via the gas ballast.
Note : the pump is not sealed when switched off.
Connect to the OME 40 HP+, it is used to recover
oil. Equipped with an electrovalve which seals the
pump when switched off.
• Prevents oil backstreaming when pumping in a
“clean” vacuum.
• Remote control for gas ballast.
• Allows the gas ballast to be closed when the
pump is off, ensuring that the pump is tight.
• Filters and/or neutralizes oil when pumping gases
which are corrosive and could rapidly degrade oil
quality.
• Allows pump to be mounted on a frame.
• On C1 model, allows to remove the oil filter
cartridge and replace it by an oil filtration system
type DE1 or DE2.
EN – 14
When pumping on corrosive, aggressives or flammable gases, the gas can
cause injury or death. In these cases,
- connect the exhaust of the pump to an exhaust stack or an evacuation
duct.
- connect a relief valve or rupture disc directly on the pump. Contact your
closest service center (see addresses at the back of the manual).
When the exhaust is connected to an extraction duct or an oil mist
eliminator, you must remove the exhaust safety valve mounted in the
pump’s exhaust orifice.
At the pump exhaust, the discharge circuit must be such that the resulting
excess pressure in the oil case is as low as possible. The maximum excess
pressure recommended for correct pump operation is 0.5 bar (6 PSI).
A slight negative pressure in the oil case (0.1 to 0.2 bar / 1.5 PSI), at the
exhaust, will prevent gases from accumulating and reduce pump corrosion
and pollution.
For safety reasons, use accessories on the inlet and exhaust lines whose
materials and sealing properties are compatible with the gases being used.
Safety instructions concerning the
installation and operation
Unpacking
Handling
Before switching on the equipment, the user must read all of the start-up
and operation sections of this manual and observe the safety instructions
listed in this manual.
We took care to provide you with a clean appliance. To keep it in this
condition, unpack it only in its final place of use.
Make sure the equipment shows no sign of transport damage. If it has
been damaged, take the necessary steps to record this with the carrier
and inform the manufacturer. In all cases, we recommend keeping the
packaging (reusable materials) for further transport of the equipment orfor
prolonged storage.
Vane roughing pumps use lubricants, it is recommended to request
information from the manufacturer on the safety data sheets concerning
the lubricant. These can be downloaded from www.adixen.com.
The pumps are delivered without an oil charge: the oil is delivered in
separate containers.
Wear gloves, protective glasses to fill in or drain the oil in the pumps.
In the same way, it is recommended to drain the pump before returning
the equipment.
For all handling of the equipment, it is highly recommended to only
use the devices provided for this purpose (handle, hoisting rings, spring
hook..).
The spring hook and square support must not be used to tip up the pump
from horizontal to vertical position and vice versa.
The maker can not be held liable for the consequences of using other
handling devices.
ENStart-up
Storage
C2 series
Other series
The product is supplied with the inlet and exhaust sealed. These are to
prevent foreign bodies entering the pump during transport and storage.
C2 Series: In order to prevent moisture from entering the pump before
installation, it has been pressurized before hand with nitrogen and sealed
with blanking plates.
Do not remove these blanking plates until you are ready to install the
product on the vacuum line.
New pump:
If the pump is new and has not been unpacked, store it as received since it has been
pressurized with neutral gas at factory.
• If the pump is to be stored, we guarantee the reliability of our equipment without
particular storage precautions for up to 3 months (ambient temperature between 41°F
and 149°F or 5°C and 65°C).
• For storage periods of over 3 months, we recommend to fill the pump with oil
during storage. For this, fill the pump and run it at ultimate vacuum (inlet orifice
blocked) for approximately 1 hour in order to lubricate all the parts of the functional
block (see page 29).
Then, stop the pump and store it with the inlet and exhaust orifices sealed: clamping
ring, centring ring, plug, etc.
The shaft must be rotated by hand (be means of the fan) or by starting the pump every
six months following this storage procedure.
EN – 15
Storage (cont’d)
All series
Installation and
start-up
• After 3 months storage without oil, factors such as temperature, degree of humidity,
salt air, etc. may cause the deterioration of the pump components, particularly the
hardening of O-rings and the "sticking" of lip seals on shafts and the gumming of oil.
In this state, a pump may have operational problems, particularly oil leaks. Before any
start-up (new pump as well as used), the pump must be disassembled (see page 46),
and all the seals changed.
Pump which have been used:
If the pump is not new, drain and rinse it (see page 42). Fill it with new oil, then pump
a dry inert gas through it to remove all traces of dampness in the pumping system and
oil casing. Pump in dry inert gas as fallows:
- 10 minutes at above 2.25 Torr (30 mbar).
- 10 minutes at ultimate pressure with gas ballast open.
- 10 minutes at ultimate pressure.
Stop the pump and seal the inlet and exhaust orifices tightly with quick connect
clamps, centering rings, blank-off flanges...
Note:
The seal kits must be stored with caution. Keep them away from heat and light
(sunlight and ultraviolet light) in order to prevent the elostomers from hardening
(AFNOR standard FD T 46.022).
The pump must be operated in the horizontal position with the pumping
axis vertical and the inlet operating upwards.
Ensure that the product is connected to an electrical installation:
- in compliance with the local and national safety requirements,
- equipped with electrical protection (fuses, circuit breaker, …) which has a
suitable earth (ground) point, properly connected.
Do not expose any part of the human body to vacuum.
The product is supplied with the inlet and exhaust sealed. Remove these
blanking plates when you are ready to connect the product on your
vacuum system.
As well as, don’t operate the product unless the inlet and exhaust are
connected to a vacuum and exhaust pumping line.
The products are designed to avoid subjecting users to heat hazards.
Specific operating conditions can nevertheless exist that require extra
caution from users due to the high temperatures generated (outer
surfaces > 70° C):
Wear protective gloves to work on the appliance, especially during
maintenance.
Our pumps are tested in the factory with A120 oil or A119 for the USA (A113 oil for
the C2 series).
It is recommended to use the same oil during operation, because the oils are
not mixable (refer to table page 17 and remplacement fluids page 18).
• If changing the type of oil, refer to the chapter concerned for the procedure and the
type of lubricant required (see page 42).
EN – 16
Table of recommended oils
Recommended oils
OilsCharacteristics and applicationsSD C1 C2 Density
Additivated hydro-carbon anti-emulsion mineral oil
Special hydro-carbon double distilled synthetic oil
with anti-oxidant additive
- atmospheric cycle pumping
A121
- high temperature and pressures
- acid and organic vapor resistivity
- plasma etching prohibited
Synthetic oil organic ester type
- compatible with hydro-carbon vapors
- compatible with NH3, R134a, refrigerating
A155
agent fluids
- oxidation resistivity
- polymerization resistivity (low coating)
Double distilled mineral oil non additivated
- pumping of corrosive products
A200
- ionizer plasma resistivity
- low backstreaming
Hydro-carbon based mineral oil, double distilled, non
additivated.
- highly resistant to chemical attacks
A300
- highly ionizer plasma resistivity
- pumping of Lewis acids, halogens
- low backstreaming
Possible without restrictions
Possible with restrictions
Not recommended
Requires special preparation of pump (see page 42).
* Ultimate pressure measured according to Pneurop 6602 specifications on 2033 pump.
These values are given as a rough guide only. They may vary according to the type of pump and the pumping conditions.
In the vane pumps, we recommend to use only the adixen oils in the table below:
Note: In this case, pump performances may be slightly different from those given in
pages 11 and 12.
Filling with oil
2033 and 2063 m3/h SD, C1 series pumps are tested in the factory with A120 oil
(A119 for the US).
2033 and 2063 m
At delivery, there is some oil remaining in the functional block.
Our pumps are tested in the factory with adixen’s oil: it is recommended to
use the same oil during operation. To change the type of oil, refer to the
Maintenance Chapter, “replacement of oil type” section.
In all cases, follow the recommendations of the pump specifier for the
choice of oil to be used.
The pumps are delivered without an oil charge: the oil is delivered in
separate containers.
Wear a mask, gloves, protective glasses to fill in or drain the oil in the
pumps.
In the same way, it is recommended to drain the pump before returning
the equipment.
3
/h C2 series pumps are tested in the factory with A113 oil.
EN – 18
If necessary, carry out the special preparation
procedure for the pump (see page 41), then:
- remove the filling cap (A).
- fill with oil until:
- the oil is between the maximum and
minimum levels (SD, C2 Series),
- the oil reaches the middle of the sight
glass (C1 Series).
A
Checking the oil level
This operation must be performed with
the pump switched off.
At the first start-up, to facilitate lubrication of the pump, pour a few drops of oil (1 to
3
2 cm
) through the inlet orifice.
C2 series: if the pump is equipped with an oil temperature sensor, the installation must
be made with the pump drained of oil.
To use the pump in optimum conditions, the oil level must be observed and checked
regularly. This level is checked with the pump switched off, hot and on a horizontal plane.
Oil level
sight glass
SD and C2 Series
Oil level
sight glass
C1 Series
maximum level
maximum level
minimum level
B
ENStart-up
Note: Optimum pump performance and service life are obtained when the oil level is
between the maximum level and the minimum level.
EN – 19
EN – 20
Mechanical connections
Mounting on a frame
Ventilation
For a given application, pump performance, vacuum characteristics,
temperature and reliability depend on the following:
• assembly conditions (accessory, filter...) and mechanical connections,
• used oil,
• maintenance frequency and quality.
For the assembly of the vacuum circuit, provide the accessories required for
maintenance: isolation valves, purges, etc.
For safety reasons, use accessories on the inlet and exhaust lines whose
materials and sealing properties are compatible with the gases being used.
Several fitting accessories are available in the adixen products’ catalog.
The pump can be mounted on a frame using the 4 attachment holes on the base and
the special shock mounts (refer to accessories page 14).
Note: Special shock mounts, effective against the pump's own vibrations, can also be
used but they do not ensure correct attachment during the transfer of equipment. In
this case, the pump should be clamped onto its support (see page 13).
The pump and the motor are each equipped with a ventilation system.
During pump installation, the pump should be placed in ventilated place. Provide a
minimum gap of 25 mm around the pump.
The vents on the pump and the motor should be checked regularly to ensure
that they are not blocked.
adixen pumps are designed for operation at an ambient temperature between 53°F
and 113°F (12 and 45°C) (with A120 oil).
ENStart-up
Inlet and
exhaust fitting
Do not expose any part of the human body to vacuum.
The product is supplied with the inlet and exhaust sealed. Remove these
blanking plates when you are ready to connect the product on your
vacuum system.
As well as, don’t operate the product unless the inlet and exhaust are
connected to a vacuum and exhaust pumping line.
At inlet:
Make sure that the parts or chambers connected to the inlet of our
pumps products withstand a negative pressure of 1 bar in relation to the
atmospheric pressure.
The inlet pressure must be no higher than atmospheric pressure.
Too high pressure can damage the product.
EN – 21
Inlet and
exhaust fitting
(cont’d)
At exhaust:
When pumping on corrosive, aggressives or flammable gases, the gas can
cause injury or death. In these cases,
- connect the exhaust of the pump to an exhaust stack or an evacuation
duct.
- connect a relief valve or rupture disc directly on the pump. Contact your
closest service center (see addresses at the back of the manual).
When the exhaust is connected to an extraction duct or an oil mist
eliminator, you must remove the exhaust safety valve mounted in the
pump’s exhaust orifice.
Make sure the exhaust pressure does not exceed 1500 mbar (absolute). Too
high a pressure can damage the appliance.
Check periodically that the pipes and accessories connected at exhaust are
not clogged and that the purge is running (Series C1, C2).
After connecting the appliance to the pump ing line, check for leaks along
the whole of the line to ensure proper connections have been made (pump,
pipes, valves, etc.).
The pump inlet and exhaust orifices are equipped with DN 40 ISO-KFend fittings
which can be used to fit various line components made of stainless steel, plastic, etc.
(see the adixen catalog).
ExhaustInlet
EN – 22
Purge and indicator
connections
SerieItemDescriptionConnection
1/8’ NPT
1/8’ NPT
C1
1
2
Gas ballast purge
Oil casing purge
Specific equipment: HP valve
(C2 Series)
C2
3
4
5
* Sensors are customer supplied.
C2 SeriesC1 series
Oil pressure sensor
connection *
Purge - Bubbler
Oil casing temperature
sensor connection *
M 10 X 1
1/8’ NPT
M 12 X 1
The C2 pumps are equipped with HP and LP elastomer valves (FPM™ according to
standard NFT 40-002). In certain applications with fluorinated gases, HP valve may
harden and become brittle and compromise pump performances. Alternatively, the
pump may be equipped with a plastic, corrosion-resistant HP valve on request. On
request we can supply these specific components depending on your needs.
ENStart-up
EquipmentHP Valve materialTightnessPart Number
StandardElastomerInstallation tight
On request
* If a plastic valve is used, the pump’s anti-suckback operation cannot be
guaranteed and an anti-suckback device must be installed in the pumping
line to ensure tightness when the pump is not operating.
Plastic *Installation not tight
Plastic + special o–ringInstallation tight
053443
065057
065160
EN – 23
Electrical connections
Three-phase version
Direction of rotation
Ensure that the product is connected to an electrical installation:
- in compliance with the local and national safety requirements,
- equipped with electrical protection (fuses, circuit breaker, …) which has a
suitable earth (ground) point, properly connected.
Our products are designed to comply with current EEC regulations. Users
making their own modifications to the product are liable to break its
compliance with these regulations, degrade its EMC (electromagnetic
compatibility) rating, and make it unsafe to use. The manufacturer declines
all liability for the consequences of such operations.
Electric shock hazard.
The voltages and currents in use can induce electric shock.
Isolate and lock out power line to the appliance before maintaining it /or
removing the cover.
Only skilled, authorized people may carry out maintenance work.
If a main isolator is installed by the customer, it must be in compliance
with local regulations, with a minimum amp. interrupting current of
10KAIC.
Check that the electrical wiring of the motor corresponds to the line
voltage, before starting up the pump.
Electrical motor is in accordance with major international standards (UL, CSA,
VDE).
All three phase motors (protection level IP 54 - TEFC type) must be protected by
a customer supplied starter consisting of a suitably rated contactor and thermal
overload (see page 27).
In all the cases, the pumps are delivered with its motor connected to the
maximum voltage (see page 26).
Wire the motor according to the line voltage. The connections to be made are shown
on a diagram inside the terminal box or on its lid (see page 25).
Check the direction of rotation of the motor (direction of arrow located on the motor
cover). For this:
– Remove the protective caps on the inlet and exhaust orifices.
– Fit a pressure gauge at the pump inlet
– Switch on the pump for 2 to 3 seconds, than stop the pump
– if the pressure indicated is less than 5.10-1mbar, the direction of rotation is correct.
– if the pressure increases, invert two phases.
Motor characteristics,
connection, protection
Motor Thermal protection
EN – 24
The information below is given as a recommendation.
The user must comply with the electrical standards or recommendations (UL, CSA, VDE)
applicable in the country in which the pump is used.
The use of electrical protection for the pump motor makes it possible to protect:
– The motor: in the event of excess voltage or rotor blocking, the resulting excess
current may destroy the coil and possibly the start-up system (for a single-phase
motor).
– The pump: in the event of a lubrication fault (contaminated oil, presence of particles),
increased resistance will draw excessive motor current.
It is necessary to protect the pump against increase of temperature. The motors are
equipped with a dry contact which gives motor temperature information.
To manage the motor thermic protection, It is the user’s responsibility to wire this dry
contact by connecting the 2 wires available in the terminal box (wiring diagram in the
terminal box – NC dry contact - 250V max. - 0.5 A max.).
Differential circuit breaker.
In case of insulation defect, for personnel protection you must install on the
main power supply a type B differential circuit breaker GFI (or RCD) of 30 mA
minimum.
This equipment protection device is compatible with type T.T electrical
network.
For other network type T.N or I.T, apply the right protection device. Contact
adixen product manufacturer for advice.
In all cases, comply with current local regulations.
Electrical connections
of three-phase
motors
Terminal box with 6 wires and
6 terminals
Terminal box with 9 wires and
6 terminals
The pumps are equipped with 6 or 9 wire terminal box motors, the wiring diagram of
the terminals is given as a rough guide only. In the event of doubt, only the plate in the
terminal box should be used as a reference.
,
(IGH¬VOLTAGE
3TAR¬9
,
7
567
,
6
5
5
5
7
6
56
,,
,
5
6
67
,
7¬7
,OW¬VOLTAGE
,
$ELTA
7
,
6
,OWVOLTAGE(IGHVOLTAGE
5
56
7
567
,,
,
7
5
6
67
5
ENStart-up
3TAR¬PARALLEL¬99
7
,
7
56765
,
5
5
7
,,
,
7
5
6
6
6
,
3TAR¬SERIAL¬9
7
,
567
,
,,
7
7
,
5
5
5
6
6
6
,
EN – 25
Electrical connections
of three-phase
motors (cont’d)
Terminal box with 9 wires and
9 terminals
,
,OWVOLTAGE(IGHVOLTAGE
,
7
5
,
56
6
7
,
5
6
,
6
7
,
7
5
567
,
7
7
7
5
5
6
6
3TAR¬PARALLEL¬99
7
6
,
7
567
,
7
5
5
6
3TAR¬SERIAL¬9
5
6
,
6
,
Different types of motors are available in accordance to the major international standards UL, CSA, VDE. The three phase
motors are compatible with the following voltages:
Motor voltage range - Capacity limits
Motor
P/N
119978*Europe
114449Asia & Row
2033
119977*
119979*Europe
114450Asia & Row
2063
119980*
CountryFr.Voltage
50 HZ 220240380415
60 HZ 220 280380 480
50 HZ180 240360 415
60 HZ180 240380 480
USA
Japon
USA
Japon
50 HZ180 220380 440
60 HZ1 90 23 03 804 60
50 HZ 220 240380 415
60 HZ 220 280380 480
50 HZ180 240360 415
60 HZ180 240380 480
50 HZ180 220380 440
60 HZ190 280380 460
5
,
IE2 high efficiency class according to IEC 60034-30 standard.
EN – 26
External motor protection,
electrical protection
Electrical protections
Motor P/NCountryFrequencyMotor powerVoltageRate
119978Europe
2033
2063
114449Asia & Row
119977
119979Europe
114450Asia & Row
119980
USA
Japon
USA
Japon
Installation protection with circuit breaker.
The user must supply the pump from facilities equipped with amain circuit
breaker, curve D (IEC 60947-2), in accordance with local regulations and with
a minimum amp. interrupting current of 10 KAIC.
This protection device should be in close proximity to the pump (no further
than 7m (25 ft) within line of sight of the pump).
The characteristics and ratings of fuses and recommended circuit breaker with standard
pump three-phase motors:
Circuit breaker rate for the following motors
50 / 60 HZ1,1 kW
60 HZ1,3 kW
50 HZ1,5 kW
60 HZ1,8 kW
50 HZ1,5 kW
60 HZ1,8 kW
50 HZ2,2 kW
60 HZ2,64 kW
50 HZ2,2 kW
60 HZ2 ,2 kW
50 HZ2,2 kW
60 HZ2,64 kW
220 V
400 V
265 V
460 V
200 V
400 V
230 V
460 V
200 V
400 V
230 V
460 V
230 V
400 V
265 V
460 V
200 V
400 V
230 V
460 V
200 V
400 V
230 V
460 V
6 A
4 A
6 A
4 A
8 A
4 A
8 A
4 A
8 A
4 A
8 A
4 A
10 A
6 A
12 A
6 A
8 A
4 A
8 A
4 A
14 A
6 A
12 A
6 A
ENStart-up
EN – 27
EN – 28
Preliminary
precautions
Operation
The performance and operational safety of this product are guaranteed
provided it is used normally in the operating conditions defined in this
manual.
It is the customer’s task to:
- train operators to use the product if they do not speak the language the
manual is written in,
- ensure operators know the safe practices to apply when using the
product.
Fire protection.
The roughing pump is not intented to be installed on process containing
flammable materials or in hazardous atmosphere.
Fire hazard due to the presence of electrical components.
The fire hazard is low due to the use of appropriated components and the
containment in the pump cover.
The vacuum pump is also a compressor: incorrect use may be dangerous.
Study the user’s manual before starting up the pump.
The products are designed to avoid subjecting users to heat hazards.
Specific operating conditions can nevertheless exist that require extra
caution from users due to the high temperatures generated (outer
surfaces > 70° C):
Wear protective gloves to work on the appliance, especially during
maintenance.
The products are factory tested to ensure they will not leak in normal
operating conditions. It is the user’s responsibility to
ensure this level of leak tightness is maintained.»
For emergencies and breakdowns, contact the manager of your local
service center (see addresses at back of manual).
ENOperation
Operating
temperature
At start-up, before switching on the motor, check that the oil bath temperature is
greater than 53°F (12°C).
The ambient operating temperature for the pump must be between 53°F (12°C)
and 113°F (45°C).
Under these conditions, the stabilized pump temperature (at the front of the oil
case) will be between 140°F and 158°F (60 and 70°C) (with A120 oil, depending on
operating conditions).
Special case - Synthetic oils
Synthetic oils are much more viscous when cold than mineral oils.
Do not start up the pump at ambient temperatures below 59°F (15°C).
The stabilized temperature is higher than with a pump used with mineral oil.
For the same reason and to facilitate lubrication of the pump, pour a few drops of oil
(1 to 2 cm
3
) through the inlet orifice before starting.
EN – 29
Before starting-up
the pump
Operation (cont’d)
Start-up
Check periodically that the pipes and accessories (i.e. oil mist eliminator)
connected at exhaust are not clogged and that the purge is running.
In certain cases, when the pump is started up in cold ambient conditions, or with
slightly contaminated oil, the current after start-up may remain high until the oil in the
pump is heated up. These conditions are sufficient for the internal thermal protection
to be activated, making start-up impossible (see electrical connections page 24).
• When using a three phase motor, check the direction of rotation of the motor
(see electrical connections page 24).
• Check the oil level (see page 20).
• Start-up the pump.
• Allow the pump to run for one hour with the inlet blocked at ultimate
vacuum:
During this operation, make sure that the oil circuit is operating. Remove one of the oil
fill plugs to listen to the pump.
At start-up, the oil enters the lubrication circuit of the vacuum pump. As a result, noises
will be heard (first irregularly, then regularly) which will reduce as the oil heats up.
These noises will no longer be heard when the fill plug has been replaced.
Under normal temperature conditions, the oil circuit should start less than 1 minute
after start-up (this time may vary with the type of oil and its degree of contamination).
It is normal for the oil level to rise (as can be seen through the oil sight glass) when the
pump is hot due to expansion of the oil and starting or the oil circuit.
Start-up after pump disassembly
or oil change
Cold start-up
See specific cases page 43.
When a pump must start cold (ambient temperature about 12 °C) or when
it has to start cold after pumping contaminating products or condensables,
proceed as follows:
• Unscrew air inlet tube to the maximum extent to help oil circuit to start.
• Readjust antinoise system when the pump is hot.
Note : When you have pumped on dangerous products (corrosive, toxic...),
you must reheat the pump with an external device to reach the pump
starting temperature. Consult us.
EN – 30
Operation of gas ballast
Regeneration of
pump oil
Pumping condensable
vapors
Choice of pump and systemThe pump’s capacity to eliminate condensable vapors is related to their type, the pump
Choice of oil
AssemblyThe condensation of vapors at the pump exhaust is
In a pump stored with the same oil for a long time, condensed vapors may contaminate
the oil bath and affect performance. This is also the case after pumping vapors and
when the oil appears cloudy or discolored through the sight glass.
• Run the pump, shutting it off from the system at the inlet by a valve or a plug.
• Open the gas ballast and allow the pump to operate for 1/2 hour to 1 hour, or
longer if the oil remains cloudy. This operation accelerates the temperature rise of the
pump while eliminating residual vapors present in the oil bath.
To pump with condensable products, it is necessary to operate with a hot pump. For
this, isolate the pump from the system and allow it to operate for 1/2 hour with the
gas ballast open, or 1 hour (if possible) with the gas ballast closed. When the oil bath is
hot, the condensation of vapors in the pump is reduced or prevented.
temperature and the quantity of air introduced by the gas ballast.
Care should be taken to limit the inlet pressure of the pump to its maximum admissible
water vapor pressure with the pumped product. This is obtained by reading the pump
characteristic table for water vapor (see pages 11 and 12).
The use of cold traps or condensers are recommended when large quantities of vapors
are to be extracted.
Caution : don’t forget to regenerate the traps. Excessively intense or prolonged
pumping may cause the products condensed in the trap to be evaporated a
second time.
Choose an oil which facilitates the separation of pumped products which may be
condensed in the oil bath (anti-emulsion oil for water-based compounds, etc.)
(see page 17).
Exh.
reduced if:
• The pump and oil temperature are high.
• The pressure at the exhaust is as low as possible
(removal of the oil mist eliminator, connection to
an evacuation duct...).
• The condensates are collected separately from
the oil bath and do not block the exhaust duct.
For this:
• Avoid using any vertical ducting which promotes
the condensation of products and the return of
these products to the pump.
• Use a condensate collector.
• We do not recommend an oil mist eliminator
when pumping condensable vapors: if it is
essential, do not connect it directly to the pump
exhaust but place it outside the condensation
zone.
• Remove the stop valve from the pump exhaust
(SD series).
• Connect the exhaust to a mechanical device
creating a negative pressure from 0.75 Torr to
1.5 Torr (0.1 to 0.2 bar).
Inl.
Exh.
Inl.
ENOperation
Condensat trap
EN – 31
Pumping condensable
vapors (cont’d)
Vapor pumping procedure• Isolate the pump from the system and increase the pump temperature, 30 minutes
with gas ballast (see page 31).
• Start pumping and check the oil level:
- The oil level drops, oil is being lost, add oil in the pump.
- The oil level rises; condensates have been added into the oil.
• After pumping, let the pump running at ultimate pressure and condensates will be
separate from the oil.
- If the oil is cloudy or discoloured, change the oil.
- If the condendates are heavier than the oil, drain them by the oil drain port.
- If the condensates are lighter than the oil, drain the pump, flush the pump with
clean oil. Let the mixture to clarify, than recover the oil.
EN – 32
C1 and C2 Series
PurgesThe use of vane pumps may result in pumping gases or vapors which are flammable
Oil case purgeThe purge dilutes pumped gases with a inert gas.
Purges for pumping condensable,
corrosive, and hazardous gases
or that could contaminate the oil. In this case, these products must be diluted using
purges supplied with dry gases, such as nitrogen to avoid undesirable reactions.
For this purpose, a filtered dry nitrogen supply or other inert gas with the same
characteristics is required:
• condensation point < 72°F/22°C,
• dust < 1μm,
• minimum absolute pressure 2 bar,
• H
O concentration < 10 ppb,
2
• O
concentration < 5 ppb.
2
It makes it possible to limit corrosion in the oil case, condensation and accumulation of
gases in dead spaces of the pump.
Furthermore, the purge allows to flush with gas the pipes and accessories connected at
the exhaust of the pump.
Connect the dry nitrogen supply on the specific connector (1/8 NPT).
Set the nitrogen pressure to approximately 15.4 PSIG (1.1 absolute bar) (see table page 34), and the flowrate so as to satisfy the dilution conditions.
(Caution: do not generate an excess pressure > 7 PSIG (0.5 relative bar).
ENOperation
Purge with gas ballastBecause of the danger present if the gas ballast was to be opened to astmosphere
(C2 series), the manual gas ballast doesn’t operate. Connect the dry nitrogen on the
specific connector (1/8 NPT). The nitrogen flowrate should be adjusted according to
the values from table page 34.
C2 Series
Use of the bubblerThe bubble device is composed of an air tube with several holes, located at the bottom
of the oil case, which releases bubbles of inert gas in the oil. In this way, the oil is
saturated with neutral gas, which reduces its capacity to dissolve pumped gases. The
bubbles of inert gas released make it possible to eliminate the volatile vapours or acids
condensed in the oil. The bubbler flow also lowers the pumps temperature which slows
corrosion.
Connect the dry nitrogen supply on the specific connector (1/8 NPT).
SettingThe gas flow rate is adapted according to the application and the installation, taking
the following criteria into account (flow 60 to 300 l/h) (see table page 34):
• When pumping high quantities of gas, a highly corrosive gas or an easily condensable
gas, it is recommended to use a high nitrogen flow rate.
Caution ! It is assumed that a sufficient quantity of nitrogen is available.
• The pump exhaust circuit must be such that, for discharged flow rates, pressure drops
do not cause an abnormal excess pressure in the oil case.
• The nitrogen flow rate must be such that oil loses have no effect on the operation of
the pump throughout the pumping cycle (the oil level must be above the lower limit
of the sight glass at the end of pumping).
Run the pump at ultimate vacuum for one hour and set the nitrogen flow rate as
follows (at atmospheric pressure and at 60°F/20°C).
Purges for pumping condensable,
corrosive, and hazardous gases (cont’d)
Setting
Corresponding
Neutral gas flow (l/h)Pressure (bars)
miniaveragemaxiStarting Operating Problem
1200
1500
1500
60
70
6070300
1700
300
300
300
2000
2500
700
900
700
900
--1.1 to 1.25
--
--
T (°C)
* Sensors are customer supplied.
Note: these characteristics apply for pumps operating at a constant inlet
pressure (1 to 5 mbar): they are adapted for each case of pumping.
C2 SeriesC1 series
absolute
pressure
(bar)
(indicative value)
1.1 to 1.25
1.15 to 1.25
1.1 to 1.25
1.15 to 1.25
Operation principle
Start-upIsolate the pump from the pumping line (close the isolation valve at inlet).
StopIsolate the pump from the pumping line (close the isolation valve).
Using the two purges
simultaneously
(C2 series)
Start up the pump at ultimate vacuum. When it is hot, open the nitrogen purge and
adjust the flow.
Wait for the pump stabilization.
Open the inlet valve and pump on corrosive gases: check that the purge in running
during all the pumping time.
When pumping stops, allow the purge to operate for approximately 1 hour (depending on the quantity of pumped gas) at ultimate vacuum, with the purge, in order to degas
the oil effectively and clean the pump with nitrogen to eliminate the traces of pumped
gases.
Stop the purge but let the pump running to avoid any condensation, or dampness
introduction that can react with pumped gases.
If the pump must be stopped, prepare it as described on page 16 to store a pump
which has been used.
When the bubbler and the oil casing purge are used simultaneously, the gas flow rate
must be ajusted to suit the application and the installation. The adjustment data
given in the table corresponds to the adding flow adjustment data.
EN – 34
Oxygen pumping
In certain applications, mixtures containing oxygen at different concentrations, or even
pure oxygen, are used.
Oils of mineral origin are combustible. Exposure to pure oxygen at high temperatures
may cause them to self-ignite. In addition, they are highly oxidized during pumping and
quickly lose their lubricating properties.
Mineral oils must not be used for oxygen levels of over 21 % in pumped gases. In this
case, perfluorinated synthetic oils must be used (seepage 17).
The use of these oils requires a special pump preparation (see page 42). The pump
must be completely disassembled and all traces mineral oil removed. Flushing the oil
case is not adequate.
It is strongly recommended not to use fluids such as tri-aryl-phosphate-ester
which are known to cause accidents.
Any accumulation of oxygen in the installation should be avoided and the oxygen or
combustible mixture should be diluted with a neutral gas at the exhaust: the gas flow
rate should be 4 times the oxygen flow rate.
Certain combustible or explosive gases require a higher degree of dilution.
Our Support Services and Customer Services can advise you to help solve
problems of this kind.
ENOperation
EN – 35
Recovery of oil
(high pressure and cycling)
When the pump operates at high pressure, the oil heats up, becomes more fluid and is
flushed out of the functional block by the gas stream.
Oil losses at the exhaust are increased.
For intermittent
pumping
For cyclical pumping
or continuous
pumping at high
pressure
If the pump only operates for a very short time at high pressure, the lubricating oil
is replaced when the pump returns to low pressure. The use of a oil mist eliminator
prevents losses due to intermittent high pressure operation.
If the pump operates at high pressure in a cyclical fashion, oil consumption may reach
sufficiently high levels (according to the pumped volume and pumping cycle rates)
causing the level to drop in the oil case.
There is then a risk of seizure due to a lack of oil. In addition, the high flow of gas
passing through the eliminator prevents oil from returning to the oil case.
In order to pump in these conditions, the pump must be equipped with an oil mist
eliminator and an oil draining kit, which enables oil recovery via the gas ballast (see accessories page 14).
In case of oil recovery via the pump inlet port, consult us.
An electrovalve ensure the tightness when the pump is stopped.
OME 40HP+
Electrovalve
Outlet
EN – 36
Gas ballast
Safety instructions for maintenance
General precautions
For normal operation, the maintenance of 2033-2063 m3/h series pumps only require
regular oil changes (see page 41).
Maintenance must be performed by a skilled maintenance operator trained
in the relevant health and safety aspects (EMC, electrical hazards, chemical
pollution, etc.).
Isolate the product from all energy sources (mains electricity, compressed air,
etc.) before starting work.
Certain gases can become corrosive and toxic when trapped in oil. Always
wear protective gloves when handling used and dirty pump oil, drain it
into a closable container, and do not breathe the oil fumes. Always use
fully self-contained breathing apparatus.
During pump removal, draining or maintenance operator could be in
contact with process residues which could cause severe injury or death.
Ask your safety department for instructions according to the local
regulations.
We recommend to:
- To purge the pumping installation with dry nitrogen.
- Wear gloves, protective glasses and, if required for the used gases, a
breathing mask.
- Ventilate the premises well.
- Do not eliminate maintenance waste via standard disposal channels. Have
it destroyed by a qualified company if necessary.
- Install the inlet and exhaust blanking plates, thus accessories are
delivered with the pump.
Decontamination – product dismantling
According to the regulations 2002/96/CE about Waste of electrical and
electronical equipments, and 2002/95/CE about Restriction of Hazardous
substances, the manufacturer provides a recycling paid service for the
end of-life of waste electrical and electronic equipment.
Any obligation of the manufacturer to take back such equipment shall
apply only to complete not amended or modified equipment, using
adixen Vacuum Products original spare parts, delivered by adixen,
containing i.e. all its components and sub-assemblies.
This obligation will not cover the shipping cost to an adixen take back
facility.
If you return the product to an adixen repair service center, please make
sure you follow the «procedure for returning products» and fill in the
declaration of contamination found in the end of the manual or on the
website.
ENMaintenance
Insufficient tightness after servicing could result in chemical hazards. Always
perform a leak test after maintenance.
EN – 37
Troubleshooting and corrective actions
IncidentsCausesCorrective actions
The pump is not runningIncorrect motor power supply.•Check the power supply.
Temperature too low.•Reheat the pump and its oil.
Gumming of seals after prolonged
•Disassemble the motor and try to turn
storage.
Oil contaminated after pumping.•Drain, flush and refill with clean oil.
Motor coupling damaged.•Replace by disassembling the motor.
Pump seized, due to a stopping after
•Disassemble, clean, hone the scratched
pumping in difficult conditions (no
draining or flushing).
The pump does not startOil cold.•Warm pump.
the fan manually.
Disassemble, clean the pump, replace
seals, reassemble.
metal parts (replace them if necessary)
and reassemble.
The vacuum pump does not produce
a vacuum
Insufficient oil in the oil case.•Fill up to the level.
Oil contaminated.•Drain, flush and refill with clean oil.
Oil pump inlet partially blocked.•Drain, and clean the oil pump inlet duct.
Oil contaminated.•Drain, flush and start again with clean
oil.
Oil pump inlet partially blocked.•Drain and clean the oil pump inlet duct.
One of the LP safety valves is
•Replace the LP safety valve.
damaged.
Part forgotten in reassembly.•Repeat the reassembly.
All series C1 C2 C1 and C2
IncidentsCausesCorrective actions
The vacuum pump does not produce
a vacuum (continued)
Noisy pumpOil level too high.•Drain and fill with a new oil.
Ultimate pressure obtained: a few 7.5 x10-3 Torr (10-2 mbar)
Gas ballast knob open (or supplied
•Close the gas ballast or stop the dry air
with dry nitrogen C1,C2 Series).
O-ring pinched.•Replace by a new one.
One of the seals is damaged.•Replace by new ones.
One of the HP safety valves is
•Replace the HP safety valve.
damaged.
Lubrication holes blocked.•Disassemble and clean.
Incorrect anti-noise device setting.•Repeat the assembly and setting.
Part forgotten in reassembly.•Repeat the reassembly.
Filter cartridge clogged.Replace by a new cartridge.
Accessories
At the pump exhaust, the installation
•Check the installation.
produces an exhaust pressure of
1,125 Torr (1.5 bar).
Oil mist eliminator cartridge clogged.•Replace.
Oil contaminated (presence of
•Drain, flush and refill with clean oil.
particles).
supply.
ENMaintenance
Pump not prepared for the oil used.•Check the pump configuration or the
type of oil.
Incorrect motor power supply.•Check the power supply.
Motor bearings damaged.•Replace the motor after inspection.
Motor coupling incorrectly set or
•Check the setting, replace the motor
damaged.
Incorrect fan assembly.•Check the assembly.
Incorrect anti-suckback device
•Repeat the assembly.
assembly.
Vanes damaged or stuck.•Replace the vanes.
Pump too hotAmbient temperature too high.•Check that the temperature is between
Pump placed in a poorly ventilated
•Check the installation.
place or vents blocked.
Operation at high pressure
•Study an outside cooling drvice.
P > 22 Torr (30 mbar).
Excess pressure at exhaust.•Check the exhaust line.
Motor in over-voltage or motor in
•Check the voltage, replace the motor.
short-circuit.
All series C1 C2 C1 and C2
coupling.
12 and 45 °C.
EN – 39
Troubleshooting and corrective actions
(cont’d)
IncidentsCausesCorrective actions
Pump too hot (cont’ed)Oil contaminated.•Drain, flush and refill with clean oil.
Pump not prepared for the oil used
•Check pump configuration or type of oil.
or oil unsuitable.
Considerable oil lossesOil level too high.•Drain and fill with a new oil.
Operation at high pressure.•Use an HP type oil mist eliminator with
oil recovery.
Gas ballast open:
•
1 - accidentally
2 - pumping of condensable vapors.
Leak at oil case seal or at front seal.•Check the assembly and replace the
1 - Close.
2 - Use a condensate collector.
seals if necessary.
Purges gas flow too important.
Poor pump tightness when
switched off
Oil in plateOil case and frame cleaned poorly
Gas ballast open.•Close the gas ballast.
Safety valve damaged.•Replace by a new one.
Incorrect anti-suckback assembly.•Repeat the assembly.
O-ring pinched.•Replace by a new one.
Seals damaged.•Replace by a new one.
Oil contaminated.•
Using a plastic HP valve (not tight)
•Remove the base and clean.
during reassembly.
Oil case seal pinched.•Disassemble the oil case, clean the faces
Front seal damaged or felt saturated.•Replace by new ones.
All series C1 C2 C1 and C2
Readjust.
Drain, flush and refill with clean oil.
Check the installation. Contact us.
and refit a new seal.
EN – 40
Maintenance
Maintenance
frequency
FrequencyOperating conditions
Oil
Pump
The frequency values are minimum values for «normal» operating conditions: pressure
< 1 mbar (0.75 Torr), clean and non-corrosive gas.
An incorrect ultimate vacuum or a reduction in pumping speed are signs that
the oil has deteriorated.
The periodic inspection of the state of the oil is performed by comparison with a
sample of new oil in order to check the level of contamination or deterioration of the
lubricant.
The frequency at which oil is renewed is adapted to the type of operation:
If the oil is cloudy, this indicates that condensables have been absorbed during
pumping. The oil can be regenerated using the gas ballast (see page 31).
A thickening of the oil, together with a blackish color and a “burnt” smell indicate
that the oil has deteriorated. Drain the pump and flush it.
When the lubricating oil is expensive (fluorocarbon synthetic oils), the use of an oil mist
eliminator allows oil recovery after deposition.
6 months“normal”, 24h per day
1 year“normal”, < 12h per day
1 year“normal”, 24h per day
2 years“normal”, < 12h par day
ENMaintenance
Roughing
Maintenance of the
accessoiries
The oil should be changed every 6 months. This value is given as a guide only.
It may be extended to 1 year if the ultimate vacuum required is sufficient (for roughing
pumps).
Similarly, if the pump is stopped frequently for long periods, the oil should
be changed at intervals of 6 months to a maximum of 1 year (oil may become
sticky).
Note: Every pumping operation is different. This oil must therefore be changed at
intervals adapted to each specific application.
The use of accessories (see page 14) can reduce the frequency of these maintenance
operations.
When an adixen accessory is connected to the pump, periodically it is necessary to
make accessory overhaul.
Study the accessory user’s manual and make sure you follow the safety instructions
it gives regarding protection of personnel: operator could be in contact with process
residues on the exhaust which could cause severe injury or death. Ask your safety
department for instructions according to the local regulations.
When an oil mist eliminator is installed, check periodically at the exhaust
orifice that:
- the exhaust valve can move, so the exhaust is not blocked,
- the exhaust valve can move, no overpressure in the oil casing.
EN – 41
Draining
Maintenance (cont’d)
Flushing
The draining operation places the contaminated pumping circuit in
communication with the outside atmosphere. Take all necessary steps to
ensure personal safety: wear gloves, protective glasses.
The pump must be drained when hot and after
the oil case has been vented to atmospheric
pressure. For this:
Switch off the pump.
Isolate the pump or disconnect it from the
installation.
Tilt the pump.
Unscrew the draining plug (A) on the side of
the oil case and the filling plug (B) on the top
of the oil case.
When all the oil has drained, replace the two
plugs temporarily and run the pump for about
10 seconds leaving the intake open. Take care
with the oil mist which may appear at the
exhaust. This operation removes the oil from
the functional block.
Drain this oil by removing the draining plug (A).
Replace the draining plug (A) and fill with fresh oil to the appropriate maximum level of
the oil sight glass (C) (see page 20) through the filling orifice (B).
The draining operation can be followed by a flushing operation if the oil is particularly
dirty. This operation requires a volume of oil equal to the capacity of the pump.
After draining the oil case, replace the draining plug. Remove the intake filter, clean it
and replace it. Run the pump at atmospheric pressure, pour the flushing oil very slowly
through the inlet orifice. Take care with oil mist which may develop at the exhaust.
Stop the pump and drain the flushing oil via the draining plug. Replace the plug and fill
with fresh oil (see page 17).
C
A
B
Change of oil type
Compatible oils
EN – 42
2033/2063 m3/h SD and C1 pumps are tested in the factory with A120 oil or A119
for USA unless specified otherwise in the order.
2033/2063 m
otherwise in the order.
When the pump is delivered, a certain quantity of oil remains in the functional block.
Thus, if you wish to use another type of oil, proceed as follows:
Mineral oil can be replaced by another type of mineral oil. Simply flush the pump using
the new oil and fill the pump (
Mineral oils are also compatible with mineral-based synthetic oils (see page 17).
3
/h C2 pumps are tested in the factory with A113 oil unless specified
see page 17).
Change of type of oil
(cont’d)
Incompatible oils
Start-up after pump
disassembly or oil
change
This is the case when, for example, a mineral oil is replaced by a synthetic oil (e.g. A120
by A113).
Synthetic oils are considered to be incompatible with each other for practical reasons:
they are expensive. A mixture may cause slight cloudiness of the resulting mixture,
which could be interpreted mistakenly as a sign of contamination or deterioration.
For the same reasons, clear synthetic and mineral oils (A300), which are also expensive,
are treated as synthetic oils.
These remarks apply to ester or fluorocarbon type synthetic oils and the oils A111,
A113 and A300 (see page 17).
Proceed as follows:
Disassemble the pump completely and clean it (see page 46).
Reassemble it.
Connect an oil mist eliminator to the pump exhaust.
Fill the pump (oil case and sealed housing) with the new oil (see page 17).
NOTE: to replace a synthetic oil by a mineral oil, proceed as for compatible oils.
In all cases, follow the recommendations of the pump integrators for the
choice of the oil to be used.
ENMaintenance
Using noise limiter
The principle of the noise limiter is described page 9. It is adjusted at the
factory when the pump is checked and need only to be readjusted after:
- pump disassembly-reassembly operations,
- changing the oil type (not all oils are miscible in the same proportions with
pumped gases).
• Set pump to normal operating condition (temperature, ambient sound level, etc.).
• Connect a liquid nitrogen trap and a Penning gauge to pump inlet.
• Check the direction of rotation.
• Remove fill exhaust port) and unscrew gas inlet tube with a screwdriver all the way
out.
• Run pump for about one hour at ultimate pressure.
• When the pump is hot,screw in tube, half a turn at a time, monitoring partial
pressure and sound level (wait 3 to 4 minutes after each half turn). When the desired
noise level is set, replace the exhaust port to evaluate the sound level.
EN – 43
Tools and consumable products
Special precautions
Spare parts
Minor kit
Read the safety instructions at the beginning of the maintenance chapter.
Before disassembling the pump, drain it (see page 42).
All the seals and faulty parts should be replaced: provide a seal kit or a
maintenance kit.
For fasted service, specify the following when ordering:
- Pump type.
- Serial number (on pump label).
- Part number (see list at end of manual).
Maintenance kits containing the most frequently used parts are always available at our
sales outlets. Be sure to use these kits so you will have all the parts necessary.
This kit contains all the seals on the pump
which must be replaced at each complete
disassembly. It includes the flat gasket for
oil casing (on former pumps) but also the
o-ring for the new models.
Keep this kit in a dry place, away from
heat and light (sunlight and ultraviolet
light), in order to prevent any hardening
of the elastomers (see AFNOR standards:
“storage conditions for vulcanized
elastomer based products” - FD T.46 022).
Screw kitThis kit contains all screws and washers for
In addition to the seal kit, this kit
contains a set of spare parts to perform
maintenance operations on the pump for
a two year period, under normal operating
conditions.
Study the general precautions listed on Maintenance chapter page 37.
The following steps are necessary to protect the pump as far as possible from the
effects of corrosion:
• Flush pump with a neutral gas (dry nitrogen) during half an hour to prevent toxic or
corrosive gases accumulating in the pump.
• C2 Model: Disconnect the nitrogen lines to the pump. If the sensors are connected,
disconnect them.
• Disconnect the pump from the system and seal off the inlet and exhaust ports. Bring
the pump to the maintenance area immediately.
• Drain pump (see page 42).
Do not store a pump in this condition for any length of time: once the
neutral gas has dissipated, the inside of the oil case will be in contact with
the ambient air laden with water vapor; this may react with the pumped
gases to form acids that may corrode the pump even at room temperature.
The first phase of disassembly is to disassemble the motor, the second is to disassemble
the pumping module.
Follow the chronological order of disassembling instructions.
See the drawings and their part lists in pages N – 1 to N – 13
Disassembling
the motor block
(see page N-2)
C2 Model
Disassembling of the fan
Dismantling gas ballast
(see page N-10)
C2 Model
SD/C1 Model
Unscrew 4 nuts (16) and washers (15).
Remove motor assembly (C) and motor mounting plate (22). The coupling separates
into two halves, one (2) (N-12) on the motor side, the other (1) (N-12) on the pump
side.
In case of important pollution, roughly clean the pump with hot solvents under
pressure.
Prevent fan (17) from rotating by wedging a wooden shim against the side of the frame
and two blades of the fan.
Remove elastomere coupling (1) (N-12).
Unscrew self-locking srew (19) (not reusable) and remove washer (18).
Using two M8 mm extraction screws, remove fan (17) and shim.
Remove screws (26) and washers (27).
Using two M8 mm extraction screws, remove cover (13) with double lip seal (12).
Remove three screws (22) then (23), (40) and remove gas ballast assembly (25) and
O-ring (26).
Unscrew plug (41) (1/8“ NPT).
Remove PTFE tape from plug thread (41) and put new one when reassembling.
Remove the fastening screw (19) (C1 model) from the gas ballast knob (20) and
unscrew it completely, then remove the spring (21) (SD model) and the O-ring (24).
Remove the 3 screws (22) then (23), then remove the gas ballast assembly (25) and the
O-ring (26).
Valve (27)/valve support (28)/washer (29)/circlip (30) are not easy to
disassemble. All parts are available in an equipped gas ballast sub-assembly
(see N-11).
EN – 46
Removing the oil case
(see page N-2)
C1 and C2 ModelsWhen the oil casing has been disassembled, leave the pump under a suction hood for
Disassembling the oil sight glass
(see page N–8)
SD and C2 Models
C1 ModelUnscrew the oil sight glass body (51) using a 50mm spanner and remove the O-ring
Removing accessories
Removing bubbler
(C2 Model) (see page N–10)
Install the pump vertically on a work bench using a hoist.
Remove the nuts (4) then (5) and remove the oil casing (A) and its O-ring (3).
The presence of an oil casing flat gasket
may cause case (A) and frame (B) to
stick together due to aging. Insert lever
between base and bottom of case, and
pry off case. Do not use a hammer or
screwdriver, which could damage the
parts and sealing surfaces.
fifteen to thirty minutes before disassembling it to make sure all the pumped gases
have been evacuated.
Unscrew and remove the 2 nuts (25) and the washers (24). Remove the flange (23), the
protection (22) (SD model), the sight glass (21) and the seal (20). Change the seal prior
to reassemble.
(50).
Remove the circlip (54) then the glass (53) and the O-ring (52
Unscrew (50) with a thin spanner, while securing the base (54). Change the O-ring (51)
prior to reassemble.
Unscrew the two nuts holding the tube fasteners and remove it.
Remove the tube (55).
Unscrew the base (54).
Remove the washer (52) and the O-ring (53) from the inside of the base. Change the
seal prior to reassemble.
Remove the PTFE tape from the base (54) and put a new one when reassembling.
).
ENMaintenance
Removing oil pressure
monitoring system
(C2 Model)
Removing the filter cartridge
(C1 model) (see page N–6)
Remove pressure gauge or monitoring device or plug.
Unscrew tube connector (10) (N-6) located on the oil pump (11) (N-6).
Unscrew (50) with a thin spanner, while securing the base (54). Change the O-ring (51)
prior to reassemble.
Remove the tube (56).
Remove the washer (52) and the O-ring (53) from the inside of the base (54). Change
the seal prior to reassemble.
Remove the PTFE tape from thread (54) and (10) (N-6), and put new one when
reassembling.
Using the specific key (see page 45), remove the filter cartridge (33).
EN – 47
Disassembling the
pumping module
(see page N-4)
Removing the exhaust valve
cover (16) and (32)
Disassembling the pump (cont’d)
Remove the screws (18), (17) then (34), (33) and the cover(s) (16), (32).
Remove the exhaust valves (13), (30) and their springs (15) (31) and for 63C1 model,
the washer (14).
Disassembling oil pump (11)
(see page N–6)
22
15
5
23
16
21
14
20
13
17
3
18
4
19
19
12
Disassembling the rear flange (4)
Removing HP rotor (9) and
HP stator (12)
C1 model: Remove the 2 screws (32) and remove the case bushing (31).
Remove screws (21) then (18) and equipped body (11).
Remove screws (20) then (19) and cylinder (17), spring (16), piston (15) and diaphragm
(14).
Remove seat (13) and O-ring (12). Change the O-ring prior to reassemble.
Unscrew the oil inlet tube fixation (3) and (4) and remove the stop (5) (SD and C1 models). Remove the oil inlet tube (1).
Unscrew air inlet tube (7) and remove spring (6).
If necessary, note settting of air inlet tube (7): number of turns until tube stops moving
turning clokwise.
Remove vane (9).
Remove 4 nuts (1) then (2).
Insert two screwdrivers into the two notches and twist to remove plate off pins (11).
Pull flange (4) straight out, holding HP rotor (9) in place.
Remove O-ring (5).
Remove the HP rotor (9) by sliding it out of the HP stator (12).
Remove vanes (10) and their springs (39).
Insert two screwdrivers in the two notches of the HP stator (12) and twist to remove
plate off pins (19).
Remove HP stator (12) straight out.
Remove the O-ring (20).
EN – 48
Removing flange (21)
SD ModelOil jet (23) lubricates the first stage. Do not remove it for cleaning.
Removing LP rotor (26)
and LP stator (29)
Insert two screwdrivers in the notches of the flange (21) and release the flange (21).
Remove the O-ring (24).
Remove tube (37) and O-ring (36).
When reassembling, spray with compresses air to remove any obstructions.
Remove the LP rotor (26) by sliding it out of the LP stator (29).
Remove vanes (27) and their springs (38).
Insert two screwdrivers in the two notches of the LP stator (29) and twist to remove
plate of pins (7) (N-2).
Remove LP stator
(29) straight out.
Remove the O-ring (35).
Remove tube (38) and O-ring (37) (N-2).
Disassembling inlet nipple (9)
(see page N-10)
Disassembling exhaust nipple (3)
(see page N-8)
SD Model
Remove 4 screws (4), (7) then (3), (6) and remove clamps (2) and (5).
Remove nipple (9) and its O-ring (8).
Remove the metallic filter (31) and clean it.
Remove the protection (1).
To remove the exhaust nipple (3), the nipple must be connected to a line with a NW40
centering ring with O-ring and quick connect clamp. Use the quick connect clamp to
unscrew the nipple (3).
Remove the O-ring (4).
Remove the pin (7) and the filter (9), the sleeve (8), the shaft (6), the valve (2) and the
circlip (5).
Cleaning metal
components
Cleaning the oil level
sight glass
SD, C2 series pump
Solvents are required to clean components.
Standard precautions should be taken in compliance with the manufacturer's
instructions.
After use in mineral or synthetic oil, clean the metal components with a mineral
products based solvent such as AXAREL
NAPHTESOL
(4)
. Proceed as follows:
(1)
, CARECLEAN
(2)
, PREMACLEAN
(3)
,
• clean when cold or hot (max. 45°C) by dipping or using a cloth,
• vacuum dry in a ventilated oven,
• the component must be cleaned a second time with alcohol.
After use in (perfluorinate) synthetic oil, clean the metal components in a solvent
such as GALDEN S 90™
(5)
and proceed as follows:
• clean when cold by dipping or using a cloth,
• dry the components in the air or with compressed air.
After use in (non-perfluorinate) synthetic or mineral oil, clean the metal
components with a solvent such as alcohol and proceed as follows:
• clean when cold by dipping or using a cloth,
• dry the components in the air.
Industrial washing solutions can also be used. The cleaning operation should be
followed by vacuum drying.
When cleaning the plastic sight flass, avoid contact with alcohol or alcohol based
washing solutions. Clean the component with a solvent but do not dip it, and rinse it
immediately.
ENMaintenance
C1 series pump
Oil casing/frame
surfaces cleaning
The sight glass of these pumps is made of glass. It can be cleaned with commun used
solvents.
Replace the oil casing O-ring each time the pump is disassembled.
• If the oil casing was equipped with a flat gasket, clean the oil casing and central
housing surfaces by scraping them with a piece of wood or plastic to avoid scratching
them. When reassembling, oil the frame and case surfaces lightly.
• If the oil casing was equipped with an O-ring, lubricate it with the grease delivered in
the minor kit before reassembling.
(1)
DUPONT DE NEMOURS registered trademark
(2)
CASTROL registered trademark
(3)
DOW registered trademark
(4
) Nippon Oil Corporation registered trademark
(5)
MONTEDISON registered trademark
EN – 49
Replacement of shaft seals
Specific tools
Recommended tools
Extracting a shaft
seal from its housing
Assembling
the shaft seal
• Specific extraction tool.
• Specific assembly mandrel.
• A support plate (or washer).
• A flat screwdriver.
• A hammer.
With the flange flat: the seal is extracted using
a screwdriver, resting on the plate (or washer) so
as not to damage the seal housing.
The seal housing is lubricated with the lubricant
used in the pump.
The flange is resting on a flat surface.
According to the direction of assembly, the seal
is fitted on the assembly mandrel.
Using a press or a hammer, the seal is inserted in its
housing.
Check the position of the seal: it must lean against
its bearing.
(*) 24.5 mm according to product configuration.
washer
(*)ø 19.5
ø 34.5 ± 0.1
+0.2
0
5.5 ± 0.2
+0.2
1
0
à 45°
Mandrel
Single lip seal greasing
Double lip seal greasing (12)
The lip of the seal is lubricated with the lubricant used in the pump.
The double lip seal was installed on the mandrel according to the right direction of assembly and fit it into the seal
holder (13) (see § Assembling the shaft seal).
Use only the grease delivered in the minor kit.
Put some spots of grease between the lips of the seal as
shown on the picture.
Spread meticulously the grease
to fill in the space between
the two lips: be aware to not
damage the lips! than remove
the excess of grease.
EN – 50
Direction of assembly
of shaft seals
They are fitted using the assembly mandrel according to the direction of assembly
below:
BP statorHP stator
BP rotorHP rotor
Frame
Rear flangeFlange
Assembly the
protective sleeve
Seal holder
To install the flanges, use protective sleeve and oil it
before mounting flange (or wrap end of shaft with
adhesive tape).
Sleeve
Lip seal
Rings
Double lip seal
ENMaintenance
EN – 51
Reassembling the pump
Component
preparation
Before reassembly• Coat all pump parts and lips of shaft seals with clean oil. Make sure seals are
Assembling moving
parts
(see page N-4)
• All parts must be dry so that no solvent remains, particularly in blind holes
• Check that the lubrication holes are not blocked.
• Oil used for lubricate pump parts must be the same as oil used for pump operation.
correctly installed (see page 50).
• Fill lubrication holes of bearings and seal seats with oil.
• Do not put too much oil in the bottoms of the holes for the plate/stator
alignments pins.
• Tighten nuts without forcing maximum torque (see chapter «Nomenclature»)
• Rest the frame (B) on a flat surface in order to assemble the pump verticaly.
The bushings in the frame and plates can be replaced, but special machining is
required whenever a bushing is changed. Consult service center for assistance.
• Be aware of the LP valve (27) (N-4) direction of assembly: their grooves must be
visible in a same side of view (see the picture).
• Reassemble moving parts in reverse order of disassembly.
• Before replacing valves, pour a little oil into the stators through the valve holes.
• Before reassembling oil pump (11) (N-6), assemble fan (17) (N-2): using a new self-
locking screw (19) (N-2) to tighten it (Maintenance kit page 44).
1 groove
2 grooves
Installing bubbler (C2 Model)
(see page N-10)
Assembling oil pump
(see page N-6)
9
Rotor
Before tightening nuts (1) (N-4) to fasten rear flange (4) (N-4), replace bubbler as
follows:
• Put a PTFE tape on base (54) and gas connection threads.
• Set the pipe (55) in the central housing (1).
• Put a new seal (53) and the washer (52) on the upper end of the pipe and then
screw it in the base (54).
• Set the two tube fasteners on the studs and screw it in the two nuts (1) (N-4).
• Put a new seal on (51) and screw it on (50).
Mount all necessary parts on oil pump body
proceeding in reverse order as described page 46.
Place slot of oil pump rotor in horizontal position
(parallel to pump base).
Fan can be used to turn rotor, but never insert
a screwdriver in the rotor slot as this may
cause damage.
Place vane (9) in its slot.
With pump horizontal, let pump body (11) drop
by gravity on to rotor.
With pump vertical, turn pump body (11)
clockwise around alignment pin (8), to bring
it into contact with the rotor without forcing.
Never rest pump body on rotor; this will
eliminate bearing play.
Fit two screws (21) equipped with washer (18). They must be tightened first (21a), and
(21b) second (maximum torque: 10 Nm.)
8
21b
11
21a
EN – 52
Oil inlet tube (1) reassembly
(C2 Model)
Air inlet tube (7) reassemblyInstall the spring (6) and screw the air inlet tube (7) and unscrew it of the number of
When positioning the oil inlet tube (1), make sure that screw is properly centered in the
centering hole, the collector located at the upper part of the tube must line up under
the oil fill port in the oil casing.
turns given, when disassembling (usually 3 or 4 turns) (see page 48).
Installing the filter cartridge (33)
(C1 model)
Installing oil pressure
indicator
(C2 Model) (see page N-10)
Motor coupling
(see page N-12)
Install the case bushing (31) on the oil pump (11) (the direction is defined by the
centering pins which allow to have a right oil circulation in the cartridge). Than, screw
the filter cartridge (33).
Place a strip of Teflon tape on thread of connectors (54) and (10) (N-6).
Position one end of tube (56) in connector (10) (N-6) and the other end in the hole in
the frame provided for this purpose.
Install a new o-ring (52), the washer (53) on the top end of the tube and screw (54) on
the frame (1).
Screw connector (10) (N-6) into oil pump (11) (N-6).
Change the O-ring (51) and screw the screw (50).
To make sure motor coupling does not
touch fan, adjust distance from motor
plate (dimension A on the drawing):
To perform this adjustment, use adjusting
tool in tool kit (see page 45).
Pump modelsDimension «A»
2033 SD - C1 - C216.6 ± 0.5 mm
2063 SD - C1 - C2 23.3 ± 0.5 mm
ENMaintenance
Installing the oil sight glass
(see page N-8)
SD, C2 Series
C1 series pump
Fill with oil
A
Install a new flat seal (20) then the sight glass (21), the protection (22) (SD model) and
the flange (23).
Secure with 2 screws (25) equipped with washers (24) to a maximal torque of 12Nm ±
2 Nm.
Place the O-ring (52), the glass (53) and the circlip (54) on the Oil sight glass body (51).
Place the O-ring (50) and screw the oil sight glass body equipped (
spanner.
After reassembling, fill the oil casing with oil (see page 17) before start-up the pump
(see page 29).
51) using a 50 mm
EN – 53
Declaration of contamination
Procedure for returning adixen products
You wish to return an adixen product for maintenance. The equipment will be dismantled and
possibly cleaned by a technician from our service centre. Pfeiffer Vacuum requires this form to
be completed to preclude the potential health risk to its service personnel that can occur when
receiving, disassembling, or repairing potentially contaminated products..
Please fill in the present DECLARATION OF CONTAMINATION, print it and attach it to the product
before shipping to your closest service center.
Equipment returned without this form fully completed, and secured to outside of package, will be
returned to customer unprocessed, at his cost.
If following inspection and quotation, customer elects to not proceed with repair, he will be
subject to service fee to cover product decontamination, disassembly, cleaning and evaluation
costs.
Please contact service center for any further recommendations.
We wish to draw your attention to the following points:
Equipment must be drained of fluids and residue, securely packaged and shipped prepaid.
Concerning the closing of the ports (inlet & outlets of the product), metallic airtight blank
flanges should be used if toxic or copper gases have been pumped.
The risk may be of the following nature:
Chemical: Danger to health, risks of explosion, fire, risks for the environment. Please indicate
•
the chemical formula and name of the gases or substances that have been in contact with the
equipment (pump, detector, gauge or accessory).
Biological: In case of contamination (such as pathogenic germs, micro-organisms (bacteria,
•
viruses, etc.) classes 1 to 4 and group E), we are currently unable to decontaminate and recycle
such material without risk to the safety of our staff. Please contact us before sending the product
to the service center.
Radioactive: In case of contamination, our Service Center is currently unable to decontaminate
•
and recycle such material without risk to the safety of our staff. A written evidence of
decontamination will be requested prior to any service action. Please contact us before sending
the product to the service center.
•
Copper contamination: Copper based by-products formed in sputtering or etching processes are
considered as a poison in some semi-conductor processes. A specific treatment is required, which
generates extra cost.
In the event of chemical contamination, please indicate the following
gases or substances:
Pump
Gases
reaction (C)
Exhaust
(A)+(B)+(C)
Gas introduced (A)
Reactor
Substances
produced by
reaction (B)
·
Gases (or substances) introduced into the reactor and which may be found at the exhaust (A).
· Gases (or substances) resulting from the reaction or process (B).
· Gases (or substances) that may possibly be formed inside the pump (due to a thermodynamic or chemical reaction,
Composants de maintenance / Maintenance components / Unterhaltung Teile
Plan de montage cuve et bâti .............................................Oil casing and central housing assembly drawing .................... Gesamtplan Ölbehälter und Pumpenträger ................................... N-2
Nomenclature cuve et bâti ..................................................Oil casing and central housing part list .................................... Nomenklatur Ölbehälter und Pumpenträger ................................. N-3
Plan du bloc fonctionnel (D) ................................................Pumping module drawing (D) .................................................. Gesamtplan Pumpenblock (D) ......................................................N-4
Nomenclature bloc fonctionnel (D)......................................Pumping module part list (D) ................................................... Nomenklatur Pumpenblock (D) ..................................................... N-5
Plan système de lubrification pompe à huile (E) ..................Oil pump system drawing (E) ................................................... Gesamtplan Ölpumpsystem (E) ..................................................... N-6
Nomenclature système de lubrification ..............................Oil pump system part list (E) .................................................... Nomenklatur Ölpumpsystem (E) ...................................................N-7
pompe à huile (E)
Plan de détail cuve (A) ........................................................Oil casing detail drawing (A) .................................................... Einzelplan Ölbehälter (A) .............................................................. N-8
Nomenclature cuve (A) .......................................................Oil casing part list (A) ..............................................................Nomenklatur Ölbehälter (A).......................................................... N-9
Plan de détail bâti (B) ..........................................................Central housing detail drawing (B) ........................................... Einzelplan Pumpenträger (B) ....................................................... N-10
Nomenclature bâti (B) .........................................................Central housing part list (B) ..................................................... Nomenklatur Pumpenträger (B) .................................................. N-11
Plan ensemble motorisation (M) ..........................................Motor assembly drawing (M) ................................................... Gesamtplan Motor (M) ............................................................... N-12
Nomenclature ensemble motorisation (M) ...........................Motor assembly part list (M) ....................................................Nomenklatur Motor (M) ............................................................. N-13
N – 1
Nomenclature
N – 2
Plan de montage cuve et bâti
Oil casing and central housing assembly drawing
Ölbehälter und Pumpenträger Gesamtplan
10a
8
9
7
6
SD Model
C1 Model
5
4
3
2
1
A
37
38
D
E
M
22
21
C2 model
18
17
16
15
14
13
10
11
B
12a
12
26
27
28
29
30
31
32
33
34
35
20
19
23
24
25
A B D E M Detailed next pages
Rep.Part
4/9/16
Nut H M81.5
Nut H M103.0
Stud M8-28 ZN10C1.5
6
Stud M8-28 SS1.5
Stud M10-30 3.0
Stud M8-201.5
14
Stud M10-253.0
19Screw CHC M10-204.5
Screw CHC M8-251.5
20
Screw CHC M8-201.5
Clamping torque
(DaN.m)
Nomenclature cuve et bâti / Oil casing and central housing part list / Ölbehälter und Pumpenträger Nomenklatur
REPDÉSIGNATIONSPECIFICATIONBENENNUNG
2033 C1
2033 SD
2063 SD
A CuveOil casingÖlbehälter1 1 1 1 1 1see N-9
B BâtiCentral housingPumpenträger1 1 1 1 1 1 see N-11
1 Frein d’axeCirclipsAchsebremse1 1 1 1 1 1
Joint à lèvre
2
20X35X7 FMP81
3 Joint torique c 3,53 - d 221,85 O-ring c 3.53 - d 221.85Dichtung c 3,53 - d 221,85 111
3 Joint torique c 3,53 - d 278,99 O-ring c 3,53 - d 278,99Dichtung c 3,53 - d 278,99111
4 Ecrou H M8Nut H M8Mutter H M8888
4 Ecrou H M10Nut H M10Mutter H M10888
5 Rondelle D10Washer D10Unterlegscheibe D10888
5 Rondelle D8Washer D8Unterlegscheibe D8888
6 Goujon M8-28 INOXStud M8Stehbolzen M8888054209
6 Goujon M10-25Stud M10Stehbolzen M10888054441
7 Pion de positionnement D6Pin D6Zylinder D6222071240
7 Pion de positionnement D8Pin D8Zylinder D8222071042
B BâtiCentral housingPumpenträger1 1 1 1 1 1 see N-11
8 Rondelle D10Washer D10Unterlegscheiter D101 1 1 1 1 1
9 Equerre fixation Square supportWinkel Träger1 1 1 1 1 1 A465526
10 Vis CHC M10 x 30Screw CHC M10-30Schraube CHC M10-301 1 1 1 1 1075548
10a MousquetonSnap hookKarabiner Haken1 1118743
11 Pion de positionnement D6Pin D6Zylinder D6222071041
11 Pion de positionnement D8Pin D8Zylinder D8222071046
Joint à 2 lèvres
12
20X35X7 FMP81
12a Joint torique c 2,5 - d 38O-ring c 2.5 - d 38Dichtung c 2,5 - d 381 1 1 1 1 1
33 Idem 17Idem 17Ebenso 17
34 Idem 18Idem 18Ebenso 18
35 Idem 5Idem 5Ebenso 5
2
22222
2
22222
1
11
4
44444
4
44444
1
11111
36 Joint torique c 2,00 - d 8,00 O-ring c 2.00 - d 8.00Dichtung c 2,00 - d 8,00111111
37 Tube porte-jointTubeRöhre
38 Ressort de paletteVane springSchieberfeder
39 Idem 38Idem 38Ebenso 38
1
11111
6
66666
3
33333
2063 C2
A110543S
A110544S
A214797S
A214806S
11
REF.
P/N
Bestell.
Nr
054413S
054190S
054434S
065001
054182S
054439S
065074S
065545S
054120S
054411S
054428
054191
054442
054140
-
Lot joints / Minor kit / Dichtungssatz Lot maintenance / Major kit / Wartungssatz Lot visserie / Screw kit / Schraubensatz
Nomenclature
Nomenclature
N – 6
Plan système de lubrification pompe à huile (E)
Oil pump system drawing (E)
Ölpumpsystem Gesamtplan (E)
Nomenclature système de lubrification pompe à huile (E) / Oil pump system part list (E) /
REPDÉSIGNATIONSPECIFICATIONBENENNUNG
1 Tube de prise d'huileOil admission tubeÖleinlass1054268
1 Tube de prise d'huileOil admission tubeÖleinlass1065509
1 Tube de prise d'huileOil admission tubeÖleinlass1065047
1 Tube de prise d'huileOil admission tubeÖleinlass1065046
1 Tube de prise d'huileOil admission tubeÖleinlass1065058
1 Tube de prise d'huileOil admission tubeÖleinlass1065534
2 GicleurJetDüse111111054241
3 Vis CHC M6-12Screw CHC M5-12Schraube CHC M5-12111111
4 Rondelle D5Washer D5Unterlegscheibe D5111111
5 Butée pour tubeStop tubeAnschlag1111065510
6 RessortSpringFeder111111
7 Tube de prise d’airAir admission tubeLufteinlass111111054212
8 Pion de positionnement D6Pin D6Zylinder D6111111071040
9 PaletteVaneSchieber11
9 PaletteVaneSchieber11
9 PaletteVaneSchieber1
9 PaletteVaneSchieber1
10 RaccordConnectorVerschluss11076635
11 Corps de pompe à huileOil pump bodyÖlpumpenkörper1054253
11 Corps de pompe à huileOil pump bodyÖlpumpenkörper1065513
11 Corps de pompe à huileOil pump bodyÖlpumpenkörper1054255
11 Corps de pompe à huileOil pump bodyÖlpumpenkörper1065512
11 Corps de pompe à huileOil pump bodyÖlpumpenkörper1065071
11 Corps de pompe à huileOil pump bodyÖlpumpenkörper1065536
12 Joint torique c 2,70 - d 10,50 O-ring c 2.70 - d 10.50Dichtung c 2,70 - d 10,50111111
13 SiègeSeatSitz11054144
13 SiègeSeatSitz1111054203
14 MembraneMembraneMembran111111
15 PistonPistonKolben11083331
15 PistonPistonKolben1111054194
16 RessortSpringFeder111111
17 CylindreCylinderZylinder11083077
17 CylindreCylinderZylinder1111054195
19 Rondelle D8Washer D8Unterlegscheibe D8222222
Lot joints / Minor kit / Dichtungssatz Lot maintenance / Major kit / Wartungssatz Lot visserie / Screw kit / Schraubensatz
Nomenclature
N – 8
Plan de détail cuve (A)
Oil casing detail drawing (A)
Einzelplan Ölbehälter (A)
Rep.Part
25Screw CHC M8-201.5
Clamping torque
(DaN.m)
30Screw CHC M6-200.65
3$¬-ODEL
B
E
A
#¬-ODEL
#¬-ODEL
Nomenclature cuve (A) / Oil casing part list (A) / Nomenklatur Ölbehälter (A)
REPDÉSIGNATIONSPECIFICATIONBENENNUNG
1 Protecteur platFlat protectorBlindflansche
Anneau porte-joint DN40
1a
équipé d’un joint
1b Collier de serrage Quick connect clampSpannring
1e Obturateur DN 40 ISO KF
2 Soupape de refoulementExhaust valveAuspuffventil
3 Embout de refoulementExhaust nippleAuspuffstutzen
3 Embout de refoulementExhaust nippleAuspuffstutzen
4 Joint torique c 3,00 - d 44,00 O-ring c 3.00 - d 44.00Dichtung c 3,00 - d 44,00
5 CirclipsCirclipsKlemmen
6 Axe refoulementExhaust valve shaftAuspuffventilachse
7 GoupilleForelockStift
8 RondelleWasherUnterlegscheibe
9 Filtre de refoulementexhaust filterAuspuff-Filter
10 BouchonFill plugStopfen
10 BouchonFill plugStopfen
11 Joint torique c 3,00 - d 41,00 O-ring c 3.00 - d 41.00Dichtung c 3,00 - d 41,00
11 Idem 4Idem 4Ebenso 4
15 CuveOil caseBehälter
15 CuveOil caseBehälter
15 CuveOil caseBehälter
15 CuveOil caseBehälter
15 CuveOil caseBehälter
15 CuveOil caseBehälter
20 Joint torique c 3,53 - d 63,10 O-ring c 3.53 - d 63.10Dichtung c 3,53 - d 63,10
21 Verre de voyantGlassGlas
21 Voyant plastique (PA)Oil sight glass (PA)Glas (PA)
22 Protection verreGlass protectionGlasprotektion
23 Bride de voyantOil sight glass flangeÖlschauglasklammer
23 Bride de voyantOil sight glass flangeÖlschauglasklammer
24 Rondelle D8Washer D8Scheibe D8
25 Vis CHC M8-20Screw CHC M8-20Schraube CHC M8-20
30 Vis CHC M6-20Screw CHC M6-20Schraube CHC M6-20
31 Rondelle D6Washer D6Scheibe D6
32 BrideFlangeFlansch
33 Joint torique c 5,33 - d 91,44 O-ring c 5.33 - d 91.44Dichtung c 5,33 - d 91,44
34 Joint torique c 3,00 - d 96,00 O-ring c 3.00 - d 96.00Dichtung c 3,00 - d 96,00
40 BouchonPlugStopfen
N – 9
Centering ring with o-ring
DN 40 ISO KF
Blank off flange DN 40
ISO KF
Zentrierring mit
Rundschnurring DN 40 ISO KF
Blindflansche DN 40 ISO KF
2033 C1
2063 C1
2033 SD
2063 SD
1111
11
11
111111
11
11
11
11
11
11
11
1
1
1111
11
11
11
2222
2222
11
2033 C2
11
11
11
1111
1111
1111
1
1
1
1
11
11
33
33
11
11
11
REF.
P/N
Bestell.
2063 C2
Nr
068012
068230
083267
068595
054131
054205
054133
054223
073309
100116
082925
054213
065158
104008
065566
104008
065051
065532
103307
105452
103308
104483
075608
054214
102847
REF.
2033 C2
2063 C2
11
P/N
Bestell.
065078
REPDÉSIGNATIONSPECIFICATIONBENENNUNG
2033 C1
2033 SD
40 BouchonPlugStopfen
41 Joint torique c 2,70 - d 16,90 O-ring c 2.70 - d 16.90Dichtung c 2,70 - d 16,90
42 Bouchon M10Plug M10Stopfen M10
43 Joint torique c 2,70 - d 10,50 O-ring c 2.70 - d 10.50Dichtung c 2,70 - d 10,501 1
50 Joint torique c 3,60 - d 37,30 O-ring c 3.60 - d 37.30Dichtung c 3,60 - d 37,301 1
51 CorpsBodyKörper1 1054198
52 Idem 4Idem 4Ebenso 41 1
53 Disque verreGlassGlas1 1054199
54 CirclipsCirclipKlemmen1 1
60 BouchonPlug1 1 1 1 082926
111111
2063 C1
2063 SD
1111
Nr
Lot joints / Minor kit / Dichtungssatz Lot maintenance / Major kit / Wartungssatz Lot visserie / Screw kit / Schraubensatz
Nomenclature
N – 10
Plan de détail bâti (B)
Central housing detail drawing (B)
Einzelplan Pumpenträger (B)
'AS¬"ALLAST
Rep.Part
Clamping torque
(DaN.m)
4Screw CHC M6-200.65
22Screw CHC M6-120.65
B
D
C
3$¬-ODEL
#¬-ODEL
A
3$#¬-ODEL
#¬-ODEL
Nomenclature bâti (B) / Central housing part list (B) / Pumpenträger Nomenklatur (B)
Lot joints / Minor kit / Dichtungssatz Lot maintenance / Major kit / Wartungssatz Lot visserie / Screw kit / Schraubensatz
Nomenclature
Pfeiffer Vacuum stands for innovative and custom vacuum
solutions worldwide. For German engineering art, competent
advice and reliable services.
Even since the invention of the turbopump, we’ve been setting
standards in our industry. And this claim to leadership will continue
to drive use in the future.
Leading. Dependable.
Customer Friendly.
You are looking for a
perfect vacuum solution?
Please contact us:
Pfeiffer Vacuum Products GmbH
Berliner Strasse 43
35614 Asslar - Germany
T +49 6441 802-0
F +49 6441 802-202
Info@pfeiffer-vacuum.de
www.pfeiffer-vacuum.de
adixen Vacuum Products
98 avenue de Brogny
74009 Annecy Cedex - France
T +33 (0) 4 50 65 77 77
F +33 (0) 4 50 65 77 89
info@adixen.fr
www.adixen.com
Ed 04-Date: 07/12-P/N:105527
*105527*
Leading. Dependable.
Customer Friendly.
Pfeiffer Vacuum stands for innovative and custom vacuum
solutions worldwide. For German engineering art, competent
advice and reliable services.
Even since the invention of the turbopump, we’ve been setting
standards in our industry. And this claim to leadership will continue
to drive use in the future.
You are looking for a
perfect vacuum solution?
Please contact us:
Pfeiffer Vacuum Products GmbH
Berliner Strasse 43
35614 Asslar - Germany
T +49 6441 802-0
F +49 6441 802-202
Info@pfeiffer-vacuum.de
www.pfeiffer-vacuum.de
adixen Vacuum Products
98 avenue de Brogny
74009 Annecy Cedex - France
T +33 (0) 4 50 65 77 77
F +33 (0) 4 50 65 77 89
info@adixen.fr
www.adixen.com
*105527*
Ed 04-Date: 07/12-P/N:105527
Loading...
+ hidden pages
You need points to download manuals.
1 point = 1 manual.
You can buy points or you can get point for every manual you upload.