Omron ZN-A2502, ZN Series, ZN-A2502D, ZN-A4105D, ZN-A4105 System Manual

...

Clean Sensing System

ZN Series

System Manual

Cat. No. Z267-E1-01

Introduction

Thank you for purchasing the ZN. This manual provides only information, such as system components and setup procedures, that is required when using the ZN Series in a system. For details on product functions, performance and handling methods of individual products, refer to the Instruction Sheet packaged with the respective product. When using the ZN, be sure to observe the following:

• The ZN must be operated by personnel knowledgeable in electrical engineering.

• To ensure safe use of the product, please read the Instruction Sheet packaged with each product and this manual to deepen your understanding of the product.

• Please keep this manual and the Instruction Sheet packaged with each product in a safe place so that they can be referred to whenever necessary.

Introduction

Section 1

Section 2

Section 3

Section 4

APPLICATION CONSIDERATIONS (Please Read)

FEATURES

UPGRADING THE SYSTEM

BASIC KNOWLEDGE OF CLEAN SENSING SYSTEMS

APPENDICES

Introduction ‚Í‚¶‚ß‚É ‘æ 1 Í‘æ 2 Í‘æ 3 Í‘æ 4 Í

Section 1 Section 2 Section 3 Section 4

System Manual

Clean Sensing System ZN Series

Introduction

READ AND UNDERSTAND THIS DOCUMENT

Please read and understand this document before using the products. Please consult your OMRON representative if you have any questions or comments.

WARRANTY

OMRON’s exclusive w arranty is that the products are f ree from defects in materials a nd workmanship for a period of one year (or othe r pe ri od if specified) from date of sale by OMRO N .

OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR IMPLIED, REGA RDING NONINFRINGEMENT, MERCHANTABILITY, OR FITNESS FOR PARTICULAR PURPOSE OF THE PRODUCTS. ANY BUYER OR USER ACKNOWLEDGES THAT THE BUYER OR USER ALONE HAS DETERMINED THAT THE PRODUCTS WILL SUITABLY MEET THE REQUIREMENTS OF THEIR INTENDED USE. OMRON DISCLAIMS ALL OTHER WARRANTIES, EXPRESS OR IMPLIED.

LIMITATIONS OF LIABILITY

OMRON SHALL NOT BE RESPONSIBLE FOR SPECIAL, INDIRECT, OR CONSEQUENTIAL DAMAGES, LOSS OF PROFITS OR COMMERCIAL LOSS IN ANY WAY CONNECTED WITH THE PRODUCTS, WHETHER SUCH CLAIM IS BASED ON CONTRACT, WARRANTY, NEGLIGENCE, OR STRICT LIABILITY.

In no event shall responsi bility of OMRON for any act exceed the individual price of the product on which liability is asserted.

IN NO EVENT SHALL OMRON BE RESPONSIBLE FOR WARRANTY, REPAIR, OR OTHER CLAIMS REGARDING THE PRODUCTS UNLESS OMRON’S ANALYSIS CONFIRMS THAT THE PRODUCTS WERE PROPERLY HANDLED, STORED, INSTALLED, AND MAINTAINED AND NOT SUBJECT TO CONTAMINATION, ABUSE, MISUSE, OR INAPPROPRIATE MODIFICATION OR REPAIR.

SUITABILITY FOR USE

THE PRODUCTS CONTAINED IN THIS DOCUMENT ARE NOT SAFETY RATED. THEY ARE NOT DESIGNED OR RATED FOR ENSURING SAFETY OF PERSONS, AND SHOULD NOT BE RELIED UPON AS A SAFETY COMPONENT OR PROTECTIVE DEVICE FOR SUCH PURPOSES. Please refer to separate catalogs for OMRON’s safety rated products.

OMRON shall not be responsible for conform ity with any standards, codes, or regulations that apply to th e combination of produc ts in the customer’s application or us e of th e pr oduct.

At the customer’s request, OMRON will provide applicable third party certification documents identifying ratings and limitations of use that apply to the products. This information by itself is not sufficient for a complete determination of the suitability of the produ cts in comb ination w ith the en d produc t, machi ne, syste m, or other application or use.

The following are some examples of applications for which particular attention must be given. This is not intended to be an exhaustive list of all possible uses of the products, nor is it intended to imply that the uses listed may be suitable for the p ro ducts:

• Outdoor use, uses inv olving potential chemical contamination or electrical interference, or conditions or uses not described in this document.

System Manu al

Introduction

• Nuclear energy control systems, combustion systems, railroad systems, aviation systems, medical equipment, amu sem ent ma chi ne s, v eh ic le s, saf et y eq ui pme nt , an d ins t al la t io ns su bj ec t t o separate industry or government regulations.

• Systems, machin es, and equipment that could present a ris k to lif e or pro per t y.

Please know and obse rv e all p ro hi bi tio ns of use applicable to the products. NEVER USE THE PRODUCTS FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR

PROPERTY WITHOUT ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS, AND THAT THE OMRON PRODUCT IS PROPERLY RATED AND INSTALLED FOR THE INTENDED USE WITHIN THE OVERALL EQUIPMENT OR SYSTEM.

PERFORMANCE DATA

Performance data given in this document is provided as a guide for the user in determining suitability and does not constitute a warranty. It may represent the result of OMRON’s test conditions, and the users must correlate it to actual application requirements. Actual performance i s su bj ect t o th e O M RO N Warranty and Limitations of Liability.

CHANGE IN SPECIFICATIONS

Product specifications and accessories may be changed at any time based on improvements and other reasons.

Introduction

It is our practice to change model numbers when published ratings or features are changed, or when significant construction chang es are made. However, some specifications o f the product may be changed without any notice. When in do ubt, special m odel numbe rs may be a ssigned to fix or establish key s pecificat ions for your application on your request. Please consu lt with your OMRON repres entative at any time to conf irm actual specifications of purchased products.

DIMENSIONS AND WEIGHTS

Dimensions and weights are nominal and are not to be used for manufacturing purposes, even when tolerances are shown.

ERRORS AND OMISSIONS

The information in this do cument has been carefully checked and i s believed to be accurate; however, no responsibility is assum ed for clerical, typographical, or proofreading errors, or omissions.

PROGRAMMABLE PRODUCTS

OMRON shall not be responsible for the user’s prog ra m m in g of a pro gr ammable product, or any conse quence thereof.

This document shall not be copied for sales or promotions w ithout permission.

This document is protected by copyri ght and is inten ded solely for use in conjunc tion with the pr oduct. P lease notify us before cop ying or reproducing this docum ent in any manner, for any other purpose. I f copying or transmitting this document to another, please copy or transmit it in its entirety.

System Manu al

iii

Introduction Precautions for Safe Use

Introduction

Precautions for Safe Use

The following points are important to ensure safety, so make sure that they are strictly observed.

■ Power Supply and Wiring

• When connecting multiple Air Clean Units to build a system, use a commercially available LAN cable (straight type: Category 5E or higher).

• On models that can be connecte d t o A ir Clea n Units, such as the Air P artic le S ens or (ZN-PDA12) and Interfac e Unit (ZN-SF12), use the cable from the body to directly connect to the unit.

• To extend the cable mentioned above, a commercially available LAN connector female to female, straight type) and a LAN cable (straight type: Category 5E or higher) must be used.

• The cables must be 100 m or shorter in total length.

For details on other precautions for safe use and precautions for correct use, refer to the Instruction Sheet for the respective device, and make sure that they are strictly observed.

System Manu al

Editor's Note

● Title of each section

● Header

● Cross-header

● Index label

● Overview and points of the

function described

● Operation procedure and supplementary explanat ion

Indicates the contents of the page.

Shows the chapter number and contents.

Shows the operation flow and setup method.

Explains the operation procedure and the display status resulting from execution of the operation. Helpful information regarding operation and reference pages is introduced here using symbols.

* This page does not exist.

● Overview of the section

Page Format

Introduction

Editor's Note

Introduction

System Manu al

Introduction Editor's Note

Introduction

Notational Conventions

■ Menu

In this manual, menu items displayed on the screen are enclosed with [ ].

■ Operation procedure

Operation steps are numbered to indicate their order .

■ Visual Aids

Indicates points that are important to achieve the full product performance, such as operational precautions and application procedures.

Indicates pages where related information can be found.

Indicates information helpful in operation.

System Manu al

CONTENTS

Introduction

CONTENTS

Introduction

Precautions for Safe Use iv Editor's Note v

Page Format v Notational Conventions vi

CONTENTS vii

Section 1 FEATURES 1

What is the "Clean Sensing System?" 2

System Features 2 Features of the Clean Sensing System 4

System Configuration Examples 7

Direct Clean Sensing System 7 Multi-Clean Sensing System 11

CONTENTS

Section 2 UPGRADING THE SYSTEM 13

Before Upgrading the System 14

Flow of Operations for Upgrading the System 14 Installing the Exclusive Monitoring Software 15

Setup Methods Suited to Specific Applications 18

Automatically Adjusting the Air Volume Level 18 Monitoring/Logging the Amount of Particles 25 Detecting the Cleanliness of Multiple Processes 31

System Manu al

vii

Introduction CONTENTS

Introduction

Section 3 BASIC KNOWLEDGE OF CLEAN SENSING SYSTEMS 35

Feedback Control 36

CONTENTS

What is "Feedback?" 36 How Feedback Control Works 40

Clean Sensing 44

Principle of "Particle Count" 44 What is "Cleanliness?" 45

Section 4 APPENDICES 47

Maintenance 48 Troubleshooting 50

Troubleshooting 50 Error Messages and Countermeasures 51

Specifications and Dimensions 53 List of Products 66 INDEX 69 Revision History 72

viii

System Manu al

Section 1 FEATURES

What is the "Clean Sensing System?" 2

System Features 2 Features of the Clean Sensing System 4

System Configuration Examples 7

Direct Clean Sensing System 7 Multi-Clean Sensi ng Sy st em 11

Section 1 FEATURES

System Manu al

Section 1

OPE1

OPE2

OPE3

■ Clean Monitoring System (ZN-SFW Series)

Monitoring the amount of particles at multiple points in manufacturing processes is important in improving product quality. By connecting Interface Units, you can log the measured data of Air Particle Sensors at up to ten locations at once on a personal computer. The Electrostatic Sensor (ZJ-SD) also can be connected, which means that you can al so asce rtain the re latio nship between the amount of s tatic electricity and the amount of particles.

The clean sensing system continuously s enses the amount of particles in a clean boot h or cl ean b ench, and c ontrols the ai r vol ume le ve l of t he Air Clean Unit. This way, it can easily ensure an environment having a fixed cleanliness class at all times. An environment for removing dust and neu tralizing static electri city can be built by incorporating a new-concept Ionizer Unit in this system.

What is the "Clean Sensing System?"

Section 1 FEATURES

System Features

OPE3

OPE2

OPE1

Z N

S F

System Manu al

What is the "Clean Sensing System?"

■ Air Clean Unit (ZN-A Series)

Unique twin-blower structure (ZN-A2502) achieves light weight and large air volume. Compact but more powerful. Incorporating a clogged main filter (HEPA) detection function. Visibility is improved by indicators located on two corners of the body.

■ Air Particle Sensor (ZN-PD Series)

High-performance fan used for air suction to ensure measurement at all times. Use of a semiconductor laser and high-sensitivity optical design in the sensor achieves measurement of minute particles of 0.3 µm, 0.5 µm and 1.0 µm in diameter.

Thinnest in industry, large air volume

■ Ionizer Unit (ZN-J Series)

Directly mounted on Air Clean Unit Open structure does not b lock the laminar ai rflow from the Ai r Clean Unit. No more troublesome wiring required. Installation man-hours can be considerably reduced.

An industry first, one-touch dust removal and static neutralization

Smallest in industry, constant measuring

Main Applications

Electronic component production processes

Storage or test

environments

Cell manufacturing

processes

Section 1

Section 1 FEATURES

System Manu al

Section 1 What is the "Clean Sensing System?"

Features of the Clean Sensing System

Section 1 FEATURES

■ Feedback-based Automatic Adjustment of Air Volume

The air volume level of the Air Clean Unit can be automati cally controlled based on the amount of particles measured by the Air Par ticle Sensor. The cleanli ness class in clean booths can be maintained at the opt imum air volume level in propor tion to the amount of particles from rapid air feed through to fine air volume operation in the power saving mode.

Setting Method p.18

■ Monitoring/Logging the Amount of Particles

The cleanlines s class i nside clean b ooths can be ver ified and ascertained by the amount of particle s per unit volume. The amount of particles can be verified on the Sensor and the Amplifier Unit. Measured values can be easily logged on a personal computer using Interface Units and the exclusive monitoring software (Realtime Clean Air Monitor). Changes in the amount of particles over time observed in this way can be made use of as data for improving product quality.

Setting Method p.25

System Manu al

OPE3

OPE2

OPE1

Section 1

Max. 9 units connected

Max. 10 units connected

What is the "Clean Sensing System?"

■ Improving Product Quality by Multi-point Measurement

Since Air Clean Units and Air Particle Sensors can be conn ected to each other, the amount of air particles in multiple clean booths installed in processes can be comprehensively de tected and controlled. Which process is worseni ng in cleanliness can be linked to quality control for continual management.

Setting Method p.31

Section 1 FEATURES

System Manu al

Section 1

Ion Balance Sensor

What is the "Clean Sensing System?"

■ Simultaneous Dust Removal and Static Neutralization

The Ionizer Unit ZN-J series, the first in industry to be added on later to an Air Clean

Section 1 FEATURES

Unit, provides you with a new clean environment capable of removing dust and neutralizing static electricity.

• Sim ultaneous Removal of Particles and Static Electricity

A variable DC sy stem is used for electrostatic di scharge. This system c an neutralize static electricity in wide spaces. Two ion balance sensors provide c onstant feedback to maintain uniform neutr alizing performance.

• Simultaneous Monitoring of Charged Amount of Workpieces

Electrostatic Sensor ZJ-SD can be connected to the clean sensing system. The problem of adhesion of particles can be solv ed by acc urately asc ertaining the char ged amount of the workpiece, and using the Ionizer Unit to approp riately neutralize static electricity. Also, since ZJ-SD data can also b e cap tured on a person al c omputer via the Inte rfac e Unit, the amount of particles and charged amount can be acquired and collected simultaneously, and made use of as basic data for improving product quality.

System Manu al

System Configuration Examples

For details on settings, see p.25.

System Configuration Examples

Section 1

Direct Clean Sensing System

■ Data Logging

Clean Monitoring System

ZN-SFW11

Realtime Clean Air Monitor

Interface

Unit

S F

1 1

Amplifier Unit

Section 1 FEATURES

Air Particle Sensor

ensor

ZN-PD03

ZN-PDA11

DC power supply

[Features]

• Monitoring/Logging the Amount of Particles

System Manu al

Section 1

For details on settings, see p.18.

To extend the cable mentioned above, a commercially available LAN connector (female to female, straight type) and a LAN cable (straight type: Category 5E or higher) must be used.

System Configuration Examples

■ Feedback

Section 1 FEATURES

C adapter (provided)

Or, DC power supply

Air Clean Unit

ZN-A2502 ZN-A4105

Air Particle Sensor

enso

Amplifier Unit

ZN-PD03

ZN-PDA12

Cable length: standard 2 m

[Features]

• Feedback-based Automatic Adjustment of Air Volume

System Manu al

■ Feedback and Data Logging

Z N

S F

1 1

Air Clean Unit

ZN-A2502 ZN-A4105

[Features]

• Feedback-based Automatic Adjustment of Air Volume

• Monitoring/Logging the Amount of Particles

Air Particle Sensor

Interface

Unit

Realtime Clean Air Monitor

ZN-PD03

Amplifier Unit

ZN-PDA12

Clean Monitoring System

ZN-SFW11

AC adapter (provided)

Or, DC power supply

Cable length: standard 2 m

For details on settings, see p.18, p.25.

To extend the cable mentioned above, a commercially available LAN connector (female to female, straight type) and a LAN cable (straight type: Category 5E or higher) must be used.

Section 1

System Configuration Examples

Section 1 FEATURES

System Manu al

Section 1

For details on settings, see p.18, p.25.

To extend the cable mentioned above, a commercially available LAN connector (female to female, straight type) and a LAN cable (straight type: Category 5E or higher) must be used.

System Configuration Examples

■ Dust Removal and Static Neutralization

Connection Example with Different Models (Electrostatic Sensor)

Section 1 FEATURES

Air Clean Unit

AC adapter (provided)

Or, DC power supply

ZN-A2502 ZN-A4105

Connector cable (provided)

Clean Monitoring System

Realtime Clean Air Monitor

Electrostatic

Sensor

ZJ-SD100

ZN-SFW12

Interface

Unit

OPE3

OPE2

OPE1

1 2

Amplifier Unit

ZJ-SDA11

Cable length: standard 2 m

Sensor

ZN-J25A ZN-J41A

Ionizer Unit

Air Particle Sensor

Sensor

ZX-CAL2

Amplifier Unit

ZN-PD03

ZN-PDA11

Calculating Unit

OPE3

OPE2

OPE1

ZERO ENABLE

(kV)

Z J

-S D A 1

DC power

supply

System Manu al

[Features]

• Simultaneous Monitoring of the Ion Balance

• Feedback-based Automatic Adjustment of Air Volume

• Monitoring/Logging the Amount of Particles

ZN-A2502 ZN-A4105

Air Clean Unit

Air Particle Sensor

Calculating Unit

ZX-CAL2

ZN-PD03

Sensor

ace

Unit

ZN-SFW12

Clean Monitoring System

Commercially available LAN cable

(straight type: Category 5E or higher)

DC power

supply

[Features]

• Feedback-based Automatic Adjustment of Air Volume

• Monitoring/Logging the Amount of Particles

• Detecting the Cleanliness of Multiple Processes

AC adapter

(provided)

Or,

DC power supply

Cable length: standard 2 m

For details on settings, see p.31.

To extend the cable mentioned above, a commercially available LAN connector (female to female, straight type) and a LAN cable (straight type: Category 5E or higher) must be used.

Realtim Clean Air Monito

Multi-Clean Sensing System

Interf

Section 1

System Configuration Examples

Section 1 FEATURES

System Manu al

Section 1 System Configuration Examples

MEMO

Section 1 FEATURES

System Manu al

Section 2 UPGRADING THE SYSTEM

Before Upgrading the System 14

Flow of Operations for Upgrading the System 14 Installing the Exclusive Monitoring Software 15

Setup Methods Suited to Specific Applications 18

Automatically Adjusting the Air Volume Level 18 Monitoring/Logging the Amount of Particles 25 Detecting the Cleanliness of Multiple Processes 31

Section 2 UPGRADING THE SYSTEM

System Manu al

Section 2

p.18 p.25 p.31

p.48

Before Upgrading the System

Flow of Operations for Upgrading the System

Section 2 UPGRADING THE SYSTEM

Preparation

Installation

Connections

Checks

Direct Clean Sensing System

Automatically Adjusting the Air Volume Level

Refer to the Instruction Sheet packaged with each device.

• Setting the ID of the Air Clean Unit

• Connecting the Air Clean Unit and Air Particle Sensor

• Connecting the Air Clean Unit power supply

Checking communications Checking system operation Checking system operation

Monitoring/Logging the Amount of Particles

Installing the exclusive monitoring software

• Connecting the Air Particle Sensor and Interface Unit together

• Connecting the Interface Unit and personal computer

• Connecting the Air Particle Sensor power supply

Multi-Clean Sensing System

Detecting the Cleanliness of Multiple Processes

• Setting the ID of the Air Clean Unit

• Connecting the Air Clean Unit and Interface Unit Connecting Air Clean Units to each other

•

• Connecting the Air Particle Sensor and Interface Unit together

• Connecting the Interface Unit and personal computer

• Connecting the Air Particle Sensor power supply Connecting the Air Clean Unit power supply

•

Operations and settings

Resetting during operation

Maintenance

System Manu al

Setting the feedback conditions

Starting operation

• Resetting the feedback method Resetting the target cleanliness class

•

• Resetting the feedback cycle Resetting the low power air volume level

•

Resetting the high power air volume level

• Resetting the high power time

Trend graph display/data logging

Starting monitoring/logging Starting operation

Setting the feedback conditions

• Resetting the feedback method Resetting the target cleanliness class

•

• Resetting the feedback cycle Resetting the low power air volume level

•

• Resetting the calculation type Resetting the high power air volume level

•

• Resetting the high power time

Section 2

Clean Monitoring System

(ZN-SFW11/SFW12)

Realtime Clean Air Monitor

Interface Unit

Numerical display of measured amount of particles

Graphic display of changes in measured values over time

Logging of data

Display and setting of Air Particle Sensor and Interface Unit settings

Before Upgrading the System

Installing the Exclusive Monitoring Software

The Exclusive Monitoring Software (Realtime Clean Air Monitor) tool is provided for the ZN Series. This tool allows you to set sensing functions, acquire and collect the amount of measured particles, and display this information as a graph on a personal computer.

ZN-SF12

• Monitoring of measurement results

Section 2 UPGRADING THE SYSTEM

• Function setup support

■ Operating Environment

The following operating environment for Exclusive Monitoring Software is recommended. Check the environment before installing the software.

Item Condition OS Windows 2000/XP CPU PentiumIII 850 MHz or faster (2 GHz or faster recommended) RAM 128 MB or more (256 MB or more recommended) Free space on hard disk At least 50 MB Display screen 1024 x 768 dots

High Color (16-dot) or higher

• Windows is a trademark or registered trademark of Microsoft Corporation.

System Manu al

+ 58 hidden pages

Omron ZN-A2502, ZN Series, ZN-A2502D, ZN-A4105D, ZN-A4105 System Manual

Specifications and Main Features

Frequently Asked Questions

User Manual