FOR
RFID SYSTEM
FOR SEMI CONDUCTOR
DEVICE FABRICATION LINE
USER'S MANUAL
ID Link Unit
Model V700-L11
IDRW Head
Model V700-HMD13
Model V700-HMD11-1
ID Tag
Model V700-D23P41-1
OMRON Corporation
© OMRON Corporation 2003 All Right Reserved
Catalog No. Z213-E1-01B
Introduction
Thank you for purchasing the OMRON product.
To be able to operate the product safely and efficiently, carefully study this user's manual and get fully familiar
with the instruction in it before attempting to use the product. Keep this manual at hand for speedy reference
while operating, maintaining or servicing the equipment.
READ AND UNDERSTAND THIS DOCUMENT
Please read and understand this document before using the products. Please consult your OMRON representative if you have any qu estions or
comments.
WARRANTY
OMRON’s exclusive warranty is that the products are free from defects in materials and workmanship for a period of one year (or other period if
specified) from date of sale by OMRON.
OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR IMPLIED, REGARDING NON-INFRINGEMENT,
MERCHANTABILITY, OR FITNESS FOR PARTICULAR PURPOSE OF THE PRODUCTS. ANY BUYER OR USER ACKNOWLEDGES THAT
THE BUYER OR USER ALONE HAS DETERMINED THAT THE PRODUCTS WILL SUITABLY MEET THE REQUIREMENTS OF THEIR
INTENDED USE. OMRON DISCLAIMS ALL OTHER WARRANTIES, EXPRESS OR IMPLIED.
LIMITATIONS OF LIABILITY
OMRON SHALL NOT BE RESPONSIBLE FOR SPECIAL, INDIRECT, OR CONSEQUENTIAL DAMAGES, LOSS OF PROFITS OR
COMMERCIAL LOSS IN ANY WAY CONNECTED WITH THE PRODUCTS, WHETHER SUCH CLAIM IS BASED ON CONTRACT, WARRANTY,
NEGLIGENCE, OR STRICT LIABILITY.
In no event shall responsibility of OMRON for any act exceed the individual price of the product on which liability is asserted.
IN NO EVENT SHALL OMRON BE RESPONSIBLE FOR WARRANTY, REPAIR, OR OTHER CLAIMS REGARDING THE PRODUCTS UNLESS
OMRON’S ANALYSIS CONFIRMS THAT THE PRODUCTS WERE PROPERLY HANDLED, STORED, INSTALLED, AND MAINTAINED AND
NOT SUBJECT TO CONTAMINATION, ABUSE, MISUSE, OR INAPPROPRIATE MODIFICATION OR REPAIR.
SUITABILITY FOR USE
THE PRODUCTS CONTAINED IN THIS DOCUMENT ARE NOT SAFETY RATED. THEY ARE NOT DESIGNED OR RATED FOR ENSURING
SAFETY OF PERSONS, AND SHOULD NOT BE RELIED UPON AS A SAFETY COMPONENT OR PROTECTIVE DEVICE FOR SUCH
PURPOSES. Please refer to separate catalogs for OMRON's safety rated products.
OMRON shall not be responsible for conformity with any standards, codes, or regulations that apply to the combination of products in the
customer’s application or use of the product.
At the customer’s request, OMRON will provide applicable third party certification documents identifying ratings and limitations of use that apply
to the products. This information by itself is not sufficient for a complete determination of the suitability of the products in combination with the end
product, machine, system, or other application or use.
The following are some examples of applications for which particular attention must be given. This is not intended to be an exhaustive list of all
possible uses of the products, nor is it intended to imply that the uses listed may be suitable for the products:
• Outdoor use, uses involving potential chemical contamination or electrical interference, or conditions or uses not described in this document.
• Nuclear energy control systems, combustion systems, railroad systems, aviation systems, medical equipment, amusement machines, vehicles,
safety equipment, and installations subject to separate industry or government regulations.
• Systems, machines, and equipment that could present a risk to life or property.
Please know and observe all prohibitions of use applicable to the products.
NEVER USE THE PRODUCTS FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR PROPERTY WITHOUT ENSURING THAT
THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS, AND THAT THE OMRON PRODUCT IS PROPERLY RATED
AND INSTALLED FOR THE INTENDED USE WITHIN THE OVERALL EQUIPMENT OR SYSTEM.
PERFORMANCE DATA
Performance data given in this document is provided as a guide for the user in determining suitability and does not constitute a warranty. It may
represent the result of OMRON’s test conditions, and the users must correlate it to actual application requirements. Actual performance is subject
to the OMRON Warranty and Limitations of Liability.
CHANGE IN SPECIFICATIONS
Product specifications and accessories may be changed at any time based on improvements and other reasons.
It is our practice to change model numbers when published ratings or features are changed, or when significant construction changes are made.
However, some specifications of the product may be changed without any notice. When in doubt, special model numbers may be assigned to fix
or establish key specifications for your application on your request. Please consult with your OMRON representative at any time to confirm actual
specifications of purchased products.
DIMENSIONS AND WEIGHTS
Dimensions and weights are nominal and are not to be used for manufacturing purposes, even when tolerances are shown.
ERRORS AND OMISSIONS
The information in this document has been carefully checked and is believed to be accurate; however, no responsibility is assumed for clerical,
typographical, or proofreading errors, or omissions.
PROGRAMMABLE PRODUCTS
OMRON shall not be responsible for the user’s programming of a programmable product, or any consequence thereof.
COPYRIGHT AND COPY PERMISSION
This document shall not be copied for sales or promotions without permission. This document is protected by copyright and is intended solely for
use in conjunction with the product. Please notify us before copying or reproducing this document in any manner, for any other purpose. If copying
or transmitting this document to another, please copy or transmit it in its entirety.
V700-L11
User's Manual
1
Introduction
Precaution
Introduction
Meanings of Signal Words
The following signal words are used in this manual.
Indicates a potentially hazardous situation which, if not avoided, will result in minor or
WARNING
CAUTION
moderate injury, or may result in serious injury or death. Additionally, there may be
significant property damage.
Indicates a potentially hazardous situation which, if not avoided, may result in minor or
moderate injury or in property damage.
Meanings of Alert Symbols
The following alert symbols are used in this manual.
Indicates general prohibitions for which there is no specific symbol.
Indicates instruction for the user to always connect the ground wire.
Indicates prohibition when there is a risk of minor injury from electrical shock or other
source if the product is disassembled.
Alert statements in this Manual
The following alert statements apply to the products in this manual. Each alert statement also appears at the
locations needed in this manual to attract your attention.
WARNING
This product is not designed to be used either directly or indirectly in applications that
detect human presence for the purpose of maintaining safety. Do not use this product
as a sensing device for protecting human lives.
2
V700-L11
User's Manual
CAUTION
Do not disassemble the Unit or touch the internal parts of the Unit while the power is
turned ON. Doing so may result in electric shock due to the high-voltage internal
parts.
The GR (frame ground) terminal is in the multi-connection port. Always ground the
multi-connection port to 100 Ω or less, regardless of whether it is used or not.
Performance may deteriorate if the port is not ground.
Introduction
Precautions for Correct Use
To operate the system more reliably and to allow the system to fully perform as designed, follow the
instructions below:
■ About environments of installation
Do not install or leave the product to a location such as:
• Location subjected to direct sunlight
• Location where corrosive gas, dust, metal dust, salty air is present
• Location where the operating temperat ure can exce ed or drop below a range de fined in the specification
• Location where temperature change is great, and can lead to dew condensation
• Location with higher humidity, and can lead to dew condensation
• Location where vibration or impact whose magnitude greater than specified can be directly transmitted to the product proper
• Location where splash of water, oil or chemical product is present
Introduction
Precautions for Correct Use
■ About installation
• This product operates on the 125 kHz frequency band to communicate with an ID tag. Certain transceivers, motors, monitors, and power supplies (power ICs) can emit a radio frequency wave (noise)
that can adversely affect communications with an ID tag. Whe n planning to use the pr oduct near such
a source, study the possible result in advance.
• To minimize the possible noise interference, eart h-ground ( class D earth work) a meta l object that will
be located around the product.
■ About wiring work
• Be sure to earth-ground the product per class D earth work. Otherwise, the product will not perform
as designed.
• Before starting a wiring work or disconnecting a cable, be sure to power OFF the product.
• Do not run the cable for the product in a conduit common to a high voltage line and a power supply
line.
• To avoid static-induced failure, wear a wrist band or equivalent means to release a static charge
before touching a terminal or a signal line within a connector.
■ About thread glue
• A thread glue can deteriorate and lead to crack on a resin part. Thus, do not apply a thread glue to
the threading on a resin part or to resin-made washers.
■ About cleaning
• NEVER use an organic solvent such as thinner or benzene, as it will a ttack resin componen ts or case
coating.
V700-L11
User's Manual
3
Introduction
Limitations about Model V700-HMD13
Introduction
Limitations about Model V700-HMD13
When a Model V700-HMD13 (not M odel V700-HMD13 ) is used to configure a system, there will be the
operating limitations described below.
<Description of limitations>
Among the memory page1 1 through 30 on an ID tag, page 1 through 12 are available to the user. Do not
access to page 13 to 30 with commands. However, note that data read/write is possible with a plurality of
pages as a block.
(1) Operation to read data in page 1 through 30 as a block
The data read process is divided into two steps: read of page 1 through 14 and that of page 15
through 30.
0100 0000FFFC [CR]
➀
0100 FFFF0000 [CR]
➁
(2) Operation to write data in page 1 through 30 as a block
0200 0000FFFC (write data with page 1)(write data with page 2)
➀
... (write data with page 14) [CR]
0200 FFFF0000 (write data with page 15)(write data with page 16)
➁
... (write data with page 30) [CR]
(3) Operation to write data in page 3 through 30 as a block
The data write process is divided into two steps: write of page 3 through 14 and that of page 15
through 30.
0200 0000FFF0 (write data with page 3)(write data with page 4)
➀
... (write data with page 14) [CR]
0200 FFFF0000 (write data with page 15)(write data with page 16)
➁
... (write data with page 30) [CR]
A RFID system configuration using Model V700-HMD13A will serve free of the above-mentioned
limitations.
4
V700-L11
User's Manual
CONTENTS
Introduction
Introduction
Introduction
Meanings of Signal Words 2
Meanings of Alert Symbols 2
Alert statements in this Manual 2
Precautions for Correct Use 3
Limitations about Model V700-HMD13 4
CONTENTS 5
Section 1 System Features and Configuration 7
1.1 System features 8
1.2 System configuration 9
Section 2 Unit Specifications 11
2.1 IDR/W head: Model V700-HMD13 12
2.1.1 Names and functions of various components/specifications 12
2.1.2 Interface specifications (same as with Model V700-HMD11-1) 13
2.1.3 Dimensional drawing and mounting method 15
CONTENTS
2.1.4 Communication performance (information only) 17
2.2 IDR/W head: Model V700-HMD11-1 18
2.2.1 Names and functions of various components/specifications 18
2.2.2 Interface specifications (same as with Model V700-HMD13 ) 19
2.2.3 Dimensional drawing and mounting method 21
2.2.4 Communication performance (information only) 22
2.3 ID link unit: Model V700-L11 23
2.3.1 Names and functions of various components/specifications 23
2.3.2 Interface specifications 26
2.3.3 Dimensional drawing and mounting method 30
2.4 ID tag: Model V700-D23P41-1 31
Section 3 System Configuration Examples 33
3.1 Configuration based on upstream controller and RS-232C 34
3.2 Configuration based on upstream controller and RS-485 35
V700-L11
User's Manual
5
Introduction
Introduction
Section 4 Data Read/Write with ID Tag 37
4.1 Operating principle 38
CONTENTS
Section 5 Data Transaction Time (information only) 47
Section 6 Performance Data Based on Operating Conditions (information only) 51
4.2 Command/response frame structure 39
4.3 Response code list 41
4.4 Command types and response <applicable to OMRON original 1:1 protocol> 42
4.4.1 Read 42
4.4.2 Write 43
4.4.3 Same write 44
4.4.4 Byte write 45
4.4.5 Test 46
5.1 Data transaction time 48
5.2 TAT (Turn Around Time) 49
6.1 Effect of nearby metal object onto IDRW head 52
6.2 Spacing for installing IDRW heads 53
6.3 Effect of inclination of ID tag 54
Section 7 Troubleshooting 55
7.1 IDRW head is directly connected to upstream contr olle r 56
7.1.1 No response (response not yet received), or, occurrence of illegal characters 56
7.1.2 Response is available (response code is other than "00") 56
7.2 Configuration using link unit 57
7.2.1 No response (response not yet received), or occurrence of illegal characters 57
7.2.2 Response is available (response code is other than "00") 58
<Memory assignment with SEMI E99-conforming system (with Model V700-L21)> 59
Revision History 60
V700-L11
6
User's Manual
Section 1
System Features and Configuration
1.1 System features 8
1.2 System configuration 9
Section 1
System Features and Configuration
V700-L11
User's Manual
7
Section 1
System Features and Configuration
1.1 System features
Section 1
1.1 System features
OMRON's RFID system for semiconductor device fabrication line is configured with the following units:
● Model V700-HMD13 , or V700-HMD11-1 (ID R/W head)
An ID R/W head that reads or writes data from or into the memory on ID tag without a need to contact
the ID tag. It will be hereunder simply called IDRW head (or, more simply, IDRWH). It is operated independently or via a link unit.
Two differently formed IDRW head types are available:
Model V700-HMD13 features a form and data tr ansaction per formance suitable for the "undocked
➀
position" per SEMI standards.
Model V700-HMD11-1 features a form and data transaction performance suitable for the "docked
➁
position" per SEMI standards. It is delivered together with two mountin g nuts.
Mounting nut (2 M4)
● Model V700-L11 (ID link unit)
This unit allows one or more ID R/W heads to be linked to one port of an upstream controller, and will
be hereunder simply called "link unit". Being driven by a 24 VDC power supply, it supplies 5 VDC
power to the IDWR heads. When delivered, it includes a connector (COMBICON screw-down plug:
Model XW4B-05C1-H1-D) for multi-connection ports.
COMM
RUN
ERR
ID
Connector for multi-connection port
● Model V700-D23P41-1 (ID tag)
This is a round rod type ID tag that measures 3.9 mm in diameter and 25 mm in length. It contains a
memory space of 240 bytes that allows a user to read or write data from or into it.
8
V700-L11
User's Manual
1.2 System configuration
Section 1
System Features and Configuration
By combining an IDRW head and a link unit, various system configurations (connection configuration, supply
voltage).
Interfacing with upstream controller: RS-232C
Unit-to-unit configuration IDRW head/link unit connection configuration
• 1:1 connection (RS-232C)
• 5 VDC power supply
ID tag
RS-232C
IDRW head
Upstream
controller
5 VDC
• 1:1 connection (RS-232C)
• 24 VDC power supply
ID tag
Link unit
RS-232C
Upstream
controller
• 1:N connection (RS-232C)
• 24 VDC power supply
IDRW head
24 VDC
ID tag
Section 1
1.2 System configuration
IDRW head
ID tag
IDRW head
ID tag
IDRW head
RS-485
RS-485
Link unit
24 VDC
Link unit
24 VDC
Link unit
24 VDC
RS-232C
Upstream
controller
Max. 31 units
Precautions for trouble-free operation
For a 1:N connection involving a link unit, it is necessary to add an normal controlled RS signal from an
upstream controller to a CS signal. The RS signal must be turned OFF within 15 msec after completion of
data transmission. Otherwise, this configuration does not operate correctly.
(For details, refer to Sec. 2.3.2 Inter face specifications.)
V700-L11
User's Manual
9
Section 1
1.2 System configuration
Section 1
System Features and Configuration
By altering the connection to a link unit, it is possib le to conne ct the link unit to an up stream contro ller th at has
RS-485 interface.
Interfacing with upstream controller: RS-485
Unit-to-unit configuration IDRW head/link unit connection configuration
• 1:1 connection (RS-485)
• 24 VDC power supply
ID tag
Link unit
RS-485
• 1:N connection (RS-485)
• 24 VDC power supply
IDRW head
ID tag
IDRW head
ID tag
IDRW head
ID tag
RS-485
RS-485
24 VDC
Link unit
24 VDC
Link unit
24 VDC
Link unit
Upstream
controller
RS-485
Upstream
controller
Max. 31 units
IDRW head
24 VDC
Precautions for trouble-free operation
The upstream controller must be able to be ready to receive data within 15 ms after data transmission.
Without this control scheme, the whole system fails to operate correctly.
10
V700-L11
User's Manual
Section 2
Unit Specifications
2.1 IDR/W head: Model V700-HMD13 12
2.1.1 Names and functions of various components/
specifications 12
2.1.2 Interface specifications (same as with Mo d el
V700-HMD11-1) 13
2.1.3 Dimensional drawing and mounting method 15
2.1.4 Communication performance (information only) 17
2.2 IDR/W head: Model V700-HMD11-1 18
2.2.1 Names and functions of various components/
specifications 18
2.2.2 Interface specifications (same as with Model
V700-HMD13 ) 19
2.2.3 Dimensional drawing and mounting method 21
2.2.4 Communication performance (information only) 22
2.3 ID link unit: Model V700-L11 23
Section 2
Unit Specifications
2.3.1 Names and functions of various components/
specifications 23
2.3.2 Interface specifications 26
2.3.3 Dimensional drawing and mounting method 30
2.4 ID tag: Model V700-D23P41-1 31
V700-L11
User's Manual
11
Section 2
Unit Specifications
2.1 IDR/W head: Model V700-HMD13
2.1.1 Names and functions of various components/specifications
Communication area
Section 2
2.1 IDR/W head: Model V700-HMD13
Mounting bracket
I/F connector
I/F cable
Antenna section
1m
● Antenna section
This section reads or writes data from or into an ID tag .
● Mounting bracket
This bracket is for securing the antenna section. The vertical position of the mounting bracket can be
adjusted in a range of 0 to 45 mm.
● I/F connector
This interface connector supplies power to IDR/W head, and permits data transmission with an
upstream controller.
■ General specifications
Characteristic Specification Comment
Supply voltage 5 VDC±5% Supplied from the I/F connector
Current consumption 400 mA max. When 5 VDC is input: approx. 8 A max. with rush current
Dimensions 44.8×149.8×73 mm Except for cable
Cable length 1 m (dia. 6 mm) Can be extended to 4 m in conjunction with Model V700-L11
Protection rating IP30 (IEC 60529)
Operating ambient
temperature
Operating ambient
humidity
Storage ambient tem-
perature
Storage ambient
humidity
Mounting system Screwed down at four points. Capable of mounting to sheet metal*
* Be sure to ground the sheet metal that accepts the IDR/W head by class D earth work (grounding resis-
tance of 100 Ω or less, diameter of grounding conductor of 1.6 mm or greater).
0 to + 40°C No freezing
35 to 85%RH No dew condensation
−15 to + 50°C No freezing
35 to 85%RH No dew condensation
12
V700-L11
User's Manual
Unit Specifications
2.1.2 Interface specifications (same as with Model V700-HMD11-1)
Characteristic Specification
Connector specification 9-pin D-SUB connector plug, with M2.6 lock screws
Power supply 5 VDC±5%
Power supply
section
Communication standard RS-232C
Synchronization Asynchronous mode, start-stop synchronization
Communications control stan-
dard
Baud rate (fixed) 9600 bps
Character format (fixed) Start bit Data bit Parity bit Stop bit Total
Communications section
Error control Even parity
(Pin arrangement)
1
9
OMRON original 1:1 protocol
18Even111
Pin No. Signal name Symbol Direction Comment
1
2 Send data SD Input
3 Receive data RD Output
4 Request send RS Input
5 Clear to send CS Output Normally ON
6
7 0 V input 0V Input Internally connected to SG
8
9 Signal ground SG --- Internally connected to 0V
+5 V input
5V Input 5 VDC±5%
Section 2
Section 2
2.1 IDR/W head: Model V700-HMD13
V700-L11
User's Manual
13
Section 2
2.1 IDR/W head: Model V700-HMD13
Section 2
Unit Specifications
■ Cable connection example
<Connection with DOS/V PC>
Symbol Pin No. Pin No. Symbol
11
DOS/V
PC
D-SUB
9-pin
socket
#4-40
• Recommended cable : CO-MA-VV-SB 5PX28AWG (Hitachi Cable, Ltd.)
• Recommended connector : <IDRWH side> socket-Model XM2D-0901 (OMRON),
• Recommended 5 V power supply : <for AC input> Model S82S-0705 (OMRON),
RD 2 2 SD
SD 3 3 RD
44RS
SG 5 5 CS
665V
RS 7 7 0V
CS 8 8
99SG
5 V power
supply
hood-Model XM2S-0911 (OMRON),
lock-Model XM2Z-0001 (OMRON)
: <DOS/V PC side> socket-Model XM2D-0901 (OMRON),
hood-Model XM2S-0911(OMRON)
<for DC input> Model S82S-7705 (OMRON)
IDRWH
D-SUB
9-pin
socket
M2.6
nut
<Connection with link unit>
The IDR/W head can be directly connected to the ID connection port on the link unit. When consider-
ing extending the cable, use the cable whose configuration is specified below. Limit the whole cable
length to 4 m.
Symbol Pin No. Pin No. Symbol
11
Link unit
D-SUB
9-pin
plug
M2.6
SD 2 2 SD
RD 3 3 RD
RS 4 4 RS
CS 5 5 CS
5V 6 6 5V
0V 7 7 0V
88
SG 9 9 SG
IDRWH
D-SUB
9-pin
socket
M2.6
nut
∗ For the 5 V/0 V power line, use a cable whose conductor size is AWG22 or greater.
• Recommended cable : OTSC-8PVB-2 No. 22AWG (Onamba)
• Recommended connector : <IDRWH side> socket-Model XM2D-0901 (OMRON),
hood-Model XM2S-0911 (OMRON),
lock-Model XM2Z-0001 (OMRON)
: <Link unit side> plug-Model XM2A-0901 (OMRON),
hood-Model XM2S-0911(OMRON)
14
Wrong wiring connection can lead to a malfunction of the equipment. Be fully sure of the correct
wiring connections.
V700-L11
User's Manual
2.1.3 Dimensional drawing and mounting method
● IDR/W head with mounting brackets installed
Section 2
Unit Specifications
PVC-insulated round cable 6 (7/ 0.18) 8-core,
standard length, 1 m
Coil
4-M4
(FOUP side)
Section 2
17.0
32
44.8
2.1 IDR/W head: Model V700-HMD13
44
Mounting bracket
(material: SUS 304)
45
8.4
22.4
36.4
57
4-M4
11.5 cable lead-in hole
Case sideplate Aluminum plate (A5052P) (Unit: mm)
Communication area on case Bakelite
Mounting bracket SUS 304 (t=1.0)
Cable PVC cable
119.8
149.8
Mounting bracket
(material: SUS 304)
73
4- 4.5
● IDR/W head proper
44.8
8.4
22.4
57
4-M4
11.5 cable lead-in hole
Coil
17.0
44.8
119.8
73
119.8
36.4
V700-L11
User's Manual
15
Section 2
Unit Specifications
● Mounting brackets
Section 2
2.1 IDR/W head: Model V700-HMD13
15
2-M4
44.8
57
45
69
4.1
13
8.4
36.4
4.1
■ Mounting hole drawing
Mounting holes dimensions
(top mounting configuration)
15
8.4
2-M4
45
57
69
10.1
4
15
35
2- 4.5
Mounting holes dimensions
(front mounting configuration)
4- 4.2
10.1
4-M4 or 4.2
4
15
35
2- 4.5
4.1
44.8
4.1
36.4
45
120
140
25
140
35
∗ Be sure to limit the tightening torque for the M4 screws and bracket mounting scr ews to 1.2 N-m or less.
16
In the installation work, do not exert an excessively strong force to the case or deform the case.
Otherwise, the IDR/W head may fail to perform as designed.
V700-L11
User's Manual
2.1.4 Communication performance (information only)
Communication area (Model V700-HM D 13 vs. Mode V700-D23P41-1)
Locus of the tip
of V700-D23P41-1
Section 2
Unit Specifications
80
70
60
Section 2
Antenna
Model label side
(Make sure that the
direction is correct.)
Case (sideplate)
V700-D23P41
FOUP side
170
160 150 140 130 120 110 100
Location of the tip of ID tag
Range supported by the HMD13A
and D23P41-1.
The mounting position of the ID Tag is as
follows:
• Distance from facial datum plane: 150 mm
min., 170 mm max.
• Height: 15 mm min., 36 mm max.
Note: The SEMI standards do not stipulate
the distance from the facial datum plane for
the ID Tag mounting position. Be sure to use
the distances shown above.
2.1 IDR/W head: Model V700-HMD13
50
40
30
20
10
Unit: mm
V700-L11
User's Manual
17
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