Introduction Table of Contents/Precautions on Safety
SECTION 1 Product Outline
SECTION 2 Installation and Connections/Wiring
SECTION 3 Preparing for Communications
SECTION 4 Reading from/Writing to ID Tags
SECTION 5 Troubleshooting
SECTION 6 Appendix
CIDRW System
V640-HAM11 |
Amplifier Unit |
V640-HS61 |
CIDRW Head |
V700-L22 |
CIDRW Controller |
V700-L11 |
Link Unit |
6 SECTION 5 SECTION 4 SECTION 3 SECTION 2 SECTION 1 SECTION INTRODUCTION
User's Manual
Disclaimers Considerations Application Liability, of Limitations Warranty, INTRODUCTION
2
INTRODUCTION
Please read and understand this manual before storing, installing, programming, operating, maintaining, or disposing of the products. Please consult your OMRON representative if you have any questions or comments.
OMRON's exclusive warranty is that the products are free from defects in materials and workmanship for a period of one year (or other period if specified) from date of sale by OMRON.
OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR IMPLIED, REGARDING NONINFRINGEMENT, MERCHANTABILITY, OR FITNESS FOR PARTICULAR PURPOSE OF THE PRODUCTS. ANY BUYER OR USER ACKNOWLEDGES THAT THE BUYER OR USER ALONE HAS DETERMINED THAT THE PRODUCTS WILL SUITABLY MEET THE REQUIREMENTS OF THEIR INTENDED USE. OMRON DISCLAIMS ALL OTHER WARRANTIES, EXPRESS OR IMPLIED.
OMRON SHALL NOT BE RESPONSIBLE FOR SPECIAL, INDIRECT, OR CONSEQUENTIAL DAMAGES, LOSS OF PROFITS OR COMMERCIAL LOSS IN ANY WAY CONNECTED WITH THE PRODUCTS, WHETHER SUCH CLAIM IS BASED ON CONTRACT, WARRANTY, NEGLIGENCE, OR STRICT LIABILITY.
In no event shall the responsibility of OMRON for any act exceed the individual price of the product on which liability is asserted.
IN NO EVENT SHALL OMRON BE RESPONSIBLE FOR WARRANTY, REPAIR, OR OTHER CLAIMS REGARDING THE PRODUCTS UNLESS OMRON'S ANALYSIS CONFIRMS THAT THE PRODUCTS WERE PROPERLY HANDLED, STORED, INSTALLED, AND MAINTAINED AND NOT SUBJECT TO CONTAMINATION, ABUSE, MISUSE, OR INAPPROPRIATE MODIFICATION OR REPAIR.
CIDRW System
User’s Manual
INTRODUCTION
OMRON shall not be responsible for conformity with any standards, codes, or regulations that apply to the combination of the product in the customer's application or use of the products.
At the customer's request, OMRON will provide applicable third party certification documents identifying ratings and limitations of use that apply to the products. This information by itself is not sufficient for a complete determination of the suitability of the products in combination with the end product, machine, system, or other application or use.
The following are some examples of applications for which particular attention must be given. This is not intended to be an exhaustive list of all possible uses of the products, nor is it intended to imply that the uses listed may be suitable for the products:
•Outdoor use, uses involving potential chemical contamination or electrical interference, or conditions or uses not described in this manual.
•Nuclear energy control systems, combustion systems, railroad systems, aviation systems, medical equipment, amusement machines, vehicles, safety equipment, and installations subject to separate industry or government regulations.
•Systems, machines, and equipment that could present a risk to life or property.
Please know and observe all prohibitions of use applicable to the products.
NEVER USE THE PRODUCT FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR PROPERTY WITHOUT ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS, AND THAT THE OMRON PRODUCTS ARE PROPERLY RATED AND INSTALLED FOR THE INTENDED USE WITHIN THE OVERALL EQUIPMENT OR SYSTEM.
Disclaimers Considerations Application Liability, of Limitations Warranty, INTRODUCTION
OMRON shall not be responsible for the user's programming of a programmable product, or any consequence thereof.
CIDRW System |
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Disclaimers Considerations Application Liability, of Limitations Warranty, INTRODUCTION
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INTRODUCTION
PERFORMANCE DATA
Performance data given in this manual is provided as a guide for the user in determining suitability and does not constitute a warranty. It may represent the result of OMRON's test conditions, and the users must correlate it to actual application requirements. Actual performance is subject to the OMRON Warranty and Limitations of Liability.
Product specifications and accessories may be changed at any time based on improvements and other reasons.
It is our practice to change model numbers when published ratings or features are changed, or when significant construction changes are made. However, some specifications of the product may be changed without any notice. When in doubt, special model numbers may be assigned to fix or establish key specifications for your application on your request. Please consult with your OMRON representative at any time to confirm actual specifications of purchased product.
Dimensions and weights are nominal and are not to be used for manufacturing purposes, even when tolerances are shown.
The information in this document has been carefully checked and is believed to be accurate; however, no responsibility is assumed for clerical, typographical, or proofreading errors, or omissions.
CIDRW System
User’s Manual
INTRODUCTION
1. FCC Rules (Federal Communications Commission)
This device complies with Part 15 Subpart C of the FCC Rules.
FCC ID: E4E6CYCID6400202
Operation is subject to the following two conditions:
(1)this device may not cause harmful interference, and
(2)this device must accept any interference received, including interference that may cause undesired operation.
FCC NOTICE
This equipment has been tested and found to comply with the limits for a Class B digital device, pursuant to part 15 of the FCC Rules. These limits are designed to provide reasonable protection against harmful interference in a residential installation.
This equipment generates, uses and can radiate radio frequency energy and, if not installed and used in accordance with the instructions, may cause harmful interference to radio communications. However, there is no guarantee that interference will not occur in a particular installation. If this equipment does cause harmful interference to radio or television reception, which can be determined by turning the equipment off and on, the user is encouraged to try to correct the interference by one or more of the following measures:
•Reorient or relocate the receiving antenna
•Increase the separation between the equipment and receiver.
•Connect the equipment into an outlet on a circuit different from that to which the receiver is connected.
•Consult the dealer or an experienced radio/TV technician for help.
FCC WARNING
Changes or modifications not expressly approved by the party responsible for compliance could void the user's authority to operate the equipment.
Properly shielded and grounded cables and connectors must be used for connection to host computer and/or peripherals in order to meet FCC emission limits.
CAUTION
This device must be professionally installed.
This CIDRW Head [Model: V640-HS61 (-X)] is dedicated to Amplifier Unit [Model: V640-HAM11 (-X)].
Use Safe for Precautions INTRODUCTION
CIDRW System |
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INTRODUCTION
This CIDRW system complies with the following standards.
•SEMI E99 THE CARRIER ID READER/WRITER FUNCTIONAL STANDARD
•SEMI E5 EQUIPMENT COMMUNICATION STANDARD 2 MESSAGE CONTENT (SECS II)
•SEMI E4 EQUIPMENT COMMUNICATION STANDARD 1 MESSAGE TRANSFER (SECS I)
SEMI is the acronym for Semiconductor Equipment and Materials International.
SECS is the acronym for SEMI Equipment Communications Standard.
Use Safe for Precautions INTRODUCTION
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Use Safe for Precautions INTRODUCTION
INTRODUCTION
Please observe the following precautions for safe use of the products.
•Do not insert water or wires through gaps in the case. This could cause fire or electric shock.
•In the event of a malfunction, stop using the product immediately, turn off the power, and consult your OMRON dealer.
•Dispose of this product as industrial waste.
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INTRODUCTION
Please observe the following precautions to prevent failure to operate, malfunctions, or undesirable effects on product performance.
Install the product at a location where:
•It is not exposed to direct sunlight.
•It is not exposed to corrosive gases, dust, metal chips, or salt.
•The working temperature is within the range stipulated in the specifications.
•There are no sudden variations in temperature (no condensation).
•The relative humidity is within the range stipulated in the specifications.
•No vibration or shock exceeding the values stipulated in the specifications is transmitted directly to the body of the product.
•It is not subject to splashing water, oil, or chemical substances.
•This product communicates with ID Tags using the 134 kHz frequency band. Note that some transceivers, motors, monitoring equipment, and power supplies (power supply ICs) generate electrical waves (noise) that interfere with communications with ID Tags. If you are using the product in the vicinity of any of these devices, check the effect on communications in advance.
•In order to minimize the effects of noise, ground nearby metal bodies with a grounding resistance not exceeding 100 ohms.
•When mounting Amplifier Units, tighten the screws with a torque no greater than 1.2 N·m.
•When mounting CIDRW Heads, tighten the screws with a torque no greater than 0.6 N·m.
•When multiple CIDRW Heads are mounted next to each other, communications performance could be impaired by mutual interference. Note the information in this manual on mutual interference when installing multiple heads.
Refer to page 115.
Use Safe for Precautions INTRODUCTION
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INTRODUCTION |
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• Ensure correct polarity when connecting to the +/- power supply terminals. |
INTRODUCTION |
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Power and Ground Cables |
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• Use the power supply voltage specified in this manual. |
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Wiring Work |
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• The ground terminals must be connected to a ground with a grounding resistance not exceeding 100 |
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vent charging, before touching terminal components or parts inside connectors. |
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Screw Locking Adhesive |
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• Screw locking adhesive (screw lock) may cause deterioration and cracking of resin parts: do not use |
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it for screws in resin parts or anywhere where resin washers are used. |
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Cleaning |
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• Do not use organic solvents such as thinner or benzene. |
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INTRODUCTION
Indicates an explanation of a point that must be observed to ensure that the product is capable of its proper functions and performance. Read this information carefully and follow the cautions: if the product is used incorrectly, data or the equipment itself could be destroyed.
Indicates summaries of points of particular importance relating to product performance, e.g. points to note during operation and advice on how to use the product.
Indicates the number of a page where related information can be found.
Indicates information for reference when you encounter a problem.
Use Safe for Precautions INTRODUCTION
The following symbols are used to show the status of the indicators on the CIDRW Controller and Amplifier Units.
OFF
Flashing
ON
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Contens of Table INTRODUCTION
INTRODUCTION
Table of Contents
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Introduction |
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Read and Understand this Manual |
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WARRANTY |
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LIMITATIONS OF LIABILITY |
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SUITABILITY FOR USE |
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PROGRAMMABLE PRODUCTS |
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PERFORMANCE DATA |
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CHANGE IN SPECIFICATIONS |
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DIMENSIONS AND WEIGHTS |
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ERRORS AND OMISSIONS |
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Applicable Standards |
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Applicable SEMI Standards |
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Precautions for Safe Use |
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Precautions for Correct Use |
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Editor’s Note |
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Table of Contents |
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SECTION 1 Product Outline |
15 |
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What is a CIDRW System? |
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Features |
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System Configuration |
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Component Names and Functions |
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Flowchart for Getting Started |
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SECTION 2 Installation and Connections/Wiring |
25 |
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Installation |
26 |
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Connections and Wiring |
31 |
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SECTION 3 Preparing for Communications |
47 |
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Set the Communications Conditions for the CIDRW Controller |
48 |
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Set the Communications Conditions for Amplifier Units |
61 |
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Set the Communications Conditions for Link Units |
63 |
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Communications Test |
65 |
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INTRODUCTION |
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Table of Contents |
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SECTION 4 Reading from/Writing to ID Tags |
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When SECS is Used |
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When SECS is Not Used |
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SECTION 5 Troubleshooting |
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When SECS is Used |
92 |
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When SECS is Not Used |
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SECTION 6 Appendix |
103 |
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Specifications and Dimensions |
104 |
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System Configuration Examples |
108 |
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Characteristic Data depending on Conditions of Use |
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Data Segment Area |
122 |
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Regular Inspection |
123 |
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SECS Protocol Specifications |
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ASCII Code Table |
129 |
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Protective Construction |
130 |
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Revision History |
134 |
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Contents of Table INTRODUCTION
CIDRW System |
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Contens of Table INTRODUCTION
INTRODUCTION
Table of Contents
MEMO
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SECTION 1
Product Outline
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What is a CIDRW System? |
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Features |
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System Configuration |
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Component Names and Functions |
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Flowchart for Getting Started |
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Outline Product 1 SECTION
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System? CIDRW a is What 1 SECTION
SECTION 1
Product Outline
The CIDRW system writes data to, and reads data from, the carrier IDs (ID Tags) mounted on the carriers (FOUP) in semiconductor manufacturing processes without contacting these ID Tags. CIDRW is the abbreviation of "Carrier ID Reader/Writer" and this abbreviation is used throughout this manual.
Reading and writing information such as models, process instructions, lots, and inspection results to and from ID Tags makes it possible to manage work instruction information from a host device.
Example: Management of information in semiconductor and wafer manufacturing processes
ID Tag (holder is separate)
CIDRW Head
Reading and writing information
• Model information
• Process instruction information
• Completion information
Amplifier Unit |
• Lot information |
• Inspection results Etc.
CIDRW Controller
Host
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SECTION 1
Product Outline
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CIDRW System Conforming to SEMI Standards |
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CIDRW Controller |
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Host |
V700-L22 |
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ID Tag |
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Amplifier Unit |
CIDRW Head |
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V640-HAM11 |
V640-HS61 |
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(Made by Texas |
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Instruments) |
SECS I/II
RS-232C |
RS-232C |
List of Applicable Standards
•SEMI E99 THE CARRIER ID READER/WRITER FUNCTIONAL STANDARD
•SEMI E5 EQUIPMENT COMMUNICATION STANDARD 2 MESSAGE CONTENT (SECS II)
•SEMI E4 EQUIPMENT COMMUNICATION STANDARD 1 MESSAGE TRANSFER (SECS I)
SEMI is the acronym for Semiconductor Equipment and Materials International.
SECS is the acronym for SEMI Equipment Communications Standard.
Features 1 SECTION
CIDRW System |
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User’s Maual |
Configuration System 1 SECTION
SECTION 1
Product Outline
Communication with the host device is possible using the SECS protocol.
Host
RS-232C
SECS I/II
This is e.g. a host, or equipment controller.
CIDRW Controller
V700-L22
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Amplifier Unit |
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V640-HAM11 |
RS-232C |
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Multiple Amplifier Units |
These are units that |
are controlled in |
control a CIDRW Head. |
response to commands |
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device. |
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CIDRW Head
V640-HS61
These are antennae for reading the carrier IDs from the ID Tags and writing the carrier IDs.
Communications with the host device follow the OMRON proprietary protocol.
The Amplifier Units are connected directly to the host device without using a CIDRW Controller.
Host
Amplifier Unit |
CIDRW Head |
V640-HAM11 |
V640-HS61 |
RS-232C |
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OMRON proprietary protocol |
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This is e.g. a host, or equipment controller.
These are units that |
These are antennae for |
control a CIDRW Head. |
reading the carrier IDs |
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from the ID Tags and |
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writing the carrier IDs. |
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SECTION 1
Product Outline
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No. |
Name |
Function |
1 |
Power indicator (green) |
An LED that indicates whether the power is ON or OFF. Lit while the power is ON. |
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2 |
OPERATING indicator (green) |
Lit while the CIDRW system status model is operating. |
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3 |
ALARMS indicator (green) |
Lit when the status of "AlamStatus" of the CIDRW system is "Alarm (1)." |
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4 |
BUSY indicator (green) |
Lit when the status of "OparationalStatus" of the CIDRW system is "BUSY." |
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5 |
ERROR indicator (red) |
When a processing error is detected (when SSACK is other than "NO"), this indicator is |
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lit for 50 ms. |
624 VDC power supply termiConnect to the 24 VDC power supply. nals
(with cover)
7 |
Frame ground terminal |
The grounding wire is connected here. (Ground to 100 Ω or less) |
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(with cover) |
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8 |
MODE switch |
Used to select the mode of operation. |
Refer to page 48.
0 : Normal Operation mode. When mounting the Controller, set the switch to this position.
3 : Setting mode, selected to set information such as the communication conditions. When the switch on the bottom face of the Controller cannot be accessed, the operation mode can be changed from the host device while the switch is left at the "0" setting.
1 - 2, 4 - 7 : Setting prohibited
9 |
RESET switch |
Restarts the CIDRW Controller. |
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10 |
SECS port |
Port for connecting the host device. Conforms to SECS I/II. |
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11 |
ID port |
An Amplifier Unit or Link Unit is connected here. |
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12 |
Maintenance port (with cover) |
Not used. Do not remove the cover. |
Functions and Names Component 1 SECTION
CIDRW System |
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SECTION 1
Product Outline
Functions and Names Component 1 SECTION
No. |
Name |
Function |
1 |
Dedicated power supply con- |
Connect to the 24 VDC power supply. |
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2 |
RS-485 port |
When using multiple CIDRW Heads, connect this to the RS-485 port of another Amplifier |
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Unit or to the multi-connection port of a Link Unit. |
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3 |
RS-232C port |
Connected to a CIDRW Controller or a host device. |
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Uses the OMRON proprietary communications protocol. |
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4 |
RUN indicator (green) |
Turns ON when the Amplifier Unit is in normal operation. |
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5 |
COMM indicator (yellow) |
Turns ON during communications with the host device or during communications with an |
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ID Tag. |
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6 |
NORM indicator (green) |
Turns ON when the communications finish with no error. |
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7 |
ERROR indicator (red) |
Turns ON when an error occurs during communication with the host device, or during |
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communication with an ID Tag. |
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8 |
CIDRW Head connection port |
A CIDRW Head is connected here. |
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9 |
Setting DIP switches |
Used to set the node number, the communications conditions, and the RS-485 terminal |
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resistance. |
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SECTION 1
Product Outline
V640-HS61
CIDRW HEAD
No. |
Name |
Function |
1 |
Antenna |
Used to communicate with ID Tags. |
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2 |
Antenna center |
This is the center of the communications area. |
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3 |
Connector |
Connect to an Amplifier Unit. |
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Functions and Names Component 1 SECTION
CIDRW System |
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SECTION 1
Product Outline
Functions and Names Component 1 SECTION
No. |
Name |
Function |
1 |
Multi-connection port |
This is the port that connects to the Amplifier Units when multiple CIDRW Heads are |
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(RS-485) |
connected to a CIDRW Controller. The GR (frame ground) terminal is also at this port. |
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2 |
RUN indicator (green) |
Turns ON while the Link Unit is in normal operation. |
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3 |
ID indicator (green) |
Turns ON during data communications with a V700 series IDRW Head. |
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4 |
COMM indicator (green) |
Turns ON during data communications with the host device. |
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5 |
ERR indicator (red) |
Turns ON when an error occurs during data communications with the host device or |
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head. |
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6 |
Host device connection port |
This is a port for connecting to the CIDRW Controller via an RS-232C interface. A dust |
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(RS-232C) |
cover is fitted on shipment from the factory. Remove this cover before using the port. |
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7 |
ID connection port |
This is a dedicated port for connecting a V700 series IDRW Head. Connect either a |
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V700-HMD13 or V700-HMD11-1 IDRW Head. |
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8 |
24 V power supply terminals |
Connect to the 24 VDC power supply. |
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(inside the cover) |
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9 |
Setting DIP switches |
Used to set the equipment number, the communications conditions, and the RS-485 ter- |
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minal resistance. |
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Connectionsand |
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Installation |
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Refer to page 26. |
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Installation |
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Connection and Wiring |
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Refer to page 31. |
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Communicationsfor |
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Set the Communications Conditions for the CIDRW Controller |
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Refer to page 48. |
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Preparation |
Set the Communications Conditions for Amplifier Units |
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Refer to page 61. |
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Set the Communications Conditions for Link Units
Refer to page 63.
Operation |
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Test for Communications with the Host Device |
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Trial |
Refer to page 65. |
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ID Tag <-> CIDRW System Communications Test
Refer to page 66.
Check the Surrounding Environment
Refer to page 28.
SECTION 1
Product Outline
Started Getting for Flowchart 1 SECTION
CIDRW System |
23 |
User’s Maual |
SECTION 1
Product Outline
Started Getting for Flowchart 1 SECTION
Communications |
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When SECS is Used |
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Refer to page 70. |
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When SECS is Not Used
Refer to page 81.
When you Encounter a Problem...
When SECS is Used
Refer to page 92. List of Error Messages
Refer to page 92. Controller Indicators
Refer to page 93. Operation Check Flowchart
When SECS is Not Used
Refer to page 98. List of Error Messages
Refer to page 98. Amplifier Unit Indicators
Refer to page 99. Operation Check Flowchart
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SECTION 2
Installation and Connections/Wiring
|
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Installation |
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Connections and Wiring |
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Connections/Wiring and Installation 2 SECTION
CIDRW System |
25 |
User’s Maual |
Installation 2 SECTION
SECTION 2
Installation and Connections/Wiring
There is a switch for selecting the operation mode (Normal Operation mode <-> Setting mode) on the bottom face of the CIDRW Controller. Set the communications conditions in the Setting mode (switch position 3) before mounting the CIDRW Controller.
Refer to page 48.
Set the Controller to the Normal Operation mode (switch position 0) when mounting it.
Mount the CIDRW Controller with the resin washers and four M4 screws provided as accessories.
Mounting dimensions
(Unit: mm)
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•Tighten the M4 screws with a torque not exceeding 1.2 N·m.
•Do not apply organic solvents used with screw locking agents at the locations where the screws are inserted.
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SECTION 2
Installation and Connections/Wiring
Use spring washers and flat washers with the four M4 screws when mounting the Amplifier Unit.
Installation 2 SECTION
Mounting dimensions
(Unit: mm)
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RUN
COMM
NORM
ERROR
Tighten the M4 screws with a torque not exceeding 1.2 N·m.
CIDRW System |
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User’s Manual |
Installation 2 SECTION
SECTION 2
Installation and Connections/Wiring
The area for communications with ID Tags varies substantially according to the installation orientations and the background conditions (metals, noise, etc.). Check the communications area before deciding the installation position.
For details on actual communications distances, see Characteristic Data depending on Conditions of Use in Appendix.
Refer to page 109.
The communications area differs according to the positional relationship during communications.
Mounting |
Communications area (purely illustrative) |
Explanation |
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orientation |
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Coaxial |
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The maximum communications area is |
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obtained when the centerlines of the CIDRW |
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Head and the ID Tag coincide. |
Parallel |
The maximum communications area is |
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obtained when the center point of the |
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antenna on the CIDRW Controller is aligned |
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with the centerline of the ID Tag. |
Vertical |
When the center point of the antenna on the |
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CIDRW Head is aligned with the centerline of |
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the ID Tag, the communications area is sub- |
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stantially reduced. |
The communications distances for reading and writing are not the same; the distance is shorter for writing. Therefore, when data is to be both read and written, take the distance for writing as the reference distance when installing the CIDRW Head and the ID Tag.
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User’s Manual |
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SECTION 2
Installation and Connections/Wiring
Metals in the vicinity of the communications area will affect the range, making it smaller.
Refer to page 115.
This CIDRW system uses a frequency of 134 kHz for communications with ID Tags. Equipment such as switching power supplies, inverters, servomotors, or monitors in the surrounding area will adversely affect communications, restricting the communications area.
The noise levels in the vicinity of the CIDRW Head can be determined with the environmental noise measurement command (applies only when SECS is not used). Refer to page 89.
For details on the relationship between noise and communications distance, see Appendix. Refer to page 121.
Use spring washers and flat washers with the four M3 screws when mounting a CIDRW Head.
Mounting dimensions
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(Unit: mm) |
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Antenna center |
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Tighten the M3 screws with a torque not exceeding 0.6 N·m.
Be sure to install the Amplifier Unit in a panel or metal-shielded equipment.
Installation 2 SECTION
CIDRW System |
29 |
User’s Manual |
SECTION 2
Installation and Connections/Wiring
Mount Link Units with the two M4 screws and washers provided as accessories.
Installation 2 SECTION
Mounting dimensions
(Unit: mm)
Two M4 or 4.2-dia. holes
•Tighten the M4 screws with a torque not exceeding 1.2 N·m.
•Do not apply organic solvents used with screw locking agents at the locations where the screws are inserted.
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SECTION 2
Installation and Connections/Wiring
Connect the wires to the 24 VDC power supply terminals and frame ground terminal.
Ground to 100 Ω or less.
24 VDC
• Crimp terminals
The terminal screws on the terminal block are M3 size. Use appropriate crimp terminals for M3 screws as shown below.
Crimp terminals
Shape |
Size |
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Forked
6 mm max.
Round
6 mm max.
• Power supply
Use a power supply unit that satisfies the following conditions.
Condition
Power supply voltage |
Output current |
24 VDC +10%, -15% |
500 mA DC min. |
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Recommended model
Manufacturer |
Model |
OMRON |
S82K-01524 |
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Be sure to replace the cover after wiring.
Wiring and Connections 2 SECTION
CIDRW System |
31 |
User’s Manual |