Omron 6CYCIDV6400202 Manual Part One

CIDRW SYSTEM

V640 SERIES

USER'S MANUAL

AMPLIFIER UNIT

V640-HAM11

CIDRW HEAD

V640-HS61

CIDRW CONTROLLER

V700-L21

LINK UNIT

V700-L11

Cat. No. Z167-E1-01

Special or Critical Applications

When the CIDRW System will be used in one of the conditions or applications listed below, allow extra safety margins in
ratings and functions, add extra safety feature such as fail-safe systems, and consult your OMRON representative.

• Operating conditions or environments which are not described in the manual.

• Nuclear power contr ol sy stems , railroa d sy stems, aviat ion sy stems , vehic les, co mbus tion sy stems , medi cal equ ipmen t,
amusement equipment, or safety equipment.

• Other systems, machines, and equip me nt that may have a s erio us influence on lives an d p roperty and require e xt ra
safety features.

Product Availability

Some of the products listed may not be available in some countries. Please contact your nearest OMRON sales
office by referring to the addresses provided at the back of this manual.

 OMRON, 2003

All rights reserved. No part of this publication may be reproduced, stored in a retrieval system, or transmitted, in
any form, or by an y means, mechanical , e lec tro nic , pho toc opy in g, rec ordi ng, or otherwise, wi thou t the prior written
permission of OMRON.
No patent liability is assumed with respect to the use of the information contained herein. Moreover, because
OMRON is constantly stri vi ng to im prov e it s high -qua lity products, the informat ion contained in this manual is sub­ject to ch ange wit hout no tice . Ev ery pr eca ution has be en ta ken in th e pr epara tio n of t hi s man ual . Ne ver thel ess,
OMRON assumes no responsibility for errors or omissions. Neither is any liability assumed for damages resulting
from the use of the information contained in this publication.

INTRODUCTION

ÇÕǹÇ?Ç ëÊ 1 èÕ ëÊ 2 èÕ ëÊ 3 èÕ ëÊ 4 èÕ

Introduction

SECTION 1

SECTION 2

SECTION 3

SECTION 4

SECTION 5

Table of Contents/Precautions on Safety

SECTION 1 SECTION 2 SECTION 3 SECTION 4 SECTION 5 SECTION 6

Product Outline

Installation and Connections/Wiring

Preparing for Communications

Reading from/Writing to ID Tags

Troubleshooting

SECTION 6

Appendix

CIDRW System

V640-HAM11 Amplifire Unit
V640-HS61 CIDRW Head
V700-L21 CIDRW Controller
V700-L11 Link Unit

User's Manual

INTRODUCTION

Table of Contens

INTRODUCTION
Table of Contents

Table of Contents

Introduction 1

Table of Contents 2
General Safety Precautions 4
General Safety Precautions 4
Warning 4
Caution 4
Notice 5
Applicable SEMI Standards 7
Applicable Standards 8
Editor’s Note 10

SECTION 1 Product Outline 11

What is a C IDRW System? 12
Features 13
System Configuration 14
Component Names and Functi on s 15
Flowchart for Getting Started 19

SECTION 2 Installation and Connections/Wiring 21

Installation 22
Connections and Wiring 27

SECTION 3 Preparing for Communications 43

Set the Communications Conditions for the CIDRW Controller 44
Set the Communications Conditions for Amplifier Units 55
Set the Communications Conditions for Link Units 57
Communications Test 59

SECTION 4 Reading from/Writing to ID Tags 63

When SECS is Used 64
When SECS is Not Used 74

CIDRW System

2

User’s Manual

INTRODUCTION

Table of Contents

SECTION 5 Troubleshooting 83

When SECS is Used 84
When SECS is Not Used 90

SECTION 6 Appendix 95

Specifications and Dimensions 96
System Configuration E xamples 100
Characteristic Data depending on Conditions of Use 102
Data Segment Area 111
Regular Inspection 112
SECS Protocol Specifications 113
ASCII Code Table 118
Protective Construction 119
Revision Histor y 124

INTRODUCTION

Table of Contents

CIDRW System

User’s Maual

3

INTRODUCTION

INTRODUCTION

General Safety Precautio ns

OMRON products are manufactured for use according to proper procedures by a qualified operator and only for the

General Safety Precautions

purposes described in this manual.
The follow ing conventions are used to indicate an d classify precauti ons in this manual. Always heed the infor mation
provided with them. Failure to heed precautions can result in injury to people or damage to property.

DANGER

Indicates an imminently hazardous situation which, if not avoided, will result in death or serious injury.

WARNING

Indicates a potentially hazardous situation which, if not avoided, could result in death or serious injury.

Caution

Indicates a potentially hazardous situation which, if not avoided, could result in minor or moderate injury, or property
damage.

WARNING

Failure to read and understand the information provided in this manual may result in personal injury or death, damage to
the product, or product failure. Please read each section in its entirety and be sure you understand the information
provided in the section and related sections before attempting any of the procedures or operations given.

Caution
General Safety Precautions

Caution

To ensure safety, observe the following points.

Caution • Do not insert water or wires through gaps in the case. This could cause fire or electric shock.
Caution • In the event of a malfunction, stop using the product immediately, turn off the power, and

consult your OMRON dealer.

Caution • Dispose of this product as industrial waste.

CIDRW System

4

User’s Manual

Notice

INTRODUCTION

INTRODUCTION

The CIDRW System is highly reliable and resistant to most environmental factors. The following guidelines, however, must
be followed to ensure reliability and optimum use of the CIDRW System.

 Installation Site

Install the product at a location where:

• It is not exposed to direct sunlight.

• It is not exposed to corrosive gases, dust, metal chips, or salt.

• The working temperature is within the range stipulated in the specifications.

• There are no sudden variations in temperature (no condensation).

• The relative humidity is within the range stipulated in the specifications.

• No vibration or sh ock exceedin g the values st ipulated in the sp ecifications is transmitted dire ctly to
the body of the product.

• It is not subject to splashing water, oil, or chemical substances.

 Mounting

• This product commun icate s with ID Tags using the 134 kHz frequency b and . Note th at some tr ans­ceivers, motors, mo nitoring equipment, and power supplies (power supply ICs) generate electrical
waves (noise) that in terfere with communica tions with ID Tags. If you are using the product in the
vicinity of any of these devices, check the effect on communications in advance.

• In order to minimize the effects of noise, ground nearby metal bodies with a grounding resistance not
exceeding 100 ohms.

• When mounting Amplifier Units, tighten the screws with a torque no greater than 1.2 N·m.

• When mounting CIDRW Heads, tighten the screws with a torque no greater than 0.6 N·m.

• When multiple CIDRW Heads are mounte d next to each other, communications perfor mance could
be impaired by mutual interference. Note the information in this manual on mutual interference when
installing multiple heads.

Refer to page 105.

Notice

CIDRW System

User’s Manual

5

INTRODUCTION

Notice

INTRODUCTION

 Power and Ground Cables

• Use the power supply voltage specified in this manual.

• Ensure correct polarity when connecting to the +/- power supply terminals.

• The ground terminals must be connected to a ground with a grounding resistance not exceeding 100
ohms.

 Wiring Work

• Always turn the power off before starting wiring work or connecting/disconnecting cables.

• Do not run high-voltage lines and power lines though the same conduit.

• To prevent damage by static electrici ty, wear a wrist strap or equivalent, an d take measures t o pre­vent charging, before touching terminal components or parts inside connectors.

 Screw Locking Adhesive

• Screw locking adhesive (screw lock) may cause deterioration and cracking of resin parts: do not use
it for screws in resin parts or anywhere where resin washers are used.

 Cleaning

• Do not use organic solvents such as thinner or benzene.

CIDRW System

6

User’s Manual

Applicable SEMI Standards

INTRODUCTION

INTRODUCTION

This CIDRW system complies with the following standards.

• SEMI E99 THE CARRIER ID READER/WRITER FUNCTIONAL STANDARD

• SEMI E5 EQUIPMENT COMMUNICATION STANDARD 2 MESSAGE CONTENT (SECS II)

• SEMI E4 EQUIPMENT COMMUNICATION STANDARD 1 MESSAGE TRANSFER (SECS I)

SEMI is the acronym for Semiconductor Equipment and Materials International.
SECS is the acronym for SEMI Equipment Communications Standard.

Applicable SEMI Standards

CIDRW System

User’s Manual

7

INTRODUCTION

INTRODUCTION

Applicable Standards

Applicable Standards

1. FCC Rules (Federal Communications Commission)

This device complies with Part 15 Subpart C of the FCC Rules.
FCC ID: E4E6CYCID6400202
Operation is subject to the following two conditions:
(1) this device may not cause harmful interference, and
(2) this device mus t a cc ep t a ny i nter fe re nc e r ec eiv ed, including interfe renc e that may cause u nde si r ed ope r-

ation.

FCC NOTICE

This equipment has been tested and found to comply with the limits for a Class B digital device, pursu­ant to part 15 of the FCC Rules. These limi ts are designed to provide reasonable prot ection against
harmful interference in a residential installation.
This equipment gen er ate s, us es and c an rad ia te r ad io fr equ enc y ene rgy and, if not installed a nd used
in accordance with the inst ructions, may cause harmful interfer ence to radio communications. How­ever, there is no guarantee that interference wi ll not occu r in a particular in stallation. If this equipment
does cause harmfu l interference to r adio or television reception, which c an be determined b y turning
the equipment off and on, the user is en couraged to try to correct the interference by one or more of
the following measures:

• Reorient or relocate the receiving antenna

• Increase the separation between the equipment and receiver.

• Connect the equipment into an outlet on a circuit different from that to which the receiver is

connected.

• Consult the dealer or an experienced radio/TV technician for help.

FCC WARNING

Changes or modifica tions not expre ssly approved by th e party responsible for compliance cou ld void
the user's authority to operate the equipment.
Properly shielded and grounded cables and connectors must be used for connection to host
computer and/or peripherals in order to meet FCC emission limits.

CAUTION

This device must be professionally installed.
This CIDRW Head [Model: V640-HS61 (-X)] is dedicated to Amplifier Unit [Model: V640-HAM11 (-X)].

CIDRW System

8

User’s Manual

INTRODUCTION

INTRODUCTION

2. EC Declaration of Conformity

Hereby, Omron, declares that this V640(-X) is in compliance with the essential requirements and other
relevant provisions of Directive 199 9/5/EC, and satisf y tests for the appr opriate requi rements of the followi ng
relevant standards.
Radio: EN300 330 V1.2.1 (May 1999)
EMC: EN301 489-3 (EN301 489-1)
Safety: EN61010-1: 1993+A2

Countries of intended use:
Austria, Belgium, Denm ark, Finland, France, Germany, Iceland, Ireland, Italy, Liechtenstein, Luxem­bourg, Netherlands, Norway, Portugal, Spain, Sweden, Switzerland, United Kingdom

English Hereby, Omron, declares that this V640(-X) is in compliance with the essential

requirements and other relevant provisions of Directive 1999/5/EC.

Finnish Omron vakuuttaa täten että V640(-X) tyyppinen laite on direktiivin 1999/5/EY oleellis-

ten vaatimusten ja sitä koskevien direktiivin muiden ehtojen mukainen.

Dutch Hierbij verklaart Omron dat het toestel V640(-X) in overeenstemming is met de

essentiële eisen en de andere relevante bepalingen van richtlijn 1999/5/EG

French Par la présente Omron déclare que l'appareil V640(-X) est conforme aux exigences

essentielles et aux autres dispositions pertinentes de la directive 1999/5/CE

Swedish Härmed intygar Omron att denna V640(-X) står I överensstämmelse med de

väsentliga egenskapskrav och övriga relevanta bestämmelser som framgår av direk­tiv 1999/5/EG.

Danish Undertegnede Omron erklærer herved, at følgende udstyr V640(-X) overholder de

væsentlige krav og øvrige relevante krav i direktiv 1999/5/EF

German Hiermit erklärt Omron, dass sich dieser/diese/dieses V640 (-X ) in Übereins tim mu ng

mit den grundlegenden Anforderungen und den anderen relevanten Vorschriften der
Richtlinie 1999/5/EG befindet". (BMWi)

Italian Con la presente Omron dichiara che questo V640(-X) è conforme ai requisiti essen-

ziali ed alle altre disposizioni pertinenti stabilite dalla direttiva 1999/5/CE.

Spanish Por medio de la presente Omron declara que el V640(-X) cumple con los requisitos

esenciales y cualesquiera otras disposiciones aplicables o exigibles de la Directiva
1999/5/CE

Portuguese Omron declara que este V640(-X) está conforme com os requisitos essenciais e out-

ras disposições da Directiva 1999/5/CE.

Applicable Standards

CIDRW System

User’s Manual

9

INTRODUCTION

INTRODUCTION

Editor’s Note

Editor’s Note

Visual Aid s

Indicates an explanation of a point that must be observed to ensure that the product is capable of its proper functions and perfor­mance. Read this information carefully and follow the cautions: if the product is used incorrectly, data or the equipment itself
could be destroyed.

Indicates summaries of points of particular importance relating to product performance, e.g. points to note during operation and
advice on how to use the product.

Indicates the number of a page where related information can be found.

Indicates information for reference when you encounter a problem.

Indicator Statuses

The following symbol s are used to show the status of the indi cators on the CIDRW Controller and Amplifier
Units.

OFF

Flashing

ON

10

CIDRW System

User’s Manual

SECTION 1
Product Outline

What is a CIDRW System? 12
Features 13
System Configuration 14

SECTION 1

Product Outline

Component Names and Functions 15
Flowchart for Getting Started 19

CIDRW System

User’s Manual

11

SECTION 1
Product Outline

What is a CIDRW System?

SECTION 1

The CIDRW system writes data to, an d reads data from, the carrier IDs (ID Tags) mounted on the carriers
(FOUP) in semiconductor manufacturing processes without contacting these ID Tags. CIDRW is the
abbreviation of "Carrier ID Reader/Writer" and this abbreviation is used throughout this manual.
Reading and writing information such as models, process instructions, lots, and inspection results to and from

What is a CIDRW System?

ID Tags makes it possible to manage work instruction information from a host device.

Example: Management of information in semiconductor and wafer manufacturing processes

ID Tag

(holder is separate)

CIDRW Head

Amplifier Unit

CIDRW Controller

Host

Reading and writing
information

• Model information

• Process instruction
information

• Completion
information

• Lot information

• Inspection resu lts

Etc.

12

CIDRW System

User’s Manual

Features

SECTION 1

Product Outline

 CIDRW Systems that Conform to SEMI Standards (SEMI E99, E5, E4)

CIDRW System Conforming to SEMI Standards

CIDRW Controller

Host

SECS I/II

List of Applicable Standards

• SEMI E99 THE CARRIER ID READER/WRITER FUNCTIONAL STANDARD

• SEMI E5 EQUIPMENT COMMUNICATION STANDARD 2 MESSAGE CONTENT (SECS II)

• SEMI E4 EQUIPMENT COMMUNICATION STANDARD 1 MESSAGE TRANSFER (SECS I)

SEMI is the acronym for Semiconductor Equipment and Materials International.
SECS is the acronym for SEMI Equipment Communications Standard.

V700-L21

Amplifier Unit
V640-HAM11

CIDRW Head
V640-HS61

ID Tag
RI-TRP-DR2B

(Made by Texas
Instruments)

SECTION 1

Features

CIDRW System

User’s Maual

13

SECTION 1
Product Outline

System Configuration

SECTION 1

System Configuration

When SECS is Used

Communication with the host device is possible using the SECS protocol.

CIDRW Controller

Host

RS-232C
SECS I/II

This is e.g. a host,
or equipment con­troller.

V700-L21

RS-232C

Multiple Amplifier Units
are controlled in
response to commands
(SECS) from the host
device.

Amplifier Unit
V640-HAM11

These are units that
control a CIDRW Head.

CIDRW Head
V640-HS61

These are antennae for
reading the carrier IDs
from the ID Tags and
writing the carrier IDs.

When SECS is Not Used

Communications with the host device follow the OMRON proprietary protocol.
The Amplifier Units are connected directly to the host device without using a CIDRW Controller.

Host

CIDRW Head
V640-HS61

These are antennae for
reading the carrier IDs
from the ID Tags and
writing the carrier IDs.

This is e.g. a host,
or equipment con­troller.

RS-232C
OMRON proprietary

Amplifier Unit
V640-HAM11

protocol

These are units that
control a CIDRW Head.

14

CIDRW System

User’s Manual

Component Names and Functions

CIDRW Controller V700-L21

SECTION 1

Product Outline

SECTION 1

Component Names and Functions

45%

5'%5 +&

No. Name Function

1 Power indicator (green) An LED that indicates whether the power is ON or OFF. Lit while the power is ON.
2 OPERATING indicator (green) Lit while the CIDRW system status model is operating.
3 ALARMS indicator (green) Lit when the status of "AlamStatus" of the CIDRW system is "Alarm (1)."
4 BUSY indicator (green) Lit when the status of "OparationalStatus" of the CIDRW system is "BUSY ."
5 ERROR indicator (red) When a processing error is detected (when SSACK is other than "NO"), this indicator is

6 24 VDC power supply termi-

nals
(with cover)

7 Frame ground terminal

(with cover)

8 MODE switch Used to select the mode of operation.

/#+06'0#00%'

lit for 50 ms.
Connect to the 24 VDC power supply.

The grounding wire is connected here. (Ground to 100 Ω or less)

Refer to page 44.

0 : Normal Operation mode. When mounting the Controller, set the switch to this posi-

tion.

3 : Setting mode, selected to set information such as the communication conditions.

When the switch on the bottom face of the Controller cannot be accessed, the opera­tion mode can be changed from the host device while the switch is left at the "0" set­ting.

1 - 2, 4 - 7 :

9 RESET switch Restarts the CIDRW Controller.
10 SECS port Port for connecting the host device. Conforms to SECS I/II.
11 ID port An Amplifier Unit or Link Unit is connected here.
12 Maintenance port (with cover) Not used. Do not remove the cover.

Setting prohibited

CIDRW System

User’s Maual

15

SECTION 1
Product Outline

SECTION 1

Component Names and Functions

Amplifier Unit V640-HAM11

No. Name Function

1 Dedicated power supply con-

nector

2 RS-485 port When using multiple CIDRW Heads, connect this to the RS-485 port of another Amplifier

3 RS-232C port Connected to a CIDRW Controller or a host device.

4 RUN indicator (green) Turns ON when the Amplifier Unit is in normal operation.

5 COMM indicator (yellow) Turns ON during communications with the host device or during communications with an

6 NORM indicator (green) Turns ON when the communications finish with no error.

7 ERROR indicator (red) Turns ON when an error occurs during communication with the host device, or during

8 CIDRW Head connection port A CIDRW Head is connected here.

9 Setting DIP switches Used to set the node number, the communications conditions, and the RS-485 terminal

Connect to the 24 VDC power supply.

Unit or to the multi-connection port of a Link Unit.

Uses the OMRON proprietary communications protocol.

ID Tag.

communication with an ID Tag.

resistance.

16

CIDRW System

User’s Manual

CIDRW Head V640-HS61

V640-HS61

CIDRW HEAD

No. Name Function

1 Antenna Used to communicate with ID Tags.

2 Antenna center This is the center of the communications area.

3 Connector Connect to an Amplifier Unit.

SECTION 1

Product Outline

SECTION 1

Component Names and Functions

CIDRW System

User’s Maual

17

SECTION 1
Product Outline

SECTION 1

Component Names and Functions

Link unit V700-L11

No. Name Function

1 Multi-connection port

(RS-485)
2 RUN indicator (green) Turns ON while the Link Unit is in normal operation.
3 ID indicator (green) Turns ON during data communications with a V700 series IDRW Head.
4 COMM indicator (green) Turns ON during data communications with the host device.
5 ERR indicator (red) Turns ON when an error occurs during data communications with the host device or

6 Host device connection port

(RS-232C)
7 ID connection port This is a dedicated port for connecting a V700 series IDRW Head. Connect either a

8 24 V power supply terminals

(inside the cover)
9 Setting DIP switches

(inside the cover)

This is the port that connects to the Amplifier Units when multiple CIDRW Heads are
connected to a CIDRW Controller. The GR (frame ground) terminal is also at this port.

head.
This is a port for connecting to the CIDRW Controller via an RS-232C interface. A dust

cover is fitted on shipment from the factory. Remove this cover before using the port.

V700-HMD13 or V700-HMD11-1 IDRW Head.
Connect to the 24 VDC power supply.

Used to set the equipment number, the communications conditions, and the RS-485 ter­minal resistance.

18

CIDRW System

User’s Manual