Omega Products FMA-762A-I User Manual

HIGH FLOW-RATE GAS MASS CONTROLLERS AND METERS For Clean Gases
FMA-775A
FMA-700A/800A
Series
Optional
U ±1% Accuracy
(Up to 500 SLM), ±0.2% Repeatability
U Low Cost U For Flow Rates
Up to 1000 SLM
U Normally Closed
Valve for Added Safety
U Fast Response U Altitude Insensitive U Removable Sensing
Tube Assembly
The OMEGA® FMA-700A and 800A Series mass flowmeters and controllers extend the range of mass flow measurement and control from 0 to 5 SCCM to 1000 SLM with 50:1 turndown capability. Like all mass flow sensors, these new units measure mass flow rate directly, without the need for temperature or pressure corrections.
The FMA-700A and 800A Series work on the heated bypass sensor tube principle. The units feature corrosion-resistant stainless steel and FKM construction and a 325 mesh (44 micron) inlet screen to prevent contamination of the sensor. The flow body and valve leak less than 10-8 atm-cc/sec of helium. In the event of a power failure, the valve is normally closed.
The FMA-78P2 and FMA-78P4 are 2- and 4-channel readout/power supply/setpoint control electronic boxes for use with FMA-700A and 800A Series mass flow sensors. The units feature 000.0 to 102.4% of full scale display, a ±15 Vdc power supply, setpoint potentiometers (for mass flow controllers), power cord, and an electrical connector for hookup of the electronics boxes’ outputs.
Mating D connector included
with all models. All models
shown smaller than actual size.
FMA-760A
Maximum Pressure:
FMA-760A to FMA-772A: 1000 psig
The FMA-78P Series rate indicators/ electronics packages also have back-panel blend control switches that select independent/ slave operations for each channel (channel 1 is the master), and the units include a 0 to 5 Vdc output for each channel for chart recording, data acquisition, or computer interfacing.
SPECIFICATIONS
Accuracy: ±1% full scale
(up to 500 SLM), ±2% full scale for 750 to 1000 SLM
Repeatability: ±0.2% full scale Turndown Ratio: 50:1 Response Time: 2.0 seconds Analog Setpoint:
0 to 5 Vdc: Voltage output models 4 to 20 mA: Current output models
Linear Output:
Standard: 0 to 5 Vdc into 2000 Ω min Optional: 4 to 20 mA, into 200 to 750 Ω
Dimensions: mm (inch); Weight: kg (lb)
Model No. Height Length Width Weight FMA-760A 115 (4.5) 123 (4.8) 25 (1) 0.7 (1.5) FMA-761A to 770A 115 (4.5) 128 (5.0) 25 (1) 0.7 (1.5) FMA-771A & 772A 131 (5.1) 161 (6.4) 44 (1.8) 1.8 (4) FMA-773A & 774A 134 (5.3) 184 (7.3) 48 (1.9) 2.4 (5.2) FMA-775A to 778A 150 (5.9) 216 (8.5) 64 (2.5) 5 (11) FMA-860A 115 (4.5) 102 (4.0) 25 (1) 0.5 (1) FMA-861A to 870A 115 (4.5) 102 (4.0) 25 (1) 0.5 (1) FMA-871A to 874A 131 (5.1) 116 (4.6) 44 (1.8) 0.9 (2) FMA-875A & 876A 150 (5.9) 151 (5.9) 64 (2.5) 2.4 (5.3) FMA-877A & 878A 150 (5.9) 185 (7.3) 64 (2.5) 3 (6.6)
FMA-773A to 778A: 200 psig
FMA-860A to FMA-874A: 1500 psig†† FMA-875A to FMA-878A: 1000 psig
Pressure Coefficient: 0.1% typical Differential Pressure:
FMA-800A Series: 0.5 psid
FMA-700A Series: No less than
20% of supply pressure, depending on parameters
Temperature Range: Gas and Ambient -10 to 70°C (14 to 158°F)
Temperature Coefficient:
0.05% full scale/°C Wetted Parts: 316 SS body and sensing
tube assembly, FKM elastomers, other materials available
POWER Voltage Output Models: 12 Vdc (±5%)
or 15 Vdc (±10%) mA Output Models: 15 Vdc (±5%)
or 24 Vdc (±15%)
Current Consumption: FMA-800A: <45 mA DC FMA-700A: <250 mA DC
†† For maximum pressures up to 3000 psig, consult Flow Engineering for quote.
††
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RATE INDICATORS
Electronics For Completing The System
Meters/controllers must have 0 to 5 Vdc outputs.
When a panel meter system is required, order your mass flow sensor with the following components:
Power Supply (FPW-15): See Accessories table below
Display and Alarm (DPF64) Totalization (DPF65 or DPF66)
FMA-78P4 readout/power supply electronics shown smaller than actual size. FMA-78C10, 3 m (10') interconnecting cable, sold separately.
D
Various Compatible Meters: DPF50,
DPF60, DPF300, iSeries, DPF403.
Visit omega.com/meters for details
SPECIFICATIONS
(FMA-78P Series)
Power: 117 Vac ±10%, 50 to 60 Hz,
50 watts Dimensions:
215.9 W x 123.8 H x 247.7 mm D
1
2 x 47⁄8 x 93⁄4")
(8
Display: 0 to 102.4%
Rate Indicators/Electronics Boxes
Model No. Description FMA-78P2 For up to 2 meters
FMA-78P4 For up to 4 meters
Meters/controllers must have
0 to 5 Vdc outputs.
controllers
controllers
Accessories
Model No. Description FMA-78C10
FMA-78C25
FMA-78C50
FPW-15
Note: All flow ranges are specified for nitrogen or air. When used for other gases, a correlation factor is used to determine flow rate.
Comes complete with operator’s manual and mating connector.
For use with FMA-700A/800A Series
**
units only.
3 m (10') interconnect cable with connectors
8 m (25') interconnect cable with connectors
15 m (50') interconnect cable with connectors
15 Vdc power supply**
Mass Flowmeters/Controllers
To Order
Model No. Controller Model No. Compression (with Valve) Meter Fitting (inch) Range
FMA-760A-V-(*) FMA-860A-V ¹⁄₈ 0 to 5 SCCM FMA-761A-V-(*) FMA-861A-V ¹⁄₄ 0 to 10 SCCM FMA-762A-V-(*) FMA-862A-V ¹⁄₄ 0 to 20 SCCM FMA-763A-V-(*) FMA-863A-V ¹⁄₄ 0 to 50 SCCM FMA-764A-V-(*) FMA-864A-V ¹⁄₄ 0 to 100 SCCM FMA-765A-V-(*) FMA-865A-V ¹⁄₄ 0 to 200 SCCM FMA-766A-V-(*) FMA-866A-V ¹⁄₄ 0 to 500 SCCM FMA-767A-V-(*) FMA-867A-V ¹⁄₄ 0 to 1 SLM FMA-768A-V-(*) FMA-868A-V ¹⁄₄ 0 to 2 SLM FMA-769A-V-(*) FMA-869A-V ¹⁄₄ 0 to 5 SLM FMA-770A-V-(*) FMA-870A-V ¹⁄₄ 0 to 10 SLM FMA-771A-V-(*) FMA-871A-V ¹⁄₄ 0 to 15 SLM FMA-772A-V-(*) FMA-872A-V ¹⁄₄ 0 to 20 SLM FMA-773A-V-(*) FMA-873A-V ¹⁄₄ 0 to 50 SLM FMA-774A-V-(*) FMA-874A-V ¹⁄₄ 0 to 100 SLM FMA-775A-V-(*) FMA-875A-V ³⁄₈ 0 to 200 SLM FMA-776A-V-(*) FMA-876A-V ³⁄₈ 0 to 500 SLM FMA-777A-V-(*) FMA-877A-V ¹⁄₂ 0 to 750 SLM FMA-778A-V-(*) FMA-878A-V ³⁄₄ 0 to 1000 SLM
(*)Replace asterisk in model number with gas name, inlet pressure, and outlet pressure. Replace “-V” in model number with “-l” for 4 to 20 mA output; no additional cost. For NIST calibration, add suffix “-NIST” to model number for additional cost. When gas
calibration is for less than 59ºF or more than 87ºF, for additional cost. For calibrations up to 3000 psig consult Flow Engineering for cost.
Ordering Examples: FMA-871A-V, 150 psig, ambient temperature. FMA-766A-V-(N2, 20/0 psi, 70°F), mass flow controller for nitrogen, 20 psi inlet pressure,
0 psi outlet, and 70°F temperature, range 0 to 500 SCCM.
Visit omega.com/fma700_800 for Pricing and Details
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