Omega Products FMA-700A Installation Manual

FMA-700A SERIES Mass Flow Controllers

FMA-800A SERIES Mass Flowmeters

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WARNING: These products are not designed for use in, and should not be used for, human applications.

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i

TABLE OF
CONTENTS

FMA-700A Series Mass Flow Controllers
FMA-800A Series Mass Flowmeters

Page

Section 1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1

1.1 General Description .............................................................................. 2

1.2 System Features ..................................................................................... 3

Section 2 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

2.1 for Series FMA-800A MFM’S ............................................................... 5

2.1 for Series FMA-700A MFC’S ................................................................ 5

Section 3 Installation and Operating Procedures . . . . . . . . . . 6

3.1 General Information ............................................................................. 6

3.2 Gas Connections ................................................................................... 6

3.3 System Purging....................................................................................... 7

3.4 External Electrical Connector-9-Pin D-Connector............................. 7

3.5 Basic Operating Procedures to Establish a Controlled Flow Rate .. 9

3.6 Additional Features - Connections and Operations

Valve Override (SIM-VO) for Series FMA-700A MFC.................. 9

3.7 Reference Voltage (VREF) .................................................................. 10

3.8 Digital Interfacing ................................................................................10

Section 4 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . 11

4.1 Theory of Operation ............................................................................ 11

4.2 Mass Flowmeter/Mass Flow Controller Electronics ...................... 14

4.3 Control of the Proportional Control Valve ...................................... 16

Section 5 Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17

5.1

General ............................................................................................................17

5.2 Preliminary Checks ........................................................................................... 17

5.3 Control Valve Disassembly ............................................................................ 17

ii

TABL E OF
CONTENTS

FMA-700A Series Mass Flow Controllers
FMA-800A Series Mass Flowmeters

Page

Section 5 Maintenance continued

5.4 System Troubleshooting .................................................................................. 18

5.5 Return Shipments

.......................................................................................................... 18

Section 6 Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19

6.1 General Description ............................................................................ 19

6.2 Equipment Required............................................................................ 19

6.3 Calibration Procedure ......................................................................... 19

Section 7 Input/Output (I/O) Designations & Electrical

Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

7.1 Input/Output (I/O) Designations (Electrical Connections) .......... 24

7.2 I/O Electrical Specifications .............................................................. 25

7.3 Simple Valve Override (SIM-VO) ...................................................... 27

Section 8 Current Loop Specifications. . . . . . . . . . . . . . . . . . 28

Section 9 Gas Conversion Factors . . . . . . . . . . . . . . . . . . . . 30

EXPLODED VIEW

SERIES FMA-700A MASS FLOW CONTROLLER

INTRODUCTION

1

(Model FMA-761A-V Illustrated)

1

INTRODUCTION

1

2

1.1 General Description

OMEGA’s Mass Flow Products reflect over three decades of experience in the design and
manufacture of precision instruments for the measurement and control of gas flow.
OMEGA’s Mass Flow products incorporate design principles that are simple and
straightforward, yet flexible enough to operate under a wide variety of process
parameters. The result is mass flowmeters (MFM’s), mass flow controllers (MFC’s) that
are accurate, reliable and cost-effective solutions for many mass flow applications.

OMEGA’s Series FMA-800A and Series FMA-700A accurately measure (Series FMA­700A/800A) and control (Series FMA-700A) flow rates of a wide variety of gases from 5
standard cubic centimeters per minute (SCCM) to 1000 standard liters per minute (SLM)
full scale nitrogen flow for operating pressures up to 1500 PSIG. The MFM’s and MFC’s
provide a linear flow signal output proportional to a calibrated flow rate. This output
signal can be used to drive a digital display, such as the DPF60 Series, or other customer
supplied data acquisition equipment.

The Series FMA-800A MFM’s & FMA-700A MFC’s incorporate an operating principle
based on the thermodynamic properties of the process gas being monitored. Both the
FMA-800A MFM’S & FMA-700A MFC’s employ a sensor assembly that includes a heater
and two precision resistance-type temperature sensors. The integral printed circuit board
(PCB) assembly performs amplification and linearization of the sensor assembly output
signal and provides the flow signal output. Patented, restrictive laminar flow elements
condition the main channel of gas flow while thermal measurement occurs in the gas
flowing through the bypass sensor assembly. The FMA-700A additionally incorporate an
integral proportional control valve and closed loop control circuitry on the PCB assembly.
Detailed explanation of operational theory is described in Section 4, Theory of Operation.

INTRODUCTION

1

1.2 System Features

+ Single Power Supply Operation

Voltage output models operate from nominal power supply voltages of + 12 (±5%) or +
15 (±10%) Vdc. Current loop models operate from nominal power supply voltages of + 15
(±5%) or + 24 (±15%) Vdc. The voltage output models may be directly connected into
existing installations having dual power supply voltages of ±15 Vdc with no change in
performance and no modification to the installation to accept the new MFM/MFC.

+ 4-20 mAdc Operation

4-20 mAdc current loop model is sinking current loop current flow.

+ Fast Response

Control circuitry significantly reduces “dead time” when ramping from no (i.e. zero) flow
conditions and improves MFC response time.

+ Absolute Zero (ABZ)

When the flow is detected to be less than 1.5% of of full scale, ABZ circuitry automatically
clamps the flow signal output to zero, eliminating flow signal zero drift.
Duringcalibration, the ABZ feature is disabled by means of a control input at the I/O
connector (refer to Section 7, Input/Output [I/O} Designations [Electrical Connections]
and I/O Electrical Specifications for details).

+ Internal Voltage Regulation and Temperature Compensation Circuits

Stabilizes flow signal output, flow signal accuracy and closed loop control during
transitional conditions, regardless of power supply and temperature fluctuations.

3

4

+ Attitude Insensitivity

MFM’s and MFC’s may be mounted in any position and are able to maintain tight
accuracy specifications with stable control.

+ Laminar Flow Element Package

Computer-determined for each specific application based on flow rate and the physical
properties of the process gas.

+ Valve Override (SIM-VO)

The automatic closed loop control may be temporarily defeated to force the control valve
fully open during system or process diagnostics.

2

SPECIFICATIONS

2.1 Specifications

Specifications for Series FMA-800A MFM’s and Series FMA-700A MFC’s

Response Time (per SEMI E17-91 Setting Time): 1 to 2 seconds

Accuracy and Linearity: +/-1% full scale (≤500 SLM N

2

).

+/-1.5% full scale (>500 SLM N

2

).

Repeatability: Within ±0.2% full scale at any constant

temperature within operating
temperature range.

INTRODUCTION

1

5

SPECIFICATIONS

2

2.1 Specifications (Con’t)

Specifications for Series FMA-800A MFM’s and Series FMA-700A MFC’s

Rangeability (Control Range): 50:1 (2% - 100% full scale)

(accuracy and control)

Ambient and Operating Temperature Range: -10 to 70°C (+ 14 to 158°F)

Temperature Coefficient (per SEMI E18-91 Zero
Effect and Span Effect): ± 0.05% full scale/°C of zero

± 0.05% of reading/°C of span

Pressure Coefficient (per SEMI E28-92 Total
Calibration Effect): ± 0.1% atmosphere typical using nitrogen (N

2

)

Setpoint Input / Flow Signal Output:

Setpoint Input Flow Signal Output

0-5 Vdc 0-5 Vdc (2K ohm

minimum load resistance

1-5 Vdc 4-20 mAdc (refer to load

resistance values **

Load resistance values for 4-20 mAdc flow
signal output:

0-450 ohms for 6.5 -15 Vdc loop supply
voltage
200 -750 ohms for 15-30 Vdc loop supply
voltage

Power Supply Requirements
(Current consumption <45 mAdc for MFM’s
250 mAdc for MFC’s:

Voltage output models:
+12 (±5%)
+15 (±10%) Vdc

Current loop models
+ 15 (±5%) or +24 (±15%) Vdc

Mounting Orientation: Attitude insensitive

Warm-up Time: 10 minutes

External Electrical Connector:
Nine (9) - pin D-connector

3

INSTALLATION AND OPERATING PROCEDURES

3.1 General Information

OMEGA’s Series FMA-800A MFM’s and Series FMA-700A MFC’s must be installed in a
clean, dry area with adequate space surrounding the MFM/MFC for ease of
maintenance. Ambient temperature should not exceed the specific operating range of -10

-70°C (14-158°F). The MFM's/MFC's are attitude insensitive, therefore, may be mounted
in any position. Users may specify factory calibration in the exact attitude of the
installation. Users must specify process gas, flow range, inlet pressure, outlet pressure
(for FMA-700A), operating temperature and calibration standard at the time of ordering.
When supplying a MFC, OMEGA Engineering will computer-calculate the appropriate
value orifice for the application based on the user-specified operating parameters.

3.2 Gas Connections

Each MFM/MFC has two (2) threaded process connection ports, one (1) located at each
end of the base block. One (1) serves as the gas inlet while the other is the gas outlet. For
compression fittings, make certain the tubing which mates to the fitting is correctly sized,
clean and is seated against the shoulder in the body of the compression fitting, prior to
tightening the connection. Tighten the fittings hex nut sufficiently to prevent leakage. For
face seal fittings, exercise caution so as not to damage the face seal sealing surfaces.
Whether using compression or face seal fittings , refer to the applicable fitting
manufacturer’s data for specific recommendations regarding installation and tightening.
Test joints for leaks. The inlet connection contains a 325 mesh (44 micron) filter
screenwhich prevents foreign matter from entering the instrument. Refer to System
Purging for additional recommendations.

6

INSTALLATION AND OPERATING PROCEDURES

3

7

3.3 System Purging

To eliminate contamination from foreign materials, start-up cleaning is highly
recommended prior to MFM/MFC installation. Start-up cleaning must remove weld
debris, tube scale and any loose particulate generated during system fabrication.

If corrosive gases or reactive gases are to be used. the complete gas handling system must
be purged to remove all air before introducing process gas into the system. Purging can
be accomplished with dry nitrogen or other suitable inert gases.

Also, if it becomes necessary to break any gas connection exposing the gas handling
system to air, all traces of corrosive or reactive gas must be purged from the system
before breaking the connection.

Never allowing a corrosive or reactive process to mix with air reduces the chance of
particulate or precipitate formation in the gas handling system.

3.4 External Electrical Connector - 9-Pin D - Connector

Please note the two (2) “common” references noted in the text. SIGNAL COMMON
(pin 4) is a zero current return reference for all functional circuit modules. POWER
COMMON/0 VDC (pin 8) is the separate return for the proportional control valve
operating current and all other circuit currents.

Figures 3-1 and 3-2 diagram the external electrical connections to be made to the FMA­800A MFM’s and FMA-700A MFC’s. A separate control valve common wire, connected to
POWER COMMON/0 VDC (pin 8) is illustrated and required. This connection keeps the
high current related to the control valve independent of the more sensitive, low level,
processing circuitry, thus avoiding potential noise problems and/or ground loops.

3.4 External Electrical Connector - 9-Pin D - Connector (Con’t)

For Models having a 0-5 Vdc Flow Sgnal Output, Figure 3-1 also illustrates the circuit
arrangement for a typical user-provided setpoint control. As an alternative OMEGA
offers the FMA-78P Series Interface Modules.

Refer to Section 7, Input/Output (I/O) Designations (Electrical Connections) & I/O
Electrical Specifications, for more details of the individual pin functions for the 9-pin D­connector. See Section 8, Current Loop Specification, for details on current loop operation.

❋ = No connection required

for Series FMA-800A MFM

SERIES FMA-800 MASS FLOWMETER

OR

SERIES FMA-700 MASS FLOW CONTROLLER

8

INSTALLATION AND OPERATING PROCEDURES

3

Figure 3-1 External Electrical Connections for

Series FMA-800A MFM’s and Series FMA-700A MFC’s

For Models having a 0-5 Vdc Flow Sgnal Output

9

INSTALLATION AND OPERATING PROCEDURES

3