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MULTI PARAMETER
GAS MASS FLOWMETERS
For Clean Gases
FMA6600 Series
Starts at
$
1195
Multi-Drop Capability
of Up to 256 Units
(for RS485 Option)
Stores Calibration Data
for Up to 10 Different
Gases
Supports 10 Different
Engineering Units
Including User Defined
Programmable 12-Digits
Totalizer Indicates Total
Gas Volume
Flow Alarm Limits for
High and Low Gas Flow
with Relay Output
Pressure Alarm
(FMA6700) Limits for
High and Low Gas
Pressure with
Relay Output
Temperature Alarm
(FMA6700) Limits for
High and Low Gas
Temperature with Relay
Output
Digital (RS232 or
RS485) and Analog
Outputs Operate
Simultaneously
Internal Conversion
Factors for Up to
32 Gases
Interface
All features of the FMA6600 and
FMA6700 Series flow meters can
be accessed via the local four
button keypad and LCD. The digital
interface operates via RS485
(optional RS232 available) and
provides access to applicable
internal data including: flow,
temperature, and pressure
readings, auto zero, totalizer and
alarms settings, gas table,
conversion factors and engineering
units selection, dynamic response
compensation and linearization
table adjustment.
The analog interface provides
0 to 5 Vdc, 0 to 10 Vdc or
4 to 20 mA outputs for flow,
pressure and temperature
(jumper selectable).
Auto Zero
The FMA6600 and FMA6700
Series supports automatic sensor
zero offset adjustment that can be
activated locally via keypad or
remotely via digital interface. The
auto zero feature requires
absolutely no flow through the
meter during auto zero process.
Provisions are made to either start,
stop or save the current auto zero
value via digital commands.
D-X
D
FMA6701, $1495,
shown actual size.
Totalizer
The total volume of the gas is
calculated by integrating the actual
gas flow rate with respect to time.
Both keypad menu and digital
interface commands are
provided to:
• Set the totalizer to ZERO
• Start the totalizer at a preset flow
• Assign action at a preset total
volume
• Start/stop totalizing the flow
• Read totalizer
Totalizer conditions become true,
when the totalizer reading and the
“Stop at Total” volumes are equal.
Flow Alarm
High and Low gas flow ALARM
limits can be preprogrammed via
keypad or remotely via digital
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interface. ALARM conditions become true when the
current flow reading is equal or higher/lower than
corresponding values of high and low alarm levels.
Alarm action can be assigned with preset delay
interval (0 to 3600 seconds) to activate the contact
closer (separate for High and Low alarm).
Pressure Alarm (FMA6700 Series)
High and Low gas pressure ALARM limits can be
preprogrammed via keypad or remotely via digital
interface. Pressure alarm conditions become true
when the current pressure reading is equal or higher
than corresponding values of high pressure alarm
settings or equal or lower than corresponding values
of low pressure alarm settings. Alarm action can be
assigned to activate the contact closer (separate for
High and Low pressure alarm).
Temperature Alarm (FMA6700 Series)
High and Low gas temperature ALARM limits can be
preprogrammed via keypad or remotely via digital
interface. Temperature alarm conditions become true
when the current temperature reading is equal or
higher than corresponding values of high temperature
alarm settings or equal or lower than corresponding
values of low temperature alarm settings. Alarm
action can be assigned to activate the contact closer
(separate for High and Low temperature alarm).
Engineering Units
The flow set points, measured gas flow and associated
totalizer data are scaled directly in engineering units
via the front panel keypad or digital interface.
The following units of measure are supported: %F.S.,
L/min, L/h, mL/min, mL/h, SCFH, SCFM, LbPH,
LbPM, User Defined EU.
Multi-Gas Calibration
The FMA6600 Series is capable of storing primary
calibration data for up to 10 gases. This feature allows
the same FMA6600 Series to be calibrated for multiple
gases while maintaining the rated accuracy on each.
Standard 10-Point NIST Calibration
Optional up to 9 additional 10-point calibration may be
ordered at an additional charge of $250 per gas.
Conversion Factors
Conversion factors for up to 32 gases are stored in the
FMA6600 and FMA 6700 Series. In addition the
provision is made for a user defined conversion factor.
Conversion factors may be applied to any of the ten gas
calibrations via keypad or digital interface commands.
Contact Closure
Two sets of dry contact relay outputs are provided to
actuate user supplied equipment. These are
programmable via local keypad or digital interface
such that the relays can be made to switch when a
specified event occurs (e.g. when a low or high flow,
pressure or temperature alarm limit is exceeded or
when the totalizer reaches a specified value).
Leak Integrity
1 x 10-9sccs of Helium maximum to the outside
environment.
Many fittings of various
materials and styles are
available. See pages T-36
to T-80 or visit omega.com
SPECIFICATIONS
Accuracy:
FMA6700: ±1% of FS including linearity [0 to 50°C and
0.35 to 6.8 bar (5 to 100 psia)]
FMA6600: ±1% of FS at calibration conditions [101 KPA
(14.7 psia) and 21.1°C (70°F)]
Pressure Range: 0 to 6.8 bar (100 psig) (measurement)
Pressure Accuracy: ±1% of FS
Temperature Range: 0 to 50°C (measurement)
Temperature: ±1°C accuracy
Repeatability: ±0.15% of full scale
Response Time: Units up to 10 LPM @ 1 second, units
greater than 10 LPM @ 2 seconds to within
±2% of setpoint over 25 to 100% of full scale
Temp. Coefficient: 0.15% of full scale/°C or better.
Pressure Coefficient: 0.01% of full scale/psi
(0.07 bar) or better
Max Gas Pressure: 6.8 bar (100 psig)
Max Burst Pressure: 13.6 bar (200 psig)
Max Pressure Drop: 8 psi (at 100 L/min flow)
Gas & Ambient Temp: 5 to 50°C (41 to 122°F)
Output Signals: Linear 0 to 5 Vdc (3000 ⍀ min load
impedance); 0 to 10 Vdc (6000 ⍀ min impedance);
4 to 20 mA optional (500 ⍀ max loop resistance).
Maximum noise 20 mV peak to peak.
Input Power: May be configured for three different options:
±15Vdc (±200 mA maximum); +12Vdc (300 mA maximum)
optional; +24Vdc (250 mA maximum) optional; Circuit
boards have built-in polarity reversal protection. Resettable
fuses provide power input protection.
Materials in Fluid Contact: 316 stainless steel, FKM
O-rings. EPDM or Perfluoroelastomer O-rings optional
Connections:
Models >= 15 LPM: Standard
Models 20 to 50 LPM: Standard
Models 60 to 100 LPM: Standard
Display: 128 x 64 graphic LCD with backlight
(up to 8 lines of text)
Calibration: Standard one 10 points NIST calibration.
Optional up to 9 additional calibrations may be ordered for
an additional charge of $250 per gas.
CE Compliance: EN 55011 class 1, class B; EN50082-1
Environmental (per IEC 664): Installation Level II;
Pollution Degree II
Approximate Shipping Weights:
Models up to 15 SLPM: 1.68 kg (3.7 lb)
Models from 20 to 100 LPM: 1.97 kg (4.34 lb)
1
⁄4" compression fittings
1
⁄4" compression fittings
3
⁄8" compression fittings
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Dimensions:
mm (in)
Dimensions:
mm (in)
MOST POPULAR MODELS HIGHLIGHTED!
To Order (Specify Model Number)
Flow Meter Flow/Pressure/Temp Compression
Model No. Price Model No. Price Max Flow (N2) Fitting
FMA6601 $1195 FMA6701 $1495 10 cc/min SCCM
FMA6602 1195 FMA6702 1495 20 cc/min SCCM
FMA6603 1195 FMA6703 1495 50 cc/min SCCM
FMA6604 1195 FMA6704 1495 100 cc/min SCCM
FMA6605 1195 FMA6705 1495 200 cc/min SCCM
FMA6606 1195 FMA6706 1495 500 cc/min SCCM
FMA6607 1195 FMA6707 1495 1 LPM
FMA6608 1195 FMA6708 1495 2 LPM
FMA6609 1195 FMA6709 1495 5 LPM
FMA6610 1195 FMA6710 1495 10 LPM
FMA6611 1295 FMA6711 1595 15 LPM
FMA6612 1295 FMA6712 1595 20 LPM
FMA6613 1295 FMA6713 1595 30 LPM
FMA6614 1295 FMA6714 1595 40 LPM
FMA6615 1295 FMA6715 1595 50 LPM
FMA6616 1395 FMA6716 1695 60 LPM
FMA6617 1395 FMA6717 1695 80 LPM
FMA6618 1395 FMA6718 1695 100 LPM
1
⁄4"
1
⁄4"
1
⁄4"
1
⁄4"
1
⁄4"
1
⁄4"
1
⁄4"
1
⁄4"
1
⁄4"
1
⁄4"
1
⁄4"
1
⁄4"
1
⁄4"
1
⁄4"
1
⁄4"
3
⁄8"
3
⁄8"
3
⁄8"
D
Options
Ordering Add’l
Suffix Cost Description
-I N/C 4 to 20 mA output (replaces
standard 0 to 5V)
-12V $50 12 Vdc power
-24V 100 24 Vdc power
-K 364 Perfluoroelastomer O-rings
-B N/C Buna O-Rings
-E N/C EPR O-Rings
-VCR 100 VCR fittings
-RS232 N/C RS232 communications
(replaces RS485)
-O2CLEAN 125 Cleaned for Oxygen use
Comes complete with operator’s manual, software, cable (FMA65-C)
and NIST traceable certificate for Nitrogen.
Power supply sold separately.
Note: Computer must be running Windows XP in order to work with
supplied software.
Note: Flow rates are stated for Nitrogen at STP conditions
[21.1°C (70°F) at 1 atm].
Accessories
Model No. Price Description
FMA66-PW $214 115 Vac to ±15 Vdc
power supply
FMA66-12PW 60 115 Vac to 12 Vdc
power supply
FMA66-24PW 60 115 Vac to 24 Vdc
power supply
FMA66-230EU 214 230 Vac to ±15 Vdc
power supply
FMA66-12PW-230EU 70 230 Vac to12 Vdc
power supply
FMA66-24PW-230EU 70 230 Vac to 24 Vdc
power supply
FMA65-C 57 Replacement cable 25 pin
D-conn with 1.8 m (6') wire
branch to power supply
Ordering Examples: FMA6609,
max, and FMA66-PW, power supply, $1195 + 214 = $1409.
FMA6618,
power supply, $1395 + 214 = $1609.
3
⁄8" compression fitting, 100 LPM max, and FMA66-PW,
1
⁄4" compression fitting, 5 LPM
Recommended Reference Book: Fundamentals of
Gas Dynamics, ME-1851, $130. See Section Y
For Additional Books
D-X
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