GAS MASS FLOW CONTROLLERS
With RS485 Standard and Alarm Functions
For Clean Gases
FMA6500ST Series
Starts at
$
1495
Standard
⻬ Digital and Analog
Modes Operate
Simultaneously
⻬ Programmable Flow
Configurations
⻬ RS485 Standard,
Multi-Drop Capability
of Up to 256 units
⻬ Stores Calibration Data
for Up to 10 Gases
⻬ Totalizer Indicates
Total Gas Quantity
⻬ Alarm Limits for High
and Low Gas Flow
⻬ Conversion Factors
for Up to 256 Gases
⻬ Autotune Function
for Optimum
Control Response
⻬ Self Diagnostic Tests
FMA6502ST, $1495,
shown smaller than
actual size.
Microprocessor driven digital flow
controllers allow one to program,
record, and analyze flow rates of
various gases with a computer via
an RS485 interface (optional
RS232 is available).
Controllers can be programmed for
various control functions including,
flow setpoint, totalizer, stop
totalizer, read totalizer, totalizer
from preset flow, stop at preset
total, auto zero, and more.
Principles of Operation
Metered gases are divided into two
laminar flow paths, one through the
primary flow conduit, and the other
through a capillary sensor tube.
Both flow conduits are designed to
ensure laminar flow, therefore, the
ratio of their flow rates remains
constant. Two precision temperature
sensing windings on the sensor
tube are heated, and when flow
takes place, gas carries heat from
the upstream to the downstream
windings. The resultant temperature
differential is proportional to the
change in resistance of the sensor
windings.
A Wheatstone bridge design is used
to monitor the temperature
dependent resistance gradient on
the sensor windings which is linearly
proportional to the instantaneous
rate of flow. The output of the
Wheatstone bridge is converted to
digital format with a 12-Bit Adc
(analog to digital converter).
An on-board microprocessor and
nonvolatile memory store all
calibration factors and directly
control a proportional
electromagnetic valve. The digital
closed loop control system
D-XX
continuously compares the mass
flow output with the selected flow
rate. Deviations from the setpoint
are corrected by compensating valve
adjustments, with PID algorithm,
thus maintaining the desired flow
parameters with a high degree of
accuracy. Output signals of
0 to 5 Vdc or 4 to 20 mA are
generated indicating mass molecular
based flow rates of the metered gas.
Interface
The digital interface operates
via RS485 (optional RS232) and
provides access to applicable
internal data including: flow
setpoint, actual flow, zero
adjustments, and linearization table
adjustments. The analog interface
provides 0 to 5 Vdc, 0 to 10 Vdc
and 4 to 20 mA inputs and outputs.
Auto Zero
The FMA6500ST automatically nulls
the sensor zero offset whenever the
flow setpoint is below 2% FS. To
accommodate this feature the control
valve must fully close under that
condition. Provisions are made to
either disable, force, or store the
current auto zero via digital
commands.
Totalizer
The firmware for the FMA6500ST
provides functions to register total gas
quantity. The total mass of gas is
calculated by integrating the actual
gas flow rate with respect to time.
Digital interface commands are
provided to: set the totalizer to zero,
start/stop totalizing the flow, read the
totalizer, start the totalizer at a
preset flow, and stop the flow at a
preset total.
Multi-Gas Calibration Option
The FMA6500ST is capable of
storing primary calibration data for
up to 10 gases. This feature allows
the same FMA6500ST to be calibrated
for multiple gases while maintaining
the rated accuracy on each.
Standard 10-Point NIST Calibration
Optional up to 9 additional 10-point
calibration may be ordered at an
additional charge of $250 per gas.
Conversion Factors
Conversion factors for up to 256 gases
are stored in the FMA6500ST.
Conversion factors may be applied
to any of the ten gas calibrations via
digital interface commands.
Flow Alarms
High and Low gas flow ALARM limits
are programmed using the digital
interface. Alarm conditions are
reported via the digital interface or
can activate the contact closure
outputs.
Programmable Flow
OMEGA
®
software supports
programmable flow modes, allowing
execution of custom programming
of up to ten steps. Various flow
configurations include ramping,
linearized increasing, and
decreasing modes.
Autotune
The autotune function allows the
FMA6500ST to automatically
optimize control response for the
gas under actual process conditions.
During the autotune process, the
instrument adjusts PID gains for
optimum step response and
determine key control valve
characteristics (only available on
units with less than 80 L/min
maximum flow).
Contact Closure
Two sets of dry contact relay
outputs are provided to actuate
user supplied equipment. These are
programmable via the digital interface
such that the relays can be made to
switch when a specified event occurs
(e.g. when a low or high flow alarm
limit is exceeded or when the totalizer
reaches a specified value).
Valve Override
Means are provided to force the
control valve fully open (purge) or
fully closed via either the analog or
digital interfaces.
Self Diagnostics
Whenever power is first applied,
the FMA6500ST runs a series
of self diagnostic tests to
ensure that it is in optimum
working condition.
Engineering Units
The flow setpoint, measured gas
flow and associated totalizer data
is scaled directly in engineering
units via digital interface
commands. The following units of
measure are supported: % of FS,
mL/min, mL/hr, scfm, scfh, sL/min,
sL/hr, lbs/hr, lbs/min, and one user
defined unit of measure.
Leak Integrity
1 x 10-9smL/sec of helium maximum
to the outside environment.
Balanced Power Supply
The FMA6500ST operates on
±15 Vdc. The current requirements
for the positive and negative power
supplies are balanced such that the
current in the power supply
common connection is minimized.
Maximum power consumption is
13.5 watts at ±15 Vdc.
SPECIFICATIONS
Accuracy (including linearity):
15 to 25°C (59 to 77°F) and 0.7 to 4 bar
(10 to 60 psia): ±1% of FS, 0 to 50°C
(32 to 122°F) and 0.3 to 10 bar (5 to
150 psia): ±2% of FS, ±1% of FS at a
specific temperature and pressure
with special calibration
Repeatability: ±0.15% FS
Turndown Ratio: 50:1
Response Time: 0.6 to 1.0 s to within
±2% of setpoint over 20% to 100% FS
Temperature Coefficient:
0.05% of full scale/°C or better
D-XX
FMA6502ST,
$1495, shown
smaller than
actual size.
Pressure Coefficient: 0.01% FS/psi
(0.07 bar) or better
Leak Integrity:
-9
1 x 10
the outside environment
Optimum Gas Pressure:
1.73 bar (25 psig)
Max Gas Pressure: 34.5 bar (500 psig)
Max Diff. Pressure: 3.4 bar (50 psig)
for up to 10 LPM, 2.8 bar (40 psig) for
15 LPM and greater
Gas and Ambient Temp:
5 to 50°C (41 to 122°F)
Output Signals: Linear 0 to 5 Vdc
(2000 Ω min load impedance);
0 to 10 Vdc (4000 Ω min impedance);
4 to 20 mA optional (0 to 500 Ω loop
resistance)
Communication Interface:
RS485, standard; RS232, optional
Transducer Input Power:
±15 Vdc, 450 mA maximum
Wetted Parts: 316 stainless steel,
416 stainless steel, FKM O-rings
Neoprene or Perfluoroelastomer
O-rings optional
Connections: Standard
compression fittings up to 30 LPM
models; for 60 LPM models and
greater:
Circuit Protection:
Circuit boards have built-in polarity
reversal protection; resettable fuses
provide power input protection
Calibration Options:
Standard 10-point NIST calibration
optional up to 9 additional 10-point
calibrations may be ordered for an
additional charge of $250 per gas
smL/sec Helium maximum to
1
⁄4"
3
⁄8" compression fittings
D
FMA6500
Power
Supply
25 Pins
1.8 (6)
Computer
Communication
3
3
25 Pins
1.8 (6)
FMA6500
Command
Module
Proc
Computer
Communication
15 Pins
3
FMA6500
Analog Setpoint
Analog Output
Purge
Close
Relay
Other See Manual
25 Pins
1.8 (6)
Transformer
Computer
Communication
Power
110/230/240 V
9
3
3
FMA6500
Computer
Communication
Power
110/230/240 V
3
3
Tr an s f or m e r
1.8 (6)
25 Pins
25-Pin
D-Connector Male
12.7 (0.50)
12.7 (0.50)
38.1 (1.50)
157.1 (6.19)
82.6 (3.25)
133.8 (5.27)
6-32-2B
17.5 (0.69)
74.3 (2.93)
4.0 (0.16)
FLOW
25-Pin
D-Connector Male
167.0 (6.58)
15.9 (0.63)
47.6 (1.88)
15.9 (0.63)
92.1 (3.63)
143.5 (5.65)
*149.1 (5.87)
6-32-2B
17.5 (0.69)
10.3 (0.41)
68.3 (2.69)
* For High-Flow
Mass Flow Controllers
FMA6500ST Controller Dimensions 15 LPM and Greater FMA6500ST Controller Dimensions Up to 10 LPM
Dimensions: mm (in) Dimensions: mm (in)
Standard Cable (Supplied with FMA6500ST) FMA65-C
FMA65-C15
FMA65PWA
FPW-D15 power supply, $95,
sold separately.
Dimensions: m (ft)
Dimensions: m (ft)
Dimensions: m (ft)
FMA65PWC
D-XX
Dimensions: m (ft)
MOST POPULAR MODELS HIGHLIGHTED!
To Order
(Specify Model Number)
Model No. Price Max Flowrate** Compression Fitting Max. Pressure Drop (psid)
FMA6502ST $1495 10 SCCM
FMA6504ST 1495 20 SCCM
FMA6506ST 1495 50 SCCM
FMA6508ST 1495 100 SCCM
FMA6510ST 1495 200 SCCM
FMA6512ST 1495 500 SCCM
FMA6514ST 1495 1 SLM
FMA6516ST 1495 2 SLM
FMA6518ST 1495 5 SLM
FMA6520ST 1495 10 SLM
FMA6523ST 1595 15 SLM
FMA6524ST 1595 20 SLM
FMA6526ST 1595 30 SLM
FMA6528ST 1595 50 SLM
FMA6540ST 1695 60 SLM
FMA6541ST 1695 80 SLM
FMA6542ST 1695 100 SLM
1
⁄4" 1.06
1
⁄4" 1.06
1
⁄4" 1.06
1
⁄4" 1.06
1
⁄4" 1.06
1
⁄4" 1.06
1
⁄4" 1.06
1
⁄4" 1.06
1
⁄4" 1.06
1
⁄4" 3.87
1
⁄4" 2.00
1
⁄4" 3.50
1
⁄4" 8.00
1
⁄4" 8.00
3
⁄8" 18.9
3
⁄8" 18.9
3
⁄8" 18.9
Accessories
Model No. Price Description
FMA65-C $57 Replacement cable 25 pin D-conn with 1.8 m (6') wire,
FMA65PWC 214 Power supply with 25 pin female D-conn 110 Vac
FMA65PWA 250
FMA65EPWC 275 European power supply with 25 pin female D-conn
FMA65UKPWC 214 UK power supply with 25 pin female D-conn 230 Vac
FMA65-C15 75 25 pin D-conn with 1.8 m (6') wire to 15 pin DM, branch
FMA65-CAL-(*) 250 10-point NIST calibration per gas; specify up to 9 gases
Comes complete with operator’s manual, software, cable (FMA65-C), and NIST certificate.
Power supply sold separately.
Specify gas or gases and inlet/outlet pressure. Calibrations done at ambient [20ºC (70ºF)]
*
temperature only.
Flow ranges specified are for nitrogen or air at 20 psig inlet (up to 50 SLM) or 25 psig inlet
**
(60 to 100 SLM units) and 0 psig outlet, see ordering chart.
For RS232 communications (replaces RS485), add suffix “-RS232” to model number, no
additional charge.
For 4 to 20 mA output (replaces 0 to 5V), add suffix “-I” to model number, no additional charge.
For Perfluoroelastomer O-rings (replaces FKM O-rings), add suffix “-K”
to model number and $364 to price.
Ordering Examples: FMA6512ST, mass flow controller, and FMA65PWC power supply,
$1495 + 214 = $1709.
FMA6542ST, mass flow controller, and FMA65PWC power supply, $1695 + 214 = $1909.
branch to power supply
(±15 Vdc) branch 1.8 m (6') wire to computer port, stripped
Power supply with 25 pin female D-conn 110 Vac
(±15 Vdc) branch 1.8 m (6') wire to analog interface
230 Vac (±15 Vdc) branch 1.8 m (6') wire to computer
port, stripped
(±15 Vdc) branch 1.8 m (6') wire to computer port,
stripped
1.8 m (6'), wire to computer port, stripped
(specify primary gas on FMA6500, inlet/outlet, and
Per
temperature)
Gas
D
FMA6502ST, $1495,
shown smaller
than actual size.
D-XX
Recommended Reference Book:
Fundamentals of Gas Dynamics,
ME-1851, $140.
See Section Y for Additional Books.
One Omega Drive | Stamford, CT 06907 | 1-888-TC-OMEGA (1-888-826-6342) | info@omega.com
EPG05
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