Omega Products FMA6500 Installation Manual

User’s Guide

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FMA6500

Mass Flow Controller

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TABLE OF CONTENTS

1. UNPACKING THE FMA6500 SERIES MASS FLOW CONTROLLER..........

1.1 Inspect Package for External Damage..............................................

1.2 Unpack the Mass Flow Controller.......................................................

1.3 Returning Merchandise for Repair.....................................................

2. INSTALLATION....................................................................

2.1 Primary Gas Connections.................................................................

2.2 Electrical Connections......................................................................

2.3 Communication Parameters and Connections................................

3. PRINCIPLE OF OPERATION..................................................

4. SPECIFICATIONS..................................................................

4.1 FMA6500 Mass Flow Controllers.....................................................

4.2 CE Compliance................................................................................

5. OPERATING INSTRUCTIONS.....................................................

5.1 Preparation and Warm Up................................................................

5.2 Flow Signal Output Readings..............................................................

5.3 Swamping Condition...........................................................................

5.4 Set Point Reference Signal .............................................................

5.5 Valve OFF Control ..........................................................................

5.6 Valve Open/Purge ............................................................................

5.7 Analog Interface Configuration...........................................................

11
11
11
11
12
12
12
13

1
1
1
1

1
1
2
2

6

6
7
8

6. MAINTENANCE...................................................................3

6.1 Introduction........................................................................................

6.2 Flow Path Cleaning..............................................................................

6.2.1 Restrictor Flow Element (RFE).................................................

6.2.2 FMA6500 up to 10 L/min models.................................................

6.2.3 FMA6500 15 L/min and greater models.....................................

6.2.4 Valve Maintenance ...................................................................

7. CALIBRATION PROCEDURES....................................................

7.1 Flow Calibration...................................................................................

7.2 Calibration of FMA6500 Mass Flow Controllers.................................

8. TROUBLESHOOTING.............................................................

8.1 Common Conditions...........................................................................

8.2 Technical Assistance............................................................................

8.3 Troubleshooting Guide....................................................................

9. CALIBRATION CONVERSIONS FROM REFERENCE GASES................

13
13
14
14
14
14
15

15
15
16

17
17
17
18

20

APPENDIX 1 COMPONENT DIAGRAM......................................................

21

APPENDIX 2 GAS FACTOR TABLE ("K" FACTORS).....................................

APPENDIX 3 DIMENSIONAL DRAWINGS..................................................

APPENDIX 4 SENDING COMMANDS TO THE FMA6500...............................

APPENDIX 5 EEPROM TABLES: GAS DEPENDENT VARIABLES....................

GAS INDEPENDENT VARIABLES...............

APPENDIX 6 WARRANTY...........................................................................

25

29

31

37

39

42

TRADEMARKS

Omega®-is a registered trademark of OMEGA ENGINEERING, INC.

®

Buna

-is a registered trademark of DuPont Dow Elastometers.

®

-is a registered trademark of DuPont Dow Elastomers.

Kalrez

®

-is a registered trademark of DuPont.

Neoprene

1. UNPACKING THE MASS FLOW CONTROLLER

1.1 Inspect Package for External Damage

Your FMA6500 Mass Flow Controller was carefully packed in a sturdy cardboard
carton, with anti-static cushioning materials to withstand shipping shock. Upon
receipt, inspect the package for possible external damage. In case of external
damage to the package contact the shipping company immediately.

1.2 Unpack the Mass Flow Controller

Open the carton carefully from the top and inspect for any sign of concealed ship­ping damage. In addition to contacting the shipping carrier please forward a copy
of any damage report to Omega7 directly.

When unpacking the instrument please make sure that you hav e all the items indi­cated on the Packing List.Please report any shortages promptly.

1.3 Returning Merchandise for Repair

Please contact an OMEGA7 customer service representative and request a

Return Authorization Number (AR).

It is mandatory that any equipment returned for servicing be purged and neutral­ized of any dangerous contents including but not limited to toxic, bacterially infec­tious, corrosive or radioactive substances.

2. INSTALLATION

2.1 Primary Gas Connections

Please note that the FMA6500 Mass Flow Controller will not operate with liquids.
Only clean gases are allowed to be introduced into the instrument. If gases are
contaminated they must be filtered to prev ent the introduction of impediments into
the sensor.

Caution: FMA6500 transducers should not be used for monitoring



Attitude sensitivity of the Mass Flow Controller is
path of the Flow Controller must be horizontal within those stated limits. Should
there be need for a different orientation of the meter, re-calibration may be neces­sary.It is also preferable to install the FMA6500 tr ansducer in a stable environment,
free of frequent and sudden temperature changes, high moisture, and drafts.

Prior to connecting gas lines inspect all parts of the piping system including fer­rules and fittings for dust or other contaminants.

OXYGEN gas unless specifically cleaned and prepared for such
application. For more information, contact Omega7.

+

15F.This means that the gas flow

1

Be sure to observe the direction of gas flow as indicated by the arrow on the front
of the meter when connecting the gas system to be monitored.

Insert tubing into the compression fittings until the ends of the properly sized tub­ings home flush against the shoulders of the fittings. Compression fittings are to
be tightened according to the manufacturer's instructions to one and one quarter
turns. Avoid over tightening which will seriously damage the Restrictor Flow
Elements (RFE's)!

FMA6500 transducers are supplied with standard 1/4 inch (FMA6500 up to 10
L/min) or 3/8 inch (FMA6500 15 L/min and greater), or optional 1/8 inch inlet and
outlet compression fittings which should not be removed unless the meter is being
cleaned or calibrated for a new flow range.

Using a Helium Leak Detector or other equivalent method perform a thorough
leak test of the entire system.
leakage within stated limits. See specifications in this manual.)

2.2 Electrical Connections

FMA6500 transducers require a +15VDC and -15VDC power supply to operate.
Additionally, a readout panel meter, digital multimeter, or other equivalent device
is required to observe the flow signal in analog mode. A variable analog 0-5VDC
reference input is required for FMA6500 models to operate in analog mode.

FMA6500 is supplied with a 25 pin "D" connector. Pin diagram is presented in fig­ure b-2.

(All FMA6500's are checked prior to shipment for

2.3 Communication Parameters and Connections

Baud rate: 9600 baud Stop bit: 1
Data bits: 8 Parity: NON

RS-232 option: Crossover connection has to be established:

Pin 11 (TX) of the “D” connector has to be connected to RX
(pin 2 on the DB9 connector).
Pin 24 (RX) of the “D” connector has to be connected to TX
(pin 3 on the DB9 connector).
Pin 20 (Common) of the “D” connector has to be connected
to GND (pin 5 on the DB9 connector).

RS-485 option:

The RS485 converter/adapter has to be configured for: multidrop, 2 wire, half duplex
mode. The transmitter circuit has to be enabled by TD or RTS (depending on which
is available on the converter/adapter). Settings for the receiver circuit usually should
follow the selection made for the transmitter circuit in order to eliminate Echo.

Pin 11 (-) of the “D” connector has to be connected to
T- or R- on the RS-485 converter/adapter.
Pin 24 (+) of the “D” connector has to be connected to

2

T+ or R+ on the RS-485 converter/adapter.
Pin 20 (Common) of the “D” connector has to be connected
to GND on the RS-485 converter/adapter.

3

FIGURE b-1, WIRING DIAGRAM FOR FMA6500 TRANSDUCERS.

4

PIN FUNCTION

1 +15 VDC Power Supply
2 0-5 VDC Flow Signal (4-20mA Option)
3 0-5 VDC Set Point Input (4-20mA Option)
4 Force Valve Open Control
5 Force Valve Closed Control
6 (Reserved)
7 (Reserved)
8 Relay No. 1 - Common Contact
9 Relay No. 1 - Normally Open Contact
10 Relay No.2 - Nor mally Closed Contact
11 RS485 (-) (Optional RS232 TX)
12 (No Connection)
13 Chassis Ground
14 -15 VDC Power Supply
15 Common, Signal Ground For Pin 2
16 Common, Signal Ground For Pin 3
17 (Optional) RS232 Common
18 Common, Power Supply
19 Common
20 Common
21 Relay No.1 - Nor mally Closed Contact
22 Relay No.2 - Common Contact
23 Relay No.2 - Nor mally Open Contact
24 RS485 (+) (Optional RS232 RX)
25 Return for Pin 2 (Optional 4-20 mA Only)

FIGURE b-2, FMA6500 25 PIN "D" CONNECTOR CONFIGURATION

Important notes:



In general, "D" Connector numbering patterns are standardized.There are, how­ever , some connectors with nonconf orming patterns and the numbering sequence
on your mating connector may or may not coincide with the numbering sequence
shown in our pin configuration table above. It is imperative that you match the
appropriate wires in accordance with the correct sequence regardless of the par­ticular numbers displayed on your mating connector.

Make sure power is OFF when connecting or disconnecting any cab les in the system.
The (+) and (-) power inputs are each protected by a 500mA M (medium time-lag)

resettable fuse. If a shorting condition or polarity reversal occurs , the fuse will cut
power to the flow transducer circuit. Disconnect the power to the unit, remove the
faulty condition, and reconnect the power. The fuse will reset once the faulty con­dition has been removed.

Cable length may not exceed 9.5 feet (3 meters).

5

Use of the FMA6500 flow transducer in a manner other than that specified in this
manual or in writing from Omega7, may impair the protection provided by the

equipment.

3. PRINCIPLE OF OPERATION

The stream of gas entering the Mass Flow transducer is split by shunting a small
portion of the flow through a capillary stainless steel sensor tube. The remainder
of the gas flows through the primary flow conduit. The geometry of the primary
conduit and the sensor tube are designed to ensure laminar flow in each branch.
According to principles of fluid dynamics the flow rates of a gas in the two lami­nar flow conduits are proportional to one another.Therefore, the flow rates meas­ured in the sensor tube are directly proportional to the total flow through the trans­ducer.

In order to sense the flow in the sensor tube, heat flux is introduced at two sec­tions of the sensor tube by means of precision wound heater sensor coils.Heat is
transferred through the thin wall of the sensor tube to the gas flowing inside. As
gas flow takes place heat is carried by the gas stream from the upstream coil to
the downstream coil windings. The resultant temperature dependent resistance
differential is detected by the electronic control circuit.The measured gradient at
the sensor windings is linearly proportional to the instantaneous rate of flow tak­ing place.

An output signal is generated that is a function of the amount of heat carried by
the gases to indicate mass molecular based flow rates.

Additionally, FMA6500 model Mass Flow Controllers incor porate a microproces­sor and non-volatile memory that stores all calibration factors and directly controls
a proportionating solenoid valve. The digital closed loop control system of the
FMA6500 continuously compares the mass flow output with the selected flow rate.
Deviations from the set point are corrected by compensating valve adjustments,
thus maintaining the desired flow parameters with a high degree of accuracy.

4. SPECIFICATIONS

FLOW MEDIUM: Please note that FMA6500 Mass Flow Controllers

are designed to work with clean gases only. Never try
to meter or control flow rates of liquids with
any FMA6500.

CALIBRATIONS: Performed at standard conditions [14.7 psia

(1.01 bars) and 70

F

F (21.1FC)] unless otherwise

requested or stated.

ENVIRONMENTAL (PER IEC 664):

Installation Level II;Pollution Degree II.

6

4.1 FMA6500 Series Mass Flow Controllers

ACCURACY: +

F

59

F to 77FF (15FC to 25FC) and pressures of 10 to 60 psia (0.7 to 4.1 bars).

REPEATABILITY: +

TEMPERATURE COEFFICIENT: 0.1% of full scale/

1% of full scale, including linearity for gas temperatures ranging from

0.15% of full scale.

F

C.

PRESSURE COEFFICIENT: 0.01% of full scale/psi (0.07 bar).
RESPONSE TIME: FMA6500 up to 10 L/min: 300ms time constant; approximately

1 second to within +

2% of set flow rate for 25% to 100% of full

scale flow.
FMA6500 15 L/min and greater: 600ms time constant;

approximately 2 seconds to within +

2% of set flow rate for 25% to

100% of full scale flow.

GAS PRESSURE: 500 psig (34.5 bars) maximum; optimum pressure is 20 psig (1.4
bars); 25 psig (1.7 bars gauge) for FMA6500 80 L/min and greater.

DIFFERENTIAL PRESSURES REQUIRED: 5 to 50 psig (0.35 to 3.34 bars) differential
pressures. Optimum differential pressure is 25 psid (1.7 bars). See Table IV for
pressure drops associated with various models and flow rates.

MAXIMUM PRESSURE DIFFERENTIAL: 50 psid for FMA6500 up to 60 L/min, 40
psid for FMA6500 80 L/min and greater.

F

GAS AND AMBIENT TEMPERATURE: 41

F to 122FF (5FC to 50FC).

RELATIVE GAS HUMIDITY: Up to 70%.
LEAK INTEGRITY: 1 x 10

-9

sccs He maximum to the outside environment.

ATTITUDE SENSITIVITY: 1% shift for a 90 degree rotation from horizontal to verti­cal; standard calibration is in horizontal position.

OUTPUT SIGNALS: Linear 0-5 VDC (2000 Ω minimum load impedance); 4-20 mA
optional (50-500 Ω loop resistance); 20 mV peak to peak max noise.

Contact Omega7 for optional RS232 or IEEE488 interfaces.

COMMAND SIGNAL: 0-5 VDC (200K Ω input impedance); 4-20 mA optional.
TRANSDUCER INPUT POWER: FMA6500 - +15 +5% VDC, 450 mA max, 6.75 watts

max; -15 +

5% VDC, 450 mA max; 6.75 watts max;

Power inputs are each protected by a 500mA M (medium time-lag) resettable
fuse, and an inverse shunt rectifier diode for polarity protection.

7

WETTED MATERIALS: 316 stainless steel, 416 stainless steel, VITON7 O-rings;
BUNA-N7, NEOPRENE7 or KALREZ7 O-rings are optional.

Omega7 makes no expressed or implied guarantees of corrosion resistance of
mass flow meters as pertains to different flow media reacting with components of
meters. It is the customers' sole responsibility to select the model suitable for a
particular gas based on the fluid contacting (wetted) materials offered in the dif­ferent models.

INLET AND OUTLET CONNECTIONS: 1/4" (FMA6500 up to 50 L/min) or 3/8"
(FMA6500 60 L/min and greater) compression fittings standard; 1/8" or 3/8" com­pression fittings and 1/4" VCR7 fittings are optional.

TRANSDUCER INTERFACE CABLE: Flat cable with 25-pin "D" connectors on the
ends is standard.Optional shielded cable is availab le with male/female 25-pin "D"
connector ends. [Cable length may not exceed 9.5 feet (3 meters)]

4.2 CE Compliance

Any model FMA6500 bearing a CE marking on it, is in compliance with the
below stated test standards currently accepted.

EMC Compliance with 89/336/EEC as amended;
Emission Standard: EN 55011:1991, Group 1, Class A
Immunity Standard: EN 55082-1:1992

8

FLOW RANGES

TABLE I FMA6500 LOW FLOW MASS FLOW CONTROLLERS*

CODE scc/min [N2]

02

04 0 to 20

06 0 to 50

08

10 0 to 200

0 to 10 12 0 to 500

0 to 100 18

CODE

14

16

20

std liters/min [N

TABLE II FMA6500 MEDIUM FLOW MASS FLOW CONTROLLERS*

CODE standard liters/min [N2]

23 15

24 20

26 30

28 50

TABLE III FMA6500 HIGH FLOW MASS FLOW CONTROLLERS*

0 to 1

0 to 2

0 to 5

0 to 10

]

2

CODE standard liters/min [N2]

40 60

41 80

42 100

* Flow rates are stated for Nitrogen at STP conditions [i.e. 70FF (21.1FC) at 1 atm].

For other gases use the K factor as a multiplier from APPENDIX 2.

9

TABLE IV PRESSURE DROPS

FLOW RATE

[std liters/min]

up to 10 720 1.06 75

15 2630 3.87 266
20 1360 2.00 138
30 2380 3.50 241
40 3740 5.50 379
50 5440 8.00 551
60 7480 11.00 758

100 12850 18.89 1302

[mm H2O]

MAXIMUM PRESSURE DROP

[psid] [mbar]

TABLE V APPROXIMATE WEIGHTS

MODEL WEIGHT

FMA6500 up to 10 L/min transmitter 2.20 lbs (1.00 kg) 3.70 lbs (1.68 kg)

FMA6500 15 L/min and greater transmitter 2.84 lbs (1.29 kg) 4.34 lbs (1.97 kg)

SHIPPING WEIGHT

10

5. OPERATING INSTRUCTIONS

5.1 Preparation and Warm Up

It is assumed that the Mass Flow Controller or Controller has been correctly
installed and thoroughly leak tested as described in section (2). Make sure the
flow source is OFF. Power up the transducer using your own power supply (or
switch the POWER switch to the ON position at the front panel of your Process
Controller). Allow the Mass Flow Meter or Controller to warm-up for a minimum of
15 minutes.

During initial powering of the FMA6500 transducer, the flow output signal will be indi­cating a higher than usual output. This is indication that the FMA6500 transducer has
not yet attained it's minimum operating temperature. This condition will automatical­ly cancel within a few minutes and the transducer should eventually zero.

Caution: If the valve is left in the AUTO (control) or OPEN mode for an
extended period of time, it may become warm or even hot to the touch.



Use care in avoiding direct contact with the valve during operation.

5.2 Flow Signal Output Readings

The flow signal output can be viewed on the panel meter, digital multimeter, or
other display device used as shown in figure b-1.

Analog output flow signals of 0 to 5 VDC or optional 4 to 20 mA are attained at
the appropriate pins the 25-pin "D" connector (see Figure b-2) on the side of the
FMA6500 transducer.

Meter signal output is linearly proportional to the mass molecular flow rate of the
gas being metered. The full scale range and gas for which your meter has been
calibrated are shown on the flow transducer's front label.

For information on the RS485 or optional RS232 interfaces please contact
Omega7.

5.3 Swamping Condition

If a flow of more than 10% above the maximum flow rate of the Mass Flow
Controller is taking place, a condition known as "sw amping" may occur. Readings
of a "swamped" meter cannot be assumed to be either accurate or linear. Flow
must be restored to below 110% of maximum meter range. Once flow rates are
lowered to within calibrated range, the swamping condition will end. Operation of
the meter above 110% of maximum calibrated flow may increase recovery time.

11

5.4 Set Point Reference Signal

FMA6500 flow controllers have a built-in solenoid valve and allow the user to set
the flow to any desired flow rate within the range of the particular model installed.
This valve is normally closed when no power is applied.

The set point input in analog mode responds to an analog 0 to 5 VDC reference
voltage or 4-20mA reference current.This voltage is a linear representation of 0
to 100% of the full scale mass flow rate.Response time to set point changes are
1 second to within 2% of the final flow over 25 to 100% of full scale.

A variable 0 to 5VDC analog signal may be applied directly to the SET POINT and
COMMON connections of the FMA6500 transducer (see Figure b-1).

If a potentiometer is used to adjust the set point reference signal its value should
be between 5K to 100K ohm and it should be capable of at least 10-turns or more
for adjustment.

5.5 Valve OFF Control

It may, at times, be desirable to set the flow and maintain that setting while being
able to turn the flow control valve off and on again.This can be accomplished via
pin 5 on the 25-pin "D" connector.When 0 VDC (LO W) signal is applied (connection
via a relay, switch or NPN open collector transistor is permissible), the solenoid
valve is not powered and therefore will remain normally closed. Conversely, when
the pin is disconnected from 0 VDC ("floating”) the solenoid v alv e will remain activ e .

The simplest means for utilizing the VALVE OFF control feature, is to connect a
toggle switch between the COMMON and FORCE VALVE CLOSED pins of the
FMA6500 transducer.Toggling the switch on and off will allow for activating and
deactivating the solenoid valve.

5.6 Valve Open /Purge

At times, it may be necessary to purge the flow system with a neutralizing gas
such as pure dry nitrogen.The FMA6500 transducer is capable of a full open con­dition for the solenoid valve, regardless of set point conditions. Connecting the
FORCE VALVE OPEN pin (pin 4 on 25-pin "D" connector) to g round will fully open
the valve. This connection can be made with a relay, switch or NPN open collec­tor transistor.Conversely, when the pin is disconnected from 0 VDC ("floating”) the
solenoid valve will remain active. (Note: in digital mode hardware I/O overrides
software command)

The simplest means for utilizing the VAL VE OPEN control f eature , is to connect a tog­gle switch between the COMMON and FORCE VALVE OPEN pins of the FMA6500
transducer.Toggling the s witch on will cause the valv e to open fully and purge the sys­tem. Toggling the switch off will allow the solenoid valve to resume normal activity.

Caution: If the valve is left in the AUTO (control) or OPEN mode for an
extended period of time, it may become warm or even hot to the touch.



Use care in avoiding direct contact with the valve during operation.

12

5.7 Analog Interface Configuration

The FMA6500 can be configured for the desired range and scaling by selection
of analog board (see APPENDIX 1 on page 21) jumpers as follows:

0 to 5 V output: Jumper pins 2 and 3 of JP6.

Jumper pins 2 and 3 of JP3.
Jumper pins 2 and 3 of JP5.
Jumper pins 1 and 2 of JP12.

0 to 5 V input: Jumper pins 2 and 3 of JP2.

Jumper pins 2 and 3 of JP4.
Jumper pins 1 and 2 of JP11.

0 to 10 V output: As for 0 to 5V, but jumper pins 2 and 3 of JP12.
4 to 20 mA output: Jumper pins 1 and 2 of JP6.

Jumper pins 1 and 2 of JP3.
Jumper pins 1 and 2 of JP5.
Jumper pins 1 and 2 of JP12.

4 to 20 mA input: Jumper pins 1 and 2 of JP2.

Jumper pins 1 and 2 of JP4.
Jumper pins 1 and 2 of JP11.

By default the FMA6500 is configured for analog input output ranges set to 0-5V
(unless ordered with special configuration).

6. MAINTENANCE

6.1 Introduction

It is important that the Mass Flow Controller is used with clean, filtered gases only .
Liquids may not be metered. Since the RTD sensor consists, in part, of a small
capillary stainless steel tube, it is prone to occlusion due to impediments or gas
crystallization. Other flow passages are also easily obstructed. Therefore, great
care must be exercised to avoid the introduction of any potential flow impediment.
To protect the instrument a 50 micron (FMA6500 up to 10 L/min) or 60 micron
(FMA6500 15 L/min and greater) filter is built into the inlet of the flow transducer.
The filter screen and the flow paths may require occasional cleaning as described
below.There is no other recommended maintenance required. It is good practice,
however, to keep the meter away from vibration, hot or corrosive environments
and excessive RF or magnetic interference.

If periodic calibrations are required they should be performed by qualified per­sonnel and calibrating instruments, as described in section (7). It is recommend­ed that units are returned to Omega7 for repair service and calibration.

CAUTION: TO PROTECT SERVICING PERSONNEL IT IS MANDATO­RY THAT ANY INSTRUMENT BEING SERVICED IS COMPLETELY



PURGED AND NEUTRALIZED OF TOXIC, BACTERIOLOGICALLY
INFECTED, CORROSIVE OR RADIOACTIVE CONTENTS.

13

6.2 Flow Path Cleaning

Before attempting any disassembly of the unit for cleaning, try inspecting the flow
paths by looking into the inlet and outlet ends of the meter for any debris that ma y
be clogging the flow through the meter. Remove debris as necessary. If the flow
path is not unclogged, then proceed with steps below.

Do not attempt to disassemble the sensor. If blockage of the sensor tube is not
alleviated by flushing through with cleaning fluids, please return meter to Omega7

for servicing.

6.2.1 Restrictor Flow Element (RFE)

The Restrictor Flow Element (RFE) is a precision flow divider inside the trans­ducer, which splits the inlet gas flow by a preset amount to the sensor and main
flow paths.The par ticular RFE used in a given Mass Flow Controller depends on
the gas and flow range of the instrument.

6.2.2 FMA6500 up to 10 L/min models

Unscrew the inlet compression fitting of meter.Note that the Restr ictor Flow
Element (RFE) is connected to the inlet fitting.

Carefully disassemble the RFE from the inlet connection. The 50 micron filter
screen will now become visible.Push the screen out through the inlet fitting.Clean
or replace each of the removed parts as necessary. If alcohol is used for clean­ing, allow time for drying.

Inspect the flow path inside the transducer for any visible signs of contaminants.
If necessary, flush the flow path through with alcohol. Thoroughly dry the flow
paths by flowing clean dry gas through.

Carefully re-install the RFE and inlet fitting, avoiding any twisting and deforming
the RFE. Be sure that no dust has collected on the O-ring seal.

Note: Overtightening will deform and render the RFE defective.



It is advisable that at least one calibration point be checked after re installing the
inlet fitting - see section (7).

6.2.3 FMA6500 15 L/min and greater

Unscrew the four socket head cap screws (two 10-24 and two 6-32) at the inlet
side of the meter.This will release the short square block containing the inlet com­pression fitting.

The 60 micron filter screen will now become visible.Remove the screen. DO NOT
remove the RFE inside the flow transducer! Clean or replace each of the remo v ed
parts as necessary. If alcohol is used for cleaning, allow time for drying.

14

Inspect the flow path inside the transducer for any visible signs of contaminants.
If necessary, flush the flow path through with alcohol. Thoroughly dry the flow
paths by flowing clean dry gas through.

Re-install the inlet parts and filter screen. Be sure that no dust has collected on
the O-ring seal.

It is advisable that at least one calibration point be checked after re installing the
inlet fitting - see section (7).

6.2.4 Valve Maintenance (FMA6500)

The solenoid valve consists of 316 and 416 stainless steel, and VITON7 (or
optional NEOPRENE7 or KALREZ7) O-rings and seals. No regular maintenance
is required except for periodic cleaning.

Various corrosive gases may demand more frequent replacement of VITON7
O- rings and seals inside the valve.Be sure to use an elastomer material, appro­priate for your specific gas application.

Set the FMA6500 into PURGE mode, and attempt to flush through with a clean,
filtered, and neutral gas such as nitrogen. [Another option for fully opening the
valve is to remov e the plastic cap on top of the v alv e , and turn the set screw coun­terclockwise until it stops. Set valve for the closed position. Apply an inlet pres­sure of 5 psig and atmospheric pressure at the outlet. If a small flow occurs, turn
the set screw on top of the solenoid valve clockwise until the flow through the
FMA6500 just stops.

Note: Removal of the factory installed calibration seals and/or any
adjustments made to the meter, as described in this section, will void



any calibration warranty applicable.

7. CALIBRATION PROCEDURES

7.1 Flow Calibration

Omega7 Engineering' Flow Calibration Laboratory offers professional calibration
support for Mass Flow meterss and Controllers, using precision calibrators under
strictly controlled conditions. NIST traceable calibrations are available.
Calibrations can also be performed at customers' site using available standards.

Factory calibrations are performed using NIST traceable precision volumetric cal­ibrators incorporating liquid sealed frictionless actuators.

Generally, calibrations are performed using dr y nitrogen gas. The calibration can
then be corrected to the appropriate gas desired based on relative correction [K]
factors shown in the gas f actor table see Appendix 2.A reference gas, other than
nitrogen, may be used to closer approximate the flow characteristics of certain
gases. This practice is recommended when a reference gas is found with ther­modynamic properties similar to the actual gas under consideration. The appro-

15

priate relative correction factor should be recalculated see section (9). It is stan­dard practice to calibrate Mass Flow meters/Controllers with dry nitrogen gas at

F

F (21.1EC), 20 psig (1.4 bars) [25 psig (1.7 bars) for FMA6540, 41] inlet pres-

70
sure and 0 psig (0 bar) outlet pressure. It is best to calibrate the FMA6500 trans­ducers to actual operating conditions. Specific gas calibrations of non-toxic and

non-corrosive gases are available at specific conditions. Please contact Omega7
for a price quotation.

It is recommended that a flow calibrator of at least four times better collectiv e accu­racy than that of the Mass Flow Controller to be calibrated be used. Equipment
required for calibration includes a flow calibration standard and a certified high
sensitivity multimeter (which together have a collective accuracy of +

0.25% or bet­ter), an insulated (plastic) screwdriver, a flow regulator (example:metering needle
valve) installed upstream from the Mass Flow Controller and a pressure regulated
source of dry filtered nitrogen gas (or other suitable reference gas).

The gas and ambient temperature, as well as inlet and outlet pressure conditions
should be set up in accordance with actual operating conditions.

7.2 Calibration of FMA6500 Mass Flow Controllers

All adjustments to the FMA6500 calibration and control loop tuning are accom­plished using the RS485 (or optional RS232) interface in conjunction with setup
and calibration software available from Omega7. The sensor zero is automatical­ly adjusted internally whenever the control valv e is fully closed (set point less than
2% of full scale) and the unit is warmed up.

FMA6500 Mass Flow meters may be field recalibrated/checked using the setup
and calibration program for the same range they were originally factory calibrated
for. Flow range changes may require a different Restrictor Flow Element (RFE).
Additionally, a different Solenoid Valve Orifice for the FMA6500 Mass Flow
Controller (see Table VI) may also be required. Consult Omega7 for more informa­tion.

TABLE VI FMA6500 SOLENOID VALVE ORIFICE SELECTION TABLE

ORIFICE PART NUMBER

FLOW RATE [N2]

OR.010 Under 10 sccm

OR.020 10 to 1000 sccm

OR.040 1 to 5 slpm

OR.055 5 to 10 slpm

OR.063 10 to 15 slpm

OR.073 15 to 20 slpm

OR.094 20 to 50 slpm

OR.125 50 to 100 slpm

16

8. TROUBLESHOOTING

8.1 Common Conditions

Your Mass Flow Controller was thoroughly checked at numerous quality control
points during and after manufacturing and assembly operations.It was calibrat­ed in accordance to your desired flow and pressure conditions for a given gas or
a mixture of gases.

It was carefully packed to prevent damage during shipment. Should you feel that
the instrument is not functioning properly please check for the following common
conditions first:

Are all cables connected correctly?
Are there any leaks in the installation?
Is the power supply correctly selected according to requirements? When several

meters are used a power supply with appropriate current rating should be selected.
Were the connector pinouts matched properly? When interchanging with other

manufacturers' equipment, cables and connectors must be carefully wired for cor­rect pin configurations.

Is the pressure differential across the instrument sufficient?
For best results it is recommended that instruments are returned to the factory

for servicing. See section 1.3 for return procedures.

8.2 Technical Assistance

OMEGA7 Engineer ing will provide technical assistance over the phone to quali­fied repair personnel. Please call our Flow Department at 800-872-9436 Ext.

2298.

17

8.3 Troubleshooting Guide

Indication

lack of
reading
or output

output reads
at (+) or (-)
saturation
only

flow reading
does not
coincide with
the set point
(FMA6500
models only)

Likely Reason

power supply off

fuse blown
(FMA6500)

filter screen obstructed at inlet

occluded sensor tube

pc board defect

valve adjustment wrong

fuse blown
(FMA6500)

inadequate gas pressure

filter screen obstructed at inlet

ground loop

Remedy

check connection of power supply

disconnect FMA6500 transducer from
power supply; remove the shorting
condition or check polarities;
fuse resets automatically

REMOVE CAUSE OF SHORT CIRCUIT!

flush clean or disassemble to remove
impediments or replace

flush clean or disassemble to remove
impediments or return to factory for
replacement

return to factory for replacement

re-adjust valve (section 6.2.4)

disconnect FMA6500 transducer from
power supply; remove the shorting
condition or check polarities; fuse
resets automatically

REMOVE CAUSE OF SHORT CIRCUIT!

apply appropriate gas pressure

flush clean or disassemble to remove
impediments or replace

signal and power supply commons are
different

no response
to set point
(FMA6500
models only)

unstable or no
zero reading

inadequate gas pressure

cable or connector
malfunction

set point is too low
(<2% of full scale)

valve adjustment wrong

gas leak

pc board defective

apply appropriate gas pressure

check cables and all connections or
replace

re-adjust set point

re-adjust valve (section 6.2.4)

locate and correct

return to factory for replacement

18

Indication

full scale
output at
"no flow"
condition or
with valve
closed

Likely Reason

defective sensor

gas Leak

Remedy

return to factory for replacement

locate and repair

calibration off

FMA6500
valve does not
work in open
position

gas metered is not the same
as what meter was calibrated
for

composition of gas changed

gas leak

pc board defective

RFE dirty

occluded sensor tube

filter screen obstructed at inlet

transducer is not mounted
properly

incorrect valve adjustment

pc board defect

cable or connectors
malfunction

use matched calibration

see K factor tables in APPENDIX 2

locate and correct

return to factory for replacement

flush clean or disassemble to remove
impediments

flush clean or disassemble to remove
impediments or return to factory for
replacement

flush clean or disassemble to remove
impediments or replace

check for any tilt or change in the
mounting of the transducer; generally,
units are calibrated for horizontal
installation (relative to the sensor tube)

re-adjust valve (section 6.2.4)

return to factory for replacement

check cable and connectors or replace

FMA6500
valve does not
work in close
position

differential pressure too high

insufficient inlet pressure

incorrect valve adjustment

pc board defect

cable or connectors
malfunction

orifice obstructed

19

decrease pressure to correct level

adjust appropriately

re-adjust valve (section 6.2.4)

return to factory for replacement

check cable and connectors or replace

disassemble to remove impediments
or return to factory

9. CALIBRATION CONVERSIONS FROM REFERENCE
GASES

The calibration conversion incorporates the K factor. The K factor is derived from
gas density and coefficient of specific heat. For diatomic gases:

gas

d X C

p

1

=

K

where d = gas density (gram/liter)
C

= coefficient of specific heat (cal/gram)

p

Note in the above relationship that d and Cp are usually chosen at standard con­ditions of one atmosphere and 25

F

C.

If the flow range of a Mass Flow Controller or Controller remains unchanged, a
relative K factor is used to relate the calibration of the actual gas to the reference
gas.

Q

a

=

K

Q

r

K

a

=

K

r

where Qa= mass flow rate of an actual gas (sccm)
Q

r

K

a

K

r

= mass flow rate of a reference gas (sccm)
= K factor of an actual gas
= K factor of a reference gas

For example, if we want to know the flow rate of oxygen and wish to calibrate
with nitrogen at 1000 SCCM, the flow rate of oxygen is:

Q

= Q

= Q

O

a

2

x K = 1000 X 0.9926 = 992.6 sccm

r

where K = relative K factor to reference gas (oxygen to nitrogen)

20

APPENDIX 1

COMPONENTS DIAGRAMS

FMA6500 DIGITAL PC BOARD

(Primary Side)

21

APPENDIX 1

(CONTINUED)

FMA6500 DIGITAL PC BOARD

(SECONDARY SIDE)

22

APPENDIX 1

(CONTINUED)

FMA6500 ANALOG PC BOARD

(Primary Side)

23

APPENDIX 1

(CONTINUED)

FMA6500 ANALOG PC BOARD

(SECONDARY SIDE)

24

APPENDIX 2

GAS FACTOR TABLE (“K” FACTORS)

ACTUAL GAS

Acetylene C

2H2

Air
Allene (Propadiene) C
Ammonia NH

3H4

3

Argon Ar
Arsine AsH
Boron Trichloride BCl
Boron Trifluoride BF
Bromine Br
Boron Tribromide Br
Bromine Pentaflouride BrF
Bromine Trifluoride BrF

3

3

3

2

3

5

3

Bromotrifluoromethane (Freon-13 B1) CBrF
1,3-Butadiene C4H
Butane C4H
1-Butane C4H

6

10

8

2-Butane C4H8 CIS
2-Butane C
Carbon Dioxide CO
Carbon Disulfide CS
Carbon Monoxide C
Carbon Tetrachloride CCl
Carbon Tetrafluoride (Freon-14)CF
Carbonyl Fluoride COF

4H8

TRANS

2

2

O

4

4

2

Carbonyl Sulfide COS
Chlorine Cl
Chlorine Trifluoride ClF

2

3

Chlorodifluoromethane (Freon-22)CHClF
Chloroform CHCl

3

Chloropentafluoroethane(Freon-115)C2ClF
Chlorotrifluromethane (Freon-13) CClF
CyanogenC2N

2

3

CyanogenChloride CICN
Cyclopropane C
Deuterium D
Diborane B2H

3H5

2

6

3

2

5

K FACTOR

Relative to N

.5829

1.0000
.4346
.7310

1.4573
.6735
.4089
.5082
.8083
.38
.26
.3855
.3697
.3224
.2631
.2994
.324
.291
.7382
.6026

1.00
.31
.42
.5428
.6606
.86
.4016
.4589
.3912
.2418
.3834
.61
.6130
.4584

1.00
.4357

Cp

[Cal/g]

2

.4036
.240
.352
.492
.1244
.1167
.1279
.1778
.0539
.0647
.1369
.1161
.1113
.3514
.4007
.3648
.336
.374
.2016
.1428
.2488
.1655
.1654
.1710
.1651
.114
.1650
.1544
.1309
.164
.153
.2613
.1739
.3177

1.722
.508

Density

[g/I]

1.162

1.293

1.787
.760

1.782

3.478

5.227

3.025

7.130

11.18

7.803

6.108

6.644

2.413

2.593

2.503

2.503

2.503

1.964

3.397

1.250

6.860

3.926

2.945

2.680

3.163

4.125

3.858

5.326

6.892

4.660

2.322

2.742

1.877

1.799

1.235

25

ACTUAL GAS

K Factor

Relative to N

Cp

[Cal/g]

2

Density

[g/I]

Dibromodifluoromethane CBr

2F2

Dichlorodifluoromethane (Freon-12) CCl2F
Dichlofluoromethane (Freon-21) CHCl2F
Dichloromethylsilane (CH
Dichlorosilane SiH2Cl

SiCl

3)2

2

2

Dichlorotetrafluoroethane (Freon-114) C2Cl2F
1,1-Difluoroethylene (Freon-1132A) C2H2F
Dimethylamine (CH3)2NH
Dimethyl Ether (CH
2,2-Dimethylpropane C
Ethane C2H

6

3)2

O

3H12

Ethanol C2H6O
Ethyl Acetylene C

4H6

Ethyl Chloride C2H5Cl
Ethylene C

2H4

Ethylene Oxide C2H4O
Fluorine F
Fluoroform (Freon-23) CHF

2

3

Freon-11 CCl3F
Freon-12 CCl
Freon-13 CClF
Freon-13B1 CBrF
Freon-14 CF

2F2

3

3

4

Freon-21 CHCl2F
Freon-22 CHClF
Freon-113 CCl2FCClF
Freon-114 C2Cl2F
Freon-115 C2ClF
Freon-C318 C4F
Germane GeH
Germanium Tetrachloride GeCl

2

2

4

5

8

4

4

Helium He
Hexafluoroethane C
Hexane C
Hydrogen H

6H14

2

(Freon-116)

2F6

Hydrogen Bromide HBr
Hydrogen Chloride HCl
Hydrogen Cyanide HCN

.1947

2

.3538
.4252
.2522
.4044
.2235

4

.4271

2

.3714
.3896
.2170
.50
.3918
.3225
.3891
.60
.5191
.9784
.4967
.3287
.3538
.3834
.3697
.4210
.4252
.4589
.2031
.2240
.2418
.1760
.5696
.2668

1.454
.2421
.1792

1.0106

1.000

1.000

1.070

.15
.1432
.140
.1882
.150
.1604
.224
.366
.3414
.3914
.420
.3395
.3513
.244
.365
.268
.1873
.176
.1357
.1432
.153
.1113
.1654
.140
.1544
.161
.160
.164
.185
.1404
.1071

1.241
.1834
.3968

3.419
.0861
.1912
.3171

9.362

5.395

4.592

5.758

4.506

7.626

2.857

2.011

2.055

3.219

1.342

2.055

2.413

2.879

1.251

1.965

1.695

3.127

6.129

5.395

4.660

6.644

3.926

4.592

3.858

8.360

7.626

6.892

8.397

3.418

9.565
.1786

6.157

3.845
.0899

3.610

1.627

1.206

26

Actual Gas

Hydrogen Fluoride HF
Hydrogen Iodide HI
Hydrogen Selenide H
Hydrogen Sulfide H
Iodine Pentafluoride IF
Isobutane CH(CH3)
Isobutylene C4H

Se

2

S

2

5

3

6

Krypton Kr
Methane CH
Methanol CH
Methyl Acetylene C3H

4

3

4

Methyl Bromide CH2Br
Methyl Chloride CH
Methyl Fluoride CH
Methyl Mercaptan CH
Methyl Trichlorosilane (CH
Molybdenum Hexafluoride MoF
Monoethylamine C2H5NH
Monomethylamine CH3NH

Cl

3

F

3

SH

3

)SiCl

3

3

6

2

2

Neon NE
Nitric Oxide NO
Nitrogen N
Nitrogen Dioxide NO
Nitrogen Trifluoride NF

2

2

3

Nitrosyl Chloride NOCl
Nitrous Oxide N

O

2

Octafluorocyclobutane (Freon-C318) C
Oxygen O
Oxygen Difluoride OF

2

2

Ozone
Pentaborane B
Pentane C5H

5H9

12

Perchloryl Fluoride ClO3F
Perfluoropropane C
Phosgene COCl
Phosphine PH
Phosphorous Oxychloride POCl
Phosphorous Pentafluoride PH

3F8

2

3

3

5

4F8

K Factor

Relative to N

.9998
.9987

.7893

.80

.2492

.27
.2951

1.453
.7175
.5843
.4313
.5835
.6299
.68
.5180
.2499
.2126
.3512
.51

1.46
.990

1.000
.737
.4802
.6134
.7128
.176
.9926
.6337
.446
.2554
.2134
.3950
.174
.4438

1.070
.36
.3021

Cp

[Cal/g]

2

.3479
.0545

.1025

.2397
.1108
.3872
.3701
.0593
.5328
.3274
.3547
.1106
.1926
.3221
.2459
.164
.1373
.387
.4343
.246
.2328
.2485
.1933
.1797
.1632
.2088
.185
.2193
.1917
.195
.38
.398
.1514
.197
.1394
.2374
.1324
.1610

Density

[g/I]

.893

5.707

3.613

1.520

9.90

3.593

2.503

3.739
.715

1.429

1.787

4.236

2.253

1.518

2.146

6.669

9.366

2.011

1.386
.900

1.339

1.25

2.052

3.168

2.920

1.964

8.397

1.427

2.406

2.144

2.816

3.219

4.571

8.388

4.418

1.517

6.843

5.620

27

Actual Gas

Phosphorous Trichloride PCl
Propane C3H
Propylene C3H
Silane SiH

8

6

4

Silicon Tetrachloride SiCl
Silicon Tetrafluoride SiF
Sulfur Dioxide SO

2

Sulfur Hexafluoride SF
Sulfuryl Fluoride SO2F

3

4

4

6

2

Tetrafluoroethane (Forane 134A) CF3CH2F
Tetrafluorohydrazine N

2F4

Trichlorofluoromethane (Freon-11) CCl3F
Trichlorosilane SiHCl

3

1,1,2-Trichloro-1,2,2 Trifluoroethane
(Freon-113) CCl

FCClF

2

2

Triisobutyl Aluminum (C4H9)AL
Titanium Tetrachloride TiCl
Trichloro Ethylene C2HCl

4

3

Trimethylamine (CH3)3N
Tungsten Hexafluoride WF
Uranium Hexafluoride UF

6

6

Vinyl Bromide CH2CHBr
Vinyl Chloride CH

CHCl

2

Xenon Xe

K Factor

Relative to N

.30
.35
.40
.5982
.284
.3482
.69
.2635
.3883
.5096
.3237
.3287
.3278

.2031

.0608
.2691
.32
.2792
.2541
.1961
.4616
.48

1.44

Cp

[Cal/g]

2

.1250
.399
.366
.3189
.1270
.1691
.1488
.1592
.1543
.127
.182
.1357
.1380

.161

.508
.120
.163
.3710
.0810
.0888
.1241
.12054
.0378

Density

[g/I]

6.127

1.967

1.877

1.433

7.580

4.643

2.858

6.516

4.562

4.224

4.64

6.129

6.043

8.36

8.848

8.465

5.95

2.639

13.28

15.70

4.772

2.788

5.858

28

APPENDIX 3

DIMENSIONAL DRAWINGS

FMA6500 UP TO 10 L/MIN MASS FLOW CONTROLLER

NOTES: Omega7 reserves the right to change designs and dimensions at its
sole discretion at any time without notice. For certified dimensions please con-

tact Omega7.

29

FMA6500 15 L/MIN AND GREATER MASS FLOW CONTROLLER

NOTES: Omega7 reserves the right to change designs and dimensions at its
sole discretion at any time without notice. For certified dimensions please con-

tact Omega7.

30

APPENDIX 4

SENDING COMMANDS TO THE FMA6500

RS485

The standard FMA6500 comes with an RS485 interface. The protocol described below
allows for the unit using either a custom software program or a “dumb terminal”.
All values are sent as printable ASCII characters. The start character is always !and
the command string is terminated with a carriage return (line feeds are
automatically stripped out by the FMA6500:

!<Addr>, <Cmd>,Arg1,Arg2,Arg3,Arg4<CR>

WHERE:

! Start character

Addr RS485 device address in the ASCII representation of

hexadecimal (00 through FF are valid).**

Cmd The one or two character command from the table above.

Arg1 to Arg4 The command arguments from the table above.

Multiple arguments are comma delimited.

CR Carriage return character.

** Default address for all units is 11.

Several examples of commands follow. All assume that the FMA6500 has been configured
for address 15 (0F hex) on the RS485 bus:

1. To put the unit in digital mode: !0F,M,D<CR>
The FMA6500 will reply: !0FMD<CR>

2. To set the flow of 50% of FS: !0F,S,50.0<CR>
The FMA6500 will reply: !0FS50.0<CR>

3. To get a flow reading: !0F,F<CR>
The FMA6500 will reply: !0F50.0<CR>

(Assuming the flow is at 50% FS)

4. Set the high alarm limit to 5% above Set point: !0F,A,H,5.0<CR>
The FMA6500 will reply: !0FA5.0<CR>

31
32

333435

36

APPENDIX 5

CALIBRATION TABLE: GAS DEPENDENT VARIABLES

INDEX

0 BlankEEPROM char[10] Do not modify. For internal use only.

1 SerialNumber char[20]

2 ModelNumber char[20]

3 SoftwareVer char[10]

4 TimeSinceCalHr float Time since last calibration in hours.

5 Options uint Misc. Options.

6 AOutOffset_mA int

7 AddressRS485 char[3] Two character address for RS485 only.

8 AInScaleV float

9 AInOffsetV float

10 AInScale_mA float

11 AInOffset_mA float

12 AoutScaleV float

13 AoutScale_mA float

14 SensorZero uint

15 Klag[0] float

16 Klag[1] float

17 Klag[2] float

18 Klag[3] float

19 Klag[4] float

20 Klag[5] float

21 Reserved float

22 Reserved float

23 Reserved float

24 Reserved float

25 Reserved float

26 Reserved float

27 Kgain[0] float

28 Kgain[1] float

NAME

DATA
TYPE

NOTES

37

INDEX NAME

29 Kgain[2] float

30 Kgain[3] float

31 Kgain[4] float

32 Kgain[5] float

33 Reserved float

34 Reserved float

35 Reserved float

36 Reserved float

37 Reserved float

38 Reserved float

39 ValveTbl[0][open] float Index 0: Valve actuation. Must be 0.0.- Do Not Alter

40 ValveTbl[0][valve value] uint Index 0: Valve: D/A value - Do Not Alter

41 ValveTbl[1][flow] float Index 1: Actual valve opening in % FS. Do Not Alter

42 ValveTbl[1][valve value] uint Index 1: Valve D/A counts corresponding to flow. Do Not Alter

43 ValveTbl[2][flow] float Do Not Alter

44 ValveTbl[2][valve value] uint Do Not Alter

45 ValveTbl[3][flow] float Do Not Alter

46 ValveTbl[3][valve value] uint Do Not Alter

47 ValveTbl[4][flow] float Do Not Alter

48 ValveTbl[4][valve value] uint Do Not Alter

49 ValveTbl[5][flow] float Do Not Alter

50 ValveTbl[5][valve value] uint Do Not Alter

51 ValveTbl[6][flow] float Do Not Alter

52 ValveTbl[6][valve value] uint Do Not Alter

53 ValveTbl[7][flow] float Do Not Alter

54 ValveTbl[7][valve value] uint Do Not Alter

55 ValveTbl[8][flow] float Do Not Alter

56 ValveTbl[8][valve value] uint Do Not Alter

57 ValveTbl[9][flow] float Index 9: Valve fully open. Must be 1.0- Do Not Alter

58 ValveTbl[9][valve value] uint Index 9: D/A count for a fully open valve. Must be 4095.- Do Not Alter

59 AutoTune Time Constant uint Do Not Alter

DATA
TYPE

NOTES

38

CALIBRATION TABLE: GAS INDEPENDENT VARIABLES

INDEX NAME

100 GasIdentifer char[27]

101 FullScaleRange float

102 StdTemp float

103 StdPressure float

104 StdDensity float

105 CalibrationGas char[27]

106 CalibratedBy char[20]

107 CalibratedAt char[20]

108 DateCalibrated char[10]

109 DateCalibrationDue char[10]

110 PID_Kp float

111 PID_Ki float

112 PID_Kd float

113 SensorTbl[0][Sensor Value] uint Index 0: Must be 120 (zero value)

114 SensorTbl[0][Flow] float Index 0: Must be 0.0 (zero PFS)

115 SensorTbl[1][Sensor Value] uint A/D value from sensor.

DATA
TYPE

NOTES

116 SensorTbl[1][Flow] float Actual Flow in PFS.

117 SensorTbl[2][Sensor Value] uint

118 SensorTbl[2][Flow] float

119 SensorTbl[3][Sensor Value] uint

120 SensorTbl[3][Flow] float

121 SensorTbl[4][Sensor Value] uint

122 SensorTbl[4][Flow] float

123 SensorTbl[5][Sensor Value] uint

124 SensorTbl[5][Flow] float

125 SensorTbl[6][Sensor Value] uint

126 SensorTbl[6][Flow] float

127 SensorTbl[7][Sensor Value] unit

128 SensorTbl[7][Flow] float

39

INDEX NAME

129 SensorTbl[8][Sensor Value] uint

130 SensorTbl[8][Flow] float

131 SensorTbl[9][Sensor Value] uint

132 SensorTbl[9][Flow] float

133 SensorTbl[10][Sensor Value] uint

134 SensorTbl[10][Flow] float Flow in PFS. Should be 1.0

135

136

137

DATA
TYPE

Note:Values will be available for selected gas only.

NOTES

40

NOTES:

41

WARRANTY/DISCLAIMER

OMEGA ENGINEERING, INC.warrants this unit to be free of defects in materials and workmanship for a
period of 13 months from date of purchase. OMEGA’s Warranty adds an additional one (1) month grace
period to the normal one (1) year product warranty to cover handling and shipping time. This ensures
that OMEGA’s customers receive maximum coverage on each product.

If the unit malfunctions, it must be returned to the factory for evaluation. OMEGA’s Customer Service
Department will issue an Authorized Return (AR) number immediately upon phone or written request.
Upon examination by OMEGA, if the unit is found to be defective, it will be repaired or replaced at no
charge. OMEGA’s WARRANTY does not apply to defects resulting from any action of the purchaser,
including but not limited to mishandling, improper interfacing, operation outside of design limits, improp­er repair, or unauthorized modification. This WARRANTY is VOID if the unit shows evidence of having
been tampered with or shows evidence of having been damaged as a result of excessive corrosion; or
current, heat, moisture or vibration;improper specification; misapplication; misuse or other operating con­ditions outside of OMEGA’s control.Components which wear are not warranted, including but not limited
to contact points, fuses, and triacs.

OMEGA is pleased to offer suggestions on the use of its various products. However, OMEGA nei­ther assumes responsibility for any omissions or errors nor assumes liability for any damages
that result from the use of its products in accordance with information pr o vided b y OMEGA,either
verbal or written. OMEGA warrants only that the parts manufactured by it will be as specified and
free of defects. OMEGA MAKES NO OTHER WARRANTIES OR REPRESENTATIONS OF ANY KIND
WHATSOEVER,EXPRESS OR IMPLIED,EXCEPT THAT OF TITLE,AND ALL IMPLIED W ARRANTIES
INCLUDING ANY WARRANTY OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PUR­POSE ARE HEREBY DISCLAIMED.LIMITATION OF LIABILITY:The remedies of purchaser set forth
herein are exclusive, and the total liability of OMEGA with respect to this order, whether based on
contract, warranty, negligence, indemnification, strict liability or otherwise , shall not exceed the
purchase price of the component upon which liability is based.In no event shall OMEGA be liable
for consequential, incidental or special damages.

CONDITIONS: Equipment sold by OMEGA is not intended to be used, nor shall it be used: (1) as a

“Basic Component” under 10 CFR 21 (NRC), used in or with any nuclear installation or activity; or (2) in
medical applications or used on humans. Should any Product(s) be used in or with any nuclear
installation or activity, medical application, used on humans, or misused in any way, OMEGA assumes
no responsibility as set forth in our basic WARRANTY/ DISCLAIMER language, and, additionally,
purchaser will indemnify OMEGA and hold OMEGA harmless from any liability or damage whatsoever
arising out of the use of the Product(s) in such a manner.

RETURN REQUESTS/INQUIRIES

Direct all warranty and repair requests/inquiries to the OMEGA Customer Service Department.
BEFORE RETURNING ANY PRODUCT(S) TO OMEGA, PURCHASER MUST OBTAIN AN
AUTHORIZED RETURN (AR) NUMBER FROM OMEGA’S CUSTOMER SERVICE DEPARTMENT (IN
ORDER TO AVOID PROCESSING DELAYS). The assigned AR number should then be marked on the
outside of the return package and on any correspondence.

The purchaser is responsible for shipping charges, freight, insurance and proper packaging to prevent
breakage in transit.

ARRANTY RETURNS, please have the

FOR W
following information available BEFORE
contacting OMEGA:

1. Purchase Order number under which
the product was PURCHASED,

2. Model and serial number of the product
under warranty, and

3. Repair instructions and/or specific
problems relative to the product.

OMEGA’s policy is to make running changes, not model changes, whenever an improvement is possible.
This affords our customers the latest in technology and engineering.

OMEGA is a registered trademark of OMEGA ENGINEERING, INC.
© Copyright 2001 OMEGA ENGINEERING, INC. All rights reserved. This document may not be copied, photo-

copied, reproduced, translated, or reduced to any electronic medium or machine-readable form, in whole or in part,
without the prior written consent of OMEGA ENGINEERING, INC.

FOR NON-WARRANTY REPAIRS,
for current repair charges.Have the following
information available BEFORE contacting OMEGA:

1. Purchase Order number to cover the
COST of the repair,

2. Model and serial number of the

product, and

3. Repair instructions and/or specific problems

relative to the product.

42

consult OMEGA

Where Do I Find Everything I Need for

Process Measurement and Control?

OMEGA…Of Course!

Shop online at www.omega.com

TEMPERATURE

5

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5

Wire: Thermocouple, RTD & Thermistor

5

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5

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5

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5

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5

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5

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5

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5

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M-4061/0606