Omega Products FMA6500 Installation Manual

User’s Guide

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FMA6500

Mass Flow Controller

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WARNING:These products are not designed for use in, and should not be used for, patient-connected applications.

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TABLE OF CONTENTS

1. UNPACKING THE FMA6500 SERIES MASS FLOW CONTROLLER..........

1.1 Inspect Package for External Damage..............................................

1.2 Unpack the Mass Flow Controller.......................................................

1.3 Returning Merchandise for Repair.....................................................

2. INSTALLATION....................................................................

2.1 Primary Gas Connections.................................................................

2.2 Electrical Connections......................................................................

2.3 Communication Parameters and Connections................................

3. PRINCIPLE OF OPERATION..................................................

4. SPECIFICATIONS..................................................................

4.1 FMA6500 Mass Flow Controllers.....................................................

4.2 CE Compliance................................................................................

5. OPERATING INSTRUCTIONS.....................................................

5.1 Preparation and Warm Up................................................................

5.2 Flow Signal Output Readings..............................................................

5.3 Swamping Condition...........................................................................

5.4 Set Point Reference Signal .............................................................

5.5 Valve OFF Control ..........................................................................

5.6 Valve Open/Purge ............................................................................

5.7 Analog Interface Configuration...........................................................

11
11
11
11
12
12
12
13

1
1
1
1

1
1
2
2

6

6
7
8

6. MAINTENANCE...................................................................3

6.1 Introduction........................................................................................

6.2 Flow Path Cleaning..............................................................................

6.2.1 Restrictor Flow Element (RFE).................................................

6.2.2 FMA6500 up to 10 L/min models.................................................

6.2.3 FMA6500 15 L/min and greater models.....................................

6.2.4 Valve Maintenance ...................................................................

7. CALIBRATION PROCEDURES....................................................

7.1 Flow Calibration...................................................................................

7.2 Calibration of FMA6500 Mass Flow Controllers.................................

8. TROUBLESHOOTING.............................................................

8.1 Common Conditions...........................................................................

8.2 Technical Assistance............................................................................

8.3 Troubleshooting Guide....................................................................

9. CALIBRATION CONVERSIONS FROM REFERENCE GASES................

13
13
14
14
14
14
15

15
15
16

17
17
17
18

20

APPENDIX 1 COMPONENT DIAGRAM......................................................

21

APPENDIX 2 GAS FACTOR TABLE ("K" FACTORS).....................................

APPENDIX 3 DIMENSIONAL DRAWINGS..................................................

APPENDIX 4 SENDING COMMANDS TO THE FMA6500...............................

APPENDIX 5 EEPROM TABLES: GAS DEPENDENT VARIABLES....................

GAS INDEPENDENT VARIABLES...............

APPENDIX 6 WARRANTY...........................................................................

25

29

31

37

39

42

TRADEMARKS

Omega®-is a registered trademark of OMEGA ENGINEERING, INC.

®

Buna

-is a registered trademark of DuPont Dow Elastometers.

®

-is a registered trademark of DuPont Dow Elastomers.

Kalrez

®

-is a registered trademark of DuPont.

Neoprene

1. UNPACKING THE MASS FLOW CONTROLLER

1.1 Inspect Package for External Damage

Your FMA6500 Mass Flow Controller was carefully packed in a sturdy cardboard
carton, with anti-static cushioning materials to withstand shipping shock. Upon
receipt, inspect the package for possible external damage. In case of external
damage to the package contact the shipping company immediately.

1.2 Unpack the Mass Flow Controller

Open the carton carefully from the top and inspect for any sign of concealed ship­ping damage. In addition to contacting the shipping carrier please forward a copy
of any damage report to Omega7 directly.

When unpacking the instrument please make sure that you hav e all the items indi­cated on the Packing List.Please report any shortages promptly.

1.3 Returning Merchandise for Repair

Please contact an OMEGA7 customer service representative and request a

Return Authorization Number (AR).

It is mandatory that any equipment returned for servicing be purged and neutral­ized of any dangerous contents including but not limited to toxic, bacterially infec­tious, corrosive or radioactive substances.

2. INSTALLATION

2.1 Primary Gas Connections

Please note that the FMA6500 Mass Flow Controller will not operate with liquids.
Only clean gases are allowed to be introduced into the instrument. If gases are
contaminated they must be filtered to prev ent the introduction of impediments into
the sensor.

Caution: FMA6500 transducers should not be used for monitoring



Attitude sensitivity of the Mass Flow Controller is
path of the Flow Controller must be horizontal within those stated limits. Should
there be need for a different orientation of the meter, re-calibration may be neces­sary.It is also preferable to install the FMA6500 tr ansducer in a stable environment,
free of frequent and sudden temperature changes, high moisture, and drafts.

Prior to connecting gas lines inspect all parts of the piping system including fer­rules and fittings for dust or other contaminants.

OXYGEN gas unless specifically cleaned and prepared for such
application. For more information, contact Omega7.

+

15F.This means that the gas flow

1

Be sure to observe the direction of gas flow as indicated by the arrow on the front
of the meter when connecting the gas system to be monitored.

Insert tubing into the compression fittings until the ends of the properly sized tub­ings home flush against the shoulders of the fittings. Compression fittings are to
be tightened according to the manufacturer's instructions to one and one quarter
turns. Avoid over tightening which will seriously damage the Restrictor Flow
Elements (RFE's)!

FMA6500 transducers are supplied with standard 1/4 inch (FMA6500 up to 10
L/min) or 3/8 inch (FMA6500 15 L/min and greater), or optional 1/8 inch inlet and
outlet compression fittings which should not be removed unless the meter is being
cleaned or calibrated for a new flow range.

Using a Helium Leak Detector or other equivalent method perform a thorough
leak test of the entire system.
leakage within stated limits. See specifications in this manual.)

2.2 Electrical Connections

FMA6500 transducers require a +15VDC and -15VDC power supply to operate.
Additionally, a readout panel meter, digital multimeter, or other equivalent device
is required to observe the flow signal in analog mode. A variable analog 0-5VDC
reference input is required for FMA6500 models to operate in analog mode.

FMA6500 is supplied with a 25 pin "D" connector. Pin diagram is presented in fig­ure b-2.

(All FMA6500's are checked prior to shipment for

2.3 Communication Parameters and Connections

Baud rate: 9600 baud Stop bit: 1
Data bits: 8 Parity: NON

RS-232 option: Crossover connection has to be established:

Pin 11 (TX) of the “D” connector has to be connected to RX
(pin 2 on the DB9 connector).
Pin 24 (RX) of the “D” connector has to be connected to TX
(pin 3 on the DB9 connector).
Pin 20 (Common) of the “D” connector has to be connected
to GND (pin 5 on the DB9 connector).

RS-485 option:

The RS485 converter/adapter has to be configured for: multidrop, 2 wire, half duplex
mode. The transmitter circuit has to be enabled by TD or RTS (depending on which
is available on the converter/adapter). Settings for the receiver circuit usually should
follow the selection made for the transmitter circuit in order to eliminate Echo.

Pin 11 (-) of the “D” connector has to be connected to
T- or R- on the RS-485 converter/adapter.
Pin 24 (+) of the “D” connector has to be connected to

2

T+ or R+ on the RS-485 converter/adapter.
Pin 20 (Common) of the “D” connector has to be connected
to GND on the RS-485 converter/adapter.

3

FIGURE b-1, WIRING DIAGRAM FOR FMA6500 TRANSDUCERS.

4

PIN FUNCTION

1 +15 VDC Power Supply
2 0-5 VDC Flow Signal (4-20mA Option)
3 0-5 VDC Set Point Input (4-20mA Option)
4 Force Valve Open Control
5 Force Valve Closed Control
6 (Reserved)
7 (Reserved)
8 Relay No. 1 - Common Contact
9 Relay No. 1 - Normally Open Contact
10 Relay No.2 - Nor mally Closed Contact
11 RS485 (-) (Optional RS232 TX)
12 (No Connection)
13 Chassis Ground
14 -15 VDC Power Supply
15 Common, Signal Ground For Pin 2
16 Common, Signal Ground For Pin 3
17 (Optional) RS232 Common
18 Common, Power Supply
19 Common
20 Common
21 Relay No.1 - Nor mally Closed Contact
22 Relay No.2 - Common Contact
23 Relay No.2 - Nor mally Open Contact
24 RS485 (+) (Optional RS232 RX)
25 Return for Pin 2 (Optional 4-20 mA Only)

FIGURE b-2, FMA6500 25 PIN "D" CONNECTOR CONFIGURATION

Important notes:



In general, "D" Connector numbering patterns are standardized.There are, how­ever , some connectors with nonconf orming patterns and the numbering sequence
on your mating connector may or may not coincide with the numbering sequence
shown in our pin configuration table above. It is imperative that you match the
appropriate wires in accordance with the correct sequence regardless of the par­ticular numbers displayed on your mating connector.

Make sure power is OFF when connecting or disconnecting any cab les in the system.
The (+) and (-) power inputs are each protected by a 500mA M (medium time-lag)

resettable fuse. If a shorting condition or polarity reversal occurs , the fuse will cut
power to the flow transducer circuit. Disconnect the power to the unit, remove the
faulty condition, and reconnect the power. The fuse will reset once the faulty con­dition has been removed.

Cable length may not exceed 9.5 feet (3 meters).

5

Use of the FMA6500 flow transducer in a manner other than that specified in this
manual or in writing from Omega7, may impair the protection provided by the

equipment.

3. PRINCIPLE OF OPERATION

The stream of gas entering the Mass Flow transducer is split by shunting a small
portion of the flow through a capillary stainless steel sensor tube. The remainder
of the gas flows through the primary flow conduit. The geometry of the primary
conduit and the sensor tube are designed to ensure laminar flow in each branch.
According to principles of fluid dynamics the flow rates of a gas in the two lami­nar flow conduits are proportional to one another.Therefore, the flow rates meas­ured in the sensor tube are directly proportional to the total flow through the trans­ducer.

In order to sense the flow in the sensor tube, heat flux is introduced at two sec­tions of the sensor tube by means of precision wound heater sensor coils.Heat is
transferred through the thin wall of the sensor tube to the gas flowing inside. As
gas flow takes place heat is carried by the gas stream from the upstream coil to
the downstream coil windings. The resultant temperature dependent resistance
differential is detected by the electronic control circuit.The measured gradient at
the sensor windings is linearly proportional to the instantaneous rate of flow tak­ing place.

An output signal is generated that is a function of the amount of heat carried by
the gases to indicate mass molecular based flow rates.

Additionally, FMA6500 model Mass Flow Controllers incor porate a microproces­sor and non-volatile memory that stores all calibration factors and directly controls
a proportionating solenoid valve. The digital closed loop control system of the
FMA6500 continuously compares the mass flow output with the selected flow rate.
Deviations from the set point are corrected by compensating valve adjustments,
thus maintaining the desired flow parameters with a high degree of accuracy.

4. SPECIFICATIONS

FLOW MEDIUM: Please note that FMA6500 Mass Flow Controllers

are designed to work with clean gases only. Never try
to meter or control flow rates of liquids with
any FMA6500.

CALIBRATIONS: Performed at standard conditions [14.7 psia

(1.01 bars) and 70

F

F (21.1FC)] unless otherwise

requested or stated.

ENVIRONMENTAL (PER IEC 664):

Installation Level II;Pollution Degree II.

6

4.1 FMA6500 Series Mass Flow Controllers

ACCURACY: +

F

59

F to 77FF (15FC to 25FC) and pressures of 10 to 60 psia (0.7 to 4.1 bars).

REPEATABILITY: +

TEMPERATURE COEFFICIENT: 0.1% of full scale/

1% of full scale, including linearity for gas temperatures ranging from

0.15% of full scale.

F

C.

PRESSURE COEFFICIENT: 0.01% of full scale/psi (0.07 bar).
RESPONSE TIME: FMA6500 up to 10 L/min: 300ms time constant; approximately

1 second to within +

2% of set flow rate for 25% to 100% of full

scale flow.
FMA6500 15 L/min and greater: 600ms time constant;

approximately 2 seconds to within +

2% of set flow rate for 25% to

100% of full scale flow.

GAS PRESSURE: 500 psig (34.5 bars) maximum; optimum pressure is 20 psig (1.4
bars); 25 psig (1.7 bars gauge) for FMA6500 80 L/min and greater.

DIFFERENTIAL PRESSURES REQUIRED: 5 to 50 psig (0.35 to 3.34 bars) differential
pressures. Optimum differential pressure is 25 psid (1.7 bars). See Table IV for
pressure drops associated with various models and flow rates.

MAXIMUM PRESSURE DIFFERENTIAL: 50 psid for FMA6500 up to 60 L/min, 40
psid for FMA6500 80 L/min and greater.

F

GAS AND AMBIENT TEMPERATURE: 41

F to 122FF (5FC to 50FC).

RELATIVE GAS HUMIDITY: Up to 70%.
LEAK INTEGRITY: 1 x 10

-9

sccs He maximum to the outside environment.

ATTITUDE SENSITIVITY: 1% shift for a 90 degree rotation from horizontal to verti­cal; standard calibration is in horizontal position.

OUTPUT SIGNALS: Linear 0-5 VDC (2000 Ω minimum load impedance); 4-20 mA
optional (50-500 Ω loop resistance); 20 mV peak to peak max noise.

Contact Omega7 for optional RS232 or IEEE488 interfaces.

COMMAND SIGNAL: 0-5 VDC (200K Ω input impedance); 4-20 mA optional.
TRANSDUCER INPUT POWER: FMA6500 - +15 +5% VDC, 450 mA max, 6.75 watts

max; -15 +

5% VDC, 450 mA max; 6.75 watts max;

Power inputs are each protected by a 500mA M (medium time-lag) resettable
fuse, and an inverse shunt rectifier diode for polarity protection.

7

WETTED MATERIALS: 316 stainless steel, 416 stainless steel, VITON7 O-rings;
BUNA-N7, NEOPRENE7 or KALREZ7 O-rings are optional.

Omega7 makes no expressed or implied guarantees of corrosion resistance of
mass flow meters as pertains to different flow media reacting with components of
meters. It is the customers' sole responsibility to select the model suitable for a
particular gas based on the fluid contacting (wetted) materials offered in the dif­ferent models.

INLET AND OUTLET CONNECTIONS: 1/4" (FMA6500 up to 50 L/min) or 3/8"
(FMA6500 60 L/min and greater) compression fittings standard; 1/8" or 3/8" com­pression fittings and 1/4" VCR7 fittings are optional.

TRANSDUCER INTERFACE CABLE: Flat cable with 25-pin "D" connectors on the
ends is standard.Optional shielded cable is availab le with male/female 25-pin "D"
connector ends. [Cable length may not exceed 9.5 feet (3 meters)]

4.2 CE Compliance

Any model FMA6500 bearing a CE marking on it, is in compliance with the
below stated test standards currently accepted.

EMC Compliance with 89/336/EEC as amended;
Emission Standard: EN 55011:1991, Group 1, Class A
Immunity Standard: EN 55082-1:1992

8

FLOW RANGES

TABLE I FMA6500 LOW FLOW MASS FLOW CONTROLLERS*

CODE scc/min [N2]

02

04 0 to 20

06 0 to 50

08

10 0 to 200

0 to 10 12 0 to 500

0 to 100 18

CODE

14

16

20

std liters/min [N

TABLE II FMA6500 MEDIUM FLOW MASS FLOW CONTROLLERS*

CODE standard liters/min [N2]

23 15

24 20

26 30

28 50

TABLE III FMA6500 HIGH FLOW MASS FLOW CONTROLLERS*

0 to 1

0 to 2

0 to 5

0 to 10

]

2

CODE standard liters/min [N2]

40 60

41 80

42 100

* Flow rates are stated for Nitrogen at STP conditions [i.e. 70FF (21.1FC) at 1 atm].

For other gases use the K factor as a multiplier from APPENDIX 2.

9

TABLE IV PRESSURE DROPS

FLOW RATE

[std liters/min]

up to 10 720 1.06 75

15 2630 3.87 266
20 1360 2.00 138
30 2380 3.50 241
40 3740 5.50 379
50 5440 8.00 551
60 7480 11.00 758

100 12850 18.89 1302

[mm H2O]

MAXIMUM PRESSURE DROP

[psid] [mbar]

TABLE V APPROXIMATE WEIGHTS

MODEL WEIGHT

FMA6500 up to 10 L/min transmitter 2.20 lbs (1.00 kg) 3.70 lbs (1.68 kg)

FMA6500 15 L/min and greater transmitter 2.84 lbs (1.29 kg) 4.34 lbs (1.97 kg)

SHIPPING WEIGHT

10