Omega Products FMA3103ST User Manual

STAINLESS STEEL GAS MASS
FLOWMETERS AND CONTROLLERS

For Clean Gases

All units shown
smaller than
actual size.

FMA3204ST, $975

FMA3103ST, $485

FMA3409ST, $1200

FMA3309ST, $800

FMA3100ST Series

Starts at

$

425

†

Optional

 Stainless Steel

Construction

 FMA3400ST Series Can

be Ordered to Work with
Up to 3 Gases

The FMA3100/3300ST Series will
precisely measure flow rates of
virtually any clean, dry gas as low as

0.4 to 20 SCCM or as high as 10 to
500 SLM, including hydrogen.
Repeatable results are achieved by
using a thermal mass flow sensor
design. This proven design
minimizes zero drift while
maintaining fast response and linear
outputs. Compression tube fittings
provide fast gas connections and
integrate well with existing tubing.

† Refer to footnote on page D-24 for NIST

calibration ordering information

The FMA3200/3400ST Series flow
controllers will precisely measure
and control flow rates of virtually
any clean, dry gas as low as 0.4 to
20 SCCM or as high as 0.2 to
10 SLM. The FMA3200/3400ST
Series feature an integrated 3-digit
display for flow-rate monitoring right
on the unit. Electrical connections
are made via the included
1 m (3') cable. Either a mating
cable (FMA3000C) or power
adaptor is required. See
accessories below. The units are
available with or without a display
for a wide range of applications.

SPECIFICATIONS

Accuracy/Linearity: ±1.5% FS

(10 to 100% of rated flow); ±3% FS
(20 to 100% of rated flow) for second
and third gas selection on FMA3400ST

Repeatability: ±0.25% FS
Power Requirements:

FMA3100ST: 12 to 15 Vdc @100 mA
FMA3300ST: 12 to 15 Vdc @150 mA
FMA3200ST: 12 to 15 Vdc @ 230 mA
FMA3400ST: 12 to 15 Vdc @ 250 mA

Pressure Rating: Overpressure limit is

10.2 bar (150 psig)
Operating Temperature: 0 to 55°C

(32 to 131°F), non-condensing

Storage Temperature:

0 to 70°C (32 to 158°F)

Temperature Sensitivity:

±0.15% FS or less per °C

D-23

Wetted Materials: Stainless steel (303,

304, 316) and FKM O-rings

Recommended Filtration: 10 microns
Turndown Ratio: 50:1
Compatible Gases: Most clean, dry

gases that are compatible with the
wetted materials

Outputs: Analog voltage output
0 to 5 Vdc; voltage level is proportional
to flow rate (zero Vdc at zero flow); load
connected to output should not be less
than 2500 Ω

Setpoint Input:

FMA3200ST: Analog voltage input,

0 to 5 Vdc; voltage level is proportional
to flow rate (zero Vdc at zero flow);
input load approx 2 MΩ

FMA3400ST:

User-selectable internal or external

External: Analog voltage input,
0 to 5 Vdc; voltage level is proportional

to flow rate (zero Vdc at zero flow);
input load approx 2 MΩ

Internal: Front-panel adjustable
with 2 trim pots, 1 coarse and
1 fine adjustment

Flow Connections:

Stainless steel fittings
Electrical Connections: Integrated,

1 m (3'), 6-conductor cable, terminated
with 6-pin male mini DIN connector
(PS/2 style)

Dimensions:

FMA3100ST: 47.4 L x 26.2 W x

90.2 mm H (1.87 x 1.03 x 3.55")
FMA3300ST: 47.4 L x 26.2 W x

127.0 mm H (1.87 x 1.03 x 5.0")
FMA3200ST: 80.5 L x 26.2 W x

96.5 mm H (3.17 x 1.03 x 3.80")
FMA3400ST: 80.5 L x 26.2 W x

133.6 mm H (3.17 x 1.03 x 5.26")

1

DPi8

⁄8 DIN temperature, process,

and strain meters and PID controller,
shown smaller than actual size.
See page M-37 for details,
or visit omega.com/dpi_series

MOST POPULAR MODELS HIGHLIGHTED!

To Order

Stainless Steel Mass Flowmeters
Model No. Model No. Max Flow Max Pressure Tube

(No Display) Price (Display) Price 50:1 Turndown Drop Fitting
FMA3101ST $425 FMA3301ST $650 20 SCCM 1" H2O

FMA3102ST 460 FMA3302ST 675 50 SCCM 1" H2O
FMA3103ST 485 FMA3303ST 700 100 SCCM 2" H2O
FMA3104ST 485 FMA3304ST 700 200 SCCM 2" H2O
FMA3105ST 485 FMA3305ST 700 500 SCCM 2" H2O
FMA3106ST 485 FMA3306ST 700 1 SLM 3" H2O
FMA3107ST 485 FMA3307ST 700 2 SLM 3" H2O
FMA3108ST 485 FMA3308ST 700 5 SLM 3" H2O
FMA3109ST 550 FMA3309ST 800 10 SLM 5" H2O
FMA3110ST 700 FMA3310ST 900 20 SLM 6" H2O
FMA3111ST 825 FMA3311ST 1000 50 SLM 6" H2O
FMA3112ST 900 FMA3312ST 1100 100 SLM 6" H2O
Stainless Steel Controllers

Model No. Model No. Max Flow Differential Tube
(No Display) Price (Display) Price 50:1 Turndown Pressure (psi) Fitting

FMA3202ST $900 FMA3402ST $1100 50 SCCM 15 to 40
FMA3203ST 975 FMA3403ST 1200 100

FMA3204ST 975 FMA3404ST 1200 200
FMA3205ST 975 FMA3405ST 1200 500
FMA3206ST 975 FMA3406ST 1200 1000
FMA3207ST 975 FMA3407ST 1200 2 SLM 15 to 40
FMA3208ST 975 FMA3408ST 1200 5 SLM 15 to 45
FMA3209ST 1000 FMA3409ST 1200 10 SLM 15 to 45

(Specify Model Number)

SCCM
SCCM
SCCM

SCCM

Desired

15 to 40
15 to 40
15 to 40
15 to 40

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8

D

Accessories

Flowmeters: FMA3100ST and FMA3300ST
Model No. Price Model No. Price Description

FMA3115PW $105 FMA3230PW $105 Power supply/output 0 to 5 Vdc
(115 Vac) (230 Vac)

Controllers Only: FMA3200ST and FMA3400ST
FMA3215PW $140 FMA3223PW $140 Power supply/input/output cable (0 to 5 Vdc)
Cable for All Units
FMA3000C* $30 1 m (3') cable with mating connector and stripped ends

For use with power supplies that have terminal connections.

*

†

For a NIST calibration certificate add suffix, “-NISTAIR” to model number, and $350 to price.
All units are calibrated for air at 20/0 psig unless specified
All calibrations are done at ambient temperature only (20ºC/70ºF)
Flow ranges are based on dry air or nitrogen as standard.
Other gasses available (carbon dioxide, helium, argon, hydrogen, methane, oxygen) for ranges up to 10 SLM add $150; for ranges 20 to

100 SLM add $250.
To order FMA-3400ST Series up to 3 different gasses, add $150 per gas to the price and specify FMA34**ST-1st Gas-2nd Gas-3rd Gas-in/out

pressure

Specify flow controller; Example: FMA3408ST-N2-H2-O2, 20/0, $1200 + 150 + 150 = $1500.

**

Comes complete with operator’s manual and 1 m (3') signal/power cable. Order power supply with mating connector separately.

Ordering Examples: FMA3409ST, 10 SLM mass flow controller with display, FMA3215PW, 115 Vac power supply, $1200 + 140 = $1340.
FMA3103ST-N2-NIST, 100 SCCM mass flowmeter NIST calibrated for Nitrogen and FMA3215PW, 115 Vac power supply,
$485 + 350 + 140 = $975.

Recommended Reference Book: Flow Measurement, GE-1400, $110, See Section Y for Additional Books

D-24