Omega Products FMA3102 User Manual
ECONOMICAL GAS MASS FLOW
CONTROLLERS AND METERS
For Clean Gases
FMA3100 Series
†
Optional
U For Flow Rates
Up to 10 SLM
U 0 to 5 Vdc
Linear Output
U Cost Effective
FMA3100 Series mass
flow sensors represent a
breakthrough in mass flow
sensor technology. State-ofthe-art electronics, a compact
mechanical design, and mass
production tooling concepts are
combined into one high-performance,
cost effective product. The gas flow
sensor is suitable for many OEM
applications. A 0 to 5 Vdc linear
output is standard.
Using the basic FMA3100 thermal
mass flow sensor, the FMA3200
mass flow controllers offer
accurate, stable control of gas flows
in a compact package. In power-off
mode, the flow control valve is closed
with a minimal leak rate. This
cost-effective controller is ideal for
many OEM applications, with a
0 to 5 Vdc linear output and a
0 to 5 Vdc control input.
The FMA3300s combine the features
of the FMA3100 with an adjustable
31⁄2 digit LCD digital display meter for
viewing flow rate in engineering units
(i.e., mL/min or L/min). These
compact flowmeters have proved
effective in many laboratory
applications.
GENERAL SPECIFICATIONS
Output: 0 to 5 Vdc (2500 Ω minimum)
Input Setpoint Voltage
(FMA3200 Only): 0 to 5 Vdc
Accuracy: ±1.5% FS*
Repeatability: ±0.5% FS
Response Time: 2 seconds (typical)
to within ±2% of actual flow rate from
25 to 100% of full scale
† Refer to footnote on next page for NIST
calibration ordering information.
FMA3206 mass flow
controller, shown actual size.
Operating Ambient:
10 to 50°C (50 to 122°F),
non-condensing atmosphere
Operating Pressure Range:
To 150 psi maximum at 25°C (77°F)
Temperature Coefficient:
±0.2% per °C
Pressure Coefficient: ±0.02% per psi
Leak Integrity: 1x10
He maximum to outside environments
Input Power:
FMA3100 and FMA3300:
12 to 15 Vdc, 100 mA (1.5 W)
FMA3200: 12 to 15 Vdc,
250 mA (3.75 W)
Connections:
flow ranges up to 1 L/min;
1
⁄4" compression fitting for up to 5 L/min;
3
⁄8" compression fitting for 10 L/min
Wetted Materials:
Anodized aluminum, FKM O-rings,
304 and 316 SS, epoxy, acetal
compression tube fittings standard
Turndown Ratio: 10:1
Gases: Most clean, dry gases (e.g., air,
nitrogen, carbon dioxide, argon,
hydrogen, helium, methane, oxygen)
Filtration: Requires 20-micron filter
if gas contains any particulate matter
-4
SCCS
1
⁄8" compression fittings,
SPECIFICATIONS
(FMA3200 Flow Controllers)
Differential Pressure: 15 to 40 psi
Valve Cycle Life: >1 million cycles;
valve is normally closed
Leakage Through the Valve:
0.2 SCCM or less than 2% FS,
whichever is greater
Control Range: 50:1
Remote Setpoint Voltage: 0 to 5 Vdc
Weight:
FMA3100: 199 g (0.44 lb)
FMA3300: 249 g (0.55 lb)
FMA3200: 386 g (0.85 lb)
Size Without Fittings (Approx.):
FMA3100: 47 L x 26 W x 90 mm H
(1.87 x 1.03 x 3.55")
FMA3300: 47 L x 26 W x 127 mm H
(1.87 x 1.03 x 5.0")
FMA3200: 81 L x 26 W x 97 mm H
(3.17 x 1.03 x 3.80")
* Stated accuracy under general specifications
valid for the following conditions:
1. Temperature between
18 and 25°C (64 and 77°F)
2. Warm-up time: at least 10 min
3. Power input voltage stable
(12V ±0.1V) typical
4. Linearity: Add ±0.5% for ranges
up to 500 SCCM, ±1.0% over
500 SCCM
5. Accuracy range: 10 to 100%
6. Line pressure of 1 to 30 psi for
FMA3100 and FMA3300, and at
factory-specified settings
for FMA3200
7. Factory gas (specified) is used
D-21
FMA3101
FMA3303
flow sensor
Models shown
smaller than
actual size.
flow sensor
To Order Visit omega.com/fma3100_3200_3300 for Pricing and Details
Flowmeters
Model No. Model No. Pressure Drop
Without Display With Display Flow Rates** at Max Flow
FMA3101 FMA3301 0 to 20 SCCM 1" H
FMA3102 FMA3302 0 to 50 SCCM
FMA3103 FMA3303 0 to 100 SCCM
FMA3104 FMA3304 0 to 200 SCCM 2" H
FMA3105 FMA3305 0 to 500 SCCM
FMA3106 FMA3306 0 to 1 SLM
FMA3107 FMA3307 0 to 2 SLM 3" H
FMA3108 FMA3308 0 to 5 SLM
FMA3109 FMA3309 0 to 10 SLM
Comes complete with operator’s manual, and 0.6 m (24") signal/power cable (compatible only with power supplies below).
† For optional 4-point NIST calibration certificate add suffix “-NISTAIR” to model number for additional cost.
Ordering Example: FMA3307, 0 to 2000 SCCM flowmeter with display, and FMA3115PW, power supply/output cable.
10" H
O
2
O
2
O
2
O
2
D
Specify gas, inlet/outlet pressure and
*
temperature.
Flow ranges are based on dry air or nitrogen as
**
a standard; other gases available (carbon dioxide,
helium, argon, hydrogen, methane, oxygen) for an
additional cost.
† For optional 4-point NIST calibration certificate
add suffix “-NISTAIR” to model number, for
additional cost.
Ordering Example: FMA3203-(Helium, 20/0
psig, 70°F), 0 to 100 SCCM flow controller, and
FMA3215PW, power supply/output cable.
Made To Order
Controller (Without a Display)
Model No. Flow Rates** Pressure Drop at Max Flow
FMA3202-(*) 0 to 50 SCCM
FMA3203-(*) 0 to 100 SCCM
FMA3204-(*) 0 to 500 SCCM 15 psi
FMA3205-(*) 0 to 5 SLM
FMA3206-(*) 0 to 10 SLM
Accessories
Flowmeters: FMA3100 and FMA3300 Series
Model No. Description
FMA3115PW Power supply/output cable (0 to 5 Vdc), 115 Vac
FMA3230PW Power supply/output cable (0 to 5 Vdc), 230 Vac
Controllers Only: FMA3200 Series
FMA3215PW Power supply/input/output cable (0 to 5 Vdc), 115 Vac
FMA3223PW Power supply/input/output cable (0 to 5 Vdc), 230 Vac
Cable for FMA3100/3200/3300 Series
FMA3000C 1 m (3') cable with mating connector and stripped ends for use with power supplies that have
terminal connections
D-22
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