Omega Products FMA-2601A User Manual

MASS AND VOLUMETRIC GAS FLOW CONTROLLERS
For Clean Gases
FMA-2613A
shown smaller
than actual size.
FMA-2601A shown
FMA-2600A Series
U 20+ Gas Calibrations, Including He, O2,
Neon, N Methane, Ethane, H2, Propane, Butane, iso-Butane, Ethylene, Acetylene, Krypton, Xenon, Sulfur Hexafluoride
U Pressure, Temperature, and
Volumetric and Mass Flow Simultaneously Displayed
U Easy-to-Use Pushbutton Interface U NIST Traceability Standard U Full Scale Ranges from
0.5 SCCM to 1500 SLM
U Response Time of 50 to 100 ms Typical U Turndown Ratio of 100:1 Typical U Position Insensitive U ±0.8% Reading Accuracy U RS232 Standard
The FMA-2600A Series mass and volumetric flow controllers use the principle of differential pressure within a laminar flow field to determine and control mass flow rate. A laminar flow element (LFE) inside the meter forces the gas into laminar (streamlined) flow. Inside this region, the Poiseuille equation dictates that the volumetric flow rate be linearly related to the pressure drop. A differential pressure sensor is used to measure the pressure drop along a fixed distance of the LFE. This, along with the viscosity of the gas, is used to accurately determine the volumetric flow rate. Separate absolute temperature and pressure sensors are incorporated and correct the volumetric
O, N2, Air, Argon, CO, CO2,
2
smaller than actual size.
flow rate to a set of standard conditions. This standardized flow rate is commonly called the mass flow rate and is reported in units such as standard cubic feet per minute (SCFM) or standard liters per minute (SLM).
The controller uses a true proportional valve coupled to the flow body to control flow using the integral PID loop controller. Standard units include a 0 to 5 V output (4 to 20 mA optional) and RS232 communications. The gas-select feature and the setpoints can be adjusted from the front keypad or via RS232 communications. Volumetric flow, mass flow, absolute pressure, and temperature can all be viewed or recorded through the RS232 connection. It is also possible to multi-drop up to 26 units on the same serial connection to a distance of 46 m (150').
SPECIFICATIONS
Accuracy: ±(0.8% of reading + 0.2%FS) Repeatability: ±0.2% FS Turndown Ratio: 100:1 Control Response Time: 100 ms Input Control Signal: 0 to 5 Vdc, RS232 Output Signal: 0 to 5 Vdc, RS232 Optional Input/Outputs: 4 to 20 mA, 0 to 10 Vdc Operating Temperature: -10 to 50°C (14 to 122°F) Zero Shift: 0.02%/ATM FS/°C Span Shift: 0.02%/ATM FS/°C Humidity Range: 0 to 100% RH, non-condensing Excess Flow Rate: 2.4% FS
Wetted Materials: 303 and 302 SS, FKM, silicone RTV (rubber), glass-reinforced nylon, aluminum, brass, 410 SS, silicone, glass; >250 SLM: 416 SS and nickel replace brass
Maximum Pressure
Mass Flow Controllers: 145 psig To Use in Volumetric Mode: Near atmosphere, 15 psig
recommended maximum. Volumetric flowmeters and controllers not certified for accuracy at mass flow rates above the rated flow range of the meter. They are designed for near atmospheric pressure conditions only. The recommended maximum operating pressure is 15 psig
D-29
Minimum Differential Pressure Required:
5 SLM and under: 5 psid; 10 to 250 SLM: 15 psid; 500 SLM: 5 psid; 1500 SLM: 10 psid Supply Current: 0.250 A for 20 SLM and under; 0.75 A for 50 SLM and above (typical) Supply Voltage: 12 to 30 Vdc for units 20 SLM and smaller; 24 to 30 Vdc for units 50 SLM and larger
Electrical Connections: 8-pin circular
Dimensions: mm (inch)
Flow Range Height Length Depth
0.5 to 50 SCCM 99 (3.9) 86 (3.4) 27.9 (1.1) 100 SCCM to 20 SLM 104 (4.1) 89 (3.6) 27.9 (1.1) 50 to 100 SLM 112 (4.4) 163 (6.4) 58.4 (2.3) 250 SLM 140 (5.5) 196 (7.7) 58.4 (2.3) 500 to 1500 SLM 140 (5.5) 188 (7.4) 58.4 (2.3)
Please allow approximately 44.5 mm (1.75") on top of the unit for electrical cable connection.
mini DIN
To Order Visit omega.com/fma2600_fvl2600 for Pricing and Details
Mass Flowmeter 4 to 20 mA Output
Model No. Model No. Model No. Model No. Connection Flow
FMA-2601A FMA-2601A-I FMA-2601A-I2 FMA-2601A-V2 10 - 32 thread 0.5 SCCM FMA-2602A FMA-2602A-I FMA-2602A-I2 FMA-2602A-V2 10 - 32 thread 1 SCCM FMA-2614A FMA-2614A-I FMA-2614A-I2 FMA-2614A-V2 10 - 32 thread 2 SCCM FMA-2615A FMA-2615A-I FMA-2615A-I2 FMA-2615A-V2 10 - 32 thread 5 SCCM FMA-2603A FMA-2603A-I FMA-2603A-I2 FMA-2603A-V2 10 - 32 thread 10 SCCM FMA-2616A FMA-2616A-I FMA-2616A-I2 FMA-2616A-V2 10 - 32 thread 20 SCCM FMA-2604A FMA-2604A-I FMA-2604A-I2 FMA-2604A-V2 10 - 32 thread 50 SCCM FMA-2617A FMA-2617A-I FMA-2617A-I2 FMA-2617A-V2 ¹⁄₈ FNPT 100 SCCM FMA-2618A FMA-2618A-I FMA-2618A-I2 FMA-2618A-V2 ¹⁄₈ FNPT 200 SCCM FMA-2619A FMA-2619A-I FMA-2619A-I2 FMA-2619A-V2 ¹⁄₈ FNPT 500 SCCM FMA-2620A FMA-2620A-I FMA-2620A-I2 FMA-2620A-V2 ¹⁄₈ FNPT 1 SLM FMA-2605A FMA-2605A-I FMA-2605A-I2 FMA-2605A-V2 ¹⁄₈ FNPT 2 SLM
FMA-2606A FMA-2606A-I FMA-2606A-I2 FMA-2606A-V2 ¹⁄₈ FNPT 5 SLM FMA-2607A FMA-2607A-I FMA-2607A-I2 FMA-2607A-V2 ¹⁄₈ FNPT 10 SLM FMA-2608A FMA-2608A-I FMA-2608A-I2 FMA-2608A-V2 ¹⁄₈ FNPT 20 SLM FMA-2609A FMA-2609A-I FMA-2609A-I2 FMA-2609A-V2 ¹⁄₄ FNPT 50 SLM FMA-2610A FMA-2610A-I FMA-2610A-I2 FMA-2610A-V2 ¹⁄₄ FNPT 100 SLM FMA-2611A FMA-2611A-I FMA-2611A-I2 FMA-2611A-V2 ¹⁄₂ FNPT 250 SLM FMA-2612A FMA-2612A-I FMA-2612A-I2 FMA-2612A-V2 ³⁄₄ FNPT 500 SLM FMA-2613A FMA-2613A-I FMA-2613A-I2 FMA-2613A-V2 ³⁄₄ FNPT 1000 SLM FMA-2621A FMA-2621A-I FMA-2621A-I2 FMA-2621A-V2 ³⁄₄ FNPT 1500 SLM
FMA-2622A FMA-2622A-I FMA-2622A-I2 FMA-2622A-V2 ³⁄₄ FNPT 2000 SLM FMA-2623A FMA-2623A-I FMA-2623A-I2 FMA-2623-V2 1¹⁄₄ FNPT 3000 SLM
Accessories for FMA-2600A Series
Model No. Description FMA1600-C1 Replacement 8-pin male mini DIN connector cable, single ended, 1.83 m (6') FMA1600-C1-25FT 8-pin male mini DIN connector cable, single ended, 7.62 m (25') FMA1600-C2 8-pin male mini DIN connector cable, double ended, 1.83 m (6') FMA1600-C2-25FT 8-pin male mini DIN connector cable, double ended, 7.62 m (25') FMA1600-C3 8-pin male mini DIN to DB9 female adaptor, 1.83 m (6') FMA1600-CRA 8-pin male right-angle mini DIN cable, single ended, 7.83 m (6') FMA1600-MDB Multi-drop box FMA1600-PSU Universal 100 to 240 Vac to 24 Vdc power supply adaptor
Comes complete with 24 Vdc universal power supply, 1.8m (6') cable, 8-pin male mini-DIN connector, operator’s manual, and NIST certificate Standard units are calibrated to air @ 5 psig for 0 to 1 LPM, 15 psig for 2 to 10 LPM, 30 psig for 20 to 100 LPM, and 50 psig for 200 LPM
and greater. For custom calibrations, add “-(*)” to the model number, no additional cost. * Specify gas, and inlet/outlet or backpressure for custom calibrations Calibrations done at ambient 21C (70ºF) temperature only. To replace the standard RS232 communications with RS485, add suffix “-RS485” to the model number, for additional cost. Standard input is 0 to 5 V, for optional 4 to 20 mA input add suffix “-IN” to the model number, no additional cost. Standard output is scaled to the mass flow rate. For volumetric flow rate as standard output add suffix “-VOL” to the model number, no additional
cost. For “-VOL” controllers the control loop is set to volumetric as standard. Standard output is 0 to 5 V, for optional 4 to 20 mA output, add suffix, “-I” to model number, for additional cost. For two 4 to 20 mA output, add suffix “-I2” to model number, for additional cost. For two 0 to 5 V output, add suffix “V2” to model number, for additional cost. ** Optional secondary output are scaled the same as the primary output scale. For an alternate output scale add suffix “-T” to the model number for
temperature or “-P” for pressure, no additional cost. For an integrated positive shut-off valve, add suffix “-P” to the model number, for additional cost. Models with the positive shut off valve have ¼"
welded male VCR fittings. Available on models up to 20 SLM. For units scaled in SCFH, add suffix “-SCFH” to model number. Please specify the desired range in SCFH, no additional cost. For totalizer option, add suffix “-TOT” to the model number, for additional cost. Please specify resolution. This is a 6-digit counter. Examples: For totalizing in liters with 1/100 liter resolution, the max count would be 9999.99. For totalizing in liters with
1 liter resolution, the max count would be 999999.
Two 4 to 20 mA Output
D-30
Two 0 to 5V Output Maximum
D
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