Motorola MPX5999D Datasheet
SEMICONDUCTOR TECHNICAL DATA
+' # +'
&!"( " &$ '&"+"'&
+' ,+(,+ %()+,)
'%(&*+ & $")+
"$"'& )**,) &*')
The MPX5999D piezoresistive transducer is a state–of–the–art pressure sensor
designed for a wide range of applications, but particularly for those employing a
microcontroller or microprocessor with A/D inputs. This patented, single element
X–ducer combines advanced micromachining techniques, thin–film metallization and
bipolar semiconductor processing to provide an accurate, high level analog output signal
that is proportional to applied pressure.
Figure 1 shows a block diagram of the internal circuitry integrated on the stand–alone
sensing chip.
Features
• Temperature Compensated Over 0 to 85°C
• Ideally Suited for Microprocessor or Microcontroller–Based Systems
• Patented Silicon Shear Stress Strain Gauge
• Durable Epoxy Unibody Element
V
S
3
X–ducer
SENSING
ELEMENT
THIN FILM
TEMPERATURE
COMPENSA TION
AND
GAIN STAGE #1
GAIN STAGE #2
AND
GROUND
REFERENCE
SHIFT CIRCUITRY
1
V
out
Order this document
by MPX5999D/D
X–ducer
SILICON
PRESSURE SENSORS
BASIC CHIP
CARRIER ELEMENT
CASE 867–08, STYLE 1
PIN NUMBER
1
V
out
2
Gnd
3
NOTE: Pins 4, 5, and 6 are internal
device connections. Do not connect
to external circuitry or ground. Pin 1
is noted by the notch in the Lead.
V
S
4
N/C
5
N/C
6
N/C
2
GND
PINS 4, 5 AND 6 ARE NO CONNECTS
Figure 1. Fully Integrated Pressure Sensor Schematic
MAXIMUM RATINGS
Overpressure
Burst Pressure
Storage Temperature T
Operating Temperature T
1. TC = 25°C unless otherwise noted. Maximum Ratings apply to Case 867–08 only.
2. Extended exposure at the specified limits may cause permanent damage or degradation to the device.
3. This sensor is designed for applications where P1 is always greater than, or equal to P2.
Senseon and X–ducer are trademarks of Motorola, Inc.
(Replaces MPX5999)
(2)
(1)
Parametrics Symbol Value Unit
(P1 > P2) P
(2)
(P1 > P2) P
max
burst
stg
A
4000 kPa
6000 kPa
–40° to +150 °C
–40° to +125 °C
Motorola, Inc. 1997
1Motorola Sensor Device Data
MPX5999D
OPERATING CHARACTERISTICS
Characteristic
(6)
(8)
(1)
(2)
(3)
(4)
(0 to 85°C) V
(5)
(0 to 85°C) V
(0 to 85°C) — — — ± 2.5 %V
(7)
(0 to 85°C) V
Pressure Range
Supply Voltage
Supply Current I
Zero Pressure Offset
Full Scale Output
Full Scale Span
Sensitivity V/P — 4.5 — mV/kPa
Accuracy
Response Time
Output Source Current at Full Scale Output I
Warm–Up
(VS = 5.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Symbol Min Typ Max Unit
P
OP
V
S
o
off
FSO
FSS
t
R
O+
— — 20 — Sec
0 — 1000 kPa
4.75 5.0 5.25 Vdc
— 7.0 10 mAdc
0.088 0.2 0.313 Vdc
4.587 4.7 4.813 Vdc
— 4.5 — Vdc
— 1.0 — ms
— 0.1 — mA
MECHANICAL CHARACTERISTICS
Characteristic Symbol Min Typ Max Unit
Weight, Basic Element (Case 867) — — 4.0 — Grams
Cavity Volume — — — 0.01 IN
Volumetric Displacement — — — 0.001 IN
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range.
3. Offset (V
4. Full Scale Output (V
5. Full Scale Span (V
minimum rated pressure.
6. Accuracy (error budget) consists of the following:
• Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range.
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
• Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
• TcSpan: Output deviation over the temperature range of 0° to 85°C, relative to 25°C.
• TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0° to 85°C, relative
• Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of V
7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
8. Warm–up is defined as the time required for the device to meet the specified output voltage after the pressure has been stabilized.
9. P2 max is 500 kPa.
) is defined as the output voltage at the minimum rated pressure.
off
) is defined as the output voltage at the maximum or full rated pressure.
FSO
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
FSS
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
minimum or maximum rated pressure, at 25°C.
to 25°C.
FSS
, at 25°C.
FSS
3
3
2 Motorola Sensor Device Data
Loading...